Vacuum type air pressure nanoimprint device

Abstract

The invention relates to the technical field of nanoimprint, in particular to a vacuum type air pressure nanoimprint device which comprises a double-layer buffering vacuum sealing cover cap, a supporting fixing base, a nanoimprint structure and a sealing cover cap lifting driving structure. The double-layer buffering vacuum sealing cover cap, the nano-imprinting structure and the sealing cover cap lifting driving structure are all arranged on the supporting and fixing base, and the nano-imprinting structure is located in the double-layer buffering vacuum sealing cover cap; through cooperative cooperation of the double-layer buffering vacuum sealing cover and the sealing cover lifting driving structure, the stability of the vacuum environment can be guaranteed, the sealing performance of the cavity is effectively enhanced to eradicate air leakage, then air pressure fluctuation in the cavity is avoided, it is guaranteed that the imprinting process is stable, and the pattern transfer quality is not affected; and meanwhile, airflow impact can be reduced during switching between the vacuum environment and the atmospheric environment, damage to the template and the substrate is prevented, the service life of the device is not shortened, the working efficiency of the device is not reduced, and diversified machining requirements can be met.

Description

Technical Field

[0001] This invention relates to a vacuum pneumatic nanoimprinting device, and more particularly to a vacuum pneumatic nanoimprinting device, belonging to the field of nanoimprinting technology. Background Technology

[0002] Nanoimprinting is a high-resolution, low-cost micro-nano fabrication technology that uses mechanical force to transfer nanostructures from a template onto a substrate material, achieving precise replication of nanoscale patterns. Nanoimprinting is mainly used in semiconductors, optical devices, biomedicine, flexible electronics, and flexible films. With its unique advantages, nanoimprinting technology has shown broad application prospects in the field of micro-nano manufacturing, driving the development of multiple high-tech industries. However, existing vacuum-type pneumatic nanoimprinting devices suffer from difficulties in ensuring the stability of the vacuum environment and poor sealing performance of the vacuum chamber, which can easily lead to air leakage. This can cause fluctuations in the internal air pressure, affecting the stability of the imprinting process and reducing the quality of pattern transfer. In addition, the device is prone to airflow impact when switching between vacuum and atmospheric environments, which may damage the template and substrate. This reduces the service life and working efficiency of the device and makes it difficult to meet diverse processing needs.

[0003] Therefore, there is an urgent need for a vacuum-type pneumatic nanoimprint device to solve the aforementioned problems. Summary of the Invention

[0004] The purpose of this invention is to provide a vacuum-type pneumatic nanoimprinting device. This invention, through the coordinated operation of a double-layer buffer vacuum sealing cover and a lifting drive structure for the sealing cover, can ensure a stable vacuum environment, effectively enhance the sealing performance of the cavity to prevent air leakage, and thus avoid pressure fluctuations within the cavity, ensuring a stable imprinting process and unaffected pattern transfer quality. At the same time, it can also reduce airflow impact when switching between vacuum and atmospheric environments, preventing damage to the template and substrate. This will not reduce the service life and working efficiency of the device, and can meet diverse processing needs.

[0005] To achieve the above objectives, the main technical solutions adopted by the present invention include: A double-layer buffer vacuum sealing cover is provided on a support base. The double-layer buffer vacuum sealing cover can provide a vacuum working chamber with buffer function for the device. A nanoimprint structure is disposed on the support fixing base and located in the double-layer buffer vacuum sealing cover. The nanoimprint structure is used to imprint the material to be imprinted. A sealing cover lifting drive structure is provided, which is mounted on the support and fixed base and is screwed and lifted to the double-layer buffer vacuum sealing cover. The sealing cover lifting drive structure is used to lift and compress the double-layer buffer vacuum sealing cover.

[0006] Preferably, the nanoimprint structure includes an imprinting component, a pressing and fixing component disposed on the support and fixed base and located in the imprinting component, a real-time air pressure monitoring module embedded in the imprinting component, a pressure sensing module embedded in the imprinting component, and a temperature sensing module embedded in the imprinting component.

