Clamp applied to ion beam processing device

Abstract

A clamp applied to an ion beam machining device comprises a workbench, a positioning part used for containing a workpiece to be machined, baffles located on the two sides of the positioning part and a driving mechanism connected with the baffles, the positioning part is arranged in the center of the workbench and can rotate relative to the workbench, and the baffles have at least two states. In the first state, the baffle abuts against the to-be-machined workpiece on the positioning part and covers part of the to-be-machined workpiece. In the second state, a gap is formed between the baffle and the to-be-machined workpiece on the positioning part, and the to-be-machined workpiece is exposed; the driving mechanism can drive the baffle to move in the transverse direction and / or the vertical direction relative to the workbench, so that the baffle can be switched between the two states. According to the clamp, the machining area of the workpiece to be machined is switched by rotating the positioning part; the baffle of the clamp not only has the function of pressing the workpiece to be machined, but also has the function of shielding part of the workpiece to be machined, and the states of the workpiece before and after machining can be compared more accurately.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion beam processing device, and particularly relates to a clamp applied to an ion beam processing device. BACKGROUND

[0002] In the process of ultra-precision manufacturing and processing, the ion beam processing device is a device for processing workpieces by using high-energy ion beams, that is, the ions generated by the ion source are accelerated to a high-energy state by an electric field or a magnetic field, the high-energy ions are sprayed to the surface of the workpiece, the atoms on the surface of the workpiece are knocked out, the workpiece is locally melted or deformed, and then the workpiece is processed, therefore, the ion beam processing process needs more process steps and strict parameter control, and the precision requirement is very high.

[0003] At present, the ion beam processing device in the prior art is shown in the Chinese invention application No. CN202111041822.0 (application publication No. CN113695991A) "Optical element ion beam polishing processing device", which comprises a support base, a vacuum chamber, a main machine platform, a support plate and an optical workpiece clamp, the optical workpiece clamp is arranged on the support plate, the optical workpiece clamp is used for clamping the optical workpiece to be polished, the main machine platform is further provided with a movement mechanism for providing movable ion beams, so that the device can flexibly change the polishing angle and facilitate the accessibility of the ion beam in any space.

[0004] Although the above-mentioned ion beam processing device can flexibly move the ion source, the clamp for clamping the workpiece cannot be adaptively adjusted, the thickness and size of each workpiece may not be consistent, if the clamp cannot be adaptively adjusted to the workpiece, the problem of shaking of small workpieces and installation of large workpieces may occur, thereby affecting the processing effect of the workpiece. And in the ion beam processing process, any slight shaking or deviation may cause the processing precision to decrease, thereby affecting the production quality of the workpiece, therefore, the clamp needs to stably fix the workpiece so that it remains stable during the processing process, thereby ensuring the precision of the ion beam processing. In addition, some workpieces need to be regionally divided during the ion beam processing process, so as to compare and analyze the characteristics and states of the workpiece before and after processing; however, the existing clamp can only clamp the whole workpiece for processing, and cannot process the workpiece in different regions or cannot accurately position the position of the region, thereby affecting the processing of the workpiece, so that the comparison data before and after processing of the workpiece cannot be accurately obtained, the clamp can also use a baffle to partially shield and divide the region, but the baffle needs to be manually adjusted, so that the position of the baffle is not accurate enough, thereby affecting the processing effect of the workpiece, and the processed workpiece may have precision errors. Therefore, the clamp applied to the ion beam processing device needs to be further improved. SUMMARY

[0005] The technical problem solved by the present application is to provide a clamp with reasonable structure and capable of regional division for the ion beam processing device.

[0006] The technical solution adopted by the present application to solve the above technical problem is that the clamp applied to the ion beam processing device comprises a workbench, and is characterized in that it further comprises

[0007] a positioning part for placing a workpiece to be processed, the positioning part is arranged at the center of the workbench, and the positioning part is capable of rotating relative to the workbench;

[0008] a baffle plate arranged on both sides of the positioning part, the baffle plate has at least two states, in the first state, the baffle plate abuts against the workpiece to be processed on the positioning part and covers part of the workpiece to be processed, and in the second state, the baffle plate has a gap with the workpiece to be processed on the positioning part and the workpiece to be processed is exposed;

[0009] a driving mechanism connected with the baffle plate, the driving mechanism is capable of driving the baffle plate to move along the transverse direction and / or the vertical direction relative to the workbench, so that the baffle plate can be switched between the two states.

