A sulfur trioxide spray absorption structure and absorption tower for the preparation of electronic-grade sulfuric acid

By employing a flow-controlled nozzle assembly in the sulfur trioxide absorption tower, the problem of uneven liquid flow rate is solved, the absorption efficiency and equipment operating efficiency are improved, and the cost is reduced.

CN120789858BActive Publication Date: 2025-11-14SUZHOU CRYSTAL CLEAR CHEMICAL CO LTD +1
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Patent Information

Application Number
CN202511241108.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-09-02
Publication Date
2025-11-14
Estimated Expiration
2045-09-02

AI Technical Summary

Technical Problem

In sulfur trioxide absorption towers, problems such as uneven liquid flow rate, differences in pipeline flow rate, nozzle aging and wear, and rust blockage lead to poor sulfur trioxide absorption, affecting absorption efficiency and equipment operating time, and increasing processing costs.

Method used

The flow control nozzle assembly includes a connecting pipe, a rotating shell, a baffle, and a stamping plate. The rotating shell is driven to rotate by the fluid impact force, which automatically adjusts the outlet area, balances the liquid flow, and ensures the uniformity of the flow of each nozzle.

Benefits of technology

It improves the absorption efficiency of sulfur trioxide, reduces equipment operating time, enhances energy utilization, and reduces equipment operating costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention discloses a sulfur trioxide spray absorption structure and absorption tower for the preparation of electronic-grade sulfuric acid in the field of industrial sulfur trioxide absorption technology. It aims to solve the problem of low actual absorption efficiency caused by uneven solution spraying within the tower in existing technologies. It includes an inlet pipe and a connecting pipe connected to the inlet pipe. Multiple spray pipes are connected to the connecting pipe, and each spray pipe has several outlet pipes. Each outlet pipe is equipped with a flow-controlled nozzle assembly. The flow-controlled nozzle assembly includes a connecting pipe, a rotating shell, and a torsion spring. The torsion spring provides a rotational torque to the rotating shell in the opposite direction to the liquid's rotation. This invention reduces the difference in liquid flow velocity at different nozzle positions, thereby improving the absorption effect of the absorption tower on sulfur trioxide by improving the balance of liquid flow. This helps to reduce equipment operating time, improve energy utilization, and reduce equipment operating costs.
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Description

Technical Field

[0001] This invention relates to a sulfur trioxide spray absorption structure and absorption tower for the preparation of electronic-grade sulfuric acid, belonging to the field of industrial sulfur trioxide absorption technology. Background Technology

[0002] In the industrial production of electronic-grade sulfuric acid, sulfur dioxide is generated by burning sulfur or pyrite, and then sulfur trioxide is generated by catalysis in an oxygen environment. Sulfur trioxide reacts with water to form sulfuric acid. In order to achieve the absorption of only sulfur trioxide in the mixed gas of sulfur dioxide and sulfur trioxide, nicotinic acid or concentrated sulfuric acid is used in industry to absorb sulfur trioxide in the air. The unabsorbed sulfur dioxide and other gases such as oxygen are returned to the catalytic furnace for further catalysis or other process treatments.

[0003] In sulfur trioxide absorption towers, the spray nozzles need to be evenly distributed within the tower to ensure effective absorption of sulfur trioxide. However, in the spray pipes of sulfur trioxide absorption towers, uneven liquid flow rate, differences in pipe flow, nozzle aging and wear, and rust blockage can lead to uneven liquid spray flow rate within the pipes. When this occurs, the absorption effect of sulfur trioxide will be poor, affecting the absorption efficiency of sulfur trioxide, resulting in longer equipment cycle times and operating time, impacting energy efficiency and leading to increased processing costs. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid. This structure reduces the difference in liquid flow rate at different nozzle positions, improves the absorption effect of the absorption tower on sulfur trioxide by improving the balance of liquid flow, and helps to reduce equipment operating time, improve energy utilization, and reduce equipment operating costs.