[0007] Preferably, the double-layer buffer vacuum sealing cover includes a hollow buffer cover, a first soft rubber sealing ring block disposed at the lower end edge of the hollow buffer cover, an annular support seat disposed on the upper end surface of the support fixing seat, a second soft rubber sealing ring block disposed on the upper end surface of the annular support seat, and a high-efficiency vacuum pump symmetrically mounted on the support fixing seat. The high-efficiency vacuum pump and the double-layer buffer vacuum sealing cover are connected together by a connecting hose.

[0008] Preferably, the hollow buffer cover includes a supporting annular connecting plate, an inner cover disposed on the supporting annular connecting plate, an outer cover disposed on the supporting annular connecting plate and sleeved on the outer side of the inner cover, a plurality of protrusions evenly and equidistantly disposed on the upper end face of the inner cover, a spiral air inlet slot that is screwed through and opened on the protrusions, an air inlet pipe symmetrically connected to the front and rear end faces of the outer cover, and a high-precision electrically controlled valve connected to the air inlet pipe.

[0009] Preferably, the first soft rubber sealing ring block is embedded in the second soft rubber sealing ring block, the lower end face of the first soft rubber sealing ring block is provided with a plurality of extrusion protrusions, and the upper end face of the second soft rubber sealing ring block is provided with a plurality of extrusion grooves, the extrusion protrusions and the extrusion grooves fitting together.

[0010] Preferably, the sealing cover lifting drive structure includes two first drive motors symmetrically mounted on both sides of the support fixing seat, a support plate disposed above the first drive motors, a rotating lead screw mounted on the output end of the first drive motors, a support slide rod symmetrically disposed on the lower end face of the support plate, a limiting sliding lug slidably sleeved on the support slide rod, and a lifting connecting lug screw screw spun onto the rotating lead screw.

[0011] Preferably, the top end of the rotating lead screw is rotatably mounted on the support plate, the rotating lead screw is located between the two support slide rods, and the end of the support slide rod is provided with a slide rod mounting seat, which is mounted on the support fixing seat by bolts.

[0012] Preferably, the top of the rotating lead screw is provided with a rotating locking block, and the support plate is provided with a rotating locking groove. The rotating locking block and the rotating locking groove are mutually locked and adapted to each other, and the four limiting sliding lugs are all provided on the outer cover.

[0013] Preferably, the bottom end of the rotating lead screw is provided with a first connecting seat, the output shaft end of the first drive motor is provided with a second connecting seat, the first connecting seat is installed on the second connecting seat by bolts, and both of the lifting connecting lugs are provided on the outer cover.

[0014] Preferably, the end face of the support fixing seat is provided with a first mounting and storage groove, the high-efficiency vacuum pump is installed in the first mounting and storage groove by bolts, the support fixing seat is provided with second mounting and storage grooves symmetrically on both sides, and the first drive motor is installed in the second mounting and storage groove by bolts.

[0015] The present invention has at least the following beneficial effects: 1. This invention, through the coordinated operation of a double-layer buffer vacuum sealing cover and a lifting drive structure for the sealing cover, can ensure a stable vacuum environment, effectively enhance the sealing performance of the cavity to prevent air leakage, thereby avoiding pressure fluctuations within the cavity and ensuring a stable imprinting process and unaffected pattern transfer quality. At the same time, it can also reduce airflow impact when switching between vacuum and atmospheric environments, preventing damage to the template and substrate. This will not reduce the service life and working efficiency of the device, and can meet diverse processing needs.

[0016] 2. This invention integrates a real-time air pressure monitoring module, a pressure sensing module, and a temperature sensing module into a nanoimprint structure. Through the coordinated operation of these three modules, it can ensure a stable and precise controllable vacuum level within the cavity, effectively avoiding air pressure fluctuations caused by air leakage. At the same time, it can precisely adjust the magnitude and distribution of the imprinting air pressure to ensure that the imprinting force is applied evenly to the template. It can also precisely control the temperature of each area to ensure that the material is heated evenly. Attached Figure Description

[0017] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of the overall pre-operation state structure of the present invention; Figure 2 This is a schematic diagram of the lifting and lowering drive mechanism for the sealing cover of the present invention; Figure 3 This is a schematic diagram of the high-precision electrically controlled valve of the present invention; Figure 4 This is a disassembled schematic diagram of the sealing cover lifting drive part of the present invention; Figure 5 This is a schematic diagram of the internal structure of the hollow buffer cover of the present invention in half section. Figure 6 This is a schematic diagram of the nanoimprint structure of the present invention; Figure 7 This is a schematic diagram of the overall operational state structure of the present invention.

