Feeding device and tray placing apparatus
By using the mounting frame, platform, mounting tray, and pressing structure of the feeding device, the problem of poor positional reliability of semiconductor wafers on the feeding tray is solved, enabling precise picking and placing of wafers and efficient tray placement.
Patent Information
- Application Number
- CN202511444508.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-10
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2045-10-10
AI Technical Summary
The poor reliability of the semiconductor wafer's position on the feed tray affects the tray placement efficiency.
The feeding device includes a mounting frame, a platform, a mounting plate, a drive unit, and a pressing structure. The sheet is attached to the diaphragm. Through the cooperation of the drive unit and the pressing structure, the reliability of the sheet's position in the Z-axis direction is ensured, and precise picking and placing are achieved.
It improves the reliability of sheet positioning, simplifies the gripping process, and increases tray placement efficiency.
Smart Images

Figure CN120933203B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of semiconductor sheet tray arranging, in particular to a feeding device and a tray arranging equipment. BACKGROUND
[0002] After production, the semiconductor sheet needs to be first cracked by a cracking device, and then the cracked sheet flows to a tray arranging and sorting device for sorting and arranging. For example, a semiconductor chip sorting machine disclosed in Chinese Patent CN202011552366.1 includes a feeding tray, a storage tray, and an arranging arm. The feeding tray is used to accommodate chips to be arranged, and the storage tray is used to accommodate storage boards for storing chips. The bottoms of the feeding tray and the storage tray are respectively provided with driving mechanisms, and the arranging arm is located between the feeding tray and the storage tray. The arranging arm is adapted to swing to the feeding tray to pick up the chips, and swing to the storage tray to place the chips on the storage boards.
[0003] However, the chips are directly and randomly arranged on the feeding tray, which has poor position reliability, and the arranging arm is not convenient for picking up the chips, which greatly affects the tray arranging efficiency.
[0004] Therefore, it is necessary to improve the prior art to overcome the defects in the prior art. SUMMARY
[0005] The purpose of the present application is to provide a feeding device. The sheet has good position reliability at the feeding device, and the tray arranging efficiency is improved.
[0006] The purpose of the present application is achieved by the following technical scheme: a feeding device, comprising:
[0007] a first mounting frame;
[0008] a first carrier provided on the first mounting frame;
[0009] a mounting disc located above the first carrier, and a through hole is provided in the middle of the mounting disc along the Z-axis direction to form an avoiding area for the sheet component to be placed on the first carrier;
[0010] a first driving member provided on the first mounting frame and in transmission connection with the mounting disc;
[0011] a pressing structure including a transmission disc provided on the mounting disc, a second driving member, and a pressing plate provided on the mounting disc. The transmission disc is rotatable about the direction parallel to the Z-axis. The transmission disc is provided with a third avoiding hole for the sheet component to be placed on the first carrier. The second driving member is adapted to drive the transmission disc to rotate. The pressing plate is switched to an avoiding state or a blocking state in response to the rotation of the transmission disc;
[0012] The sheet assembly includes a film sheet and a sheet attached to the film sheet in a sheet state, a projection of the sheet assembly carried by the first carrier in a Z-axis direction does not coincide with the pressing plate when the pressing plate is in the avoiding state, and the film sheet partially coincides with the pressing plate in the Z-axis direction and the sheet does not coincide with the pressing plate in the Z-axis direction when the pressing plate is in the blocking state, the pressing plate abuts against the film sheet downward along the Z-axis in response to the driving of the first driving member.
[0013] Further, the mounting disc includes:
[0014] A bottom plate is connected to the output end of the first driving member, the bottom plate has a circular ring structure, and a first avoiding hole is formed in the middle part;
[0015] A cover plate has a circular ring structure and is coaxially arranged above the bottom plate, and a second avoiding hole is formed in the middle part of the cover plate, which is coaxial with the first avoiding hole, and the first avoiding hole and the second avoiding hole cooperate to form the avoiding area;
[0016] A connecting ring is connected between the bottom plate and the cover plate;
[0017] The transmission disc is coaxially arranged between the bottom plate and the cover plate and is accommodated in the connecting ring, and the inner edge of the connecting ring is suitable for guiding the rotation of the transmission disc.
[0018] Further, the inner diameter of the first avoiding hole is larger than the inner diameter of the third avoiding hole, the inner diameter of the second avoiding hole is smaller than the inner diameter of the third avoiding hole, the bottom of the transmission disc is provided with a transmission rack, and the second driving member is arranged on the bottom plate and has a transmission gear engaged with the transmission rack.
