Heated precursor transmission pipeline and thin film deposition equipment thereof

Abstract

The invention discloses a heated precursor transmission pipeline and thin film deposition equipment thereof. The pipeline comprises a transmission pipeline assembly internally provided with a pipe cavity, a main heating unit, a compensation heating unit, a first heat preservation unit and a second heat preservation unit. The main heating unit and the compensation heating unit are attached to the outer wall of the conveying pipeline assembly in the length direction of the conveying pipeline assembly, the first heat preservation unit is attached to the exterior of the main heating unit, and the second heat preservation unit is attached to the exterior of the compensation heating unit. The main heating unit and the compensation heating unit are arranged outside the pipeline, the main heating unit is used for rapidly heating the pipeline, and the compensation heating unit is used for adjusting and compensating the temperature of the local pipeline according to needs, so that the temperature of the precursor pipeline is accurately adjusted and controlled; the temperature stability of the process gas transmitted to the process chamber and the film deposition quality are improved, the pipeline is divided into standardized units, the cost is reduced, and the pipeline can be flexibly assembled to meet the requirements of different transmission pipelines.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a heated precursor delivery line and a thin film deposition equipment. BACKGROUND

[0002] In a semiconductor process equipment, especially a thin film deposition equipment, a solid source is generally input into a shower plate in a process chamber in a gaseous state after being gasified by heating. The process gas after the solid source is gasified generally needs to be input into the shower plate at a set temperature and be able to maintain the set temperature for a long time. A gas delivery line is connected between the solid source gasification mechanism and the process chamber, which is generally referred to as a precursor delivery line. Due to the influence of environmental factors such as heat dissipation, the temperature of the process gas input into the shower plate will fluctuate, and even condense, which ultimately affects the quality of thin film deposition. In view of the above problems, a heating unit and a heat preservation layer are generally arranged outside the precursor delivery line to reduce the influence of heat dissipation on the temperature of the process gas, but the existing design still cannot meet the high-precision temperature control requirements of the line. For example, a titanium nitride atomic layer deposition device disclosed in Chinese patent (CN107868944A) is provided with a heating unit on the source bottle outlet line, the titanium precursor delivery line and the front-stage line, so as to perform segmented gradient heating on the source bottle outlet line, the titanium precursor delivery line and the front-stage line. However, this gradient temperature heating control cannot accurately control and adjust the local temperature as needed, and the temperature control fluctuation is still relatively large, which cannot meet the strict process requirements of semiconductors. SUMMARY

[0003] The present application aims to overcome the deficiencies of the prior art, and provides a heated precursor delivery line and a thin film deposition equipment, so as to solve the technical problem of low temperature control precision of the existing precursor delivery line.

[0004] To achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0005] In a first aspect, the embodiments of the present application provide a heated precursor delivery line, which comprises: a delivery line assembly provided with a lumen, a main heating unit, a compensation heating unit, a first heat preservation unit and a second heat preservation unit.

[0006] The main heating unit is attached to part of the outer wall of the delivery line assembly along the length direction of the delivery line assembly.

[0007] The compensation heating unit comprises a plurality of compensation heating sheets, and the plurality of compensation heating sheets are attached to the remaining part of the outer wall of the delivery line assembly along the length direction of the delivery line assembly.

[0008] The first heat preservation unit is attached to the outside of the main heating unit, and the second heat preservation unit is attached to the outside of the compensation heating unit.

[0009] The main heating unit is used for rapidly heating the transmission pipeline assembly, and the compensation heating unit is used for compensation heating of a local position of the transmission pipeline assembly.

[0010] The main heating unit is a heating wire or a heating sheet attached to the outer wall of the transmission pipeline assembly.

[0011] The first heat preservation unit and the second heat preservation unit are made of engineering plastics, glass fiber or ceramic material.

[0012] The transmission pipeline assembly is made of stainless steel material.

[0013] The transmission pipeline assembly comprises a plurality of standardized pipeline units, and a sealing ring is arranged between the abutting surfaces of adjacent standardized pipeline units.