[0018] In the diagram: 1. Double-layer buffer vacuum sealing cover; 2. Support and fixing base; 3. Nanoimprint structure; 4. Sealing cover lifting drive structure; 5. Imprint assembly; 6. Pressing and fixing assembly; 7. Real-time air pressure monitoring module; 8. Pressure sensing module; 9. Temperature sensing module; 10. Hollow buffer cover; 11. First soft rubber sealing ring block; 12. Ring support base; 13. Second soft rubber sealing ring block; 14. High-efficiency vacuum pump; 15. Connecting hose; 16. Supporting ring connecting plate; 17. Inner cover; 18. 19. Outer cover; 20. Protrusion block; 21. Spiral air inlet slot; 22. Air inlet pipe; 23. High-precision electrically controlled valve; 24. Extrusion protrusion; 25. Extrusion groove; 26. First mounting and storage slot; 27. First drive motor; 28. Support plate; 29. ​​Rotating lead screw; 30. Support slide rod; 31. Limiting sliding lug; 32. Lifting connecting lug; 33. Second mounting and storage slot; 34. Slide rod mounting seat; 35. Rotating locking block; 36. Rotating locking groove; 37. First connecting seat; 38. Second connecting seat. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0020] like Figures 1-7 As shown in this embodiment, a vacuum-type pneumatic nanoimprint device includes: Double-layer buffer vacuum sealing cover 1 is mounted on the support base 2. The double-layer buffer vacuum sealing cover 1 can provide the device with a vacuum working chamber with buffer function. The nanoimprint structure 3 is set on the support and fixing base 2 and located in the double-layer buffer vacuum sealing cover 1. The nanoimprint structure 3 is used to imprint the material to be imprinted. The sealing cover lifting drive structure 4 is set on the support and fixing seat 2 and is screwed and lifted to the double-layer buffer vacuum sealing cover 1. The sealing cover lifting drive structure 4 is used to lift and compress the double-layer buffer vacuum sealing cover 1. The support and fixing base 2 facilitates the fixed support of the double-layer buffer vacuum sealing cover 1, the nano-imprint structure 3 and the sealing cover lifting drive structure 4. The coordinated operation of the double-layer buffer vacuum sealing cover 1 and the sealing cover lifting drive structure 4 can ensure the stability of the vacuum environment, effectively enhance the sealing performance of the cavity to prevent air leakage, and thus avoid pressure fluctuations in the cavity, ensuring the stability of the imprinting process and the quality of pattern transfer. At the same time, it can also reduce airflow impact when switching between vacuum and atmospheric environments, preventing damage to the template and substrate. This will not reduce the service life and working efficiency of the device, and can meet diverse processing needs.

[0021] In this embodiment, as Figure 6 As shown, the nanoimprint structure 3 includes an imprinting component 5, a pressing and fixing component 6 disposed on the support and fixing base 2 and located in the imprinting component 5, a real-time air pressure monitoring module 7 embedded in the imprinting component 5, a pressure sensing module 8 embedded in the imprinting component 5, and a temperature sensing module 9 embedded in the imprinting component 5. The imprinting component 5 facilitates the imprinting of the material to be imprinted, and the pressing and fixing component 6 facilitates the pressing and fixing of the material to be imprinted. The real-time air pressure monitoring module 7, the pressure sensing module 8, and the temperature sensing module 9 work together to ensure that the vacuum degree inside the cavity is stable and precisely controllable, effectively avoiding air pressure fluctuations caused by air leakage. At the same time, they can precisely adjust the magnitude and distribution of the imprinting air pressure to ensure that the imprinting force is uniformly applied to the template, and can also precisely control the temperature of each area to ensure that the material is heated evenly. Here, the real-time air pressure monitoring module 7, the pressure sensing module 8, and the temperature sensing module 9 are all existing module components, so their working principle is existing technology, and therefore will not be described in detail here.

