Transfer device and bearing bracket

Abstract

The invention provides a transfer device and a bearing bracket, the transfer device comprises a clamping mechanism, the clamping mechanism comprises two clamping arms oppositely arranged in a first horizontal direction, each clamping arm extends in a second horizontal direction perpendicular to the first horizontal direction, and the clamping arms can be switched between a clamping position and a non-clamping position; the clamping arm is provided with a plurality of clamping parts which are arranged at intervals in the second horizontal direction; under the condition that the clamping arms are located at the clamping positions, the two clamping arms are used for supporting the bearing bracket; in the process that the clamping arms move to the non-clamping position from the clamping position, the two clamping arms can put down the bearing bracket. The clamping arms are distributed in the first horizontal direction, and the clamping parts can be matched with lap joint parts extending in the width direction of the bearing bracket to clamp the bearing bracket. The lap joint part extends along the width direction of the bearing bracket, and does not need to occupy the space in the length direction of the bearing bracket, so that the space can be used for placing a loading device, and the bearing capacity of the wafer is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a transfer device and a carrier bracket. BACKGROUND

[0002] With the rapid development of the photovoltaic industry, the proportion of photovoltaic power generation in power supply is increasing, and the demand for photovoltaic components will continue to grow in the future. Under this background, the increase in wafer production and the increase in wafer size will be an inevitable trend. During the wafer processing process, the wafer needs to be transported, and the carrying capacity of the wafer during transportation directly affects the production efficiency of the wafer.

[0003] Therefore, how to improve the carrying capacity of the wafer is a technical problem that those skilled in the art urgently need to solve. SUMMARY

[0004] The present application aims to at least solve one of the technical problems existing in the prior art, and proposes a transfer device and a carrier bracket, which increases the space for carrying wafers, thereby improving the carrying capacity of the wafers.

[0005] To achieve the purpose of the present application, a transfer device is provided, which is applied to a semiconductor processing equipment, comprising a clamping mechanism, the clamping mechanism comprises two clamping arms oppositely arranged in a first horizontal direction, each clamping arm is arranged to extend in a second horizontal direction perpendicular to the first horizontal direction, and can be switched between a clamping position and a non-clamping position;

[0006] A plurality of clamping portions are arranged on the clamping arm along the second horizontal direction; in the case that the clamping arm is located at the clamping position, each clamping portion is located below the corresponding lap portion of at least one carrier bracket of the semiconductor processing equipment, so as to lift the carrier bracket; during the movement of the clamping arm from the clamping position to the non-clamping position, each clamping portion moves away from below the corresponding lap portion, so as to be able to put down the carrier bracket.

[0007] In some embodiments, the plurality of clamping portions includes two first clamping portions and at least one second clamping portion, in the case that the clamping arm is located at the clamping position, each first clamping portion is used to lift the lap portion at the two ends of the carrier bracket arranged along the second horizontal direction; each second clamping portion is used to lift the lap portion at the adjacent end of the adjacent two carrier brackets.

[0008] In some embodiments, the clamping portion includes a receiving groove for accommodating the corresponding lap portion, the bottom surface of the receiving groove is used to support the lap portion, and the side wall of the receiving groove is a guide slope, which is used to guide the lap portion to fit the groove bottom of the receiving groove, so as to correct the carrier bracket.

[0009] In some embodiments, two of the clamping arms have a first opening on the side opposite to the two clamping portions, the first opening is in communication with the accommodating groove, so that the lap portion can enter the accommodating groove.

[0010] The guide slope includes a first guide slope, and a side wall of the accommodating groove towards the first opening is the first guide slope, which is used to correct the carrying bracket in the first horizontal direction.

[0011] In some embodiments, the guide slope includes a second guide slope, and a side wall of the accommodating groove distributed in the second horizontal direction is the second guide slope, which is used to correct the carrying bracket in the second horizontal direction.

[0012] In some embodiments, a driving mechanism is further included, the driving mechanism includes a driving portion and two transmission assemblies, the driving portion is in transmission connection with the two clamping arms through the two transmission assemblies respectively, and drives the two clamping arms to move synchronously between the clamping position and the non-clamping position.

[0013] In some embodiments, the clamping arm includes a crossbeam and a transmission portion, the clamping portion is distributed along the length direction of the crossbeam, and the transmission portion is in fixed connection with the crossbeam.

[0014] The driving mechanism further includes a mounting seat between the crossbeams of the two clamping arms, the transmission portions of the two clamping arms are hinged to the mounting seat, the transmission assembly includes a moving seat, the two moving seats are movably connected with the mounting seat, the transmission portion is connected with the moving seat, and the driving portion can drive the two moving seats to move reversely synchronously, so as to drive the two clamping arms to move synchronously.

[0015] In some embodiments, the transmission portion has a strip-shaped hole, the moving seat has a transmission pin penetrating into the strip-shaped hole to push the transmission portion to rotate, and a roller is arranged between the transmission pin and the strip-shaped hole.

[0016] In some embodiments, the transmission assembly further includes a lead screw connected with the driving portion and a nut mounted on the moving seat, the lead screw is in threaded cooperation with the nut, and the driving portion drives the moving seat to move through the lead screw and the nut.

[0017] In some embodiments, the mounting seat further includes a linear guide rail assembly, and the driving mechanism further includes a sliding block used to cooperate with the guide rail assembly, and the sliding block is arranged on the moving seat.