[0014] The standardized pipeline unit comprises a pipeline body and a connecting piece, the pipeline body is internally provided with a pipe cavity, one end of the pipeline body is a first abutting portion, the other end of the pipeline body is a second abutting portion, the first abutting portion has a first abutting plane, the second abutting portion has a second abutting plane, and the second abutting portion is provided with a clearance groove behind the second abutting plane, the connecting piece is arranged in the clearance groove and connected to the first abutting plane of the adjacent pipeline body through the second abutting plane.

[0015] The transmission pipeline assembly is further provided with a plurality of temperature controllers, temperature detection sensors and temperature alarms connected to the temperature controllers, the temperature detection sensors are used for detecting the temperature of different positions of the transmission pipeline assembly, and the temperature alarms are used for starting alarm when the detection value of the temperature alarms deviates from the set alarm threshold.

[0016] The standardized pipeline unit is further provided with at least one oil passage, and the oil passage is provided with a circulating heating medium.

[0017] The standardized pipeline unit comprises a gas conveying pipe, a heat conducting medium layer and a heat conducting block, the heat conducting medium layer is wrapped on the outer wall of the gas conveying pipe, and the heat conducting block is wrapped on the outside of the heat conducting medium layer.

[0018] In a second aspect, an embodiment of the present application provides a thin film deposition device, which comprises the heated precursor transmission pipeline as claimed in any one of the above.

[0019] The heated precursor transmission pipeline and the thin film deposition device thereof of the present application, by setting a main heating unit and a compensation heating unit outside the pipeline, the main heating unit is used for fast heating and temperature rising of the pipeline, and the compensation heating unit is used for temperature adjustment and compensation of the local pipeline as needed, which can realize accurate temperature control of the precursor pipeline, so as to improve the temperature stability of the process gas transmission to the process chamber and the thin film deposition quality. And the transmission pipeline assembly, the heating unit and the heat preservation unit form a standardized module, which can be flexibly assembled according to the actual situation of the equipment, has stronger adaptability, and reduces the processing cost.

[0020] The above description is only a summary of the technical scheme of the present application, in order to more clearly understand the technical means of the present application, it can be implemented according to the content of the specification, and in order to make the above and other purposes, characteristics and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail as follows. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is the axial view of the heated precursor transmission pipeline of the embodiment of the present application.

[0022] Figure 2 It is the front and rear direction exploded view of the heated precursor transmission pipeline of the embodiment of the present application.

[0023] Figure 3 It is the vertical direction exploded view of the heated precursor transmission pipeline of the embodiment of the present application.

[0024] Figure 4 It is the exploded view of the transmission pipeline assembly part of the first embodiment of the heated precursor transmission pipeline of the embodiment of the present application.

[0025] Figure 5 It is the structure schematic view of the transmission pipeline assembly part of the second embodiment of the heated precursor transmission pipeline of the embodiment of the present application. Figure 4 It is the enlarged structure schematic view of the local part A.

[0026] Figure 6 It is the structure schematic view of the transmission pipeline assembly part of the second embodiment of the heated precursor transmission pipeline of the embodiment of the present application.

[0027] Figure 7 It is the perspective view of the transmission pipeline assembly part of the second embodiment of the heated precursor transmission pipeline of the embodiment of the present application.

[0028] Figure 8 It is the structure schematic view of the transmission pipeline assembly part of the third embodiment of the heated precursor transmission pipeline of the embodiment of the present application. Figure 6 It is the enlarged structure schematic view of the local part B.

[0029] Figure 9 It is the structure schematic view of the transmission pipeline assembly part of the third embodiment of the heated precursor transmission pipeline of the embodiment of the present application.

[0030] Reference numerals:

[0031] Heated precursor transmission pipeline 100, transmission pipeline assembly 1, main heating unit 2, first heat preservation unit 3, compensation heating unit 4, second heat preservation unit 5, adapter 6, temperature controller 7, temperature detection sensor and temperature alarm 8, sealing ring 9, first standardized pipeline unit 11, second standardized pipeline unit 12, third standardized pipeline unit 13, lumen 111, connecting hole 112, pipe body 120, lumen 121, air avoidance groove 122, connecting piece 123, first oil passage 1201, second oil passage 1202, oil inlet joint 1203, oil outlet joint 1204, gas conveying pipe 131, heat conducting medium layer 132, heat conducting block 133. DETAILED DESCRIPTION

[0032] In order to make the objects, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and specific embodiments.