[0005] To achieve the above objectives, the present invention employs the following technical solution:

[0006] On one hand, the present invention provides a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid, comprising an inlet pipe and a connecting pipe connected to the inlet pipe, wherein a plurality of spray pipes are connected to the connecting pipe, each spray pipe is provided with a plurality of outlet pipes, and each outlet pipe is equipped with a flow-controlled nozzle assembly, the flow-controlled nozzle assembly comprising:

[0007] A connecting pipe is installed at the outlet end of the outlet pipe. The connecting pipe has a bent fluid passage inside, which is used to change the spraying direction of concentrated sulfuric acid or nicotinic acid passing through the pipe from vertical to horizontal.

[0008] A rotating shell with a rotating seal is disposed on the surface of a connecting pipe. The outlet of the connecting pipe is located within the shell space inside the rotating shell. A baffle and a stamping plate are fixedly installed inside the rotating shell. The stamping plate is disposed at the spray position of the outlet of the connecting pipe, and the extension direction of the stamping plate is set at an acute angle to the spray direction of the liquid. When the liquid is sprayed out of the connecting pipe, it can cause the liquid to impact the stamping plate, thereby providing rotational force for the rotating shell. The baffle can block the outlet of the connecting pipe by rotating and change the cross-sectional area of ​​the outlet. A connector is disposed at the bottom of the rotating shell, and a nozzle is installed on the connector.

[0009] A torsion spring is provided between the connecting pipe and the rotating shell. The torsion spring is used to provide a rotational torque to the rotating shell in the opposite direction of the liquid driving the rotating shell to rotate.

[0010] Specifically, a connecting plate is rotatably disposed above the connecting pipe, the connecting plate is provided with a first positioning structure, the rotating shell is provided with a second positioning structure, the two ends of the torsion spring are respectively positioned on the first positioning structure and the second positioning structure, and the connecting plate is also provided with an angle positioning mechanism for fixing the connecting plate.

[0011] Specifically, the connecting pipe has multiple positioning ports evenly distributed around its outer periphery, the connecting plate has pins that can be inserted into the positioning ports, and the connecting pipe also has an indicator scale groove for indicating the rotation angle of the connecting plate.

[0012] Specifically, the connecting pipe is circular in shape, and the multiple spray pipes are parallel to each other and have equal spacing between adjacent chords.

[0013] Specifically, the connecting pipe is cylindrical in shape, the fluid passage is an inverted "T" shaped structure, and the baffles and stamping plates inside the rotating shell are designed in two sets with circumferential symmetry.

[0014] Specifically, the connecting pipe is provided with an annular groove, and the rotating shell is rotatably fitted at the position of the annular groove. The rotating shell is composed of two splicing bodies with the same structure. Each set of baffles and stamping plates is respectively set on different splicing bodies. The surface of the annular groove is provided with an oil groove, and the oil groove is filled with lubricating oil.

[0015] Specifically, each of the outlet pipes is equipped with an ultrasonic flow sensor. The ultrasonic flow sensor includes an ultrasonic transmitter and a corresponding receiver. The transmitter and receiver are protected by a protective cover to prevent the sulfuric acid environment from corroding the transmitter and receiver.

[0016] Specifically, the transmitting device and the receiving device are respectively located on both sides of the liquid outlet pipe, and the signal transmitting surface and the signal receiving surface are both located on the outer surface of the liquid outlet pipe. The transmitting device and the receiving device are locked and held tightly to the outer surface of the liquid outlet pipe by bolts.

[0017] Specifically, the outer surface of the protective cover and the outer surface of the cable are provided with an anti-corrosion coating material, which is one or a combination of microcrystalline wax-based penetrating corrosion inhibitor coating, fluoroelastomer copolymer heavy-duty anti-corrosion coating system, nanocomposite ceramic-metal polymer coating, polytetrafluoroethylene-graphene reinforced inert coating, and solvent-free organic-inorganic hybrid ceramic coating.