[0010] Further, a rotating part capable of rotating relative to the workbench is further included, the upper end of the rotating part is connected with the positioning part, the lower end of the rotating part is exposed to the lower surface of the workbench, and the rotating part is capable of driving the positioning part to rotate relative to the workbench. The rotating part can be a threaded rod, the locking force of the threaded rod is better, and the rotating part can more accurately rotate the positioning part, so that the workpiece to be processed on the positioning part is more accurately switched between processing areas.

[0011] Further, a vertical through mounting hole is arranged at the center of the workbench, the positioning part comprises a placing plate, the placing plate is mounted at the upper end of the mounting hole, the rotating part is fixedly connected with the bottom of the placing plate through the mounting hole, the placing plate is a high-temperature-resistant plate body, and rotating the rotating part can drive the placing plate to rotate around the central axis of the workbench. The high-temperature-resistant placing plate can ensure that the ion beam does not affect the placing plate and the components below the placing plate when the ion beam processes the workpiece to be processed, so as to ensure the processing effect of the ion beam processing device. The rotating part can be connected with the placing plate through the mounting hole of the workbench, so that the placing plate is controlled to rotate through the rotating part.

[0012] Further, the positioning part further comprises two extension arms, one end of each of the extension arms is connected with the outer side of the placing plate, the two extension arms are located on the same straight line, and the two extension arms are capable of rotating relative to the workbench. When the rotating part drives the placing plate to rotate, the two extension arms also rotate with the placing plate, and the extension arms can more accurately display the rotating angle of the placing plate and the workpiece to be processed, so as to facilitate the accurate control of the operator.

[0013] Further, the driving mechanism comprises a motor and a transmission assembly, the motor is connected with the transmission assembly, the transmission assembly is connected with the baffle, and the motor can drive the baffle to move along the transverse direction and / or the vertical direction by the transmission assembly. The driving mechanism arranged in this way can drive the baffle to adaptively adjust to the workpiece to be processed.

[0014] Further, the transmission assembly comprises two connecting arms extending along the vertical direction, the connecting arms are connected with the motor, two first sliding grooves extending along the vertical direction are arranged on the workbench, and the two connecting arms are respectively arranged in the corresponding first sliding grooves. The baffle is arranged at the upper end of the connecting arm along the transverse direction, and the motor can drive the connecting arm to move vertically in the first sliding groove, so as to drive the baffle to move vertically relative to the workbench. The connecting arm can drive the baffle to move vertically, so that the baffle can be adjusted vertically according to the thickness of the workpiece to be processed, so that the baffle is in the first state.

[0015] Further, the upper end of the connecting arm is provided with a second sliding groove extending along the transverse direction, the baffle is arranged in the second sliding groove along the transverse direction, a digital electric control machine connected with the baffle is arranged on the connecting arm, and the digital electric control machine can drive the baffle to move along the transverse direction. The baffle can move along the transverse direction in the second sliding groove by the digital electric control machine, so as to adjust the area of the baffle shielding the workpiece to be processed.

[0016] Further, the second sliding groove is also provided with two transmission roller sets, the transmission roller set comprises a plurality of rollers arranged along the transverse direction, the two transmission roller sets are arranged along the vertical direction in the second sliding groove, and a space for the baffle to move along the transverse direction is formed between the two transmission roller sets. The transmission roller set is connected with the digital electric control machine. The digital electric control machine can control the transmission roller set to rotate by means of the coaxial gear, and the forward or reverse rotation of the transmission roller set can drive the two baffles to move close to or away from each other, so as to adjust the area of the baffle shielding the workpiece to be processed. Moreover, the rollers of the transmission roller set adopt high-temperature-resistant silica gel pads, which can ensure that the transmission roller set is not damaged during ion beam processing.

[0017] Further, the transmission assembly further comprises a fixed plate, the two ends of the fixed plate are respectively connected with the lower ends of the connecting arms, the fixed plate is located below the workbench, and the motor is connected with one of the connecting arms or the two connecting arms are respectively connected with corresponding motors. The fixed plate can make the two connecting arms move vertically synchronously, so that one motor can be used to control one connecting arm to move vertically, or two connecting arms are respectively controlled by corresponding motors, and two motors need to synchronously control two connecting arms to move vertically.