[0033] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0034] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship described based on the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0035] In addition, the terms "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features referred to. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0036] In the present application, unless specifically defined and limited otherwise, the terms "mounting", "connected", "connecting", "fixed", and "fixedly" mean to be connected by any means, for example, fixed connection, detachable connection, or integral connection; mechanical connection, or electrical connection; direct connection, or indirect connection via an intermediate medium; or internal communication between two elements, or interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in the present application according to the specific circumstances.

[0037] In the present application, unless specifically defined and limited otherwise, "on" or "under" of a first feature to a second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, "on", "above" and "over" of the first feature to the second feature includes that the first feature is directly above and obliquely above the second feature, or only means that the horizontal height of the first feature is higher than that of the second feature. "Under", "below" and "under" of the first feature to the second feature includes that the first feature is directly below and obliquely below the second feature, or only means that the horizontal height of the first feature is less than that of the second feature.

[0038] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0039] In a semiconductor process equipment, especially a thin film deposition equipment, a solid source is generally input into a shower plate in a process chamber in a gaseous state after being gasified by heating. The process gas after the solid source is gasified generally needs to be input into the shower plate at a set temperature and be able to maintain the set temperature for a long time. A gas transmission pipeline is connected between the solid source gasification mechanism and the process chamber, which is generally called a precursor transmission pipeline. Due to the influence of environmental factors such as heat dissipation, the temperature of the process gas input into the shower plate will fluctuate, and even condense, which ultimately affects the quality of thin film deposition. In view of the above problems, a heating unit and a heat preservation layer are generally arranged outside the precursor transmission pipeline to reduce the influence of heat dissipation on the temperature of the process gas, but the existing design still cannot meet the high-precision temperature control requirement. For example, Chinese patent (CN107868944A) discloses a titanium nitride atomic layer deposition device, which is provided with a heating unit on the source bottle outlet pipeline, the titanium precursor transmission pipeline and the front-stage pipeline, so as to perform segmented gradient heating on the source bottle outlet pipeline and the titanium precursor transmission pipeline, and perform segmented gradient cooling on the front-stage pipeline. However, this gradient temperature heating control cannot accurately control and adjust the local temperature as needed. In order to solve the above problems, the embodiment discloses a heated precursor transmission pipeline 100.

[0040] Please refer to Figures 1 to 5 which is a first embodiment structure diagram of the heated precursor transmission pipeline 100. In the embodiment, the heated precursor transmission pipeline 100 comprises: a transmission pipeline assembly 1 provided with a pipe cavity inside, a main heating unit 2, a compensation heating unit 4, a first heat preservation unit 3 and a second heat preservation unit 5; the main heating unit 2 and the compensation heating unit 4 are wrapped outside the transmission pipeline assembly 1, the first heat preservation unit 3 and the second heat preservation unit 5 are wrapped outside the main heating unit 2 and the compensation heating unit 4, the main heating unit 2 and the compensation heating unit 4 form a cover for the outer wall of the transmission pipeline assembly, which is used for heating the transmission pipeline assembly 2. The first heat preservation unit 3 and the second heat preservation unit 5 form a full cover for the outer wall of the main heating unit 2 and the compensation heating unit 4, which is used for reducing the speed of releasing internal heat energy to the external environment, reducing energy consumption and maintaining the temperature stability of the transmission pipeline assembly 1.

[0041] The main heating unit 2 is arranged along the length direction of the transmission pipeline assembly 1 and is attached to part of the outer wall of the transmission pipeline assembly 1; the transmission pipeline assembly 1 is generally in a long strip structure, and the corresponding main heating unit 2 is also in a long strip structure, which is attached to part of the outer wall of the transmission pipeline assembly 1, and the remaining part is left empty for attaching the compensation heating unit 4. The main heating unit 2 and the transmission pipeline assembly 1 are arranged along the length direction, which is beneficial to the main heating unit 2 to quickly heat the whole transmission pipeline assembly 1.

