Vacuum valve

Abstract

A vacuum valve for a medium vacuum system, a high vacuum system, and / or an ultra-high vacuum system, the vacuum valve comprising: a valve housing defining a passage connecting a first opening and a second opening of the valve housing; a valve body and a complementary base, the valve body comprising a valve shaft extending in an axial direction and actuatable to move the valve body between an open position and a closed position in which the valve body cooperates with the base to hermetically close the passage; and a locking unit configured to fix the valve body in a locked position, where the locking unit includes a locking mechanism configured to urge the at least one locking element in a radial direction toward the valve shaft upon actuation of the locking unit to assume a locked position, the radial direction being disposed in a plane perpendicular to the axial direction.

Description

Technical Field

[0001] This invention relates to a vacuum valve for medium vacuum systems, high vacuum systems and / or ultra-high vacuum systems. Background Art

[0002] Medium vacuum systems, high vacuum systems, and ultra-high vacuum systems are used in many technical fields and industrial or scientific applications. This type of vacuum (especially in the 100 to 1000 vacuum range) is crucial for high-vacuum systems. -9 Vacuum conditions within the Pa range place very high demands on the design of components used in such systems. In particular, valves in such systems must meet high standards because they must be able to reliably prevent gas leakage when in a closed condition.

[0003] Vacuum systems are typically subject to occupational safety procedures. In particular, it is important to reliably secure the system in its defined condition during maintenance, storage, or transportation. For this purpose, lock-in-calibration systems are provided, which ensure that all components of the vacuum system that may be hazardous to employees are isolated, locked, and calibrated. Lock-in-calibration systems are generally not used during the expected operation of the vacuum system.

[0004] Valves are important components of vacuum systems. The purpose of this invention is to provide a vacuum valve that reliably provides the aforementioned functions. Summary of the Invention

[0005] According to one aspect of the invention, a vacuum valve for medium vacuum systems, high vacuum systems, and / or ultra-high vacuum systems is provided. The vacuum valve includes: a valve housing defining a passage connecting a first opening and a second opening of the valve housing; a valve body and a complementary base. The valve body includes a valve shaft extending axially and actuated to move the valve body between an open position and a closed position, wherein the valve body, in the closed position, engages with the base to hermetically close the passage. Furthermore, a locking unit is provided, configured to secure the valve body in a locked position, wherein the locking unit includes a locking mechanism configured to, upon actuation of the locking unit, push at least one locking element radially toward the valve shaft to present the locked position, the radial direction being disposed in a plane perpendicular to the axial direction.

[0006] The locking unit ensures that the valve body is reliably held in the locked position. In this state, the user can perform maintenance on the vacuum system, for example, without worrying about the valve body changing its position. Locking the valves in the vacuum system may also be important during system transport or storage.

[0007] Further embodiments are given in the claims, description and drawings.

[0008] The valve body can be actuated by the linear or rotary motion of the valve shaft.

[0009] According to one embodiment of the invention, when the valve body is in the locked position, there is a form-fit connection between the locking element and the valve shaft. This form-fit connection is particularly reliable.

[0010] Alternatively, when the valve body is in the locked position, there is a friction connection between the locking element and the valve shaft. With only a friction connection provided, the locking position of the locking element can be freely selected because it is not necessary to align any parts. Furthermore, the friction connection can be released relatively easily.

[0011] According to one embodiment of the invention, the locking element is configured to apply a clamping force to the valve shaft when the locked mechanism pushes it toward the valve shaft. The clamping force ensures that the valve body is reliably fixed in the locked position.

[0012] According to one embodiment of the invention, the locking unit is actuated by means of a rotatable actuating element. The actuating element can be configured for manual operation. For example, the actuating element is a handle or a screw head.

[0013] According to one embodiment of the invention, the locking unit includes a conversion mechanism disposed between the actuating element and the locking mechanism, and configured to convert the rotational motion of the actuating element into linear motion of the locking mechanism. The linear motion of the locking mechanism can occur axially or radially. The expression "disposed between" can mean: "partially disposed between," i.e., the conversion mechanism is geometrically or spatially located between the actuating element and the locking mechanism; and / or "functionally disposed between," i.e., the conversion mechanism is located in the force flow between the actuating element and the locking mechanism. The conversion mechanism ensures efficient energy transfer from the actuating element to the locking mechanism.

[0014] To precisely adjust the position of the locking mechanism, the conversion mechanism may include a threaded connection. In particular, the threaded connection enables the conversion mechanism's movement to be converted into a smaller movement of the locking mechanism.

