Ultrasonic scribing cutter and ultrasonic scribing equipment

Abstract

The invention discloses an ultrasonic scribing tool. The ultrasonic scribing tool comprises a base body, a blade, a tool rest and a radial vibration module. The blade is arranged on one side of the base body, and the periphery of the blade protrudes out of the periphery of the base body. The cutter frame is arranged on the side, away from the base body, of the blade, the periphery of the cutter frame is flush with the periphery of the base body, the cutter frame is provided with a main shaft hole, and the main shaft hole is used for being matched with a main shaft of a cutting machine for positioning so as to achieve axial rotation of the blade. The radial vibration module is arranged on the side, away from the base body, of the tool rest and used for generating ultrasonic vibration to drive the blade to vibrate in the radial direction. In addition, the invention further provides ultrasonic scribing equipment.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of dicing blade manufacturing, in particular to an ultrasonic dicing tool and an ultrasonic dicing device. BACKGROUND

[0002] When the conventional dicing blade is used to cut hard and brittle and / or ultra-thin wafers (such as SiC, composite materials, advanced packaging wafers) at high speed and continuously, micro-cracks, edge collapse and thermal damage are caused due to continuous cutting contact, blocked chip removal and cooling, thereby causing cutting quality problems of unstable processing quality and low efficiency. SUMMARY

[0003] In view of the above, it is necessary to provide an ultrasonic dicing tool to improve the quality of the cut workpiece.

[0004] In addition, the present application also provides an ultrasonic dicing device.

[0005] An ultrasonic dicing tool includes a base, a blade, a holder and a radial vibration module. The blade is arranged on one side of the base, and the peripheral edge of the blade protrudes from the peripheral edge of the base. The holder is arranged on the side of the blade away from the base, and the peripheral edge of the holder is flush with the peripheral edge of the base. The holder is provided with a main shaft hole for cooperating with the main shaft of the cutting machine to realize the axial rotation of the blade. The radial vibration module is arranged on the side of the holder away from the base, and the radial vibration module is used to generate ultrasonic vibration to drive the blade to vibrate radially.

[0006] In some possible embodiments, the radial vibration module includes a piezoelectric ceramic ring, a first energy supply coil and a second energy supply coil. The piezoelectric ceramic ring is electrically connected to the first energy supply coil. The piezoelectric ceramic ring is arranged on the holder. The second energy supply coil is arranged in a spaced manner with the first energy supply coil. The second energy supply coil is electrically connected to an external power source. The first coil and the second coil realize the transmission of electric energy through electromagnetic coupling.

[0007] In some possible embodiments, the first coil and the second coil are arranged in a coaxial and opposite manner. An annular gap is arranged between the first coil and the second coil. The radial width of the annular gap is 10-20 μm.

[0008] In some possible embodiments, the holder is provided with a plurality of openings. The openings are arranged in a spaced manner around the main shaft hole. The openings are located between the main shaft hole and the radial vibration module.

[0009] In some possible implementation manners, the hole includes an inner ring hole and an outer ring hole, the inner ring hole and the outer ring hole are respectively arranged along two circumferences concentric with the main shaft hole, and projections of the inner ring hole and the outer ring hole on the axis direction of the main shaft hole at least partially overlap.

[0010] In some possible implementation manners, the inner ring hole and the outer ring hole are long circular through holes, and end portions of the inner ring hole and the outer ring hole are circularly chamfered.

[0011] In some possible implementation manners, the amplitude of the radial vibration of the blade along the main shaft hole is 1-6 μm.

[0012] In some possible implementation manners, the blade is provided with a center hole, and the center hole is coaxially arranged with the main shaft hole.

[0013] In some possible implementation manners, the outer diameter of the blade is greater than the outer diameter of the base body.

[0014] An ultrasonic slicing device includes a main shaft, a clamping flange, and an ultrasonic slicing cutter as described above, the main shaft passes through the main shaft hole, the clamping flange is coaxially arranged with the main shaft, and the clamping flange is used for clamping and fixing the ultrasonic slicing cutter at the end portion of the main shaft.

[0015] In the present application, by arranging a radial vibration module to drive the blade to generate radial micro-level high-frequency vibration, in combination with coaxial positioning of the main shaft hole and the main shaft and overhanging of the peripheral edge of the blade, it is beneficial to reduce cutting force and heat generation, to make cooling and chip removal more smooth, to make vibration distribution more uniform, and to make the cutting seam edge more complete. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 FIG. 1 is a partial schematic view of an ultrasonic slicing device according to an embodiment of the present application.