[0042] The compensation heating unit 4 comprises a plurality of compensation heating sheets, which are attached to the outer wall of the remaining part of the transmission pipeline assembly 1 along the length direction of the transmission pipeline assembly 1; that is, the compensation heating unit 4 comprises one or more compensation heating sheets, which can be arranged at different positions of the outer wall of the transmission pipeline assembly 1 according to the process requirements, and are mainly attached to the positions requiring temperature compensation. The compensation heating sheets are used to assist the main heating unit 2 in temperature regulation of the transmission pipeline assembly 1.

[0043] In another embodiment, the compensation heating sheets of the compensation heating unit 4 can all cover the outer wall of the remaining part of the transmission pipeline assembly 1, and at this time, each compensation heating sheet adopts an independent heating control mode. In the initial heating stage of the transmission pipeline assembly 1, the main heating unit 2 and all the compensation heating units 4 can be started at the same time, so as to quickly heat the transmission pipeline assembly 1 to the required temperature. When the transmission pipeline assembly 1 reaches the set temperature, the compensation heating units 4 are turned off. In the subsequent running process, according to the real-time monitoring temperature, part of the compensation heating sheets are controlled to be started, so as to quickly and accurately heat and compensate the local temperature, and finally the temperature of the process gas (of course, other gases transmitted through the pipeline) passing through the transmission pipeline assembly is kept to have a small fluctuation.

[0044] Of course, it can be understood that in another embodiment, only the main heating unit 2 can be started in the initial heating stage of the transmission pipeline assembly 1, and the compensation heating unit 4 is only started in the temperature compensation process in the subsequent running process.

[0045] The first heat preservation unit 3 is attached to the outside of the main heating unit 2, and the second heat preservation unit 5 is attached to the outside of the compensation heating unit 4. The outer shape structure of the first heat preservation unit 3 corresponds to the structure of the main heating unit 2, and the outer shape structure of the second heat preservation unit 5 corresponds to the outer shape structure of the compensation heating unit 4. The first heat preservation unit 3 and the second heat preservation unit 5 adopt independent structure design, which is beneficial to the standardization of the heat preservation unit and the flexible assembly of the transmission pipeline assembly. The structures of the first heat preservation unit 3 and the second heat preservation unit 5 can be the same structure or different structures, and the functions of the first heat preservation unit 3 and the second heat preservation unit 5 are both heat preservation and heat insulation. According to the length of the actual transmission pipeline assembly 1, the length of the heat preservation layer can be flexibly set, and there is no need to independently process a plurality of different models of heat preservation layers for standby, thereby reducing the production cost.

[0046] The main heating unit 2 is used for quickly heating the transmission pipeline assembly 1, and the compensation heating unit 4 is used for compensation heating of the local position of the transmission pipeline assembly 1. Compared with the existing pipeline temperature design, the heated precursor transmission pipeline 100 of the embodiment can ensure the initial heating to be fast and efficient, and can also maintain the temperature of the transmission pipeline assembly 1 during the running stage and accurately adjust the local position. Compared with the existing temperature control system, the scheme of the embodiment has higher flexibility and more convenient local adjustment.

[0047] Please refer to the accompanying drawings again Figures 1 to 3 In the embodiment, the transmission pipeline assembly 1 has a cuboid structure, and the cuboid structure has four equal-width sides. In other embodiments, other shapes such as a straight prism or a cylinder can also be used. Figure 2 And Figure 3 Taking the straight four-prism structure as an example, the main heating unit 2 is provided with two groups, which are respectively arranged on the front and back surfaces of the transmission pipeline assembly 1, and the compensation heating unit 4 is arranged on the upper and lower surfaces of the transmission pipeline assembly 1. The interval cross arrangement of the main heating unit 2 and the compensation heating unit 4 takes into account the heating efficiency and the convenience of temperature adjustment.

