A method and system for debugging laser process switch delay

Abstract

The application provides a laser process switch delay debugging method and system, the debugging method comprises the following steps: when a to-be-tested sample enters a laser processing area of a laser device, driving the laser device to emit laser based on a laser delay parameter of the laser device to form a plurality of light spots arranged in an array on the to-be-tested sample; obtaining a light spot image of the to-be-tested sample containing the plurality of light spots, selecting a plurality of detection light spots in an effective detection area based on the light spot image; judging whether a distance change quantity between a distance from a detection light spot to a previous detection light spot and a distance from the detection light spot to a next detection light spot is in a preset interval; if yes, the laser delay debugging is completed; otherwise, adjusting the laser delay parameter of the laser device until the distance change quantity is in the preset interval, the application can more accurately determine whether the laser delay parameter is appropriate, effectively avoids laser processing quality problems caused by inaccurate debugging, and improves the precision and efficiency of laser process switch delay debugging.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of laser technology, in particular to a laser process switch delay debugging method and system. BACKGROUND

[0002] Laser processing technology has been widely used in industrial manufacturing, electronic packaging, medical devices and other fields due to its high precision, high efficiency and non-contact processing advantages. Among them, the switch delay parameter of laser process is one of the key factors affecting the processing precision. If the delay parameter is not set properly, it may cause the relative position deviation of laser and processing object, and then cause the processing spot position deviation, size unevenness and other problems, which seriously affect the product qualification rate.

[0003] Currently, the debugging of laser process switch delay mainly relies on manual experience or traditional trial-and-error method. For example, the operator adjusts the delay parameter repeatedly and observes the processing effect such as spot shape, processing trace, etc., to gradually approach the optimal parameter. This method is not only inefficient, but also the debugging result is greatly affected by subjective factors, which is difficult to ensure the consistency of debugging precision. SUMMARY

[0004] In order to overcome the defects of the above-mentioned prior art, the present application provides a laser process switch delay debugging method and system, and the specific technical solutions are as follows:

[0005] A laser process switch delay debugging method applied to a laser delay measurement device, the laser delay measurement device comprising a moving platform, a laser device and a sample to be measured, the moving platform driving the laser device and the sample to be measured to move relative to each other;

[0006] The laser process switch delay debugging method comprises:

[0007] When the sample to be measured enters the laser processing area of the laser device, the laser device is driven to emit laser based on the laser delay parameter of the laser device, so as to form a plurality of light spots arranged in rows on the sample to be measured;

[0008] Obtain the light spot image of the sample to be measured containing a plurality of light spots, and select a plurality of detection light spots in the effective detection area based on the light spot image;

[0009] Judge whether the distance variation between the distance from the detection light spot to the previous detection light spot and the distance to the next detection light spot is in a preset interval; if yes, the laser delay debugging is completed; otherwise, adjust the laser delay parameter of the laser device until the distance variation is in the preset interval.

[0010] In one specific embodiment, the acquiring the light spot image of the sample to be measured containing a plurality of light spots, and selecting a plurality of detection light spots in the effective detection region based on the light spot image comprises:

[0011] acquiring a light spot image of the sample to be measured containing a plurality of light spots, and processing the light spot image to obtain a light spot moving track of the plurality of light spots;

[0012] selecting a plurality of light spots located in the middle region based on the light spot moving track, and taking the plurality of light spots located in the middle region as a plurality of detection light spots in the effective detection region.

[0013] In one specific embodiment, the determining whether the distance variation between the distance from the detection light spot to the previous detection light spot and the distance from the detection light spot to the next detection light spot is in a preset interval before comprising:

[0014] recognizing the contour of the plurality of detection light spots in the effective detection region according to a contour tracking algorithm;

[0015] positioning the center point of each detection light spot based on the contour of the plurality of detection light spots;

[0016] obtaining the distance between each adjacent detection light spot based on the center point of each detection light spot.

