Five-axis laser ablation and spray modification integrated equipment

Abstract

The application discloses a kind of five-axis laser ablation and modification integrated equipment of spraying, including full-closed linkage five-axis laser ablation system, ultrasonic cleaning system and surface modification spraying system.Five-axis laser ablation system is divided into five-axis movement module, laser module and cleaning module, five-axis movement module realizes the adaptive processing of complex surface and cooperates multiple infrared sensing to overcome the defocusing problem of curved surface, laser module integrates air film cooling mechanism to inhibit thermal damage, cleaning module is combined with in-situ smoke filtration to adsorb ablation pollutants in real time, effectively improve environmental safety;Ultrasonic cleaning system transports processing materials and removes processing residues in depth through cavitation effect;Surface modification spraying system adopts controllable atomization process to construct functional coating.The application realizes the deep integration and automatic flow of electrical component super-hydrophobic surface integrated processing, solves the thermal damage and smoke pollution problem in processing process, effectively improves processing efficiency, equipment service life and environmental safety.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of laser micro-nano processing surface modification, in particular to an integrated laser ablation and surface spraying modification function super-hydrophobic surface integrated processing equipment. BACKGROUND

[0002] With the development of large-scale high-integration circuit technology, the heat generated by high-integration electronic components leads to the reduction of the efficiency of electronic systems, and in complex environments, it is easy to be affected by high-temperature water vapor, which has a very serious impact on its life. It will be a future strategy to equip electronic device components with super-hydrophobic properties and improve thermal conductivity. Laser ablation to prepare super-hydrophobic surface has been widely proven to be an effective means to solve these problems. By laser ablation, the micro-nano texture of the surface processing can be precisely controlled, the surface area of the electronic component can be increased, and the thermal conductivity efficiency can be improved; after chemical modification, the super-hydrophobic surface formed can resist the penetration of water vapor, thereby enhancing the overall performance of the electrical equipment.

[0003] The existing laser ablation equipment for preparing super-hydrophobic surface has obvious limitations. Specifically, it has a single function, needs to be manually operated with multiple devices, and cannot achieve integrated processing; the working area is mostly two-dimensional plane, lacking the need for processing complex surface parts such as curved surfaces. In addition, due to the lack of a cooling system, long-time operation causes the laser head and the surface temperature of the part to be too high, which is not conducive to the service life of the equipment and the limitation of the processing precision of the part; and the existing equipment is mostly open, and harmful smoke generated during the processing process is not treated. Due to these limitations, traditional laser equipment is difficult to meet the requirements of complex processing tasks and automation, and also affects the processing precision of the equipment and the health of the operators, thereby affecting the processing efficiency and safety. SUMMARY

[0004] In view of the deficiencies of the prior art, the purpose of the present application is to provide a five-axis laser ablation and spraying modification integrated equipment, which overcomes the poor adaptability and low automation of the existing equipment, and improves the processing precision and safety.

[0005] The technical problem of the present application is solved by the following technical scheme:

[0006] The five-axis laser ablation and spraying modification integrated equipment comprises a machine tool shell and a five-axis laser ablation system, an ultrasonic cleaning system and a surface modification spraying system installed in the machine tool shell;

[0007] The five-axis laser ablation system comprises a five-axis motion module, a laser module and a cleaning module;

[0008] The five-axis motion module comprises a first XYZ linear motion mechanism and a first rotary motion mechanism;

[0009] The laser module comprises a laser generator and a laser head; the laser head is provided with a ventilation nozzle at the bottom and an air hole channel communicated with the ventilation nozzle inside; the air hole channel of the laser head is connected with a first air pump through a pipeline to realize the cooling of the laser head and the surface of the workpiece during the ablation process.

[0010] The workpiece to be processed is placed on the first rotary motion mechanism, the first XYZ linear motion mechanism can drive the laser head to move above the workpiece in the X-axis and Z-axis directions, and drive the first rotary motion mechanism to move in the Y-axis direction, and simultaneously the first rotary motion mechanism can drive the workpiece to rotate in the XY-axis plane and the XZ-axis to facilitate the focusing of laser processing.

[0011] The cleaning module comprises a fan suction assembly for discharging the smoke generated by laser processing;

[0012] The ultrasonic cleaning system and the surface modification spraying system are sequentially arranged at the rear of the five-axis motion mechanism, and are used for sequentially performing ultrasonic cleaning and spraying-drying operations on the workpiece processed by laser.

[0013] The ultrasonic cleaning system comprises a material transportation module and an ultrasonic cleaning module; the material transportation module is used for transporting the workpiece processed by laser to the ultrasonic cleaning module for cleaning operation, and transporting the cleaned workpiece to the surface modification spraying system.

[0014] Further, the first XYZ linear motion mechanism comprises two parts, an upper part and a lower part; the upper part is a Z-axis ball screw assembly and an X-axis ball screw assembly mounted thereon, and the lower part is a Y-axis ball screw assembly; the three parts are respectively connected with a driving motor assembly;

[0015] The first rotary motion mechanism is mounted on the Y-axis ball screw assembly, and the laser module is mounted on the X-axis ball screw assembly;

[0016] The first rotary motion mechanism comprises a first Y-axis rotary mechanism and a first Z-axis rotary mechanism; the Y-axis ball screw assembly is used for driving the first Y-axis rotary mechanism to move in the Y-axis direction;

[0017] The first Y-axis rotary mechanism is used for driving the first Z-axis rotary mechanism to rotate, and the rotation axis thereof is parallel to the Y-axis;

[0018] The workpiece to be processed is placed on the first Z-axis rotary mechanism, and the first Z-axis rotary mechanism drives the workpiece to rotate, and the rotation axis thereof is parallel to the Z-axis.

[0019] Further, a Y-axis guide rail support plate is arranged on the Y-axis ball screw assembly, and the Y-axis rotary mechanism is fixedly arranged on the Y-axis guide rail support plate;

[0020] The first Y-axis rotating mechanism comprises a first rotating motor, a second coupling, a gear shaft, a double-row ball bearing, a rotating plate, a small end cover and a bottom plate, the first rotating motor is fixedly connected with the gear shaft through the second coupling, one side of the rotating plate is an internal gear hole, the internal gear hole is engaged with the gear of the gear shaft, and the gear shaft is fixed on the other side of the rotating plate through the small end cover and bolts, and the bottom plate is connected on the rotating plate through bolts.

