A method and apparatus for measuring the orthogonality of an orthogonal rotating shaft system

Abstract

The application discloses a kind of method and device for measuring the orthogonality of orthogonal rotating shaft system, belong to orthogonal rotating shaft system detection technical field, the orthogonal rotating shaft system includes first rotating shaft system and second rotating shaft system, the method includes: using CCD double-axis autocollimator and respectively with first rotating shaft system and second rotating shaft system fixed cubic reference prism and double-sided optical flat crystal are carried out shaft inclination angle rotation error measurement and attitude fine adjustment;Using second rotating shaft system passes through double-sided optical flat crystal and sets up reference cross line XY;By adjusting the installation position of two rotating shaft systems, the cross line of the reflected light beam of cubic reference prism is coincided with reference cross line XY;Rotate first rotating shaft system, record angle deviation value and calculate the orthogonality value of two rotating shaft systems.The application eliminates the reference drift error of two autocollimators aiming at each other, eliminates the interference of shaft system itself rotation error to orthogonality measurement, improves the precision and reliability of shaft system orthogonality measurement as a whole.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of orthogonal rotating shaft system detection, and more particularly to a method and device for measuring the orthogonality of an orthogonal rotating shaft system. BACKGROUND

[0002] Under the background of continuous deep space exploration of the universe, space laser communication technology is developing rapidly. With the advantages of high speed, large bandwidth and strong anti-interference ability, it has been widely and critically applied in satellite communication, deep space exploration, interstellar network construction and other fields. The market demand for space laser communication related equipment is increasing. However, due to the complex technology and precise manufacturing requirements, the production capacity of related products in this field has always been difficult to meet the huge market demand.

[0003] In the batch production process of the laser pointing mechanism (CPA), the orthogonality test is a crucial process. The orthogonality error of the laser pointing mechanism will directly and significantly affect the pointing accuracy and high-stability continuous aiming capability of the product, and thus the quality and reliability of space laser communication.

[0004] The existing orthogonality test method for the orthogonal rotating shaft system such as CPA is to establish the reference by means of two CCD double-axis autocollimators aiming at each other. The specific operation process is as follows: first, adjust the attitude of the shaft so that the inclination angle mirror of the measured shaft axis line and the reference optical axis formed by the mutual aiming of the two autocollimators are coincided, and record the position reading at this time as 0° position; turn the measured shaft by 180°, and read the corresponding position value again; the orthogonality error between the two shafts can be obtained by calculating the difference between the two relative position readings. The orthogonality test method has the following defects: 1. It relies on two autocollimators to "aim at each other" to establish the reference optical axis, and the reference stability is easily affected by equipment installation error, alignment deviation, environmental vibration, etc., which easily introduces reference offset error; 2. It does not consider the shaft system rotation error, that is, when the measured shaft is turned by 180°, the measurement result will be affected by the shaft inclination rotation error; 3. There is a single-point measurement limitation, that is, the orthogonality is calculated only through the 0° and 180° positions, which cannot fully reflect the error distribution of the shaft system in the whole rotation range, so that the accuracy and reliability of the whole measurement are poor. SUMMARY

[0005] In view of the problems of the existing orthogonality test method for the orthogonal rotating shaft system that is easy to introduce reference offset error, does not consider the shaft system rotation error and has single-point measurement limitation, the present application proposes a method for measuring the orthogonality of an orthogonal rotating shaft system to solve the problems of the prior art. In addition, the present application also proposes a device for implementing the orthogonality test method.