[0018] In some embodiments, a detection mechanism is further provided on the mounting base, and the detection mechanism is configured to detect whether the transfer device collides with an obstacle.

[0019] In some embodiments, a connecting base is provided on the mounting base, and the detection mechanism comprises a rotating block, a rotating shaft, and a detection portion. The rotating block is hinged to the connecting base via the rotating shaft. A preset interval is provided between the rotating block and the upper surface of the mounting base. The detection portion is provided in two, and the two detection portions are provided on the side of the rotating block facing the mounting base, and the two detection portions are provided on the two sides of the rotating shaft, respectively.

[0020] The present application further provides a carrying bracket, which has a plurality of lapping portions for cooperating with the transfer device on both sides in the width direction. The lapping portions extend along the width direction of the carrying bracket. The number of the lapping portions on the same side is at least two, and the lapping portions are distributed along the length direction of the carrying bracket.

[0021] When cooperating with the transfer device, the width direction of the carrying bracket is parallel to the first horizontal direction, and the length direction of the carrying bracket is parallel to the second horizontal direction.

[0022] In some embodiments, the carrying bracket comprises a carrying structure for supporting a loading device and a connecting structure connecting the end portions of the carrying structure. The carrying structure extends along the length direction of the carrying bracket, and the connecting structure extends along the width direction of the carrying bracket.

[0023] The lapping portions are provided on the connecting structure, and a clearance slot is formed between the lapping portions and the carrying structure. The clearance slot is used for providing clearance for the clamping portion when the transfer device clamps the carrying bracket.

[0024] The present application has the following beneficial effects:

[0025] The transfer device provided by the present application is applied to a semiconductor processing equipment, and comprises a clamping mechanism. The clamping mechanism comprises two clamping arms arranged oppositely in a first horizontal direction. Each clamping arm extends along a second horizontal direction perpendicular to the first horizontal direction and can be switched between a clamping position and a non-clamping position. A plurality of clamping portions are arranged on the clamping arm along the second horizontal direction. In the case that the clamping arm is located at the clamping position, each clamping portion is located below a corresponding lapping portion in at least one carrying bracket of the semiconductor processing equipment, so as to lift the carrying bracket. In the process that the clamping arm moves from the clamping position to the non-clamping position, each clamping portion moves away from below the corresponding lapping portion, so as to be able to put down the carrying bracket.

[0026] The clamping arms are distributed along a first horizontal direction, and the clamping portions can clamp the carrier pallet by cooperating with the overlapping portions extending along the width direction of the carrier pallet. The overlapping portions extend along the width direction of the carrier pallet, and do not need to occupy the space in the length direction of the carrier pallet, so that the space can be used to place the loading device, thereby improving the carrying capacity of the wafer.

[0027] The application also provides a carrier pallet used in cooperation with the transfer device, and has the above advantages. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 A schematic structural view of the transfer device clamping the carrier pallet is provided in a specific embodiment of the application;

[0029] Figure 2 For Figure 1 A schematic structural view of the transfer device releasing the carrier pallet;

[0030] Figure 3 For Figure 1 A schematic structural view of the carrier pallet partially carrying the loading device;

[0031] Figure 4 For Figure 1 A schematic structural view of the clamping arm;

[0032] Figure 5 For Figure 1 A schematic view of the clamping arm clamping two carrier pallets;

[0033] Figure 6 For Figure 1 A side view of the clamping arm releasing the carrier pallet;

[0034] Figure 7 For Figure 1 A side view of the clamping arm clamping the carrier pallet;

[0035] Figure 8 For Figure 7 A partial enlarged view;

[0036] Figure 9 For Figure 1 A schematic structural view of the driving mechanism;

[0037] Figure 10 For Figure 9 A schematic structural view of the driving mechanism cooperating with the clamping arm in the application;

[0038] Figure 11 A side view of the driving mechanism;

[0039] Figure 12 A schematic structural view of the detection mechanism connected with the driving mechanism;

[0040] Figure 13 Figure 1 is a schematic view of a structure of a loading and unloading mechanism.

[0041] wherein, Figures 1 to 13 the reference signs in the figures are:

[0042] 100, bearing bracket; 110, bearing structure; 111, bearing groove; 120, connecting structure; 121, overlapping part; 122, accommodation groove; 130, supporting structure; 200, transfer device; 210, driving mechanism; 211, top plate; 212, bottom plate; 213, connecting plate; 214, hinged plate; 215, hinged hole; 216, double-output shaft motor; 217, moving seat; 218, nut; 219, lead screw; 2110, roller; 2111, linear guide rail assembly; 2112, sliding block; 2113, bearing seat; 2114, supporting seat; 2115, connecting seat; 220, clamping arm; 221, cross beam; 222, transmission part; 223, first clamping part; 224, second clamping part; 225, accommodating groove; 226, guide inclined surface; 227, rotating shaft; 2221, fixed arm; 2222, connecting arm; 2223, transmission arm; 2224, strip-shaped hole; 230, detection mechanism; 231, rotating block; 232, rotating shaft; 233, microswitch; 240, loading and unloading mechanism; 241, driving vertical module; 242, driven vertical module; 243, vertical synchronous shaft; 244, vertical motor; 245, vertical speed reducer; 246, driving translation assembly; 247, driven translation assembly; 248, horizontal synchronous shaft; 249, horizontal motor; 2410, driving extension assembly; 2411, driven extension assembly; 2412, extension synchronous shaft; 2413, extension motor; 300, loading device; 310, support bracket. DETAILED DESCRIPTION

[0043] In order for those skilled in the art to better understand the technical solutions of the present application, the transfer device provided by the present application is described in detail below in combination with the drawings.