[0017] Figure 2 FIG. 2 is a partial schematic view of an ultrasonic slicing cutter of the ultrasonic slicing device shown in FIG. 1. Figure 1

[0018] Figure 3 FIG. 3 is a schematic view of the ultrasonic slicing cutter shown in FIG. 2 from another angle. Figure 2

[0019] Figure 4 FIG. 4 is an exploded view of the ultrasonic slicing cutter shown in FIG. 2. Figure 3

[0020] Figure 5 FIG. 5 is a sectional view of the ultrasonic slicing cutter shown in FIG. 2 along the line V-V. Figure 3

[0021] Figure 6 FIG. 6 is a sectional view of the ultrasonic slicing cutter shown in FIG. 2 along the line V-V.​​​​Figure 5 exploded view of the cross-sectional view.

[0022] Figure 7 micrograph of a cut of the product of Example 1 of the present application.

[0023] Figure 8 micrograph of a cut of the product of Comparative Example 1 of the present application.

[0024] Explanation of main element symbols ultrasonic dicing apparatus: 100; dicing cutter: 10; spindle hole: 11; base: 12; blade: 13; cutter holder: 14; radial vibration module: 15; machine tool: 20; spindle: 21; clamping member: 30; flange: 31; first step region: 141; second step region: 142; third step region: 143; opening: 144; inner ring opening: 144a; outer ring opening: 144b; annular mounting groove: 145; piezoelectric ceramic ring: 151; first energizing coil: 152; second energizing coil: 153. DETAILED DESCRIPTION

[0025] Embodiments of the present application are described in detail below with reference to the attached drawings, wherein like or similar elements are denoted by the same or similar reference signs throughout the drawings. The embodiments described below are examples for explaining the present application, and are not intended to limit the present application.

[0026] In the description of the present application, it is to be understood that the terms indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, in the description of the present application, it is to be noted that the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0027] In the description of the present application, it is to be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting" should be understood broadly, for example, can be fixedly connected, or can be detachably connected, or integrally connected; can be mechanically connected, or can be electrically connected or can communicate with each other, can be directly connected, or can be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0028] Please refer to Figure 1The embodiment provides an ultrasonic dicing device 100 (referred to as the device 100 below) for dicing and separating processing of semiconductor wafers, compound semiconductor wafers, ceramic sheets, glass substrates and other hard and brittle material workpieces.

[0029] The device 100 comprises an ultrasonic dicing cutter 10 (referred to as the cutter 10 below), a machine tool 20 and a clamping piece 30. The cutter 10 is provided with a main shaft hole 11, the main shaft 21 of the machine tool 20 penetrates the main shaft hole 11, the main shaft 21 is in transition or clearance fit with the main shaft hole 11, and is clamped by a flange 31 in the clamping piece 30 to transmit torque. The flange 31 fixes the cutter 10 to the end of the main shaft 21 and realizes reliable clamping through screwing force or axial pressing force.

[0030] Please refer to Figure 2 and Figure 3 The cutter 10 comprises a base body 12, a blade 13, a cutter holder 14 and a radial vibration module 15. The blade 13 is arranged on one side of the base body 12, and the peripheral edge of the blade 13 protrudes from the peripheral edge of the base body 12. The cutter holder 14 is arranged on the side of the blade 13 away from the base body 12, and the peripheral edge of the cutter holder 14 is flush with the peripheral edge of the base body 12. The cutter holder 14 is provided with the main shaft hole 11, which is in position with the main shaft 21 to realize rotation of the blade 13 around the axis. The radial vibration module 15 is arranged on the cutter holder 14 and excites high-frequency micro-displacement radially along the main shaft hole 11 in the plane of the blade 13 after being electrified. For the convenience of description, the side of the cutter holder 14 facing the blade 13 is defined as the front side, and the side away from the blade 13 is defined as the back side.

[0031] In operation, the main shaft 21 drives the cutter 10 to rotate at high speed, and the radial vibration module 15 superimposes high-frequency displacement of μm level radially along the main shaft hole 11 in the plane of the blade 13; the cooling system of the machine tool 20 supplies cooling liquid to the cutting area, and the cooling liquid flows along the outer circle of the blade 13 and carries away the grinding chips. The rotation axis of the blade 13 is coaxial with the axis of the main shaft 21.

