Workpiece rotating stand and vacuum chamber

Abstract

The invention belongs to the technical field of vacuum coating, and discloses a workpiece rotating stand and a vacuum chamber. The workpiece rotating stand comprises a plurality of coating areas distributed in the circumferential direction, rotating shafts used for supporting workpieces are arranged in the coating areas, and an included angle is formed between the rotation axis direction of the rotating shafts and the central symmetry line of the coating areas. The vacuum chamber comprises a workpiece rotating stand, the workpiece rotating stand is arranged in a cavity body of the vacuum chamber, the vacuum chamber further comprises a rotating mechanism, the rotating mechanism comprises a first rotating structure and a second rotating structure, the workpiece rotating stand is connected with the output end of the first rotating structure, and the first rotating structure can drive the workpiece rotating stand to rotate along the center axis of the workpiece rotating stand. The rotating shaft is connected with the output end of the second rotating structure, and the second rotating structure can drive the rotating shaft to rotate. According to the workpiece rotating stand and the vacuum chamber, the coating uniformity of the side face of the workpiece and the two end faces in the length direction of the rotating shaft can be improved, and the workpiece coating quality is improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and more particularly to a workpiece rotating frame and a vacuum chamber. Background Technology

[0002] Vacuum coating equipment is used for coating processes such as evaporation or sputtering to deposit film layers on the surface of workpieces, forming thin films with various functions. Currently, due to the development of vacuum coating technology, the shapes of vacuum-coated products are becoming more diversified, with an increasing demand for coating the surfaces of rotating workpieces with end faces and side faces.

[0003] Typically, a workpiece loading fixture with a rotating structure is used to achieve uniform coating on the surface of a rotating workpiece. However, in the prior art, the coating thickness on the end face of the rotating workpiece perpendicular to its rotation axis is often less than the coating thickness on the side face of the rotating workpiece, resulting in uneven coating on the surface of the rotating workpiece.

[0004] Therefore, there is an urgent need for a workpiece rotating frame and a vacuum chamber to solve the above-mentioned technical problems. Summary of the Invention

[0005] The purpose of this invention is to provide a workpiece rotating frame and a vacuum chamber, which aims to solve the problem in the prior art that the coating thickness on the two end faces of the rotating workpiece perpendicular to the rotation axis is less than the coating thickness on the side face of the rotating workpiece. This vacuum chamber can effectively improve the coating uniformity on the side face of the workpiece and the two end faces along the length of the rotation axis, thereby improving the quality of the workpiece.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A workpiece rotating frame includes several circumferentially distributed coating areas, and a rotating shaft for supporting the workpiece is provided in each coating area. The rotation axis of the rotating shaft is set at an angle to the central symmetry line of the coating area.

[0008] In some possible implementations, each of the coating regions includes two symmetrically arranged coating partitions, each of the coating partitions being provided with a rotation axis for supporting the workpiece, wherein the smaller of the angles between the rotation axis direction of the rotation axis and the lines of symmetry of the two coating partitions of the corresponding coating region is greater than 45°.

[0009] In some possible implementations, the rotation axis of the rotary shaft is perpendicular to the line of symmetry of the two coating zones corresponding to the coating area.

[0010] A vacuum chamber includes a workpiece carrier as described in any of the above embodiments, the workpiece carrier being disposed within the cavity of the vacuum chamber. The vacuum chamber further includes a rotation mechanism, the rotation mechanism comprising a first rotation structure and a second rotation structure. The workpiece carrier is connected to the output end of the first rotation structure, the first rotation structure being capable of driving the workpiece carrier to rotate along its own central axis, and the rotation shaft being connected to the output end of the second rotation structure, the second rotation structure being capable of driving the rotation shaft to rotate.

[0011] In some possible implementations, the vacuum chamber further includes a coating source assembly disposed within the cavity of the vacuum chamber and located below the workpiece rotating frame. The coating source assembly includes a coating source, the top view of which is located within at least one of the coating areas.

[0012] In some possible implementations, the first rotary structure includes a first driving member and a carrier disk that is pulsatorically connected to the output end of the first driving member. The workpiece rotating frame includes a plurality of material frame groups, each material frame group including two symmetrically arranged material frames. The plurality of material frame groups and the plurality of coating areas correspond one-to-one. The two material frames in each material frame group and the two coating partitions in each coating area correspond one-to-one. The material frames are fixedly connected to the carrier disk, and the rotary shaft is rotatably mounted on the material frames.

