Femtosecond laser-based temperature measurement and morphology synchronous in-situ monitoring system for light-transmitting object

Abstract

The invention relates to a femtosecond laser-based temperature measurement and morphology synchronous in-situ monitoring system for a light-transmitting object. The method comprises the following steps: utilizing a femtosecond pulse laser, a time domain stretching assembly, an optical signal amplification assembly, a non-polarization beam splitter, a time delay assembly, a first spatial dispersion assembly, a second spatial dispersion assembly, a first microscope objective, a second microscope objective and a high-speed photoelectric detector; a high-speed oscilloscope, a computer and other components carry out time domain and space transformation on femtosecond laser pulses, and by combining data processing methods such as Hilbert transformation and the like, transient temperature and morphology changes of the light-transmitting object can be obtained. Therefore, the problem that MHz-level synchronous ultrafast temperature measurement and imaging of a light-transmitting object cannot be realized in the prior art is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of high-speed temperature measurement and imaging, and particularly relates to a system for synchronous in-situ monitoring of temperature and morphology of a light-transmitting object based on femtosecond laser. BACKGROUND

[0002] For temperature measurement, the conventional temperature measurement method mainly measures the average temperature of an object in a relatively long change time. In some fields, it is required to obtain a transient temperature. Current transient temperature measurement methods are mainly divided into contact temperature measurement and non-contact temperature measurement. Contact temperature measurement is to realize temperature measurement through thermal equilibrium between a temperature-sensitive element and a measured object.

[0003] Taking the traditional thermocouple temperature measurement as an example, in the process of temperature change, it cannot meet the requirement of transient temperature measurement, and contact temperature measurement will destroy the integrity of the temperature field. Non-contact temperature measurement generally realizes temperature measurement based on the infrared radiation characteristics of the material or indirectly reflects the temperature by measuring the thermal characteristics of the medium. The characteristic of this kind of temperature measurement method is that it does not need to contact the measured object and will not destroy the temperature field of the measured object, but the measurement accuracy is not as good as that of the contact temperature measurement method. The morphology measurement usually needs high-resolution imaging technology such as scanning electron microscope and atomic force microscope. These technologies can provide detailed images of the surface and microstructure of the object, but in addition to high resolution, fast imaging speed is also required to observe the morphology change of the object in the dynamic process. However, the above measurement devices, especially the atomic force microscope, have slow imaging speed and cannot capture.

[0004] However, the prior art cannot simultaneously obtain the morphology and temperature information of the measured object, and can only measure a single physical quantity, and cannot realize simultaneous and synchronous measurement of temperature and morphology. Although some technologies can realize synchronous detection of temperature and morphology, the temperature measurement and imaging speed is slow, and dynamic monitoring cannot be realized, which needs to be solved urgently. SUMMARY

[0005] The present application provides a system for synchronous in-situ monitoring of temperature and morphology of a light-transmitting object based on femtosecond laser, to solve the problem that the prior art cannot realize MHz-level synchronous ultrafast temperature measurement and imaging of a light-transmitting object.

[0006] The first aspect embodiment of the present application provides a system for simultaneous in-situ monitoring of temperature and morphology of a light-transmitting object based on femtosecond laser, comprising: a broadband femtosecond pulse laser for generating femtosecond laser pulses meeting preset power and wavelength requirements; a time-domain stretching component for time-domain stretching of the femtosecond laser pulses; an optical signal amplification component for power compensation of the time-domain stretched femtosecond laser pulses to obtain corresponding compensation amplified laser signals; a non-polarization beam splitter for splitting the compensation amplified laser signals into reference pulses and probe pulses; a time delay component for adjusting the passing time of the reference pulses so that the reference pulses and the probe pulses interfere in time domain; a first spatial dispersion component for spatial dispersion of the probe pulses to obtain corresponding spatial pulses; a first microscope objective for focusing the spatial pulses on a sample of a light-transmitting object to be measured; a second microscope objective for converging transmission pulses transmitting through the sample of the light-transmitting object to be measured; a second spatial dispersion component for beam combining of the converged transmission pulses to obtain corresponding transmission pulse spots; a high-speed photodetector for collecting pulse signals formed after the reference pulses and the transmission pulses couple and interfere, and converting the pulse signals into corresponding analog signals; a high-speed oscilloscope for collecting the analog signals to obtain corresponding sampling pulses; and a computer for reconstructing spatial temperature and image information of the sample of the light-transmitting object to be measured based on the sampling pulses, a pre-stored function relationship and a digital signal processing strategy.

[0007] Optionally, in an embodiment of the present application, further comprising: an optical power meter for being placed between the first microscope objective and the sample of the light-transmitting object to be measured before the simultaneous in-situ monitoring of temperature and morphology of the sample of the light-transmitting object to be measured, so that the broadband femtosecond pulse laser generates femtosecond laser pulses meeting preset power requirements, and being removed from the system for simultaneous in-situ monitoring of temperature and morphology of a light-transmitting object based on femtosecond laser after the simultaneous in-situ monitoring of temperature and morphology.

[0008] Optionally, in an embodiment of the present application, the first spatial dispersion component comprises: a first acousto-optic deflector for adjusting the propagation direction of the probe pulses; and a first diffraction grating for dispersing the probe pulses into the spatial pulses.

[0009] Optionally, in an embodiment of the present application, the second spatial dispersion component comprises: a second acousto-optic deflector for converting the scanned transmission pulses into point pulses; and a second diffraction grating for reducing the scanned spatial pulses to obtain the scanned transmission point pulses.

[0010] Optionally, in one embodiment of the present application, further comprising: a first collimator, disposed between the optical signal amplification assembly and the first spatial dispersion assembly, for causing the compensation amplified laser signal to be incident on the non-polarization beam splitter in the form of spatial light based on a target angle; a second collimator, disposed between the second spatial dispersion assembly and the high-speed photodetector, for coupling the transmitted pulse into a preset optical path so that the high-speed photodetector detects the transmitted pulse; a third collimator, disposed between the delay assembly and the high-speed photodetector, for coupling the reference pulse into a preset optical path so that the high-speed photodetector detects the reference pulse; and a coupler, disposed between the second spatial dispersion assembly and the high-speed photodetector, for coupling the transmitted pulse and the reference pulse and causing interference between the detected pulse and the reference pulse.

[0011] Optionally, in one embodiment of the present application, further comprising: a first lens combination, disposed between the first spatial dispersion assembly and the first microscopic objective lens, for adjusting the size of the pulse spot and the incident angle of the spatial pulse incident on the first microscopic objective lens; and a second lens combination, disposed between the second microscopic objective lens and the second spatial dispersion assembly, for converging the transmitted pulse into the second spatial dispersion assembly.

[0012] The second aspect embodiment of the present application provides a method for synchronously monitoring the temperature and morphology of a light-transmitting object in situ based on a femtosecond laser, comprising the following steps: generating a femtosecond laser pulse meeting preset power and wavelength requirements by a preset broadband femtosecond pulse laser, and performing time-domain stretching and power loss compensation operations on the femtosecond laser pulse to obtain a corresponding compensation amplified laser signal; dividing the compensation amplified laser signal into a reference pulse and a detected pulse, adjusting the passing time of the reference pulse, so that the reference pulse and the detected pulse interfere in the time domain, and spatially dispersing the detected pulse to obtain a corresponding spatial pulse, focusing the spatial pulse on a to-be-measured light-transmitting object sample, and converging a transmitted pulse that transmits through the to-be-measured light-transmitting object sample to obtain a corresponding transmitted pulse spot; receiving a pulse signal formed after the reference pulse and the transmitted pulse are coupled and interfered by a preset high-speed photodetector and a high-speed oscilloscope, converting the pulse signal into a corresponding analog signal, sampling the analog signal to obtain a corresponding sampling pulse, and reconstructing the spatial temperature and image information of the to-be-measured light-transmitting object sample based on the sampling pulse, a pre-stored function relationship, and a digital signal processing strategy.