[0017] In one specific embodiment, the adjusting the laser time delay parameter of the laser device comprises:

[0018] obtaining a plurality of distance variations between the distance from each different detection light spot to the previous detection light spot and the distance from each different detection light spot to the next detection light spot;

[0019] determining a parameter adjustment amount of the laser device based on the maximum value of the plurality of distance variations, and adjusting the laser time delay parameter of the laser device based on the parameter adjustment amount.

[0020] In one specific embodiment, the determining the parameter adjustment amount of the laser device based on the maximum value of the plurality of distance variations comprises:

[0021] judging whether the maximum value is less than a preset threshold based on the maximum value of the plurality of distance variations;

[0022] if the maximum value is less than the preset threshold, querying a preset time delay adjustment table according to the maximum value to obtain the parameter adjustment amount;

[0023] otherwise, inputting the maximum value into a pre-trained time delay parameter prediction model to predict the parameter adjustment amount.

[0024] In one specific embodiment, the laser device is arranged above the moving platform, with a transmitting end of the laser device facing the moving platform, and a transmitting beam of the laser device forming the laser processing area on the moving platform;

[0025] The moving platform has a conveyor belt arranged thereon and moving relative to the laser device, and the sample to be tested is placed on the conveyor belt,

[0026] The moving platform is provided with a sensing device for sensing whether the sample to be tested enters the laser processing area of the laser device, and the laser device is driven when the sample to be tested enters the laser processing area and stopped when the sample to be tested leaves the laser processing area.

[0027] A laser process switch delay debugging system applied to a laser delay measurement device, the laser delay measurement device comprising a moving platform, a laser device, and a sample to be tested, the moving platform driving the laser device and the sample to be tested to move relative to each other;

[0028] The laser process switch delay debugging system comprises:

[0029] A laser transmitting module for driving the laser device to emit laser based on a laser delay parameter of the laser device when the sample to be tested enters a laser processing area of the laser device, so as to form a plurality of light spots arranged in an array on the sample to be tested;

[0030] An image processing module for acquiring a light spot image of the sample to be tested containing a plurality of light spots, and selecting a plurality of detection light spots in an effective detection area based on the light spot image;

[0031] A debugging module for judging whether a distance variation between a distance from a detection light spot to a previous detection light spot and a distance from the detection light spot to a next detection light spot is within a preset interval; if yes, the laser delay debugging is completed; otherwise, the laser delay parameter of the laser device is adjusted until the distance variation is within the preset interval.

[0032] In one specific embodiment, the acquisition of the light spot image of the sample to be tested containing a plurality of light spots and the selection of a plurality of detection light spots in an effective detection area based on the light spot image comprise:

[0033] Acquiring a light spot image of the sample to be tested containing a plurality of light spots, and processing the light spot image to acquire a light spot moving track of the plurality of light spots;

[0034] Selecting a plurality of light spots located in a middle area based on the light spot moving track, and taking the plurality of light spots located in the middle area as the plurality of detection light spots in the effective detection area.

[0035] In one specific embodiment, further comprising:

[0036] an identifying module configured to identify contours of the plurality of detected light spots in the effective detection area according to a contour tracking algorithm;

[0037] a positioning module configured to position a center point of each of the detected light spots based on the contours of the plurality of detected light spots;

[0038] a calculating module configured to obtain a distance between each adjacent detected light spot based on the center point of each of the detected light spots.

[0039] In one specific embodiment, the debugging module comprises:

[0040] an obtaining module configured to obtain, based on each of the different detected light spots, a distance variation between a distance to a previous detected light spot and a distance to a next detected light spot;

[0041] a determining module configured to determine a parameter adjustment amount of the laser device based on a maximum value of the distance variations, and adjust the laser delay parameter of the laser device based on the parameter adjustment amount.

