Two-dimensional large-angle fast reflecting mirror device based on PCB eddy current sensor

Abstract

The invention relates to the technical field of fast reflecting mirrors, in particular to a two-dimensional large-angle fast reflecting mirror device based on a PCB eddy current sensor, and the device comprises a flexible supporting assembly which enables a reflecting mirror assembly to deflect in a two-dimensional direction, and enables the reflecting mirror assembly to reset through the elastic deformation of the flexible supporting assembly after the angular displacement of the reflecting mirror assembly occurs; the eddy current sensor probes comprise multiple layers of coils, the multiple layers of coils are arranged on the eddy current circuit board in a printing mode, and each pair of eddy current sensor probes are symmetrically arranged on the eddy current circuit board. The flexible supporting assembly is matched with the moving magnetic type driving structure, so that the reflector assembly can achieve large-angle deflection in two orthogonal directions, compared with a traditional micro-angle deflection structure, the maximum deflection angle is remarkably increased, a wider view field range can be covered, and the large-angle deflection structure is suitable for application scenes such as large-view-field scanning, target rapid capture and wide-angle wave beam control.

Description

Technical Field

[0001] The present invention relates to the technical field of fast reflector, and in particular to a two-dimensional large-angle fast reflector device based on a PCB eddy current sensor. Background Art

[0002] Fast mirror devices are a key actuator widely used in high-precision optical control applications such as laser scanning, space communications, imaging systems, and target tracking. These devices primarily utilize a drive mechanism to deflect the mirror, enabling rapid and precise control of the beam's direction. Existing fast mirror devices typically utilize piezoelectric, electrostatic, or voice coil drives to achieve minute deflection of the mirror. Traditional two-dimensional fast mirrors typically include four voice coil motors, with each pair of two forming a push-pull pair to form a rotating axis. These provide smooth, uniform torque to the mirror and boast advantages such as small size, compact structure, high precision, wide bandwidth, and high speed. They have been widely used in key areas such as space laser communications, astronomical telescopes, adaptive optics, image motion compensation for aerial photography, high-precision laser processing equipment, and carrier laser systems.

[0003] Existing moving magnet fast reflectors use voice coil motor drive technology to achieve rapid light beam deflection through a structural design of a fixed coil and a movable magnet. However, most existing moving magnet fast reflectors have a small deflection angle. Summary of the Invention

[0004] (1) Purpose of the invention

[0005] The purpose of the present invention is to provide a two-dimensional large-angle fast reflector device based on PCB eddy current sensors, which uses a flexible support component with a cross structure and a dynamic magnetic drive structure to enable the reflector assembly to achieve large-angle deflection in two orthogonal directions. The eddy current sensor adopts a printed multi-layer coil structure, which can accurately monitor the two-dimensional angular displacement of the reflector assembly, realize closed-loop real-time feedback, and improve the accuracy and reliability of control.

[0006] (2) Technical solution

[0007] To solve the above problems, the present invention provides a two-dimensional large-angle fast reflector device based on a PCB eddy current sensor, comprising:

[0008] Reflector assembly, flexible support assembly, moving magnet electromagnetic drive assembly, eddy current sensor assembly and base;

[0009] The reflector assembly, the flexible support assembly and the base are sequentially connected along the axial direction; the flexible support assembly enables the reflector assembly to deflect in two dimensions, and after the reflector assembly undergoes angular displacement, the reflector assembly is reset by its own elastic deformation;

[0010] The dynamic magnetic electromagnetic drive assembly and the eddy current sensor assembly are arranged around the center position inside the base; the dynamic magnetic electromagnetic drive assembly drives the reflector assembly to deflect within a set angle;

[0011] The eddy current sensor assembly includes an eddy current circuit board and at least two pairs of eddy current sensor probes;

[0012] The eddy current sensor probe includes a multi-layer coil, which is arranged on the eddy current circuit board by printing, and each pair of the eddy current sensor probes is symmetrically arranged on the eddy current circuit board. The eddy current sensor probe is used to detect the deflection angle of the reflector assembly.

