Glass material

Abstract

The invention provides a glass material which has a proper thermal expansion coefficient and meets the application in the field of semiconductor manufacturing. The glass material comprises the following components in percentage by weight: 38-52% of SiO2; 11% to 24% of B2O3; 10.5%-22% of Al2O3 (aluminum oxide); baO: greater than or equal to 2% but less than 10%; caO: greater than 0 but less than or equal to 7%; zrO2 + TiO2: 0.5 to 8.5% of the total weight of the raw materials; and 0.5 to 9.5 percent of La2O3 and Y2O3. Through reasonable component design, the thermal expansion coefficient alpha of the obtained glass material at 20-300 DEG C is 30 * 10 <-7 > / K-45 * 10 <-7 > / K, and the glass material has a proper matching degree with a resin material, and is suitable for the field of semiconductor manufacturing.

Description

TECHNICAL FIELD

[0001] The present application relates to a glass material, in particular to a glass material used in the field of semiconductor manufacturing. BACKGROUND

[0002] In the prior art, metal, ceramic and monocrystalline silicon materials with good mechanical strength and acid and alkali corrosion resistance are usually used as substrates for wafers in the manufacturing process to prevent the wafer from deforming in the processes of photolithography, cleaning and packaging. However, since the substrate materials such as metal, ceramic and monocrystalline silicon are not transparent, a heated stripping process is needed in the process of stripping the substrate from the wafer. If a transparent glass material is used as a manufacturing substrate, a light stripping process can be used. Compared with the heated stripping process, the light stripping process can greatly reduce the process time and stripping cost, and avoid baking the chip wafer at high temperature, thereby improving the yield of the chip manufacturing process. The light stripping process generally uses ultraviolet laser, which requires that the glass substrate material has high transmittance to the working light wavelength. On the other hand, the substrate material is generally combined with a resin material, which requires that the thermal expansion coefficient of the substrate material matches that of the resin material. Otherwise, the wafer will be warped and deformed when it undergoes high and low temperature changes in the chip manufacturing process, resulting in chip scrap.

[0003] For the above reasons, it is of great significance to develop a glass material with a suitable thermal expansion coefficient for the development of the field of semiconductor manufacturing. SUMMARY

[0004] The technical problem to be solved by the present application is to provide a glass material with a suitable thermal expansion coefficient to meet the application in the field of semiconductor manufacturing.

[0005] The technical solution adopted by the present application to solve the technical problem is:

[0006] The glass material contains, in terms of weight percentage, SiO2: 38-52%; B2O3: 11-24%; Al2O3: 10.5-22%; BaO: greater than or equal to 2% but less than 10%; CaO: greater than 0 but less than or equal to 7%; ZrO2+TiO2: 0.5-8.5%; La2O3+Y2O3: 0.5-9.5%.

[0007] Further, the glass material, the components of which are expressed in percentage by weight, further comprises: ZnO: 0-5%; and / or SrO: 0-5%; and / or MgO: 0-6%; and / or Gd2O3: 0-5%; and / or Nb2O5: 0-3%; and / or WO3: 0-3%; and / or Ta2O5: 0-3%; and / or GeO2: 0-3%; and / or Rn2O: 0-3%; and / or fining agent: 0-2%; and / or F: 0-2%, the Rn2O being one or more of Li2O, Na2O, K2O, and the fining agent being one or more of Sb2O3, SnO2, CeO2.

[0008] A glass material, the components of which are expressed in percentage by weight, consisting of: SiO2: 38-52%; B2O3: 11-24%; Al2O3: 10.5-22%; BaO: greater than or equal to 2% but less than 10%; CaO: greater than 0 but less than or equal to 7%; ZrO2+TiO2: 0.5-8.5%; La2O3+Y2O3: 0.5-9.5%; ZnO: 0-5%; SrO: 0-5%; MgO: 0-6%; Gd2O3: 0-5%; Nb2O5: 0-3%; WO3: 0-3%; Ta2O5: 0-3%; GeO2: 0-3%; Rn2O: 0-3%; fining agent: 0-2%; F: 0-2%, the Rn2O being one or more of Li2O, Na2O, K2O, and the fining agent being one or more of Sb2O3, SnO2, CeO2.

[0009] Further, the glass material, the components of which are expressed in percentage by weight, wherein: Al2O3 / SiO2 is 0.22-0.55, preferably Al2O3 / SiO2 is 0.25-0.50, more preferably Al2O3 / SiO2 is 0.28-0.44.

[0010] Further, the glass material, the components of which are expressed in percentage by weight, wherein:

[0011] (Al2O3+SiO2) / B2O3 is 2.3-6.0, preferably (Al2O3+SiO2) / B2O3 is 2.5-5.5, more preferably (Al2O3+SiO2) / B2O3 is 2.8-4.5, further preferably (Al2O3+SiO2) / B2O3 is 3.0-4.0.

[0012] Further, the glass material, the components of which are expressed in percentage by weight, wherein: (Zr02+Ti02) / (La203+Y203) is 0.1-8.0, preferably (Zr02+Ti02) / (La203+Y203) is 0.2-5.0, more preferably (Zr02+Ti02) / (La203+Y203) is 0.3-3.0, further preferably (Zr02+Ti02) / (La203+Y203) is 0.6-2.0.

[0013] Further, the glass material, the components of which are expressed in percentage by weight, wherein: (MgO+CaO+BaO) / (La203+Y203) is 0.5-8.0, preferably (MgO+CaO+BaO) / (La203+Y203) is 0.8-6.0, more preferably (MgO+CaO+BaO) / (La203+Y203) is 1.0-5.0, further preferably (MgO+CaO+BaO) / (La203+Y203) is 1.5-3.5.

[0014] Further, the glass material, the components of which are expressed in percentage by weight, wherein: (CaO+BaO) / Si02 is 0.06-0.40, preferably (CaO+BaO) / Si02 is 0.10-0.35, more preferably (CaO+BaO) / Si02 is 0.15-0.30.

[0015] Further, the glass material, the components of which are expressed in percentage by weight, wherein:

[0016] (La203+Y203+BaO) / Si02 is 0.08-0.45, preferably (La203+Y203+BaO) / Si02 is 0.10-0.40, more preferably (La203+Y203+BaO) / Si02 is 0.15-0.35.