[0013] Optionally, in an embodiment of the present application, the reconstructing the spatial temperature and image information of the to-be-tested light-transmitting object sample based on the sampling pulse, the pre-stored function relationship and the digital signal processing strategy comprises: performing a low-frequency filtering operation on the sampling pulse to obtain a corresponding filtered signal, and performing a Hilbert transform on a high-frequency component in the filtered signal to generate a transformed component corresponding to the high-frequency component, and obtaining real part information and imaginary part information of the high-frequency component; determining a function relationship between the transmittance and the temperature of the to-be-tested light-transmitting object sample based on the pre-set power and wavelength requirements, and reconstructing the spatial temperature and image information of the to-be-tested light-transmitting object sample according to the real part information, the imaginary part information, the sampling pulse and the function relationship.

[0014] The third aspect of the embodiments of the present application provides an electronic device, comprising a memory, a processor and a computer program stored in the memory and executable on the processor, and the processor executes the program to implement the method for synchronously monitoring the temperature and the morphology of a light-transmitting object based on a femtosecond laser as described in the above embodiments.

[0015] The fourth aspect of the embodiments of the present application provides a computer readable storage medium, which stores a computer program, and the program is executed by a processor to implement the method for synchronously monitoring the temperature and the morphology of a light-transmitting object based on a femtosecond laser as described above.

[0016] Therefore, the embodiments of the present application have the following beneficial effects:

[0017] The embodiments of the present application can obtain the transient temperature and the morphology change of a light-transmitting object by using a femtosecond pulse laser, a time-domain stretching assembly, an optical signal amplification assembly, a non-polarization beam splitter, a time delay assembly, a first spatial dispersion assembly and a second spatial dispersion assembly, a first microscope objective, a second microscope objective, a high-speed photoelectric detector, a high-speed oscilloscope and a computer and other assemblies to perform time-domain and spatial transformation on femtosecond laser pulses, combined with a Hilbert transform and other data processing methods.

[0018] Additional aspects and advantages of the present application will be made apparent by the following description and the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0019] The above and / or additional aspects and advantages of the present application will become apparent and be readily understood from the following description, taken in conjunction with the accompanying drawings, in which:

[0020] Figure 1 FIG. 1 is a schematic diagram of a system for monitoring temperature and morphology of a transparent object according to an embodiment of the present application;

[0021] Figure 2 FIG. 2 is a schematic diagram of a system for monitoring temperature and morphology of a transparent object according to an embodiment of the present application;

[0022] Figure 3 FIG. 3 is a schematic diagram of a system for monitoring temperature and morphology of a transparent object according to an embodiment of the present application;

[0023] Figure 4 FIG. 4 is a schematic diagram of a system for monitoring temperature and morphology of a transparent object according to an embodiment of the present application;

[0024] Figure 5 FIG. 5 is a flowchart of a method for monitoring temperature and morphology of a transparent object according to an embodiment of the present application;

[0025] Figure 6 FIG. 6 is a schematic diagram of an electronic device according to an embodiment of the present application. DETAILED DESCRIPTION

[0026] Embodiments of the present application are described in detail below with reference to the accompanying drawings, in which like or similar elements are denoted by the same or similar reference signs, and the embodiments described below are examples for explaining the present application and are not intended to limit the present application.

[0027] A system for monitoring temperature and morphology of a transparent object according to an embodiment of the present application is described below with reference to the accompanying drawings. In view of the problems mentioned in the background art, the present application provides a system for monitoring temperature and morphology of a transparent object, in which the system can obtain the transient temperature and morphology of the transparent object by using a femtosecond pulse laser, a time-domain stretching component, an optical signal amplification component, a non-polarization beam splitter, a delay component, a first spatial dispersion component and a second spatial dispersion component, a first microscope objective, a second microscope objective, a high-speed photodetector, a high-speed oscilloscope, and a computer, and by using a Hilbert transform and other data processing methods. The present application can realize synchronous temperature measurement and morphology monitoring by using a MHz-level monitoring strategy for the transient temperature and morphology of the transparent object, thereby greatly improving the test sampling rate. Thus, the present application solves the problem that the prior art cannot realize MHz-level synchronous ultrafast temperature measurement and imaging of a transparent object.

[0028] Specifically, Figure 1 is a block schematic diagram of a system for simultaneous in-situ monitoring of temperature and morphology of a light-transmitting object based on femtosecond laser according to an embodiment of the present application.

[0029] As Figure 1 shown, the system 10 for simultaneous in-situ monitoring of temperature and morphology of a light-transmitting object based on femtosecond laser includes a broadband femtosecond pulse laser 100, a time-domain stretching assembly 200, an optical signal amplification assembly 300, a non-polarization beam splitter 400, a delay assembly 500, a first spatial dispersion assembly 600, a second spatial dispersion assembly 700, a first microscope objective 800, a second microscope objective 900, a high-speed photodetector 1000, a high-speed oscilloscope 1100, and a computer 1200.

[0030] The broadband femtosecond pulse laser 100 is configured to generate femtosecond laser pulses that meet preset power and wavelength requirements.

[0031] The time-domain stretching assembly 200 is configured to perform time-domain stretching on the femtosecond laser pulses.

[0032] The optical signal amplification assembly 300 is configured to perform power compensation on the time-domain stretched femtosecond laser pulses to obtain corresponding compensation amplified laser signals.

[0033] The non-polarization beam splitter 400 is configured to divide the compensation amplified laser signals into reference pulses and probe pulses.

[0034] The delay assembly 500 is configured to adjust the passing time of the reference pulses so that the reference pulses and the probe pulses perform time-domain interference.

[0035] The first spatial dispersion assembly 600 is configured to perform spatial dispersion on the probe pulses to obtain corresponding spatial pulses.

[0036] First, the broadband femtosecond pulse laser 100 can be used to generate femtosecond laser pulses with a first power and a first wavelength (i.e., meeting preset power and wavelength requirements). The time-domain stretching assembly 200 is connected to the broadband femtosecond pulse laser 100 and performs time-domain stretching on the femtosecond laser pulses.

[0037] Second, the optical signal amplification assembly 300 connected to the time-domain stretching assembly 200 is used to perform power compensation on the time-domain stretched femtosecond laser pulses to obtain corresponding compensation amplified laser signals. The non-polarization beam splitter 400 is connected to the optical signal amplification assembly 300 to divide the compensation amplified laser signals into reference pulses and probe pulses.

[0038] Again, the embodiment of the present application can set the first spatial dispersion component 600 on the first exit light path of the non-polarization beam splitter 400 to spatially disperse the exited probe pulse as a spatial pulse.

[0039] In addition, the embodiment of the present application can set the delay component 500 on the second exit light path of the non-polarization beam splitter 400 to change the passing time of the reference pulse, so that the reference signal and the probe signal can form interference in time.

[0040] It can be understood that the embodiment of the present application can stretch the narrow pulse which cannot be directly detected in time domain to a wide pulse which can be detected by the MHz level and above high-speed free space photoelectric detector, i.e. high-speed photoelectric detector 1000, and carry the spatial temperature information of the sample to be measured on the spectrum of the pulse, so as to obtain the topography and temperature information of each corresponding position on the sample at the same time.