[0018] Further, the workbench is also provided with an external interface, and the external interface is connected with the electric control operation platform. The electric control operation platform can facilitate the operator to operate the clamp.

[0019] Compared with the prior art, the application has the advantages that:

[0020] (1) The positioning part of the application is used for placing the workpiece to be processed, and the positioning part can rotate relative to the workbench under the action of external force, so that the workpiece to be processed is placed on the positioning part after being divided into regions, and after the specified region is processed by the ion beam processing device, the processing region of the workpiece to be processed can be switched by rotating the positioning part, without the need to disassemble the workpiece to be processed from the positioning part for rotation, which is convenient for the user to operate, the stability of the positioning part is better, the accuracy is higher, and the processing region of the workpiece to be processed can be replaced more accurately;

[0021] (2) The application further provides movable baffles on both sides of the positioning part, which can move vertically and horizontally under the action of a driving mechanism, so that when workpieces to be processed of different sizes are placed on the positioning part, the baffles can be adaptively adjusted according to the size of the workpiece to be processed, so that workpieces to be processed of different sizes can be stably positioned on the positioning part;

[0022] (3) The baffles of the application not only have the function of pressing the workpiece to be processed, but also have the function of shielding part of the workpiece to be processed, after the workpiece to be processed is divided into regions, the baffles can move horizontally according to the division of the regions, accurately adjusting the position of the baffles, so that the baffles can shield the non-processing region of the workpiece to be processed, so that the operator can more accurately compare and analyze the characteristics and state of the workpiece before and after processing, and improve the processing effect of the workpiece. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a structural schematic view of an embodiment of the application;

[0024] Figure 2 is a structural schematic view of an embodiment of the application from another perspective;

[0025] Figure 3 is a structural schematic view of a driving mechanism and a rotating part in an embodiment of the application (omitting the motor);

[0026] Figure 4 is a structural schematic view of a workbench and a positioning part in an embodiment of the application;

[0027] Figure 5 is a structural schematic view of a workbench in an embodiment of the application;

[0028] Figure 6 is a structural schematic view of an electrically controlled operating platform in an embodiment of the application. DETAILED DESCRIPTION

[0029] The application will be further described in detail below with reference to the embodiments of the drawings.

[0030] AsFigures 1-6 The best embodiment of the present application is shown.

[0031] As shown in Figure 1 and Figure 2 , the clamp of the embodiment is applied to an ion beam processing device, and the clamp comprises a workbench 1, a positioning part 2, a baffle 3, a driving mechanism 4 and a rotating part 5. The workbench 1 is cylindrical, and a dustproof plate is arranged on the workbench 1. The positioning part 2 is used for placing a workpiece to be processed, and the positioning part 2 is arranged at the center of the workbench 1, that is, the center axis of the positioning part 2 coincides with the center axis of the workbench 1. The positioning part 2 can rotate relative to the workbench 1, so that the processing area of the workpiece to be processed is switched by rotating the positioning part 2. The baffle 3 is located on both sides of the positioning part 2. The driving mechanism 4 is connected with the baffle 3, and the driving mechanism 4 can drive the baffle 3 to move along the horizontal direction and the vertical direction relative to the workbench 1, so that the baffle 3 has at least two states and can be switched between the two states. In the first state, the baffle 3 abuts against the workpiece to be processed on the positioning part 2 and covers part of the workpiece to be processed. In the second state, the baffle 3 has a gap with the workpiece to be processed on the positioning part 2 and the workpiece to be processed is exposed. Therefore, the baffle 3 not only has the function of pressing the workpiece to be processed, but also has the function of shielding part of the workpiece to be processed. The baffle 3 can be adaptively adjusted according to the size of the workpiece to be processed under the action of the driving mechanism 4, and the area of the baffle 3 shielding the workpiece to be processed can also be adjusted under the action of the driving mechanism 4, so that the operator can more accurately compare and analyze the characteristics and states of the workpiece before and after processing.