[0015] Threaded connections may include an actuating shaft having threads (preferably external threads). The actuating shaft may have a cylindrical shape.

[0016] According to one embodiment of the present invention, the actuation shaft and the valve shaft are arranged coaxially.

[0017] According to one embodiment of the invention, the locking unit includes a hollow shaft having threads that engage with the actuation shaft.

[0018] For particularly slender designs, the hollow shaft and valve shaft can be arranged coaxially. The hollow shaft can be securely fixed to the valve body, or it can be an integral part of it.

[0019] According to one embodiment of the invention, the locking element is pushed against the inner surface portion of the valve shaft by the locking mechanism when the locking unit is actuated. For example, the locking element includes at least one, preferably two or more, grippers that are pressed against the inner surface portion of the valve shaft when the locking unit is actuated. Such grippers are easy to operate and inexpensive.

[0020] According to one embodiment of the invention, in order to provide a particularly stable locked position, at least a portion of the locking element is moved by the locking mechanism into a recess provided on the valve shaft when the locking unit is actuated. For example, the locking element is at least partially moved into one or more pins, one or more locking balls, or cam members in the recess. The recess may be located on the inner side of the valve shaft. However, a design in which the recess is located on the outer side of the valve shaft may also be used.

[0021] According to one embodiment of the invention, the locking mechanism includes at least one inclined surface configured to mate with a complementary inclined surface or spherical surface of the locking element. For example, the locking mechanism (preferably, the actuation shaft) includes a tapered portion configured to mate with a complementary inclined surface of the locking element (e.g., the inner surface of a gripper, the complementary inclined surfaces of one or more pins, and / or the spherical surfaces of one or more locking balls). The inclined and / or spherical surfaces enable a uniform thrust acting on the locking element.

[0022] According to one embodiment of the invention, the locking element is pushed against the outer surface portion of the valve shaft by the locking mechanism upon actuation of the locking unit. This design is particularly compact and cost-effective. For example, the locking element is or includes a support clamp that can be secured around the valve shaft by operating the actuating element.

[0023] According to one embodiment of the invention, the actuation shaft extends radially, which reduces the axial dimension of the vacuum valve.

[0024] According to one embodiment of the invention, the actuation shaft and the valve shaft extend perpendicularly to each other.

[0025] According to one embodiment of the invention, the locking unit includes a reset mechanism configured to move the locking element from a locked position to an unlocked position, specifically, to move the locking element radially away from the valve shaft. The reset mechanism facilitates the release of the valve body from its locked position. For example, the reset mechanism includes a resilient element. When the valve body is in the locked position, the resilient element may be in a prestressed state.

[0026] According to one embodiment of the invention, at least one component of the locking unit is fixed to the valve housing. For example, a hollow shaft is fixed to the valve housing.

[0027] According to one embodiment of the invention, the locked position corresponds to an open or closed position of the valve body. The locked position can be an open position (e.g., to provide access for maintenance) or a closed position (e.g., to maintain a vacuum in the system during maintenance, transport, or storage of the valve body). The locked position can also be an intermediate position.

[0028] According to one embodiment of the present invention, a vacuum valve includes an electromechanical actuation unit for actuating a valve body. The actuation unit may include an electric motor and a mechanical conversion unit, the mechanical conversion unit having an input portion drivably connected to the electric motor and an output portion drivably connected to the valve body, wherein the mechanical conversion unit converts the rotational output of the electric motor into linear motion of the output portion to move the valve body axially. The output portion may include a nut element connected to the valve shaft. This electromechanical actuation unit can be very compact and allows for the efficient conversion of electrical energy input into actuating motion of the valve body.

[0029] Pneumatic and / or hydraulic actuation units can also be provided.

[0030] According to one embodiment of the invention, the vacuum valve includes at least one position sensor for detecting the relative position of the output section and / or the valve body and / or other components connected to the valve body relative to the valve housing. This sensor particularly allows for closed-loop control because the data provided by the sensor can be used to control the actuation unit.

[0031] The position sensor can be an encoder, an optical sensor, a Hall effect-based sensor, or any other suitable sensor.

[0032] Information regarding the location of the output section and / or the valve body and / or other components connected to the valve body (e.g., pistons in hydraulic or pneumatic systems) allows for the determination and, if necessary, adjustment of the corresponding actuation unit. The valve body can also be easily positioned in a desired intermediate position to control the airflow dynamics in the vacuum system, such as influencing, suppressing, or enhancing pressure-time curves, pressure peaks, gas flow rates, flow-induced debris generation and movement, and pump inlet pressure.