[0006] According to one aspect of the present invention, a method for measuring the orthogonality of an orthogonal rotation axis system is provided, the orthogonal rotation axis system comprising at least a first rotation axis system and a second rotation axis system orthogonal to it, the method comprising the following steps: S1: emitting a laser beam towards a reflecting surface of a cubic reference prism fixedly mounted to the first rotation axis system using a first CCD biaxial autocollimator, and rotating the first rotation axis system to measure the tilt angle of the first rotation axis system. The rotation error value is determined, and the tilt angle is finely adjusted by fine-tuning the attitude of the cubic reference prism. The rotational error value is less than a specific value, thereby determining the position of the mechanical reference axis of the first rotational axis system and the position of the cubic reference prism. One reflecting surface of the cubic reference prism is parallel to the mechanical reference axis of the second rotational axis system and is located near the end of the first CCD dual-axis autocollimator. The geometric center of the cubic reference prism is located at the intersection of the mechanical reference axis of the first rotational axis system and the mechanical reference axis of the second rotational axis system. S2: Using the second CCD dual-axis autocollimator, a laser beam is emitted towards the first reflecting surface of the double-sided optical flat fixed to the second rotational axis system. The second rotational axis system is rotated to measure its tilt angle. The rotation error value was determined, and the tilt angle was adjusted by fine-tuning the orientation of the double-sided optical flat. The rotational error value is less than the specified value, thereby determining the mechanical reference axis of the second rotational axis system and the position of the double-sided optical flat, wherein the first reflecting surface of the double-sided optical flat is near the second CCD dual-axis autocollimator; S3: Block the second reflecting surface of the double-sided optical flat at the far end of the second CCD dual-axis autocollimator, and use the second CCD dual-axis autocollimator to emit a laser beam towards the first reflecting surface of the double-sided optical flat. Using the reflected beam of the double-sided optical flat as a reference, perform relative measurement zeroing on the CCD dual-axis autocollimator and set the reference crosshairs XY; S4: Remove the blockage, use the second CCD dual-axis autocollimator to emit a laser beam towards the first reflecting surface of the double-sided optical flat, and pass through... S5: Adjust the installation positions of the first and second rotary axis systems so that the crosshairs X′Y′ of the reflected beams from the four reflecting surfaces of the cubic reference prism, which are perpendicular to the mechanical reference axis of the second rotary axis system, coincide with the reference crosshair XY; S6: Use the second CCD dual-axis autocollimator to emit a laser beam towards the first reflecting surface of the double-sided optical flat, rotate the first rotary axis system so that the crosshairs X′Y′ of the reflected beams from the four reflecting surfaces of the cubic reference prism coincide with the reference crosshair XY in one of the X and Y directions, and record the angular deviation value of the crosshairs X′Y′ of the reflected beams relative to the reference crosshair XY in the other of the X and Y directions. , , and The orthogonality values ​​of the first and second rotary axis systems were calculated.

[0007] As a further embodiment of the first aspect, the first CCD dual-axis autocollimator and the second CCD dual-axis autocollimator are the same movable CCD dual-axis autocollimator.

[0008] As a further aspect of the first aspect, in step S5, the orthogonality value of the first and second rotary shaft systems is calculated using a deviation formula, wherein the deviation formula is: ,in Let be the orthogonality value.

[0009] According to a second aspect of the present invention, an apparatus is provided for measuring the orthogonality of an orthogonal rotation axis system, the orthogonal rotation axis system comprising at least a first rotation axis system and a second rotation axis system orthogonal to it, the apparatus comprising: a CCD dual-axis autocollimator, a first axis-measuring tilt fixture, a cubic reference prism, a second axis-measuring tilt fixture, and a double-sided optical flat, wherein the cubic reference prism is fixedly mounted to the first rotation axis system, and its geometric center is located at the intersection of the mechanical reference axis of the first rotation axis system and the mechanical reference axis of the second rotation axis system; the double-sided optical flat... A crystal is fixedly mounted to the second rotation axis system and has a cylindrical surface and a first reflecting surface and a second reflecting surface arranged at the near end and far end of the CCD dual-axis autocollimator, respectively. The CCD dual-axis autocollimator is used to emit a laser beam toward a reflecting surface of a cubic reference prism and the first reflecting surface of the double-sided optical flat crystal, wherein the reflecting surface of the cubic reference prism is parallel to the mechanical reference axis of the second rotation axis system and is located at the near end of the CCD dual-axis autocollimator. A first tilt measuring fixture is fixedly mounted to the first rotation axis system to assist in measuring the tilt angle of the first rotation axis system. Rotation error value; The second tilting angle measuring fixture is fixedly installed on the second rotary shaft system to assist in measuring the tilt angle of the second rotary shaft system. Rotation error value.

[0010] As a further embodiment of the second aspect, the non-working surface of the cubic reference prism, which is parallel to the mechanical reference axis of the second rotational axis system and is located at the far end of the CCD dual-axis autocollimator, is fixedly connected to the first axis-measuring tilting fixture. The first axis-measuring tilting fixture is fixedly installed on the end face of the first rotational axis system, such that the geometric center of the cubic reference prism is located at the intersection of the mechanical reference axis of the first rotational axis system and the mechanical reference axis of the second rotational axis system.

[0011] As a further embodiment of the second aspect, the first tilting fixture includes a first adjusting screw and a first silicone pad. The first adjusting screw passes through the first silicone pad and is fixed to the end face of the first rotary axis system. The first adjusting screw and the first silicone pad are used to fine-tune the attitude of the cubic reference prism to assist in measuring the tilt angle of the first rotary axis system. Rotation error value.

[0012] As a further scheme of the second aspect, the non-working surface of the cubic reference prism is fixedly connected with the first axis tilt angle tooling by bonding.

[0013] As a further scheme of the second aspect, the second axis tilt angle tooling has a mounting hole for fixing the double-sided optical flat.

