A surface defect inspection apparatus and a method for inspecting a semiconductor heating plate

Abstract

The present application relates to surface deformation detection equipment technical field, specifically is related to a kind of surface flaw detection equipment and the detection method for semiconductor heating disc, including base and detection unit;Support unit is arranged on base and moves along vertical direction, the upper end of support unit is used to support heating disc, detection unit includes the shell of being set above base, the upper portion of shell is vertically provided with camera, camera vertically penetrates shell, shell is hemispherical shell structure, the lower portion of shell is provided with the opening for heating disc to enter its inside, around the axis of rotation of shell in shell is provided with light unit, light unit includes the arc-shaped guide rail of rotation around the axis of shell, driving seat is movably arranged on arc-shaped guide rail along the extension direction of arc-shaped guide rail, one end of driving seat towards shell inside is provided with projection lamp, the projection direction of projection lamp always points to the center of shell circle.The present application improves the accuracy of detection result.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor heating disc surface detection, in particular to a surface defect detection equipment and a detection method for a semiconductor heating disc. BACKGROUND

[0002] The heating disc is a component directly contacting the wafer in the thin film deposition process, which is heated to a high temperature by itself to provide a suitable process environment temperature for the thin film deposition and acts as a lower plate in the radio frequency loop; whether the upper surface of the heating disc is flat or not is crucial to the quality of the thin film deposition. Even if the shape tolerance of the upper surface of the heating disc is constrained by the flatness and surface roughness during the manufacturing process, in the actual working condition, the heating disc is in a high-temperature and vacuum environment, the temperature of the surface of the heating disc is not completely uniform, and the vacuum and high temperature also amplify the original manufacturing error to different degrees. After the comprehensive effects of various factors, the surface of the heating disc is easily deformed or has defects.

[0003] Chinese patent application CN119063646A discloses a heating disc surface deformation online detection device, which comprises a sealing cover assembly, a transparent window for signal detection is arranged on the top of the sealing cover assembly, a support assembly, the bottom of the support assembly is connected to the edge of the sealing cover assembly, a rotary table assembly, the rotary table assembly is connected to the top of the support assembly, and a sensor assembly, the sensor assembly is connected to the rotary table assembly, and is used for controlled rotation of the rotary table assembly to scan and detect the heating disc located in the sealing cover assembly; the sealing cover assembly comprises a sealing cover plate with a through cavity in the middle, a quartz window arranged on the top opening of the through cavity, and a sealing ring arranged between the quartz window and the abutting part of the sealing cover plate; at least two handles are arranged on the top of the sealing cover plate near the edge; the support assembly comprises at least two supports and a support base connected to the bottom of each support, the supports are arranged around the periphery of the sealing cover plate, and the middle part of the support protrudes outward, and the support base is fixedly connected to the sealing cover plate.

[0004] The above-mentioned scheme detects the heating disc in a scanning manner, but the scanning structure is very simple and has only one angle, so the scanning structure may not be able to completely scan the heating disc when scanning, because the existing scanning mechanism mainly adopts a visual detection method, but is affected by external light, different light irradiation angles form different irradiation effects on the surface of the heating disc, that is, under the irradiation of a single angle light, the deformation of the surface of the heating disc cannot be identified, and the open detection device also causes dust from the outside to fall on the heating disc, which also affects the subsequent detection. SUMMARY

[0005] To solve the above problems, a surface flaw detection device and a detection method for a semiconductor heating disc are provided. A hemispherical shell is arranged on the upper part of the base, and a support unit moving in the vertical direction is arranged on the base. During detection, the heating disc is first pushed into the gap between the shell and the base, and then the heating disc moves to the upper part of the support unit. After that, the support unit drives the heating disc to rise in the vertical direction. After the support unit rises to the sealing position, the support unit covers the opening at the bottom of the shell. The support unit and the shell form a detection cavity without external light. Then, the projection lamp is turned on, and the arc-shaped guide rail rotates around the axis of the shell. For every rotation of the arc-shaped guide rail, the drive seat arranged on the arc-shaped guide rail moves a rated distance from bottom to top along the extension direction of the arc-shaped guide rail. The camera arranged on the upper part of the shell continuously monitors the upper end surface of the heating disc. After the arc-shaped guide rail rotates several times, the drive seat moves to the upper end of the arc-shaped guide rail and stops moving. At this time, the detection of the heating disc is completed. Thus, the detection of the upper end surface of the heating disc without dead angle under the influence of external light is realized.