[0044] In the related art, the wafer boat loaded with wafers is placed in a boat bracket and arranged along the length direction of the boat bracket. The both ends of the boat bracket are provided with supporting columns extending along the length direction of the boat bracket. During the process of carrying the boat bracket, the robot needs to grab the boat bracket through the supporting columns at both ends of the boat bracket, and both the robot and the supporting columns need to occupy the space in the length direction of the boat bracket, i.e. the space for placing the wafer boat, thereby reducing the number of wafer boats that can be placed by the boat bracket and the number of wafers transferred each time.

[0045] In addition, in some related technologies, robotic arms can directly grasp quartz boats loaded with wafers, and multiple quartz boats can be grasped and transferred at once. However, there may be some positional deviation between the individual quartz boats, and the robotic arm cannot guide and correct the quartz boats during the grasping process. This leads to positional deviations of the quartz boats during processing, ultimately resulting in poor consistency in the processing of wafers on different quartz boats and affecting product yield.

[0046] The transfer device 200 provided in this application is applied to a semiconductor processing equipment and includes a clamping mechanism. The clamping mechanism includes two clamping arms 220 arranged opposite each other in a first horizontal direction. Each clamping arm 220 extends along a second horizontal direction perpendicular to the first horizontal direction and can switch between a clamping position and a non-clamping position. The clamping arm 220 is provided with a plurality of clamping portions arranged at intervals along the second horizontal direction. When the clamping arm 220 is in the clamping position, each clamping portion is located below the corresponding overlapping portion 121 in at least one support bracket 100 of the semiconductor processing equipment to support the support bracket 100. During the process of the clamping arm 220 moving from the clamping position to the non-clamping position, each clamping portion moves away from below the corresponding overlapping portion 121 so that the support bracket 100 can be lowered.

[0047] When the transfer device 200 clamps the support bracket 100, the first horizontal direction is parallel to the width direction of the support bracket 100, and the second horizontal direction is parallel to the length direction of the support bracket 100.

[0048] like Figure 1 As shown, the overlapping portions 121 are generally spaced apart along the length of the support bracket 100. In the clamping position, the clamping portions are spaced apart in the second horizontal direction, and the two clamping arms 220 respectively engage with the overlapping portions 121 on both sides of the support bracket 100 to lift the support bracket 100. In the non-clamping position, the clamping arms 220 move away from the overlapping portions 121 to lower the support bracket 100. Figure 2 As shown, at this time, the clamping arm 220 moves away from the overlapping part 121, and the clamping arm 220 no longer applies a supporting force to the overlapping part 121, thereby lowering the support bracket 100.

[0049] In this embodiment, the transfer device 200 clamps the carrier tray 100 from both sides in the first horizontal direction. The transfer device 200 and the overlapping portion 121 do not need to occupy space in the length direction of the carrier tray 100. The wafer loading device 300 is arranged in the carrier tray 100 along the length direction of the carrier tray 100. The space occupied by the transfer device 200 and the overlapping portion 121 in the length direction of the carrier tray 100 is reduced, the space of the carrier tray 100 for accommodating the loading device 300 is increased, and thus the wafer carrying capacity of the carrier tray 100 is also increased.

[0050] The plurality of clamping portions include two first clamping portions 223 and at least one second clamping portion 224, each first clamping portion 223 is used to hold the overlap portion of the two ends of the carrier tray 100 arranged along the second horizontal direction when the clamping arm 220 is in the clamping position; and each second clamping portion 224 is used to hold the overlap portion of the adjacent ends of the two adjacent carrier trays 100.

[0051] The transfer device 200 can often clamp more than two carrier trays 100, and the more than two carrier trays 100 can be arranged along the second horizontal direction, and the transfer device 200 clamps each carrier tray 100 from both sides of the carrier tray 100. As shown in Figure 4 The clamping portions include the first clamping portions 223 and the second clamping portions 224. The first clamping portions 223 are located at the two ends of the clamping arm 220, and the positions of the first clamping portions 223 correspond to the positions of the overlap portions 121 of the two ends of the carrier tray 100 arranged along the second horizontal direction, so that the first clamping portions 223 are engaged with the overlap portions 121. The second clamping portions 224 are located between the two first clamping portions 223, and the positions of the second clamping portions 224 correspond to the positions of the overlap portions 121 of the adjacent ends of the two adjacent carrier trays 100, so that the second clamping portions 224 are engaged with the two overlap portions 121. Of course, the clamping portions can also adopt other distribution modes, for example, each clamping portion corresponds to one overlap portion 121, which is not limited herein.

[0052] In this embodiment, the transfer device 200 can clamp more than two carrier trays 100, and each carrier tray 100 can be used to carry a plurality of loading devices 300, so that the transfer device 200 can transfer a plurality of loading devices 300 at a time, thereby improving the transfer efficiency of the wafers.

