Automatic carbon rope winding assembly and vacuum evaporation equipment

Abstract

The invention relates to an automatic carbon rope winding assembly and vacuum evaporation equipment, a carbon rope roll is rotatably arranged on a rotating disc, and the carbon rope roll supplies a carbon rope to a carbon rope electrode assembly, so that each carbon rope electrode is sequentially connected with the carbon rope roll through the carbon rope; the rotating disc is rotatably arranged with the carbon rope electrode assembly as the center and drives the carbon rope roll to rotate relative to the carbon rope electrode assembly, so that the carbon rope makes contact with the at least one carbon rope electrode and is limited to the limiting structure of the carbon rope electrode. After the carbon rope section used in the evaporation process is broken, a new carbon rope section can be automatically wound under the condition that the vacuum environment is not damaged, and the carbon rope section does not need to be manually replaced every time the evaporation is finished, so that the continuous evaporation of carbon films with different thicknesses is realized, and the production efficiency is improved; the carbon rope coil can provide the carbon rope sections for the carbon rope electrode repeatedly, so that the carbon rope coil can be matched with other structures to realize continuous production, the influence caused by breakage of the carbon rope sections is greatly reduced, and the traditional production process of evaporating the carbon rope sections of the carbon rope electrode assembly is not influenced at all.

Description

Technical Field

[0001] The present application relates to the field of vacuum thermal evaporation carbon plating, and in particular to an automatic carbon rope winding assembly and a vacuum evaporation plating device. Background Art

[0002] Vacuum thermal evaporation carbon deposition is a physical vapor deposition technique that first heats a carbon source to a high temperature in a vacuum environment using an electric current, causing the solid carbon to sublime into carbon vapor. The carbon vapor is then transported within the vacuum environment and condensed and deposited onto the substrate surface, gradually forming a uniform nanoscale carbon film. Carbon coating is a critical step in ensuring high-fidelity, artifact-free data in a variety of advanced analytical techniques. Its unique advantages are particularly prominent in the following applications:

[0003] The amorphous nature of carbon films is crucial for EBSD analysis. Unlike metal coatings that generate their own diffraction patterns, carbon films offer excellent conductivity without interfering with crystallographic signals such as the sample's Kikuchi patterns, making them ideal for obtaining clean, precise EBSD results.

[0004] For EDS analysis, carbon's low atomic number offers significant advantages. It produces virtually no additional X-ray background signal, avoiding peak overlap issues that can occur with coatings like gold and platinum, thereby ensuring unimpeded, high-precision analysis of light and trace elements in samples.

[0005] For FIB-prepared TEM samples, carbon film is a critical protective layer. Prior to FIB cutting and Pt deposition, a pre-coated carbon film effectively protects the surface analysis area of ​​the sample, preventing damage or amorphization from ion beam bombardment, thereby ensuring the original structural integrity of the final TEM sample.

[0006] For biological and sensitive samples: Carbon film not only minimizes charging effects and thermal damage through its electrical and thermal conductivity, but its extremely fine particles also enable excellent reproduction of the delicate ultrastructure of biological samples. More importantly, it significantly increases secondary electron yield, resulting in brighter, clearer images of these low-contrast samples.

[0007] Therefore, carbon coating has become an indispensable core technology for achieving high-resolution morphology observation and high-precision composition analysis in cutting-edge applications such as EBSD, EDS, TEM-FIB, and biological electron microscopy, and is widely used in scanning electron microscopy sample preparation. The industry primarily uses two mainstream evaporation source technologies: the carbon rod method and the carbon rope method.

[0008] The main drawback of the carbon rod method lies in process control. It requires high current, generating significant thermal effects that may affect heat-sensitive samples. More critically, precise control of coating thickness and batch-to-batch repeatability are poor. Furthermore, the carbon rods frequently need to be manually sharpened to a specific shape, which not only increases operational complexity but also introduces human uncertainty.

[0009] The carbon rope method, also known as the carbon fiber method, features low operating current, minimal thermal effects, and highly precise and repeatable control of coating thickness, making it ideal for high-resolution imaging. However, due to the inherent brittleness of the carbon rope, it can break during use. Consequently, if a section of carbon rope breaks after evaporation, the operator must interrupt the process, disrupt the vacuum environment, manually replace the rope with the next section, and then re-evacuate the system. This frequent downtime and manual intervention significantly reduces experimental continuity and efficiency. Summary of the Invention

[0010] Based on this, it is necessary to provide an automatic carbon rope winding assembly and vacuum evaporation equipment.

[0011] One embodiment of the present application is an automatic carbon rope winding assembly, which includes a rotating disk, a carbon rope electrode assembly, and a carbon rope roll;

[0012] The carbon rope electrode assembly is provided with a carbon rope electrode and a limiting structure, and the carbon rope electrode is configured to connect to a power supply copper column;

[0013] The carbon rope roll is rotatably disposed on the rotating disk, and the carbon rope roll is configured to supply carbon rope to the carbon rope electrode assembly, so that each of the carbon rope electrodes is sequentially connected to the carbon rope roll through the carbon rope;

[0014] The rotating disk is rotatably arranged around the carbon rope electrode assembly. When the rotating disk is in a rotating state, the carbon rope roll is driven to rotate relative to the carbon rope electrode assembly, so that the carbon rope contacts at least one of the carbon rope electrodes and is limited to the limiting structure of the carbon rope electrode.

[0015] The automatic carbon rope winding assembly, through the cooperation of the rotating disk, the carbon rope electrode assembly and the carbon rope roll, realizes the automatic replenishment of the carbon rope when the carbon rope segment between the carbon rope electrodes is broken. On the one hand, it is suitable for the evaporation process. When the carbon rope segment used in the evaporation process is broken, a new carbon rope segment can be automatically wound without destroying the vacuum environment. There is no need to manually replace the carbon rope segment each time the evaporation is completed, thereby realizing the continuous evaporation of carbon films of different thicknesses and improving production efficiency. On the other hand, the carbon rope roll cooperates with the rotating disk, so that the carbon rope roll can repeatedly provide carbon rope segments for the carbon rope electrodes, which is beneficial to the assembly process. It is combined with other structures to achieve continuous production, greatly reducing the impact of carbon rope segment breakage; on the other hand, the carbon rope electrode is connected to the power supply copper column to realize the access of electric energy; on the other hand, the carbon rope electrode assembly is coordinated with the rotating disk. The carbon rope electrode assembly remains stationary, while the rotating disk rotates with the carbon rope electrode assembly as the center, which does not affect the traditional production process of evaporating carbon rope segments of the carbon rope electrode assembly at all. It can retain the advantage of high-precision control of the carbon rope method and overcome the core disadvantage of the traditional method that manual replacement leads to the destruction of vacuum. Therefore, it is conducive to adapting to traditional production processes, thereby promoting the universality of automatic winding carbon rope assemblies.

[0016] In some embodiments, the limiting structure includes an electrode center column and a compression spring, and the compression spring is configured to elastically abut the electrode center column against the carbon rope electrode to elastically clamp the carbon rope on the carbon rope electrode.

[0017] In some embodiments, the automatic carbon rope winding assembly further comprises an insulating boss disposed on the rotating disk, wherein the insulating boss is provided with a protrusion;

[0018] When the rotating disk is in a rotating state, the insulating boss drives the rotating disk to rotate relative to the carbon rope electrode assembly. When the rotating disk rotates until the protrusion abuts against the electrode center column, the electrode center column releases the carbon rope on the carbon rope electrode. When the rotating disk rotates until the protrusion is out of contact with the electrode center column, the electrode center column returns to its original position and elastically clamps the carbon rope on the carbon rope electrode.

[0019] In some embodiments, the carbon rope electrode assembly comprises two carbon rope electrodes and a limiting structure thereof; or,

[0020] The carbon rope electrode assembly includes a first carbon rope electrode assembly and a second carbon rope electrode assembly;

[0021] The first carbon rope electrode assembly includes a first electrode central column, a first carbon rope electrode, a first electrode spring, a first electrode insulating sleeve and a first clip spring;

[0022] The first electrode insulating sleeve is placed outside the first carbon rope electrode, the first electrode central column passes through the first carbon rope electrode, the first electrode spring and the first retaining spring are both located inside the first carbon rope electrode, one end of the first electrode spring abuts the first carbon rope electrode, and the other end abuts the first retaining spring, the first electrode central column is engaged with the first retaining spring and abuts the first carbon rope electrode through the first retaining spring, and the first electrode spring is configured to elastically abut the first electrode central column against the first carbon rope electrode, so that the first electrode central column is located at the top of the first carbon rope electrode and, together with the first carbon rope electrode, clamps the carbon rope on the first carbon rope electrode;

[0023] The second carbon rope electrode assembly includes a second electrode central column, a second carbon rope electrode, a second electrode spring, a second electrode insulating sleeve and a second clip spring;

[0024] The second electrode insulating sleeve is placed outside the second carbon rope electrode, the second electrode central column passes through the second carbon rope electrode, the second electrode spring and the second retaining spring are both located inside the second carbon rope electrode, one end of the second electrode spring abuts the second carbon rope electrode, and the other end abuts the second retaining spring, the second electrode central column is engaged with the second retaining spring and abuts the second carbon rope electrode through the second retaining spring, and the second electrode spring is configured to elastically abut the second electrode central column against the second carbon rope electrode, so that the second electrode central column is located at the top of the second carbon rope electrode and, together with the second carbon rope electrode, clamps the carbon rope on the second carbon rope electrode.

[0025] In some embodiments, the automatic carbon rope winding assembly further comprises a scraper rotatably disposed on the rotating disk; the scraper is configured to have a position of contacting the carbon rope electrode when the rotating disk is rotating, so as to scrape off the carbon rope wound around the carbon rope electrode.

[0026] In some embodiments, the scraper is in transmission connection with the rotating disk via a scraper gear, so that the rotation direction of the scraper is opposite to that of the rotating disk.

[0027] In some embodiments, the automatic carbon rope winding assembly further comprises the power supply copper column; or,

[0028] The automatic carbon rope winding assembly further includes a first bearing and a second bearing, the carbon rope electrode assembly passes through the rotating disk and is connected to the rotating disk via the first bearing and the second bearing, so that the rotating disk is rotatable around the carbon rope electrode assembly; or

[0029] The limiting structure limits the position of the carbon rope on the carbon rope electrode in a snap-fit ​​or clamping manner; or,

[0030] The automatic carbon rope winding assembly further includes a carbon rope positioning piece disposed on the rotating disk; the carbon rope positioning piece is located between the carbon rope roll and the carbon rope electrode assembly, and each of the carbon rope electrodes sequentially contacts the carbon rope positioning piece through the carbon rope; the carbon rope positioning piece is configured to contact the carbon rope and limit the position of the carbon rope.

