Film coating monitoring system, vacuum film coating equipment and film coating monitoring method

Abstract

The invention belongs to the technical field of vacuum coating, and discloses a coating monitoring system, vacuum coating equipment and a coating monitoring method. A monitoring piece of the coating monitoring system comprises a plurality of monitoring points distributed in the radial direction and the circumferential direction, and films can be deposited at the monitoring points under the action of a film deposition source; the monitoring point selection unit comprises a first through hole, and the first through hole is used for selectively exposing at least one monitoring point to an action area of the thin film deposition source; when the monitoring point is exposed to the action area of the thin film deposition source, the monitoring point is in a monitored state, and when the monitoring point is not exposed to the action area of the thin film deposition source, the monitoring point is in a non-monitoring state; and the light projecting and receiving unit is at least used for projecting light to the monitoring point in the monitored state and receiving and detecting light from the monitoring point, so that the utilization rate of the monitoring piece is improved, the replacement frequency of the monitoring piece is reduced, the cost, manpower and material resources are saved, and the working stability and working efficiency of the vacuum coating equipment are improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and more particularly to coating monitoring systems, vacuum coating equipment, and coating monitoring methods. Background Technology

[0002] Vacuum coating equipment is trending towards development from single-chamber intermittent vacuum coating equipment to multi-chamber continuous vacuum coating equipment. As a crucial component of vacuum coating equipment, the coating monitoring system is used to simultaneously detect the coating thickness of the workpiece during the coating process, ensuring the coating performance of the equipment. Existing coating optical monitoring systems typically consist of a film thickness detection component, a tray, a monitoring plate, and a monitoring plate mounting fixture. The monitoring plate is fixedly mounted on the mounting fixture and has multiple monitoring points. Rotating the mounting fixture exposes each monitoring point, allowing the coating material to pass through the through-holes in the tray and coat a specific monitoring point. The film thickness detection component detects the film thickness at these monitoring points and determines whether the coating thickness of the workpiece meets the requirements. After coating one layer, the monitoring point usually needs to be replaced to ensure the effectiveness of film thickness monitoring.

[0003] In existing technologies, after a certain number of film layers have been deposited, if all the monitoring points on the monitoring plate have been used, the monitoring plate needs to be replaced to ensure that the monitoring points on the monitoring plate can monitor the coating effect of the next batch of workpieces transported to the vacuum coating equipment. However, replacing the monitoring plate usually requires breaking the vacuum, which is detrimental to continuous vacuum coating. Especially in continuous vacuum coating equipment, if the method of replacing the monitoring plate by breaking the vacuum is adopted, the coating efficiency will be significantly reduced; if the coating workpiece rack and the monitoring plate are transported as a whole without breaking the vacuum, the stability of the coating monitoring system will be significantly reduced. Summary of the Invention

[0004] The purpose of this invention is to provide a coating monitoring system, a vacuum coating equipment, and a coating monitoring method to solve the aforementioned problems existing in the coating monitoring system of the prior art.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] The coating monitoring system includes:

[0007] The monitoring sheet includes multiple monitoring points distributed radially and circumferentially, and a thin film can be deposited at the monitoring points under the action of a thin film deposition source.

[0008] A monitoring point selection unit includes a first through hole, which is used to selectively expose at least one monitoring point to the working area of ​​the thin film deposition source; when the monitoring point is exposed to the working area of ​​the thin film deposition source, the monitoring point is in a monitored state, and when the monitoring point is not exposed to the working area of ​​the thin film deposition source, the monitoring point is in a non-monitored state.

[0009] The light-projecting and light-receiving unit is at least used to project light onto the monitoring point in the monitored state, and to receive and detect light from the monitoring point.

[0010] As a preferred embodiment of the above-mentioned coating monitoring system, the coating monitoring system further includes a first driving mechanism, and the monitoring point selection unit further includes a first shielding structure and a second shielding structure that are sequentially and spaced apart on the side of the monitoring sheet near the thin film deposition source.

[0011] The first driving mechanism can drive at least two of the monitoring chip, the first shielding structure, and the second shielding structure to rotate around a fixed axis, so that the first shielding structure and the second shielding structure can cooperate to form the first through hole. The fixed axis is collinear with the rotation axis of the monitoring chip, the rotation axis of the first shielding structure, and the rotation axis of the second shielding structure.

[0012] As a preferred embodiment of the above-mentioned coating monitoring system, the first shielding structure is provided with N second through holes, which are distributed radially at intervals along the first shielding structure. The first driving mechanism can drive at least two of the monitoring sheet, the first shielding structure and the second shielding structure to rotate around a rotation axis, so that each second through hole can become the first through hole in sequence, where N is a positive integer greater than 1.

[0013] As a preferred embodiment of the above-mentioned coating monitoring system, N second through holes are distributed at circumferential intervals along the first shielding structure;

[0014] The second shielding structure is provided with a third through hole, the length of which extends radially along the second shielding structure, and each of the second through holes can sequentially communicate with the third through hole to form the first through hole.

[0015] As a preferred embodiment of the above-mentioned coating monitoring system, the N second through holes are distributed on the same straight line, and the straight line is any line passing through the rotation center point of the first shielding structure;

[0016] The second shielding structure is provided with N third through holes, and the N third through holes are distributed at intervals along the circumference of the second shielding structure;

[0017] N third through holes are provided in a one-to-one correspondence with N second through holes, and the third through holes can communicate with the second through holes to form the first through hole.

[0018] As a preferred embodiment of the above-mentioned coating monitoring system, the light-emitting and light-receiving unit includes a light-emitting and light-receiving group, which includes a light output transmission head and a light receiving transmission head. The light output transmission head is used to transmit the light emitted by the light source to the monitoring sheet, and the light receiving transmission head is used to transmit the light reflected or transmitted by the monitoring sheet to the detector.

[0019] The number of light-emitting and light-receiving groups is N, and the N light-emitting and light-receiving groups are arranged in a one-to-one correspondence with the N second through holes.

[0020] As a preferred embodiment of the above-mentioned coating monitoring system, the N second through holes are distributed on the same straight line, and the straight line is any line passing through the rotation center point of the first shielding structure;

[0021] The light-emitting and light-receiving unit includes a light-emitting and light-receiving group, which includes a light output transmission head and a light receiving transmission head. The light output transmission head is used to transmit the light emitted by the light source to the monitoring chip, and the light receiving transmission head is used to transmit the light reflected or transmitted by the monitoring chip to the detector.

[0022] The coating monitoring system further includes a second driving mechanism, which includes a first translation driving mechanism. The light-emitting and light-receiving group is connected to the output end of the first translation driving mechanism, and the first translation driving mechanism can drive the light-emitting and light-receiving group to translate.

[0023] As a preferred embodiment of the above-mentioned coating monitoring system, the coating monitoring system further includes a third driving mechanism, which includes a rotary driving mechanism disposed in the coating chamber and a second translational driving mechanism connected to the output end of the rotary driving mechanism.

[0024] The light-emitting and light-receiving unit includes a light-emitting and light-receiving group, which includes a light output transmission head and a light receiving transmission head. The light output transmission head is used to transmit the light emitted by the light source to the monitoring chip, and the light receiving transmission head is used to transmit the light reflected or transmitted by the monitoring chip to the detector.

[0025] The light-emitting and light-receiving group is connected to the output end of the second translation drive mechanism. The rotation drive mechanism can drive the second translation drive mechanism and the light-emitting and light-receiving group to rotate synchronously around the fixed axis. The second translation drive mechanism can drive the light-emitting and light-receiving group to translate.

[0026] As a preferred embodiment of the above-mentioned coating monitoring system, the rotary drive mechanism includes a rotary drive component fixedly disposed in the coating chamber and a first rotary transmission component. The output shaft of the rotary drive component is connected to the input end of the first rotary transmission component, and the output end of the first rotary transmission component is connected to the second translation drive mechanism. The rotary drive component can drive the first rotary transmission component, the second translation drive mechanism, and the light-emitting and light-receiving group to rotate synchronously around the fixed axis.

[0027] As a preferred embodiment of the above-mentioned coating monitoring system, the rotary drive mechanism further includes a first gear transmission assembly, which includes a first gear and a first gear ring. The output shaft of the rotary drive is connected to the first gear, the outer periphery of the first gear ring meshes with the first gear, and the first gear ring is rotatably connected to the coating chamber and circumferentially connected to the first rotary drive.

[0028] As a preferred embodiment of the above-mentioned coating monitoring system, the second translation drive mechanism includes a second translation drive member disposed at the output end of the rotary drive mechanism. The output end of the second translation drive member is connected to the light-emitting and light-receiving group for transmission. The second translation drive member can drive the light-emitting and light-receiving group to translate.

[0029] As a preferred embodiment of the above-mentioned coating monitoring system, the multiple monitoring points of the monitoring sheet form N monitoring point groups, and the N monitoring point groups are distributed radially at intervals along the monitoring sheet. Each monitoring point group includes multiple monitoring points distributed circumferentially at intervals along the monitoring sheet, where N is a positive integer greater than 1.

