Wear-resistant and corrosion-resistant surface treatment process for precision displacement table and vacuum compatibility optimization method
Through multi-layer functional coatings and process optimization, the performance deficiencies of precision displacement stages in complex working conditions and vacuum environments have been solved, achieving a surface treatment effect with high stability and long lifespan.
Patent Information
- Application Number
- CN202511093616.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-06
- Publication Date
- 2025-11-11
AI Technical Summary
Existing surface treatment technologies for precision displacement stages have insufficient adaptability to complex working conditions, shortened service life, reduced reliability in vacuum environments, and low bonding strength between the coating and the substrate, making them prone to delamination.
The design employs a multi-layer functional coating, including a composite coating of materials such as nano-sized ceramic particles, fluorinated polymers, titanium nitride, and polytetrafluoroethylene. Combined with plasma cleaning and pretreatment, the process is optimized for different working conditions and vacuum environments to enhance the adhesion between the coating and the substrate and improve its wear resistance and corrosion resistance.
It significantly improves the wear and corrosion resistance of precision displacement stages in complex working conditions and vacuum environments, extends service life, reduces equipment failures, improves positioning accuracy and stability, and reduces maintenance costs.
Smart Images
Figure CN120924971A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of surface treatment technology for displacement stages, specifically to a wear-resistant and corrosion-resistant surface treatment process and a vacuum compatibility optimization method for precision displacement stages. Background Technology
[0002] Precision displacement stages are core precision components in high-end manufacturing, semiconductor processing, vacuum coating, and other fields. Their surface properties directly determine the positioning accuracy, operational stability, and service life of the equipment. However, existing surface treatment technologies have significant limitations: Limited adaptability to different working conditions: Traditional processes often use single-function coatings, which cannot cope with complex and ever-changing working environments. For example, in high-humidity environments, single anti-corrosion coatings are prone to corrosion of the substrate due to moisture penetration; in highly corrosive media, ordinary wear-resistant coatings will fail rapidly due to chemical erosion; and under alternating conditions of high humidity and strong corrosion, the coating is more likely to crack and peel off due to alternating environmental stress, leading to premature equipment failure.
[0003] Insufficient adaptability to vacuum environment: In a vacuum environment, the defects of existing processes are more prominent: First, the surface coating has a high outgassing rate, which easily contaminates the vacuum cavity and affects the stability of the vacuum degree; second, the friction coefficient of the material changes greatly under vacuum, resulting in fluctuations in positioning accuracy; third, extreme temperature fluctuations and high-frequency mechanical vibrations will exacerbate coating fatigue, leading to a sharp decline in wear resistance and corrosion resistance, which seriously affects the reliability of the equipment.
[0004] Poor process synergy: Existing technologies lack coordinated design between pretreatment, coating deposition and working condition adaptation. For example, pretreatment simply removes surface oil without optimizing coating adhesion; coating deposition parameters are fixed and cannot be adjusted according to substrate material, resulting in low coating-substrate bonding strength and easy delamination. Summary of the Invention
[0005] The purpose of this invention is to propose a wear-resistant and corrosion-resistant surface treatment process and a vacuum compatibility optimization method for precision displacement stages, in order to solve the problems of insufficient performance adaptability, shortened service life, and decreased reliability of precision displacement stages in complex working conditions in the prior art.