[0042] The present application has at least the following beneficial effects:

[0043] The present application provides a laser process switch delay debugging method and system, which is applied to a laser delay measurement device, and the laser delay measurement device comprises a moving platform, a laser device and a sample to be measured. The moving platform drives the laser device and the sample to be measured to move relative to each other. The debugging method comprises the following steps: when the sample to be measured enters a laser processing area of the laser device, the laser device is driven to emit laser based on a laser delay parameter of the laser device, so as to form a plurality of light spots arranged in an array on the sample to be measured; a light spot image of the sample to be measured containing the plurality of light spots is obtained, a plurality of detected light spots in an effective detection area are selected based on the light spot image; it is judged whether a distance variation between a distance to a previous detected light spot and a distance to a next detected light spot of the detected light spot is in a preset interval; if yes, the laser delay debugging is completed; otherwise, the laser delay parameter of the laser device is adjusted until the distance variation is in the preset interval. Compared with the traditional debugging method, the present application can more accurately determine whether the laser delay parameter of the laser device is appropriate, effectively avoids the laser processing quality problem caused by inaccurate debugging, and improves the precision and efficiency of the laser process switch delay debugging. BRIEF DESCRIPTION OF DRAWINGS

[0044] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0045] Figure 1 The flow of the debugging method of the laser process switch delay provided by the present application Figure 1 ;

[0046] Figure 2 The flow of the debugging method of the laser process switch delay provided by the present application Figure 2 ;

[0047] Figure 3 The flow of the debugging method of the laser process switch delay provided by the present application Figure 3 ;

[0048] Figure 4 The flow of the debugging method of the laser process switch delay provided by the present application Figure 4 ;

[0049] Figure 5 The flow of the debugging method of the laser process switch delay provided by the present application Figure 5 ;

[0050] Figure 6 The schematic diagram of the debugging system of the laser process switch delay provided by the present application

[0051] Figure 7 The laser delay measuring device provided by the present application

[0052] Figure 8 The light spot moving trajectory diagram provided by the present application

[0053] Reference signs:

[0054] 1-laser emission module; 2-image processing module; 3-debugging module; 4-moving platform; 5-laser device; 6-sample to be measured; 8-laser processing area

[0055] 21-first processing module; 22-second processing module

[0056] 31-acquisition module; 32-determination module DETAILED DESCRIPTION

[0057] Various embodiments of the invention will be described more fully below. The invention may have various embodiments, and adjustments and changes may be made therein. However, it should be understood that there is no intention to limit the various embodiments of the invention to the specific embodiments disclosed herein, but rather the invention should be understood to cover all modifications, equivalents, and / or alternatives falling within the spirit and scope of the various embodiments of the invention.

[0058] In the following, the terms “comprising” or “may include” as used in various embodiments of the invention indicate the presence of the disclosed functions, operations, or elements, and do not limit the addition of one or more functions, operations, or elements. Furthermore, as used in various embodiments of the invention, the terms “comprising,” “having,” and their cognates are intended only to indicate a specific feature, number, step, operation, element, component, or combination of the foregoing, and should not be construed as primarily excluding the presence of one or more other features, numbers, steps, operations, elements, components, or combinations of the foregoing, or the possibility of adding one or more combinations of the foregoing.

[0059] Example 1

[0060] like Figure 1 As shown, a method for adjusting the delay of a laser process switch is applied to a laser delay measurement device. The laser delay measurement device includes a moving platform 4, a laser device 5, and a sample to be tested 6. The moving platform 4 drives the laser device 5 and the sample to be tested 6 to move relative to each other.

[0061] The methods for adjusting the switching delay in laser processes include:

[0062] S1: When the sample 6 to be tested enters the laser processing area 8 of the laser device, the laser device is driven to emit laser based on the laser delay parameters of the laser device to form multiple light spots arranged in a row on the sample 6 to be tested.

[0063] S2: Acquire a spot image of the sample 6 to be tested containing multiple spot lights, and select multiple detection spot lights within the effective detection area based on the spot image;

[0064] S3: Determine whether the change in distance between the detection spot and the previous detection spot and the next detection spot is within the preset range; if yes, the laser delay adjustment is complete; otherwise, adjust the laser delay parameters of the laser device until the change in distance is within the preset range.