[0053] In some embodiments, as shown in Figure 4 The clamping portions include accommodation grooves 225 for accommodating the corresponding overlap portions 121, the bottom surface of the accommodation groove 225 is used to support the overlap portion 121, and the sidewall of the accommodation groove 225 is a guide inclined surface 226, which is used to guide the overlap portion 121 to fit the groove bottom of the accommodation groove 225, and to correct the carrier tray 100. When entering the accommodation groove 225, the overlap portion 121 can slide along the guide inclined surface 226 to the bottom of the accommodation groove 225. The guide inclined surface 226 exerts a horizontal directional component force on the overlap portion, so that the carrier tray 100 moves in the horizontal direction, thereby adjusting the position and angle of the carrier tray 100, and achieving the purpose of correcting the carrier tray 100.

[0054] Optionally, the opposite side of the corresponding two clamping portions of the two clamping arms 220 has a first opening, and the first opening is in communication with the accommodation groove 225, so that the overlap portion 121 can enter the accommodation groove 225;

[0055] The guide slope includes a first guide slope, the side wall of the receiving groove 225 facing the first opening is the first guide slope, and the first guide slope is used to correct the position of the carrier bracket in the first horizontal direction.

[0056] The positions of the corresponding two clamping portions in the second horizontal direction are the same. The first openings of the two clamping portions can be arranged oppositely, and the two first guide slopes are also arranged oppositely. When the carrier bracket 100 is placed in the receiving groove 225 of the two clamping portions, the two first guide slopes guide the overlapping portions 121 of the carrier bracket 100 from both sides respectively, that is, the two first guide slopes can exert a pair of opposite forces on the two overlapping portions 121, so as to adjust the position of the carrier bracket 100 in the first horizontal direction.

[0057] The guide slope includes a second guide slope, the side wall of the receiving groove 225 distributed in the second horizontal direction is the second guide slope, and the second guide slope is used to correct the position of the carrier bracket in the second horizontal direction.

[0058] The second guide slope can adjust the position of the carrier bracket 100 in the second horizontal direction. Specifically, the clamping arm 220 usually includes a plurality of second guide slopes, and the second guide slopes can limit the movement of the overlapping portion 121 in the second horizontal direction. For example, the two first clamping portions 223 have a pair of opposite second guide slopes, and the forces exerted by the opposite second guide slopes on the carrier bracket 100 are opposite in direction, so that the position of the carrier bracket 100 can be adjusted from two movement directions.

[0059] Optionally, the top of the second clamping portion 224 and the side opening toward the carrier bracket 100 when in the clamping position, and the overlapping portions 121 of the two carrier brackets 100 can pass through the opening and be inserted into the receiving groove 225. The top of the first clamping portion 223, the side facing the carrier bracket 100 when in the clamping position, and the opposite side of the two first clamping portions 223 are opened. The clamping portion is provided with more openings, which can facilitate the insertion of the overlapping portion 121 into the receiving groove 225, and at the same time can reduce the weight of the clamping arm 220 and reduce the load of the equipment. The side wall of the clamping portion which is not opened can limit the movement of the overlapping portion 121 inserted into the receiving groove 225, limit the movement of the carrier bracket 100, and reduce the risk of accidents such as falling of the carrier bracket.

[0060] In some embodiments, the transfer device 200 further comprises a driving mechanism 210 for driving the clamping arms 220 to switch between the clamping position and the non-clamping position. The driving mechanism 210 comprises a driving part and two transmission assemblies, the driving part is in transmission connection with the two clamping arms 220 through the two transmission assemblies, and the two clamping arms 220 are synchronously driven to move between the clamping position and the non-clamping position. The movement mode of the clamping arms 220 can be swinging, translation or a combination of swinging and translation. The synchronous movement of the two clamping arms 220 driven by the driving mechanism 210 can realize synchronous clamping on both sides of the carrier bracket 100, and ensure that the clamping process is more stable and reliable.

[0061] Optionally, the number of the driving mechanism 210 can be two, and the two driving mechanisms 210 are respectively located at the two ends of the clamping arms 220. The two driving mechanisms 210 are synchronously driven to drive the two ends of the clamping arms 220 to move synchronously. Meanwhile, the two transmission assemblies of the driving mechanism 210 are synchronously driven by the driving part to realize the synchronous movement of the two clamping arms 220, and complete the clamping of the carrier bracket 100. The two driving mechanisms 210 are respectively located at the two ends of the clamping arms 220, which is convenient for the transfer device 200 to maintain the balance of the carrier bracket 100, and reduces the risk of accidents such as falling of the carrier bracket 100. Of course, the number of the driving mechanism 210 is not limited to this.

[0062] In some embodiments, the clamping arm 220 comprises a crossbeam 221 and a transmission part 222, the clamping part is distributed along the length direction of the crossbeam, and the transmission part 222 is fixedly connected with the crossbeam 221. The transmission part 222 is usually in one-to-one correspondence with the driving mechanism 210, and the crossbeam 221 is connected with the transmission assembly of the driving part. For example, the number of the driving mechanism 210 is two, and the two driving mechanisms 210 are respectively located at the two ends of the crossbeam 221. The crossbeam 221 is connected with one transmission part 222 at each end, and the crossbeam 221 and the transmission part 222 can be fixedly connected by screws.

