Fork and transporting device thereof

Abstract

The embodiment of the invention discloses a tooth fork and a conveying device thereof. The tooth fork comprises a main body with a notch, a first bearing part extends from one side of the notch of the main body in the thickness direction, and a second bearing part is arranged on the other side of the notch of the main body in the thickness direction. According to the embodiment of the invention, the first bearing part and the second bearing part are arranged on the two sides of the main body in the thickness direction, so that the size of the tooth fork is greatly reduced, the moving space is saved for subsequently taking and placing a wafer box and a photomask box, and the overall size of the transportation device can be greatly reduced; and meanwhile, the two surfaces of the tooth fork in the thickness direction are overturned, so that the forked object of the tooth fork can be quickly adjusted, and the transportation efficiency of the wafer box and the photomask box is further improved. And then the first area and the second area are sequentially distributed in the moving direction of the conveying device, transverse bloating of the conveying device is avoided, and therefore the space utilization rate of the device is increased.

Description

Technical Field

[0001] The present application relates to the field of semiconductor transportation technology, and in particular to a tooth fork and a transportation device thereof. Background Art

[0002] The photomask is a graphic master used in the photolithography process in chip manufacturing. It uses quartz glass as a substrate and is coated with chromium metal for light shielding. Using the exposure principle, the light source is projected through the photomask onto the silicon wafer to expose and display a specific pattern. The photomask box is a special container for storing and protecting the photomask, so as to facilitate the transfer of the photomask between different processes.

[0003] Before the photolithography process begins, the reticle box containing the photomask is first placed on a reticle transport device, then transported to a designated location and removed. Similarly, wafers also require a wafer transport device for transportation. However, in actual transportation, it has been found that existing transportation methods not only increase the number of transportation steps, thereby extending the overall transportation time, but also occupy more production space, which in turn increases the number of components and production costs associated with the equipment. Summary of the Invention

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a tooth fork and a transport device thereof to solve the problem that the transport steps of the mask box and the wafer box in the current photolithography process are multiple and the production space occupied is large.

[0005] In a first aspect, the present application provides a tooth fork, comprising a main body, wherein a notch is formed through the main body along its thickness direction, and a first bearing portion is formed by extending outward from the notch, and the first bearing portion is located on one side of the main body in the thickness direction; The main body is respectively connected to two opposing outer side surfaces at the notch thereof with receiving plates, and each receiving plate is provided with a groove on the end surface close to the notch, and the groove extends inward to form a second bearing portion on the two receiving plates, and the second bearing portion is located on the other side of the main body in the thickness direction.

[0006] Based on the above-mentioned tooth fork, by arranging the first bearing part and the second bearing part on both sides in the thickness direction of the main body, the volume of the tooth fork is greatly reduced, thereby saving activity space for subsequent taking and placing of wafer boxes and mask boxes, so that the overall volume of the transportation device can be greatly reduced; at the same time, by flipping the two sides of the tooth fork in the thickness direction, the forked object of the tooth fork can be quickly adjusted, thereby improving the transportation efficiency of the wafer boxes and mask boxes.

[0007] In one or more embodiments of the fork, the first supporting portion and the second supporting portion are respectively used to support a wafer box or a reticle box, and the surfaces of the first supporting portion and the second supporting portion used to support the wafer box or the reticle box are supporting surfaces, and elastic columns are distributed along the circumference of the supporting surfaces of the first supporting portion and / or the second supporting portion. Wherein, the peripheral side surface of the received portion of the wafer box and / or the mask box is distributed with matching grooves; The elastic columns correspond to the matching grooves one by one. When the tooth fork supports one of the wafer box and the mask box having the matching groove, the elastic columns on the corresponding supporting surface are at least partially accommodated in the corresponding matching groove.

[0008] In one or more embodiments of the above-mentioned tooth fork, accommodating grooves are distributed along the inner circumferential side of the notch and / or the second bearing portion, the elastic columns correspond to the accommodating grooves one by one, and the elastic columns are partially accommodated in the corresponding accommodating grooves.

