Atomization device, valveless pump, preparation method of atomization device and control method of atomization device

Abstract

The invention provides an atomization device, a valveless pump, a preparation method of the atomization device and a control method of the atomization device. The atomization device comprises a main body structure, a first base plate and an actuating assembly. Wherein the main body structure comprises an inlet, a first pipeline, a first cavity, a second pipeline and an outlet which are communicated with one another; the first pipeline is located between the inlet and the first cavity, the second pipeline is located between the first cavity and the outlet, the radial sizes of the two ends, connected with the inlet and the first cavity, of the first pipeline are different, and the radial sizes of the two ends, connected with the first cavity and the outlet, of the second pipeline are different; the first substrate is arranged on one side of the main body structure, and a through hole is formed in the first substrate; the actuating assembly is arranged on the side, away from the first substrate, of the main body structure. According to the atomization device, the valve-free design is achieved, the service life of the atomization device is prolonged, and the structure and the manufacturing process are simpler.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of fluid transmission devices, in particular to an atomization device, a valveless pump, a preparation method of the atomization device and a control method thereof. BACKGROUND

[0002] The atomization device is a device capable of sucking fluid and then spraying the fluid into mist droplets, which is widely used in many fields. However, the structure of the current atomization device is relatively complex and needs to be further improved.

[0003] The above information disclosed in the background section is only intended to strengthen the understanding of the background of the present disclosure, and therefore it can include information that does not constitute the related art known to those of ordinary skill in the art. SUMMARY

[0004] The present disclosure provides an atomization device, a valveless pump, a preparation method of the atomization device and a control method thereof. The atomization device realizes valveless design, improves the service life of the atomization device, and has a simpler structure and manufacturing process.

[0005] The present disclosure provides an atomization device, which comprises a main body structure, a first substrate and an actuating assembly. The main body structure comprises a communication inlet, a first pipeline, a first cavity, a second pipeline and an outlet. The first pipeline is located between the inlet and the first cavity, and the second pipeline is located between the first cavity and the outlet. The radial dimensions of the two ends of the first pipeline connected with the inlet and the first cavity are different, and the radial dimensions of the two ends of the second pipeline connected with the first cavity and the outlet are different. The first substrate is arranged on one side of the main body structure, and the first substrate is provided with a through hole. The actuating assembly is arranged on the side of the main body structure away from the first substrate.

[0006] The present disclosure also provides a valveless pump, which comprises a main body structure and an actuating assembly. The main body structure comprises a communication inlet, a first pipeline, a first cavity, a second pipeline and an outlet. The first pipeline is located between the inlet and the first cavity, and the second pipeline is located between the first cavity and the outlet. The radial dimensions of the two ends of the first pipeline connected with the inlet and the first cavity are different, and the radial dimensions of the two ends of the second pipeline connected with the first cavity and the outlet are different. The actuating assembly is arranged on one side of the main body structure.

[0007] The embodiment of the present disclosure further provides a preparation method of an atomization device, comprising the following steps: providing a main structure, wherein the main structure comprises a communication inlet, a first pipeline, a first cavity, a second pipeline and an outlet; the first pipeline is located between the inlet and the first cavity, the second pipeline is located between the first cavity and the outlet, and the radial dimensions of the two ends of the first pipeline connected with the inlet and the first cavity are different, and the radial dimensions of the two ends of the second pipeline connected with the first cavity and the outlet are different; providing a first substrate provided with a through hole; combining the first substrate with the main structure, so that the first substrate is located on one side of the main structure; and providing an actuating assembly, and combining the actuating assembly with the main structure, so that the actuating assembly is located on the side of the main structure away from the first substrate.

[0008] The embodiment of the present disclosure further provides a control method applied to an actuating device, wherein the actuating device comprises a main structure and an actuating assembly, and the main structure comprises a communication inlet, a first pipeline, a first cavity, a second pipeline and an outlet; the method comprises the following steps: sending a first voltage signal to the actuating assembly, so that a fluid flows into the first cavity through the inlet and the first pipeline; and sending a second voltage signal to the actuating assembly, so that the actuating assembly moves towards the direction close to the main structure, and the fluid flows out of the first cavity, the second pipeline and the outlet.

[0009] The above technical solution shows that the atomization device of the embodiment of the present disclosure has at least one of the following advantages and positive effects:

[0010] In the embodiment of the present disclosure, the first pipeline of the main structure is located between the inlet and the first cavity, and the second pipeline is located between the first cavity and the outlet, and the valve-free design of the atomization device is realized, so that the fatigue damage of the valve is avoided, the radial dimensions of the two ends of the first pipeline connected with the inlet and the first cavity are different, the radial dimensions of the two ends of the second pipeline connected with the first cavity and the outlet are different, the valve-free design of the atomization device is realized, the structure of the atomization device is simpler, and the service life of the atomization device is improved, and the manufacturing process is simplified. BRIEF DESCRIPTION OF DRAWINGS

[0011] The above and other features and advantages of the present disclosure will become more apparent by describing in detail example embodiments thereof with reference to the attached drawings.

[0012] Figure 1 A structural schematic diagram of an atomization device shown for some embodiments of the present disclosure;

[0013] Figure 2 A schematic diagram of fluid flowing into an atomization device shown for some embodiments of the present disclosure;

[0014] Figure 3 This is a schematic diagram of a fluid outflow atomizing device shown in some embodiments of this disclosure;

[0015] Figure 4 This is a top view of the main structure shown in some embodiments of this disclosure;

[0016] Figure 5 This is a schematic diagram of the structure of an atomizing device shown in some embodiments of this disclosure;

[0017] Figure 6 This is an explosion schematic diagram of an atomizing device shown in some embodiments of this disclosure;

[0018] Figure 7 This is a top view of a first substrate shown in some embodiments of the present disclosure;

[0019] Figure 8 This is a schematic diagram illustrating an actuation component according to some embodiments of the present disclosure;

[0020] Figure 9 This is a schematic diagram illustrating fluid entering an atomizing device according to some embodiments of this disclosure;

[0021] Figure 10 This is a schematic diagram of a fluid outflow atomizing device shown in some embodiments of this disclosure;

[0022] Figure 11 This is a schematic diagram of the structure of an atomizing device shown in some embodiments of this disclosure;

[0023] Figure 12 This is a top view of the main structure shown in some embodiments of this disclosure;

[0024] Figure 13 This is a top view of the main structure shown in some embodiments of this disclosure;

[0025] Figure 14 For along Figure 13 A cross-sectional view of the AA atomizing device;

[0026] Figure 15 This is a top view of an atomizing device shown in some embodiments of this disclosure, showing only the main structure;

[0027] Figure 16 This is a schematic diagram of the structure of a valveless pump shown in some embodiments of this disclosure;

[0028] Figure 17 This is a flowchart illustrating a method for preparing an atomizing device according to some embodiments of the present disclosure;

[0029] Figure 18 The flowchart illustrates a control method for some embodiments of this disclosure.

[0030] Reference numerals:

[0031] 1: main structure; 11: inlet; 12: first pipe; 121: first end; 122: second end; 13: first cavity; 14: second pipe; 141: third end; 142: fourth end; 15: outlet; 2: first substrate; 21: through hole; 22: second inlet passage; 3: actuating assembly; 31: flexible film; 32: piezoelectric element; 321: upper electrode wiring; 322: lower electrode wiring; 301: first actuating assembly; 302: second actuating assembly; 4: second substrate; 41: first inlet passage; 42: second cavity; 5: third substrate; 51: first outlet passage; Z: vertical direction. DETAILED DESCRIPTION

[0032] Example embodiments now will be described more fully hereinafter with reference to the accompanying drawings. Example embodiments, however, can be implemented in many different forms and should not be construed as limited to the implementations set forth herein; rather, these implementations are provided as part of this disclosure for illustrative purposes. Like reference numerals refer to like elements throughout.

[0033] In the following description of various example embodiments of the disclosure, reference is made to the accompanying drawings, which form a part hereof, and in which are shown by way of illustration various example structures in which aspects of the disclosure can be implemented. It is to be understood that other specific arrangements of parts, structures, example devices, systems, and steps can be utilized and structural and functional modifications can be made without departing from the scope of the present disclosure. Also, while the terms "over," "between," "among," and the like can be used in the description herein to describe one aspect or element of the disclosure with respect to another, such terms are used herein only for convenience and are not intended to limit the aspects of the disclosure to a particular orientation or configuration. Nothing in this specification should be construed as requiring a specific three-dimensional orientation of structures in order to fall within the scope of the disclosure. Furthermore, the terms "first," "second," and the like are used herein merely as labels for convenience and are not intended to limit the objects to which these terms refer to a particular numeric sequence.