[0017] Further, the glass material, the components of which are expressed in percentage by weight, wherein: MgO / (Zr02+Ti02) is 0.05-8.0, preferably MgO / (Zr02+Ti02) is 0.1-5.0, more preferably MgO / (Zr02+Ti02) is 0.2-3.0, further preferably MgO / (Zr02+Ti02) is 0.3-2.0.

[0018] Further, the glass material, the components of which are expressed in percentage by weight, wherein: Ti02 / BaO is 0.02-1.5, preferably Ti02 / BaO is 0.05-1.0, more preferably Ti02 / BaO is 0.1-0.8, further preferably Ti02 / BaO is 0.15-0.5.

[0019] Further, the glass material, the components of which are expressed in percentage by weight, wherein: Al2O3 / BaO is 1.2-8.0, preferably Al2O3 / BaO is 1.5-6.0, more preferably Al2O3 / BaO is 1.8-5.0, further preferably Al2O3 / BaO is 2.0-3.8.

[0020] Further, the glass material, the components of which are expressed in percentage by weight, wherein: Rn2O / Al2O3 is 0.2 or less, preferably Rn2O / Al2O3 is 0.15 or less, more preferably Rn2O / Al2O3 is 0.1 or less, further preferably Rn2O / Al2O3 is 0.05 or less, the Rn2O being one or more of Li2O, Na2O, K2O.

[0021] Further, the glass material, the components of which are expressed in percentage by weight, wherein: SiO2: 40-50%, preferably SiO2: 42-48%; and / or B2O3: 13-23%, preferably B2O3: 16-21%; and / or Al2O3: 12-20%, preferably Al2O3: 13-18%; and / or BaO: 3-9%, preferably BaO: 4-8%; and / or CaO: 0.5-6%, preferably CaO: 1-4%; and / or ZrO2+TiO2: 1-7%, preferably ZrO2+TiO2: 1.5-6%; and / or La2O3+Y2O3: 1-8%, preferably La2O3+Y2O3: 2-7%; and / or ZnO: more than 0 but less than or equal to 4%, preferably ZnO: 0.5-3%; and / or SrO: 0-3%, preferably SrO: 0-1%; and / or MgO: 0.5-4%, preferably MgO: 1-3%; and / or Gd2O3: 0-3%, preferably Gd2O3: 0-1%; and / or Nb2O5: 0-2%, preferably Nb2O5: 0-1%; and / or WO3: 0-2%, preferably WO3: 0-1%; and / or Ta2O5: 0-2%, preferably Ta2O5: 0-1%; and / or GeO2: 0-2%, preferably GeO2: 0-1%; and / or Rn2O: 0-2%, preferably Rn2O: 0-1%; and / or fining agent: 0-1%, preferably fining agent: 0-0.5%; and / or F: 0-1%, the Rn2O being one or more of Li2O, Na2O, K2O, the fining agent being one or more of Sb2O3, SnO2, CeO2.

[0022] Further, the glass material, wherein the components are expressed in percentage by weight, wherein: ZrO2: 0-5%, preferably ZrO2: 0.5-4%, more preferably ZrO2: 1-3%; and / or TiO2: 0-5%, preferably TiO2: 0.5-4%, more preferably TiO2: 1-3%; and / or La2O3: 0-7%, preferably La2O3: 0.5-5%, more preferably La2O3: 1-4%; and / or Y2O3: 0-7%, preferably Y2O3: 0.5-5%, more preferably Y2O3: 1-4.5%.

[0023] Further, the glass material, wherein the components do not contain: SrO; and / or do not contain Gd2O3; and / or do not contain Nb2O5; and / or do not contain WO3; and / or do not contain Ta2O5; and / or do not contain GeO2; and / or do not contain Li2O; and / or do not contain Na2O; and / or do not contain K2O; and / or do not contain P2O5; and / or do not contain Fe2O3.

[0024] Further, the glass material has a thermal expansion coefficient α 20 / 300℃ of 30 x 10 -7 / K to 45 x 10 -7 / K, preferably 32 x 10 -7 / K to 42 x 10 -7 / K, more preferably 35 x 10 -7 / K to 40 x 10 -7 / K; and / or an acid resistance stability D A of 2 or more, preferably 1; and / or a water resistance stability D W of 2 or more, preferably 1; and / or a refractive index n d of 1.51 to 1.57, preferably 1.52 to 1.56, more preferably 1.525 to 1.55; and / or an Abbe number v d of 54 to 60, preferably 55 to 59, more preferably 56 to 58.5; and / or a Young's modulus E of 65 GPa or more, preferably 67 GPa or more, more preferably 69 GPa or more, further preferably 71 GPa or more; and / or a transition temperature T g of 630 to 695°C, preferably 640 to 680°C, more preferably 655 to 675°C; and / or a density p of 2.80 g / cm 3 or more, preferably 2.70 g / cm 3 or more, more preferably 2.65 g / cm 3 or more; and / or a viscosity at 1400°C of 180 to 250 dPaS, preferably 190 to 230 dPaS, more preferably 205 to 225 dPaS; and / or a light transmittance T 550nmis 86.0% or more, preferably 88.0% or more, more preferably 90.0% or more; and / or the light transmittance T at 355 nm is 80.0% or more, preferably 82.0% or more, more preferably 84.0% or more; and / or the dielectric constant is 3.0 to 7.0, preferably 4.0 to 6.5, more preferably 4.5 to 6.0; and / or the surface resistance is 0.5 x 10 355nm Ω, preferably 0.8 x 10 12 Ω, more preferably 1.2 x 10 12 Ω, preferably 0.8 x 10 12 Ω, more preferably 1.2 x 10 12 Ω, more preferably 1.2 x 10 12 Ω, more preferably 1.2 x 10 12 Ω.

[0025] An encapsulating container made of the above glass material.

[0026] A glass member made of the above glass material.

[0027] An apparatus containing the above glass material, or containing the above glass member.

[0028] The present application has the following advantageous effects: by rational component design, the glass material obtained by the present application has a thermal expansion coefficient (α 20-300℃ ) of 30 x 10 -7 / K to 45 x 10 -7 / K, which has a suitable matching degree with resin materials, and is suitable for use in the semiconductor manufacturing field. DETAILED DESCRIPTION

[0029] Hereinafter, the embodiments of the glass material of the present application will be described in detail, but the present application is not limited to the following embodiments, and can be implemented by appropriate modifications within the scope of the object of the present application. Furthermore, regarding the repeatedly described parts, although there are appropriately omitted descriptions, the gist of the present application is not limited thereby. In the present specification, the glass material of the present application will be sometimes simply referred to as glass.

