Electrochemical metal 3D printing device based on meniscus confinement electrodeposition

Abstract

The invention discloses an electrochemical metal 3D printing device based on meniscus confinement electrodeposition, a micro pipette is a metal salt electrolyte supply part and is fixed at the bottom of a micro pipette holder, an anode bar is arranged at the top of the micro pipette holder, the lower end of the anode bar is connected with a platinum anode wire, and the platinum anode wire is arranged in the micro pipette; the micro pipette holder is detachably connected with a mechanical clamping jaw at the tail end of the six-degree-of-freedom mechanical arm; the cathode substrate is fixed on the surface of a right-angle adapter plate connected with the three-axis displacement platform; the anode bar is electrically connected with the anode of the power supply, and the cathode substrate and the cathode of the power supply are electrically connected with two electrodes of the ampere meter respectively. The computer adjusts the angle formed by the axis of the micro pipette and the normal of the plane of the cathode substrate in real time through a preset program; a meniscus is formed between the tip of the micro pipette and the cathode substrate, metal ions in the electrolyte are reduced into elemental metal to be attached to the cathode substrate under the driving of voltage, and rapid manufacturing of a complex three-dimensional metal structure can be completed.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of electrochemical additive manufacturing, and in particular, relates to an electrochemical metal 3D printing device based on meniscus-confined electrodeposition. BACKGROUND

[0002] With the rapid development of 3D chip packaging and semiconductor field, how to efficiently and low-costly produce metal microstructure is the focus of researchers. At present, the microfabrication technology of metal can be divided into subtractive manufacturing and additive manufacturing. The traditional subtractive manufacturing technology includes micro-milling, micro-turning, micro-drilling, etc. The disadvantages of these technologies are that a large amount of raw materials are wasted, and the degree of freedom of manufacturing is low and the cost is high. Additive manufacturing can be divided into high-temperature additive manufacturing and low-temperature additive manufacturing. High-temperature additive manufacturing technologies include selective laser melting (SLM) and electron beam melting (EBM). The metal microstructure produced by high-temperature additive manufacturing inevitably introduces thermal stress, a large number of voids and cracks, and poor forming precision. Low-temperature additive manufacturing is to realize the layer-by-layer stacking of metal by using electrochemical method. According to whether a mask is needed, it can be divided into mask-based electrodeposition and mask-free electrodeposition. Mask-based electrodeposition includes through-mask electroplating and instant mask (IM) electroplating, etc. However, the mask-based electrodeposition has the disadvantages of high cost of mask production and low degree of freedom of forming. Mask-free electrodeposition includes local electrodeposition (LECD), jet ECD, meniscus-confined electrodeposition (MCED), etc. Since there is no constraint of mask, mask-free electrodeposition has the advantages of high degree of freedom of forming, high precision and low cost, and is an important method for efficient and low-cost production of metal microstructure in the future.

[0003] Local electrodeposition (LECD) is to immerse both anode and cathode in electrolyte, and to generate localized electric field at the tip of anode and induce electrodeposition at cathode. Due to the diffusion of electrolyte, the metal microstructure produced by this method will lead to thickening of the deposited structure and poor processing precision. Moreover, the workpiece to be processed needs to withstand the immersion of electrolyte, and the application scenarios are relatively limited. Jet ECD is to use jet anode electrolyte jet as anode tool to selectively deposit metal on cathode. However, it is difficult to maintain stable flow field under high-speed jet, which leads to poor electrodeposition forming precision. Moreover, the cathode substrate is partially or completely covered by flowing electrolyte, which cannot produce high-precision metal microstructure.

[0004] The core mechanism of meniscus confined electrodeposition (MCED) is to use the stable meniscus formed between the micron / nanometer anode tip and the cathode substrate as a micro electrolysis reaction cell to strictly limit the metal deposition process in the contact area of the meniscus and the substrate. The forming resolution is directly controlled by the inner diameter of the anode tip, and the reaction only occurs in the contact area of the meniscus, avoiding the large-area erosion of the workpiece to be processed by the electrolyte, greatly expanding the applicability of the micro metal structure in precision devices. In addition, due to the characteristics of no need for inert gas protection and simple equipment configuration, MCED significantly reduces the process cost, and the "deposition forming" characteristic saves the post-processing process, providing a solution for low-cost and high-precision preparation of micro metal structures.