[0032] Please refer to Figure 1 , Figure 3 , and Figure 4The radial vibration module 15 converts the electrical signal into the high-frequency displacement of the blade 13 along the radial direction of the main shaft hole 11 by piezoelectric conversion. The radial vibration module 15 includes a piezoelectric ceramic ring 151, a first power supply coil 152, and a second power supply coil 153. The piezoelectric ceramic ring 151 is arranged concentrically along the main shaft hole 11 and is attached to the annular mounting groove 145 on the back of the tool holder 14 through an adhesive layer, and the electrode surface of the piezoelectric ceramic ring 151 is arranged towards the back of the tool holder 14. The first power supply coil 152 and the second power supply coil 153 are coaxially arranged opposite to each other, the first power supply coil 152 is fixed on one side close to the piezoelectric ceramic ring 151 and is electrically connected with the piezoelectric ceramic ring 151, the second power supply coil 153 is arranged at a position opposite to the first power supply coil 152 and is connected with an external power supply, and the electrical energy is transmitted between the two through electromagnetic coupling. An annular gap is arranged between the first power supply coil 152 and the second power supply coil 153, and the radial width of the annular gap is 10-20 μm, so as to form a stable non-contact coupling gap and maintain the consistency of the insulation and mechanical gap in the rotating state. In order to prevent the invasion of cooling liquid and the short circuit of metal chips, the piezoelectric ceramic ring 151 and the first power supply coil 152 are provided with insulation packaging and sealing rings, and the tool holder 14 is provided with an annular mounting groove 145 and a positioning shoulder at the corresponding position to limit the assembly concentricity and end face adhesion of the piezoelectric ceramic ring 151.

[0033] The first power supply coil 152 can be fixed in the inner cavity of the main shaft 21 or the inner cavity of the end body of the main shaft, and the second power supply coil 153 is fixed to the transmission end retaining structure on the outer side of the main shaft 21, and the two coils are coaxially arranged with the main shaft axis as the center and are separated by a non-magnetic isolation sleeve; in other embodiments, the installation positions of the first power supply coil 152 and the second power supply coil 153 are replaced with each other, but the coaxial arrangement and the annular gap are maintained, and the first power supply coil 152 is electrically connected with the piezoelectric ceramic ring 151 through conductive contacts, shielding leads or embedded electrodes. The coil skeleton is made of temperature-resistant insulating material, and the winding can use multi-strand twisted wire to reduce high-frequency loss; stress release structure and limiting ring are arranged at the end of the coil to suppress wire vibration under high-speed rotation condition.

[0034] In some embodiments, the radial vibration module 15 further comprises a control unit (not shown in the figure) connected with an external power supply and closed-loop regulating the frequency, amplitude and duty cycle. The control unit can comprise one or a combination of power drive stage, detection and protection stage, and tuning and control algorithm. The power drive stage can be a full-bridge or half-bridge power amplifier, the detection and protection stage samples the coil voltage, current, coil temperature and tool holder 14 temperature, and the tuning and control algorithm can be one of phase-locked loop frequency tracking, voltage-current phase-based resonance point tracking, constant amplitude control or adaptive frequency sweeping tuning. To achieve amplitude closed-loop, the control unit can use the electrical equivalent quantity of the piezoelectric ceramic ring 151 for indirect estimation, or configure one or more of a charge amplifier, a current sensor, a Hall sensor, a temperature sensor and a capacitive gap monitoring probe to achieve amplitude retention, detuning protection, overcurrent protection, overtemperature protection and start-stop soft switching.

[0035] In some embodiments, the radial vibration module 15 realizes the radial vibration of the blade 13 through mechanical vibration. The radial vibration module 15 can comprise a coaxially arranged bolt clamping type transducer and an annular horn, the transducer front cover plate is connected with the back of the tool holder 14, and the annular horn converts axial vibration into radial vibration of the blade 13 area through the design of cross-section gradual change and pitch line position; or comprises an annular elastic body resonant sheet and a mechanical horn structure, the resonant sheet and the tool holder 14 form a concentric vibration system, and the radial displacement peak value of the annular standing wave of the resonant sheet is formed at the cutting outer circle position. The radial vibration module 15 can also adopt a magnetostrictive ring structure composed of a magnetostrictive element and an excitation coil, the magnetostrictive material generates high-frequency micro-displacement in the radial direction under the joint action of the bias magnetic field and the alternating magnetic field and is coupled to the blade 13 through the tool holder 14; or adopts a combination of an electromagnetic actuator array and an annular elastic body, a plurality of electromagnetic actuator units are distributed in the circumferential direction and are driven in phase or in phase to form a target mode; or adopts an electrostatic actuator array and an annular electrode structure, and realizes micro-displacement output through the action of high-frequency alternating electric field. The above-mentioned alternative schemes are coaxially arranged with the main shaft hole 11 in assembly, and the electrical isolation and the consistency of the mechanical gap are maintained through the annular gap or the insulating medium.