[0030] [GLASS MATERIAL]

[0031] Hereinafter, the range of each component of the glass material of the present application will be described. In the present application, unless otherwise specified, the content, the total content, and the entire content of each component are all expressed in terms of weight percentage (wt%), i.e., the content, the total content, and the entire content of each component are expressed in terms of weight percentage with respect to the total amount of glass material in terms of oxide composition. Here, the "oxide composition" refers to the case where the total amount of the oxide is taken as 100% when the oxide, the complex salt, the hydroxide, and the like, which are used as raw materials for the glass material composition of the present application, are decomposed and converted into the oxide upon melting.

[0032] Unless otherwise indicated herein, the numerical values listed in this application are inclusive of the endpoints and the range of values, and include all integers and fractions within that range, and are not limited to the specific values recited. The term "and / or" as used herein is inclusive, e.g., "A and / or B" means only A, only B, or both A and B.

[0033] <Essential and Optional Components>

[0034] SiO2is the main component of the glass skeleton, and has an important influence on the high temperature viscosity and the coefficient of thermal expansion of the glass. If the content of SiO2is less than 38%, the coefficient of thermal expansion of the glass increases, and it is difficult to achieve the desired coefficient of thermal expansion of the application, and the transition temperature and the resistance to devitrification decrease. If the content of SiO2exceeds 52%, the high temperature viscosity of the glass becomes large, which is not conducive to obtaining large-size high-quality glass. Therefore, in the present application, the content of SiO2is 38-52%, preferably 40-50%, and more preferably 42-48%.

[0035] Al2O3can improve the Young's modulus of the glass, which is conducive to improving the anti-warping and anti-cracking performance of the glass, and can also reduce the coefficient of thermal expansion of the glass and adjust the dielectric constant of the glass. In the present application, the content of Al2O3is more than 10.5% to achieve the above effects. However, if the content of Al2O3is too high, the melting property of the glass decreases, and the anti-crystallization performance decreases. Therefore, in the present application, the content of Al2O3is 10.5-22%, preferably 12-20%, and more preferably 13-18%.

[0036] In some embodiments, the ratio of the content of Al2O3to the content of SiO2, Al2O3 / SiO2, is controlled in the range of 0.22-0.55, which can improve the Young's modulus of the glass while achieving a suitable coefficient of thermal expansion. Therefore, it is preferred that Al2O3 / SiO2be 0.22-0.55, more preferably Al2O3 / SiO2be 0.25-0.50, and further preferably Al2O3 / SiO2be 0.28-0.44.

[0037] B2O3can improve the melting property and the resistance to devitrification of the glass. In the present application, the content of B2O3is more than 11% to achieve the above effects. However, if the content of B2O3exceeds 24%, it is difficult to achieve the desired range of the coefficient of thermal expansion of the glass. Therefore, in the present application, the content of B2O3is 11-24%, preferably 13-23%, and more preferably 16-21%.

[0038] In some embodiments, the ratio between the total content of Al2O3 and SiO2 (Al2O3+SiO2) and the content of B2O3 (Al2O3+SiO2) / B2O3 is controlled in the range of 2.3-6.0, so that the glass can have a better high-temperature viscosity and improved light transmittance. Therefore, (Al2O3+SiO2) / B2O3 is preferably 2.3-6.0, more preferably (Al2O3+SiO2) / B2O3 is 2.5-5.5, further preferably (Al2O3+SiO2) / B2O3 is 2.8-4.5, and more further preferably (Al2O3+SiO2) / B2O3 is 3.0-4.0.

[0039] ZrO2 can increase the refractive index and chemical stability of the glass, reduce the thermal expansion coefficient of the glass, and optimize the high-temperature viscosity. However, when the content of ZrO2 is too high, the resistance to devitrification of the glass decreases, and the ultraviolet light transmittance decreases. Therefore, the content of ZrO2 is 0-5%, preferably 0.5-4%, and more preferably 1-3%.

[0040] TiO2 can increase the refractive index and dispersion of the glass, and adjust the thermal expansion coefficient of the glass. However, when the content of TiO2 exceeds 5%, the light transmittance of the glass decreases rapidly, making the subsequent laser stripping difficult, and the thermal expansion coefficient of the glass is difficult to meet the design requirements. Therefore, the content of TiO2 is 0-5%, preferably 0.5-4%, and more preferably 1-3%.

[0041] In some embodiments, the total content of ZrO2 and TiO2 (ZrO2+TiO2) is controlled in the range of 0.5-8.5%, so that the glass can have desired optical constants, and it is easier to obtain desired thermal expansion coefficient and excellent light transmittance. Therefore, ZrO2+TiO2 is preferably 0.5-8.5%, more preferably ZrO2+TiO2 is 1-7%, and further preferably ZrO2+TiO2 is 1.5-6%.

[0042] ZnO can improve the melting property of the glass and adjust the high-temperature viscosity of the glass. However, when the content of ZnO is too high, the transition temperature of the glass decreases, the glass is not suitable for use in high-temperature environments, and the chemical stability of the glass decreases. Therefore, the content of ZnO is 0-5%, preferably greater than 0 but less than or equal to 4%, and more preferably 0.5-3%.

[0043] BaO can increase the refractive index of the glass, and adjust the surface resistance and high-temperature viscosity of the glass. When the content of BaO is less than 2%, the above effects are not obvious. When the content of BaO is more than 10%, the thermal expansion coefficient and density of the glass increase. Therefore, the content of BaO in the present application is greater than or equal to 2% but less than 10%, preferably 3-9%, and more preferably 4-8%.

[0044] In some embodiments, the ratio between the content of TiO2and the content of BaO, TiO2 / BaO, is controlled in the range of 0.02 to 1.5, and the glass has a good dielectric constant and high temperature viscosity. Therefore, it is preferred that TiO2 / BaO is 0.02 to 1.5, more preferably TiO2 / BaO is 0.05 to 1.0, further preferably TiO2 / BaO is 0.1 to 0.8, and more further preferably TiO2 / BaO is 0.15 to 0.5.

[0045] In some embodiments, the ratio between the content of Al2O3and the content of BaO, Al2O3 / BaO, is controlled in the range of 1.2 to 8.0, and the light transmittance of the glass is improved while the density of the glass is reduced. Therefore, it is preferred that Al2O3 / BaO is 1.2 to 8.0, more preferably Al2O3 / BaO is 1.5 to 6.0, further preferably Al2O3 / BaO is 1.8 to 5.0, and more further preferably Al2O3 / BaO is 2.0 to 3.8.