[0014] As a further scheme of the second aspect, the cylindrical surface of the double-sided optical flat is fixedly connected in the mounting hole of the second axis tilt angle tooling by bonding.

[0015] As a further scheme of the second aspect, the second axis tilt angle tooling includes a second adjusting screw, a second silica gel pad, an adapter and a locking screw, the second adjusting screw is fixed to the adapter through the second silica gel pad, and the adapter is fixed to the end surface of the second rotation axis system through the locking screw, wherein the second adjusting screw and the second silica gel pad are used for fine adjustment of the attitude of the double-sided optical flat to assist in measuring the tilt angle of the second rotation axis system. Rotation error value.

[0016] The present application has the advantages of:

[0017] 1. The present application takes the reflected light beam of the double-sided optical flat as the reference, anchors the reference on the physically stable optical reflection surface, and eliminates the reference drift error of mutual collimation of two autocollimators; the present application measures the tilt angle rotation error of two rotation axis systems through the cubic reference prism and the double-sided optical flat, and makes the tilt angle rotation error less than a specific value through the attitude fine adjustment assembly, thereby eliminating the interference of the rotation error of the axis system itself on the orthogonality measurement in advance, and ensuring that the final result only reflects the orthogonality deviation of the two axes; the present application measures the reflected light beam deviation of the four reflection surfaces of the cubic reference prism perpendicular to the second rotation axis system by rotating the first rotation axis system to calculate the comprehensive orthogonality value, so that it can reflect the error distribution of the rotation axis system in the entire rotation range, and overall improve the accuracy of the orthogonality measurement of the axis system.

[0018] 2. The present application only needs one movable CCD double-axis autocollimator to realize the orthogonality test of the orthogonal rotation axis system, compared with the prior art which must use two CCD double-axis autocollimators to mutually collimate the reference, thereby reducing the dependence on the number of equipment, reducing the equipment cost and the difficulty of synchronous calibration, while maintaining the measurement accuracy.

[0019] 3、The measurement result of the prior art may contain multiple interferences such as reference offset, shafting rotation error, tilt mirror installation error, it is difficult to distinguish the error source, and the result has low reliability; and the application can separate the shafting self error, installation error and orthogonal error gradually, the error of each link can be traced and controlled, and the final result only reflects the orthogonal essence deviation of two axes, so the reliability of the application is higher.

[0020] 4、Since the orthogonal measurement device of the application comprises the tilt angle measuring tool and the attitude fine adjustment assembly, it can be applied to the case where the measured shaft can rotate and the measured shaft is hollow or the orthogonal position of the measured shaft is in a split form in the scene involving the orthogonality of two or more rotating shafts. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is the flow chart of the method for measuring the orthogonality of the orthogonal rotating shaft system of the application.

[0022] Figure 2 is the structural schematic diagram of the device for measuring the orthogonality of the orthogonal rotating shaft system of the application.

[0023] Figure 3 is the sectional view of the device for measuring the orthogonality of the orthogonal rotating shaft system of the application.

[0024] Figure 4 is the perspective view of the first shaft tilt angle measuring tool and the cubic reference prism installed thereon.

[0025] Figure 5 is the sectional view of the first shaft tilt angle measuring tool and the cubic reference prism installed thereon.

[0026] Figure 6 is the perspective view of the second shaft tilt angle measuring tool and the double-sided optical flat crystal installed thereon.

[0027] Figure 7 is the sectional view of the second shaft tilt angle measuring tool and the double-sided optical flat crystal installed thereon.

[0028] Explanation of reference signs: 1, cubic reference prism; 2, second rotation axis system; 3, first axis inclination measuring tool; 4, first CCD double-axis autocollimator; 4', second CCD double-axis autocollimator; 5, first rotation axis system; 6, double-sided optical flat; 7, second axis axis inclination measuring tool; 8, adapter; 9, mechanical reference axis of the second rotation axis system; 10, mechanical reference axis of the first rotation axis system; 11, first adjusting screw; 12, end surface of the first rotation axis system; 13, end surface of the second rotation axis system; 14, locking screw; 15, first silica gel pad; 15', second silica gel pad; 16, second adjusting screw; 17, first reflecting surface of the cubic reference prism perpendicular to the mechanical reference axis of the second rotation axis system; 18, second reflecting surface of the cubic reference prism perpendicular to the mechanical reference axis of the second rotation axis system; 19, third reflecting surface of the cubic reference prism perpendicular to the mechanical reference axis of the second rotation axis system; 20, fourth reflecting surface of the cubic reference prism perpendicular to the mechanical reference axis of the second rotation axis system; 21, non-working surface of the cubic reference prism; 22, reflecting surface of the cubic reference prism parallel to the second rotation axis system; 23, first reflecting surface of the double-sided optical flat; 24, second reflecting surface of the double-sided optical flat. DETAILED DESCRIPTION

[0029] Embodiments of the present disclosure will be described in more detail with reference to the drawings. While certain embodiments of the present disclosure are shown in the drawings, it is understood that the present disclosure can be embodied in various forms and should not be interpreted as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure can be more thoroughly and completely understood. It should be understood that the drawings of the present disclosure are for exemplary purposes only and are not intended to limit the scope of protection of the present disclosure.

