Glass composition

Abstract

The present application provides a glass composition with high light transmittance. The glass composition contains, in terms of weight percentage, SiO2: 46-57.5%; B2O3: 2-10%; Al2O3: 14-26%; ZnO: 1-8%; CaO: 1-8%; MgO: 4.5-14.5%, wherein SiO2 / MgO is 3.5-10.0. Through reasonable component design, the glass composition obtained by the present application has high light transmittance.

Description

Technical Field

[0001] This invention relates to a glass composition, and more particularly to a glass composition with high light transmittance. Background Technology

[0002] Currently, the materials commonly used for chip packaging carriers include monocrystalline silicon wafers, metals, and ceramics. Monocrystalline silicon wafers have the advantage of a thermal expansion coefficient comparable to that of the monocrystalline silicon substrate being packaged, resulting in high mechanical strength and improved packaging yield, making them widely used. However, their fatal flaw lies in the temporary bonding between monocrystalline silicon wafers, which, while strong, makes peeling after packaging extremely difficult. While metals also possess high strength, bonding them to monocrystalline silicon substrates requires high-temperature temporary bonding, which can easily damage the circuit layers on the silicon wafer surface. Ceramic materials, although also possessing high strength, also require high-temperature bonding. Glass has significant advantages over other materials (such as metals, crystals, and ceramics) in terms of light transmittance, chemical properties, mechanical properties, electrical properties, and manufacturing costs, and therefore has gradually been applied in semiconductor packaging and semiconductor manufacturing processes in recent years.

[0003] When glass is used in semiconductor packaging, ultraviolet (UV) laser lift-off technology is commonly employed. Compared to traditional lift-off techniques, UV laser lift-off offers advantages such as high yield and low cost. However, it requires the carrier glass to possess high transmittance in the UV band. Higher UV transmittance results in higher debonding efficiency during packaging and a lower risk of wafer warpage. Furthermore, high visible light transmittance allows for more efficient and precise optical inspection during the packaging process. Summary of the Invention

[0004] For the reasons mentioned above, the technical problem to be solved by the present invention is to provide a glass composition with high light transmittance.

[0005] The technical solution adopted by this invention to solve the technical problem is:

[0006] (1) A glass composition, the components of which are expressed in weight percentage as follows: SiO2: 46-57.5%; B2O3: 2-10%; Al2O3: 14-26%; ZnO: 1-8%; CaO: 1-8%; MgO: 4.5-14.5%, wherein the ratio of SiO2 to MgO is 3.5-10.0.

[0007] (2) The glass composition according to (1), wherein the components are expressed in weight percentage, further contain: ZrO2: 0-3%; and / or TiO2: 0-3%; and / or BaO: 0-5%; and / or SrO: 0-5%; and / or Ln2O3: 0-5%; and / or Nb2O5: 0-3%; and / or WO3: 0-3%; and / or Ta2O5: 0-3%; and / or GeO2: 0-3%; and / or Rn2O: 0-3%; and / or clarifying agent: 0-2%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifying agent is one or more of Sb2O3, SnO2, and CeO2.

[0008] (3) A glass composition containing SiO2, B2O3, Al2O3, ZnO, CaO, and MgO, wherein the components are expressed as weight percentages, and the SiO2 / MgO ratio is 3.5 to 10.0. The light transmittance T of the glass composition at 550 nm is... 550nm The light transmittance at 355nm is above 88.0%. 355nm It is above 85.0%.

[0009] (4) The glass composition according to (3) comprises, by weight percentage: SiO2: 46-57.5%; and / or B2O3: 2-10%; and / or Al2O3: 14-26%; and / or ZnO: 1-8%; and / or CaO: 1-8%; and / or MgO: 4.5-14.5%; and / or ZrO2: 0-3%; and / or TiO2: 0-3%; and / or BaO: 0-5%; and / or SrO: 0-5%; and / or Ln Ln2O3: 0-5%; and / or Nb2O5: 0-3%; and / or WO3: 0-3%; and / or Ta2O5: 0-3%; and / or GeO2: 0-3%; and / or Rn2O: 0-3%; and / or clarifying agent: 0-2%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifying agent is one or more of Sb2O3, SnO2, and CeO2.

[0010] (5) The glass composition according to any one of (1) to (4) wherein the components, expressed as weight percentages, satisfy one or more of the following seven conditions:

[0011] 1) The Al2O3 / SiO2 ratio is 0.28 to 0.52, preferably 0.32 to 0.50, and more preferably 0.35 to 0.45;

[0012] 2) The ratio of (MgO+ZnO) / Al2O3 is 0.25 to 1.4, preferably 0.30 to 1.2, more preferably 0.40 to 1.0, and even more preferably 0.50 to 0.90.

[0013] 3) The MgO / ZnO ratio is 0.8 to 8.0, preferably 1.0 to 6.0, more preferably 1.2 to 4.0, and even more preferably 1.5 to 3.0;

[0014] 4) The ratio of (CaO+BaO) / B2O3 is 0.20 to 3.5, preferably 0.30 to 2.0, more preferably 0.40 to 1.5, and even more preferably 0.50 to 1.0.

[0015] 5) The ZnO / B2O3 ratio is 0.2 to 3.0, preferably 0.3 to 2.0, more preferably 0.4 to 1.5, and even more preferably 0.55 to 1.2;

[0016] 6) The SiO2 / (MgO+ZnO) ratio is 2.2 to 7.5, preferably 2.5 to 7.0, more preferably 3.0 to 5.5, and even more preferably 3.2 to 4.5;

[0017] 7) The SiO2 / MgO ratio is 4.0 to 8.0, preferably 4.5 to 7.0, and more preferably 5.0 to 6.5.

