An IPA cleaning machine

Abstract

The application relates to the technical field of semiconductor processing, in particular to an IPA cleaning machine which comprises a workbench, a conveying mechanism arranged on the top of the workbench, a three-axis displacement mechanism arranged on the top of the workbench and located above the conveying mechanism, and a cleaning mechanism installed on the three-axis displacement mechanism and used for cleaning the semiconductors on the top of a tray, wherein the cleaning mechanism comprises a cleaning mounting block and cleaning foam arranged on the cleaning mounting block, and the cleaning mounting block is provided with a foam replacement structure used for quickly disassembling and assembling the cleaning foam. The horizontal conveying assembly is used for conveying the semiconductors to be cleaned, the jacking assembly is used for jacking the semiconductors to a cleaning position, the positioning assembly is used for positioning the tray, the three-axis displacement mechanism is used for adjusting the position of the cleaning mechanism, the cleaning mechanism is used for cleaning the semiconductors, the spraying valve is used for spraying the target products, and then the cleaning cloth treated by deionization is used for wiping the products, so that the cleaning efficiency of the products is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to an IPA cleaning machine. BACKGROUND

[0002] The integrated circuit industry is the core of the information technology industry and plays a key role in promoting the transformation and upgrading of the manufacturing industry to digitalization and intelligence. The semiconductor chip is the carrier of the integrated circuit. During the chip manufacturing process, a large amount of particulate matter will be left on the surface of the semiconductor chip after chemical mechanical polishing, so that cleaning, drying and other post-processing are required. The existing semiconductor cleaning process usually uses the method of spraying IPA for cleaning. IPA (isopropyl alcohol) is a colorless flammable liquid with a pungent odor characteristic of alcohols.

[0003] In the field of semiconductor manufacturing and precision instrument processing, the cleanliness of products directly affects the quality and performance of products. Traditional cleaning methods mainly include manual wiping, ultrasonic cleaning and chemical solvent soaking. Manual wiping is highly dependent on manpower and low in efficiency, and some manufacturing enterprises have begun to use automated cleaning equipment for processing. However, in the existing processing technology, the contact between the cleaning liquid and the atomized gas particles in the working space will form particulate pollutants, so after being processed by the existing automated cleaning equipment, the particulate pollutants will adhere to the surface of the semiconductor chip, which will affect the surface cleaning and drying effect. Moreover, when the cleaning components that come into contact with the surface of the semiconductor chip become dirty after a period of use of the existing automated cleaning equipment, the entire machine needs to be disassembled and replaced, which results in long downtime and low replacement efficiency, and therefore needs to be improved. SUMMARY

[0004] In order to solve the problems of poor semiconductor surface cleaning effect and low cleaning component replacement efficiency in the background art, the present application provides an IPA cleaning machine.

[0005] The IPA cleaning machine provided by the present application adopts the following technical scheme:

[0006] An IPA cleaning machine, comprising a workbench, wherein the top of the workbench is provided with a conveying mechanism, the conveying mechanism comprises a tray for placing a semiconductor to be cleaned, and the conveying mechanism is used for conveying the tray in horizontal and vertical directions.

[0007] The workbench is provided with a three-axis displacement mechanism; a cleaning mechanism for cleaning the top of the tray is mounted on the three-axis displacement mechanism, the cleaning mechanism comprises a cleaning mounting block and a cleaning foam arranged thereon, the cleaning mounting block is provided with a foam replacement structure, the foam replacement structure comprises a support plate arranged inside the cleaning foam, side wing plates are arranged on both sides of the top of the support plate, a dismounting and mounting transmission assembly is arranged on the top of the side wing plates, a locking assembly is arranged on the cleaning mounting block and located on both sides of the cleaning foam, and the dismounting and mounting transmission assembly is used to drive the locking assembly to fix or release the cleaning foam.

[0008] By adopting the above technical scheme, the semiconductor to be cleaned is conveyed by the horizontal conveying assembly, is lifted to the cleaning position by the jacking assembly, and is positioned by the positioning assembly, then the position of the cleaning mechanism is adjusted by the three-axis displacement mechanism, the semiconductor is cleaned by the cleaning mechanism, the target product is sprayed by the spray valve, and then the product is wiped by the cleaning foam treated by deionization; the cleaning efficiency of the product is improved.

[0009] Optionally, the conveying mechanism comprises a fixed conveying frame and an adjustable conveying frame arranged opposite to each other on the top of the workbench, the fixed conveying frame is fixed on the top of the workbench, the adjustable conveying frame is slidingly connected to the top of the workbench, first threaded rods are threadedly connected to the inner sides of both ends of the bottom of the adjustable conveying frame, the first threaded rods are rotationally connected to the top of the workbench, a first motor is mounted on the top of the workbench, the output end of the first motor is fixedly connected to one of the first threaded rods, first pulleys are fixed to one end of the two first threaded rods, and a first transmission belt is connected to the outer sides of the two first pulleys.

[0010] By adopting the above technical scheme, the distance between the adjustable conveying frame and the fixed conveying frame can be adjusted by starting the first motor, so as to adapt to the cleaning of semiconductors of different specifications and improve the adaptability.

[0011] Optionally, a second motor is mounted on the side opposite to the fixed conveying frame and the adjustable conveying frame, a plurality of drive sprockets are rotationally connected to the opposite side of the fixed conveying frame and the adjustable conveying frame in a symmetrical manner, a conveying chain is connected to the plurality of sprockets on the same side, the output end of the second motor penetrates through the fixed conveying frame or the adjustable conveying frame and is fixedly connected to one of the drive sprockets on the same side, the tray is placed on the top of the two conveying chains, and a plurality of carriers are fixed to the tray.

[0012] By adopting the above technical scheme, the tray is horizontally conveyed by the circular motion of the conveying chain to reach the cleaning position, continuous conveying can be realized, and the cleaning efficiency is improved.