[0031] In some embodiments, the automatic carbon rope winding assembly further includes a mounting flange, a baffle cover, and a protective cover;

[0032] The carbon rope electrode assembly is disposed on the mounting flange, the rotating disk is rotatably disposed on the mounting flange, the baffle cover and the protective cover are respectively disposed on two sides of the mounting flange to form a protective space, and the carbon rope electrode assembly, the rotating disk and the carbon rope coil are all located in the protective space; or,

[0033] The automatic carbon rope winding assembly also includes a power supply copper column assembly, which includes a first power supply copper column, a second power supply copper column, a copper column insulating cap, a copper column cover, a copper column flange seat and a copper column insulating pad; the first power supply copper column and the second power supply copper column serve as the power supply copper column, are respectively sleeved with the copper column insulating cap, pass through the copper column cover, the copper column flange seat and the copper column insulating pad in sequence, and are respectively connected to the carbon rope electrode; the copper column cover is arranged on the copper column flange seat, and the copper column flange seat is arranged on the mounting flange through the copper column insulating pad, so as to supply power to the carbon rope electrode through the first power supply copper column and the second power supply copper column in a sealed vacuum state.

[0034] In some embodiments, the automatic carbon rope winding assembly further comprises a monitoring assembly drivingly connected to the rotating disk, wherein the monitoring assembly is configured to control the rotation of the rotating disk when the carbon rope segment between the two carbon rope electrodes is disconnected, including controlling the rotation direction and / or rotation speed of the rotating disk.

[0035] In some embodiments, a vacuum evaporation device includes a housing and the automatic carbon rope winding assembly according to any one of the embodiments, wherein the automatic carbon rope winding assembly is disposed in the housing. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0037] Figure 1This is a schematic structural diagram of an embodiment of the automatic carbon rope winding assembly described in this application.

[0038] Figure 2 for Figure 1 Another schematic diagram of the embodiment shown.

[0039] Figure 3 for Figure 1 A schematic structural diagram of the embodiment shown with the baffle cover removed.

[0040] Figure 4 for Figure 2 A schematic structural diagram of the embodiment shown in another direction after the protective cover is removed.

[0041] Figure 5 for Figure 1 A schematic diagram of a portion of the structure of the embodiment shown in another direction.

[0042] Figure 6 for Figure 5 A schematic diagram of another direction of the embodiment shown.

[0043] Figure 7 for Figure 1 The embodiment shown is a schematic cross-sectional view of a portion of the structure in another direction.

[0044] Figure 8 for Figure 1 A schematic half-section diagram of the structure of the carbon rope rotating shaft assembly and the carbon rope coil of the illustrated embodiment.

[0045] Figure 9 for Figure 1 A schematic half-section diagram of the structure of the scraper wheel and the scraper wheel shaft assembly of the illustrated embodiment.

[0046] Figure 10 for Figure 1 A schematic diagram of the working state of the carbon rope coil of the embodiment shown is located on one side of the carbon rope electrode assembly.

[0047] Figure 11 for Figure 10 Schematic diagram of the carbon rope segment in the embodiment shown in a broken state.

[0048] Figure 12 for Figure 11 The carbon rope reel of the embodiment shown is a schematic diagram of a state in which the carbon rope is automatically wound by rotating relative to the carbon rope electrode assembly.

[0049] Figure 13 for Figure 1 Schematic diagram of the working state of the embodiment shown, in which the carbon rope coil is located on the other side of the carbon rope electrode assembly.

[0050] Figure 14 for Figure 13Schematic diagram of the carbon rope segment in the embodiment shown in a broken state.

[0051] Figure 15 for Figure 14 The carbon rope reel of the embodiment shown is a schematic diagram of a state in which the carbon rope is automatically wound by rotating relative to the carbon rope electrode assembly. DETAILED DESCRIPTION

[0052] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0053] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0054] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0055] In this application, unless otherwise expressly specified or limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or that the first feature and the second feature are indirectly in contact through an intermediate medium. Furthermore, a first feature being “above,” “above,” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below,” “below,” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0056] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and or" used in the specification of this application includes any and all combinations of one or more of the relevant listed items.

[0057] The present application discloses an automatic carbon rope winding assembly and vacuum evaporation equipment, which includes some or all of the technical features of the following embodiments; that is, the automatic carbon rope winding assembly and vacuum evaporation equipment include some or all of the following structures. In one embodiment of the present application, an automatic carbon rope winding assembly includes a rotating disk, a carbon rope electrode assembly, and a carbon rope roll; the carbon rope electrode assembly is provided with a carbon rope electrode and a limiting structure, and the carbon rope electrode is configured to be connected to a power supply copper column; the carbon rope roll is rotatably disposed on the rotating disk, and the carbon rope roll is configured to supply carbon rope to the carbon rope electrode assembly so that each carbon rope electrode is sequentially connected to the carbon rope roll through the carbon rope; the rotating disk is rotatably disposed with the carbon rope electrode assembly as the center, and when the rotating disk is in a rotating state, the carbon rope roll drives the carbon rope roll to rotate relative to the carbon rope electrode assembly so that the carbon rope contacts at least one of the carbon rope electrodes and is limited to the limiting structure of the carbon rope electrode. The automatic carbon rope winding assembly, through the cooperation of the rotating disk, the carbon rope electrode assembly, and the carbon rope reel, enables automatic rewinding of the carbon rope in the event of a carbon rope segment breakage between the carbon rope electrodes. This automatic winding assembly is suitable for evaporation processes. If a carbon rope segment used in the evaporation process breaks, a new carbon rope segment can be automatically rewound without disrupting the vacuum environment, eliminating the need to manually replace the carbon rope segment after each evaporation, thereby enabling continuous evaporation of carbon films of varying thicknesses and improving production efficiency. Furthermore, the carbon rope reel cooperates with the rotating disk, enabling the carbon rope reel to repeatedly supply carbon rope segments to the carbon rope electrodes, thereby facilitating continuous production with other structures and significantly reducing the impact of carbon rope segment breakage. Furthermore, the carbon rope electrode assembly cooperates with the rotating disk, allowing the carbon rope electrode assembly to remain stationary while the rotating disk rotates around the carbon rope electrode assembly. This does not affect the conventional production process for evaporating carbon rope segments from the carbon rope electrode assembly, thus facilitating adaptation to conventional production processes and enhancing the universality of the automatic carbon rope winding assembly.

[0058] The following combination Figures 1 to 15 , the automatic carbon rope winding assembly and vacuum evaporation equipment are described in detail. Figure 1 The related embodiment shows the mounting flange 1 and the baffle cover 2 of the automatic carbon rope winding assembly 100. Figure 2 The related embodiment shows a protective cover 3 located on the other side of the mounting flange 1. Figure 3The relevant embodiment shows a scraper wheel 4, a scraper wheel shaft assembly 5, a baffle cover insulating pad 6, a rotating disk 7, a first carbon rope electrode assembly 8, a carbon rope segment 9, an electrode protection cover 10, a second carbon rope electrode assembly 11, a carbon rope shaft assembly 12, a carbon rope roll 13, a carbon rope positioning shaft assembly 14, a carbon rope positioning piece 15, and a carbon rope 200 located on one side of a mounting flange 1. The carbon rope 200 is wound around the carbon rope roll 13, one end of which is connected to the two carbon rope electrodes via the carbon rope positioning piece 15. The section of the carbon rope 200 located between the two carbon rope electrodes is the carbon rope segment 9. Figure 4 The relevant embodiment shows the synchronous gear belt 16, the steering gear pulley 17, the steering gear mounting base 18, the steering gear 19, the power supply copper column assembly 20 and the magnetic fluid transmission assembly 21 located on the other side of the mounting flange 1; Figure 5 and Figure 6 The relevant embodiment shows the insulating flange 22, insulating boss 23, rotating disk gear 24, fixed internal gear 25, scraper shaft 501, scraper bearing seat 502, scraper gear 503, power supply copper column assembly 20 and magnetic fluid transmission assembly 21 located on opposite sides of the rotating disk 7. The power supply copper column assembly 20 includes a first power supply copper column 2001, a second power supply copper column 2002, a copper column insulating cap 2003, a copper column cover 2004, a copper column flange seat 2005 and a copper column insulating gasket 2006. The magnetic fluid transmission assembly 21 includes a magnetic fluid gear 2101, a magnetic fluid fixing seat 2102, a magnetic fluid cover 2103, a magnetic fluid transmission shaft 2104 and a magnetic fluid pulley 2105. Figure 7 The relevant embodiment shows a first bearing 26, a second bearing 27, a first electrode central column 801, a first carbon rope electrode 802, a first electrode spring 803, a first electrode insulating sleeve 804, a first retaining spring 805, a second electrode central column 1101, a second carbon rope electrode 1102, a second electrode spring 1103, a second electrode insulating sleeve 1104 and a second retaining spring 1105; Figure 8 The relevant embodiment shows a carbon rope shaft assembly 12 and a carbon rope roll 13. The carbon rope shaft assembly 12 includes a carbon rope shaft fixing column 1201, a carbon rope shaft 1202 and a magnetic attraction member 1203. Figure 9 The relevant embodiment shows a scraper wheel 4 and a scraper wheel shaft assembly 5, wherein the scraper wheel shaft assembly 5 includes a scraper wheel shaft 501, a scraper wheel bearing seat 502, a scraper wheel gear 503, a first scraper wheel bearing 504, a second scraper wheel bearing 505 and a scraper wheel bearing washer 506; Figure 10 、 Figure 11 、 Figure 12 、 Figure 13 、 Figure 14 and Figure 15 The relevant embodiment shows that the rotating disk 7 rotates around the carbon rope electrode assembly to wrap the carbon rope segment 9.

[0059] like Figures 1 to 3As shown, in some embodiments, an automatic carbon rope winding assembly 100 includes a rotating disk 7, a carbon rope electrode assembly, and a carbon rope roll 13; the carbon rope electrode assembly is provided with a carbon rope electrode and a limiting structure, and the carbon rope electrode is configured to be connected to a power supply copper column; the carbon rope roll 13 is rotatably disposed on the rotating disk 7, and the carbon rope roll 13 is configured to supply a carbon rope 200 to the carbon rope electrode assembly, so that each carbon rope electrode is sequentially connected to the carbon rope roll 13 through the carbon rope 200; that is, the carbon rope roll 13 is configured to wind the carbon rope 200, that is, the carbon rope 200 is wound on the carbon rope roll 13, and the section of the carbon rope 200 located between two carbon rope electrodes is called a carbon rope segment 9.