[0018] (6) The glass composition according to any one of (1) to (4), wherein the components are expressed in weight percentage, wherein: Ln2O3 / ZnO is 0.5 or less, preferably Ln2O3 / ZnO is 0.3 or less, more preferably Ln2O3 / ZnO is 0.2 or less, and even more preferably Ln2O3 / ZnO is 0.1 or less; and / or Rn2O / Al2O3 is 0.18 or less, preferably Rn2O / Al2O3 is 0.15 or less, more preferably Rn2O / Al2O3 is 0.15 or less. The concentration of O3 is 0.1 or less, more preferably Rn2O / Al2O3 is 0.05 or less; and / or Rn2O / MgO is 0.5 or less, preferably Rn2O / MgO is 0.3 or less, more preferably Rn2O / MgO is 0.2 or less, and more preferably Rn2O / MgO is 0.1 or less, wherein Rn2O is one or more of Li2O, Na2O, and K2O, and Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3.

[0019] (7) The glass composition according to any one of (1) to (4), wherein the components are expressed in weight percentages, wherein: SiO2: 48-56%, preferably SiO2: 50-55%; and / or B2O3: 3-9%, preferably B2O3: 4-8%; and / or Al2O3: 16-25%, preferably Al2O3: 18-23%; and / or ZrO2: 0-2%, preferably ZrO2: 0-1%; and / or TiO2: 0-2%, preferably TiO2: 0-1%; and / or ZnO: 2-7%, preferably ZnO: 3-6.5%; and / or BaO: 0-3.5%, preferably BaO: 0.5-2%; and / or SrO: 0-3%, preferably SrO: 0-1%; and / or CaO: 1.5-7%, preferably CaO: 2-5%; and / or MgO: 6- 13%, preferably MgO: 7-12%; and / or Ln2O3: 0-3%, preferably Ln2O3: 0-1%; and / or Nb2O5: 0-2%, preferably Nb2O5: 0-1%; and / or WO3: 0-2%, preferably WO3: 0-1%; and / or Ta2O5: 0-2%, preferably Ta2O5: 0-1%; and / or GeO2: 0-2%, preferably GeO2: 0-1%; and / or Rn2O: 0-2%, preferably Rn2O: 0-1%; and / or clarifying agent: 0-1%, preferably clarifying agent: 0-0.5%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifying agent is one or more of Sb2O3, SnO2, and CeO2.

[0020] (8) The glass composition according to any one of (1) to (4) is free from ZrO2; and / or TiO2; and / or SrO; and / or La2O3; and / or Y2O3; and / or Gd2O3; and / or Nb2O5; and / or WO3; and / or Ta2O5; and / or GeO2; and / or Li2O; and / or Na2O; and / or K2O; and / or P2O5; and / or Fe2O3; and / or F.

[0021] (9) The coefficient of thermal expansion α of the glass composition according to any one of (1) to (4) 20 / 300℃ 31×10 -7 / K~45×10 -7 / K, preferably 33×10 -7 / K~42×10 -7 / K, more preferably 35×10 -7 / K~40×10 -7 / K; and / or acid resistance stability D A It is classified as Class 2 or above, preferably Class 1; and / or water resistance stability D W It is of two or more classes, preferably of one class; and / or refractive index n d The Abbe number is 1.51 to 1.58, preferably 1.52 to 1.57, and more preferably 1.53 to 1.56; and / or the Abbe number ν. d The value is 57–63, preferably 58–62, more preferably 59–61.5; and / or the Young's modulus E is 83 GPa or more, preferably 85 GPa or more, more preferably 87 GPa or more; and / or the transition temperature T g The temperature is 700°C or higher, preferably 710°C or higher, more preferably 720°C or higher, and even more preferably 725–745°C; and / or the density ρ is 2.90 g / cm³. 3 The preferred value is 2.80 g / cm³. 3 The following is more preferred: 2.70 g / cm³ 3 The following are also mentioned: a viscosity of 170–220 dPaS at 1400°C, preferably 180–210 dPaS, more preferably 185–205 dPaS; and / or a light transmittance T at 550 nm. 550nm The transmittance is 88.0% or more, preferably 89.0% or more, more preferably 90.0% or more; and / or the light transmittance T at 355 nm. 355nm The purity is 85.0% or higher, preferably 87.0% or higher, more preferably 89.0% or higher; and / or the dielectric constant is 3.5 to 8.0, preferably 4.0 to 7.5, more preferably 5.0 to 6.7; and / or the surface resistivity is 6.5 × 10⁻⁶.12 ~9.8×10 12 Ω, preferably 7.5 × 10 12 ~9.2×10 12 Ω, more preferably 7.8 × 10 12 ~8.8×10 12 Ω; and / or Knoop hardness H K 500×10 7 Pa or higher, preferably 520 × 10 Pa 7 Pa or higher, more preferably 540 × 10 Pa 7 Pa or above.

[0022] (10) A packaging carrier made of any one of the glass compositions described in (1) to (9).

[0023] (11) A glass element made of any of the glass compositions described in (1) to (9).

[0024] (12) An apparatus comprising any one of the glass compositions described in (1) to (9), or comprising the glass element described in (11).

[0025] The beneficial effect of the present invention is that, through reasonable component design, the glass composition obtained by the present invention has high light transmittance. Detailed Implementation

[0026] The embodiments of the glass composition of the present invention will now be described in detail. However, the present invention is not limited to the embodiments described below, and appropriate modifications can be made to implement it within the scope of the present invention. Furthermore, while there are appropriate omissions in the repeated descriptions, this does not limit the spirit of the invention. In this specification, the glass composition of the present invention is sometimes simply referred to as glass.

