Self-cooling bulb assembly and laser maintaining light source

Abstract

The invention provides a self-cooling bulb assembly and a laser maintaining light source, and belongs to the field of semiconductor light sources. The bulb assembly comprises a bulb body, an electrode, a bulb cooling unit and a bulb supporting unit; the bulb body comprises an ellipsoidal bulb body and lamp tube bodies, and the two electrodes are inserted into the corresponding lamp tube bodies; the bulb cooling unit sleeves the peripheries of the two lamp tube bodies of the bulb body in a non-contact manner and provides cooling towards the ellipsoidal bulb body, and the bulb supporting unit supports and fixes electrodes at the two ends of the bulb body; the laser maintaining light source comprises a light source bulb, an arc striking assembly, a laser supply module, a reflector, a light outlet window set, a light trap assembly, a pumping and draining adapter, an infrared temperature detection assembly, a light source internal pressure sensor, a light source controller and a light source shell. The bulb assembly can be well self-cooled, wide-spectrum illumination can be stably output, and popularization and application in the fields of wafer quantity detection, overlay alignment quantity detection and photoetching machining are facilitated.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor light sources, specifically relating to a self-cooling bulb assembly and a laser-maintained light source. Background Technology

[0002] In wafer quality control and photolithography processes, the light source is of paramount importance. Traditional LED light sources lack sufficient energy; existing halogen light sources and laser-supplied plasma (LSP) light sources generate a lot of heat, have poor cooling effects, and their internal pressure varies with temperature, resulting in poor stability. Therefore, a stable and continuous broadband light source is needed. Summary of the Invention

[0003] In order to overcome the shortcomings of the prior art, the present invention aims to provide a self-cooling bulb assembly and a laser sustaining light source, which can solve the above-mentioned problems.

[0004] A self-cooling bulb assembly includes a bulb body, electrodes, a bulb cooling unit, and a bulb support unit. The bulb body includes an ellipsoidal bulb and two lamp tubes, which are symmetrically connected to the two ends of the ellipsoidal bulb. Two electrodes are inserted into the corresponding lamp tubes. The bulb cooling unit is non-contactly sleeved onto the periphery of the two lamp tubes of the bulb body and provides cooling toward the ellipsoidal bulb. The bulb support unit supports and fixes the electrodes at both ends of the bulb body.

[0005] Furthermore, the lamp tube body is a stepped tube, with a small-diameter outer tube section used to connect and fix the electrode, and a large-diameter inner tube section used to transition and connect the ellipsoidal bulb.

[0006] Furthermore, the outer tube section of the electrode is controllably electrically connected to the high-voltage line assembly for arc ignition via electrode terminals consisting of an electrode tip and a copper lug.

[0007] Furthermore, the bulb cooling unit includes an insulating heat dissipation sleeve, a cooling rod, and an external cooling air source; the annular insulating heat dissipation sleeve is fitted onto the outer periphery of the large-diameter inner section of the lamp tube body, and heat dissipation holes are opened on the annular end face of the insulating heat dissipation sleeve facing the ellipsoidal bulb; a cooling channel is opened inside the cooling rod, and one end of the cooling rod is connected to the insulating heat dissipation sleeve, while the other end of the cooling rod is connected to the external cooling air source through the cooling channel.

[0008] Furthermore, cooling channels are opened inside the insulating heat dissipation sleeve, and the annular end face of the insulating heat dissipation sleeve facing the ellipsoidal bulb is designed with an arc-shaped surface and / or a slope. Heat dissipation holes with different spray angles are opened in an annular matrix on the annular end face, and the spray coverage of all heat dissipation holes of the same insulating heat dissipation sleeve is half of the ellipsoidal bulb.

[0009] Furthermore, the bulb support unit uses an adapter terminal and / or an adapter cap, both of which are made of insulating and heat-resistant materials.

[0010] This invention also provides a laser sustaining light source, comprising a light bulb, an arc-initiating assembly, a laser supply module, a reflector, a light-emitting window assembly, a light trap assembly, a pump-out adapter, an infrared temperature detection assembly, a light source internal pressure sensor, a light source controller, and a light source housing. The light bulb uses the aforementioned bulb assembly. The arc-initiating assembly is connected to the two poles of the bulb assembly, providing instantaneous high voltage to excite the inert gas inside the bulb assembly to achieve arc initiation. The laser supply module provides pump laser from below to the bulb assembly to maintain the plasma that generates broadband light. The reflector and the light-emitting window assembly are arranged opposite each other on the front and rear sides of the bulb assembly, and the reflector converges and reflects the broadband light facing away from the light-emitting window assembly back towards the light-emitting window assembly. The light trap assembly is arranged above the bulb assembly to absorb stray light. The pump-out adapter is connected to an external pump-out assembly to remove harmful gases or dust generated inside the light source. The infrared temperature detection assembly is used to monitor the surface temperature of the bulb body in real time. The light source internal pressure sensor is used to monitor the gas pressure inside the light source. The light source controller is used to control the switching of the light source, adjust the light source parameters, and control the environment. The light source housing supports the entire light source.