[0013] Optionally, a jacking mounting frame is fixed on the top of the workbench between the fixed conveying frame and the adjustable conveying frame, a jacking cylinder is installed at the bottom of the jacking mounting frame, the output end of the jacking cylinder penetrates through the jacking mounting frame and is fixed with a jacking plate, the jacking plate is in sliding connection with the jacking mounting frame, blocking cylinders are installed on both sides of one end of the jacking mounting frame, blocking blocks are fixed at the output end of the blocking cylinders, a plurality of blocking mounting boxes are installed on the side of the jacking mounting frame away from the blocking cylinders, blocking wedge blocks are rotatably connected to the inner side of the blocking mounting boxes, elastic members are arranged between the blocking wedge blocks and the blocking mounting boxes, and the two ends of the elastic members are respectively in abutment with the blocking wedge blocks and the blocking mounting boxes.

[0014] By adopting the above technical scheme, the tray can be conveyed to a cleaning position in the vertical direction by the jacking assembly for cleaning.

[0015] Optionally, positioning cylinders are installed at the top of the fixed conveying frame and the adjustable conveying frame in opposition, positioning plates are fixed at the output end of the positioning cylinders, and the positioning plates are in sliding connection at the top of the corresponding fixed conveying frame or the adjustable conveying frame.

[0016] By adopting the above technical scheme, the position of the tray is positioned by the positioning assembly, the tray is prevented from moving during cleaning, and the cleaning accuracy is improved.

[0017] Optionally, cross beams are fixed at the top of both sides of the workbench, the three-axis displacement mechanism comprises a transverse drive electric cylinder installed at the top of one of the cross beams, a transverse displacement plate is fixed at the output end of the transverse drive electric cylinder, the transverse displacement plate is in sliding connection at the top of the other cross beam, longitudinal drive electric cylinders are installed on the transverse displacement plate, longitudinal displacement plates are fixed at the output end of the longitudinal drive electric cylinders, the longitudinal displacement plates are in sliding connection with the transverse displacement plate, vertical drive electric cylinders are installed on the longitudinal displacement plates, vertical displacement plates are installed at the output end of the vertical drive electric cylinders, and the vertical displacement plates are in sliding connection with the longitudinal displacement plates.

[0018] By adopting the above technical scheme, three-degree-of-freedom displacement adjustment of the cleaning mechanism can be realized by the three-axis displacement mechanism, and multi-position cleaning in the horizontal plane is realized.

[0019] Optionally, the cleaning mechanism comprises unwinding and winding insertion rods rotatably connected on both sides of the vertical displacement plate, an unwinding roller and a winding roller are respectively inserted on the outer sides of the unwinding and winding insertion rods, a third motor is installed on the vertical displacement plate, a drive pulley is fixed to the output end of the third motor, a transmission pulley is fixed to one end of the winding insertion rod, a second transmission belt is connected to the outer sides of the drive pulley and the transmission pulley, an adjusting cylinder is installed on the vertical displacement plate and located between the bottom of the unwinding roller and the winding roller, the cleaning mounting block is installed on the output end of the adjusting cylinder, the cleaning foam is detachably installed on the inner side of the cleaning mounting block, a plurality of tensioning guide rollers are rotatably connected on both sides of the top of the cleaning mounting block on the vertical displacement plate, the cleaning cloth is unwound from the unwinding roller, passes through the cleaning foam and the plurality of tensioning guide rollers, and is wound on the winding roller, an electrostatic ion spray gun is installed on the vertical displacement plate and located on one side of the adjusting cylinder, spray valves are installed on both sides of the top of the cleaning mounting block on the vertical displacement plate, and a pressure tank group is installed on the workbench.

[0020] By adopting the above technical scheme, the unwinding and winding of the cleaning cloth can be realized through the setting of the unwinding roller and the winding roller, the waste cloth can be collected while cleaning, the environmental protection is improved, and the subsequent treatment of the waste cloth is facilitated.

[0021] Optionally, the dismounting transmission assembly comprises a drive rack fixed on the top of the side wing plate, a transmission shaft rotatably connected on the inner side of the cleaning mounting block and located above the supporting plate, first gears fixed on the outer sides of both ends of the transmission shaft and capable of being meshed with the drive rack, second gears fixed on both ends of the transmission shaft, and third gears meshed with the bottom of the second gears;

[0022] The locking assembly comprises dismounting cover plates installed on the cleaning mounting block by screws and located on the opposite sides of the two third gears, the third gears are rotatably connected on the corresponding dismounting cover plates, adjusting screws are threadedly connected on the inner sides of the dismounting cover plates, positioning tooth plates are rotatably connected on one end of the adjusting screws and pass through the corresponding third gears, a plurality of clamping teeth are transversely arranged on the side of the positioning tooth plate close to the cleaning foam, a plurality of guide rods are fixed on the side of the positioning tooth plate away from the cleaning foam, the positioning tooth plate is slidably connected on the inner side of the cleaning mounting block through the plurality of guide rods, and adjusting knobs are fixed on the ends of the adjusting screws away from the positioning tooth plate and protrude out of the corresponding dismounting cover plates.

[0023] By adopting the above technical scheme, the cleaning foam replacement structure is designed, the cleaning foam can be quickly dismounted and replaced, the downtime is reduced, and the production efficiency is improved.

[0024] Optionally, the adjusting screw is provided with a plurality of clamping grooves on the outer periphery, and the third gear is provided with a plurality of clamping strips on the inner side, which are matched with the clamping grooves, and the third gear is clamped and slidably connected with the adjusting screw through the cooperation of the clamping strips and the clamping grooves.

[0025] By adopting the above technical scheme, the adjusting screw can be driven to rotate when the third gear rotates, and the third gear and the adjusting screw are slidably connected, so that the function of time complexity is realized by using a simple structure, and the mechanical structure complexity is reduced.

