System for storing energy by utilizing medium and vaporizing and filling silane

Abstract

The invention discloses a system for storing energy by using a medium and vaporizing and filling silane, which comprises a vaporizer communicated with liquid silane input and heat exchange medium input and used for vaporizing liquid silane; the filling compressor is communicated with the vaporizer and is used for compressing gaseous silane; the precooler is communicated with the vaporizer and the filling compressor and is used for reducing the temperature of the gaseous silane; and the heat exchanger is communicated with the precooler and is used for heating a heat exchange medium. According to the system for storing energy by utilizing the medium and vaporizing and filling the silane, the heat exchange medium is used as a heat medium to vaporize the silane instead of using an electric heater to vaporize the silane, so that a large amount of power consumption is saved, and potential safety hazards caused by the electric heater are avoided; and then external heat sources such as solar energy and compressor exhaust are used for heating the heat exchange medium for heat energy storage, and heat consumption is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of silane vaporization, and particularly to a system for silane vaporization and filling by using medium energy storage. BACKGROUND

[0002] Silane gas is a special electronic gas, which is widely used in many fields such as photovoltaic, integrated circuit, display panel, solar cell, thin film transistor, and advanced ceramic. Silane is usually transported by using a tube bundle vehicle, a Y bottle, a B bottle, or other storage devices.

[0003] During the silane filling process, silane vaporization occurs when silane changes from a liquid phase to a vapor phase. Usually, an electric heater is used for silane vaporization. However, the use of such an electric device consumes a large amount of electricity during operation, and the large current and voltage lead to serious safety hazards. In particular, it is inconvenient to use in a silane storage tank area. SUMMARY

[0004] In view of the above problems of the existing system for silane vaporization and filling by using medium energy storage, the present application is proposed.

[0005] Therefore, the present application aims to provide a system for silane vaporization and filling by using medium energy storage, which aims to reduce the power consumption and heat energy consumption of silane vaporization.

[0006] To solve the above technical problems, the present application provides the following technical solution: a vaporizer in communication with a liquid silane input and a heat exchange medium input, for vaporizing liquid silane; a filling compressor in communication with the vaporizer, for compressing gaseous silane; a pre-cooler in communication with the vaporizer and the filling compressor, for reducing the temperature of gaseous silane; and a heat exchanger in communication with the pre-cooler, for heating the heat exchange medium.

[0007] As a preferred solution of the system for silane vaporization and filling by using medium energy storage, the vaporizer is provided with a first silane inlet and a first medium inlet for inputting liquid silane and heat exchange medium, respectively, and the vaporizer is provided with a first silane outlet and a first medium outlet for discharging vaporized silane and heat exchanged heat exchange medium, respectively.

[0008] As a preferred solution of the system for silane vaporization and filling by using medium energy storage, the gaseous silane discharged from the first silane outlet is input into the filling compressor, the output end of the filling compressor is in communication with the input end of the pre-cooler, and the heat exchange medium discharged from the first medium outlet is input into the pre-cooler.

[0009] As a preferred scheme of the system for filling and charging by using medium energy storage and silane vaporization according to the present application, the pre-cooler is provided with a second silane inlet and a second medium inlet for inputting compressed gaseous silane and primary heat-exchanged heat-exchange medium respectively, and is provided with a second silane outlet and a second medium outlet for discharging temperature-reduced gaseous silane and secondary heat-exchanged heat-exchange medium respectively.

[0010] As a preferred scheme of the system for filling and charging by using medium energy storage and silane vaporization according to the present application, the second medium outlet discharges heat-exchanged heat-exchange medium into the heat exchanger, and the heat exchanger is used for heating the heat-exchanged heat-exchange medium by an external heat source.

[0011] As a preferred scheme of the system for filling and charging by using medium energy storage and silane vaporization according to the present application, the system further comprises a silane storage tank for storing liquid silane and a medium storage tank for storing heat-exchanged heat-exchange medium.

[0012] As a preferred scheme of the system for filling and charging by using medium energy storage and silane vaporization according to the present application, the silane discharged from the vaporizer can be sent back to the silane storage tank for collecting silane in the pipeline.

[0013] As a preferred scheme of the system for filling and charging by using medium energy storage and silane vaporization according to the present application, the heat-exchanged heat-exchange medium discharged from the heat exchanger after being heated is input into the medium storage tank for storing the heat-exchanged heat-exchange medium with heat.

