Sintering furnace for processing reaction-sintered silicon carbide with monitoring function

Abstract

The application discloses a sintering furnace with monitoring function for reaction sintering silicon carbide processing, and relates to the field of sintering furnaces.The sintering furnace comprises a sintering furnace shell, the inner wall of the sintering furnace shell is fixedly connected with support columns arranged in a circumferential array, the surface of the support columns is provided with a rack frame which is matched with the shape of the inside of the sintering furnace shell and increases the loading volume, the rack frame comprises two circular ring plates which slide with the surface of the support columns, the two circular ring plates are symmetrically and fixedly connected with limiting racks which are arranged in a circumferential array and provide multiple layers of placement positions for blanks, and the two limiting racks are slidably connected with a placement plate which is used for recombining the structure of the rack frame.The two circular ring plates and the limiting racks constitute a reconfigurable frame, the placement plate has different sizes, the blanks can be flexibly placed in multiple layers, the utilization rate of the loading volume is improved, the rack is inserted into the support column, the rack frame is aligned with the furnace body, and the rack frame is prevented from tilting when being moved in or out;the auxiliary monitoring column is integrated with the functions of moving and monitoring, and the operation process is simplified.

Description

TECHNICAL FIELD

[0001] The sintering equipment relates to the field of sintering furnaces, in particular to a sintering furnace with monitoring function for processing reaction sintered silicon carbide. BACKGROUND

[0002] Reaction sintered silicon carbide is widely used in aerospace, semiconductor and high-end equipment manufacturing fields due to its high hardness, high temperature resistance and corrosion resistance. The space utilization rate, loading and unloading process anti-damage ability and process reliability of the sintering furnace as the core production equipment directly determine the product quality and production cost.

[0003] The existing Chinese invention patent with the publication number CN118310295A discloses a vertical sintering furnace; the following problems still exist in actual use:

[0004] The sintering furnace relies on two groups of rollers of the loading table to slide in and out of the material, and uses one group of rollers to realize the feeding and discharging of the material, so that the two groups of rollers are worn to the same extent. Each time the material is fed or discharged, the two groups of rollers alternately support the front half or the rear half of the loading table. When the load is heavy, the roller and the loading table are in local line contact. Due to uneven weight distribution of the blank body stack, the loading table torque is inclined. When the traction speed of the external conveying equipment is too fast, the inertia vibration of the roller group is amplified, which causes the horizontal deflection of the loading table. Moreover, the roller conveying assembly of the sintering furnace occupies half of the internal space of the sintering furnace, and can only be loaded in one layer or stacked. When stacked, it is easy to collapse due to uneven weight, the loading capacity of a single furnace is reduced, and the unit energy consumption is increased. SUMMARY

[0005] In order to improve the problems of loading table deviation and space waste, the application provides a sintering furnace with monitoring function for processing reaction sintered silicon carbide.

[0006] The sintering furnace with monitoring function for processing reaction sintered silicon carbide provided by the application adopts the following technical scheme:

[0007] A sintering furnace with monitoring function for processing reaction sintered silicon carbide, comprising a sintering furnace shell, the inner wall of the sintering furnace shell is fixedly connected with a circumferential array of support columns, the surface of the support column is provided with a rack frame which is adapted to the shape of the inside of the sintering furnace shell and increases the loading volume, the rack frame comprises two circular ring plates which slide with the surface of the support column, two circular ring plates are symmetrically fixedly connected with a circumferential array of limiting racks which provide multiple layer placement positions for the blank body, and the two limiting racks are slidably connected with placement plates of different sizes for recombining the structure of the rack frame;

[0008] The outer side of the sintering furnace shell is provided with a conveying vehicle for moving the rack frame, the surface of the conveying vehicle is fixedly connected with an extension frame which is distributed in a circumferential array and uniformly supported by inserting with the support column, the inside of the conveying vehicle is slidably connected with an auxiliary monitoring column which extends to the inside of the sintering furnace shell and is bolted with the rack frame, and the inside of the auxiliary monitoring column is slidably connected with a silicon carbide column which assists in monitoring the pressure in the sintering furnace shell by displacement distance.

[0009] The bottom of the conveying vehicle is provided with a support assembly for assisting in supporting and avoiding deformation of the extension frame, the support assembly comprises two uneven moving plates and support frames in a normal state, the inside of the moving plate is hingedly connected with a connecting rod, and the end of the connecting rod away from the moving plate is hingedly connected with the inside of the support frame at both ends of the support rack.

[0010] By adopting the above technical scheme, the circular ring plate and the limiting frame form a reconfigurable frame, which cooperates with the placement plates of different sizes to achieve flexible placement of the embryo body in multiple layers, improve the utilization rate of loading volume, and ensure that the rack frame and the furnace body are accurately aligned by inserting the extension frame with the support column to avoid tilting when moving in or out. The auxiliary monitoring column integrates the functions of moving and monitoring, simplifies the operation process, and through the linkage of the hingedly connected connecting rod, moving plate and support frame, the uneven moving plate in a normal state can adaptively adjust the support angle to avoid deformation of the extension frame due to heavy weight and ensure the structural stability.