[0018] On the other hand, the present invention provides a sulfur trioxide absorption tower, comprising a tower body, a circulating pump, and the sulfur trioxide spray absorption structure described in any one of the above.

[0019] Compared with the prior art, the beneficial effects achieved by the present invention are as follows:

[0020] This invention employs a special design at the nozzle's spray structure, enabling the nozzle to first convert the vertically moving fluid into a horizontally moving fluid when spraying sulfur trioxide absorbent liquid. A special design of the rotating shell allows the internal pressure plate to be deflected by the fluid flow, causing the entire shell to rotate. This rotation of the shell drives a baffle plate to rotate, thus sealing the outlet of the connecting pipe. In other words, when the flow velocity is high, resulting in significant pressure on the pressure plate, the flow rate can be adjusted by changing the size of the outlet, thereby preventing excessive flow. When applied to a spray system for sulfur trioxide absorption, this invention can balance the flow rate among the various nozzles, preventing excessive flow in some areas from causing insufficient flow in others and reducing the sulfur trioxide absorption efficiency. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the flow self-control nozzle assembly provided in an embodiment of the present invention;

[0022] Figure 2 This is another schematic diagram of the flow self-control nozzle assembly provided in an embodiment of the present invention;

[0023] Figure 3 This is a front view of the flow self-control nozzle assembly provided in an embodiment of the present invention;

[0024] Figure 4 This is the present invention. Figure 3 A cross-sectional view of the flow self-control nozzle assembly provided in the embodiment;

[0025] Figure 5 This is the present invention. Figure 3A cross-sectional view of the flow self-control nozzle assembly in the BB direction provided in the embodiment;

[0026] Figure 6 This is an overall schematic diagram of the spray absorption structure provided in an embodiment of the present invention;

[0027] Figure 7 This is a cross-sectional schematic diagram of the spray absorption structure provided in an embodiment of the present invention;

[0028] Figure 8 This is an exploded structural diagram of the flow self-control nozzle assembly provided in an embodiment of the present invention;

[0029] Reference numerals in the attached drawings: 1. Connecting pipe; 2. Rotating shell; 3. Baffle; 4. Stamping plate; 5. Connecting head; 6. Torsion spring; 7. Connecting disc; 8. First positioning structure; 9. Second positioning structure; 10. Indicating scale groove; 11. Pin; 12. Oil tank; 13. Nozzle; 14. Inlet pipe; 15. Connecting pipe; 16. Spray pipe; 17. Outlet pipe; 18. Ultrasonic flow sensor; 19. Protective cover. Detailed Implementation

[0030] The present invention will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and should not be used to limit the scope of protection of the present invention.

[0031] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0032] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances. Example 1