[0027] [Glass Composition]

[0028] The component ranges of the glass composition of the present invention are described below. In the present invention, unless otherwise specified, the content of each component, the total content, and the total content are all expressed as weight percentages (wt%), that is, the weight percentage of the content of each component, the total content, and the total content relative to the total amount of glass material converted into oxide composition. Here, "converted into oxide composition" means that when the oxides, complex salts, and hydroxides used as raw materials for the glass composition of the present invention decompose and transform into oxides upon melting, the total amount of such oxides is taken as 100%.

[0029] Unless otherwise specified in the specific context, the numerical ranges listed in this invention include upper and lower limits, and "above" and "below" include endpoint values ​​and all integers and fractions included in the range, but are not limited to the specific values ​​listed when the range is defined. The term "and / or" as used herein is inclusive; for example, "A and / or B" means only A, or only B, or both A and B.

[0030] <Essential and Optional Components>

[0031] SiO2 is a major component constituting the glass framework and has a significant impact on the high-temperature viscosity and coefficient of thermal expansion of glass. If its content is below 46%, the coefficient of thermal expansion of the glass increases, making it difficult to achieve the desired coefficient of thermal expansion as described in this invention, and the transition temperature and devitrification resistance decrease. If the SiO2 content exceeds 57.5%, the high-temperature viscosity of the glass increases, which is not conducive to obtaining large-size, high-quality glass. Therefore, the SiO2 content in this invention is 46–57.5%, preferably 48–56%, and more preferably 50–55%.

[0032] Al₂O₃ can increase the Young's modulus of glass, which is beneficial for improving its resistance to warping and breakage. It can also reduce the coefficient of thermal expansion and adjust the dielectric constant of glass. In this invention, the above effects are achieved by containing more than 14% Al₂O₃. However, if the Al₂O₃ content is too high, the meltability of the glass decreases, and its resistance to crystallization declines. Therefore, the Al₂O₃ content in this invention is 14–26%, preferably 16–25%, and more preferably 18–23%.

[0033] In some embodiments, controlling the Al2O3 / SiO2 ratio (Al2O3 / SiO2) within the range of 0.28 to 0.52 can improve the Young's modulus of the glass while obtaining a suitable coefficient of thermal expansion. Therefore, an Al2O3 / SiO2 ratio of 0.28 to 0.52 is preferred, 0.32 to 0.50 is more preferred, and 0.35 to 0.45 is even more preferred.

[0034] B2O3 can improve the melt flow properties and devitrification resistance of glass. This invention achieves these effects by containing more than 2% B2O3. However, if the B2O3 content exceeds 10%, it is difficult to achieve the desired coefficient of thermal expansion of the glass. Therefore, the B2O3 content in this invention is 2–10%, preferably 3–9%, and more preferably 4–8%.

[0035] ZnO can improve the melting properties of glass and adjust its high-temperature viscosity. However, if its content is too high, the glass transition temperature will decrease, making the glass unsuitable for use in high-temperature environments, and its chemical stability will also decrease. Therefore, the ZnO content is 1–8%, preferably 2–7%, and more preferably 3–6.5%.

[0036] In some embodiments, controlling the ratio of ZnO content to B2O3 content (ZnO / B2O3) within the range of 0.2 to 3.0 can improve the acid resistance of the glass while preventing a decrease in its hardness. Therefore, a ZnO / B2O3 ratio of 0.2 to 3.0 is preferred, more preferably 0.3 to 2.0, even more preferably 0.4 to 1.5, and still more preferably 0.55 to 1.2.

[0037] MgO can improve the light transmittance of glass, reduce its density, and give it a suitable dielectric constant. However, if its content is too high, the chemical stability of the glass will deteriorate. Therefore, the MgO content in this invention is 4.5% to 14.5%, preferably 6% to 13%, and more preferably 7% to 12%.

[0038] In some embodiments, controlling the SiO2 / MgO ratio (SiO2 / MgO) within the range of 3.5 to 10.0 can improve the light transmittance of the glass while obtaining a better dielectric constant. Therefore, a SiO2 / MgO ratio of 3.5 to 10.0 is preferred, more preferably 4.0 to 8.0, even more preferably 4.5 to 7.0, and still more preferably 5.0 to 6.5.

[0039] In some embodiments, controlling the ratio of MgO to ZnO (MgO / ZnO) within the range of 0.8 to 8.0 allows the glass to maintain a good dielectric constant while preventing an increase in density. Therefore, a MgO / ZnO ratio of 0.8 to 8.0 is preferred, more preferably 1.0 to 6.0, even more preferably 1.2 to 4.0, and still more preferably 1.5 to 3.0.

[0040] In some embodiments, controlling the ratio of the total MgO and ZnO content (MgO+ZnO) to the Al2O3 content (MgO+ZnO) / Al2O3 within the range of 0.25 to 1.4 can improve the water resistance of the glass while maintaining good high-temperature viscosity. Therefore, it is preferable that (MgO+ZnO) / Al2O3 is 0.25 to 1.4, more preferably 0.30 to 1.2, even more preferably 0.40 to 1.0, and even more preferably 0.50 to 0.90.

[0041] In some embodiments, the ratio of SiO2 content to the total content of MgO and ZnO (MgO+ZnO), SiO2 / (MgO+ZnO), is controlled within the range of 2.2 to 7.5. This can improve the hardness of the glass while preventing a decrease in its acid resistance. Therefore, a SiO2 / (MgO+ZnO) ratio of 2.2 to 7.5 is preferred, more preferably 2.5 to 7.0, further preferably 3.0 to 5.5, and even more preferably 3.2 to 4.5.

[0042] CaO can improve the Young's modulus and melt properties of glass without significantly increasing the coefficient of thermal expansion and density, but if its content is too high, the glass's resistance to crystallization will decrease. Therefore, the CaO content is 1-8%, preferably 1.5-7%, and more preferably 2-5%.