[0013] In another aspect of the present invention, preferably, the base includes a base body and a base circuit board, wherein the base circuit board is arranged at an end of the base body away from the reflector assembly; and the eddy current circuit board is arranged at an end of the base body close to the reflector assembly;

[0014] The eddy current circuit board includes a welding pin, and the base body is provided with a welding pin through hole. The welding pin and the welding pin through hole are adapted to each other, and the eddy current circuit board is connected to the base circuit board through the welding pin and the welding pin through hole.

[0015] In another aspect of the present invention, preferably, the moving magnet type electromagnetic drive assembly comprises two pairs of permanent magnets and two pairs of drive coils, and the drive coils and permanent magnets are symmetrically arranged in pairs around the central axis of the reflector assembly;

[0016] The two pairs of driving coils are respectively vertically embedded in the mounting grooves on the base body and distributed around the flexible support component. The permanent magnets are arranged inside the driving coils in a one-to-one correspondence.

[0017] In another aspect of the present invention, preferably, the end of the permanent magnet away from the reflector assembly is configured as a conical structure, or as a structure combining a conical shape and an arc shape.

[0018] In another aspect of the present invention, preferably, a connecting piece is included, and one end of the permanent magnet close to the reflector assembly is connected to the reflector assembly through the connecting piece.

[0019] In another aspect of the present invention, preferably, the flexible support assembly is configured as a cross-flexible support hinge.

[0020] In another aspect of the present invention, preferably, the flexible support assembly includes two pairs of flexible hinge pieces and two pairs of spring pieces, the two pairs of flexible hinge pieces are arranged in a cross-like manner, and each pair of flexible hinge pieces are arranged opposite to each other to form a two-dimensional flexible support structure;

[0021] The two pairs of spring sheets are respectively arranged between a corresponding pair of flexible hinge sheets. The two spring sheets in each pair of spring sheets are respectively arranged in orthogonal directions. The upper and lower ends of the spring sheets are respectively connected to the opposite surfaces of the pair of flexible hinge sheets.

[0022] In another aspect of the present invention, preferably, the reflector assembly includes a reflector surface and a mirror holder;

[0023] The mirror surface of the reflector is fixedly connected to the mirror holder, and the moving magnet electromagnetic drive component drives the mirror holder to drive the mirror surface of the reflector to deflect.

[0024] In another aspect of the present invention, preferably, a connecting slot is provided at the bottom of the mirror holder, the position and number of the connecting slot correspond to the connecting piece, and the dynamic magnetic electromagnetic drive component is fixedly connected to the mirror holder through the connecting piece and the connecting slot.

[0025] Another aspect of the present invention preferably further includes a motor line, wherein both ends of the motor line are connected to the moving magnet electromagnetic drive component and the host computer, and the motor line includes four groups of control cables, each group including a positive line and a negative line.

[0026] (3) Beneficial effects

[0027] The above technical solution of the present invention has the following beneficial technical effects:

[0028] The present invention uses a flexible support component in conjunction with a dynamic magnetic drive structure to enable the reflector assembly to achieve large-angle deflection in two orthogonal directions. Compared with the traditional micro-angle deflection structure, the maximum deflection angle is significantly improved, which can cover a wider field of view and is suitable for application scenarios such as large field of view scanning, rapid target capture and wide-angle beam control. The dynamic magnetic electromagnetic drive component is symmetrically arranged around the reflector, with high drive efficiency and uniform magnetic field, so that the reflector assembly can complete rapid response within milliseconds and has micro-radian precision positioning capabilities. The dynamic magnetic electromagnetic drive component and the eddy current sensor component are integrated inside the base, and the reflector, drive, detection and support structures are highly integrated, occupying a small space, which is convenient for application in compact optical-mechanical structures and is conducive to the miniaturization design of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention;

[0030] Figure 2 is a cross-sectional view of the overall structure of an embodiment of the present invention;

[0031] Figure 3 is a schematic structural diagram of a flexible support assembly according to an embodiment of the present invention;