[0036] Please refer to Figure 4 , Figure 5 and Figure 6, the back of the tool holder 14 is outwardly formed with a first step area 141, a second step area 142 and a third step area 143 from the main shaft hole 11 in sequence, and the axial thickness satisfies: the first step area 141 is greater than the second step area 142, and the second step area 142 is greater than the third step area 143, forming a three-step disc structure with a center thickness and an edge thinness. The first step area 141 is used to adapt to the main shaft 21, and a positioning shoulder or a matching cylindrical segment can be provided to provide axial positioning and radial guidance between the main shaft and the tool holder 14; a positioning pin or a key connection can be provided between the flange 31 and the tool holder 14 to improve the anti-sliding ability and assembly repeatability. The second step area 142 is used to carry and position the radial vibration module 15, form a vibration transmission interface and provide a modal tuning structure: the back of the second step area 142 is provided with an annular mounting groove 145, the groove bottom of the annular mounting groove 145 serves as a lamination surface of the piezoelectric ceramic ring 151, and the groove sidewall serves as a radial limiting surface; the second step area 142 is provided with a plurality of openings 144 spaced apart in the circumferential direction, the openings 144 penetrate the thickness of the tool holder 14 in the axial direction and are located between the first step area 141 and the piezoelectric ceramic ring 151. The plurality of openings 144 change the equivalent stiffness and mass distribution of the tool holder 14 near the outer circle of the blade 13, thereby tuning the natural vibration frequency and modal form of the tool holder 14-blade 13 combination, so that the radial vibration mode at the outer circle of the blade 13 is dominant and the ultrasonic vibration can form an observable amplitude in the outer circle area of the blade 13. The third step area 143 is used to cooperate with the base 12 to clamp the blade 13, the base 12 is arranged in the third step area 143, the blade 13 is arranged between the base 12 and the third step area 143, and the peripheral edge of the base 12 is substantially flush with the side edge of the third step area 143 away from the second step area 142. The end face of the third step area 143 serves as a support surface of the base 12, and the inner side or the outer side of the third step area 143 can be provided with a ring-shaped stop or a positioning shoulder for limiting the radial position and end face height of the base 12; the contact surface between the third step area 143 and the base 12 can have flatness and roughness requirements, and a glue layer or a thin gasket can be provided to uniform the clamping stress; the third step area 143 forms a step height difference relative to the second step area 142 to ensure the coaxiality of the clamping position of the outer circle of the blade 13 and the axis of the main shaft 21.

[0037] The opening 144 includes an inner ring opening 144a and an outer ring opening 144b, which are respectively arranged along two concentric circles with the spindle hole 11, and the projections of the inner ring opening 144a and the outer ring opening 144b in the axial direction of the spindle hole 11 at least partially overlap. The inner ring opening 144a and the outer ring opening 144b are long circular through holes, and the end portions are rounded to reduce stress concentration and facilitate stable high-frequency vibration modes. The inner ring opening 144a and the outer ring opening 144b can be arranged at equal angles in the circumferential direction, and can be staggered as needed to obtain symmetrical vibration modes and uniform mass distribution. In some embodiments, the opening 144 does not penetrate the thickness of the tool holder 14, but only forms a blind hole, a thinned groove or an equivalent compliant structure on the back surface to form a local low stiffness ring area to achieve a similar modal tuning effect as the through hole; in some embodiments, the opening 144 can be a circular hole, an arc-shaped groove, a zigzag groove or other circumferentially extending slots, and can be arranged in a single ring or multiple rings on a concentric circle.