[0033] As an alternative to or addition to sensors, passive indicators (such as markers) can be provided. For example, a transparent window with ruler lines can be provided in the valve housing to visually determine the relative position of the valve body directly and / or indirectly via the position of the component connected to the valve body.

[0034] According to one embodiment of the invention, the vacuum valve includes an active sensor for determining that the valve body is in a locked position. The sensor may be a torque sensor, a pressure sensor, or any other suitable sensor actively engaged with the actuating element and / or the valve base. Attached Figure Description

[0035] Figure 1A A first embodiment of a vacuum valve is shown.

[0036] Figure 1B It shows according to Figure 1A The cross-section of the vacuum valve.

[0037] Figure 1C It shows Figure 1B A magnified view of a portion of it.

[0038] Figure 2A A second embodiment of the vacuum valve is shown in cross-section.

[0039] Figure 2B It shows Figure 2A A magnified view of a portion of it.

[0040] Figure 3 A cross-section of a third embodiment of the vacuum valve is shown.

[0041] Figure 4A A fourth embodiment of the vacuum valve is shown.

[0042] Figure 4B It shows according to Figure 4A The cross-section of the vacuum valve.

[0043] Figure 4C It shows Figure 4B A magnified view of a portion of it. Detailed Implementation

[0044] Figure 1A and Figure 1B A vacuum valve 10 according to a first embodiment of the present invention is shown. The vacuum valve 10 includes a valve housing 12, which in turn includes a top member 13 and a separate bottom member 15, the top member 13 and the separate bottom member 15 being hermetically connected to each other via a flange connection 11 including a seal 37. However, it is also conceivable that the valve housing 12 be designed as a single unit. The top member 13 defines passages for connecting a first opening 14 and a second opening 16 of the valve 10 (see...). Figure 1B Both openings 14 and 16 include flange portions 22a and 22b, which allow the vacuum valve 10 to be integrated into a medium vacuum system, a high vacuum system, or an ultra-high vacuum system.

[0045] The top member 13 also defines a base 20 for the valve body 18 of the vacuum valve 10. The valve body 18 has a substantially triangular cross-sectional shape and includes a recess in which a seal 17 is disposed. Figure 1BIn the closed position of the valve body 18 shown, the seal 17 mates with the base 20 to close the first opening 14, thereby sealing the passage in an airtight manner. The seal 17 can be a conventional O-ring or a so-called "low-force seal," i.e., a seal that can be properly compressed by applying a relatively small force and / or already has sealing properties under low force.

[0046] The valve body 18 is screwed onto a valve shaft 24 extending axially along A. Alternatively, the valve body 18 and the valve shaft 24 may be designed as a single unit (not shown). The valve shaft 24 includes a hollow portion 25, which is partially disposed within a chamber 21 defined by the top member 13 of the valve housing 12.

[0047] Valve shaft 24 is fixed to piston 19 of pneumatic actuation unit 35. Piston 19 can move axially A within a chamber 23 defined by bottom member 15 of valve housing, such that valve shaft 24 is actuated to move valve body 18 between an open position and a closed position as shown in the figure. When valve shaft 24 moves axially A via piston 19, a corrugated portion 27 supported by axial protrusion 29 of valve shaft 24 and intermediate member 11 of valve housing 12 is stretched or compressed. Corrugated portion 27 may have elastic characteristics supporting the closure of valve 10. It is even conceivable to provide a spring-like corrugated portion 27 that automatically closes valve 10 in the event of failure of actuation unit 35.

[0048] Vacuum valve 10 includes a position sensor (not shown) for determining the relative position of piston 19 with respect to valve housing 12, and thus the relative position of valve body 18. The position sensor may be an encoder, an optical sensor, a Hall effect-based sensor, or any other suitable sensor. Alternatively, for example, a transparent window with markings (also not shown) may be provided in valve housing 12 for visually determining the relative position of valve body 18.

[0049] The distal end 31 of the actuation shaft 56 protrudes into the end of the hollow portion 25 of the valve shaft 24 located opposite to the valve body 18. The actuation shaft 56 has a generally cylindrical shape and includes an external thread 58 that mates with the internal thread 60 of the hollow shaft 44, which is fixed to the bottom member 15 of the valve housing 12. However, it is also conceivable that the hollow shaft 44 is integrally part of the bottom member 15 of the valve housing 12. The actuation shaft 56, the hollow shaft 44, and the valve shaft 24 are arranged coaxially and extend along the axial direction A.

