Method for repairing and regenerating Y2O3 oxidized part of TFT (Thin Film Transistor) dry etching machine

Abstract

The invention discloses a method for repairing and regenerating a Y2O3 oxidized part of a TFT (Thin Film Transistor) dry etching machine, and relates to the technical field of precise cleaning and regeneration, the method for repairing and regenerating specifically comprises the following steps: (1) alkali washing: soaking a product with ammonia water with the mass ratio of NH3.H2O to H2O being (10-20): (80-90), soaking at 20-50 DEG C for 1-3 hours, observing the photoresist removal condition during the period, prolonging the soaking time if the photoresist removal condition does not reach the standard, and if the photoresist removal condition does not reach the standard, carrying out alkali washing; the photoresist is fully removed; and (2) pure water soaking: fishing out the product subjected to alkali washing in the step (1) and soaking. According to the method for repairing and regenerating the Y2O3 oxidized part of the TFT dry etching machine, the whole cleaning process of alkali cleaning, pure water soaking, sand blasting, remaining coating thickness measurement, thin spraying and ultrasonic cleaning is adopted, the problem that the cost is too high is solved, the process is simple, the repaired coating is basically consistent with a newly sprayed product, and the cost can be reduced by 50% or above.

Description

Technical Field

[0001] This invention relates to the field of precision cleaning and regeneration technology, specifically a method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine. Background Technology

[0002] In the field of thin-film transistor liquid crystal display (TFT-LCD) manufacturing, TFT dry etching machines are key equipment for achieving high-precision patterning etching, and their performance directly affects the production quality and efficiency of panels. Y2O3 oxide components, as one of the core components of TFT dry etching machines, play a crucial role in the etching process. However, due to their extremely harsh working environment, Y2O3 oxide components are prone to various forms of damage during use, making repair and regeneration a significant challenge for the industry.

[0003] The working principle of a TFT dry etching machine is to use plasma to etch the substrate to achieve specific circuit patterns. During this process, the Y2O3 oxide component is exposed to harsh environments such as high temperature, strong ion bombardment, and chemical corrosion. High temperatures cause changes in the crystal structure of the Y2O3 oxide component, reducing its hardness and wear resistance; strong ion bombardment causes sputtering of surface atoms, resulting in a rough surface and reduced thickness; chemical corrosion causes the oxide component to react with the etching gas, altering its surface chemical composition and properties. The combined effect of these factors severely limits the lifespan of the Y2O3 oxide component.

[0004] From an economic cost perspective, Y2O3 oxide components are typically made from high-quality Y2O3 material, resulting in high manufacturing costs. Frequent replacement of these oxide components significantly increases the operating costs for TFT-LCD manufacturers. For example, the purchase cost of Y2O3 oxide components for an advanced TFT dry etching machine can reach hundreds of thousands or even millions of yuan. During large-scale production, if damaged oxide components cannot be effectively repaired and regenerated, companies will face enormous economic pressure.

[0005] The TFT panel industry has matured and entered mass production in recent years. Dry etching is a crucial step in the TFT process. Dry etching typically uses plasma discharge to etch away the areas on the substrate without photoresist, leaving the areas with photoresist intact, thus forming the desired pattern on the substrate. With technological advancements, customers are demanding longer lifespans for dry etching equipment, leading to the emergence of the Y2O3 spraying process in recent years, which significantly extends the lifespan of products after cleaning and regeneration. For dry-etched oxide parts after spraying, the traditional method is to remove the Y2O3 coating and re-spray, but this method still has the following drawbacks:

[0006] Not only does it consume the aluminum alloy substrate, but it also requires recoating with expensive Y2O3 powder, which greatly increases the production costs for both customers and suppliers.

[0007] Therefore, we propose a method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine to solve the problems mentioned above. Summary of the Invention

[0008] The purpose of this invention is to provide a method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine, in order to solve the problem mentioned in the background art that currently increases production costs for customers and suppliers in the market.

