Magnetic levitation vacuum pump

Abstract

The application discloses a magnetic suspension vacuum pump and relates to the technical field of vacuum pumps. The magnetic suspension vacuum pump comprises a shell, an impeller, a front bearing seat, a front radial magnetic bearing, a stator, a rear radial magnetic bearing, an axial magnetic bearing and a rotor which are sequentially assembled in the shell, and further comprises a partition ring which is arranged between the front bearing seat and the front radial magnetic bearing and has a gap which is communicated with the outside of the shell between the partition ring and the front radial magnetic bearing so as to form a first air inlet cavity; and a first flow channel which comprises the first air inlet cavity, an air gap between the front radial magnetic bearing and the rotor, an air gap between the stator and the rotor and a first air outlet cavity. Heat exchange devices are arranged at two ends of the stator, so that the cooling gas can pass through the heat exchange devices to reduce the temperature before passing through the stator, thereby avoiding the problem that the local heat accumulation is caused by the continuous temperature rise of the cooling gas during the flow of the cooling gas in the shell.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum pumps, in particular to a magnetic suspension vacuum pump. BACKGROUND

[0002] The magnetic suspension vacuum pump is an industrial equipment that applies magnetic suspension bearing technology to the field of vacuum pumps. It replaces mechanical contact components with magnetic suspension bearing technology, eliminating the need for lubrication and mechanical friction, thereby achieving high precision and high efficiency in vacuum extraction.

[0003] The magnetic suspension vacuum pump generates a large amount of heat during operation. High temperatures can cause fluctuations in the performance of electromagnetic materials, and under high load, the windings may even burn out. Therefore, heat dissipation is required. In the patent with application number CN202411206533.5, a magnetic suspension motor with thrust disc heat dissipation air duct and vacuum pump is proposed. A magnetic suspension motor with thrust disc heat dissipation air duct is designed. By setting a thrust disc and a heat dissipation air duct outside the rotor, negative pressure is formed by rotational centrifugal force to self-suck external air for heat dissipation, effectively improving the heat dissipation effect of the rear radial magnetic bearing and the axial magnetic bearing.

[0004] However, during the heat dissipation process of the vacuum pump, the temperature of the cooling air will continue to rise after passing through the front radial magnetic bearing and the air gap between the stator and the rotor, resulting in a decrease in the heat dissipation effect of the stator winding located at the air outlet, and easy accumulation of heat, causing the local temperature to rise. SUMMARY

[0005] To overcome the shortcomings of the prior art, the present application provides a magnetic suspension vacuum pump that solves the problems raised in the background art.

[0006] To achieve the above purpose, the present application is implemented by the following technical scheme: a magnetic suspension vacuum pump, comprising a shell, and a impeller, a front bearing seat, a front radial magnetic bearing, a stator, a rear radial magnetic bearing, an axial magnetic bearing and a rotor sequentially assembled in the shell, further comprising: a partition ring, the partition ring is arranged between the front bearing seat and the front radial magnetic bearing, and a gap is left between the partition ring and the front radial magnetic bearing for communication with the outside of the shell to form a first air inlet chamber; a gap is left between the stator and the rear radial magnetic bearing for communication with the outside of the shell to form a first air outlet chamber; a first flow channel, the first flow channel comprises the first air inlet chamber, the air gap between the front radial magnetic bearing and the rotor, the air gap between the stator and the rotor, and the first air outlet chamber; a water cooling assembly, the water cooling assembly is installed on the inner wall of the shell, and cooling liquid flows through the water cooling assembly; a heat exchange device, the heat exchange device is installed on both sides of the stator, and the heat exchange device and the water cooling assembly have a communication path, so that the cooling liquid flows through the heat exchange device, and the gas in the first flow channel flows through the heat exchange device and exchanges heat with the heat exchange device.

[0007] Further, the heat exchange device comprises a first heat exchange assembly and a second heat exchange assembly, the first heat exchange assembly is arranged between the front radial magnetic bearing and the stator along the axial direction of the rotor, the second heat exchange assembly is arranged between the rear radial magnetic bearing and the stator along the axial direction of the rotor, and the first heat exchange assembly and the second heat exchange assembly are symmetrically arranged about the stator.