[0022] In this embodiment, as Figure 1 and Figure 2As shown, the double-layer buffer vacuum sealing cover 1 includes a hollow buffer cover 10, a first soft rubber sealing ring block 11 disposed at the lower end edge of the hollow buffer cover 10, an annular support seat 12 disposed on the upper end surface of the support and fixing seat 2, a second soft rubber sealing ring block 13 disposed on the upper end surface of the annular support seat 12, and a high-efficiency vacuum pump 14 symmetrically mounted on the support and fixing seat 2. The high-efficiency vacuum pump 14 and the double-layer buffer vacuum sealing cover 1 are connected together by a connecting hose 15. The hollow buffer cover 10 facilitates switching between vacuum and atmospheric environments. To reduce airflow impact, the first soft rubber sealing ring block 11 and the second soft rubber sealing ring block 13 cooperate with each other to effectively improve the sealing between the hollow buffer cover 10 and the ring support seat 12. The ring support seat 12 facilitates the support and fixation of the second soft rubber sealing ring block 13. The high-efficiency vacuum pump 14 facilitates the rapid evacuation of air from the working chamber of the double-layer buffer vacuum sealing cover 1, thereby realizing vacuum-type pneumatic nano-imprinting. The connecting hose 15 facilitates the connection between the high-efficiency vacuum pump 14 and the double-layer buffer vacuum sealing cover 1.

[0023] In this embodiment, as Figure 3 and Figure 5 As shown, the hollow buffer cover 10 includes a supporting annular connecting plate 16, an inner cover 17 disposed on the supporting annular connecting plate 16, an outer cover 18 disposed on the supporting annular connecting plate 16 and sleeved on the outer side of the inner cover 17, a plurality of protrusions 19 evenly and equidistantly disposed on the upper end face of the inner cover 17, a spiral air inlet slot 20 that is screwed into the protrusions 19, an air inlet pipe 21 symmetrically connected to the front and rear end faces of the outer cover 18, and a high-precision electrically controlled valve 22 connected to the air inlet pipe 21. The inner cover 17 and the outer cover 18 are easily fixed and supported. The protrusion 19 facilitates the extension of the spiral air inlet groove 20's spiral operation path. The spiral air inlet groove 20 facilitates the dispersal and spiral entry of air from the atmospheric environment into the inner cover 17 when switching between vacuum and atmospheric environments. At the same time, because it is a spiral operation path, the air entering the inner cover 17 will have a significantly reduced airflow impact force. The air inlet pipe 21 and the high-precision electronically controlled valve 22 work together to facilitate the control and adjustment of the rate and amount of air entering the vacuum environment from the atmospheric environment.

[0024] In this embodiment, as Figure 3 and Figure 5As shown, the first soft rubber sealing ring block 11 is embedded in the second soft rubber sealing ring block 13. The lower end face of the first soft rubber sealing ring block 11 is provided with a plurality of extrusion protrusions 23, and the upper end face of the second soft rubber sealing ring block 13 is provided with a plurality of extrusion grooves 24. The extrusion protrusions 23 and the extrusion grooves 24 fit together and cooperate with each other, so that the first soft rubber sealing ring block 11 can be embedded, extruded and fixed in place on the second soft rubber sealing ring block 13. At the same time, the cooperation between the extrusion protrusions 23 and the extrusion grooves 24 will also effectively reduce the possibility of air leakage.

[0025] In this embodiment, as Figure 2 and Figure 4 As shown, the sealing cover lifting drive structure 4 includes two first drive motors 26 symmetrically mounted on both sides of the support fixing base 2, a support plate 27 disposed above the first drive motors 26, a rotating lead screw 28 mounted on the output end of the first drive motors 26, a support slide rod 29 symmetrically disposed on the lower end face of the support plate 27, a limiting sliding lug 30 slidably sleeved on the support slide rod 29, and a lifting connecting lug 31 screwed onto the rotating lead screw 28. The first drive motors 26 facilitate the provision of driving force for the rotation of the rotating lead screw 28. The support plate 27 facilitates the connection of the top ends of the two support slide rods 29 together, and also facilitates the rotational support of the rotating lead screw 28. The support slide rod 29 and the limiting sliding lug 30 cooperate to limit the lifting of the hollow buffer cover 10. The rotating lead screw 28 and the lifting connecting lug 31 cooperate to realize the lifting and lowering movement of the hollow buffer cover 10 by rotating the lead screw 28.