[0013] In some possible implementations, the second rotary structure includes a second drive member and a power transmission structure fixedly installed in the cavity of the vacuum chamber. The power transmission structure includes a first gear assembly, a second gear assembly, a third gear assembly, and a fourth gear assembly. The first gear assembly includes a planetary shaft rotatably passing through the support plate, a planetary gear disposed at one end of the planetary shaft, and a planetary bevel gear disposed at the other end of the planetary shaft. The planetary gear meshes with the output end of the second drive member. The second gear assembly includes a drive shaft, a tandem drive gear mounted on the drive shaft, and a planetary sub-bevel gear mounted at one end of the drive shaft. The planetary sub-bevel gear is driven by the third gear assembly and is connected to the planetary bevel gear. The tandem drive gear is driven by the fourth gear assembly and is connected to the rotary shaft.

[0014] In some possible implementations, the third gear assembly includes a base and an angle-adjusting bevel gear, the base being connected to the carrier plate, the angle-adjusting bevel gear being disposed on the base, and the planetary bevel gear and the planetary sub-bevel gear respectively meshing with the angle-adjusting bevel gear.

[0015] In some possible implementations, the fourth gear assembly includes a connecting shaft and a tandem rotary gear disposed at one end of the connecting shaft, the tandem rotary gear meshing with the tandem drive gear, and the other end of the connecting shaft being fixedly connected to one end of the rotary shaft via a connecting structure.

[0016] In some possible implementations, the vacuum chamber further includes an angle adjustment structure and a gearbox, the gearbox being spaced around the outside of the drive shaft and rotatably connected to the base, one end of the angle adjustment structure being connected to the bearing plate, and the other end of the angle adjustment structure being connected to the gearbox.

[0017] In some possible implementations, the angle adjustment structure includes a connecting arm with connecting members at both ends. The length of the connecting members is adjustable, and both ends of the connecting arm are connected to the bearing plate and the gearbox body through the connecting members.

[0018] The beneficial effects of this invention are:

[0019] The workpiece turntable provided by this invention has its rotation axis angled to the central symmetry line of the coating area. This effectively improves the coating uniformity on the sides of the workpiece and on both end faces along the length of the rotation axis, thus improving workpiece quality. Furthermore, existing workpieces are typically distributed radially on the workpiece turntable, meaning the extension direction of the workpiece's rotation axis is parallel to the radial direction of the turntable. This results in a larger gap between adjacent workpieces along the radial direction of the turntable, leading to significant space waste. This invention, by setting the rotation axis angled to the central symmetry line of the coating area, allows for the arrangement of more rotation axes on the workpiece turntable, enabling it to support more workpieces, increasing the workpiece loading capacity, and consequently improving coating efficiency.

[0020] The vacuum chamber provided by this invention includes the aforementioned workpiece rotating frame. During vapor deposition, a first rotating structure drives the workpiece rotating frame to rotate along its own central axis, and a second rotating structure drives the rotating shaft to rotate. By setting the rotation axis direction of the rotating shaft at an angle to the central symmetry line of the coating area, the coating uniformity of the side surface of the workpiece and the two end faces along the length of the rotating shaft can be effectively improved, thereby improving the workpiece quality. At the same time, the rotating shaft can support more workpieces, increasing the workpiece loading capacity and thus improving the coating efficiency. Attached Figure Description

[0021] Figure 1 This is a top view of the vacuum chamber provided in an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of the rotary mechanism provided in an embodiment of the present invention;

[0023] Figure 3 This is a schematic diagram of the rotary mechanism in the first state provided by an embodiment of the present invention;

[0024] Figure 4 This is a schematic diagram of the rotary mechanism in the second state provided in an embodiment of the present invention;

[0025] Figure 5 This is a schematic diagram showing the angle between the rotation axis direction of the rotary shaft and the symmetry line of the two coating partitions of the corresponding coating area provided in the embodiment of the present invention.