[0006] In a first aspect, the present invention provides a wear-resistant and corrosion-resistant surface treatment process for a precision displacement stage, comprising the following steps: Pre-treatment of the metal substrate of the precision displacement stage specifically includes removing the oxide layer and impurities on the surface of the metal substrate; Plasma cleaning technology is used to activate the surface of metal substrates, forming a highly active surface state. Multiple functional coatings are sequentially deposited on the surface of a metal substrate, specifically including: In response to determining that the working environment of the metal substrate is a high humidity condition, a first functional coating is deposited on the surface of the metal substrate. The first functional coating is composed of nano-sized ceramic particles and organosilane. In response to determining that the working environment of the metal substrate is a highly corrosive medium, a second functional coating is deposited on the surface of the metal substrate. The second functional coating is composed of a fluorinated polymer and graphene composite. In response to determining that the working environment of the metal substrate is a condition of alternating high humidity and strong corrosive media, a third functional coating is deposited on the surface of the metal substrate, the third functional coating being composed of alternating layers of titanium nitride and polytetrafluoroethylene. The thickness of the first functional coating ranges from 2 micrometers to 5 micrometers, the thickness of the second functional coating ranges from 3 micrometers to 7 micrometers, and the thickness of the third functional coating ranges from 5 micrometers to 10 micrometers.
[0007] Furthermore, the preparation process of the first functional coating specifically includes: The metal substrate is placed in a magnetron sputtering device, argon is introduced as the working gas, and the gas pressure in the chamber is controlled to be 0.5 Pa to 1.0 Pa. Nanoscale ceramic particles are sputtered and deposited on the surface of a metal substrate, wherein the particle size ranges from 20 nanometers to 50 nanometers. A hydrophobic surface structure is formed by grafting organosilanes onto the surface of ceramic particles using chemical vapor deposition.
[0008] Furthermore, the preparation process of the second functional coating specifically includes: A metal substrate is placed in a thermal spraying device, and fluorinated polymer powder is sprayed onto the surface of the metal substrate using an electric arc spraying method. The particle size of the powder ranges from 10 micrometers to 30 micrometers. A graphene dispersion is coated on the surface of a fluoropolymer coating, wherein the concentration of the graphene dispersion ranges from 0.1 g / L to 0.5 g / L. The graphene dispersion is combined with the fluorinated polymer coating by ultraviolet curing technology to form a composite coating with enhanced corrosion resistance.
[0009] Furthermore, the preparation process of the third functional coating specifically includes: A metal substrate is placed in a physical vapor deposition apparatus, and a titanium nitride layer and a polytetrafluoroethylene layer are deposited sequentially. The thickness of the titanium nitride layer is controlled to be 1 micrometer to 2 micrometers, and the thickness of the polytetrafluoroethylene layer is controlled to be 2 micrometers to 4 micrometers; Repeat the above deposition steps until the total number of layers reaches 5 to 8; High-temperature annealing is used to form a stable interface bond between the layers. The annealing temperature range is 300 degrees Celsius to 500 degrees Celsius, and the annealing time is 1 hour to 3 hours.
[0010] Furthermore, the pretreatment process of the metal substrate specifically includes: The metal substrate is chemically cleaned by immersing it in an acidic solution, wherein the acidic solution is a mixture of hydrochloric acid and nitric acid in a volume ratio of 1:1. After removing the metal substrate, rinse it with deionized water, and then place it in an ultrasonic cleaner for cleaning. The ultrasonic frequency is 40 kHz to 60 kHz, and the cleaning time is 10 to 20 minutes. The cleaned metal substrate is placed in a vacuum drying oven and dried at a temperature of 80 to 100 degrees Celsius for 2 to 4 hours.
[0011] Furthermore, the specific parameters of the plasma cleaning technology include: The power range of plasma cleaning equipment is 100 watts to 300 watts, and the cleaning time is 5 minutes to 15 minutes; During plasma cleaning, a mixture of oxygen and argon is introduced, with the volume ratio of oxygen to argon being 1:3 to 1:5.
[0012] Furthermore, the hydrophobicity of the first functional coating was verified by a contact angle test, with a contact angle range of 120 degrees to 150 degrees. The corrosion resistance of the second functional coating was verified by salt spray testing, with a corrosion resistance time range of 500 to 1000 hours; The wear resistance of the third functional coating was verified by friction and wear tests, with wear rates ranging from 1×10^-6 mm³ / N·m to 5×10^-6 mm³ / N·m.