[0060] The rotating disk 7 is rotatable with the carbon rope electrode assembly as the center, that is, the center position of the carbon rope electrode assembly is the rotation center of the rotating disk 7. Figure 3 As shown, the first carbon rope electrode assembly 8 and the second carbon rope electrode assembly 11 are used as a whole, and the center position of the first carbon rope electrode assembly 8 and the second carbon rope electrode assembly 11 is the rotation center of the rotating disk 7; or as shown Figure 7 As shown, it can also be understood that the first carbon rope electrode 802 and the second carbon rope electrode 1102 are used as a whole, with the center position of the first carbon rope electrode 802 and the second carbon rope electrode 1102 as the rotation center of the rotating disk 7. When the rotating disk 7 is in a rotating state, it drives the carbon rope roll 13 to rotate relative to the carbon rope electrode assembly, so that the carbon rope 200 contacts at least one of the carbon rope electrodes and is limited to the limiting structure of the carbon rope electrode. The normal working state is as shown in FIG. Figure 10 or Figure 13 As shown; after working for a period of time, Figure 11 or Figure 14 As shown, when the carbon rope segment 9 between the two carbon rope electrodes is disconnected, the carbon rope roll 13 is still connected to one carbon rope electrode through the carbon rope 200, and the carbon rope roll 13 rotates relative to the carbon rope electrode assembly, as shown in FIG. Figure 12 or Figure 15 As shown, the carbon rope 200 is connected to another carbon rope electrode, and a new carbon rope segment 9 is formed between the two carbon rope electrodes.

[0061] This design, through the cooperation of the rotating disk 7, the carbon rope electrode assembly and the carbon rope coil 13, realizes the automatic replenishment of the carbon rope 200 when the carbon rope segment 9 between the carbon rope electrodes is broken. On the one hand, it is suitable for the evaporation process. When the carbon rope segment 9 used in the evaporation process is broken, a new carbon rope segment 9 can be automatically wound without destroying the vacuum environment. There is no need to manually replace the carbon rope segment 9 after each evaporation, thereby realizing continuous evaporation of carbon films of different thicknesses and improving production efficiency. On the other hand, the carbon rope coil 13 cooperates with the rotating disk 7, so that the carbon rope coil 13 can repeatedly provide carbon rope segments 9 for the carbon rope electrodes, that is, to wind the supplementary carbon rope segments 9 for the adjacent carbon rope electrodes. The carbon rope segment 9 is convenient for cooperating with other structures to realize continuous production, greatly reducing the impact caused by the breakage of the carbon rope segment 9; on the other hand, the carbon rope electrode is connected to the power supply copper column to realize the access of electric energy; on the other hand, the carbon rope electrode assembly is coordinated with the rotating disk 7, the carbon rope electrode assembly remains stationary, and the rotating disk 7 rotates with the carbon rope electrode assembly as the center, which does not affect the traditional production process of evaporating the carbon rope segment 9 of the carbon rope electrode assembly. It can retain the advantage of high-precision control of the carbon rope method and overcome the core disadvantage of the traditional method that the carbon rope segment 9 needs to be manually replaced, which causes the destruction of vacuum. Therefore, it is convenient to adapt to the traditional production process, thereby facilitating the improvement of the universality of the automatic winding carbon rope assembly 100.

[0062] like Figure 3 As shown, in order to conveniently replace the carbon rope reel 13, as an example, the automatic carbon rope winding assembly 100 further includes a carbon rope rotating shaft assembly 12 disposed on the rotating disk 7, and the carbon rope reel 13 is rotatably disposed on the rotating disk 7 through the carbon rope rotating shaft assembly 12. As an example, in combination with Figure 8 The carbon rope shaft assembly 12 includes a carbon rope shaft fixing column 1201, a carbon rope shaft 1202, and a magnetic element 1203. The carbon rope shaft fixing column 1201 is mounted on the rotating disk 7. The carbon rope shaft 1202 is rotatably mounted on the carbon rope shaft fixing column 1201. The carbon rope roll 13 is magnetically attached to the carbon rope shaft 1202 via the magnetic element 1203. For example, the magnetic element 1203 is a magnet or magnetic steel. In this embodiment, the carbon rope roll 13 is rotatable relative to the carbon rope shaft fixing column 1201.

[0063] This design, on the one hand, by installing the carbon rope shaft assembly 12 on the rotating disk 7, allows the carbon rope roll 13 to be rotatably mounted therewith. Combined with the magnetic attraction of the magnetic element 1203, the carbon rope roll 13 can be quickly removed from the carbon rope shaft 1202 without the need for complex tools or tedious operations. This greatly simplifies the replacement process of the carbon rope roll 13, saving replacement time and reducing equipment downtime. Furthermore, the carbon rope shaft 1202 is rotatably mounted on the carbon rope shaft fixing column 1201, ensuring that the carbon rope roll 13 can smoothly release the carbon rope 200 as the rotating disk 7 rotates. This prevents the carbon rope 200 from being stuck or pulled, leading to breakage, thereby ensuring a stable supply of carbon rope 200 and further reducing the impact of carbon rope segment 9 breakage on the vapor deposition process. Furthermore, the magnetic element 1203 is made of common magnetic materials such as magnets or magnetic steel. This is not only low-cost and readily available, but also offers stable magnetic attraction. It securely holds the carbon rope reel 13, preventing it from loosening and shifting during rotation, while also allowing for easy detachment for replacement. This balances securement reliability with operational convenience, helping to reduce the manufacturing and maintenance costs of the automatic carbon rope winding assembly 100. Furthermore, the carbon rope rotating shaft assembly 12 features a simple and compact design, providing excellent compatibility with existing components such as the rotating disk 7 and carbon rope reel 13. This allows integration into existing systems without requiring significant structural modifications to the automatic carbon rope winding assembly 100, without interfering with the conventional process for depositing the carbon rope segments 9 in the carbon rope electrode assembly. This further enhances the universality and practicality of the automatic carbon rope winding assembly 100.

[0064] In order to maintain the position of the carbon rope 200 on the carbon rope electrode and prevent the carbon rope segment 9 from being unable to be reconnected after being disconnected, in some embodiments, the limiting structure limits the position of the carbon rope 200 on the carbon rope electrode by means of a snapping or clamping mechanism. An example of a clamping mechanism is provided below. In some embodiments, the limiting structure includes an electrode center post and a compression spring. The compression spring is configured to elastically abut the electrode center post against the carbon rope electrode to elastically clamp the carbon rope 200 on the carbon rope electrode. As an example, the carbon rope electrode assembly further includes an electrode insulating sleeve and a retaining spring. The electrode insulating sleeve is positioned outside the carbon rope electrode. The electrode center post is snapped to the retaining spring and abuts the carbon rope electrode via the retaining spring. The compression spring and retaining spring are both located within the carbon rope electrode. The electrode center post passes through the carbon rope electrode and elastically abuts the carbon rope electrode at the top of the carbon rope electrode.

[0065] This design, on the one hand, fixes the position of the carbon rope 200 by snapping or clamping, effectively preventing the problem of carbon rope 200 shifting after the carbon rope segment 9 is disconnected, making it impossible to reconnect, ensuring a stable connection between the carbon rope 200 and the carbon rope electrode, laying the foundation for the subsequent automatic winding of a new carbon rope segment 9, and further ensuring the continuity of the evaporation process. On the other hand, taking the clamping structure composed of a compression spring and an electrode center column as an example, the elastic force provided by the compression spring allows the electrode center column to tightly abut the carbon rope electrode, achieving a flexible clamping of the carbon rope 200, which can prevent the carbon rope 200 from loosening and avoid damage to the carbon rope 200 caused by rigid clamping. At the same time, the electrode insulation sleeve can ensure electrical safety, and the spring clip helps to fix the electrode center column, improving the overall stability of the limiting structure. The layout of the various components is reasonable, does not interfere with the original function of the carbon rope electrode assembly, is compatible with traditional evaporation processes, and is conducive to the promotion and application of automatic winding carbon rope assemblies 100.

[0066] like Figure 5 As shown, in order to facilitate the loosening and resetting of the elastic clamping by rotation, in some embodiments, the automatic carbon rope winding assembly 100 further includes an insulating boss 23 provided on the rotating disk 7, and the insulating boss 23 has a raised portion. When the rotating disk 7 is in a rotating state, the insulating boss 23 is driven to rotate relative to the carbon rope electrode assembly. When the rotating disk 7 is rotated until the raised portion abuts against the electrode center column, the electrode center column releases the carbon rope 200 clamped on the carbon rope electrode. When the rotating disk 7 is rotated until the raised portion is out of contact with the electrode center column, the electrode center column is reset and elastically clamps the carbon rope 200 on the carbon rope electrode.

[0067] This design, on the one hand, by providing an insulating boss 23 with a raised portion on the rotating disk 7, drives the synchronous movement of the insulating boss 23 with the rotation of the rotating disk 7, automatically switching the tightness of the electrode center column's grip on the carbon rope 200. When the raised portion abuts, the carbon rope 200 is loosened, facilitating the delivery of a new carbon rope segment 9 to the carbon rope reel 13. When the raised portion disengages, the grip is restored, ensuring stable fixation of the carbon rope 200 without manual intervention, further enhancing the automation level of carbon rope 200 replacement and fixation. Furthermore, the insulating properties of the insulating boss 23 prevent electrical connection with the carbon rope electrode assembly, preventing leakage or current interference, and ensuring electrical safety of the assembly and stability of the vapor deposition process. Furthermore, this structure is driven solely by the inherent rotation of the rotating disk 7, eliminating the need for an additional power unit. This simplifies the overall structure of the automatic carbon rope winding assembly 100 and reduces manufacturing costs.

[0068] The following description will be made using two carbon rope electrodes as an example. If necessary, the embodiments of the present application are also applicable to a larger number of carbon rope electrodes. In some embodiments, the carbon rope electrode assembly is provided with two carbon rope electrodes and their limiting structures. Figure 3 and Figure 7As shown, in some embodiments, the carbon rope electrode assembly includes a first carbon rope electrode assembly 8 and a second carbon rope electrode assembly 11; the first carbon rope electrode assembly 8 includes a first electrode central column 801, a first carbon rope electrode 802, a first electrode spring 803, a first electrode insulating sleeve 804 and a first retaining spring 805; the first electrode insulating sleeve 804 is placed outside the first carbon rope electrode 802, the first electrode central column 801 passes through the first carbon rope electrode 802, and the first electrode spring 803 and the first retaining spring 805 are both located inside the first carbon rope electrode 802. One end of the first electrode spring 803 abuts the first carbon rope electrode 802, and the other end abuts the first clamping spring 805. The first electrode center column 801 is clamped with the first clamping spring 805 and abuts the first carbon rope electrode 802 through the first clamping spring 805. The first electrode spring 803 is configured to elastically abut the first electrode center column 801 against the first carbon rope electrode 802, so that the first electrode center column 801 is at the top position of the first carbon rope electrode 802 and clamps the first carbon rope electrode 802 together with the first carbon rope electrode 802. The carbon rope 200; the second carbon rope electrode assembly 11 includes a second electrode central column 1101, a second carbon rope electrode 1102, a second electrode spring 1103, a second electrode insulating sleeve 1104 and a second retaining spring 1105; the second electrode insulating sleeve 1104 is placed outside the second carbon rope electrode 1102, the second electrode central column 1101 passes through the second carbon rope electrode 1102, the second electrode spring 1103 and the second retaining spring 1105 are both located inside the second carbon rope electrode 1102, and one end of the second electrode spring 1103 abuts against the second carbon rope electrode The second electrode central column 1101 is engaged with the second clamping spring 1105 and abuts the second carbon rope electrode 1102 through the second clamping spring 1105. The second electrode spring 1103 is configured to elastically abut the second electrode central column 1101 against the second carbon rope electrode 1102, so that the second electrode central column 1101 is at the top position of the second carbon rope electrode 1102 and jointly clamps the carbon rope 200 on the second carbon rope electrode 1102 with the second carbon rope electrode 1102.