[0030] Reference Figure 1 In embodiments of the present disclosure, a method for measuring the orthogonality of an orthogonal rotation axis system is provided, the orthogonal rotation axis system comprising at least a first rotation axis system and a second rotation axis system orthogonal thereto, for example, the first rotation axis system can be an azimuth axis system, and the second rotation axis system can be a pitch axis system, the method comprising the following steps S1 to S5.

[0031] In step S1, a first CCD double-axis autocollimator is used to emit a laser beam to one reflecting surface of a cubic reference prism fixedly installed to the first rotation axis system, and the first rotation axis system is rotated to measure the inclination of the first rotation axis system rotational error value, and the inclination The rotation error value is less than a certain value, so as to determine the mechanical reference axis of the first rotation axis system and the position of the cubic reference prism, wherein the certain value is 3", the one reflecting surface of the cubic reference prism is parallel to the mechanical reference axis of the second rotation axis system and is at the near end of the first CCD biaxial autocollimator, and the geometric center of the cubic reference prism is located at the intersection of the mechanical reference axis of the first rotation axis system and the mechanical reference axis of the second rotation axis system. This step accurately matches the attitude of the cubic reference prism with the mechanical reference axis of the first rotation axis system, and ensures that, in subsequent measurement, the reflecting characteristics of the cubic reference prism only reflect the two-axis orthogonality, rather than the rotation error of the first axis itself.

[0032] In step S2, a laser beam is emitted to the first reflecting surface of the double-sided optical flat crystal fixedly installed to the second rotation axis system by using the second CCD biaxial autocollimator, and the second rotation axis system is rotated to measure the inclination angle of the second rotation axis system the rotation error value, and by fine-tuning the attitude of the double-sided optical flat crystal, the inclination angle the rotation error value is less than a certain value, so as to determine the mechanical reference axis of the second rotation axis system and the position of the double-sided optical flat crystal, wherein the first reflecting surface of the double-sided optical flat crystal is at the near end of the second CCD biaxial autocollimator. This step is the same as step S1, and ensures that the reflecting reference of the double-sided optical flat crystal is only related to the mechanical reference axis of the second rotation axis system, and eliminates the influence of the rotation error of the second axis itself. By steps S1 and S2, the interference of the rotation error of the axis system itself on the orthogonality measurement is eliminated in advance, and it is ensured that the final result only reflects the orthogonality deviation of the two axes.

[0033] In step S3, the second reflecting surface of the double-sided optical flat crystal at the far end of the second CCD biaxial autocollimator is shielded, a laser beam is emitted to the first reflecting surface of the double-sided optical flat crystal by using the second CCD biaxial autocollimator, and the relative measurement zero and the reference cross line XY are set for the CCD biaxial autocollimator based on the reflected light beam of the double-sided optical flat crystal. The present application anchors the reference on the physically stable optical reflecting surface based on the reflected light beam of the double-sided optical flat crystal, and eliminates the reference drift error of the two autocollimators aiming at each other in the prior art.

[0034] In step S4, the shielding is removed, a laser beam is emitted to the first reflecting surface of the double-sided optical flat by the second CCD biaxial autocollimator, and the mounting positions of the first rotary shaft system and the second rotary shaft system are adjusted so that the cross line X'Y' of the reflected laser beam on the four reflecting surfaces of the cubic reference prism perpendicular to the mechanical reference axis of the second rotary shaft system is coincident with the reference cross line XY. Through this step, the first rotary shaft system and the second rotary shaft system are brought into an approximately orthogonal state at the mechanical mounting level, which eliminates the interference caused by excessive initial installation deviation and ensures that the subsequent measurement is the orthogonality error of the two shaft systems themselves rather than the installation deviation. Moreover, this step is equivalent to correlating the reference of the first rotary shaft system (reflected by the cubic reference prism) and the reference of the second rotary shaft system (reflected by the double-sided optical flat) to the same measurement reference, thereby laying a unified reference framework for accurately calculating the orthogonality error of the two shaft systems.