[0043] SrO can adjust the high-temperature viscosity and melting properties of glass, but if its content is too high, the chemical stability of the glass will decrease. Therefore, the SrO content is 0-5%, preferably 0-3%, and more preferably 0-1%. In some embodiments, it is even more preferable that the glass does not contain SrO.

[0044] BaO can increase the refractive index of glass and adjust its surface resistivity and high-temperature viscosity. However, if its content is too high, the coefficient of thermal expansion and density of the glass will increase. Therefore, the BaO content in this invention is 0-5%, preferably 0-3.5%, and more preferably 0.5-2%.

[0045] In some embodiments, controlling the ratio of the total content of CaO and BaO (CaO+BaO) to the content of B2O3 ((CaO+BaO) / B2O3) within the range of 0.20 to 3.5 can enable the glass to obtain better transition temperature and surface resistivity. Therefore, it is preferable that (CaO+BaO) / B2O3 is 0.20 to 3.5, more preferably 0.30 to 2.0, further preferably 0.40 to 1.5, and even more preferably 0.50 to 1.0.

[0046] ZrO2 can improve the refractive index and chemical stability of glass, reduce its coefficient of thermal expansion, and optimize its high-temperature viscosity. However, when the ZrO2 content is too high, the glass's resistance to devitrification decreases, and its ultraviolet light transmittance drops. Therefore, the ZrO2 content is 0–3%, preferably 0–2%, and more preferably 0–1%. In some embodiments, it is further preferred that the glass does not contain ZrO2.

[0047] TiO2 can improve the refractive index and dispersion of glass and adjust its coefficient of thermal expansion. However, if the TiO2 content exceeds 3%, the light transmittance of the glass decreases rapidly, and the coefficient of thermal expansion of the glass is difficult to meet design requirements. Therefore, the TiO2 content is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is even more preferable that the glass does not contain TiO2.

[0048] Ln2O3 (Ln2O3 can be one or more of La2O3, Y2O3, and Gd2O3) can improve the devitrification resistance and refractive index of glass, but when its content is too high, the ultraviolet light transmittance of the glass decreases, and the transition temperature is difficult to meet the design requirements. Therefore, the content of Ln2O3 is 0-5%, preferably 0-3%, and more preferably 0-1%. In some embodiments, it is further preferred that it does not contain La2O3; and / or does not contain Y2O3; and / or does not contain Gd2O3.

[0049] In some embodiments, controlling the ratio of Ln2O3 content to ZnO content (Ln2O3 / ZnO) to below 0.5 allows the glass to maintain good high-temperature viscosity while preventing a deterioration in its anti-crystallization properties. Therefore, it is preferable that Ln2O3 / ZnO is below 0.5, more preferably below 0.3, further preferably below 0.2, and even more preferably below 0.1.

[0050] Nb₂O₅ is a high-refractive-index and high-dispersion component that can improve the refractive index and devitrification resistance of glass, and reduce the coefficient of thermal expansion of glass. However, if its content is too high, the ultraviolet light transmittance of the glass will decrease, and the coefficient of thermal expansion of the glass will be too low. Therefore, the content of Nb₂O₅ is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferred that the glass does not contain Nb₂O₅.

[0051] WO3 is a high-refractive-index and high-dispersion component that can improve the refractive index and devitrification resistance of glass. However, if its content is too high, the visible light transmittance of the glass will decrease. Therefore, the WO3 content is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is even more preferable that the glass does not contain WO3.

[0052] Ta₂O₅ can increase the refractive index of glass, but a high content will significantly increase the cost of the glass and worsen its melting performance and increase its density. Therefore, the content of Ta₂O₅ is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is even more preferable that Ta₂O₅ is not present.

[0053] GeO2 can improve the refractive index and devitrification resistance of glass. However, the presence of GeO2 in glass is detrimental to the control of glass raw material costs, and its high content reduces the chemical stability of the glass. Therefore, the GeO2 content is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferred that the glass does not contain GeO2.

[0054] Rn₂O (which can be one or more of Li₂O, Na₂O, and K₂O) can lower the melting temperature and density of glass, but a high content of Rn₂O will decrease the glass transition temperature. On the other hand, when glass containing Rn₂O is used as a carrier, the alkali metal ions Li₂O… + Na + K + It can enter the single-crystal silicon substrate and contaminate the chip circuit. Therefore, the content of Rn2O in this invention is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferred that it does not contain Li2O; and / or does not contain Na2O; and / or does not contain K2O.

[0055] In some embodiments, controlling the ratio of Rn2O content to Al2O3 content, Rn2O / Al2O3, to be below 0.18 can ensure that the glass has a good coefficient of thermal expansion while preventing a deterioration in the Young's modulus. Therefore, it is preferable that Rn2O / Al2O3 is below 0.18, more preferably below 0.15, further preferably below 0.1, and even more preferably below 0.05.

[0056] In some embodiments, controlling the ratio of Rn2O content to MgO content, Rn2O / MgO, to be below 0.5 allows the glass to have a good coefficient of thermal expansion while preventing a deterioration in its high-temperature viscosity. Therefore, it is preferable that Rn2O / MgO is below 0.5, more preferably below 0.3, further preferably below 0.2, and even more preferably below 0.1.

[0057] In this invention, one or more of the following components containing 0-2% Sb2O3, SnO2, and CeO2 are used as clarifiers to improve the clarification effect of the glass. Preferably, the content of the clarifier is 0-1%, more preferably 0-0.5%.

[0058] <Components that should not be present>

[0059] P2O5 tends to form differential phases inside the glass, which scatter some short-wavelengths, making it difficult to achieve the designed transmittance. Therefore, in some embodiments, it is preferable to not contain P2O5.

[0060] Fe2O3 can cause glass discoloration, which is detrimental to achieving excellent light transmittance. Therefore, in some embodiments, it is preferable to avoid the presence of Fe2O3.