[0021] Further, the Y-axis rotating mechanism is provided with a bottom plate, and the first Z-axis rotating mechanism is arranged on the bottom plate.

[0022] The first Z-axis rotating mechanism comprises a second rotating motor, a small pulley, a belt, a large pulley, a Z rotating shaft, a ball bearing and a thrust bearing, and a laser processing table, the output shaft of the second rotating motor is fixedly connected with the small pulley, the Z rotating shaft is fixedly connected with the large pulley and the laser processing table, the ball bearing and the thrust bearing are located between the bottom plate and the Z rotating shaft to ensure the normal rotation of the Z rotating shaft and the laser processing table, and the small pulley and the large pulley are connected through the belt to transmit the rotating motion of the second rotating motor to the laser processing table.

[0023] Further, the laser generator transmits the laser source to the laser head through an optical fiber, and the laser head comprises a fixed base, a laser head upper shell, a laser head lower shell and a protective mirror shell arranged in sequence from top to bottom.

[0024] The fixed base is mounted on the X-axis guide rail support plate of the X-axis ball screw assembly and connected with the laser head upper shell through bolts, the upper part of the laser head upper shell is internally provided with a transmission lens, the upper part of the laser head lower shell is internally provided with a lens and a lens holder, and the lower part of the laser head lower shell is externally provided with a plurality of infrared sensors, the self-adaptive focal length regulation and control of the processed parts are realized through the infrared sensors and the five-axis motion module, and the protective mirror shell is provided with a protective mirror at the lower part.

[0025] Further, the protective mirror shell is provided with a plurality of ventilation nozzles at the lower part, the laser head upper shell is internally provided with an L-shaped air hole channel and externally connected with a first air pump through a pipeline, the laser head lower shell and the protective mirror shell are internally provided with air hole channels, and the lens holder is externally provided with a spiral hole channel structure.

[0026] The first air pump introduces air into the L-shaped air hole channel of the laser head upper shell, the air passes through the spiral hole channel of the lens holder and the air hole channels of the laser head lower shell and the protective mirror shell in sequence to reach the ventilation nozzles, so as to cool the internal devices of the laser head to prolong the service life, and the ventilation nozzles act on the surface of the processed parts to reduce the surface temperature and improve the processing precision.

[0027] Further, the fan adsorption assembly comprises an adsorption assembly mounting shell, a baffle, an activated carbon adsorption net, a blast passage, a blower and an impeller, the activated carbon adsorption net and the baffle are mounted in the adsorption assembly mounting shell, the upper surface of the adsorption assembly mounting shell is connected with the blast passage, the impeller is arranged in the blast passage, the blower is connected with the impeller through a key groove, the blower drives the impeller to rotate to discharge the air in the blast passage and form a low pressure, the smoke and dust gas generated in the laser ablation process will pass through the baffle, the activated carbon adsorption net and the blast passage in sequence under the action of the air pressure and be discharged from the equipment, wherein the smoke and dust particles will be captured by the activated carbon adsorption net.

[0028] Further, the material transportation module comprises a second XYZ linear motion mechanism and a suction cup; the ultrasonic cleaning module comprises a solution storage and a liftable ultrasonic generator;

[0029] The second XYZ linear motion mechanism comprises a second X-axis linear motion mechanism, a second Y-axis linear motion mechanism and a second Z-axis linear motion mechanism, the second Z-axis linear motion mechanism comprises a first air cylinder and a piston rod at the lower end of the first air cylinder, the suction cup is connected with the piston rod through a thread, after the five-axis laser ablation system completes the machining, the workpiece is moved to the ultrasonic cleaning module by the second XYZ linear motion mechanism and the suction cup, and then is moved to the surface modification spraying system after the cleaning is completed.

[0030] Further, the solution storage comprises a cleaning liquid storage tank, a cleaning cylinder and a waste liquid cylinder, the cleaning liquid storage tank is connected with the cleaning cylinder through a special pipeline, the special pipeline is provided with an electromagnetic valve for controlling the flow of the cleaning liquid into the cleaning cylinder, the bottom of the cleaning cylinder is provided with a concave groove and a waste liquid through hole in communication, and the waste liquid at the bottom of the cleaning cylinder flows into the waste liquid pipeline through the waste liquid through hole and is collected by the waste liquid cylinder;

[0031] The liftable ultrasonic generator comprises a second air cylinder, an ultrasonic transducer and a cleaning table, the second air cylinder is connected with the end of the cleaning table through a bolt, the ultrasonic transducer is fixed in the inside of the cleaning table and externally connected with the ultrasonic generator, the cleaning of the workpiece is realized by applying the cavitation effect to the cleaning liquid, and the lower surface of the cleaning table has a convex structure corresponding to the concave groove at the bottom of the cleaning cylinder;

[0032] When the workpiece is cleaned, the material transportation module carries the workpiece to the cleaning table, the second air cylinder is retracted, the convex structure of the cleaning table is closely combined with the concave groove at the bottom of the cleaning cylinder and blocks the waste liquid through hole, so that the cleaning liquid in the cleaning cylinder is prevented from leaking, then the cleaning liquid in the cleaning liquid storage tank enters the cleaning cylinder and completely immerses the workpiece to perform the cleaning work, the second air cylinder is extended to cause the cleaning table to be lifted after the cleaning is completed, and the cleaning liquid flows into the waste liquid cylinder through the concave groove at the bottom of the cleaning cylinder and the waste liquid through hole to realize the waste liquid recovery.

[0033] Further, the surface modification spraying system comprises a material transfer module, a spraying module and a drying module, the material transfer module is used for conveying the workpiece to the position right below the spraying module for spraying operation, and the drying module is used for drying the workpiece after spraying;

[0034] The material transfer module comprises a third Y-axis linear motion mechanism, a second rotary motion mechanism and a material bearing table.

[0035] The third Y-axis linear motion mechanism is used for driving the second rotary motion mechanism to move in the Y-axis direction.

[0036] The second rotary motion mechanism comprises a second Y-axis rotary mechanism and a second Z-axis rotary mechanism, the second Y-axis rotary mechanism is used for driving the second Z-axis rotary mechanism to rotate, and the rotation axis of the second Y-axis rotary mechanism is parallel to the Y-axis.

[0037] The material bearing table is fixedly arranged on the second Z-axis rotary mechanism, the workpiece to be sprayed is placed on the material bearing table, the second Z-axis rotary mechanism drives the material bearing table and the workpiece thereon to rotate, and the rotation axis of the second Z-axis rotary mechanism is parallel to the Z-axis.