[0063] The driving mechanism 210 further comprises a mounting seat located between the crossbeams 221 of the two clamping arms 220. The transmission part 222 of each clamping arm 220 is hingedly connected with the corresponding mounting seat, and the transmission assembly further comprises a moving seat 217, the two moving seats 217 are movably connected with the corresponding mounting seats, the transmission part 222 is connected with the corresponding moving seat 217, and the driving part can drive the two moving seats 217 to move synchronously and reversely to drive the two clamping arms 220 to move synchronously.

[0064] Optionally, one end of the transmission part 222 is fixedly connected with the cross beam 221, and the other end is provided with a strip-shaped hole 2224. The middle part of the transmission part 222 is provided with a rotating shaft 227 for hinged connection with the mounting seat. The rotating shaft 227 is parallel to the length direction of the cross beam 221. The transmission part 222 rotates around the rotating shaft 227, and can drive the cross beam 221 to move in the vertical direction of the length of the cross beam 221. The transmission assembly comprises a moving seat 217 movably connected with the transmission part 222. The driving part can drive the moving seat 217 to displace in the vertical direction of the length of the cross beam 221, and the moving seat 217 can drive the transmission part 222 to rotate around the rotating shaft 227 during the movement. As shown in Figure 6 , the clamping arm 220 is in the non-clamping position, and the clamping part is away from the lap joint part 121. As shown in Figure 7 , the clamping arm 220 is in the clamping position. As shown in Figure 8 , the clamping part is located below the lap joint part 121, and is used for supporting the lap joint part 121. When the clamping arm 220 is switched from the non-clamping position to the clamping position, the transmission part 222 rotates around the rotating shaft 227. In the embodiment, the clamping arm 220 is switched between the clamping position and the non-clamping position in the swinging mode, and the clamping arm 220 occupies less space, and the movement is more flexible. The user can also set the clamping arm 220 to other movement modes, such as translation, which is not limited herein.

[0065] Optionally, the transmission part 222 has a strip-shaped hole 2224, the moving seat 217 has a transmission pin penetrating into the strip-shaped hole 2224 to drive the transmission part 222 to rotate, and the transmission pin and the strip-shaped hole are provided with a roller 2110.

[0066] As shown in Figures 6 to 8 , the transmission part 222 comprises a fixed arm 2221, a connecting arm 2222 and a transmission arm 2223 connected in sequence, and the fixed arm 2221, the connecting arm 2222 and the transmission arm 2223 form a “U” shaped structure. The fixed arm 2221 is fixedly connected with the end face of the cross beam 221 by means of screws, the strip-shaped hole 2224 is arranged on the transmission arm 2223, and the connecting arm 2222 connects the fixed arm 2221 and the transmission arm 2223. When the clamping arm 220 is in the non-clamping position, the clamping part is away from the lap joint part 121. As shown in Figure 6 and Figure 7 , the opening of the U-shaped structure is downward. When the clamping arm 220 is in the clamping position, the clamping part extends to the lower side of the lap joint part 121 from the fixed arm 2221. The transmission part 222 can also be arranged in other shapes as required, which is not limited herein.

[0067] Optionally, as shown in Figure 10As shown, the roller 2110 is sleeved on the outer periphery of the transmission pin and can pass through the slotted hole 2224. The outer peripheral surface of the roller 2110 is in contact with the side wall of the slotted hole 2224. When the movable seat 217 pushes the transmission part 222 to rotate, the roller 2110 rolls in the slotted hole 2224, which can reduce the friction between the transmission part 222 and the movable seat 217.

[0068] Optional, such as Figure 9 As shown, the mounting base includes a top plate 211, a bottom plate 212, and a connecting plate 213. The top plate 211 and the bottom plate 212 are parallel to each other and both extend along a first horizontal direction. There can be two connecting plates 213, located at opposite ends of the top plate 211. The connecting plates 213 connect the top plate 211 and the bottom plate 212. A drive unit and a transmission assembly are disposed between the top plate 211 and the bottom plate 212. Two clamping arms 220 are respectively disposed at opposite ends of the top plate 211. There are also two transmission assemblies. The drive unit is located between the two transmission assemblies and is connected to the two clamping arms 220 respectively through the two transmission assemblies. The upper part of the two connecting plates 213 is provided with hinge holes 215. The top plate 211 is also provided with a hinge plate 214 corresponding to the position of the connecting plate 213, and the hinge plate 214 is also provided with hinge holes 215. The two ends of the rotating shaft 227 are respectively installed in the hinge holes 215 of the connecting plate 213 and the hinge plate 214. Two movable seats 217 are located between the top plate 211 and the bottom plate 212. The movable seats 217 are movably connected to the transmission unit 222 through the strip hole 2224. The drive unit drives the two movable seats 217 to move, which in turn drives the transmission unit 222 to rotate around the rotating shaft 227.