[0008] Further, the first heat exchange assembly comprises an outer shell sleeve, the inner circumferential side and the side close to the stator of the outer shell sleeve are open ends, and a predetermined distance is left from the outer circumferential surface of the rotor, the outer circumferential side of the outer shell sleeve is a closed end; a heat dissipation disc is fixedly arranged in the outer shell sleeve, the space inside the outer shell sleeve is divided into an air inlet side and an air outlet side along the axial direction, and the air inlet side and the air outlet side are communicated at the outer circumferential side close to the outer shell sleeve; a cooling coil is fixedly arranged in the heat dissipation disc, and the cooling coil is communicated with the water cooling assembly.

[0009] Further, the first heat exchange assembly further comprises a heat dissipation fin, the heat dissipation fin is arranged in a U-shaped sleeve outside the stator winding, one side of the heat dissipation fin passes through the side opening end of the outer shell sleeve and is fixedly connected with the heat dissipation disc, and part of the heat dissipation fin is located in the outer shell sleeve and part of the heat dissipation fin is located outside the outer shell sleeve, the number of the heat dissipation fins is the same as the number of the stator windings, and there is a spacing space between adjacent heat dissipation fins; the side close to the stator of the outer shell sleeve is provided with a separation insert, and the separation insert can be inserted into the spacing space.

[0010] Further, the housing is provided with a rear bearing seat, a gap is left between the rear bearing seat and the housing for communication with the outside to form a second air inlet cavity, and an air channel is arranged on the rear bearing seat in the radial direction.

[0011] Further, the axial magnetic bearing is composed of a front axial bearing, a rear axial bearing and a thrust disc, the front axial bearing is located on the side close to the rear radial magnetic bearing; a first axial hole is arranged on the side close to the outer circumferential surface of the front axial bearing; a second axial hole is arranged on the side close to the rotor shaft of the thrust disc.

[0012] Further, a gap is left between the separation ring and the front bearing seat for communication with the outside to form a second air exhaust cavity; a cavity is arranged between the impeller and the front bearing seat, a first labyrinth seal structure is arranged between the side close to the outer circumferential surface of the impeller and the front bearing seat, a flow-through hole is arranged on the front bearing seat, and the cavity and the second air exhaust cavity are communicated through the flow-through hole; a third flow channel comprises the first air inlet cavity, the gap between the separation ring and the rotor, the gap between the front bearing seat and the rotor, the cavity and the second air exhaust cavity.

[0013] Further, the first heat exchange assembly is provided with a flow resistance ring at the gas inlet side, and the flow resistance ring is fixed to the outer circumferential surface of the rotor; the second labyrinth seal structure is arranged between the flow resistance ring and the heat dissipation disc.

[0014] Further, the water cooling assembly comprises a first winding pipe, a second winding pipe, a third winding pipe and a fourth winding pipe; the first winding pipe is sleeved on the outer circumferential surface of the front radial magnetic bearing to form a first water cooling part; the second winding pipe is sleeved on the outer circumferential surface of the rear radial magnetic bearing and the axial magnetic bearing to form a second water cooling part; the third winding pipe and the fourth winding pipe are both sleeved on the outer circumferential surface of the stator, and one end of the third winding pipe is communicated with the second winding pipe, and one end of the fourth winding pipe is communicated with the first winding pipe.

[0015] Further, the other end of the third winding pipe is communicated with the water inlet part of the first heat exchange assembly, and the other end of the fourth winding pipe is communicated with the water inlet part of the second heat exchange assembly.

[0016] The present application has the following advantages:

[0017] (1) The magnetic suspension vacuum pump is provided with heat exchange devices at both ends of the stator, so that the cooling gas can be cooled by the heat exchange devices before flowing through the stator, thereby avoiding the problem of local heat accumulation caused by the continuous temperature rise of the cooling gas in the shell.

[0018] (2) The magnetic suspension vacuum pump is provided with a water cooling assembly to cool the side close to the outer circumferential surface of the front radial magnetic bearing, the stator, the rear radial magnetic bearing and the axial magnetic bearing, and the water cooling assembly is connected with the heat exchange device, and the heat exchange device is provided with heat dissipation fins in contact with the stator winding, so that the cooling liquid in the water cooling assembly can flow through the heat exchange device, and the heat exchange device can transfer the heat of the windings at both ends of the stator and remove the heat through the water cooling assembly.