[0026] In this embodiment, as Figure 4 As shown, the top end of the rotating lead screw 28 is rotatably mounted on the support plate 27. The rotating lead screw 28 is located between two support slide rods 29. The end of the support slide rod 29 is provided with a slide rod mounting seat 33, which is mounted on the support fixing seat 2 by bolts.

[0027] In this embodiment, as Figure 3 , Figure 4 as well as Figure 5 As shown, a rotating locking block 34 is provided at the top of the rotating screw 28, and a rotating locking groove 35 is provided on the support plate 27. The rotating locking block 34 and the rotating locking groove 35 are mutually locked and adapted. Four limiting sliding lugs 30 are all provided on the outer cover 18. The rotating locking block 34 and the rotating locking groove 35 cooperate with each other to facilitate the top of the rotating screw 28 to be rotatably locked on the support plate 27.

[0028] In this embodiment, as Figure 3 , Figure 4 as well as Figure 5As shown, a first connecting seat 36 is provided at the bottom of the rotating lead screw 28, and a second connecting seat 37 is provided at the output shaft end of the first drive motor 26. The first connecting seat 36 is installed on the second connecting seat 37 by bolts. Both lifting connecting lugs 31 are provided on the outer cover 18. The first connecting seat 36 and the second connecting seat 37 cooperate with each other to facilitate the fixing of the bottom of the rotating lead screw 28 on the output shaft end of the first drive motor 26.

[0029] In this embodiment, as Figure 2 and Figure 6 As shown, a first mounting and storage slot 25 is provided through the end face of the support and fixing base 2. The high-efficiency vacuum pump 14 is installed in the first mounting and storage slot 25 by bolts. The support and fixing base 2 is provided with second mounting and storage slots 32 symmetrically on both sides. The first drive motor 26 is installed in the second mounting and storage slot 32 by bolts. The first mounting and storage slot 25 facilitates the installation and storage of the high-efficiency vacuum pump 14, and the second mounting and storage slot 32 facilitates the installation and storage of the first drive motor 26.