[0050] The actuation shaft 56 can be moved along axis A by means of a rotatable actuation element 32. In the example shown, the actuation element 32 is a handle 71, which can be manually rotated about axis A to further screw the actuation shaft 56 into or away from the hollow shaft 44 due to the interaction of threads 58, 60. The actuation shaft 56 is inserted into the hollow portion 39 of the actuation element 32. It should be understood that the handle 71 is merely an example, and the actuation element 32 can also be implemented by electromechanical components for automatically controlling the position of the actuation shaft 56.

[0051] As in Figure 1C As can be seen in more detail below, when the actuating element 32 is operated to cause the actuating shaft 56 to move axially A relative to the hollow shaft 44 and the valve shaft 24 (in... Figure 1C When moving from center to right, at a certain point, the tapered portion 46 located at the distal end 31 of the actuation shaft 56 contacts the complementary inclined surface 41 of the locking element 30. The locking element 30 includes a gripper 34. The gripper 34 and the hollow shaft 44 can be designed as a single unit. However, it is also possible for the gripper 34 to be a separate component connected to the hollow shaft 44. The connection between the gripper 34 and the shaft 44 ensures that the gripper 34 does not move substantially relative to the shaft 44 along the axial direction A.

[0052] As the actuating shaft 56 moves further within the hollow shaft 44 and the valve shaft 24 (not shown), the tapered portion 46 pushes the gripper 34 radially toward the inner surface portion 36 of the hollow portion 25 of the valve shaft 24, creating a frictional connection between the gripper 34 and the valve shaft 24. In other words, the locking element 30 is clamped to the valve shaft 24. In this locked position, the frictional connection secures the valve shaft 24 to the valve housing 12 via the locking element 30, the actuating shaft 56, and the hollow shaft 44, and thus secures the valve body 18 to the valve housing 12.

[0053] Devices can be provided for determining the attachment point (i.e., for verifying the locked position of the locking element 30) where the actuating shaft 56 has moved sufficiently far into (or toward) the valve shaft 24. For example, the actuating element 32 is equipped with a torque sensor (not shown) for this purpose. The angular position of the actuating element 32 relative to the housing 12 can also be an indication of the locked / unlocked state of the valve body 18.

[0054] Actuating element 32, actuating shaft 56, hollow shaft 44, and locking element 30 are part of locking unit 26, wherein the tapered portion 46 of actuating shaft 56 serves as locking mechanism 28. The external thread 58 of actuating shaft 56 and the internal thread 60 of hollow shaft 44 together form a conversion mechanism 54 for converting the rotational motion of actuating element 32 into linear motion of locking mechanism 28.

[0055] exist Figure 2A and Figure 2BThe vacuum valve 10 according to the second embodiment of the present invention shown in the figure is compared with the reference. Figures 1A to 1C The main difference in the described vacuum valve 10 is that the locking element 30 includes one or more pins 38 instead of grippers 34. The pins 38 are located inside the distal section 42 of the hollow shaft 44.

[0056] A recess 40 for receiving pin 38 in the locked position is formed on the inner surface of the hollow portion 25 of valve shaft 24. The dimensions of the recess 40 are complementary to the dimensions of pin 38. Pin 38 is characterized by an inclined surface 41 that is complementary to the tapered portion 46 of actuation shaft 56. The distal section 42 of hollow shaft 44 has an inclined inner surface 43 that is also complementary to the tapered portion 46 of actuation shaft 56. It is conceivable that a supporting clamping force is generated when shaft 56 presses against surface 43 by a portion of the outwardly bent section 42. However, the internal dimensions of the end section 42 can be configured such that surface 43 and portion 46 do not interact, or the end section forms a mechanical stop that restricts the axial movement of shafts 44, 56.

[0057] As the actuating shaft 56 moves axially A into the hollow shaft 44 and valve shaft 24, the pin 38 moves radially outward through the tapered portion 46 until the tapered portion 46 contacts the inclined inner surface 43 of the hollow shaft 44. In this locked position, at least a portion of the pin 38 is located inside the recess 40, while the remainder of the pin 38 is located within the hollow shaft 44. As a result, the valve shaft 24 is secured to the hollow shaft 44.

[0058] Figure 3 The vacuum valve 10 according to the third embodiment of the present invention shown in the figure is compared with the reference. Figure 2A and Figure 2B The main difference in the described vacuum valve 10 is that the locking element 30 includes one or more locking balls 62 instead of one or more pins 38. The locking balls 62 are located inside the distal section 42 of the hollow shaft 44.