[0033] This invention provides a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid. This structure reduces the difference in liquid flow velocity at different nozzle positions, improving the absorption effect of the absorption tower on sulfur trioxide by balancing the liquid flow rate. This helps reduce equipment operating time, increase energy utilization, and reduce equipment operating costs. To achieve the structural function, the structure includes an inlet pipe 14 and a connecting pipe 15 connected to the inlet pipe 14. The inlet pipe 14 is connected to a circulation pump in the spray system, supplying nicotinic acid or concentrated sulfuric acid for absorbing sulfur trioxide to the main pipeline. The connecting pipe 15 serves as the main connecting path inside the absorption tower. To ensure uniform distribution of the liquid flow within the absorption tower and spray the appropriate absorption solution onto the tower environment, multiple spray pipes 16 are connected to the connecting pipe 15, and each spray pipe 16 has several outlet pipes 17. Simultaneously, a flow-controlled nozzle assembly is installed on each outlet pipe 17. This assembly enables uniform spraying of the absorption solution within the absorption tower environment. Due to the unique characteristics of the tower environment, an active control method would require a corresponding control structure on each outlet pipe 17 to actively regulate the flow. This approach is not only structurally complex and involves complex control procedures and a large structural volume, but also difficult to maintain within the equipment. Therefore, this embodiment provides a passive adjustment method to automatically limit the flow rate, preventing excessively high or low flow velocities in different outlet pipes 17, which could lead to low local absorption efficiency. By improving the uniformity of the spray positions from multiple nozzles, absorption efficiency is ensured, saving equipment operating time. To achieve passive automatic flow control, the flow-controlled nozzle assembly includes: a connecting pipe 1, installed at the outlet end of the outlet pipe 17, such as... Figure 4 As shown, a bent fluid passage is provided inside the connecting pipe 1 to change the direction of concentrated sulfuric acid or nicotinic acid flowing through the pipe from vertical to horizontal spraying. Simultaneously, a rotating shell 2 is provided, which is rotated and sealed onto the surface of the connecting pipe 1, such as using an oil film seal. Since the specific implementation is not unique and is not the main content protected by this application, it will not be elaborated further here. The outlet of the connecting pipe 1 is located within the shell space inside the rotating shell 2. Figure 4As shown, the absorbent solution sprayed laterally at this time directly impacts the interior of the rotating shell 2, and as... Figure 5 as well as Figure 8 As shown, an additional baffle 3 and a stamping plate 4 are provided inside the rotating shell 2. The stamping plate 4 is designed to be a plate with a certain slope, and the baffle 3 is set as an arc-shaped plate, such as... Figure 8 As shown, the stamping plate 4 and the baffle 3 are both fixedly installed inside the rotating shell 2. In this embodiment, the stamping plate 4 and the baffle 3 are installed at the bottom of the inner cavity of the rotating shell 2, with a certain distance between them. The stamping plate 4 near the center of the rotating shell 2 is rotatably engaged with the outer wall surface of the bottom spray position of the connecting pipe 1 (with a very small gap, not in contact or connected to the wall surface of the connecting pipe 1). The inner arc surface of the baffle 3 can also be rotatably engaged with the outer wall surface of the bottom liquid outlet position of the connecting pipe 1. The stamping plate 4 is installed at the spray position of the liquid outlet of the connecting pipe 1, and the extension direction of the stamping plate 4 is set at an acute angle to the liquid spray direction. When the stamping plate 4 is in the base position, it can block the front end of the liquid outlet, so that when the connecting pipe 1 sprays liquid, the liquid can impact the inclined surface of the stamping plate 4, thereby providing rotational force for the rotating shell 2. The baffle 3 can block the outlet of the connecting pipe 1 and change the cross-sectional area of ​​the outlet during the rotation of the rotating shell 2. It should be noted that the stamping plate 4 and the baffle 3 should be able to cover the outlet hole at the bottom of the connecting pipe 1 in the height direction to ensure that the stamping plate 4 can obtain a greater impact force and the baffle 3 can block the outlet hole. That is, the higher the flow velocity, the greater the impact force provided by the fluid to the stamping plate 4. The greater the impact force, the greater the torque of the rotating shell 2 which is fixed relative to the stamping plate 4. The greater the rotation torque, the greater the rotation amplitude of the rotating shell 2. The greater the blocking amplitude of the baffle 3 which is fixed relative to the rotating shell 2, the greater the blocking amplitude of the outlet position. Thus, by providing flow resistance, the continuous increase of the flow velocity is limited, thereby suppressing the maximum flow velocity. In order to allow the liquid to spray out normally, a connector 5 is set below the rotating shell 2, and as shown in the figure... Figure 1 As shown, a nozzle 13 is installed on the connector 5, and the liquid is sprayed out through the nozzle 13. In order for the liquid to flow normally into the connector 5, the connecting pipe 1 itself should not block the liquid inlet of the connector 5, that is, the bottom surface of the connecting pipe 1 should be as shown. Figure 4The position shown is higher than the bottom surface of the inner cavity of the rotating shell 2; in order to prevent the excessive impact force of the liquid when it is first introduced from causing the baffle 3 to directly block the outlet position, a torsion spring 6 is installed between the connecting pipe 1 and the rotating shell 2. The torsion spring 6 is used to provide the rotating shell 2 with a rotational torque in the opposite direction of the liquid drive rotation, in order to balance the torque of the liquid impact, and ensure that there is always a corresponding and appropriate liquid flow rate in the rotating shell 2 to supply the nozzle 13, so as to avoid the baffle 3 moving directly to the position of blocking the outlet position and causing no flow. When the structure is working, the torque provided by the torsion spring 6 keeps the baffle 3 and the stamping plate 4 in their initial positions. When liquid passes through, it provides corresponding torque to overcome the force of the torsion spring 6 and rotate. The inner side of the baffle 3 and the outer side of the connecting pipe 1 are matched with a circular arc, so that after the rotating shell 2 rotates, it can achieve local sealing of the liquid outlet, thereby providing flow resistance and changing the liquid flow rate. When the liquid inlet volume of the inlet pipe 14 remains constant per unit time, the portion of the flow rate that is restricted at the flow control nozzle assembly at the larger flow rate is used to compensate the flow control nozzle assembly at other smaller flow rates. Finally, after the flow rate of each liquid outlet pipe 17 stabilizes, the torque provided by the stamping plate 4 and the torque provided by the torsion spring 6 are balanced, thereby improving the ability of the liquid to be evenly distributed in different pipelines, thus prompting each nozzle 13 to reduce the flow difference and improve the uniform spraying effect.