[0005] In the prior art, the equipment based on the meniscus confined electrodeposition (MCED) technology generally uses a three-degree-of-freedom translation clamping device to fix a micro pipette. The inherent limitation of the flat nozzle structure design causes the inclination angle of the meniscus to be not too large, otherwise the meniscus will be pulled off. The existing three-degree-of-freedom system cannot adjust the size of the angle formed by the axis of the micro pipette and the normal line of the substrate plane in real time during the deposition process, so that it is difficult to process overhanging structures and three-dimensional spiral structures. SUMMARY

[0006] The purpose of the present application is to provide an electrochemical metal 3D printing device based on meniscus confined electrodeposition to solve the technical problems of insufficient degrees of freedom and poor space forming capability of the current electrochemical 3D printing device.

[0007] To solve the above technical problems, the technical scheme adopted by the present application is: An electrochemical metal 3D printing device based on meniscus confined electrodeposition, comprising a micro pipette, a micro pipette holder, a six-degree-of-freedom mechanical arm, a cathode substrate, a three-axis displacement platform and a power supply. The micro pipette is a supply component of metal salt electrolyte. The micro pipette is fixed to the bottom of the micro pipette holder. The top of the micro pipette holder is provided with an anode rod. The lower end of the anode rod is connected to a platinum anode wire. The platinum anode wire is placed in the interior of the micro pipette. The micro pipette holder is detachably connected to the mechanical clamping jaw at the end of the six-degree-of-freedom mechanical arm. The cathode substrate is fixed on the surface of the right-angle adapter plate connected to the three-axis displacement platform. The six-degree-of-freedom mechanical arm is connected to a computer signal. The computer adjusts the angle formed by the axis of the micro pipette and the normal line of the cathode substrate plane in real time through a preset program. The anode rod is electrically connected to the positive electrode of the power supply. The cathode substrate and the negative electrode of the power supply are respectively electrically connected to the two poles of the ammeter. The tip of the micro pipette and the cathode substrate form a meniscus. Under the drive of the voltage, the metal ions in the electrolyte are reduced to elemental metal and attached to the cathode substrate.

[0008] Further, the six-degree-of-freedom mechanical arm comprises, from the bottom end to the terminal end, a base rotating shaft, a shoulder joint, an elbow joint, a wrist rotating shaft, a wrist pitch shaft and a wrist roll shaft, and the mechanical gripper is connected with the wrist roll shaft.

[0009] Further, the three-axis displacement platform comprises three linear displacement platforms perpendicular to each other on the x-axis, the y-axis and the z-axis, and the three-axis displacement platform is connected with the computer signal.

[0010] Further, the cathode substrate side is provided with a microscope.

[0011] Further, a channel for inputting electrolyte is arranged in the micro pipette holder, and a liquid inlet identical to the channel is arranged on the sidewall of the micro pipette holder, and the liquid inlet is connected with a liquid storage tank for storing electrolyte through a conduit.

[0012] Further, the liquid storage tank is connected with a gas pressure instrument through a conduit.

[0013] Further, the power supply operates in a constant current mode, and outputs a wide-range adjustable current of 1 pA to 1 A.

[0014] Further, a locking handle for adjusting the opening size of the mechanical gripper is arranged on the mechanical gripper.

[0015] Further, the bottom of the six-degree-of-freedom mechanical arm and the three-axis displacement platform are arranged on the surface of the optical breadboard.

[0016] Further, the optical breadboard is fixedly arranged on a horizontal support table.

[0017] According to the technical scheme provided in the application, the six-degree-of-freedom mechanical arm and the three-axis displacement platform are used in cooperation, and the computer adjusts the angle formed by the micro pipette axis and the normal line of the cathode substrate plane in real time through a preset program, so that the problem of insufficient freedom and weak 3D space forming of the traditional electrochemical 3D printer is solved, and the preparation of complex metal microstructures such as overhanging structures, inclined structures and spiral structures can be realized, and the advantages of micron-level resolution, low process cost and no need for post-processing are achieved.

[0018] In addition, the application can select different electrolytes for electrodeposition according to the type of metal to be deposited, without the need for heating metal powder as in the traditional metal 3D printing device, thereby saving energy, reducing damage to the printing substrate caused by high temperature, and improving the printing quality and resolution.

[0019] The electrochemical metal 3D printing device based on meniscus limited electrodeposition provided in the application is suitable for the fields of 3D chip interconnection, MEMS, medical sensor electrodes and the like. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings, which are incorporated herein and constitute part of this application, illustrate exemplary embodiments of the present application and, together with the general description given above and the detailed description given below, serve to explain the present application.

