Vibration damper and vibration damping system

Abstract

The invention relates to a shock absorber and a shock absorption system, and belongs to the technical field of precise shock absorption. The shock absorber comprises a bottom plate, a top plate, a shock absorption cavity, a horizontal positive stiffness assembly and a vertical positive stiffness assembly, the bottom plate and the top plate are oppositely arranged at intervals, and the shock absorption cavity, the horizontal positive stiffness assembly and the vertical positive stiffness assembly are arranged between the bottom plate and the top plate; wherein the top plate is connected with the vibration reduction cavity in the mode that the top plate can move in the depth direction of the vibration reduction cavity, the vibration reduction cavity and the bottom plate are arranged in a spaced mode, and the vibration reduction cavity and the bottom plate are connected together through the vertical positive rigidity assembly, and the vertical positive rigidity assembly is used for providing vertical positive rigidity and conducting horizontal vibration reduction on the top plate; the horizontal positive rigidity assembly is located outside the vibration reduction cavity, connected with the top plate and the bottom plate and used for providing horizontal positive rigidity, so that decoupling of the horizontal rigidity and the vertical rigidity of the vibration reducer is achieved, it is ensured that stable positive rigidity is provided in the horizontal direction, interference of vertical vibration on the horizontal vibration reduction performance is effectively isolated, and the vibration reduction performance of the vibration reducer is improved. Therefore, the overall performance of the shock absorber is greatly improved.

Description

Technical Field

[0001] This application relates to the field of precision vibration reduction technology, specifically to a vibration damper and a vibration reduction system. Background Technology

[0002] With the continuous improvement of the precision of ultra-precision machining equipment and measuring instruments, the vibration of their working environment is increasingly demanding of low amplitude and low frequency, which places more stringent requirements on the vibration reduction performance of vibration damping tables. Traditional passive vibration isolation technology, consisting of a mass-spring-damper system, cannot meet the vibration reduction requirements of ultra-precision equipment due to the inherent contradiction between the low-frequency vibration transmissibility and the high-frequency vibration attenuation rate. Therefore, there is an urgent need for new technologies and methods to improve this situation.

[0003] Active vibration damping is a crucial technology for solving the aforementioned problems. Active vibration damping systems generally consist of a combination of passive vibration isolation elements and active actuators, such as active vibration dampers composed of air springs and voice coil motors in parallel, active vibration dampers composed of vibration-damping rubber and piezoelectric ceramics, and active vibration dampers combining air springs and pneumatic actuators. These types of active vibration dampers can achieve both low-frequency suppression and high-frequency isolation.

[0004] However, the horizontal and vertical stiffness of the aforementioned active dampers are significantly coupled, which is not conducive to improving the overall damping performance of the dampers. Summary of the Invention

[0005] The purpose of this application is to provide a vibration damper and a vibration damping system to decouple the horizontal stiffness and vertical stiffness of the vibration damper, thereby improving the overall vibration damping performance of the vibration damper.

[0006] This application provides a vibration damper, comprising: a vibration damper, characterized in that it includes a bottom plate and a top plate arranged at relative intervals, a vibration damping cavity disposed between the bottom plate and the top plate, a horizontal positive stiffness component, and a vertical positive stiffness component; wherein, the top plate is connected to the vibration damping cavity in a manner movable along the depth direction of the vibration damping cavity, the vibration damping cavity is spaced apart from the bottom plate, and the vertical positive stiffness component connects the vibration damping cavity to the bottom plate and is used to provide vertical positive stiffness and perform horizontal vibration damping on the top plate; the horizontal positive stiffness component is located outside the vibration damping cavity and connected to the top plate and the bottom plate, and is used to provide horizontal positive stiffness.

[0007] The vibration damper further includes a horizontal negative stiffness component disposed between the bottom plate and the top plate. The horizontal negative stiffness component is located outside the vibration damping cavity and is used to provide horizontal negative stiffness. Furthermore, when the top plate moves horizontally relative to the bottom plate, the magnitude of the force applied to the top plate by the horizontal negative stiffness component is less than the magnitude of the force applied to the top plate by the horizontal positive stiffness component.

[0008] The horizontal negative stiffness component includes a first magnet group and a second magnet group. The first magnet group is disposed on the surface of the damping cavity facing the base plate, and the second magnet group is disposed on the side of the base plate facing the damping cavity corresponding to the area of ​​the first magnet group. Each first magnet in the first magnet group and each second magnet in the second magnet group are arranged at intervals relative to each other in a one-to-one correspondence.

[0009] The base plate has a through hole on the side facing the vibration damping cavity, corresponding to the area of ​​the first magnet assembly. The horizontal negative stiffness component also includes a magnet base, at least part of which is housed in the through hole and connected to the base plate. The magnet base is spaced apart from the vibration damping cavity. The second magnet assembly is specifically disposed on the surface of the magnet base facing the vibration damping cavity. Furthermore, the position of the magnet base in the depth direction of the through hole is adjustable to allow the second magnet assembly to move away from or closer to the first magnet assembly.

[0010] The vibration damper further includes a vertical negative stiffness component disposed between the bottom plate and the top plate. The vertical negative stiffness component is located inside the vibration damping cavity and is used to provide vertical negative stiffness. Furthermore, when the top plate moves vertically relative to the bottom plate, the magnitude of the force applied to the top plate by the vertical negative stiffness component is less than the magnitude of the force applied to the top plate by the vertical positive stiffness component.

[0011] The vertical negative stiffness component includes a stator magnet and a mover magnet arranged at relatively intervals along the horizontal direction. The stator magnet is connected to the inner bottom wall of the vibration damping cavity, and the mover magnet is connected to the top plate.

[0012] The vertical negative stiffness component further includes a first leaf spring and a second leaf spring. Both the first and second leaf springs are arranged parallel to the horizontal plane and are spaced apart from each other. The first end of the first leaf spring in the horizontal direction is connected to the inner bottom wall of the vibration damping cavity, and the second end of the first leaf spring in the horizontal direction is connected to the bottom end of the moving magnet. The first end of the second leaf spring in the horizontal direction is connected to the inner bottom wall of the vibration damping cavity, and the second end of the second leaf spring in the horizontal direction is connected to the top end of the moving magnet.

[0013] The vertical negative stiffness component further includes a lower fixing block, a first leaf spring outer ring pad, a stator magnetic ring outer frame, and a second leaf spring outer ring pad. The lower fixing block, the first leaf spring, the first leaf spring outer ring pad, the stator magnetic ring outer frame, the second leaf spring outer ring pad, and the second leaf spring are sequentially stacked on the inner bottom wall of the vibration damping cavity. The lower fixing block is connected to the inner bottom wall of the vibration damping cavity. The first horizontal end of the first leaf spring is connected between the lower fixing block and the first leaf spring outer ring pad. The stator magnetic ring outer frame is connected between the first leaf spring outer ring pad and the second leaf spring outer ring pad. The first horizontal end of the second leaf spring is connected to the second leaf spring outer ring pad. The stator magnet is disposed on the stator magnetic ring outer frame.

[0014] The vertical positive stiffness component includes a support rod group, which includes multiple support rods. The multiple support rods are arranged in parallel and spaced apart, and the support rods are arranged vertically. The bottom end and top end of the support rods are respectively connected to the base plate and the vibration damping cavity.

[0015] The sidewall of the vibration damping cavity is provided with a plurality of receiving grooves facing the end face of the base plate. The receiving grooves at least partially penetrate the sidewall of the vibration damping cavity, and the plurality of receiving grooves correspond to the plurality of support rods respectively. One end of the support rod is fixed to the base plate, and the other end of the support rod extends into its corresponding receiving groove and is connected to the bottom of its corresponding receiving groove.

[0016] The horizontal stiffness component includes a spring, a spring mounting bracket, and a spring fixing component. The spring mounting bracket is fixed to the base plate, the spring is arranged horizontally, and the first end of the spring is fixed to the spring mounting bracket. The second end of the spring is fixed to the top plate through the spring fixing component.

[0017] The horizontal stiffness component further includes a rigid rope. The first end of the rigid rope is fixed to the spring mounting bracket, and the second end of the rigid rope extends horizontally from the spring mounting bracket and connects to the first end of the spring, so that the first end of the spring is fixed to the spring mounting bracket by the rigid rope. Furthermore, the length of the second end of the rigid rope extending horizontally from the spring mounting bracket is adjustable.

[0018] The number of the horizontal positive stiffness components is at least two, and the at least two horizontal positive stiffness components include at least one first horizontal positive stiffness component and at least one second horizontal positive stiffness component; and the first horizontal positive stiffness component is configured to generate a first horizontal force applied to the top plate when the top plate moves relative to the bottom plate in a first horizontal direction, the direction of the first horizontal force being opposite to the direction of the top plate moving relative to the bottom plate in the first horizontal direction; the second horizontal positive stiffness component is configured to generate a second horizontal force applied to the top plate when the top plate moves relative to the bottom plate in a second horizontal direction, the direction of the second horizontal force being opposite to the direction of the top plate moving relative to the bottom plate in the second horizontal direction, wherein the first horizontal direction is perpendicular to the second horizontal direction.