[0019] Further, a plurality of pressing plates are arranged along the circumference of the transmission disc, the top surface of the transmission disc is recessed inward to form a sliding groove corresponding to each pressing plate, and each pressing plate is partially and slidably arranged in the sliding groove, and each pressing plate is synchronously switched to the avoiding state or the blocking state in response to the rotation of the transmission disc.
[0020] Further, the pressing plate includes:
[0021] A plate body is arranged between the top surface of the transmission disc and the bottom surface of the cover plate, and the plate body is partially protruded relative to the inner wall of the third avoiding hole to press the film sheet;
[0022] A guide part is protruded from the bottom of the plate body and is slidably arranged in the sliding groove;
[0023] A guide pin, whose axial direction is parallel to the axial direction of the transmission disc, and whose top is protruded relative to the top of the plate body, and a guide hole is formed through the cover plate corresponding to the position of the guide pin, and the guide pin is arranged in the guide hole.
[0024] Further, the first driving member is uniformly distributed along the circumference of the mounting disc.
[0025] Further, the first mounting frame comprises:
[0026] A mounting frame body;
[0027] A rotating seat arranged on the mounting frame body and capable of rotating around the direction parallel to the Z axis;
[0028] The first carrier and the first driving member are fixedly connected with the rotating seat, and the mounting frame body is provided with a first driving assembly, and the first driving assembly is suitable for driving the first carrier to rotate.
[0029] Further, the first carrier and the rotating seat are both circular in outer contour, the first carrier is coaxially arranged on the top of the rotating seat, the rotating seat is inwardly recessed on the outer periphery to form a guide groove, and the first mounting frame comprises a plurality of guide bearings arranged on the mounting frame body, the guide bearings are arranged around the outer periphery of the rotating seat, and part of the guide bearings are embedded in the guide groove to support and guide the rotating seat to rotate.
[0030] Further, the first carrier is formed with a ring of teeth on the outer periphery, and the first driving assembly is suitable for engaging with the teeth to drive the first carrier to rotate.
[0031] In addition, the application also provides a disc arranging device comprising the above-mentioned feeding device.
[0032] Compared with the prior art, the application has the following beneficial effects: the above structure is adopted, the sheet is attached to the film, the particles scattered by the sheet are avoided, the film can be fixed by the feeding device, the position of the sheet is reliable, the subsequent grabbing and disc arranging are more convenient, and the disc arranging efficiency is improved; in addition, by arranging the mounting disc, the first driving member and the pressing structure, the pressing plate is switched to the avoiding state under the driving of the second driving member at the beginning, so that the sheet assembly can be smoothly placed on the first carrier, then the second driving member drives the pressing plate to switch to the blocking state, and the first driving member drives the pressing plate to descend, so as to tightly press the film on the first carrier, the film is stably placed on the first carrier, and the sheet is avoided by the avoiding area and the third avoiding hole, so as to ensure that the particles of the sheet can be accurately and reliably taken away from the film, and the disc arranging operation is very reliable. BRIEF DESCRIPTION OF DRAWINGS
[0033] Figure 1is the structural schematic view of the feeding device of the present application.
[0034] Figure 2 is the structural schematic view of the sheet assembly of the present application.
[0035] Figure 3 is the structural schematic view of the feeding device of the present application after removing the ejector pin mechanism and the first adjusting module.
[0036] Figure 4 is the exploded structural schematic view of Figure 3 .
[0037] Figure 5 is the exploded structural schematic view of the mounting disc, the first driving member and the pressing structure of the present application.
[0038] Figure 6 is the state schematic view of the present application when the pressing plate is in the avoiding state.
[0039] Figure 7 is the state schematic view of the present application when the pressing plate is in the blocking state.
[0040] Figure 8 is the exploded structural schematic view of Figure 3 .
[0041] Figure 9 is the structural schematic view of the ejector pin mechanism of the present application.
[0042] Figure 10 is the structural schematic view of the disc mounting device of the present application.
[0043] Figure 11 is the mounting schematic view of the feeding device, the storage device and the swing arm device of the present application.
[0044] Figure 12 is the structural schematic view of the first carrying mechanism of the present application.
[0045] Figure 13 is the structural schematic view of the second carrying mechanism of the present application.