[0048] In the embodiment, the main heating unit 2 is a heating wire or a heating sheet attached to the outer wall of the transmission pipeline assembly 1. The heating wire or the heating sheet is made into an equal-thickness sheet structure, which is attached to the outer wall of the transmission pipeline assembly 1, and is specifically an electric heating sheet or an electric heating wire.

[0049] In order to improve the uniformity of heating and heat preservation of the transmission pipeline assembly 1, the transmission pipeline assembly 1 is made of a material with a relatively thick pipeline wall and high thermal conductivity. Increasing the thickness of the pipeline wall can improve the heat conduction efficiency of the main heating unit 2 and the compensation heating unit 4 on the pipeline heating, and can also avoid the rapid drop of the pipeline temperature, which affects the process gas temperature stability.

[0050] The inner cavity of the transmission pipeline assembly 1 adopts an electro-polishing process, so that the surface roughness reaches 0.2 or higher.

[0051] In the embodiment, the first heat preservation unit 3 and the second heat preservation unit 5 are made of engineering plastics or ceramic materials, and other materials with high thermal insulation such as glass fiber or foamed silica gel.

[0052] In the embodiment, the transmission pipeline assembly 1 is made of stainless steel. Of course, in other embodiments, the transmission pipeline assembly 1 can also be made of other materials with good thermal conductivity.

[0053] In order to reduce the production cost of the transmission pipeline assembly 1 and improve the assembly flexibility, the transmission pipeline assembly 1 comprises several standardized pipeline units, and sealing rings 9 are arranged between the abutting surfaces of adjacent standardized pipeline units.

[0054] Please refer again to Figure 3 The transmission pipeline assembly 1 is cut into a first standardized pipeline unit 11, a second standardized pipeline unit 12 and a third standardized pipeline unit 13, a sealing ring 9 is arranged at the abutting surface of the first standardized pipeline unit 11 and the second standardized pipeline unit 12, and a sealing ring 9 is arranged at the abutting surface of the second standardized pipeline unit 12 and the third standardized pipeline unit 13. The gas inlet end of the first standardized pipeline unit 11 is provided with an adapter 6 connected to a source gas cylinder, and the gas outlet end of the third standardized pipeline unit 13 is connected to a shower plate of a process chamber.

[0055] The first standardized pipeline unit 11 and the third standardized pipeline unit 13 are both provided with a gas path turning structure, and the second standardized pipeline unit 12 is a straight line structure. Different angles and numbers of the first standardized pipeline unit 11, the second standardized pipeline unit 12 and the third standardized pipeline unit 13 can be combined to realize the gas path communication between the source gas cylinder and the process chamber at different distances and angles.

[0056] The first standardized pipeline unit 11, the second standardized pipeline unit 12 and the third standardized pipeline unit 13 have the same structure. Taking the second standardized pipeline unit 12 as an example, it comprises a pipeline body 120 and a connecting piece 123. The pipeline body 120 is internally provided with a pipe cavity 121. One end of the pipeline body 120 is a first abutting portion, and the other end is a second abutting portion. The first abutting portion has a first abutting surface, and the second abutting portion has a second abutting surface. The second abutting portion is provided with a clearance groove 122 behind the second abutting surface. The connecting piece 123 is arranged in the clearance groove 122 and connected to the first abutting surface of the adjacent standardized pipeline unit through the second abutting surface.

[0057] As Figure 5The diagram shows the separated structure of the mating ends between the first standardized piping unit 11 and the second standardized piping unit 12. The mating end structure of the first standardized piping unit 11 is the same as the structure of one end of the other standardized piping units, and the end structure of the second standardized piping unit 12 is the same as the structure of the other mating end of the other standardized piping units. The first standardized piping unit 11 has a cavity 111 inside, and a connecting hole 112 is provided on the mating surface. The connector 123 passes through the second standardized piping unit 12 and connects to the connecting hole 112, thereby assembling and fixing the first standardized piping unit 11 and the second standardized piping unit 12. The sealing ring 9 is pressed between the mating surfaces of the two to improve the sealing of the cavity connection.