[0011] Preferably, the inside of the limiting frame is movably connected with a slide column, both ends of the slide column are fixedly connected with square plates of different functions, both ends of the placement plate are provided with T-shaped grooves extending into the inside of the limiting frame and sliding with one of the square plates, and the surface of the limiting frame away from the placement plate is provided with a redundant groove sliding with the other square plate.

[0012] By adopting the above technical scheme, the square plates of different functions at both ends are respectively adapted to the T-shaped grooves and the redundant grooves of the placement plate to realize horizontal sliding and vertical limiting of the placement plate, and both adjustment flexibility and fixed reliability are taken into account. The redundant groove provides a moving space for the slide column to avoid being stuck during adjustment and improve the smoothness of operation.

[0013] Preferably, the bottom of the placement plate is provided with a heat transfer groove extending through the inside of the placement plate, the surface of the placement plate is provided with a circular-arc-shaped groove, and the inner wall of the heat transfer groove is provided with a heat transfer hole one extending through the groove and a heat transfer hole two extending through the placement plate.

[0014] By adopting the above technical scheme, the heat transfer groove extends through the plate body, combined with the heat transfer hole one and the heat transfer hole two extending through the top and bottom, to form a three-dimensional heat flow channel, promote the uniform distribution of heat, solve the temperature difference problem of traditional sintering furnaces, and improve the sintering quality.

[0015] Preferably, the surface of the conveying trolley is provided with a limiting groove in sliding connection with the surface of the moving plate, the surface of the moving plate is fixedly connected with a connecting plate, and the inner wall of the moving plate is fixedly connected with a limiting plate limiting the rotating direction of the connecting rod.

[0016] By adopting the above technical scheme, the limiting groove and the connecting plate guide the linear sliding of the moving plate, and the connecting plate and the stretching frame are linked to automatically adjust the supporting assembly and reduce manual intervention.

[0017] Preferably, the inside of the auxiliary monitoring column is provided with a cylindrical groove in sliding connection with a silicon carbide column, one end of the auxiliary monitoring column located in the sintering furnace shell is fixedly connected with a connecting column, the inner wall of the cylindrical groove is fixedly connected with a pressure guide pipe extending into the inside of the connecting column, and the silicon carbide column and the inner wall of the cylindrical groove are fixedly connected with a spring.

[0018] By adopting the above technical scheme, the high-temperature stability of silicon carbide is utilized to indirectly monitor the pressure change in the furnace through the pressure displacement thereof, mechanical signals are converted into quantifiable data, real-time pressure monitoring is realized, the pressure guide pipe is directly connected with the furnace and the monitoring column, pressure transmission delay is avoided, and monitoring sensitivity and accuracy are improved.

[0019] Preferably, the surface of each of the two circular ring plates is provided with a circular hole, the surface of one of the circular ring plates is provided with an auxiliary groove for facilitating the dismounting and moving of the placing plate, and the surface of the other circular ring plate is fixedly connected with an auxiliary frame in plug connection with the connecting column.

[0020] By adopting the above technical scheme, the auxiliary groove provides a dismounting and moving space for the placing plate, facilitating the quick replacement or adjustment of the plate layer to adapt to different production requirements.

[0021] Preferably, the surface of the auxiliary monitoring column is fixedly connected with a sealing cover matched with the sintering furnace shell.

[0022] By adopting the above technical scheme, the sealing cover covers the furnace opening to prevent heat and gas leakage, and fixes the auxiliary monitoring column to avoid displacement and monitoring failure.

[0023] Preferably, the surface of the conveying trolley is fixedly connected with a stretching frame, and the moving end of the stretching frame is fixedly connected with the surface of the auxiliary monitoring column.

[0024] By adopting the above technical scheme, the auxiliary monitoring column is moved by the moving end of the stretching frame to realize the accurate butt joint or separation of the material rack frame and the furnace body, and the supporting assembly is adjusted in linkage to improve the automation level.

[0025] Preferably, the extension frame and the supporting column are parallel to the placing plate, and the extension frame and the supporting column are of the same size.

[0026] By adopting the technical scheme, the consistent size is used to ensure that the conveying vehicle and the furnace body support structure are completely matched, the force is uniformly borne when the material rack frame moves in, and local excessive pressure is avoided to cause deformation or damage.

[0027] Preferably, one end of the connecting plate away from the moving plate is fixed with the moving end of the stretching frame.

[0028] By adopting the technical scheme, the stretching frame moves synchronously to drive the connecting plate, drive the moving plate to slide, and automatically support the support assembly.