[0006] To solve the above problems, a surface flaw detection device and a detection method for a semiconductor heating disc are provided. A hemispherical shell is arranged on the upper part of the base, and a support unit moving in the vertical direction is arranged on the base. During detection, the heating disc is first pushed into the gap between the shell and the base, and then the heating disc moves to the upper part of the support unit. After that, the support unit drives the heating disc to rise in the vertical direction. After the support unit rises to the sealing position, the support unit covers the opening at the bottom of the shell. The support unit and the shell form a detection cavity without external light. Then, the projection lamp is turned on, and the arc-shaped guide rail rotates around the axis of the shell. For every rotation of the arc-shaped guide rail, the drive seat arranged on the arc-shaped guide rail moves a rated distance from bottom to top along the extension direction of the arc-shaped guide rail. The camera arranged on the upper part of the shell continuously monitors the upper end surface of the heating disc. After the arc-shaped guide rail rotates several times, the drive seat moves to the upper end of the arc-shaped guide rail and stops moving. At this time, the detection of the heating disc is completed. Thus, the detection of the upper end surface of the heating disc without dead angle under the influence of external light is realized.

[0007] Preferably, a button is fixedly arranged on the inner wall of the shell, and a driving unit for driving the rotation of the arc-shaped guide rail is arranged on the lower part of the arc-shaped guide rail. The button is activated by the rotating arc-shaped guide rail. After the button is activated, the drive seat moves a rated distance from bottom to top along the extension direction of the arc-shaped guide rail.

[0008] Preferably, the driving unit includes a first gear ring fixedly connected with the arc-shaped guide rail. The axis of the first gear ring is collinear with the axis of the shell. The first gear ring rotates around its own axis. A first gear wheel is engaged on one side of the first gear ring. A first rotary driver is arranged on the end of the first gear wheel to drive the rotation of the first gear wheel.

[0009] Preferably, the supporting unit comprises a shielding shell moving along the vertical direction, the shielding shell is a cylindrical structure, a lifting sleeve is vertically arranged in the shielding shell, the axis of the lifting sleeve is collinear with the axis of the shielding shell, and a suction cup is arranged on the upper portion of the shielding shell.

[0010] Preferably, a lifting unit for driving the shielding shell to move is arranged on one side of the shielding shell, the lifting unit comprises a threaded rod arranged in the base along the vertical direction, the threaded rod penetrates through the shielding shell and is threadedly connected with the shielding shell, and a second rotary driver for driving the threaded rod to rotate is arranged on the upper end of the threaded rod.

[0011] Preferably, a positioning unit is arranged in the base, the positioning unit comprises a positioning shell, the upper portion of the positioning shell is larger than the lower portion of the positioning shell, an air inflation film is sleeved on the inner wall of the positioning shell, an air inflation cavity is formed between the air inflation film and the inner wall of the positioning shell, the air inflation cavity is an annular structure, a first air pump communicating with the air inflation cavity is arranged on the positioning shell, and the first air pump performs suction on the air inflation cavity at a rated frequency.

[0012] Preferably, a plurality of first air fans are arranged on the upper portion of the cover shell, a plurality of second air fans are arranged on the side wall of the shielding shell, the first air fans and the second air fans operate simultaneously after the detection cavity is formed, the first air fans blow the filtered air into the detection cavity, and the second air fans exhaust the air in the detection cavity.

[0013] Preferably, a through groove for the shielding shell to pass through is formed in the base, the through groove is an annular structure, rubber is arranged on the through groove, a first exhaust port is formed in the lower side wall of the base, an annular gap is formed between the inner wall of the base and the outer wall of the shielding shell, an isolation sleeve is arranged in the annular gap, the annular gap is divided into a first cavity and a second cavity along the vertical direction by the isolation sleeve, the isolation sleeve is fixedly arranged on the shielding shell, and a second exhaust port is formed in the lifting sleeve.

[0014] Preferably, a second air pump communicating with the lifting sleeve is arranged on the bottom of the lifting sleeve, a shielding unit capable of shielding the second exhaust port is arranged on the second exhaust port, the shielding unit comprises a shielding plate rotating around the lifting sleeve, and when the second air pump is started, the shielding plate covers the second exhaust port.

[0015] The application also relates to a detection method for a semiconductor heating disc.

[0016] S1, the heating disc is pushed into the gap between the cover shell and the base, at this time, the supporting unit is located at the supporting position, after the heating disc moves to the upper portion of the supporting unit, the supporting unit drives the heating disc to ascend along the vertical direction, after the supporting unit ascends to the sealing position, the supporting unit shields the opening at the bottom of the cover shell, and the supporting unit and the cover shell form a detection cavity without the influence of external light.

[0017] S2. The projection light is turned on, and the arc-shaped guide rail rotates around the axis of the cover. For each rotation of the arc-shaped guide rail, the drive seat set on the arc-shaped guide rail moves a rated distance from bottom to top along the extension direction of the arc-shaped guide rail. The camera set on the upper part of the cover continuously monitors the upper surface of the heating plate. After the arc-shaped guide rail rotates multiple times, the drive seat moves to the upper end of the arc-shaped guide rail and stops moving. At this time, the detection of the heating plate is completed.