[0061] Fluorine (F) lowers the glass transition temperature and volatilizes during the glass melting process, causing instability in the glass composition and reducing glass quality. Therefore, in some embodiments, it is preferable to omit F.

[0062] In the glass of the present invention, even if oxides of transition metals such as V, Cr, Mn, Fe, Co, Ni, Cu, Ag, and Mo are contained in small amounts, either alone or in combination, the glass will be colored and absorb at specific wavelengths in the visible light region, thereby weakening the property of the present invention to improve visible light transmittance. Therefore, it is preferable that the glass does not actually contain the above-mentioned components, especially for glasses that require transmittance in the visible light region.

[0063] Oxides of Th, Cd, Tl, Os, Be, and Se have been increasingly subject to controlled use in recent years due to their status as hazardous chemicals. Environmental protection measures are essential not only in glass manufacturing but also in processing and post-product disposal. Therefore, given the importance of environmental impact, it is preferable to avoid the presence of these substances, except where their contamination is unavoidable. This results in glass that is virtually free of pollutants. Consequently, the glass of this invention can be manufactured, processed, and disposed of even without specific environmental countermeasures.

[0064] To achieve environmental friendliness, the glass of the present invention preferably does not contain As2O3 and PbO.

[0065] The terms "not containing" and "0%" as used herein mean that the compound, molecule, or element was not intentionally added to the glass of this invention as a raw material. However, as raw materials and / or equipment used in the production of glass, there may be some impurities or components that are not intentionally added, which may be present in small or trace amounts in the final glass. Such cases are also within the scope of protection of this patent.

[0066] The properties of the glass composition of the present invention will now be described.

[0067] <Refractive Index and Abbe Number>

[0068] Refractive index (n) of glass composition d ) and Abbe number (ν d According to the national standard GB / T 7962.

[0069] Test according to the method specified in "1-2010".

[0070] In some embodiments, the refractive index (n) of the glass composition of the present invention is... d The lower limit of the refractive index (n) is 1.51, preferably 1.52, and more preferably 1.53. In some embodiments, the refractive index (n) of the glass composition of the present invention is... d The upper limit of ) is 1.58, the preferred upper limit is 1.57, and the more preferred upper limit is 1.56.

[0071] In some embodiments, the Abbe number (ν) of the glass composition of the present invention is... d The lower limit for the Abbe number (ν) is 57, preferably 58, and more preferably 59. In some embodiments, the Abbe number (ν) of the glass composition of the present invention is... d The upper limit of ) is 63, the preferred upper limit is 62, and the more preferred upper limit is 61.5.

[0072] <Coefficient of thermal expansion>

[0073] The coefficient of thermal expansion of the glass composition (α) 20 / 300℃ Data from 20 to 300°C were tested according to the method specified in the national standard GB / T 7962.16-2010. The coefficient of thermal expansion of the glass composition should not be too high or too low, and it needs to be thermally matched with the encapsulation medium (such as resin material) to prevent excessive difference in the coefficient of thermal expansion from causing stress rise in the interface layer and resulting in cracking.

[0074] In some embodiments, the coefficient of thermal expansion (α) of the glass composition of the present invention is... 20 / 300℃ ) is 31×10 -7 / K~45×10 -7 / K, preferably 33×10-7 / K~42×10 -7 / K, more preferably 35×10 -7 / K~40×10 -7 / K.

[0075] <Stability under acid conditions>

[0076] Acid resistance stability of glass compositions (D) A (Powder method) Tested according to the method specified in the national standard GB / T 17129. In this specification, acid resistance stability is sometimes simply referred to as acid resistance or acid stability. In the application of glass compositions in a highly acidic environment, the better the acid resistance, the less likely the glass will fail.

[0077] In some embodiments, the acid resistance stability (D) of the glass composition of the present invention is... A There are two or more categories, with category 1 being preferred.

[0078] <Stability under water resistance>

[0079] Water resistance stability of glass compositions (D) W (Powder method) Tested according to the method specified in the national standard GB / T 17129. In this specification, water resistance stability is sometimes simply referred to as water resistance or water stability. The better the water resistance of the glass composition, the more water erosion can be avoided during application. In particular, excellent water resistance of the glass composition can better prevent water erosion during the encapsulation process. Poor water resistance of the glass can lead to reduced glass transmittance and decreased debonding efficiency, and in severe cases, it can cause the carrier plate to crack and fail.

[0080] In some embodiments, the water resistance stability (D) of the glass composition of the present invention is... W There are two or more categories, with category 1 being preferred.

[0081] Young's Modulus

[0082] The Young's modulus (E) of the glass composition was obtained by ultrasonic testing of its longitudinal wave velocity and transverse wave velocity, and then calculated according to the following formula.

[0083] The following formula is used to calculate:

[0084]

[0085] Where G = V S 2 ρ

[0086] In the formula:

[0087] E is Young's modulus, in Pa;

[0088] G is the shear modulus, Pa;

[0089] V T The longitudinal wave velocity is given in m / s.

[0090] V S The transverse wave velocity is in m / s;

[0091] ρ is the density of glass, in g / cm³ 3 .

[0092] The higher the Young's modulus of the glass composition, the less likely it is to deform during application. In particular, the higher the Young's modulus of the glass composition, the less likely it is to warp and break under stress during the packaging process. In some embodiments, the Young's modulus (E) of the glass composition of the present invention is 83 GPa or higher, preferably 85 GPa or higher, and more preferably 87 GPa or higher.

[0093] <Transition Temperature>

[0094] Transition temperature of glass composition (T) g Test according to the method specified in the national standard GB / T 7962.16-2010.