[0058] The recessed groove 122 is a recessed groove in the pipe body 120. The connecting piece 123 can be a screw or the like. During assembly, the screw enters through the recessed groove 122, passes through the mating surface, and is screwed into the connecting hole 112. After assembly, the screw is completely recessed into the recessed groove 122 to maintain the flatness of the outer wall of the pipe body 120, thereby facilitating the installation of the main heating unit 2 or the compensating heating unit 4. Multiple sets of the recessed groove 122 and its corresponding connecting piece 123 can be provided to form a more reliable fixed connection.

[0059] In the first embodiment of the transmission pipeline assembly 1, the pipeline body 120 is a straight quadrangular prism structure integrally formed from aluminum alloy. Its pipe wall is thicker than that of existing round pipe structures, and its surface is flat, facilitating subsequent connection of heating elements or heating wires. This standardized pipeline unit can be arbitrarily combined and spliced ​​as needed to accommodate pipeline connections between source gas cylinders and process chambers with different spacing or orientations. The standardized modular design improves its compatibility and reduces production costs.

[0060] like Figure 1 As shown, to achieve automatic temperature monitoring and alarm, the transmission pipeline assembly 1 is also equipped with several temperature controllers 7 and temperature detection sensors and temperature alarms 8 connected to the temperature controllers 7. The temperature detection sensors and temperature alarms 8 are used to detect the temperature at different locations on the transmission pipeline assembly 1. The temperature alarm is used to activate an alarm when the detection value of the temperature detection sensor deviates from a set alarm threshold. The probe of the temperature detection sensor is in contact with the pipeline body 120 and transmits the detected temperature value to the temperature controllers 7. The temperature controllers 7 receive the temperature detection signal and control whether the temperature detection sensors and temperature alarms 8 activate the alarm according to the control logic, and simultaneously start and stop the compensation heating unit 4 accordingly, so as to achieve automatic, efficient and precise temperature control.

[0061] Due to the deformation of the heating sheet or heating wire during heating, the heating sheet or heating wire can be partially separated from the outer wall of the pipe body 120 after long-term operation, affecting the uniformity of heating, as shown in Figures 6 to 8 As shown in the drawings, the transmission pipeline assembly 1 is also provided with at least one oil passage, that is, the standardized pipeline unit is also provided with at least one oil passage. In this embodiment, the transmission pipeline assembly 1 is provided with a first oil passage 1201 and a second oil passage 1202, the first oil passage 1201 and the second oil passage 1202 form a closed loop circulation passage, and the two ends extend to the two ends of the transmission pipeline assembly 1, the first oil passage 1201 and the second oil passage 1202 are provided with a circulating heating medium, such as heating oil, and are connected to the oil inlet joint 1203 and the oil outlet joint 1204 on the outer wall of the pipe body 120, and the oil inlet joint 1203 and the oil outlet joint 1204 are connected to the oil temperature machine through the pipeline. The heating medium can maintain sufficient contact with the oil passage, thereby reducing the local temperature difference caused by the separation of the heating wire or heating sheet from the pipeline.

[0062] Please refer to Figure 8 When the oil passage is arranged in the transmission pipeline assembly 1, the butt joint structure and mode between adjacent standardized pipeline units are the same as the first embodiment, please refer to Figures 1 to 5 The butt joint structure is shown.

[0063] Please refer to Figure 9 It is another embodiment structure diagram of the standardized pipeline unit of the heated precursor transmission pipeline 100 of the present embodiment. Compared with the one-piece structure of the pipe body 120 of the first embodiment, the present embodiment is a multi-component combined structure. Taking the third standardized pipeline unit 13 as an example, the third standardized pipeline unit 13 comprises a gas conveying pipe 131, a heat conducting medium layer 132, and a heat conducting block 133. The heat conducting medium layer 132 is wrapped on the outer wall of the gas conveying pipe 131, and the heat conducting block 133 is wrapped outside the heat conducting medium layer 132. The gas conveying pipe 131 is a conventional standard metal circular pipe, and the heat conducting block 133 is a thickened aluminum alloy material with a flat outer surface in the shape of a straight four-prism.