[0035] In step S5, a laser beam is emitted to the first reflecting surface of the double-sided optical flat by the second CCD biaxial autocollimator, the first rotary shaft system is rotated so that the cross line X'Y' of the reflected laser beam on the four reflecting surfaces of the cubic reference prism is coincident with the reference cross line XY in one of the X and Y directions, and the angular deviation values of the cross line X'Y' of the reflected laser beam in the other of the X and Y directions relative to the reference cross line XY are recorded 、 、 and , and the orthogonality values of the first rotary shaft system and the second rotary shaft system are calculated. In this step, the four deviation values directly reflect the orthogonality deviation of the first rotary shaft system relative to the second rotary shaft system in different directions, covering the full-dimensional error information of the two-axis orthogonality. In addition, the comprehensive calculation of the four deviation values can effectively integrate the multi-directional error and avoid the contingency of single-position measurement, and finally output a quantitative result that can objectively reflect the orthogonality precision of the two rotary shaft systems, thereby providing a clear basis for the precision evaluation or adjustment of the shaft system.

[0036] It should be noted that the proximal end of the CCD biaxial autocollimator refers to the end closer to the CCD biaxial autocollimator when the CCD biaxial autocollimator is aligned with the emitted laser beam, and the distal end of the CCD biaxial autocollimator refers to the end farther away from the CCD biaxial autocollimator when the CCD biaxial autocollimator is aligned with the emitted laser beam.

[0037] In embodiments of the present invention, the first CCD dual-axis autocollimator and the second CCD dual-axis autocollimator are the same movable CCD dual-axis autocollimator. This invention allows all measurement steps S1 to S5 to be completed using the same movable device, reducing dependence on the number of devices, lowering hardware investment costs, and avoiding complex operations such as synchronous calibration and coaxiality adjustment between two devices. This makes the method of the present invention easier to promote and apply in practical scenarios. Furthermore, different autocollimators may have individual differences such as accuracy deviations and reading drift. If two devices are used to measure S1 and S2 separately, additional systematic errors may be introduced. Using the same device avoids the problem of inconsistent references caused by individual device differences, further ensuring the accuracy of the measurement results.

[0038] In the embodiments of the present invention, the deviation formula used is: ,in The orthogonality value is defined as follows: the smaller the orthogonality value, the smaller the deviation of the two axes in each direction, the closer it is to the ideal orthogonal state, and the higher the orthogonality accuracy. The orthogonality error of the two axes may exhibit positive and negative deviations in different directions (for example, the deviation of a certain reflecting surface may be +). The other reflective surface may be - If a simple arithmetic mean is used, positive and negative deviations may cancel each other out, resulting in a result that does not accurately reflect the actual magnitude of the error. The root mean square formula used in this invention first eliminates the influence of sign through squaring, then takes the average and square root, ensuring that deviations in all directions are accounted for, thus avoiding the problem of errors being "masked." Furthermore, squaring amplifies the weight of larger deviations (e.g., 2). The square of is The average deviation of the four reflective surfaces is calculated to be 4 times that of the standard deviation, making the formula results more reflective of the "key errors" that significantly affect the overall accuracy. By averaging the deviations of the four reflective surfaces, it is equivalent to sampling and statistically processing the error multiple times, effectively reducing the impact of random interference (such as environmental vibration and reading errors) in a single measurement, making the results more stable and more repeatable.

[0039] In the embodiment of the present application, a device for measuring the orthogonality of an orthogonal rotating shaft system is provided, the orthogonal rotating shaft system at least comprising a first rotating shaft system and a second rotating shaft system orthogonal to the first rotating shaft system, the device can be used to implement the method for measuring the orthogonality of an orthogonal rotating shaft system of the present application, the device comprising: a CCD double-axis autocollimator, a first shaft inclination measuring tool 3, a cubic reference prism 1, a second shaft inclination measuring tool 7 and a double-sided optical flat 6, wherein the cubic reference prism 1 is fixedly installed to the first rotating shaft system 5, and the geometric center thereof is located at the intersection of the mechanical reference axis of the first rotating shaft system 5 and the mechanical reference axis of the second rotating shaft system 2; the double-sided optical flat 6 is fixedly installed to the second rotating shaft system 2, has a cylindrical surface and a first reflecting surface 23 and a second reflecting surface 24 arranged at the near end and the far end of the CCD double-axis autocollimator respectively; the CCD double-axis autocollimator is used to emit a laser beam to one reflecting surface 22 of the cubic reference prism 1 and to the first reflecting surface 23 of the double-sided optical flat, wherein the one reflecting surface 22 of the cubic reference prism 1 is parallel to the mechanical reference axis of the second rotating shaft system and at the near end of the CCD double-axis autocollimator; the first shaft inclination measuring tool 3 is fixedly installed to the first rotating shaft system for assisting in measuring the inclination error value of the first rotating shaft system error value of the second rotating shaft system

[0040] In the embodiment of the present application, the non-working surface 21 of the cubic reference prism 1 which is parallel to the mechanical reference axis of the second rotating shaft system 2 and at the far end of the CCD double-axis autocollimator is fixedly connected with the first shaft inclination measuring tool 3, and the first shaft inclination measuring tool 3 is fixedly installed to the end surface of the first rotating shaft system 5, so that the geometric center of the cubic reference prism is located at the intersection of the mechanical reference axis of the first rotating shaft system 5 and the mechanical reference axis of the second rotating shaft system 2. Preferably, the non-working surface of the cubic reference prism 1 is fixedly connected with the first shaft inclination measuring tool 3 in an adhesive manner.