[0046] BRIEF DESCRIPTION OF THE DRAWINGS
[0047] 100, supply device; 110, first mounting frame; 111, mounting frame body; 112, rotating seat; 1121, guide groove; 113, guide bearing; 120, first carrier; 121, tooth portion; 130, mounting disc; 131, bottom plate; 1311, first avoiding hole; 132, cover plate; 1321, second avoiding hole; 1322, guide hole; 133, connecting ring; 140, first driving member; 151, transmission disc; 1511, third avoiding hole; 1512, sliding groove; 1513, transmission rack; 152, second driving member; 1521, transmission gear; 153, pressing plate; 1531, plate body; 1532, guide portion; 1533, guide pin; 1534, arc-shaped side surface; 160, first driving assembly; 170, ejector pin mechanism; 171, ejector pin assembly; 1711, ejector rod; 1712, ejector pin; 172, second driving assembly; 180, first adjusting module; 200, sheet assembly; 210, diaphragm; 220, sheet; 300, storage device; 310, second mounting frame; 320, second carrier; 330, second adjusting module; 400, swing arm device; 410, swing arm; 420, third driving assembly; 430, visual assembly; 500, conveying device; 510, first conveying line; 520, second conveying line; 530, third conveying line; 600, carrying device; 610, first carrying mechanism; 611, first carrying module; 612, first support; 613, first pick-and-place assembly; 614, second pick-and-place assembly; 615, third driving member; 620, second carrying mechanism; 621, second carrying module; 622, second support; 623, third pick-and-place assembly; 700, carrier disc. DETAILED DESCRIPTION
[0048] In order to make the above objectives, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below with reference to the drawings. It can be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application. In addition, it should be noted that, for the purpose of description, only the parts related to the present application are shown in the drawings, not all the structures. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.
[0049] The terms "comprising" and "having" and any variations thereof in the present application are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.
[0050] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another. As will be apparent to those of ordinary skill in the art, embodiments described herein can be combined with other embodiments.
[0051] Referring to Figures 1 to 3 As shown in the drawings, the feeding device 100 corresponding to a preferred embodiment of the application comprises a first mounting frame 110, a first carrier 120 arranged on the first mounting frame 110, a mounting disc 130 located above the first carrier 120 and having a through hole in the Z-axis direction in the middle thereof for accommodating the sheet assembly 200 on the first carrier 120, a first driving member 140 arranged on the first mounting frame 110 and in driving connection with the mounting disc 130, and a pressing structure comprising a transmission disc 151 arranged on the mounting disc 130, a second driving member 152 and a pressing plate 153 arranged on the mounting disc 130, the transmission disc 151 being rotatable about the direction parallel to the Z-axis, the transmission disc 151 being provided with a third avoiding hole 1511 for accommodating the sheet assembly 200 on the first carrier 120, the second driving member 152 being adapted to drive the transmission disc 151 to rotate, and the pressing plate 153 being switched to an avoiding state or a blocking state in response to the rotation of the transmission disc 151, wherein the sheet assembly 200 comprises a diaphragm 210 and a sheet 220 attached to the diaphragm 210 and in a split state, the projection of the sheet assembly 200 on the Z-axis direction and the projection of the pressing plate 153 on the Z-axis direction are not coincident when the pressing plate 153 is in the avoiding state, and the projection of the diaphragm 210 on the Z-axis direction and the projection of the pressing plate 153 on the Z-axis direction are partially coincident and the projection of the sheet 220 on the Z-axis direction and the projection of the pressing plate 153 on the Z-axis direction are not coincident when the pressing plate 153 is in the blocking state, and the pressing plate 153 is pressed against the diaphragm 210 along the Z-axis in response to the driving of the first driving member 140.
[0052] The sheet 220 is attached to the film sheet 210, avoiding the particles scattered by the cracking of the sheet 220, and the feeding device 100 can fix the film sheet 210, so that the position of the sheet 220 is reliable, and the subsequent grabbing and placing are more convenient, and the placing efficiency is improved. In addition, by setting the mounting disc 130, the first driving member 140 and the pressing structure, initially, the pressing plate 153 is switched to the avoiding state under the driving of the second driving member 152, so that the sheet assembly 200 can be smoothly placed on the first loading platform 120, and then the second driving member 152 drives the pressing plate 153 to switch to the blocking state, and the first driving member 140 drives the pressing plate 153 to descend, so as to tightly press the film sheet 210 to the first loading platform 120, and the film sheet 210 is stably placed on the first loading platform 120, and the sheet 220 is avoided by the avoiding area and the third avoiding hole 1511, so as to ensure that the particles of the sheet 220 can be accurately and reliably taken away from the film sheet 210, and the placing operation is very reliable.
