Ion chromatography sampling controller

Abstract

The invention relates to an ion chromatography sampling controller, which is connected between a sampling system and at least one ion chromatography instrument, and comprises an input pipeline, a pretreatment unit, a first pump, an output pipeline and a control unit, the input pipeline is connected with the sampling system so as to input gas to be detected; the pretreatment unit is used for collecting at least one detection target in the gas to be detected by using a liquid medium to form an object to be analyzed; the first pump is respectively connected with the input pipeline and the pretreatment unit in a gas communication manner; the output pipeline is connected between the pretreatment unit and the at least one ion chromatograph and is used for outputting the to-be-analyzed object to the at least one ion chromatograph; the control unit is connected with the preprocessing unit and the first pump and is in communication connection with the at least one ion chromatograph.

Description

TECHNICAL FIELD

[0001] The present application relates to gas analysis, and in particular, to an ion chromatography sampling controller. BACKGROUND

[0002] With the development of high-level processes in clean rooms, the monitoring of airborne molecular contaminants (AMC) is becoming increasingly important. Generally, clean rooms detect acids and bases by first sampling the ambient gas and then using an ion chromatography (IC) instrument to analyze the sample.

[0003] However, the gas sample must first be captured and processed using a liquid medium before being detected. In the existing detection process, this requires manual operation, which is time-consuming and labor-intensive. In a multi-point air quality monitoring system, it is obviously difficult to achieve real-time monitoring, and there are obvious shortcomings that need to be improved.

[0004] Therefore, it is necessary to provide a novel and advanced ion chromatography sampling controller to solve the above problems. SUMMARY

[0005] The main purpose of the present application is to provide an ion chromatography sampling controller that can automatically sample and detect.

[0006] To achieve the above purpose, the present application provides an ion chromatography sampling controller for connecting between a sampling system and at least one ion chromatography instrument, comprising: an input pipeline, a pretreatment unit, a first pump, an output pipeline, and a control unit. The input pipeline is connected to the sampling system to input a gas to be tested; the pretreatment unit is used to collect at least one detection target in the gas to be tested using a liquid medium to form a sample to be analyzed; the first pump is connected to the input pipeline and the pretreatment unit in gas communication; the output pipeline is connected between the pretreatment unit and the at least one ion chromatography instrument and is used to output the sample to be analyzed to the at least one ion chromatography instrument; the control unit is connected to the pretreatment unit and the first pump and is communicatively connected to the at least one ion chromatography instrument, and the control unit can control the first pump to draw gas to allow the gas to be tested to enter the input pipeline and the pretreatment unit, and can send a control signal to control the at least one ion chromatography instrument to analyze to generate an analysis data.

[0007] As a preferred embodiment of the above technical solution, preferably, a first liquid pipeline is further included, wherein the first liquid pipeline is connected to the input pipeline to input a cleaning liquid.

[0008] As a preferred embodiment of the above technical solution, preferably, a second liquid pipeline is further included, wherein the second liquid pipeline is connected to the pretreatment unit to input the liquid medium.

[0009] As a preferred solution of the above technical scheme, preferably, a gas pipeline is further included, wherein the gas pipeline is connected to the input pipeline for inputting a cleaning gas.

[0010] As a preferred solution of the above technical scheme, preferably, the control unit includes an access unit, wherein when the at least one ion chromatograph completes analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data.

[0011] As a preferred solution of the above technical scheme, preferably, at least one second pump is further included, wherein the at least one second pump is connected to the at least one ion chromatograph, and the control unit can control the at least one second pump to make the to-be-analyzed substance enter the at least one ion chromatograph.

[0012] As a preferred solution of the above technical scheme, preferably, the pretreatment unit includes a plurality of impact assemblies and at least one first switching valve, the at least one first switching valve is connected to the plurality of impact assemblies and the first pump, and the control unit can control the at least one first switching valve to communicate one of the impact assemblies and the first pump.

[0013] As a preferred solution of the above technical scheme, preferably, the output pipeline is provided with at least one second switching valve connected to the plurality of impact assemblies, and the control unit can control the at least one second switching valve to communicate one of the impact assemblies and the at least one ion chromatograph.