[0026] In the picture:

[0027] 10. Vacuum chamber;

[0028] 110. Coating area; 111. Coating zone; 120. Material frame; 200. Rotary shaft; 311. First drive component; 312. Bearing plate; 321. Second drive component; 411. Planetary shaft; 412. Planetary gear; 413. Planetary bevel gear; 421. Drive shaft; 422. Tandem drive gear; 423. Planetary sub-bevel gear; 431. Base; 432. Angle adjustment bevel gear; 441. Tandem rotary gear; 500. Transition gear; 600. Bearing housing; 700. Gearbox body; 800. Angle adjustment structure; 810. Connecting arm; 820. Connector; 900. Connecting structure; 1000. Workpiece; 1100. Bearing. Detailed Implementation

[0029] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0030] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0031] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0032] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0033] like Figure 1 As shown, this embodiment provides a workpiece rotating frame, which includes several circumferentially distributed coating areas 110. A rotation shaft 200 for supporting a workpiece 1000 is disposed within each coating area 110. The rotation axis of the rotation shaft 200 is angled to the central symmetry line of the coating area 110. Figure 1 The center symmetry line of each coating area 110 is shown by a dashed line.

[0034] The workpiece turntable provided in this embodiment has its rotation axis 200 set at an angle to the central symmetry line of the coating area 110. This effectively improves the coating uniformity of the side surface of the workpiece 1000 and the two end faces along the length of the rotation axis 200, thereby improving the coating quality of the workpiece 1000. In addition, existing workpieces 1000 are usually radially distributed on the workpiece turntable, that is, the extension direction of the rotation axis of the workpiece 1000 is parallel to the radial direction of the workpiece turntable. This results in a larger gap between adjacent workpieces 1000 in the radial direction of the workpiece turntable, which leads to a large waste of space. By setting the rotation axis 200 at an angle to the central symmetry line of the coating area 110, more rotation axes 200 can be arranged on the workpiece turntable to support more workpieces 1000, thereby increasing the loading capacity of the workpieces 1000 and improving the coating efficiency.

[0035] Optionally, each coating area 110 includes two symmetrically arranged coating partitions 111, and each coating partition 111 is provided with a rotation axis 200 for supporting the workpiece 1000. The smaller of the angles between the rotation axis direction of the rotation axis 200 and the lines of symmetry of the two coating partitions 111 of the corresponding coating area 110 is greater than 45°. Figure 5 As shown, the rotation axis of the rotary shaft 200 is A, and the line of symmetry of the two coating sections 111 of the coating area 110 corresponding to the rotary shaft 200 is B. In one possible implementation, the angle between the rotation axis direction of the rotary shaft 200 and the line of symmetry of the two coating sections 111 of the corresponding coating area 110 includes angle α and angle θ, where angle θ is the smaller one. By setting the smaller of the angles between the rotation axis direction of the rotary shaft 200 and the line of symmetry of the two coating sections 111 of the corresponding coating area 110 to be greater than 45°, the evaporation path of the coating source has a more uniform evaporation area relative to the side and end faces of the workpiece 1000, ensuring that the side and end faces of the workpiece 1000 can be uniformly coated. In actual implementation, each coating area 110 can exist independently or be connected to form a whole.

[0036] Preferably, the rotation axis of the rotary shaft 200 is perpendicular to the line of symmetry of the two coating sections 111 of the corresponding coating area 110. This optimizes the structural distribution and improves overall stability. Optionally, both the coating source and the ion source can be located on the line of symmetry of their respective coating areas 110, so that the angle between the line connecting the coating source and the ion source and the length direction of the workpiece 1000 is 45°, which is beneficial for uniform coating on the sides and ends of the workpiece 1000.

[0037] like Figures 1 to 4 As shown, this embodiment also provides a vacuum chamber 10, including the aforementioned workpiece carrier, which is disposed within the cavity of the vacuum chamber 10. The vacuum chamber 10 further includes a rotation mechanism, which includes a first rotation structure and a second rotation structure. The workpiece carrier is connected to the output end of the first rotation structure, and the first rotation structure can drive the workpiece carrier to rotate along its own central axis. The rotation shaft 200 is connected to the output end of the second rotation structure, and the second rotation structure can drive the rotation shaft 200 to rotate.

[0038] The vacuum chamber 10 provided in this embodiment includes the aforementioned workpiece rotating frame. During vapor deposition, the first rotary structure drives the workpiece rotating frame to rotate along its own central axis, and the second rotary structure drives the rotary shaft 200 to rotate. By setting the rotation axis direction of the rotary shaft 200 at an angle to the central symmetry line of the coating area 110, the coating uniformity of the side surface of the workpiece 1000 and the two end faces along the length direction of the rotary shaft 200 can be effectively improved, thereby improving the coating quality of the workpiece 1000. At the same time, the rotary shaft 200 can support more workpieces 1000, increasing the loading capacity of the workpieces 1000 and thus improving the coating efficiency.