[0059] exist Figure 3 In the locking position shown, the central portion of the locking ball 62 is located inside the through hole 64 of the hollow shaft 44, while the portion of the ball 62 extending beyond the through hole 64 (i.e., the portion extending beyond the outer surface of the hollow shaft 44) contacts the concave surface 70 of the locking shoulder 66 of the valve shaft 24. Thus, the hollow shaft 44 cannot move further in the axial direction A into the hollow portion 25 of the valve shaft 24.

[0060] The remaining portion of sphere 62 located inside the hollow shaft 44 comes into contact with the inclined surface 46 of the actuation shaft 56. The concave surface 70 is complementary to the spherical surface of sphere 62. It can also be a flat and / or inclined surface. Surface 70 is optional.

[0061] The diameter of the through hole 64 substantially corresponds to the diameter of the ball 62, such that the hollow shaft 44 has virtually no room to move in the locked position. The through hole 64 may converge radially outward or have a contraction to restrict the movement of the ball 62 in the outward direction.

[0062] Additionally, the actuation shaft 56 is characterized by a cylindrical tip portion 68 that extends from the tapered portion 46 to hold the ball 62 in place. It will be understood, of course, that the cylindrical tip portion 68 is optional.

[0063] Furthermore, the valve shaft 24 may be characterized by its orientation towards Figure 3 The second locking shoulder (not shown) of the locking shoulder 66 is used to lock the hollow shaft 44 in both axial directions relative to the valve shaft 24.

[0064] In reference respectively Figure 1A In the first, second, and third embodiments of the present invention described up to Figure 4, a friction connector or form-fit connector for fixing the valve body 18 in the locked position is formed on the inner surface portion 36 of the valve shaft 24. However, it is also conceivable that in this configuration, one or both of the connectors are formed on the outer surface portion of the valve shaft 24.

[0065] Figures 4A to 4C The vacuum valve 10 shown according to the fourth embodiment of the present invention and the reference are shown. Figures 1A to 3 The difference in the vacuum valve 10 shown is that the locking unit 26 includes a bracket clamp 33 that can be tightened around the valve shaft 24 by means of an operating screw 47. Figure 4C The bracket clamp 33 in the locked position is shown. The bracket clamp 33 extends at least partially in the circumferential direction of the shaft 24 and is arranged coaxially with the valve shaft 24. At least a portion of the bracket clamp 33 is secured to the valve housing 12 such that the clamp 33 provides an anchoring point for the valve shaft 24 when the clamp 33 is locked.

[0066] The screw 47 includes: a screw head / actuating element 32, which can be operated by a screwdriver or the like; a screw body / actuating shaft 56 having an external thread 58 that cooperates with the internal thread (not shown) of the valve housing 12 and / or the bracket clamp 33; and a distal surface of the actuating shaft 56 as a locking mechanism 28. When the actuating shaft 56 is rotated by operating the actuating element 32, the locking mechanism 28 pushes the bracket clamp 33 toward the outer surface portion 52 of the valve shaft 24. In this locked position, a clamping force F acts on the valve shaft 24 and creates a frictional connection between the bracket clamp 33 and the valve shaft 24.

[0067] As an addition or alternative, the locking unit 26 can be implemented using a collate clamp, a shutter clamp, and / or an iris clamp (not shown). Additionally, two or more clamps can be arranged around the valve shaft 24 along axial direction A.

[0068] The vacuum valve 10 according to an embodiment of the invention includes a reset mechanism for moving the locking element 30 radially away from the valve shaft 24. For example, the reset mechanism includes an elastic member (not shown) disposed between the base of the recess 40 and the pin 38. However, the reset mechanism may also be formed by the (support) clamp 33 itself, wherein such clamp is pre-tensioned such that the clamp opens when the actuation shaft 56 moves away from the valve shaft 24.

[0069] The different locking concepts described above can be combined. For example, vacuum valve 10 can be equipped with jaws 34, pins 38 and / or (bracket) clamps to make vacuum valve 10 more reliable.