[0026] Optionally, the workbench is provided with a roll changing mechanism at one end, the roll changing mechanism comprises a supporting frame mounted on the unwinding roller and the winding roller, a spring is fixed at the bottom of the supporting frame, a positioning rod is abutted below the spring, a plurality of positioning holes are formed at the ends of the unwinding inserting rod and the winding inserting rod, the bottom end of the positioning rod is inserted into the corresponding positioning hole on the inner side, a roll changing frame is rotatably connected to one end of the top of the workbench, first and second roll changing inserting rods corresponding to the unwinding inserting rod and the winding inserting rod are respectively fixed on the two ends of the roll changing frame close to one side of the unwinding inserting rod and the winding inserting rod, a plurality of insertion holes matched with the positioning rod are formed on the ends of the first and second roll changing inserting rods away from the unwinding inserting rod, and a turntable is fixed to the middle of the side of the roll changing frame away from the first roll changing inserting rod.

[0027] By adopting the above technical scheme, the unwinding roller and the winding roller can be replaced at the same time through the roll changing mechanism, and the replacement efficiency is improved.

[0028] In summary, the present application has at least one of the following beneficial technical effects:

[0029] 1. The present application transports the semiconductor to be cleaned through the conveying mechanism, lifts it to the cleaning position first, then positions the tray, adjusts the position of the cleaning mechanism through the three-axis displacement mechanism, cleans the semiconductor through the cleaning mechanism, sprays the target product through the spray valve first, and then wipes the product through the cleaning cloth treated by deionization; improve the cleaning efficiency of the product.

[0030] 2. The application is designed by the replacement structure of the foam, which is convenient for quickly disassembling and replacing the cleaning foam; when it is necessary to remove, the adjusting knob is counterclockwise rotated, when the two indicating arrows are aligned, the clamping of the positioning tooth plate to the cleaning foam makes it not to fall off and can be slightly moved, and then the cleaning foam is extracted with the support plate. During the extraction process, the driving rack is engaged with the driving rack, so that the positioning tooth plate is completely separated from the cleaning foam, which is convenient for subsequent installation. When reinstalling, the cleaning foam is sleeved on the support plate, and is inserted into the cleaning installation block, in the process of inserting, the driving rack first contacts the first gear and is engaged with the first gear, drives the adjusting screw to rotate, drives the positioning tooth plate to gradually contact the cleaning foam and generates a pre-tightening force to make it not to fall down, and then the staff can release the cleaning foam with both hands and rotate the adjusting knob, so that it can avoid holding the cleaning foam with one hand and adjusting the adjusting knob with the other hand, improve the replacement efficiency of the cleaning foam, reduce the downtime, and improve the production efficiency.

[0031] 3. The application can replace the unwinding roller and the winding roller at the same time through the structure design of the roll replacing mechanism, improve the replacement efficiency and convenience. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 is a structure schematic diagram of an IPA cleaning machine according to an embodiment of the application.

[0033] Figure 2 is a front view structure schematic diagram of an embodiment of the application.

[0034] Figure 3 is a structure schematic diagram of a fixed conveying frame, an adjustable conveying frame and a first threaded rod according to an embodiment of the application.

[0035] Figure 4 is a structure schematic diagram of a horizontal conveying assembly according to an embodiment of the application.

[0036] Figure 5 is a structure schematic diagram of a jacking assembly according to an embodiment of the application.

[0037] Figure 6 is a structure schematic diagram of a three-axis displacement mechanism according to an embodiment of the application.

[0038] Figure 7 is a structure schematic diagram of a cleaning mechanism according to an embodiment of the application.

[0039] Figure 8 is a structure schematic diagram of an electrostatic ion spray gun and a spray valve according to an embodiment of the application.

[0040] Figure 9 is a structure schematic diagram of a driving pulley, a transmission pulley and a second transmission belt according to an embodiment of the application.

[0041] Figure 10It is a structure schematic view of the cleaning installation block and the cleaning foam of the embodiment of the present application.

[0042] Figure 11 It is a section schematic view of the foam replacement structure of the embodiment of the present application.

[0043] Figure 12 It is an axial structure schematic view of the section of the foam replacement structure of the embodiment of the present application.

[0044] Figure 13 It is a structure schematic view of the second gear and the third gear of the embodiment of the present application.

[0045] Legend of reference signs:

[0046] 100, conveying mechanism; 200, three-axis displacement mechanism; 300, cleaning mechanism; 400, roll replacement mechanism; 500, workbench; 101, fixed conveying frame; 102, adjustable conveying frame; 103, first threaded rod; 104, first motor; 105, first pulley; 106, first transmission belt; 107, second motor; 108, conveying chain; 109, tray; 110, carrier; 111, blocking cylinder; 112, blocking block; 113, jacking mounting frame; 114, jacking cylinder; 115, jacking plate; 116, blocking mounting box; 117, blocking wedge; 118, positioning cylinder; 119, positioning plate; 201, transverse drive electric cylinder; 202, transverse displacement plate; 203, longitudinal drive electric cylinder; 204, longitudinal displacement plate; 205, vertical drive electric cylinder; 206, vertical displacement plate; 301, unwinding insertion rod; 302, winding insertion rod; 303, unwinding roller; 304, winding roller; 305, tension guide roller; 306, third motor; 307, drive pulley; 308, transmission pulley; 309, second transmission belt; 310, adjusting cylinder; 311, cleaning installation block; 312, cleaning foam; 313, support plate; 314, spray valve; 315, drive rack; 316, first gear; 317, transmission shaft; 318, second gear; 319, third gear; 320, adjusting screw; 321, positioning toothed plate; 322, adjusting knob; 323, dismounting cover plate; 324, side wing plate; 325, guide rod; 326, clamping groove; 327, static electricity removing ion spray gun; 328, pressure tank group; 401, roll replacement frame; 402, first roll replacement insertion rod; 403, second roll replacement insertion rod; 404, support frame; 405, positioning rod; 406, spring; 408, turntable. DETAILED DESCRIPTION

[0047] In order for those skilled in the art to better understand the technical solutions of the present application, the following will combine the accompanying drawings to make a detailed description of the present application. Figures 1-13 The present application will be further described in detail.

[0048] Reference Figures 1-13The embodiment of the present application provides an IPA cleaning machine, which comprises a workbench 500, the top of the workbench 500 is provided with a conveying mechanism 100, the conveying mechanism 100 comprises a tray 109 used for placing a semiconductor to be cleaned, and the conveying mechanism 100 is used for conveying the tray 109 in horizontal and vertical directions.