[0038] The spraying module is located above the material transfer module and comprises a spraying liquid agitator and a spraying head.

[0039] The spraying liquid agitator comprises an agitator cavity, a magnet rotor arranged in the agitator cavity, and a servo motor and a magnetic stirring head arranged outside below the agitator cavity, the agitator cavity contains the spraying liquid, the servo motor drives the magnet rotor to rotate to generate a changing magnetic field, under the action of the magnetic field force, the magnetic stirring head rotates to stir and uniformly spray the spraying liquid, the spraying head is connected with the agitator cavity through a pipeline and is externally connected with a second air pump, the second air pump is used for generating different negative pressures in the spraying head, so that the spraying of the spraying liquid in different working conditions is realized.

[0040] Further, the drying module is located above the material transfer module and is located below the spraying module, the drying module comprises a Y-axis feeding mechanism, an infrared curing lamp and a lamp support plate, the infrared curing lamp is fixed on the lamp support plate, the lamp support plate is fixedly arranged on the Y-axis feeding mechanism, and the Y-axis feeding mechanism can drive the lamp support plate to move together with the infrared curing lamp in the Y-axis direction.

[0041] When the spraying is completed, the infrared curing lamp moves to the position above the workpiece together with the Y-axis feeding mechanism to quickly cure the spraying liquid on the surface of the workpiece, and the infrared curing lamp is retracted after drying.

[0042] Compared with the prior art, the present application has the following beneficial effects:

[0043] 1) The device is integrated by five-axis laser ablation, ultrasonic cleaning and surface spraying modification, which constructs a fully enclosed automatic processing system, which can effectively solve the problems of equipment dispersion, process fragmentation and artificial transfer in traditional process, and can effectively solve the problems of efficiency and pollution. Five-axis linkage cooperates with multi-infrared sensor to realize full-angle adaptive processing of complex three-dimensional curved surface electronic components, which significantly overcomes the defocusing problem of traditional equipment in curved surface processing. In addition, the active air film cooling mechanism integrated with laser module forms an efficient dynamic heat shield in the processing area, which effectively inhibits the heat diffusion and heat accumulation in the laser ablation process, significantly reduces the material thermal damage and abnormal spatter of molten material, and guarantees the edge definition and substrate integrity of microstructure. At the same time, the integrated multi-stage smoke filtering system can realize real-time adsorption and purification of harmful pollutants generated in the processing, which can significantly improve the environmental cleanliness and operation safety.

[0044] 2) After laser ablation, the workpiece is automatically transferred to the cleaning system by precise feeding mechanism, and the ultrasonic cavitation effect can deeply remove the processing residues in the micro-nano structure; the cleaned workpiece is automatically transferred to the spraying modification unit, and a uniform and firm functional coating is constructed on the surface by controllable atomization and rapid curing process. This integrated processing equipment greatly shortens the processing cycle, avoids secondary pollution and surface damage caused by manual intervention, and significantly improves the product quality and performance. Therefore, this equipment simultaneously realizes efficient processing of high-precision micro-nano structure and stable imparting of super-hydrophobic function on the surface of electronic components, which synergistically enhances the heat dissipation performance and environmental tolerance of electronic components in harsh environments with high temperature and high humidity, and provides innovative technical support for the manufacturing of high-reliability electronic equipment. BRIEF DESCRIPTION OF DRAWINGS

[0045] Figure 1 is the overall appearance of the five-axis laser ablation and spraying modification integrated equipment of the present application;

[0046] Figure 2 is the overall internal structure of the equipment of the present application;

[0047] Figure 3 is the internal structure of the five-axis laser ablation system of the present application;

[0048] Figure 4 is the structure sectional view of the first rotating motion mechanism of the present application;

[0049] Figure 5 is the structure sectional view of the laser head of the present application;

[0050] Figure 6 is the structure sectional view of the cleaning module of the present application;

[0051] Figure 7 is the internal structure of the ultrasonic cleaning system of the present application;

[0052] Figure 8 is the sectional view of the liftable ultrasonic generator structure of the present application;

[0053] Figure 9 is the internal structure diagram of the surface modification spraying system of the present application;

[0054] The reference signs are as follows:

[0055] 1. Five-axis motion module; 11. First XYZ linear motion mechanism; 1101-1. Y-axis ball screw assembly; 1101-2. Z-axis ball screw assembly; 1101-3. X-axis ball screw assembly; 1102. First coupling; 1103. Driving motor; 1104. Y-axis guide rail support plate; 1105. X-axis guide rail support; 12. First Y-axis rotating mechanism; 1201. First rotating motor; 1202. Second coupling; 1203. Gear shaft; 1204. Double-row ball bearing; 1205. Rotating plate; 1206. Small end cover; 1207. Bottom plate; 13. First Z-axis rotating mechanism; 1301. Second rotating motor; 1302. Small pulley; 1303. Belt; 1304. Large pulley; 1305. Z rotating shaft; 1306. Ball bearing; 1307. Thrust bearing; 1308. Laser processing table;

[0056] 2. Laser module; 21. Laser generator; 22. Laser head; 2201. Fixed base; 2202. Laser head upper shell; 2203. Laser head lower shell; 2204. Protective mirror shell; 2205. Transmission lens; 2206. Lens; 2207. Lens holder; 2208. Infrared sensor; 2209. Protective mirror; 2210. Ventilation nozzle; 23. Optical fiber; 24. First air pump;

[0057] 3. Cleaning module; 31. Fan suction assembly; 3101. Suction assembly mounting shell; 3102. Baffle; 3103. Activated carbon adsorption net; 3104. Blowing channel; 3105. Blower; 3106. Impeller;

[0058] 4. Material transportation module; 41. Second XYZ linear motion mechanism; 4101. Second X-axis linear motion mechanism; 4102. Second Y-axis linear motion mechanism; 4103. Second Z-axis linear motion mechanism; 4103-1. Piston rod; 42. Suction cup;

[0059] 5. Ultrasonic cleaning module; 51. Solution storage; 5101. Cleaning liquid storage tank; 5102. Cleaning cylinder; 5103. Waste liquid cylinder; 5104. Special pipeline; 5105. Solenoid valve; 5106. Waste liquid pipeline; 52. Liftable ultrasonic generator; 5201. Second air cylinder; 5202. Ultrasonic transducer; 5203. Cleaning table;