[0014] As a preferred scheme of the system for filling and charging by using medium energy storage and silane vaporization according to the present application, the heat source of the heat exchanger includes, but is not limited to, solar energy, charging compressor hot exhaust gas and electric heater.

[0015] As a preferred scheme of the system for filling and charging by using medium energy storage and silane vaporization according to the present application, the heat-exchanged heat-exchange medium includes, but is not limited to, ethylene glycol, propylene glycol, glycerol, salt water, pure water, heat-conducting oil and silicone oil.

[0016] The present application has the following beneficial effects: by using heat-exchanged heat-exchange medium as a heat medium for silane vaporization, the use of electric heater for silane vaporization is avoided, a large amount of power consumption is saved, and the safety hazard caused by the electric heater is avoided; then, the heat-exchanged heat-exchange medium is heated by using external heat sources such as solar energy and compressor exhaust gas for heat energy storage, heat consumption is reduced, and energy consumption is further reduced; the heat-exchanged heat-exchange medium is used for temperature reduction of silane at the outlet of a silane filling and charging compressor, the heat-exchanged heat-exchange medium is also heated, energy consumption is saved, and high-temperature and high-pressure silane gas is also stored after being cooled. The traditional heat medium is combined with new energy; the heat-exchanged heat-exchange medium simultaneously functions as a heat medium, a refrigerant and a heat storage medium in the system; energy saving and emission reduction are achieved in the process of silane vaporization and filling; the traditional electric heating is replaced, and the safety performance in the process of silane vaporization is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description only constitute some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0018] Figure 1 The overall schematic diagram of the system for utilizing medium energy storage and silane vaporization filling according to the present application.

[0019] Figure 2 The schematic diagram of utilizing filling compressor waste heat of the system for utilizing medium energy storage and silane vaporization filling according to the present application.

[0020] Figure 3 The schematic diagram of utilizing ethylene glycol as heat exchange medium of the system for utilizing medium energy storage and silane vaporization filling according to the present application. DETAILED DESCRIPTION

[0021] In order to make the above objectives, features and advantages of the present application more apparent, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0022] In the following description, a large number of specific details are set forth in order to facilitate a thorough understanding of the present application, but the present application can also be implemented in other ways different from those described herein, and those skilled in the art can make similar generalizations without departing from the connotation of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0023] Secondly, the "one embodiment" or "embodiment" referred to herein means that the specific features, structures or characteristics can be included in at least one implementation of the present application. "In one embodiment" appearing in different places in the specification does not mean the same embodiment, nor is it an independent or alternative embodiment that excludes other embodiments.

[0024] Thirdly, the present application is described in detail in combination with the schematic diagram, and in the detailed description of the embodiments of the present application, the cross-sectional view of the device structure is partially enlarged without the general proportion for the convenience of description, and the schematic diagram is only an example, which should not limit the scope of protection of the present application herein. In addition, the three-dimensional spatial dimensions of length, width and depth should be included in actual manufacture.

[0025] Embodiment 1

[0026] Reference Figures 1-3For the first embodiment of the present application, a system for filling with medium energy storage and silane vaporization is provided, which comprises a vaporizer 100, which is connected with liquid silane input and heat exchange medium input, for vaporizing liquid silane; a filling compressor 200, which is connected with the vaporizer 100, for compressing gaseous silane; a precooler 300, which is connected with the vaporizer 100 and the filling compressor 200, for reducing the temperature of gaseous silane; and a heat exchanger 400, which is connected with the precooler 300, for heating heat exchange medium.

[0027] Further, a silane storage tank 500 for storing liquid silane and a medium storage tank 600 for storing heat exchange medium are included. The silane vaporized in the vaporizer 100 can be returned to the silane storage tank 500. Since the temperature and pressure of the gaseous silane vaporized without filling are high, a return pipeline is arranged at the output end of the vaporizer 100 to collect the remaining silane in the pipeline when filling is not performed. A heat exchange medium circulating pump is further arranged at the output end of the medium storage tank 600. The initial temperature of the liquid silane is low, and the initial heat exchange medium has heat capable of vaporizing the liquid silane.