[0065] Compared with the traditional debugging method, the laser delay parameter of the laser device can be more accurately determined whether it is appropriate, and the laser processing quality problem caused by inaccurate debugging can be effectively avoided, and the precision of the laser process on-off delay debugging is improved. Moreover, the method adopts the way of automatically acquiring the spot image and analyzing the distance change of the detection spot, without manual measurement and judgment operation which is tedious and prone to error. Once the distance change is not in the preset interval, the laser delay parameter of the laser device can be quickly adjusted and detected again until the debugging is completed, which greatly shortens the debugging period and significantly enhances the efficiency of the laser process on-off delay debugging.

[0066] Specifically, as shown in Figure 8 The distance between adjacent detection spots is d1, d2...dn in turn, the distance change between the distance of the detection spot to the previous detection spot and the distance to the next detection spot is d(m)-d(m-1), m∈(2,n); the preset interval is 0-0.5cm, when d(m)-d(m-1) is in the preset interval, the laser delay debugging is completed; otherwise, the laser delay parameter of the laser device is adjusted until the distance change is in the preset interval.

[0067] As shown in Figure 2 , 8 The spot image of the to-be-tested sample 6 containing multiple spots is acquired, and multiple detection spots in the effective detection area are selected based on the spot image, which includes:

[0068] The spot image of the to-be-tested sample 6 containing multiple spots is acquired, and the spot image is processed to obtain the spot moving track of the multiple spots;

[0069] Based on the spot moving track, multiple spots located in the middle region are selected, and the multiple spots located in the middle region are taken as multiple detection spots in the effective detection area.

[0070] The debugging method of the present application processes the image to obtain the spot moving track after acquiring the spot image, rather than directly selecting the spot randomly. Based on the spot moving track, multiple spots located in the middle region are accurately positioned as detection spots, and the middle region spot (such as Figure 8The middle area (as shown by the dashed line area) is less affected by the boundary effect, the starting and ending stage instability factors, and can more truly reflect the performance of the laser device in the stable working state. By selecting the detection light spot in this way, the detection error caused by the unreasonable selection of the light spot is effectively avoided, and the detection accuracy of the laser process switch delay debugging is significantly improved. Based on this, the laser delay debugging can ensure that the debugging result is real and reliable, reduces the debugging deviation caused by the improper selection of the detection light spot, and greatly enhances the reliability of the entire laser process switch delay debugging process.

[0071] In one embodiment, the middle area is within 1 / 3-2 / 3 of the light spot moving track.

[0072] In another embodiment, the light spot moving track of n light spots is obtained, and the light spots in the middle area are the mth light spot to the n-mth light spot. Wherein, m can be 5, 6, 7 or 8.

[0073] As shown in Figure 3 , it is judged whether the distance variation between the distance from the detection light spot to the previous detection light spot and the distance to the next detection light spot is in the preset interval before including:

[0074] According to the contour tracking algorithm, the contours of the plurality of detection light spots in the effective detection area are recognized;

[0075] Based on the contours of the plurality of detection light spots, the center point of each detection light spot is located;

[0076] Based on the center point of each detection light spot, the distance between each adjacent detection light spot is obtained.

[0077] The debugging method of the present application judges whether the distance variation of the detection light spot is in the preset interval before, adopts the contour tracking algorithm to recognize the contour of the detection light spot, compared with the traditional fuzzy boundary recognition method, greatly reduces the influence of boundary error on the subsequent center point positioning. Based on the accurate light spot contour, the center point of each detection light spot is located, and the distance between adjacent detection light spots is obtained, which effectively improves the accuracy of distance measurement and provides a reliable data basis for accurately judging whether the laser process switch delay is suitable.

