Macroscopic detection device and macroscopic detection method

Abstract

The invention discloses a macroscopic detection device and a macroscopic detection method, and the macroscopic detection device comprises a light box which is internally provided with a light-emitting diode and is provided with a light outlet; the optical filter switching piece is arranged on one side of the light outlet, the optical filter switching piece comprises at least two optical filters, and the optical filter switching piece is rotatably arranged relative to the light outlet; the carrying table is arranged on the side, away from the light box, of the light filter switching piece, and the carrying table can rotate relative to the light box; and the transfer piece comprises a positioning part used for fixing the to-be-tested piece, and the transfer piece is used for transferring the to-be-tested piece to the carrying table. Light-emitting adjusting components such as a Fresnel lens do not need to be additionally arranged, the carrying table can rotate relative to the light box, a user can conveniently observe different positions of the to-be-detected piece, macroscopic detection of scratches, smudginess, edge breakage, demolding and the like on the surface of the to-be-detected piece is carried out, the structure is simple, preparation and maintenance are convenient, cost is low, and practicability is high. And the macroscopic detection of a substrate of a display panel and other film layers can be met.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of macroscopic detection, and particularly relates to a macroscopic detection device and a macroscopic detection method. BACKGROUND

[0002] In the production process of display panels, product detection is an important link in the whole process production. The inspection of display panels includes macroscopic detection. Through a macroscopic detection device, the macroscopic detection device irradiates illuminating light on a to-be-detected piece and observes the image thereof by naked eyes to detect defects such as uneven film thickness, dirt, pattern defects / defocus, etc. that can be macroscopically detected in a surface of a semiconductor wafer substrate, a wafer, etc.

[0003] However, the existing macroscopic detection device has a complex structure and high maintenance cost.

[0004] Therefore, there is an urgent need for a new macroscopic detection device and a macroscopic detection method. SUMMARY

[0005] The present application provides a macroscopic detection device and a macroscopic detection method. The macroscopic detection device provided by the present application has a simple structure, is easy to manufacture and maintain, has low cost, and can meet the macroscopic detection requirements for the film layer of the substrate of the display panel.

[0006] In one aspect, the present application provides a macroscopic detection device, which comprises: a light box, wherein a light-emitting diode is arranged in the light box, and the light box has a light outlet; a filter switching piece arranged on one side of the light outlet, wherein the filter switching piece comprises at least two filters, and the filter switching piece is rotatably arranged relative to the light outlet; a stage arranged on a side of the filter switching piece away from the light box, wherein the stage is rotatably arranged relative to the light box; and a transfer piece, wherein the transfer piece comprises a positioning part for fixing a to-be-detected piece, and the transfer piece is used for transferring the to-be-detected piece to the stage.

[0007] According to one aspect of the present application, the filter switching piece comprises a rotating shaft and a rotating disc connected with the rotating shaft, the rotating disc is provided with at least two openings, and the filters are fixed in the openings.

[0008] According to one aspect of the present application, the transfer piece comprises at least two fixed arms arranged at intervals, the fixed arms are provided with the positioning parts, and the positioning parts are used for limiting the movement of the to-be-detected piece in a plane parallel to the extension direction of the fixed arms; preferably, the positioning parts comprise protruding structures.

[0009] According to one aspect of the present application, the transfer piece comprises a first fixed arm and two second fixed arms respectively connected with the same end of the first fixed arm, and the first fixed arm and the second fixed arms are both provided with the positioning parts.

[0010] According to one aspect of the present application, the transfer member comprises two third fixing arms arranged side by side and spaced apart, the third fixing arms comprising first surfaces for carrying the test member, the first surfaces being provided with vacuum suction cups.

[0011] According to one aspect of the present application, two positioning portions are respectively arranged on the third fixing arms, the positioning portions being movable along the extension direction of the third fixing arms; preferably, a lead screw is arranged on the third fixing arm, the positioning portions being connected to the lead screw and being movable along the lead screw.

[0012] According to one aspect of the present application, the macroscopic detection device further comprises a containing box, the containing box comprising a first chamber and a second chamber connected in communication; the light box and the filter switching member are arranged in the first chamber, and the stage and the transfer member are arranged in the second chamber.

[0013] According to one aspect of the present application, the macroscopic detection device further comprises a drive member connected to the stage and a control member connected to the drive member in signal, the control member controlling the drive member to drive the stage to rotate.