[0028] The vaporizer 100 is used for heat exchange between liquid silane and heat exchange medium, which is used as coolant and heat medium of the silane filling system, and the heat exchange medium is also used as a heat storage medium to store heat energy. The medium storage tank 600 stores heat energy while storing heat exchange medium.

[0029] During filling, the liquid silane in the silane storage tank 500 is discharged from the bottom of the silane storage tank 500 into the vaporizer 100, and the heat exchange medium in the medium storage tank 600 is introduced into the vaporizer 100 from another path. In the vaporizer 100, the liquid silane is heat-exchanged with the heat exchange medium. Since the heat exchange medium has self-contained heat energy in the storage tank, the heat exchange medium heats the liquid silane to vaporization in the vaporizer 100. At this time, part of the liquid silane is changed into gaseous silane and then sent to the filling compressor 200, and the temperature of the heat exchange medium is reduced and delivered to the precooler 300. The gaseous silane entering the filling compressor 200 is changed into high-pressure and high-temperature gas after being pressurized. The high-pressure and high-temperature silane gas enters the precooler 300 and is heat-exchanged with the heat exchange medium discharged from the vaporizer 100. This heat exchange lowers the temperature of the gaseous silane and raises the temperature of the heat exchange medium. The gaseous silane after being cooled is filled into a movable silane filling container, such as a tube bundle vehicle, a Y bottle, a B bottle, etc. The heat exchange medium is discharged from the precooler 300 after being heat-exchanged with the high-temperature and high-pressure gaseous silane and is heated in the heat exchanger 400. The heat exchanger 400 further heats the heat exchange medium by using external heat, and the heat exchange medium after being heated is stored in the medium storage tank 600.

[0030] Embodiment 2

[0031] Reference Figure 2For the second embodiment of the present application, which is different from the first embodiment, the vaporizer 100 is provided with a first silane inlet 101 and a first medium inlet 102 for inputting liquid silane and heat exchange medium respectively, and is provided with a first silane outlet 103 and a first medium outlet 104 for discharging vaporized silane and heat exchanged heat exchange medium respectively. The first silane inlet 101 is in communication with the discharge outlet of the silane storage tank 500 for inputting the liquid silane stored in the silane storage tank 500 into the vaporizer 100. The first medium inlet 102 is in communication with the discharge outlet of the medium storage tank 600 for inputting the heat exchange medium into the vaporizer 100. The gaseous silane discharged from the first silane outlet 103 is input into the filling compressor 200, and the output end of the filling compressor 200 is in communication with the input end of the pre-cooler 300. The heat exchanged heat exchange medium is input into the pre-cooler 300. A reflux pipeline is further provided on the pipeline connecting the first silane outlet 103 and the filling compressor 200, and the other end of the reflux pipeline is in communication with the silane storage tank 500. By providing the reflux pipeline, the remaining gaseous silane in the pipeline can be transported back to the silane storage tank 500 when the filling is stopped, preventing damage to the pipeline caused by the vaporized silane.

[0032] Further, the high-temperature exhaust end of the filling compressor 200 is provided with a waste heat utilization pipeline, and the output end of the waste heat utilization pipeline is in communication with the heat source input end of the heat exchanger 400. When the filling compressor 200 performs filling compression on the gaseous silane, the heat emitted is input into the heat exchanger 400 through the waste heat utilization pipeline, and in the heat exchanger 400, the heat is used as a heat source to heat the heat exchange medium discharged from the pre-cooler 300, thereby recycling the waste heat of the filling compressor 200 and further saving energy consumption.

[0033] The pre-cooler 300 is provided with a second silane inlet 301 and a second medium inlet 302 for inputting compressed gaseous silane and primary heat exchanged heat exchange medium respectively, and is provided with a second silane outlet 303 and a second medium outlet 304 for discharging cooled gaseous silane and secondary heat exchanged heat exchange medium respectively. The second silane inlet 301 is in communication with the output port of the filling compressor 200 for sending the compressed high-temperature and high-pressure silane into the pre-cooler 300 for cooling, and the second medium inlet 302 is in communication with the first medium outlet 104 of the vaporizer 100 for inputting the cooled heat exchange medium in the vaporizer 100 to exchange heat and cool the high-temperature and high-pressure silane.

[0034] The remaining structure is the same as that of embodiment 1.