[0009] In one or more embodiments of the above-mentioned tooth fork, a detection component is provided at one end of the tooth fork located at the notch, and the detection component is electrically connected to the multi-axis drive mechanism of the tooth fork to transmit an electrical signal to the multi-axis drive mechanism of the tooth fork when the detection component collides with the outside world.

[0010] In one or more embodiments of the aforementioned tooth fork, the detection assembly includes a guard plate, a pressure sensor, and an elastic member, the guard plate being rotatably connected to the tooth fork, the pressure sensor being mounted on a side of the tooth fork having a notch, and one end of the elastic member being mounted on the tooth fork in a direction of extension and contraction, and the other end being connected to the guard plate; The guard plate has an abutment portion, which is arranged on the side of the pressure sensor away from the tooth fork. When the abutment portion is squeezed by external force, the abutment portion is deformed and / or the abutment portion rotates relative to the tooth fork, so that the abutment portion is pressed against the detection end of the pressure sensor.

[0011] In one or more embodiments of the above-mentioned tooth fork, at least two mounting ends are formed on one side of the tooth fork having a notch, each mounting end is installed with a set of detection components, and the guard plate abutment parts at two adjacent mounting ends are connected by a transfer plate.

[0012] In a second aspect, the present application provides a transport device, comprising the fork as described above, and further comprising: a frame having a first area and a second area arranged in sequence along a moving direction of the transport device, the first area and the second area being used to place a wafer box and a mask box, respectively; A multi-axis drive mechanism is provided on the top of the frame, and its drive end is connected to the main body, so as to drive the tooth fork as a whole to enter and exit the first area and the second area through the main body, and drive the first bearing part or the second bearing part to extend under the received part of the wafer box or the mask box through the main body, thereby driving the tooth fork as a whole to rise and fall, so as to lift or lower the received part of the wafer box or the mask box.

[0013] Based on the above-mentioned transport device, the multi-dimensional movement and rotation of the tooth fork can be realized through the multi-axis drive structure, so that the wafer box and the mask box can be moved into or out of the transport device, and the wafer box and the mask box can be stored separately through the first area and the second area to avoid collision between the two during the picking and placing process; and the first area and the second area are distributed in sequence along the moving direction of the transport device to avoid the lateral bloating of the transport device, thereby improving the space utilization of the device.

[0014] In one or more embodiments of the above-mentioned transport device, frames are provided in the first area and the second area, and each frame is provided with at least two platforms along its own height direction. The platforms in the first area and the second area are used to carry wafer boxes and mask boxes respectively.

[0015] In one or more embodiments of the above-mentioned transport device, at least one of the platforms is provided with at least one positioning structure, each of the positioning structures includes at least two positioning posts, and the positioning posts are used to be plugged into and matched with the positioning holes of the wafer box or the mask box.

[0016] In one or more embodiments of the above-mentioned transport device, at least one limiting structure is provided on each of the platforms, each of the limiting structures includes at least two baffles, and a limiting channel is formed between all the baffles in each of the limiting structures, and the limiting channel is used to limit the movement of the wafer box or the mask box in the horizontal direction.

[0017] One or more of the above embodiments of the present application have at least one or more of the following beneficial effects: By arranging the first and second bearing parts on both sides of the main body in the thickness direction, the volume of the fork is greatly reduced, thereby saving space for subsequent handling when placing wafer boxes and mask boxes, and significantly reducing the overall volume of the transport device. At the same time, by flipping the two sides of the fork in the thickness direction, the fork can be quickly adjusted to the forked object, thereby improving the transportation efficiency of the wafer boxes and mask boxes. The multi-axis drive structure can then realize the movement and rotation of the fork in multiple dimensions, thereby moving the wafer boxes and mask boxes into or out of the transport device. The wafer boxes and mask boxes can be stored separately by the first area and the second area, which can prevent the two from colliding during the handling process. The first area and the second area are distributed sequentially along the movement direction of the transport device to avoid lateral bloating of the transport device, thereby improving the space utilization rate of the device.