[0038] The piezoelectric ceramic ring 151 can be a single closed ring or a multi-segment partition ring structure, and is attached to the back surface of the tool holder 14 through an adhesive layer with a thickness and elastic modulus selected to balance transmission efficiency and reliable bonding. The electrodes of the piezoelectric ceramic ring 151 are connected to the circuit of the first energizing coil 152 through embedded conductive contacts or flexible leads, and an insulating gasket and a limiting structure can be provided between the electrodes and the conductive contacts to ensure the stability of the gap and the compression force. The external power supply can be an ultrasonic generator or a wideband driving power supply, and the output frequency and amplitude can be matched by sweeping the entire machine before processing, so that the working frequency of the piezoelectric ceramic ring 151 is coordinated with the target mode of the tool holder 14-blade 13 system. A double-sided adhesive layer can be provided between the blade 13 and the base 12, and the base 12 is made of aluminum or aluminum alloy. The adhesive layer between the blade 13 and the base 12 is uniformly laid to ensure coaxiality and end face runout; in some embodiments, a damping layer is provided between the blade 13 and the tool holder 14 to adjust the bandwidth and peak response.

[0039] The blade 13 is a ring structure, and the material of the blade 13 can be a diamond grinding wheel, a diamond electroplated sheet, a resin bond sheet, a metal bond sheet or a ceramic bond sheet. The blade 13 is provided with a central hole coaxially arranged with the spindle hole 11. The radial vibration amplitude of the blade 13 is in the range of 1-6 μm, and the amplitude can be set according to the material type and cutting process parameters. The outer diameter of the blade 13 is greater than the outer diameter of the base 12, and the outer edge of the blade 13 protrudes relative to the outer edge of the base 12 by a protrusion amount, which is determined according to the cutting depth and cooling conditions.

[0040] During assembly, the piezoelectric ceramic ring 151 is bonded to the annular mounting groove 145 on the back of the tool holder 14. After the adhesive layer cures, the electrode connection is completed. The blade 13 is placed between the third-stage zone 143 and the substrate 12 and clamped with adhesive to complete the end face alignment and coaxiality adjustment. The tool 10 is assembled to the end of the spindle 21 and clamped and fixed by the flange 31. The second power supply coil 153 is connected to the external power supply and the coaxial alignment and annular gap setting with the first power supply coil 152 are completed. During the trial operation, low-speed rotation, ultrasonic frequency sweep and cooling flow are verified. After confirming that the annular gap is stable in the range of 10-20 μm and the radial amplitude of the blade 13 reaches the set value, machining begins.

[0041] To verify the cutting quality and processing efficiency of the ultrasonic scribing equipment 100, a comparative experiment was conducted on silicon carbide wafers. The experiment used a standard film-attached fixing method and constant flow deionized water cooling. Conventional cutting and ultrasonic cutting were performed under the same machine tool 20 and process parameters, and micrographs of the cut kerf were obtained under the same magnification and illumination conditions for comparison.

[0042] Example 1: The product type being cut is SiC, with a thickness of 0.35 mm; the ultrasonic scribing tool 10 is model SSTCS 2000-50-N1 (53.3×0.035×40-1A); the spindle speed is 20000 rpm; the feed rate is 10 mm / s; and the cooling medium is deionized water. The radial vibration module 15 is in operation: the piezoelectric ceramic ring 151 is concentrically bonded to the tool holder 14; the first power supply coil 152 and the second power supply coil 153 are coaxially opposite each other and maintain an annular gap of 10–20 μm; after frequency sweep tuning, it stably outputs micron-level radial vibration (on the order of 1–6 μm) within the working frequency band. Microscopic images are obtained after cutting, as... Figure 7 The image shown is an "ultrasonic cutting" image.

[0043] Comparative Example 1: Except for the radial vibration module 15 not being turned on (the piezoelectric ceramic ring 151 is not energized, and the power supply coil has no output), all other conditions are consistent with Example 1; a micrograph was obtained after cutting, as... Figure 8 The image shown is a "standard cut". Figure 8 The image is a standard cutting micrograph, showing discontinuous breakage and localized debris accumulation at the cut edge. Figure 7 These are ultrasonic cutting micrographs. The cut edges are continuous, with significantly reduced chipping and debris, and the groove bottom and sidewall contours are straighter. Both images were acquired under the same magnification and illumination conditions. This demonstrates that, under identical conditions, activating ultrasonic vibration improves the integrity of the cut edges and results in a more stable surface morphology.