[0019] Of course, it is not necessary to achieve all the advantages described above when implementing any product of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present application;

[0021] Figure 2 It is a schematic diagram of the overall structure of the present application;

[0022] Figure 3 It is a schematic diagram of the internal structure of the present application;

[0023] Figure 4 It is a schematic diagram of the internal structure of the present application;

[0024] Figure 5 It is a schematic diagram of the cooling gas flow path of the present application;

[0025] Figure 6 A zone enlarged schematic view in the present application Figure 3

[0026] Figure 7 B zone enlarged schematic view in the present application Figure 3

[0027] Figure 8 Exploded schematic view of the internal structure of the shell in the present application

[0028] Figure 9 Schematic view of the heat exchange device cooperating with the stator in the present application

[0029] Figure 10 Exploded schematic view of the heat exchange device structure in the present application

[0030] Figure 11 Schematic view of the internal structure of the heat exchange device in the present application

[0031] Figure 12 Schematic view of the distribution of the fins in the present application

[0032] Figure 13 Schematic view of the arrangement of the water cooling assembly in the present application

[0033] Figure 14 Schematic view of the structure of the first isolation ring in the present application

[0034] Figure 15 Schematic view of the structure of the rear bearing seat in the present application

[0035] In the figure, 1, shell; 2, impeller; 3, first air inlet; 4, second air inlet; 5, first air outlet; 6, second air outlet; 7, first water inlet; 8, second water inlet; 9, first water outlet; 10, second water outlet; 13, front bearing seat; 131, flow-through hole; 14, rotor; 15, auxiliary bearing; 16, front radial magnetic bearing; 17, rear radial magnetic bearing; 18, axial magnetic bearing; 181, front axial bearing; 1811, first axial hole; 182, rear axial bearing; 183, thrust disc; 1831, second axial hole; 19, rear bearing seat; 191, air channel; 20, first heat exchange assembly; 21, second heat exchange assembly; 22, shell sleeve; 23, heat dissipation disc; 24, cooling coil; 25, fin; 26, isolation insert; 27, first isolation ring; 271, radial air hole; 28, second isolation ring; 29, first winding pipe; 30, second winding pipe; 31, third winding pipe; 32, fourth winding pipe; 33, stator; 34, spacer ring; 35, first labyrinth seal structure; 36, choke ring; 37, second labyrinth seal structure; 38, flow guide ring; 39, first water inlet end; 40, first water outlet end; 41, second water inlet end; 42, second water outlet end; 43, cavity. ​​DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0037] In the description of the present application, it should be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "periphery" and the like indicate the orientation or positional relationship, which are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the indicated component or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0038] The technical solutions provided by the embodiments of the present application will be described below according to Figure 1 Figure 15 The embodiments of the present application provide a magnetic suspension vacuum pump.

[0039] As shown in Figure 1 Figure 5 A technical solution provided by the embodiments of the present application is a magnetic suspension vacuum pump, which comprises a shell 1, and an impeller 2, a front bearing seat 13, a front radial magnetic bearing 16, a stator 33, a rear radial magnetic bearing 17, an axial magnetic bearing 18 and a rotor 14 which are sequentially assembled in the shell 1, wherein the front bearing seat 13 is used for mounting an auxiliary bearing 15, the auxiliary bearing 15 is used for supporting the rotor 14 in the case of power failure, in the prior art, a position sensor (not shown in the figure) should also be provided to determine the position of the rotor 14, and further comprising a partition ring 34, the partition ring 34 is arranged between the front bearing seat 13 and the front radial magnetic bearing 16, and a gap is left between the partition ring 34 and the front radial magnetic bearing 16 to communicate with the outside of the shell 1 to form a first air inlet chamber, a first air inlet 3 is arranged on the outer surface of the shell 1, and the first air inlet 3 communicates with the first air inlet chamber to introduce cooling gas into the first air inlet chamber.

[0040] Further, a gap is left between the stator 33 and the rear radial magnetic bearing 17 to communicate with the outside of the shell 1 to form a first exhaust chamber, and a first exhaust port 5 is arranged on the outside of the shell 1, so that the cooling gas in the first exhaust chamber can be discharged through the first exhaust port 5.