[0014] As a preferred solution of the above technical scheme, preferably, the control unit includes a timing control module, the at least one first switching valve and the at least one second switching valve can change the communication state of each impact assembly and the first pump and the at least one ion chromatograph according to a plurality of timing signals of the timing control module.

[0015] As the preferred technical solution of the above-mentioned technical scheme, preferably, further comprising a first liquid pipeline, a second liquid pipeline and a gas pipeline, wherein the first liquid pipeline is connected to the input pipeline for inputting a cleaning liquid; the second liquid pipeline is connected to the pretreatment unit for inputting the liquid medium; the gas pipeline is connected to the input pipeline for inputting a cleaning gas; the first liquid pipeline is provided with a first valve connected to the control unit, and the gas pipeline is provided with a second valve connected to the control unit; the second liquid pipeline is provided with a third valve connected to the control unit, and the control unit can control the third valve to be opened before the input of the gas to be tested; the control unit comprises an access unit, wherein when the at least one ion chromatograph completes analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data; the pretreatment unit comprises a plurality of impact assemblies and at least one first switching valve, the at least one first switching valve is connected between the plurality of impact assemblies and the first pump, and the control unit can control the at least one first switching valve to communicate one of the impact assemblies with the first pump; each of the impact assemblies comprises an impact bottle and a buffer bottle, the impact bottle is connected to the input pipeline, and the buffer bottle is connected between the impact bottle and the first pump; the output pipeline is provided with at least one second switching valve connected to the plurality of impact assemblies, and the control unit can control the at least one second switching valve to communicate one of the impact assemblies with the at least one ion chromatograph; the control unit comprises a timing control module, and the at least one first switching valve and the at least one second switching valve can change the communication state of each of the impact assemblies with the first pump and the at least one ion chromatograph according to a plurality of timing signals of the timing control module; the ion chromatography sampling controller further comprises at least one calibration pipeline connected to the output pipeline, the at least one calibration pipeline is used for inputting a calibration liquid to the at least one ion chromatograph; the control unit further comprises a state detection module, the state detection module is used for receiving and storing a plurality of action signals from the sampling system and the at least one ion chromatograph, and the control unit can determine whether the sampling system and the at least one ion chromatograph are abnormal according to the plurality of action signals; and a gas flow controller is arranged between the input pipeline and the first pump. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0017] Fig. 1 It is a perspective view of a preferred embodiment of the present application.

[0018] Fig. 2 It is a pipeline configuration diagram of a preferred embodiment of the present application.

[0019] Fig. 3 A communication structure block diagram of a preferred embodiment of the present application.

[0020] Fig. 4 A control flow chart of a preferred embodiment of the present application.

[0021] Wherein, 1: ion chromatography sampling controller; 2: sampling system; 3: ion chromatograph; 10: input pipeline; 11: gas flow controller; 20: pretreatment unit; 21: impact assembly; 211: impact bottle; 212: buffer bottle; 22: first switching valve; 30: first pump; 40: output pipeline; 41: second switching valve; 42: sample valve; 50: control unit; 51: timing control module; 52: access unit; 53: state detection module; 60: shell; 70: second pump; 80: first liquid pipeline; 81: first valve; 90: gas pipeline; 91: second valve; 100: second liquid pipeline; 101: third valve; 110: calibration pipeline. DETAILED DESCRIPTION

[0022] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0023] The following only illustrates possible implementation manners of the present application by way of examples, but is not used to limit the scope of the present application intended to be protected. The term "a" or "at least one" before a noun in the text is not a limitation on the quantity, and "a plurality of" can also be used according to the needs. The change in the quantity is also the scope intended to be protected. It is stated in advance.

[0024] Please refer to Figs. 1 to 4 The ion chromatography sampling controller 1 of the present application is used for connecting between a sampling system 2 and at least one ion chromatograph 3, and includes an input pipeline 10, a pretreatment unit 20, a first pump 30, an output pipeline 40 and a control unit 50.