[0009] To achieve the above objectives, the present invention provides the following technical solution: a method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine, the method specifically including the following steps:

[0010] Step (1), Alkali washing: Soak the product in ammonia water with a mass ratio of NH3·H2O:H2O=(10-20):(80-90) at 20-50℃ for 1-3 hours. During this period, observe the removal of photoresist. If the removal does not meet the standard, extend the soaking time to fully remove the photoresist.

[0011] Step (II) Pure water soaking: Take out the product after alkaline washing in step (I) and put it into an ultrapure water tank for overflow soaking for more than 1 hour;

[0012] Step (3), Drying: Take out the product from step (2), first blow dry most of the moisture on the surface of the product with CDA filtered by 0.5μm, and then put it into a high-temperature oven to dry.

[0013] Step (4), Sandblasting: The dried product is peeled off and sandblasted, wherein the dried product is sandblasted using a sandblasting machine;

[0014] Step (5) Thickness Measurement: Using a coating thickness gauge, select 10 points evenly on the product surface to measure the coating thickness, and take the average value as the remaining thickness;

[0015] Step (VI) Spraying: Spraying is performed using coating equipment and powder;

[0016] Step (7) Ultrasonic cleaning: Place the coated product from step (6) into an ultrasonic cleaning tank in a Class 100 cleanroom, and use an ultrasonic cleaning machine to add fresh ultrapure water to the ultrasonic cleaning tank and vibrate for 10 minutes.

[0017] Step (8) Cleanroom Drying: In a Class 100 cleanroom, place the cleaned product into a high-temperature oven to dry.

[0018] Step (nine), Cooling: The dried product is left in a Class 100 cleanroom to cool naturally;

[0019] Step (10), Vacuum Packaging: After cooling, the product is vacuum-packed in a double-layer PE material bag and labeled.

[0020] Preferably, in step (i), commercially available 25% industrial grade ammonia solution and ultrapure water with resistivity >15mΩ·cm are used for preparation, and in steps (i) to (x), the water used is ultrapure water with resistivity >15mΩ·cm.

[0021] Using the above-mentioned technical methods, the entire process uses ultrapure water, which can effectively avoid secondary pollution of the oxidized parts by impurities in the water, ensure the purity of the cleaning and repair process, and help improve the quality and stability of the repaired products.

[0022] Preferably, in steps (iii) and (viii), the power supply parameters of the high-temperature oven are AC380V / 40HZ, the temperature control is 80-600℃, the rated power is 22KW, and the working size is 3M*1.2M*1.2M.

[0023] By employing the above-mentioned technical methods, it is ensured that the temperature can be precisely controlled according to product requirements during the drying and desiccation steps. This ensures both the effectiveness of moisture removal and avoids damage to the oxidized parts due to improper temperature, thus ensuring the reliability and stability of the repair process.

[0024] Preferably, in step (iv), the sandblasting machine is a direct-pressure manual sandblasting machine with a sandblasting gun nozzle diameter of 1-3cm, a sandblasting pressure of 2-5Kg / cm2, and the required abrasive material is 80-220 mesh glass beads.

[0025] By employing the above-mentioned technical methods, precise treatment of the surface of anodized parts can be achieved. While removing surface impurities and some coatings, the bonding force between the Y2O3 coating and the aluminum alloy body can be avoided, ensuring that the repaired anodized parts have structural integrity and reliable performance.

[0026] Preferably, in step (iv), during the sandblasting process, differentiated repair is achieved by adjusting the matching relationship between the abrasive mesh size and the sandblasting pressure.

[0027] By employing the above-mentioned technical methods, the sandblasting process can be flexibly adjusted according to the different wear levels and remaining coating thickness of the oxidized parts, meeting diverse repair needs, improving repair effectiveness and accuracy, and further optimizing repair costs and product quality.

[0028] Preferably, the instrument used to measure the remaining coating thickness in step (v) is a Nix QNIX4500 coating thickness gauge.

[0029] By employing the above-mentioned technical methods, the accuracy and reliability of the measurement data are ensured, providing a precise basis for subsequent spraying operations, ensuring that the spraying thickness is appropriate, and avoiding the impact of excessively thick or thin coatings on the performance of the anodized parts.