[0032] Figure 41 is a schematic structural diagram of an eddy current sensor assembly according to an embodiment of the present invention;

[0033] Figure 5 is a bottom view of a mirror holder according to an embodiment of the present invention;

[0034] Figure 6 is a cross-sectional view of a base according to an embodiment of the present invention;

[0035] Figure 7 This is a block diagram of input and output relationships of an embodiment of the present invention;

[0036] Figure 8 This is a schematic diagram of the electrical interface connection of a moving magnet type electromagnetic drive assembly according to one embodiment of the present invention;

[0037] Figure 9 It is a schematic diagram of signal output of an eddy current sensor assembly according to an embodiment of the present invention.

[0038] Reference numerals:

[0039] 1: reflector assembly, 110: reflector surface, 120: mirror support,

[0040] 2: flexible support component, 210: flexible hinge piece, 220: spring piece,

[0041] 3: Moving magnetic electromagnetic drive assembly, 310: Permanent magnet, 320: Drive coil,

[0042] 4: Eddy current sensor assembly, 410: Eddy current circuit board, 411: welding pin, 420: Eddy current sensor probe,

[0043] 5: base, 510: base body, 520: base circuit board,

[0044] 6: Connecting piece, 7: Motor wire, 8: Communication cable. DETAILED DESCRIPTION

[0045] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present invention.

[0046] The accompanying drawings illustrate schematic diagrams of layer structures according to embodiments of the present invention. These figures are not drawn to scale; for clarity, some details are exaggerated and some details may be omitted. The shapes, relative sizes, and positional relationships of the various regions and layers shown in the figures are merely exemplary and may deviate in practice due to manufacturing tolerances or technical limitations. Those skilled in the art may design regions / layers with different shapes, sizes, and relative positions based on actual needs.

[0047] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0048] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0049] The present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, identical elements are represented by similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale.

[0050] Example 1

[0051] A two-dimensional large-angle fast reflector device based on PCB eddy current sensor, Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention; Figure 2 FIG. 1 is a cross-sectional view of the overall structure of an embodiment of the present invention; FIG. Figure 1 and Figure 2 Shown, including:

[0052] Reflector assembly 1, flexible support assembly 2, dynamic magnetic electromagnetic drive assembly 3, eddy current sensor assembly 4 and base 5; the reflector assembly 1 is used to carry and reflect the incident light beam and is the core execution unit of the entire device; the base 5 serves as the fixed support part of the device and provides a stable installation foundation for the remaining components.

[0053] The reflector assembly 1, the flexible support assembly 2 and the base 5 are connected in sequence along the axial direction; the flexible support assembly 2 enables the reflector assembly to deflect in a two-dimensional direction, and after the reflector assembly undergoes angular displacement, the reflector assembly 1 is reset through its own elastic deformation; the flexible support assembly 2 is arranged between the base 5 and the reflector assembly 1, and the top end of the flexible support assembly 2 is fixed on the reflector assembly 1, and the bottom end is fixed on the base 5, so that the two-dimensional rotation of the reflector assembly can be realized. Figure 3 FIG. 1 shows a schematic structural diagram of a flexible support assembly according to an embodiment of the present invention. Figure 3As shown, the flexible support assembly 2 is configured as a cross-shaped flexible support hinge. Furthermore, in this embodiment, the flexible support assembly 2 includes two pairs of flexible hinge pieces 210 and two pairs of spring pieces 220. The two pairs of flexible hinge pieces 210 are arranged in a cross-shaped manner, and each pair of flexible hinge pieces 210 are arranged opposite to each other to form a flexible support structure in a two-dimensional direction. The two pairs of spring pieces 220 are respectively arranged between the corresponding pair of flexible hinge pieces, and the two spring pieces in each pair of spring pieces are respectively arranged in orthogonal directions, and the upper and lower ends of the spring pieces are respectively connected to the opposite surfaces of the pair of flexible hinge pieces. Each pair of flexible hinge pieces 210 is symmetrically arranged between the reflector assembly and the base, and the upper end of each spring piece 220 is connected to the edge of the flexible hinge piece 210 located above by welding, and the lower end of each spring piece 220 is connected to the edge of the flexible hinge piece 210 located below by welding. Two flexible hinges 210 are stacked via a pair of springs 220 to form a set of flexible hinges. The two sets of flexible hinges are arranged in a cross-shaped pattern. When the fast reflector deflects, the flexible support assembly 2 applies a force to the mirror support reflector assembly 1 to return it to the mechanical zero position. This force reduces the overshoot of the voice coil motor during closed-loop control. A protective shell is installed on the outside of each pair of springs to protect the springs. The springs 220 can be made of any elastic material, such as cold-rolled 304 plate, stainless steel, beryllium bronze, spring steel, etc. In this embodiment, cold-rolled 304 plate is used to ensure that no plastic deformation occurs during repeated deflection. The use of a cross-shaped flexible support hinge can enhance the deflection stability of the fast reflector and the stability of the mirror surface at the mechanical zero position. When the fast reflector deflects, the cross-shaped flexible support hinge applies a force to the mirror support to return it to the mechanical zero position. This force reduces the overshoot of the voice coil motor during closed-loop control. Traditional bearings have friction and clearance, resulting in poor control characteristics, low speed, short life, and easy jamming at low temperatures. The use of flexible supports has a long service life, no gap, high repeatability positioning accuracy, no friction, no need for lubrication, and is not affected by vacuum and low temperature working environments.