[0019] The vibration damping cavity has an open end along the vertical direction and a closed end, with the opening of the vibration damping cavity facing the top plate. The vibration damper also includes a cover plate located between the bottom plate and the top plate. The cover plate is connected to the top plate and is spaced apart from the inner bottom wall of the vibration damping cavity. Furthermore, the cover plate is connected to the side wall of the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity, and is sealed with the vibration damping cavity to form a sealed cavity.

[0020] The vibration damper further includes a sensor assembly and a motor assembly disposed between the base plate and the top plate; wherein the sensor assembly is configured to detect the movement of the top plate; the motor assembly includes a stator and a mover, and one of the stator and the mover is connected to the base plate and the other is connected to the top plate.

[0021] This application also provides a vibration reduction system, which includes the vibration damper described above.

[0022] The beneficial effects of this application are as follows: The vibration damper and vibration damping system provided by this application, where the vibration damper is applied to a vibration damping system, achieve decoupling of the horizontal and vertical stiffness of the vibration damper by designing the horizontal positive stiffness component and the vertical positive stiffness component in the vibration damper as two independent structures. This allows the vibration damper to more flexibly cope with vibrations in different directions, improving the vibration damping effect and stability. Furthermore, through the ingenious placement of the horizontal and vertical positive stiffness components, the vibration damper not only ensures stable positive stiffness in the horizontal direction but also effectively isolates the interference of vertical vibration on the horizontal vibration damping performance, thus significantly improving the overall performance of the vibration damper. Attached Figure Description

[0023] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.

[0024] Figure 1 This is a three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application; Figure 2 This is a side view of the vibration damper provided in the embodiments of this application; Figure 3 This is another three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application; Figure 4 This is another three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application; Figure 5 This is a cross-sectional structural schematic diagram of the vibration damper provided in the embodiments of this application; Figure 6 This is a bottom view of the structure of the vibration damper provided in the embodiment of this application; Figure 7 This is a schematic diagram of the structure of the rigid rope and the rotating shaft pin provided in the embodiment of this application; Figure 8 This is a three-dimensional structural diagram of a portion of the vibration damper provided in the embodiments of this application, including the vibration damping cavity, in a transparent display state. Figure 9 This is another three-dimensional structural diagram of the vibration damper provided in the embodiments of this application, including a portion of the vibration damping cavity, with the vibration damping cavity in a transparent display state; Figure 10 This is a three-dimensional structural diagram of a portion of the vibration damper provided in the embodiments of this application; Figure 11 This is a three-dimensional structural diagram of another part of the vibration damper provided in the embodiments of this application; Figure 12 This is a top view schematic diagram of the first and second leaf springs provided in the embodiments of this application; Figure 13 This is a three-dimensional structural diagram of a portion of the vertical negative stiffness component provided in the embodiments of this application; Figure 14 This is a three-dimensional structural diagram of another part of the vertical negative stiffness component provided in the embodiments of this application; Figure label: 10-Vibration damper; 100-Vibration damping cavity; 100A-Sealed cavity; 101-Side wall; 102-Inner bottom wall; 103-Accommodation groove; 104-First accommodation groove; 11-Bottom plate; 111-Through hole; 12-Top plate; 15-Cover plate; 151-First protrusion; 31-Sealing membrane; 32-Outer pressure component of sealing membrane; 33-Inner pressure component of sealing membrane; 41-Top pressure block of support rod; 42-Bottom pressure block of support rod; 43-Stop block; 16-Sensor assembly; 161-Velocity sensor; 162-Displacement sensor; 17-First Motor assembly; 171-First stator; 172-First mover; 173-First motor bracket; 18-Second motor assembly; 181-Second stator; 182-Second mover; 183-Second motor bracket; 200-Horizontal positive stiffness assembly; 200A-First horizontal positive stiffness assembly; 200B-Second horizontal positive stiffness assembly; 201-Spring; 202-Spring mounting bracket; 2021-Connecting plate; 203-Spring fixing assembly; 2031-Spring fixing block; 2032-Spring clamping block; 204-Rigid rope; 2 05-Rotating pin; 206-Locking component; 300-Vertical positive stiffness assembly; 300A-Support rod assembly; 301-Support rod / first support rod; 302-Support rod / second support rod; 303-Support rod / third support rod; 304-Support rod / fourth support rod; 400-Horizontal negative stiffness assembly; 401-First magnet assembly; 4011-First magnet; 402-Second magnet assembly; 4021-Second magnet; 403-Magnet base; 4031-Second receiving groove; 404-Flat-head set screw; 405-Locking Screw; 500 - Vertical negative stiffness assembly; 501 - Stator magnet / outer magnetic ring assembly; 5011 - Outer magnetic ring; 5012 - Outer magnetic ring spacer; 502 - Mover magnet / inner magnetic ring assembly; 503 - First leaf spring; 504 - Second leaf spring; 505 - Lower fixing block; 506 - First leaf spring outer ring pad; 507 - Stator magnetic ring outer frame; 508 - Second leaf spring outer ring pad; 509 - Inner magnetic ring column; 510 - Connecting block; 511 - First pad; 512 - Second pad; 513 - Lower limit block; K1 - Scale; F1 - Step surface. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this application and are not intended to limit this application.

[0026] In the following description, the connection of the second component to the first component may include embodiments in which the second component is directly connected to the first component, and may also include embodiments in which the second component is connected to the first component via an additional component, such that the second component is not directly connected to the first component.

[0027] In the following description, the connection between the second component and the first component may include embodiments in which the second component is directly connected to the first component, and may also include embodiments in which the second component is connected to the first component via an additional component, thereby preventing the second component from being directly connected to the first component.

[0028] When describing the structure of a component, when referring to a layer or region as being "above" or "on top of" another layer or region, it can mean that it is directly above the other layer or region, or that it contains other layers or regions between itself and the other layer or region. Furthermore, if the component is flipped, the layer or region will be located "below" or "under" the other layer or region. Additionally, the features, structures, or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0029] Furthermore, the directional terms mentioned in the embodiments of this application, such as [up], [down], [front], [back], [left], [right], [inner], [outer], [side], etc., are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrating and understanding the embodiments of this application, and not for limiting the embodiments of this application. In the various drawings, structurally similar units are represented by the same reference numerals. For clarity, the various parts in the drawings are not drawn to scale. In addition, some related parts may not be shown in the drawings.

[0030] The following detailed description is based on specific embodiments. It should be noted that the sequence numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0031] Please see Figures 1 to 6 , Figure 1 This is a three-dimensional structural diagram of the vibration damper provided in the embodiments of this application. Figure 2 This is a side view of the vibration damper provided in the embodiment of this application. Figure 3 This is another three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application. Figure 4 This is another three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application. Figure 5 This is a cross-sectional structural schematic diagram of the vibration damper provided in the embodiments of this application. Figure 6 This is a bottom view structural diagram of the vibration damper provided in the embodiments of this application. Figures 1 to 6 As shown, the vibration damper 10 includes a base plate 11 and a top plate 12 spaced apart from each other, a damping cavity 100, a horizontal positive stiffness component 200, and a vertical positive stiffness component 300 disposed between the base plate 11 and the top plate 12. The top plate 12 is connected to the damping cavity 100 in a manner movable along the depth direction of the damping cavity 100. The damping cavity 100 is spaced apart from the base plate 11. The vertical positive stiffness component 300 connects the damping cavity 100 to the base plate 11 and provides vertical positive stiffness while providing horizontal vibration damping for the top plate 12. The horizontal positive stiffness component 200 is located outside the damping cavity 100 and connected to the top plate 12 and the base plate 11, and provides horizontal positive stiffness.

[0032] It should be noted that the vertical direction in this embodiment can refer to any direction perpendicular to the horizontal plane, and the horizontal direction in this embodiment can refer to any direction parallel to the horizontal plane. Specifically, the depth direction of the vibration damping cavity 100 can be parallel to the vertical direction.

[0033] In this embodiment, as Figure 5 As shown, in the above-mentioned vibration damper 10, the vibration damping cavity 100 can provide a sealed cavity 100A. The sealed cavity 100A can be the vibration damping cavity 100 directly, or it can be formed by sealing the vibration damping cavity 100. Specifically, the air pressure in the sealed cavity 100A is adjustable. When the top plate 12 moves along the depth direction of the vibration damping cavity 100, the vertical dimension of the sealed cavity 100A can be reduced to increase the air pressure in the sealed cavity 100A, or the vertical dimension of the sealed cavity 100A can be increased to decrease the air pressure in the sealed cavity 100A. Thus, the sealed cavity 100A can perform vertical vibration damping on the top plate 12.

[0034] Specifically, the vibration damper 10 can have an operating state and a non-operating state. Furthermore, when the vibration damper 10 is in the operating state, the aforementioned sealed cavity 100A is filled with gas, causing the top plate 12 to float under the pressure of the gas within the sealed cavity 100A. When the top plate 12 is in the floating state, if the top plate 12 is subjected to vertical disturbance, the top plate 12 will move along the depth direction of the vibration damping cavity 100, thereby achieving vertical vibration damping of the top plate 12 through changes in the gas pressure within the sealed cavity 100A.

[0035] When the shock absorber 10 is not in operation, the air pressure in the sealed cavity 100A is too low to cause the top plate 12 to float. At this time, the top plate 12 is in a descending state and is supported by other components and structures inside the shock absorber 10.