[0069] This design, on the one hand, uses two carbon rope electrodes as an example to construct a carbon rope electrode assembly, clarifying the specific composition and assembly relationship of each component, making the structural design clearer. This not only facilitates manufacturing, assembly and commissioning, but also provides clear guidance for subsequent maintenance and repair, reducing operational difficulty. On the other hand, in the first carbon rope electrode assembly 8, the first electrode spring 803, through the first retaining spring 805 and the first electrode center column 801, elastically abuts the first carbon rope electrode 802, thereby stably clamping the carbon rope 200. Similarly, in the second carbon rope electrode assembly 11, the second electrode spring 1103 cooperates with the second retaining spring 1105 and the second electrode center column 1101 to firmly secure the carbon rope 200. The synergistic effect of these two components effectively prevents displacement of the carbon rope 200, ensuring smooth reconnection after a carbon rope segment 9 breaks. This provides reliable support for continuous evaporation during automatic winding of the carbon rope assembly 100, reducing production interruptions caused by problems securing the carbon rope 200. Furthermore, the first electrode insulation sleeve 804 and the second electrode insulation sleeve 1104 are respectively mounted on the outer surface of the corresponding carbon rope electrode, isolating the current and preventing the risk of leakage, ensuring the safe operation of the equipment and the personal safety of operators, and improving the safety and reliability of the assembly during use. Furthermore, this design is clearly applicable to a larger number of carbon rope electrodes, not just two. This greatly broadens the application scenarios of the automatic carbon rope winding assembly 100, allowing it to be adapted to meet the requirements of evaporation for two or more carbon rope electrodes. This further enhances the universality of the assembly, enabling it to better meet the evaporation requirements of different production conditions, helping to improve production efficiency and carbon film evaporation quality.

[0070] like Figure 5 and Figure 7As shown, for an embodiment having an insulating boss 23, as an example, the rotating disk 7 drives the insulating boss 23 to rotate relative to the carbon rope electrode assembly. When the rotating disk 7 rotates until the protrusion abuts the first electrode central post 801, the elastic force of the first electrode spring 803 is overcome, so that the first electrode central post 801 and the first carbon rope electrode 802 loosen the carbon rope 200 therebetween. In other words, the carbon rope 200 between the first electrode central post 801 and the first carbon rope electrode 802 is loosened, so that the residual carbon rope 200 wound around the first carbon rope electrode 802 can be scraped off in cooperation with the embodiment having a scraper 4. Then, when the rotating disk 7 rotates until the protrusion is out of contact with the first electrode central post 801, the first electrode central post 801 is reset under the action of the first electrode spring 803, and the first electrode central post 801 and the first carbon rope electrode 802 jointly elastically clamp the carbon rope 200 on the first carbon rope electrode 802. Similarly, when the raised portion is rotated to abut against the second electrode central column 1101, the elastic force of the second electrode spring 1103 is overcome, so that the second electrode central column 1101 and the second carbon rope electrode 1102 loosen the carbon rope 200 therebetween, so as to facilitate the scraping of the residual carbon rope 200 wound around the second carbon rope electrode 1102 in cooperation with the embodiment having the scraper 4; then, when the raised portion is rotated to a state where it is out of contact with the second electrode central column 1101, the second electrode central column 1101 is reset under the action of the second electrode spring 1103, and the second electrode central column 1101 and the second carbon rope electrode 1102 jointly elastically clamp the carbon rope 200 on the second carbon rope electrode 1102. As an example, the carbon rope 200 can be wound around the first carbon rope electrode 802 or the second carbon rope electrode 1102 1 / 6 to 5 / 6 of a circle, and then clamped by the first electrode central column 801 and the first carbon rope electrode 802, or by the second electrode central column 1101 and the second carbon rope electrode 1102.

[0071] This design allows the insulating boss 23 to precisely contact the first and second electrode center posts 801 and 1101 as the rotating disk 7 rotates. When in contact, the raised portion overcomes the spring force of the corresponding electrodes, loosening the carbon rope 200. This allows the scraper 4 to efficiently scrape away any residual carbon rope 200 from the first and second carbon rope electrodes 802 and 1102, preventing it from affecting the winding and vapor deposition quality of the new carbon rope segment 9. After breaking contact, the electrode center posts return to their original position under the spring force, securing the new carbon rope segment 9 and providing a reliable foundation for subsequent vapor deposition. Furthermore, the carbon rope 200 can be wound around the carbon rope electrodes for 1 / 6 to 5 / 6 of a turn before being clamped. This winding range ensures sufficient contact between the carbon rope 200 and the electrodes to ensure conductivity and vapor deposition, while also preventing excessive winding turns that could waste the carbon rope 200 or cause it to break due to overtightening, achieving both practicality and cost-effectiveness. On the other hand, the entire process is driven by the original rotation of the rotating disk 7, without the need for an additional power device, thus simplifying the structure of the automatic carbon rope winding assembly 100 and not interfering with the traditional evaporation process.

[0072] like Figure 3 As shown, in order to prevent the carbon rope 200 remaining on the carbon rope electrode from causing adverse effects, in some embodiments, the automatic carbon rope winding assembly 100 further includes a scraper 4 rotatably disposed on the rotating disk 7; the scraper 4 is configured to contact the carbon rope electrode when the rotating disk 7 is rotating to scrape off the carbon rope 200 wound on the carbon rope electrode. In order to more completely scrape off the carbon rope 200 remaining on the carbon rope electrode, in some embodiments, the scraper 4 is transmission-connected to the rotating disk 7 via a scraper gear 503, such that the scraper 4 rotates in the opposite direction to the rotating disk 7.

[0073] This design, on the one hand, provides a rotatable scraper 4 on the rotating disk 7. The rotating disk 7 rotates to allow the scraper 4 to contact the carbon rope electrode, promptly scraping away any residual carbon rope 200 on the electrode. This prevents the residual carbon rope from affecting the stable connection between the new carbon rope segment 9 and the electrode, preventing unstable evaporation current or carbon film quality deviations caused by the residual carbon rope, thereby ensuring the continuity of the evaporation process and the quality of the finished carbon film. On the other hand, the scraper 4 is connected to the rotating disk 7 via a scraper gear 503, rotating in the opposite direction of the rotating disk 7, creating a reverse friction effect that more thoroughly removes the residual carbon rope 200 on the electrode. Compared to a scraper structure rotating in the same direction or a fixed structure, this scraping effect is superior. Furthermore, this transmission method relies on the original power of the rotating disk 7, eliminating the need for additional drive components, simplifying the structure of the automatic carbon rope winding assembly 100 and reducing manufacturing costs.

[0074] The traditional device for carbon coating non-conductive samples in scanning electron microscopes mainly adopts the high-temperature evaporation carbon coating technology of carbon rope. Before processing the sample each time, the old carbon rope needs to be manually removed and the new carbon rope needs to be wound onto the evaporation electrode. This operation process is not only cumbersome, but also cannot achieve continuous evaporation of carbon films of different thicknesses, which seriously restricts its work efficiency and scope of application. In addition, manual replacement of carbon ropes may also lead to operational errors, affecting the uniformity and quality stability of the carbon film, further limiting the application potential of the device in fields with high precision requirements. As an example, the automatic winding carbon rope assembly 100 also includes a fixed gear, which is fixed relative to the carbon rope electrode assembly, that is, it does not rotate with the rotating disk 7; the fixed gear is a fixed outer gear or a fixed inner gear 25; as Figure 3 and Figure 6 As shown. Below, the fixed internal gear 25 is taken as an example; as an example, the fixed internal gear 25 is annular and is arranged concentrically with the rotating disk 7, that is, the fixed internal gear 25 coincides with the rotating axis of the rotating disk 7; the automatic carbon rope winding assembly 100 also includes a scraper gear 503, the scraper gear 503 is engaged with the fixed internal gear 25 and the scraper gear 503 is connected to the scraper 4, so that when the rotating disk 7 rotates, the scraper gear 503 is driven to rotate by the fixed internal gear 25, thereby driving the scraper 4 to rotate, and the rotation direction of the scraper 4 is opposite to that of the rotating disk 7. As an example, the scraper gear 503 and the fixed internal gear 25 are both arranged at the bottom of the rotating disk 7 or in the internal space of the rotating disk 7 to avoid direct exposure to the carbon vapor environment, which can reduce carbon deposition pollution.

[0075] This design, on the one hand, utilizes the fixed internal gear 25 to cooperate with the scraper gear 503, and utilizes the characteristic that the fixed internal gear 25 does not rotate with the rotating disk 7. When the rotating disk 7 rotates, it drives the scraper gear 503 and the connected scraper wheel 4 to rotate in the opposite direction. Compared with traditional devices that manually replace carbon ropes, this design can automatically and efficiently scrape away residual carbon rope 200 on the carbon rope electrode, avoiding the tedious manual operation and solving the problem that traditional devices cannot continuously evaporate carbon films of different thicknesses, significantly improving work efficiency and broadening the scope of application. On the other hand, the counter-rotating scraper wheel 4 can more thoroughly remove residual carbon rope 200, reducing the evaporation error caused by residue, ensuring the uniformity and quality stability of the carbon film, breaking through the application limitations of traditional devices in high-precision applications, and improving the adaptability of the automatic carbon rope winding assembly 100 in high-end inspection scenarios such as carbon plating of non-conductive samples in scanning electron microscopes. Furthermore, positioning both the scraper gear 503 and the fixed internal gear 25 at the bottom or within the rotating disk 7 prevents them from being directly exposed to the carbon vapor environment, effectively reducing carbon deposit pollution and alleviating gear problems such as sticking and wear caused by carbon deposits. This extends the component's service life, reduces maintenance frequency and costs, and ensures the long-term stable operation of the automatic carbon rope winding assembly 100. Furthermore, the fixed internal gear 25 is concentrically positioned with the rotating disk 7, ensuring a stable transmission process and controllable rotational direction and speed of the scraper 4, further improving the accuracy of scraping residual carbon rope 200. Furthermore, the entire transmission structure relies on the inherent rotational power of the rotating disk 7, eliminating the need for additional drive components and simplifying the overall assembly structure.