[0046] SrO can adjust the high temperature viscosity and melting property of the glass, but if its content is too high, the chemical stability of the glass is reduced. Therefore, the content of SrO is 0 to 5%, preferably 0 to 3%, and more preferably 0 to 1%. In some embodiments, it is further preferred that SrO is not contained.

[0047] CaO can improve the Young's modulus and melting property of the glass without significantly increasing the thermal expansion coefficient and the density, but if its content is too high, the anti-crystallization property of the glass is reduced. Therefore, the content of CaO is greater than 0 but less than or equal to 7%, preferably 0.5 to 6%, and more preferably 1 to 4%.

[0048] In some embodiments, the ratio between the total content of CaO and BaO, CaO+BaO, and the content of SiO2, (CaO+BaO) / SiO2, is controlled in the range of 0.06 to 0.40, and the glass has a high Young's modulus while the density of the glass is reduced. Therefore, it is preferred that (CaO+BaO) / SiO2is 0.06 to 0.40, more preferably (CaO+BaO) / SiO2is 0.10 to 0.35, and further preferably (CaO+BaO) / SiO2is 0.15 to 0.30.

[0049] MgO can improve the light transmittance of the glass, reduce the density of the glass, and make the glass have a suitable dielectric constant, but if its content is too high, the chemical stability of the glass is reduced. Therefore, the content of MgO in the present application is 0 to 6%, preferably 0.5 to 4%, and more preferably 1 to 3%.

[0050] In some embodiments, the ratio between the content of MgO and the total content of ZrO2 and TiO2, ZrO2+TiO2, MgO / (ZrO2+TiO2), is controlled in the range of 0.05-8.0, so that the glass can easily obtain a suitable transition temperature and high temperature viscosity. Therefore, it is preferred that MgO / (ZrO2+TiO2) is 0.05-8.0, more preferably MgO / (ZrO2+TiO2) is 0.1-5.0, further preferably MgO / (ZrO2+TiO2) is 0.2-3.0, and more further preferably MgO / (ZrO2+TiO2) is 0.3-2.0.

[0051] La2O3 can increase the refractive index and Abbe number of the glass, improve the chemical stability and devitrification resistance of the glass. However, if the content of La2O3 is too high, the dielectric constant of the glass is difficult to meet the design requirements, and the ultraviolet transmittance of the glass decreases. Therefore, the content of La2O3 is 0-7%, preferably 0.5-5%, and more preferably 1-4%.

[0052] Y2O3 can increase the refractive index and devitrification resistance of the glass, and increase the Young's modulus of the glass. However, if the content of Y2O3 is too high, the chemical stability and ultraviolet transmittance of the glass decrease. Therefore, the content of Y2O3 is 0-7%, preferably 0.5-5%, and more preferably 1-4.5%.

[0053] In some embodiments, the total content of La2O3 and Y2O3, La2O3+Y2O3, is controlled in the range of 0.5-9.5%, so that the glass can obtain a higher Young's modulus while preventing the ultraviolet transmittance of the glass from decreasing. Therefore, it is preferred that La2O3+Y2O3 is 0.5-9.5%, more preferably La2O3+Y2O3 is 1-8%, and further preferably La2O3+Y2O3 is 2-7%.

[0054] In some embodiments, the ratio between the total content of ZrO2 and TiO2, ZrO2+TiO2, and the total content of La2O3 and Y2O3, La2O3+Y2O3, (ZrO2+TiO2) / (La2O3+Y2O3), is controlled in the range of 0.1-8.0, so that the glass can obtain a better dielectric constant and surface resistance while improving the acid resistance of the glass. Therefore, it is preferred that (ZrO2+TiO2) / (La2O3+Y2O3) is 0.1-8.0, more preferably (ZrO2+TiO2) / (La2O3+Y2O3) is 0.2-5.0, further preferably (ZrO2+TiO2) / (La2O3+Y2O3) is 0.3-3.0, and more further preferably (ZrO2+TiO2) / (La2O3+Y2O3) is 0.6-2.0.

[0055] In some embodiments, the ratio between the total content of MgO, CaO, and BaO (MgO+CaO+BaO) and the total content of La2O3 and Y2O3 (La2O3+Y2O3) (MgO+CaO+BaO) / (La2O3+Y2O3) is controlled in the range of 0.5 to 8.0, so that the glass has a suitable high-temperature viscosity and a good dielectric constant. Therefore, it is preferred that (MgO+CaO+BaO) / (La2O3+Y2O3) is in the range of 0.5 to 8.0, more preferably (MgO+CaO+BaO) / (La2O3+Y2O3) is in the range of 0.8 to 6.0, further preferably (MgO+CaO+BaO) / (La2O3+Y2O3) is in the range of 1.0 to 5.0, and more further preferably (MgO+CaO+BaO) / (La2O3+Y2O3) is in the range of 1.5 to 3.5.

[0056] In some embodiments, the ratio between the total content of La2O3, Y2O3, and BaO (La2O3+Y2O3+BaO) and the content of SiO2 (La2O3+Y2O3+BaO) / SiO2 is controlled in the range of 0.08 to 0.45, so that the glass has a good surface resistance and water resistance. Therefore, it is preferred that (La2O3+Y2O3+BaO) / SiO2 is in the range of 0.08 to 0.45, more preferably (La2O3+Y2O3+BaO) / SiO2 is in the range of 0.10 to 0.40, and further preferably (La2O3+Y2O3+BaO) / SiO2 is in the range of 0.15 to 0.35.

[0057] Gd2O3 can improve the refractive index and chemical stability of the glass, but if its content is too high, the glass has poor resistance to devitrification and increased density. Therefore, the content of Gd2O3 is 0 to 5%, preferably 0 to 3%, and more preferably 0 to 1%. In some embodiments, it is further preferred that the glass does not contain Gd2O3.

[0058] Nb2O5 is a high-refractive high-dispersive component, which can improve the refractive index and resistance to devitrification of the glass and reduce the thermal expansion coefficient of the glass, but if its content is too high, the ultraviolet transmittance of the glass is reduced, and the thermal expansion coefficient of the glass is too low. Therefore, the content of Nb2O5 is 0 to 3%, preferably 0 to 2%, and more preferably 0 to 1%. In some embodiments, it is further preferred that the glass does not contain Nb2O5.