[0054] The dynamic magnetic electromagnetic drive assembly 3 and the eddy current sensor assembly 4 are arranged around the center position inside the base 5; the dynamic magnetic electromagnetic drive assembly 3 drives the reflector assembly 1 to deflect within a set angle;

[0055] Figure 4 FIG. 1 shows a schematic structural diagram of an eddy current sensor assembly according to an embodiment of the present invention. Figure 4 As shown, the eddy current sensor assembly 4 includes an eddy current circuit board 410 and at least two pairs of eddy current sensor probes 420;

[0056] The eddy current sensor probe 420 includes a multi-layer coil, which is arranged on the eddy current circuit board 410 in a printed manner, and each pair of the eddy current sensor probes 420 is symmetrically arranged on the eddy current circuit board 410. The eddy current sensor probes 420 are used to detect the deflection angle of the reflector assembly 1. The eddy current circuit board 410 is the carrier of the eddy current sensor assembly 4, responsible for carrying and connecting each eddy current sensor probe 420. The eddy current sensor probe 420 is a non-contact detection component for realizing angular displacement. Its structure adopts a multi-layer micro-coil and is integrated on the surface of the eddy current circuit board 410 through a precision printed circuit process. Compared with traditional mechanical sensors, the design process is simple, the cost is low, and the consistency is good. It is particularly suitable for use in application scenarios of high-frequency vibration and rapid scanning. Each pair of eddy current sensor probes 420 is symmetrically arranged on the eddy current circuit board 410. In this embodiment, two pairs of probes are arranged vertically and are distributed in a cross shape to respectively sense the angular changes of the reflector assembly in two orthogonal directions. The symmetrical arrangement structure enables the eddy current sensor probe 420 to collect angular offset information in two-dimensional directions in real time, and enhance the linearity and accuracy of the measurement through differential signal calculation.

[0057] The four sensor probes can measure the four azimuth deflections of the reflector assembly, and the eddy current probes maintain a first preset distance from the center of the reflector assembly. It should be noted that there is no limit to the number of sensors here, and the number of sensors can be increased as long as the deflection of the reflector assembly can be measured and feedback can be provided.

[0058] Figure 5 FIG. 1 shows a bottom view of a mirror holder according to an embodiment of the present invention. Figure 5 As shown, the reflector assembly 1 includes a reflector surface 110 and a mirror holder 120; the reflector surface 110 is an element for realizing the optical reflection function, the reflector surface 110 is fixedly connected to the mirror holder 120, and the dynamic magnetic electromagnetic drive assembly 3 drives the mirror holder 120 to drive the reflector surface 110 to deflect.