[0039] For example, in this embodiment, the workpiece 1000 has a cylindrical structure, and the extension direction of the cylindrical structure is parallel to the rotation axis of the rotation shaft 200. This arrangement can improve the coating uniformity of the circumferential side surface and the two end faces of the cylindrical structure.

[0040] Optionally, the vacuum chamber 10 further includes a coating source assembly disposed within the cavity of the vacuum chamber 10 and below the workpiece rotating frame. The coating source assembly includes a coating source, the top view of which is located within at least one coating area 110. This arrangement ensures that the coating path of the coating source forms a certain angle with both the end face and the side face of the workpiece 1000. During the rotation of the workpiece rotating frame, both end faces of the workpiece 1000 can receive relatively equal amounts of coating material emitted from the coating source, and the difference between the amount of coating material received by the side face and the two end faces is small, which is beneficial to further improve the coating uniformity of the side face and end face of the workpiece 1000. Further, the vacuum chamber 10 also includes an ion source located below the workpiece rotating frame, the top view of which is located within at least one other coating area 110. Exemplarily, the coating source can be an evaporation source, such as an electron gun.

[0041] In this embodiment, the first rotating structure includes a first driving member 311 and a carrier disk 312 that is pulsatorically connected to the output end of the first driving member 311. The workpiece rotating frame includes several material frame groups, each material frame group including two symmetrically arranged material frames 120. The several material frame groups correspond one-to-one with several coating areas 110. The two material frames 120 in each material frame group correspond one-to-one with the two coating partitions 111 in each coating area 110. The material frames 120 are fixedly connected to the carrier disk 312, and the rotating shaft 200 is rotatably mounted on the material frames 120. When the first driving member 311 drives the carrier disk 312 to rotate, the carrier disk 312 drives the material frames 120 to rotate. The arrangement of the material frames 120 can provide a large supporting force to the rotating shaft 200. Preferably, both ends of the rotary shaft 200 are detachably rotatably mounted to the material frame 120 via bearings 1100, in order to reduce the friction between the rotary shaft 200 and the material frame 120, ensure the stability of the rotary shaft 200's movement, and improve the ease of disassembly and assembly. Understandably, the rotation of the bearing disk 312 driven by the first driving member 311 is a revolution.

[0042] Optionally, the second rotary structure includes a second drive member 321 fixedly installed in the cavity of the vacuum chamber 10 and a power transmission structure. The power transmission structure includes a first gear assembly, a second gear assembly, a third gear assembly, and a fourth gear assembly. The first gear assembly includes a planetary shaft 411 rotatably passing through the support disk 312, a planetary gear 412 disposed at one end of the planetary shaft 411, and a planetary bevel gear 413 disposed at the other end of the planetary shaft 411. The planetary gear 412 meshes with the output end of the second drive member 321. The second gear assembly includes a drive shaft 421, a tandem drive gear 422 mounted on the drive shaft 421, and a planetary sub-bevel gear 423 mounted at one end of the drive shaft 421. The planetary sub-bevel gear 423 is connected to the planetary bevel gear 413 through the third gear assembly, and the tandem drive gear 422 is connected to the rotary shaft 200 through the fourth gear assembly. During operation, the second driving component 321 drives the planetary gear 412 to rotate. The rotation of the planetary gear 412 drives the planetary shaft 411 connected to it to rotate. The rotation of the planetary shaft 411 drives the planetary bevel gear 413 mounted on it to rotate. The rotation of the planetary bevel gear 413 drives the planetary sub-bevel gear 423 to rotate via the third gear assembly, which in turn drives the drive shaft 421 to rotate. The rotation of the drive shaft 421 drives the tandem shaft drive gear 422 mounted on it to rotate. The rotation of the tandem shaft drive gear 422 drives the rotary shaft 200 to rotate via the fourth gear assembly. The rotation of the rotary shaft 200 drives the workpiece 1000 mounted on it to rotate. The gear assembly has accurate transmission ratios, high transmission efficiency, high reliability, and long service life. It can be understood that the aforementioned "second driving component 321 drives the planetary gear 412 to rotate" means that when the first driving component 311 drives the bearing disk 312 to rotate, it also simultaneously drives the planetary gear 412 to revolve. Since the second drive member 321 does not revolve, the revolve of the planetary gear 412 causes the second drive member 321, which is fixedly installed in the cavity of the vacuum chamber 10, to react with the planetary gear 412, so that the planetary gear 412, which meshes with the output end of the second drive member 321, also rotates on its own axis while revolving, thereby driving the planetary shaft 411 connected to it to rotate on its own axis.