[0041] Optionally, in an embodiment of the present application, the first spatial dispersion component 600 comprises a first acousto-optic deflector and a first diffraction grating.

[0042] The first acousto-optic deflector is configured to adjust the propagation direction of the probe pulse.

[0043] The first diffraction grating is configured to disperse the probe pulse as a spatial pulse.

[0044] It should be noted that the first spatial dispersion component 600 in the embodiment of the present application is mainly composed of an acousto-optic deflector (i.e. the first acousto-optic deflector) and a diffraction grating (i.e. the first diffraction grating). The first diffraction grating can disperse the pulse as a one-dimensional spatial pulse, and the acousto-optic deflector can change the propagation direction of the pulse, so as to realize the two-dimensional scanning of the subsequent one-dimensional femtosecond laser on the test object.

[0045] The second spatial dispersion component 700 is configured to converge the transmission pulse transmitted through the sample to be measured to obtain a corresponding transmission pulse spot.

[0046] In addition, the embodiment of the present application can also use the second spatial dispersion component 700 to converge the light pulse of the sample to be measured to obtain a point light (i.e. pulse spot).

[0047] Optionally, in an embodiment of the present application, the second spatial dispersion component 700 comprises a second acousto-optic deflector and a second diffraction grating.

[0048] The second acousto-optic deflector is configured to convert the scanned transmission pulse into a point pulse.

[0049] The second diffraction grating is configured to restore the scanned spatial pulse to obtain the transmission point pulse being scanned.

[0050] In the embodiment of the present application, the second spatial dispersion component 700 can also adopt the combination of an acousto-optic deflector (i.e., a second acousto-optic deflector) and a diffraction grating (i.e., a second diffraction grating) to reduce the scanned spatial pulse (i.e., one-dimensional spatial pulse) through the diffraction grating to obtain a scanning transmission pulse, and convert the scanning transmission pulse into a point pulse by using the acousto-optic deflector.

[0051] The first microscope objective 800 is used to focus the spatial pulse on the sample of the transparent object to be measured.

[0052] The second microscope objective 900 is used to converge the transmission pulse through the sample of the transparent object to be measured.

[0053] In the embodiment of the present application, the first microscope objective 800 can be arranged between the first spatial dispersion component 600 and the transparent object to be measured to focus the spatial pulse on the transparent object to be measured; and the second microscope objective 900 can be arranged between the transparent object to be measured and the second spatial dispersion component 700 to converge the transmission pulse through the sample of the transparent object to be measured.

[0054] Optionally, in one embodiment of the present application, the system for synchronous in-situ measurement of temperature and morphology of the transparent object based on femtosecond laser of the present application further comprises an optical power meter, which is arranged between the first microscope objective 800 and the sample of the transparent object to be measured before the synchronous in-situ measurement of temperature and morphology of the sample of the transparent object to be measured is performed, so that the femtosecond laser pulse generated by the broadband femtosecond pulse laser 100 meets the preset power requirement, and the system for synchronous in-situ measurement of temperature and morphology of the transparent object based on femtosecond laser is removed after the synchronous in-situ measurement of temperature and morphology is performed.

[0055] In the specific implementation process, before the test starts, the optical power meter can be arranged between the first microscope objective 800 and the sample of the transparent object to be measured, to ensure that the optical power generated by the broadband femtosecond pulse laser 100 is sufficient to image through the sample of the transparent object to be measured and not too large to damage the transparent object to be measured; and after the test starts, the optical power meter is removed from the optical path.

[0056] Optionally, in one embodiment of the present application, the system for synchronous in-situ measurement of temperature and morphology of the transparent object based on femtosecond laser of the present application further comprises a first lens combination and a second lens combination.

[0057] The first lens combination is arranged between the first spatial dispersion component 600 and the first microscope objective 800 to adjust the size of the pulse spot and the incident angle of the spatial pulse incident to the first microscope objective 800.

[0058] A second lens combination is arranged between the second spatial dispersion component 700 and the second microscopic objective 900 to converge the transmitted pulse into the second spatial dispersion component 700.

[0059] It should be noted that in the embodiments of the present application, the first lens combination is arranged between the first spatial dispersion component 600 and the first microscopic objective 800 to adjust the size of the pulse spot and the angle of the pulse incident to the first microscopic objective 800; and the second lens combination is arranged between the second spatial dispersion component 700 and the second microscopic objective 900, and the second lens combination is used to converge the transmitted pulse onto the second spatial dispersion component 700.

[0060] A high-speed photodetector 1000 is arranged to collect the pulse signal formed by the coupling and interference of the reference pulse and the transmitted pulse, and convert the pulse signal into a corresponding analog signal.

[0061] After that, the embodiments of the present application can arrange a high-speed photodetector 1000 of MHz level and above on the exit light path of the second spatial dispersion component 700 to convert the detected pulse signal (i.e. the reference pulse and the transmitted pulse) into a corresponding analog signal.

[0062] Optionally, in one embodiment of the present application, the femtosecond laser-based synchronous in-situ monitoring system 10 for temperature measurement and topography of the transparent object according to the embodiments of the present application further comprises a first collimator, a second collimator, a third collimator and a coupler.

[0063] The first collimator is arranged between the optical signal amplification component 300 and the first spatial dispersion component 600 to incident the compensation amplified laser signal to the non-polarization beam splitter 400 in the form of spatial light based on the target angle.

[0064] The second collimator is arranged between the second spatial dispersion component 700 and the high-speed photodetector 1000 to couple the transmitted pulse into a preset light path so that the high-speed photodetector 1000 detects the transmitted pulse.

[0065] The third collimator is arranged between the delay component 500 and the high-speed photodetector 1000 to couple the reference pulse into a preset light path so that the high-speed photodetector detects the reference pulse.

[0066] The coupler is arranged between the second spatial dispersion component 700 and the high-speed photodetector 1000 to couple the transmitted pulse and the reference pulse, and interfere the detected pulse and the reference pulse.

[0067] In actual implementation, the first embodiment of the present application can be provided with a first collimator between the optical signal amplification component 300 and the first spatial dispersion component 600, so as to make the pulse amplified by the optical signal amplification component 300 (i.e. the compensation amplified laser signal) incident on the non-polarization beam splitter in the form of spatial light at a specific angle; secondly, the first embodiment of the present application can be provided with a second collimator between the second spatial dispersion component 700 and the MHz-level and above high-speed photoelectric detector 1000, so as to couple the transmitted pulse into the optical path for detection by the high-speed photoelectric detector 1000; the first embodiment of the present application can also be provided with a third collimator between the delay component 500 and the high-speed photoelectric detector 1000, so as to couple the reference pulse into the preset optical path, so that the high-speed photoelectric detector 1000 detects the reference pulse.

[0068] In addition, the first embodiment of the present application can be provided with a coupler between the second spatial dispersion component 700 and the high-speed photoelectric detector 1000, so as to couple the transmitted pulse and the reference pulse and form interference therebetween.

[0069] The high-speed oscilloscope 1100 is used to collect a sampling analog signal to obtain a corresponding sampling pulse.

[0070] The computer 1200 is used to reconstruct the spatial temperature and image information of the sample of the measured light-transmitting object based on the sampling pulse, the pre-stored function relationship and the digital signal processing strategy.

[0071] It should be noted that the MHz-level and above high-speed photoelectric detector 1000 is connected to the MHz-level and above high-speed oscilloscope 1100 in the first embodiment of the present application, so as to collect a sampling analog electrical signal (i.e. a sampling pulse); secondly, the computer 1200 is connected to the MHz-level and above high-speed oscilloscope 1100 in the first embodiment of the present application, so as to store the pre-acquired function relationship and digital signal processing algorithm, and realize the reconstruction of the spatial temperature and image information of the measured sample. The function relationship is the function relationship between the transmittance and the temperature of the observed object at the first wavelength (satisfying the preset wavelength relationship).