[0049] The workbench 500 is provided with a three-axis displacement mechanism 200, the three-axis displacement mechanism 200 is installed with a cleaning mechanism 300 used for cleaning the semiconductor on the top of the tray 109, the cleaning mechanism 300 comprises a cleaning mounting block 311 and cleaning foam 312 arranged on the cleaning mounting block 311, the cleaning mounting block 311 is provided with a foam replacement structure, the foam replacement structure comprises a supporting plate 313 arranged on the inner side of the cleaning foam 312, the top of the supporting plate 313 is fixedly installed with side wing plates 324 on both sides, the top of the side wing plates 324 is provided with a dismounting and mounting transmission assembly, so that the cleaning foam 312 can be quickly dismounted and mounted, the cleaning mounting block 311 and the two sides of the cleaning foam 312 are provided with a locking assembly, the dismounting and mounting transmission assembly is connected with the locking assembly, and the locking assembly is used for driving the locking assembly to fix or release the cleaning foam 312.

[0050] The semiconductor to be cleaned is conveyed by the conveying mechanism, is first lifted to a cleaning position, then the tray 109 is positioned, subsequently the position of the cleaning mechanism 300 is adjusted through the three-axis displacement mechanism 200, and the semiconductor is cleaned through the cleaning mechanism 300.

[0051] With reference to Figures 3-4 The conveying mechanism 100 comprises fixed conveying frames 101 and adjustable conveying frames 102 arranged on both sides of the top of the workbench 500, the fixed conveying frames 101 are fixed on the top of the workbench 500, and the adjustable conveying frames 102 are slidably connected to the top of the workbench 500. Two first threaded rods 103 are rotationally arranged on the top of the workbench 500, and the two ends of the adjustable conveying frames 102 are respectively threadedly connected with the two first threaded rods 103. A first motor 104 is installed on the top of the workbench 500, and the output end of the first motor 104 is fixedly connected with one of the first threaded rods 103. One first pulley 105 is fixed to one end of each of the two first threaded rods 103, and the two first pulleys 105 are drivingly connected through a first transmission belt 106.

[0052] When it is necessary to adjust the distance between the fixed conveying frames 101 and the adjustable conveying frames 102, the first motor 104 drives the corresponding first threaded rod 103 to rotate, and drives the other first threaded rod 103 to synchronously rotate through the first pulley 105 and the first transmission belt 106, so that the adjustable conveying frames 102 are driven to move away from or approach the fixed conveying frames 101, and thus the distance between the fixed conveying frames 101 and the adjustable conveying frames 102 can be adjusted.

[0053] With reference to Figures 3-4The horizontal conveying assembly comprises two second motors 107, one of which is installed on the fixed conveying frame 101 and the other on the adjustable conveying frame 102. A plurality of drive sprockets are rotatably connected to the fixed conveying frame 101 and the adjustable conveying frame 102, respectively. A conveying chain 108 is arranged on each of the fixed conveying frame 101 and the adjustable conveying frame 102. The plurality of drive sprockets on each of the fixed conveying frame 101 and the adjustable conveying frame 102 are drivingly connected by the conveying chain 108. The output end of the second motor 107 is fixedly connected to one of the drive sprockets through the side wall of the conveying frame. The tray 109 is placed on the top of the two conveying chains 108. The tray 109 is fixed with a plurality of carriers 110.

[0054] When the tray 109 is horizontally conveyed, the second motor 107 is started to drive the conveying chain 108 to move through the plurality of drive sprockets. The tray 109 is driven to move by the circulating movement of the conveying chain 108, so as to be horizontally conveyed.

[0055] Referring to Figure 5 The jacking assembly comprises a jacking mounting frame 113 fixed on the top of the workbench 500 and located between the fixed conveying frame 101 and the adjustable conveying frame 102. The jacking mounting frame 113 is installed with a jacking cylinder 114 at the bottom. The output end of the jacking cylinder 114 penetrates the jacking mounting frame 113 and is fixed with a jacking plate 115. The jacking plate 115 is slidingly connected with the jacking mounting frame 113. The jacking mounting frame 113 is installed with a blocking cylinder 111 at both sides of one end. The output end of the blocking cylinder 111 is fixed with a blocking block 112. A plurality of blocking mounting boxes 116 are installed on the side of the jacking mounting frame 113 away from the blocking cylinder 111. The blocking mounting boxes 116 are rotatably connected with blocking wedge blocks 117 on the inner side. Elastic members are arranged between the blocking wedge blocks 117 and the blocking mounting boxes 116.

[0056] When the horizontal conveying assembly conveys the tray 109 to the proximity of the blocking block 112, the blocking cylinder 111 is started to drive the blocking block 112 to rise, so that the blocking block 112 blocks the tray 109. At the same time, the tray 109 moves from the blocking wedge block 117 to the blocking block 112. When the tray 109 passes through the blocking wedge block 117, it will be pressed down. When the tray 109 is abutted by the blocking block 112, the blocking wedge block 117 is separated from the bottom of the tray 109 and is popped out by the elastic member, so that the end face thereof abuts against the other end of the tray 109 to horizontally and transversely position the same. Then, the jacking cylinder 114 is started to drive the jacking plate 115 to rise, so as to lift up the tray 109 and transport it upward.

[0057] Referring to Figure 4The positioning assembly comprises two positioning cylinders 118 respectively installed on the top of the fixed conveying frame 101 and the adjustable conveying frame 102, the output end of the positioning cylinder 118 is fixed with a positioning plate 119, and the positioning plate 119 is slidingly connected to the top of the corresponding fixed conveying frame 101 or the adjustable conveying frame 102. When the tray 109 is transported in the vertical direction to between the two positioning plates 119, the positioning cylinder 118 is started to drive the two positioning plates 119 to approach each other and clamp the tray 109 to position it.