[0053] Further, referring to FIGS. 1, 2 and 3, Figure 4 and Figure 5 As shown, the mounting disc 130 includes a bottom plate 131 and a cover plate 132 located above the bottom plate 131, and the bottom plate 131 and the cover plate 132 are coaxially arranged in a circular ring structure. A first avoiding hole 1311 is coaxially arranged in the middle of the bottom plate 131, and a second avoiding hole 1321 is coaxially arranged in the middle of the cover plate 132. The first avoiding hole 1311 and the second avoiding hole 1321 cooperate to form the aforementioned avoiding area. A connecting ring 133 is connected between the bottom plate 131 and the cover plate 132 to form a receiving area for mounting the pressing plate 153 between the bottom plate 131 and the cover plate 132. The connecting ring 133 can be integrally formed with the cover plate 132 and annularly arranged at the outer edge of the cover plate 132. The bottom of the connecting ring 133 is detachably connected with the bottom plate 131. It is true that in other embodiments, the connecting ring 133 can be integrally formed with the bottom plate 131 and detachably connected with the cover plate 132.
[0054] The first driving member 140 is a linear cylinder arranged along the Z-axis direction, and the output end thereof is connected with the bottom of the bottom plate 131 to support and drive the mounting disc 130 to ascend and descend along the Z-axis direction. Preferably, the first driving member 140 has a plurality of numbers and is equally spaced along the circumference of the mounting disc 130. The plurality of first driving members 140 cooperate to support and drive the mounting disc 130 to ascend and descend, improving the reliability of the support and the ascending and descending.
[0055] Further, the transmission disc 151 is coaxially arranged on the bottom plate 131 and accommodated in the connecting ring 133, the inner edge of the connecting ring 133 is adapted to guide the transmission disc 151 to rotate around the axis thereof, and the cover plate 132 is located above the transmission disc 151 to prevent the transmission disc 151 from being separated from the mounting disc 130. The top surface of the transmission disc 151 is inwardly recessed with a plurality of sliding grooves 1512 extending along the tangential direction of the transmission disc 151 and circumferentially arrayed around the axis of the transmission disc 151. A plurality of pressing plates 153 are arranged along the circumferential direction of the transmission disc 151, and the pressing plates 153 correspond to the sliding grooves 1512 one by one, part of the pressing plates 153 is accommodated in the sliding grooves 1512 and can slide along the sliding grooves 1512, and part of the pressing plates 153 protrudes relative to the inner wall of the third avoiding hole 1511. When the transmission disc 151 rotates, the pressing plates 153 can be rotated under the pushing of the sliding grooves 1512 to adjust the protruding degree of the pressing plates 153 relative to the inner wall of the third avoiding hole 1511, thereby switching to the avoiding state or the blocking state.
[0056] Further, the pressing plate 153 comprises a plate body 1531 and a guide portion 1532 protruding from the bottom of the plate body 1531, the guide portion 1532 is adapted to the sliding groove 1512 and is embedded in the sliding groove 1512, and the top surface of the transmission disc 151 and the bottom surface of the cover plate 132 have a gap therebetween, the plate body 1531 is fitted between the top surface of the transmission disc 151 and the bottom surface of the cover plate 132 to limit the transmission disc 151 and the plate body 1531 in the axial direction of the mounting disc 130. Part of the plate body 1531 protrudes relative to the inner wall of the third avoiding hole 1511 to press the diaphragm 210. The guide pin 1533 is fixed on the pressing plate 153, the axial direction of the guide pin 1533 is parallel to the axial direction of the transmission disc 151, the top of the guide pin 1533 protrudes relative to the top of the plate body 1531, the guide hole 1322 is strip-shaped and is formed through the cover plate 132 at the position corresponding to the guide pin 1533, the guide pin 1533 is arranged in the guide hole 1322, and the guide hole 1322 is adapted to guide the pressing plate 153 during the rotation of the pressing plate 153. The guide hole 1322 and the sliding groove 1512 can cooperate with each other to enable the pressing plate 153 to stably and reliably rotate along the preset path to the avoiding state or the blocking state.