[0078] As shown in Figure 4 , adjusting the laser delay parameter of the laser device includes:

[0079] Based on each different detection light spot, the distance variation between the distance from the detection light spot to the previous detection light spot and the distance to the next detection light spot is obtained;

[0080] Based on the maximum value of the plurality of distance variations, the parameter adjustment amount of the laser device is determined, and the laser delay parameter of the laser device is adjusted based on the parameter adjustment amount.

[0081] The commissioning method of the present application can comprehensively and meticulously analyze the change of the laser spot in space by obtaining a plurality of distance change amounts from different detection spots. The distance change amounts corresponding to different detection spots reflect the differences in the emission state of the laser at different positions or different times. Determining the parameter adjustment amount of the laser device based on the maximum of the plurality of distance change amounts can ensure that the adjustment amplitude is sufficient to correct the time delay problem of the laser device, while not causing new problems due to excessive adjustment, so that the adjustment of the laser time delay parameter is more accurate and reliable, which helps to improve the working stability and processing quality of the laser device.

[0082] As shown in Figure 5 Based on the maximum of the plurality of distance change amounts, determining the parameter adjustment amount of the laser device includes:

[0083] Based on the maximum of the plurality of distance change amounts, determining the parameter adjustment amount of the laser device includes:

[0084] If the maximum is less than the preset threshold, the parameter adjustment amount is obtained by querying the preset time delay adjustment table according to the maximum.

[0085] Otherwise, the maximum is input into the pre-trained time delay parameter prediction model to predict the parameter adjustment amount.

[0086] The commissioning method of the present application adopts a hierarchical judgment mechanism to determine the parameter adjustment amount of the laser device. Based on the maximum of the plurality of distance change amounts, it is judged whether it is less than the preset threshold. When the maximum is less than the preset threshold, it indicates that the time delay deviation of the laser device is in a relatively small range, and at this time, the parameter adjustment amount is obtained by querying the preset time delay adjustment table. The preset time delay adjustment table is summarized through a large number of experiments and data analysis, and has high accuracy and reliability, which can quickly give a suitable adjustment amount and improve the commissioning efficiency. When the maximum is greater than or equal to the preset threshold, it indicates that the laser device has a serious time delay problem, and at this time, the maximum is input into the pre-trained time delay parameter prediction model for prediction. The model can comprehensively consider various factors and accurately analyze complex time delay problems, so as to predict a more reasonable parameter adjustment amount and ensure the accuracy of laser commissioning in the case of serious time delay.

[0087] Specifically, the pre-trained time delay parameter prediction model is obtained by inputting a sample set containing a spot spacing difference value sequence and a corresponding optimal time delay adjustment amount into a machine learning model for training. The spot spacing difference value sequence and the corresponding optimal time delay adjustment amount are obtained by collecting historical commissioning data.

[0088] As shown in Figure 7As shown, the laser device is arranged above the moving platform, the emitting end of the laser device faces the moving platform, and the emitting light beam of the laser device forms a laser processing area 8 on the moving platform;

[0089] The moving platform has a conveying belt moving relative to the laser device, and the sample 6 to be tested is placed on the conveying belt,

[0090] The moving platform is provided with a sensing device for sensing whether the sample 6 to be tested enters the laser processing area 8 of the laser device; the laser device is driven when the sample 6 to be tested enters the laser processing area 8 and stopped when it leaves the laser processing area 8.

[0091] The laser device of the present application is arranged above the moving platform and the emitting end faces the moving platform, forming a laser processing area 8 on the moving platform. By arranging the laser device in the upper position, the emitting light beam can irradiate the sample 6 to be tested on the moving platform at a relatively vertical angle, reducing energy loss and deviation during light beam propagation, and ensuring the precision and quality of laser processing. At the same time, the conveying belt is arranged on the moving platform to carry the sample 6 to be tested and move it relative to the laser device, realizing the automatic conveying of the sample 6 to be tested and providing a basic condition for continuous and efficient laser processing. The sensing device arranged on the moving platform can send a driving signal to the laser device in time when it detects that the sample 6 to be tested enters the processing area, so that the laser device starts to work and processes the sample 6 to be tested; when the sample 6 to be tested leaves the processing area, the sensing device can quickly send a stop signal to make the laser device stop emitting. It not only saves energy, but also prolongs the service life of the laser device, and improves the safety and reliability of laser processing.