[0011] Compared with the prior art, the beneficial effects of the present invention are as follows: the bulb assembly of this application can be self-cooled and can stably output broadband light, which is convenient for its application in the fields of wafer quantity inspection, overlay alignment quantity inspection and photolithography. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of a self-cooling bulb assembly according to the present invention; Figure 2 for Figure 1 Exploded view; Figure 3 This is a schematic diagram of a laser-based light source.

[0013] In the picture: 10. Light source: light bulb; 11. Bulb body; 111. Ellipsoidal bulb; 112. Lamp tube body; 12. Electrodes; 13. Bulb cooling unit; 131. Insulating heat dissipation sleeve; 1311. Heat dissipation holes; 132. Cooling support rod; 14. Electrode terminals; 15. Adapter terminal; 16. Adapter cap; 20. Arc-starting assembly; 30. Laser supply module; 40. Reflector; 50. Light-emitting window assembly; 60. Light trap components; 70. Drawer-out adapter; 80. Infrared temperature detection component; 90. Internal pressure sensor for the light source; 100. Light source controller; 110. Light source housing. Detailed Implementation

[0014] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0015] A self-cooling bulb assembly, see [link / reference] Figure 1 and Figure 2 The bulb assembly includes a bulb body 11, an electrode 12, a bulb cooling unit 13, and a bulb support unit.

[0016] Specifically: the bulb body 11 includes an ellipsoidal bulb 111 and a lamp tube body 112. The two lamp tube bodies 112 are symmetrically connected to the two ends of the ellipsoidal bulb 111, and the two electrodes 12 are inserted into the corresponding lamp tube bodies 112. The bulb cooling unit 13 is non-contactly sleeved onto the outer periphery of the two lamp tube bodies 112 of the bulb body 11 and provides cooling toward the ellipsoidal bulb 111. The bulb support unit supports and fixes the electrodes at both ends of the bulb body 11.

[0017] The lamp tube body 112 is a stepped tube, with a small-diameter outer tube section used to connect to the fixed electrode 12 and a large-diameter inner tube section used to transition to the ellipsoidal bulb 111.

[0018] The outer tube section of electrode 12 is electrically connected to the high-voltage line assembly for arc initiation via an electrode terminal 14 consisting of an electrode tip and a copper lug.

[0019] Electrode 12 is inserted into ellipsoidal bulb 111 from lamp body 112. The bulb body 11 is filled with inert gas (such as helium, neon, argon, krypton, xenon) or other gases, or combinations thereof, which are not limited here.

[0020] The bulb cooling unit 13 includes an insulating heat dissipation sleeve 131, a cooling rod 132, and an external cooling air source. The annular insulating heat dissipation sleeve 131 is fitted onto the outer periphery of the large-diameter inner section of the lamp tube body 112, and heat dissipation holes are opened on the annular end face of the insulating heat dissipation sleeve 131 facing the ellipsoidal bulb 111. A cooling channel is opened inside the cooling rod 132, and one end of the cooling rod 132 is connected to the insulating heat dissipation sleeve 131, while the other end of the cooling rod 132 is connected to the external cooling air source through the cooling channel.

[0021] Cooling channels are provided inside the insulating heat dissipation sleeve 131. The annular end face of the insulating heat dissipation sleeve 131 facing the ellipsoidal bulb 111 is designed with an arc-shaped surface and / or a slope. Heat dissipation holes 1311 with different spray angles are provided in an annular matrix on the annular end face. The spray coverage of all heat dissipation holes 1311 of the same insulating heat dissipation sleeve 131 is half of the ellipsoidal bulb 111.

[0022] The spray angles of the heat dissipation holes on different surfaces of the annular end face of the insulating heat dissipation sleeve 131 are different, and the spray coverage of the two sets of insulating heat dissipation sleeves 131 covers the entire ellipsoidal bulb 111.

[0023] Furthermore, heat dissipation holes 1311 are also formed on the inner ring surface of the insulating heat dissipation sleeve 131 to at least partially cover the lamp tube body 112 on the corresponding side. In a specific example, it mainly covers the large-diameter inner section of the lamp tube body 112.

[0024] The bulb support unit uses an adapter 15 and / or an adapter cap 16, both of which are made of insulating and heat-insulating materials.

[0025] In the specific example, the insulating heat dissipation sleeve 131, the cooling upright 132, the adapter end seat 15, and the adapter cap 16 are all made of ceramic.

[0026] The present invention also provides a laser sustaining light source, see [link to relevant documentation]. Figure 3 The laser sustaining light source includes a light source bulb 10, an arc ignition component 20, a laser supply module 30, a reflector 40, a light output window group 50, a light trap component 60, a draw-out adapter 70, an infrared temperature detection component 80, a light source internal pressure sensor 90, a light source controller 100, and a light source housing 110.

[0027] The light source bulb 10 uses the aforementioned bulb assembly; the arc ignition assembly 20 is connected to the two poles of the bulb assembly and provides instantaneous high voltage to excite the inert gas inside the bulb assembly to achieve arc ignition.