[0036] In this embodiment, as Figure 2 As shown, in the aforementioned vibration damper 10, the vertical positive stiffness component 300 provides vertical support to the vibration damping cavity 100, thereby supporting the vibration damping cavity 100 and suspending it above the base plate 11. Simultaneously, the vertical positive stiffness component 300 also functions to perform horizontal vibration damping on the top plate 12. Specifically, when the vibration damper 10 is in operation, and the top plate 12 is subjected to horizontal disturbance, the vibration damping cavity 100 vibrates synchronously with the top plate 12 in the horizontal direction. This allows the vertical positive stiffness component 300 connected to the vibration damping cavity 100 to absorb and dissipate the energy of the horizontal vibration, thereby effectively reducing the horizontal amplitude of the top plate 12 and improving the horizontal vibration damping performance of the vibration damper 10. Furthermore, the horizontal vibration reduction function of the vertical positive stiffness component 300 is independent of the vertical positive stiffness it provides, which means that the vertical positive stiffness component 300 can effectively reduce the horizontal vibration of the top plate 12 without affecting the stability of the vertical support.

[0037] In this embodiment, when the damper 10 is in operation, when the top plate 12 moves horizontally relative to the bottom plate 11, the horizontal positive stiffness component 200 can generate a first force applied to the top plate 12. The direction of the first force is opposite to the direction of the horizontal movement of the top plate 12 relative to the bottom plate 11, and the magnitude of the first force is directly proportional to the displacement of the top plate 12 relative to the bottom plate 11 in the horizontal direction, thereby enabling the horizontal positive stiffness component 200 to provide horizontal positive stiffness in the damper 10.

[0038] When the damper 10 is in operation, when the top plate 12 moves vertically relative to the bottom plate 11, the vertical stiffness component 300 can generate a second force applied to the top plate 12. The direction of the second force is opposite to the direction of the vertical movement of the top plate 12 relative to the bottom plate 11, and the magnitude of the second force is directly proportional to the displacement of the top plate 12 relative to the bottom plate 11 in the vertical movement. Thus, the vertical stiffness component 300 provides vertical stiffness in the damper 10.

[0039] It should be noted that, in this embodiment, by designing the horizontal positive stiffness component 200 for providing horizontal positive stiffness and the vertical positive stiffness component 300 for providing vertical positive stiffness in the vibration damper 10 as two independent structures, the horizontal and vertical stiffness of the vibration damper 10 are decoupled. This allows the vibration damper 10 to more flexibly respond to vibrations in different directions, improving the vibration damping effect and stability. Furthermore, through the ingenious placement of the horizontal positive stiffness component 200 and the vertical positive stiffness component 300, the vibration damper 10 not only ensures stable positive stiffness in the horizontal direction but also effectively isolates the interference of vertical vibration on the horizontal vibration damping performance, thus significantly improving the overall performance of the vibration damper 10.

[0040] In some embodiments, such as Figure 5 As shown, the aforementioned vibration damping cavity 100 can be a cavity with one open end and one closed end. Specifically, the vibration damping cavity 100 is open at one vertical end (i.e., the top end) and closed at the other vertical end (i.e., the bottom end), and the top opening of the vibration damping cavity 100 is opposite to the top plate 12. Correspondingly, the aforementioned vibration damper 10 may also include a cover plate 15, which is located between the bottom plate 11 and the top plate 12, connected to the top plate 12, and spaced apart from the inner bottom wall surface 102 of the vibration damping cavity 100. Furthermore, the cover plate 15 is connected to the side wall 101 of the vibration damping cavity 100 in a manner that allows it to move along the depth direction of the vibration damping cavity 100, and seals with the vibration damping cavity 100 to form a sealed cavity 100A.

[0041] Specifically, such as Figure 5 As shown, the cover plate 15 has a first surface (i.e., upper surface) facing away from the inner bottom wall surface 102 of the damping cavity 100 and a second surface (i.e., lower surface) facing towards the inner bottom wall surface 102 of the damping cavity 100. Furthermore, a first protrusion 151 is formed in the middle region of the first surface of the cover plate 15, protruding in a direction away from the inner bottom wall surface 102 of the damping cavity 100. The top plate 12 can be fixedly connected to the top of the first protrusion 151 of the cover plate 15 by screws.

[0042] In some specific embodiments, such as Figure 5As shown, in order to achieve the sealing of the cover plate 15 and the damping cavity 100 to form a sealed cavity 100A, the above-mentioned damper 10 may further include a sealing membrane 31, an outer pressure member 32 for the sealing membrane, and an inner pressure member 33 for the sealing membrane. The sealing membrane 31 is disposed on the end face (i.e., the upper end face) of the side wall 101 of the damping cavity 100 facing the top plate 12 and on the second surface (i.e., the lower surface) of the cover plate 15 facing the inner bottom wall 101 of the damping cavity 100. The sealing membrane 31 covers the gap area between the side wall 101 of the damping cavity 100 and the cover plate 15. Specifically, the orthographic projection of the sealing membrane 31 on the bottom plate 11 can completely cover the orthographic projection of the gap area on the bottom plate 11. An external sealing membrane pressure member 32 is disposed on the end face of the side wall 101 of the vibration damping cavity 100 facing the top plate 11, and covers the portion of the sealing membrane 31 on the side wall 101 of the vibration damping cavity 100 (i.e., the portion directly above the side wall 101 of the vibration damping cavity 100) and is sealed to the side wall 101 of the vibration damping cavity 100. An internal sealing membrane pressure member 33 is disposed on the second surface of the cover plate 15 facing the inner bottom wall surface 102 of the vibration damping cavity 100, and covers the portion of the sealing membrane 31 on the cover plate 15 (i.e., the portion directly below the cover plate 15) and is sealed to the cover plate 15. In this way, the cover plate 15 and the vibration damping cavity 100 are sealed together by the sealing membrane 31 to form a sealed cavity 100A.

[0043] The sealing membrane 31 may be made of a flexible material to ensure that the cover plate 15 can move along the depth direction of the vibration damping cavity 100.

[0044] In some embodiments, such as Figure 1 and Figure 2 As shown, the horizontal stiffness component 200 may include a spring 201, a spring mounting bracket 202, and a spring fixing component 203. The spring 201 is arranged horizontally, meaning its length direction is parallel to the horizontal plane. One end of the spring 201 along its length direction (hereinafter referred to as the first end) is fixed to the spring mounting bracket 202, and the other end of the spring 201 along its length direction (hereinafter referred to as the second end) is fixed to the top plate 12 via the spring fixing component 203. The spring mounting bracket 202 is fixed to the bottom plate 11, for example, by means of screws, thereby connecting the first end of the spring 201 to the bottom plate 11 via the spring mounting bracket 202.

[0045] Specifically, the horizontal stiffness component 200 may also include a rigid rope 204, one end of which (hereinafter referred to as the first end) is fixed to the spring mounting bracket 202, and the other end of which (hereinafter referred to as the second end) extends horizontally from the spring mounting bracket 202 and is connected to the first end of the spring 201, so that the first end of the spring 201 is fixed to the spring mounting bracket 202 by the rigid rope 204.

[0046] Furthermore, the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202 is adjustable. By adjusting the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202, the tension of the second end of the rigid rope 204 on the first end of the spring 201 can be increased or decreased, thereby adjusting the deformation of the spring 201 and flexibly adapting to the vibration reduction requirements under different working conditions.

[0047] It should be noted that in the overall structural arrangement of the vibration damper 10, the design of the horizontal positive stiffness component 200 not only improves the dynamic response capability of the system but also enhances the maintainability and adaptability of the structure, thus maintaining good working performance under complex working conditions. Through the coordinated adjustment of the spring 201 and the rigid rope 204, precise control of the system stiffness can be achieved, thereby meeting the performance requirements under different load conditions. This adjustment method is not only simple in structure and convenient to operate, but also has high reliability and repeatability. In practical applications, by adjusting the horizontal extension length of the rigid rope 204, the preload of the spring 201 can be effectively controlled, thereby optimizing the static and dynamic characteristics of the system.

[0048] In some examples, the spring 201 described above may specifically be a tension spring. The rigid rope 204 described above may specifically be a steel wire rope.

[0049] In some examples, such as Figure 1 As shown, to fix the second end of the spring 201 to the top plate 12 using the spring fixing assembly 203, the spring fixing assembly 203 may include a spring fixing block 2031 and a spring clamping block 2032. The spring fixing block 2031 is fixed to the top plate 10, for example, by screws. The spring clamping block 2032 is detachably connected to the spring fixing block 2031, and both the spring clamping block 2032 and / or the spring fixing block 2031 have clamping portions (e.g., recesses) for clamping the second end of the spring 201. By connecting the spring clamping block 2032 to the spring fixing block 2031, the second end of the spring 201 can be clamped and fixed between the spring clamping block 2032 and the spring fixing block 2031, thereby stably fixing the second end of the spring 201 to the top plate 12. The detachable spring clamping block 2032 facilitates the replacement or adjustment of the spring 201's installation state while ensuring the stability and reliability of the connection. In addition, this detachable structure facilitates quick assembly and disassembly when the spring 201 becomes fatigued or requires maintenance, improving the overall flexibility and service life of the structure.