[0092] Embodiment 2

[0093] As Figure 6 shown, a laser process switch delay debugging system is applied to a laser delay measurement device, which includes a moving platform, a laser device, and a sample 6 to be tested, and the moving platform drives the relative movement of the laser device and the sample 6 to be tested;

[0094] The laser process switch delay debugging system includes:

[0095] A laser emitting module 1 is used to drive the laser device to emit laser based on the laser delay parameters of the laser device when the sample 6 to be tested enters the laser processing area 8 of the laser device, so as to form a plurality of light spots arranged in rows on the sample 6 to be tested;

[0096] An image processing module 2 is used to acquire a light spot image of the sample 6 to be tested containing a plurality of light spots, and select a plurality of detection light spots in the effective detection area based on the light spot image;

[0097] The debugging module 3 is configured to determine whether a distance variation between a distance to a previous detection light spot and a distance to a next detection light spot is within a preset range. If yes, the laser delay debugging is completed. Otherwise, the laser delay parameter of the laser device is adjusted until the distance variation is within the preset range.

[0098] The present application can more accurately determine whether the laser delay parameter of the laser device is appropriate through cooperation among the laser emission module 1, the image processing module 2 and the debugging module 3, effectively avoids the laser processing quality problem caused by inaccurate debugging, improves the accuracy of the laser process on-off delay debugging, and automatically acquires the light spot image and analyzes the distance variation of the detection light spot through the image processing module, without the need for manual measurement and judgment operation which is tedious and prone to error. Once the distance variation is not within the preset range, the laser delay parameter of the laser device can be quickly adjusted and detected again until the debugging is completed, thereby greatly shortening the debugging period and significantly enhancing the efficiency of the laser process on-off delay debugging.

[0099] As shown in Figure 6 The image processing module 2 comprises:

[0100] The first processing module 21 is configured to acquire a light spot image of the sample 6 to be measured containing a plurality of light spots, and process the light spot image to acquire a light spot moving track of the plurality of light spots.

[0101] The second processing module 22 is configured to select a plurality of light spots located in the middle region based on the light spot moving track, and take the plurality of light spots located in the middle region as a plurality of detection light spots in the effective detection region.

[0102] The present application can select the light spots in the middle region as the detection light spots through cooperation between the first processing module and the second processing module, and perform laser delay debugging based on this, so as to ensure that the debugging result is real and reliable, reduce the debugging deviation caused by improper selection of the detection light spots, and greatly enhance the reliability of the entire laser process on-off delay debugging process.

[0103] The debugging system of the laser process on-off delay further comprises:

[0104] The recognition module is configured to recognize the contour of the plurality of detection light spots in the effective detection region according to a contour tracking algorithm.

[0105] The positioning module is configured to position the center point of each detection light spot based on the contour of the plurality of detection light spots.

[0106] The calculation module is configured to acquire the distance between each adjacent detection light spot based on the center point of each detection light spot.

[0107] The application identifies the cooperation among the module, the positioning module and the calculation module, greatly reduces the influence of the boundary error on the subsequent center point positioning, and calculates the distance between each adjacent detection light spot through the center point, effectively improves the accuracy of distance measurement, and provides a reliable data basis for accurately judging whether the laser process switch delay is appropriate.

[0108] As shown in Figure 6 The debugging module 3 includes:

[0109] The acquisition module 31 is configured to acquire, based on each different detection light spot, a distance variation between a distance to a previous detection light spot and a distance to a subsequent detection light spot of the plurality of different detection light spots.

[0110] The determination module 32 is configured to determine a parameter adjustment amount of the laser device based on a maximum value of the plurality of distance variations, and adjust the laser delay parameter of the laser device based on the parameter adjustment amount.