[0058] With reference to Figure 6 The top of the workbench 500 is fixed with a cross beam above the conveying mechanism 100, and the three-axis displacement mechanism 200 comprises a horizontal drive cylinder 201 installed on the cross beam on the top of the workbench 500, the output end of the horizontal drive cylinder 201 is fixed with a horizontal displacement plate 202, the horizontal displacement plate 202 is slidingly connected to the top of the other cross beam, the horizontal displacement plate 202 is installed with a vertical drive cylinder 203, the output end of the vertical drive cylinder 203 is fixed with a vertical displacement plate 204, the vertical displacement plate 204 is slidingly connected with the horizontal displacement plate 202, and the vertical displacement plate 204 is installed with a vertical drive cylinder 205, the output end of the vertical drive cylinder 205 is installed with a vertical displacement plate 206, and the vertical displacement plate 206 is slidingly connected with the vertical displacement plate 204.

[0059] When the horizontal drive cylinder 201 is started, the horizontal displacement plate 202 can be driven to move horizontally in the horizontal direction, when the vertical drive cylinder 203 is started, the vertical displacement plate 204 can be driven to move vertically in the vertical direction, and when the vertical drive cylinder 205 is started, the vertical displacement plate 206 can be driven to move vertically in the vertical direction, so as to realize three-degree-of-freedom adjustment of the cleaning mechanism 300, so as to facilitate multi-position cleaning work in space.

[0060] With reference to Figures 7-9The cleaning mechanism 300 comprises a pay-off inserting rod 301 and a winding inserting rod 302 rotatably connected on both sides of the vertical displacement plate 206, and the pay-off inserting rod 301 and the winding inserting rod 302 are respectively provided with a pay-off roller 303 and a winding roller 304 on the outer sides. A third motor 306 is installed on the vertical displacement plate 206, and a driving pulley 307 is fixed to the output end of the third motor 306. One end of the winding inserting rod 302 is fixedly provided with a transmission pulley 308, and the driving pulley 307 and the transmission pulley 308 are drivingly connected through a second transmission belt 309. An adjusting cylinder 310 is installed on the vertical displacement plate 206 and located between the bottom of the pay-off roller 303 and the winding roller 304. A cleaning mounting block 311 is installed on the output end of the adjusting cylinder 310. A cleaning foam 312 is detachably installed on the cleaning mounting block 311. A plurality of tensioning guide rollers 305 are rotatably connected on both sides of the top of the cleaning mounting block 311 on the vertical displacement plate 206. The cleaning cloth is wound from the pay-off roller 303, passes through the cleaning foam 312 and the plurality of tensioning guide rollers 305, and is wound on the winding roller 304. In use, the pay-off roller 303 is wound with the cleaning cloth, the free end of the cleaning cloth passes through the tensioning guide rollers 305 and the bottom of the cleaning foam 312, and is connected to the outer periphery of the winding roller 304.

[0061] An electrostatic ion spray gun 327 is installed on the vertical displacement plate 206 and located on one side of the adjusting cylinder 310. A spray valve 314 is installed on the vertical displacement plate 206 and located on both sides of the top of the cleaning mounting block 311. A pressure tank group 328 is installed on the workbench 500, and the output end of the pressure tank group 328 is connected to the input end of the spray valve 314 through a conduit.

[0062] When cleaning, the third motor 306 is started to drive the driving pulley 307 to rotate, and the transmission pulley 308 is driven to rotate through the second transmission belt 309, and the winding roller 304 is driven to rotate through the rotation of the transmission pulley 308 to continuously wind the cleaning cloth, so that the cleaning cloth is continuously unwound from the pay-off roller 303, so that the cleaning cloth is always clean, and the waste cloth after cleaning can be wound for processing to prevent secondary pollution of the semiconductor.

[0063] The spray valve 314 is provided with high-pressure fluid by the pressure tank group 328, and the working principle of the pressure tank for providing high-pressure fluid is the prior art, which will not be described in detail here, and is provided with a flow detector to ensure that the amount of each spray is the same. Before the cleaning cloth is replaced and wiped, the electrostatic ion spray gun 327 is started to remove static electricity. In use, the spray valve 314 is first sprayed, then the cleaning cloth is wiped, and then it is moved to the new product for repeated operation.

[0064] Referring to Figures 10-13The disassembly and assembly transmission assembly comprises a driving rack 315 fixed on the top of the side wing plate 324, a transmission shaft 317 rotatably connected to the middle of the inner side of the cleaning mounting block 311 and above the supporting plate 313, a first gear 316 fixed on the outer side of both ends of the transmission shaft 317 and capable of being meshed and connected with the driving rack 315, a second gear 318 fixed on both ends of the transmission shaft 317, and a third gear 319 meshed and connected at the bottom of the second gear 318;

[0065] The locking assembly comprises a disassembly and assembly cover plate 323 mounted on the cleaning mounting block 311 by screws and located on the side opposite to the two third gears 319, the third gear 319 is rotatably connected to the corresponding disassembly and assembly cover plate 323, an adjusting screw 320 is threadedly connected to the inner side of the disassembly and assembly cover plate 323, the adjusting screw 320 is rotatably connected to a positioning tooth plate 321 at one end thereof penetrating through the corresponding third gear 319, the positioning tooth plate 321 is transversely provided with a plurality of clamping teeth on the side close to the cleaning foam 312, a plurality of guide rods 325 are fixed on the side of the positioning tooth plate 321 away from the cleaning foam 312, the positioning tooth plate 321 is slidably connected to the inner side of the cleaning mounting block 311 through the guide rods 325, and the adjusting screw 320 is fixed with an adjusting knob 322 at the end thereof away from the positioning tooth plate 321 and extending out of the corresponding disassembly and assembly cover plate 323.

[0066] The adjusting screw 320 is axially provided with a plurality of clamping grooves 326 on the outer periphery, the inner side of the third gear 319 is provided with a plurality of clamping strips matched with the clamping grooves 326, and the third gear 319 is clamped and slidably connected with the adjusting screw 320 through the cooperation of the clamping strips and the clamping grooves 326.

