The invention relates to the technical field of electronic-grade
sulfuric acid, and discloses a method for preparing electronic-grade
sulfuric acid. Industrial-grade liquid
sulfur trioxide is subjected to gasification, demisting, dehumidification and purification to prepare ultra-pure
sulfur trioxide; absorbing
sulfur trioxide by using electronic-grade
sulfuric acid to prepare an electronic-grade sulfuric acid crude product; the electronic-grade sulfuric acid crude product is subjected to degassing,
hydrogen type macroporous cation resin modification and continuous multi-group high-efficiency membrane combined
filtration to obtain electronic-grade sulfuric acid; according to the modified
hydrogen type macroporous cationic resin disclosed by the invention, the surface characteristics of the resin are changed through
acylation reaction, so that the modified
hydrogen type macroporous cationic resin shows better selectivity and affinity in the subsequent
metal ion adsorption process; the introduced multi-sulfydryl functional group provides more adsorption sites for the resin, and the sites and
metal ions can form a stable complex, so that the
metal ions in a solution are effectively adsorbed and removed, and metal
ion impurities in electronic-grade sulfuric acid are further reduced; the purity of the prepared electronic-grade sulfuric acid is 99.9999999%, the content of metal ions is only 5 ppt, and the electronic-grade sulfuric acid can meet the quality requirement of
semiconductor-grade G5 of an ultra-large
integrated circuit.