[0060] 6, material transfer module; 61, third Y-axis linear motion mechanism; 62, second rotary motion mechanism; 63, material carrying table;

[0061] 7, spraying module; 71, spraying liquid stirrer; 7101, servo motor; 7102, magnet rotor; 7103, magnetic stirring head; 72, spraying head; 73, second air pump;

[0062] 8, drying module; 81, Y-axis feeding mechanism; 82, infrared curing lamp; 83, lamp support plate; 9, control unit. DETAILED DESCRIPTION

[0063] The present application is further described below with reference to the accompanying drawings:

[0064] Referring to Figure 2 , Figure 3 , Figure 7 and Figure 9 , a five-axis laser ablation and spraying modification integrated equipment includes a machine tool shell and a five-axis laser ablation system, an ultrasonic cleaning system and a surface modification spraying system installed in the machine tool shell. According to Figures 1-2 , the machine tool shell is divided into upper and lower two-part spaces by a lower base, and the upper space is roughly divided into three separate chambers, which are respectively marked as the first chamber, the second chamber and the third chamber, for sequentially placing parts of the five-axis laser ablation system, the ultrasonic cleaning system and the surface modification spraying system. The control unit 9 of the entire system is also arranged in the third chamber. According to Figure 2 , the left and right sides of the second chamber are respectively provided with openings, which facilitate the laser-ablated workpiece in the first chamber to be transported into the second chamber, and the ultrasonic-cleaned workpiece in the second chamber to be transferred into the third chamber.

[0065] The five-axis laser ablation system includes a five-axis motion module 1, a laser module 2 and a cleaning module 3. The five-axis motion module 1 includes a first XYZ linear motion mechanism 11 and a first rotary motion mechanism; the laser module 2 includes a laser generator 21 and a laser head 22, the laser head is circumscribed by a first air pump 24 and realizes the cooling of the laser head 22 and the surface of the workpiece during the ablation process through the internal air hole channel; the cleaning module includes a fan suction assembly 31, which realizes the adsorption and cleaning treatment of the pollutants such as smoke generated during the laser ablation process. The ultrasonic cleaning system includes a material transportation module 4 and an ultrasonic cleaning module 5. The material transportation module contains a second XYZ linear motion mechanism 41 and a suction cup 42; the ultrasonic cleaning module includes a solution storage 51 and a liftable ultrasonic generator 52. The surface modification spraying system is divided into a material transfer module 6, a spraying module 7 and a drying module 8. The material transfer module 6 contains a third Y-axis linear motion mechanism 61, a second rotary motion mechanism 62 and a material carrying table 63; the spraying module 7 includes a spraying liquid stirrer 71 and a spraying head 72.

[0066] Referring to Figure 3 , the first XYZ linear motion mechanism 11 includes two parts, the upper part is the Z-axis ball screw assembly 1101-2 and the X-axis ball screw assembly 1101-3 installed thereon, and the lower part is the Y-axis ball screw assembly 1101-1, and the three are respectively connected with a driving motor assembly. Figure 3 For example, the Y-axis ball screw assembly 1101-1 in the Y-axis ball screw assembly 1101-1, the screw rod is connected with the driving motor 1103 through the first coupling 1102, and under the driving action of the driving motor 1103, the ball on the screw rod of the Y-axis ball screw assembly 1101-1 can move in the Y-axis direction. The Y-axis ball screw assembly 1101-1 is installed on the upper surface of the lower base, the Z-axis ball screw assembly 1101-2 is installed in the upper left corner of the first cavity shell, and the X-axis ball screw assembly 1101-3 is installed on the Z-axis ball screw assembly 1101-2; the first rotary motion mechanism is divided into a first Y-axis rotary mechanism 12 and a first Z-axis rotary mechanism 13, the first Y-axis rotary mechanism 12 is arranged on the Y-axis guide rail support plate 1104 of the Y-axis ball screw assembly 1101-1, and the first Z-axis rotary mechanism 13 is arranged on the bottom plate 1207 of the first Y-axis rotary mechanism 12.

[0067] The first Y-axis rotary mechanism 12 is used for driving the first Z-axis rotary mechanism 13 to rotate, and the rotation axis thereof is parallel to the Y-axis.

[0068] The workpiece to be processed is placed on the first Z-axis rotary mechanism 13, the first Z-axis rotary mechanism 13 drives the workpiece to rotate, and the rotation axis thereof is parallel to the Z-axis.

[0069] Referring to Figure 4 , the first Y-axis rotary mechanism 12 includes a first rotary motor 1201, a second coupling 1202, a gear shaft 1203, a double-row ball bearing 1204, a rotating plate 1205, a small end cover 1206 and a bottom plate 1207, the first rotary motor 1201 is fixedly connected with the gear shaft 1203 and rotates through the second coupling 1202, one side of the rotating plate 1205 is an internal gear hole, the internal gear hole is engaged with the gear of the gear shaft 1203, and the gear shaft 1203 is fixed on the other side of the rotating plate 1205 through the small end cover 1206 and the bolt, and the bottom plate 1207 is connected with the rotating plate 1205 through the bolt to realize the Y-axis rotation 12.

[0070] Referring to Figure 4The first Z-axis rotating mechanism 13 comprises a second rotating motor 1301, a small pulley 1302, a belt 1303, a large pulley 1304, a Z rotating shaft 1305, a ball bearing 1306, a thrust bearing 1307 and a laser processing table 1308. The output shaft of the second rotating motor 1301 is connected with the small pulley 1302, the Z rotating shaft 1305 is connected with the large pulley 1304, and the Z rotating shaft 1305 is connected with the laser processing table 1308 through threads. The ball bearing 1306 and the thrust bearing 1307 are located between the bottom plate 1207 and the Z rotating shaft 1305, so as to ensure the normal rotation of the Z rotating shaft 1305 and the laser processing table 1308. The small pulley 1302 and the large pulley 1304 are connected through the belt 1303, and the rotating motion of the second rotating motor 1301 is transmitted to the laser processing table 1308, so that the first Z-axis rotating mechanism 13 drives the workpiece to rotate, and the rotating axis is parallel to the Z-axis.