[0057] Preferably, in the embodiment, the diaphragm 210 is a circular sheet, and the sheet material 220 is located in the middle region of the diaphragm 210. The plate body 1531 has an arc-shaped side surface 1534 facing the third avoiding hole 1511. Referring to Figure 6 and Figure 7As shown, when each pressing plate 153 is switched to the avoiding state, the arc-shaped side surface 1534 encloses a circular hole coaxial with the third avoiding hole 1511, and the inner diameter of the circular hole is greater than the outer diameter of the diaphragm 210, so as to allow the sheet assembly 200 to pass through and be placed on the first loading platform 120; when each pressing plate 153 is switched to the blocking state, the corner of the arc-shaped side surface 1534 close to the center of the transmission disc 151, and the corner of the arc-shaped side surface 1534 away from the center of the transmission disc 151, so that the corner close to the center of the transmission disc 151 can be used to press the diaphragm 210.
[0058] The inner diameter of the first avoiding hole 1311 is greater than the inner diameter of the third avoiding hole 1511; the inner diameter of the second avoiding hole 1321 is less than the inner diameter of the third avoiding hole 1511 and greater than the inner diameter of the circular hole enclosed by the arc-shaped side surface 1534. The bottom of the transmission disc 151 is provided with a transmission rack 1513 which is an arc-shaped rack coaxial with the transmission disc 151, and the second driving member 152 is a rotary motor fixed to the bottom plate 131, and the output end of the rotary motor is provided with a transmission gear 1521 which is engaged with the transmission rack 1513. The transmission disc 151 is adapted to be positively rotated to a first preset position under the transmission of the transmission gear 1521 and the transmission rack 1513, so that the pressing plate 153 is in the avoiding state, or reversely rotated to a second preset position, so that the pressing plate 153 is in the blocking state.
[0059] Further, referring to Figure 3 and Figure 8 The first mounting bracket 110 includes a mounting bracket body 111 and a rotating seat 112, the rotating seat 112 is arranged on the mounting bracket body 111 and can rotate around the direction parallel to the Z axis. The first loading platform 120 and the first driving member 140 are fixedly connected with the rotating seat 112. The mounting bracket body 111 is provided with a first driving assembly 160 which is adapted to drive the first loading platform 120 to rotate. By adopting the above structure, the diaphragm 210 can rotate around the direction parallel to the Z axis, so as to correct the position after the sheet assembly 200 is placed on the first loading platform 120, and ensure that the particles of the sheet 220 are arrayed along the X axis and the Y axis, which is convenient for subsequent tray arranging.
[0060] Specifically, the first carrier 120 and the rotating seat 112 are both circular in outer profile, the first carrier 120 is coaxially arranged on the top of the rotating seat 112, and the first driving member 140 is fixed to the outer periphery of the rotating seat 112, so that the first carrier 120 and the first driving member 140 can rotate synchronously with the rotating seat 112. The outer periphery of the rotating seat 112 is inwardly recessed to form a ring of guide grooves 1121, and the mounting bracket body 111 is provided with a plurality of guide bearings 113 around the rotating seat 112, the guide bearings 113 are partially embedded in the guide grooves 1121 to support and guide the rotating seat 112 to rotate. The outer periphery of the first carrier 120 is formed with a ring of tooth portions 121, and the first driving assembly 160 is a driving structure of a motor cooperating with a belt, the belt of the first driving assembly 160 is engaged with the tooth portions 121 to drive the first carrier 120 to rotate.
[0061] Preferably, the first carrier 120 and the rotating seat 112 are both annular structures, and both have an inner hole with the same axis as the outer edge in the middle. The mounting bracket body 111 is a through structure corresponding to the middle of the two. Figure 1 and Figure 9 As shown in FIGS. 1, 2 and 3, the feeding device 100 further comprises a thimble mechanism 170, which comprises a thimble assembly 171 and a second driving assembly 172. The second driving assembly 172 is located below the first mounting bracket 110, the lower end of the thimble assembly 171 is in transmission connection with the second driving assembly 172, and the upper end penetrates the mounting bracket body 111, the rotating seat 112 and the first carrier 120 in sequence and is arranged in the avoiding area and the third avoiding hole 1511. The outer edge of the diaphragm 210 is carried on the first carrier 120, and the middle part is in a suspended state. The thimble assembly 171 is adapted to support the particle to be taken away from the sheet 220 along the Z-axis upward under the driving of the second driving assembly 172, so that the taking and placing structure can more reliably take away the particle.