[0072] As an implementable manner, after the sampling pulse is acquired, the first embodiment of the present application can filter out the low-frequency component of the sampling pulse, and perform Hilbert transform on the high-frequency component by the computer 1200 to obtain the transformed component T and the real part and the imaginary part of T. The spatial temperature and image information of the measured sample can be reconstructed according to the real part and the imaginary part of T and the known information such as the sampling pulse according to different algorithms and function relationships, so as to obtain the temperature and the topographic information of each corresponding position on the sample at the same time.

[0073] Therefore, the surface temperature and topography information of the sample can be converted by the computer 1200 after the collected sampling pulse is processed and transformed, and the obtained temperature information and topography information correspond to each other in time and space, so that the synchronous detection of temperature and topography is realized.

[0074] It should be noted that the one-dimensional line region, two-dimensional surface region, and specified point of the observation object (i.e., the transparent object sample to be measured) can be realized by specific selection and movement of part of the optical elements, and the specific implementation is as follows:

[0075] (1) The diffraction grating can be used as a spatial dispersion component in the embodiment of the present application, the pulse is dispersed into one-dimensional spatial pulse by the diffraction grating, and the one-dimensional line region of the observation object can be realized by the ultrafast temperature measurement;

[0076] (2) The combination of the acousto-optic deflector and the diffraction grating is used as a spatial dispersion component, the internal driving frequency is changed by the acousto-optic deflector, and the propagation direction of the spatial pulse is changed, so that the two-dimensional scanning of the subsequent femtosecond laser on the transparent object is realized; the pulse is dispersed into one-dimensional spatial pulse by the diffraction grating, and the two-dimensional surface region of the observation object can be realized by the ultrafast temperature measurement and the ultrafast topography synchronous in-situ monitoring;

[0077] (3) The spatial dispersion component is moved out of the optical path, and the specified point of the observation object can be realized by the ultrafast temperature measurement and the ultrafast topography synchronous in-situ monitoring.

[0078] The execution logic of the temperature measurement and topography synchronous in-situ monitoring system based on femtosecond laser for transparent object in the present application is described below by specific embodiments and in combination with the drawings.

[0079] Specifically, the execution steps of the first specific embodiment of the present application for one-dimensional line region ultrafast temperature measurement and topography synchronous in-situ monitoring of transparent object are as follows:

[0080] Step 1, the temperature of the test object (i.e., the transparent object sample to be measured) is regulated by the temperature regulation device, the monochromatic laser of the first wavelength (i.e., meeting the preset wavelength requirement) is emitted by the broadband femtosecond pulse laser, and the function relationship between the transmittance and the temperature of the test object is calibrated by the function f(x) and stored to the computer;

[0081] Step 2, the test object is fixed on the specific position of the measurement system;

[0082] Step 3, the optical power meter is located between the first microscope objective and the test object during calibration, the femtosecond laser and the erbium-doped fiber amplifier are adjusted so that the generated femtosecond laser pulses still have the first power and the first wavelength after stretching and compensation, the power is sufficient to transmit and image inside the object to be tested after splitting, and the wavelength is sufficient to form an image with sufficient quality after transmitting on the surface of the object to be tested; the optical power meter is removed from the optical path after the test starts, and the pulse power and wavelength emitted and amplified by the femtosecond laser and the erbium-doped fiber amplifier remain unchanged;

[0083] Step 4, before the test, use the light shield to shield the sample light path, and adjust the optical path difference of the reference light path to form a stable interference waveform on the oscilloscope;

[0084] Step 5, the single-mode optical fiber stretches the femtosecond pulse in the time domain, and the stretched pulse is power-compensated by the erbium-doped fiber amplifier and then enters the beam splitter in the form of spatial light at a specific angle through the first collimator;

[0085] Step 6, the beam splitter divides the pulse into reference pulses and probe pulses through polarization, the reference pulses are detected by the MHz-level and above high-speed free-space photodetector module after the delay component and the coupler, and are sampled by the MHz-level and above high-speed digital oscilloscope;

[0086] Step 7, the probe pulse is incident on the diffraction grating to realize one-dimensional spatial dispersion; the spatially dispersed pulse is focused on the sample to be tested through the lens group and the microscope objective to form a linear light spot, different wavelengths are focused at different positions, thereby realizing the mapping of wavelength and spatial position;

[0087] Step 8, the pulse is recombined in space after transmitting from the sample through the same microscope objective, plano-convex lens and diffraction grating, and is coupled into the optical fiber through the collimator, and then is detected by the MHz-level and above high-speed free-space photodetector and sampled by the MHz-level and above high-speed digital oscilloscope;

[0088] Step 9, the sampled data are processed by the computer to realize the reconstruction of the one-dimensional spatial temperature and image information of the test object at the same time.

[0089] Thus, the first specific embodiment of the application stretches the narrow pulse that cannot be directly detected in the time domain into a wide pulse that can be detected by the high-speed MHz-level and above high-speed free-space photodetector through time-domain stretching, disperses the spatial pulse to form a one-dimensional spatial pulse by using the diffraction grating, thereby realizing one-dimensional line scanning of the one-dimensional femtosecond laser on the observation object (light-transmitting object), carrying the spatial temperature information of the sample to be tested on the spectrum of the pulse, thereby obtaining the topography and temperature information of each corresponding position on the sample at the same time, and realizing 100MHz-level high-speed synchronous detection of the temperature and topography information in the one-dimensional line region.

[0090] Specifically, Figure 2 The structure diagram of a one-dimensional line region ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring system for a light-transmitting object based on a femtosecond laser is shown in FIG. 1. As shown in the figure, the second specific embodiment of the present application analyzes and describes a one-dimensional line region ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring system for a light-transmitting object, which mainly includes a femtosecond pulse laser 101, a single-mode optical fiber 102, an optical fiber amplifier 103, a first collimator 104, a beam splitter 105, a delay component 106, a second collimator 107, a first diffraction grating 108, a first convex lens 109, a second convex lens 110, a first objective lens 111, a sample 112, a second objective lens 113, a third convex lens 114, a fourth convex lens 115, a second diffraction grating 116, a third collimator 117, a coupler 118, an MHz-level and above high-speed free-space photoelectric detector 119, an MHz-level and above high-speed digital oscilloscope 120, and a computer 121. Figure 2

[0091] The femtosecond pulse laser 101 is connected with the single-mode optical fiber 102, the optical fiber amplifier 103 is connected with the single-mode optical fiber 102, the first collimator 104 is connected with the optical fiber amplifier 103, the beam splitter 105 is located in front of the first collimator 104, the delay component 106 is located on the side of the reference pulse split by the beam splitter 105, the second collimator 107 is located on the right side of the delay component 106, the first diffraction grating 108 is located in front of the beam splitter 105, the first convex lens 109 is located on the right side of the diffraction grating 108, the second convex lens 110 is located on the right side of the first convex lens 109, the first objective lens 111 is located on the right side of the second convex lens 110, and the sample 112 is located on the right side of the first objective lens 111; the second objective lens 113 is located on the right side of the sample 112, the third convex lens 114 is located on the right side of the second objective lens 113, the fourth convex lens 115 is located on the right side of the third convex lens 114, the second diffraction grating 116 is located on the right side of the fourth convex lens 115, the third collimator 117 is located behind the second diffraction grating 116, the coupler 118 is connected with the third collimator 117 and the second collimator 107, the MHz-level and above high-speed free-space photoelectric detector 119 is connected with the coupler 118, the MHz-level and above high-speed oscilloscope 120 is connected with the MHz-level and above high-speed free-space photoelectric detector 119, and the computer 121 is connected with the MHz-level and above high-speed oscilloscope 120.