[0030] As a preferred embodiment of the above-mentioned coating monitoring system, the second through hole is a tapered hole, with the larger end of the second through hole facing the second shielding structure and the smaller end of the second through hole facing the monitoring sheet.

[0031] As a preferred embodiment of the above-mentioned coating monitoring system, the first driving mechanism can drive the first shielding structure and / or the second shielding structure to rotate around the fixed axis to form the first through hole;

[0032] The first driving mechanism can also drive the monitoring chip to rotate around the fixed axis; and / or, the first driving mechanism can drive the first shielding structure and the second shielding structure to rotate synchronously around the fixed axis.

[0033] As a preferred embodiment of the above-mentioned coating monitoring system, the first shielding structure includes a tray, the second shielding structure includes a protective cover, N second through holes are disposed on the tray, and the tray is detachably disposed in the coating chamber;

[0034] The first driving mechanism includes a monitoring chip driving mechanism and a protective cover driving mechanism disposed in the coating chamber. The monitoring chip driving mechanism can drive the monitoring chip to rotate around the fixed axis, and the protective cover driving mechanism can drive the protective cover to rotate around the fixed axis.

[0035] As a preferred embodiment of the above-mentioned coating monitoring system, the monitoring film driving mechanism includes a monitoring film driving component disposed in the coating chamber and a second rotary transmission component. The output shaft of the monitoring film driving component is connected to the input end of the second rotary transmission component, and the output end of the second rotary transmission component is detachably connected to the monitoring film. The monitoring film driving component can drive the second rotary transmission component and the monitoring film to rotate synchronously around the fixed axis.

[0036] As a preferred embodiment of the above-mentioned coating monitoring system, the monitoring chip drive mechanism further includes a second gear transmission assembly, which includes a second gear and a second gear ring. The output shaft of the monitoring chip drive is connected to the second gear, the outer circumference of the second gear ring meshes with the second gear, and the second gear ring is rotatably connected to the coating chamber and circumferentially connected to the second rotary transmission component.

[0037] A vacuum coating equipment includes a coating chamber and a thin film deposition source, wherein the thin film deposition source is disposed in the coating chamber, and also includes the aforementioned coating monitoring system.

[0038] A coating monitoring method is used in the coating monitoring system described above. The monitoring points of the monitoring sheet form N monitoring point groups. The N monitoring point groups are distributed radially at intervals along the monitoring sheet. Each monitoring point group includes multiple monitoring points distributed circumferentially at intervals along the monitoring sheet. N is a positive integer greater than 1.

[0039] The coating monitoring method includes:

[0040] The first through hole is controlled to be distributed on the circumference of any one of the N monitoring point groups;

[0041] The first through-hole is controlled to selectively expose at least one monitoring point in the corresponding monitoring point group to the working area of ​​the thin film deposition source; the thin film deposition source is controlled to deposit a film on each of the exposed monitoring points; and the light-emitting and light-receiving unit is controlled to detect the film thickness of each of the exposed monitoring points.

[0042] After all monitoring points in the corresponding monitoring point group have been coated and the coating thickness has been detected:

[0043] The first through hole is positioned on the circumference of another location in the N monitoring point groups;

[0044] The first through-hole is controlled to selectively expose at least one monitoring point in the corresponding monitoring point group to the working area of ​​the thin film deposition source; the thin film deposition source is controlled to deposit a film on each of the exposed monitoring points; and the light-emitting and light-receiving unit is controlled to detect the film thickness of each of the exposed monitoring points.

[0045] As a preferred embodiment of the above-mentioned coating monitoring method, the coating monitoring method further includes:

[0046] After all N monitoring point groups of the monitoring chip have been coated, the monitoring chip is disassembled and replaced.

[0047] The beneficial effects of this invention are:

[0048] This invention provides a coating monitoring system, a vacuum coating equipment, and a coating monitoring method. The coating monitoring system includes a monitoring plate, a monitoring point selection unit, and a light-emitting and light-receiving unit. The monitoring plate includes multiple monitoring points distributed radially and circumferentially, where a thin film can be deposited under the action of a thin film deposition source. The monitoring point selection unit includes a first through-hole for selectively exposing at least one monitoring point to the area of ​​the thin film deposition source. When a monitoring point is exposed to the area of ​​the thin film deposition source, it is in a monitored state; when it is not exposed, it is in a non-monitored state. The light-emitting and light-receiving unit is used at least to project light onto the monitored point and to receive and detect light from the monitored point.

[0049] When coating a workpiece, the coating monitoring system selectively exposes at least one monitoring point to the working area of ​​the thin film deposition source through a first through-hole. Simultaneously, the system detects the film thickness at the monitoring point exposed to the working area of ​​the thin film deposition source through a light-emitting and light-receiving unit. This allows the film thickness at the monitoring point to indirectly reflect the film thickness on the workpiece, thus facilitating the determination of whether the film thickness of the workpiece meets the expected film thickness. By setting multiple monitoring points distributed radially and circumferentially along the monitoring sheet, the number of monitoring points is effectively increased compared to existing technologies, thus improving the utilization rate of the monitoring sheet. By setting a first through hole, at least one monitoring point can be selectively exposed to the working area of ​​the thin film deposition source. It can be understood that the first through hole can allow each monitoring point of the monitoring sheet to be exposed to the working area of ​​the thin film deposition source in a predetermined or set order. Specifically, after the working area of ​​at least one monitoring point exposed to the working area of ​​the thin film deposition source by the first through hole is coated and the coating thickness is detected, the first through hole will selectively expose at least one of the remaining multiple monitoring points to the working area of ​​the thin film deposition source for coating in a predetermined or set order, until all multiple monitoring points of the monitoring sheet are coated and the coating thickness is detected, and then the monitoring sheet is disassembled and replaced. Therefore, compared with the existing technology that can only monitor the film thickness of the workpiece through a ring of monitoring points on the monitoring plate, this coating monitoring system effectively improves the utilization rate of the monitoring plate, effectively reduces the replacement frequency of the monitoring plate, saves costs and manpower and resources, and thus effectively improves the working stability and efficiency of the vacuum coating equipment. Attached Figure Description

[0050] Figure 1 This is a schematic diagram of the structure of the vacuum coating equipment provided in a specific embodiment of the present invention;

[0051] Figure 2 This is a partial structural diagram of the vacuum coating equipment provided in a specific embodiment of the present invention. Figure 1 ;

[0052] Figure 3 This is a schematic diagram of the structure of the monitoring chip provided in a specific embodiment of the present invention;

[0053] Figure 4 This is a schematic diagram of the first shielding structure provided in a specific embodiment of the present invention;

[0054] Figure 5 This is a schematic diagram of the second shielding structure provided in a specific embodiment of the present invention;

[0055] Figure 6 This is a partial structural diagram of the vacuum coating equipment provided in a specific embodiment of the present invention. Figure 2 ;

[0056] Figure 7 This is a partial structural diagram of the vacuum coating equipment provided in a specific embodiment of the present invention. Figure 3 ;

[0057] Figure 8 This is a partial structural diagram of the vacuum coating equipment provided in a specific embodiment of the present invention. Figure 4 ;

[0058] Figure 9 This is a partial structural diagram of the vacuum coating equipment provided in a specific embodiment of the present invention. Figure 5 ;

[0059] Figure 10 This is a partial structural diagram of the vacuum coating equipment provided in a specific embodiment of the present invention. Figure 6 ;

[0060] Figure 11 This is a partial structural schematic diagram of a vacuum coating apparatus provided in other embodiments of the present invention. Figure 7 ;

[0061] Figure 12 This is a structural schematic diagram of a connector provided in another embodiment of the present invention.

[0062] In the picture:

[0063] 1. Surveillance camera; 11. Surveillance point group; 111. Surveillance point; 12. Circumferential limit groove;

[0064] 2. Light projection and light receiving unit;

[0065] 3. First shielding structure; 31. Second through hole; 32. Limiting slot;

[0066] 4. Second shielding structure; 41. Third through hole;

[0067] 5. Third drive mechanism; 51. Second translation drive mechanism; 52. First rotary transmission component;

[0068] 6. Monitoring screen drive mechanism; 61. Monitoring screen drive component; 62. Second rotary transmission component; 621. Insert rod; 63. Second gear transmission assembly; 631. Second gear; 632. Second gear ring; 64. Connecting component; 641. Support part; 642. Connecting part; 6421. Sliding slot; 6422. Circumferential limit block; 65. Support adjustment block; 66. Ball bearing;

[0069] 7. Protective cover drive mechanism; 71. Protective cover drive component; 72. Third rotary transmission component; 73. Third gear transmission assembly; 731. Third gear; 732. Third gear ring;

[0070] 8. First gear and rack assembly;

[0071] 9. Coated umbrella frame;

[0072] 10. Fourth drive mechanism; 101. Coated umbrella frame drive component; 102. Fourth rotary transmission component; 103. Fourth gear transmission assembly; 1031. Fourth gear; 1032. Fourth gear ring. Detailed Implementation

[0073] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0074] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0075] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0076] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0077] Figure 1 , Figure 2 , Figure 6 and Figure 9In the process, there are multiple light-emitting and light-receiving units 2, and multiple light-emitting and light-receiving groups are fixedly installed in the coating chamber. The monitoring sheet 1 is rotatably connected to the coating chamber through the monitoring sheet drive mechanism 6. The protective cover is rotatably connected to the coating chamber through the protective cover drive mechanism 7. The tray is detachably connected to the coating chamber.