[0076] like Figure 3 As shown, as an example, the automatic carbon rope winding assembly 100 further includes a scraper shaft assembly 5 rotatably arranged on the rotating disk 7, and the scraper 4 is arranged on the scraper shaft assembly 5. Figure 9As an example, the scraper wheel shaft assembly 5 includes a scraper wheel shaft 501, a scraper wheel bearing seat 502, a scraper wheel gear 503 and a scraper wheel bearing. The scraper wheel bearing seat 502 is installed on the rotating disk 7. The scraper wheel shaft 501 is connected to the scraper wheel bearing seat 502 through the scraper wheel bearing. The scraper wheel shaft 501 is also axially connected to the scraper wheel 4 and the scraper wheel gear 503, that is, the scraper wheel 4 uses the scraper wheel shaft 501 as the rotating axis, and the rotating axis of the scraper wheel gear 503 coincides with the scraper wheel shaft 501; the scraper wheel gear 503 is meshed with the fixed internal gear 25 to When the rotating disk 7 is rotating, the scraper 4 is driven to rotate by the scraper shaft 501, so that when the rotating disk 7 rotates around the carbon rope electrode assembly, the scraper 4 is rotated around the scraper shaft 501, similar to when the rotating disk 7 revolves, the scraper gear 503 and the fixed internal gear 25 cooperate to drive the scraper 4 to form a state of self-rotation, so that the scraper 4 rotates around the carbon rope electrode, thereby scraping off the remaining carbon rope 200 wound around the carbon rope electrode when the carbon rope segments 9 between adjacent carbon rope electrodes are disconnected.

[0077] like Figure 9 As shown, as an example, the scraper shaft assembly 5 includes a scraper shaft 501, a scraper bearing seat 502, a scraper gear 503, a first scraper bearing 504, a second scraper bearing 505, and a scraper bearing washer 506. The scraper bearing seat 502 is mounted on the rotating disk 7. The scraper shaft 501 is connected to the first scraper bearing 504 and the second scraper bearing 505 via the scraper bearing washer 506, and is connected to the scraper bearing seat 502 via the first scraper bearing 504 and the second scraper bearing 505. The scraper shaft 501 is also axially connected to the scraper 4 and the scraper gear 503, respectively. The scraper gear 503 is meshed with the fixed internal gear 25. As an example, the first scraper bearing 504 and the second scraper bearing 505 are integrally provided. As an example, the scraper shaft 501 and the scraper bearing washer are integrally provided.

[0078] This design, on the one hand, ensures the coaxiality and stability of the scraper wheel 4 during rotation by arranging the scraper shaft assembly 5 on the rotating disk 7, thereby stably mounting the scraper wheel 4 via the scraper shaft 501, scraper bearing seat 502, and other components. This prevents deviations during scraping of residual carbon rope 200 due to loose installation, thus ensuring effective scraping, laying the foundation for stable winding of new carbon rope segments 9, and further maintaining the continuity of the evaporation process. On the other hand, the scraper shaft 501 is simultaneously connected to the scraper wheel 4 and the scraper gear 503, and the scraper gear 503 meshes with the fixed internal gear 25. As the rotating disk 7 revolves, the gear transmission drives the scraper wheel 4 to rotate about the scraper shaft 501, forming a combined motion of revolution and rotation. This motion allows the scraper wheel 4 to fully rotate in close contact with the carbon rope electrode, efficiently scraping residual carbon rope 200 from the electrode. Especially after the carbon rope segment 9 is disconnected, the residual can be completely removed, preventing any impact on the subsequent carbon rope 200 connection and evaporation quality. Furthermore, the scraper bearing arrangement reduces friction between the scraper shaft 501 and the scraper bearing seat 502, reducing component wear and extending the service life of the scraper shaft assembly 5. It also ensures smooth rotation of the scraper 4, preventing incomplete scraping caused by jamming. The entire assembly is compact and highly compatible with existing components such as the rotating disk 7 and the fixed internal gear 25. It can be incorporated into the automatic carbon rope winding assembly 100 without significant modification, without interfering with the traditional evaporation process and its associated components.

[0079] In some embodiments, the automatic carbon rope winding assembly 100 further includes the power supply copper column; in some embodiments, such as Figure 4 As shown, the automatic carbon rope winding assembly 100 also includes a power supply copper column assembly 20; Figure 6 In some embodiments, the power supply copper column assembly 20 includes a first power supply copper column 2001, a second power supply copper column 2002, a copper column insulating cap 2003, a copper column cover 2004, a copper column flange seat 2005 and a copper column insulating gasket 2006; the first power supply copper column 2001 and the second power supply copper column 2002 serve as the power supply copper columns, are respectively sleeved with the copper column insulating cap 2003, sequentially pass through the copper column cover 2004, the copper column flange seat 2005 and the copper column insulating gasket 2006, and are respectively connected to the carbon rope electrode; the copper column cover 2004 is set on the copper column flange seat 2005, and the copper column flange seat 2005 is set on the mounting flange 1 through the copper column insulating gasket 2006, so as to supply power to the carbon rope electrode through the first power supply copper column 2001 and the second power supply copper column 2002 in a sealed vacuum state. As an example, the first power supply copper column 2001 is connected to the first carbon rope electrode 802 , and the second power supply copper column 2002 is connected to the second carbon rope electrode 1102 to achieve electrical conduction.

[0080] This design, on the one hand, utilizes a power supply copper post assembly 20, with first and second power supply copper posts 2001 and 2002 connected to the first and second carbon rope electrodes 802 and 1102, respectively, to achieve stable transmission of electrical energy to the carbon rope electrodes. This provides reliable power support for high-temperature carbon evaporation of the carbon rope 200, ensuring the normal operation of the evaporation process and preventing the impact of unstable power supply on the quality of carbon film deposition. Furthermore, within the power supply copper post assembly 20, the copper post insulating cap 2003 and copper post insulating gasket 2006 effectively isolate the power supply copper post from other components, preventing leakage risks and ensuring safe equipment operation. Furthermore, the copper post cover 2004 and copper post flange seat 2005, in conjunction with the copper post insulating gasket 2006, are mounted on the mounting flange 1, maintaining power supply in a sealed vacuum environment. This meets the vacuum requirements of the evaporation process, ensuring continuous power supply without breaking the vacuum, facilitating the continuous deposition of carbon films of varying thicknesses and further improving production efficiency. On the other hand, the component has a simple structure and reasonable assembly, and is well compatible with the carbon rope electrode assembly, which is conducive to its promotion and application in scenarios such as vacuum carbon plating.

[0081] like Figure 7 As shown, in order to facilitate the assembly of the carbon rope electrode assembly and the rotating disk 7, in some embodiments, the automatic carbon rope winding assembly 100 further includes a first bearing 26 and a second bearing 27. The carbon rope electrode assembly passes through the rotating disk 7 and is connected to the rotating disk 7 via the first bearing 26 and the second bearing 27, so that the rotating disk 7 can be rotatably arranged with the carbon rope electrode assembly as the center; as an example, the first bearing 26 and the second bearing 27 are arranged integrally.

[0082] This design, on the one hand, connects the carbon rope electrode assembly to the rotating disk 7 via the first bearing 26 and the second bearing 27, allowing the rotating disk 7 to rotate stably around the carbon rope electrode assembly. This ensures the coaxiality and stability of the rotating disk 7 when driving the carbon rope reel 13, scraper wheel 4, and other components. This prevents rotational deviation from causing inaccurate winding of the carbon rope 200 or incomplete removal of residual carbon rope by the scraper wheel 4, thus laying the foundation for the stable operation of the automatic winding carbon rope assembly 100. Furthermore, the bearing connection simplifies the assembly process of the carbon rope electrode assembly and the rotating disk 7, reducing installation difficulty. Furthermore, the bearings reduce frictional losses during relative rotation between the two, extending component life and preventing frictional jams that affect the automatic rewinding and vapor deposition efficiency of the carbon rope 200.

[0083] like Figure 3As shown, in order to protect the carbon rope 200 between the carbon rope electrode assembly and the carbon rope roll 13, in some embodiments, the automatic carbon rope winding assembly 100 further includes a carbon rope positioning piece 15 disposed on the rotating disk 7; the carbon rope positioning piece 15 is located between the carbon rope roll 13 and the carbon rope electrode assembly, and each carbon rope electrode sequentially contacts the carbon rope positioning piece 15 through the carbon rope 200; the carbon rope positioning piece 15 is configured to contact the carbon rope 200 and limit the position of the carbon rope 200. As an example, the carbon rope positioning piece 15 is provided with a perforation, and the carbon rope 200 supplied from the carbon rope roll 13 passes through the perforation and then contacts the carbon rope electrode; illustratively, the carbon rope positioning piece 15 has a cylindrical surface, and the carbon rope 200 supplied from the carbon rope roll 13 contacts a portion of the cylindrical surface before passing through the perforation. As an example, the automatic carbon rope winding assembly 100 further includes a carbon rope positioning shaft assembly 14 disposed on the rotating disk 7 , and the carbon rope positioning piece 15 is detachably disposed on the carbon rope positioning shaft assembly 14 .

[0084] This design, on the one hand, by providing a carbon rope positioning piece 15 on the rotating disk 7, positioned between the carbon rope coil 13 and the carbon rope electrode assembly and contacting the carbon rope 200, effectively limits the position of the carbon rope 200, preventing the carbon rope 200 from shifting, tangling, or loosening during its supply from the carbon rope coil 13 to the carbon rope electrode. This ensures a stable transmission path for the carbon rope 200 and precise contact between the carbon rope 200 and each carbon rope electrode, paving the way for the subsequent stable winding and vapor deposition of the carbon rope segments 9 and reducing vapor deposition failures caused by positional deviations of the carbon rope 200. Furthermore, the carbon rope positioning piece 15 is provided with perforations for the carbon rope 200 to pass through, or with a cylindrical surface to guide the carbon rope 200, further optimizing the guiding effect of the carbon rope 200. It also buffers the tension of the carbon rope 200 during transmission, preventing the carbon rope 200 from breaking due to excessive tension or accumulating due to insufficient tension, protecting the integrity of the carbon rope 200, reducing the probability of carbon rope segment 9 breakage, and minimizing the risk of production interruption. On the other hand, the carbon rope positioning piece 15 is detachable through the carbon rope positioning shaft assembly 14, which makes it easy to replace the appropriate carbon rope positioning piece 15 according to the requirements of the carbon rope 200 specifications, carbon rope electrode position, etc., thereby improving the flexibility and adaptability of the assembly; and the assembly structure of the carbon rope positioning piece 15 and the carbon rope positioning shaft assembly 14 is relatively simple and practical.

[0085] like Figure 1 and Figure 2 As shown, in some embodiments, the automatic carbon rope winding assembly 100 further includes a mounting flange 1, a baffle cover 2 and a protective cover 3; the carbon rope electrode assembly is arranged on the mounting flange 1, the rotating disk 7 is rotatably arranged on the mounting flange 1, the baffle cover 2 and the protective cover 3 are respectively arranged on both sides of the mounting flange 1 to form a protective space, combined with Figure 3, the carbon rope electrode assembly, the rotating disk 7 and the carbon rope coil 13 are all located in the protective space. As an example, the baffle cover 2 and the protective cover 3 are integrally provided. As an example, the automatic carbon rope winding assembly 100 further includes a baffle cover insulating pad 6, and the baffle cover 2 is provided on the mounting flange 1 through the baffle cover insulating pad 6. Figure 3 As shown, as an example, the automatic carbon rope winding assembly 100 further includes an electrode protection cover 10, which is provided on the carbon rope electrode assembly to cover the carbon rope electrode located on one side of the carbon rope roll 13 while exposing the carbon rope segments 9 between adjacent carbon rope electrodes.