[0044] Finally, it should be noted that the above examples are only used to illustrate the technical solutions of the present application and are not limiting. Although the present application has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. An ultrasonic dicing blade, comprising: The utility model relates to an ultrasonic dicing tool, comprising: a base, a blade provided on one side of the base, the peripheral edge of the blade protruding from the peripheral edge of the base; a holder provided on the side of the blade away from the base, the peripheral edge of the holder flush with the peripheral edge of the base, the holder being provided with a spindle hole for cooperating with a spindle to realize axial rotation of the blade; a radial vibration module provided on the side of the holder away from the base, the radial vibration module being used to generate ultrasonic vibration to drive the blade to vibrate radially.

2. The ultrasonic dicing blade of claim 1, wherein, The radial vibration module comprises a piezoelectric ceramic ring, a first energy supply coil and a second energy supply coil, the piezoelectric ceramic ring being electrically connected to the first energy supply coil, the piezoelectric ceramic ring being provided on the holder, the second energy supply coil being spaced apart from the first energy supply coil, the second energy supply coil being electrically connected to an external power source, and the first coil and the second coil achieving power transmission through electromagnetic coupling.

3. The ultrasonic dicing blade of claim 2, wherein, The first energy supply coil and the second energy supply coil are coaxially and oppositely arranged, an annular gap being provided between the first energy supply coil and the second energy supply coil, the radial width of the annular gap being 10-20 μm.

4. The ultrasonic dicing blade of claim 1, wherein, The holder is provided with a plurality of through holes, the through holes being spaced apart around the spindle hole, the through holes being located between the spindle hole and the radial vibration module.

5. The ultrasonic dicing blade of claim 4, wherein, The through holes comprise inner circle through holes and outer circle through holes, the inner circle through holes and the outer circle through holes being respectively spaced apart along two circles concentric with the spindle hole, the projections of the inner circle through holes and the outer circle through holes in the axial direction of the spindle hole at least partially overlapping.

6. The ultrasonic dicing blade of claim 5, wherein, The inner circle through holes and the outer circle through holes are oblong through holes, the end portions of the inner circle through holes and the outer circle through holes being rounded.

7. The ultrasonic dicing blade of claim 1, wherein, The amplitude of radial vibration of the blade along the spindle hole is 1-6 μm.

8. The ultrasonic dicing blade of claim 1, wherein, The blade is provided with a central hole coaxially arranged with the spindle hole.

9. The ultrasonic dicing blade of claim 1, wherein, The outer diameter of the blade is greater than the outer diameter of the base.