[0018] S3. The support unit lowers the heating plate, the projection light is turned off, and the heating plate can be removed after the support unit has descended to the support position.

[0019] The advantages of this invention compared to the prior art are:

[0020] 1. This invention features a hemispherical cover on the upper part of a base, and a vertically movable support unit on the base. During testing, the heating plate is first pushed in through the gap between the cover and the base. After the heating plate moves to the upper part of the support unit, the support unit drives the heating plate to rise vertically. Once the support unit reaches the sealed position, it blocks the opening at the bottom of the cover, forming a testing cavity free from external light. Then, a projection lamp is turned on, and an arc-shaped guide rail rotates around the axis of the cover. For each rotation of the arc-shaped guide rail, a drive seat on the rail moves a predetermined distance from bottom to top along the rail's extension direction. A camera on the upper part of the cover continuously monitors the upper surface of the heating plate. After the arc-shaped guide rail rotates multiple times, the drive seat moves to the upper end of the rail and stops, completing the testing of the heating plate. This achieves comprehensive testing of the upper surface of the heating plate without blind spots, improving the accuracy of the test results.

[0021] 2. By setting a positioning unit in the support unit, the heating plate is positioned so that its axis is collinear with the axis of the housing before entering the housing. This ensures that the heating plate is exposed to similar light from all angles when the projection lamp shines on its upper surface, reducing detection errors. Simultaneously, a first air pump repeatedly draws air from the inflation chamber, causing the inflation membrane on the positioning shell to vibrate, allowing the heating plate to be quickly positioned under the support of the lifting sleeve.

[0022] 3. By setting up rubber and isolation sleeves, and installing a rotating cleaning brush inside the lifting sleeve, the dust adhering to the inner wall of the lifting sleeve can be cleaned smoothly, thus ensuring the normal use of the suction cup. Attached Figure Description

[0023] Figure 1 This is a three-dimensional schematic diagram of a surface defect detection device of the present invention with an outer shell.

[0024] Figure 2 is a side view of a surface flaw detection device of the present application when an outer shell is externally fitted.

[0025] Figure 3 is a perspective view of a surface flaw detection device of the present application. Figure 2 is a cross-sectional view of the surface flaw detection device of the present application at A-A.

[0026] Figure 4 is a cross-sectional perspective view of a surface flaw detection device of the present application when an outer shell is externally fitted.

[0027] Figure 5 is a perspective view of a surface flaw detection device of the present application. Figure 4 is a partial enlarged view of the surface flaw detection device of the present application at B.

[0028] Figure 6 is a partial enlarged view of the surface flaw detection device of the present application at C. Figure 4

[0029] Figure 7 is a partial enlarged view of the surface flaw detection device of the present application at D. Figure 4

[0030] Figure 8 is a partial enlarged view of the surface flaw detection device of the present application at E. Figure 4

[0031] Figure 9 is a perspective view of a surface flaw detection device of the present application when a cover is removed.

[0032] Figure 10 is a partial enlarged view of the surface flaw detection device of the present application at F. Figure 9

[0033] Reference numerals in the drawings are:

[0034] ​​​​1, base; 11, cleaning brush; 12, fourth rotary driver; 2, support unit; 21, shielding shell; 22, lifting sleeve; 221, second exhaust port; 222, second air pump; 223, shielding unit; 2231, shielding plate; 2232, second gear ring; 2233, second gear; 2234, third rotary driver; 23, suction cup; 24, lifting unit; 241, second rotary driver; 242, threaded rod; 25, positioning unit; 251, positioning shell; 252, inflatable film; 253, first air pump; 254, fixed rod; 26, first air blower; 27, second air blower; 28, rubber; 29, insulation sleeve; 3, detection unit; 31, camera; 32, cover shell; 33, lighting unit; 331, arc-shaped guide rail; 332, driving seat; 333, projection lamp; 334, button; 335, driving unit; 3351, first gear ring; 3352, first gear; 3353, first rotary driver; 4, heating disc. DETAILED DESCRIPTION

[0035] In order to further understand the features, technical means and specific purposes and functions achieved by the present application, the present application will be described in further detail below in conjunction with the drawings and specific embodiments.