[0050] For example, the spring fixing block 2031 and the spring clamping block 2032 can be connected by bolts to achieve clamping and releasing of the second end of the spring 201. This bolt connection structure can adjust the clamping force according to actual needs, preventing the spring 201 from shifting or falling off due to uneven force. In addition, the surface of the clamping part can be provided with anti-slip texture or elastic pads to enhance clamping stability and reduce wear on the spring 201.

[0051] For example, such as Figure 1 As shown, the spring fixing block 2031 can be an L-shaped structure, and the short plate of the L-shaped structure is fixedly connected to the top plate 12 by screws. The spring clamping block 2032 is detachably connected to the long plate of the L-shaped structure, and the second end of the spring 201 is clamped between the spring clamping block 2032 and the long plate of the L-shaped structure, so that the second end of the spring 201 is fixed to the top plate 12 by the spring fixing assembly 203, and at the same time, it is convenient to maintain the spring 201.

[0052] In some examples, such as Figure 1 and Figure 2 As shown, to allow for adjustable length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202, the spring mounting bracket 202 may include a connecting plate 2021 and a rotating pin 205. The connecting plate 2021 is perpendicular to the base plate 11 and connected to the side of the base plate 11 facing the top plate 12 (i.e., the upper side). Exemplarily, the connecting plate 2021 can be directly connected to the side of the base plate 11 facing the top plate 12 (i.e., the upper side) by welding or by screws. Furthermore, the rotating pin 205 is rotatably connected to the connecting plate 2021 about its axis.

[0053] Specifically, the connecting plate 2021 has a mounting hole that penetrates the connecting plate 2021. The rotating pin 205 passes through the mounting hole, and the two opposite ends of the rotating pin 205 protrude from opposite sides of the connecting plate 2021 along its length (hereinafter referred to as the first side and the second side). The mounting hole can be located at the top of the connecting plate 2021 and can be at the same horizontal height as the part of the spring fixing assembly 203 used to fix the second end of the spring 201 (for example, the clamping part of the spring fixing block 2031 and / or the clamping part of the spring clamping block 2032 used to clamp the second end of the spring 201). Figure 7As shown, the first end of the rigid rope 204 can be fixed to the portion of the rotating pin 205 located on the first side of the connecting plate 2021. The second end of the rigid rope 204 can be wound around the portion of the rotating pin 205 located on the first side of the connecting plate 2021 several times and then extend horizontally towards the first end of the spring 210 and connect with the first end of the spring 210. In this way, by rotating the rotating pin 205, the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202 can be adjusted, thereby adapting to different installation requirements and improving the flexibility of the device.

[0054] For example, such as Figure 1 and Figure 2 As shown, the aforementioned horizontal stiffness component 200 may further include a locking component 206, used to fix the relative position between the rotating pin 205 and the connecting plate 2021 after adjusting the horizontal extension length of the rigid rope 204, preventing the rotating pin 205 from shifting or loosening during use. This design is not only simple in structure and easy to adjust, but also effectively improves the stability and reliability of the overall device, and is suitable for spring connection and tensioning requirements under various complex working conditions.

[0055] For example, the locking component 206 can be a locking nut or a locating pin. For instance, when a locking nut is used as the locking component 206, the locking nut can be connected to the second side surface of the connecting plate 2021 and abut against the end face of the portion of the rotating shaft pin 205 located on the second side of the connecting plate 2021, thereby fixing the position of the rotating shaft pin 205 and preventing it from rotating or moving axially during use.

[0056] For example, such as Figure 2 As shown, the above-mentioned shock absorber 10 can also be equipped with a scale K1, which has a scale for indicating the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202, thereby improving the efficiency and accuracy of adjusting the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202.

[0057] Specifically, such as Figure 2 As shown, the scale K1 can be set on the outer wall of the vibration damping cavity 100.

[0058] In some specific embodiments, such as Figure 3 As shown, the number of the above-mentioned horizontal positive stiffness components 200 can be at least two, and the at least two horizontal positive stiffness components 200 can include at least one first horizontal positive stiffness component 200A and at least one second horizontal positive stiffness component 200B.

[0059] Furthermore, the first horizontal stiffness component 200A is configured to generate a first horizontal force applied to the top plate 12 when the top plate 12 moves relative to the bottom plate 11 in a first horizontal direction. The direction of the first horizontal force is opposite to the direction of the top plate 12 moving relative to the bottom plate 11 in the first horizontal direction, and the magnitude of the first horizontal force is directly proportional to the displacement of the top plate 12 relative to the bottom plate 11 in the first horizontal direction.

[0060] The second horizontal stiffness component 200B is configured to generate a second horizontal force applied to the top plate 12 when the top plate 12 moves relative to the bottom plate 11 in a second horizontal direction. The direction of the second horizontal force is opposite to the direction of the movement of the top plate 12 relative to the bottom plate 11 in the second horizontal direction, and the magnitude of the second horizontal force is directly proportional to the magnitude of the displacement of the top plate 12 relative to the bottom plate 11 in the second horizontal direction.

[0061] Wherein, both the first horizontal direction and the second horizontal direction are parallel to the horizontal plane, and the first horizontal direction is perpendicular to the second horizontal direction. For example, the top plate 12 has a rectangular structure in a top view, and the first horizontal direction and the second horizontal direction can be parallel to the length direction and width direction of the top plate 12, respectively.

[0062] In this way, regardless of which direction the top plate 12 is subjected to horizontal disturbance, the corresponding horizontal positive stiffness component 200 can provide a counterforce, thereby achieving effective support and vibration reduction for the top plate 12.

[0063] Furthermore, it should be noted that the specific structure of the first horizontal positive stiffness component 200A and the specific structure of the second horizontal positive stiffness component 200B in this embodiment can be understood by referring to the structure of the horizontal positive stiffness component 200 described above, so they will not be repeated here.

[0064] In some examples, such as Figure 3 As shown, in order to enhance the horizontal stability of the vibration damper 10, the at least two horizontal positive stiffness components 200 included in the vibration damper 10 can be located outside the vibration damping cavity 100 and arranged around the vibration damping cavity 100. In this way, not only can the space utilization of the vibration damper 10 be effectively improved, but it can also facilitate the subsequent manual adjustment of the horizontal positive stiffness components 200 to achieve the purpose of adjusting the horizontal positive stiffness of the horizontal positive stiffness components 200.

[0065] For example, such as Figure 3As shown, the vibration damper 10 may include two horizontal positive stiffness components 200, namely, a first horizontal positive stiffness component 200A and a second horizontal positive stiffness component 200B. The first horizontal positive stiffness component 200A and the second horizontal positive stiffness component 200B may be located on adjacent outer sides of the damping cavity 100 and may share the same spring mounting bracket 202. This not only improves the vibration damping effect and stability of the vibration damper 10 but also makes the structure of the vibration damper 10 more compact and reasonable.

[0066] In the above embodiments, such as Figure 2 , Figure 8 and Figure 9 As shown, the aforementioned vertical stiffness component 300 may include a support rod assembly 300A, for example, it may specifically be a support rod assembly 300A. Specifically, each support rod 301 / 302 / 303 / 304 in the support rod assembly 300A may be arranged vertically, that is, the length direction of each support rod 301 / 302 / 303 / 304 in the support rod assembly 300A may be perpendicular to the horizontal plane, and the two ends (i.e., the bottom end and the top end) of each support rod 301 / 302 / 303 / 304 in the support rod assembly 300A along its length direction may be connected to the base plate 11 and the damping cavity 100 respectively, so that the base plate 11 and the damping cavity 100 of the aforementioned vibration damper 10 are connected together through the support rod assembly 300A.

[0067] Specifically, the aforementioned support rod assembly 300A may include multiple support rods 301 / 302 / 303 / 304. For example, it may be composed of multiple support rods 301 / 302 / 303 / 304, which may be arranged in parallel at intervals and evenly distributed along the outer periphery of the vibration damping cavity 100. This arrangement ensures that the vertical force on the vibration damping cavity 100 is more uniform, thereby improving the stability and vibration damping performance of the vibration damper 10. Furthermore, the multiple support rods 301 / 302 / 303 / 304 can be configured in different quantities and spacings according to actual needs to adapt to different load conditions and vibration damping requirements. For example, in scenarios with large vertical loads, the number of support rods 301 / 302 / 303 / 304 can be increased, or support rods 301 / 302 / 303 / 304 with larger diameters can be selected, thereby improving the overall load-bearing capacity of the vertical stiffness component 300.

[0068] In some specific embodiments, such as Figure 10As shown, the vibration damping cavity 100 may have a plurality of receiving slots 103 on the side (i.e., the bottom side) facing the base plate 11. Each receiving slot 103 at least partially penetrates the side wall 101 of the vibration damping cavity 100, and the plurality of receiving slots 103 correspond to the plurality of support rods 301 / 302 / 303 / 304 included in the support rod group 300A. For example, the plurality of receiving slots 103 may correspond one-to-one with the plurality of support rods 301 / 302 / 303 / 304 included in the support rod group 300A. Furthermore, the bottom end of each support rod 301 / 302 / 303 / 304 in the aforementioned support rod group 300A is fixed to the base plate 11, and the top end of each support rod 301 / 302 / 303 / 304 in the aforementioned support rod group 300A extends into its corresponding receiving groove 103 and is connected to the bottom of its corresponding receiving groove 103. For example, it can be connected to the middle area of ​​the inner bottom wall of its corresponding receiving groove 103.