[0029] In summary, the present application has at least one of the following beneficial technical effects:

[0030] 1. The abutment of the extension frame and the support column realizes the stable sliding of the entire material rack frame on the support column or the extension frame into or out of the inside of the sintering furnace shell, avoiding the shaking and collision risk caused by the traditional way (such as layer-by-layer, block-by-block, carrying and placing the plate or single green body into or out of the high-temperature furnace chamber); the continuous track formed by the abutment of the support column and the extension frame ensures that the force is uniformly borne when the material rack frame moves, the center of gravity is stable, and the material rack frame is prevented from tilting during the movement to cause the displacement or collision of the green body.

[0031] 2. The shape of the material rack frame matches the circular cross-section of the inside of the sintering furnace shell, eliminating the dead angle of the traditional rectangular material rack in the circular furnace cavity, significantly improving the effective loading volume in the furnace, and the design of the different sizes, detachable and reconfigurable placing plates provides high flexibility, which can easily adjust the material rack structure according to different sizes and shapes of silicon carbide green bodies; the heat transfer grooves opened on the placing plate can limit the rolling of the circular cylindrical silicon carbide embryo, and when other three-dimensional embryos are placed, the recess is located below the embryo, and the bottom and top of the embryo are heated through the recess, the heat transfer hole one and the heat transfer hole two, increasing the area of heat contact with the embryo; the design of the limiting frame, the square plate and the T-shaped groove simplifies the installation and disassembly process.

[0032] 3. When the material rack frame is completely moved out and hung on the extension frame, the bottom support assembly is gradually moved and automatically raised by the movement of the material rack frame, and is located on the circular ring plate at both ends of the material rack frame, sharing the weight at both ends of the material rack frame, preventing the entire weight of the material rack frame and the loaded green bodies from acting on the extension frame for a long time, avoiding the deformation of the extension frame to cause the inclination of the material rack frame, maintaining the horizontal stability of the frame during the conveying and waiting process, and further protecting the fragile silicon carbide green bodies; after the material rack frame is completely moved out of the furnace and stably supported, the operator can safely and sequentially (from top to bottom) take out the green bodies from the frame, avoiding the disassembly operation of the single plate on which the embryo is placed when the frame is narrow or unstable, significantly reducing the operation difficulty and the probability of green body damage.

[0033] 4. The furnace pressure is transmitted to the silicon carbide column under normal temperature area through the pressure guide pipe. The pressure drives the silicon carbide column to move and compress the spring. The displacement of the silicon carbide column directly reflects the size of the furnace pressure. When the main electronic pressure sensor fails due to high temperature, electrical failure, signal interference and other reasons, the pure mechanical system can still work to provide pressure information, and the redundant pressure monitoring is realized. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 It is a three-dimensional schematic view of the overall structure of the present application.

[0035] Figure 2 It is a side view of the overall structure of the present application.

[0036] Figure 3 It is a schematic view of the internal structure of the sintering furnace shell of the present application.

[0037] Figure 4 It is a sectional view of the internal structure of the sintering furnace shell of the present application.

[0038] Figure 5 It is a schematic view of the internal structure of the sintering furnace shell of the present application. Figure 4 It is a schematic view of the enlarged structure at position A.

[0039] Figure 6 It is a schematic view of the overall structure of the rack frame of the present application.

[0040] Figure 7 It is a schematic view of the overall structure of the rack frame of the present application. Figure 6 It is a schematic view of the enlarged structure at position B.

[0041] Figure 8 It is a schematic view of the connection position of the rack frame and the conveying vehicle of the present application.

[0042] Figure 9 It is a schematic view of the connection position of the rack frame and the conveying vehicle of the present application. Figure 8 It is a schematic view of the enlarged structure at position C.

[0043] Figure 10 It is a schematic view of the assembly structure of the rack frame and the conveying vehicle of the present application.

[0044] Reference signs: 1, sintering furnace shell; 11, support column;

[0045] 2, rack frame; 21, circular ring plate; 22, auxiliary frame; 23, auxiliary groove; 24, limiting frame; 241, sliding column; 242, square plate; 243, T-shaped groove; 244, redundant groove; 25, placement plate; 251, heat transfer groove; 252, groove; 253, heat transfer hole one; 254, heat transfer hole two; 26, circular hole;

[0046] 3, conveying vehicle; 31, sealing cover; 32, auxiliary monitoring column; 321, silicon carbide column; 322, cylindrical groove; 323, pressure guide pipe; 324, spring; 325, connecting column; 33, extension frame;

[0047] 34, support assembly; 341, limiting groove; 342, connecting plate; 343, moving plate; 344, support frame; 345, connecting rod; 346, limiting plate; 35, stretching frame. DETAILED DESCRIPTION

[0048] The following description will be made in conjunction with the accompanying drawings as follows Figures 1-10 The application is further described in detail.

[0049] The embodiment of the application discloses a sintering furnace with monitoring function for processing reaction sintered silicon carbide.