[0034] The flowcharts shown in the drawings are merely illustrative and do not necessarily include all contents and operations / steps, nor are they necessarily executed in the order described. For example, some operations / steps can be further divided, and some operations / steps can be combined or partially combined, so the actual execution order can be changed depending on the actual situation.

[0035] In addition, in the description of the disclosure, the meaning of "a plurality of" is at least two, such as two, three, etc., unless explicitly and specifically limited otherwise.

[0036] In the related art, the atomization device is provided with a valve. When the fluid is inhaled, the valve is opened, and then the valve is closed to spray mist droplets. Due to the high frequency of use of the atomization device, the valve is easily damaged due to fatigue, reducing the service life of the atomization device, and the structure and manufacturing process of the atomization device in the related art are complex.

[0037] Figure 1 An atomization device in an embodiment of the present disclosure is shown. As shown in Figure 1 , the atomization device includes a main body structure 1, a first substrate 2, and an actuating assembly 3. As shown in Figure 6 , the main body structure 1 has an inlet 11 and an outlet 15 for fluid to flow in and out, the first substrate 2 is arranged on one side of the main body structure 1, and the first substrate 2 is provided with a through hole 21. When the fluid flows out of the outlet 15 of the main body structure 1, the atomized droplets are formed after passing through the through hole 21 of the first substrate 2. The actuating assembly 3 is arranged on the side of the main body structure 1 away from the first substrate 2, and is used to actuate the fluid to enter and actuate the fluid to flow out.

[0038] As shown in Figure 1 , the stacking direction of the first substrate 2, the main body structure 1, and the actuating assembly 3 is defined as the vertical direction Z.

[0039] As shown in Figure 4 and Figure 6 , the main body structure 1 includes the communicating inlet 11, a first duct 12, a first cavity 13, a second duct 14, and the outlet 15. The first duct 12 is located between the inlet 11 and the first cavity 13, and the second duct 14 is located between the first cavity 13 and the outlet 15, that is, the inlet 11, the first duct 12, the first cavity 13, the second duct 14, and the outlet 15 are sequentially communicated.

[0040] Continuing to refer to Figure 4 and Figure 6 , the radial dimensions of the two ends of the first duct 12 connected with the inlet 11 and the first cavity 13 are different, and the radial dimensions of the two ends of the second duct 14 connected with the first cavity 13 and the outlet 15 are different. As shown in Figure 4 , the first duct 12 has opposite first and second ends 121 and 122, the first end 121 is in communication with the inlet 11, and the second end 122 is in communication with the first cavity 13. The second duct 14 has opposite third and fourth ends 141 and 142, the third end 141 is in communication with the first cavity 13, and the fourth end 142 is in communication with the outlet 15.

[0041] In some embodiments, the radial dimension of the end of the first conduit 12 connected with the inlet 11 is smaller than the radial dimension of the end of the first conduit 12 connected with the first cavity 13, and the radial dimension of the end of the second conduit 14 connected with the first cavity 13 is smaller than the radial dimension of the end of the second conduit 14 connected with the outlet 15. That is, in these embodiments, the radial dimension of the first end 121 of the first conduit 12 is smaller than the radial dimension of the second end 122, and the radial dimension of the third end 141 of the second conduit 14 is smaller than the radial dimension of the fourth end 142.

[0042] In some embodiments, the first conduit 12 and the second conduit 14 can be tapered conduits. Taking the first conduit 12 as an example, when the first conduit 12 is a tapered conduit, the first conduit 12 has a central axis passing through the center of the first conduit 12 and extending from the first end 121 to the second end 122, and the angle between the side wall of the first conduit 12 and the central axis is less than 30°, for example, the angle can be 10°, 15°, 20°, 25°, etc. The second conduit 14 is a tapered conduit, which is the same as the first conduit 12, and will not be described here.

[0043] Of course, the first conduit 12 and the second conduit 14 can also not be tapered conduits, as long as the radial dimensions of the two ends of the first conduit 12 and the second conduit 14 are different and the same as the above-mentioned embodiments, which are not specially limited here.

[0044] Wherein, the radial dimension can be understood as the inner diameter of the first conduit 12 and the second conduit 14, in the embodiments of the present disclosure, the end with larger radial dimension of the first conduit 12 and the second conduit 14 can be referred to as the large end, and the end with smaller radial dimension can be referred to as the small end, for example, in the above-mentioned embodiments, the first end 121 and the third end 141 can be referred to as the small end, and the second end 122 and the fourth end 142 can be referred to as the large end.

[0045] Continuing to refer to Figure 1 , the part of the first substrate 2 corresponding to the outlet 15 of the main body structure 1 is provided with a through hole 21, which can have multiple, for atomizing the fluid. As Figure 2 shown, when the actuating assembly 3 moves away from the main body structure 1, the actuating fluid flows from the inlet 11 of the main body structure 1 into the first cavity 13 through the first conduit 12. As Figure 3 shown, when the actuating assembly 3 moves towards the main body structure 1, the actuating fluid flows out of the first cavity 13 of the main body structure 1 through the second conduit 14 and the outlet 15, and flows out through the through hole 21 of the first substrate 2.

[0046] By providing the first conduit 12 and the second conduit 14 in the main body structure 1, and the radial dimensions of the two ends of the first conduit 12 are different, and the radial dimensions of the two ends of the second conduit 14 are different, the valveless design of the atomizing device can be realized. Please refer to the following relationship (1):

[0047]

[0048] In the above relation (1), q d This represents the flow rate of the fluid in the expansion tube, specifically the flow rate of the fluid in the first pipe 12 or the second pipe 14 from the smaller end to the larger end; A represents the cross-sectional area of ​​the smaller end of the first pipe 12 or the second pipe 14; p c ρ represents the cavity pressure in the first pipe 12 or the second pipe 14; ρ represents the density of the fluid; ξ d This represents the pressure loss coefficient of the expansion tube.

[0049] Also refer to the following relation (2):

[0050]

[0051] In the above relation (2), q n This represents the flow rate of the fluid in the contraction pipe, specifically the flow rate of the fluid in the first pipe 12 or the second pipe 14 from the larger end to the smaller end; A represents the cross-sectional area of ​​the smaller end of the first pipe 12 or the second pipe 14; p c ρ represents the cavity pressure in the first pipe 12 or the second pipe 14; ρ represents the density of the fluid; ξ n Let ξ represent the pressure loss coefficient of the contraction tube, and ξ d <ξ n .

[0052] In the same pipe, when fluid flows from the small end to the large end, the pipe is an expander; when fluid flows from the large end to the small end, the pipe is a contractor. This is because A and p in the two equations... c Since ρ is the same, it can be seen from the above relationships (1) and (2) that the flow rate of the fluid in the expansion tube is greater than that in the contraction tube. That is to say, the flow rate is larger when the fluid flows from the small end to the large end, and smaller when it flows from the large end to the small end, so that the fluid can flow in one direction. The first pipe 12 and the second pipe 14 mentioned above can act as valves.

[0053] To illustrate more clearly, refer to Figure 9 and Figure 10 .in, Figure 9 A schematic diagram of fluid entering the atomizing device according to an embodiment of the present disclosure is shown. Figure 10 A schematic diagram of a fluid outflow atomizing device according to an embodiment of this disclosure is shown.

[0054] like Figure 9As shown, under the action of the actuation component 3, the volume of the first cavity 13 increases, and fluid is drawn in. Fluid flows from the inlet 11 into the first pipe 12, and then into the first cavity 13. That is, the fluid flows from the first end 121 to the second end 122 of the first pipe 12, where the radial dimension of the first end 121 is smaller than that of the second end 122. At this time, the first pipe 12 acts as an expander, resulting in a larger flow rate. The radial dimension of the third end 141 of the second pipe 14 is smaller than that of the fourth end 142, making the second pipe 14 a contractor, resulting in a smaller flow rate. Therefore, this facilitates the flow of fluid from the inlet 11 into the first cavity 13.

[0055] like Figure 10 As shown, when the actuating component 3 moves in the reverse direction, the volume of the first chamber 13 decreases, and the fluid is discharged. The fluid flows from the first chamber 13 along the second pipe 14 to the outlet 15, that is, the fluid flows from the third end 141 to the fourth end 142 of the second pipe 14, and then forms a spray through the through hole 21. At this time, the second pipe 14 is an expansion pipe with a larger discharge flow, while the first pipe 12 is a contraction pipe with a smaller discharge flow. Therefore, by setting the first pipe 12 and the second pipe 14, the fluid can be drawn in from the inlet 11, preventing the fluid from flowing back from the outlet 15, and the fluid can be discharged from the outlet 15, preventing the fluid from being discharged from the inlet 11. This acts as a valve, eliminating the need for a separate valve. Thus, a valveless design of the atomizing device is achieved, thereby avoiding valve fatigue damage and improving the service life of the atomizing device. At the same time, the structure of the atomizing device is simpler, simplifying the manufacturing process.