[0078] Figure 7 In this process, there is one light-emitting and light-receiving unit 2, which is driven to translate by a second driving mechanism. Figure 8 In this system, there is one light-emitting and light-receiving group, which is driven by a third drive mechanism 5 to translate and / or rotate around a fixed axis.

[0079] Figure 1 , Figure 2 , Figure 5 , Figure 6 , Figure 8 and Figure 9 In the middle, the third through hole 41 is a long strip hole. Figure 7 In the middle, there are N third through holes 41, and the N third through holes 41 are set one-to-one with the N second through holes 31, where N is a positive integer greater than 1.

[0080] This invention provides a coating monitoring system. Among them, such as... Figure 1-3 and Figure 6-9 As shown, the coating monitoring system includes a monitoring plate 1, a monitoring point selection unit, and a light-emitting and light-receiving unit 2. The monitoring plate 1 includes multiple monitoring points 111 distributed radially and circumferentially. Under the action of the thin film deposition source, a thin film can be deposited at the monitoring point 111. The monitoring point selection unit includes a first through hole, which is used to selectively expose at least one monitoring point 111 to the action area of ​​the thin film deposition source. When the monitoring point 111 is exposed to the action area of ​​the thin film deposition source, the monitoring point 111 is in a monitored state. When the monitoring point 111 is not exposed to the action area of ​​the thin film deposition source, the monitoring point 111 is in a non-monitored state. The light-emitting and light-receiving unit 2 is used to project light onto the monitoring point 111 in the monitored state, and to receive and detect the light from the monitoring point 111.

[0081] In the following description, when it is mentioned that light is projected onto the monitoring point 111 and that light is received and detected from the monitoring point 111, it actually means that light is projected onto the thin film at the monitoring point 111 and that light is received and detected from the thin film at the monitoring point 111, whether transmitted or reflected.

[0082] When coating a workpiece, the coating monitoring system selectively exposes at least one monitoring point 111 to the working area of ​​the thin film deposition source through a first through hole. Simultaneously, the light-emitting and light-receiving unit 2 detects the film thickness at the monitoring point 111 exposed to the working area of ​​the thin film deposition source on the monitoring sheet 1. This allows the film thickness at the monitoring point 111 to indirectly reflect the film thickness on the workpiece, thereby facilitating the determination of whether the film thickness of the workpiece meets the expected film thickness. By setting multiple monitoring points 111 distributed radially and circumferentially along the monitoring sheet 1, the number of monitoring points 111 is effectively increased compared to the prior art, thus improving the utilization rate of the monitoring sheet 1. By setting a first through hole, at least one monitoring point 111 can be selectively exposed to the working area of ​​the thin film deposition source. It can be understood that the first through hole can allow each monitoring point 111 of the monitoring sheet 1 to be exposed to the working area of ​​the thin film deposition source in a predetermined or set order. Specifically, after the first through hole selectively exposes at least one monitoring point 111 to the working area of ​​the thin film deposition source and all of them are coated and the coating thickness is detected, the first through hole will selectively expose at least one of the remaining multiple monitoring points 111 to the working area of ​​the thin film deposition source and be coated in a predetermined or set order until all multiple monitoring points 111 of the monitoring sheet 1 are coated and the coating thickness is detected before the monitoring sheet 1 is disassembled and replaced. Therefore, compared with the existing technology that can only monitor the film thickness of the workpiece through a ring of monitoring points 111 on the monitoring plate 1, this coating monitoring system effectively improves the utilization rate of the monitoring plate 1, effectively reduces the replacement frequency of the monitoring plate 1, saves costs and manpower and resources, and thus effectively improves the working stability and efficiency of the vacuum coating equipment.

[0083] Understandably, the number of monitoring points 111 exposed by the first through hole each time can be set to one or more as needed. Specifically, as the number of monitoring points 111 exposed by the first through hole gradually increases, the diameter of the first through hole will also gradually increase.

[0084] Understandably, in Figure 1 In the figure, the thin film deposition source (not shown) is located below the coating umbrella frame.

[0085] Among them, such as Figure 2-9 As shown, the coating monitoring system also includes a first driving mechanism, and the monitoring point selection unit also includes a first shielding structure 3 and a second shielding structure 4 that are sequentially and spaced apart on the side of the monitoring sheet 1 near the thin film deposition source; the first driving mechanism can drive at least any two of the monitoring sheet 1, the first shielding structure 3 and the second shielding structure 4 to rotate around a fixed axis, so that the first shielding structure 3 and the second shielding structure 4 can cooperate to form a first through hole, and the fixed axis is collinear with the rotation axis of the monitoring sheet 1, the rotation axis of the first shielding structure 3 and the rotation axis of the second shielding structure 4.

[0086] Since the first through hole can selectively expose at least one monitoring point 111 to the working area of ​​the thin film deposition source, and the first driving mechanism can drive at least any two of the monitoring plate 1, the first shielding structure 3 and the second shielding structure 4 to rotate around a fixed axis, it can be understood that the relative position of the first through hole and the monitoring point 111 is not fixed.

[0087] After the first driving mechanism drives the first shielding structure 3 and / or the second shielding structure 4 to rotate around a fixed axis to form the first through hole, the first through hole can be driven to rotate around the fixed axis, or the monitoring piece 1 can be driven to rotate around the fixed axis, or both the first through hole and the monitoring piece 1 can be driven to rotate around the fixed axis. In all these ways, the first through hole can sequentially expose each monitoring point 111 on its circumference to the working area of ​​the thin film deposition source. After each monitoring point 111 on the circumference of the first through hole has been coated and the coating thickness has been detected, the first driving mechanism drives the first shielding structure 3 and / or the second shielding structure 4 to rotate around the fixed axis again to form the first through hole. It can be understood that the distribution position of the first through hole formed this time is different from that of the first through hole formed previously along the radial direction of the monitoring piece 1, so that the first through hole can sequentially expose each monitoring point 111 of the monitoring piece 1 to the working area of ​​the thin film deposition source in the expected or set order.

[0088] Specifically, such as Figure 2-9 As shown, the first shielding structure 3 has N second through holes 31, which are distributed radially at intervals along the first shielding structure 3. The first driving mechanism can drive at least any two of the monitoring sheet 1, the first shielding structure 3, and the second shielding structure 4 to rotate around a rotation axis, so that each second through hole 31 can sequentially become a first through hole. N is a positive integer greater than 1. By setting each second through hole 31 to sequentially become a first through hole, it can be understood that during the coating process, the first driving mechanism drives the first shielding structure 3 and / or the second shielding structure 4 to rotate around a rotation axis, so that only one of the N second through holes 31 can always expose the monitoring point 111 on the monitoring sheet 1 to the working area of ​​the thin film deposition source, and the N second through holes 31 are distributed radially at intervals along the first shielding structure 3, so that all monitoring points 111 on the monitoring sheet 1 can be effectively utilized. In this embodiment, as Figure 4 As shown, an example is provided by setting four second through holes 31.

[0089] Preferably, such as Figure 3As shown, the monitoring points 111 of the monitoring sheet 1 form N monitoring point groups 11. The N monitoring point groups 11 are distributed radially at intervals along the monitoring sheet 1, and each monitoring point group 11 includes multiple monitoring points 111 distributed circumferentially at intervals along the monitoring sheet 1. The N monitoring point groups 11 and N second through holes 31 are arranged in a one-to-one correspondence. This arrangement allows the first through holes to selectively expose at least one monitoring point 111 to the working area of ​​the thin film deposition source.

[0090] Specifically, such as Figure 4 , Figure 8 and Figure 9 As shown, N second through holes 31 are distributed at circumferential intervals along the first shielding structure 3. Or, as... Figure 7 As shown, N second through holes 31 are distributed on the same straight line, which is any line passing through the rotation center point of the first blocking structure 3. It can be understood that the fixed axis passes through the rotation center point of the first blocking structure 3.

[0091] More specifically, such as Figure 2 , Figure 6 , Figure 8 and Figure 9 As shown, when N second through holes 31 are distributed circumferentially along the first shielding structure 3, the second shielding structure 4 is provided with a third through hole 41. The length of the third through hole 41 extends radially along the second shielding structure 4, and each second through hole 31 can sequentially connect with the third through hole 41 to form a first through hole. The N second through holes 31 are distributed radially and circumferentially along the first shielding structure 3, so that the N second through holes 31 are not distributed on the same straight line. It can be understood that the same straight line is any line passing through the rotation center point of the first shielding structure 3. By setting the length direction of the third through hole 41 to extend radially along the second blocking structure 4, that is, the third through hole 41 is an elongated hole, the first driving mechanism drives the first blocking structure 3 and / or the second blocking structure 4 to rotate around a fixed axis, so that the third through hole 41 can communicate with any of the second through holes 31 to form a first through hole, so that the first through holes formed by the third through hole 41 and the N second through holes 31 have N selectable distribution positions, and the N selectable distribution positions are the positions of the N second through holes 31 respectively.