[0021] Figure 1 is a schematic diagram of the overall structure of the electrochemical metal 3D printing device described in the present application; Figure 2 is a schematic diagram of the structure of the six-degree-of-freedom mechanical arm and mechanical gripper described in the present application; Figure 3 is a schematic diagram of the structure of the three-axis displacement platform and right-angle adapter plate described in the present application; Figure 4 is a schematic diagram of the structure of the connection of the liquid storage tank, air pressure gauge and micro pipette holder described in the present application; Figure 5 is a schematic diagram of the structure of the micro pipette holder and micro pipette described in the present application.

[0022] In the figure, 1 is a six-degree-of-freedom mechanical arm, 2 is a micro pipette, 3 is a three-axis displacement platform, 4 is a cathode substrate, 5 is a right-angle adapter plate, 6 is an optical breadboard, 7 is an ammeter, 8 is a liquid storage tank, 9 is a horizontal support table, 10 is a power supply, 11 is a computer, 12 is an air pressure gauge, 13 is a microscope, 14 is a micro pipette holder, 15 is a short catheter, 16 is a long catheter, and 17 is an electrolyte; 101 is a base rotation axis, 102 is a shoulder joint, 103 is an elbow joint, 104 is a wrist rotation axis, 105 is a wrist pitch axis, 106 is a wrist roll axis, 107 is a large arm, 108 is a small arm, 109 is a mechanical gripper, 110 is a thread, 111 is a locking handle, 112 is a motor, 113 is a gear, 114 is a connecting plate, 115 is a driven gear, 116 is a driving gear, 117 is a first gripper, and 118 is a second gripper; 301 is an X-axis linear displacement platform, 302 is a Y-axis linear displacement platform, and 303 is a Z-axis linear displacement platform; 1401 is a liquid outlet, 1402 is an anode rod, 1403 is a platinum anode wire, 1404 is a quartz sealing lock head, 1405 is a rubber sealing ring, and 1406 is a quartz sealing nut. DETAILED DESCRIPTION

[0023] In order for those skilled in the art to better understand the present application, the present application is further clearly and completely explained below in combination with the reference drawings and in combination with the embodiments. It should be noted that the features in the embodiments and examples in the present application can be combined with each other without conflict.

[0024] As Figure 1As shown, a typical embodiment of the present application provides an electrochemical metal 3D printing device based on meniscus confined electrodeposition, mainly including a micro pipette 2, a micro pipette holder 14, a six-degree-of-freedom mechanical arm 1, a cathode substrate 4, a three-axis displacement platform 3 and a power supply 10.

[0025] The micro pipette 2 is a supply component of metal salt electrolyte, the micro pipette 2 is fixed at the bottom of the micro pipette holder 14, the top of the micro pipette holder 14 is provided with an anode rod 1402, the lower end of the anode rod 1402 is connected with a platinum anode wire 1403, and the platinum anode wire 1403 is arranged in the micro pipette 2.

[0026] According to the opening size of the micro pipette, the platinum anode wire 1403 with a proper diameter is selected, and the diameter of the platinum anode wire 1403 connected with the lower end of the anode rod 1402 is ≤100 μm, and the platinum anode wire 1403 is arranged in the electrolyte 17 in the micro pipette 2 to conduct current.

[0027] The micro pipette holder 14 is detachably connected with the mechanical gripper 109 at the end of the six-degree-of-freedom mechanical arm 1, and the cathode substrate 4 is fixed on the surface of the right-angle adapter plate 5 connected with the three-axis displacement platform 3; the six-degree-of-freedom mechanical arm 1 is signal connected with the computer 11, and the computer 11 adjusts the angle formed by the axis of the micro pipette 2 and the normal line of the plane of the cathode substrate 4 in real time through a preset program, and the adjustment range of the angle is 0°-90°.

[0028] The anode rod 1402 is electrically connected with the positive electrode of the power supply 10, and the cathode substrate 4 and the negative electrode of the power supply are respectively electrically connected with the two poles of the ammeter 7.

[0029] The power supply 10 is operated in a constant current mode, and outputs a wide-range adjustable current of 1 pA to 1 A.

[0030] According to the above embodiment, the micro pipette 2 is filled with metal salt electrolyte, the meniscus formed between the tip of the micro pipette 2 and the cathode substrate 4 is used as a micro electrolysis reaction cell, the metal deposition process is strictly limited in the contact area of the meniscus and the cathode substrate 4, and under the driving of the voltage, the metal ions in the electrolyte are reduced to elemental metal and attached to the cathode substrate 4. By adjusting the angle formed by the axis of the micro pipette 2 and the normal line of the plane of the cathode substrate 4, the electrodeposition of complex metal structures can be realized.