[0059] WO3 is a high-refractive high-dispersive component, which can improve the refractive index and resistance to devitrification of the glass, but if its content is too high, the visible light transmittance of the glass is reduced. Therefore, the content of WO3 is 0 to 3%, preferably 0 to 2%, and more preferably 0 to 1%. In some embodiments, it is further preferred that the glass does not contain WO3.

[0060] Ta2O5 can increase the refractive index of the glass, but its content is high, it can greatly increase the cost of the glass, and make the glass melting performance worse, the density increases. Therefore, the content of Ta2O5 is 0-3%, preferably 0-2%, more preferably 0-1%. In some embodiments, it is further preferred not to contain Ta2O5.

[0061] GeO2 can improve the refractive index and resistance to devitrification of the glass, and the presence of GeO2 in the glass is not conducive to the control of the cost of the glass raw materials, and its high content can reduce the chemical stability of the glass. Therefore, the content of GeO2 is 0-3%, preferably 0-2%, more preferably 0-1%. In some embodiments, it is further preferred not to contain GeO2.

[0062] Rn2O (Rn2O is one or more of Li2O, Na2O, K2O) can reduce the glass melting temperature and density, but its content is high, the transition temperature of the glass is reduced. On the other hand, the glass containing Rn2O, when used as a carrier, alkali metal ions Li + , Na + , K + will enter the single crystal silicon substrate, pollute the chip circuit. Therefore, the content of Rn2O in the present application is 0-3%, preferably 0-2%, more preferably 0-1%. In some embodiments, it is further preferred not to contain Li2O; and / or not to contain Na2O; and / or not to contain K2O.

[0063] In some embodiments, the ratio between the content of Rn2O and the content of Al2O3 is controlled to be less than 0.2, which can make the glass have a better thermal expansion coefficient while preventing the glass from deteriorating in Young's modulus. Therefore, it is preferred that Rn2O / Al2O3 be less than 0.2, more preferably Rn2O / Al2O3 be less than 0.15, further preferably Rn2O / Al2O3 be less than 0.1, and more preferably Rn2O / Al2O3 be less than 0.05.

[0064] In the present application, by containing 0-2% of one or more components of Sb2O3, SnO2, CeO2 as a fining agent, the fining effect of the glass is improved, preferably the content of the fining agent is 0-1%, more preferably 0-0.5%.

[0065] F (fluorine) can reduce the high temperature viscosity of the glass, making it easier for the glass to expel bubbles, in addition, a small amount of F can improve the ultraviolet transmittance of the glass, but if its content exceeds 2%, the volatilization of F increases sharply, the glass components become unstable, and the quality of the glass decreases. Therefore, the content of F is 0-2%, preferably 0-1%.

[0066] <Components not to be contained>

[0067] P2O5 is likely to generate micro-phase separation in the interior of the glass, which scatters a portion of short wavelength light, making it difficult to achieve the designed transmittance. Therefore, in some embodiments, it is preferable not to contain P2O5.

[0068] Fe2O3 causes the glass to be colored, which is not conducive to achieving excellent light transmittance of the glass. Therefore, in some embodiments, it is preferable not to contain Fe2O3.

[0069] In the glass of the present application, even if a small amount of oxides of transition metals such as V, Cr, Mn, Fe, Co, Ni, Cu, Ag, and Mo is contained alone or in combination, the glass will be colored, and absorption will occur at specific wavelengths in the visible light region, thereby reducing the property of improving visible light transmittance of the present application, and thus, for glasses in which transmittance at wavelengths in the visible light region is required, it is preferable to not actually contain the above components.

[0070] Oxides of Th, Cd, Tl, Os, Be, and Se have a tendency in recent years to be controlled for use as harmful chemical substances, and measures for environmental protection are necessary not only in the manufacturing process of the glass, but also in the processing process and disposal after productization. Therefore, in the case where the influence on the environment is valued, it is preferable to not actually contain them except for unavoidable mixing. Thus, the glass becomes practically free of substances that pollute the environment. Therefore, even without taking special measures for environmental countermeasures, the glass of the present application can be manufactured, processed, and disposed of.

[0071] In order to achieve environmental friendliness, the glass of the present application preferably does not contain As2O3 and PbO.

[0072] The "not containing" and "0%" described herein mean that the compound, molecule, or element, etc. is not intentionally added as a raw material to the glass of the present application, but some impurities or components that are not intentionally added can exist as raw materials and / or equipment for producing the glass, and can be contained in a small amount or trace amount in the final glass, and such cases are also within the scope of protection of the present application.

[0073] Next, the properties of the glass material of the present application will be described.

[0074] <Refractive index and Abbe number>

[0075] The refractive index (n d ) and Abbe number (ν d ) of the glass material were measured according to the method prescribed in the national standard "GB / T 7962.1-2010".

[0076] In some embodiments, the refractive index (n d) is 1.51, preferably 1.52, more preferably 1.525. In some embodiments, the glass material of the present application has a refractive index (n d ) of 1.57, preferably 1.56, more preferably 1.55.

[0077] In some embodiments, the glass material of the present application has an Abbe number (ν d ) of 54, preferably 55, more preferably 56. In some embodiments, the glass material of the present application has an Abbe number (ν d ) of 60, preferably 59, more preferably 58.5.

[0078] <COEFFICIENT OF THERMAL EXPANSION>

[0079] The coefficient of thermal expansion (a 20 / 300℃ ) of the glass material is tested according to the method specified in the national standard GB / T 7962.16-2010 at 20-300℃. The coefficient of thermal expansion of the glass material should not be too high or too low, and needs to be thermally matched with the packaging medium (such as resin material) to prevent the interface layer stress from rising due to the large difference in the coefficient of thermal expansion, which may cause cracking.

[0080] In some embodiments, the coefficient of thermal expansion (a 20 / 300℃ ) of the glass material of the present application is 30x10 -7 / K-45x10 -7 / K, preferably 32x10 -7 / K-42x10 -7 / K, more preferably 35x10 -7 / K-40x10 -7 / K.

[0081] <STABILITY AGAINST ACID ACTION>

[0082] The stability against acid action (D A ) (powder method) of the glass material is tested according to the method specified in the national standard GB / T 17129. In this specification, the stability against acid action is sometimes referred to simply as acid resistance or acid stability. In the application process of the glass material, the better the acid resistance, the less likely the glass is to fail in a strong acidic environment.