[0056] like Figures 1 to 3 As shown, the actuation component 3 may include a flexible membrane 31 and a piezoelectric element 32. The flexible membrane 31 is disposed on the side of the main structure 1 away from the first substrate 2 and at least covers the first cavity 13. The piezoelectric element 32 is disposed on the side of the flexible membrane 31 away from the main structure 1 and corresponds to the first cavity 13.

[0057] In some embodiments, the flexible membrane 31 may be at least one of PDMS (polydimethylsiloxane), HDPE (high-density polyethylene), or other deformable flexible membranes 31, without particular limitation herein.

[0058] In some embodiments, the piezoelectric element 32 may be a piezoelectric sheet. When different voltage signals are applied to the piezoelectric element 32, the piezoelectric element 32 can generate bending vibrations, for example, the piezoelectric element 32 can bend and vibrate in the vertical direction Z.

[0059] Figure 8 A schematic diagram of the actuation component 3 is shown. In some embodiments, such as Figure 8As shown, the actuation assembly 3 also includes an upper electrode wiring 321 and a lower electrode wiring 322, which are electrically connected to the piezoelectric element 32. A periodically controlled voltage signal is transmitted to the piezoelectric element 32 through the upper electrode wiring 321 and the lower electrode wiring 322, causing the piezoelectric element 32 to bend and vibrate. Furthermore, an insulating layer can be provided on the surface of the piezoelectric element 32 to protect it.

[0060] In this embodiment, the piezoelectric element 32 is disposed in the vertical direction Z corresponding to the first cavity 13. The bending vibration of the piezoelectric element 32 causes the flexible membrane 31 to deform, thereby changing the volume of the first cavity 13 and actuating the fluid flow.

[0061] like Figure 5 and Figure 6 As shown, in some embodiments, the atomizing device may further include a second substrate 4 disposed between the actuation component 3 and the main structure 1. The second substrate 4 is provided with a first inlet channel 41 and a second cavity 42. The first inlet channel 41 is connected to the inlet 11, and the second cavity 42 is connected to the first cavity 13. The first cavity 13 and the second cavity 42 can form a receiving cavity for containing fluid.

[0062] When fluid is drawn in, it flows into the inlet 11 of the main structure 1 through the first inlet channel 41 of the second substrate 4, and then enters the receiving cavity through the first pipe 12 of the main structure 1. By setting the second substrate 4, its second cavity 42 is superimposed with the first cavity 13 to form a receiving cavity, which increases the cavity volume and can store more fluid.

[0063] In this embodiment of the present disclosure, in the stacking direction of the second substrate 4 and the main structure 1, i.e., in the vertical direction Z, the first inlet channel 41 of the second substrate 4 corresponds to the inlet 11, and the second cavity 42 corresponds to the first cavity 13. This makes the flow of fluid smoother and simplifies the manufacturing process.

[0064] The first inlet channel 41 and the inlet 11 may have the same or different shapes and radial dimensions, such as... Figure 6 As shown, both the first inlet channel 41 and the inlet 11 can be circular in shape, which reduces fluid resistance and makes the fluid flow more stable. The shape and radial dimensions of the second cavity 42 can be the same as or different from those of the first cavity 13. Figure 6 As shown, in some embodiments, the second cavity 42 and the first cavity 13 have the same radial dimensions and the same shape, that is, the projections of the first cavity 13 and the second cavity 42 in the vertical direction Z can completely overlap, thus simplifying the manufacturing process.

[0065] like Figure 5 and Figure 6As shown, in some embodiments, the actuation component 3 may include a flexible membrane 31 and a piezoelectric element 32. When the atomizing device includes a second substrate 4, the flexible membrane 31 is disposed on the side of the second substrate 4 away from the main structure 1 and at least covers the second cavity 42. The piezoelectric element 32 is disposed on the side of the flexible membrane 31 away from the second substrate 4 and corresponds to the second cavity 42.

[0066] The flexible membrane 31 and piezoelectric element 32 can be referred to in the above embodiment, and will not be repeated here. The piezoelectric element 32 is disposed in the vertical direction Z corresponding to the second cavity 42. The bending vibration of the piezoelectric element 32 causes the flexible membrane 31 to deform, thereby changing the volume of the receiving cavity formed by the first cavity 13 and the second cavity 42, actuating the fluid flow. An opening corresponding to the first inlet channel 41 can be opened on the flexible membrane 31. When the piezoelectric element 32 moves away from the receiving cavity, the volume of the receiving cavity increases, forming a negative pressure. The fluid flows into the first inlet channel 41 through the opening, then enters the inlet 11 of the main structure 1, and flows into the receiving cavity through the first pipe 12. When the piezoelectric element 32 moves towards the receiving cavity, the receiving cavity is compressed, reducing its volume, and at the same time, the fluid is squeezed. The fluid flows from the receiving cavity through the second pipe 14 to the outlet 15 of the main structure 1, and then forms droplets and is ejected through the through hole 21 of the first substrate 2.

[0067] like Figure 5 and Figure 6 As shown, in some embodiments, the atomizing device may further include a third substrate 5 disposed between the main structure 1 and the first substrate 2. The third substrate 5 is provided with a first outlet channel 51, and the two ends of the first outlet channel 51 are respectively connected to the outlet 15 and the through hole 21 of the first substrate 2.

[0068] The third substrate 5 has a first outlet channel 51, which communicates with the outlet 15 of the main structure 1, extending the path of fluid flow to the through hole 21 of the first substrate 2 and buffering the fluid to make it flow out more stably. Furthermore, the third substrate 5 is located between the first substrate 2 and the main structure 1, and the third substrate 5 blocks the inlet 11 of the main structure 1. Therefore, if... Figure 7 As shown, the through-hole 21 can cover the entire first substrate 2. During installation, there is no need to consider the alignment with the first outlet channel 51, thus simplifying the manufacturing process.

[0069] Continue to refer to Figure 5 and Figure 6 In the stacking direction of the third substrate 5 and the main structure 1, that is, in the vertical direction Z, the first outlet channel 51, the outlet 15 and a plurality of through holes 21 are correspondingly arranged to facilitate the outflow of fluid.

[0070] In some embodiments, the atomization device can include the main body structure 1, the first substrate 2, the actuating assembly 3, and the second substrate 4 described above. In other embodiments, the atomization device can include the main body structure 1, the first substrate 2, the actuating assembly 3, and the third substrate 5 described above. In other embodiments, the atomization device can include the main body structure 1, the first substrate 2, the actuating assembly 3, the second substrate 4, and the third substrate 5 described above. Those skilled in the art can set it according to actual needs, which is not specially limited here.

[0071] As shown in Figure 5 The through hole 21 on the first substrate 2 includes a tapered hole, and the radial dimension of the tapered hole gradually decreases from the side of the first substrate 2 towards the side of the main body structure 1. The radial dimension of the tapered hole can be understood as the inner diameter of the tapered hole. By setting the tapered hole described above, the fluid can be atomized.

[0072] In some embodiments, the radial dimension of the tapered hole can be 10 nm to 50 μm. In some embodiments, the radial dimension of the tapered hole can gradually decrease in the range of 30 nm to 10 nm, or the radial dimension of the tapered hole can gradually decrease in the range of 70 nm to 50 nm, or the radial dimension of the tapered hole can gradually decrease in the range of 100 nm to 50 nm, or the radial dimension of the tapered hole can gradually decrease in the range of 200 nm to 150 nm, or the radial dimension of the tapered hole can gradually decrease in the range of 500 nm to 300 nm, or the radial dimension of the tapered hole can gradually decrease in the range of 800 nm to 600 nm, or the radial dimension of the tapered hole can gradually decrease in the range of 30 μm to 10 μm, or the radial dimension of the tapered hole can gradually decrease in the range of 40 μm to 20 μm. The smaller the radial dimension of the tapered hole, the smaller the size of the mist droplets formed. Those skilled in the art can set it according to actual needs, which is not specially limited here.

[0073] The radial dimension of the tapered hole of the embodiments of the present disclosure reaches nanometer or micrometer level, which can form nanometer or micrometer level spray. When the atomization device is applied in the medical field, the sprayed medicament is more uniform and easier to be absorbed by the human body. When the atomization device is applied in other fields, the mist droplets can also be more uniform.

[0074] In some embodiments, as shown in Figure 11 The first substrate 2 is provided with a second inlet channel 22, which communicates with the inlet 11 of the main body structure 1. In this way, the flexible membrane 31 of the actuating assembly 3 can not be provided with an opening, thereby simplifying the manufacturing process.