[0062] The second driving assembly 172 can adopt a motor cooperating with a cam to realize the reciprocating lifting of the thimble assembly 171. The thimble assembly 171 comprises a thimble rod 1711 and thimbles 1712. The thimble rod 1711 is arranged along the Z-axis direction, and the lower end thereof is in transmission cooperation with the second driving assembly 172. The thimbles 1712 are fixed to the upper end of the thimble rod 1711, and the number of the thimbles 1712 is at least one, and in this embodiment, it is preferred to be four to cooperate with supporting a particle. Preferably, a debonding structure can also be arranged on the thimble rod 1711. When the thimble rod 1711 drives the thimbles 1712 to rise, it can debond the particle to be taken away, facilitating the taking away of the particle.
[0063] In addition, the feeding device 100 further comprises a first adjustment module 180, which is in transmission connection with the mounting bracket body 111 to drive the mounting bracket body 111 to move along the X-axis and Y-axis directions.
[0064] The working process of the feeding device 100 is as follows: initially, the pressing plate 153 is in the avoiding state, and the sheet assembly 200 is coaxially arranged on the first carrier 120; then the second driving member 152 drives the pressing plate 153 to switch to the blocking state, and then the first driving member 140 drives the mounting disc 130 to descend, so that the pressing plate 153 presses multiple regions of the outer edge of the diaphragm 210; the first adjusting module 180 drives the first carrier 120 to step along the preset path, so that each particle on the sheet 220 flows to the taking position one by one, and each time the first carrier 120 moves one step, the thimble mechanism 170 is upwardly lifted to take the particle in the taking position, and then the taking structure takes away the particle; when all the particles are taken away, the mounting disc 130 is raised, the pressing plate 153 releases the diaphragm 210, and is reset to the avoiding state, so as to take away the empty diaphragm 210 by the taking structure.
[0065] Further, referring to Fig. 1, Figure 10 The present application further provides a tray placing device, which comprises the feeding device 100, the storage device 300, the swing arm device 400, the conveying device 500 and the carrying device 600. The storage device 300 is used for receiving the empty carrier 700, and the swing arm device 400 is located between the feeding device 100 and the storage device 300, so as to transfer the particles in the feeding device 100 to the carrier 700.
[0066] Further, referring to Fig. 1, Figure 11 The storage device 300 comprises a second mounting frame 310, a second carrier 320 and a second adjusting module 330. The second mounting frame 310 is in transmission connection with the second adjusting module 330, and the structure of the second adjusting module 330 is the same as that of the first adjusting module 180, which will not be repeated here. The second carrier 320 is arranged on the second mounting frame 310 and is used for carrying the fixed carrier 700. In working, the second adjusting module 330 is adapted to drive the carrier 700 to step along the preset path, so that each storage grid of the carrier 700 flows to the taking position of the swing arm device 400 one by one, so as to place the particles to the carrier 700 one by one.
[0067] The swing arm device 400 comprises a swing arm 410 and a third driving assembly 420 for driving the swing arm 410. The end of the swing arm 410 is provided with a vacuum suction member for taking and placing the particles. The swing arm 410 can be swung to the taking position or the placing position by the third driving assembly 420, and is lowered along the Z axis when being swung to the taking position or the placing position, and is raised along the Z axis when being swung away from the taking position or the placing position, so as to realize the transfer and the tray placing of the particles. The swing arm device 400 is a conventional structure, which will not be repeated here.
[0068] Preferably, the swing arm device 400 further comprises two vision assemblies 430 corresponding to the first carrier 120 and the second carrier 320 respectively to acquire image information of the sheet assembly 200 and the carrier 700, the vision assembly 430 corresponding to the first carrier 120 is capable of realizing position correction and appearance inspection of the sheet assembly 200, and the vision assembly 430 corresponding to the second carrier 320 is capable of checking whether the placement of the particles on the carrier 700 is qualified.
[0069] Further, referring to FIGS. 1, 2 and 3, Figure 10 , Figure 12 and Figure 13 , the conveying device 500 comprises a first conveying line 510, a second conveying line 520 and a third conveying line 530. The first conveying line 510 is used for inputting the sheet assembly 200, specifically, an input end of the first conveying line 510 is connected with a front-end flaking device, so that the sheet assembly 200 output by the front-end flaking device can flow to the first conveying line 510. The second conveying line 520 is used for inputting the empty carrier 700, and the third conveying line 530 is used for outputting the full carrier 700. The conveying device 600 comprises a first conveying mechanism 610 and a second conveying mechanism 620, the first conveying mechanism 610 is adapted to convey the sheet assembly 200 from the first conveying line 510 to the first carrier 120. The second conveying mechanism 620 is adapted to convey the empty carrier 700 from the second conveying line 520 to the second carrier 320, or to convey the full carrier 700 from the second carrier 320 to the third conveying line 530.