[0036] REFERENCE Figures 1-4 AND Figure 10 A surface flaw detection device, comprising a base 1 and a detection unit 3 arranged above the base 1; a support unit 2 arranged on the base 1 and moving in the vertical direction, the upper end of the support unit 2 being used to support a heating disc 4, the detection unit 3 comprising a cover shell 32 arranged above the base 1, the upper part of the cover shell 32 being vertically provided with a camera 31, the camera 31 vertically penetrating the cover shell 32, the cover shell 32 being a hemispherical shell structure, the lower part of the cover shell 32 being provided with an opening for the heating disc 4 to enter the inside thereof, a lighting unit 33 being rotationally arranged around the axis of the cover shell 32 in the cover shell 32, the lighting unit 33 comprising an arc-shaped guide rail 331 rotating around the axis of the cover shell 32, a driving seat 332 being movably arranged on the arc-shaped guide rail 331 in the extension direction of the arc-shaped guide rail 331, the driving seat 332 being provided with a projection lamp 333 at one end thereof facing the inside of the cover shell 32, the projection direction of the projection lamp 333 always pointing to the center of the cover shell 32, during detection, the support unit 2 seals the opening at the bottom of the cover shell 32, the support unit 2 and the cover shell 32 forming a detection cavity, and there is a gap between the bottom of the cover shell 32 and the upper end of the base 1 for the heating disc 4 to enter the upper end of the support unit 2.

[0037] The deformation detection of the semiconductor heating disc 4 mainly relies on visual detection method, but the result of visual detection is easily affected by the irradiation angle of external ambient light, and the observable situation of the upper end surface of the heating disc 4 is different at different irradiation angles. The existing deformation detection device is an open detection device, that is, the external ambient light will affect the detection of the detection unit 3, even if the detection angle of the detection unit 3 can be changed, the influence of the external ambient light cannot be avoided, and if the deformation detection device is arranged in a sealed structure, it is more laborious to place the heating disc 4 each time, resulting in low detection efficiency.

[0038] In order to avoid the above situation, the deformation detection device is further optimized, so that the deformation detection device is in a sealed state during detection, and it is easier to place the heating disc 4. The structure and working principle of the deformation detection device are as follows:

[0039] The support unit 2 has a support position and a sealing position from bottom to top along the vertical direction. Before detection, the support unit 2 is at the support position, and the upper end surface of the support unit 2 is coplanar with the upper end surface of the base 1. First, the staff pushes the heating disc 4 to be detected into the gap between the cover 32 and the base 1, so that the heating disc 4 moves to the upper end of the support unit 2, and then the support unit 2 drives the heating disc 4 to rise synchronously along the vertical direction. When the support unit 2 rises to the sealing position, the support unit 2 blocks the bottom opening of the cover 32, and at this time the support unit 2 and the cover 32 form a detection cavity. When the projection lamp 333 is not turned on, the detection cavity is in a completely dark state. Then the projection lamp 333 is turned on, and the arc-shaped guide rail 331 drives the projection lamp 333 to rotate around the axis of the cover 32 through the driving seat 332. And the driving seat 332 moves a rated distance from bottom to top on the arc-shaped guide rail 331 every time the arc-shaped guide rail 331 rotates one circle. The rated distance refers to the outer peripheral arc length of the arc-shaped guide rail 331, not the vertical distance, so that the driving seat 332 can drive the projection lamp 333 to move every time, and the projection angle of the projection lamp 333 changes constantly. After the arc-shaped guide rail 331 rotates several circles, the driving seat 332 moves from the lower side of the arc-shaped guide rail 331 to the upper side, and at this time the projection angle of the projection lamp 333 is the largest. In the process of rotating the arc-shaped guide rail 331 around the axis of the cover 32, the camera 31 can detect the heating disc 4 on the support unit 2 in real time. The camera 31 can realize detection by continuous detection or interval sampling. When the interval sampling is used for detection, the detection frequency of the camera 31 needs to be preset, that is, the number of photos collected by the camera 31 when the arc-shaped guide rail 331 rotates one circle. In this way, the heating disc 4 can be detected without the influence of external light, and the accuracy of the detection result is improved.

[0040] Reference Figure 3 andFigure 6 A button 334 is fixedly arranged on the inner wall of the cover 32, and a driving unit 335 for driving the arc-shaped guide rail 331 to rotate is arranged at the lower part of the arc-shaped guide rail 331. The button 334 is activated by the arc-shaped guide rail 331 in rotation, and after the button 334 is activated, the driving seat 332 moves a rated distance along the extension direction of the arc-shaped guide rail 331 from bottom to top.

[0041] When the driving seat 332 is located at the lower end of the arc-shaped guide rail 331, the projection angle of the projection lamp 333 arranged on the driving seat 332 is the smallest, and when the driving seat 332 is located at the upper end of the arc-shaped guide rail 331, the projection angle of the projection lamp 333 is the largest. When detection is performed, the driving seat 332 first moves from the support position of the arc-shaped guide rail 331. First, when the driving seat 332 is located at the support position of the arc-shaped guide rail 331, the driving unit 335 drives the arc-shaped guide rail 331 to rotate around the axis of the cover 32, and at this time, the camera 31 captures the upper end surface of the heating disc 4. After the arc-shaped guide rail 331 rotates one circle, the button 334 is activated, and the driving seat 332 moves a rated distance on the arc-shaped guide rail 331, so that the projection angle of the projection lamp 333 changes. It is worth noting that the rated distance of the driving seat 332 moving on the arc-shaped guide rail 331 corresponds to the angle of the projection lamp 333 changing each time. Since the moving distance is rated, the projection angle of the projection lamp 333 changing each time is also completely the same, so that the camera 31 can detect the upper end surface of the heating disc 4 under different illumination conditions.