[0059] Furthermore, in this embodiment, a connecting piece 6 is also included, and a connecting slot is provided at the bottom of the mirror holder 120. The position and number of the connecting slots correspond to the connecting piece 6. The dynamic magnetic electromagnetic drive component 3 is fixedly connected to the mirror holder 120 through the connecting piece 6 and the connecting slots.

[0060] The reflector surface 110 can be fixed to the upper surface of the mirror holder 120 by bonding, screwing or embedding to form a stable and rigid overall structure. The bonding between the reflector surface 110 and the mirror holder 120 can be, but is not limited to, epoxy resin glue, polyurethane glue, acrylate glue, organic silicone glue and other fixing glues. In this embodiment, the reflector surface 110 and the mirror holder 120 are bonded with silicone glue. In this embodiment, the reflector surface diameter is 40mm±0.05mm. The thickness of the lens can be selected from 1.8mm, 2mm, 2.2mm and other thicknesses, and the further thickness is 1.8mm±0.05mm. The base material of the reflector surface 110 can be any reflector material such as fused quartz, K9, aluminum, etc. In this embodiment, the reflector surface 110 is made of fused quartz, and the reflector surface is silver-coated. The mirror holder 120 is connected to the moving magnetic electromagnetic drive assembly 3 by 4 hexagon socket head screws, and the screws are fixed by thread glue. Epoxy resin glue is injected into the pin holes of the cross-shaped flexible support hinges to bond the mirror support 120. The mirror support 120 can be made of one of the following materials: aluminum alloys such as AL6061-T6, titanium alloys such as Ti-6Al-4V, beryllium aluminum alloys such as AlBeMet, carbon fiber composites (CFRP), Invar alloys (e.g., Fe-Ni 36%), etc. In this embodiment, the mirror support 120 is made of AL6061-T6 aluminum alloy.

[0061] The mirror support 120 is the support and transmission structure of the reflector assembly. On the one hand, it supports the reflector surface 110, and on the other hand, it serves as the responsive actuator of the driving action. In this embodiment, a plurality of connection slots are provided at the bottom of the mirror support 120 for rigidly connecting to the dynamic magnetic electromagnetic drive assembly 3 via the connecting piece 6. The number and position of the connection slots correspond one-to-one with the connecting piece 6, and are arranged symmetrically to ensure uniform distribution of the driving force on the mirror support and prevent unbalanced loading or imbalance of the mirror surface. The connecting piece 6 is made of high-strength, low-weight metal or composite material. One end of the connecting piece 6 is fixed to the dynamic magnetic electromagnetic drive assembly by mechanical fastening, such as screws, rivets, etc., or by bonding, and the other end is plugged into or fixed in the connection slot of the mirror support 120, thereby realizing effective transmission of the electromagnetic driving force to the mirror support.

[0062] Figure 6 A cross-sectional view of a base according to an embodiment of the present invention is shown. Figure 6 As shown, the base 5 includes a base body 510 and a base circuit board 520, and the base circuit board 520 is arranged at an end of the base body 510 away from the reflector assembly 1; the eddy current circuit board 410 is arranged at an end of the base body 510 close to the reflector assembly 1; and further includes a base cover plate to seal the base circuit board 520.

[0063] The eddy current circuit board 410 includes solder pins 411. The base body 510 is provided with solder pin through-holes. The solder pins 411 fit snugly within the through-holes, connecting the eddy current circuit board 410 to the base circuit board 520 via the solder pins 411 and the through-holes. The base body 510 is surrounded by solder pin through-holes sized to accommodate the solder pins. The solder pins penetrate the through-holes and are connected to the base circuit board 520 by welding. The base circuit board 520 receives electromagnetic signals collected by the eddy current sensor probe 420 and converts them into electrical signals, which are then output via the communication cable 8 for data feedback.