[0071] With reference to Figure 5 The laser generator 21 is installed in the upper left corner of the first chamber shell, and transmits the laser source to the laser head 22 through the optical fiber 23. The laser head 22 comprises, from top to bottom, a fixed base 2201, a laser head upper shell 2202, a laser head lower shell 2203 and a protective mirror shell 2204. The fixed base 2201 is installed on the X-axis guide rail support plate 1105 of the X-axis ball screw assembly 1101-3, and is connected with the laser head upper shell 2202 through bolts. The upper part of the laser head upper shell 2202 is internally provided with a transmission lens 2205. The upper part of the laser head lower shell 2203 is internally provided with a lens 2206 and a lens holder 2207, and the lower part is externally provided with four infrared sensors 2208. The infrared sensors 2208 cooperate with the five-axis motion module 1 to realize adaptive focal length regulation and control of the machined parts. The lower part of the protective mirror shell 2204 is provided with a protective mirror 2209 and six ventilation nozzles 2210.

[0072] With reference to Figure 5 The laser head upper shell 2202 is internally provided with an L-shaped air hole channel and is externally connected with the first air pump 24 through a pipeline. The lens holder 2207 is externally provided with a spiral hole channel structure. The laser head lower shell 2203 and the protective mirror shell 2204 are internally provided with air hole channels. The first air pump 24 introduces air into the L-shaped air hole channel of the laser head upper shell 2202. The air passes through the spiral hole channel externally provided with the lens holder 2207, and the air hole channels in the laser head lower shell 2203 and the protective mirror shell 2204 in sequence to reach each ventilation nozzle 2210, so as to cool the internal devices of the entire laser head and prolong the service life. The ventilation nozzles 2210 act on the surface of the machined parts, so as to reduce the surface temperature and improve the machining precision.

[0073] With reference to Figure 6, the fan adsorption assembly 31 is installed at the right rear of the first chamber shell, including an adsorption assembly mounting shell 3101, a baffle 3102, an activated carbon adsorption net 3103, a blast passage 3104, a blower 3105 and an impeller 3106, the activated carbon adsorption net 3103 and the baffle 3102 are installed in the adsorption assembly mounting shell 3101, the adsorption assembly mounting shell 3101 has a clamping groove inside, which can realize flexible installation and replacement of the activated carbon adsorption net 3103. The upper surface of the adsorption assembly mounting shell 3101 is connected with the blast passage 3104, the impeller 3106 is arranged in the blast passage 3104, the blower 3105 is connected with the impeller 3106 through a key groove, the blower 3105 drives the impeller 3106 to rotate to discharge the air in the blast passage 3104 and form a low pressure, the smoke and dust gas generated in the laser ablation process will pass through the baffle 3102, the activated carbon adsorption net 3103 and the round hole of the blast passage 3104 in turn under the action of air pressure and be discharged from the equipment, wherein the smoke and dust particles will be captured by the activated carbon adsorption net 3103.

[0074] With reference to Figure 7 , the material transportation module 4 comprises a second XYZ linear motion mechanism 41 and a suction cup 42, and the second XYZ linear motion mechanism 41 is the same as the first XYZ linear motion mechanism 11. The second XYZ linear motion mechanism 41 comprises a second X-axis linear motion mechanism 4101, a second Y-axis linear motion mechanism 4102 and a second Z-axis linear motion mechanism 4103, the second Z-axis linear motion mechanism 4103 comprises a first cylinder and a piston rod 4103-1 at the lower end of the first cylinder, and the suction cup 42 is connected with the piston rod 4103-1 through threads. After the five-axis laser ablation system completes the machining, the workpiece is moved to the ultrasonic cleaning module 5 by the second XYZ linear motion mechanism 41 and the suction cup 42, and then is moved to the material support table 63 of the surface modification spraying system after the cleaning is completed.

[0075] With reference to Figure 7 and Figure 8 , the solution storage 51 comprises a cleaning liquid storage tank 5101, a cleaning cylinder 5102 and a waste liquid cylinder 5103, the cleaning liquid storage tank 5101 is connected with the cleaning cylinder 5102 through a special pipeline 5104, the special pipeline 5104 is provided with an electromagnetic valve 5105 for controlling the flow of cleaning liquid into the cleaning cylinder 5102, the bottom of the cleaning cylinder 5102 is provided with a concave groove and a waste liquid through hole (the concave groove is located above the waste liquid through hole), and the waste liquid at the bottom of the cleaning cylinder 5101 flows into the waste liquid pipeline 5106 through the waste liquid through hole and is collected by the waste liquid cylinder 5103.

[0076] With reference to Figure 7 and Figure 8The liftable ultrasonic generator 52 comprises a second cylinder 5201, an ultrasonic transducer 5202 and a cleaning table 5203, the second cylinder 5201 is connected to the end of the cleaning table 5203 by bolts, the ultrasonic transducer is fixed in the cleaning table 5203 and externally connected to the ultrasonic generator, the cavitation effect is generated by applying the sound wave to the cleaning liquid to realize the cleaning of the workpiece, and the lower surface of the cleaning table 5203 has a convex structure corresponding to the bottom concave groove of the cleaning cylinder 5102. When cleaning the workpiece, the suction cup 42 carries the workpiece to the cleaning table 5203, the second cylinder 5201 is retracted, the cleaning table 5203 is lowered into the cleaning cylinder 5102, the convex structure of the cleaning table 5203 is closely combined with the bottom concave groove of the cleaning cylinder 5102 and the waste liquid through hole is plugged to ensure that the cleaning liquid in the cleaning cylinder 5102 is not leaked. After cleaning, the second cylinder 5201 is extended to cause the cleaning table 5203 to rise, the cleaning liquid flows into the waste liquid cylinder 5103 through the bottom concave groove of the cleaning cylinder 5102 and the waste liquid through hole to realize waste liquid recovery. The cleaning table 5203 and the workpiece thereon are exposed to air, the cleaning liquid is mostly ethanol, the ethanol on the surface of the workpiece will evaporate quickly to ensure the dryness requirement of the surface, and the suction cup 42 continues to carry the workpiece to the material carrying table 63 of the surface modification spraying system.

[0077] With reference to Figure 9 The third Y-axis linear motion mechanism 61 and the second rotary motion mechanism 62 of the surface modification spraying system are the same as the Y-axis ball screw assembly 1101-1 of the five-axis laser ablation system and the components of the first rotary motion mechanism, and spraying of the complex workpiece in the machining process is realized. The third Y-axis linear motion mechanism 61 is used for driving the second rotary motion mechanism 62 to move in the Y-axis direction, the second rotary motion mechanism 62 comprises a second Y-axis rotary mechanism and a second Z-axis rotary mechanism, the second Y-axis rotary mechanism is used for driving the second Z-axis rotary mechanism to rotate, and the rotation axis thereof is parallel to the Y-axis; the material carrying table 63 is fixedly arranged on the second Z-axis rotary mechanism, the workpiece to be sprayed is placed on the material carrying table 63, the second Z-axis rotary mechanism drives the material carrying table 63 and the workpiece thereon to rotate, and the rotation axis thereof is parallel to the Z-axis.