[0092] More specifically, such as Figure 7As shown, when N second through holes 31 are distributed on the same straight line, the second blocking structure 4 is provided with N third through holes 41, which are distributed at intervals along the circumference of the second blocking structure 4. The N third through holes 41 correspond one-to-one with the N second through holes 31, and the third through holes 41 can communicate with the second through holes 31 to form a first through hole. The N second through holes 31 are distributed at intervals along the radial direction of the first blocking structure 3 on the same straight line. By setting the N third through holes 41 at intervals along the circumference of the second blocking structure 4, the first driving mechanism drives the first blocking structure 3 and / or the second blocking structure 4 to rotate around a fixed axis, so that the third through holes 41 can communicate with the corresponding second through holes 31 to form a first through hole. The N distribution positions of the first through holes are the positions of the N third through holes 41. It can be understood that the same straight line is any line passing through the rotation center point of the first blocking structure 3.

[0093] For N second through holes 31 distributed circumferentially along the first shielding structure 3, and for N second through holes 31 distributed on the same straight line, after the first through hole is formed, the first shielding structure 3 and the second shielding structure 4 are driven to rotate synchronously around a fixed axis by the first driving mechanism, causing the first through hole to rotate around the fixed axis. Alternatively, the monitoring piece 1 is driven to rotate around the fixed axis by the first driving mechanism. Or, the first shielding structure 3 and the second shielding structure 4 are driven to rotate synchronously around the fixed axis by the first driving mechanism, and the monitoring piece 1 is also driven to rotate around the fixed axis. This ensures that each monitoring point 111 of the monitoring piece 1 is exposed to the working area of ​​the thin film deposition source.

[0094] Preferably, such as Figure 6-9 As shown, the second through-hole 31 is a tapered hole, with the larger end of the second through-hole 31 facing the second shielding structure 4 and the smaller end facing the monitoring plate 1. This allows the thin film deposition source to better deposit film onto the monitoring point 111 exposed by the second through-hole 31.

[0095] For the light-projecting and light-receiving unit 2, such as Figure 1 , Figure 2 , Figure 6 and Figure 9 As shown, the light-emitting and light-receiving unit 2 can be configured to include N light-emitting and light-receiving groups. Each of the N light-emitting and light-receiving groups corresponds to one of the N second through-holes 31. Each light-emitting and light-receiving group includes a light output transmission head and a light receiving transmission head. The light output transmission head transmits the light emitted by the light source to the monitoring chip 1, and the light receiving transmission head transmits the light reflected or transmitted from the monitoring chip 1 to the detector. That is, each second through-hole 31 corresponds to one light-emitting and light-receiving group. When any second through-hole 31 becomes the first through-hole, the corresponding light-emitting and light-receiving group, in conjunction with the light source and detector, detects the film thickness at the corresponding monitoring point 111 on the monitoring chip 1.

[0096] Furthermore, the light-projecting and light-receiving unit 2 can be configured to include N light sources and N detectors, with each light-projecting and light-receiving group corresponding to one light source and one detector. Alternatively, the light-projecting and light-receiving unit 2 can also include one light source and one detector, with the light output transmission heads of the N light-projecting and light-receiving groups sharing one light source and the light receiving transmission heads of the N light-projecting and light-receiving groups sharing one detector. Both the light source and the detector are fixedly connected to the coating chamber. Alternatively, both the light source and the detector are fixedly connected to other housings outside the coating chamber via a connecting structure. This configuration allows for the sequential detection of the film thickness at multiple monitoring points 111 of the monitoring sheet 1 according to a predetermined or set order, resulting in high detection stability and high detection accuracy for the coating monitoring system.

[0097] Specifically, when the light-emitting and light-receiving unit 2 includes N light-emitting and light-receiving groups, and the N light-emitting and light-receiving groups and N second through holes 31 are arranged in a one-to-one correspondence, and the light-emitting and light-receiving unit 2 includes N light sources and N detectors, and each light-emitting and light-receiving group corresponds to one light source and one detector, the light source emits light, and the light output transmission head is connected to the output end of the light source to transmit the light emitted by the light source to the monitoring chip 1; the detector receives light, and the light receiving transmission head is connected to the input end of the detector to transmit the light reflected or transmitted by the monitoring chip 1 to the detector.

[0098] More specifically, such as Figure 1 , Figure 2 , Figure 6 and Figure 9 As shown, along the extension direction of the fixed axis, the light output conduction head and the light receiving conduction head can be evenly distributed on the side of the monitoring sheet 1 away from the first blocking structure 3 and the second blocking structure 4. In this case, the light received by the detector is the light reflected by the thin film of the monitoring point 111 on the monitoring sheet 1. Preferably, the light output conduction head and the light receiving conduction head are integrated into a single structure. As an alternative, along the extension direction of the fixed axis, the light output conduction head and the light receiving conduction head can also be arranged on the side of the second blocking structure 4 away from the monitoring sheet 1 and the first blocking structure 3.

[0099] More specifically, along the extension direction of the fixed axis, the light output transmission head can also be positioned on the side of the monitoring sheet 1 away from the first blocking structure 3 and the second blocking structure 4, and the light receiving transmission head can be positioned on the side of the second blocking structure 4 away from the first blocking structure 3 and the monitoring sheet. In this case, the light received by the detector is the light transmitted by the thin film on the monitoring point 111 of the monitoring sheet 1. As an alternative, along the extension direction of the fixed axis, the light receiving transmission head can also be positioned on the side of the monitoring sheet away from the first blocking structure 3 and the second blocking structure 4, and the light output transmission head can be positioned on the side of the second blocking structure 4 away from the first blocking structure 3 and the monitoring sheet 1.

[0100] More specifically, a first controller is provided, which can control any light source and its corresponding detector to be in an active state, and control the remaining light sources and detectors to be in an inactive state. The first controller is electrically or communicatively connected to multiple light sources and multiple detectors. This is so that when any second through hole 31 becomes a first through hole, the corresponding light source and detector cooperate to detect the film thickness on the monitoring point 111 in the corresponding area on the monitoring sheet 1.

[0101] Among them, such as Figure 7 and Figure 8 As shown, the light-emitting and light-receiving unit 2 can also be configured to include a light-emitting and light-receiving group, which is driven to move by a second driving mechanism or a third driving mechanism 5. The light-emitting and light-receiving group includes a light output transmission head and a light receiving transmission head. The light output transmission head transmits light emitted from the light source to the monitoring sheet 1, and the light receiving transmission head transmits light reflected or transmitted from the monitoring sheet 1 to the detector. Further, the light-emitting and light-receiving unit 2 also includes a light source and a detector; the light output transmission head is connected to the output end of the light source and transmits light emitted from the light source to the monitoring sheet 1; the light receiving transmission head is connected to the input end of the detector and transmits light reflected or transmitted from the monitoring sheet 1 to the detector; the light output transmission head and the light receiving transmission head are integrated into a single structure and are distributed on the side of the monitoring sheet away from the first blocking structure 3 and the second blocking structure 4. It is understood that the light output transmission head and the light receiving transmission head are a single structure, which can also sequentially detect the film thickness of multiple monitoring points 111 of the monitoring sheet 1 according to a predetermined or set order.

[0102] Specifically, such as Figure 7 and Figure 8 As shown, when the light-projecting and light-receiving unit 2 includes a light-projecting and light-receiving group, and N second through holes 31 are distributed on the same straight line, and the straight line is any line passing through the rotation center point of the first blocking structure 3, the light-projecting and light-receiving group is driven to move by the second driving mechanism or the third driving mechanism 5. Figure 8 As shown, when the light-emitting and light-receiving unit 2 includes a light-emitting and light-receiving group, and N second through holes 31 are distributed at circumferential intervals along the first shielding structure 3, the third driving mechanism 5 is used to drive the light-emitting and light-receiving group to move.