[0014] According to one aspect of the present application, the macroscopic detection device further comprises a drive member connected to the stage and a control member connected to the drive member in signal, the control member controlling the drive member to drive the stage to rotate.

[0015] According to one aspect of the present application, in the step of placing the test member from the wafer transfer box to the stage by the transfer member, the positioning portions are moved by the lead screw so as to abut against the edge of the test member.

[0016] Compared with the prior art, the macroscopic detection device provided by the embodiment of the application comprises a light box, a filter switching piece, a carrier and a transfer piece. In the embodiment, the light emitted by the light-emitting diode in the light box can be emitted in parallel through the light outlet, and then irradiated to the to-be-detected piece through the filter. No light adjustment component such as a field lens needs to be additionally arranged. Different filters are selected by the filter switching piece, so that the light-emitting diode in the light box can be converted into different colors, thereby facilitating detection of the to-be-detected piece. The carrier is used to carry the to-be-detected piece, and the carrier can rotate relative to the light box to drive the to-be-detected piece to rotate together, thereby facilitating a user to observe different positions of the to-be-detected piece, and macroscopically detecting scratches, dirt, edge collapse and film peeling and the like on the surface of the to-be-detected piece. The macroscopic detection device provided by the embodiment of the application has the advantages of simple structure, easy preparation and maintenance, low cost, and the ability to meet the macroscopic detection of the film layer of the substrate of the display panel and the like. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments of the present application will be briefly introduced as follows. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0018] Figure 1 is a structural schematic view of a macroscopic detection device provided by the embodiment of the present application;

[0019] Figure 2 is a structural schematic view of a filter switching piece provided by the embodiment of the present application;

[0020] Figure 3 is a structural schematic view of a carrier provided by the embodiment of the present application;

[0021] Figure 4 is a structural schematic view of a transfer piece provided by the embodiment of the present application;

[0022] Figure 5 is a structural schematic view of a transfer piece provided by another embodiment of the present application;

[0023] Figure 6 is a flowchart of a macroscopic detection method provided by the embodiment of the present application.

[0024] In the drawings:

[0025] 1 - light box; 2 - filter switching piece; 21 - rotating shaft; 22 - rotating disc; 3 - carrier; 4 - transfer piece; 41 - positioning part; 5 - accommodating box body; 6 - driving piece; 7 - filter; L1 - first fixed arm; L2 - second fixed arm; L3 - third fixed arm; C - light outlet; D - to-be-detected piece; G - opening; K1 - first cavity; K2 - second cavity. DETAILED DESCRIPTION

[0026] The features and exemplary embodiments of the various aspects of the application will be described below in detail, in order to make the purposes, technical solutions and advantages of the application more clearly understood, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only configured to explain the application, and are not configured to limit the application. The application can be implemented without some of these specific details for those skilled in the art. The following description of the embodiments is only to provide a better understanding of the application by showing examples of the application.

[0027] It should be noted that, in this paper, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment. Without more limitations, the elements defined by the statement "include" do not exclude the presence of other identical elements in the process, method, article or equipment including the elements.

[0028] It should be understood that when describing the structure of a component, when one layer, one region is referred to as being "on" or "above" another layer, another region, it can mean being directly on or above another layer, another region, or containing other layers or regions between it and another layer, another region. And if the component is turned over, the layer, the region will be "under" or "below" the other layer, the other region.

[0029] Various modifications and changes can be made to the application without departing from the spirit or scope of the application, which will be apparent to those skilled in the art. Therefore, the application is intended to cover the modifications and variations of the application falling within the scope of the corresponding claims (claimed technical solutions) and their equivalents. It should be noted that the embodiments provided by the embodiments of the application can be combined with each other without contradiction.

[0030] The embodiments of the application provide a macroscopic detection device and a macroscopic detection method, which will be described below in combination with the accompanying drawings Figures 1 to 6 The embodiments of the macroscopic detection device and the macroscopic detection method will be described.