[0041] In the embodiment of the present application, the first shaft inclination measuring tool 3 comprises a first adjusting screw 11 and a first silica gel pad 15, wherein the first adjusting screw 11 is fixed to the end surface of the first rotating shaft system 5 through the first silica gel pad 15. The first adjusting screw 11 and the first silica gel pad 15 are used to finely adjust the posture of the cubic reference prism, so as to assist in measuring the inclination error value of the first rotating shaft system

[0042] In the embodiment of the present application, the second axis-inclination measuring tool 7 has a mounting hole for fixing the double-sided optical flat 6, the cylindrical surface of the double-sided optical flat 6 is fixed in the mounting hole of the second axis-inclination measuring tool 7, and the second axis-inclination measuring tool 7 is fixedly mounted to the end face of the second rotary shaft system 2. Preferably, the cylindrical surface of the double-sided optical flat 6 is bonded in the mounting hole of the second axis-inclination measuring tool 7.

[0043] In the embodiment of the present application, the second axis-inclination measuring tool 7 includes a second adjusting screw 16, a second silica gel pad 15', an adapter 8, and a locking screw 14. The second adjusting screw 16 is fixed to the adapter 8 through the second silica gel pad 15', and the adapter 8 is fixed to the end face of the second rotary shaft system 2 by the locking screw 14. The second adjusting screw 16 and the second silica gel pad 15' are used to finely adjust the attitude of the double-sided optical flat 6, so as to assist in measuring the inclination angle of the second rotary shaft system 2. rotary error value.

[0044] Referring to Figures 2 to 7 , a specific embodiment of combining the method and device of the present application for measuring the orthogonality of the orthogonal rotary shaft system is described, which includes steps one to five.

[0045] In step one, the non-working face 21 of the cubic reference prism 1 is bonded with the corresponding first axis-inclination measuring tool 3, and three first adjusting screws 11 are installed on the end face 12 of the first rotary shaft system through the first axis-inclination measuring tool 3 and the silica gel pad 15, so that the cubic reference prism 1 is located at the center of the perpendicular reflection faces 17, 18, 19, and 20 of the second rotary shaft system 2, i.e., the geometric center is located at the intersection of the mechanical reference axis 9 of the second rotary shaft system and the mechanical reference axis 10 of the first rotary shaft system, so that the cubic reference prism 1 can enter the field of view of the CCD biaxial autocollimator 4; the parallel reflection face 22 of the cubic reference prism 1 is aligned with the CCD biaxial autocollimator 4, the first rotary shaft system 5 is rotated clockwise, the first adjusting screw 11 is adjusted to deform the silica gel pad 15 to finely adjust the attitude of the cubic reference prism 1, if there is an inclination rotary error of the first rotary shaft system, i.e., the spatial angle of the mechanical reference axis 10 of the first rotary shaft system is slightly inclined during rotation, the attitude of the cubic reference prism 1 will change synchronously, which will cause the reflection direction of the reflection face 22 of the cubic reference prism 1 to deviate, and the CCD biaxial autocollimator 4 can record the inclination changes of the first rotary shaft system at different rotation positions by monitoring the deviation of the reflected light beam cross line in real time, so as to measure the inclination rotary error of the first rotary shaft system 5, and determine the positions of the mechanical reference axis 10 of the first rotary shaft system and the cubic reference prism 1.

[0046] In step two, the cylindrical surface of the double-sided optical flat 6 is bonded in the mounting hole of the second axis-inclination measuring tool 7, the adapter 8 is mounted on the end face 13 of the second rotary shaft system by six locking screws 14, and three second adjusting screws 16 are mounted on the adapter 8 through the second axis-inclination measuring tool 7 and the silica gel pad 15. The CCD biaxial autocollimator 4 is moved to the position of the CCD biaxial autocollimator 4' to align the first reflecting surface 23 of the double-sided optical flat, the second adjusting screws 16 are adjusted by clockwise rotating the second rotary shaft system 2 to slightly adjust the posture of the double-sided optical flat 6 by deforming the silica gel pad 15, and the inclination of the second rotary shaft system 2 is measured. Rotary error, the position of the mechanical reference axis 9 of the second rotary shaft system and the double-sided optical flat 6 is determined.