[0103] The second driving mechanism includes a first translation driving mechanism, with the light-emitting and light-receiving group connected to the output end of the first translation driving mechanism. The first translation driving mechanism can drive the light-emitting and light-receiving group to translate. Specifically, the first translation driving mechanism includes a first translation driving component, with the light-emitting and light-receiving group connected to the output end of the first translation driving component. After the first driving mechanism drives the first blocking structure 3 and / or the second blocking structure 4 to rotate around a fixed axis to form a first through hole, the first driving mechanism then drives the first blocking structure 3 and the second blocking structure 4 to rotate synchronously around the fixed axis, and the first translation driving component drives the light-emitting and light-receiving group to translate, so that the light-emitting and light-receiving group is directly opposite its second through hole 31. At this time, the first driving mechanism then drives the first through hole to rotate around the fixed axis, so that the monitoring points 111 on the monitoring sheet 1 corresponding to the circumference of the second through hole 31 can all be coated; when the monitoring points 111 on the monitoring sheet 1 corresponding to the second through hole 31 are... After all the monitoring points 111 on the circumference are coated, the first driving mechanism drives the first shielding structure 3 and / or the second shielding structure 4 to rotate around a fixed axis, causing one of the remaining multiple second through holes 31 to form a first through hole. Then, the first driving mechanism drives the first shielding structure 3 and the second shielding structure 4 to rotate synchronously around the fixed axis, and the first translational driving member drives the light-emitting and light-receiving group to translate, so that the light-emitting and light-receiving group is directly opposite a corresponding second through hole 31. Thus, the film thickness on multiple monitoring points 111 of the monitoring sheet 1 can be detected by a single light-emitting and light-receiving unit 2. The movement path of the light-emitting and light-receiving group driven by the first translational driving member is parallel to the monitoring sheet 1 and perpendicular to and intersects the fixed axis.

[0104] Specifically, the first translational drive is a linear motor located in the coating chamber, and the light-emitting and light-receiving assembly is located at the output end of the linear motor. As an alternative, such as... Figure 7 As shown, the first translation drive is a motor disposed in the coating chamber. The first translation drive mechanism also includes a first gear and rack assembly 8, with the motor connected to the gear transmission of the first gear and rack assembly 8, and the light-emitting and light-receiving group connected to the rack of the first gear and rack assembly 8. As an alternative, the first translation drive is an electric actuator.

[0105] Among them, such as Figure 8 As shown, the third driving mechanism 5 includes a rotary driving mechanism disposed in the coating chamber and a second translational driving mechanism 51 connected to the output end of the rotary driving mechanism. The light-emitting and light-receiving group is connected to the output end of the second translational driving mechanism 51. The rotary driving mechanism can drive the second translational driving mechanism 51 and the light-emitting and light-receiving group to rotate synchronously around a fixed axis, and the second translational driving mechanism 51 can drive the light-emitting and light-receiving group to translate. With this configuration, for both the case where the N second through holes 31 are distributed circumferentially along the first shielding structure 3 and the case where the N second through holes 31 are distributed on the same straight line, the film thickness on multiple monitoring points 111 of the monitoring sheet 1 can be detected by a single light-emitting and light-receiving unit 2.

[0106] Specifically, such as Figure 8 As shown, the rotary drive mechanism includes a rotary drive component disposed in the coating chamber and a first rotary transmission component 52. The output shaft of the rotary drive component is connected to the input end of the first rotary transmission component 52, and the output end of the first rotary transmission component 52 is connected to a second translational drive mechanism 51. The rotary drive component can drive the first rotary transmission component 52, the second translational drive mechanism 51, and the light-emitting and light-receiving group to rotate synchronously around a fixed axis. It can be understood that the first rotary transmission component 52 is a ring-shaped component. Specifically, the rotary drive component is a motor. Preferably, the rotary drive component is located outside the coating chamber, and the first rotary transmission component 52 is located inside the coating chamber.

[0107] More specifically, the rotary drive mechanism further includes a first gear transmission assembly, which comprises a first gear and a first gear ring. The output shaft of the rotary drive is connected to the first gear, and the outer circumference of the first gear ring meshes with the first gear. The first gear ring is rotatably connected to the coating chamber and circumferentially connected to the first rotary transmission member 52. The rotary drive member drives the first gear and the first gear ring to mesh, thereby driving the first rotary transmission member 52, the second translational drive mechanism 51, and the light-emitting and light-receiving group to rotate synchronously around a fixed axis. It can be understood that the central axis and rotation center line of the first rotary transmission member 52 are both collinear with the fixed axis.

[0108] More specifically, such as Figure 8 As shown, the second translation drive mechanism 51 includes a second translation drive member disposed at the output end of the rotary drive mechanism. The output end of the second translation drive member is connected to the light-emitting and light-receiving group for transmission, and the second translation drive member can drive the light-emitting and light-receiving group to translate. Specifically, the second translation drive member is connected to the output end of the first rotary transmission member 52. The movement path of the light-emitting and light-receiving group driven by the second translation drive member is parallel to the monitoring plate 1 and perpendicular to and intersects with the fixed axis.

[0109] More specifically, the second translational drive is a linear motor connected to the output end of the first rotary transmission member 52, and the light-emitting and light-receiving group is disposed at the output end of the linear motor. As an alternative, the second translational drive is a motor connected to the output end of the first rotary transmission member 52, and the second translational drive mechanism 51 further includes a second gear and rack assembly, with the motor and the second gear and rack assembly connected by gear transmission, and the light-emitting and light-receiving group connected to the rack of the second gear and rack assembly. As an alternative, the second translational drive is an electric actuator.

[0110] Specifically, the first driving mechanism can drive the first shielding structure 3 and / or the second shielding structure 4 to rotate around a fixed axis to form a first through hole. The first driving mechanism can also drive the monitoring piece 1 to rotate around a fixed axis; and / or, the first driving mechanism can drive the first shielding structure 3 and the second shielding structure 4 to rotate synchronously around a fixed axis. Both of these can ensure that the first through hole sequentially exposes each monitoring point 111 on its circumference to the working area of ​​the thin film deposition source.

[0111] The following is a specific implementation of the first drive mechanism, such as Figure 1 , Figure 2 , Figure 6 and Figure 9 As shown, the exemplary configuration includes a first shielding structure 3 comprising a tray, a second shielding structure 4 comprising a protective cover, N second through holes 31 disposed on the tray, and the tray being detachably disposed within the coating chamber, and a third through hole 41 disposed on the protective cover; the number of light-emitting and light-receiving groups is multiple, and all multiple light-emitting and light-receiving groups are fixedly disposed within the coating chamber. Specifically as follows:

[0112] Among them, such as Figure 2 and Figure 3 As shown, the first driving mechanism includes a monitoring plate driving mechanism 6 and a protective cover driving mechanism 7 disposed in the coating chamber. The monitoring plate driving mechanism 6 can drive the monitoring plate 1 to rotate around a fixed axis, and the protective cover driving mechanism 7 can drive the protective cover to rotate around a fixed axis. By driving the protective cover to rotate around the fixed axis through the protective cover driving mechanism 7, the protective cover and the tray can form a first through hole. By driving the monitoring plate 1 to rotate around the fixed axis through the monitoring plate driving mechanism 6, each monitoring point 111 on the monitoring plate 1 can be exposed to the working area of ​​the thin film deposition source through the first through hole.

[0113] Among them, such as Figure 1-3 As shown, the monitoring chip drive mechanism 6 includes a monitoring chip drive component 61 disposed in the coating chamber and a second rotary transmission component 62. The output shaft of the monitoring chip drive component 61 is connected to the input end of the second rotary transmission component 62, and the output end of the second rotary transmission component 62 is detachably connected to the monitoring chip 1. The monitoring chip drive component 61 can drive the second rotary transmission component 62 and the monitoring chip 1 to rotate synchronously around a fixed axis. It can be understood that the second rotary transmission component 62 is a ring-shaped component. Specifically, the monitoring chip drive component 61 is a motor. Preferably, the monitoring chip drive component 61 is located outside the coating chamber, and the second rotary transmission component 62 is located inside the coating chamber.

[0114] Specifically, such as Figure 1-3As shown, the monitoring chip drive mechanism 6 also includes a second gear transmission assembly 63, which includes a second gear 631 and a second gear ring 632. The output shaft of the monitoring chip drive member 61 is connected to the second gear 631. The outer circumference of the second gear ring 632 meshes with the second gear 631. The second gear ring 632 is rotatably connected to the coating chamber and circumferentially connected to the second rotary transmission member 62. The monitoring chip drive member 61 drives the second gear 631 and the second gear ring 632 to mesh, thereby driving the second rotary transmission member 62 and the monitoring chip 1 to rotate synchronously around a fixed axis. It can be understood that the central axis and rotation center line of the second rotary transmission member 62 are both collinear with the fixed axis.

[0115] Among them, such as Figure 9-12 As shown, the monitoring chip drive mechanism 6 also includes a connector 64. One end of the connector 64 is detachably connected to the monitoring chip 1, and the other end is slidably connected to the second rotary transmission component 62 along the extension direction of the fixed axis. The connector 64 and / or the tray are detachably connected to a support adjustment structure, which is distributed between the connector 64 and the tray. The support adjustment structure can support the connector 64 along the extension direction of the fixed axis and can adjust the distance between the monitoring chip 1 and the tray along the extension direction of the fixed axis. During the rotation of the monitoring chip 1 around the fixed axis, the support adjustment structure can support the connector 64, allowing the connector 64 and the monitoring chip 1 to rotate smoothly and synchronously around the fixed axis. Furthermore, by replacing the support adjustment structure with different specifications, the distance between the monitoring chip 1 and the tray along the extension direction of the fixed axis can be adjusted to avoid mutual friction between the monitoring chip 1 and the tray, thus preventing damage to the monitoring chip 1 and / or the tray. This effectively extends the service life of the monitoring chip 1 and the tray and effectively prevents wear on the coating layer at the monitoring point 111 of the monitoring chip 1, thereby further improving the detection accuracy of the coating monitoring system for film thickness. Firstly, it improves the accuracy of the measurement. Secondly, if the support adjustment structure is worn after the monitoring film drive mechanism 6 has been running for a period of time, causing the gap between the monitoring film 1 and the tray to be substandard, for example, when the monitoring film 1 and the tray are about to contact, only the support adjustment structure needs to be replaced, thereby effectively reducing the cost of measuring film thickness. Thirdly, when replacing the support adjustment structure, since the tray is detachably mounted on the support frame, when the tray is removed from the support frame, it simultaneously drives the connecting piece 64 and the monitoring film 1 away from the second rotary transmission piece 62, facilitating the replacement of the support adjustment structure and thus effectively improving the efficiency of replacing the support adjustment structure.