[0031] Please refer to Figures 1 to 4The macroscopic detection device provided by the embodiment of the present application comprises a light box 1, a light filter switching piece 2, a carrier 3 and a transfer piece 4, in the embodiment, the light emitted by the light-emitting diode in the light box 1 can be emitted in parallel through the light outlet C, then irradiate to the measured piece D through the light filter 7, without setting additional light adjustment components such as a Finsen lens, the light-emitting diode in the light box 1 can be converted into different colors by selecting different light filters 7 through the light filter switching piece 2, so as to facilitate the detection of the measured piece D, the carrier 3 is used for carrying the measured piece D, and the carrier 3 can rotate relative to the light box 1, so as to drive the measured piece D to rotate together, which facilitates the user to observe different positions of the measured piece D, and macroscopic detection of scratches, dirt, edge collapse and film peeling on the surface of the measured piece D can be performed, the macroscopic detection device provided by the embodiment of the present application has the advantages of simple structure, easy preparation and maintenance, low cost, and can meet the macroscopic detection of the film layer of the substrate of the display panel.

[0032] The macroscopic detection device provided by the embodiment of the present application comprises a light box 1, a light filter switching piece 2, a carrier 3 and a transfer piece 4, in the embodiment, the light emitted by the light-emitting diode in the light box 1 can be emitted in parallel through the light outlet C, then irradiate to the measured piece D through the light filter 7, without setting additional light adjustment components such as a Finsen lens, the light-emitting diode in the light box 1 can be converted into different colors by selecting different light filters 7 through the light filter switching piece 2, so as to facilitate the detection of the measured piece D, the carrier 3 is used for carrying the measured piece D, and the carrier 3 can rotate relative to the light box 1, so as to drive the measured piece D to rotate together, which facilitates the user to observe different positions of the measured piece D, and macroscopic detection of scratches, dirt, edge collapse and film peeling on the surface of the measured piece D can be performed, the macroscopic detection device provided by the embodiment of the present application has the advantages of simple structure, easy preparation and maintenance, low cost, and can meet the macroscopic detection of the film layer of the substrate of the display panel.

[0033] In the embodiment, the measured piece D can be an array substrate of a display panel or a wafer, and the macroscopic detection device can exclude product scratches and foreign matters.

[0034] The embodiment adopts a light-emitting diode as a light source, compared with a metal lamp source in the prior art, the light-emitting diode (LED) has low cost, long service life and can meet the demand of illumination, and a plurality of light-emitting diodes are arranged in the light box 1, so that the light emitted by the light box 1 at the light outlet C is approximately parallel light, and therefore, it is not necessary to set a Finsen lens or other components to adjust the light path, and the structure is simple.

[0035] A plurality of light filters 7 for different colors can be arranged on the light filter switching piece 2, so that the white light emitted by the light-emitting diode is converted into other colors such as green light and red light through the light filter 7, to meet different detection requirements.

[0036] The test pieces D can be taken out from a conveying box, such as a FOUP (Front Opening Unified Pod), by the transfer member 4, and positioned and fixed by the positioning portion 41 of the transfer member 4, so that the positions of the test pieces D are uniform, and no additional edge detector or the like is needed to ensure the positioning accuracy, and the structure is simple and the cost is low.

[0037] Please refer to Figure 2 In some optional embodiments, the filter switching member 2 comprises a rotating shaft 21 and a rotating disc 22 connected with the rotating shaft 21, the rotating disc 22 is provided with at least two openings G, and the filter 7 is fixed in the opening G.

[0038] It can be understood that the rotating shaft 21 can drive the rotating disc 22 to be connected together, and the number of openings G can be correspondingly arranged according to the number of filters 7 required, and the filter 7 is fixed in the opening G to avoid the influence of the rotating disc 22 on the light output of the filter 7, and the rotating shaft can be driven to rotate by manual or motor or the like.

[0039] Optionally, the rotating disc 22 is provided with four symmetrical openings G, and one filter 7 is arranged in each opening G.

[0040] Please refer to Figure 4 In some optional embodiments, the transfer member 4 comprises at least two fixed arms arranged at intervals, and the fixed arms are provided with positioning portions 41, and the positioning portions 41 are used to limit the movement of the test piece D in the plane parallel to the extension direction of the fixed arm.

[0041] It should be noted that the fixed arms are arranged at intervals, which can facilitate the taking down of the test piece D, that is, the fixed arms have a certain space, and the positioning portions 41 are arranged on the fixed arms respectively, so that the fixed positions of the test piece D are locked by the cooperation of the plurality of fixed arms, and the positions of the test pieces D are ensured to be the same, and the position of the test piece D does not need to be adjusted by the edge detector, and optionally, three, four or more positioning portions 41 can be arranged to abut against the edges of the test piece D, so that the test piece D is positioned and fixed stably.