[0032] As shown in Figures 3-6 , the upper end of the rotating part 5 of the embodiment is connected with the positioning part 2, and the lower end of the rotating part 5 is exposed to the lower surface of the workbench 1. The rotating part 5 can drive the positioning part 2 to rotate relative to the workbench 1. Specifically, the central part of the workbench 1 of the embodiment is provided with a vertical through mounting hole 11. The positioning part 2 comprises a placing plate 21 and two extension arms 22. The placing plate 21 is installed at the upper end of the mounting hole 11. The rotating part 5 can be fixedly connected with the bottom of the placing plate 21 through the mounting hole 11. The placing plate 21 is a high-temperature-resistant plate body. Rotating the rotating part 5 can drive the placing plate 21 to rotate around the center axis of the workbench 1. One end of each of the extension arms 22 is connected with the outer side of the placing plate 21. The two extension arms 22 are located on the same straight line. The two extension arms 22 can rotate relative to the workbench 1. The two extension arms 22 can display the angle of rotation of the positioning part 2. In addition, the side part of the workbench 1 of the embodiment is also provided with an external interface 13. The external interface 13 is connected with an electric control operation table 6. The electric control operation table 6 is shown in Figure 6 .

[0033] As shown in Figure 3 and Figure 4As shown, the driving mechanism 4 of the embodiment comprises a motor 41 and a transmission assembly, the motor 41 is connected with the transmission assembly, the transmission assembly is connected with the baffle 3, and the motor 41 can drive the baffle 3 to move along the horizontal direction and the vertical direction by the transmission assembly. Wherein, the transmission assembly comprises two connecting arms 42 extending along the vertical direction and a fixed plate 44, the connecting arms 42 are connected with the motor 41, two first sliding grooves 12 extending along the vertical direction are arranged on the workbench 1, the two connecting arms 42 are respectively arranged in the corresponding first sliding grooves 12, the baffle 3 is arranged at the upper end of the connecting arms 42 along the horizontal direction, and the motor 41 can drive the connecting arms 42 to move vertically in the first sliding grooves 12, so as to drive the baffle 3 to move vertically relative to the workbench 1; the lower ends of the connecting arms 42 are respectively connected with the two ends of the fixed plate 44, that is, the fixed plate 44 integrates the two connecting arms 42 into one piece, so that the two connecting arms 42 can move vertically synchronously, the fixed plate 44 is located below the workbench 1, the two connecting arms 42 are respectively connected with the corresponding motor 41, the rotating part 5 also passes through the fixed plate 44 and the mounting hole 11 and is connected with the placing plate 21, the lower end of the rotating part 5 is exposed to the lower surface of the fixed plate 44, so as to facilitate an operator to control the rotating part 5 to rotate.

[0034] In addition, the upper end of the connecting arm 42 of the embodiment is provided with a second sliding groove 421 extending along the horizontal direction, the baffle 3 is arranged in the second sliding groove 421 along the horizontal direction, the connecting arm 42 is provided with a digital electric control machine 43 connected with the baffle 3, and the digital electric control machine 43 can drive the baffle 3 to move along the horizontal direction. Moreover, the second sliding groove 421 is also provided with two transmission roller sets 422, the transmission roller set 422 comprises a plurality of rollers arranged along the horizontal direction, the two transmission roller sets 422 are arranged in the second sliding groove 421 along the vertical direction, a space for the baffle 3 to move horizontally is formed between the two transmission roller sets 422, the transmission roller set 422 is connected with the digital electric control machine 43, that is, the digital electric control machine 43 can control the transmission roller set 422 to rotate by means of the coaxial gear, and the forward or reverse rotation of the transmission roller set 422 can drive the two baffles 3 to move close to or away from each other, so as to adjust the area of the baffle 3 shielding the workpiece to be processed.

[0035] The working process of the embodiment is as follows:

[0036] A, the motor 41 drives the two connecting arms 42 to move upward in the first sliding groove 12, the digital electric control machine 43 controls the transmission roller set 422 to rotate to drive the two baffles 3 to move away from each other, so that the positioning part 2 is exposed, then the workpiece to be processed is regionally divided, and then the workpiece to be processed is placed on the placing plate 21 of the positioning part 2;

[0037] B. According to the processing area of ​​the workpiece to be processed, the digital display electronic control computer 42 controls the transmission roller group 422 to rotate so as to drive the two baffles 3 to move closer together, so that the two baffles 3 can block the non-processing area. Then the motor 41 drives the two connecting arms 42 to move downward in the first slide groove 12, so that the two baffles 3 can press down the non-processing area of ​​the workpiece to be processed.