[0041] Further, a first flow channel for the circulation of cooling gas is formed in the shell 1, in combination with Figure 5 ​​The first flow channel includes a first air inlet chamber, an air gap between the front radial magnetic bearing 16 and the rotor 14, an air gap between the stator 33 and the rotor 14, and a first exhaust chamber. Since there is a gap between the magnetic poles of the front radial magnetic bearing 16, some of the cooling gas can also flow through the interior of the front radial magnetic bearing 16, thereby carrying away the heat of the front radial magnetic bearing 16 and the stator 33 near the inner circumferential surface through the cooling gas.

[0042] In addition, a water-cooling assembly is provided inside the housing 1. The water-cooling assembly is installed on the inner wall of the housing 1. Coolant is introduced into the water-cooling assembly to cool the front radial magnetic bearing 16, stator 33, rear radial magnetic bearing 17 and axial magnetic bearing 18 on the side near the outer peripheral surface. The coolant can be water or a mixture of water and ethylene glycol.

[0043] Furthermore, heat exchange devices are provided on both sides of the stator 33 inside the housing 1. The heat exchange devices have a communication path with the water cooling assembly so that the coolant flows through the heat exchange devices and the gas in the first flow channel flows through the heat exchange devices and exchanges heat with the heat exchange devices. This allows the cooling gas to carry away some heat through the heat exchange devices before passing through the stator 33, thereby improving the cooling effect of the cooling gas on the side of the stator 33 near the inner circumferential surface.

[0044] like Figure 3 - Figure 5 As shown, the heat exchange device includes a first heat exchange component 20 and a second heat exchange component 21. The first heat exchange component 20 is disposed along the axial direction of the rotor 14 between the front radial magnetic bearing 16 and the stator 33, and there is a gap between it and the front radial magnetic bearing 16 to facilitate the flow of cooling gas. The second heat exchange component 21 is disposed along the axial direction of the rotor 14 between the rear radial magnetic bearing 17 and the stator 33, and there is a gap between it and the rear radial magnetic bearing 17 to facilitate the flow of cooling gas. The first heat exchange component 20 and the second heat exchange component 21 are symmetrically arranged about the stator 33. The first heat exchange component 20 and the second heat exchange component 21 in this scheme have the same composition structure.

[0045] like Figure 3 - Figure 5 as well as Figure 9 - Figure 11 As shown, the first heat exchange assembly 20 includes an outer casing 22. The inner circumferential side and the side near the stator 33 of the outer casing 22 are open ends, and a preset distance is left between them and the outer circumferential surface of the rotor 14. That is, the end face of the outer casing 22 near the rotor 14 does not contact the outer circumferential surface of the rotor 14. Preferably, the preset distance is not less than the air gap between the stator 33 and the outer circumferential surface of the rotor 14. The outer circumferential side of the outer casing 22 is a sealed end, and the outer casing 22 is fixed to the inner wall of the housing 1 through the outer circumferential surface.

[0046] And, a heat dissipation disc 23 is fixedly arranged in the shell sleeve 22, the heat dissipation disc 23 divides the space inside the shell sleeve 22 into an air inlet side and an air outlet side in the axial direction, and the air inlet side and the air outlet side are communicated at the outer circumferential side close to the shell sleeve 22, so that the cooling gas can contact the two sides of the heat dissipation disc 23, thereby increasing the contact time and improving the heat exchange effect.

[0047] And, a cooling coil 24 is arranged in the heat dissipation disc 23, the cooling coil 24 is communicated with a water cooling assembly, and the cooling liquid in the water cooling assembly can flow through the cooling coil 24, thereby taking away the heat at the heat dissipation disc 23.

[0048] As shown in Figure 9 - Figure 12 In order to facilitate heat dissipation of the windings of the stator 33, the first heat exchange assembly 20 further comprises heat dissipation fins 25, the heat dissipation fins 25 are U-shaped and arranged outside the windings of the stator 33, one side of the heat dissipation fins 25 is fixedly connected with the heat dissipation disc 23 through the opening end of the side of the shell sleeve 22, and part of the heat dissipation fins 25 is located inside the shell sleeve 22 and the other part is located outside the shell sleeve 22, the number of the heat dissipation fins 25 is the same as the number of the windings of the stator 33, and there is a spacing between adjacent heat dissipation fins 25, the heat generated by the windings of the stator 33 can be transmitted to the heat dissipation disc 23 through the heat dissipation fins 25, and then dissipated through the water cooling assembly and the cooling gas.