[0030] In this embodiment, as Figures 1-7 As shown, the working process of the vacuum-type pneumatic nanoimprint device provided in this embodiment is as follows: Step 1: When using this device, it should first be connected to the control terminal computer. Then, a synchronization controller module should be installed between two or more electric telescopic poles or drive motors that need to work synchronously. This ensures that the two or more electric telescopic poles or drive motors can work synchronously. The synchronization controller module should also be connected to the control terminal computer so that the operator can better operate the device. The synchronization controller module used here is an existing technology module, so its working principle is existing technology and will not be described in detail here. Step 2: When the device is in operation, the operator should first place the material to be imprinted on the support base in the imprinting assembly 5. Then, the operator uses the control terminal computer to control the pressing and fixing assembly 6 to press and fix the material to be imprinted on the support base in the imprinting assembly 5. Subsequently, the operator uses the control terminal computer to control the two first drive motors 26 to start operation. At this time, the first drive motors 26 will start to drive the rotating screw 28 to rotate. Since the rotating screw 28 and the lifting connecting lug 31 are screwed together, the hollow buffer cover 1 will rotate under the rotation of the two rotating screws 28. The machine begins to descend slowly until the first soft rubber sealing ring block 11 at the lower edge of the hollow buffer cover 10 is attached to the second soft rubber sealing ring block 13 on the upper surface of the ring support 12. However, it is important to ensure that the extrusion protrusion 23 is embedded in the extrusion groove 24. At this point, the operator controls the two first drive motors 26 to stop working through the control terminal computer. Then, the operator controls the two first drive motors 26 to drive the rotating screws 28 installed on their respective output ends to rotate half a turn in the above-mentioned working method. After that, the operator controls the two first drive motors 26 to stop working through the control terminal computer. Step 3: At this time, the first soft rubber sealing ring block 11 will be tightly pressed and adhered to the second soft rubber sealing ring block 13, thereby effectively enhancing the sealing performance of the cavity to prevent air leakage and avoid pressure fluctuations in the cavity. Then, the operator controls the two high-efficiency vacuum pumps 14 to start the operation through the control terminal computer. At this time, the two high-efficiency vacuum pumps 14 will extract the air in the double-layer buffer vacuum sealing cover 1 through the connecting hose 15, so that the working cavity covered by the double-layer buffer vacuum sealing cover 1 is in a vacuum state. At this time, the operator controls the two high-efficiency vacuum pumps 14 to stop the operation through the control terminal computer. Then, the imprinting component 5 will imprint the material to be imprinted after pressing and fixing. Step 4: After the imprinting component 5 has finished imprinting the material to be imprinted, the operator can start the operation by controlling the two high-precision electric valves 22 through the control terminal computer. The high-precision electric valves 22 start to slowly release a small amount of air into the space between the inner cover 17 and the outer cover 18. The air between the inner cover 17 and the outer cover 18 will enter the inner wall of the inner cover 17 through the spiral air inlet groove 20 on the protrusion 19. Because it is a spiral operation path, the air entering the inner cover 17 will greatly reduce the airflow impact force and prevent damage to the template and the base. When the air pressure in the inner wall of the inner cover 17 is the same as the air pressure in the outer wall of the outer cover 18, the operator can stop the operation by controlling the two high-precision electric valves 22 through the control terminal computer. Step 5: At this point, the operator can control the two first drive motors 26 through the control terminal computer to start the operation. The first drive motors 26 will start to drive the rotating screw 28 to rotate in the opposite direction. Since the rotating screw 28 and the lifting connecting lug 31 are screwed together, the hollow buffer cover 10 will slowly rise under the reverse rotation of the two rotating screws 28 until the hollow buffer cover 10 returns to the initial state. Then the operator can control the two first drive motors 26 through the control terminal computer to start the operation. Step 6: Then the operator can control the pressing and fixing component 6 to stop pressing and return to the initial state through the control terminal computer. Subsequently, the operator can control the imprinting component 5 to also return to the initial state through the control terminal computer. At this time, the operator can remove the imprinted material from the support base in the imprinting component 5.

[0031] If certain terms are used in the specification and claims to refer to specific components, those skilled in the art will understand that hardware manufacturers may use different names to refer to the same component. This specification and claims do not distinguish components based on differences in name, but rather on differences in function. The term "comprising" as used throughout the specification and claims is an open-ended term and should be interpreted as "comprising but not limited to." "Approximately" means that within an acceptable margin of error, those skilled in the art can solve the technical problem and substantially achieve the technical effect within a certain margin of error.

[0032] It should be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a product or system comprising a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a product or system. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the product or system that includes that element.

[0033] The foregoing description illustrates and describes several preferred embodiments of the present invention. However, as previously stated, it should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the inventive concept described herein through the foregoing teachings or techniques or knowledge in related fields. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the protection scope of the appended claims.

Claims

1. A vacuum-type pneumatic nanoimprinting device, characterized in that, include: A double-layer buffer vacuum sealing cover (1) is provided on a support base (2). The double-layer buffer vacuum sealing cover (1) can provide the device with a vacuum working chamber with buffer function. Nanoimprint structure (3), the nanoimprint structure (3) is disposed on the support fixing seat (2) and located in the double-layer buffer vacuum sealing cover (1), the nanoimprint structure (3) is used to imprint the material to be imprinted; The sealing cover lifting drive structure (4) is set on the support fixing seat (2) and is screwed and lifted to connect with the double-layer buffer vacuum sealing cover (1). The sealing cover lifting drive structure (4) is used to lift and compress the double-layer buffer vacuum sealing cover (1).