[0034] It should be noted that before spray adsorption, the liquid inlet rate per unit time of the inlet pipe 14 can be set according to the number of flow-controlled nozzle assemblies and specific spraying requirements. Then, the flow rate of each flow-controlled nozzle assembly is adaptively adjusted by the torsion spring 6, the stamping plate 4, and the baffle 3 until the flow rates of all flow-controlled nozzle assemblies tend to be balanced. When it is necessary to adjust the liquid flow rate within the flow-controlled nozzle assembly, this can be achieved by selecting torsion springs 6 with different torque values. Generally, when a higher flow rate is required, a higher torque value is selected for the torsion spring 6.

[0035] In this embodiment, the angle between the inclination direction of the stamping plate 4 and the liquid outlet direction of the connecting pipe 1 can be set to vary according to the rotation amplitude, such as... Figure 5 The arrangement is as shown, with the inner side of the stamping plate 4 featuring a curved arc. When the torsion spring 6 drives the stamping plate 4 to its initial position, the angle between the axis of the pipe where the liquid outlet is located and the tangential edge of the inner wall of the stamping plate 4 intersects is between 45° and 55°. As the rotating shell 2 rotates, this angle gradually changes, and the provided rotational torque also gradually changes. That is, by reducing the rotational torque, after the rotating shell 2 has rotated a certain distance, a sustained high torque is avoided, preventing the baffle 3 from completely blocking the liquid outlet of the connecting pipe 1. The specifications of the torsion spring 6 can be selected according to the actual needs of the product and the flow rate.