[0049] An isolation insert 26 is arranged at the side of the shell sleeve 22 close to the stator 33, the isolation insert 26 can be inserted into the spacing, thereby dividing the spacing into two parts in the axial direction, one part close to the heat dissipation disc 23 is enclosed by the heat dissipation disc 23, the shell sleeve 22, the isolation insert 26 and the heat dissipation fins 25, and this part is the air outlet side of the shell sleeve 22, and the other part close to the windings of the stator 33 is enclosed by the housing 1, the isolation insert 26, the heat dissipation fins 25 and the end surface of the stator 33, and this part is the gap between the shell sleeve 22 and the stator 33.

[0050] As shown in Figure 4 and Figure 5 In order to enable the cooling gas in the first flow channel to fully enter the first heat exchange assembly 20, a flow resistance ring 36 is arranged at the air inlet side of the first heat exchange assembly 20, the flow resistance ring 36 is fixedly arranged on the outer circumferential surface of the rotor 14, and a second labyrinth seal structure 37 is arranged between the flow resistance ring 36 and the heat dissipation disc 23, for details, please refer to Figure 6 and Figure 11As shown, the second labyrinth sealing structure 37 consists of several sequentially arranged annular sealing teeth. A series of intercepting gaps and expansion cavities are formed between the teeth. When the cooling gas passes through the gaps of the tortuous labyrinth, a throttling effect is generated to achieve the purpose of preventing leakage. This allows the cooling gas in the air gap between the front radial magnetic bearing 16 and the rotor 14 to enter the air inlet side of the first heat exchange assembly 20 and flow out from the air outlet side of the first heat exchange assembly 20, so as to prevent the cooling gas in the air gap between the front radial magnetic bearing 16 and the rotor 14 from directly entering the air gap between the stator 33 and the rotor 14.

[0051] Optionally, combined Figure 14 To prevent some of the cooling gas from entering the gap between the outer casing 22 and the stator 33 after it flows out from the outlet side of the first heat exchange component 20, thus disrupting the airflow, a first isolation ring 27 is provided between the heat sink 23 and the end face of the stator 33 in the first heat exchange component 20. The first isolation ring 27 has radial air holes 271 at the outlet side of the first heat exchange component 20. The end face of the isolation insert 26 here contacts the outer peripheral surface of the first isolation ring 27 to prevent the cooling gas from entering the gap from the side.

[0052] Combination Figure 3 - Figure 6 as well as Figure 7 To facilitate heat dissipation for the axial magnetic bearing 18 and the rear radial magnetic bearing 17, a rear bearing seat 19 is provided inside the housing 1. The rear bearing seat 19 is used to install another auxiliary bearing 15. A gap is left between the rear bearing seat 19 and the housing 1 to communicate with the outside, so as to form a second air intake chamber. The rear bearing seat 19 has an air passage 191 opened radially. A second air inlet 4 is provided outside the housing 1. The second air inlet 4 communicates with the second air intake chamber. Cooling gas can enter the air gap between the rear bearing seat 19 and the rotor 14 through the air passage 191.

[0053] Furthermore, a second flow channel is formed within the shell 1, with the structure as follows: Figure 5 As shown, the second flow channel includes the rear bearing housing 19 and the air gap between the axial magnetic bearing 18 and the rotor 14, the air gap between the rear radial magnetic bearing 17 and the rotor 14, and the first exhaust chamber. Cooling gas enters the second intake chamber from the second intake port 4 and enters the second flow channel through the air passage 191, thereby dissipating heat from the axial magnetic bearing 18 and the rear radial magnetic bearing 17.

[0054] like Figure 7As shown, the axial magnetic bearing 18 consists of a front axial bearing 181, a rear axial bearing 182, and a thrust disk 183. The front axial bearing 181 is located on the side close to the rear radial magnetic bearing 17. In order to improve the heat dissipation effect of the axial magnetic bearing 18, a first axial hole 1811 is provided on the side of the front axial bearing 181 near the outer peripheral surface, and a second axial hole 1831 is provided on the side of the thrust disk 183 near the axis of the rotor 14. Thus, part of the cooling gas entering from the second air inlet 4 flows directly to the first exhaust chamber through the second axial hole 1831, part of the gas flows through the gap between the thrust disk 183 and the rear axial bearing 182, and then part of the gas flows out through the first axial hole 1811, and part of the gas flows through the gap between the thrust disk 183 and the front axial bearing 181, thereby carrying away the heat inside the axial magnetic bearing 18.