[0092] It should be noted that the system provided by the second specific embodiment of the present application can realize the steps in the first specific embodiment, and realize the one-dimensional line region ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring of the light-transmitting object under normal circumstances, with a sampling frequency of 100 MHz or above.

[0093] ​Secondly, the third specific embodiment of the present application provides a method for simultaneous in-situ monitoring of ultrafast temperature measurement and ultrafast morphology of a two-dimensional surface area of ​​a translucent object based on a femtosecond laser. The difference between this method and the first specific embodiment is that step 7 of the first specific embodiment, "the detection pulse is incident on the diffraction grating to achieve one-dimensional spatial dispersion; the pulse after spatial dispersion is focused through the lens group and the microscope objective to form a linear spot on the sample to be measured, and different wavelengths are focused at different positions, thereby achieving the mapping of wavelength and spatial position" is adjusted to: "the detection pulse is incident on the acousto-optic deflector; the internal driving frequency is changed by the acousto-optic deflector, and the propagation direction of the spatial pulse is changed, thereby achieving subsequent large-area two-dimensional scanning of the translucent object by the one-dimensional femtosecond laser, and the spatial pulse is dispersed into a one-dimensional spatial pulse through the diffraction grating."

[0094] It can be understood that the third specific embodiment utilizes the femtosecond level characteristic of the femtosecond laser pulse wave, utilizes a diffraction grating to disperse the spatial pulse to form a one-dimensional spatial pulse, and uses an acousto-optic deflector to change the internal driving frequency and the propagation direction of the spatial pulse to achieve a large-area two-dimensional scanning of the one-dimensional femtosecond laser on the sample to be measured, and ultra-fast acquisition of information such as the transmittance of the pulse when passing through the observed object. In conjunction with a pre-calibrated functional relationship and decoding algorithm, the 100MHz-level ultra-fast temperature and morphology synchronous in-situ monitoring of the two-dimensional surface area of ​​the observed object can be performed.

[0095] Afterwards, if Figure 3 As shown, the present application can illustrate and introduce the fourth specific embodiment of the ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring system of the two-dimensional surface area of ​​the transparent object based on femtosecond laser.

[0096] The difference between the ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring system for the two-dimensional surface area of ​​a transparent object and the second specific embodiment is that: the system provided by the fourth specific embodiment also includes an acousto-optic deflector. The system provided by the fourth specific embodiment can perform ultrafast temperature measurement and ultrafast morphology detection on the two-dimensional surface area of ​​a transparent object based on femtosecond laser.

[0097] Specifically, if Figure 3As shown, the femtosecond laser-based ultrafast temperature measurement and ultrafast topography synchronous in-situ monitoring system for a two-dimensional surface area of a light-transmitting object comprises a femtosecond pulse laser 201, a single-mode optical fiber 202, an optical fiber amplifier 203, a first collimator 204, a beam splitter 205, a delay component 206, a second collimator 207, a first acousto-optic deflector 208, a first diffraction grating 209, a first convex lens 210, a second convex lens 211, a first objective lens 212, a sample 213, a second objective lens 214, a third convex lens 215, a fourth convex lens 216, a second diffraction grating 217, a second acousto-optic deflector 218, a third collimator 219, a coupler 220, a MHz-level or higher-speed free-space photodetector 221, a MHz-level or higher-speed digital oscilloscope 222, and a computer 223.

[0098] The femtosecond pulse laser 201 is connected to the single-mode optical fiber 202, the optical fiber amplifier 203 is connected to the single-mode optical fiber 202, the first collimator 204 is connected to the optical fiber amplifier 203, the beam splitter 205 is located in front of the first collimator 204, the delay component 206 is located on the reference pulse side split by the beam splitter 205, the second collimator 207 is located on the right side of the delay component 206, the first acousto-optic deflector 208 is located in front of the beam splitter 205, the first diffraction grating 209 is located in front of the first acousto-optic deflector, the first convex lens 210 is located on the right side of the diffraction grating 209, the second convex lens 211 is located on the right side of the first convex lens 210, the first objective lens 212 is located on the right side of the second convex lens 211, and the sample 213 is located on the right side of the first objective lens 212. The second objective lens 214 is located on the right side of the sample 213, the third convex lens 215 is located on the right side of the second objective lens 214, the fourth convex lens 216 is located on the right side of the third convex lens 215, the second diffraction grating 217 is located on the right side of the fourth convex lens 216, the second acousto-optic deflector 218 is located behind the second diffraction grating 217, the third collimator 219 is located behind the second acousto-optic deflector 218, the coupler 220 is connected to the third collimator 219 and the second collimator 207, the MHz-level or higher-speed free-space photodetector 221 is connected to the coupler 220, the MHz-level or higher-speed digital oscilloscope 222 is connected to the MHz-level or higher-speed free-space photodetector 221, and the computer 223 is connected to the MHz-level or higher-speed digital oscilloscope 222. The internal driving frequency is changed by the acousto-optic deflector 208, and the propagation direction of the spatial pulse is changed, so that subsequent one-dimensional femtosecond laser can be scanned on a large two-dimensional area of a light-transmitting object. The spatial pulse is dispersed into a one-dimensional spatial pulse by the diffraction grating 209.

[0099] It should be noted that the system provided by the fourth specific embodiment can realize ultrafast temperature measurement and ultrafast topography synchronous in-situ monitoring for a two-dimensional surface area of a light-transmitting object, and the system has simple structure and is easy to operate.

[0100] It can be understood that, on the basis of the one-dimensional line area ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring system, the application can set an acousto-optic deflector before the diffraction grating to realize the function of two-dimensional surface area ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring of the sample to be measured. The collection frequency of two-dimensional temperature distribution mainly depends on the actual frequency of the acousto-optic deflector and the one-dimensional temperature measurement system, and can usually reach a MHz-level sampling rate. The two-dimensional surface area ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring example can not only obtain the transient changes of temperature and morphology with time in a superfast manner, but also can obtain the specific temperature distribution and morphology information of different regions at a certain transient state through the function of two-dimensional scanning.

[0101] Then, the embodiment of the application can illustrate the system for ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring of a specified point of a light-transmitting object based on a femtosecond laser through a fifth specific embodiment. The difference between the fifth specific embodiment and the first specific embodiment is that the fifth specific embodiment directly irradiates the probe pulse to the first plano-convex lens through the collimator, that is, the fifth specific embodiment removes the spatial dispersion component and does not involve the step of dispersing the spatial pulse into a one-dimensional spatial pulse through the diffraction grating.

[0102] It can be understood that the fifth specific embodiment utilizes the femtosecond laser pulse wave with a femtosecond-level characteristic to obtain the transmittance information of the pulse when passing through the observation object in a superfast manner, and cooperates with the pre-calibrated function relationship and decoding algorithm to realize the 100MHz-level ultrafast temperature and morphology synchronous in-situ monitoring of the specified point of the observation object.