[0064] Preferably, the heat conducting medium layer 132 is a semicircular pipe structure with two symmetrical structures, and the heat conducting block 133 is a square block structure with two symmetrical structures, and the heat conducting block 133 is fixedly connected by screws.

[0065] The heated precursor transmission pipeline and the thin film deposition device thereof in the embodiment can realize accurate temperature regulation of the precursor pipeline, improve the temperature stability of the process gas transmitted to the process chamber and the thin film deposition quality, and reduce the production cost and improve the pipeline adaptability through the modular pipeline design.

[0066] The above is only used to further illustrate the technical content of the present application by way of examples, so that the reader can more easily understand, but does not represent that the embodiments of the present application are limited to this. Any technical extension or re-creation made according to the present application is protected by the present application. The protection scope of the present application is subject to the claims.

Claims

1. A heating precursor transport pipeline, characterized in that, include: The assembly includes a transmission pipeline with a cavity, a main heating unit, a compensating heating unit, a first insulation unit, and a second insulation unit. The main heating unit is attached to a portion of the outer wall of the transmission pipeline assembly along the length of the transmission pipeline assembly; The compensation heating unit includes a plurality of compensation heating elements, which are attached to the outer wall of the remaining portion of the transmission pipeline assembly along the length of the transmission pipeline assembly. The first insulation unit is attached to the outside of the main heating unit, and the second insulation unit is attached to the outside of the compensation heating unit to form full external coverage of the transmission pipeline assembly; The main heating unit is used to rapidly heat up the transmission pipeline assembly, and the compensation heating unit is used to provide compensation heating for a localized part of the transmission pipeline assembly.

2. The heating precursor transport pipeline according to claim 1, characterized in that, The main heating unit is a heating wire or heating element attached to the outer wall of the transmission pipeline assembly.

3. The heating precursor transport pipeline according to claim 1, characterized in that, The first insulation unit and the second insulation unit are made of engineering plastics, foamed silicone, glass fiber or ceramic materials.

4. The heating precursor transport pipeline according to claim 1, characterized in that, The transmission pipeline assembly is made of stainless steel.

5. The heating precursor transport pipeline according to any one of claims 1 to 4, characterized in that, The transmission pipeline assembly includes several standardized pipeline units, and a sealing ring is provided between the mating surfaces of adjacent standardized pipeline units.

6. The heating precursor transport pipeline according to claim 5, characterized in that, The standardized pipeline unit includes a pipeline body and a connector. The pipeline body has a cavity inside. One end of the pipeline body is a first docking part and the other end is a second docking part. The first docking part has a first docking plane and the second docking part has a second docking plane. The second docking part is provided with a clearance groove behind the second docking plane. The connector is recessed in the clearance groove and passes through the second docking plane to connect to the first docking plane of another adjacent pipeline body.

7. The heating precursor transmission pipeline according to claim 5, characterized in that, The transmission pipeline assembly is also equipped with several temperature controllers, as well as temperature detection sensors and temperature alarms connected to the temperature controllers. The temperature detection sensors are used to detect the temperature at different locations of the transmission pipeline assembly, and the temperature alarms are used to activate an alarm when the detected value of the temperature alarm deviates from a set alarm threshold.

8. The heating precursor transport pipeline according to claim 5, characterized in that, The standardized pipeline unit is also equipped with at least one oil passage, and the oil passage contains a circulating heating medium.

9. The heating precursor transmission pipeline according to claim 5, characterized in that, The standardized pipeline unit includes: a gas transmission pipe, a heat-conducting medium layer, and a heat-conducting block. The heat-conducting medium layer covers the outer wall of the gas transmission pipe, and the heat-conducting block covers the outside of the heat-conducting medium layer.

10. A thin film deposition apparatus, characterized in that, The thin film deposition apparatus includes a heated precursor transport pipeline as described in any one of claims 1 to 9.

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