[0050] Referring to Figure 1 , Figure 2 and Figure 6 , the sintering furnace of the application belongs to sintering equipment, and provides a sintering furnace with monitoring function for processing reaction sintered silicon carbide, which comprises a sintering furnace shell 1, the inner wall of the sintering furnace shell 1 is fixed with the inward one end of four support columns 11, the four support columns 11 are longitudinally parallel to the sintering furnace shell 1, and the four support columns 11 are circumferentially arrayed in the interior of the sintering furnace shell 1, the surface of the four support columns 11 is provided with a rack frame 2, the shape of the rack frame 2 is matched with the shape of the interior of the sintering furnace shell 1, the rack frame 2 can increase the loading volume, improve the amount of sintering blanks of the sintering furnace each time, the rack frame 2 comprises two circular ring plates 21, the two circular ring plates 21 are both in sliding connection with the surface of each support column 11, the two circular ring plates 21 are located at two ends of the rack frame 2, the side, close to each other, of the two circular ring plates 21 is respectively fixed with the two ends of a plurality of limiting racks 24, the limiting racks 24 are circumferentially arrayed on the surface of the circular ring plate 21, and the limiting racks 24 on the two sides of the circular ring plate 21 are symmetrically arranged, the limiting racks 24 provide a plurality of placing positions for the blanks, each two symmetrical limiting racks 24 are respectively in sliding connection with the two ends of a placing plate 25, the part, in contact between the limiting racks 24 and the placing plate 25, is respectively concave-convex, the concave-convex shape is used for limiting the position of the placing plate 25, avoiding displacement of the placing plate 25, the placing plate 25 can be used for recombining the structure of the rack frame 2, and the size of each placing plate 25 is different, used for matching the shapes of the circular ring plate 21 and the sintering furnace shell 1.

[0051] The two circular plates 21 drive the limiting frame 24 and the placement plate 25 to slide on the support column 11, the support column 11 limits the parallel movement of the circular plate 21, avoids rotation, and the user selects whether each pair of limiting frame 24 is inserted into the placement plate 25 according to the shape and height of the embryo, for example, when the embryo is a three-dimensional column, the placement plate 25 can be inserted every other pair of limiting frame 24, so that the height between the placement plates 25 adapts to the shape of the embryo, when the embryo is a sheet, the placement plate 25 can be inserted between each pair of limiting frame 24, and the embryo is stacked on the placement plate 25 to avoid space waste, the circular plate 21 and the limiting frame 24 form a reconfigurable rack frame 2, which cooperates with the placement plate 25 of different sizes to realize flexible placement of the embryo in multiple layers and improve the utilization rate of loading volume.

[0052] Referring to Figure 5 , Figure 7 The middle part of each limiting frame 24 is movably connected by a slide column 241, the two ends of the slide column 241 are fixed with a square plate 242, and the two square plates 242 have different functions, the two ends of the placement plate 25 are symmetrically provided with T-shaped grooves 243, the T-shaped grooves 243 extend to the inside of the side close to the placement plate 25, and the two T-shaped grooves 243 are slidably connected with the surface of the square plate 242 close to the placement plate 25, the T-shaped groove 243 is composed of a vertical section and a parallel section, the square plate 242 slidably arranged in the T-shaped groove 243 is matched with the parallel section of the T-shaped groove 243, and the area of the vertical section allows the square plate 242 to rotate one circle, the two limiting frames 24 symmetrically arranged away from each other are provided with a redundant groove 244, the redundant groove 244 is slidably arranged with the other square plate 242 away from the placement plate 25, and the area of the redundant groove 244 also allows the square plate 242 to rotate one circle. The redundant groove 244 is used for conveniently rotating the square plate 242.

[0053] In a normal state, the square plate 242 close to the placement plate 25 is located in the T-shaped groove 243 extending to the limiting frame 24, and the other square plate 242 is not located in the redundant groove 244, when the placement plate 25 is inserted into the limiting frame 24, the T-shaped groove 243 on the placement plate 25 coincides with the T-shaped groove 243 on the limiting frame 24, then the slide column 241 is manually pushed into the T-shaped groove 243 on the placement plate 25 by the operator, and after being pushed to the bottom, the square plate 242 away from the placement plate 25 is rotated by 90 degrees, so that the square plate 242 is parallel to the vertical section of the T-shaped groove 243, and the placement plate 25 is fixed.