[0070] The conveying directions of the first conveying line 510, the second conveying line 520 and the third conveying line 530 are parallel to the X-axis direction, and the feeding device 100, the swing arm device 400 and the storage device 300 are arranged outside the second conveying line 520 in the Y-axis direction. In the embodiment, the swing arm device 400 is arranged in two along the X-axis direction, and the feeding device 100 and the storage device 300 correspond to the swing arm device 400 one by one, so that the two carriers 700 can be placed at the same time, and the placing efficiency is effectively improved.
[0071] Preferably, two storage devices 300 are arranged adjacently, one feeding device 100 is located outside one storage device 300 in the X-axis direction, and another feeding device 100 is located outside another storage device 300 in the X-axis direction. The number of the first carrying mechanisms 610 is two, and each first carrying mechanism 610 corresponds to one feeding device 100. The two first carrying mechanisms 610 are respectively located at the positions close to the input end and close to the output end of the first conveying line 510, that is, the first conveying line 510 has two feeding positions for the sheet assembly 200 to take away, and each first carrying mechanism 610 can independently carry the sheet assembly 200 at different feeding positions. The number of the second carrying mechanism 620 is one, and the second carrying mechanism 620 is located between the two first carrying mechanisms 610, and the carrying range of the second carrying mechanism 620 covers the two storage devices 300. By using the above structure, the number of the second carrying mechanism 620 can be reduced, and the cost can be reduced.
[0072] Further, the first carrying mechanism 610 comprises a first carrying module 611, a first support 612, a first taking and placing assembly 613, and a second taking and placing assembly 614. The first support 612 is in transmission connection with the first carrying module 611, and the first carrying module 611 can drive the first support 612 to move along the X-axis, Y-axis, and Z-axis directions. The first taking and placing assembly 613 and the second taking and placing assembly 614 are both arranged on the first support 612, and at least one of the first taking and placing assembly 613 and the second taking and placing assembly 614 is in transmission connection with the first support 612 through a third driving member 615, and the third driving member 615 is a linear cylinder arranged along the Z-axis direction. The first taking and placing assembly 613 and the second taking and placing assembly 614 are both vacuum suction structures, the first taking and placing assembly 613 is used for taking and placing the sheet assembly 200, and the second taking and placing assembly 614 is used for taking and placing the empty film sheet 210 on the tray. Preferably, the first taking and placing assembly 613 and the second taking and placing assembly 614 are both used for suctioning the outer edge of the film sheet 210, so as to avoid damaging the sheet 220.
[0073] Further, the second carrying mechanism 620 comprises a second carrying module 621, a second support 622, and a third taking and placing assembly 623. The second support 622 is in transmission connection with the second carrying module 621, and the second carrying module 621 can drive the second support 622 to move along the X-axis, Y-axis, and Z-axis directions. The third taking and placing assembly 623 is arranged on the second support 622, and the third taking and placing assembly 623 is a clamping jaw structure that can clamp or release the tray 700. The third taking and placing assembly 623 can be provided with one or two according to needs.
[0074] The above description is only an embodiment of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation using the content of the specification and drawings, or direct or indirect application in other related technical fields, is also included in the patent protection scope of the present application.