[0075] In some embodiments, the shape of the cross section of the first cavity 13, the inlet 11 and the outlet 15 of the main body structure 1 along the direction perpendicular to the stacking direction of the main body structure 1 and the first substrate 2 (and perpendicular to the vertical direction Z) can include at least one of a circle, an ellipse, a waist circle, a triangle, a rectangle, a square and a polygon.

[0076] In some embodiments, as shown in FIG. 1, the shape of the cross section of the first cavity 13, the inlet 11 and the outlet 15 can be a square, which can be set by those skilled in the art according to actual needs, and is not specially limited here. Figure 12

[0077] Of course, the shape of the cross section of the first inlet channel 41 and the second cavity 42 of the second substrate 4, the second outlet channel 51 of the third substrate 5 and the second inlet channel 22 of the first substrate 2 along the direction perpendicular to the vertical direction Z can also include at least one of a circle, an ellipse, a waist circle, a triangle, a rectangle, a square and a polygon. In some embodiments, the shape of the cross section of the first inlet channel 41 and the inlet 11 is the same, and the shape of the cross section of the first outlet channel 51 and the outlet 15 is the same, which is convenient for processing and installation and is conducive to the flow of fluid.

[0078] As shown in FIG. 1, in some embodiments, the main body structure 1 includes a plurality of inlets 11, a plurality of first pipes 12, a first cavity 13, a plurality of second pipes 14 and a plurality of outlets 15. The plurality of inlets 11 and the plurality of first pipes 12 correspond one-to-one, the plurality of outlets 15 and the plurality of second pipes 14 correspond one-to-one, and the plurality of first pipes 12 and the plurality of second pipes 14 also correspond to the first cavity 13, respectively. In this way, the amount of fluid sucked into the first cavity 13 can be increased, and the amount of fluid discharged can be increased, thereby increasing the amount of mist sprayed at one time. Thus, by changing the number of inlets 11 and outlets 15, the amount of mist sprayed can be adjusted. Figure 15 In some embodiments, the number of first inlet channels 41 on the second substrate 4 can be the same as the number of inlets 11, and be arranged one-to-one, and the number of first outlet channels 51 on the third substrate 5 can be the same as the number of outlets 15, and be arranged one-to-one.

[0079] In some embodiments, the number of first inlet channels 41 of the second substrate 4 can be the same as the number of inlets 11, and the positions correspond, and the second cavity 42 of the second substrate 4 corresponds to the first cavity 13 to form a containing cavity. The number of first outlet channels 51 of the third substrate 5 can be the same as the number of outlets 15, and the positions correspond, which can be set by those skilled in the art according to actual needs, and is not specially limited here.

[0080]

[0081] Figure 13 ​​A top view of the atomization device in some embodiments is shown, for the purpose of clearly showing the internal cavity structure, Figure 13 Only the structure of the main body structure 1 is shown. Figure 14 The atomization device in some embodiments has a main body structure 1 along Figure 13 A cross-sectional view along A-A is shown. As Figure 13 and Figure 14 shown, the main body structure 1 includes at least one inlet 11, a plurality of first conduits 12, a plurality of first cavities 13, a plurality of second conduits 14, and at least one outlet 15. Among them, the plurality of first cavities 13 are arranged at intervals, each first cavity 13 is communicated with the at least one inlet 11 through the at least one first conduit 12, and each first cavity 13 is communicated with the at least one outlet 15 through the at least one second conduit 14.

[0082] In an embodiment, as Figure 13 shown, the main body structure 1 includes one inlet 11, one outlet 15, a plurality of first cavities 13, a plurality of first conduits 12, and a plurality of second conduits 14. The plurality of first cavities 13 are arranged side by side, each first cavity 13 is connected with a first conduit 12 and a second conduit 14, the plurality of first conduits 12 are connected with the inlet 11, and the plurality of second conduits 14 are connected with the outlet 15. The opening area of the inlet 11 and the outlet 15 can be increased to ensure that the fluid can enter or flow out of the plurality of first cavities 13 at the same time. As Figure 13 shown, in some embodiments, the main body structure 1 includes one inlet 11, one outlet 15, two first cavities 13 arranged side by side, two first conduits 12, and two second conduits 14.

[0083] In some embodiments, the main body structure 1 can include a plurality of inlets 11, a plurality of outlets 15, a plurality of first cavities 13, a plurality of first conduits 12, and a plurality of second conduits 14. The plurality of first cavities 13 are arranged side by side, each first cavity 13 can be connected with a plurality of first conduits 12 and a plurality of second conduits 14, the plurality of first conduits 12 can be connected with the plurality of inlets 11 one by one, and the plurality of second conduits 14 can be connected with the plurality of outlets 15 one by one.

[0084] The atomization device in the above embodiments has a plurality of first cavities 13, that is, the atomization device has a plurality of parallel cavities to improve the atomization efficiency.

[0085] In some embodiments, the number of the first inlet channels 41 of the second substrate 4 can be the same as the number of the inlets 11, and the positions correspond, the number of the second cavities 42 of the second substrate 4 can be the same as the number of the first cavities 13, and the positions correspond, each set of corresponding first cavity 13 and second cavity 42 forms a containing cavity, so that the plurality of parallel chambers can be a plurality of parallel containing cavities. The number of the first outlet channels 51 of the third substrate 5 can be the same as the number of the outlets 15, and the positions correspond, and those skilled in the art can set it according to actual needs, which is not specially limited here.

[0086] Based on the above embodiments, the actuating assembly 3 can have a plurality, and the number of the actuating assembly 3 is the same as the number of the first cavities 13, and the actuating assembly 3 is arranged one by one corresponding to the first cavities 13. As shown in Figure 14 The atomizing device is provided with two first cavities 13, and the actuating assembly 3 includes a first actuating assembly 301 and a second actuating assembly 302, the first actuating assembly 301 is arranged on the side away from the first substrate 2 of one of the first cavities 13 (containing cavities), and the second actuating assembly 302 is arranged on the side away from the first substrate 2 of the other first cavity 13 (containing cavities). In the same vibration cycle, different voltage signals can be applied to the first actuating assembly 301 and the second actuating assembly 302, so that the first actuating assembly 301 and the second actuating assembly 302 vibrate in opposite directions, for example, as shown in Figure 14 When the first actuating assembly 301 vibrates downward, the fluid flows into the first cavity 13, while the second actuating assembly 302 vibrates upward, extruding the first cavity 13, so that the fluid flows out and is atomized and sprayed through the through hole 21 of the first substrate 2. When the first actuating assembly 301 vibrates upward, it extrudes the first cavity 13, the fluid flows out and is atomized and sprayed through the through hole 21, while the second actuating assembly 302 vibrates downward, the fluid flows in. Therefore, in one vibration cycle, there will always be mist droplets sprayed out, improving the atomization efficiency.

[0087] As shown in Figure 14 The actuating assembly 3 includes a flexible film 31 and a plurality of piezoelectric elements 32, the flexible film 31 is arranged on the side away from the first substrate 2 of the main body structure 1 and covers at least the plurality of first cavities 13 (containing cavities), and the plurality of piezoelectric elements 32 are arranged on the side away from the main body structure 1 of the flexible film 31 and correspond one by one to the plurality of first cavities 13.

[0088] Among them, the flexible film 31 and the piezoelectric element 32 can refer to the above embodiments, which will not be repeated here. The piezoelectric element 32 corresponds one by one to the first cavity 13 in the vertical direction Z, so that the flow of the fluid in the corresponding first cavity 13 can be controlled by individually controlling the vibration direction of each piezoelectric element 32.

[0089] In some embodiments, the main body structure 1, the first substrate 2, the second substrate 4 and the third substrate 5 of the present disclosure can be made of at least one of a silicon wafer, glass and a high polymer polymer with rigidity. Among them, the high polymer polymer can be a PVC (Polyvinyl chloride) plastic plate, which can be selected by those skilled in the art according to actual conditions, and is not specially limited here.

[0090] In summary, the atomization device of the present disclosure does not need to separately set a valve, realizes a valve-free design, thereby avoiding valve fatigue damage, improving the service life of the atomization device, and the structure is simpler, simplifying the manufacturing process. In addition, in the above embodiment, by setting a plurality of first cavities 13, and corresponding piezoelectric elements 32 are arranged below each first cavity 13, therefore, in one vibration period, mist droplets will always be sprayed out, improving the atomization efficiency.

[0091] As shown in Figure 16 The present disclosure also provides a valveless pump, which comprises a main body structure 1 and an actuating assembly 3. Among them, the main body structure 1 comprises a communication inlet 11, a first pipeline 12, a first cavity 13, a second pipeline 14 and an outlet 15; the first pipeline 12 is located between the inlet 11 and the first cavity 13, and the second pipeline 14 is located between the first cavity 13 and the outlet 15, and the radial dimensions of the two ends of the first pipeline 12 connected with the inlet 11 and the first cavity 13 are different, and the radial dimensions of the two ends of the second pipeline 14 connected with the first cavity 13 and the outlet 15 are different. The actuating assembly 3 is arranged on one side of the main body structure 1, and is used to actuate the flow of fluid into the valveless pump and the flow of fluid out of the valveless pump.