[0054] Referring to Figure 4 , Figure 5The bottom of the placement plate 25 is provided with a heat transfer groove 251. Both ends of the heat transfer groove 251 penetrate the interior of the placement plate 25, and both ends of the heat transfer groove 251 are located on both sides of the bottom of the placement plate 25. The heat transfer groove 251 is a groove body with a parallel middle and outward inclined ends, which is used to transfer the heat gathered at both ends of the placement plate 25. The upper surface of the placement plate 25 is provided with a groove 252. The groove 252 is arc-shaped and can be used to place a tubular blank. If the blank is not tubular, the groove 252 can be located in the middle of the bottom of the blank. The top and bottom of the inner wall of the heat transfer groove 251 are respectively provided with a heat transfer hole 1 253 and a heat transfer hole 254. The heat transfer hole 1 253 penetrates the groove 252, and the heat transfer hole 254 penetrates the bottom of the placement plate 25. Heat can be transferred to the bottom of the blank through the heat transfer hole 1 253, and heat can be transferred to the top of the blank through the heat transfer hole 254, which is used to increase the heating area.

[0055] The heat transfer groove 251 on the placement plate 25 can restrict the rolling of the silicon carbide blank in the shape of a cylindrical core. When placing other three-dimensional blanks, the groove 252 can be located below the blank. The bottom and top of the blank are heated through the groove 252, the first heat transfer hole 253 and the second heat transfer hole 254, increasing the contact area between heat and the blank.

[0056] Reference Figure 2 , Figure 8 A conveyor trolley 3 is installed on the outer side of the sintering furnace shell 1. The conveyor trolley 3 is used to move the material rack frame 2. The outer side of the middle part of the conveyor trolley 3 is fixed with four extension frames 33. The four extension frames 33 are distributed in a circumferential array on the surface of the conveyor trolley 3. The extension frames 33 are inserted into the support columns 11 to uniformly support the material rack frame 2. Both the extension frames 33 and the support columns 11 are parallel to the placement plate 25, and the extension frames 33 and the support columns 11 are the same size, so that there is no shaking or obstruction when the material rack frame 2 slides on the support columns 11 and the extension frames 33. The interior of the conveyor trolley 3 is slidably connected to the auxiliary monitoring column 32. The auxiliary monitoring column 32 extends into the interior of the sintering furnace shell 1 and is bolted to the material rack frame 2. A silicon carbide column 3 is slidably connected inside the auxiliary monitoring column 32. 21. The silicon carbide column 321 assists in monitoring the pressure inside the sintering furnace shell 1 by the displacement distance. A cylindrical groove 322 is opened inside the auxiliary monitoring column 32. The cylindrical groove 322 passes through the end of the auxiliary monitoring column 32 away from the conveyor 3, and the cylindrical groove 322 is slidably connected to the silicon carbide column 321. The surface of the auxiliary monitoring column 32 is fixedly connected to the connecting column 325. The connecting column 325 is set at the end of the auxiliary monitoring column 32 located inside the sintering furnace shell 1. The inner wall of the cylindrical groove 322 is fixed to the outer surface of the pressure guiding pipe 323. The pressure guiding pipe 323 extends into the interior of the connecting column 325. The end of the silicon carbide column 321 away from the pressure guiding pipe 323 is fixed to one end of the spring 324. The other end of the spring 324 is connected to the side of the cylindrical groove 322 away from the silicon carbide column 321.

[0057] A laser displacement sensor is used to measure the distance between the silicon carbide column 321 and the cylindrical groove 322. The pressure guide tube 323 transmits the furnace pressure to the silicon carbide column 321. The pressure pushes the silicon carbide column 321 to move and compress the spring 324. The displacement of the silicon carbide column 321 directly reflects the furnace pressure. When the main electronic pressure sensor fails due to high temperature, electrical fault, signal interference, etc., this purely mechanical system can be used to provide pressure information. The position of the silicon carbide column 321 (equipped with a scale or limit mark) can be directly observed on site, providing operators with the most direct and reliable feedback on the furnace pressure status. The spring 324 is made of Elgiloy constant elastic alloy.

[0058] Reference Figure 8 , Figure 10 The bottom of the conveyor 3 is provided with a support assembly 34. The support assembly 34 is used to assist in supporting the material rack frame 2 to prevent the extension frame 33 from deforming. The support assembly 34 includes a movable plate 343 and a support frame 344. The movable plate 343 and the support frame 344 are not aligned under normal conditions. The inner side of the movable plate 343 is hinged to three connecting rods 345. One end of each of the three connecting rods 345 is hinged to the inner side of the support frame 344. The movable plate 343 is located at the end of the connecting rods 345 away from the movable plate 343. The two ends of the support frame 344 are arc-shaped and adapted to the bottom of the annular plate 21 of the material rack frame 2. The support frame 344 is used to support the two ends of the material rack frame 2. A limit groove 341 is opened on the upper surface of the bottom of the conveyor 3. The movable plate 343 is slidably connected to the surface of the movable plate 343. The end of the movable plate 343 away from the sintering furnace shell 1 is adapted to the size of the connecting plate 342. The end of the movable plate 343 away from the sintering furnace shell 1 is fixed to the surface of the connecting plate 342. The inner wall of the movable plate 343 is fixed to the surface of the three limiting plates 346. The three limiting plates 346 are respectively set on both sides of the connecting rod 345. The end of the limiting plate 346 near the sintering furnace shell 1 is higher than the end of the limiting plate 346 away from the sintering furnace shell 1. The limiting plate 346 is used to limit the rotation direction of the connecting rod 345. The design of the support frame 344 ensures that the load of each support point is evenly distributed. The arc design of the support frame 344 is adapted to the circular plate 21 of the material rack frame 2.