Claims
1. A supply device, characterized in that, The application relates to a first mounting frame (110), a first carrier (120) arranged on the first mounting frame (110), a mounting disc (130) arranged above the first carrier (120) and having a through hole in the middle part along the Z-axis direction for accommodating a sheet assembly (200) to avoid the first carrier (120), a first driving member (140) arranged on the first mounting frame (110) and in transmission connection with the mounting disc (130), a pressing structure comprising a transmission disc (151) arranged on the mounting disc (130), a second driving member (152) and a pressing plate (153) arranged on the mounting disc (130), the transmission disc (151) being rotatable along the direction parallel to the Z-axis, the transmission disc (151) being provided with a third avoiding hole (1511) for accommodating the sheet assembly (200) to avoid the first carrier (120), the second driving member (152) being suitable for driving the transmission disc (151) to rotate, and the pressing plate (153) being switched to an avoiding state or a blocking state in response to the rotation of the transmission disc (151), wherein the sheet assembly (200) comprises a diaphragm (210) and a sheet (220) attached to the diaphragm (210) and in a split state, when the pressing plate (153) is in the avoiding state, the projection of the sheet assembly (200) carried on the first carrier (120) and the pressing plate (153) in the Z-axis direction is not coincident, and when the pressing plate (153) is in the blocking state, the diaphragm (210) and the pressing plate (153) in the Z-axis direction are partially coincident, and the sheet (220) and the pressing plate (153) in the Z-axis direction are not coincident, and the pressing plate (153) is pressed against the diaphragm (210) along the Z-axis in response to the driving of the first driving member (140). The mounting disc (130) comprises a bottom plate (131) connected with the output end of the first driving member (140), the bottom plate (131) being in a circular ring structure and having a first avoiding hole (1311) in the middle part, a cover plate (132) in a circular ring structure and coaxially arranged above the bottom plate (131) and having a second avoiding hole (1321) in the middle part and coaxial with the first avoiding hole (1311), the first avoiding hole (1311) and the second avoiding hole (1321) cooperating to form the avoiding area, and a connecting ring (133) received between the bottom plate (131) and the cover plate (132), wherein the transmission disc (151) is coaxially arranged between the bottom plate (131) and the cover plate (132) and accommodated in the connecting ring (133), and the inner edge of the connecting ring (133) is suitable for guiding the rotation of the transmission disc (151). 2. The feeder of claim 1, wherein 3. The feeder of claim 2, wherein The inner diameter of the first avoiding hole (1311) is larger than that of the third avoiding hole (1511), the inner diameter of the second avoiding hole (1321) is smaller than that of the third avoiding hole (1511), the bottom of the transmission disc (151) is provided with a transmission rack (1513), and the second driving member (152) is arranged on the bottom plate (131) and is provided with a transmission gear (1521) engaged with the transmission rack (1513).
4. The feeder of claim 2, wherein A plurality of the pressing plates (153) are arranged along the circumference of the transmission disc (151), the top surface of the transmission disc (151) is inwardly recessed to form a sliding groove (1512) corresponding to the pressing plate (153), and the pressing plate (153) is partially and slidably arranged in the sliding groove (1512). Each pressing plate (153) is synchronously switched to an avoiding state or a blocking state in response to the rotation of the transmission disc (151).
5. The feeder of claim 4, wherein The pressing plate (153) comprises: a plate body (1531) arranged between the top surface of the transmission disc (151) and the bottom surface of the cover plate (132), and the plate body (1531) is partially protruded relative to the inner wall of the third avoiding hole (1511) to press the diaphragm (210); a guide portion (1532) protruded from the bottom of the plate body (1531) and slidably arranged in the sliding groove (1512); a guide pin (1533) axially parallel to the axis of the transmission disc (151), and the top of the guide pin (1533) is protruded relative to the top of the plate body (1531), and the cover plate (132) is provided with a guide hole (1322) corresponding to the position of the guide pin (1533), and the guide pin (1533) is arranged in the guide hole (1322).
6. The feeder of claim 1, wherein The first driving member (140) is uniformly distributed along the circumference of the mounting disc (130).
7. The feeder of claim 1, wherein The first mounting frame (110) comprises: a mounting frame body (111); a rotating seat (112) arranged on the mounting frame body (111) and rotatable about a direction parallel to the Z-axis; wherein the first carrier (120) and the first driving member (140) are fixedly connected with the rotating seat (112), the mounting frame body (111) is provided with a first driving assembly (160) adapted to drive the first carrier (120) to rotate.
8. The feeder of claim 7, wherein The first carrier (120) and the rotating seat (112) are circular in outer contour, the first carrier (120) is coaxially arranged on the top of the rotating seat (112), the rotating seat (112) is inwardly recessed to form a guide groove (1121) around the outer periphery, and the first mounting frame (110) comprises a plurality of guide bearings (113) arranged on the mounting frame body (111), the guide bearings (113) are arranged around the outer periphery of the rotating seat (112) and are partially arranged in the guide groove (1121) to support and guide the rotation of the rotating seat (112).
9. The feeder of claim 8, wherein The first carrier (120) is formed with a ring of teeth (121) around the periphery thereof, and the first drive assembly (160) is adapted to engage with the teeth (121) to drive the first carrier (120) to rotate.
10. A tray shuffling apparatus characterized by, A feeding device (100) as claimed in any one of claims 1 to 9.
Citation Information
Patent Citations
Semiconductor chip sorting machine
CN112718518A
Placing machine
CN109229465A
Feeding method, storage device, computer equipment and test equipment
CN114914183A