[0069] Specifically, the opening width of the receiving groove 103 can be greater than the width of its corresponding support rod 301 / 302 / 303 / 304, so that the part of the support rod 301 / 302 / 303 / 304 extending into its corresponding mounting groove 103 can swing horizontally, thereby improving the vibration reduction effect of the support rod 301 / 302 / 303 / 304 in the horizontal direction.

[0070] It should be noted that the design of the support rod assembly 300A allows the support rods 301 / 302 / 303 / 304 to undergo elastic deformation when the damping cavity 100 is subjected to horizontal forces, absorbing and dispersing these forces without significantly affecting the vertical support force. In practical implementation, the material, size, and quantity of the support rods 301 / 302 / 303 / 304 in the support rod assembly 300A can be adjusted according to actual needs to meet the comprehensive requirements of vertical stiffness and horizontal flexibility under different working conditions.

[0071] In some examples, such as Figure 8 and Figure 9 As shown, the aforementioned support rod group 300A can be specifically composed of four support rods 301 / 302 / 303 / 304 (i.e., the first support rod 301, the second support rod 302, the third support rod 303, and the fourth support rod 304). The side wall 101 of the aforementioned vibration damping cavity 100 is rectangular in shape when viewed from above, and the four support rods 301 / 302 / 303 / 304 can be respectively arranged at the four corners of the rectangle, thereby evenly distributing the support force and enhancing the stability and load-bearing capacity of the overall structure.

[0072] In some examples, the support rods 301 / 302 / 303 / 304 in the support rod assembly 300A described above can be made of an elastic material that undergoes elastic deformation when subjected to horizontal force.

[0073] In some examples, such as Figure 8 and Figure 9 As shown, the aforementioned vibration damper 10 may further include a plurality of support rod top pressure blocks 41, which correspond to the plurality of support rods 301 / 302 / 303 / 304 included in the aforementioned support rod assembly 300A. For example, the plurality of support rod top pressure blocks 41 may correspond one-to-one with the plurality of support rods 301 / 302 / 303 / 304 included in the aforementioned support rod assembly 300A. Furthermore, each support rod top pressure block 41 may be disposed on the outer periphery of the side wall 101 of the vibration damping cavity 100 corresponding to the top end of the corresponding support rod 301 / 302 / 303 / 304, and may be at least partially embedded in the outer periphery of the side wall 101 of the vibration damping cavity 100, and may be detachably connected to the side wall 101 of the vibration damping cavity 100. By connecting the top pressure block 41 of the support rod to the side wall 101 of the damping cavity 100, the top ends of the corresponding support rods 301 / 302 / 303 / 304 can be clamped and fixed between the top pressure block 41 and the side wall 101 of the damping cavity 100. Simultaneously, the bottom pressure block 41 of the support rod abuts against the top surface of the corresponding support rod 301 / 302 / 303 / 304, thereby stably fixing the top ends of the support rods 301 / 302 / 303 / 304 to the side wall 101 of the damping cavity 100 at the bottom of the corresponding receiving groove 103, and preventing the support rods 301 / 302 / 303 / 304 from moving upwards. The detachable top pressure block 41 facilitates the replacement or adjustment of the installation state of the support rods 301 / 302 / 303 / 304, while ensuring the stability and reliability of their connection. In addition, this detachable structure also facilitates quick assembly and disassembly when the support rods 301 / 302 / 303 / 304 become fatigued or require maintenance, improving the overall flexibility and service life of the structure.

[0074] In some examples, such as Figure 8 and Figure 9As shown, the aforementioned shock absorber 10 may further include a plurality of support rod bottom pressure blocks 42, which correspond to the plurality of support rods 301 / 302 / 303 / 304 included in the aforementioned support rod assembly 300A. For example, the plurality of support rod bottom pressure blocks 42 may correspond one-to-one with the plurality of support rods 301 / 302 / 303 / 304 included in the aforementioned support rod assembly 300A. Furthermore, each support rod bottom pressure block 42 may be disposed on the outer periphery of the base plate 11 corresponding to the bottom end of the corresponding support rod 301 / 302 / 303 / 304, and may be at least partially embedded in the outer periphery of the base plate 11, and may be detachably connected to the base plate 11. By connecting the bottom pressure block 42 of the support rod to the base plate 11, the bottom ends of the corresponding support rods 301 / 302 / 303 / 304 can be clamped and fixed between the bottom pressure block 42 and the base plate 11. Simultaneously, the bottom pressure block 42 abuts against the bottom end face of the corresponding support rods 301 / 302 / 303 / 304, thereby stably fixing the bottom ends of the support rods 301 / 302 / 303 / 304 to the base plate 11 and preventing downward movement. The detachable bottom pressure block 42 facilitates the replacement or adjustment of the installation state of the support rods 301 / 302 / 303 / 304, while ensuring the stability and reliability of the connection. Furthermore, this detachable structure allows for quick assembly and disassembly when the support rods 301 / 302 / 303 / 304 experience fatigue or require maintenance, improving the overall structural flexibility and service life.

[0075] Furthermore, the aforementioned shock absorber 10 may also include a stop block 43, which is detachably connected to the base plate 11 and abuts against the side of the bottom pressure block 42 of the support rod away from the bottom end of the corresponding support rod 301 / 302 / 303 / 304. This stops the bottom pressure block 42 of the support rod from horizontally displacing relative to the base plate 11, thereby improving the firmness of the connection between the bottom end of the support rod 301 / 302 / 303 / 304 and the base plate 11.

[0076] In the above embodiments, such as Figure 5As shown, the vibration damper 10 may further include a horizontal negative stiffness component 400, which is located between the bottom plate 11 and the top plate 12 and is used to provide horizontal negative stiffness in the vibration damper 10. Specifically, when the vibration damper 10 is in operation, when the top plate 12 moves horizontally relative to the bottom plate 11, the horizontal negative stiffness component 400 can generate a third force applied to the top plate 12. The direction of the third force is the same as the direction of the horizontal movement of the top plate 12 relative to the bottom plate 11, and the magnitude of the third force is directly proportional to the displacement of the top plate 12 relative to the bottom plate 11 in the horizontal direction, thereby enabling the horizontal negative stiffness component 400 to provide horizontal negative stiffness in the vibration damper 10.

[0077] Furthermore, when the vibration damper 10 is in operation, and the top plate 12 moves horizontally relative to the bottom plate 11, the force exerted on the top plate 12 by the horizontal negative stiffness component 400 (i.e., the aforementioned third force) is smaller than the force exerted on the top plate 12 by the horizontal positive stiffness component 200 (i.e., the aforementioned first force), thus ensuring the overall structure remains stable under normal conditions. When external excitation increases, such as during an earthquake or strong wind, the horizontal negative stiffness unit can gradually counteract the positive stiffness effect, reducing the equivalent stiffness of the system and achieving efficient dissipation of vibration energy. By adjusting the matching relationship between the horizontal negative stiffness unit and the horizontal positive stiffness unit, the overall mechanical performance of the vibration damper 10 can be optimized to meet the vibration isolation requirements under different working conditions. This structural design is reasonable, not only improving the adaptability of the vibration damper in complex environments but also enhancing the adjustability and robustness of the system, showing good prospects for engineering applications. Furthermore, the horizontal negative stiffness component 400 works in synergy with the horizontal positive stiffness component 200. During the long-term operation of the damper 10, the dynamic mechanical balance formed between the horizontal negative stiffness component 400 and the positive stiffness component 200 can effectively suppress the occurrence of structural resonance.

[0078] In some embodiments, such as Figure 5 , Figure 10 and Figure 11As shown, the aforementioned horizontal negative stiffness component 400 may include a first magnet group 401 and a second magnet group 402. The first magnet group 401 is disposed on the surface of the damping cavity 100 facing the base plate 11, and the second magnet group 402 is disposed on the side of the base plate 11 facing the damping cavity 100 corresponding to the area of ​​the first magnet group 401. Each first magnet 4011 in the first magnet group 401 and each second magnet 4021 in the second magnet group 402 are arranged in a one-to-one correspondence with each other, thereby ensuring that the first magnet 4011 in the first magnet group 401 can move synchronously with the damping cavity 100 during horizontal movement relative to the base plate 11. Furthermore, during horizontal movement of the damping cavity 100 relative to the base plate 11, the relative movement between the first magnet 4011 in the first magnet group 401 and the second magnet 402 in the second magnet group 402 generates a magnetic repulsive force in the same direction as the horizontal movement of the damping cavity 100, i.e., the aforementioned third force. The magnitude of this magnetic repulsion force is directly proportional to the horizontal offset of the first magnet 4011 in the first magnet group 401 relative to the second magnet 402 in the second magnet group 402. When the damping cavity 100 moves horizontally, the distance between the first magnet 4011 in the first magnet group 401 and the second magnet 402 in the second magnet group 402 changes, thereby altering the magnitude and direction of the magnetic repulsion force. This magnetic repulsion force can effectively counteract or weaken the positive stiffness effect caused by external excitation, achieving negative stiffness characteristics. By rationally designing the arrangement, magnetic pole direction, and number of magnets of the first magnet group 401 and the second magnet group 402, the horizontal negative stiffness component 400 can exhibit the desired mechanical response under different displacement amplitudes. This design not only realizes the dynamic stiffness adjustment capability of the vibration damper in the horizontal direction but also provides a strong guarantee for the stability of the system. By precisely controlling the magnetic field distribution and interaction forces, the vibration damper can maintain efficient vibration isolation performance under complex and variable working conditions. In addition, the structure has good scalability, and the layout and parameter configuration of the magnet assembly can be flexibly adjusted according to actual needs, further improving the adaptability and reliability of the vibration damper and showing broad application potential.