[0111] The application ensures that the adjustment range is sufficient to correct the delay problem of the laser device, and at the same time, does not cause new problems due to excessive adjustment, so that the adjustment of the laser delay parameter is more accurate and reliable, and helps to improve the working stability and processing quality of the laser device.

[0112] The determination module includes:

[0113] The determination module includes:

[0114] The query module is configured to, if the maximum value is less than the preset threshold, query the preset delay adjustment table according to the maximum value to obtain the parameter adjustment amount.

[0115] The prediction module is configured to, if the maximum value is not less than the preset threshold, input the maximum value into a pre-trained delay parameter prediction model to predict the parameter adjustment amount.

[0116] The application can obtain a more accurate parameter adjustment amount through the cooperation among the judgment module, the query module and the prediction module, thereby improving the working stability and processing quality of the laser device.

[0117] In various embodiments of the present application, the expression "or" or "at least one of A or / and B" includes any combination or all combinations of the listed terms. For example, the expression "A or B" or "at least one of A or / and B" can include A, can include B, or can include both A and B.

[0118] The expressions used in the various embodiments of the present application, such as "first", "second", etc., can modify various constituent elements in the various embodiments, but can not limit the corresponding constituent elements. For example, the above expressions do not limit the order and / or importance of the elements. The above expressions are only for the purpose of distinguishing one element from other elements. For example, the first user device and the second user device indicate different user devices, although both are user devices. For example, without departing from the scope of the various embodiments of the present application, a first element can be referred to as a second element, and likewise, a second element can be referred to as a first element.

[0119] It should be noted that in the present application, unless otherwise explicitly specified and defined, the terms "mounting", "connecting", "fixing", etc. should be understood in a broad sense, for example, can be fixed connection, can also be detachable connection, or integral connection; can be mechanical connection, can also be electrical connection; can be direct connection, or can be indirect connection through an intermediate medium; can be internal communication of two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0120] In the present application, those of ordinary skill in the art need to understand that the terms indicating the orientation or positional relationship herein are based on the orientation or positional relationship shown in the drawings, which is only for the purpose of facilitating the description of the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0121] The terms used in the various embodiments of the present application are only for the purpose of describing specific embodiments and are not intended to limit the various embodiments of the present application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Unless otherwise defined, all terms used herein, including technical terms and scientific terms, have the same meaning as commonly understood by those of ordinary skill in the art to which the various embodiments of the present application belong. The terms such as those defined in a generally used dictionary will be interpreted to have the same meaning as the contextual meaning in the relevant technical field and will not be interpreted to have an idealized or overly formal meaning, unless clearly defined in the various embodiments of the present application.