[0013] Furthermore, the metal substrate is made of stainless steel or aluminum alloy; When the metal substrate is stainless steel, the ceramic particles of the first functional coating are selected as alumina; when the metal substrate is aluminum alloy, the ceramic particles of the first functional coating are selected as zirconium oxide.
[0014] A second aspect of the present invention provides a vacuum compatibility optimization method, applied to the aforementioned wear-resistant and corrosion-resistant surface treatment process of a precision displacement stage, specifically including the following steps: The operating parameters of the precision displacement stage in a vacuum environment are obtained, including the vacuum level, temperature fluctuation range, and mechanical vibration frequency. Adjusting key parameters in the surface treatment process according to the aforementioned operating parameters specifically includes: In response to determining that the vacuum level is higher than 1×10^-5 Pa, a fourth functional coating is deposited on the surface of a metal substrate, the fourth functional coating being made of diamond-like carbon material; In response to the determination that the temperature fluctuation range exceeds ±50 degrees Celsius, a fifth functional coating is deposited on the surface of a metal substrate, the fifth functional coating being a composite of shape memory alloy and epoxy resin; In response to determining that the mechanical vibration frequency exceeds 1000 Hz, a sixth functional coating is deposited on the surface of a metal substrate, the sixth functional coating being composed of a cemented carbide and a polyimide composite.
[0015] Furthermore, the preparation process of the fourth functional coating specifically includes: The metal substrate is placed in a plasma-enhanced chemical vapor deposition apparatus, and methane gas is introduced as a carbon source. The pressure inside the control chamber is 0.1 Pa to 0.5 Pa, and the deposition temperature is 200 degrees Celsius to 400 degrees Celsius. By adjusting the methane gas flow rate and power density, the hardness range of the diamond-like carbon material can be controlled from 20 GPa to 50 GPa.
[0016] Furthermore, the preparation process of the fifth functional coating specifically includes: Shape memory alloy powder and epoxy resin are mixed in a mass ratio of 1:2 to 1:5 to form a uniform slurry. The mixed slurry is coated onto the surface of a metal substrate to a thickness of 100 to 200 micrometers; The mixed slurry is solidified by hot pressing, with a hot pressing temperature of 150 to 200 degrees Celsius and a hot pressing pressure of 10 to 20 MPa.
[0017] Furthermore, the preparation process of the sixth functional coating specifically includes: Hard alloy powder and polyimide solution are mixed in a mass ratio of 1:1 to 1:3 to form a uniform suspension. The suspension is sprayed onto the surface of a metal substrate, with a coating thickness of 50 micrometers to 150 micrometers. The suspension is solidified using infrared heating technology at a temperature of 180 to 220 degrees Celsius for 30 to 60 minutes.
[0018] Furthermore, the vacuum compatibility optimization method also includes testing the overall performance of the precision displacement stage, specifically including: The positioning accuracy of a precision displacement stage is measured in a vacuum environment, with a positioning accuracy range of ±1 micrometer to ±5 micrometers. The dynamic response time of a precision displacement stage was measured in a vacuum environment, with the dynamic response time ranging from 1 millisecond to 10 milliseconds. The surface outgassing rate of a precision displacement stage was measured in a vacuum environment, ranging from 1×10⁻⁹ Pa·L / s to 1×10⁻⁸ Pa·L / s.
[0019] Furthermore, the edge region of the metal substrate is provided with a chamfer structure, the chamfer angle is 45 degrees to 60 degrees, and the chamfer width is 0.5 mm to 1 mm; The chamfered structure is formed by machining, and a water-soluble cutting fluid is used for lubrication during the machining process.
[0020] Furthermore, the metal substrate is installed by bolt connection, the bolt material is high-strength stainless steel, and the bolt diameter ranges from 4 mm to 8 mm; The bolted joints are coated with anti-loosening adhesive, with a thickness of 0.1 mm to 0.3 mm. The bolt tightening torque ranges from 5 N·m to 15 N·m.