[0079] In some examples, such as Figure 5 As shown, the surface of the damping cavity 100 facing the base plate 11 can be provided with a first receiving groove 104 corresponding to each first magnet 4011 in the first magnet group 401, so as to facilitate the positioning and installation of each first magnet 4011 in the first magnet group 401 on the surface of the damping cavity 100 facing the base plate 11.

[0080] For example, such as Figure 5 As shown, each of the first magnets 4010 in the first magnet group 401 can be fully embedded in its corresponding first receiving groove 104.

[0081] In some examples, such as Figure 5 As shown, a through hole 111 can be provided on the side of the base plate 11 facing the vibration damping cavity 100, corresponding to the area of ​​the first magnet assembly 401. Furthermore, the horizontal negative stiffness assembly 400 may also include a magnet base 403, at least partially housed within the through hole 111 and connected to the base plate 11, with the magnet base 403 and the vibration damping cavity 100 being spaced apart from each other.

[0082] Specifically, the second magnet assembly 402 of the horizontal negative stiffness component 400 can be specifically disposed on the surface (i.e., the upper surface) of the magnet base 403 facing the vibration damping cavity 100. Furthermore, the position of the magnet base 403 in the depth direction of the through hole 111 can be adjusted so that the second magnet assembly 402 is away from or close to the first magnet assembly 401.

[0083] For example, such as Figure 5 As shown, the surface of the magnet base 403 facing the vibration damping cavity 100 can be provided with a second receiving groove 4031 corresponding to each second magnet 4021 in the second magnet group 402, so as to facilitate the positioning and installation of each second magnet 4021 in the second magnet group 402 on the surface of the magnet base 403 facing the vibration damping cavity 100.

[0084] For example, such as Figure 5 As shown, each of the second magnets 4021 in the second magnet group 402 can be fully embedded in its corresponding second receiving groove 4031.

[0085] For example, such as Figure 10 and Figure 11 As shown, the first magnet group 401 can be specifically composed of sixteen first magnets 4011, and the second magnet group 402 can be specifically composed of sixteen second magnets 4021. The sixteen first magnets 4011 and the sixteen second magnets 4021 are arranged in a one-to-one correspondence with each other to form sixteen magnet pairs.

[0086] Specifically, the sixteen magnet pairs are spaced apart, for example, they can be divided into two groups, each group consisting of eight magnet pairs. The eight magnet pairs in one group can be arranged along a first circle, and the eight magnet pairs in the other group can be arranged along a second circle. The first and second circles are concentric, and the diameter of the first circle is smaller than the diameter of the second circle, thus forming an inner and outer layer of magnet arrays. This arrangement not only increases the magnet density but also effectively enhances the interaction of the magnetic fields.

[0087] In some specific examples, such as Figure 6As shown, in order to make the position of the magnet base 403 adjustable in the depth direction of the through hole 111, the horizontal negative stiffness component 400 may further include a flat-head set screw 404 and a locking screw 405. Furthermore, the inner wall of the through hole 111 may be provided with a stepped surface F1, which is opposite to the surface (i.e., the upper surface) of the magnet base 403 facing the vibration damping cavity 100. The edge region of the magnet base 403 can be connected to the stepped surface F1 by the locking screw 405, thereby connecting the magnet base 403 to the base plate 11 via the locking screw 405. Furthermore, the flat-head set screw 404 can pass through the magnet base 403 from the surface (i.e., the lower surface) away from the vibration damping cavity 100 and abut against the stepped surface F1. Thus, by adjusting the screw-in depth of the flat-head set screw 404, the position of the magnet base 403 within the through hole 111 can be changed, thereby adjusting the magnetic force distance between the magnet assembly and the vibration damping cavity 100. This method allows for flexible adaptation to horizontal negative stiffness requirements under different working conditions, while ensuring the stability and reliability of the system during adjustment. Furthermore, in the above structure, the combined use of the locking screw 405 and the flat-head set screw 404 ensures that the magnet base 403 is securely locked after position adjustment, preventing loosening due to external vibration or prolonged operation. This dual-screw coordinated fastening design not only improves the overall structural connection stiffness but also enhances the ability to maintain adjustment accuracy, ensuring the continuous effectiveness of the magnetic field.

[0088] For example, such as Figure 6As shown, the number of locking screws 405 can be three, and the number of flat-head set screws 404 can also be three. These three locking screws 405 and three flat-head set screws 404 can be alternately distributed along the periphery of the magnet base 403, forming a uniform support and locking layout. This multi-point coordinated fixing structure effectively prevents the magnet base 403 from tilting or shifting during adjustment, thereby ensuring that the magnetic field between the magnet assembly and the vibration damping cavity 100 remains uniform and stable. Furthermore, the reasonable arrangement of the three flat-head set screws 404 on the lower surface of the magnet base 403 not only provides precise fine-tuning capabilities but also effectively avoids localized stress concentration caused by uneven force at a single point, further improving the overall system reliability and service life. In practical applications, the arrangement of the three locking screws 405 and the flat-head set screws 404 can be optimized and adjusted according to specific working conditions, for example, by changing the screw spacing or adding auxiliary positioning structures to improve adjustment sensitivity and load-bearing capacity. Furthermore, to further enhance the axial positioning stability of the magnet base 403 within the through hole 111, an elastic gasket or high-precision guide post can be added between its lower surface and the stepped surface F1, thereby achieving dual axial and radial limiting. This structure not only improves the installation accuracy of the magnet base 403 but also effectively suppresses the slight swaying caused by high-frequency vibration, ensuring the stability of the magnetic field area.

[0089] In the above embodiments, such as Figure 5 As shown, the vibration damper 10 may further include a vertical negative stiffness component 500 disposed between the bottom plate 11 and the top plate 12. The vertical negative stiffness component 500 is located inside the damping cavity 100 and is used to provide vertical negative stiffness. Specifically, when the vibration damper 10 is in operation, when the top plate 12 moves vertically relative to the bottom plate 11, the vertical negative stiffness component 500 can generate a fourth force applied to the top plate 12. The direction of the fourth force is the same as the direction of the vertical movement of the top plate 12 relative to the bottom plate 11, and the magnitude of the fourth force is directly proportional to the displacement of the top plate 12 relative to the bottom plate 11, thereby enabling the vertical negative stiffness component 500 to provide vertical negative stiffness in the vibration damper 10.

[0090] Furthermore, when the damper 10 is in operation, when the top plate 12 moves vertically relative to the bottom plate 11, the force exerted on the top plate 12 by the vertical negative stiffness component 500 (i.e., the fourth force mentioned above) is less than the force exerted on the top plate 12 by the vertical positive stiffness component 300 (i.e., the second force mentioned above).

[0091] In some embodiments, the vertical negative stiffness assembly 500 may include a stator magnet 501 and a mover magnet 502 arranged horizontally at relative intervals. The stator magnet 501 is connected to the inner bottom wall 102 of the damping cavity 100, and the mover magnet 502 is connected to the top plate 12. This ensures that the mover magnet 502 of the vertical negative stiffness assembly 500 can move synchronously with the top plate 12 during vertical movement. Furthermore, during vertical movement of the top plate 12, the relative movement between the mover magnet 502 and the stator magnet 501 generates a magnetic repulsive force in the same direction as the vertical movement of the top plate 12, i.e., the aforementioned fourth force. The magnitude of this magnetic repulsive force is directly proportional to the vertical Z-direction offset of the mover magnet 502 relative to the stator magnet 501, thereby ensuring that the negative stiffness provided by the vertical negative stiffness assembly 500 is related to the movement distance of the top plate 12.

[0092] In some specific embodiments, such as Figure 5 As shown, the aforementioned vertical negative stiffness component 500 may further include a first leaf spring 503 and a second leaf spring 504. Both the first leaf spring 503 and the second leaf spring 504 are arranged parallel to the horizontal plane, and the first leaf spring 503 and the second leaf spring 504 are arranged at intervals relative to each other. The first end of the first leaf spring 503 along the horizontal direction is connected to the inner bottom wall 102 of the damping cavity 100, and the second end of the first leaf spring 503 along the horizontal direction is connected to the bottom end of the moving magnet 502. The first end of the second leaf spring 504 along the horizontal direction is connected to the inner bottom wall 102 of the damping cavity 100, and the second end of the second leaf spring 504 along the horizontal direction is connected to the top end of the moving magnet 502. Thus, the movement of the bottom end and the bottom end of the moving magnet 502 in the horizontal direction can be restricted by the first leaf spring 503 and the second leaf spring 504 respectively, thereby improving the impact resistance of the aforementioned damper 10.