[0092] The main body structure 1 and the actuating assembly 3 of the valveless pump of the present disclosure can be the same as the main body structure 1 and the actuating assembly 3 of the atomization device in any of the above embodiments.

[0093] In some embodiments, the radial dimension of the end of the first pipeline 12 connected with the inlet 11 is smaller than the radial dimension of the end of the first pipeline 12 connected with the first cavity 13, and the radial dimension of the end of the second pipeline 14 connected with the first cavity 13 is smaller than the radial dimension of the end of the second pipeline 14 connected with the outlet 15. In this way, the first pipeline 12 and the second pipeline 14 can play the role of a valve, without the need to separately set a valve, realizing the valve-free design of the valveless pump, thereby avoiding valve fatigue damage, improving the service life of the valveless pump, and at the same time, the structure of the valveless pump is simpler, simplifying the manufacturing process.

[0094] As shown in Figure 16As shown, the actuating assembly 3 includes a flexible membrane 31 and a piezoelectric element 32, the flexible membrane 31 is arranged on one side of the main body structure 1 and covers at least the first cavity 13, and the piezoelectric element 32 is arranged on the side of the flexible membrane 31 away from the main body structure 1 and corresponds to the first cavity 13. The flexible membrane 31 and the piezoelectric element 32 can be the same as those of the atomization device embodiments. In the embodiments of the present disclosure, the piezoelectric element 32 is arranged corresponding to the first cavity 13 in the vertical direction Z, and the deformation of the flexible membrane 31 is caused by the bending vibration of the piezoelectric element 32, thereby changing the volume of the first cavity 13 to actuate the fluid flow.

[0095] Reference Figure 16 and Figure 6 In some embodiments, the valveless pump further includes a second substrate 4 arranged between the actuating assembly 3 and the main body structure 1, the second substrate 4 is provided with a first inlet channel 41 and a second cavity 42, the first inlet channel 41 is in communication with the inlet 11, and the second cavity 42 is in communication with the first cavity 13, and the first cavity 13 and the second cavity 42 can form a containing cavity for containing fluid. The specific structure of the second substrate 4 and its relationship with the main body structure 1 are the same as those of any of the above-mentioned atomization device embodiments, which will not be described here. By arranging the second substrate 4, the second cavity 42 and the first cavity 13 superimpose to form a containing cavity, which increases the volume of the cavity and can store more fluid.

[0096] In some embodiments, the actuating assembly 3 can include a flexible membrane 31 and a piezoelectric element 32, when the atomization device includes a second substrate 4, the flexible membrane 31 is arranged on the side of the second substrate 4 away from the main body structure 1 and covers at least the second cavity 42, and the piezoelectric element 32 is arranged on the side of the flexible membrane 31 away from the second substrate 4 and corresponds to the second cavity 42. The flexible membrane 31 and the piezoelectric element 32 can be the same as those of the atomization device embodiments, which will not be described here.

[0097] The piezoelectric element 32 is arranged corresponding to the second cavity 42 in the vertical direction Z, and the deformation of the flexible membrane 31 is caused by the bending vibration of the piezoelectric element 32, thereby changing the volume of the containing cavity formed by the first cavity 13 and the second cavity 42 to actuate the fluid flow. An opening corresponding to the first inlet channel 41 can be formed on the flexible membrane 31, when the piezoelectric element 32 moves away from the containing cavity, the volume of the containing cavity increases to form a negative pressure, and the fluid flows into the first inlet channel 41 through the opening, and then enters the inlet 11 of the main body structure 1 and flows into the containing cavity through the first pipe 12. When the piezoelectric element 32 moves towards the containing cavity, the containing cavity is compressed to reduce the volume, and at the same time, the fluid is squeezed, and the fluid flows from the containing cavity to the outlet 15 of the main body structure 1 through the second pipe 14.

[0098] Continue to refer to Figure 16 and Figure 6In some embodiments, the valveless pump may further include a third substrate 5 disposed between the main structure 1 and the first substrate 2. The third substrate 5 has a first outlet channel 51, the two ends of which are respectively connected to the outlet 15 and the through hole 21 of the first substrate 2. The first outlet channel 51 on the third substrate 5, connected to the outlet 15 of the main structure 1, extends the path of the fluid to the through hole 21 of the first substrate 2, and acts as a buffer for the fluid, making its flow more stable. The structure of the third substrate 5 in the embodiments of this disclosure can be the same as that of the third substrate 5 in the atomizing device embodiments, and will not be described again here.

[0099] In some embodiments, such as Figure 15 As shown, the main structure 1 includes multiple inlets 11, multiple first pipes 12, a first cavity 13, multiple second pipes 14, and multiple outlets 15. Each inlet 11 is connected to one of the first pipes 12, and each outlet 15 is connected to one of the second pipes 14. The first pipes 12 and the second pipes 14 are also connected to the first cavity 13. This increases the amount of fluid drawn into the first cavity 13 and the amount of fluid discharged, thereby increasing the amount of droplets ejected at one time. Therefore, by changing the number of inlets 11 and outlets 15, the amount of droplets ejected can be adjusted.

[0100] In some embodiments, such as Figure 13 As shown, the main structure 1 includes at least one inlet 11, multiple first pipes 12, multiple first chambers 13, multiple second pipes 14, and at least one outlet 15. The multiple first chambers 13 are spaced apart, each first chamber 13 is connected to at least one inlet 11 via at least one first pipe 12, and each first chamber 13 is connected to at least one outlet 15 via at least one second pipe 14. Thus, the valveless pump has multiple first chambers 13, meaning it has multiple parallel chambers, thereby increasing the fluid output.

[0101] In some embodiments, the actuation assembly 3 includes a flexible membrane 31 and a plurality of piezoelectric elements 32. The flexible membrane 31 is disposed on one side of the main structure 1 and at least covers a plurality of first cavities 13. The plurality of piezoelectric elements 32 are disposed on the side of the flexible membrane 31 away from the main structure 1 and correspond one-to-one with the plurality of first cavities 13. The flexible membrane 31 and the piezoelectric elements 32 can be described with reference to the above embodiments, and will not be repeated here. The piezoelectric elements 32 correspond one-to-one with the first cavities 13 in the vertical direction Z; therefore, the inflow and outflow of fluid in the corresponding first cavity 13 can be controlled by individually controlling the vibration direction of each piezoelectric element 32.

[0102] In summary, the valveless pump of the embodiments of the present disclosure does not need to separately set a valve, realizes valveless design, thereby avoiding fatigue damage of the valve, improving the service life of the valveless pump, and the structure is simpler, simplifying the manufacturing process. In addition, in the above embodiments, by setting a plurality of first cavities 13, and a piezoelectric element 32 is correspondingly arranged below each first cavity 13, thus in one vibration period, fluid will always flow out, improving the fluid output efficiency of the valveless pump.

[0103] As shown in Figure 17 The embodiments of the present disclosure also provide a preparation method of the atomization device, including the following steps S171-S173.

[0104] S171: providing a main structure 1, the main structure 1 including a communication inlet 11, a first pipeline 12, a first cavity 13, a second pipeline 14 and an outlet 15; the first pipeline 12 is located between the inlet 11 and the first cavity 13, the second pipeline 14 is located between the first cavity 13 and the outlet 15, and the radial dimension of the two ends of the first pipeline 12 connected with the inlet 11 and the first cavity 13 is different, and the radial dimension of the two ends of the second pipeline 14 connected with the first cavity 13 and the outlet 15 is different.

[0105] In some embodiments, the main structure 1 can be formed by etching process. For example, a plate structure can be provided, a mask is arranged on the plate structure, and the mask has the patterns of the inlet 11, the first pipeline 12, the first cavity 13, the second pipeline 14 and the outlet 15. According to the patterns on the mask, the inlet 11, the first pipeline 12, the first cavity 13, the second pipeline 14 and the outlet 15 are etched on the plate structure by etching process to form the main structure 1.

[0106] In some embodiments, the radial dimension of the end of the first pipeline 12 of the main structure 1 connected with the inlet 11 is smaller than the radial dimension of the end of the first pipeline 12 connected with the first cavity 13; and the radial dimension of the end of the second pipeline 14 connected with the first cavity 13 is smaller than the radial dimension of the end of the second pipeline 14 connected with the outlet 15. Thus, the first pipeline 12 and the second pipeline 14 can play the role of the valve, so that the atomization device realizes valveless design.

[0107] S172: providing a first substrate 2 provided with a through hole 21, and combining the first substrate 2 with the main structure 1 so that the first substrate 2 is located on one side of the main structure 1.