[0021] The technical solution of this invention features multi-layered functional coatings designed for different working environments, which can respectively meet the usage requirements of high humidity, highly corrosive media, and alternating working conditions. Specifically, the coating suitable for high humidity environments effectively blocks water vapor erosion; the coating suitable for highly corrosive environments can resist the long-term effects of corrosive media; and the coating suitable for alternating working conditions can cope with the effects of alternating environmental stresses, thereby enabling the precision displacement stage to maintain stable wear-resistant and corrosion-resistant performance in various complex environments.
[0022] By employing vacuum compatibility optimization methods and depositing functional coatings specifically tailored to the operating parameters of a vacuum environment, the reliability of a precision displacement stage in a vacuum environment can be improved. These coatings reduce the adverse effects of the vacuum environment, help maintain the positioning accuracy of the equipment, and enhance stability under extreme temperature fluctuations and mechanical vibrations, ensuring the equipment operates normally in a vacuum environment.
[0023] The combination of pretreatment and plasma activation provides a good surface foundation for coating deposition, enhances the adhesion between the coating and the metal substrate, and reduces problems such as coating peeling and cracking. When paired with functional coatings suitable for different working conditions, the service life of precision displacement stages can be significantly extended, downtime due to equipment failure can be reduced, and overall operating costs can be lowered.
[0024] The entire process design, from metal substrate pretreatment to coating deposition and vacuum adaptation optimization, achieves synergistic cooperation among all links, ensuring that the precision displacement stage maintains stable performance during long-term use. Whether in complex working conditions or vacuum environments, it can reliably perform its precision positioning function and meet the requirements of high-precision equipment. Attached Figure Description
[0025] Figure 1 This is a flowchart of the metal substrate pretreatment and plasma activation treatment process of the present invention. Figure 2 This is a flowchart of the multilayer functional coating deposition process of the present invention; Figure 3 This is a block diagram of the vacuum compatibility optimization method of the present invention; Figure 4 This is a block diagram for testing the vacuum environment performance of the present invention. Detailed Implementation
[0026] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.
[0027] This invention provides a wear-resistant and corrosion-resistant surface treatment process and vacuum compatibility optimization method for a precision displacement stage. Through the combined design of multiple functional coatings and process optimization for different working environments and operating parameters, it solves the problem that traditional surface treatment processes struggle to handle various complex working conditions, and significantly improves the reliability and accuracy of the precision displacement stage in a vacuum environment. The following is in conjunction with the appendix... Figure 1 To be continued Figure 4 The specific embodiments of the present invention will be described in detail below.
[0028] First, the pretreatment process of the metal substrate is described. According to... Figure 1 The process shown includes three steps in the pretreatment of the metal substrate: chemical cleaning, ultrasonic cleaning, and vacuum drying. The metal substrate is immersed in an acidic solution composed of hydrochloric acid and nitric acid in a 1:1 volume ratio for chemical cleaning to remove the surface oxide layer and impurities. After cleaning, it is rinsed thoroughly with deionized water and then placed in an ultrasonic cleaner. The ultrasonic frequency is set to 40 kHz to 60 kHz and the cleaning time is 10 to 20 minutes to ensure thorough surface cleaning. Subsequently, the metal substrate is placed in a vacuum drying oven and dried at 80 to 100 degrees Celsius for 2 to 4 hours to prevent residual moisture from affecting subsequent processes.
[0029] After pretreatment, the surface of the metal substrate is activated using plasma cleaning technology. For example... Figure 1 As shown, the plasma cleaning equipment has a power range of 100 watts to 300 watts and a cleaning time of 5 to 15 minutes. During the cleaning process, a mixture of oxygen and argon is introduced, with a volume ratio of oxygen to argon of 1:3 to 1:5. This process effectively removes minute contaminants from the surface of the metal substrate and creates a highly active surface state, providing a good foundation for subsequent coating deposition.