[0103] Specifically, Figure 4 FIG. 1 is a structural schematic diagram of the system for ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring of a specified point of a light-transmitting object based on a femtosecond laser. As shown in FIG. 1, the system provided by the sixth specific embodiment of the application is different from the system provided by the second specific embodiment in that the system provided by the sixth specific embodiment removes the diffraction grating, and can realize the function of ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring of a specified point of a light-transmitting object based on a femtosecond laser. Figure 4 Specifically, as shown in FIG. 1,

[0104] Figure 4 ​As shown, the femtosecond laser-based ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring system for a specified point of a light-transmitting object includes a femtosecond pulse laser 301, a single-mode optical fiber 302, an optical fiber amplifier 303, a first collimator 304, a beam splitter 305, a delay component 306, a second collimator 307, a first convex lens 308, a second convex lens 309, a first objective lens 310, a sample 311, a second objective lens 312, a third convex lens 313, a fourth convex lens 314, a third collimator 315, a coupler 316, an MHz-level or above high-speed free-space photodetector 317, an MHz-level or above high-speed digital oscilloscope 318, and a computer 319.

[0105] The femtosecond pulse laser 301 is connected with the single-mode optical fiber 302, the optical fiber amplifier 303 is connected with the single-mode optical fiber 302, the first collimator 304 is connected with the optical fiber amplifier 303, the beam splitter 305 is located at the right of the first collimator 304, the delay component 306 is located at the reference pulse side split by the beam splitter 305, the second collimator 307 is located at the back side of the delay component 306, the first convex lens 308 is located at the right of the beam splitter 305, the second convex lens 309 is located at the right of the first convex lens 308, the first objective lens 310 is located at the right of the second convex lens 309, the sample 311 is located at the right of the first objective lens 310. The second objective lens 312 is located at the right of the sample 311, the third convex lens 313 is located at the right of the second objective lens 312, the fourth convex lens 314 is located at the right of the third convex lens 313, the third collimator 315 is located at the right of the fourth convex lens, the coupler 316 is connected with the third collimator 315 and the second collimator 307, the MHz-level or above high-speed free-space photodetector 317 is connected with the coupler 316, the MHz-level or above high-speed oscilloscope 318 is connected with the MHz-level or above high-speed free-space photodetector 317, and the computer 319 is connected with the MHz-level or above high-speed oscilloscope 318.

[0106] It should be noted that the system provided by the sixth embodiment of the present application can realize ultrafast temperature measurement and ultrafast morphology synchronous in-situ monitoring for a specified point of a light-transmitting object by simplifying the device by canceling the spatial dispersion component, and the system has simple structure and is convenient to operate.

[0107] According to the embodiment of the present application, a synchronous in-situ monitoring system for temperature measurement and morphology of a light-transmitting object based on a femtosecond laser is proposed. By using components such as a femtosecond pulse laser, a time-domain stretching component, an optical signal amplification component, a non-polarizing beam splitter, a delay component, a first spatial dispersion component and a second spatial dispersion component, a first microscope objective lens, a second microscope objective lens, a high-speed photodetector, a high-speed oscilloscope, and a computer to perform time-domain and spatial transformations on the femtosecond laser pulse, combined with data processing methods such as the Hilbert transform, the transient temperature and morphology changes of the light-transmitting object can be obtained. This application can achieve synchronous temperature measurement and morphology monitoring through a MHz-level monitoring strategy for the transient temperature and morphology changes of the light-transmitting object, greatly improving the test sampling rate.

[0108] Next, a method for simultaneous in-situ temperature measurement and morphology monitoring of a light-transmitting object based on a femtosecond laser according to an embodiment of the present application will be described with reference to the accompanying drawings.

[0109] Figure 5 This is a flow chart of a method for simultaneous in-situ temperature measurement and morphology monitoring of a translucent object based on a femtosecond laser, provided in an embodiment of the present application.

[0110] like Figure 5 As shown, the method for synchronous in-situ temperature measurement and morphology monitoring of a light-transmitting object based on a femtosecond laser comprises the following steps:

[0111] In step S501, a preset broadband femtosecond pulse laser is used to generate femtosecond laser pulses that meet preset power and wavelength requirements, and time domain stretching and power loss compensation operations are performed on the femtosecond laser pulses to obtain corresponding compensated amplified laser signals.

[0112] In step S502, the compensated amplified laser signal is divided into a reference pulse and a detection pulse, and the passage time of the reference pulse is adjusted so that the reference pulse and the detection pulse interfere in the time domain, and the detection pulse is spatially dispersed to obtain a corresponding spatial pulse, and the spatial pulse is focused onto the transparent object sample to be measured, and the transmission pulse passing through the transparent object sample to be measured is converged to obtain a corresponding transmission pulse spot.

[0113] In step S503, a pulse signal formed by coupling and interfering the reference pulse and the transmitted pulse is received by a preset high-speed photodetector and a high-speed oscilloscope, and the pulse signal is converted into a corresponding analog signal. The analog signal is sampled to obtain a corresponding sampling pulse, and based on the sampling pulse, the pre-stored functional relationship and the digital signal processing strategy, the spatial temperature and image information of the translucent object sample to be measured are reconstructed.

[0114] Specifically, the embodiment of the present application can obtain the functional relationship between transmittance and temperature, and store it in the computer, and generate femtosecond pulses of the first power and the first wavelength (i.e. meet the preset power and wavelength requirements) through a broadband femtosecond pulse laser, and the pulses are first stretched in time domain through a time dispersion unit.

[0115] It can be understood that in the specific implementation process, the embodiment of the present application needs to process and transform the collected data through the computer to convert the surface temperature and topography information of the sample; before conversion, the functional relationship between temperature and transmittance needs to be tested, the functional relationship is obtained by emitting monochromatic laser of the first wavelength through the femtosecond laser, and then the functional relationship between the transmittance and the temperature of the observed object is obtained, and is calibrated as function f(x) and stored in the computer in advance.

[0116] Secondly, the embodiment of the present application can compensate the power loss through the optical fiber amplifier, and then divide the reference pulse and the probe pulse through the collimator and the non-polarization beam splitter, and adjust the two beams to form interference; the reference pulse is detected by the MHz level and above high-speed free space photoelectric detector module after passing through the delay component and is sampled by the MHz level and above high-speed digital oscilloscope, the probe pulse is incident on the spatial dispersion component to realize spatial dispersion.

[0117] After that, the spatially dispersed pulses are focused by the lens combination and the microscope, and different wavelengths are focused at different positions, so as to realize the mapping of wavelength and spatial position; the pulses are transmitted from the sample, pass through the same lens combination, the microscope and the spatial dispersion component, and are recombined in space, and are coupled into the optical fiber through the collimator, and then are detected by the MHz level and above high-speed free space photoelectric detector and sampled by the MHz level and above high-speed digital oscilloscope, so that the sampling pulses can be obtained from the reference pulse and the transmitted pulse, and the high-speed and continuous detection and sampling characteristics of the photoelectric detector and the digitizer make the system sampling rate reach 100MHz and above.

[0118] Finally, the embodiment of the present application can reconstruct the spatial temperature and image information of the measured transparent object sample based on the sampling pulse, the pre-stored functional relationship and the digital signal processing strategy.

[0119] As an implementable manner, the embodiment of the present application can adopt a diffraction grating as a spatial dispersion component, disperse the pulse into one-dimensional spatial pulses through the diffraction grating, and realize the in-situ monitoring of the one-dimensional line region of the observation object in the superfast temperature measurement and the superfast morphology synchronization. Alternatively, the embodiment of the present application can also adopt the combination of an acousto-optic deflector and a diffraction grating as a spatial dispersion component, change the internal driving frequency through the acousto-optic deflector, change the propagation direction of the spatial pulse, and thus realize the two-dimensional scanning of the subsequent one-dimensional femtosecond laser on the light-transmitting object. In addition, the embodiment of the present application can also disperse the pulse into one-dimensional spatial pulses through the diffraction grating, and realize the in-situ monitoring of the two-dimensional surface region of the observation object in the superfast temperature measurement and the superfast morphology synchronization.