[0018] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The disclosure of this application will be more easily understood with reference to the accompanying drawings. Those skilled in the art will readily appreciate that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the figures represent similar components, where: Figure 1 This is a schematic diagram of the structure of a tooth fork provided in an embodiment of the present application; Figure 2 yes Figure 1 Enlarged view of point A in the middle; Figure 3 This is a structural schematic diagram for showing the back of a tooth fork provided in an embodiment of the present application; Figure 4 yes Figure 3 Enlarged view of point B in the middle; Figure 5 This is a structural diagram for illustrating a second bearing portion provided in an embodiment of the present application; Figure 6 This is a structural diagram provided by an embodiment of the present application for illustrating a first carrier forking a wafer box; Figure 7 yes Figure 6 Enlarged view of point C in the middle; Figure 8 This is a schematic diagram of a structure of a transport device provided in an embodiment of the present application; Figure 9 This is a structural diagram for displaying the second area provided in an embodiment of the present application.

[0020] Description of reference numerals: 1. Tooth fork; 11. Mounting end; 2. Main body; 21. Notch; 22. First bearing part; 221. Bearing surface; 222. Accommodating groove; 3. Supporting plate; 31. Channel; 32. Second bearing part; 4. Elastic column; 5. Wafer box; 51. Supported part; 52. Matching groove; 6. Mask box; 7. Detection component; 71. Guard plate; 711. Abutment part; 72. Pressure sensor; 73. Elastic member; 74. Transfer plate; 75. Distance sensor; 8. Frame; 81. First area; 82. Second area; 83. Frame; 831. Platform; 832. Positioning structure; 8321. Positioning column; 833. Limiting structure; 8331. Baffle; 9. Multi-axis drive mechanism. DETAILED DESCRIPTION

[0021] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the scope of protection of the present application.

[0022] Before semiconductor lithography begins, the reticle pod and wafer cassette must be placed on separate transport devices, which then transport them to their designated locations. However, this method of transportation is not only inefficient but also occupies more production space and increases the number of components and production costs associated with the various equipment.

[0023] Therefore, an embodiment of the present application creatively proposes a tooth fork and a transportation device thereof, wherein the tooth fork includes a main body with a notch, a first bearing portion extending on one side of the thickness direction of the notch of the main body, and a second bearing portion provided on the other side of the thickness direction of the notch of the main body; when taking and placing wafer boxes and mask boxes, the volume of the tooth fork is greatly reduced by arranging the first bearing portion and the second bearing portion on both sides of the thickness direction of the main body, thereby saving movement space for subsequent taking and placing of wafer boxes and mask boxes, so that the overall volume of the transportation device can be greatly reduced; at the same time, by flipping the two sides of the tooth fork in the thickness direction, the forked object of the tooth fork can be quickly adjusted, thereby improving the transportation efficiency of the wafer boxes and mask boxes. The transport device includes a tooth fork, a multi-axis drive mechanism and a frame provided with a first area and a second area. The multi-axis drive structure can realize the movement and rotation of the tooth fork in multiple dimensions, so as to move the wafer box and the mask box into or out of the transport device, and realize the separate storage of the wafer box and the mask box through the first area and the second area, so as to avoid collision between the two during the picking and placing process; and distribute the first area and the second area in sequence along the moving direction of the transport device to avoid the lateral bloating of the transport device, thereby improving the space utilization rate of the device.

[0024] The present application will be described in detail below through specific embodiments.

[0025] Reference Figures 1 to 7 As shown, an embodiment of the present application provides a tooth fork 1, which includes a main body 2, a notch 21 extending through the main body 2 along its thickness direction, and extending outward at the notch 21 to form a first bearing portion 22, and the first bearing portion 22 is located on one side of the thickness direction of the main body 2; the main body 2 is respectively connected to two opposing outer side surfaces at its notch 21 with receiving plates 3, and each receiving plate 3 has an end face near the notch 21 with a groove 31, and the groove 31 extends inward to form a second bearing portion 32 on the two receiving plates 3, and the second bearing portion 32 is located on the other side of the thickness direction of the main body 2.