[0078] The material carrying table 63 is fixed with the third Y-axis linear motion mechanism 61 and sends the workpiece cleaned by the ultrasonic to the chamber of the surface modification spraying system. Figure 2 and Figure 9In the third axis Y linear motion mechanism 61 under the conveying effect, the material carrying table 63 moves in the Y axis direction to enter the second chamber from the third chamber, and after the suction cup 42 carries the cleaned workpiece to the material carrying table 63, the material carrying table 63 returns to the third chamber. The spraying liquid agitator 71 is located in the upper left corner of the third chamber, including an agitator cavity, a magnet rotor 7102 arranged in the agitator cavity, and a servo motor 7101 and a magnetic stirring head 7103 arranged outside below the agitator cavity. The agitator cavity contains spraying liquid, the servo motor 7101 drives the magnet rotor 7102 to rotate to generate a changing magnetic field, which makes the magnetic stirring head 7103 rotate under the action of the magnetic field force, thereby stirring and uniformly spraying the spraying liquid. The spraying head 72 is connected with the agitator cavity through a pipeline and is externally connected with the second air pump 73. The control of the flow of the second air pump 73 makes the spraying head 72 generate different negative pressures, thereby realizing the spraying of spraying liquid in different working conditions.

[0079] Referring to Figure 9 The drying module 8 is located below the control unit 9 of the right half of the third chamber, and is located above the material transfer module 6 and below the spraying module 7. The drying module 8 includes a Y-axis feeding mechanism 81, an infrared curing lamp 82 and a lamp support plate 83. The infrared curing lamp 82 is fixed on the lamp support plate 83, and the lamp support plate 83 is fixedly arranged on the Y-axis feeding mechanism 81. The Y-axis feeding mechanism 81 can drive the lamp support plate 83 to move together with the infrared curing lamp 82 in the Y-axis direction. After spraying is completed, the infrared curing lamp 82 moves to above the workpiece with the Y-axis feeding mechanism 81 to quickly cure the spraying liquid on the surface of the workpiece. After drying is completed, it is withdrawn to avoid interference with the next spraying.

[0080] Working principle:

[0081] The workpiece to be processed is placed on the laser processing table 1308 and fixed, the multiple infrared sensors 2208 scan the workpiece topography to determine the focal length, and the processing pattern and control unit 9 are combined to establish the processing path. The five-axis motion module 1 adjusts the workpiece to the appropriate distance from the laser head and prepares for processing by appropriate XYZ-axis feeding and YZ-axis rotation. The laser generator 21 is turned on, the laser source is transmitted to the laser head 22 through the optical fiber 23 and acts on the workpiece surface, and the entire workpiece surface is micro-nano textured under the cooperation of the five-axis motion module 1. During laser ablation, surface thermal damage and metal smoke often occur, therefore, the first air pump 24 is turned on at the beginning of laser ablation, the airflow flows through the laser head upper shell 2202, the laser head lower shell 2203, the spiral hole channel outside the lens holder 2207, the protective mirror shell 2204 and the ventilation nozzle 2210 of the laser head 22 in sequence, and the airflow is sprayed out through the ventilation nozzle 2210 to act on the ablated surface of the workpiece, which reduces the thermal damage of the workpiece and also cools the internal devices of the laser head 22, thereby improving the service life and processing accuracy. At the same time, the air blower 3105 of the cleaning module 3 drives the impeller 3106 to rotate to exhaust the air in the air blowing channel 3104 and form a low pressure area, and the metal smoke generated during laser ablation will pass through the baffle 3102, the activated carbon adsorption net 3103 and the exhaust device of the air blowing channel 3104 in sequence under the action of air pressure, wherein the smoke particles will be captured by the activated carbon adsorption net 3103.

[0082] After laser ablation, the workpiece is sent to the chamber of the ultrasonic cleaning system by the Y-axis ball screw assembly 1101-1, the second XYZ linear motion mechanism 41 cooperates with the suction cup 42 to move the workpiece into the cleaning cylinder 5102, and after cleaning, it is moved to the material carrying table 63 of the surface spraying modification system. Among them, the second air cylinder 5201 is retracted during ultrasonic cleaning, the convex structure of the cleaning table 5203 is closely combined with the concave groove at the bottom of the cleaning cylinder 5102, the electromagnetic valve 5105 is opened to make the cleaning liquid flow from the cleaning liquid storage tank 5101 into the cleaning cylinder 5102, and the ultrasonic transducer 5202 acts on the cleaning liquid to produce cavitation effect to clean the residues on the processed surface of the workpiece; after cleaning, the second air cylinder 5201 is raised, and the cleaning liquid flows from the concave groove at the bottom of the cleaning cylinder 5102 and the waste liquid through hole into the waste liquid cylinder 5103.

[0083] After ultrasonic cleaning, the workpiece on the material carrying table 63 is sprayed by the spraying liquid stirrer 71 and the spraying head 72. First, the servo motor 7101 drives the magnet rotor 7102 to rotate to generate a changing magnetic field, which makes the magnetic stirring head 7103 rotate and then stirs and uniformly sprays the liquid. The spraying head 72 can generate different pressure differences in the chamber under the flow control of the second air pump 73, thereby realizing spraying under different working conditions. After spraying is completed, the infrared curing lamp 82 moves above the workpiece with the Y-axis feeding mechanism 81 to quickly cure the sprayed liquid on the surface of the workpiece, and then it is retracted after drying.

[0084] The present application includes but not limited to the above embodiments, within the scope defined by the claims of the present application, as long as the technical solutions which can be realized on the basis of the above embodiments without creative labor can be considered within the protection scope of the present application.