[0086] This design, on the one hand, forms a protective space through the cooperation of the mounting flange 1, the baffle cover 2, and the protective cover 3, enclosing core components such as the carbon rope electrode assembly, rotating disk 7, and carbon rope coil 13. This effectively isolates external pollutants such as dust and impurities, preventing contamination of the components from affecting operational accuracy and service life. It also prevents the diffusion of evaporated carbon rope 200 during the evaporation process, ensuring a clean environment within the assembly and providing environmental protection for the quality of carbon film evaporation. On the other hand, the baffle cover 2 is mounted on the mounting flange 1 via the baffle cover insulating pad 6, which insulates the baffle cover 2 from the mounting flange 1, preventing leakage between components and ensuring electrical safety. Furthermore, the baffle cover 2 and protective cover 3 can be integrated, simplifying the assembly process, improving the sealing of the protective space, further enhancing the protective effect, and reducing the difficulty and cost of component assembly. On the other hand, the electrode protection cover 10 is provided on the carbon rope electrode assembly. On the premise that the exposed carbon rope segment 9 does not affect the evaporation, the carbon rope electrode on one side of the carbon rope roll 13 is covered. This can prevent the non-working area of ​​the carbon rope electrode from being contaminated by impurities or damaged by friction during the transmission of the carbon rope 200, thereby ensuring the stable conductive performance of the carbon rope electrode. In addition, the entire protection structure is well compatible with the original components of the assembly and does not interfere with the automatic winding and evaporation process of the carbon rope.

[0087] like Figure 5 As shown, as an example, the automatic carbon rope winding assembly 100 further includes an insulating flange 22, the carbon rope electrode assembly is arranged on the insulating flange 22, and the insulating flange 22 is arranged on the mounting flange 1; for the embodiment with the electrode protection cover 10, as an example, the electrode protection cover 10 is arranged on the insulating flange 22. Figure 4As shown, as an example, the automatic carbon rope winding assembly 100 further includes a synchronous gear belt 16, a steering gear pulley 17, a steering gear mounting seat 18, a steering gear 19, and a magnetic fluid transmission assembly 21; the steering gear mounting seat 18 is disposed on the mounting flange 1, the steering gear 19 is disposed on the steering gear mounting seat 18, the steering gear pulley 17 is disposed on the steering gear 19, and is connected to the magnetic fluid transmission assembly 21 via the synchronous gear belt 16, and the magnetic fluid transmission assembly 21 is connected to the rotating disk 7, such as by transmission connection. As an example, the automatic carbon rope winding assembly 100 further includes a rotating disk gear 24 connected to the rotating disk 7, the magnetic fluid transmission assembly 21 meshing with the rotating disk gear 24, the magnetic fluid transmission assembly 21 is connected to the rotating disk 7 via the rotating disk gear 24, and the steering gear 19 drives the rotating disk 7 to rotate via the magnetic fluid transmission assembly 21.

[0088] This design, by providing an insulating flange 22, onto which the carbon rope electrode assembly is mounted and then secured to the mounting flange 1, effectively isolates the carbon rope electrode assembly from the mounting flange 1, preventing the risk of leakage caused by current conduction to the mounting flange 1. Furthermore, the electrode protection cover 10 can be mounted against the insulating flange 22, further ensuring the insulation protection of the carbon rope electrode assembly and enhancing the operational safety of the automatic carbon rope winding assembly 100, thus meeting the electrical safety requirements of the vapor deposition process. Furthermore, the servo 19 is secured to the mounting flange 1 via the servo mounting base 18. It drives the magnetohydrodynamic transmission assembly 21 via the synchronous gear belt 16 and servo pulley 17, which in turn drives the rotating disk 7 via the rotating disk gear 24, forming a stable power transmission chain. This transmission method precisely controls the speed and direction of the rotating disk 7, ensuring that the rotating disk 7 drives the carbon rope reel 13, scraper 4, and other components along a predetermined trajectory. This ensures the accuracy of the automatic winding of the carbon rope 200 and the scraping of residual carbon rope, while avoiding deviations caused by manual operation. On the other hand, the application of the magnetic fluid transmission component 21 can realize power transmission while maintaining a vacuum sealed environment, without destroying the vacuum conditions required for evaporation, and provide a guarantee for the continuous evaporation of carbon films of different thicknesses.

[0089] like Figure 6 As shown, as an example, the magnetofluid transmission assembly 21 includes a magnetofluid gear 2101, a magnetofluid fixing seat 2102, a magnetofluid cover plate 2103, a magnetofluid transmission shaft 2104 and a magnetofluid pulley 2105; the magnetofluid gear 2101 and the magnetofluid pulley 2105 are respectively arranged on the magnetofluid transmission shaft 2104, and the magnetofluid transmission shaft 2104 and the magnetofluid cover plate 2103 are respectively arranged on the magnetofluid fixing seat 2102; the magnetofluid pulley 2105 is connected to the servo pulley 17 through the synchronous gear belt 16; the magnetofluid gear 2101 is connected to the rotating disk 7 through the rotating disk gear 24 to cooperate and drive the rotating disk 7 to rotate.

[0090] This design, on the one hand, allows the MFD transmission assembly 21 to cooperate with the rotating disk gear 24 and the steering gear pulley 17 through the MFD gear 2101 and MFD pulley 2105, respectively, to establish a stable power transmission path from the steering gear 19 to the rotating disk 7. This allows for precise power transmission, ensuring that the rotating disk 7 rotates at the preset speed and direction, ensuring that the carbon rope reel 13 supplies the carbon rope 200 and the scraper 4 scrapes away residual carbon rope in a precisely controlled manner. This prevents power transmission deviations from causing incorrect winding or incomplete scraping of the carbon rope 200, thus providing reliable power support for the automatic carbon rope winding process. Furthermore, the MFD mount 2102 and MFD cover 2103 provide a stable mounting base for components such as the MFD transmission shaft 2104, ensuring smooth transmission of the assembly and reducing transmission losses caused by component shaking. Furthermore, the MFD transmission characteristics enable power transmission while maintaining a vacuum-sealed environment, without disrupting the vacuum conditions required for evaporation. This meets the requirements of continuous evaporation, allowing for automatic replenishment of the carbon rope 200 without interrupting the process. On the other hand, the component structure is well compatible with the original components of the automatic carbon rope winding assembly 100, such as the servo 19 and the rotating disk 7, and does not interfere with the traditional process of evaporating the carbon rope segment 9 of the carbon rope electrode assembly, further improving the component's operational stability and universality, and helping to ensure evaporation efficiency and carbon film quality.

[0091] To reduce manual intervention and achieve automated operation as much as possible, in some embodiments, the automatic carbon rope winding assembly 100 further includes a monitoring assembly that is driven and connected to the rotating disk 7. The monitoring assembly is configured to control the rotation of the rotating disk 7 when the carbon rope segment 9 between the two carbon rope electrodes is disconnected, including controlling the rotation direction and / or rotation rate of the rotating disk 7. Alternatively, the monitoring assembly is configured to control the rotation of the rotating disk 7 when the carbon rope segment 9 between the two carbon rope electrodes is disconnected, including controlling the rotation direction or rotation rate of the rotating disk 7.

[0092] This design, on the one hand, utilizes a monitoring assembly connected to the rotating disk 7, enabling real-time monitoring of the status of the carbon rope segment 9 between the two carbon rope electrodes. When a carbon rope segment 9 becomes disconnected, the rotating disk 7 is promptly activated, enabling the automatic replenishment of the carbon rope 200 without manual observation or intervention. This completely eliminates the cumbersome operation associated with traditional manual carbon rope replacement, significantly reducing labor costs and time, further enhancing the automation level of the automatic carbon rope winding assembly 100 and providing a key guarantee for the continuous deposition of carbon films of varying thicknesses. Furthermore, the monitoring assembly not only controls the initiation of the rotation of the rotating disk 7 but also precisely controls its rotation direction and speed. A suitable rotation direction ensures that the carbon rope 200 released from the carbon rope reel 13 moves accurately toward the carbon rope electrodes, preventing the carbon rope 200 from deviating from the preset path and causing winding failures. An appropriate rotation speed matches the supply of carbon rope 200, preventing excessive rotation from causing slack and accumulation of the carbon rope 200, or excessive rotation from causing breakage due to excessive tension. This ensures a stable and orderly winding process for the carbon rope 200, improving the success rate and quality of winding new carbon rope segments 9. On the other hand, the drive connection design between the monitoring component and the rotating disk 7 can work in conjunction with existing structures such as the carbon rope rotating shaft component 12, the scraper 4, and the power supply copper column component 20 that automatically winds the carbon rope component 100: after the carbon rope segment 9 is disconnected, the monitoring component controls the rotation of the rotating disk 7, driving the carbon rope reel 13 to supply rope and the scraper 4 to scrape off the residual carbon rope. At the same time, the power supply copper column component 20 continuously and stably supplies power, forming a complete automated closed-loop process.

[0093] Next, continue to combine Figures 1 to 15The automatic carbon rope winding assembly 100 described in the examples is illustrated. In some embodiments, the automatic carbon rope winding assembly 100 is equipped with a pair of carbon rope electrodes fixed to a mounting flange 1, including a first carbon rope electrode 802 and a second carbon rope electrode 1102. The automatic carbon rope winding assembly 100 includes a rotating disk 7 capable of orbiting around the carbon rope electrodes. The rotating disk 7 is equipped with a carbon rope reel 13, a carbon rope positioning plate 15, and a scraper 4. As the rotating disk 7 rotates, the scraper 4 scrapes away the remaining carbon rope segments 9 that have broken off after use. Simultaneously, the carbon rope 200 on the carbon rope reel 13 is automatically wound onto the carbon rope electrodes to form new carbon rope segments 9. In some embodiments, the carbon rope electrodes, including the first carbon rope electrode 802 and the second carbon rope electrode 1102, are directly connected to and fixed to a power supply copper rod. A movable electrode center post is located in the center of the carbon rope electrodes, with a compression spring interposed between the carbon rope electrodes and the electrode center post. In some embodiments, the rotating disk 7 is equipped with a fixed insulating boss 23, which is higher on one side and lower on the other. As the rotating disk 7 rotates, the insulating boss 23 drives the electrode center column up and down, thereby clamping and loosening the carbon rope. In some embodiments, the scraper wheel 4 is connected to a transmission gear, such as a fixed internal gear 25, which rotates in the opposite direction as the rotating disk 7 rotates, effectively scraping away broken carbon ropes after use.