[0026] It should be noted that, referring to Figure 6 and Figure 7 As shown, the wafer box 5 and the mask box 6 generally include a box body and a protruding structure extending outward from the surface of the box body; the protruding structure includes an intermediate body extending outward from the surface of the box body, and a received portion 51 extending outward from the intermediate body. In order to facilitate taking and placing, the projection surface of the received portion 51 generally includes the projection surface of the intermediate body; when forking the wafer box 5 and the mask box 6, the first supporting portion 22 or the second supporting portion 32 is extended into the space between the received portion 51 and the box body, and avoids the intermediate body.

[0027] In addition, the shape of the notch 21 can be a regular shape such as a rectangle, a fan or a U shape, or any other irregular shape, and the specific shape is flexibly adjusted according to the shape of the protruding structure on the surface of the box body. In this embodiment, the shape of the notch 21 is a U shape.

[0028] It is understood that the shape of the receiving plate 3 can be any shape, such as a rectangular thin plate, a cylindrical shape, etc., as long as the two receiving plates 3 can stably support the wafer box 5 or the photomask box 6. In this embodiment, the receiving plate 3 is a rectangular thin plate, and the main body 2 is also a rectangular thin plate, and the length directions of the two are consistent.

[0029] When taking and placing the wafer box 5 and the mask box 6, the volume of the tooth fork 1 is greatly reduced by arranging the first carrying part 22 and the second carrying part 32 on both sides in the thickness direction of the main body 2, thereby saving movement space for subsequent taking and placing of the wafer box 5 and the mask box 6, so that the overall volume of the transportation device can be greatly reduced; at the same time, by flipping the two sides of the tooth fork 1 in the thickness direction, the forked object of the tooth fork 1 can be quickly adjusted, thereby improving the transportation efficiency of the wafer box 5 and the mask box 6.

[0030] Further, refer to Figure 1 and Figure 2As shown, in some examples, the first carrying portion 22 and the second carrying portion 32 are respectively used to carry the wafer box 5 or the reticle box 6, and the surfaces of the first carrying portion 22 and the second carrying portion 32 for carrying the wafer box 5 or the reticle box 6 are carrying surfaces 221, and elastic columns 4 are distributed along the circumference of the carrying surfaces 221 of the first carrying portion 22 and / or the second carrying portion 32; The peripheral side surface of the receiving portion 51 of the wafer box 5 and / or the mask box 6 is provided with matching grooves 52 ; The elastic columns 4 correspond to the matching grooves 52 one by one. When the tine 1 carries one of the wafer box 5 and the mask box 6 having the matching groove 52 , the elastic columns 4 on the corresponding carrying surface 221 are at least partially accommodated in the corresponding matching groove 52 .

[0031] It is understood that different wafer cassettes 5 and reticle pods 6 have different specifications, and the corresponding raised structures have different sizes. During the actual handling process, it is necessary to adjust the first supporting portion 22 and the second supporting portion 32 according to the raised structures. In this embodiment, the first supporting portion 22 is used to support the wafer cassette 5, and the second supporting portion 32 is used to support the reticle pod 6.

[0032] The number of elastic columns 4 is generally adjusted according to the shape of the receiving portion 51. As an example and not a limitation, refer to Figure 6 As described, it shows a schematic diagram of the cooperation between the first supporting part 22 and the received part 51 of the wafer box 5; in this embodiment, the cross-section of the received part 51 of the wafer box 5 is generally rectangular, that is, it has four sides in the circumference, and correspondingly, except for the side where the intermediate body needs to enter and exit, at least three positioning columns 8321 are provided on the supporting surface 221 of the first supporting part 22 to correspond to the three sides of the received part 51, so as to improve the restriction on the received part 51 and enhance the stability of the wafer box 5 during transportation.