10. An ultrasonic dicing apparatus characterized by comprising: The utility model relates to an ultrasonic dicing tool, comprising: a base, a blade provided on one side of the base, the peripheral edge of the blade protruding from the peripheral edge of the base; a holder provided on the side of the blade away from the base, the peripheral edge of the holder flush with the peripheral edge of the base, the holder being provided with a spindle hole for cooperating with a spindle to realize axial rotation of the blade; a radial vibration module provided on the side of the holder away from the base, the radial vibration module being used to generate ultrasonic vibration to drive the blade to vibrate radially. The radial vibration module comprises a piezoelectric ceramic ring, a first energy supply coil and a second energy supply coil, the piezoelectric ceramic ring being electrically connected to the first energy supply coil, the piezoelectric ceramic ring being provided on the holder, the second energy supply coil being spaced apart from the first energy supply coil, the second energy supply coil being electrically connected to an external power source, and the first coil and the second coil achieving power transmission through electromagnetic coupling. The first energy supply coil and the second energy supply coil are coaxially and oppositely arranged, an annular gap being provided between the first energy supply coil and the second energy supply coil, the radial width of the annular gap being 10-20 μm. The holder is provided with a plurality of through holes, the through holes being spaced apart around the spindle hole, the through holes being located between the spindle hole and the radial vibration module. The through holes comprise inner circle through holes and outer circle through holes, the inner circle through holes and the outer circle through holes being respectively spaced apart along two circles concentric with the spindle hole, the projections of the inner circle through holes and the outer circle through holes in the axial direction of the spindle hole at least partially overlapping. The inner circle through holes and the outer circle through holes are oblong through holes, the end portions of the inner circle through holes and the outer circle through holes being rounded. The amplitude of radial vibration of the blade along the spindle hole is 1-6 μm. The blade is provided with a central hole coaxially arranged with the spindle hole. The outer diameter of the blade is greater than the outer diameter of the base. The utility model relates to an ultrasonic dicing tool, comprising: a base, a blade provided on one side of the base, the peripheral edge of the blade protruding from the peripheral edge of the base; a holder provided on the side of the blade away from the base, the peripheral edge of the holder flush with the peripheral edge of the base, the holder being provided with a spindle hole for cooperating with a spindle to realize axial rotation of the blade; a radial vibration module provided on the side of the holder away from the base, the radial vibration module being used to generate ultrasonic vibration to drive the blade to vibrate radially. The radial vibration module comprises a piezoelectric ceramic ring, a first energy supply coil and a second energy supply coil, the piezoelectric ceramic ring being electrically connected to the first energy supply coil, the piezoelectric ceramic ring being provided on the holder, the second energy supply coil being spaced apart from the first energy supply coil, the second energy supply coil being electrically connected to an external power source, and the first coil and the second coil achieving power transmission through electromagnetic coupling. The first energy supply coil and the second energy supply coil are coaxially and oppositely arranged, an annular gap being provided between the first energy supply coil and the second energy supply coil, the radial width of the annular gap being 10-20 μm. The holder is provided with a plurality of through holes, the through holes being spaced apart around the spindle hole, the through holes being located between the spindle hole and the radial vibration module. The through holes comprise inner circle through holes and outer circle through holes, the inner circle through holes and the outer circle through holes being respectively spaced apart along two circles concentric with the spindle hole, the projections of the inner circle through holes and the outer circle through holes in the axial direction of the spindle hole at least partially overlapping. The inner circle through holes and the outer circle through holes are oblong through holes, the end portions of the inner circle through holes and the outer circle through holes being rounded. The amplitude of radial vibration of the blade along the spindle hole is 1-6 μm. The blade is provided with a central hole coaxially arranged with the spindle hole. The outer diameter of the blade is greater than the outer diameter of the base. The utility model relates to an ultrasonic dicing tool, comprising: a base, a blade provided on one side of the base, the peripheral edge of the blade protruding from the peripheral edge of the base; a holder provided on the side of the blade away from the base, the peripheral edge of the holder flush with the peripheral edge of the base, the holder being provided with a spindle hole for cooperating with a spindle to realize axial rotation of the blade; a radial vibration module provided on the side of the holder away from the base, the radial vibration module being used to generate ultrasonic vibration to drive the blade to vibrate radially. The radial vibration module comprises a piezoelectric ceramic ring, a first energy supply coil and a second energy supply coil, the piezoelectric ceramic ring being electrically connected to the first energy supply coil, the piezoelectric ceramic ring being provided on the holder, the second energy supply coil being spaced apart from the first energy supply coil, the second energy supply coil being electrically connected to an external power source, and the first coil and the second coil achieving power transmission through electromagnetic coupling. The first energy supply coil and the second energy supply coil are coaxially and oppositely arranged, an annular gap being provided between the first energy supply coil and the second energy supply coil, the radial width of the annular gap being 10-20 μm. The holder is provided with a plurality of through holes, the through holes being spaced apart around the spindle hole, the through holes being located between the spindle hole and the radial vibration module. The through holes comprise inner circle through holes and outer circle through holes, the inner circle through holes and the outer circle through holes being respectively spaced apart along two circles concentric with the spindle hole, the projections of the inner circle through holes and the outer circle through holes in the axial direction of the spindle hole at least partially overlapping. The inner circle through holes and the outer circle through holes are oblong through holes, the end portions of the inner circle through holes and the outer circle through holes being rounded. The amplitude of radial vibration of the blade along the spindle hole is 1-6 μm. The blade is provided with a central hole coaxially arranged with the spindle hole. The outer diameter of the blade is greater than the outer diameter of the base. The utility model relates to an ultrasonic dicing tool, comprising: a base, a blade provided on one side of the base, the peripheral edge of the blade protruding from the peripheral edge of the base; a holder provided on the side of the blade away from the base, the peripheral edge of the holder flush with the peripheral edge of the base, the holder being provided with a spindle hole for cooperating with a spindle to realize axial rotation of the blade; a radial vibration module provided on the side of the holder away from the base, the radial vibration module being used to generate ultrasonic vibration to drive the blade to vibrate radially. The radial vibration module comprises a piezoelectric ceramic ring, a

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