[0108] Specifically, a plurality of through holes 21 are formed on the first substrate 2. The first substrate 2 with the through holes 21 is arranged on one side of the main structure 1 and combined. For example, the first substrate 2 can be bonded or adhered to one side of the main structure 1.

[0109] In some embodiments, the through hole 21 on the first substrate 2 comprises a tapered hole, the radial dimension of which decreases from the side of the first substrate 2 facing the main body structure 1 to the side of the first substrate 2 away from the main body structure 1, so that the fluid flowing out of the outlet 15 can be atomized into droplets and then sprayed out.

[0110] S173: providing the actuating assembly 3, combining the actuating assembly 3 with the main body structure 1, and locating the actuating assembly 3 on the side of the main body structure 1 away from the first substrate 2.

[0111] In the embodiments of the present disclosure, the actuating assembly 3 can comprise a flexible film 31 and a piezoelectric element 32, the flexible film 31 is arranged on the side of the main body structure 1 away from the first substrate 2 and covers at least the first cavity 13, and the piezoelectric element 32 is arranged on the side of the flexible film 31 away from the main body structure 1 and corresponds to the first cavity 13. The flexible film 31 can be bonded or adhered to the side of the main body structure 1 away from the first substrate 2, the piezoelectric element 32 is arranged on the side of the flexible film 31 away from the main body structure 1 and corresponds to the first cavity 13 in the vertical direction Z, so that when the piezoelectric element 32 vibrates periodically, the volume of the first cavity 13 can be changed to actuate the fluid.

[0112] The method of the embodiments of the present disclosure can further comprise: providing a second substrate 4, the second substrate 4 is provided with a first inlet channel 41 and a second cavity 42, combining the main body structure 1, the second substrate 4 and the actuating assembly 3, and locating the second substrate 4 between the main body structure 1 and the actuating assembly 3, and making the first inlet channel 41 communicate with the inlet 11 and the second cavity 42 communicate with the first cavity 13.

[0113] In some embodiments, the second substrate 4 can also be formed by an etching process, for example, a plate-shaped structure is provided, and another mask is arranged above the plate-shaped structure, the mask has the pattern of the first inlet channel 41 and the pattern of the second cavity 42. According to the patterns on the mask, the first inlet channel 41 and the second cavity 42 are etched on the plate-shaped structure by an etching process to form the second substrate 4. The actuating assembly 3, the second substrate 4 and the main body structure 1 can be bonded or adhered together, so that the second substrate 4 is located between the actuating assembly 3 and the main body structure 1. The second cavity 42 of the second substrate 4 corresponds to the first cavity 13 in the stacking direction of the main body structure 1 and the second substrate 4 to form a containing cavity.

[0114] In some embodiments, the actuation component 3 includes a flexible membrane 31 and a piezoelectric element 32. The flexible membrane 31 is disposed on the side of the second substrate 4 away from the main structure 1 and at least covers the second cavity 42. The piezoelectric element 32 is disposed on the side of the flexible membrane 31 away from the second substrate 4 and corresponds to the second cavity 42. That is, the piezoelectric element 32 is disposed below the receiving cavity formed by the first cavity 13 and the second cavity 42, so that when the piezoelectric element 32 vibrates, it can drive the flexible membrane 31 to change the volume of the receiving cavity.

[0115] The method of this disclosure embodiment may further include: providing a third substrate 5, the third substrate 5 having a first outlet channel 51, combining the first substrate 2, the third substrate 5 and the main structure 1, and the third substrate 5 being located between the main structure 1 and the first substrate 2, and connecting the first outlet channel 51 with the outlet 15.

[0116] In some embodiments, the third substrate 5 may also be formed using an etching process. For example, a plate-like structure is provided, and another mask is disposed above the plate-like structure. The mask has a pattern of the first exit channel 51. According to the pattern on the mask, the first exit channel 51 is etched on the plate-like structure using an etching process to form the third substrate 5.

[0117] The third substrate 5 can be bonded or glued to the side of the main structure 1 away from the actuation component 3, and the first substrate 2 can be bonded or glued to the side of the second substrate 4 away from the main structure 1.

[0118] In some embodiments, after providing the actuation component 3, the second substrate 4, the main structure 1 and the third substrate 5 described above, the actuation component 3, the second substrate 4, the main structure 1 and the third substrate 5 can be stacked along the vertical direction Z and bonded or glued to form a whole, which can form the valveless pump in the above embodiment. Then, the first substrate 2 is bonded to the third substrate 5 to form an atomizing device, simplifying the manufacturing process.

[0119] like Figure 15 As shown, in some embodiments, the main structure 1 includes multiple inlets 11, multiple first pipes 12, a first cavity 13, multiple second pipes 14, and multiple outlets 15. Each inlet 11 is connected to one of the multiple first pipes 12, and each outlet 15 is connected to one of the multiple second pipes 14. The multiple first pipes 12 and the multiple second pipes 14 are also connected to the first cavity 13. This increases the amount of fluid drawn into the first cavity 13 and the amount of fluid discharged, thereby increasing the amount of droplets ejected at one time. Therefore, by changing the number of inlets 11 and outlets 15, the amount of spray can be adjusted. When fabricating this main structure 1, the pattern on the mask can be set accordingly, and then the plate-like structure can be etched; details will not be elaborated here.

[0120] likeFigure 13 and Figure 14 As shown in FIG. 1, in some embodiments, the main body structure 1 comprises at least one inlet 11, a plurality of first conduits 12, a plurality of first cavities 13, a plurality of second conduits 14 and at least one outlet 15. The plurality of first cavities 13 are spaced apart, each first cavity 13 is in communication with the at least one inlet 11 through at least one first conduit 12, and each first cavity 13 is in communication with the at least one outlet 15 through at least one second conduit 14. In this way, the atomization device has a plurality of first cavities 13, i.e., the atomization device has a plurality of parallel chambers, thereby improving the atomization efficiency.

[0121] In some embodiments, the provided actuating assembly 3 comprises a flexible film 31 and a plurality of piezoelectric elements 32. The flexible film 31 is provided on the side of the main body structure 1 away from the first substrate 2 and covers at least the plurality of first cavities 13. The plurality of piezoelectric elements 32 are provided on the side of the flexible film 31 away from the main body structure 1 and correspond one-to-one to the plurality of first cavities 13. The flexible film 31 and the piezoelectric elements 32 can refer to the above embodiments, which will not be described here. The piezoelectric elements 32 correspond one-to-one to the first cavities 13 in the vertical direction Z, so that the inflow and outflow of the fluid in the corresponding first cavities 13 can be controlled by individually controlling the vibration direction of each piezoelectric element 32. Therefore, in one vibration cycle, there will always be mist droplets sprayed out, improving the atomization efficiency.

[0122] In summary, the preparation method of the atomization device of the embodiments of the present disclosure is simpler, realizes a valveless design of the atomization device, and the structure is simpler.

[0123] The embodiments of the present disclosure also provide a preparation method of a valveless pump, comprising: providing a main body structure 1, the main body structure 1 comprising an inlet 11, a first conduit 12, a first cavity 13, a second conduit 14 and an outlet 15 which are in communication; the first conduit 12 is located between the inlet 11 and the first cavity 13, the second conduit 14 is located between the first cavity 13 and the outlet 15, and the radial dimensions of the two ends of the first conduit 12 connected with the inlet 11 and the first cavity 13 are different, and the radial dimensions of the two ends of the second conduit 14 connected with the first cavity 13 and the outlet 15 are different; providing an actuating assembly 3, combining the actuating assembly 3 with the main body structure 1, so that the actuating assembly 3 is located on one side of the main body structure 1.

[0124] The preparation method of the valveless pump is basically the same as the preparation method of the atomization device, except that the first substrate 2 is not included in the valveless pump, and the related preparation method of the first substrate 2 and the bonding step are not included in the preparation method of the valveless pump. For the specific preparation method of the valveless pump, the preparation method of the corresponding structure in the atomization device can be referred to, which will not be described here.

[0125] As Figure 18As shown, the embodiments of the present disclosure also provide a control method applied to an actuating device, the actuating device comprising a main body structure 1 and an actuating assembly 3, the main body structure 1 comprising a communicating inlet 11, a first pipeline 12, a first cavity 13, a second pipeline 14 and an outlet 15. The actuating method comprises the following steps S181-S182.

[0126] It should be noted that the actuating device can comprise the atomizing device and the valveless pump in the above embodiments, the main body structure 1 and the actuating assembly 3 can be the main body structure 1 and the actuating assembly 3 in any of the above embodiments, and the control method of the embodiments of the present disclosure can be used to control the atomizing device and the valveless pump.

[0127] S181: sending a first voltage signal to the actuating assembly 3 to make the fluid flow into the first cavity 13 through the inlet 11 and the first pipeline 12.