[0043] Preferably, a bearing housing 600 is provided on the bearing disk 312, and the planetary shaft 411 is rotatably connected to the bearing disk 312 through the bearing housing 600, which helps to improve the rotational reliability of the planetary shaft 411. Optionally, the planetary gear 412 and the second drive member 321 are meshed through a transition gear 500, which can play a role in spatial adaptation and buffering transmission shocks.

[0044] In one possible implementation, the third gear assembly includes a base 431 and an angle-adjusting bevel gear 432. The base 431 is connected to a support plate 312, and the angle-adjusting bevel gear 432 is mounted on the base 431. Planetary bevel gears 413 and planetary sub-bevel gears 423 mesh with the angle-adjusting bevel gear 432, respectively. The bevel gears employ a helical or spiral tooth design, generating a large driving force from the moment of contact, resulting in higher transmission efficiency than ordinary spur gears. In this embodiment, the angle-adjusting bevel gear 432 can achieve axial steering.

[0045] In this embodiment, the fourth gear assembly includes a connecting shaft and a tandem rotary gear 441 disposed at one end of the connecting shaft. The tandem rotary gear 441 meshes with a tandem drive gear 422. The other end of the connecting shaft is fixedly connected to one end of the rotary shaft 200 through a connecting structure 900. The gear assembly has accurate transmission ratio, high transmission efficiency, high operational reliability, and long service life.

[0046] Optionally, the connecting structure 900 can be configured as a threaded component or a magnetic connector. For example, the other end of the connecting shaft can be detachably connected to the rotary shaft 200 via a threaded component, reducing assembly costs; or, both the end of the connecting shaft and the end of the rotary shaft 200 can be provided with magnetic connectors, and the connecting shaft and the rotary shaft 200 can be attracted to each other by magnetic force, making disassembly and assembly convenient.

[0047] Preferably, the vacuum chamber 10 further includes an angle adjustment structure 800 and a gearbox 700. The gearbox 700 is spaced around the outside of the drive shaft 421 and rotatably connected to the base 431. One end of the angle adjustment structure 800 is connected to the support plate 312, and the other end of the angle adjustment structure 800 is connected to the gearbox 700. The gearbox 700 protects the drive shaft 421, the tandem drive gear 422, and the fourth gear assembly connected to the tandem drive gear 422 from damage by the external environment, thus improving reliability.

[0048] In this embodiment, bearing seats 600 are provided at both ends of the interior of the gearbox 700, and the two ends of the drive shaft 421 are rotatably connected to the gearbox 700 through the bearing seats 600, which helps to improve the rotational reliability of the drive shaft 421.

[0049] Optionally, the angle adjustment structure 800 includes a connecting arm 810, with connecting members 820 at both ends of the connecting arm 810. The length of the connecting members 820 is adjustable, and both ends of the connecting arm 810 are connected to the carrier plate 312 and the gearbox 700 respectively via the connecting members 820. See also Figures 2 to 4During angle adjustment, the gearbox 700 rotates relative to the base 431. Adjusting the length of the connectors 820 at both ends of the connecting arm 810 adjusts the included angle between the gearbox 700 and the base 431, thereby adjusting the meshing position between the planetary bevel gear 423 and the angle adjustment bevel gear 432. This, in turn, adjusts the relative position between the rotating shaft 200, which is connected to the drive gear 422 of the drive shaft 421, and the coating source. Optionally, the connectors 820 can be made of stainless steel, and their length can be adjusted as needed in practical applications. Alternatively, the connectors 820 can also be made of a connecting rope.

[0050] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A workpiece rotating frame, characterized in that, The workpiece rotating frame includes several circumferentially distributed coating areas (110). A rotating shaft (200) for supporting the workpiece (1000) is provided in the coating area (110). The rotation axis direction of the rotating shaft (200) is set at an angle to the central symmetry line of the coating area (110).