Claims

1. A method for adjusting the switching delay in laser processing, characterized in that, The application is applied to a laser time delay measurement device, which comprises a moving platform, a laser device and a sample to be measured, and the moving platform moves the laser device and the sample to be measured relative to each other. The method comprises the following steps: When the sample to be measured enters the laser processing area of the laser device, the laser device is driven to emit laser based on the laser time delay parameter of the laser device, so as to form a plurality of light spots arranged in an array on the sample to be measured. An image of the sample to be measured containing a plurality of light spots is obtained, and a plurality of detection light spots in an effective detection area are selected based on the image of the light spots. It is judged whether the distance variation between the distance from a detection light spot to a previous detection light spot and the distance from the detection light spot to a next detection light spot is in a preset interval; if yes, the laser time delay debugging is completed; otherwise, the laser time delay parameter of the laser device is adjusted until the distance variation is in the preset interval. The method for obtaining the image of the sample to be measured containing a plurality of light spots and selecting a plurality of detection light spots in the effective detection area based on the image of the light spots comprises the following steps: An image of the sample to be measured containing a plurality of light spots is obtained, and the image of the light spots is processed to obtain the light spot moving track of the plurality of light spots. A plurality of light spots in the middle area are selected based on the light spot moving track, and the plurality of light spots in the middle area are taken as a plurality of detection light spots in the effective detection area. Before judging whether the distance variation between the distance from a detection light spot to a previous detection light spot and the distance from the detection light spot to a next detection light spot is in a preset interval, the following steps are included: The contours of a plurality of detection light spots in the effective detection area are recognized according to a contour tracking algorithm. The center point of each detection light spot is positioned based on the contours of a plurality of detection light spots. The distance between each adjacent detection light spot is obtained based on the center point of each detection light spot. The method for adjusting the laser time delay parameter of the laser device comprises the following steps: The distance variation between the distance from a plurality of different detection light spots to a previous detection light spot and the distance from the plurality of different detection light spots to a next detection light spot is obtained based on each different detection light spot. The parameter adjustment amount of the laser device is determined based on the maximum value of a plurality of distance variations, and the laser time delay parameter of the laser device is adjusted based on the parameter adjustment amount. The laser device is arranged above the moving platform, the emission end of the laser device faces the moving platform, and the emission beam of the laser device forms the laser processing area on the moving platform. The moving platform is provided with a conveying belt which moves relative to the laser device, and the sample to be measured is placed on the conveying belt. The moving platform is provided with a sensing device which is used for sensing whether the sample to be measured enters the laser processing area of the laser device; the laser device is used for driving when the sample to be measured enters the laser processing area and stopping when the sample to be measured leaves the laser processing area.

2. The method of claim 1, wherein, The method for determining the parameter adjustment amount of the laser device based on the maximum value of a plurality of distance variations comprises the following steps: It is judged whether the maximum value is less than a preset threshold based on the maximum value of a plurality of distance variations. If the maximum value is less than a preset threshold, a preset delay adjustment table is queried according to the maximum value to obtain the parameter adjustment amount; Otherwise, the maximum value is input into a pre-trained delay parameter prediction model to predict the parameter adjustment amount.

3. A system for debugging laser process switch delay, characterized in that, The method for debugging the laser process switch delay is used to perform the laser process switch delay, and the debugging system is applied to a laser delay measurement device, the laser delay measurement device includes a moving platform, a laser device, and a sample to be measured, and the moving platform moves the laser device and the sample to be measured relative to each other. The debugging system of the laser process switch delay includes: A laser emission module is configured to emit laser light from the laser device based on a laser delay parameter of the laser device when the sample to be measured enters a laser processing region of the laser device, so as to form a plurality of light spots arranged in an array on the sample to be measured. An image processing module is configured to acquire a light spot image of the sample to be measured containing a plurality of light spots, and select a plurality of detection light spots in an effective detection region based on the light spot image. A debugging module is configured to determine whether a distance change amount between a distance from a detection light spot to a previous detection light spot and a distance from the detection light spot to a next detection light spot is within a preset interval; if yes, the laser delay debugging is completed; otherwise, the laser delay parameter of the laser device is adjusted until the distance change amount is within the preset interval. The image processing module includes: A first processing module is configured to acquire a light spot image of the sample to be measured containing a plurality of light spots, and process the light spot image to acquire a light spot moving track of the plurality of light spots. A second processing module is configured to select a plurality of light spots located in a middle region based on the light spot moving track, and take the plurality of light spots located in the middle region as a plurality of detection light spots in an effective detection region. Further comprising: An identification module is configured to identify an outline of the plurality of detection light spots in the effective detection region according to an outline tracking algorithm. A positioning module is configured to position a center point of each detection light spot based on the outline of the plurality of detection light spots. A calculation module is configured to acquire a distance between each adjacent detection light spot based on the center point of each detection light spot. The debugging module includes: An acquisition module is configured to acquire a distance change amount between a distance from each different detection light spot to a previous detection light spot and a distance from the detection light spot to a next detection light spot. A determination module is configured to determine a parameter adjustment amount of the laser device based on a maximum value of a plurality of distance change amounts, and adjust the laser delay parameter of the laser device based on the parameter adjustment amount.

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