[0031] In a specific embodiment, the six-degree-of-freedom mechanical arm 1 includes a base rotating shaft 101, a shoulder joint 102, an elbow joint 103, a wrist rotating shaft 104, a wrist pitch shaft 105 and a wrist roll shaft 106 arranged in sequence from the bottom end to the end.

[0032] As shown in Figure 2 The six-degree-of-freedom robot arm 1 is assembled by six high-precision motors 112, and the rotation is realized by driving the gear 113 by the motor 112. The gear is composed of a driving gear 116 and a driven gear 115. Taking the base rotation shaft 101 as an example, the driving motor 112 is installed on the upper part of the robot arm base, and the rotation is realized by the meshing of the driving gear 116 fixed on the output shaft end of the motor 112 and the coaxially arranged driven gear 115; on the surface of the driven gear 115, a connecting plate 114 perpendicular to the plane thereof is fixed, which is used to install and support the shoulder joint 102 and the whole arm body structure above. Similarly, the shoulder joint 102, the elbow joint 103, the wrist rotation shaft 104 and the wrist pitch shaft 105 all adopt similar driving connection structures, and the driving motors 112 of each are installed on the outer surface of the previous arm body, and the driving gears 116 of the motors are meshed with the driven gears 115 fixed at the joint of the next arm body, so as to realize the accurate rotation of the corresponding joint. Unlike the gear transmission structure of the above-mentioned joints, the driving motor output shaft of the wrist roll shaft 106 is directly connected with the end mechanical gripper (109) through the threaded connection of the thread 110.

[0033] Among them, the base rotation shaft 101 is used for overall horizontal rotation, and the rotation range is ±360°; the shoulder joint 102 is used for adjusting the up-down swing of the large arm 107, and the rotation range is ±120°; the elbow joint 103 is used for adjusting the forward-backward stretching of the small arm 108, and the rotation range is ±120°; the wrist rotation shaft 104 is used for the horizontal torsion of the end, and the rotation range is ±360°; the wrist pitch shaft 105 is used for the up-down inclination of the end, and the rotation range is ±120°; the wrist roll shaft 106 is used for rotating the mechanical gripper 109 along the central axis thereof, and the rotation range is ±360°.

[0034] As shown in Figure 2 The wrist roll shaft 106 is connected with the mechanical gripper 109 through the thread 110, and the mechanical gripper 109 is composed of the first gripper 117 and the second gripper 118 which can be opened and closed relative to each other, and is used to fix the micropipette holder 14. The mechanical gripper 109 is provided with an L-shaped locking handle 111, the threaded rod part of the locking handle 111 is threadedly connected with the first gripper 117 of the mechanical gripper 109, and the end of the threaded rod part of the locking handle 111 abuts against the second gripper 118. The locking handle 111 is used to adjust the opening size of the mechanical gripper 109, and in the embodiment, the diameter range of the object gripped by the mechanical gripper 109 is 1-3 cm.

[0035] In a specific embodiment, the three-axis displacement platform includes three linear displacement platforms perpendicular to each other on the x-axis, y-axis and z-axis, and the three-axis displacement platform is signal connected with the computer 11.

[0036] like Figure 3 As shown, the three linear displacement platforms are X-axis linear displacement platform 301, Y-axis linear displacement platform 302, and Z-axis linear displacement platform 303. Each linear displacement platform has a travel of 1.5 cm and a repeatability of ±1 μm. A right-angle adapter plate 5 is mounted on the side of the Z-axis linear displacement platform 303 for placing the cathode substrate 4.

[0037] A microscope 13 is provided on the side of the cathode substrate 4 for observing the meniscus.

[0038] The computer 11 in the present invention is used to control the movement of the three-axis displacement platform 3 and the six-degree-of-freedom robotic arm 1. In addition, it also serves as a display of the microscope 13 to monitor the stability of the meniscus in real time.

[0039] In a preferred embodiment, a channel for inputting electrolyte is provided inside the micropipette holder 14, and a liquid inlet 1401 identical to the channel is provided on the side wall of the micropipette holder 14. The liquid inlet 1401 is connected to a liquid storage tank 8 for storing electrolyte through a conduit, and the liquid storage tank 8 is connected to the air pressure gauge 12 through a conduit.

[0040] Specifically, if Figure 4 As shown, the barometer 12 is connected to the short tube 15 of the liquid reservoir 8, which is connected to the micropipette holder 14 via a long tube 16. The long tube 16 must be completely immersed in the electrolyte 17. By controlling the output pressure of the barometer 12, the electrolyte 17 is squeezed into the long tube 16, then reaches the liquid inlet 1401 of the micropipette holder, and finally enters the micropipette 2.