[0083] In some embodiments, the stability against acid action (D A ) of the glass material of the present application is class 2 or above, preferably class 1.

[0084] <STABILITY AGAINST WATER ACTION>

[0085] The stability against water action (D W) is tested according to the method specified in national standard GB / T 17129. The water resistance stability of the glass material is sometimes referred to as water resistance or water resistance stability in this specification. The better the water resistance of the glass material, the more the water erosion can be avoided in the application process. In particular, the glass material has excellent water resistance, which can avoid water erosion in the packaging process. If the water resistance of the glass is poor, it will cause the glass transmittance to decrease, reduce the debonding efficiency, and even cause the carrier plate to break and fail.

[0086] In some embodiments, the water resistance stability (D W ) of the glass material of the present application is more than class 2, preferably class 1.

[0087] <Young's modulus>

[0088] The Young's modulus (E) of the glass material is calculated according to the following formula by testing the longitudinal wave velocity and transverse wave velocity of the glass material by ultrasonic method.

[0089] The following formula is used to calculate:

[0090]

[0091] G = V S 2 ρ

[0092] In the formula:

[0093] E is the Young's modulus, Pa;

[0094] G is the shear modulus, Pa;

[0095] V T is the longitudinal wave velocity, m / s;

[0096] V S is the transverse wave velocity, m / s;

[0097] ρ is the density of the glass, g / cm 3 .

[0098] The greater the Young's modulus of the glass material, the less likely it is to deform in the application process. In particular, the greater the Young's modulus of the glass material, the less likely it is to warp and break in the stress link of the packaging process.

[0099] In some embodiments, the Young's modulus (E) of the glass material of the present application is more than 65 GPa, preferably more than 67 GPa, more preferably more than 69 GPa, and further preferably more than 71 GPa.

[0100] <Transition temperature>

[0101] The transition temperature (T g) according to the method specified in the national standard "GB / T 7962.16-2010".

[0102] If the transition temperature of the glass material is low, the heat resistance of the glass decreases, and softening deformation easily occurs during high-temperature processing. If the transition temperature of the glass is too high, it will cause design difficulties in the heat resistance of the precision annealing equipment, resulting in a decrease in the reliability of the precision annealing equipment. Especially when large-diameter glass blanks are precision annealed, they need to be kept at a temperature near the transition temperature for a long time. If the transition temperature is too high, the reliability of the precision annealing equipment will be greatly reduced.

[0103] In some embodiments, the transition temperature (T g ) of the glass material of the present application is above 630°C, preferably above 640°C, and more preferably above 655°C.

[0104] In some embodiments, the transition temperature (T g ) of the glass material of the present application is below 695°C, preferably below 680°C, and more preferably below 675°C.

[0105] <density>

[0106] The density (p) of the glass material is tested according to the method specified in the national standard "GB / T 7962.20-2010". The lower the density of the glass material, the more conducive to the lightweight of the application terminal. In particular, the lower the density of the glass material, the lower the weight that the support equipment in the packaging process bears, and the higher the precision and efficiency can be achieved.

[0107] In some embodiments, the density (p) of the glass material of the present application is 2.80 g / cm 3 , preferably 2.70 g / cm 3 , and more preferably 2.65 g / cm 3 .

[0108] <viscosity>

[0109] The viscosity of the glass material is tested by using a THETA Rheotronic II high-temperature viscometer using a rotational method, with the numerical unit being dPaS (poise), and the smaller the value, the smaller the viscosity. The glass material needs to have a suitable high-temperature viscosity to prevent the glass from producing stripes and / or crystallization during the forming process. The glass material of the present application has a suitable high-temperature viscosity, and can be used to manufacture large-diameter glass materials.

[0110] In some embodiments, the viscosity of the glass material of the present application at 1400°C is 250 dPaS or less, preferably 230 dPaS or less, and more preferably 225 dPaS or less.

[0111] In some embodiments, the glass material of the present application has a viscosity of 180 dPaS or more, preferably 190 dPaS or more, and more preferably 205 dPaS or more at 1400℃.

[0112] <Light transmittance>

[0113] The light transmittance of the glass material is tested according to the following method: the glass sample to be tested is processed to a certain thickness and the opposite surfaces are polished to be parallel, and the method specified in the national standard GB / T 7962.12-2010 is used for testing. In the present application, the glass material is processed to a thickness of 1±0.1 mm, and the light transmittance (T550) at 550 nm and the light transmittance (T355) at 355 nm are tested. The higher the light transmittance of the glass material at 550 nm, the higher the efficiency and accuracy of the optical detection equipment in the packaging process; the higher the light transmittance of the glass material at 355 nm, the higher the efficiency of debonding in the packaging process, and the smaller the risk of warping of the packaging wafer. 550nm ) and the light transmittance (T 355nm ) at 355 nm. The higher the light transmittance of the glass material at 550 nm, the higher the efficiency and accuracy of the optical detection equipment in the packaging process; the higher the light transmittance of the glass material at 355 nm, the higher the efficiency of debonding in the packaging process, and the smaller the risk of warping of the packaging wafer.

[0114] In some embodiments, the glass material of the present application has a light transmittance (T 550nm ) of 86.0% or more, preferably 88.0% or more, and more preferably 90.0% or more at 550 nm.

[0115] In some embodiments, the glass material of the present application has a light transmittance (T 355nm ) of 80.0% or more, preferably 82.0% or more, and more preferably 84.0% or more at 355 nm.

[0116] <Dielectric constant>

[0117] The dielectric constant of the glass material is tested according to the method specified in the national standard GB / T 7265.1-1987, and in the present application, the data under the condition of 1.8 GHz is tested.

[0118] In some embodiments, the lower limit of the dielectric constant of the glass material of the present application is 3.0, preferably the lower limit is 4.0, and more preferably the lower limit is 4.5.

[0119] In some embodiments, the upper limit of the dielectric constant of the glass material of the present application is 7.0, preferably the upper limit is 6.5, and more preferably the upper limit is 6.0.

[0120] <Surface resistance>

[0121] The surface resistance of the glass material refers to the quotient of the direct current voltage applied to two electrodes on a surface of the glass and the steady-state current flowing through the two electrodes after a certain time, and the unit is ohm (Ω), which is tested by a volume surface resistivity tester.