[0067] It should be noted that the driving rack 315 is only fixed on one end of the top of the side wing plate 324, and when the cleaning foam 312 is completely mounted to the inner side of the cleaning mounting block 311, the driving rack 315 is not meshed with the first gear 316 and is in a disengaged state.

[0068] When it is needed to remove the cleaning foam 312 from the inside of the cleaning mounting block 311, first, the two adjusting knobs 322 on both sides are turned counterclockwise at the same time, so that the adjusting knobs 322 on both sides drive the adjusting screw 320 to rotate, when the adjusting screw 320 rotates counterclockwise, since it is screwed with the corresponding dismounting cover plate 323, the adjusting screw 320 rotates outward at the same time, so that the positioning tooth plate 321 on both sides gradually loosens the top of the cleaning foam 312. The dismounting cover plate 323 and the adjusting knob 322 are respectively marked with an indicating arrow, when the adjusting knob 322 is turned counterclockwise to the point where the two indicating arrows are aligned, the adjusting knob 322 is loosened when the positioning tooth plate 321 holds the cleaning foam 312 so that it does not fall off and can move slightly. Then the cleaning foam 312 and the support plate 313 are pulled out from the inside of the cleaning mounting block 311. During the pulling-out process, the driving rack 315 will contact the first gear 316, at this time the cutting angle of the first gear 316 matches and engages with the cutting angle of the driving rack 315, then during the process of continuing to pull out the cleaning foam 312 and the support plate 313, the driving rack 315 drives the first gear 316 to rotate, the first gear 316 drives the second gear 318 to rotate through the transmission shaft 317, and then drives the third gear 319 to rotate, so that the adjusting screw 320 rotates counterclockwise, so that the positioning tooth plate 321 completely separates from the cleaning foam 312 during the pulling-out process of the cleaning foam 312, in order to facilitate the subsequent installation of the cleaning foam 312.

[0069] When it is needed to install the cleaning foam 312 into the inside of the cleaning mounting block 311, the cleaning foam 312 is sleeved outside the support plate 313, and the cleaning foam 312 and the support plate 313 are inserted into the inside of the cleaning mounting block 311, during the insertion process, the driving rack 315 will first contact and engage with the first gear 316, during the continuing insertion process, the driving rack 315 drives the first gear 316 to rotate, and then drives the transmission shaft 317, the second gear 318, the third gear 319 and the adjusting screw 320 to rotate in sequence through the first gear 316, when the adjusting screw 320 rotates, it drives the positioning tooth plate 321 to move inward and gradually contact and produce a certain pre-tightening force on the cleaning foam 312, when the cleaning foam 312 is completely inserted into the inside of the cleaning mounting block 311, the clamping force provided by the positioning tooth plate 321 on both sides can prevent the cleaning foam 312 from falling down, then the staff can release the cleaning foam 312, then the adjusting knobs 322 are turned at the same time to drive the positioning tooth plate 321 to clamp the cleaning foam 312, in this way, it can avoid holding the cleaning foam 312 with one hand and adjusting the adjusting knob 322 with the other hand, realize the simultaneous adjustment of the two adjusting knobs 322, and improve the replacement efficiency of the cleaning foam 312.

[0070] Referring to Figure 6 and Figure 8The workbench 500 is provided with a roll changing mechanism 400, the roll changing mechanism 400 comprises a support frame 404 mounted on the unwinding roller 303 and the winding roller 304, the bottom of the support frame 404 is fixedly provided with a spring 406, the lower side of the spring 406 abuts against a positioning rod 405, the ends of the unwinding inserting rod 301 and the winding inserting rod 302 are respectively provided with a plurality of positioning holes, the bottom end of the positioning rod 405 is inserted into the inside of the corresponding positioning hole, one end of the top of the workbench 500 is rotatably connected with a roll changing frame 401, the two ends of the roll changing frame 401 are respectively fixedly provided with a first roll changing inserting rod 402 and a second roll changing inserting rod 403 corresponding to the unwinding inserting rod 301 and the winding inserting rod 302 on the side close to the unwinding inserting rod 301 and the winding inserting rod 302, a plurality of inserting holes matched with the positioning rod 405 are formed on the end of the first roll changing inserting rod 402 and the second roll changing inserting rod 403 away from the unwinding inserting rod 301, and a rotating disc 408 is fixedly arranged on the middle of the side of the roll changing frame 401 away from the first roll changing inserting rod 402.

[0071] When the clean cleaning cloth on the unwinding roller 303 is used up, the unwinding roller 303 and the winding roller 304 need to be replaced, at this time, the staff rotates the rotating disc 408, so that the roll changing frame 401 rotates, so that the first roll changing inserting rod 402 and the second roll changing inserting rod 403 are in a horizontal state, so that the first roll changing inserting rod 402 and the second roll changing inserting rod 403 close to the cleaning mechanism 300 are empty, and at the same time, the new unwinding roller 303 and the winding roller 304 to be replaced are inserted into the first roll changing inserting rod 402 and the second roll changing inserting rod 403 away from the cleaning mechanism 300, then the horizontal drive electric cylinder 201, the longitudinal drive electric cylinder 203 and the vertical drive electric cylinder 205 are started to drive the unwinding inserting rod 301 and the winding inserting rod 302 to move to the position opposite to the first roll changing inserting rod 402 and the second roll changing inserting rod 403 and close to the first roll changing inserting rod 402 and the second roll changing inserting rod 403, at this time, the central axis of the first roll changing inserting rod 402 is collinear with the unwinding inserting rod 301, and the central axis of the winding roller 304 is collinear with the winding inserting rod 302, then the staff pushes the positioning rod 405 upwards to make it separate from the inside of the unwinding inserting rod 301 and the winding inserting rod 302, then the positioning rod 405 is pulled while the positioning rod 405 is pushed, the unwinding roller 303 and the winding roller 304 are inserted into the first roll changing inserting rod 402 and the second roll changing inserting rod 403 respectively and the positioning rod 405 is loosened, so that the positioning rod 405 is inserted into the inserting hole to position the unwinding roller 303 and the winding roller 304, then the staff rotates the rotating disc 408 by 180 degrees, and then the new unwinding roller 303 and the winding roller 304 on the first roll changing inserting rod 402 and the second roll changing inserting rod 403 are installed on the corresponding unwinding inserting rod 301 and winding inserting rod 302.