[0094] This design allows the carbon rope 200 used during the vapor deposition process to automatically rewrap and reconnect to form a new carbon rope segment 9 after breaking, eliminating the need for manual replacement after each deposition cycle. This allows for the continuous deposition of carbon films of varying thicknesses. The carbon rope electrodes are directly connected to the power supply copper posts, eliminating frictional losses and ensuring stable and reliable power supply. The transmission mechanism is concealed within the rotating disk 7, preventing direct exposure to the carbon vaporization environment and effectively reducing the risk of carbon deposit contamination.

[0095] In some embodiments, a vacuum evaporation apparatus includes a housing and the automatic carbon rope winding assembly 100 described in any embodiment, wherein the automatic carbon rope winding assembly 100 is disposed within the housing. Specifically, the vacuum evaporation apparatus includes the automatic carbon rope winding assembly 100 described in any embodiment and can also be referred to as a carbon coating apparatus for automatic carbon rope winding. Because the vacuum evaporation apparatus utilizes the automatic carbon rope winding assembly 100 described in any embodiment, it also exhibits the beneficial technical effects of the automatic carbon rope winding assembly 100, which will not be further described here.

[0096] In some embodiments, a vacuum evaporation device or an automatic carbon rope winding assembly 100 thereof is provided, wherein the mounting flange 1 is used to fix and support the remaining components to facilitate assembly of the automatic carbon rope winding assembly 100, the protective cover 3 is used to protect the internal components of the automatic carbon rope winding assembly 100, the baffle cover insulating pad 6 is installed on the mounting flange 1, the baffle cover 2 is installed on the baffle cover insulating pad 6, the scraper 4 is fixed on the scraper shaft assembly 5, the scraper shaft assembly is fixedly mounted on the rotating disk 7, the carbon rope positioning piece 15 is fixed on the carbon rope positioning shaft assembly 14, the carbon rope positioning shaft assembly 14 is fixed on the rotating disk 7, the carbon rope rotating shaft assembly 12 is fixed on the rotating disk 7, the carbon rope roll 13 is placed on the carbon rope rotating shaft assembly 12, and the first carbon rope electrode assembly 8 is fixed on the carbon rope rotating shaft assembly 12. Fixed on the insulating flange 22, the second carbon rope electrode assembly 11 is fixed on the insulating flange 22, the electrode protection cover 10 is fixed on the insulating flange 22, the insulating flange 22 is fixed on the mounting flange 1, the insulating boss 23 is fixed on the rotating disk 7, the rotating disk gear 24 is fixed on the rotating disk 7, the fixed internal gear 25 is fixed on the mounting flange 1, the first bearing 26 is fixed on the rotating disk 7, the second bearing 27 is fixed on the rotating disk 7, the power supply copper column assembly 20 is fixed on the mounting flange 1, the magnetohydrodynamic transmission assembly 21 is fixed on the mounting flange 1, the synchronous gear belt 16 is connected to the servo pulley 17, the servo pulley 17 is fixed on the servo 19, the servo 19 is fixed on the servo mounting seat 18, and the servo mounting seat 18 is fixed on the mounting flange 1.

[0097] As an example, the first carbon rope electrode assembly 8 includes a first electrode central column 801, a first carbon rope electrode 802, a first electrode spring 803, a first electrode insulating sleeve 804, and a first retaining spring 805. The first electrode central column 801 is installed at the center of the first carbon rope electrode 802 and can move up and down. The first electrode spring 803 is sleeved on the outside of the first electrode central column 801 to perform a compression and reset function. The first retaining spring 805 is fixed to the first electrode central column 801 to fix the first electrode spring 803.

[0098] As an example, the second carbon rope electrode assembly 11 includes a second electrode central column 1101, a second carbon rope electrode 1102, a second electrode spring 1103, a second electrode insulating sleeve 1104, and a second retaining spring 1105. The second electrode central column 1101 is installed at the center of the second carbon rope electrode 1102 and can move up and down. The second electrode spring 1103 is sleeved on the outside of the second electrode central column 1101 to perform a compression and reset function. The second retaining spring 1105 is fixed on the second electrode central column 1101 to fix the second electrode spring 1103.

[0099] As an example, the power supply copper column assembly 20 includes a first power supply copper column 2001, a second power supply copper column 2002, a copper column insulating cap 2003, a copper column cover 2004, a copper column flange seat 2005, and a copper column insulating pad 2006. The first power supply copper column 2001 is fixed on the copper column insulating pad 2006, the second power supply copper column 2002 is fixed on the copper column insulating pad 2006, the copper column insulating cap 2003 is fixed on the first power supply copper column 2001 and the second power supply copper column 2002, the copper column insulating pad 2006 is fixed on the copper column flange seat 2005, and the copper column insulating cap 2003 is fixed on the copper column flange seat 2005. The function of the power supply copper column assembly 20 is to supply power to the first carbon rope electrode assembly 8 and the second carbon rope electrode assembly 11, and at the same time can seal the vacuum.

[0100] As an example, the magnetofluid transmission assembly 21 includes a magnetofluid gear 2101, a magnetofluid fixing seat 2102, a magnetofluid cover plate 2103, a magnetofluid transmission shaft 2104, and a magnetofluid pulley 2105. The magnetofluid gear 2101 is fixed on the magnetofluid transmission shaft 2104, the magnetofluid pulley 2105 is fixed on the magnetofluid transmission shaft 2104, the magnetofluid transmission shaft 2104 is fixed on the magnetofluid fixing seat 2102, and the magnetofluid cover plate 2103 is fixed on the magnetofluid fixing seat 2102. The function of the magnetofluid transmission assembly 21 is to seal the vacuum and drive the rotating disk to rotate through gear transmission.

[0101] As an example, the carbon rope shaft assembly 12 includes a carbon rope shaft fixing column 1201, a carbon rope shaft 1202, and a magnetic element 1203. The carbon rope shaft 1202 is fixed to the carbon rope shaft fixing column 1201, and the magnetic element 1203 is fixed to the carbon rope shaft fixing column 1201. The carbon rope shaft assembly 12 is configured to attach the carbon rope coil 13 to the carbon rope shaft 1202 through the magnetic attraction of the magnetic element 1203, without affecting the rotation of the carbon rope coil.

[0102] As an example, the scraper shaft assembly 5 includes a scraper shaft 501, a scraper bearing seat 502, a scraper gear 503, a first scraper bearing 504, a second scraper bearing 505, and a scraper bearing washer 506. The scraper gear 503 is fixed on the scraper shaft 501, the scraper bearing washer 506 is fixed on the scraper shaft 501, the first scraper bearing 504 is fixed on the scraper bearing seat 502, the second scraper bearing 505 is fixed on the scraper bearing seat 502, the scraper shaft 501 is installed on the first scraper bearing 504 and the second scraper bearing 505, the scraper gear 503 and the fixed internal gear 25 rotate after meshing, thereby driving the scraper shaft 501 to rotate, and the scraper 4 rotates with the scraper shaft 501, so as to facilitate scraping off the broken carbon rope after use.

[0103] The following examples illustrate the specific use of the vacuum evaporation device or its automatic carbon rope winding assembly 100. When in use, first remove the baffle cover 2, then place the carbon rope roll 13 on the carbon rope rotating shaft assembly 12. The carbon rope 200 on the carbon rope roll 13 passes through the carbon rope positioning piece 15 and is then clamped onto the first carbon rope electrode assembly 8 and the second carbon rope electrode assembly 11, forming a carbon rope segment 9 between the first carbon rope electrode 802 and the second carbon rope electrode 1102. The baffle cover 2 is then restored to its original position. The initial state of the automatic carbon rope winding assembly 100 is as follows: Figure 10 shown.

[0104] The automatic carbon rope winding assembly 100 is installed in the vacuum chamber of the vacuum evaporation equipment. After the vacuum chamber reaches the vacuum degree required by the process, the thermal evaporation power supply outputs current to the power supply copper column assembly 20. The current is transmitted to the second carbon rope electrode assembly 11, and flows to the first carbon rope electrode assembly 8 through the carbon rope segment 9. After the carbon rope segment 9 is energized, it will generate high temperature, which will cause the solid carbon to sublime into steam instantly. Then the carbon atoms collide with the surface of the low-temperature sample and condense and deposit, thereby forming a nano-scale uniform carbon film. In this process, the carbon rope segment 9 will be continuously consumed and finally broken. The vacuum evaporation equipment or its automatic carbon rope winding assembly 100 can monitor whether the carbon rope segment 9 is broken at any time. After the carbon rope segment 9 is broken, the steering gear 19 drives the rotating disk gear 24 to rotate through the magnetic fluid gear 2101, thereby driving the rotating disk 7 to rotate. An insulating boss 23 is fixed on the rotating disk 7, and the insulating boss 23 is provided with a side convex The starting portion, i.e., the inclined boss, drives the first electrode center column 801 to move upward when rotating, thereby loosening the broken carbon rope segment 9. The scraper 4, carbon rope positioning plate 15, and carbon rope roll 13 on the rotating disk 7 will rotate together with the rotating disk 7, wherein the scraper gear 503 below the scraper shaft assembly 5 will mesh with the fixed internal gear 25 to achieve self-rotation, such as reverse rotation, thereby driving the scraper 4 to rotate to facilitate scraping off the broken carbon rope segment 9 after use. The broken carbon rope segment 9 will fall from the opening below the baffle cover 2 into the carbon rope collection box in the vacuum chamber. The carbon rope 200 on the carbon rope roll 13 starts to wind from the second carbon rope electrode assembly 11 to the first carbon rope electrode assembly 8, forming a new carbon rope segment 9. After the insulating boss 23 rotates to the lower position, the first electrode center column 801 moves toward the first carbon rope electrode 802 under the action of the first electrode spring 803, thereby clamping the carbon rope. This process is as follows Figure 11 and Figure 12 As shown, after rewinding the new carbon rope segment, Figure 13 shown.

[0105] In this way, carbon can be evaporated without breaking the vacuum. The thermal evaporation power supply continues to output current to the power supply copper column assembly 20, and the current is transmitted to the second carbon rope electrode assembly 11, and flows through the carbon rope segment 9 to the first carbon rope electrode assembly 8. Similarly, after the carbon rope segment 9 is energized, it will generate high temperature and evaporate and deposit to form a carbon film. In this process, the carbon rope segment 9 will be continuously consumed and finally broken. After the carbon rope segment 9 breaks, the servo 19 drives the rotating disk gear 24 to rotate through the magnetic fluid gear 2101, thereby driving the rotating disk 7 to rotate. The insulating boss 23 is fixed on the rotating disk 7, and the insulating boss 23 is provided with a protrusion as a bevel boss. When rotating, it drives the second electrode center column 1101 to move upward, thereby loosening the broken carbon rope segment 9, and the scraper on the rotating disk 7 The wheel 4, the carbon rope positioning piece 15, and the carbon rope roll 13 will rotate together with the rotating disk 7, wherein the scraper gear 503 below the scraper shaft assembly 5 will mesh with the fixed internal gear 25 to achieve self-rotation, thereby driving the scraper 4 to rotate to facilitate scraping off the broken carbon rope after use. The broken carbon rope segment 9 will fall from the opening below the baffle cover 2 into the carbon rope collection box in the vacuum chamber. The carbon rope 200 on the carbon rope roll 13 starts to wind from the first carbon rope electrode assembly 8 to the second carbon rope electrode assembly 11 to form a new carbon rope segment 9. After the insulating boss 23 rotates to the lower position, the second electrode center column 1101 moves toward the second carbon rope electrode 1102 under the action of the second electrode spring 1103 to clamp the carbon rope. This process is as follows Figure 14 and Figure 15 As shown, after rewinding the new carbon rope segment, Figure 10 shown.