[0122] In some embodiments, the lower limit of the surface resistance of the glass material of the present application is 0.5 x 10 12 Ω, preferably the lower limit is 0.8 x 10 12 Ω, and more preferably the lower limit is 1.2 x 10 12 Ω.

[0123] In some embodiments, the upper limit of the surface resistance of the glass material of the present application is 3.0 x 10 12 Ω, preferably the upper limit is 2.8 x 10 12 Ω, and more preferably the upper limit is 2.5 x 10 12 Ω.

[0124] The glass material of the present application can be used to manufacture packaging carriers (substrate materials) for semiconductor processes due to its excellent properties described above.

[0125] The glass material of the present application can be used to manufacture various glass elements, and can provide various glass elements such as lenses, prisms, etc. with high optical value. As examples of lenses, various lenses such as concave meniscus lenses, convex meniscus lenses, lenticular lenses, double concave lenses, plano-convex lenses, and plano-concave lenses can be mentioned, wherein the lens surface is spherical or aspherical.

[0126] The glass material of the present application, and the glass elements can be used to manufacture various devices (devices described in the present application include instruments, apparatuses, etc.), such as imaging devices, sensors, microscopes, medical technology, digital projection, communication, optical communication technology / information transmission, optics / illumination in the automotive field, photolithography technology, excimer lasers, wafers, computer chips, and integrated circuits and electronic devices including such circuits and chips, or for video recording devices and apparatuses used in the field of vehicle-mounted devices, monitoring and security.

[0127] [Manufacturing method]

[0128] The manufacturing method of the glass material of the present application is as follows: the glass material of the present application uses carbonates, nitrates, sulfates, hydroxides, oxides, fluorides, etc. as raw materials, which are mixed according to conventional methods, and the mixed charge is then put into a smelting furnace at 1300-1500°C for smelting, and after clarification, stirring and homogenization, a homogeneous molten glass without bubbles and undissolved substances is obtained, which is cast in a mold and annealed to form the glass material. Those skilled in the art can appropriately select the raw materials, process methods and process parameters according to actual needs.

[0129] [Examples]

[0130] In order to further clearly illustrate and describe the technical solutions of the present application, the following non-limiting examples are provided.

[0131] Glass materials having the compositions shown in Tables 1 to 3 were obtained by the above-described method for producing glass materials. In addition, the properties of each glass were measured by the test methods described in the present application, and the results of the measurements are shown in Tables 1 to 3.

[0132] Table 1.

[0133]

[0134]

[0135] Table 2.

[0136]

[0137]

[0138] Table 3.

[0139]

[0140]

Claims

1. Glass material, characterized in that Its components, expressed in weight percentage, include: SiO2: 38-52%; B2O3: 11-24%; Al2O3: 10.5-22%; BaO: greater than or equal to 2% but less than 10%; CaO: greater than 0 but less than or equal to 7%; ZrO2+TiO2: 0.5-8.5%; La2O3+Y2O3: 0.5-9.5%.

2. The glass material according to claim 1, wherein Its components, expressed in weight percentage, further contain: ZnO: 0-5%; and / or SrO: 0-5%; and / or MgO: 0-6%; and / or Gd2O3: 0-5%; and / or Nb2O5: 0-3%; and / or WO3: 0-3%; and / or Ta2O5: 0-3%; and / or GeO2: 0-3%; and / or Rn2O: 0-3%; and / or clarifier: 0-2%; and / or F: 0-2%, wherein the Rn2O is one or more of Li2O, Na2O, and K2O, and the clarifier is one or more of Sb2O3, SnO2, and CeO2.

3. Glass material, characterized in that Its components, expressed in weight percentage, are SiO2: 38-52%; B2O3: 11-24%; Al2O3: 10.5-22%; BaO: greater than or equal to 2% but less than 10%; CaO: greater than 0 but less than or equal to 7%; ZrO2+TiO2: 0.5-8.5%; La2O3+Y2O3: 0.5-9.5%; ZnO: 0-5%; SrO: 0-5%; The invention comprises the following components: MgO: 0-6%; Gd2O3: 0-5%; Nb2O5: 0-3%; WO3: 0-3%; Ta2O5: 0-3%; GeO2: 0-3%; Rn2O: 0-3%; clarifier: 0-2%; and F: 0-2%. The Rn2O is one or more of Li2O, Na2O, and K2O, and the clarifier is one or more of Sb2O3, SnO2, and CeO2.

4. The glass material according to any one of claims 1 to 3, characterized in that The components are expressed in weight percentage, wherein: Al2O3 / SiO2 is 0.22-0.55, preferably Al2O3 / SiO2 is 0.25-0.50, and more preferably Al2O3 / SiO2 is 0.28-0.

44.

5. The glass material according to any one of claims 1 to 3, characterized in that Its components are expressed in weight percentage, wherein: (Al2O3+SiO2) / B2O3 is 2.3~6.0, preferably (Al2O3+SiO2) / B2O3 is 2.5~5.5, more preferably (Al2O3+SiO2) / B2O3 is 2.8~4.5, and further preferably (Al2O3+SiO2) / B2O3 is 3.0~4.

0.

6. The glass material according to any one of claims 1 to 3, characterized in that Its components are expressed in weight percentage, wherein: (ZrO2+TiO2) / (La2O3+Y2O3) is 0.1~8.0, preferably (ZrO2+TiO2) / (La2O3+Y2O3) is 0.2~5.0, more preferably (ZrO2+TiO2) / (La2O3+Y2O3) is 0.3~3.0, and further preferably (ZrO2+TiO2) / (La2O3+Y2O3) is 0.6~2.

0.

7. The glass material according to any one of claims 1 to 3, characterized in that Its components are expressed in weight percentage, wherein: (MgO+CaO+BaO) / (La2O3+Y2O3) is 0.5~8.0, preferably (MgO+CaO+BaO) / (La2O3+Y2O3) is 0.8~6.0, more preferably (MgO+CaO+BaO) / (La2O3+Y2O3) is 1.0~5.0, and further preferably (MgO+CaO+BaO) / (La2O3+Y2O3) is 1.5~3.

5.

8. The glass material according to any one of claims 1 to 3, characterized in that Its components are expressed in weight percentage, wherein: (CaO+BaO) / SiO2 is 0.06-0.40, preferably (CaO+BaO) / SiO2 is 0.10-0.35, and more preferably (CaO+BaO) / SiO2 is 0.15-0.

30.