[0042] Optionally, the positioning portion 41 comprises a protruding structure which is protruded relative to the surface of the fixed arm to clamp the test piece D, and the protruding structure can be a bolt, a screw or other components, and is not limited in particular.

[0043] Please refer to Figure 4 In some optional embodiments, the transfer member 4 comprises a first fixed arm L1 and two second fixed arms L2 connected with the same end of the first fixed arm L1, and the first fixed arm L1 and the second fixed arm L2 are both provided with the positioning portion 41.

[0044] It should be noted that the first fixed arm L1 and the two second fixed arms L2 can form a similar "Y" shape structure, and one positioning part 41 can be arranged at the end of each of the two second fixed arms L2 away from the first fixed arm L1, and two positioning parts 41 can be arranged on the first fixed arm L1, so as to fix the measured member D by cooperating the positioning parts 41.

[0045] Of course, according to the size and shape of the measured member D, more positioning members can be arranged to position and fix the measured member D, so that the measured member D can be fixed at a predetermined position.

[0046] Please refer to Figure 5 In some optional embodiments, the transfer member 4 includes two third fixed arms L3 arranged side by side and spaced apart, and the third fixed arm L3 includes a first surface for carrying the measured member D, and the first surface is provided with a vacuum chuck.

[0047] In the embodiment, the transfer member 4 can adopt a vacuum mechanical arm, and the vacuum mechanical arm includes a vacuum chuck. The vacuum chuck can generate a vacuum adsorption force by using a gas pump as a driving source. The third fixed arm L3 is adopted to realize the grabbing, placing and positioning of the measured member D, so as to realize automatic operation.

[0048] The working principle is as follows: compressed air enters the vacuum chuck from the cylinder to form a negative pressure environment. The vacuum chuck and the surface of the measured member D are in contact, a negative pressure is generated, the measured member D is adsorbed, the vacuum chuck and the measured member D are moved by the third fixed arm L3, and the measured member D is placed on the loading platform 3.

[0049] In some optional embodiments, two positioning parts 41 are arranged on the third fixed arm L3 respectively, and the positioning part 41 can move along the extension direction of the third fixed arm L3. The positioning part 41 is moved to fix and position the measured member D of different sizes, increase the positioning station, correct the position offset after the device takes the measured member D (i.e. obtains the measured member D), avoid damage to the measured member D due to position offset, and reduce loss.

[0050] Optionally, the third fixed arm L3 is provided with a lead screw, the positioning part 41 is connected with the lead screw and can move along the lead screw. The lead screw can be driven to rotate by a motor to drive the positioning part 41 to move linearly. That is, the lead screw and the motor can convert the rotary motion into linear motion. Specifically, the working process of the lead screw and the motor includes three stages of rotation of the motor, conversion of the rotary motion into linear motion by the threads of the lead screw, and movement of the lead screw to drive the positioning part 41. The position of the positioning part 41 on the third fixed arm L3 can be adjusted by the lead screw, and the measured member D can be clamped and fixed. That is, the two positioning parts 41 on the third fixed arm L3 can clamp the opposite sides of the measured member D respectively.

[0051] Please refer to Figures 1 to 3 In some optional embodiments, the macroscopic detection device further comprises a housing box 5, the housing box 5 comprises a first chamber K1 and a second chamber K2 connected in communication; the light box 1 and the filter switching piece 2 are arranged in the first chamber K1, and the carrier table 3 and the transfer piece 4 are arranged in the second chamber K2.

[0052] By arranging the light box 1, the filter switching piece 2, the carrier table 3 and the transfer piece 4 in the first chamber K1 and the second chamber K2 respectively, mutual interference is avoided, normal implementation of the work of each component is ensured, and the light box 1, the filter switching piece 2, the carrier table 3 and the transfer piece 4 are integrated in the same housing box 5, which is convenient for detection. Optionally, the first chamber K1 is arranged above the second chamber K2, the light emitted by the light-emitting diode of the light box 1 passes through the filter 7 downward, enters the second chamber K2, and irradiates the to-be-detected piece D located on the carrier table 3, which is convenient for detection.

[0053] Optionally, control pieces, motors, operation tables, feeding openings and the like can be arranged in the housing box 5.