[0128] S182: sending a second voltage signal to the actuating assembly 3 to control the actuating assembly 3 to move towards the main body structure 1 to make the fluid flow out of the first cavity 13, the second pipeline 14 and the outlet 15.

[0129] The first voltage signal and the second voltage signal are opposite voltage signals in a period, the actuating assembly 3 vibrates to one side in the vertical direction Z after receiving the first voltage signal, and the actuating assembly 3 vibrates to the opposite side in the vertical direction Z after receiving the second voltage signal.

[0130] Reference Figure 2 , after the actuating assembly 3 receives the first voltage signal, the actuating assembly 3 moves away from the main body structure 1 to make the volume of the first cavity 13 larger, so that the fluid is sucked in, i.e. the fluid flows into the first cavity 13 through the inlet 11 and the first pipeline 12 of the main body structure 1. Reference Figure 3 , then the actuating assembly 3 receives the second voltage signal, the actuating assembly 3 moves towards the main body structure 1 to make the first cavity 13 be squeezed to have a smaller volume, so that the fluid flows out of the first cavity 13, the second pipeline 14 and the outlet 15.

[0131] Thus, the control method of the embodiments of the present disclosure can accurately control the fluid to flow into and out of the atomizing device or the valveless pump.

[0132] In some embodiments, as shown in Figure 13 and Figure 14 , the main body structure 1 comprises a plurality of first cavities 13, the actuating assembly 3 comprises a first actuating assembly 301 and a second actuating assembly 302, and the first actuating assembly 301 and the second actuating assembly 302 correspond to different first cavities 13.

[0133] The sending of the first voltage signal to the actuating assembly 3 in S181 includes sending the first voltage signal to the first actuating assembly 301. That is, in S181, the first voltage signal is sent to the first actuating assembly 301, so that the first actuating assembly 301 moves in a direction away from the main body structure 1, and in turn, the fluid in the corresponding first cavity flows in.

[0134] Based on this, the control method further includes: sending the second voltage signal to the second actuating assembly 302 at the same time as sending the first voltage signal to the first actuating assembly 301.

[0135] That is, the second voltage signal is sent to the second actuating assembly 302, so that the second actuating assembly 302 moves in a direction close to the main body structure 1, and in turn, the fluid in the corresponding first cavity 13 flows out. That is, the first actuating assembly 301 and the second actuating assembly 302 simultaneously receive opposite voltage signals, so that when the first actuating assembly 301 corresponds to the first cavity 13, the fluid in the first cavity 13 flows in, and the fluid in the first cavity 13 corresponding to the second actuating assembly 302 flows out. When the second voltage signal is sent to the first actuating assembly 301, the first actuating assembly 301 moves in a direction close to the main body structure 1, so that the fluid in the corresponding first cavity flows out, and at the same time, the first voltage signal is sent to the second actuating assembly 302, the second actuating assembly 302 moves in a direction away from the main body structure 1, so that the fluid in the corresponding first cavity flows in.

[0136] By sending opposite voltage signals to different actuating assemblies 3 at the same time, the fluid can always flow out, thereby improving the fluid output of the actuating device, so that the actuating device can always output fluid. When the actuating device is an atomization device, it can always output atomized droplets. When the atomization device is used for drug atomization to treat respiratory diseases such as asthma, it can always output atomized drugs, thereby improving the treatment effect.

[0137] Of course, the number of first cavities 13 of the main body structure 1 can be greater than two, and the actuating assembly 3 is correspondingly arranged at each first cavity 13. That is, the actuating assembly 3 can further include a third actuating assembly, a fourth actuating assembly, etc. A person skilled in the art can set the number of first cavities 13 and actuating assemblies 3 according to actual needs, which is not specially limited here.

[0138] Among the plurality of actuating assemblies 3, the first voltage signal can be sent to part of the actuating assemblies 3, and the second voltage signal can be sent to the remaining part of the actuating assemblies 3 at the same time, so that the actuating device can always output fluid.

[0139] The execution body of the embodiment of the application can be a controller, for example, can be a PLC (programmable logic controller), or can be a cloud server.

[0140] In summary, the control method of the embodiments of the present disclosure can accurately control the actuating device to output fluid, and can output at any time, thereby improving the fluid output amount.

[0141] The embodiments of the present disclosure can also provide a computer device, comprising a processor, an input / output interface, and a memory. The processor acquires a computer program in the memory, and executes each step of the method shown in any of the above embodiments.

[0142] The embodiments of the present disclosure also provide a computer readable storage medium storing a computer program, which is adapted to be loaded by the processor and execute the control method provided by each step of any of the above embodiments. For details, refer to the implementation manner provided by each step of any of the above embodiments, which will not be described herein. In addition, the beneficial effects of using the same method will not be described herein. For technical details not disclosed in the embodiments of the computer readable storage medium, refer to the description of the method embodiments of the present disclosure. As an example, the computer program can be deployed to execute on one computer device, or on multiple computer devices located in one place, or on multiple computer devices distributed in multiple places and interconnected through a communication network.

[0143] The computer readable storage medium can be the computer network security server virtualization processing system or the internal storage unit of the computer device provided by any of the above embodiments, such as the hard disk or the memory of the computer device. The computer readable storage medium can also be an external storage device of the computer device, such as a plug-in hard disk, a smart media card (SMC), a secure digital (SD) card, a flash card, etc. Further, the computer readable storage medium can include both the internal storage unit and the external storage device of the computer device. The computer readable storage medium is used to store the computer program and other programs and data required by the computer device. The computer readable storage medium can also be used to temporarily store data that has been output or will be output.

[0144] The embodiments of the present disclosure also provide a computer program product or a computer program, which comprises computer instructions stored in a computer readable storage medium. The processor of the computer device reads the computer instructions from the computer readable storage medium, and the processor executes the computer instructions to make the computer device execute the method provided in any of the above embodiments.

[0145] It should be appreciated that the present disclosure is not limited to the details of construction and arrangement of parts set forth in the specification. The present disclosure is capable of other embodiments and of being practiced or being carried out in various ways. Variations and modifications of the foregoing are within the scope of the present disclosure. It should be understood that the present disclosure fully encompasses all combinations of two or more individual features set forth herein and / or in the appended claims. All these different combinations are considered to be within the scope of the present disclosure. The embodiments described hereinabove are presented by way of example only and are not intended to limit the scope of the disclosure.

Claims

1. An atomization device, comprising: a main structure comprising a communication inlet, a first duct, a first cavity, a second duct and an outlet; the first duct is located between the inlet and the first cavity, the second duct is located between the first cavity and the outlet, and the radial dimension of the two ends of the first duct connected with the inlet and the first cavity is different, and the radial dimension of the two ends of the second duct connected with the first cavity and the outlet is different; a first substrate provided on one side of the main structure, the first substrate is provided with a through hole; and an actuating assembly provided on the side of the main structure away from the first substrate.

2. The atomization device of claim 1, wherein, The radial dimension of the end of the first duct connected with the inlet is smaller than the radial dimension of the end of the first duct connected with the first cavity; the radial dimension of the end of the second duct connected with the first cavity is smaller than the radial dimension of the end of the second duct connected with the outlet.

3. The atomization device according to claim 1, further comprising: a second substrate provided between the actuating assembly and the main structure, the second substrate is provided with a first inlet channel and a second cavity, the first inlet channel is in communication with the inlet, and the second cavity is in communication with the first cavity.

4. The atomization device of claim 3, wherein, In the stacking direction of the second substrate and the main structure, the first inlet channel corresponds to the inlet, and the second cavity corresponds to the first cavity.

5. The atomization device of claim 3, wherein, The actuating assembly comprises a flexible film and a piezoelectric element, the flexible film is provided on the side of the second substrate away from the main structure and covers at least the second cavity, and the piezoelectric element is provided on the side of the flexible film away from the second substrate and corresponds to the second cavity.

6. The atomization device according to claim 1, further comprising: a third substrate provided between the main structure and the first substrate, the third substrate is provided with a first outlet channel, and the two ends of the first outlet channel are in communication with the outlet and the through hole respectively.

7. The atomization device of claim 6, wherein, In the stacking direction of the third substrate and the main structure, the first outlet channel, the outlet and the through hole are correspondingly arranged.

8. The atomization device of claim 1, wherein, The actuating assembly comprises a flexible film and a piezoelectric element, the flexible film is provided on the side of the main structure away from the first substrate and covers at least the first cavity, and the piezoelectric element is provided on the side of the flexible film away from the main structure and corresponds to the first cavity.

9. The atomization device of claim 1, wherein, The through hole comprises a tapered hole, and the radial dimension of the tapered hole decreases from the side of the first substrate facing the main structure to the side away from the main structure.