[0069] In some embodiments, the transmission assembly further includes a lead screw 219 connected to the drive unit and a nut 218 mounted on the movable seat 217. The lead screw 219 and the nut 218 are threadedly engaged, and the drive unit drives the movable seat 217 to move via the lead screw 219 and the nut 218. Figures 9 to 11As shown, the two lead screws 219 can be coaxially arranged, and both are connected with the driving part and rotate under the driving of the driving part. The two transmission assemblies can be symmetrically distributed on both sides of the driving part, and the nut 218 is fixedly connected with the moving seat 217. The thread rotation directions of the two lead screws 219 are opposite, and the nuts 218 of the two transmission assemblies are respectively threadedly connected with the two lead screws 219. When the two lead screws 219 rotate synchronously, the two nuts 218 are respectively applied with forces in opposite directions and distributed along the axial direction of the lead screw 219. The moving seat 217 moves under the action of the force, and then pushes the transmission part 222 through the roller 2110 installed on the moving seat 217, so that the clamping arm 220 is switched between the clamping position and the non-clamping position. For example, when the moving seat 217 moves away from the driving part, the clamping arm 220 is switched from the clamping position to the non-clamping position; when the moving seat 217 moves towards the driving part, the clamping arm 220 is switched from the non-clamping position to the clamping position. The transmission efficiency and transmission accuracy of the nut 218 and the lead screw 219 structure are higher, which can ensure that the actions of the two clamping arms 220 have a high synchronization rate. Of course, the transmission assembly can also adopt other structures, such as cam structure, crank connecting rod structure, gear structure, etc., which are not limited here.

[0070] In some embodiments, the mounting seat further comprises a linear guide rail assembly 2111, and the driving mechanism 210 further comprises a sliding block 2112 for cooperating with the guide rail assembly, and the sliding block 2112 is arranged on the moving seat 217. Figure 11 As shown, the linear guide rail assembly 2111 can be arranged on the lower surface of the top plate 211, and the linear guide rail assembly 2111 is arranged along the movement path of the moving seat 217, that is, the linear guide rail assembly 2111 is arranged in parallel with the lead screw 219. The moving seat 217 is located below the linear guide rail assembly 2111, the sliding block 2112 is fixed on the top of the moving seat 217 and cooperates with the linear guide rail assembly 2111. When the driving part drives the moving seat 217 to move, the linear guide rail assembly 2111 plays a guiding role to avoid the inclination of the moving seat 217 during movement. Figure 11 As shown, the two moving seats 217 of the driving mechanism 210 can cooperate with the same linear guide rail assembly 2111, so that the movement paths of the two moving seats 217 are on the same straight line, which helps to align the two ends of the clamping arm 220, so as to align the clamping parts on the two clamping arms 220 and improve the alignment effect of the clamping arm 220 on the bearing bracket 100.

[0071] In some embodiments, the driving part is a double-output shaft motor 216, and the lead screws 219 of the two transmission assemblies are respectively connected with the two ends of the double-output shaft motor 216. Figure 11As shown, the double-output shaft motor 216 is arranged on the bottom plate 212 of the mounting base, and two bearing seats 2113 are further arranged on the bottom plate 212. The double-output shaft motor 216 is located between the two bearing seats 2113, and the shaft of the double-output shaft motor 216 is matched with the two bearing seats 2113 through bearings.

[0072] Optionally, the bottom plate 212 is further provided with a support seat 2114 for supporting one end of the lead screw 219 away from the double-output shaft motor 216.

[0073] Optionally, the transfer device further comprises a detection mechanism 230 arranged on the mounting base, and the detection mechanism 230 is used for detecting whether the transfer device collides with an obstacle. As shown, Figure 11 and 12 As shown, the detection mechanism 230 is arranged above the top plate 211, and when the transfer device collides with the obstacle, the detection mechanism 230 is subjected to collision and relative motion with the mounting base, and the detection mechanism 230 can detect the relative motion, thereby determining that the transfer device collides with the obstacle.

[0074] In some embodiments, the mounting base is provided with a connecting seat 2115, and the detection mechanism 230 comprises a rotating block 231, a rotating shaft 232, and a detection part. The rotating block 231 is hinged to the connecting seat 2115 through the rotating shaft 232, and the rotating block 231 has a preset interval with the upper surface of the mounting base. The number of detection parts is two, and the two detection parts are located on the side of the rotating block 231 facing the mounting base, and the two detection parts are respectively located on the two sides of the rotating shaft 232. As shown, Figure 11 As shown, the connecting seat 2115 can be arranged at the end of the mounting base away from the clamping arm 220, and the detection mechanism 230 is arranged on the connecting seat 2115. When the transfer device collides with the obstacle, it is usually the end that collides with the obstacle. The detection mechanism 230 is located at the end of the transfer device, so it is usually the detection mechanism 230 that collides with the obstacle. The connecting seat 2115 has a connecting hole parallel to the length direction of the clamping part, and the rotating shaft 232 is arranged in the connecting hole to hinge the connecting seat 2115 and the rotating block 231, and the rotating block 231 is arranged perpendicular to the clamping arm 220. The detection part is arranged at both ends of the rotating block 231, and when the collision occurs, the rotating block 231 will rotate around the rotating shaft 232, and the distance between the detection part and the mounting base changes, so the detection part can detect the collision. The detection part can be a micro switch 233, and when the collision occurs, the micro switch 233 contacts the mounting base, thereby detecting the collision. The micro switch 233 can be connected with an alarm mechanism, and when the collision occurs, the micro switch 233 triggers the alarm mechanism, and the alarm mechanism issues an alarm to remind the staff to handle the accident.

[0075] The application also provides a carrying bracket 100, which has a plurality of clamping portions distributed on both sides in the width direction and used for cooperating with the transfer device in any of the above embodiments, the clamping portions extend along the width direction of the carrying bracket 100, the number of the clamping portions on the same side is at least two, and the clamping portions are distributed along the length direction of the carrying bracket 100.