[0072] It should be noted that a limiting structure for rotating the roll changing frame 401 can be arranged on the top of the workbench 500, for example, an arc-shaped groove is formed, so that the rotating angle of the roll changing frame 401 is 180 degrees.

[0073] The working principle of the IPA cleaning machine provided by the application is as follows:

[0074] In use, the worker first places the semiconductor to be cleaned on the carrier 110, and then the second motor 107 is started to drive the conveying chain 108 to move through the driving sprocket, and the tray 109 is driven to move horizontally through the circular motion of the conveying chain 108.

[0075] When the horizontal conveying assembly conveys the tray 109 to the position close to the blocking block 112, the blocking cylinder 111 is started to drive the blocking block 112 to rise, so that the blocking block 112 blocks the tray 109, and the tray 109 moves from the direction of the blocking wedge 117 to the blocking block 112. When the tray 109 passes through the blocking wedge 117, the blocking wedge 117 is pressed down, and when the tray 109 is abutted by the blocking block 112, the blocking wedge 117 is separated from the bottom of the tray 109 and is popped out by the elastic member, so that the end surface thereof abuts against the other end of the tray 109 to horizontally and laterally position the tray 109. Then, the jacking cylinder 114 is started to drive the jacking plate 115 to rise, and the tray 109 is jacked up and transported upward by the jacking plate 115.

[0076] When the tray 109 is transported in the vertical direction to the position between the two positioning plates 119, the positioning cylinder 118 is started to drive the two positioning plates 119 to approach and clamp the tray 109 to position the tray 109.

[0077] In the cleaning process, the horizontal drive cylinder 201, the longitudinal drive cylinder 203, and the vertical drive cylinder 205 are started to move the spray valve 314 to the top of the semiconductor to be cleaned, and then the spray valve 314 is started to spray the semiconductor. Then, the horizontal drive cylinder 201, the longitudinal drive cylinder 203, and the vertical drive cylinder 205 are started to move the cleaning foam 312 to the top of the semiconductor to be cleaned after spraying, and the cleaning foam 312 can softly support the cleaning cloth and prevent damage to the electronic components to be cleaned. Then, the third motor 306 is started to drive the drive pulley 307 to rotate, and the transmission pulley 308 is driven to rotate through the second transmission belt 309. The transmission pulley 308 is driven to rotate the winding roller 304 to continuously wind the cleaning cloth, so that the cleaning cloth is continuously unwound from the unwinding roller 303 to clean the semiconductor. Before the cleaning cloth is replaced with a new section to wipe, the static electricity removing ion gun 327 is started to remove static electricity.

[0078] The above are preferred embodiments of the application, and do not limit the protection scope of the application. Any equivalent changes made on the basis of the structure, shape, and principle of the application should be covered by the protection scope of the application.

Claims

1. An IPA cleaning machine, characterized in that: Includes a workbench (500), the top of which is provided with a conveying mechanism (100), the conveying mechanism (100) includes a tray (109) for placing semiconductors to be cleaned, the conveying mechanism (100) is used to convey the tray (109) in the horizontal and vertical directions; The workbench (500) is provided with a three-axis displacement mechanism (200); the three-axis displacement mechanism (200) is equipped with a cleaning mechanism (300) for cleaning the semiconductors on the top of the tray (109). The cleaning mechanism (300) includes a cleaning mounting block (311) and a cleaning foam (312) disposed thereon. The cleaning mounting block (311) is provided with a foam replacement structure. The foam replacement structure includes a support plate (313) disposed inside the cleaning foam (312). Side wing plates (324) are provided on both sides of the top of the support plate (313). The top of the side wing plates (324) is provided with a disassembly and assembly transmission assembly. Locking assemblies are provided on the cleaning mounting block (311) and on both sides of the cleaning foam (312). The disassembly and assembly transmission assembly is used to drive the locking assembly to fix or loosen the cleaning foam (312). The output end of the three-axis displacement mechanism (200) is equipped with a vertical displacement plate (206). The cleaning mechanism (300) includes an unwinding rod (301) and a winding rod (302) rotatably connected to both sides of the vertical displacement plate (206). An unwinding roller (303) and a winding roller (304) are respectively inserted into the outer sides of the unwinding rod (301) and the winding rod (302). A third motor (306) is mounted on the vertical displacement plate (206). The output end of the third motor (306) is fixed with a drive pulley (307), and one end of the take-up rod (302) is fixed with a transmission pulley (308). A second transmission belt (309) is connected to the outer side of the drive pulley (307) and the transmission pulley (308). An adjusting cylinder (310) is installed on the vertical displacement plate (206) between the bottom of the unwinding roller (303) and the take-up roller (304). The cleaning mounting block ( 311) The cleaning foam (312) is detachably installed on the inner side of the cleaning mounting block (311) and installed on the output end of the regulating cylinder (310). Several tensioning guide rollers (305) are rotatably connected on the vertical displacement plate (206) and located on both sides of the top of the cleaning mounting block (311). After the cleaning cloth is unwound from the unwinding roller (303), it passes around the cleaning foam (312) and several tensioning guide rollers (305) and is then wound onto the winding roller (304). An antistatic ion spray gun (327) is installed on the vertical displacement plate (206) and located on one side of the regulating cylinder (310). Spray valves (314) are installed on the vertical displacement plate (206) and located on both sides of the top of the cleaning mounting block (311). A pressure tank group (328) is installed on the workbench (500). The output end of the pressure tank group (328) is connected to the input end of the spray valve (314) through a conduit. The disassembly and assembly transmission assembly includes a drive rack (315) fixed to the top of the side wing plate (324), a drive shaft (317) rotatably connected to the inner middle of the cleaning mounting block (311) and above the support plate (313), a first gear (316) that can mesh with the drive rack (315) is fixed at both ends of the outer side of the drive shaft (317), a second gear (318) is fixed at both ends of the drive shaft (317), and a third gear (319) is meshed at the bottom of the second gear (318). The locking assembly includes a disassembly cover plate (323) mounted on the cleaning mounting block (311) by screws and located on opposite sides of the two third gears (319). The third gears (319) are rotatably connected to the corresponding disassembly cover plate (323). An adjusting screw (320) is threadedly connected to the inner side of the disassembly cover plate (323). One end of the adjusting screw (320) passes through the corresponding third gear (319) and is rotatably connected to a positioning tooth plate (321). (321) Several teeth are provided laterally on the side near the cleaning foam (312). Several guide rods (325) are fixed on the side of the positioning tooth plate (321) away from the cleaning foam (312). The positioning tooth plate (321) is slidably connected to the inner side of the cleaning mounting block (311) through several guide rods (325). The adjusting screw (320) extends out of the corresponding disassembly cover plate (323) away from the positioning tooth plate (321) and is fixed with an adjusting knob (322).