10. The atomization device of claim 1, wherein, The first substrate is provided with a second inlet channel, and the second inlet channel is in communication with the inlet.

11. The atomization device of claim 1, wherein, The main structure comprises a plurality of inlets, a plurality of first ducts, one first cavity, a plurality of second ducts and a plurality of outlets; wherein the plurality of inlets and the plurality of first ducts correspond one by one, the plurality of outlets and the plurality of second ducts correspond one by one, and the plurality of first ducts and the plurality of second ducts also respectively communicate with the first cavity.

12. The atomization device of claim 1, wherein, The main body structure comprises at least one inlet, a plurality of first pipes, a plurality of first cavities, a plurality of second pipes and at least one outlet; The plurality of first cavities are arranged at intervals, each of the first cavities is communicated with at least one inlet through at least one first pipe, and each of the first cavities is communicated with at least one outlet through at least one second pipe.

13. The atomization device of claim 12, wherein, The actuating assembly comprises a flexible film and a plurality of piezoelectric elements, the flexible film is arranged on a side of the main body structure away from the first substrate and covers at least the plurality of first cavities, and the plurality of piezoelectric elements are arranged on a side of the flexible film away from the main body structure and correspond to the plurality of first cavities one by one.

14. The atomization device of any one of claims 1-13, wherein, The shape of the cross section of the first cavity, the inlet and the outlet along a direction perpendicular to the stacking direction of the main body structure and the first substrate comprises at least one of a circle, an ellipse, a waist circle, a triangle, a rectangle, a square and a polygon.

15. A valveless pump, comprising: a main body structure comprising an inlet, a first pipe, a first cavity, a second pipe and an outlet in communication; the first pipe is located between the inlet and the first cavity, the second pipe is located between the first cavity and the outlet, and the radial dimension of the two ends of the first pipe connected with the inlet and the first cavity is different, and the radial dimension of the two ends of the second pipe connected with the first cavity and the outlet is different; and an actuating assembly arranged on a side of the main body structure.

16. The valve-less pump of claim 15, wherein, The radial dimension of the end of the first pipe connected with the inlet is smaller than the radial dimension of the end of the first pipe connected with the first cavity; and the radial dimension of the end of the second pipe connected with the first cavity is smaller than the radial dimension of the end of the second pipe connected with the outlet.

17. The valveless pump of claim 15, further comprising: a second substrate arranged between the actuating assembly and the main body structure, the second substrate is provided with a first inlet channel and a second cavity, the first inlet channel is communicated with the inlet, and the second cavity is communicated with the first cavity.

18. The valve-less pump of claim 17, wherein, The actuating assembly comprises a flexible film and a piezoelectric element, the flexible film is arranged on a side of the second substrate away from the main body structure and covers at least the second cavity, and the piezoelectric element is arranged on a side of the flexible film away from the second substrate and corresponds to the second cavity.

19. The valveless pump of claim 15, further comprising: a third substrate arranged on a side of the main body structure away from the actuating assembly, the third substrate is provided with a first outlet channel, and the two ends of the first outlet channel are communicated with the outlet respectively.

20. The valve-less pump of claim 15, wherein, The actuating assembly comprises a flexible film and a piezoelectric element, the flexible film is arranged on a side of the main body structure and covers at least the first cavity, and the piezoelectric element is arranged on a side of the flexible film away from the main body structure and corresponds to the first cavity.

21. The valve-less pump of claim 15, wherein, The main body structure comprises a plurality of inlets, a plurality of first pipes, one first cavity, a plurality of second pipes and a plurality of outlets; The plurality of inlets are in one-to-one correspondence with the plurality of first pipes, the plurality of outlets are in one-to-one correspondence with the plurality of second pipes, and the plurality of first pipes and the plurality of second pipes are further in communication with the first cavity.

22. The valve-less pump of claim 15, wherein, The main body structure comprises at least one inlet, a plurality of first pipes, a plurality of first cavities, a plurality of second pipes, and at least one outlet. The plurality of first cavities are arranged at intervals, each first cavity is in communication with at least one inlet through at least one first pipe, and each first cavity is in communication with at least one outlet through at least one second pipe.

23. The valve-less pump of claim 22, wherein, The actuating assembly comprises a flexible film and a plurality of piezoelectric elements, the flexible film is arranged on one side of the main body structure and covers at least the plurality of first cavities, and the plurality of piezoelectric elements are arranged on the side of the flexible film away from the main body structure and correspond to the plurality of first cavities one-to-one.

24. A method for preparing an atomization device, comprising: providing a main body structure comprising an inlet, a first pipe, a first cavity, a second pipe, and an outlet in communication; the first pipe is located between the inlet and the first cavity, the second pipe is located between the first cavity and the outlet, and the radial dimension of the two ends of the first pipe connected with the inlet and the first cavity is different, and the radial dimension of the two ends of the second pipe connected with the first cavity and the outlet is different; providing a first substrate provided with a through hole, combining the first substrate with the main body structure, and arranging the first substrate on one side of the main body structure; and providing an actuating assembly, combining the actuating assembly with the main body structure, and arranging the actuating assembly on the side of the main body structure away from the first substrate.

25. The method of claim 24, wherein, The radial dimension of the end of the first pipe of the main body structure connected with the inlet is smaller than the radial dimension of the end of the first pipe connected with the first cavity; and the radial dimension of the end of the second pipe connected with the first cavity is smaller than the radial dimension of the end of the second pipe connected with the outlet.

26. The method of claim 24, further comprising: providing a second substrate provided with a first inlet channel and a second cavity, combining the main body structure, the second substrate, and the actuating assembly, and arranging the second substrate between the main body structure and the actuating assembly, and making the first inlet channel in communication with the inlet and the second cavity in communication with the first cavity.

27. The method of claim 26, wherein, The provided actuating assembly comprises a flexible film and a piezoelectric element, the flexible film is arranged on the side of the second substrate away from the main body structure and covers at least the second cavity, and the piezoelectric element is arranged on the side of the flexible film away from the second substrate and corresponds to the second cavity.

28. The method of claim 26, further comprising: A third substrate is provided, the third substrate is provided with a first outlet channel, the first substrate, the third substrate and the main structure are combined, and the third substrate is located between the main structure and the first substrate, and the first outlet channel is communicated with the outlet.

29. The method of claim 28, further comprising: After the actuating assembly, the second substrate, the main structure and the third substrate are combined, the first substrate is bonded to the third substrate.

30. The method of claim 24, wherein, The provided actuating assembly includes a flexible film and a piezoelectric element, the flexible film is arranged on the side of the main structure away from the first substrate and covers at least the first cavity, and the piezoelectric element is arranged on the side of the flexible film away from the main structure and corresponds to the first cavity.

31. The method of claim 24, wherein, The through hole of the first substrate includes a tapered hole, the radial size of the tapered hole decreases from the side of the first substrate facing the main structure to the side away from the main structure.

32. The method of claim 24, wherein, The main structure includes a plurality of inlets, a plurality of first channels, a first cavity, a plurality of second channels and a plurality of outlets; Among them, a plurality of inlets and a plurality of first channels are communicated one by one, a plurality of outlets and a plurality of second channels are communicated one by one, and a plurality of first channels and a plurality of second channels are also communicated with the first cavity respectively.

33. The method of claim 24, wherein, The main structure includes at least one inlet, a plurality of first channels, a plurality of first cavities, a plurality of second channels and at least one outlet; Among them, a plurality of first cavities are arranged at intervals, each first cavity is communicated with at least one inlet through at least one first channel, and each first cavity is communicated with at least one outlet through at least one second channel.

34. The method of claim 33, wherein, The provided actuating assembly includes a flexible film and a plurality of piezoelectric elements, the flexible film is arranged on the side of the main structure away from the first substrate and covers at least a plurality of first cavities, and a plurality of piezoelectric elements are arranged on the side of the flexible film away from the main structure and correspond to a plurality of first cavities one by one.

35. A control method applied to an actuating device, the actuating device including a main structure and an actuating assembly, the main structure including an inlet, a first channel, a first cavity, a second channel and an outlet communicated; the method comprising: sending a first voltage signal to the actuating assembly, so that the fluid flows into the first cavity through the inlet and the first channel; sending a second voltage signal to the actuating assembly to control the actuating assembly to move towards the main structure, so that the fluid flows out of the first cavity, the second channel and the outlet.

36. The control method according to claim 35, wherein The main structure includes a plurality of first cavities, the actuating assembly includes a first actuating assembly and a second actuating assembly, and the first actuating assembly and the second actuating assembly correspond to different first cavities; Sending a first voltage signal to the actuating assembly includes: sending the first voltage signal to the first actuating assembly; The method further includes sending the second voltage signal to the second actuation assembly while sending the first voltage signal to the first actuation assembly.

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