[0064] Furthermore, in this embodiment, the moving-magnet electromagnetic drive assembly 3 includes two pairs of permanent magnets 310 and two pairs of drive coils 320. The drive coils 320 and permanent magnets 310 are arranged symmetrically around the central axis of the reflector assembly 1. Each pair of permanent magnets and a pair of drive coils constitute an independent drive unit. The two pairs of drive units are arranged on either side of the central axis of the reflector assembly 1 and are orthogonally symmetrically distributed as a whole, forming an independent drive system in two dimensions. This arrangement ensures that the reflector assembly has equal responsiveness in both the X-axis and Y-axis directions, achieving two-dimensional free rotation.

[0065] The two pairs of drive coils 320 are respectively vertically embedded in the mounting grooves on the base body 510, and are bonded to the side walls of the mounting grooves of the base body 510 by injecting epoxy resin. They are distributed around the four sides of the flexible support assembly 3. The drive coils 320 are wound with high-conductivity copper wire and integrated vertically embedded in the pre-set mounting grooves on the base body 510. The mounting groove positions are symmetrical with the center of the reflector assembly. The drive coils 320 are evenly distributed around the outer periphery of the flexible support assembly 2 to form a complete two-dimensional excitation magnetic field distribution. When the drive coils are energized, an induced magnetic field is generated, which interacts with the permanent magnets 310 located therein, thereby generating a directionally controllable electromagnetic driving torque. The permanent magnets 310 are arranged one-to-one within the drive coils 320. The permanent magnet 310 and the drive coil 320 are arranged in a one-to-one correspondence within the coil cavity, serving as the main body of the electromagnetic force response. The permanent magnet 310 is made of a magnetic material such as aluminum nickel cobalt, iron chromium cobalt, ferrite, samarium cobalt, or neodymium iron boron. Preferably, neodymium iron boron is used as the permanent magnet material in this embodiment to ensure high remanence, high coercivity, and stable magnetic properties. The drive coil 320 can be made of, but is not limited to, conductive materials such as copper, aluminum, iron, silver, and gold. Preferably, copper enameled wire is used as the coil material in this embodiment. Furthermore, in this embodiment, the end of the permanent magnet 310 away from the reflector assembly 1 is configured as a conical structure, or a structure combining a cone and an arc, which can provide greater operating space and a larger deflection range. The approximately conical magnet provides the magnet with a large amount of movement space, which can prevent collision between the magnet and the coil due to excessive deflection angle when the fast reflector is deflected at a large angle. The vertical placement of the coil can reduce assembly difficulty and reduce costs.

[0066] The end of the permanent magnet 310 close to the reflector assembly 1 is connected to the reflector assembly 1 through a connecting piece 6 by gluing; the connecting piece 6 is fixed in the connecting slot of the corresponding connecting piece of the mirror holder 120 along the vertical direction by a symmetrical hexagon socket countersunk screw with a diameter of 2mm and a nominal length of 4mm.

[0067] In this embodiment, the base circuit board 520 has functions such as differential output, signal amplification, and noise filtering. The eddy current sensor probe 420, in conjunction with the base circuit board 520, acquires deflection information from the reflector assembly and converts it into an electrical signal. This information is then fed back to the user directly via the communication cable 8 as an analog signal, conveying the rotation angle of the fast-reflecting mirror.

[0068] Figure 7 FIG. 1 shows an input-output relationship block diagram of an embodiment of the present invention, as shown in FIG. Figure 7 As shown,

[0069] The host computer outputs control instructions to the moving magnet electromagnetic drive component 3 through the motor line 7, the eddy current sensor probe 420 detects the deflection signal and transmits it to the base circuit board 520, and the base circuit board 520 generates an analog signal and transmits it to the host computer through the communication cable for closed-loop control.