[0025] The input pipeline 10 is connected to the sampling system 2 for inputting a to-be-tested gas; the pretreatment unit 20 is used to collect at least one detection target in the to-be-tested gas by using a liquid medium to form a to-be-analyzed substance; the first pump 30 is connected to the input pipeline 10 and the pretreatment unit 20 in gas communication, respectively; the output pipeline 40 is connected between the pretreatment unit 20 and the at least one ion chromatograph 3 and is used to output the to-be-analyzed substance to the at least one ion chromatograph 3; the control unit 50 is connected to the pretreatment unit 20 and the first pump 30 and is communicatively connected to the at least one ion chromatograph 3, and the control unit 50 can control the first pump 30 to pump gas to make the to-be-tested gas enter the input pipeline 10 and the pretreatment unit 20 and can send a control signal to control the at least one ion chromatograph 3 to perform analysis to generate an analysis data. In this way, the ion chromatograph sampling controller 1 of the present application can be used in combination with the existing sampling system 2 and the at least one ion chromatograph 3, and can directly sample air samples such as sulfuric acid, phosphoric acid, cyanofluoric acid, phosphoric acid, hydrochloric acid, and ammonia gas in a semiconductor factory, and can achieve automatic sampling and real-time detection, and can greatly save labor and time costs.

[0026] In the present embodiment, the ion chromatograph sampling controller 1 further includes a housing 60, and the input pipeline 10, the pretreatment unit 20, the output pipeline 40, and the control unit 50 are integrated in the housing 60, which has a simple structure and is easy to move and use.

[0027] The ion chromatograph sampling controller 1 further includes at least one second pump 70 connected to the at least one ion chromatograph 3, and the control unit 50 can control the at least one second pump 70 to make the to-be-analyzed substance enter the at least one ion chromatograph 3. In the present embodiment, the number of the at least one ion chromatograph 3 is two and is used to perform anion analysis and cation analysis on the to-be-analyzed substance, respectively; each second pump 70 is connected to one ion chromatograph 3, and the second pumps 70 can be controlled by the control unit 50 to simultaneously sample or sample only one ion chromatograph 3 according to detection requirements, so that the same to-be-analyzed substance can be simultaneously analyzed, avoiding pollution caused by cross sampling. However, the number of the at least one ion chromatograph can be changed according to detection requirements; and each second pump can be connected to multiple ion chromatographs and switch sampling by a switching valve.

[0028] Preferably, the pre-treatment unit 20 comprises a plurality of impactors 21 and at least one first switching valve 22 connecting the plurality of impactors 21 and the first pump 30. The control unit 50 can control the at least one first switching valve 22 to connect one of the impactors 21 and the first pump 30, so that the plurality of impactors 21 can take turns to collect the sample gas, achieving the effect of continuous sampling. The output line 40 is provided with at least one second switching valve 41 connecting the plurality of impactors 21. The control unit 50 can control the at least one second switching valve 41 to connect one of the impactors 21 and the at least one ion chromatograph 3, so as to output the sample from one of the impactors 21.

[0029] Each of the impactors 21 comprises an impactor bottle 211 connected to the input line 10 and a buffer bottle 212 connected between the impactor bottle 211 and the first pump 30. Negative pressure can be generated in the impactor bottle 211 to extract the sample gas and prevent liquid from flowing into the first pump 30. Preferably, a gas flow controller 11 is provided between the input line 10 and the first pump 30. The control unit 50 is connected to the gas flow controller 11 to accurately control the flow of the sample gas.

[0030] The ion chromatograph sampling controller 1 further comprises a first liquid line 80 connected to the input line 10 for inputting a cleaning liquid, such as but not limited to deionized water. The ion chromatograph sampling controller 1 further comprises a gas line 90 connected to the input line 10 for inputting a cleaning gas, such as but not limited to nitrogen or compressed dry air. The first liquid line 80 is provided with a first valve 81 connected to the control unit 50, and the gas line 90 is provided with a second valve 91 connected to the control unit 50. Thus, after the control unit 50 completes the collection of the sample in each of the impactors 21 and outputs the sample for analysis, the control unit 50 can control the first valve 81 and the second valve 91 to open to input the cleaning liquid and the cleaning gas to clean the impactor bottle 211, so as to facilitate the next gas collection operation. The cleaning gas can also be input before the sample gas is input, so as to remove the residual gas in the impactor bottle 211, reducing the possibility of analysis error and contamination.