[0030] The next step is the deposition process of multilayer functional coatings, such as... Figure 2 As shown. Different functional coatings are selected according to the working environment of the metal substrate. When the working environment is under high humidity conditions, a first functional coating is deposited; when the working environment is under strong corrosive media conditions, a second functional coating is deposited; when the working environment is under alternating conditions of high humidity and strong corrosive media, a third functional coating is deposited. The first functional coating is composed of nano-sized ceramic particles and organosilane composites, with a thickness ranging from 2 micrometers to 5 micrometers. During the preparation process, the metal substrate is placed in a magnetron sputtering device, argon gas is introduced as the working gas, and the gas pressure in the chamber is controlled to be 0.5 Pa to 1.0 Pa. Ceramic particles with a particle size ranging from 20 nanometers to 50 nanometers are sputtered and deposited on the surface of the metal substrate, and then organosilane is grafted onto the surface of the ceramic particles by chemical vapor deposition to form a hydrophobic surface structure. When the metal substrate material is stainless steel, alumina is selected as the ceramic particles; when the metal substrate material is aluminum alloy, zirconium oxide is selected as the ceramic particles.
[0031] The second functional coating is composed of a fluoropolymer and graphene composite, with a thickness ranging from 3 to 7 micrometers. During preparation, a metal substrate is placed in a thermal spraying device, and fluoropolymer powder with a particle size ranging from 10 to 30 micrometers is sprayed onto the surface of the metal substrate using an arc spraying method. Subsequently, a graphene dispersion with a concentration ranging from 0.1 g / L to 0.5 g / L is coated onto the surface of the fluoropolymer coating, and ultraviolet curing technology is used to bond the graphene dispersion with the fluoropolymer coating, forming a composite coating with enhanced corrosion resistance.
[0032] The third functional coating consists of alternating layers of titanium nitride and polytetrafluoroethylene (PTFE), with a thickness ranging from 5 to 10 micrometers. During fabrication, a metal substrate is placed in a physical vapor deposition (PVD) apparatus, and titanium nitride and PTFE layers are deposited sequentially. The thickness of the titanium nitride layer is controlled to be 1 to 2 micrometers, and the thickness of the PTFE layer is controlled to be 2 to 4 micrometers. This deposition process is repeated until a total of 5 to 8 layers are reached. Subsequently, a high-temperature annealing treatment is performed to establish stable interfacial bonding between the layers. The annealing temperature range is 300°C to 500°C, and the annealing time is 1 to 3 hours.
[0033] In vacuum compatibility optimization methods, such as Figure 3As shown, key parameters in the surface treatment process were adjusted based on the operating parameters of the precision displacement stage in a vacuum environment. When the vacuum level was higher than 1 × 10⁻⁵ Pa, a fourth functional coating was deposited; when the temperature fluctuation range exceeded ±50 degrees Celsius, a fifth functional coating was deposited; and when the mechanical vibration frequency exceeded 1000 Hz, a sixth functional coating was deposited. The fourth functional coating was made of diamond-like carbon material. During its preparation, the metal substrate was placed in a plasma-enhanced chemical vapor deposition (PECVD) apparatus, methane gas was introduced as the carbon source, and the gas pressure within the chamber was controlled to be 0.1 Pa to 0.5 Pa, with a deposition temperature of 200 degrees Celsius to 400 degrees Celsius. By adjusting the methane gas flow rate and power density, the hardness range of the diamond-like carbon material was controlled to be 20 GPa to 50 GPa.
[0034] The fifth functional coating is composed of a shape memory alloy and epoxy resin. During preparation, shape memory alloy powder and epoxy resin are mixed in a mass ratio of 1:2 to 1:5 to form a uniform slurry, which is then coated onto the surface of a metal substrate to a thickness of 100 to 200 micrometers. The slurry is cured using hot pressing technology at a temperature of 150 to 200 degrees Celsius and a pressure of 10 to 20 MPa.