[0070] Figure Labels 10 Vacuum Valves 11 Flange Connections 12 valve housing 13 Top Components 14 First Opening 15 Bottom Components 16 Second opening 17 Seals 18 valve body 19 Pistons 20 bases 21 chambers Flange sections 22a and 22b 23 chambers 24 valve shaft 25 Hollow Section 26 locking units 27 wave nodes 28 Locking Institutions 29 axial protrusions 30 locking elements 31 remote 32 actuators 33-bracket clamp 34 grippers 35 Actuation Units 36 Inner Surface Part 37 Seals 38 sales 39 Hollow Section 40 recesses 41 bevel 42 distal portion 43 Inclined inner surface 44 hollow shaft 45 screw 46 conical sections 47 screws 52 Outer Surface Part 54 Conversion Mechanism 56 Actuation Shaft 58 thread 60 thread 62 locked ball 64 through holes 66 Lock shoulder 68 cylindrical tip section 70 concave / bevel 71 controller Axial axis R radial F clamping force

Claims

1. A vacuum valve (10) for use in medium vacuum systems, high vacuum systems, and / or ultra-high vacuum systems, said vacuum valve (10) comprising: Valve housing (12), the valve housing defining a passage connecting a first opening (14) and a second opening (16) of the valve housing (12), A valve body (18) and a complementary base (20), the valve body (18) including a valve shaft (24) extending axially (A) and actuable to move the valve body (18) between an open position and a closed position, wherein the valve body (18) in the closed position engages with the base (20) to hermetically close the passage, and A locking unit (26) is configured to fix the valve body (18) in a locked position, wherein the locking unit (26) includes a locking mechanism (28) configured to push at least one locking element (30) radially (R) toward the valve shaft (24) to present a locked position when the locking unit (26) is actuated, the radial direction (R) being disposed in a plane perpendicular to the axial direction (A).

2. The vacuum valve (10) according to claim 1. in, When the valve body (18) is in the locked position, there is a form-fit connection between the locking element (30) and the valve shaft (24).

3. The vacuum valve (10) according to claim 1 or 2. in, When the valve body (18) is in the locked position, there is a frictional connection between the locking element (30) and the valve shaft (24).

4. The vacuum valve (10) according to any one of the preceding claims. in, The locking element (30) is configured to apply a clamping force (F) to the valve shaft (24) when it is pushed toward the valve shaft (24) by the locking mechanism (28).

5. The vacuum valve (10) according to any one of the preceding claims. in, The locking unit (26) is actuated by means of a rotatable actuating element (32), wherein, in particular, the actuating element (32) is configured to be manually operated.

6. The vacuum valve (10) according to claim 5. in, The locking unit (26) includes a conversion mechanism (54) disposed between the actuating element (32) and the locking mechanism (28) and configured to convert the rotational motion of the actuating element (32) into the linear motion of the locking mechanism (28). In particular, the conversion mechanism (54) includes a threaded connection (58, 60), specifically an actuating shaft (56) having a thread, preferably an actuating shaft (56) having an external thread (58).

7. The vacuum valve (10) according to claim 6. in, The actuation shaft (56) and the valve shaft (24) are arranged coaxially.

8. The vacuum valve (10) according to claim 6 or 7. in, The locking unit (26) includes a hollow shaft (44) having a thread (60) that engages with the actuation shaft (56), and in particular, the hollow shaft (44) and the valve shaft (24) are arranged coaxially.

9. The vacuum valve (10) according to any one of the preceding claims. in, The locking element (30) is pushed by the locking mechanism (28) against the inner surface portion (36) of the valve shaft (24) when the locking unit (26) is actuated.

10. The vacuum valve (10) according to any one of the preceding claims. in, At least a portion of the locking element (30) moves into the recess (40) provided on the valve shaft (24) via the locking mechanism (28) when the locking unit (26) is actuated.

11. The vacuum valve (10) according to any one of the preceding claims. in, The locking mechanism (28) includes at least one inclined surface, particularly a tapered portion (46), the at least one inclined surface being configured to engage with a complementary inclined surface and / or a spherical surface of the locking element (30).

12. The vacuum valve (10) according to any one of claims 1 to 6. in, When the locking unit (26) is actuated, the locking element (30) is pushed by the locking mechanism (28) toward the outer surface portion (52) of the valve shaft (24), in particular, wherein the actuation shaft (56) extends in the radial direction (R).

13. The vacuum valve (10) according to any one of the preceding claims. in, The locking unit (26) includes a reset mechanism configured to move the locking element (30) from the locked position to the unlocked position, specifically, to move the locking element (30) radially (R) away from the valve shaft (24), and specifically, the reset mechanism includes an elastic element.

14. The vacuum valve (10) according to any one of the preceding claims. in, At least one component of the locking unit (26) is fixed to the valve housing (12).

15. The vacuum valve (10) according to any one of the preceding claims. in, The locked position corresponds to the open position or the closed position of the valve body (18).

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