[0031] The ion chromatography sampling controller 1 further comprises a second liquid line 100 connected to the pre-treatment unit 20 for inputting a liquid medium, such as but not limited to water or other liquid capable of adsorbing the at least one detection target. The second liquid line 100 is provided with a third valve 101 connected to the control unit 50, which can control the third valve 101 to open for quantitative input of the liquid medium before input of the gas to be analyzed, with accurate operation and facilitating automation.

[0032] Preferably, the ion chromatography sampling controller 1 further comprises at least one calibration line 110 connected to the output line 40 for inputting a calibration liquid to the at least one ion chromatograph 3; the output line 40 further comprises at least one injection valve connected between the impact bottle 211 and the ion chromatograph 3 and connected to the control unit 50, and each calibration line 110 is connected to an injection valve. In this way, the control unit 50 can control the at least one injection valve to make each ion chromatograph 3 communicate with the impact bottle 211 or the calibration line 110, which can be automatically switched to perform analysis of the analyte to be analyzed or instrument calibration.

[0033] It is particularly noted that the control unit 50 comprises a timing control module 51, and the at least one first switching valve 22 and the at least one second switching valve 41 can change the communication state of each impact assembly 21 with the first pump 30 and the at least one ion chromatograph 3 according to a plurality of timing signals of the timing control module 51. In this way, when one of the plurality of impact assemblies 21 is performing a collection operation of the at least one detection target, another of the plurality of impact assemblies 21 can simultaneously perform a collection operation on another gas to be analyzed, or perform a cleaning operation to remove the analyte to be analyzed after completion of detection, saving operation time to facilitate continuous sampling. Further, the timing control module 51 can be controlled by the operator to set the operation time point of the first pump 30 to draw the gas to be analyzed, the opening and closing sequence and time point of the at least one first switching valve 22 and the at least one second switching valve 41, the operation time point of the at least one second pump 70, etc., the switching time point of the first valve 81, the second valve 91 and the third valve 101, etc., time-related setting information, to meet different analysis requirements.

[0034] Preferably, the control unit 50 further comprises an access unit 52, which reads and stores the analysis data (transmitted through the Ethernet connection in the present embodiment) when the at least one ion chromatograph 3 completes the analysis and sends a feedback signal to the control unit 50, so as to realize automatic access to the analysis data. The control unit 50 can be connected to an external device such as a computer by wired or wireless means, so as to control and set the ion chromatograph sampling controller 1 through the external device, and access the content stored by the access unit 52, facilitating operation and realizing remote control.

[0035] The control unit 50 further comprises a state detection module 53 for receiving and storing a plurality of action signals from the sampling system 2 and the at least one ion chromatograph 3. The control unit 50 can determine whether the sampling system 2 and the at least one ion chromatograph 3 are abnormal according to the plurality of action signals, for example, the at least one ion chromatograph 3 does not send the feedback signal or cannot return to the standby state after completing the analysis, so as to form an activity record file or record the action signals when an abnormality occurs, and further control the ion chromatograph sampling controller 1 to stop for the operator to troubleshoot, which is safe for operation and can avoid damage to the instrument.

[0036] Fig. 4 The ion chromatograph sampling controller 1 in the present embodiment is shown in the exemplary control flow. Specifically, the ion chromatograph sampling controller 1, the sampling system 2 and the at least one ion chromatograph 3 can realize signal transmission through Modbus-TCP, for example. For example, when the sample to be analyzed is input into the at least one ion chromatograph 3 and the at least one ion chromatograph 3 is in the standby state, the control unit 50 can send the control signal (Digital output, DO) to the at least one ion chromatograph 3 to start the analysis; when the at least one ion chromatograph 3 completes the analysis, the control unit 50 receives the feedback signal (Digital Input, DI) from the at least one ion chromatograph 3, and then controls the access unit 52 to obtain the analysis data.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. An ion chromatography sampling controller for connecting between a sampling system and at least one ion chromatograph, characterized in that: include: an input pipeline for connecting the sampling system to input a gas to be measured; a pre-processing unit for collecting at least one detection target in the gas to be detected using a liquid medium to form an analyte; a first pump connected to the input pipeline and the pre-processing unit in gas communication; an output pipeline connected between the pretreatment unit and the at least one ion chromatograph for outputting the analyte to the at least one ion chromatograph; and A control unit is connected to the pre-processing unit and the first pump for communication with the at least one ion chromatograph. The control unit can control the first pump to pump gas so that the gas to be tested enters the input pipeline and the pre-processing unit, and can send a control signal to control the at least one ion chromatograph to perform analysis to generate analysis data.