[0095] If the glass transition temperature is too low, the glass's heat resistance decreases, making it prone to softening and deformation during high-temperature processes. If the glass transition temperature is too high, it creates design difficulties for the heat resistance of precision annealing equipment, leading to a decrease in its reliability. This is especially true when precision annealing large-diameter glass blanks, which require prolonged holding at temperatures near the transition temperature. If the transition temperature is too high, it will significantly reduce the reliability of the precision annealing equipment.

[0096] In some embodiments, the transition temperature (T) of the glass composition of the present invention is... g The temperature is 700°C or higher, preferably 710°C or higher, more preferably 720°C or higher, and even more preferably 725-745°C.

[0097] <Density>

[0098] The density (ρ) of the glass composition was tested according to the method specified in the national standard GB / T 7962.20-2010. Lower density of the glass composition is more conducive to achieving lightweight application terminals. In particular, lower density of the glass composition means less weight is borne by the support equipment in the packaging process, enabling higher precision and efficiency.

[0099] In some embodiments, the density (ρ) of the glass composition of the present invention is 2.90 g / cm³. 3 The preferred value is 2.80 g / cm³. 3 The following is more preferred: 2.70 g / cm³3 the following.

[0100] Viscosity

[0101] The viscosity of the glass composition was tested using a THETA Rheotronic II high-temperature viscometer via a rotational method. The unit of measurement is dPascals (poises), with lower values ​​indicating lower viscosity. The glass composition needs to possess a suitable high-temperature viscosity to prevent streaks and / or crystallization during the glass forming process. The glass composition of this invention has a suitable high-temperature viscosity, enabling the manufacture of large-diameter glass compositions.

[0102] In some embodiments, the viscosity of the glass composition of the present invention at 1400°C is 220 dPaS or less, preferably 210 dPaS or less, and more preferably 205 dPaS or less.

[0103] In some embodiments, the viscosity of the glass composition of the present invention at 1400°C is 170 dPaS or more, preferably 180 dPaS or more, and more preferably 185 dPaS or more.

[0104] <Light transmittance>

[0105] The light transmittance of the glass composition was tested according to the following method: the glass sample to be tested was processed to a certain thickness and polished with the opposing surfaces parallel, and then tested according to the method specified in the national standard GB / T 7962.12-2010. In this invention, the glass composition was processed to a thickness of 1±0.1 mm, and its light transmittance at 550 nm (T) was tested. 550nm ) and light transmittance at 355nm (T 355nm The higher the light transmittance of the glass composition at 550nm, the more efficient and accurate the optical inspection equipment can achieve during the packaging process; the higher the light transmittance of the glass composition at 355nm, the higher the debonding efficiency during the packaging process, and the lower the risk of wafer warpage.

[0106] In some embodiments, the light transmittance (T) of the glass composition of the present invention at 550 nm is... 550nm The content is 88.0% or more, preferably 89.0% or more, and more preferably 90.0% or more.

[0107] In some embodiments, the light transmittance (T) of the glass composition of the present invention at 355 nm is... 355nm The content is 85.0% or more, preferably 87.0% or more, and more preferably 89.0% or more.

[0108] <Dielectric constant>

[0109] The dielectric constant of the glass composition was tested according to the method specified in the national standard GB / T 7265.1-1987. In this invention, the data were tested under 1.8 GHz conditions.

[0110] In some embodiments, the lower limit of the dielectric constant of the glass composition of the present invention is 3.5, preferably 4.0, and more preferably 5.0.

[0111] In some embodiments, the dielectric constant of the glass composition of the present invention is at an upper limit of 8.0, preferably at an upper limit of 7.5, and more preferably at an upper limit of 6.7.

[0112] Surface resistivity

[0113] The surface resistivity of a glass composition is the ratio of the DC voltage applied to two electrodes on a certain surface of the glass to the steady-state current flowing through the two electrodes after a certain period of time. The unit is ohms (Ω), and it is measured using a volume surface resistivity tester.

[0114] In some embodiments, the lower limit of the surface resistivity of the glass composition of the present invention is 6.5 × 10⁻⁶. 12 Ω, with a preferred lower limit of 7.5 × 10 12 Ω, with a more preferred lower limit of 7.8 × 10 Ω. 12 Ω.

[0115] In some embodiments, the upper limit of the surface resistivity of the glass composition of the present invention is 9.8 × 10⁻⁶. 12 Ω, with a preferred upper limit of 9.2 × 10 12 Ω, with a preferred upper limit of 8.8 × 10⁻⁶. 12 Ω.

[0116] Knoop Hardness

[0117] Knoop hardness (H) of glass compositions K Test according to the test methods specified in the national standard GB / T 7962.18-2010.

[0118] In some embodiments, the Knoop hardness (H) of the glass composition of the present invention is... K ) is 500×10 7 Pa or higher, preferably 520 × 10 Pa 7 Pa or higher, more preferably 540 × 10 Pa 7 Pa or above.

[0119] Due to the aforementioned excellent properties, the glass composition of the present invention can be used to manufacture packaging carriers (substrate materials) for semiconductor manufacturing processes.

[0120] The glass composition of the present invention can be used to manufacture various glass components, providing various lenses, prisms, and other glass components with high optical value. Examples of lenses include concave meniscus lenses, convex meniscus lenses, biconvex lenses, biconcave lenses, plano-convex lenses, plano-concave lenses, and other lenses with spherical or aspherical lens surfaces.

[0121] The glass compositions and glass elements of the present invention can be used to manufacture various devices (including instruments, equipment, etc.), such as imaging devices, sensors, microscopes, medical technology, digital projection, communications, optical communication technology / information transmission, optics / lighting in the automotive field, photolithography, excimer lasers, wafers, computer chips, and integrated circuits and electronic devices including such circuits and chips, or for use in the automotive field, and in the field of surveillance and security.