[0042] Referring to Figure 6 The driving unit 335 comprises a first gear ring 3351 fixedly connected with the arc-shaped guide rail 331, the axis of the first gear ring 3351 is collinear with the axis of the cover 32, the first gear ring 3351 rotates around its own axis, and a first gear 3352 is engaged on one side of the first gear ring 3351. The end of the first gear 3352 is provided with a first rotary driver 3353 for driving the first gear 3352 to rotate.

[0043] The first rotary driver 3353 is preferably a servo motor.

[0044] Referring to Figure 4 and Figure 5 The support unit 2 comprises a shielding shell 21 moving in the vertical direction, the shielding shell 21 is of a cylindrical structure, a lifting sleeve 22 is vertically arranged in the shielding shell 21, the axis of the lifting sleeve 22 is collinear with the axis of the shielding shell 21, and a suction disc 23 is arranged at the upper part of the shielding shell 21.

[0045] The support unit 2 moves up and down in the vertical direction, mainly referring to the synchronous lifting process of the shielding shell 21, the lifting sleeve 22 and the suction disc 23.

[0046] Referring to Figure 4 andFigure 6 : A lifting unit 24 for driving the shielding shell 21 to move is arranged on one side of the shielding shell 21, the lifting unit 24 comprises a threaded rod 242 arranged in the base 1 in the vertical direction, the threaded rod 242 penetrates the shielding shell 21 and is threadedly matched with the shielding shell 21, and a second rotary driver 241 for driving the threaded rod 242 to rotate is arranged at the upper end of the threaded rod 242.

[0047] The second rotary driver 241 is preferably a servo motor, and the support unit 2 further comprises a lowest position which is lower than the height of the support unit 2 in the process of moving the support unit 2 in the vertical direction, after the heating disc 4 is pushed to the upper part of the support unit 2, the suction disc 23 supports the upper part of the heating disc 4, then the suction disc 23 descends, when the support unit 2 descends to the lowest position, the suction disc 23 stops descending, a positioning unit 25 for correcting the position of the heating disc 4 is arranged in the base 1, after the support unit 2 descends to the lowest position, the suction disc 23 is separated from the bottom of the heating disc 4, the positioning unit 25 supports and corrects the heating disc 4, and the axis of the corrected heating disc 4 is collinear with the axis of the cover shell 32.

[0048] Referring to Figure 8 and Figure 9 : A positioning unit 25 is arranged in the base 1, the positioning unit 25 comprises a positioning shell 251, the upper opening of the positioning shell 251 is larger than the lower opening of the positioning shell 251, a gas-filled film 252 is sleeved on the inner wall of the positioning shell 251, a gas-filled cavity is formed between the gas-filled film 252 and the inner wall of the positioning shell 251, the gas-filled cavity has an annular structure, a first air pump 253 which communicates with the gas-filled cavity is arranged on the positioning shell 251, and the first air pump 253 sucks the gas-filled cavity at a rated frequency.

[0049] The fixed rod 254 is vertically fixed at the bottom of the positioning shell 251, penetrates the shielding shell 21, and is fixedly connected with the bottom of the base 1. The first air pump 253 sucks the inflation cavity at the rated frequency, that is, the inflation cavity switches between expansion and contraction after the first air pump 253 operates, so that the inflation film 252 vibrates. During the lifting of the lifting sleeve 22, the lifting sleeve 22 has a lowest position, the upper end surface of the suction cup 23 is lower than the upper end surface of the base 1 when the lifting sleeve 22 is at the lowest position, and the heating disc 4 is supported by the inflation film 252 at this time. The suction cup 23 is disconnected with the heating disc 4. Since the size of the heating disc 4 is constant, the lifting sleeve 22 rises again after descending to the lowest position. The lifting sleeve 22 blows air to the suction cup 23 when rising, so that the suction cup 23 is not directly adsorbed on the bottom of the heating disc 4, and the heating disc 4 can freely move on the upper part of the suction cup 23. Under the continuous vibration of the inflation film 252 and the support of the lifting sleeve 22 on the bottom of the heating disc 4, the heating disc 4 can be positioned. The axis of the heating disc 4 after positioning is collinear with the axis of the lifting sleeve 22.

[0050] With reference to Figure 3 and Figure 9 : A plurality of first air fans 26 are arranged on the upper part of the cover shell 32, and a plurality of second air fans 27 are arranged on the side wall of the shielding shell 21. After the detection cavity is formed, the first air fan 26 and the second air fan 27 operate at the same time. The first air fan 26 blows filtered air into the detection cavity, and the second air fan 27 exhausts air in the detection cavity.