[0070] Figure 8 This is a schematic diagram of the electrical interface connection of a moving magnet type electromagnetic drive assembly according to one embodiment of the present invention; Figure 9 FIG. 1 is a schematic diagram of the signal output of an eddy current sensor assembly according to an embodiment of the present invention. Figure 8 and Figure 9 As shown, it also includes a motor cable 7, the two ends of which connect the moving magnet electromagnetic drive assembly 3 and the host computer. The motor cable 7 includes four groups of control cables, each group including a positive wire and a negative wire. The moving magnet electromagnetic drive assembly 3 is controlled by the host computer. The motor cable includes four groups of cables: X red wire, X black wire, Y red wire, and Y black wire, which control the X+, X-, Y+, and Y- direction coils respectively. Each group of cables contains two positive and negative cables, and a total of eight cables are assembled with the DLL-5557-8Y connector to control the voice coil motor. The DLL-5557-8Y connector has eight interfaces, two interfaces in a group, distributed vertically for a total of four groups. Each group of interfaces corresponds to a group of cables, connected from left to right to the X red wire, X black wire, Y red wire, and Y black wire respectively.

[0071] The sensor assembly integrates the measured fast mirror rotation angle information into the FH62S-10S-0.5SH connector through a circuit board. The FPC communication cable (9) is connected to the connector to directly feed back the angle information to the user in the form of an analog signal. The FH62S-10S-0.5SH connector includes ten interfaces, interfaces 1, 3, 5, and 8 are grounded, interfaces 2 and 4 are connected to -5.5V and +5.5V voltages respectively, and interfaces 6, 7, 9, and 10 output ADY-, ADY+, ADX-, and ADX+ signals respectively.

[0072] The present invention uses a flexible support component in conjunction with a dynamic magnetic drive structure to enable the reflector assembly to achieve large-angle deflection in two orthogonal directions. Compared with the traditional micro-angle deflection structure, the maximum deflection angle is significantly improved, which can cover a wider field of view and is suitable for application scenarios such as large field of view scanning, rapid target capture and wide-angle beam control. The dynamic magnetic electromagnetic drive component is symmetrically arranged around the reflector, with high drive efficiency and uniform magnetic field, so that the reflector assembly can complete rapid response within milliseconds and has micro-radian precision positioning capabilities. The dynamic magnetic electromagnetic drive component and the eddy current sensor component are integrated inside the base, and the reflector, drive, detection and support structures are highly integrated, occupying a small space, which is convenient for application in compact optical-mechanical structures and is conducive to the miniaturization design of the system.

[0073] It should be understood that the above-described specific embodiments of the present invention are merely illustrative or illustrative of the principles of the present invention and do not constitute limitations of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention should be included within the scope of protection of the present invention. In addition, the appended claims are intended to cover all variations and modifications that fall within the scope and metes and bounds of the appended claims, or equivalents thereof.

[0074] While the above description does not provide detailed technical details regarding patterning and etching of each layer, those skilled in the art will appreciate that various conventional methods can be used to form layers, regions, and the like in desired shapes. Furthermore, those skilled in the art may devise methods that differ from those described above to achieve the same structure.

[0075] The present invention has been described above with reference to the embodiments thereof. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Those skilled in the art may make various substitutions and modifications without departing from the scope of the present invention, and such substitutions and modifications are intended to fall within the scope of the present invention.

[0076] Although the embodiments of the present invention have been described in detail, it should be understood that the various changes, substitutions, and alterations could be made hereto without departing from the spirit and scope of the invention.

[0077] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A two-dimensional large-angle fast reflector device based on PCB eddy current sensor, characterized in that: include: A reflector assembly (1), a flexible support assembly (2), a moving magnetic electromagnetic drive assembly (3), an eddy current sensor assembly (4) and a base (5); The reflector assembly (1), the flexible support assembly (2), and the base (5) are sequentially connected along the axial direction; the flexible support assembly (2) enables the reflector assembly to deflect in two-dimensional directions, and after the reflector assembly undergoes angular displacement, the reflector assembly (1) is reset through its own elastic deformation; The dynamic magnetic electromagnetic drive component (3) and the eddy current sensor component (4) are arranged around the center position inside the base (5); the dynamic magnetic electromagnetic drive component (3) drives the reflector component (1) to deflect within a set angle; The eddy current sensor assembly (4) comprises an eddy current circuit board (410) and at least two pairs of eddy current sensor probes (420); The eddy current sensor probe (420) comprises a multi-layer coil, which is arranged on the eddy current circuit board (410) by printing, and each pair of the eddy current sensor probes (420) is symmetrically arranged on the eddy current circuit board (410). The eddy current sensor probes (420) are used to detect the deflection angle of the reflector assembly (1).