[0054] In some optional embodiments, the macroscopic detection device further comprises a driving piece 6 connected with the carrier table 3 and a control piece signal-connected with the driving piece 6, and the control piece controls the driving piece 6 to drive the carrier table 3 to rotate.

[0055] In the embodiment, the driving piece 6 can adopt a power component such as a motor. After the to-be-detected piece D is placed on the carrier table 3, the light-emitting diode in the light box 1 is started, the driving piece 6 is started by the control piece to drive the carrier table 3 to rotate, which is convenient for the worker to observe the to-be-detected piece D from different angles and ensures the accuracy of macroscopic detection.

[0056] Please refer to Figure 6 The embodiment of the application further provides a macroscopic detection method, which adopts the macroscopic detection device in any one of the above embodiments for detection, and the macroscopic detection method comprises the following steps.

[0057] S110: placing the to-be-detected piece D on the carrier table 3 from the conveying box through the transfer piece 4, and fixing the to-be-detected piece D through the positioning part 41 of the transfer piece 4;

[0058] S120: controlling the light-emitting diode in the light box 1 to emit light, and controlling the filter switching piece 2 to rotate to select the filter 7;

[0059] S130: controlling the carrier table 3 to rotate to drive the to-be-detected piece D to rotate synchronously, so as to detect different positions of the to-be-detected piece D.

[0060] In the macroscopic detection method provided in the embodiment, the light emitted by the light-emitting diode in the light box 1 can be emitted in parallel through the light outlet C, then irradiated to the object D to be detected through the filter 7, without the need of additional light adjustment components such as a field lens, and the light-emitting diode in the light box 1 can be converted into different colors by selecting different filters 7 through the filter switching member 2, so as to facilitate the detection of the object D to be detected. The carrier 3 is used for carrying the object D to be detected, and the carrier 3 can rotate relative to the light box 1 to drive the object D to be detected to rotate, so as to facilitate the user to observe different positions of the object D to be detected, and macroscopic detection of scratches, dirt, edge collapse and film peeling and the like on the surface of the object D to be detected can be performed. The macroscopic detection device provided in the embodiment has the advantages of simple structure, easy preparation and maintenance, low cost, and can meet the macroscopic detection of the film layer of the substrate of the display panel and the like.

[0061] In step S110, the transfer box can be a FOUP. The FOUP can avoid the transfer of the object D between each production machine from being polluted by dust in the external environment, thereby affecting the yield. The positioning part 41 of the transfer member 4 can be used to position and fix the object D to be detected, so as to ensure the positions of the objects D to be detected are uniform, without the need of additional edge detector or the like to ensure the positioning accuracy, thereby achieving the advantages of simple structure and low cost.

[0062] In step S120, the light-emitting diode is used as the light source. Compared with the metal lamp source in the prior art, the light-emitting diode (LED) has the advantages of low cost, long service life, and can meet the illumination requirement. In addition, a plurality of light-emitting diodes are arranged in the light box 1, so that the light emitted from the light outlet C of the light box 1 is approximately parallel light, and thus it is not necessary to arrange a field lens or the like to adjust the light path, thereby achieving the advantage of simple structure.

[0063] In step S130, the carrier can be driven to rotate by the motor, so as to facilitate the user to observe different positions of the object D to be detected.

[0064] In some optional embodiments, in the step of placing the object D to be detected from the wafer transfer box on the carrier 3 through the transfer member 4 and fixing the object D to be detected by the positioning part 41 of the transfer member 4, the positioning part 41 is driven to move by the lead screw to abut against the edge of the object D to be detected.

[0065] The lead screw can be driven to rotate by the motor, so as to drive the positioning part 41 to move in a straight line. That is, the components formed by the lead screw and the motor can convert the rotary motion into linear motion. Specifically, the working process of the lead screw and the motor includes three stages of rotation of the motor, conversion of the rotary motion into linear motion by the threads of the lead screw, and movement of the positioning part 41 driven by the lead screw. The position of the positioning part 41 on the transfer member 4 can be adjusted by the lead screw, so as to realize clamping and fixing of the object D to be detected.

[0066] Optionally, the transfer member 4 can adopt the form of a mechanical arm, for example, the transfer member 4 comprises a first fixed arm L1 and two second fixed arms L2 connected to the same end of the first fixed arm L1 respectively, the first fixed arm L1 and the second fixed arms L2 are both provided with a positioning part 41, and the first fixed arm L1 and the two second fixed arms L2 can form a structure similar to a "Y".