[0030] Preferably, the spraying equipment in step (six) is provided by Beijing United Coating, the spraying powder is imported powder produced by FUJIMI, and the spraying thickness is determined according to S5.

[0031] By employing the above-mentioned technical methods, the quality of the spraying materials and equipment is guaranteed, which helps to obtain a high-quality coating. At the same time, by determining the spraying thickness based on the remaining coating thickness, the repair process can be precisely controlled, so that the performance of the repaired coating reaches its optimal level.

[0032] Preferably, in step (vi) during the spraying process, a gradient structure coating is formed by controlling the plasma flame parameters.

[0033] By employing the above-mentioned technical methods, this coating structure can improve the coating's adhesion, wear resistance, and other properties, further optimize the quality of the repaired oxide parts, extend their service life, and meet the high-performance requirements of TFT dry etching machines for oxide parts.

[0034] Preferably, in step (vii), the output voltage of the ultrasonic cleaner is 380V and the output current is 2A.

[0035] By employing the above-mentioned technical methods, it is ensured that appropriate cleaning energy can be provided during the ultrasonic cleaning process to effectively remove impurities and residues from the surface of the coated product, while avoiding damage to the product due to excessive energy, thus ensuring both cleaning effectiveness and product safety.

[0036] Preferably, the packaging bag used in step (x) is made of PE and the packaging method is double-layer vacuum packaging.

[0037] Using the above-mentioned technical methods, double-layer vacuum packaging can effectively prevent oxidized parts from being affected by oxidation and moisture during storage and transportation, protect the quality of the repaired oxidized parts, and the labeling facilitates product identification and management.

[0038] Compared with the prior art, the beneficial effects of the present invention are: the method for repairing and regenerating Y2O3 oxide parts in a TFT dry etching machine:

[0039] 1. The entire cleaning process, including alkaline washing, pure water immersion, sandblasting, measuring the remaining coating thickness, thin spraying, and ultrasonic cleaning, is used to solve the problem of excessively high costs. This process is simple, and the repaired coating is basically the same as the newly sprayed product, reducing costs by more than 50%. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the workflow of the present invention. Detailed Implementation

[0041] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0042] Please see Figure 1 This invention provides a technical solution: a method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine, the method specifically including the following steps:

[0043] Step (1), Alkali washing: Soak the product in ammonia water with a mass ratio of NH3·H2O:H2O=(10-20):(80-90) at 20-50℃ for 1-3 hours. During this period, observe the removal of photoresist. If the removal is not satisfactory, extend the soaking time to fully remove the photoresist. Wear protective masks and gloves. Slowly add ammonia water to the water and stir completely. After the temperature reaches 30 degrees Celsius, immerse the product in the solution for 2 hours. Remove the product and observe whether most of the photoresist on its surface has been removed. If most of the photoresist has not been removed, continue soaking.

[0044] Step (II) Pure water soaking: Take out the product after alkaline washing in step (I) and put it into an ultrapure water tank for overflow soaking for more than 1 hour. Overflow soaking is to make the residual alkali solution more completely removed.

[0045] Step (3), Drying: Take out the product from step (2), first blow dry most of the moisture on the surface of the product with CDA filtered through a 0.5μm filter, and then put it into a high-temperature oven to dry. The CDA is filtered through a 0.5μm filter. Dry in a high-temperature oven at 80℃ for 40 minutes.

[0046] Step (4) Sandblasting: The dried product is peeled off and sandblasted. The dried product is sandblasted with a sandblasting machine. Low pressure can avoid damaging the bonding force between the Y2O3 coating and the aluminum alloy body.

[0047] Step (5) Thickness Measurement: Using a coating thickness gauge, select 10 points evenly on the product surface to measure the coating thickness, and take the average value as the remaining thickness;

[0048] Step (VI) Spraying: Spraying is carried out using coating equipment and powder. The spraying equipment is provided by Beijing United Coating. The process parameters are: current 580A, voltage 70V, argon flow rate 50NLPM, and hydrogen flow rate 8NLPM. The spraying powder is imported powder produced by FUJIMI. The spraying thickness depends on the remaining coating thickness. Generally, the spraying thickness should not exceed 30μm.