[0076] When cooperating with the transfer device, the width direction of the carrying bracket 100 is parallel to the first horizontal direction, and the length direction of the carrying bracket 100 is parallel to the second horizontal direction.

[0077] The carrying bracket 100 is used for carrying the loading device 300. The loading device 300 can be a quartz boat, a graphite boat or the like, and is used for loading wafers. The loading device 300 is arranged in the carrying bracket 100 along the length direction of the carrying bracket 100. The carrying bracket 100 includes clamping portions 121 located on both sides of the carrying bracket 100, and the clamping portions 121 extend along the length direction of the carrying bracket 100. Figure 1 As shown in the figure, the carrying bracket 100 includes connecting structures 120 located at both ends of the carrying bracket 100, and the connecting structures 120 are arranged perpendicularly to the length direction of the carrying bracket 100. The loading device 300 is placed between the two connecting structures 120. The clamping portions 121 are arranged on the connecting structures 120 and extend outward from the connecting structures 120 perpendicularly to the length direction of the carrying bracket 100. The carrying bracket 100 usually includes at least four clamping portions 121, two clamping portions 121 are arranged at each end of the carrying bracket 100, and the two clamping portions 121 at the same end are located on both sides of the carrying bracket 100. Of course, the user can also set the number and distribution of the clamping portions 121 according to the needs, as long as the center of gravity of the carrying bracket 100 carrying the loading device 300 is located between the clamping portions 121.

[0078] In some embodiments, the carrying bracket includes a carrying structure 110 for supporting the loading device and a connecting structure for connecting the ends of the carrying structure, the carrying structure extends along the length direction of the carrying bracket, and the connecting structure extends along the width direction of the carrying bracket.

[0079] The clamping portion is arranged on the connecting structure, and a gap is formed between the clamping portion and the carrying structure, the gap is used for giving way to the clamping portion when the transfer device clamps the carrying bracket.

[0080] Optionally, as Figure 3As shown, the carrying bracket 100 further comprises carrying structures 110 on both sides thereof, which extend along the length direction of the carrying bracket 100. The loading device 300 is provided with support brackets 310 on opposite sides thereof. Exemplarily, the loading device 300 is provided with two support brackets 310 on each side thereof. The carrying structures 110 are used to support the support brackets 310 of the loading device 300. In addition, the carrying structures 110 are provided with carrying grooves 111, in which the support brackets 310 are placed, the carrying grooves 111 can limit the support brackets 310 and adjust the distribution of the loading device 300, so that the loading device 300 is more evenly distributed. The overlapping portions 121 can also be provided on the carrying structures 110, which are not limited herein.

[0081] Optionally, the overlapping portions 121 are located above the carrying structures 110, and the overlapping portions 121 and the carrying structures 110 form a giving slot 122. When the transfer device 200 grabs the carrying bracket 100, the giving slot 122 is used to give way for the clamping portion.

[0082] Optionally, the carrying bracket 100 further comprises a support structure 130 between the carrying structures 110, which can support the loading device 300 from the bottom. The support structure 130 can also improve the structural strength of the carrying bracket 100.

[0083] Optionally, the transfer equipment can further comprise a feeding and discharging mechanism 240 connected with the driving mechanisms 210, which is used to drive the two driving mechanisms 210 to synchronously ascend and descend and translate. The micro switch 233 can be connected with the power supply device of the feeding and discharging mechanism 240, which will cut off the power supply of the feeding and discharging mechanism 240 when a collision occurs, so as to avoid further deterioration of the accident.

[0084] Optionally, the feeding and discharging mechanism 240 has a structure as Figure 13As shown, it comprises a driving vertical module 241, a driven vertical module 242, a driving translation module 246, a driven translation module 247, a driving extension module 2410 and a driven extension module 2411. The driving vertical module 241 and the driven vertical module 242 are arranged in parallel, and are connected by a vertical synchronous shaft 243. The driving translation module 246 and the driven translation module 247 are connected to the driving vertical module 241 and the driven vertical module 242 respectively. The driving vertical module 241 is provided with a vertical speed reducer 245 and a vertical motor 244, and the vertical motor 244 drives the driving translation module 246 and the driven translation module 247 to move in the vertical direction. The driving translation module 246 and the driven translation module 247 are connected by a horizontal synchronous shaft 248. The driving extension module 2410 and the driven extension module 2411 are arranged in parallel, and are fixed to the driving translation module 246 and the driven translation module 247 respectively. The driving extension module 2410 and the driven extension module 2411 are provided with an extension synchronous shaft 2412 in the middle, and the horizontal synchronous shaft 248 is used to ensure the synchronous movement of the driving translation module 246 and the driven translation module 247. The driving translation module 246 and the driving extension module 2410 are provided with a horizontal speed reducer and a horizontal motor 249 and an extension speed reducer and an extension motor 2413 respectively on one side, which are used to provide power input for the horizontal movement of the feeding and discharging. The driving mechanism 210 and the clamping arm 220 are installed on the driving extension module 2410 and the driven extension module 2411. When the extension motor 2413 rotates, the driving extension module 2410, the driven extension module 2411, the driving mechanism 210 and the clamping arm 220 move synchronously in the horizontal direction, and when the horizontal motor 249 rotates, the driving mechanism 210 and the clamping arm 220 move in the horizontal direction.