[0059] When the material rack frame 2 enters the interior of the sintering furnace shell 1 for sintering, the moving plate 343 slides in the limiting groove 341 close to the top end of the sintering furnace shell 1, the connecting rod 345 is inclined away from the sintering furnace shell 1, and the supporting frame 344 is longer than the moving plate 343 at the end away from the sintering furnace shell 1. When the embryo sintering is completed and cooled, the connecting plate 342 is driven to move by the stretching frame 35, the connecting plate 342 drives the moving plate 343 to move when moving, the moving plate 343 drives the connecting rod 345 and the supporting frame 344 to move, and when the material rack frame 2 gradually moves out, the supporting frame 344 first touches the middle part of the conveying vehicle 3 to make the supporting frame 344 move upward through the connecting rod 345, and when the supporting frame 344 moves to the top, it contacts the two ends of the material rack frame 2 to assist in supporting the material rack frame 2. When the connecting plate 342 is driven by the stretching frame 35 to move close to the sintering furnace shell 1, the connecting rod 345 is gradually inclined away from the sintering furnace shell 1 due to the fact that the supporting frame 344 does not touch the middle part of the conveying vehicle 3, and is reset to the initial state.

[0060] Referring to Figure 8 、 Figure 9 、 Figure 3 The surface of the two circular ring plates 21 is provided with a circular hole 26, and the size of the circular hole 26 is the same as that of the supporting column 11 and the extension frame 33. The inner part of the end of the supporting column 11 close to the conveying vehicle 3 is in a hollow shape, and the end of the extension frame 33 close to the supporting column 11 is provided with a cylinder with a size suitable for the hollow shape. The extension frame 33 is inserted into the hollow part of the supporting column 11 to realize the insertion of the supporting column 11 and the extension frame 33. The surface of one of the two circular ring plates 21 is provided with an auxiliary groove 23, which is used for conveniently placing and moving the plate 25. The surface of the other circular ring plate 21 is fixed with the outer surface of the auxiliary frame 22. The middle part of the auxiliary frame 22 is provided with a through groove for insertion with the connecting column 325. The surface of the auxiliary monitoring column 32 close to the sintering furnace shell 1 is fixed with the middle part of the sealing cover 31. The size of the sealing cover 31 is suitable for the sintering furnace shell 1. The sealing cover 31 is used to close the opening of the sintering furnace shell 1. The surface of the conveying vehicle 3 is installed with the fixed end of the stretching frame 35. The moving end of the stretching frame 35 is fixed with the surface of the auxiliary monitoring column 32. The end of the connecting plate 342 away from the moving plate 343 is fixed with the moving end of the stretching frame 35.

[0061] The whole rack frame 2 is smoothly slid out of and into the furnace on the track of the support column 11 and the extension frame 33, the rack frame 2 is driven to slide in the inside of the auxiliary monitoring column 32 through the starting of the stretching frame 35, the auxiliary monitoring column 32 moves to drive the rack frame 2 and the sealing cover 31 to move at the same time, when the rack frame 2 is completely entered into the inside of the sintering furnace shell 1, the sealing cover 31 synchronously closes the sintering furnace shell 1, after the embryo in the inside of the rack frame 2 is sintered, the moving end of the stretching frame 35 is retracted, the rack frame 2 is moved through the auxiliary monitoring column 32, the rack frame 2 is slid on the extension frame 33 and the support column 11, the whole rack frame is much faster than carrying block by block, the loading and unloading time is greatly shortened, and the equipment utilization rate is improved.

[0062] It should be noted that all parts used in the inside of the sintering furnace shell 1 can be made of high-purity graphite, C / C composite material or special ceramic, which can withstand high-temperature silicon vapor corrosion, and the material is preferably C / C composite material and ultra-high-temperature ceramic coating. The sintering temperature in the sintering furnace is 1300-1600℃, which is adjusted according to different types of silicon carbide. For example, the standard sintering temperature of silicon carbide is set to 1450℃, the internal pressure of the sintering furnace is set to 0.2-0.5MPa, which meets the needs of different sintering processes. When the temperature deviation exceeds ±5℃ or the pressure is abnormal, the system automatically triggers an audible and light alarm to prevent the temperature or pressure from exceeding the predetermined range.

[0063] It should be noted that the calculation formula of the spring 324 is F=kx, wherein F is the external force borne by the spring 324, the unit is N, k is the stiffness coefficient of the spring 324, the unit is N / m, and x is the deformation of the spring 324, the unit is m. Then the spring force of the alloy spring 324 is calculated to enable it to be used in the device.