[0051] When the shielding shell 21 shields the bottom of the cover shell 32, the suction cup 23 is staggered with the positioning shell 251 at this time, and the detection cavity is in communication with the shielding shell 21. After the first air fan 26 blows filtered air into the detection cavity, the second air fan 27 arranged on the shielding shell 21 can exhaust air in the detection cavity due to the communication between the shielding shell 21 and the detection cavity. In this way, dust attached to the heating disc 4 can be blown away.

[0052] With reference to Figure 4 , Figure 6 and Figure 9 : The base 1 is provided with a through groove for the shielding shell 21 to pass through, and the through groove has an annular structure. A rubber 28 is arranged on the through groove. A first air outlet is arranged on the lower side wall of the base 1. An annular gap is formed between the inner wall of the base 1 and the outer wall of the shielding shell 21. An isolation sleeve 29 is arranged in the annular gap. The isolation sleeve 29 divides the annular gap into a first cavity and a second cavity in the vertical direction. The isolation sleeve 29 is fixedly arranged on the shielding shell 21. A second air outlet 221 is arranged on the lifting sleeve 22.

[0053] The deformation detection device also has a self-cleaning function for the lifting sleeve 22. When the lifting sleeve 22 is self-cleaned, the second fan 27 is in operation, and the first fan 26 is stopped. At this time, the rubber 28 covers the through groove, and the shielding shell 21 is still located above the first air outlet when the shielding shell 21 is in the lowest position. At this time, the suction cup 23 blocks the lower opening of the positioning shell 251, so that the air outside can only be discharged into the shielding shell 21 through the lifting sleeve 22. However, since the through groove is blocked by the rubber 28, the air in the shielding shell 21 can only be discharged through the second fan 27 and finally through the first air outlet.

[0054] Referring to Figure 4 and Figure 5 A second air pump 222 is arranged at the bottom of the lifting sleeve 22 and communicates with the lifting sleeve 22. A shielding unit 223 capable of shielding the second air outlet 221 is arranged on the second air outlet 221. The shielding unit 223 includes a shielding plate 2231 rotating around the lifting sleeve 22. When the second air pump 222 is started, the shielding plate 2231 covers the second air outlet 221.

[0055] The second air pump 222 arranged at the bottom of the lifting sleeve 22 can ensure that the suction cup 23 can be adsorbed more stably. After the heating disc 4 is positioned, the second air pump 222 can exhaust the air in the lifting sleeve 22, so that the suction cup 23 can tightly adsorb the heating disc 4. When the deformation detection device needs to self-clean the lifting sleeve 22, the shielding plate 2231 needs to be removed from the second air outlet 221 to ensure that the second air outlet 221 is not shielded. In order to enable the shielding plate 2231 to be freely opened and closed at the second air outlet 221, a second gear ring 2232 is fixedly arranged at the upper portion of the shielding plate 2231. The axis of the second gear ring 2232 is collinear with the axis of the lifting sleeve 22. One side of the second gear ring 2232 is engaged with a second gear 2233. The end portion of the second gear 2233 is provided with a third rotary driver 2234 for driving the second gear 2233 to rotate.

[0056] In order to ensure that the inner wall of the lifting sleeve 22 can be cleaned enough, a cleaning brush 11 is arranged in the lifting sleeve 22. The cleaning brush 11 penetrates the bottom of the lifting sleeve 22. The cleaning brush 11 can clean the dust attached to the inner wall of the lifting sleeve 22 during the lifting of the lifting sleeve 22. A fourth rotary driver 12 is arranged at the bottom end of the cleaning brush 11 for driving the cleaning brush 11 to rotate. The fourth rotary driver 12 is preferably a servo motor, so that the self-cleaning of the inner wall of the lifting sleeve 22 is realized, and the adsorption effect of the suction cup 23 is ensured.

[0057] Referring to Figures 1-10 The present application also relates to a detection method for a semiconductor heating disc, which adopts a surface flaw detection device, and the specific steps are as follows:

[0058] S1, push the heating disc 4 from the gap between the cover 32 and the base 1, at this time the support unit 2 is in the support position, after the heating disc 4 moves to the upper part of the support unit 2, the support unit 2 drives the heating disc 4 to rise in the vertical direction, after the support unit 2 rises to the sealing position, the support unit 2 shields the opening at the bottom of the cover 32, and the support unit 2 and the cover 32 form a detection cavity without external light influence;

[0059] S2, the projection lamp 333 is turned on, the arc-shaped guide rail 331 rotates around the axis of the cover 32, and every time the arc-shaped guide rail 331 rotates one circle, the drive seat 332 arranged on the arc-shaped guide rail 331 moves a rated distance from bottom to top along the extension direction of the arc-shaped guide rail 331, the camera 31 arranged on the upper part of the cover 32 continuously monitors the upper end surface of the heating disc 4, and after the arc-shaped guide rail 331 rotates multiple circles, the drive seat 332 moves to the upper end part of the arc-shaped guide rail 331 and stops moving, at this time the detection of the heating disc 4 is completed.