[0035] Embodiment 3

[0036] Reference Figure 3For the third embodiment of the present application, which is different from the second embodiment, the second medium outlet 304 discharges the heat exchange medium into the heat exchanger 400, which is used to heat the heat exchange medium by an external heat source.

[0037] The heat exchanger 400 heats the heat exchange medium and outputs it into the medium storage tank 600, which stores the heat exchange medium with heat.

[0038] The heat source of the heat exchanger 400 includes but is not limited to solar energy, hot exhaust gas of the filling compressor 200, an electric heater, or other heat sources. In the production process, the waste heat of other equipment can be used to preliminarily heat the heat exchange medium, improve energy utilization, and reduce waste heat emission. The heat exchange medium includes but is not limited to ethylene glycol, propylene glycol, glycerol, brine, pure water, heat-conducting oil, and silicone oil.

[0039] Table 1 below exemplarily shows the data table of the corresponding ethylene glycol generation temperature change when the ethylene glycol is used as the heat exchange medium, the initial ethylene glycol flow is 10000, the silane gasification amount is 2000, the initial silane pressure is 2.0 MPa, and the silane temperature at the outlet of the pre-cooler is changed.

[0040] The temperature of the silane discharged from the silane storage tank 500 is -34.5℃, the temperature of the ethylene glycol discharged from the medium storage tank 600 is 0℃, after the vaporization of the vaporizer 100, the pressure of the silane is 2.0 MPa, and the temperature is still -34.5℃, the ethylene glycol is cooled to -18.3℃ after heat exchange, then the silane enters the filling compressor 200 for compression, the pressure of the compressed silane rises to 12 MPa, and the temperature rises to 98.95℃, then the silane and the ethylene glycol enter the pre-cooler 300 for cooling, according to the demand, the silane can be discharged at different temperatures of 50℃, 40℃, 30℃, 20℃, etc., according to the different selection of the silane temperature, the ethylene glycol discharged from the pre-cooler 300 is -13.5℃, -12.5℃, -11.5℃, -10.6℃, and the ethylene glycol discharged from the pre-cooler 300 is heated to 0℃ in the heat exchanger 400 and then enters the medium storage tank 600 for storage.

[0041] Table 1

[0042]

[0043] Reference Figure 3The ethylene glycol at -30℃ to 30℃ is stored in the ethylene glycol storage tank, and this temperature range is selected to adapt to the silane vaporization demand under different working conditions and realize flexible storage of thermal energy. When the silane vaporization amount is small, ethylene glycol at a lower temperature (such as -10℃ to 10℃) can be used to release less heat to meet the vaporization; when the vaporization amount is large, ethylene glycol at a higher temperature (such as 10℃ to 30℃) is needed to release more heat to ensure that the liquid silane is fully gasified. At the same time, the large temperature range also reserves the adjustment space for subsequent heat exchange with the heat source such as solar energy, which is convenient for supplementing thermal energy. The ethylene glycol at the bottom of the tank is delivered to the vaporizer 100 by the ethylene glycol circulating pump to exchange heat with the silane. The temperature of the ethylene glycol can be reduced from 30℃ to 20℃, or from 20℃ to 10℃, or from 10℃ to 0℃, or from 0℃ to -10℃, etc. Similarly, according to the different initial ethylene glycol temperature selected, the temperature reduced during heat exchange is also different, and the specific heat exchange temperature difference is adjusted according to the silane vaporization amount. The vaporizer 100 is provided with a bypass in parallel form to balance the flow stability of the ethylene glycol at the pump outlet. The ethylene glycol at the outlet of the vaporizer 100 is first exchanged with the high-temperature and high-pressure silane at the outlet of the filling compressor 200 through the pre-cooler 300, and then enters the heat exchanger 400 to absorb solar energy for thermal energy storage. The temperature of the high-temperature and high-pressure silane at the outlet of the filling compressor 200 is usually between 40℃ and 120℃, which is the natural result of silane compression. However, too high a temperature may exceed the tolerance temperature of the storage equipment (such as a tube bundle vehicle or a Y bottle), affecting the service life of the equipment and reducing the chemical stability of the silane gas at high temperature, increasing the safety risk. While the range of 40℃ to 120℃ provides a target for the temperature reduction design of the pre-cooler (the silane needs to be reduced from this range to a safe filling temperature), the temperature of the ethylene glycol is always controlled below 40℃ to achieve the temperature reduction of the high-temperature and high-pressure silane gas at the outlet, ensuring that the pre-cooler can effectively reduce the temperature of the high-temperature silane. Since the temperature of the silane at the outlet of the filling compressor is 40℃ to 120℃, when the temperature of the ethylene glycol is lower than 40℃, there is a temperature difference between the two (the temperature of the silane > the temperature of the ethylene glycol), and heat will be transferred from the silane gas to the ethylene glycol to achieve silane temperature reduction. If the temperature of the ethylene glycol is ≥40℃, the temperature difference is reduced or even disappears, and the heat of the silane cannot be effectively absorbed, resulting in insufficient silane temperature reduction and affecting the subsequent filling safety. At the same time, the temperature of the ethylene glycol is increased after absorbing the heat of the silane (but it may still be lower than 40℃ or slightly exceed it), and this part of the heat can be recovered for subsequent silane vaporization, improving the energy utilization rate. At the same time, the ethylene glycol absorbs part of the heat for silane vaporization, if the heat is insufficient, that is, the temperature does not reach the initial temperature required by the vaporizer, such as lower than -30℃ or not returned to the storage temperature range, the heat exchanger 400 is continued to be used to exchange heat with solar energy to absorb the heat of solar energy to heat to the storage temperature.