[0033] Specifically, when using the first carrying part 22 to fork the wafer box 5, the first carrying part 22 can be first extended to the bottom of the wafer box 5 while avoiding the intermediate body, and then the first carrying part 22 can be lifted so that the first carrying part 22 can receive the received part 51 of the wafer box 5. During the receiving process, by moving the second carrying part 32 back and forth, the positioning column 8321 can slide into the corresponding matching groove 52, thereby realizing horizontal restriction of the wafer box 5 and avoiding abnormal horizontal movement of the wafer box 5 during transportation.

[0034] Further, in some examples, reference Figure 7 As shown, accommodating grooves 222 are distributed along the inner circumferential side of the notch 21 and / or the second bearing portion 32 . The elastic columns 4 correspond to the accommodating grooves 222 one by one, and the elastic columns 4 are partially accommodated in the corresponding accommodating grooves 222 .

[0035] The specific distribution of the accommodating grooves 222 is flexibly adjusted based on the horizontal restriction requirements for the wafer cassette 5 and the reticle box 6 during the actual forking process. For example, the accommodating grooves 222 may be provided only on the inner circumferential side of the notch 21 (corresponding to the first supporting portion 22), or only on the inner circumferential side of the first supporting portion 22. Alternatively, the accommodating grooves 222 may be provided on both the inner circumferential side of the notch 21 and the second supporting portion 32. By providing the accommodating grooves 222, the mating volume between the elastic column 4 and the mating grooves 52 can be adjusted, thereby changing the constraint between the two and adjusting the horizontal restriction force on the wafer cassette 5 or the reticle box 6. In this embodiment, to facilitate the entry and exit of the positioning column 8321 into and out of the mating grooves 52 and reduce friction between the two, the mating grooves 52 are configured as V-shaped grooves. Correspondingly, the accommodating grooves 222 may also be configured as V-shaped grooves.

[0036] In some examples, reference Figure 3 and Figure 4 As shown, a detection assembly 7 is provided at one end of the fork 1 located at the notch 21. The detection assembly 7 is electrically connected to the multi-axis drive mechanism 9 of the fork 1 so as to transmit an electrical signal to the multi-axis drive mechanism 9 of the fork 1 when the detection assembly 7 collides with the outside world. By providing the detection assembly 7 at the end of the fork 1 located at the notch 21, when the fork 1 moves horizontally and collides with a wall or other structure, if the middle portion does not enter the notch 21, the detection assembly 7 can promptly receive a collision signal and then immediately transmit the signal to the multi-axis drive mechanism 9 of the fork 1, thereby preventing further damage to the fork 1.

[0037] As an alternative example, the detection assembly 7 includes an elastic sheet, a cylindrical spring, and a pressure sensor 72. The elastic sheet is connected to the pressure sensor 72 via the cylindrical spring. The elastic sheet is made of an elastic material such as rubber. When it collides with the outside world, it can reduce the collision force. The spring further reduces the collision. At the same time, the spring quickly transmits the collision force to the pressure sensor 72, which quickly transmits the pressure signal to the multi-axis drive mechanism 9 of the tine 1, thereby preventing further damage to the tine 1.

[0038] As another alternative example, refer to Figure 3 and Figure 4 As shown, the detection assembly 7 includes a guard plate 71, a pressure sensor 72 and an elastic member 73. The guard plate 71 is rotatably connected to the tooth fork 1, and the pressure sensor 72 is installed on the side of the tooth fork 1 having the notch 21. One end of the elastic member 73 in the extension direction is installed on the tooth fork 1, and the other end is connected to the guard plate 71; the guard plate 71 has an abutment portion 711, and the abutment portion 711 is provided on the side of the pressure sensor 72 away from the tooth fork 1. When the abutment portion 711 is squeezed by external force, the abutment portion 711 is deformed and / or the abutment portion 711 rotates relative to the tooth fork 1, so that the abutment portion 711 is pressed against the detection end of the pressure sensor 72.

[0039] In this embodiment, the elastic member 73 is a cylindrical spring, and the elastic member 73 is detachably connected to the guard plate 71 and the tooth fork 1 so as to facilitate replacement of different elastic members 73 .