2. The IPA cleaning machine according to claim 1, characterized in that: The conveying mechanism (100) includes a fixed conveying frame (101) and an adjustable conveying frame (102) disposed opposite to each other on the top of the workbench (500). The fixed conveying frame (101) is fixed on the top of the workbench (500), and the adjustable conveying frame (102) is slidably connected to the top of the workbench (500). The bottom ends of the adjustable conveying frame (102) are respectively threaded with first threaded rods (103). The first threaded rods (103) are rotatably connected to the top of the workbench (500). A first motor (104) is installed on the top of the workbench (500). The output end of the first motor (104) is fixedly connected to one of the first threaded rods (103). One end of the two first threaded rods (103) is fixed with a first pulley (105), and the outside of the two first pulleys (105) is connected with a first transmission belt (106).

3. An IPA cleaning machine according to claim 2, characterized in that: A second motor (107) is installed on the opposite side of the fixed conveyor frame (101) and the adjustable conveyor frame (102). Several drive sprockets are symmetrically rotatably connected to the opposite side of the fixed conveyor frame (101) and the adjustable conveyor frame (102). Conveyor chains (108) are connected to several drive sprockets on the same side. The output end of the second motor (107) passes through the fixed conveyor frame (101) or the adjustable conveyor frame (102) and is fixedly connected to one of the drive sprockets on the same side. The tray (109) is placed on top of the two conveyor chains (108). Several carriers (110) are fixed on the tray (109).

4. An IPA cleaning machine according to claim 3, characterized in that: A lifting mounting frame (113) is fixed on the top of the workbench (500) and located between the fixed conveyor frame (101) and the adjustable conveyor frame (102). A lifting cylinder (114) is installed at the bottom of the lifting mounting frame (113). The output end of the lifting cylinder (114) passes through the lifting mounting frame (113) and is fixed with a lifting plate (115). The lifting plate (115) is slidably connected to the lifting mounting frame (113). Obstructions are installed on both sides of one end of the lifting mounting frame (113). The cylinder (111) has a blocking block (112) fixed at its output end. The lifting mounting bracket (113) has several blocking mounting boxes (116) installed on the side away from the blocking cylinder (111). A blocking wedge (117) is rotatably connected to the inside of the blocking mounting box (116). An elastic element is provided between the blocking wedge (117) and the blocking mounting box (116). The two ends of the elastic element abut against the blocking wedge (117) and the blocking mounting box (116) respectively.

5. An IPA cleaning machine according to claim 4, characterized in that: Positioning cylinders (118) are installed opposite to the top of the fixed conveyor frame (101) and the adjustable conveyor frame (102). A positioning plate (119) is fixed to the output end of the positioning cylinder (118). The positioning plate (119) is slidably connected to the top of the corresponding fixed conveyor frame (101) or the adjustable conveyor frame (102).

6. An IPA cleaning machine according to claim 5, characterized in that: The workbench (500) has crossbeams fixed on both sides of its top. The three-axis displacement mechanism (200) includes a transverse drive cylinder (201) installed on the top of one of the crossbeams. A transverse displacement plate (202) is fixed to the output end of the transverse drive cylinder (201). The transverse displacement plate (202) is slidably connected to the top of the other crossbeam. A longitudinal drive cylinder (203) is installed on the transverse displacement plate (202). A longitudinal displacement plate (204) is fixed to the output end of the longitudinal drive cylinder (203). The longitudinal displacement plate (204) is slidably connected to the transverse displacement plate (202). A vertical drive cylinder (205) is installed on the longitudinal displacement plate (204). A vertical displacement plate (206) is installed to the output end of the vertical drive cylinder (205). The vertical displacement plate (206) is slidably connected to the longitudinal displacement plate (204).

7. An IPA cleaning machine according to claim 6, characterized in that: The adjusting screw (320) has several locking grooves (326) on its outer periphery, and the third gear (319) has several locking strips that match the locking grooves (326) on its inner side. The third gear (319) is engaged with the adjusting screw (320) and slidably connected through the engagement of the locking strips with the locking grooves (326).

8. An IPA cleaning machine according to claim 7, characterized in that: The workbench (500) is provided with a winding mechanism (400) at one end. The winding mechanism (400) includes a support frame (404) installed on the unwinding roller (303) and the take-up roller (304). A spring (406) is fixed at the bottom of the support frame (404). A positioning rod (405) abuts against the lower part of the spring (406). Several positioning holes are opened at the ends of the unwinding rod (301) and the take-up rod (302). The bottom end of the positioning rod (405) is inserted into the inner side of the corresponding positioning hole. A winding frame (405) is rotatably connected to the top end of the workbench (500). 1) The two ends of the roll changing frame (401) near the unwinding rod (301) and the winding rod (302) are respectively fixed with a first roll changing rod (402) and a second roll changing rod (403) corresponding to the unwinding rod (301) and the winding rod (302). The first roll changing rod (402) and the second roll changing rod (403) are provided with a plurality of insertion holes that match the positioning rod (405) on the end away from the unwinding rod (301). A turntable (408) is fixed in the middle of the side of the roll changing frame (401) away from the first roll changing rod (402).

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