[0044] The ethylene glycol circulating pump is set as a variable frequency pump, and can be adjusted as a fixed frequency pump considering the cost. The outlet pressure of the pump can be designed to be between 0.4-1.0 MPa according to the operation requirement. The flow of the ethylene glycol circulating pump is designed according to the vaporization capacity of the silane in the silane vaporizer 100. The temperature of the ethylene glycol is increased after heat exchange, and the designed temperature increase difference can be 2℃, 3℃, 5℃, 8℃, 10℃, 12℃, etc. The silane pre-cooler 300 is designed by the circulating flow of the ethylene glycol, and meets the need of cooling the silane at the outlet of the silane filling compressor 200. The pressure of the silane storage tank 500 is controlled to be between 0.9-1.8 MPa. The silane is discharged from the bottom of the tank, and the temperature is usually between -60℃ and -35℃. An adjusting valve (valves such as adjusting valve, hand valve, etc. are not marked in the figure, and can be marked at different positions according to the need to realize control) is arranged in the pipeline to adjust the flow of the silane discharged from the silane storage tank 500.

[0045] When the silane filling stops, the vaporizer 100 and the pre-cooler 300 do not work, but the heat exchanger 400 can continue to work to absorb the heat energy of the solar energy, and increase the temperature of the ethylene glycol to store the heat energy.

[0046] The rest of the structure is the same as that of example 2.

[0047] Example 4

[0048] Referring to Table 2, when other different heat exchange media are used, the initial ethylene glycol flow is 10000, the silane vaporization amount is 2000, the initial silane pressure is 2.0 MPa, and the silane temperature at the outlet of the pre-cooler is 30℃ unchanged, the corresponding data table of the temperature change is shown when the different heat exchange media are changed.

[0049]

[0050]

[0051] In Table 2, the temperature of each node in the process of cooling the final temperature of the silane to 30℃ is shown when the initial temperature of four different heat exchange media is 10℃ or 20℃. For example, when 40% propylene glycol is used as the heat exchange medium, the initial temperature in the medium storage tank 600 is 10℃, the 40% propylene glycol exchanges heat with the -34.5℃ silane in the vaporizer 100, and the temperature of the 40% propylene glycol is reduced to -6℃ after heat exchange. Then, the 40% propylene glycol exchanges heat with the 98.95℃ silane compressed by the filling compressor 200 in the pre-cooler 300, and the temperature of the silane is reduced to 30℃, while the temperature of the 40% propylene glycol is reduced to -0.1℃. Then, the 30℃ silane is discharged for storage, and the 40% propylene glycol is heated to the initial temperature by the heat exchanger 400 for storage and circulation.

[0052] Similarly, when using synthetic heat-conducting oil, 50% glycerol aqueous solution, 30% calcium chloride aqueous solution, the heat exchange time of each heat exchange medium is different due to different heat exchange medium, different specific heat capacity, different initial temperature, etc., so as to control the temperature of silane after each heat exchange. In order to control the temperature of silane, the temperature of different heat exchange medium after each heat exchange will be different, but the principle is the same.