[0064] The stretching frame 35 is a prior art, and its structure principle will not be described in detail. The SJG series model of Jinan Taixing (China) can be used. When in use, the stretching frame 35 is placed in parallel to achieve the effect of heavy object pushing and pulling transportation. The stretching frame 35 is composed of X-shaped cross-linked alloy steel arms. The bottom is connected to a servo motor through a ball screw. The screw drives the bottom slide rail of the stretching frame 35 to horizontally retract, the X-shaped arm angle decreases, the top of the stretching frame 35 vertically lifts up, the auxiliary monitoring column 32 is axially displaced through the rigid connecting rod, the rack frame 2 is smoothly slid out along the track of the support column 11 and the extension frame 33, the operator presses the in-out key of the control panel of the conveyor 3, the PLC sends a command to the servo driver, the stretching frame 35 stretches, pushes the auxiliary monitoring column 32 to send the rack frame 2 into the furnace, reaches the set position, the motor is self-locked, the sealing cover 31 is pressed to close the furnace opening, the out-of-furnace instruction is triggered, the stretching frame 35 retracts to pull out the rack frame 2, and the support assembly 34 is supported.

[0065] The implementation principle of the sintering furnace with monitoring function for processing reaction sintered silicon carbide according to the embodiment of the application is as follows: first, an operator prepares a green body by mixing silicon carbide raw materials and a binder in a certain proportion; then, the operator adjusts the spacing and number of layers of the placement plates 25 in the rack frame 2 according to the size of the green body, locks the position by cooperation of the slide column 241 and the square plate 242, and places the green body in the arc grooves 252 of the placement plates 25 or on the grooves 252; finally, the rack frame 2 is placed on the extension frame 33 of the conveying vehicle 3, the rack frame 2 is moved into the sintering furnace shell 1 by stretching the extension frame 33, the extension frame 33 is aligned with the support column 11, the auxiliary monitoring column 32 is connected to the rack frame 2 by bolts, and the sealing cover 31 covers the furnace mouth to complete the sealing.

[0066] When the rack frame 2 is completely moved out and hung on the extension frame 33, the bottom support assembly 34 is gradually moved and automatically raised by the movement of the rack frame 2, and shares the weight of the two ends of the rack frame 2 on the ring plates 21 at the two ends of the rack frame 2, so as to prevent the whole weight of the rack frame 2 and the loaded compact from acting on the extension frame 33 for a long time, avoid the deformation of the extension frame 33 to make the rack frame 2 tilt, keep the horizontal stability of the frame during conveying and waiting, and further protect the fragile silicon carbide compact; after the rack frame 2 is completely moved out of the furnace and stably supported, the operator can safely and sequentially (from top to bottom) take out the compact from the frame, which avoids the dismounting operation of the single plate on which the green body is placed when the frame is narrow or unstable, and significantly reduces the operation difficulty and the probability of compact damage.

[0067] During sintering of the sintering furnace, the sintering temperature curve (usually 1400-1600℃), the holding time (2-4 hours) and the inert gas (argon / nitrogen) flow parameters are set through the control panel. After starting, the infrared temperature instrument in the furnace collects temperature data in real time, the pressure sensor monitors the gas pressure in the furnace cavity, and the gas chromatograph analyzes the gas composition. All data are synchronously transmitted to the central control system. The system automatically adjusts the heating power and gas flow according to the preset program, triggers the audible and light alarm and starts the compensation mechanism when the temperature deviation exceeds ±5℃ or the gas pressure is abnormal. After sintering is completed, the thermocouple monitors the temperature difference between the surface and the core of the product during the cooling stage to ensure uniform cooling and prevent cracking. The data records of the whole process automatically generate a curve graph and are stored, which is convenient for quality tracing and process optimization. When the sensor inside the sintering furnace shell 1 fails, the auxiliary monitoring column 32 is started, the silicon carbide column 321 in the auxiliary monitoring column 32 is compressed by the spring 324 under the pressure in the furnace and slides along the cylindrical groove 322, and the displacement amount is transmitted to the control system in real time through the pressure guide pipe 323 and converted into a pressure value.

[0068] The above merely provides the optional embodiments of the present application, but does not limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall fall into the protection scope of the present application.