[0067] Alternatively, the transfer member 4 comprises two third fixed arms L3 arranged side by side, the third fixed arms L3 comprise a first surface for carrying the to-be-tested member D, and the first surface is provided with a vacuum chuck, that is, the transfer member 4 adopts a structure similar to a vacuum mechanical arm. Optionally, the third fixed arms L3 are provided with a lead screw, the positioning part 41 is connected to the lead screw and can move along the lead screw.

[0068] The above is only a specific embodiment of the present application, and those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the system, module and unit described above can refer to the corresponding process in the foregoing method embodiments, which will not be described here. It should be understood that the protection scope of the present application is not limited thereto, and any person skilled in the art can easily think of various equivalent modifications or replacements within the technical range disclosed in the present application, and these modifications or replacements should be covered within the protection scope of the present application.

[0069] It should be further explained that the exemplary embodiments mentioned in the present application describe some methods or systems based on a series of steps or devices. However, the present application is not limited to the order of the above steps, that is, the steps can be executed in the order mentioned in the embodiments, or can be different from the order in the embodiments, or several steps can be executed simultaneously.

Claims

1. A macroscopic detection device, characterized in that, The macroscopic detection device comprises: a light box, wherein a light emitting diode is arranged in the light box, and the light box has a light outlet; a filter switching element arranged on one side of the light outlet, wherein the filter switching element comprises at least two filters, and the filter switching element is rotatably arranged relative to the light outlet; a carrier arranged on a side of the filter switching element away from the light box, wherein the carrier is rotatably arranged relative to the light box; a transfer element, wherein the transfer element comprises a positioning part for fixing a to-be-tested element, and the transfer element is used for transferring the to-be-tested element to the carrier.

2. The macroscopic detection device according to claim 1, characterized in that The filter switching element comprises a rotating shaft and a rotating disc connected with the rotating shaft, the rotating disc is provided with at least two openings, and the filters are fixed in the openings.

3. The macroscopic detection device of claim 1, wherein, The transfer element comprises at least two fixed arms arranged at intervals, the fixed arms are provided with the positioning parts, and the positioning parts are used for limiting movement of the to-be-tested element in a plane parallel to an extension direction of the fixed arms. Preferably, the positioning parts comprise convex structures.

4. The macroscopic detection device of claim 1, wherein, The transfer element comprises a first fixed arm and two second fixed arms respectively connected with the same end of the first fixed arm, and the first fixed arm and the second fixed arms are both provided with the positioning parts.

5. The macroscopic detection device of claim 1, wherein, The transfer element comprises two third fixed arms arranged side by side at intervals, the third fixed arms comprise first surfaces for carrying the to-be-tested element, and the first surfaces are provided with vacuum suction cups.

6. The macroscopic detection device of claim 5, wherein, The third fixed arms are respectively provided with two positioning parts, and the positioning parts are movable along the extension direction of the third fixed arms. Preferably, the third fixed arms are provided with lead screws, the positioning parts are connected with the lead screws and are movable along the lead screws.

7. The macroscopic detection device of claim 1, wherein The macroscopic detection device further comprises a containing box, wherein the containing box comprises a first chamber and a second chamber connected in communication; The light box and the filter switching element are arranged in the first chamber, and the carrier and the transfer element are arranged in the second chamber.

8. The macroscopic detection device of claim 1, wherein, The macroscopic detection device further comprises a driving element connected with the carrier and a control element in signal connection with the driving element, wherein the control element controls the driving element to drive the carrier to rotate.

9. A macroscopic detection method using the macroscopic detection apparatus according to any one of claims 1 to 8, characterized by, The macroscopic detection method comprises: placing a to-be-tested element on a carrier from a conveying box through a transfer element, wherein the to-be-tested element is fixed through a positioning part of the transfer element; controlling a light emitting diode in a light box to emit light and controlling a filter switching element to rotate so as to select a filter; controlling the carrier to rotate so as to drive the to-be-tested element to rotate synchronously, so as to detect different positions of the to-be-tested element.

10. The macroscopic detection device of claim 9, wherein, In the step of placing the to-be-tested element on the carrier from the wafer conveying box through the transfer element, wherein the to-be-tested element is fixed through the positioning part of the transfer element, the positioning part is driven to move through a lead screw, so that the positioning part abuts against an edge of the to-be-tested element.

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