[0036] This invention provides a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid. To facilitate the positioning, connection, and fixation of the torsion spring 6, a connecting disc 7 can be rotatably positioned above the connecting pipe 1. Figure 2 As shown, a first positioning structure 8 is provided on the connecting plate 7, and a second positioning structure 9 is provided above the rotating shell 2. The two ends of the torsion spring 6 are respectively positioned on the first positioning structure 8 and the second positioning structure 9, thereby achieving positioning of the two ends of the torsion spring 6. The torsion spring 6 itself can be sleeved on the connecting pipe 1 to save installation space and provide reverse torque in a concentric state. The positioning structure at this time can be as follows: Figure 2 As shown, the device consists of two clamping plates. The protruding structure at the edge of the torsion spring 6 is placed within these clamping plates, and the torsion spring 6 is fixed using a winding or locking positioning method, thus providing stable torque. To adjust the initial torque of the torsion spring 6 at various pipe positions during the preparation stage, thereby changing the flow control during actual operation and making the result more uniform in flow control, an angle positioning mechanism for fixing the connecting plate 7 is also provided on the connecting plate 7. After adjusting the torque of the torsion spring 6 by rotating the connecting plate 7, the connecting plate 7 is fixed, allowing the torsion spring 6 to provide different torques at its initial position. Considering that the initial position of the rotating shell 2 may change after the torsion spring 6 is adjusted, a corresponding abutment structure (not shown in the figure) can be set at the mating position of the connecting pipe 1 and the rotating shell 2 to ensure that the baffle 3 is in its initial position so that the liquid is in a maximum flow state. The fixing method of the connecting plate 7 is not further limited here.

[0037] This invention provides a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid, specifically an adjustment structure for positioning the angle of the connecting plate 7. Specifically, multiple positioning ports are evenly distributed around the outer periphery of the connecting pipe 1, and pins 11 that can be inserted into the positioning ports are provided on the connecting plate 7. Positioning of the connecting plate 7 at different angular positions is achieved through the insertion of the pins 11. To facilitate observation of the actual position of the connecting plate 7, an indicator scale groove 10 for indicating the rotation angle of the connecting plate 7 can be provided on the connecting pipe 1. Corresponding scale marks can also be provided on the indicator scale groove 10 to indicate the range of basic torque provided by the current torsion spring 6, thus facilitating manual adjustment.

[0038] This invention provides a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid. Considering that traditional spraying pipelines typically consist of a main pipeline connecting multiple branch pipelines, this method is prone to uneven liquid flow due to varying resistance at more distant branch locations. Furthermore, if a blockage occurs at any point in the pipeline, the liquid ejection from subsequent nozzles will be affected. To optimize this, the following structure can be implemented... Figure 6As shown, the connecting pipe 15 is generally circular, and multiple spray pipes 16 are parallel to each other and have equal spacing between adjacent chords. The circular connecting pipe 15 can adapt to the shape of the absorption tower and provide bilateral support for the multiple spray pipes 16. In addition, when there is a blockage in part of the spray pipe 16, the liquid can enter from the bypass to bypass the blockage, ensuring that each nozzle 13 sprays the absorption solution normally.

[0039] This invention provides a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid. To improve the uniformity of force distribution on the rotating shell 2 and prevent excessive localized force that could cause it to tilt and increase rotational resistance, the connecting pipe 1 is cylindrical in shape. Figure 4 As shown, the fluid passage is set in an inverted "T" shape, and two sets of baffles 3 and stamping plates 4 are symmetrically designed within the rotating shell 2. By distributing force evenly on both sides, the increased rotational resistance is avoided from affecting the rotational force of the rotating shell 2 under liquid pressure.

[0040] This invention provides a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid, specifically offering an assembly method for the rotating shell 2. Specifically, an annular groove is provided on the connecting pipe 1, and as shown... Figure 4 As shown, the rotating shell 2 is rotatably fitted at the position of the annular groove. The rotating shell 2 is composed of two identical splicing bodies, which facilitates manual assembly and installation. The machining assembly gap should be controlled to be less than or equal to 0.01mm. Each set of baffles 3 and stamping plates 4 can be set on different splicing bodies to avoid assembly errors. In order to provide corresponding rotational lubrication, an oil groove 12 is provided on the surface of the annular groove. The oil groove 12 is filled with lubricating oil. The lubricating oil can preferably be supplied externally for circulation. Since the oil supply method is not unique, it will not be restricted in detail here.