2. The ion chromatography sampling controller according to claim 1, characterized in that: The device further comprises a first liquid pipeline, wherein the first liquid pipeline is connected to the input pipeline for inputting a cleaning liquid.

3. The ion chromatography sampling controller according to claim 1, characterized in that: A second liquid pipeline is further included, wherein the second liquid pipeline is connected to the pre-treatment unit for inputting the liquid medium.

4. The ion chromatography sampling controller according to claim 1, characterized in that: The device further comprises a gas pipeline, wherein the gas pipeline is connected to the input pipeline for inputting a cleaning gas.

5. The ion chromatography sampling controller according to claim 1, characterized in that: The control unit includes an access unit, wherein when the at least one ion chromatograph completes analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data.

6. The ion chromatography sampling controller according to claim 1, characterized in that: At least one second pump is further included, wherein the at least one second pump is connected to the at least one ion chromatograph, and the control unit can control the at least one second pump to allow the analyte to enter the at least one ion chromatograph.

7. The ion chromatography sampling controller according to any one of claims 1 to 6, characterized in that: The pre-processing unit includes a plurality of impact components and at least one first switching valve. The at least one first switching valve connects the plurality of impact components and the first pump. The control unit can control the at least one first switching valve to connect one of the impact components and the first pump.

8. The ion chromatography sampling controller according to claim 7, characterized in that: The output pipeline is provided with at least one second switching valve connected to the plurality of impact components. The control unit can control the at least one second switching valve to connect one of the impact components with the at least one ion chromatograph.

9. The ion chromatography sampling controller according to claim 8, characterized in that: The control unit includes a timing control module. The at least one first switching valve and the at least one second switching valve can change the communication state between each impact component, the first pump and the at least one ion chromatograph according to a plurality of timing signals of the timing control module.

10. The ion chromatography sampling controller according to claim 6, characterized in that: It also includes a first liquid pipeline, a second liquid pipeline and a gas pipeline, wherein the first liquid pipeline is connected to the input pipeline for inputting a clean liquid; the second liquid pipeline is connected to the pretreatment unit for inputting the liquid medium; the gas pipeline is connected to the input pipeline for inputting a clean gas; the first liquid pipeline is provided with a first valve connected to the control unit, and the gas pipeline is provided with a second valve connected to the control unit; the second liquid pipeline is provided with a third valve connected to the control unit, and the control unit can control the third valve to open before inputting the gas to be tested; the control unit includes an access unit, wherein when the at least one ion chromatograph completes the analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data; the pretreatment unit includes a plurality of impact components and at least one first switching valve, the at least one first switching valve connects the plurality of impact components and the first pump, and the control unit can control the at least one first switching valve to connect one of the impact components and the first pump; each of the impact components includes an impact bottle and a buffer bottle, The impact bottle is connected to the input pipeline, and the buffer bottle is connected between the impact bottle and the first pump; the output pipeline is provided with at least one second switching valve connected to the plurality of impact components, and the control unit can control the at least one second switching valve to connect the impact component with the at least one ion chromatograph; the control unit includes a timing control module, and the at least one first switching valve and the at least one second switching valve can change the connection state of each impact component with the first pump and the at least one ion chromatograph according to the plurality of timing signals of the timing control module ; The ion chromatography sampling controller also includes at least one calibration pipeline connected to the output pipeline, and the at least one calibration pipeline is used to input a calibration liquid to the at least one ion chromatograph; the control unit also includes a status detection module, and the status detection module is used to receive and store multiple actuation signals from the sampling system and the at least one ion chromatograph. The control unit can determine whether the sampling system and the at least one ion chromatograph have abnormalities based on the multiple actuation signals; and a gas flow controller is provided between the input pipeline and the first pump.

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