[0028] The laser supply module 30 provides a pump laser from below to the bulb assembly 10 to maintain the plasma that generates broadband light.

[0029] The reflector 40 and the light-emitting window group 50 are arranged opposite each other on the front and rear sides of the bulb assembly 10. The reflector 40 converges and reflects the broadband light facing away from the light-emitting window group 50 toward the light-emitting window group 50.

[0030] The light trap assembly 60 is positioned above the bulb assembly 10 to absorb stray light; the extraction adapter 70 is connected to an external extraction assembly to extract harmful gases or dust generated within the light source.

[0031] The infrared temperature detection component 80 is used to monitor the surface temperature of the bulb body 11 in real time.

[0032] The internal pressure sensor 90 is used to monitor the air pressure inside the light source.

[0033] The light source controller 100 is used to control the switching on and off of the light source, adjust the light source parameters, and control the environment.

[0034] The light source housing 110 is used to support the entire light source.

[0035] Currently, the laser sustaining light source of this application has been applied in the applicant's self-developed wafer bright field metrology (BFI) equipment, and will be promoted in dark field metrology (DFI) equipment and overlay metrology equipment in the future.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A self-cooling bulb assembly, characterized in that: The bulb assembly includes a bulb body (11), electrodes (12), a bulb cooling unit (13), and a bulb support unit; The bulb body (11) includes an ellipsoidal bulb (111) and a lamp tube body (112). The two lamp tube bodies (112) are symmetrically connected to the two ends of the ellipsoidal bulb (111). The two electrodes (12) are inserted into the corresponding lamp tube bodies (112). The bulb cooling unit (13) is non-contactly sleeved onto the outer periphery of the two lamp tube bodies (112) of the bulb body (11) and provides cooling toward the ellipsoidal bulb (111). The bulb support unit supports and fixes the electrodes at both ends of the bulb body (11).

2. The bulb assembly according to claim 1, characterized in that: The lamp tube body (112) is a stepped tube, with a small-diameter outer tube section used to connect the fixed electrode (12) and a large-diameter inner tube section used to transition to the ellipsoidal bulb (111).

3. The bulb assembly according to claim 1, characterized in that: The outer tube section of the electrode (12) is electrically connected to the high-voltage line assembly for arc initiation via an electrode terminal (14) consisting of an electrode tip and a copper lug.

4. The bulb assembly according to claim 1, characterized in that: The bulb cooling unit (13) includes an insulating heat dissipation sleeve (131), a cooling rod (132), and an external cooling air source. The annular insulating heat dissipation sleeve (131) is fitted onto the outer periphery of the large-diameter inner section of the lamp tube body (112), and heat dissipation holes are opened on the annular end face of the insulating heat dissipation sleeve (131) facing the ellipsoidal bulb (111). A cooling channel is opened inside the cooling rod (132), and one end of the cooling rod (132) is connected to the insulating heat dissipation sleeve (131), and the other end of the cooling rod (132) is connected to the external cooling air source through the cooling channel.

5. The bulb assembly according to claim 4, characterized in that: Cooling channels are opened inside the insulating heat dissipation sleeve (131). The annular end face of the insulating heat dissipation sleeve (131) facing the ellipsoidal bulb (111) is designed with an arc surface and / or a slope. Heat dissipation holes (1311) with different spray angles are opened in an annular matrix on the annular end face. The spray coverage of all heat dissipation holes (1311) of the same insulating heat dissipation sleeve (131) is half of the ellipsoidal bulb (111).

6. The bulb assembly according to claim 1, characterized in that: The bulb support unit uses an adapter (15) and / or an adapter cap (16), both of which are made of insulating and heat-insulating materials.

7. A laser sustaining light source, characterized in that: The laser sustaining light source includes a light source bulb (10), an arc ignition assembly (20), a laser supply module (30), a reflector (40), a light output window assembly (50), a light trap assembly (60), an extraction and output adapter (70), an infrared temperature detection assembly (80), a light source internal pressure sensor (90), a light source controller (100), and a light source housing (110). The light source bulb (10) adopts the bulb assembly described in any one of claims 1-6; the arc ignition assembly (20) is connected to the two poles of the bulb assembly to provide instantaneous high voltage to excite the inert gas in the bulb assembly to achieve arc ignition; the laser supply module (30) provides pump laser to the bulb assembly from below to maintain the plasma that generates broadband light; the reflector (40) and the light output window group (50) are arranged opposite to each other on the front and rear sides of the bulb assembly, and the reflector (40) converges and reflects the broadband light facing away from the light output window group (50) toward the light output window group (50); the light trap assembly (60) is arranged above the bulb assembly to absorb stray light; the extraction adapter (70) is connected to the external extraction assembly to extract harmful gases or dust generated in the light source; the infrared temperature detection assembly (80) is used to monitor the surface temperature of the bulb body (11) in real time; the light source internal pressure sensor (90) is used to monitor the gas pressure in the light source; the light source controller (100) is used to control the switching of the light source, the adjustment of the light source parameters and environmental control; the light source housing (110) is used to support the entire light source.

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