Claims

1. A five-axis laser ablation and spray coating modification integrated equipment, characterized in that, This includes the machine tool housing and the five-axis laser ablation system, ultrasonic cleaning system, and surface modification spraying system installed in the machine tool housing; The five-axis laser ablation system includes a five-axis motion module (1), a laser module (2), and a cleaning module (3). The five-axis motion module (1) includes a first XYZ linear motion mechanism (11) and a first rotary motion mechanism; The laser module (2) includes a laser generator (21) and a laser head (22); the bottom of the laser head (22) is provided with a ventilation nozzle (2210) and an air hole channel communicating with the ventilation nozzle (2210) is provided inside. The air hole channel of the laser head (22) is connected to a first air pump (24) through a pipe to achieve cooling of the laser head (22) and the workpiece surface during the ablation process; The workpiece to be processed is placed on the first rotary motion mechanism. The first XYZ linear motion mechanism (11) can drive the laser head (22) to move above the workpiece in the X-axis and Z-axis directions, and drive the first rotary motion mechanism to move in the Y-axis direction. At the same time, the first rotary motion mechanism can drive the workpiece to rotate in the XY-axis plane and the XZ-axis to facilitate the focusing of the laser processing. The cleaning module (3) includes a fan adsorption assembly (31) for discharging fumes generated during laser processing; The ultrasonic cleaning system and the surface modification spraying system are sequentially arranged behind the five-axis motion module (1) for sequentially performing ultrasonic cleaning and spraying-drying operations on the laser-processed workpiece. The ultrasonic cleaning system includes a material transport module (4) and an ultrasonic cleaning module (5); the material transport module (4) is used to transport the laser-processed workpiece to the ultrasonic cleaning module (5) for cleaning, and to transport the cleaned workpiece to the surface modification spraying system. The ultrasonic cleaning module includes a solution storage device (51) and a liftable ultrasonic generator (52). The solution storage device (51) includes a cleaning solution storage tank (5101), a cleaning cylinder (5102), and a waste liquid cylinder (5103). The cleaning solution storage tank (5101) and the cleaning cylinder (5102) are connected by a dedicated pipe (5104). The dedicated pipe (5104) is equipped with a solenoid valve (5105) for controlling the flow of cleaning solution into the cleaning cylinder (5102). The bottom of the cleaning cylinder (5102) is provided with a communicating concave groove and a waste liquid passage hole. The waste liquid at the bottom of the cleaning cylinder (5102) flows into the waste liquid pipe (5106) through the waste liquid passage hole and is collected through the waste liquid cylinder (5103). The liftable ultrasonic generator (52) includes a second cylinder (5201), an ultrasonic transducer (5202), and a cleaning table (5203). The second cylinder (5201) is connected to the end of the cleaning table (5203) by bolts. The ultrasonic transducer is fixed inside the cleaning table (5203) and externally connected to the ultrasonic generator. The workpiece is cleaned by applying sound waves to the cleaning fluid to generate a cavitation effect. The lower surface of the cleaning table (5203) has a protruding structure corresponding to the concave groove at the bottom of the cleaning cylinder (5102). When cleaning the workpiece, the material transport module (4) moves the workpiece to the cleaning platform (5203), the second cylinder (5201) retracts, the protruding structure of the cleaning platform (5203) is tightly combined with the concave groove at the bottom of the cleaning tank (5102) and the waste liquid through hole is blocked to ensure that the cleaning liquid in the cleaning tank (5102) does not leak. Then the cleaning liquid enters the cleaning tank (5102) from the cleaning liquid storage tank (5101) and completely immerses the workpiece for cleaning. After cleaning, the second cylinder (5201) extends, causing the cleaning platform (5203) to rise. The cleaning liquid flows into the waste liquid tank (5103) through the concave groove at the bottom of the cleaning tank (5102) and the waste liquid through hole to realize waste liquid recycling.

2. The five-axis laser ablation and spraying modification integrated equipment as described in claim 1, characterized in that, The first XYZ linear motion mechanism (11) includes two parts: the upper part is a Z-axis ball screw assembly (1101-2) and an X-axis ball screw assembly (1101-3) mounted thereon, and the lower part is a Y-axis ball screw assembly (1101-1). All three are connected to a drive motor assembly. The first rotary motion mechanism is mounted on the Y-axis ball screw assembly (1101-1), and the laser module (2) is mounted on the X-axis ball screw assembly (1101-3); The first rotary motion mechanism includes a first Y-axis rotary mechanism (12) and a first Z-axis rotary mechanism (13). The Y-axis ball screw assembly (1101-1) is used to drive the first Y-axis rotary mechanism (12) to move in the Y-axis direction. The first Y-axis rotation mechanism (12) is used to drive the first Z-axis rotation mechanism (13) to rotate, and its rotation axis is parallel to the Y-axis; The workpiece to be processed is placed on the first Z-axis rotation mechanism (13), which drives the workpiece to rotate, and its rotation axis is parallel to the Z-axis.

3. The five-axis laser ablation and spraying modification integrated equipment as described in claim 2, characterized in that, The Y-axis ball screw assembly (1101-1) is provided with a Y-axis guide rail support plate (1104), and the first Y-axis rotation mechanism (12) is fixedly installed on the Y-axis guide rail support plate (1104). The first Y-axis rotation mechanism (12) includes a first rotary motor (1201), a second coupling (1202), a gear shaft (1203), a double-row ball bearing (1204), a rotating plate (1205), a small end cap (1206), and a base plate (1207). The first rotary motor (1201) is fixedly connected to the gear shaft (1203) through the second coupling (1202). One side of the rotating plate (1205) is an internal gear hole, which meshes with the gear of the gear shaft (1203). The gear shaft (1203) is fixed on the other side of the rotating plate (1205) through the small end cap (1206) and bolts. The base plate (1207) is bolted to the rotating plate (1205).

4. The five-axis laser ablation and spraying modification integrated equipment as described in claim 2, characterized in that, A base plate (1207) is provided on the Y-axis rotation mechanism (12), and the first Z-axis rotation mechanism (13) is provided on the base plate (1207); The first Z-axis rotation mechanism (13) includes a second rotary motor (1301), a small pulley (1302), a belt (1303), a large pulley (1304), a Z-axis rotation shaft (1305), a ball bearing (1306), a thrust bearing (1307), and a laser processing table (1308). The output shaft of the second rotary motor (1301) is connected to the small pulley (1302), the Z-axis rotation shaft (1305) is connected to the large pulley (1304), and the Z-axis rotation shaft (1305) is connected to the laser. The processing table (1308) is fixedly connected by threads. The ball bearing (1306) and thrust bearing (1307) are located between the base plate (1207) and the Z-axis (1305) to ensure the normal rotation of the Z-axis (1305) and the laser processing table (1308). The small pulley (1302) and the large pulley (1304) are connected by a belt (1303) so that the rotational motion of the second rotary motor (1301) is transmitted to the laser processing table (1308).