[0055] Combination Figure 4 and Figure 5 When a second heat exchange component 21 is provided, the gap between the second heat exchange component 21 and the end face of the stator 33 is the first exhaust chamber. The cooling gas in the first flow channel flows through the air inlet side of the second heat exchange component 21 and then flows out from the first exhaust chamber, thereby avoiding carrying too much heat to the winding on one side of the stator 33.

[0056] Optionally, in order to allow the cooling gas in the first flow channel to fully enter the air intake side of the second heat exchange component 21, a second isolation ring 28 is provided between the end face of the stator 33 and the heat sink 23 of the second heat exchange component 21, so that the first flow channel is not directly connected to the first exhaust chamber.

[0057] Furthermore, the end face of the isolation insert 26 in the second heat exchange assembly 21 is a certain distance from the outer peripheral surface of the second isolation ring 28, so that the cooling gas entering from the inlet side of the second heat exchange assembly 21 first passes through the outlet side of the second heat exchange assembly 21, and then enters the first exhaust chamber from the side of the first exhaust chamber near the rotor 14 and then flows out.

[0058] Optionally, combined Figure 4 and Figure 5 To prevent the cooling gases in the first and second flow channels from directly contacting each other on the outer circumferential surface of the rotor 14, a guide ring 38 is provided on the air inlet side of the second heat exchange assembly 21. The guide ring 38 is fixed on the outer circumferential surface of the rotor 14. The guide ring 38 is used to convert the axial movement of the cooling gases in the first and second flow channels into radial movement, so that they are collected and enter the air inlet side of the second heat exchange assembly 21.

[0059] like Figure 3 , Figure 5 and Figure 6As shown, in order to achieve the heat dissipation effect on the back of the impeller 2, a gap is left between the spacer ring 34 and the front bearing seat 13 to form a second exhaust cavity, the front bearing seat 13 has a protruding portion on the side close to the rotor 14, the protruding portion is in contact with the end face of the spacer ring 34 to avoid the cooling gas in the second exhaust cavity flowing into the air gap between the front bearing seat 13 and the rotor 14.

[0060] And a cavity 43 is arranged between the impeller 2 and the front bearing seat 13, a first labyrinth seal structure 35 is arranged between the side close to the outer circumferential surface of the impeller 2 and the front bearing seat 13, the first labyrinth seal structure 35 has the same working principle as the second labyrinth seal structure 37 to isolate the cavity 43 and the front face of the impeller 2, a flow-through hole 131 is arranged on the front bearing seat 13, the cavity 43 and the second exhaust cavity are communicated through the flow-through hole 131, and a second exhaust port 6 is arranged on the outside of the shell 1, the cooling gas in the second exhaust cavity is discharged through the second exhaust port 6.

[0061] A third flow channel is also formed in the shell 1, which is combined with Figure 5 As shown, the third flow channel includes a first air inlet cavity, a gap between the spacer ring 34 and the rotor 14, a gap between the front bearing seat 13 and the rotor 14, the cavity 43 and the second exhaust cavity, and the cooling gas entering from the first air inlet cavity passes through the third flow channel to achieve heat dissipation on the back side of the impeller 2.

[0062] As shown in Figure 1 , Figure 4 And Figure 13 As shown above, the water cooling assembly includes a first winding pipe 29, the first winding pipe 29 is sleeved on the outer circumferential surface of the front radial magnetic bearing 16 to form a first water cooling part to dissipate heat from the outer circumferential surface of the front radial magnetic bearing 16, and one end of the first winding pipe 29 away from the stator 33 is a first water inlet end 39, and a first water inlet 7 is arranged on the shell 1, and the first water inlet end 39 is communicated with the first water inlet 7.

[0063] And, a second winding pipe 30 is sleeved on the outer circumferential surface of the rear radial magnetic bearing 17 and the axial magnetic bearing 18 to form a second water cooling part to dissipate heat from the outer circumferential surface of the rear radial magnetic bearing 17 and the axial magnetic bearing 18, one side of the second winding pipe 30 away from the stator 33 is a second water inlet end 41, and a second water inlet 8 is arranged on the shell 1, and the second water inlet end 41 is communicated with the second water inlet 8.