[0041] like Figure 5 As shown, the anode rod 1402 is fixed to the top opening of the micropipette holder 14 through a quartz sealing lock 1404, the micropipette 2 is inserted from the bottom of the micropipette holder 14, the outer wall of the micropipette 2 is covered with a rubber sealing ring 1405, and the micropipette 2 is fixed by a quartz sealing nut 1406.

[0042] In a relatively specific embodiment, the bottoms of the six-degree-of-freedom robotic arm 1 and the three-axis displacement platform 3 are both set on the surface of the optical breadboard 6, and the optical breadboard 6 is fixed on the horizontal support platform 9. In addition, the liquid storage tank 8, the horizontal support platform 9, the power supply, the computer 11, the barometer 12 and the microscope 13 are also set on the horizontal support platform 9.

[0043] The scope of protection claimed by the present invention is not limited to the above specific embodiments. For those skilled in the art, the present invention may have various variations and modifications. Any modifications, improvements and equivalent substitutions made within the concept and principle of the present invention should be included in the scope of protection of the present invention.

Claims

1. An electrochemical metal 3D printing device based on meniscus confined electrodeposition, characterized in that: It includes a micropipette, a micropipette holder, a six-degree-of-freedom robotic arm, a cathode substrate, a three-axis displacement platform, and a power supply; The micropipette is a supply component for the metal salt electrolyte. The micropipette is fixed to the bottom of the micropipette holder. The top of the micropipette holder is provided with an anode rod. The lower end of the anode rod is connected to a platinum anode wire, which is placed inside the micropipette. The micropipette holder is detachably connected to the mechanical gripper at the end of a six-degree-of-freedom robotic arm, and the cathode base is fixed to the surface of a right-angle adapter plate connected to a three-axis displacement platform. The six-degree-of-freedom robotic arm is connected to a computer signal, and the computer adjusts the angle formed by the micropipette axis and the normal line of the cathode base plane in real time through a preset program. The anode rod is electrically connected to the positive pole of the power supply, and the cathode base and the negative pole of the power supply are electrically connected to the two poles of the ammeter respectively; a curved liquid surface is formed between the tip of the micropipette and the cathode base. Driven by the voltage, the metal ions in the electrolyte are reduced to elemental metal and attached to the cathode base.

2. The electrochemical metal 3D printing device based on meniscus confined electrodeposition according to claim 1, characterized in that: The six-degree-of-freedom robotic arm includes a base rotation axis, a shoulder joint, an elbow joint, a wrist rotation axis, a wrist pitch axis and a wrist rolling axis arranged in sequence from the bottom end to the end, and the mechanical gripper is connected to the wrist rolling axis.

3. The electrochemical metal 3D printing device based on meniscus confined electrodeposition according to claim 1 or 2, characterized in that: The three-axis displacement platform includes three mutually perpendicular linear displacement platforms on the x-axis, y-axis and z-axis respectively, and the three-axis displacement platform is connected to the computer signal.

4. The electrochemical metal 3D printing device based on meniscus confined electrodeposition according to claim 3, characterized in that: A microscope is set on the side of the cathode substrate.

5. The electrochemical metal 3D printing device based on meniscus confined electrodeposition according to claim 1 or 4, characterized in that: A channel for inputting electrolyte is provided inside the micropipette holder, and a liquid inlet identical to the channel is provided on the side wall of the micropipette holder. The liquid inlet is connected to a liquid storage tank for storing electrolyte through a conduit.

6. The electrochemical metal 3D printing device based on meniscus confined electrodeposition according to claim 5, characterized in that: The liquid storage tank is connected to the air pressure gauge through a conduit.

7. The electrochemical metal 3D printing device based on meniscus confined electrodeposition according to claim 1 or 6, characterized in that: The power supply operates in constant current mode and outputs a widely adjustable current from 1 pA to 1 A.

8. The electrochemical metal 3D printing device based on meniscus confined electrodeposition according to claim 7, characterized in that: The mechanical clamp is provided with a locking handle for adjusting the opening size of the mechanical clamp.

9. The electrochemical metal 3D printing device based on meniscus confined electrodeposition according to claim 1 or 8, characterized in that: The bottoms of the six-degree-of-freedom robotic arm and the three-axis displacement platform are both set on the surface of the optical breadboard.

10. The electrochemical metal 3D printing device based on meniscus confined electrodeposition according to claim 9, characterized in that: The optical breadboard is fixedly arranged on a horizontal support platform.

Images