[0093] Specifically, such as Figure 5 As shown, the aforementioned vertical negative stiffness component 500 may further include a lower fixing block 505, a first leaf spring outer ring pad 506, a stator magnetic ring outer frame 507, and a second leaf spring outer ring pad 508. Furthermore, on the inner bottom wall 102 of the vibration damping cavity 100, the lower fixing block 505, the first leaf spring 503, the first leaf spring outer ring pad 506, the stator magnetic ring outer frame 507, the second leaf spring outer ring pad 508, and the second leaf spring 504 are sequentially stacked.

[0094] The lower fixing block 505 is connected to the inner bottom wall 101 of the vibration damping cavity 100, for example, by means of screws. The first end of the first leaf spring 503 is connected horizontally between the lower fixing block 505 and the outer ring pad 506 of the first leaf spring. The stator magnetic ring outer frame 507 is connected between the outer ring pad 506 of the first leaf spring and the outer ring pad 508 of the second leaf spring. The first end of the second leaf spring 504 in the horizontal direction is connected to the outer ring pad 508 of the second leaf spring, thereby realizing that the first end of the first leaf spring 503 in the horizontal direction is connected to the inner bottom wall 102 of the vibration damping cavity 100 through the lower fixing block 505. At the same time, the first end of the second leaf spring 504 in the horizontal direction is connected to the inner bottom wall 102 of the vibration damping cavity 100 through the outer ring pad 508 of the second leaf spring, the outer frame 507 of the stator magnetic ring, the outer ring pad 506 of the first leaf spring, the first leaf spring 503 and the lower fixing block 505.

[0095] Furthermore, the aforementioned stator magnet 501 is specifically disposed on the outer frame 507 of the stator magnetic ring. For example, as shown... Figure 5 As shown, the stator magnetic ring outer frame 507 can be a cylindrical structure 507 with openings at both ends in the vertical direction. In the above-mentioned vertical negative stiffness assembly 500, the stator magnet 501 can be disposed on the inner surface of the cylindrical structure 507, the top end of the mover magnet 502 can be connected to the second end of the second leaf spring 504 in the horizontal direction and the top plate 12, and the bottom end of the mover magnet 502 can pass through the cylindrical structure 507 and be connected to the second end of the first leaf spring 503 in the horizontal direction.

[0096] In some examples, such as Figure 12 As shown, the first leaf spring 503 and the second leaf spring 504 can specifically be butterfly leaf springs 503 / 504. The first end and the second end of the first leaf spring 503 along the horizontal direction are respectively the outer end and the inner end of the butterfly leaf spring 503. The first end and the second end of the second leaf spring 504 along the horizontal direction are respectively the outer end and the inner end of the butterfly leaf spring 504.

[0097] In some examples, such as Figure 5As shown, the stator magnet 501 can be specifically an outer magnetic ring assembly 501, the mover magnet 502 can be specifically an inner magnetic ring assembly 502, and the aforementioned vertical negative stiffness component 500 can also include an inner magnetic ring column 509. The inner magnetic ring column 509 is arranged vertically, that is, the length direction of the inner magnetic ring column 509 is perpendicular to the horizontal plane. The inner magnetic ring assembly 502 is fixedly sleeved on the inner magnetic ring column 509, and the outer magnetic ring assembly 501 is sleeved on the outer periphery of the inner magnetic ring assembly 502 and fixed to the stator magnetic ring outer frame 507. The top end of the inner magnetic ring column 509 is connected to the second end of the second leaf spring 504 along the horizontal direction and the top plate 12, and the bottom end of the inner magnetic ring column 509 is connected to the second end of the first leaf spring 503 along the horizontal direction. Thus, the top end of the mover magnet 502 is connected to the second end of the second leaf spring 504 along the horizontal direction and the top plate 12 through the inner magnetic ring column 509, and the bottom end of the mover magnet 502 is connected to the second end of the first leaf spring 503 along the horizontal direction through the inner magnetic ring column 509.

[0098] In some specific examples, such as Figure 5 , Figure 13 and Figure 14 As shown, the aforementioned vertical negative stiffness assembly 500 may further include a connecting block 510, which is located directly above the second horizontal end of the second leaf spring 504 and connected to the second horizontal end of the second leaf spring 504 and the top end of the inner magnetic ring post 509, thereby connecting the second horizontal end of the second leaf spring 504 between the connecting block 510 and the top end face of the inner magnetic ring post 509. Simultaneously, the connecting block 510 is connected to the top plate 12, for example, specifically through the sealing membrane inner pressure member 33 and / or the cover plate 15, so that the top end of the inner magnetic ring post 509 is connected to the top plate 12 via the connecting block 510.

[0099] In some specific examples, such as Figure 5 , Figure 13 and Figure 14 As shown, the aforementioned vertical negative stiffness component 500 may further include a first pad 511 and a second pad 512. The first pad 511 and the second pad 512 are respectively located directly above and directly below the second horizontal end of the first leaf spring 503, and are connected to the second horizontal end of the first leaf spring 503, thereby connecting the second horizontal end of the first leaf spring 503 between the first pad 511 and the second pad 512. Furthermore, the bottom end of the aforementioned inner magnetic ring post 509 is connected to the first pad 511, thereby connecting the bottom end of the inner magnetic ring post 509 to the second horizontal end of the first leaf spring 503 via the first pad 511.

[0100] Specifically, such as Figure 5 , Figure 13 and Figure 14As shown, the above-mentioned vertical negative stiffness component 500 may also include a lower limit block 513. The lower limit block 513 is located directly below the second pad 512 and is spaced apart from the second pad 512. It is fixed on the inner bottom wall 102 of the vibration damping cavity 100 to achieve vertical limit protection for the second end of the first leaf spring 503 along the horizontal direction, so as to avoid elastic failure or structural damage to the first leaf spring 503 due to excessive displacement.

[0101] For example, the aforementioned outer magnetic ring assembly 501 may include one outer magnetic ring, or it may include multiple outer magnetic rings 5011 stacked vertically (e.g., ...). Figure 13 As shown). Specifically, as Figure 13 As shown, the outer magnetic ring group 501 includes a plurality of outer magnetic rings 5011 stacked vertically, and an outer magnetic ring spacer 5012 is provided between any two vertically adjacent outer magnetic rings 5011 to separate adjacent outer magnetic rings 5011 in the outer magnetic ring group 501.

[0102] For example, the aforementioned inner magnetic ring assembly 502 may include one inner magnetic ring, or it may include multiple inner magnetic rings 5021 stacked vertically (e.g., ...). Figure 14 As shown). Specifically, as Figure 14 As shown, the inner magnetic ring group 502 includes a plurality of inner magnetic rings 5021, and an inner magnetic ring spacer 5022 is provided between any two vertically adjacent inner magnetic rings 5021 to separate adjacent inner magnetic rings 5021 in the inner magnetic ring group 502.

[0103] It should be noted that, in specific implementation, the combination of magnets and the ratio of parameters of the vertical negative stiffness component 500 can be finely designed. For example, by adjusting the number of inner magnetic rings 5012 and outer magnetic rings 5011, the arrangement of magnetic poles, and the gap between them, more precise vertical negative stiffness control can be achieved to meet the different vertical negative stiffness requirements of the vibration damper 10.

[0104] In the above embodiments, such as Figures 1 to 5 As shown, the vibration damper 10 may further include a first motor assembly 17, which is disposed between the base plate 11 and the top plate 12, and includes a first stator 171 and a first mover 172. One of the first stator 171 and the first mover 172 is connected to the base plate 11, and the other is connected to the top plate 12. Furthermore, the first mover 172 can be configured to move vertically relative to the first stator 171 to achieve the vertical active vibration damping function of the vibration damper 10.

[0105] Specifically, such as Figures 1 to 5As shown, the first motor assembly 17 may further include a first motor bracket 173, which is fixed to the base plate 11, and the first stator 171 included in the first motor assembly 17 may be installed on the first motor bracket 173 so that the first stator 171 is connected to the base plate 11 through the first motor bracket 173.

[0106] In the above embodiments, such as Figures 1 to 5 As shown, the vibration damper 10 may further include a second motor assembly 18, which is disposed between the base plate 11 and the top plate 12, and includes a second stator 181 and a second mover 182. One of the second stator 181 and the second mover 182 is connected to the base plate 11, and the other is connected to the top plate 12. Furthermore, the second mover 182 can be configured to move horizontally upward relative to the second stator 181 to achieve the horizontal active vibration damping function of the vibration damper 10.

[0107] Specifically, such as Figures 1 to 5 As shown, the second motor assembly 18 may also include a second motor bracket 183, which is fixed to the base plate 11. The second stator 181 included in the second motor assembly 18 can be installed on the second motor bracket 183 so that the second stator 181 is connected to the base plate 11 through the second motor bracket 183.

[0108] It should be noted that in the above-mentioned shock absorber 10, the number and position of the first motor assembly 17 and the second motor assembly 18 can be set according to actual needs, and this case does not limit this.