[0038] C. After the exposed processing area of ​​the workpiece is processed, the baffle 3 is released from the workpiece by means of the motor 41 and the digital display control machine 43. Then, the rotating part 5 is rotated to make the positioning part 2 and the workpiece rotate at a certain angle, so that the next processing area of ​​the workpiece is exposed. Then, the baffle 3 is pressed down and blocked by the motor 41 and the digital display control machine 43, so that the workpiece can proceed to the next processing sequence.

Claims

1. A holder for use in an ion beam processing apparatus, comprising a worktable (1), characterized in that: Also includes Positioning part (2) for placing the workpiece to be processed, the positioning part (2) is arranged in the center of the workbench (1), the positioning part (2) can rotate relative to the workbench (1); Baffle (3) is located on both sides of the positioning part (2), the baffle (3) has at least two states, the first state, the baffle (3) is pressed against the workpiece to be processed on the positioning part (2) and covers part of the workpiece to be processed; the second state, the baffle (3) has a gap with the workpiece to be processed on the positioning part (2) and the workpiece to be processed is exposed; Driving mechanism (4) connected with baffle (3), the driving mechanism (4) can drive the baffle (3) to move along the transverse and / or vertical direction relative to the workbench (1), so that the baffle (3) can be switched between the two states.

2. The clamp of claim 1, wherein: Also includes a rotating part (5) that can rotate relative to the workbench (1), the upper end of the rotating part (5) is connected with the positioning part (2), and the lower end of the rotating part (5) is exposed on the lower surface of the workbench (1), the rotating part (5) can drive the positioning part (2) to rotate relative to the workbench (1).

3. The clamp of claim 2, wherein: The central part of the workbench (1) is provided with a vertical through mounting hole (11), the positioning part (2) includes a placing plate (21), the placing plate (21) is installed at the upper end of the mounting hole (11), the rotating part (5) can pass through the mounting hole (11) and be fixedly connected with the bottom of the placing plate (21), the placing plate (21) is a high-temperature-resistant plate body, rotating the rotating part (5) can drive the placing plate (21) to rotate around the center axis of the workbench (1).

4. The clamp of claim 3, wherein: The positioning part (2) further comprises two extension arms (22), one end of the extension arm (22) is connected with the outer side of the placing plate (21), the two extension arms (22) are located on the same straight line, and the two extension arms (22) can rotate relative to the workbench (1).

5. The clamp of claim 1, wherein: The driving mechanism (4) includes a motor (41) and a transmission assembly, the motor (41) is connected with the transmission assembly, the transmission assembly is connected with the baffle (3), and the motor (41) can drive the baffle (3) to move along the transverse and / or vertical direction by using the transmission assembly.

6. The clamp of claim 5, wherein: The transmission assembly includes two vertically extending connecting arms (42), the connecting arms (42) are connected with the motor (41), the workbench (1) is provided with two vertically extending first sliding grooves (12), the two connecting arms (42) are respectively arranged in the corresponding first sliding grooves (12), and the baffle (3) is arranged at the upper end of the connecting arm (42) in the transverse direction.

7. The clamp of claim 6, wherein: The upper end of the connecting arm (42) is provided with a second sliding groove (421) extending in the transverse direction, the baffle (3) is arranged in the second sliding groove (421) in the transverse direction, the connecting arm (42) is provided with a digital electric control machine (43) connected with the baffle (3), and the digital electric control machine (43) can drive the baffle (3) to move in the transverse direction.

8. The clamp of claim 7, wherein: Two transmission roller groups (422) are arranged in the second sliding groove (421), each of the transmission roller groups (422) comprises a plurality of transversely arranged rollers, and the two transmission roller groups (422) are vertically spaced apart in the second sliding groove (421) to form a space for the lateral movement of the baffle (3) between the two transmission roller groups (422), and the transmission roller groups (422) are connected with the digital electric control machine (43).

9. The clamp of claim 6, wherein: The transmission assembly further comprises a fixing plate (44), both ends of the fixing plate (44) are connected with lower ends of the connecting arms (42), the fixing plate (44) is located below the workbench (1), and the motor (41) is connected with one of the connecting arms (42) or the two connecting arms (42) are respectively connected with corresponding motors (41).

10. The clamp of claim 1, wherein: The workbench (1) is further provided with an external interface (13), and the external interface (13) is connected with the electric control operating platform (6).

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