5. The five-axis laser ablation and spraying modification integrated equipment as described in claim 2, characterized in that, The laser generator (21) transmits the laser source to the laser head (22) through the optical fiber (23). The laser head (22) includes a fixed base (2201), a laser head upper shell (2202), a laser head lower shell (2203), and a protective lens shell (2204) arranged sequentially from top to bottom. The fixed base (2201) is installed on the X-axis guide rail support plate (1105) of the X-axis ball screw assembly (1101-3) and connected to the laser head housing (2202) by bolts. The upper part of the laser head housing (2202) has a built-in transmission lens (2205). The upper part of the lower laser head housing (2203) has a lens (2206) and a lens holder (2207) installed inside, and the lower part has several infrared sensors (2208) installed outside. The infrared sensors (2208) work in conjunction with the five-axis motion module (1) to achieve adaptive focal length control of the processed parts. The lower part of the protective lens housing (2204) is provided with a protective lens (2209). The lower part of the protective lens housing (2204) is provided with several ventilation nozzles (2210), the laser head housing (2202) has an L-shaped air hole channel inside and is connected to the first air pump (24) through a pipe, the laser head lower housing (2203) and the protective lens housing (2204) both have air hole channels inside, and the lens holder (2207) has a spiral hole channel structure on the outside; The first air pump (24) introduces air into the L-shaped air hole channel of the laser head housing (2202). The air passes through the spiral hole channel outside the lens holder (2207), and the air hole channels inside the laser head lower housing (2203) and the protective lens housing (2204) to reach each of the ventilation nozzles (2210), thereby cooling the internal components of the entire laser head to improve its service life. The ventilation nozzles (2210) act on the surface of the processed parts to reduce the surface temperature and improve the processing accuracy.

6. The five-axis laser ablation and spraying modification integrated equipment according to claim 1, characterized in that: The blower adsorption assembly (31) includes an adsorption assembly mounting shell (3101), a baffle plate (3102), an activated carbon adsorption mesh (3103), an air duct (3104), a blower (3105), and an impeller (3106). The activated carbon adsorption mesh (3103) and the baffle plate (3102) are installed in the adsorption assembly mounting shell (3101). The upper surface of the adsorption assembly mounting shell (3101) is connected to the air duct (3104), and the air duct (3104) is provided with... An impeller (3106) is placed, and the blower (3105) is connected to the impeller (3106) via a keyway. The blower (3105) drives the impeller (3106) to rotate, which discharges the air from the blower channel (3104) and forms a low pressure. The smoke and dust generated during the laser ablation process will pass through the baffle (3102), the activated carbon adsorption net (3103) and the blower channel (3104) in sequence under the action of air pressure and be discharged from the equipment. The smoke and dust particles will be captured by the activated carbon adsorption net (3103).

7. The five-axis laser ablation and spraying modification integrated equipment according to claim 1, characterized in that: The material transport module (4) includes a second XYZ linear motion mechanism (41) and a suction cup (42). The second XYZ linear motion mechanism (41) includes a second X-axis linear motion mechanism (4101), a second Y-axis linear motion mechanism (4102), and a second Z-axis linear motion mechanism (4103). The second Z-axis linear motion mechanism (4103) includes a first cylinder and a piston rod (4103-1) at its lower end. The suction cup (42) is connected to the piston rod (4103-1) by a thread. After the five-axis laser ablation system completes the processing, the second XYZ linear motion mechanism (41) works in conjunction with the suction cup (42) to move the workpiece to the ultrasonic cleaning module (5). After cleaning, the workpiece is moved to the surface modification spraying system.

8. The five-axis laser ablation and spraying modification integrated equipment according to claim 1, characterized in that: The surface modification spraying system includes a material transfer module (6), a spraying module (7) and a drying module (8). The material transfer module (6) is used to transport the workpiece directly below the spraying module (7) for spraying, and the drying module (8) is used to dry the sprayed workpiece. The material transfer module (6) includes a third Y-axis linear motion mechanism (61), a second rotary motion mechanism (62), and a material carrying platform (63). The third Y-axis linear motion mechanism (61) is used to drive the second rotary motion mechanism (62) to move in the Y-axis direction; The second rotary motion mechanism (62) includes a second Y-axis rotary mechanism and a second Z-axis rotary mechanism. The second Y-axis rotary mechanism is used to drive the second Z-axis rotary mechanism to rotate, and its rotation axis is parallel to the Y-axis. The material carrier platform (63) is fixedly mounted on the second Z-axis rotation mechanism. The workpiece to be sprayed is placed on the material carrier platform (63). The second Z-axis rotation mechanism drives the material carrier platform (63) and the workpiece on it to rotate, and its rotation axis is parallel to the Z-axis. The spraying module (7) is located above the material transfer module (6) and includes a spraying liquid agitator (71) and a spraying head (72). The spray liquid agitator (71) includes an agitator cavity, a magnetic rotor (7102) disposed in the agitator cavity, and a servo motor (7101) and a magnetic stirring head (7103) disposed below the agitator cavity. The agitator cavity contains spray liquid. The servo motor (7101) drives the magnetic rotor (7102) to rotate, thereby generating a changing magnetic field. Under the action of the magnetic field force, the magnetic stirring head (7103) rotates, thereby stirring and mixing the spray liquid. The spray head (72) is connected to the agitator cavity through a pipe and externally connected to a second air pump (73). The second air pump (73) is used to generate different negative pressures in the spray head (72), thereby realizing the spraying of spray liquid under different working conditions.

9. The five-axis laser ablation and spraying modification integrated equipment according to claim 8, characterized in that: The drying module (8) is located above the material transfer module (6) and below the spraying module (7). The drying module (8) includes a Y-axis feeding mechanism (81), an infrared curing lamp (82), and a lamp support plate (83). The infrared curing lamp (82) is fixed on the lamp support plate (83), and the lamp support plate (83) is fixed on the Y-axis feeding mechanism (81). The Y-axis feeding mechanism (81) can drive the lamp support plate (83) to move together with the infrared curing lamp (82) in the Y-axis direction. After the spraying is completed, the infrared curing lamp (82) moves above the workpiece along with the Y-axis feed mechanism (81) to quickly cure the sprayed liquid on the workpiece surface. After drying, it is taken back.

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