[0109] In the above embodiments, the vibration damper 10 may further include a sensor assembly 16 and a controller disposed between the bottom plate 11 and the top plate 12. The sensor assembly 16 is used to detect the movement of the top plate 12. The controller is used to: control the operation of the first motor assembly 17 and / or the second motor assembly 18 based on the detection results of the sensor assembly 16; and / or control the air intake or exhaust of the sealed cavity 100A based on the detection results of the sensor assembly 16. Thus, by controlling the output of the motor assembly and the air intake and exhaust of the sealed cavity 100A, the vibration state of the top plate 12 can be changed, thereby achieving the vibration damping effect of the vibration damper 10.

[0110] For example, such as Figures 1 to 5 As shown, sensor assembly 16 may include velocity sensor 161 and / or displacement sensor 162.

[0111] The speed sensor 162 is mounted on the top plate 12 and configured to detect the movement speed of the top plate 12. Specifically, the speed sensor 162 may include a horizontal speed sensor and a vertical speed sensor, wherein the horizontal speed sensor is used to detect the movement speed of the top plate 12 in the horizontal direction, and the vertical speed sensor is used to detect the movement speed of the top plate 12 in the vertical direction.

[0112] The displacement sensor 162 is configured to detect the movement displacement of the top plate 12. Specifically, the displacement sensor 162 may include a horizontal displacement sensor and a vertical displacement sensor, wherein the horizontal displacement sensor is used to detect the horizontal movement displacement of the top plate 12, and the vertical displacement sensor is used to detect the vertical movement displacement of the top plate 12.

[0113] In the above embodiments, the vibration damper 10 can be used as a vibration damping platform for vibration damping of precision equipment such as semiconductor equipment and / or precision machine tools.

[0114] As can be seen from the above, the vibration damper provided in this embodiment achieves decoupling of the horizontal and vertical stiffness by designing the horizontal positive stiffness component and the vertical positive stiffness component as two independent structures. This allows the vibration damper to more flexibly cope with vibrations in different directions, improving the damping effect and stability. Furthermore, the clever placement of the horizontal and vertical positive stiffness components not only ensures stable positive stiffness in the horizontal direction but also effectively isolates the interference of vertical vibration on the horizontal damping performance, thus significantly improving the overall performance of the vibration damper.

[0115] This application also provides a vibration reduction system, which includes the vibration damper of any of the above embodiments.

[0116] Specifically, in this vibration damping system, the vibration damper includes a bottom plate and a top plate arranged at relative intervals, a vibration damping cavity disposed between the bottom plate and the top plate, a horizontal positive stiffness component, and a vertical positive stiffness component. The top plate is connected to the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity. The vibration damping cavity is spaced apart from the bottom plate. The vertical positive stiffness component connects the vibration damping cavity to the bottom plate and is used to provide vertical positive stiffness and perform horizontal vibration damping on the top plate. The horizontal positive stiffness component is located outside the vibration damping cavity and is connected to the top plate and the bottom plate, and is used to provide horizontal positive stiffness.

[0117] Specifically, the vibration damping system may also include a load, which can be fixed above the top plate of the vibration damper, thereby achieving vibration damping of the load.

[0118] For example, the load can be a semiconductor device, a precision machine tool, or other precision equipment.

[0119] In some embodiments, the vibration damping system may include multiple vibration dampers (e.g., at least three), and the vibration damping system may also include a workbench mounted above the multiple vibration dampers, so that the height of the workbench at the location of each vibration damper can be detected by a sensor, and based on the detection results of the sensor, the output of the motor in the vibration damper and / or the air intake and exhaust of the sealed cavity can be controlled so that the workbench is always in a horizontal state.

[0120] It should be noted that the vibration reduction system provided in this application embodiment, because it is equipped with the vibration damper provided in this application embodiment, can achieve the beneficial effects that any vibration damper provided in this application embodiment can achieve, as detailed in the previous embodiments, and will not be repeated here.

[0121] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vibration damper, characterized in that, It includes a bottom plate and a top plate arranged at relative intervals, as well as a vibration damping cavity, a horizontal positive stiffness component, and a vertical positive stiffness component disposed between the bottom plate and the top plate; The top plate is connected to the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity. The vibration damping cavity and the bottom plate are spaced apart. The vertical positive stiffness component connects the vibration damping cavity and the bottom plate together and is used to provide vertical positive stiffness and perform horizontal vibration damping on the top plate. The horizontal positive stiffness component is located outside the vibration damping cavity and is connected to the top plate and the bottom plate, and is used to provide horizontal positive stiffness.

2. The vibration damper according to claim 1, characterized in that, The vibration damper also includes a horizontal negative stiffness component disposed between the bottom plate and the top plate. The horizontal negative stiffness component is located outside the vibration damping cavity and is used to provide horizontal negative stiffness. Furthermore, when the top plate moves horizontally relative to the bottom plate, the force exerted on the top plate by the horizontal negative stiffness component is less than the force exerted on the top plate by the horizontal positive stiffness component.

3. The vibration damper according to claim 2, characterized in that, The horizontal negative stiffness component includes a first magnet group and a second magnet group. The first magnet group is disposed on the surface of the damping cavity facing the base plate, and the second magnet group is disposed on the side of the base plate facing the damping cavity corresponding to the area of ​​the first magnet group. Each first magnet in the first magnet group and each second magnet in the second magnet group are arranged at intervals relative to each other in a one-to-one correspondence.

4. The vibration damper according to claim 3, characterized in that, The base plate has a through hole on the side facing the vibration damping cavity, corresponding to the area of ​​the first magnet assembly; The horizontal negative stiffness component also includes a magnet base, at least a portion of which is accommodated in the through hole and connected to the base plate. The magnet base is spaced apart from the vibration damping cavity, and the second magnet group is specifically disposed on the surface of the magnet base facing the vibration damping cavity. Furthermore, the position of the magnet base in the depth direction of the through hole is adjustable to allow the second magnet group to move away from or closer to the first magnet group.

5. The vibration damper according to claim 1, characterized in that, The vibration damper also includes a vertical negative stiffness component disposed between the bottom plate and the top plate. The vertical negative stiffness component is located inside the vibration damping cavity and is used to provide vertical negative stiffness. Furthermore, when the top plate moves vertically relative to the bottom plate, the force exerted on the top plate by the vertical negative stiffness component is less than the force exerted on the top plate by the vertical positive stiffness component.

6. The vibration damper according to claim 5, characterized in that, The vertical negative stiffness assembly includes a stator magnet and a mover magnet arranged at horizontal intervals, wherein the stator magnet is connected to the inner bottom wall of the vibration damping cavity, and the mover magnet is connected to the top plate.

7. The vibration damper according to claim 6, characterized in that, The vertical negative stiffness component further includes a first leaf spring and a second leaf spring. The first leaf spring and the second leaf spring are both arranged parallel to the horizontal plane, and the first leaf spring and the second leaf spring are spaced apart from each other. The first end of the first leaf spring in the horizontal direction is connected to the inner bottom wall of the vibration damping cavity, and the second end of the first leaf spring in the horizontal direction is connected to the bottom end of the moving magnet. The first end of the second leaf spring in the horizontal direction is connected to the inner bottom wall of the vibration damping cavity, and the second end of the second leaf spring in the horizontal direction is connected to the top end of the moving magnet.

8. The vibration damper according to claim 7, characterized in that, The vertical negative stiffness component further includes a lower fixing block, a first leaf spring outer ring pad, a stator magnetic ring outer frame, and a second leaf spring outer ring pad. On the inner bottom wall of the vibration damping cavity, the lower fixing block, the first leaf spring, the first leaf spring outer ring pad, the stator magnetic ring outer frame, the second leaf spring outer ring pad, and the second leaf spring are stacked in sequence. Furthermore, the lower fixing block is connected to the inner bottom wall of the vibration damping cavity, the first end of the first leaf spring in the horizontal direction is connected between the lower fixing block and the outer ring pad of the first leaf spring, the outer frame of the stator magnetic ring is connected between the outer ring pad of the first leaf spring and the outer ring pad of the second leaf spring, the first end of the second leaf spring in the horizontal direction is connected to the outer ring pad of the second leaf spring; and the stator magnet is disposed on the outer frame of the stator magnetic ring.

9. The vibration damper according to claim 1, characterized in that, The vertical positive stiffness component includes a support rod group, which includes multiple support rods arranged in parallel at intervals and vertically. The bottom and top ends of the support rods are respectively connected to the base plate and the vibration damping cavity.

10. The vibration damper according to claim 9, characterized in that, The sidewall of the vibration damping cavity is provided with a plurality of receiving grooves on the end face of the bottom plate. The receiving grooves at least partially penetrate the sidewall of the vibration damping cavity, and the plurality of receiving grooves correspond to the plurality of support rods respectively. One end of the support rod is fixed to the bottom plate, and the other end of the support rod extends into its corresponding receiving groove and is connected to the bottom of its corresponding receiving groove.

11. The vibration damper according to claim 1, characterized in that, The vibration damper also includes a sensor assembly and a motor assembly disposed between the base plate and the top plate; The sensor assembly is configured to detect the movement of the top plate; The motor assembly includes a stator and a mover, with one of the stator and the mover connected to the base plate and the other connected to the top plate.

12. A vibration reduction system, characterized in that, Includes the vibration damper as described in any one of claims 1 to 11.

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