[0041] This invention provides a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid. To facilitate adjustment of the torsion spring 6 based on the actual outflow rate, or to facilitate observation of dynamic changes in the internal flow rate, an ultrasonic flow sensor 18 is installed on each outlet pipe 17. Specifically, the ultrasonic flow sensor 18 includes an ultrasonic transmitter and a corresponding receiver. To prevent corrosion of the ultrasonic flow sensor 18 by the acidic environment inside the absorption tower, a protective cover 19 is provided on the outside of the transmitter and receiver. The protective cover 19 can be shared or configured separately. The protective cover 19 is used to prevent corrosion of the transmitter and receiver by the sulfuric acid environment. The ultrasonic flow sensor 18 is preferably installed non-contactly. Compared to a contact sensor, although some detection accuracy is lost, it is more convenient for installation and removal on the outlet pipe 17, making it suitable for installation and protection in the absorption tower environment, while also preventing corrosion of the sensor itself by the liquid in the internal passage. To simplify the installation of the ultrasonic flow sensor 18, the transmitting and receiving devices can be respectively positioned on both sides of the outlet pipe 17, with both the signal transmitting and receiving surfaces located on the outer surface of the outlet pipe 17. This simplified installation and easy disassembly can be achieved by bolting the transmitting and receiving devices firmly to the outer surface of the outlet pipe 17. With this configuration, the sensor can be tested during initial commissioning. After detecting changes in flow rate, the position of the torsion spring 6 can be continuously adjusted to balance the flow rate at different locations, improving the uniformity of spraying inside the absorption tower.

[0042] This invention provides a sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid. Considering the corrosive environment inside the absorption tower, anti-corrosion coatings can be applied to the outer surface of the protective cover 19, the outer surface of cables, and other easily corroded materials. Specifically, the anti-corrosion coating material can be one or a combination of one or more of the following: a microcrystalline wax-based penetrating corrosion inhibitor coating, a fluoroelastomer copolymer heavy-duty anti-corrosion coating system, a nanocomposite ceramic-metal polymer coating, a polytetrafluoroethylene-graphene reinforced inert coating, and a solvent-free organic-inorganic hybrid ceramic coating. The torsion spring 6 can be sealed with a protective cover or made of Hastelloy or tantalum material to prevent oxidation and corrosion. Example 2

[0043] The present invention provides a sulfur trioxide absorption tower, including a tower body, a circulating pump, and the sulfur trioxide spray absorption structure in Embodiment 1. By adopting the spray absorption structure in Embodiment 1, the absorption tower can achieve a better uniform spraying effect, improve the absorption efficiency of the tower body for sulfur trioxide, shorten the equipment operating time, and reduce the equipment operating cost.

[0044] During actual commissioning, the flow rate of the absorption tower is first monitored by pre-spraying the solution. Based on the monitoring results, the effect of the torsion spring 6 or other structures is adjusted. The flow rate induction factors are adjusted according to the actual results to make it suitable for application in various complex spraying environments to achieve uniform spraying. This effectively reduces the impact of pipeline resistance and blockage on the actual spray flow rate.

[0045] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid, characterized in that, It includes an inlet pipe (14) and a connecting pipe (15) connected to the inlet pipe (14). Multiple spray pipes (16) are connected to the connecting pipe (15), and each spray pipe (16) has several outlet pipes (17). Each outlet pipe (17) is equipped with a flow-controlled nozzle assembly, which includes: A connecting pipe (1) is installed at the outlet end of the outlet pipe (17). The connecting pipe (1) has a bent fluid passage inside. The fluid passage is used to change the spraying of concentrated sulfuric acid or nicotinic acid passing through the pipe from a vertical direction to a horizontal direction. A rotating shell (2) is provided with a rotating seal on the surface of a connecting pipe (1). The outlet of the connecting pipe (1) is located in the shell space inside the rotating shell (2). A baffle (3) and a stamping plate (4) are fixedly installed inside the rotating shell (2). The stamping plate (4) is located at the spray position of the outlet of the connecting pipe (1), and the extension direction of the stamping plate (4) is set at an acute angle to the spray direction of the liquid. When the connecting pipe (1) sprays out liquid, it can cause the liquid to impact the stamping plate (4), thereby providing rotational force for the rotating shell (2). The baffle (3) can block the outlet of the connecting pipe (1) by rotation and change the cross-sectional area of ​​the outlet. A connector (5) is set at the bottom of the rotating shell (2), and a nozzle (13) is installed on the connector (5). A torsion spring (6) is provided between the connecting pipe (1) and the rotating shell (2). The torsion spring (6) is used to provide the rotating shell (2) with a rotational torque that drives the rotating shell (2) to rotate in the opposite direction.