2. The vacuum-type pneumatic nanoimprinting device according to claim 1, characterized in that: The nanoimprint structure (3) includes an imprint assembly (5), a pressing and fixing assembly (6) disposed on the support base (2) and located in the imprint assembly (5), a real-time air pressure monitoring module (7) embedded in the imprint assembly (5), a pressure sensing module (8) embedded in the imprint assembly (5), and a temperature sensing module (9) embedded in the imprint assembly (5).

3. The vacuum-type pneumatic nanoimprint device according to claim 1, characterized in that: The double-layer buffer vacuum sealing cover (1) includes a hollow buffer cover (10), a first soft rubber sealing ring block (11) disposed at the lower end edge of the hollow buffer cover (10), an annular support seat (12) disposed on the upper end surface of the support fixing seat (2), a second soft rubber sealing ring block (13) disposed on the upper end surface of the annular support seat (12), and a high-efficiency vacuum pump (14) symmetrically mounted on the support fixing seat (2). The high-efficiency vacuum pump (14) is connected to the double-layer buffer vacuum sealing cover (1) through a connecting hose (15).

4. The vacuum-type pneumatic nanoimprinting device according to claim 3, characterized in that: The hollow buffer cover (10) includes a supporting ring connecting plate (16), an inner cover (17) provided on the supporting ring connecting plate (16), an outer cover (18) provided on the supporting ring connecting plate (16) and sleeved on the outer side of the inner cover (17), a number of protrusions (19) evenly and equidistantly provided on the upper end face of the inner cover (17), a spiral air inlet slot (20) that is screwed through and opened on the protrusions (19), an air inlet pipe (21) symmetrically connected and installed on the front and rear end faces of the outer cover (18), and a high-precision electric control valve (22) connected and installed on the air inlet pipe (21).

5. The vacuum-type pneumatic nanoimprinting device according to claim 4, characterized in that: The first soft rubber sealing ring block (11) is embedded in the second soft rubber sealing ring block (13). The lower end face of the first soft rubber sealing ring block (11) is provided with a plurality of extrusion protrusions (23), and the upper end face of the second soft rubber sealing ring block (13) is provided with a plurality of extrusion grooves (24). The extrusion protrusions (23) and the extrusion grooves (24) fit together.

6. The vacuum-type pneumatic nanoimprinting device according to claim 4, characterized in that: The sealing cover lifting drive structure (4) includes two first drive motors (26) symmetrically installed on both sides of the support fixing seat (2), a support plate (27) set above the first drive motors (26), a rotating screw (28) installed at the output end of the first drive motors (26), a support slide rod (29) symmetrically arranged on the lower end face of the support plate (27), a limiting sliding lug (30) slidably sleeved on the support slide rod (29), and a lifting connecting lug (31) screwed onto the rotating screw (28).

7. The vacuum-type pneumatic nanoimprint device according to claim 6, characterized in that: The top end of the rotating screw (28) is rotatably mounted on the support plate (27). The rotating screw (28) is located between the two support slides (29). The end of the support slide (29) is provided with a slide mounting seat (33). The slide mounting seat (33) is mounted on the support fixing seat (2) by bolts.

8. The vacuum-type pneumatic nanoimprint device according to claim 7, characterized in that: The top of the rotating screw (28) is provided with a rotating locking block (34), and the support plate (27) is provided with a rotating locking groove (35). The rotating locking block (34) and the rotating locking groove (35) are mutually locked and adapted. The four limiting sliding lugs (30) are all provided on the outer cover (18).

9. The vacuum-type pneumatic nanoimprint device according to claim 8, characterized in that: The bottom end of the rotating screw (28) is provided with a first connecting seat (36), and the output shaft end of the first drive motor (26) is provided with a second connecting seat (37). The first connecting seat (36) is installed on the second connecting seat (37) by bolts, and the two lifting connecting lugs (31) are both provided on the outer cover (18).

10. A vacuum-type pneumatic nanoimprint device according to claim 6, characterized in that: The support base (2) has a first mounting and storage groove (25) through the end face. The high-efficiency vacuum pump (14) is installed in the first mounting and storage groove (25) by bolts. The support base (2) has second mounting and storage grooves (32) symmetrically opened on both sides. The first drive motor (26) is installed in the second mounting and storage groove (32) by bolts.

Images