[0085] It can be understood that the above embodiments are only exemplary embodiments adopted for illustrating the principles of the present application, and the present application is not limited thereto. Various modifications and improvements can be made by those of ordinary skill in the art without departing from the spirit and essence of the present application, and these modifications and improvements are also considered to be within the protection scope of the present application.

Claims

1. A transfer device applied to a semiconductor processing apparatus, characterized by, The clamping mechanism comprises two clamping arms arranged opposite to each other in a first horizontal direction, each of the clamping arms extends along a second horizontal direction perpendicular to the first horizontal direction, and is switchable between a clamping position and a non-clamping position; Each of the clamping arms is provided with a plurality of clamping portions arranged in the second horizontal direction, and each of the clamping portions is located below a corresponding lap portion of at least one carrier bracket of the semiconductor processing equipment to lift the carrier bracket when the clamping arm is in the clamping position; During movement of the clamping arm from the clamping position to the non-clamping position, each of the clamping portions moves away from the corresponding lap portion to enable the carrier bracket to be lowered.

2. The transfer device of claim 1, wherein, The plurality of clamping portions comprises two first clamping portions and at least one second clamping portion, each of the first clamping portions is used to lift the lap portions at two ends of the carrier bracket arranged in the second horizontal direction when the clamping arm is in the clamping position; Each of the second clamping portions is used to lift the lap portions at mutually adjacent ends of two adjacent carrier brackets.

3. The transfer device of claim 1, wherein, The clamping portion comprises a receiving groove for accommodating the corresponding lap portion, the bottom surface of the receiving groove is used to support the lap portion, and the side wall of the receiving groove is a guide slope used to guide the lap portion to fit the groove bottom of the receiving groove to correct the carrier bracket.

4. The transfer device of claim 3, wherein, Opposite sides of the corresponding two clamping portions of the two clamping arms have first openings, the first openings are in communication with the receiving grooves, and the lap portions can enter the receiving grooves through the first openings. The guide slope comprises a first guide slope, the side wall of the receiving groove towards the first opening is the first guide slope, and the first guide slope is used to correct the carrier bracket in the first horizontal direction.

5. The transfer device of claim 3, wherein, The guide slope comprises a second guide slope, the side wall of the receiving groove distributed in the second horizontal direction is the second guide slope, and the second guide slope is used to correct the carrier bracket in the second horizontal direction.

6. The transfer device according to any one of claims 1 to 5, wherein The driving mechanism comprises a driving portion and two transmission assemblies, the driving portion is in transmission connection with the two clamping arms through the two transmission assemblies, and drives the two clamping arms to move synchronously between the clamping position and the non-clamping position.

7. The transfer device of claim 6, wherein, The clamping arm comprises a cross beam and a transmission portion, the clamping portions are distributed along the length direction of the cross beam, and the transmission portion is in fixed connection with the cross beam. The driving mechanism further comprises a mounting seat between the cross beams of the two clamping arms, the transmission portions of the two clamping arms are hinged to the mounting seat, the transmission assembly comprises a moving seat, the two moving seats are movably connected to the mounting seat, the transmission portion is connected to the moving seat, and the driving portion can drive the two moving seats to move reversely synchronously to drive the two clamping arms to move synchronously.

8. The transfer device of claim 7, wherein, The transmission portion has a strip-shaped hole, the moving seat has a transmission pin penetrating into the strip-shaped hole to push the transmission portion to rotate, and a roller is arranged between the transmission pin and the strip-shaped hole.

9. The transfer device of claim 8, wherein, The transmission assembly further comprises a screw rod connected with the driving part and a nut installed on the moving seat, the screw rod is in threaded cooperation with the nut, and the driving part drives the moving seat to move through the screw rod and the nut.

10. The transfer device of claim 9, wherein, The mounting seat further comprises a linear guide rail assembly, and the driving mechanism further comprises a sliding block used for cooperating with the guide rail assembly, and the sliding block is arranged on the moving seat.

11. The transfer device of claim 7, wherein, The detection mechanism is arranged on the mounting seat and used for detecting whether the transfer device collides with an obstacle.

12. The transfer device of claim 11, wherein, The mounting seat is provided with a connecting seat, the detection mechanism comprises a rotating block, a rotating shaft and a detection part, the rotating block is hinged to the connecting seat through the rotating shaft, a preset interval is formed between the rotating block and the upper surface of the mounting seat, the number of the detection parts is two, the two detection parts are located on the side of the rotating block facing the mounting seat, and the two detection parts are respectively located on the two sides of the rotating shaft.

13. A carrier cradle, characterized by The carrying bracket has at least two lapping parts used for cooperating with the transfer device of any one of claims 1 to 12 and distributed on both sides in the width direction, the lapping parts extend along the width direction of the carrying bracket, the number of the lapping parts located on the same side is at least two, and the lapping parts are distributed along the length direction of the carrying bracket. When cooperating with the transfer device, the width direction of the carrying bracket is parallel to the first horizontal direction, and the length direction of the carrying bracket is parallel to the second horizontal direction.

14. The load carriage tray of claim 13, wherein, The carrying bracket comprises a carrying structure used for supporting a loading device and a connecting structure connected with the end of the carrying structure, the carrying structure extends along the length direction of the carrying bracket, and the connecting structure extends along the width direction of the carrying bracket. The lapping part is arranged on the connecting structure, and a gap is formed between the lapping part and the carrying structure, the gap is used for giving space for the clamping part when the transfer device clamps the carrying bracket.

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