[0049] Step (7) Ultrasonic cleaning: Place the coated product from step (6) into an ultrasonic cleaning tank in a Class 100 cleanroom, and use an ultrasonic cleaning machine to add fresh ultrapure water to the ultrasonic cleaning tank and vibrate for 10 minutes.

[0050] Step (8) Cleanroom drying: In a Class 100 cleanroom, place the cleaned product into a high-temperature oven for drying at 80°C for 8 hours.

[0051] Step (nine), Cooling: The dried product is left in a Class 100 cleanroom to cool naturally;

[0052] Step (10), Vacuum Packaging: After cooling, the product is vacuum-packed in a double-layer PE material bag and labeled.

[0053] In step (I), a commercially available 25% industrial-grade ammonia solution and ultrapure water with a resistivity >15mΩ·cm are used for preparation. In steps (I) to (X), the water used is ultrapure water with a resistivity >15mΩ·cm. This can minimize the contamination of the oxide parts by impurities in the water. During the cleaning and repair process, it is possible to avoid the impact of residual impurities on the coating quality and the performance of the oxide parts, ensuring that the repaired product meets high precision requirements, improving the stability and reliability of the product, and extending its service life.

[0054] In steps (3) and (8), the power supply parameters of the high-temperature oven are AC380V / 40HZ, the temperature control is 80-600℃, the rated power is 22KW, and the working size is 3M*1.2M*1.2M. Precise temperature control can ensure that the product moisture is fully removed, while avoiding thermal damage to the oxidized parts due to excessively high or low temperatures, ensuring the stability of product quality during the repair process and improving the repair success rate.

[0055] In step (four), the sandblasting machine is a direct-pressure manual sandblasting machine with a sandblasting gun nozzle diameter of 1-3cm and a sandblasting pressure of 2-5Kg / cm2. The required abrasive material is 80-220 mesh glass beads, which can achieve fine treatment of the surface of the oxide parts. The appropriate sandblasting pressure and abrasive material can effectively remove surface impurities and some coatings, while avoiding excessive impact on the substrate of the oxide parts, protecting the bonding force between the Y2O3 coating and the aluminum alloy body, ensuring the structural integrity of the repaired oxide parts, and maintaining good performance.

[0056] Step (iv) During the sandblasting process, differentiated repair is achieved by adjusting the matching relationship between the abrasive mesh size and the sandblasting pressure. Oxidized parts with different wear levels and remaining coating thicknesses can be repaired using different combinations of abrasive mesh size and sandblasting pressure, thereby improving the adaptability of the repair process, ensuring that each oxidized part can receive the most suitable repair treatment, and improving the overall repair effect and product quality.

[0057] In step (5), the instrument used to measure the remaining coating thickness is the Nix QNIX4500 coating thickness gauge, which ensures the accuracy and scientific nature of the measurement of the remaining coating thickness. The accurate measurement data provides a reliable basis for subsequent spraying, enabling the spraying thickness to be precisely controlled according to the actual situation, avoiding the impact of improper coating thickness on the performance of the anodized parts, and ensuring that the repaired anodized parts meet the usage requirements.

[0058] In step (six), the spraying equipment is provided by Beijing United Coating, and the spraying powder is imported powder produced by FUJIMI. The spraying thickness is determined according to S5, which ensures the quality stability of the spraying materials and process. High-quality spraying equipment and imported powder, combined with scientific thickness control, can form a coating with good performance, effectively repair the surface of the oxide parts, restore their function, and meet the high precision requirements of the TFT dry etching machine for oxide parts.

[0059] In step (six), during the spraying process, a gradient structure coating is formed by controlling the plasma flame parameters. The gradient structure coating can enhance the adhesion between the coating and the substrate, improve the wear resistance and corrosion resistance of the coating, and further optimize the quality of the repaired oxide parts. This allows them to perform better in the harsh working environment of the TFT dry etching machine, extend their service life, and reduce equipment maintenance costs.