[0047] In step three, the second reflecting surface 24 of the double-sided optical flat is shielded, and the laser beam is emitted by the CCD biaxial autocollimator 4' to the first reflecting surface 23 of the double-sided optical flat. The relative measurement zero is reset and the reference cross line XY is set for the CCD biaxial autocollimator 4'.

[0048] In step four, the shielding of the second reflecting surface 24 of the double-sided optical flat is removed, and the laser beam is emitted by the CCD biaxial autocollimator 4' to the reflecting surfaces 17, 18, 19, 20 of the cube reference prism 1 perpendicular to the mechanical reference axis 9 of the second rotary shaft system. When the cross line X'Y' of the reflected light beam of the cube reference prism 1 does not coincide with the reference cross line XY, the mounting positions of the first rotary shaft system 5 and the second rotary shaft system 2 need to be re-adjusted until the cross line X'Y' of the reflected light beam of the cube reference prism 1 coincides with the reference cross line XY.

[0049] In step five, the cube reference prism 1 is rotated clockwise along with the first rotary shaft system 5, so that the cross line X'Y' of the reflected light beam of the four reflecting surfaces 17, 18, 19, 20 of the cube reference prism 1 perpendicular to the mechanical reference axis 9 of the second rotary shaft system coincides with the reference cross line XY in one of the X and Y directions, and the values of the reflected light beam of the four reflecting surfaces 17, 18, 19, 20 of the cube reference prism 1 in the other direction of the X and Y directions are recorded in sequence, respectively. The first side angle deviation value is , the second side angle deviation value is , the third side angle deviation value is , and the fourth side angle deviation value is The orthogonality RMS value is calculated by the formula:

[0050] ​The above description is merely exemplary of some of the many possible embodiments of the present disclosure and of the principles thereof. It is to be understood that those skilled in the art will be able to devise various embodiments of the present disclosure without departing from the scope of the present disclosure, that the scope of the present disclosure is not limited to the specific embodiments described herein, and that the scope of the present disclosure also covers any subsequent technical equivalents, which do not depart from the principles of the present disclosure, of the technical features of the present disclosure, or of the equivalents thereof. For example, the scope of the present disclosure also covers other technical solutions formed by mutually replacing the technical features described above with technical features of the same or similar functions disclosed in the embodiments of the present disclosure (but not limited to).

Claims

1. A method for measuring the orthogonality of an orthogonal rotating shaft train, the orthogonal rotating shaft train comprising at least a first rotating shaft train and a second rotating shaft train orthogonal thereto, characterized in that, The method comprises the following steps: S1: using a first CCD biaxial autocollimator to emit a laser beam to one reflecting surface of a cube reference prism fixedly installed to a first rotary shaft system, rotating the first rotary shaft system to measure the inclination angle of the first rotary shaft system the rotary error value, and by fine-tuning the attitude of the cube reference prism, the inclination angle the rotary error value is less than a certain value, thereby determining the mechanical reference axis of the first rotary shaft system and the position of the cube reference prism, wherein the one reflecting surface of the cube reference prism is parallel to the mechanical reference axis of the second rotary shaft system and is located at the proximal end of the first CCD biaxial autocollimator, and the geometric center of the cube reference prism is located at the intersection of the mechanical reference axis of the first rotary shaft system and the mechanical reference axis of the second rotary shaft system; S2: Using a second CCD dual-axis autocollimator, a laser beam is emitted towards the first reflecting surface of the double-sided optical flat fixed to the second rotation axis system. The second rotation axis system is rotated to measure its tilt angle. The rotation error value was determined, and the tilt angle was adjusted by fine-tuning the orientation of the double-sided optical flat. The rotational error value is less than the specified value, thereby determining the mechanical reference axis of the second rotational axis system and the position of the double-sided optical flat, wherein the first reflecting surface of the double-sided optical flat is near the second CCD dual-axis autocollimator; S3: shielding the second reflecting surface of the double-sided optical flat at the far end of the second CCD biaxial autocollimator, using the second CCD biaxial autocollimator to emit a laser beam to the first reflecting surface of the double-sided optical flat, and performing relative measurement zero setting and setting a reference cross line XY based on the reflected light beam of the double-sided optical flat; S4: removing the shielding, using the second CCD biaxial autocollimator to emit a laser beam to the first reflecting surface of the double-sided optical flat, and adjusting the mounting position of the first rotary shaft system and the second rotary shaft system so that the cross line X'Y' of the reflected light beam reflected to the four reflecting surfaces of the cube reference prism perpendicular to the mechanical reference axis of the second rotary shaft system through the double-sided optical flat coincides with the reference cross line XY; S5: using the second CCD biaxial autocollimator to emit a laser beam to the first reflecting surface of the double-sided optical flat, rotating the first rotary axis system, so that the cross line X'Y' of the reflected light beam of the four reflecting surfaces of the cubic reference prism coincides with the reference cross line XY in one of the X and Y directions, and recording the angular deviation value of the cross line X'Y' of the reflected light beam relative to the reference cross line XY in the other of the X and Y directions 、 、 and , the orthogonality value of the first rotary axis system and the second rotary axis system is calculated.