[0053] It is important to note that the construction and arrangement of the application shown in the various exemplary embodiments is illustrative only. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications are possible (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, values of parameters, mounting arrangements, use of materials, colors, orientations, etc.) without materially departing from the novel teachings and advantages of the subject matter described in the application. For example, elements shown as integrally formed can be constructed of multiple parts or elements, the position of elements can be reversed or otherwise varied, and the nature or number of elements or positions can be altered or varied. Accordingly, all such variations are intended to be included within the scope of the present application. The order or sequence of any process or method steps can be varied or re-sequenced without materially affecting the application. Accordingly, the application is not limited to a particular embodiment, but extends to the subject matter of the appended claims and their equivalents.

[0054] Furthermore, in an effort to provide a concise description of exemplary embodiments, all features of an actual implementation can not be described (i.e., those unrelated to the presently contemplated best mode of carrying out the application, or those unrelated to enabling the claimed application).

[0055] It should be noted that the above-mentioned embodiments are only used to illustrate the technical solutions of the present application but not to limit the present application, and although the present application is described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or equivalently replaced without departing from the spirit and scope of the present application, and all should be included in the scope of the claims of the present application.

Claims

1. A system utilizing dielectric energy storage and silane vaporization filling, characterized in that: include, a vaporizer (100), in communication with the liquid silane input and the heat exchange medium input, for vaporizing the liquid silane; a charging compressor (200), connected to the vaporizer (100), for compressing gaseous silane; a precooler (300), connected to the vaporizer (100) and the charging compressor (200), for reducing the temperature of the gaseous silane; The heat exchanger (400) is in communication with the precooler (300) and is used to heat the heat exchange medium.

2. The system utilizing dielectric energy storage and silane vaporization filling according to claim 1, characterized in that: The vaporizer (100) is provided with a first silane inlet (101) and a first medium inlet (102), which are respectively used to input liquid silane and heat exchange medium. The vaporizer (100) is provided with a first silane outlet (103) and a first medium outlet (104), which are respectively used to discharge vaporized silane and the heat exchange medium after heat exchange.

3. The system utilizing dielectric energy storage and silane vaporization filling according to claim 2, characterized in that: The gaseous silane discharged from the first silane outlet (103) is input into the filling compressor (200), the output end of the filling compressor (200) is connected to the input end of the precooler (300), and the heat exchange medium discharged from the first medium outlet (104) is input into the precooler (300).

4. The system utilizing dielectric energy storage and silane vaporization filling according to claim 3, characterized in that: The precooler (300) is provided with a second silane inlet (301) and a second medium inlet (302), which are respectively used to input compressed gaseous silane and the heat exchange medium after the initial heat exchange. The precooler (300) is provided with a second silane outlet (303) and a second medium outlet (304), which are respectively used to discharge the cooled gaseous silane and the heat exchange medium after the second heat exchange.

5. The system utilizing dielectric energy storage and silane vaporization filling according to claim 4, characterized in that: The heat exchange medium discharged from the second medium outlet (304) is input into the heat exchanger (400), and the heat exchanger (400) is used to heat the heat exchange medium through an external heat source.

6. The system utilizing dielectric energy storage and silane vaporization filling according to any one of claims 1 to 5, characterized in that: Also included is a silane storage tank (500) for storing liquid silane; The medium storage tank (600) is used to store heat exchange medium.

7. The system utilizing dielectric energy storage and silane vaporization filling according to claim 6, characterized in that: The silane output from the vaporizer (100) can be sent back to the silane storage tank (500) for collecting the silane in the pipeline.

8. The system utilizing dielectric energy storage and silane vaporization filling according to claim 7, characterized in that: The heat exchange medium output after being heated by the heat exchanger (400) is input into the medium storage tank (600) to store the heat exchange medium with heat.

9. The system utilizing dielectric energy storage and silane vaporization filling according to claim 8, characterized in that: The heat source of the heat exchanger (400) includes but is not limited to solar energy, hot exhaust gas from the charging compressor (200), and an electric heater.

10. The system utilizing dielectric energy storage and silane vaporization filling according to claim 9, characterized in that: The heat exchange medium includes but is not limited to ethylene glycol, propylene glycol, glycerin, brine, pure water, thermal oil, and silicone oil.

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