[0120] Further, the embodiment of the present application can also move the spatial dispersion component out of the light path, and realize the in-situ monitoring of the specified point of the observation object in the superfast temperature measurement and the superfast morphology synchronization.

[0121] It can be understood that the embodiment of the present application can realize the 100MHz-level high-speed synchronous detection of the temperature and the morphology by stretching the narrow pulse that cannot be directly detected into a wide pulse that can be detected by the MHz-level and above high-speed free-space photoelectric detector in the time domain, and carrying the spatial temperature information of the sample to be measured on the spectrum of the pulse, so as to obtain the morphology and the temperature information of each position of the sample at the same time.

[0122] Optionally, in an embodiment of the present application, based on the sampling pulse, the pre-stored function relationship and the digital signal processing strategy, the spatial temperature and the image information of the sample of the transparent object to be measured are reconstructed, including: performing a low-frequency filtering operation on the sampling pulse to obtain a corresponding filtered signal, and performing a Hilbert transform on the high-frequency component in the filtered signal to generate a transformed component corresponding to the high-frequency component, and obtaining real part information and imaginary part information of the high-frequency component; based on the preset power and wavelength requirements, a function relationship between the transmittance and the temperature of the sample of the transparent object to be measured is determined, and the spatial temperature and the image information of the sample of the transparent object to be measured are reconstructed according to the real part information, the imaginary part information, the sampling pulse and the function relationship.

[0123] It should be noted that after the low-frequency component of the sampling pulse is filtered out, the Hilbert transform of the high-frequency component by the computer can obtain the transformed component T and the real part and the imaginary part of T; the spatial temperature and the image information of the sample can be reconstructed according to the obtained real part and imaginary part of T and the known information such as the sampling pulse according to different algorithms and function relationships, so as to obtain the temperature and the morphology information of each corresponding position of the sample at the same time. Thus, the obtained temperature information and the morphology information correspond to each other in time and space, so as to realize the synchronous detection of the temperature and the morphology.

[0124] Therefore, the laser pulse information on the sample obtained by the in-situ synchronous monitoring of the temperature and the morphology by the femtosecond laser can be decoded into the temperature and morphology transient measurement data, so that the temperature-morphology-electrical signal multi-dimensional synchronous information and dynamic evolution process of the sample to be measured can be obtained.

[0125] It should be noted that the foregoing description of the embodiment of the system for in-situ synchronous monitoring of temperature and morphology of a light-transmitting object based on a femtosecond laser also applies to the embodiment of the method for in-situ synchronous monitoring of temperature and morphology of a light-transmitting object based on a femtosecond laser, which will not be described herein.

[0126] According to the method for in-situ synchronous monitoring of temperature and morphology of a light-transmitting object based on a femtosecond laser, the femtosecond laser pulse satisfying the preset power and wavelength requirements is generated by the preset broadband femtosecond pulse laser, and the femtosecond laser pulse is subjected to time-domain stretching and power loss compensation operations to obtain a corresponding compensation amplified laser signal. The compensation amplified laser signal is divided into a reference pulse and a probe pulse, and the passing time of the reference pulse is adjusted to enable the reference pulse and the probe pulse to interfere with each other in the time domain, and the probe pulse is subjected to spatial dispersion to obtain a corresponding spatial pulse. The spatial pulse is focused on the sample of the light-transmitting object to be measured, and the transmitted pulse passing through the sample of the light-transmitting object to be measured is converged to obtain a corresponding transmitted pulse spot. The pulse signal formed by the coupling and interference of the reference pulse and the transmitted pulse is received by the preset high-speed photodetector and high-speed oscilloscope, and the pulse signal is converted into a corresponding analog signal. The analog signal is sampled to obtain a corresponding sampling pulse. Based on the sampling pulse, the pre-stored function relationship and the digital signal processing strategy, the spatial temperature and image information of the sample of the light-transmitting object to be measured are reconstructed. By using the MHz-level monitoring strategy for the transient temperature and morphology changes of the light-transmitting object, the in-situ synchronous monitoring of temperature and morphology can be realized, and the test sampling rate is greatly improved.

[0127] Figure 6 A structural schematic diagram of an electronic device is provided for the embodiment of the present application. The electronic device can include:

[0128] The memory 601, the processor 602, and the computer program stored in the memory 601 and executable on the processor 602.

[0129] The processor 602 executes the program to implement the method for in-situ synchronous monitoring of temperature and morphology of a light-transmitting object based on a femtosecond laser provided in the above-described embodiments.

[0130] Further, the electronic device further includes:

[0131] The communication interface 603 is configured to communicate between the memory 601 and the processor 602.

[0132] The memory 601 is configured to store a computer program capable of being executed on the processor 602.

[0133] The memory 601 can include a high-speed RAM memory, and can further include a non-volatile memory, for example, at least one disk memory.

[0134] If the memory 601, the processor 602 and the communication interface 603 are independently implemented, the communication interface 603, the memory 601 and the processor 602 can be connected with each other through a bus and complete communication between each other. The bus can be an Industry Standard Architecture (ISA) bus, a Peripheral Component (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. The bus can be divided into an address bus, a data bus, a control bus, etc. For the convenience of representation, Figure 6 In the figure, only one thick line is used to represent the bus, but it does not mean that there is only one bus or only one type of bus.

[0135] Optionally, in a specific implementation, if the memory 601, the processor 602 and the communication interface 603 are integrated on a chip, the memory 601, the processor 602 and the communication interface 603 can complete communication between each other through an internal interface.

[0136] The processor 602 can be a Central Processing Unit (CPU), or an Application Specific Integrated Circuit (ASIC), or one or more integrated circuits configured to implement the embodiments of the present application.

[0137] The embodiments of the present application also provide a computer readable storage medium, which stores a computer program, and the program is executed by a processor to implement the above-mentioned femtosecond laser-based temperature and topography synchronous in-situ monitoring method for a light-transmitting object.

[0138] In the description of the application, reference to "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" means that a particular feature, structure, material, or characteristic being described is included in at least one embodiment or example of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment or example. Furthermore, the described specific features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples. In addition, the usage of "N" means at least two, for example, two, three or the like, unless explicitly stated otherwise.

[0139] Furthermore, the terms "first", "second", or the like, are used merely as a designation of certain elements or features, and do not imply or connote relative importance or a specific order of categorization thereof. Accordingly, features described as "first" or "second" can implicitly or explicitly include at least one of the features. In the description of the application, the meaning of "N" is at least two, for example, two, three, etc., unless explicitly specified otherwise.

[0140] Any process or method descriptions or blocks in flow charts or otherwise described herein represent embodiments which can be managed as one or more modules, segments, or portions of code which include one or more executable instructions for implementing specific logic functions or steps, and alternate implementations are possible. In some embodiments, the processes and methods described can be executed by one or more apparatuses or devices, either directly or after conversion to another language. Alternate implementations are possible.

[0141] The logic and / or steps represented in the flowcharts and / or described herein, for example, can be considered as a sequence of instructions to implement logical functions, and can be embodied in any computer-readable medium for use by an instruction execution system, apparatus, or device, such as a computer-based system, processor- based system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For purposes of this specification, a "computer-readable medium" can be any apparatus that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. The computer-readable medium can be a computer- readable storage medium or a computer-readable signal medium. The computer- readable storage medium can be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any suitable combination of the foregoing. More specific examples (a non-exhaustive list) of the computer-readable storage medium include the following: an electrical connection having one or more wires (electrical connections), a portable computer diskette (a magnetic device), a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or Flash memory), an optical fiber, and a portable compact disc read-only memory (CDROM). In addition, the computer-readable medium can even be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, via, for example, optical scanning of the paper or other medium, then compiled, interpreted, or otherwise processed in a suitable manner, if necessary, and then stored in a computer memory.