[0116] Specifically, such as Figure 9 , Figure 10 and 12As shown, the support adjustment structure includes a support adjustment block 65, which is detachably disposed on the connector 64 and / or the tray, and distributed between the connector 64 and the tray. Along the extension direction of the fixed axis, one end of the support adjustment block 65 is used to abut against one of the connector 64 and the tray, and the other end is used to connect to the other of the connector 64 and the tray. With this configuration, the support adjustment block 65 can both adjust the distance between the tray and the monitoring panel 1, and also support the connector 64 and the monitoring panel 1.

[0117] Specifically, along the extension direction of the fixed axis, one end of the support adjustment block 65 is used to abut against one of the connector 64 and the tray 1, and the other end is used for threaded connection, snap-fit, or plug-in connection to the other of the connector 64 and the tray. The support adjustment block is detachably mounted on the connector 64 and / or the tray through threaded connection, snap-fit, or plug-in connection. Figure 9 and Figure 10 As shown, an exemplary configuration is provided where the support adjustment block 65 is inserted into the tray.

[0118] Specifically, when the ambient temperature of the support adjustment block 65 is high, a threaded connection or snap-fit ​​connection is preferred to avoid the temperature affecting the connection method of the support adjustment block 65. When the ambient temperature of the support adjustment block 65 is low, a threaded connection, snap-fit ​​connection, or plug-in connection can be used.

[0119] More specifically, the support adjustment block 65 is ring-shaped. Alternatively, there may be multiple support adjustment blocks 65, which are distributed at intervals along the circumference of the tray. Both methods can support the connector 64 on the tray and adjust the distance between the monitoring plate 1 and the tray.

[0120] Understandably, when the support adjustment block 65 is annular, one end of the support adjustment block 65 abuts against the connector 64, and the other end is detachably connected to the tray; or, one end of the support adjustment block 65 abuts against the tray, and the other end is detachably connected to the connector 64. When there are multiple support adjustment blocks 65, one end of each of the multiple support adjustment blocks 65 abuts against the connector 64, and the other end is detachably connected to the tray; or, one end of each of the multiple support adjustment blocks 65 abuts against the tray, and the other end is detachably connected to the connector 64; or, one end of a portion of the multiple support adjustment blocks 65 abuts against the connector 64, and the other end is detachably connected to the tray, while one end of the remaining portion abuts against the tray, and the other end is detachably connected to the connector 64. The detachable connection method can be threaded connection, snap-fit, or plug-in connection.

[0121] Preferably, the hardness of the support adjustment block 65 is less than the hardness of the connector 64, and less than the hardness of the tray. This arrangement prevents the support adjustment block 65 from damaging the connector 64 and / or the tray during assembly, and also prevents damage during operation. It is understood that the hardness of the connector 64 and the tray may be the same or different. For example, the connector 64 is made of copper, the tray is supported by stainless steel, and the outer surfaces of both the connector 64 and the tray are plated with a cadmium layer or other hardening coating to increase the service life of the connector 64 and the tray.

[0122] Preferably, the end face of the support adjusting block 65 that abuts against one of the connector 64 and the tray is spherical. This reduces the contact area between the support adjusting block 65 and the connector 64 or the tray, slowing down the wear rate of the support adjusting block 65 and effectively extending its service life. Alternatively, the end face of the support adjusting block 65 that abuts against one of the connector 64 or the tray can be flat, etc. The key is to ensure the support performance and spacing adjustment performance of the support adjusting block 65. Figure 10 As shown, the exemplary configuration of the support adjustment block 65 has a flat end face for abutting against one of the connector 64 and the tray.

[0123] As an alternative, such as Figure 11 As shown, the support adjustment structure includes multiple balls 66, which are spaced apart circumferentially along the tray. The balls 66 are detachably mounted on the connector 64 and / or the tray, and are distributed between the connector 64 and the tray. Along the extension direction of the fixed axis, one end of each ball 66 abuts against one of the connector 64 and the tray, and the other end connects to the other of the connector 64 and the tray. The cooperation of the multiple balls 66 can adjust the distance between the tray and the monitoring plate 1, and also support the connector 64 and the monitoring plate 1. Furthermore, when a ball 66 abuts against one of the connector 64 and the tray, the contact area is small, thus effectively reducing the wear rate of the ball 66.

[0124] Specifically, such as Figure 11 As shown, along the extension direction of the fixed axis, one end of the ball 66 is used to abut against one of the connector 64 and the tray, and the other end is inserted into the other of the connector 64 and the tray. This achieves a detachable connection of the ball 66 and allows the ball 66 to roll, thereby further reducing the wear rate of the ball 66; secondly, the connection method of the ball 66 is not affected by the ambient temperature.

[0125] More specifically, such as Figure 11As shown, taking a limiting slot 32 on the tray as an example, the limiting slot 32 is an annular slot, and multiple balls 66 are partially inserted into the annular slot along the extension direction of the fixed axis. As an alternative, there can be multiple limiting slots 32, distributed circumferentially on the tray; each limiting slot 32 contains at least one ball 66, and the ball 66 is partially inserted into the annular slot along the extension direction of the fixed axis. Both methods limit the position of the multiple balls 66 and allow them to roll.

[0126] Preferably, such as Figure 11 As shown, the limiting slot 32 is a stepped or conical slot, and the width of the limiting slot 32 gradually increases from the bottom to the opening. This allows the limiting slot 32 to accommodate ball bearings 66 of different diameters, thereby adjusting the distance between the monitoring plate 1 and the tray. Alternatively, the width of the limiting slot 32 can be set to be greater than the diameter of the ball bearing 66. This also allows the limiting slot 32 to accommodate ball bearings 66 of different diameters, achieving the same purpose of adjusting the distance between the monitoring plate 1 and the tray. Figure 11 As shown, the preferred limiting slot 32 is a conical slot.

[0127] Specifically, such as Figure 9 , Figure 10 and Figure 12 As shown, the connector 64 includes a supporting portion 641 and a connecting portion 642 connected to each other. The connecting portion 642 is slidably connected to the second rotary transmission member 62 along the extension direction of the fixed axis. The monitoring piece 1 can be inserted into the outer periphery of the connecting portion 642 along the extension direction of the fixed axis, so that the supporting portion 641 supports the monitoring piece 1. This arrangement allows the monitoring piece 1 and the second rotary transmission member 62 to be detachably connected via the connector 64, facilitating assembly and disassembly, and also facilitating the replacement of the support and adjustment structure. Preferably, the supporting portion 641 and the connecting portion 642 of the connector 64 are integrally formed. This can improve the structural strength and support performance of the connector 64, and reduce the number of parts.

[0128] Specifically, such as Figure 9 , Figure 10 and Figure 12As shown, one of the connecting portion 642 and the second rotary transmission member 62 is provided with a sliding slot 6421 extending along the extension direction of the fixed axis, and the other of the connecting portion 642 and the second rotary transmission member 62 can be partially inserted into the sliding slot 6421. Specifically, the other of the connecting portion 642 and the second rotary transmission member 62 is provided with a plug 621, which can be inserted into the sliding slot 6421 along the extension direction of the fixed axis. This allows the connecting member 64 to be slidably connected to the second rotary transmission member 62 along the extension direction of the fixed axis. For example, the plug 621 is provided on the second rotary transmission member 62, and the sliding slot 6421 is provided on the connecting portion 642. The plug 621 and the second rotary transmission member 62 can be fixedly connected by welding or by a detachable connection by threaded connection.

[0129] Preferably, such as Figure 9 , Figure 10 and Figure 12 As shown, there are multiple insertion rods 621 and multiple sliding slots 6421, with each insertion rod 621 and sliding slot 6421 corresponding to another. The sliding slots 6421 are distributed at intervals along the circumference of the connector 64. This further improves the smoothness of the synchronous rotation of the drive connector 64 and the monitoring piece 1 around a fixed axis. For example, as... Figure 12 As shown, the example is a 6421 with six sliding slots.