[0060] S3, the support unit 2 drives the heating disc 4 to descend, the projection lamp 333 is turned off, and the support unit 2 can be taken out after descending to the support position.

[0061] Working principle: before detection, the support unit 2 is in the support position, at this time the upper end surface of the support unit 2 is coplanar with the upper end surface of the base 1. First, the worker pushes the heating disc 4 to be detected from the gap between the cover 32 and the base 1, so that the heating disc 4 moves to the upper end of the support unit 2, then the lifting sleeve 22 drives the heating disc 4 to descend through the suction cup 23, the lifting sleeve 22 descends to the lowest position, that is, the lowest position of the support unit 2, at this time the suction cup 23 is no longer in contact with the bottom of the heating disc 4, the heating disc 4 is received by the positioning unit 25, the first air pump 253 sucks the inflation cavity at a rated frequency, so that the inflation film 252 vibrates, and at the same time the lifting sleeve 22 rises again, the lifting sleeve 22 receives the bottom of the heating disc 4 again, and the lifting sleeve 22 blows air to the suction cup 23, so that the suction cup 23 is not adsorbed on the bottom of the heating disc 4, so that the positioning of the heating disc 4 is completed under the double action of the lifting sleeve 22 and the inflation film 252. After positioning, the lifting sleeve 22 stops blowing air to the suction cup 23, the suction cup 23 adsorbs the bottom of the heating disc 4, and the shielding shell 21 drives the suction cup 23 to rise through the lifting sleeve 22.

[0062] When the support unit 2 rises to the sealing position, the support unit 2 blocks the bottom opening of the cover 32, at this time, the support unit 2 and the cover 32 form a detection cavity. Then the projection lamp 333 is turned on, the arc-shaped guide rail 331 drives the projection lamp 333 to rotate around the axis of the cover 32 through the driving seat 332, and the driving seat 332 moves a rated distance on the arc-shaped guide rail 331 from bottom to top every time the arc-shaped guide rail 331 rotates a circle, so as to ensure that the projection angle of the projection lamp 333 changes constantly every time the driving seat 332 drives the projection lamp 333 to move. After the arc-shaped guide rail 331 rotates several circles, the driving seat 332 moves from the lower end to the upper end of the arc-shaped guide rail 331, at this time, the projection angle of the projection lamp 333 is the largest. In the process of rotating the arc-shaped guide rail 331 around the axis of the cover 32, the camera 31 can detect the heating disc 4 on the support unit 2 in real time. The camera 31 can realize detection through continuous detection or interval sampling, and when the interval sampling is used, the detection frequency of the camera 31 needs to be preset, that is, the number of photos collected by the camera 31 when the arc-shaped guide rail 331 rotates a circle. In this way, the heating disc 4 can be detected without dead angle on the upper end surface under the influence of external light.

[0063] The above embodiments only express one or several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as the limitation of the protection scope of the present application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, several modifications and improvements can be made, which belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A surface defect detection device, comprising a base (1) and a detection unit (3) disposed above the base (1); Its features are, A support unit (2) that moves vertically is provided on the base (1). The upper end of the support unit (2) is used to support the heating plate (4). The detection unit (3) includes a cover (32) provided above the base (1). A camera (31) is vertically provided on the upper part of the cover (32). The camera (31) vertically penetrates the cover (32). The cover (32) is a hemispherical shell structure. An opening is provided at the lower part of the cover (32) for the heating plate (4) to enter its interior. A lighting unit (33) is rotatably arranged inside the housing (32) around the axis of the housing (32). The lighting unit (33) includes an arc-shaped guide rail (331) that rotates around the axis of the housing (32). A drive seat (332) is movably arranged on the arc-shaped guide rail (331) along the extension direction of the arc-shaped guide rail (331). The drive seat (332) and the arc-shaped guide rail (331) together form an arc-shaped slide. The drive seat (332) is positioned at one end facing the inside of the housing (32). A projection lamp (333) is provided, and the projection direction of the projection lamp (333) always points to the center of the cover (32). During the test, the support unit (2) seals the opening at the bottom of the cover (32). The support unit (2) and the cover (32) form a test cavity. There is a gap between the bottom of the cover (32) and the upper end of the base (1) for the heating plate (4) to enter the upper end of the support unit (2). A positioning unit (25) is provided in the base (1). The positioning unit (25) includes The positioning shell (251) has an upper opening that is larger than the lower opening. An inflatable membrane (252) is wrapped around the inner wall of the positioning shell (251). An inflatable cavity is formed between the inflatable membrane (252) and the inner wall of the positioning shell (251). The inflatable cavity has an annular structure. A first air pump (253) communicating with the inflatable cavity is provided on the positioning shell (251). The first air pump (253) pumps the inflatable cavity at a rated frequency.