[0035] The sixth functional coating is composed of cemented carbide and polyimide. During preparation, cemented carbide powder and polyimide solution are mixed in a mass ratio of 1:1 to 1:3 to form a uniform suspension, which is then sprayed onto the surface of a metal substrate to a thickness of 50 to 150 micrometers. The suspension is cured using infrared heating technology at a temperature of 180 to 220 degrees Celsius for 30 to 60 minutes.
[0036] Furthermore, to further enhance the overall performance of the precision displacement stage, the edge area of the metal substrate features a chamfered structure with a chamfer angle ranging from 45 to 60 degrees and a chamfer width from 0.5 mm to 1 mm. The chamfered structure is formed through machining, using water-soluble cutting fluid for lubrication during the process. The metal substrate is mounted using bolt connections, with high-strength stainless steel bolts ranging from 4 mm to 8 mm in diameter. Anti-loosening adhesive is applied to the bolt connections, with a thickness ranging from 0.1 mm to 0.3 mm, and the bolt tightening torque ranges from 5 N·m to 15 N·m.
[0037] The overall performance of a precision displacement stage is tested in a vacuum environment, such as... Figure 4As shown. The tests included positioning accuracy, dynamic response time, and surface outgassing rate. The positioning accuracy ranged from ±1 μm to ±5 μm, the dynamic response time ranged from 1 ms to 10 ms, and the surface outgassing rate ranged from 1 × 10⁻⁹ Pa·L / s to 1 × 10⁻⁸ Pa·L / s. These test results demonstrate that the precision displacement stage treated with the surface treatment process and vacuum compatibility optimization method of this invention exhibits excellent performance in complex working conditions and vacuum environments.
[0038] The above embodiments describe the technical solution of the present invention in detail, providing complete process parameters and implementation methods from the pretreatment of the metal substrate to the deposition of multilayer functional coatings and the specific operation steps of the vacuum compatibility optimization method. Through the above steps, the present invention successfully solves the problems of insufficient performance adaptability, shortened service life, and decreased reliability of precision displacement stages under complex working conditions, while ensuring that the connection relationships, positional relationships, and mutual cooperation relationships between various components are fully disclosed, thus meeting the full disclosure requirements of the patent specification.
[0039] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A wear-resistant and corrosion-resistant surface treatment process for a precision displacement stage, characterized in that, Includes the following steps: The metal substrate is pretreated to remove the oxide layer and impurities on its surface; Activation treatment of metal substrate surface is carried out using plasma cleaning technology; Multiple functional coatings are sequentially deposited on the surface of a metal substrate, specifically including: In response to determining that the working environment of the metal substrate is a high humidity condition, a first functional coating is deposited on the surface of the metal substrate. The first functional coating is composed of nano-sized ceramic particles and organosilane. In response to determining that the working environment of the metal substrate is a highly corrosive medium, a second functional coating is deposited on the surface of the metal substrate. The second functional coating is composed of a fluorinated polymer and graphene composite. In response to determining that the working environment of the metal substrate is a condition of alternating high humidity and strong corrosive media, a third functional coating is deposited on the surface of the metal substrate, the third functional coating being composed of alternating layers of titanium nitride and polytetrafluoroethylene.
2. The wear-resistant and corrosion-resistant surface treatment process for the precision displacement stage according to claim 1, characterized in that, The pretreatment process of the metal substrate includes: The metal substrate is chemically cleaned by immersing it in a mixed solution of hydrochloric acid and nitric acid with a volume ratio of 1:
1. After removing the metal substrate, rinse it with deionized water and place it in an ultrasonic cleaner. The ultrasonic frequency is 40 kHz to 60 kHz and the cleaning time is 10 to 20 minutes. The cleaned metal substrate is placed in a vacuum drying oven and dried at a temperature of 80 to 100 degrees Celsius for 2 to 4 hours.