[0040] Through the above-mentioned arrangement, the detection distance of the detection component 7 can be flexibly adjusted. For example, the guard plate 71 is first rotated to adjust the horizontal distance value between the abutment portion 711 and the pressure sensor 72, and then the abutment portion 711 is pre-fixed by replacing different elastic members 73; subsequently, when a collision occurs, the abutment portion 711 is subjected to a collision. Combined with the actual collision strength and the elastic force of the elastic member 73, the abutment portion 711 may be deformed and abut against the detection end of the pressure sensor 72, or the abutment portion 711 may only rotate relative to the tooth fork 1 and abut against the detection end of the pressure sensor 72, or the abutment portion 711 may both deform and rotate relative to the tooth fork 1 and abut against the detection end of the pressure sensor 72, and finally the pressure signal is transmitted to the multi-axis drive structure of the tooth fork 1, and the tooth fork 1 is controlled to retreat along the original moving path to prevent the tooth fork 1 from being subjected to further collision.

[0041] Further, in some examples, reference Figure 1 As shown, the tooth fork 1 has at least two mounting ends 11 formed on one side of the notch 21 , each mounting end 11 is mounted with a set of detection components 7 , and the abutting portions 711 of the guard plates 71 at two adjacent mounting ends 11 are connected via a transfer plate 74 .

[0042] In this embodiment, the notch 21 is U-shaped. Accordingly, two mounting ends 11 are formed on one side of the notch 21 of the tooth fork 1 . The transfer plate 74 is long and strip-shaped to reduce interference between the transfer plate 74 and the wafer box 5 or the mask box 6 .

[0043] By disposing the transfer plate 74 , the detection range of the detection component 7 can be further expanded, thereby avoiding collision or wear of the wafer box 5 and the mask box 6 after being forked.

[0044] In some examples, a plurality of distance measuring sensors 75 are provided along two opposite sides of the U-shaped notch 21 to detect the length of the received portion 51 of the wafer box 5 received on the carrying surface 221 of the first carrying portion 22 to determine whether the tooth fork 1 has completely forked the wafer box 5.

[0045] Example 2 Corresponding to the above embodiment 1, refer to Figure 8 and Figure 9As shown, an embodiment of the present application also provides a transport device, including a tooth fork 1, a frame 8 and a multi-axis drive mechanism 9. The frame 8 is provided with a first area 81 and a second area 82 arranged in sequence along the moving direction of the transport device. The first area 81 and the second area 82 are used to place the wafer box 5 and the mask box 6, respectively; the multi-axis drive mechanism 9 is provided on the top of the frame 8, and its driving end is connected to the main body 2 to drive the tooth fork 1 as a whole to enter and exit the first area 81 and the second area 82 through the main body 2, and drive the first bearing part 22 or the second bearing part 32 through the main body 2 to extend into the bottom of the receiving part 51 of the wafer box 5 or the mask box 6, thereby driving the tooth fork 1 to rise and fall as a whole to lift or lower the receiving part 51 of the wafer box 5 or the mask box 6.

[0046] The multi-axis drive structure can realize the movement and rotation of the tooth fork 1 in multiple dimensions, so as to move the wafer box 5 and the mask box 6 into or out of the transport device, and realize the separate storage of the wafer box 5 and the mask box 6 through the first area 81 and the second area 82, so as to avoid collision between the two during the taking and placing process; and distribute the first area 81 and the second area 82 in sequence along the moving direction of the transport device to avoid the lateral bloating of the transport device, thereby improving the space utilization rate of the device.

[0047] It is understood that the shape of the frame 8 can be a regular shape such as a cuboid or a cylinder, or any other irregular shape. In this embodiment, the frame 8 is generally cuboid, with its length aligned with the direction of movement of the transport device. Furthermore, the running mechanism that drives the transport device can be a device similar to an AGV, which is known in the art and will not be further described here.

[0048] Further, in some examples, reference Figure 8 and Figure 9 As shown, frames 83 are provided in the first area 81 and the second area 82 . Each frame 83 is provided with at least two platforms 831 along its own height direction. The platforms 831 in the first area 81 and the second area 82 are used to carry the wafer box 5 and the mask box 6 respectively.