[0130] Specifically, such as Figure 3 and Figure 12 As shown, one of the inner peripheral wall of the monitoring piece 1 and the outer peripheral wall of the connecting part 642 is recessed with a circumferential limiting groove 12, and the other is protruding with a circumferential limiting block 6422. The circumferential limiting block 6422 can be inserted and engaged with the circumferential limiting groove 12 along the extension direction of the fixed axis. With this configuration, during the synchronous rotation of the monitoring piece 1 and the connecting part 64 around the fixed axis by the monitoring piece drive member 61, the rotation of the monitoring piece 1 relative to the connecting part 64 is prevented. For example, in this embodiment, the inner peripheral wall of the monitoring piece 1 is recessed with a circumferential limiting groove 12, and the outer peripheral wall of the connecting part 642 is protruding with a circumferential limiting block 6422. Alternatively, the inner peripheral wall of the monitoring piece 1 can be provided with a protruding circumferential limiting block, and the outer peripheral wall of the connecting part 642 can be recessed with a circumferential limiting groove.

[0131] Among them, such as Figure 1 and Figure 2As shown, the protective cover drive mechanism 7 includes a protective cover drive member 71 disposed in the coating chamber and a third rotary transmission member 72. The output shaft of the protective cover drive member 71 is drively connected to the input end of the third rotary transmission member 72, and the output end of the third rotary transmission member 72 is detachably connected to the protective cover. The protective cover drive member 71 can drive the third rotary transmission member 72 and the protective cover to rotate synchronously around a fixed axis. It can be understood that the third rotary transmission member 72 is a ring-shaped component. Specifically, the protective cover drive member 71 is a motor. Preferably, the protective cover drive member 71 is distributed outside the coating chamber, and the third rotary transmission member 72 is distributed inside the coating chamber.

[0132] Specifically, such as Figure 1 and Figure 2 As shown, the protective cover drive mechanism 7 also includes a third gear transmission assembly 73, which includes a third gear 731 and a third gear ring 732. The output shaft of the protective cover drive member 71 is connected to the third gear 731, and the outer circumference of the third gear ring 732 meshes with the third gear 731. The third gear ring 732 is rotatably connected to the coating chamber and circumferentially connected to the third rotary transmission member 72. The protective cover drive member 71 drives the third gear 731 and the third gear ring 732 to mesh, thereby driving the third rotary transmission member 72 and the protective cover to rotate synchronously around a fixed axis. It can be understood that the central axis and rotation center line of the third rotary transmission member 72 are both collinear with the fixed axis.

[0133] The present invention also provides a vacuum coating apparatus, including a coating chamber and a thin film deposition source, wherein the thin film deposition source is disposed in the coating chamber, and further includes the aforementioned coating monitoring system. By adopting the aforementioned coating monitoring system, the utilization rate of the monitoring plate 1 is effectively improved, the replacement frequency of the monitoring plate 1 is effectively reduced, and costs and manpower and resources are saved, thereby effectively improving the working stability and efficiency of the vacuum coating apparatus.

[0134] Specifically, such as Figure 1 As shown, the vacuum coating equipment also includes a coating umbrella frame 9, which is spaced apart on the outer periphery of the structure formed by the monitoring plate 1, the first shielding structure 3 and the second shielding structure 4. The coating umbrella frame 9 is used to set the workpiece to be coated.

[0135] More specifically, such as Figure 1As shown, the vacuum coating equipment also includes a fourth drive mechanism 10. The fourth drive mechanism 10 includes a coating umbrella frame drive component 101, a fourth rotary transmission component 102, and a fourth gear transmission assembly 103. The fourth gear transmission assembly 103 includes a meshing fourth gear 1031 and a fourth gear ring 1032. The coating umbrella frame drive component 101 is disposed in the coating chamber, and its output shaft is drively connected to the fourth gear 1031. The fourth gear ring 1032 is rotatably connected to the coating chamber and detachably connected to the fourth rotary transmission component 102. The fourth rotary transmission component 102 is also connected to the coating umbrella frame 9. The central axis and rotation center line of the coating umbrella frame 9 are both collinear with the fixed axis. This arrangement enables the coating umbrella frame 9 to rotate around the fixed axis. Specifically, the coating umbrella frame drive component 101 is a motor. Preferably, the coating umbrella frame drive component 101 is located outside the coating chamber, while the fourth rotary transmission component 102 and the fourth gear transmission assembly 103 are both located inside the coating chamber. The fourth rotary transmission component 102 is detachably or fixedly connected to the coated umbrella frame 9.

[0136] The present invention also provides a coating monitoring method for implementation in the coating monitoring system described above. The multiple monitoring points 111 of the monitoring sheet 1 form N monitoring point groups 11. The N monitoring point groups 11 are distributed radially at intervals along the monitoring sheet 1. Each monitoring point group 11 includes multiple monitoring points 111 distributed circumferentially at intervals along the monitoring sheet 1.

[0137] The coating monitoring method includes:

[0138] Before conducting coating inspection:

[0139] S100 controls the first through hole to be distributed on the circumference of any one of the N monitoring point groups 11.

[0140] Specifically, the first driving mechanism drives at least two of the monitoring plate 1, the first shielding structure 3 and the second shielding structure 4 to rotate around a fixed axis, so that the first shielding structure 3 and the second shielding structure 4 form a first through hole, and the first through hole is distributed on the circumference of any one of the N monitoring point groups 11.

[0141] During the coating inspection process:

[0142] S200: Control the first through hole to selectively expose at least one monitoring point 111 in the corresponding monitoring point group 11 to the working area of ​​the thin film deposition source; control the thin film deposition source to deposit a film on each of the exposed monitoring points 111; control the light-emitting and light-receiving unit 2 to detect the film thickness of each of the exposed monitoring points 111.

[0143] Specifically, the first driving mechanism drives the first shielding structure 3 and the second shielding structure 4 to rotate synchronously around a fixed axis; and / or, the first driving structure drives the monitoring plate 1 to rotate around a fixed axis. This allows the first through-hole to selectively expose at least one monitoring point 111 in the corresponding monitoring point group 11 to the working area of ​​the thin film deposition source.

[0144] Once all monitoring points 111 in the corresponding monitoring point group 11 have been coated and their coating thickness has been detected, step S300 is executed.

[0145] S300 controls the first through hole to be distributed on the circumference of another location in the N monitoring point group 11.

[0146] Specifically, the first driving mechanism drives at least two of the monitoring plate 1, the first shielding structure 3, and the second shielding structure 4 to rotate around a fixed axis, so that the first shielding structure 3 and the second shielding structure 4 form a first through hole. It can be understood that the radial distribution position of the first through hole formed this time along the first shielding structure 3 is different from the radial distribution position of the previously formed first through hole along the first shielding structure 3.

[0147] Preferably, the first through holes are distributed sequentially along the radial direction of the first shielding structure 3 on the circumference of the N monitoring point groups 11.

[0148] S400: Control the first through hole to selectively expose at least one monitoring point 111 in the corresponding monitoring point group 11 to the working area of ​​the thin film deposition source; control the thin film deposition source to deposit a film on each of the exposed monitoring points 111; control the light-emitting and light-receiving unit 2 to detect the film thickness of each of the exposed monitoring points 111.

[0149] Specifically, the first driving mechanism drives the first shielding structure 3 and the second shielding structure 4 to rotate synchronously around a fixed axis; and / or, the first driving structure drives the monitoring plate 1 to rotate around a fixed axis. This allows the first through-hole to selectively expose at least one monitoring point 111 in the corresponding monitoring point group 11 to the working area of ​​the thin film deposition source.

[0150] Once all monitoring points 111 in the corresponding monitoring point group 11 have been coated and the coating thickness has been detected, return to step S300.

[0151] After all N monitoring point groups 11 of the monitoring film 1 have been coated, step S500 is executed.

[0152] S500, disassemble and replace the monitoring chip 1.

[0153] By using this coating monitoring method to control the aforementioned coating monitoring system, the working stability and efficiency of the vacuum coating equipment can be effectively improved.

[0154] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A coating monitoring system, characterized in that, include: The monitoring sheet (1) includes multiple monitoring points (111) distributed radially and circumferentially, and a thin film can be deposited at the monitoring points (111) under the action of the thin film deposition source. A monitoring point selection unit includes a first through hole, which is used to selectively expose at least one monitoring point (111) to the working area of ​​the thin film deposition source; when the monitoring point (111) is exposed to the working area of ​​the thin film deposition source, the monitoring point (111) is in a monitored state, and when the monitoring point (111) is not exposed to the working area of ​​the thin film deposition source, the monitoring point (111) is in a non-monitored state. The light-projecting and light-receiving unit (2) is used at least to project light onto the monitoring point (111) in the monitored state, and to receive and detect light from the monitoring point (111).

2. The coating monitoring system according to claim 1, characterized in that, The coating monitoring system also includes a first driving mechanism, and the monitoring point selection unit also includes a first shielding structure (3) and a second shielding structure (4) that are sequentially and spaced apart on the side of the monitoring piece (1) near the thin film deposition source. The first driving mechanism can drive at least two of the monitoring chip (1), the first shielding structure (3) and the second shielding structure (4) to rotate around a fixed axis so that the first shielding structure (3) and the second shielding structure (4) can cooperate to form the first through hole. The fixed axis is collinear with the rotation axis of the monitoring chip (1), the rotation axis of the first shielding structure (3) and the rotation axis of the second shielding structure (4).