2. The workpiece turntable according to claim 1, characterized in that, Each of the coating regions (110) includes two symmetrically arranged coating partitions (111), and each of the coating partitions (111) is provided with a rotation axis (200) for supporting the workpiece (1000). The smaller of the angles between the rotation axis direction of the rotation axis (200) and the lines of symmetry of the two coating partitions (111) of the corresponding coating region (110) is greater than 45°.

3. The workpiece rotating frame according to claim 2, characterized in that, The rotation axis (200) is perpendicular to the line of symmetry of the two coating sections (111) of the corresponding coating area (110).

4. A vacuum chamber, characterized in that, The system includes a workpiece carrier as described in any one of claims 1-3, wherein the workpiece carrier is disposed within the cavity of the vacuum chamber, and the vacuum chamber further includes a rotation mechanism, wherein the rotation mechanism includes a first rotation structure and a second rotation structure, the workpiece carrier is connected to the output end of the first rotation structure, the first rotation structure is capable of driving the workpiece carrier to rotate along its own central axis, and the rotation shaft (200) is connected to the output end of the second rotation structure, wherein the second rotation structure is capable of driving the rotation shaft (200) to rotate.

5. The vacuum chamber according to claim 4, characterized in that, The vacuum chamber further includes a coating source assembly, which is disposed within the cavity of the vacuum chamber and located below the workpiece rotating frame. The coating source assembly includes a coating source, the top view of which is located within at least one of the coating areas (110).

6. The vacuum chamber according to claim 4, characterized in that, The first rotary structure includes a first driving member (311) and a carrier disk (312) that is drivenly connected to the output end of the first driving member (311). The workpiece rotating frame includes several material frame groups, each material frame group including two symmetrically arranged material frames (120). The several material frame groups and several coating areas (110) correspond one-to-one. Each coating area (110) includes two symmetrically arranged coating partitions (111). The two material frames (120) of each material frame group and the two coating partitions (111) of each coating area (110) correspond one-to-one. The material frame (120) is fixedly connected to the carrier disk (312), and the rotary shaft (200) is rotatably mounted on the material frame (120).

7. The vacuum chamber according to claim 6, characterized in that, The second rotary structure includes a second drive member (321) fixedly installed in the cavity of the vacuum chamber and a power transmission structure. The power transmission structure includes a first gear assembly, a second gear assembly, a third gear assembly, and a fourth gear assembly. The first gear assembly includes a planetary shaft (411) rotatably passing through the support plate (312), a planetary gear (412) disposed at one end of the planetary shaft (411), and a planetary bevel gear (413) disposed at the other end of the planetary shaft (411). 412) meshes with the output end of the second drive member (321). The second gear assembly includes a drive shaft (421), a tandem drive gear (422) mounted on the drive shaft (421), and a planetary sub-bevel gear (423) mounted on one end of the drive shaft (421). The planetary sub-bevel gear (423) is connected to the planetary bevel gear (413) through the third gear assembly. The tandem drive gear (422) is connected to the rotary shaft (200) through the fourth gear assembly.

8. The vacuum chamber according to claim 7, characterized in that, The third gear assembly includes a base (431) and an angle-adjusting bevel gear (432). The base (431) is connected to the support plate (312). The angle-adjusting bevel gear (432) is disposed on the base (431). The planetary bevel gear (413) and the planetary sub-bevel gear (423) mesh with the angle-adjusting bevel gear (432) respectively.

9. The vacuum chamber according to claim 7, characterized in that, The fourth gear assembly includes a connecting shaft and a tandem rotary gear (441) disposed at one end of the connecting shaft. The tandem rotary gear (441) meshes with the tandem drive gear (422). The other end of the connecting shaft is fixedly connected to one end of the rotary shaft (200) through a connecting structure (900).

10. The vacuum chamber according to claim 8, characterized in that, The vacuum chamber further includes an angle adjustment structure (800) and a gearbox (700). The gearbox (700) is spaced around the outside of the drive shaft (421) and rotatably connected to the base (431). One end of the angle adjustment structure (800) is connected to the bearing plate (312), and the other end of the angle adjustment structure (800) is connected to the gearbox (700).

11. The vacuum chamber according to claim 10, characterized in that, The angle adjustment structure (800) includes a connecting arm (810), with connecting members (820) respectively provided at both ends of the connecting arm (810). The length of the connecting member (820) is adjustable. The two ends of the connecting arm (810) are respectively connected to the bearing plate (312) and the gearbox body (700) through the connecting member (820).

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