9. The glass material according to any one of claims 1 to 3, characterized in that Its components are expressed in weight percentage, wherein: (La2O3+Y2O3+BaO) / SiO2 is 0.08-0.45, preferably (La2O3+Y2O3+BaO) / SiO2 is 0.10-0.40, and more preferably (La2O3+Y2O3+BaO) / SiO2 is 0.15-0.

35.

10. The glass material according to any one of claims 1 to 3, characterized in that Its components are expressed in weight percentage, wherein: MgO / (ZrO2+TiO2) is 0.05~8.0, preferably MgO / (ZrO2+TiO2) is 0.1~5.0, more preferably MgO / (ZrO2+TiO2) is 0.2~3.0, and further preferably MgO / (ZrO2+TiO2) is 0.3~2.

0.

11. The glass material according to any one of claims 1 to 3, characterized in that Its components are expressed in weight percentage, wherein: TiO2 / BaO is 0.02-1.5, preferably TiO2 / BaO is 0.05-1.0, more preferably TiO2 / BaO is 0.1-0.8, and further preferably TiO2 / BaO is 0.15-0.

5.

12. The glass material according to any one of claims 1 to 3, characterized in that The components are expressed in weight percentage, wherein: Al2O3 / BaO is 1.2-8.0, preferably Al2O3 / BaO is 1.5-6.0, more preferably Al2O3 / BaO is 1.8-5.0, and further preferably Al2O3 / BaO is 2.0-3.

8.

13. The glass material according to any one of claims 1 to 3, characterized in that Its components are expressed in weight percentage, wherein: Rn2O / Al2O3 is less than 0.2, preferably Rn2O / Al2O3 is less than 0.15, more preferably Rn2O / Al2O3 is less than 0.1, and further preferably Rn2O / Al2O3 is less than 0.05, and the Rn2O is one or more of Li2O, Na2O, and K2O.

14. The glass material according to any one of claims 1 to 3, characterized in that The components are expressed in weight percentage, wherein: SiO2: 40-50%, preferably SiO2: 42-48%; and / or B2O3: 13-23%, preferably B2O3: 16-21%; and / or Al2O3: 12-20%, preferably Al2O3: 13-18%; and / or BaO: 3-9%, preferably BaO: 4-8%; and / or CaO: 0.5-6%, preferably CaO: 1-4%; and / or ZrO2+TiO2: 1-7%, preferably ZrO2+TiO2: 1.5-6%; and / or La2O3+Y2O3: 1-8%, preferably La2O3+Y2O3: 2-7%; and / or ZnO: greater than 0 but less than or equal to 4%, preferably ZnO: 0.5-3%; and / or SrO: 0-3%, preferably SrO: 0-1%; and / or MgO: 0.5-4%, preferably MgO: 1-3%; and / or Gd2O3: 0-3%, preferably Gd2O3: 0-1%; and / or Nb2O5: 0-2%, preferably Nb2O5: 0-1%; and / or WO3: 0-2%, preferably WO3: 0-1%; and / or Ta2O5: 0-2%, preferably Ta2O5: 0-1%; and / or GeO2: 0-2%, preferably GeO2: 0-1%; and / or Rn2O: 0-2%, preferably Rn2O: 0-1%; and / or clarifier: 0-1%, preferably clarifier: 0-0.5%; and / or F: 0-1%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, and the clarifier is one or more of Sb2O3, SnO2, and CeO2.

15. The glass material according to any one of claims 1 to 3, characterized in that Its components are expressed in weight percentage, among which: ZrO2: 0~5%, preferably ZrO2: 0.5~4%, more preferably ZrO2: 1~3%; and / or TiO2: 0~5%, preferably TiO2: 0.5~4%, more preferably TiO2: 1~3%; and / or La2O3: 0~7%, preferably La2O3: 0.5~5%, more preferably La2O3: 1~4%; and / or Y2O3: 0~7%, preferably Y2O3: 0.5~5%, more preferably Y2O3: 1~4.5%.

16. The glass material according to any one of claims 1 to 3, characterized in that Its components do not contain SrO; and / or do not contain Gd2O3; and / or do not contain Nb2O5; and / or do not contain WO3; and / or do not contain Ta2O5; and / or do not contain GeO2; and / or do not contain Li2O; and / or do not contain Na2O; and / or do not contain K2O; and / or do not contain P2O5; and / or do not contain Fe2O3.

17. The glass material according to any one of claims 1 to 3, characterized in that The thermal expansion coefficient of the glass material α 20 / 300℃ 30×10 -7 / K~45×10 -7 / K, preferably 32×10 -7 / K~42×10 -7 / K, more preferably 35×10 -7 / K~40×10 -7 / K; and / or acid resistance stability D A 2 or more, preferably 1; and / or water resistance stability D W Two or more types, preferably one type; and / or a refractive index n d 1.51 to 1.57, preferably 1.52 to 1.56, more preferably 1.525 to 1.55; and / or Abbe number ν d is 54 to 60, preferably 55 to 59, more preferably 56 to 58.5; and / or Young's modulus E is 65 GPa or more, preferably 67 GPa or more, more preferably 69 GPa or more, further preferably 71 GPa or more; and / or transition temperature T g 630-695°C, preferably 640-680°C, more preferably 655-675°C; and / or density ρ is 2.80 g / cm 3 Below, preferably 2.70g / cm 3 Below, more preferably 2.65g / cm 3 and / or a viscosity of 180 to 250 dPaS at 1400°C, preferably 190 to 230 dPaS, more preferably 205 to 225 dPaS; and / or a light transmittance of 550 nm, T 550nm 86.0% or more, preferably 88.0% or more, more preferably 90.0% or more; and / or the light transmittance T at 355 nm 355nm 80.0% or more, preferably 82.0% or more, more preferably 84.0% or more; and / or a dielectric constant of 3.0 to 7.0, preferably 4.0 to 6.5, more preferably 4.5 to 6.0; and / or a surface resistivity of 0.5×10 12 ~3.0×10 12 Ω, preferably 0.8×10 12 ~2.8×10 12 Ω, more preferably 1.2×10 12 ~2.5×10 12 Ω.

18. A packaging carrier, characterized in that Made of the glass material according to any one of claims 1 to 17.

19. Glass element, characterized in that Made of the glass material according to any one of claims 1 to 17.

20. A device, characterized in that A glass material according to any one of claims 1 to 17, or a glass element according to claim 19.

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