[0064] And, a third winding pipe 31 and a fourth winding pipe 32 are sleeved on the outer circumferential surface of the stator 33, preferably the third winding pipe 31 and the fourth winding pipe 32 are spirally wound on the outer circumferential surface of the stator 33, one end of the third winding pipe 31 is communicated with the second winding pipe 30, and one end of the fourth winding pipe 32 is communicated with the first winding pipe 29.

[0065] As shown in Figure 1 , Figure 2 andFigure 13 As shown, the other end of the third winding pipe 31 is communicated with the water inlet part of the first heat exchange assembly 20, i.e. communicated with one end of the cooling coil 24 of the first heat exchange assembly 20, the other end of the cooling coil 24 of the first heat exchange assembly 20 is the second water outlet end 42, the second water outlet end 42 is communicated with the second water outlet 10 provided on the shell 1, the other end of the fourth winding pipe 32 is communicated with the water inlet part of the second heat exchange assembly 21, i.e. communicated with one end of the cooling coil 24 of the second heat exchange assembly 21, the other end of the cooling coil 24 of the second heat exchange assembly 21 is the first water outlet end 40, the first water outlet end 40 is communicated with the first water outlet 9 provided on the shell 1.

[0066] In the embodiment, the flow path of the cooling liquid is divided into two paths, one path flows in from the first water inlet 7 and sequentially passes through the first water inlet end 39, the first winding pipe 29, the fourth winding pipe 32, the first water outlet end 40 and the first water outlet 9, the other path flows in from the second water inlet 8 and sequentially passes through the second water inlet end 41, the second winding pipe 30, the third winding pipe 31, the second water outlet end 42 and the second water outlet 10.

[0067] In use (when working), the first air inlet 3 and the second air inlet 4 respectively introduce cooling gas, part of the cooling gas introduced from the first air inlet 3 is cooled by the third flow channel on the back side of the impeller 2, and then flows out from the second air outlet cavity, the other part passes through the first flow channel, the first heat exchange assembly 20 and the second heat exchange assembly 21, and finally flows out from the first air outlet cavity to cool the front radial magnetic bearing 16 and the stator 33 and exchange heat with the first heat exchange assembly 20 and the second heat exchange assembly 21, the cooling gas introduced from the second air inlet 4 passes through the second flow channel, the axial magnetic bearing 18, the rear radial magnetic bearing 17 and the second heat exchange assembly 21, and finally flows out from the first air outlet cavity to cool the rear radial magnetic bearing 17, the axial magnetic bearing 18 and the stator 33 and exchange heat with the second heat exchange assembly 21.

[0068] The first water inlet 7 and the second water inlet 8 respectively introduce cooling liquid to cool the front radial magnetic bearing 16, the stator 33, the rear radial magnetic bearing 17 and the side close to the outer circumferential surface of the axial magnetic bearing 18, and at the same time take away the heat in the heat exchange device.

Claims

1. A magnetic levitation vacuum pump, comprising a housing (1), and an impeller (2), a front bearing housing (13), a front radial magnetic bearing (16), a stator (33), a rear radial magnetic bearing (17), an axial magnetic bearing (18), and a rotor (14) sequentially assembled within the housing (1), characterized in that, Also includes: Spacer (34), the spacer (34) is disposed between the front bearing housing (13) and the front radial magnetic bearing (16), and there is a communication gap between the spacer (34) and the front radial magnetic bearing (16) to the outside of the housing (1) to form a first air intake chamber; A gap is left between the stator (33) and the rear radial magnetic bearing (17) to communicate with the outside of the housing (1) to form a first exhaust chamber; The first flow channel includes a first intake chamber, an air gap between the front radial magnetic bearing (16) and the rotor (14), an air gap between the stator (33) and the rotor (14), and a first exhaust chamber; A water-cooled assembly is installed on the inner wall of the housing (1), and coolant flows through the water-cooled assembly. The heat exchange device is installed on both sides of the stator (33) and has a communication path with the water cooling assembly so that the coolant flows through the heat exchange device and the gas in the first flow channel flows through the heat exchange device and exchanges heat with the heat exchange device. The heat exchange device includes a first heat exchange component (20) and a second heat exchange component (21). The first heat exchange component (20) is disposed between the front radial magnetic bearing (16) and the stator (33) along the axial direction of the rotor (14). The second heat exchange component (21) is disposed between the rear radial magnetic bearing (17) and the stator (33) along the axial direction of the rotor (14). The first heat exchange component (20) and the second heat exchange component (21) are symmetrically arranged about the stator (33).