2. The two-dimensional large-angle fast reflector device based on PCB eddy current sensor according to claim 1, characterized in that: The base (5) comprises a base body (510) and a base circuit board (520), wherein the base circuit board (520) is arranged at an end of the base body (510) away from the reflector assembly (1); and the eddy current circuit board (410) is arranged at an end of the base body (510) close to the reflector assembly (1). The eddy current circuit board (410) includes a welding pin (411), a welding pin through hole is provided on the base body (510), the welding pin (411) and the welding pin through hole are adapted to each other, and the eddy current circuit board (410) is connected to the base circuit board (520) via the welding pin (411) and the welding pin through hole.

3. The two-dimensional large-angle fast reflector device based on PCB eddy current sensor according to claim 2, characterized in that: The dynamic magnetic electromagnetic drive assembly (3) comprises two pairs of permanent magnets (310) and two pairs of drive coils (320), wherein the drive coils (320) and the permanent magnets (310) are symmetrically arranged in pairs around the central axis of the reflector assembly (1); The two pairs of driving coils (320) are respectively vertically embedded in the mounting grooves on the base body (510) and distributed around the flexible support component (3), and the permanent magnets (310) are arranged inside the driving coils (320) in a one-to-one correspondence.

4. The two-dimensional large-angle fast reflector device based on PCB eddy current sensor according to claim 3, characterized in that: One end of the permanent magnet (310) away from the reflector assembly (1) is configured as a conical structure, or as a structure combining a conical shape and an arc shape.

5. The two-dimensional large-angle fast reflector device based on PCB eddy current sensor according to claim 3, characterized in that: It also includes a connecting piece (6), and one end of the permanent magnet (310) close to the reflector assembly (1) is connected to the reflector assembly (1) through the connecting piece (6).

6. The two-dimensional large-angle fast reflector device based on PCB eddy current sensor according to claim 1, characterized in that: The flexible support assembly (2) is configured as a cross-shaped flexible support hinge.

7. The two-dimensional large-angle fast reflector device based on PCB eddy current sensor according to claim 1, characterized in that: The flexible support assembly (2) comprises two pairs of flexible hinge pieces (210) and two pairs of spring pieces (220), the two pairs of flexible hinge pieces (210) being arranged in a cross-like manner, and each pair of flexible hinge pieces (210) being arranged opposite to each other, thereby forming a two-dimensional flexible support structure; The two pairs of spring sheets (220) are respectively arranged between a corresponding pair of flexible hinge sheets, the two spring sheets in each pair of spring sheets are respectively arranged in orthogonal directions, and the upper and lower ends of the spring sheets are respectively connected to the opposite surfaces of the pair of flexible hinge sheets.

8. The two-dimensional large-angle fast reflector device based on PCB eddy current sensor according to claim 5, characterized in that: The reflector assembly (1) comprises a reflector surface (110) and a mirror holder (120); The reflector surface (110) is fixedly connected to the mirror holder (120), and the dynamic magnetic electromagnetic drive component (3) drives the mirror holder (120) to drive the reflector surface (110) to move in a deflecting manner.

9. The two-dimensional large-angle fast reflector device based on PCB eddy current sensor according to claim 8, characterized in that: The bottom of the mirror holder (120) is provided with connection slots, the positions and number of the connection slots correspond to the connection pieces (6), and the dynamic magnetic electromagnetic drive assembly (3) is fixedly connected to the mirror holder (120) via the connection pieces (6) and the connection slots.

10. The two-dimensional large-angle fast reflector device based on PCB eddy current sensor according to claim 1, characterized in that: It also includes a motor line (7), the two ends of which are connected to the moving magnet electromagnetic drive assembly (3) and the host computer. The motor line (7) includes four groups of control cables, each group including a positive line and a negative line.

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