3. The coating monitoring system according to claim 2, characterized in that, The first shielding structure (3) is provided with N second through holes (31). The N second through holes (31) are distributed radially at intervals along the first shielding structure (3). The first driving mechanism can drive at least two of the monitoring plate (1), the first shielding structure (3) and the second shielding structure (4) to rotate around the rotation axis so that each second through hole (31) can become the first through hole in sequence. N is a positive integer greater than 1.

4. The coating monitoring system according to claim 3, characterized in that, N second through holes (31) are distributed at circumferential intervals along the first shielding structure (3); The second shielding structure (4) is provided with a third through hole (41), the length of which extends radially along the second shielding structure (4), and each second through hole (31) can sequentially communicate with the third through hole (41) to form the first through hole.

5. The coating monitoring system according to claim 3, characterized in that, N second through holes (31) are distributed on the same straight line, which is any line passing through the rotation center point of the first shielding structure (3); The second shielding structure (4) is provided with N third through holes (41), and the N third through holes (41) are distributed at intervals along the circumference of the second shielding structure (4); N third through holes (41) are provided in a one-to-one correspondence with N second through holes (31), and the third through holes (41) can communicate with the second through holes (31) to form the first through hole.

6. The coating monitoring system according to any one of claims 3-5, characterized in that, The light-emitting and light-receiving unit (2) includes a light-emitting and light-receiving group, which includes a light output transmission head and a light receiving transmission head. The light output transmission head is used to transmit the light emitted by the light source to the monitoring chip (1), and the light receiving transmission head is used to transmit the light reflected or transmitted by the monitoring chip (1) to the detector. The number of light-emitting and light-receiving groups is N, and the N light-emitting and light-receiving groups are arranged in a one-to-one correspondence with the N second through holes (31).

7. The coating monitoring system according to claim 3, characterized in that, N second through holes (31) are distributed on the same straight line, which is any line passing through the rotation center point of the first shielding structure (3); The light-emitting and light-receiving unit (2) includes a light-emitting and light-receiving group, which includes a light output transmission head and a light receiving transmission head. The light output transmission head is used to transmit the light emitted by the light source to the monitoring chip (1), and the light receiving transmission head is used to transmit the light reflected or transmitted by the monitoring chip (1) to the detector. The coating monitoring system further includes a second driving mechanism, which includes a first translation driving mechanism. The light-emitting and light-receiving group is connected to the output end of the first translation driving mechanism, and the first translation driving mechanism can drive the light-emitting and light-receiving group to translate.

8. The coating monitoring system according to any one of claims 3-5, characterized in that, The coating monitoring system further includes a third drive mechanism (5), which includes a rotary drive mechanism disposed in the coating chamber and a second translation drive mechanism (51) connected to the output end of the rotary drive mechanism. The light-emitting and light-receiving unit (2) includes a light-emitting and light-receiving group, which includes a light output transmission head and a light receiving transmission head. The light output transmission head is used to transmit the light emitted by the light source to the monitoring chip (1), and the light receiving transmission head is used to transmit the light reflected or transmitted by the monitoring chip (1) to the detector. The light-emitting and light-receiving group is connected to the output end of the second translation drive mechanism (51). The rotation drive mechanism can drive the second translation drive mechanism (51) and the light-emitting and light-receiving group to rotate synchronously around the fixed axis. The second translation drive mechanism (51) can drive the light-emitting and light-receiving group to translate.

9. The coating monitoring system according to claim 8, characterized in that, The rotary drive mechanism includes a rotary drive component fixedly disposed in the coating chamber and a first rotary transmission component (52). The output shaft of the rotary drive component is connected to the input end of the first rotary transmission component (52). The output end of the first rotary transmission component (52) is connected to the second translation drive mechanism (51). The rotary drive component can drive the first rotary transmission component (52), the second translation drive mechanism (51) and the light-emitting and light-receiving group to rotate synchronously around the fixed axis.

10. The coating monitoring system according to claim 9, characterized in that, The rotary drive mechanism further includes a first gear transmission assembly, which includes a first gear and a first gear ring. The output shaft of the rotary drive is connected to the first gear, and the outer periphery of the first gear ring meshes with the first gear. The first gear ring is rotatably connected to the coating chamber and circumferentially connected to the first rotary drive (52).

11. The coating monitoring system according to claim 8, characterized in that, The second translation drive mechanism (51) includes a second translation drive member disposed at the output end of the rotary drive mechanism. The output end of the second translation drive member is connected to the light-emitting and light-receiving group for transmission. The second translation drive member can drive the light-emitting and light-receiving group to translate.

12. The coating monitoring system according to claim 1, characterized in that, The multiple monitoring points (111) of the monitoring piece (1) form N monitoring point groups (11), and the N monitoring point groups (11) are distributed radially at intervals along the monitoring piece (1). Each monitoring point group (11) includes multiple monitoring points (111) distributed circumferentially at intervals along the monitoring piece (1), where N is a positive integer greater than 1.

13. The coating monitoring system according to any one of claims 3-5, characterized in that, The second through hole (31) is a tapered hole, with the large end of the second through hole (31) facing the second shielding structure (4) and the small end of the second through hole (31) facing the monitoring plate (1).

14. The coating monitoring system according to any one of claims 2-5, characterized in that, The first driving mechanism can drive the first shielding structure (3) and / or the second shielding structure (4) to rotate around the fixed axis to form the first through hole; The first driving mechanism can also drive the monitoring chip (1) to rotate around the fixed axis; and / or, the first driving mechanism can drive the first shielding structure (3) and the second shielding structure (4) to rotate synchronously around the fixed axis.

15. The coating monitoring system according to any one of claims 3-5, characterized in that, The first shielding structure (3) includes a tray, the second shielding structure (4) includes a protective cover, N second through holes (31) are disposed on the tray, and the tray is detachably disposed in the coating chamber; The first driving mechanism includes a monitoring chip driving mechanism (6) and a protective cover driving mechanism (7) disposed in the coating chamber. The monitoring chip driving mechanism (6) can drive the monitoring chip (1) to rotate around the fixed axis, and the protective cover driving mechanism (7) can drive the protective cover to rotate around the fixed axis.

16. The coating monitoring system according to claim 15, characterized in that, The monitoring chip driving mechanism (6) includes a monitoring chip driving component (61) disposed in the coating chamber and a second rotary transmission component (62). The output shaft of the monitoring chip driving component (61) is connected to the input end of the second rotary transmission component (62). The output end of the second rotary transmission component (62) is detachably connected to the monitoring chip (1). The monitoring chip driving component (61) can drive the second rotary transmission component (62) and the monitoring chip (1) to rotate synchronously around the fixed axis.

17. The coating monitoring system according to claim 16, characterized in that, The monitoring chip drive mechanism (6) further includes a second gear transmission assembly (63), which includes a second gear (631) and a second gear ring (632). The output shaft of the monitoring chip drive component (61) is connected to the second gear (631) for transmission. The outer periphery of the second gear ring (632) meshes with the second gear (631). The second gear ring (632) is rotatably connected to the coating chamber and is connected to the second rotary transmission component (62) in the circumferential direction.

18. A vacuum coating apparatus, comprising a coating chamber and a thin film deposition source, wherein the thin film deposition source is disposed within the coating chamber, characterized in that, It also includes the coating monitoring system according to any one of claims 1-17.

19. A coating monitoring method, characterized in that, For implementation in the coating monitoring system according to any one of claims 1-17, the multiple monitoring points (111) of the monitoring sheet (1) form N monitoring point groups (11), the N monitoring point groups (11) are distributed radially at intervals along the monitoring sheet (1), each monitoring point group (11) includes multiple monitoring points (111) distributed circumferentially at intervals along the monitoring sheet (1), and N is a positive integer greater than 1; The coating monitoring method includes: The first through hole is controlled to be distributed on the circumference of any one of the N monitoring point groups (11); The first through hole is controlled to selectively expose at least one monitoring point (111) in the corresponding monitoring point group (11) to the working area of ​​the thin film deposition source; the thin film deposition source is controlled to deposit a film on each of the exposed monitoring points (111); the light-emitting and light-receiving unit (2) is controlled to detect the film thickness of each of the exposed monitoring points (111). After all monitoring points (111) in the corresponding monitoring point group (11) have been coated and the coating thickness has been detected: Control the first through hole to be distributed on the circumference of another of the N monitoring point groups (11); The first through hole is controlled to selectively expose at least one monitoring point (111) in the corresponding monitoring point group (11) to the working area of ​​the thin film deposition source; the thin film deposition source is controlled to coat the exposed monitoring points (111) one by one; the light-emitting and light-receiving unit (2) is controlled to detect the coating thickness of the exposed monitoring points (111) one by one.

20. The coating monitoring method according to claim 19, characterized in that, The coating monitoring method further includes: After all N monitoring point groups (11) of the monitoring chip (1) have been coated, the monitoring chip (1) is disassembled and replaced.

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