2. The magnetic levitation vacuum pump according to claim 1, characterized in that, The first heat exchange assembly (20) includes: The outer casing (22) has an open end on its inner circumference side and the side near the stator (33), and a preset distance is left between it and the outer circumference of the rotor (14). The outer circumference side of the outer casing (22) is a closed end. Heat sink (23), the heat sink (23) is fixed inside the outer shell (22), dividing the space inside the outer shell (22) into an air inlet side and an air outlet side along the axial direction, and the air inlet side and the air outlet side are connected near the outer periphery of the outer shell (22); Cooling coil (24) is fixed inside the heat sink (23) and is connected to the water cooling assembly.

3. A magnetic levitation vacuum pump according to claim 2, characterized in that, The first heat exchange assembly (20) further includes: Heat sink (25), the heat sink (25) is U-shaped and sleeved on the outside of the stator (33) winding. One side of the heat sink (25) passes through the side opening of the outer casing (22) and is fixed to the heat sink (23). Part of the heat sink (25) is located inside the outer casing (22) and the other part is located outside the outer casing (22). The number of heat sinks (25) is the same as the number of stator (33) windings. There is a gap between adjacent heat sinks (25). The outer casing (22) is provided with an isolation insert (26) on the side near the stator (33), and the isolation insert (26) can be inserted into the space.

4. A magnetic levitation vacuum pump according to claim 1, characterized in that: The housing (1) is provided with a rear bearing seat (19), and there is a gap between the rear bearing seat (19) and the housing (1) to communicate with the outside, so as to form a second air intake chamber. The rear bearing seat (19) is provided with an air passage (191) in the radial direction. The second flow channel includes the air gap between the rear bearing housing (19) and the axial magnetic bearing (18) and the rotor (14), the air gap between the rear radial magnetic bearing (17) and the rotor (14), and the first exhaust chamber.

5. A magnetic levitation vacuum pump according to claim 4, characterized in that: The axial magnetic bearing (18) consists of a front axial bearing (181), a rear axial bearing (182) and a thrust disk (183), with the front axial bearing (181) located on the side close to the rear radial magnetic bearing (17). The front axial bearing (181) has a first axial hole (1811) on the side near the outer peripheral surface. The thrust disk (183) has a second axial hole (1831) on the side near the axis of the rotor (14).

6. A magnetic levitation vacuum pump according to claim 1, characterized in that: A gap is left between the spacer ring (34) and the front bearing housing (13) to communicate with the outside, so as to form a second exhaust chamber; A cavity (43) is provided between the impeller (2) and the front bearing housing (13). A first labyrinth seal structure (35) is provided between the side of the impeller (2) near the outer circumference and the front bearing housing (13). A flow hole (131) is provided on the front bearing housing (13). The cavity (43) is connected to the second exhaust chamber through the flow hole (131). The third flow channel includes a first intake chamber, a gap between the partition ring (34) and the rotor (14), a gap between the front bearing housing (13) and the rotor (14), a cavity (43), and a second exhaust chamber.

7. A magnetic levitation vacuum pump according to claim 2, characterized in that: The first heat exchange component (20) is provided with a flow-blocking ring (36) on the air inlet side, and the flow-blocking ring (36) is fixed on the outer peripheral surface of the rotor (14); A second labyrinth sealing structure (37) is provided between the flow-blocking ring (36) and the heat sink (23).

8. A magnetic levitation vacuum pump according to claim 3, characterized in that, The water-cooling assembly includes: The first winding tube (29) is sleeved on the outer peripheral surface of the front radial magnetic bearing (16) to form the first water-cooling section; The second winding tube (30) is sleeved on the outer peripheral surface of the rear radial magnetic bearing (17) and the axial magnetic bearing (18) to form a second water-cooled section; The third winding tube (31) and the fourth winding tube (32) are both sleeved on the outer circumferential surface of the stator (33), and one end of the third winding tube (31) is connected to the second winding tube (30), and one end of the fourth winding tube (32) is connected to the first winding tube (29).

9. A magnetic levitation vacuum pump according to claim 8, characterized in that: The other end of the third winding pipe (31) is connected to the water inlet of the first heat exchange component (20), and the other end of the fourth winding pipe (32) is connected to the water inlet of the second heat exchange component (21).

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