2. The sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid according to claim 1, characterized in that, A connecting plate (7) is rotatably disposed above the connecting pipe (1). A first positioning structure (8) is provided on the connecting plate (7). A second positioning structure (9) is provided above the rotating shell (2). The two ends of the torsion spring (6) are respectively positioned on the first positioning structure (8) and the second positioning structure (9). An angle positioning mechanism for fixing the connecting plate (7) is also provided on the connecting plate (7).

3. The sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid according to claim 2, characterized in that, The connecting pipe (1) is provided with a plurality of positioning ports evenly distributed on the outer periphery of the connecting pipe (1), the connecting plate (7) is provided with a pin (11) that can be inserted into the positioning port, and the connecting pipe (1) is also provided with an indicator scale groove (10) for indicating the rotation angle of the connecting plate (7).

4. The sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid according to claim 1, characterized in that, The connecting pipe (15) is generally circular, and the multiple spray pipes (16) are parallel to each other and have equal spacing between adjacent chords.

5. The sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid according to claim 1, characterized in that, The connecting pipe (1) is cylindrical in shape, the fluid passage is an inverted "T" shaped structure, and the baffle (3) and the stamping plate (4) inside the rotating shell (2) are designed in two sets with circumferential symmetry.

6. The sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid according to claim 5, characterized in that, The connecting pipe (1) is provided with an annular groove. The rotating shell (2) is rotatably fitted at the position of the annular groove. The rotating shell (2) is composed of two splicing bodies with the same structure. Each set of baffles (3) and stamping plates (4) are respectively set on different splicing bodies. The surface of the annular groove is provided with an oil groove (12), and the oil groove (12) is filled with lubricating oil.

7. The sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid according to claim 1, characterized in that, Each of the outlet pipes (17) is equipped with an ultrasonic flow sensor (18). The ultrasonic flow sensor (18) includes an ultrasonic transmitter and a receiver corresponding to the transmitter. A protective cover (19) is provided on the outside of the transmitter and receiver. The protective cover (19) is used to prevent the sulfuric acid environment from corroding the transmitter and receiver.

8. The sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid according to claim 7, characterized in that, The transmitting device and the receiving device are respectively located on both sides of the liquid outlet pipe (17), and the signal transmitting surface and the signal receiving surface are both located on the outer surface of the liquid outlet pipe (17). The transmitting device and the receiving device are locked and held tightly to the outer surface of the liquid outlet pipe (17) by bolts.

9. The sulfur trioxide spray absorption structure for the preparation of electronic-grade sulfuric acid according to claim 8, characterized in that, The outer surface of the protective cover (19) and the outer surface of the cable are provided with an anti-corrosion coating material. The anti-corrosion coating material is one or a combination of one or more of the following: microcrystalline wax-based penetrating corrosion inhibitor coating, fluoroelastomer copolymer heavy-duty anti-corrosion coating system, nanocomposite ceramic-metal polymer coating, polytetrafluoroethylene-graphene reinforced inert coating, and solvent-free organic-inorganic hybrid ceramic coating.

10. A sulfur trioxide absorption tower for the preparation of electronic-grade sulfuric acid, characterized in that, It includes a tower body, a circulating pump, and the sulfur trioxide spray absorption structure as described in any one of claims 1-9.

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