[0049] By setting up a separate frame 83, the load-bearing strength can be improved and the structural design can be easily realized to customize the boxes of different types; and by designing a multi-layer platform 831, the number of wafer boxes 5 or mask boxes 6 that can be transported by a single transport device can be further increased.

[0050] It should be noted that the number of frames 83 and the number of platforms 831 can be flexibly adjusted according to the actual size of the transport device and the internal structure of the transport device. In this embodiment, the first area 81 is used to place the wafer box 5, and the second area 82 is used to place the mask box 6. A frame 83 is provided in the first area 81 and the second area 82 respectively. The frame 83 of the first area 81 is provided with two platforms 831, and each platform 831 can place a wafer box 5. The second area 82 is provided with four platforms 831. The two top platforms 831 can respectively place two mask boxes 6, and the two bottom platforms 831 can respectively place one mask box 6.

[0051] Further, in some examples, reference Figure 8 and Figure 9 As shown, at least one positioning structure 832 is provided on at least one of the platforms 831 , and each of the positioning structures 832 includes at least two positioning posts 8321 , and the positioning posts 8321 are used to be plugged into and matched with the positioning holes of the wafer box 5 or the mask box 6 .

[0052] In this embodiment, a positioning structure 832 is provided on the platform 831 of the first area 81. The positioning structure 832 includes three positioning columns 8321. By plugging and fitting the positioning columns 8321 into the positioning holes of the wafer box 5, the wafer box 5 can be quickly positioned and pre-fixed, thereby improving the stability of the wafer box 5 during transportation. At the same time, the placement state of the wafer box 5 remains unique, which is convenient for quick forking by the tooth fork 1.

[0053] In some examples, reference Figure 8 and Figure 9 As shown, each platform 831 is provided with at least one limiting structure 833, each limiting structure 833 includes at least two baffles 8331, and a limiting channel is formed between all the baffles 8331 in each limiting structure 833, and the limiting channel is used to limit the movement of the wafer box 5 or the mask box 6 in the horizontal direction.

[0054] The limiting structure 833 in the first region 81 is a long strip of plate that abuts the side of the wafer cassette 5 to prevent abnormal horizontal movement of the wafer cassette 5 during the movement of the transport device. The limiting structure 833 in the second region 82 includes at least two diagonally arranged L-shaped plates. In this embodiment, the limiting structure 833 comprises two sets of diagonally arranged L-shaped plates, thereby restraining the four corners of the reticle cassette 6 to prevent abnormal horizontal movement of the reticle cassette 6 during the movement of the transport device.

[0055] In addition, a seat sensor and an in-position sensor can be set on each platform 831. The seat sensor is used to detect whether the platform 831 is vacant, and the in-position sensor is used to detect whether the limiting structure 833 is matched with the mask box 6 or the wafer box 5.

[0056] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0057] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0058] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A tooth fork, characterized in that: The tooth fork (1) comprises a main body (2), wherein the main body (2) is provided with a notch (21) along its thickness direction, and the notch (21) extends outward to form a first bearing portion (22), and the first bearing portion (22) is located on one side of the main body (2) in the thickness direction; The main body (2) is connected to receiving plates (3) on two opposite outer side surfaces at the notch (21), and each receiving plate (3) is provided with a groove (31) on its end surface close to the notch (21). The groove (31) extends inward to form a second bearing portion (32) on the two receiving plates (3), and the second bearing portion (32) is located on the other side of the main body (2) in the thickness direction.