[0106] That is to say Figure 10 As shown, the carbon rope coil 13 is located above the direction shown in the figure, and the carbon rope segment 9 is not broken and is in a complete state; Figure 11 As shown, the carbon rope segment 9 breaks after being powered on; Figure 12 As shown, the rotating disk 7 rotates clockwise in the direction shown, and the scraper 4 scrapes off the remaining carbon rope 200 on one of the first carbon rope electrode 802 and the second carbon rope electrode 1102, and the carbon rope coil 13 winds the carbon rope 200 around the carbon rope electrode to form a new carbon rope segment 9; Figure 13 As shown, the carbon rope coil 13 is located below the direction shown in the figure, and the carbon rope segment 9 is not broken and is in a complete state; Figure 14 As shown, the carbon rope segment 9 breaks after being powered on; Figure 15 As shown, the rotating disk 7 rotates clockwise in the direction shown, and the scraper 4 scrapes off the remaining carbon rope 200 on the other of the first carbon rope electrode 802 and the second carbon rope electrode 1102, and the carbon rope coil 13 winds the carbon rope 200 around the carbon rope electrode to form a new carbon rope segment 9.

[0107] After the above steps, the automatic carbon rope winding assembly 100 can automatically scrape off the broken carbon rope and wind a new carbon rope without destroying the vacuum environment, thereby achieving the function of continuous carbon film deposition.

[0108] It should be noted that other embodiments of the present application also include an automatic carbon rope winding assembly and a vacuum evaporation device that can be implemented by combining the technical features in the above embodiments.

[0109] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0110] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of patent protection for the present application shall be determined by the appended claims.

Claims

1. An automatic carbon rope winding assembly (100), characterized in that: It includes a rotating disk (7), a carbon rope electrode assembly (8, 11) and a carbon rope coil (13); The carbon rope electrode assembly (8, 11) is provided with a carbon rope electrode (802, 1102) and a limiting structure, and the carbon rope electrode (802, 1102) is configured to connect to the power supply copper pillars (2001, 2002); The carbon rope roll (13) is rotatably disposed on the rotating disk (7), and the carbon rope roll (13) is configured to supply carbon rope (200) to the carbon rope electrode assembly (8, 11), so that each of the carbon rope electrodes (802, 1102) is sequentially connected to the carbon rope roll (13) through the carbon rope (200); The rotating disk (7) is rotatably arranged with the carbon rope electrode assembly (8, 11) as the center. When the rotating disk (7) is in a rotating state, it drives the carbon rope roll (13) to rotate relative to the carbon rope electrode assembly (8, 11), so that the carbon rope (200) contacts at least one of the carbon rope electrodes (802, 1102) and is limited to the limiting structure of the carbon rope electrode (802, 1102).

2. The automatic carbon rope winding assembly (100) according to claim 1, characterized in that: The limiting structure comprises an electrode center column (801, 1101) and a compression spring, wherein the compression spring is configured to elastically abut the electrode center column (801, 1101) against the carbon rope electrode (802, 1102) to elastically clamp the carbon rope (200) on the carbon rope electrode (802, 1102).

3. The automatic carbon rope winding assembly (100) according to claim 2, characterized in that: The automatic carbon rope winding assembly (100) further includes an insulating boss (23) provided on the rotating disk (7), wherein the insulating boss (23) is provided with a protruding portion; When the rotating disk (7) is in a rotating state, it drives the insulating boss (23) to rotate relative to the carbon rope electrode assembly (8, 11), and when the boss is rotated to abut against the electrode center column (801, 1101), the electrode center column (801, 1101) releases the carbon rope (200) on the carbon rope electrode (802, 1102), and when the boss is rotated to a state where it is out of contact with the electrode center column (801, 1101), the electrode center column (801, 1101) is reset and elastically clamps the carbon rope (200) on the carbon rope electrode (802, 1102).

4. The automatic carbon rope winding assembly (100) according to claim 1, characterized in that: The carbon rope electrode assembly (8, 11) is provided with two carbon rope electrodes (802, 1102) and a limiting structure thereof; or, The carbon rope electrode assembly (8, 11) comprises a first carbon rope electrode assembly (8) and a second carbon rope electrode assembly (11); The first carbon rope electrode assembly (8) comprises a first electrode central column (801), a first carbon rope electrode (802), a first electrode spring (803), a first electrode insulating sleeve (804) and a first spring clip (805); The first electrode insulating sleeve (804) is sleeved on the outside of the first carbon rope electrode (802), the first electrode central column (801) passes through the first carbon rope electrode (802), the first electrode spring (803) and the first clamping spring (805) are both located in the first carbon rope electrode (802), one end of the first electrode spring (803) abuts the first carbon rope electrode (802), and the other end abuts the first clamping spring (805), the first electrode central column (801) is clamped with the first clamping spring (805) and abuts the first carbon rope electrode (802) through the first clamping spring (805), and the first electrode spring (803) is configured to elastically abut the first electrode central column (801) on the first carbon rope electrode (802), so that the first electrode central column (801) is at the top position of the first carbon rope electrode (802) and clamps the carbon rope (200) on the first carbon rope electrode (802) together with the first carbon rope electrode (802); The second carbon rope electrode assembly (11) comprises a second electrode central column (1101), a second carbon rope electrode (1102), a second electrode spring (1103), a second electrode insulating sleeve (1104) and a second spring clip (1105); The second electrode insulating sleeve (1104) is placed outside the second carbon rope electrode (1102), the second electrode central column (1101) passes through the second carbon rope electrode (1102), the second electrode spring (1103) and the second spring clip (1105) are both located inside the second carbon rope electrode (1102), one end of the second electrode spring (1103) abuts against the second carbon rope electrode (1102), and the other end abuts against the second spring clip (1105), the second electrode central column (1101) and the second carbon rope electrode (1102) are connected. The second spring clip (1105) is engaged and abuts against the second carbon rope electrode (1102) through the second spring clip (1105), and the second electrode spring (1103) is configured to elastically abut the second electrode center column (1101) against the second carbon rope electrode (1102), so that the second electrode center column (1101) is at the top position of the second carbon rope electrode (1102) and clamps the carbon rope (200) on the second carbon rope electrode (1102) together with the second carbon rope electrode (1102).

5. The automatic carbon rope winding assembly (100) according to claim 1, characterized in that: The automatic carbon rope winding assembly (100) further includes a scraper (4) rotatably arranged on the rotating disk (7); the scraper (4) is configured to have a position of contacting the carbon rope electrode (802, 1102) when the rotating disk (7) is rotating, so as to scrape off the carbon rope (200) wound on the carbon rope electrode (802, 1102).

6. The automatic carbon rope winding assembly (100) according to claim 5, characterized in that: The scraper wheel (4) is transmission-connected to the rotating disk (7) via a scraper wheel gear (503), so that the rotation direction of the scraper wheel (4) is opposite to that of the rotating disk (7).

7. The automatic carbon rope winding assembly (100) according to claim 1, characterized in that: The automatic carbon rope winding assembly (100) further includes the power supply copper pillars (2001, 2002); or, The automatic carbon rope winding assembly (100) further includes a first bearing (26) and a second bearing (27), the carbon rope electrode assembly (8, 11) passes through the rotating disk (7), and is connected to the rotating disk (7) via the first bearing (26) and the second bearing (27), so that the rotating disk (7) is rotatably arranged with the carbon rope electrode assembly (8, 11) as the center; or, The limiting structure limits the position of the carbon rope (200) on the carbon rope electrode (802, 1102) in a snap-fit ​​or clamping manner; or, The automatic carbon rope winding assembly (100) further includes a carbon rope positioning piece (15) disposed on the rotating disk (7); the carbon rope positioning piece (15) is located between the carbon rope roll (13) and the carbon rope electrode assembly (8, 11), and each of the carbon rope electrodes (802, 1102) sequentially contacts the carbon rope positioning piece (15) through the carbon rope (200); the carbon rope positioning piece (15) is configured to contact the carbon rope (200) and limit the position of the carbon rope (200).

8. The automatic carbon rope winding assembly (100) according to claim 1, characterized in that: The automatic carbon rope winding assembly (100) further includes a mounting flange (1), a baffle cover (2) and a protective cover (3); The carbon rope electrode assembly (8, 11) is arranged on the mounting flange (1), the rotating disk (7) is rotatably arranged on the mounting flange (1), the baffle cover (2) and the protective cover (3) are respectively arranged on two sides of the mounting flange (1) to form a protective space, and the carbon rope electrode assembly (8, 11), the rotating disk (7) and the carbon rope coil (13) are all located in the protective space; or, The automatic carbon rope winding assembly (100) further comprises a power supply copper column assembly (20), wherein the power supply copper column assembly (20) comprises a first power supply copper column (2001), a second power supply copper column (2002), a copper column insulating cap (2003), a copper column cover plate (2004), a copper column flange seat (2005) and a copper column insulating pad (2006); the first power supply copper column (2001) and the second power supply copper column (2002) serve as the power supply copper columns (2001, 2002), are respectively sleeved with the copper column insulating cap (2003), and sequentially pass through the copper columns. The cover plate (2004), the copper column flange seat (2005) and the copper column insulating pad (2006) are respectively connected to the carbon rope electrodes (802, 1102); the copper column cover plate (2004) is arranged on the copper column flange seat (2005), and the copper column flange seat (2005) is arranged on the mounting flange (1) through the copper column insulating pad (2006), so as to supply power to the carbon rope electrodes (802, 1102) through the first power supply copper column (2001) and the second power supply copper column (2002) in a sealed vacuum state.

9. The automatic carbon rope winding assembly (100) according to any one of claims 1 to 8, characterized in that: The automatic carbon rope winding assembly (100) further includes a monitoring assembly that drives and connects to the rotating disk (7). The monitoring assembly is configured to control the rotation of the rotating disk (7) when the carbon rope segment (9) between the two carbon rope electrodes (802, 1102) is disconnected, including controlling the rotation direction and / or rotation speed of the rotating disk (7).

10. A vacuum evaporation device, characterized in that: It comprises a housing and the automatic carbon rope winding assembly (100) according to any one of claims 1 to 9, wherein the automatic carbon rope winding assembly (100) is arranged in the housing.

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