[0142] It should be understood that aspects of the application can be implemented in hardware, software, firmware or combinations thereof. In the above embodiments, the N steps or methods can be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. If implemented in hardware and in another embodiment, any of the following technologies, known in the art, or their combinations can be used: discrete logic circuitry having logic gates for implementing logic functions on data signals, application specific integrated circuits having appropriate combinational logic gates, programmable gate arrays (PGA), field programmable gate arrays (FPGA), etc.

[0143] Those skilled in the art can understand that all or part of the steps carried out by the above-mentioned embodiment methods can be completed by programs instructing related hardware, and the programs can be stored in a computer-readable storage medium. When the programs are executed, one or a combination of the steps of the method embodiments is included.

[0144] In addition, each of the functional units in the various embodiments of the present application can be integrated in one processing module, or each of the units can be physically present separately, or two or more units can be integrated in one module. The integrated module can be implemented in the form of hardware or in the form of a software functional module. When the integrated module is implemented in the form of a software functional module and sold or used as an independent product, it can also be stored in a computer readable storage medium.

[0145] The storage medium mentioned above can be a read-only memory, a magnetic disk or an optical disk, etc. Although the embodiments of the present application have been shown and described above, it should be understood that the above embodiments are exemplary and should not be construed as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. A system for simultaneous in-situ monitoring of temperature and morphology of a transparent object based on femtosecond laser, characterized in that, The application relates to a system for measuring the temperature and topography of a transparent object based on femtosecond laser. The system comprises: a broadband femtosecond pulse laser for generating femtosecond laser pulses meeting preset power and wavelength requirements; a time-domain stretching assembly for time-domain stretching the femtosecond laser pulses; an optical signal amplification assembly for power compensation of the time-domain stretched femtosecond laser pulses to obtain corresponding compensation amplified laser signals; a non-polarization beam splitter for splitting the compensation amplified laser signals into reference pulses and probe pulses; a time delay assembly for adjusting the passing time of the reference pulses so that the reference pulses and the probe pulses interfere in the time domain; a first spatial dispersion assembly for spatially dispersing the probe pulses to obtain corresponding spatial pulses; a first microscopic objective for focusing the spatial pulses on a transparent object sample to be measured; a second microscopic objective for converging transmission pulses transmitted through the transparent object sample to be measured; a second spatial dispersion assembly for converging the converging transmission pulses to obtain corresponding transmission pulse spots; a high-speed photodetector for collecting pulse signals formed by coupling and interference of the reference pulses and the transmission pulses and converting the pulse signals into corresponding analog signals; a high-speed oscilloscope for collecting the sampled analog signals to obtain corresponding sampling pulses; 2. The system of claim 1, wherein, a computer for reconstructing spatial temperature and image information of the transparent object sample to be measured based on the sampling pulses, a pre-stored function relationship and a digital signal processing strategy. The system further comprises:

3. The system of claim 1, wherein, an optical power meter for being placed between the first microscopic objective and the transparent object sample to be measured before temperature measurement and topography synchronous in-situ monitoring of the transparent object sample to be measured, so that the broadband femtosecond pulse laser generates femtosecond laser pulses meeting preset power requirements, and the optical power meter is removed after the temperature measurement and topography synchronous in-situ monitoring. The first spatial dispersion assembly comprises: a first acousto-optic deflector for adjusting the propagation direction of the probe pulses; 4. The system of claim 1, wherein, a first diffraction grating for dispersing the probe pulses into the spatial pulses. The second spatial dispersion assembly comprises: a second acousto-optic deflector for converting the scanned transmission pulses into point pulses; 5. The system of claim 1, wherein, a second diffraction grating for reducing the scanned spatial pulses to obtain the scanned transmission point pulses. The system further comprises: a first collimator for being placed between the optical signal amplification assembly and the first spatial dispersion assembly to make the compensation amplified laser signals incident on the non-polarization beam splitter in the form of spatial light based on a target angle; a second collimator for being placed between the second spatial dispersion assembly and the high-speed photodetector to couple the transmission pulses into a preset optical path so that the high-speed photodetector detects the transmission pulses; a third collimator for being placed between the time delay assembly and the high-speed photodetector to couple the reference pulses into a preset optical path so that the high-speed photodetector detects the reference pulses. A coupler is arranged between the second spatial dispersion component and the high-speed photodetector to couple the transmission pulse and the reference pulse and to interfere the probe pulse and the reference pulse.

6. The system of claim 1, wherein, Further comprising: A first lens combination is arranged between the first spatial dispersion component and the first microscope objective to adjust the size of the pulse spot and the incident angle of the spatial pulse incident to the first microscope objective; A second lens combination is arranged between the second microscope objective and the second spatial dispersion component to converge the transmission pulse into the second spatial dispersion component.

7. A method for simultaneous in-situ monitoring of temperature and morphology of a light-transmitting object based on femtosecond laser, characterized in that, The method comprises the following steps: A femtosecond laser pulse satisfying preset power and wavelength requirements is generated by a preset broadband femtosecond pulse laser, and time-domain stretching and power loss compensation operations are performed on the femtosecond laser pulse to obtain a corresponding compensation amplified laser signal; The compensation amplified laser signal is divided into a reference pulse and a probe pulse, and the passing time of the reference pulse is adjusted to make the probe pulse and the reference pulse interfere in the time domain, and the probe pulse is spatially dispersed to obtain a corresponding spatial pulse, and the spatial pulse is focused on a to-be-measured light-transmitting object sample, and a transmission pulse that transmits through the to-be-measured light-transmitting object sample is converged to obtain a corresponding transmission pulse spot; A pulse signal formed after the reference pulse and the transmission pulse are coupled and interfered is received by a preset high-speed photodetector and a high-speed oscilloscope, the pulse signal is converted into a corresponding analog signal, the analog signal is sampled to obtain a corresponding sampling pulse, and the spatial temperature and image information of the to-be-measured light-transmitting object sample are reconstructed based on the sampling pulse, a pre-stored function relationship, and a digital signal processing strategy.

8. The method of claim 7, wherein, The reconstruction of the spatial temperature and image information of the to-be-measured light-transmitting object sample based on the sampling pulse, the pre-stored function relationship, and the digital signal processing strategy comprises: A low-frequency filtering operation is performed on the sampling pulse to obtain a corresponding filtered signal, a Hilbert transform is performed on a high-frequency component in the filtered signal to generate a transformed component corresponding to the high-frequency component, and real part information and imaginary part information of the high-frequency component are obtained; A function relationship between the transmittance and the temperature of the to-be-measured light-transmitting object sample is determined based on the preset power and wavelength requirements, and the spatial temperature and image information of the to-be-measured light-transmitting object sample are reconstructed according to the real part information, the imaginary part information, the sampling pulse, and the function relationship.

9. An electronic device, comprising: It comprises: A memory, a processor, and a computer program stored on the memory and executable on the processor, wherein the processor executes the program to implement the method for simultaneous in-situ monitoring of temperature and morphology of a light-transmitting object based on femtosecond laser according to any one of claims 7-8.

10. A computer-readable storage medium having stored thereon a computer program, characterized in that, The program is executed by the processor to implement the method for simultaneous in-situ monitoring of temperature and morphology of a light-transmitting object based on femtosecond laser according to any one of claims 7-8.

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