2. The tooth fork according to claim 1, characterized in that The first bearing portion (22) and the second bearing portion (32) are respectively used for bearing a wafer box (5) or a mask box (6); the surfaces of the first bearing portion (22) and the second bearing portion (32) for bearing the wafer box (5) or the mask box (6) are bearing surfaces (221); elastic columns (4) are distributed along the circumference of the bearing surfaces (221) of the first bearing portion (22) and / or the second bearing portion (32); Wherein, matching grooves (52) are distributed on the peripheral side surface of the receiving portion (51) of the wafer box (5) and / or the mask box (6); The elastic columns (4) correspond to the matching grooves (52) one by one. When the tooth fork (1) carries one of the wafer box (5) and the mask box (6) having the matching groove (52), the elastic columns (4) on the corresponding bearing surface (221) are at least partially accommodated in the corresponding matching groove (52).

3. The tooth fork according to claim 2, characterized in that: Accommodation grooves (222) are distributed along the inner peripheral side of the notch (21) and / or the second bearing portion (32); the elastic columns (4) correspond to the accommodation grooves (222) one by one, and the elastic columns (4) are partially accommodated in the corresponding accommodation grooves (222).

4. The tooth fork according to claim 1, characterized in that: A detection component (7) is provided at one end of the tooth fork (1) located at the notch (21); the detection component (7) is electrically connected to the multi-axis drive mechanism (9) of the tooth fork (1) so as to transmit an electrical signal to the multi-axis drive mechanism (9) of the tooth fork (1) when the detection component (7) collides with the outside world.

5. The tooth fork according to claim 4, characterized in that: The detection assembly (7) comprises a guard plate (71), a pressure sensor (72) and an elastic member (73); the guard plate (71) is rotatably connected to the tooth fork (1); the pressure sensor (72) is mounted on a side of the tooth fork (1) having a notch (21); one end of the elastic member (73) in a telescopic direction is mounted on the tooth fork (1), and the other end is connected to the guard plate (71); The guard plate (71) has an abutting portion (711), which is arranged on a side of the pressure sensor (72) away from the tooth fork (1). When the abutting portion (711) is squeezed by an external force, the abutting portion (711) is deformed and / or the abutting portion (711) rotates relative to the tooth fork (1), so that the abutting portion (711) is pressed against the detection end of the pressure sensor (72).

6. The tooth fork according to claim 5, characterized in that: The tooth fork (1) is provided with at least two mounting ends (11) on one side of the notch (21), each mounting end (11) being provided with a set of detection components (7), and the abutting portions (711) of the guard plates (71) at two adjacent mounting ends (11) are connected via a transmission plate (74).

7. A transport device comprising the tooth fork according to any one of claims 1 to 6, characterized in that: The transport device further comprises: A rack (8) is provided with a first area (81) and a second area (82) arranged in sequence along the moving direction of the transport device, wherein the first area (81) and the second area (82) are respectively used for placing a wafer box (5) and a mask box (6); A multi-axis driving mechanism (9) is provided on the top of the frame (8), and its driving end is connected to the main body (2) so as to drive the tooth fork (1) as a whole to enter and exit the first area (81) and the second area (82) through the main body (2), and drive the first bearing part (22) or the second bearing part (32) through the main body (2) to extend below the receiving part (51) of the wafer box (5) or the mask box (6), thereby driving the tooth fork (1) as a whole to rise and fall, so as to lift or lower the receiving part (51) of the wafer box (5) or the mask box (6).

8. The transport device according to claim 7, characterized in that Frames (83) are provided at both the first area (81) and the second area (82), and each frame (83) is provided with at least two layers of platforms (831) along its own height direction. The platforms (831) of the first area (81) and the second area (82) are used to carry the wafer box (5) and the mask box (6), respectively.

9. The transport device according to claim 8, characterized in that At least one of the platforms (831) is provided with at least one positioning structure (832), and each of the positioning structures (832) includes at least two positioning posts (8321), and the positioning posts (8321) are used to be plugged into and matched with positioning holes of the wafer box (5) or the mask box (6).

10. The transport device according to claim 8, characterized in that Each of the platforms (831) is provided with at least one limiting structure (833), each of the limiting structures (833) includes at least two baffles (8331), and a limiting channel is formed between all the baffles (8331) in each of the limiting structures (833), and the limiting channel is used to limit the movement of the wafer box (5) or the mask box (6) in the horizontal direction.

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