[0060] In step (seven), the ultrasonic cleaner has an output voltage of 380V and an output current of 2A. It can effectively remove impurities and residues from the surface of the product after spraying without damaging the product. It ensures the cleaning effect while protecting the integrity and performance of the product, thus improving the cleanliness and quality of the repaired product.

[0061] The packaging bag used in step (10) is made of PE and is double-vacuum packaged. Double-vacuum packaging further isolates the product from air and moisture, effectively protecting the repaired oxidized parts from oxidation and moisture during storage and transportation. The affixing of labels facilitates product identification, management, and traceability, ensuring that the product is used and maintained accurately during its circulation.

[0062] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0063] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine, characterized in that: The repair and regeneration method specifically includes the following steps: Step (1), Alkali washing: Soak the product in ammonia water with a mass ratio of NH3·H2O:H2O=(10-20):(80-90) at 20-50℃ for 1-3 hours. During this period, observe the removal of photoresist. If the removal does not meet the standard, extend the soaking time to fully remove the photoresist. Step (II) Pure water soaking: Take out the product after alkaline washing in step (I) and put it into an ultrapure water tank for overflow soaking for more than 1 hour; Step (3), Drying: Take out the product from step (2), first blow dry most of the moisture on the surface of the product with CDA filtered by 0.5μm, and then put it into a high-temperature oven to dry. Step (4), Sandblasting: The dried product is peeled off and sandblasted, wherein the dried product is sandblasted using a sandblasting machine; Step (5) Thickness Measurement: Using a coating thickness gauge, select 10 points evenly on the product surface to measure the coating thickness, and take the average value as the remaining thickness; Step (VI) Spraying: Spraying is performed using coating equipment and powder; Step (7) Ultrasonic cleaning: Place the coated product from step (6) into an ultrasonic cleaning tank in a Class 100 cleanroom, and use an ultrasonic cleaning machine to add fresh ultrapure water to the ultrasonic cleaning tank and vibrate for 10 minutes. Step (8) Cleanroom Drying: In a Class 100 cleanroom, place the cleaned product into a high-temperature oven to dry. Step (Nine), Cooling: The dried product is left in a Class 100 cleanroom to cool naturally; Step (10), Vacuum Packaging: After cooling, the product is vacuum-packed in a double-layer PE material bag and labeled.

2. The method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine according to claim 1, characterized in that: In step (i), commercially available 25% industrial grade ammonia solution and ultrapure water with resistivity >15mΩ·CM are used for preparation. In steps (i) to (x), the water used is ultrapure water with resistivity >15mΩ·CM.

3. The method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine according to claim 1, characterized in that: In steps (3) and (8), the power supply parameters of the high-temperature oven are AC380V / 40HZ, the temperature control is 80-600℃, the rated power is 22KW, and the working dimensions are 3M*1.2M*1.2M.

4. The method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine according to claim 1, characterized in that: In step (four), the sandblasting machine is a direct-pressure manual sandblasting machine with a sandblasting gun nozzle diameter of 1-3cm, a sandblasting pressure of 2-5Kg / cm2, and the required abrasive material is 80-220 mesh glass beads.

5. The method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine according to claim 4, characterized in that: Step (iv) During the sandblasting process, differentiated repair is achieved by adjusting the matching relationship between the abrasive mesh size and the sandblasting pressure.

6. The method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine according to claim 1, characterized in that: In step (5), the instrument used to measure the remaining coating thickness is the Nix QNIX4500 coating thickness gauge.

7. The method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine according to claim 1, characterized in that: In step (six), the spraying equipment was provided by Beijing United Coating, the spraying powder was imported powder produced by FUJIMI, and the spraying thickness was determined according to S5.

8. The method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine according to claim 1, characterized in that: Step (six) During the spraying process, a gradient structure coating is formed by controlling the plasma flame parameters.

9. The method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine according to claim 1, characterized in that: In step (seven), the ultrasonic cleaner has an output voltage of 380V and an output current of 2A.

10. The method for repairing and regenerating Y2O3 oxide components on a TFT dry etching machine according to claim 1, characterized in that: The packaging bag used in step (10) is made of PE and is packaged using a double-layer vacuum packaging method.

Images