Claims

1. A sintering furnace for reaction sintering silicon carbide processing with a monitoring function, characterized by: Including sintering furnace shell (1), the inner wall of sintering furnace shell (1) is fixedly connected with circumferential array distribution support column (11), the surface of support column (11) is provided with rack frame (2) that is adapted to the shape inside sintering furnace shell (1) and increases loading volume, the rack frame (2) includes two circular ring plates (21) that are slid with the surface of support column (11), two the circular ring plates (21) are fixedly connected with circumferential array distribution and provide multilayer placement position for embryo between the symmetric limit frame (24), two the limit frame (24) are slidably connected with the placement plate (25) for reorganizing the structure of rack frame (2) and the size is not identical, the surface of placement plate (25) is provided with circular recess (252), the inner wall of heat transfer groove (251) is respectively provided with heat transfer hole one (253) and heat transfer hole two (254) that pass through recess (252) and placement plate (25). The outside of sintering furnace shell (1) is provided with conveying vehicle (3) for moving rack frame (2), the surface of conveying vehicle (3) is fixedly connected with circumferential array distribution and is inserted with extension frame (33) to realize uniform support, the entire rack frame (2) is realized on the track of support column (11) and extension frame (33) by conveying vehicle (3) and extension frame (33) and is slid out and into the hearth, the inside of conveying vehicle (3) is slidably connected with auxiliary monitoring column (32) that extends to the inside of sintering furnace shell (1) and is bolted with rack frame (2), the inside of auxiliary monitoring column (32) is slidably connected with silicon carbide column (321) that assists monitoring the pressure inside sintering furnace shell (1) by displacement distance, The bottom of conveying vehicle (3) is provided with support assembly (34) for assisting support to avoid deformation of extension frame (33), the support assembly (34) includes two uneven moving plates (343) and support frame (344) in normal state, the inner side of moving plate (343) is hinged with connecting rod (345), the end of connecting rod (345) away from moving plate (343) is hinged with the inner side of support frame (344) at both ends of support rack frame (2).

2. The sintering furnace with monitoring function for processing reaction-sintered silicon carbide according to claim 1, characterized in that: The inside of limit frame (24) is movably connected with slide column (241), both ends of slide column (241) are fixedly connected with square plate (242) of different functions, both ends of placement plate (25) are provided with T-shaped groove (243) that extends to the inside of limit frame (24) and slides with one of square plate (242), the surface of limit frame (24) away from placement plate (25) is provided with redundant groove (244) that slides with another square plate (242).

3. The sintering furnace with monitoring function for processing reaction-sintered silicon carbide according to claim 2, characterized in that: The bottom of placement plate (25) is provided with heat transfer groove (251) that penetrates the inside of placement plate (25), the surface of placement plate (25) is provided with circular recess (252), the inner wall of heat transfer groove (251) is respectively provided with heat transfer hole one (253) and heat transfer hole two (254) that pass through recess (252) and placement plate (25).

4. The sintering furnace with monitoring function for processing reaction-sintered silicon carbide according to claim 2, characterized in that: The surface of the conveying trolley (3) is provided with a limiting groove (341) in sliding connection with the surface of the moving plate (343), the surface of the moving plate (343) is fixedly connected with a connecting plate (342), and the inner wall of the moving plate (343) is fixedly connected with a limiting plate (346) limiting the rotating direction of the connecting rod (345).

5. The sintering furnace with monitoring function for processing reaction-sintered silicon carbide according to claim 1, characterized in that: The inside of the auxiliary monitoring column (32) is provided with a cylindrical groove (322) in sliding connection with the silicon carbide column (321), one end of the auxiliary monitoring column (32) located in the sintering furnace shell (1) is fixedly connected with a connecting column (325), the inner wall of the cylindrical groove (322) is fixedly connected with a pressure guide pipe (323) extending into the inside of the connecting column (325), and the silicon carbide column (321) and the inner wall of the cylindrical groove (322) are fixedly connected with a spring (324).

6. The sintering furnace with monitoring function for processing reaction-sintered silicon carbide according to claim 5, characterized in that: The surfaces of the two circular ring plates (21) are both provided with a circular hole (26), the surface of one of the circular ring plates (21) is provided with an auxiliary groove (23) for facilitating the dismounting and moving of the placing plate (25), and the surface of the other circular ring plate (21) is fixedly connected with an auxiliary frame (22) in plug connection with the connecting column (325).

7. The sintering furnace with monitoring function for processing reaction-sintered silicon carbide according to claim 1, characterized in that: The surface of the auxiliary monitoring column (32) is fixedly connected with a sealing cover (31) matched with the sintering furnace shell (1).

8. The sintering furnace with monitoring function for processing reaction-sintered silicon carbide according to claim 7, characterized in that: The surface of the conveying trolley (3) is fixedly connected with a stretching frame (35), and the moving end of the stretching frame (35) is fixedly connected with the surface of the auxiliary monitoring column (32).

9. The sintering furnace with monitoring function for processing reaction-sintered silicon carbide according to claim 1, characterized in that: The lengthening frame (33) and the supporting column (11) are both parallel to the placing plate (25), and the lengthening frame (33) and the supporting column (11) are of the same size.

10. The sintering furnace with monitoring function for processing reaction-sintered silicon carbide according to claim 4, characterized in that: The end, away from the moving plate (343), of the connecting plate (342) is fixed to the moving end of the stretching frame (35).

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