2. The surface defect detection device according to claim 1, characterized in that, A button (334) is fixedly installed on the inner wall of the housing (32). A drive unit (335) for driving the arc-shaped guide rail (331) to rotate is provided at the lower part of the arc-shaped guide rail (331). The button (334) is activated by pressing the arc-shaped guide rail (331) which is rotating around the axis of the housing (32). After the button (334) is activated, the drive seat (332) moves a rated distance from bottom to top along the extension direction of the arc-shaped guide rail (331).

3. The surface defect detection device according to claim 1, characterized in that, The drive unit (335) includes a first gear ring (3351) fixedly connected to the arc-shaped guide rail (331). The axis of the first gear ring (3351) is collinear with the axis of the cover (32). The first gear ring (3351) rotates around its own axis. A first gear (3352) is meshed on one side of the first gear ring (3351). A first rotary driver (3353) for driving the first gear (3352) to rotate is provided at the end of the first gear (3352).

4. The surface defect detection device according to claim 1, characterized in that, The support unit (2) includes a shielding shell (21) that moves vertically. The shielding shell (21) is a cylindrical structure. A lifting sleeve (22) is vertically arranged inside the shielding shell (21). The axis of the lifting sleeve (22) is collinear with the axis of the shielding shell (21). A suction cup (23) is arranged on the upper part of the shielding shell (21).

5. A surface defect detection device according to claim 4, characterized in that, A lifting unit (24) for driving the movement of the shielding shell (21) is provided on one side of the shielding shell (21). The lifting unit (24) includes a threaded rod (242) arranged vertically in the base (1). The threaded rod (242) passes through the shielding shell (21) and is threadedly engaged with the shielding shell (21). A second rotary driver (241) for driving the threaded rod (242) to rotate is provided at the upper end of the threaded rod (242).

6. The surface defect detection device according to claim 4, characterized in that, Multiple first fans (26) are provided on the upper part of the cover (32), and multiple second fans (27) are provided on the side wall of the shielding shell (21). After the detection chamber is formed, the first fans (26) and the second fans (27) operate simultaneously. The first fans (26) blow filtered air into the detection chamber, and the second fans (27) extract the air from the detection chamber.

7. The surface defect detection device according to claim 4, characterized in that, The base (1) has a through groove for the shielding shell (21) to pass through. The through groove is annular and has a rubber (28) on it. The lower side wall of the base (1) has a first exhaust port. There is an annular gap between the inner wall of the base (1) and the outer wall of the shielding shell (21). An isolation sleeve (29) is provided in the annular gap. The isolation sleeve (29) divides the annular gap into a first cavity and a second cavity in the vertical direction. The isolation sleeve (29) is fixedly installed on the shielding shell (21). The lifting sleeve (22) has a second exhaust port (221).

8. The surface defect detection device according to claim 7, characterized in that, A second air pump (222) communicating with the lifting sleeve (22) is provided at the bottom of the lifting sleeve (22). A shielding unit (223) that can shield the second exhaust port (221) is provided on the second exhaust port (221). The shielding unit (223) includes a shielding plate (2231) that rotates around the lifting sleeve (22). When the second air pump (222) is started, the shielding plate (2231) covers the second exhaust port (221).

9. A method for detecting semiconductor heating plates, employing a surface defect detection device according to any one of claims 1-8, characterized in that, The specific steps are as follows: S1. Push the heating plate (4) into the gap between the cover (32) and the base (1). At this time, the support unit (2) is in the support position. After the heating plate (4) moves to the upper part of the support unit (2), the support unit (2) drives the heating plate (4) to rise in the vertical direction. After the support unit (2) rises to the sealing position, the support unit (2) covers the opening at the bottom of the cover (32). The support unit (2) and the cover (32) form a detection cavity without the influence of external light. S2. The projection lamp (333) is turned on, and the arc-shaped guide rail (331) rotates around the axis of the cover (32). For each rotation of the arc-shaped guide rail (331), the drive seat (332) set on the arc-shaped guide rail (331) moves a rated distance from bottom to top along the extension direction of the arc-shaped guide rail (331). The camera (31) set on the upper part of the cover (32) continuously monitors the upper surface of the heating plate (4). After the arc-shaped guide rail (331) rotates multiple times, the drive seat (332) moves to the upper end of the arc-shaped guide rail (331) and stops moving. At this time, the detection of the heating plate (4) is completed. S3. The support unit (2) drives the heating plate (4) to descend, the projection lamp (333) is turned off, and the heating plate (4) can be removed after the support unit (2) descends to the support position.

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