2. The method for measuring the quadrature of a quadrature rotary shafting according to claim 1, characterized in that, The first CCD biaxial autocollimator and the second CCD biaxial autocollimator are the same movable CCD biaxial autocollimator.

3. The method for measuring the quadrature of a quadrature rotary shafting according to claim 2, characterized in that, The orthogonality value of the first rotating shaft system and the second rotating shaft system is calculated by a deviation formula in the step S5, and the deviation formula is: wherein is the orthogonality value.

4. A device for measuring the orthogonality of an orthogonal rotating shaft system, the orthogonal rotating shaft system comprising at least a first rotating shaft system and a second rotating shaft system orthogonal thereto, characterized in that, The method comprises: a CCD biaxial autocollimator, a first axis inclination measuring tool, a cube reference prism, a second axis inclination measuring tool and a double-sided optical flat, wherein the cube reference prism is fixedly mounted to the first rotary shaft system, and the geometric center thereof is located at the intersection of the mechanical reference axis of the first rotary shaft system and the mechanical reference axis of the second rotary shaft system; the double-sided optical flat is fixedly mounted to the second rotary shaft system, and has a cylindrical surface and first and second reflecting surfaces arranged at the near end and the far end of the CCD biaxial autocollimator, respectively; the CCD biaxial autocollimator is used to emit a laser beam to one reflecting surface of the cube reference prism and to the first reflecting surface of the double-sided optical flat, wherein the one reflecting surface of the cube reference prism is parallel to the mechanical reference axis of the second rotary shaft system and is at the near end of the CCD biaxial autocollimator; The first axis-inclination measuring tool is fixedly installed to the first rotating shaft system, and is used for assisting in measuring the inclination angle of the first rotating shaft system Rotary error value; The second axis-inclination measuring tool is fixedly installed to the second rotating shaft system, and is used for assisting in measuring the inclination angle of the second rotating shaft system Rotary error value.

5. The device for measuring the orthogonality of a crossed rotary shafting according to claim 4, characterized in that, a non-working surface of the cube reference prism parallel to the mechanical reference axis of the second rotary shaft system and at the far end of the CCD biaxial autocollimator is fixedly connected with the first axis inclination measuring tool, and the first axis inclination measuring tool is fixedly mounted to the end surface of the first rotary shaft system, so that the geometric center of the cube reference prism is located at the intersection of the mechanical reference axis of the first rotary shaft system and the mechanical reference axis of the second rotary shaft system.

6. The device for measuring the orthogonality of a crossed rotary shafting according to claim 5, characterized in that, The first axis tilt angle tooling includes a first adjustment screw and a first silica gel pad, the first adjustment screw is fixed to the end face of the first rotation shaft system through the first silica gel pad, wherein the first adjustment screw and the first silica gel pad are used for fine adjustment of the attitude of the cubic reference prism, to assist in measuring the tilt angle of the first rotation shaft system Rotation error value.

7. The device for measuring the orthogonality of a crossed rotary shafting according to claim 5, characterized in that, The non-working surface of the cube reference prism is fixedly connected with the first axis inclination measuring tool in an adhesive manner.

8. The device for measuring the orthogonality of a crossed rotary shafting according to claim 4, characterized in that, The second axis inclination measuring tool has a mounting hole for fixing the double-sided optical flat.

9. The device for measuring the orthogonality of a crossed rotary shafting according to claim 8, characterized in that, The cylindrical surface of the double-sided optical flat is fixedly connected in the mounting hole of the second axis inclination measuring tool in an adhesive manner.

10. The device for measuring the orthogonality of a crossed rotary shafting according to claim 8, characterized in that, The second axis-inclination measuring tool comprises a second adjusting screw, a second silica gel pad, an adapter and a locking screw, the second adjusting screw is fixed to the adapter through the second silica gel pad, and the adapter is fixed to the end face of the second rotating shaft system through the locking screw, wherein the second adjusting screw and the second silica gel pad are used for fine adjustment of the attitude of the double-sided optical flat crystal, so as to assist in measuring the inclination angle of the second rotating shaft system The rotation error value.

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