[0122] [Manufacturing Method]

[0123] The manufacturing method of the glass composition of the present invention is as follows: The glass composition of the present invention uses carbonates, nitrates, sulfates, hydroxides, oxides, fluorides, etc. as raw materials. After being batched according to conventional methods, the batched furnace charge is put into a melting furnace at 1300-1500°C for melting. After clarification, stirring, and homogenization, a homogeneous molten glass without bubbles and undissolved substances is obtained. This molten glass is then cast in a mold and annealed. Those skilled in the art can appropriately select raw materials, process methods, and process parameters according to actual needs.

[0124] [Example]

[0125] To further illustrate and explain the technical solution of the present invention, the following non-limiting embodiments are provided.

[0126] In this embodiment, a glass composition having the composition shown in Tables 1 to 3 was obtained using the manufacturing method of the glass composition described above. Furthermore, the properties of each glass were measured using the testing method described in this invention, and the measurement results are shown in Tables 1 to 3.

[0127] Table 1.

[0128]

[0129]

[0130]

[0131] Table 2.

[0132]

[0133]

[0134] Table 3.

[0135]

[0136]

Claims

1. A glass composition, characterized in that, Its composition, expressed as a weight percentage, contains: SiO2: 46–57.5%; B2O3: 2–10%; Al2O3: 14–26%; ZnO: 1–8%; CaO: 1–8%; MgO: 4.5–14.5%, of which SiO2 / MgO is 3.5–10.0 and ZnO / B2O3 is 0.2–3.

0.

2. The glass composition according to claim 1, characterized in that, Its components, expressed as a weight percentage, also contain: ZrO2: 0–3%; and / or TiO2: 0–3%; and / or BaO: 0–5%; and / or SrO: 0–5%; and / or Ln2O3: 0–5%; and / or Nb2O5: 0–3%; and / or WO3: 0–3%; and / or Ta2O5: 0–3%; and / or GeO2: 0–3%; and / or Rn2O: 0–3%; and / or clarifying agent: 0–2%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifying agent is one or more of Sb2O3, SnO2, and CeO2.

3. The glass composition according to any one of claims 1 to 2, characterized in that, The light transmittance T of the glass composition at 550 nm 550nm The transmittance is above 88.0%; and / or the light transmittance T at 355 nm. 355nm It is above 85.0%.

4. A glass composition, characterized in that, Its composition, expressed as a weight percentage, contains: SiO2: 48–57.5%; B2O3: 2–10%; Al2O3: 14–26%; ZnO: 1–8%; CaO: 1–8%; MgO: 4.5–14.5%, wherein the SiO2 / MgO ratio is 3.5–10.0, and the ZnO / B2O3 ratio is 0.2–3.

0. The light transmittance T of the glass composition at 550 nm is... 550nm The light transmittance at 355nm is above 88.0%. 355nm It is above 85.0%.

5. The glass composition according to claim 4, characterized in that, Its components, expressed as a weight percentage, contain: ZrO2: 0–3%; and / or TiO2: 0–3%; and / or BaO: 0–5%; and / or SrO: 0–5%; and / or Ln2O3: 0–5%; and / or Nb2O5: 0–3%; and / or WO3: 0–3%; and / or Ta2O5: 0–3%; and / or GeO2: 0–3%; and / or Rn2O: 0–3%; and / or clarifying agent: 0–2%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifying agent is one or more of Sb2O3, SnO2, and CeO2.

6. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as a weight percentage and meet one or more of the following seven conditions: 1) The Al2O3 / SiO2 ratio is 0.28–0.52; 2) (MgO+ZnO) / Al2O3 is 0.25~1.4; 3) The MgO / ZnO ratio is 0.8–8.0; 4) (CaO+BaO) / B2O3 is 0.20~3.5; 5) The ZnO / B2O3 ratio is 0.3–2.0; 6) The ratio of SiO2 / (MgO+ZnO) is 2.2–7.5; 7) The SiO2 / MgO ratio is 4.0 to 8.

0.

7. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as a weight percentage and meet one or more of the following seven conditions: 1) The Al2O3 / SiO2 ratio is 0.32–0.50; 2) (MgO+ZnO) / Al2O3 is 0.30~1.2; 3) The MgO / ZnO ratio is 1.0–6.0; 4) (CaO+BaO) / B2O3 is 0.30~2.0; 5) The ZnO / B2O3 ratio is 0.4–1.5; 6) The ratio of SiO2 / (MgO+ZnO) is 2.5–7.0; 7) The SiO2 / MgO ratio is 4.5 to 7.

0.

8. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as a weight percentage and meet one or more of the following seven conditions: 1) The Al2O3 / SiO2 ratio is 0.35–0.45; 2) (MgO+ZnO) / Al2O3 is 0.40~1.0; 3) The MgO / ZnO ratio is 1.2–4.0; 4) (CaO+BaO) / B2O3 is 0.40~1.5; 5) The ZnO / B2O3 ratio is 0.55–1.2; 6) The ratio of SiO2 / (MgO+ZnO) is 3.0–5.5; 7) The SiO2 / MgO ratio is 5.0 to 6.

5.

9. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as a weight percentage and meet one or more of the following four conditions: 1) (MgO+ZnO) / Al2O3 is 0.50~0.90; 2) The MgO / ZnO ratio is 1.5–3.0; 3) (CaO+BaO) / B2O3 is 0.50~1.0; 4) The ratio of SiO2 / (MgO+ZnO) is 3.2 to 4.

5.

10. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as weight percentages, wherein: Ln2O3 / ZnO is less than 0.5; and / or Rn2O / Al2O3 is less than 0.18; and / or Rn2O / MgO is less than 0.5, wherein Rn2O is one or more of Li2O, Na2O, and K2O, and Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3.

11. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as weight percentages, wherein: Ln2O3 / ZnO is less than 0.3; and / or Rn2O / Al2O3 is less than 0.15; and / or Rn2O / MgO is less than 0.3, wherein Rn2O is one or more of Li2O, Na2O, and K2O, and Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3.

12. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as weight percentages, wherein: Ln2O3 / ZnO is less than 0.2; and / or Rn2O / Al2O3 is less than 0.1; and / or Rn2O / MgO is less than 0.2, wherein Rn2O is one or more of Li2O, Na2O, and K2O, and Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3.

13. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as weight percentages, wherein: Ln2O3 / ZnO is less than 0.1; and / or Rn2O / Al2O3 is less than 0.05; and / or Rn2O / MgO is less than 0.1, wherein Rn2O is one or more of Li2O, Na2O, and K2O, and Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3.

14. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as weight percentages, wherein: SiO2: 48–56%; and / or B2O3: 3–9%; and / or Al2O3: 16–25%; and / or ZrO2: 0–2%; and / or TiO2: 0–2%; and / or ZnO: 2–7%; and / or BaO: 0–3.5%; and / or SrO: 0–3%; and / or CaO: 1.5–7%; and / or MgO: 6–13%; and / or Ln2O3: 0–3%; and / or Nb2O5: 0-2%; and / or WO3: 0-2%; and / or Ta2O5: 0-2%; and / or GeO2: 0-2%; and / or Rn2O: 0-2%; and / or clarifying agent: 0-1%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifying agent is one or more of Sb2O3, SnO2, and CeO2.

15. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components are expressed as weight percentages, wherein: SiO2: 50–55%; and / or B2O3: 4–8%; and / or Al2O3: 18–23%; and / or ZrO2: 0–1%; and / or TiO2: 0–1%; and / or ZnO: 3–6.5%; and / or BaO: 0.5–2%; and / or SrO: 0–1%; and / or CaO: 2–5%; and / or MgO: 7–12%; and / or Ln2O3: 0–1%; and / or Or Nb2O5: 0-1%; and / or WO3: 0-1%; and / or Ta2O5: 0-1%; and / or GeO2: 0-1%; and / or Rn2O: 0-1%; and / or clarifying agent: 0-0.5%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifying agent is one or more of Sb2O3, SnO2, and CeO2.

16. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, Its components do not contain ZrO2; and / or TiO2; and / or SrO; and / or La2O3; and / or Y2O3; and / or Gd2O3; and / or Nb2O5; and / or WO3; and / or Ta2O5; and / or GeO2; and / or Li2O; and / or Na2O; and / or K2O; and / or P2O5; and / or Fe2O3; and / or F.

17. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, The coefficient of thermal expansion of the glass composition is α 20 / 300℃ 31×10 -7 / K~45×10 -7 / K; and / or acid resistance stability D A Class 2 or above; and / or water resistance stability D W Class 2 or above; and / or refractive index n d The value is 1.51 to 1.58; and / or the Abbe number ν. d The value is 57–63; and / or the Young's modulus E is above 83 GPa; and / or the transition temperature T g Temperature above 700℃; and / or density ρ of 2.90 g / cm³ 3 The following are also relevant: a viscosity of 170–220 dPaS at 1400°C; and / or a light transmittance of T at 550 nm. 550nm The transmittance is above 89.0%; and / or the light transmittance T at 355 nm. 355nm It has a purity of 87.0% or higher; and / or a dielectric constant of 3.5 to 8.0; and / or a surface resistivity of 6.5 × 10⁻⁶. 12 ~9.8×10 12 Ω; and / or Knoop hardness H K 500×10 7 Pa or above.

18. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, The coefficient of thermal expansion of the glass composition is α 20 / 300℃ 33×10 -7 / K~42×10 -7 / K; and / or acid resistance stability D A Class 1; and / or water resistance stability D W Class 1; and / or refractive index n d The value is 1.52–1.57; and / or the Abbe number ν. d The value is 58–62; and / or the Young's modulus E is 85 GPa or higher; and / or the transition temperature T g Temperature above 710℃; and / or density ρ of 2.80 g / cm³ 3 The following are also relevant: a viscosity of 180–210 dPaS at 1400°C; and / or a light transmittance of T at 550 nm. 550nm The transmittance is above 90.0%; and / or the light transmittance T at 355 nm. 355nm It has a purity of 89.0% or higher; and / or a dielectric constant of 4.0–7.5; and / or a surface resistivity of 7.5 × 10⁻⁶. 12 ~9.2×10 12 Ω; and / or Knoop hardness H K 520×10 7 Pa or above.

19. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, The coefficient of thermal expansion of the glass composition is α 20 / 300℃ 35×10 -7 / K~40×10 -7 / K; and / or refractive index n d The value is 1.53–1.56; and / or the Abbe number ν. d The value is 59–61.5; and / or the Young's modulus E is 87 GPa or higher; and / or the transition temperature T g Temperature above 720℃; and / or density ρ of 2.70 g / cm³ 3 The following are the characteristics: a viscosity of 185–205 dPaS at 1400℃; a dielectric constant of 5.0–6.7; and / or a surface resistivity of 7.8 × 10⁻⁶. 12 ~8.8×10 12 Ω; and / or Knoop hardness H K 540×10 7 Pa or above.

20. The glass composition according to any one of claims 1-2 and 4-5, characterized in that, The glass composition transition temperature T g The temperature ranges from 725 to 745℃.

21. A packaging carrier, characterized in that, Made from the glass composition according to any one of claims 1 to 20.

22. A glass element, characterized in that, Made from the glass composition according to any one of claims 1 to 20.

23. An apparatus, characterized in that, The glass composition comprising any one of claims 1 to 20, or the glass element comprising claim 22.

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