3. The wear-resistant and corrosion-resistant surface treatment process for the precision displacement stage according to claim 1, characterized in that, The parameters of the plasma cleaning technology include: The power range of plasma cleaning equipment is 100 watts to 300 watts, and the cleaning time is 5 minutes to 15 minutes; During plasma cleaning, a mixture of oxygen and argon is introduced, with the volume ratio of oxygen to argon being 1:3 to 1:
5.
4. The wear-resistant and corrosion-resistant surface treatment process for the precision displacement stage according to claim 1, characterized in that, The preparation process of the first functional coating includes: The metal substrate is placed in a magnetron sputtering device, argon is introduced as the working gas, and the gas pressure in the chamber is controlled to be 0.5 Pa to 1.0 Pa. Ceramic particles with a particle size ranging from 20 nanometers to 50 nanometers are sputtered onto the surface of a metal substrate. A hydrophobic surface structure is formed by grafting organosilanes onto the surface of ceramic particles using chemical vapor deposition.
5. The wear-resistant and corrosion-resistant surface treatment process for the precision displacement stage according to claim 1, characterized in that, The preparation process of the second functional coating includes: The metal substrate is placed in a thermal spraying equipment, and fluorinated polymer powder with a particle size range of 10 micrometers to 30 micrometers is sprayed onto the surface of the metal substrate by an electric arc spraying method. A graphene dispersion with a concentration ranging from 0.1 g / L to 0.5 g / L was coated onto the surface of the fluoropolymer coating. The graphene dispersion is bonded to the fluorinated polymer coating using ultraviolet curing technology.
6. The wear-resistant and corrosion-resistant surface treatment process for the precision displacement stage according to claim 1, characterized in that, The preparation process of the third functional coating includes: A metal substrate is placed in a physical vapor deposition apparatus, and a titanium nitride layer and a polytetrafluoroethylene layer are deposited sequentially. The thickness of the titanium nitride layer is controlled to be 1 micrometer to 2 micrometers, and the thickness of the polytetrafluoroethylene layer is controlled to be 2 micrometers to 4 micrometers; Repeat the above deposition steps until the total number of layers reaches 5 to 8; High-temperature annealing is used to form a stable interface bond between the layers. The annealing temperature range is 300 degrees Celsius to 500 degrees Celsius, and the annealing time is 1 hour to 3 hours.
7. A vacuum compatibility optimization method, applied to the wear-resistant and corrosion-resistant surface treatment process of the precision displacement stage as described in any one of claims 1 to 6, characterized in that, Includes the following steps: The operating parameters of the precision displacement stage in a vacuum environment are obtained, including the vacuum level, temperature fluctuation range, and mechanical vibration frequency. Adjusting key parameters in the surface treatment process according to the aforementioned operating parameters specifically includes: In response to determining that the vacuum level is higher than 1×10^-5 Pa, a fourth functional coating is deposited on the surface of a metal substrate, the fourth functional coating being made of diamond-like carbon material; In response to the determination that the temperature fluctuation range exceeds ±50 degrees Celsius, a fifth functional coating is deposited on the surface of a metal substrate, the fifth functional coating being a composite of shape memory alloy and epoxy resin; In response to determining that the mechanical vibration frequency exceeds 1000 Hz, a sixth functional coating is deposited on the surface of a metal substrate, the sixth functional coating being composed of a cemented carbide and a polyimide composite.
8. The vacuum compatibility optimization method according to claim 7, characterized in that, The preparation process of the fourth functional coating includes: The metal substrate is placed in a plasma-enhanced chemical vapor deposition apparatus, and methane gas is introduced as a carbon source. The pressure inside the control chamber is 0.1 Pa to 0.5 Pa, and the deposition temperature is 200 degrees Celsius to 400 degrees Celsius. By adjusting the methane gas flow rate and power density, the hardness range of the diamond-like carbon material can be controlled from 20 GPa to 50 GPa.