Weighing and liquid supplementing system
By combining a weighing and replenishment system with a level sensor, a distance sensor, and a vibration sensor, the problem of reduced accuracy in level detection is solved, and high-precision liquid volume calculation and replenishment volume control are achieved.
Patent Information
- Application Number
- CN202511442275.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-10
- Publication Date
- 2025-11-14
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
The accuracy of existing wet liquid level detection and replenishment systems decreases as the cross-sectional area of the replenishment tank increases, and they are susceptible to mechanical resonance and human vibration, resulting in inaccurate liquid volume calculations and failing to meet the requirements for high-precision replenishment.
A weighing and replenishment system is adopted, which combines a liquid level sensor, a distance sensor and a vibration sensor to detect the liquid level and the volume of the wall-mounted droplets from multiple dimensions. By combining coarse and fine replenishment methods and using a pneumatic diaphragm valve for error correction, precise control is achieved.
It improves the accuracy of liquid volume calculation, enables precise control of liquid replenishment, and reduces calculation errors of liquid level error and wall-mounted droplets.
Smart Images
Figure CN120949840A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of weighing and replenishing fluid technology, specifically a weighing and replenishing fluid system. Background Technology
[0002] Currently, the most widely used liquid replenishment system in the wet process equipment market is the liquid level detection replenishment system. This system calculates the liquid volume by measuring the cross-sectional area inside the replenishment tank and detecting the liquid level height, thus controlling the replenishment amount. The measurement unit is milliliters. The drawback of liquid level detection is that the detection accuracy decreases as the cross-sectional area inside the replenishment tank increases. To solve the problem of decreased accuracy due to increased cross-sectional area, a weighing measurement system is introduced. The weighing replenishment system weighs the replenishment tank and the chemical solution using a weighing module. Based on the weight change, it accurately controls the amount of chemical added. The replenishment accuracy can be controlled within 0.5 grams and is not limited by the size of the replenishment tank.
[0003] In practical applications, the liquid level measurement of weighing and replenishing technology is easily affected by mechanical resonance or random human vibration. The volume of the droplets hanging on the inner wall of the replenishing tank is difficult to quantify accurately, resulting in deviations in liquid volume calculation. The replenishing process is mostly a single coarse replenishing mode without subsequent error correction mechanisms, which ultimately leads to inaccurate liquid volume calculation and low precision in replenishing volume control, failing to meet the requirements of high-precision replenishing. Therefore, designing a weighing and replenishing system with a correction mechanism is a technical problem that needs to be solved by those skilled in the art. Summary of the Invention
[0004] To address the shortcomings of existing technologies, this invention provides a weighing and replenishing system that solves the problems mentioned in the background section.
[0005] To achieve the above objectives, the present invention provides the following technical solution: a weighing and replenishing system, comprising a replenishing tank and a processing unit, wherein the processing unit is an external controller used only for data collection and processing; a first fixing plate is fixedly connected to the top of the replenishing tank; a liquid level sensor is fixedly connected to the center of the top of the first fixing plate; one end of the liquid level sensor penetrates the first fixing plate and extends into the interior of the replenishing tank; a second fixing plate is fixedly connected to the bottom of the replenishing tank; and a replenishing device is provided on the second fixing plate. A brushless motor is fixedly connected to the bottom surface of the first fixed plate. The brushless motor is a hollow shaft brushless motor. The liquid level sensor is located inside the replenishment tank, with one end passing through the shaft of the brushless motor and extending downward. A base plate is fixedly connected to the bottom side of the output shaft of the brushless motor. Several first ranging sensors are fixed to the bottom surface of the base plate. A second ranging sensor is provided on the bottom surface of the base plate. A vibration sensor is provided on the side of the second ranging sensor. A communication line is integrated inside the base plate. The communication line is used for power supply, control, and transmission of electrical signals for the first ranging sensor, the second ranging sensor, and the vibration sensor. A weighing sensor is fixedly connected to the top surface of the first fixed plate or the bottom surface of the second fixed plate. The output terminals of the weighing sensor, liquid level sensor, first distance sensor, second distance sensor, and vibration sensor are all electrically connected to the input terminal of the processing unit, and the output terminal of the processing unit is electrically connected to the input terminal of the brushless motor. The liquid level sensor is used to calculate the first height of the liquid level inside the replenishment tank, the weighing sensor is used to obtain the weight of the replenished liquid inside the replenishment tank, the first ranging sensor is used to calculate the second height of the liquid level inside the replenishment tank, the second ranging sensor is used to calculate the third height of the liquid level inside the replenishment tank and the volume of the wall-mounted droplets, the vibration sensor is used to obtain vibration information inside the replenishment tank, the processing unit calculates the final volume VA and replenishment amount of the replenished liquid based on the first, second, and third heights of the liquid level, the liquid weight, and the vibration information, and the replenishment device releases the replenished liquid according to the replenishment amount.
[0006] Furthermore, a float ball is slidably connected to one end of the liquid level sensor inside the replenishment tank. The float ball floats on the surface of the replenishment liquid. Fixing clips are fixedly connected to both sides of the bottom of the replenishment tank. The fixing clips are used to fix the replenishment tank. A vent valve is connected to the side of the replenishment tank. The replenishment liquid is controlled by adjusting the vent valve to control the speed of liquid entering and leaving the replenishment tank. The replenishment device includes a water outlet valve, the top of which passes through a second fixed plate and is connected to the replenishment tank. One bottom end of the water outlet valve is connected to a connecting pipe, which has an "H" shape. The other top end of the connecting pipe is connected to a first pneumatic diaphragm valve, one bottom end of the connecting pipe is connected to a second pneumatic diaphragm valve, and the other bottom end of the connecting pipe is connected to a third pneumatic diaphragm valve. The output end of the processing unit is electrically connected to the input ends of the first, second, and third pneumatic diaphragm valves, respectively. The first, second, and third pneumatic diaphragm valves release replenishment liquid according to the replenishment volume. The second ranging sensor is installed inside the rotating platform, and the vibration sensor is fixed to the side of the rotating platform. The rotating platform drives the second ranging sensor to rotate 90 degrees vertically through a micro motor. The micro motor is fixed inside the rotating platform and its output shaft directly acts on the second ranging sensor. The rotating platform is fixed to the bottom surface of the substrate.
[0007] Furthermore, after the replenishment tank has completed the replenishment of liquid, the first liquid level is calculated. The specific details for calculating the first liquid level are as follows: The sensing height he is calculated. The replenishing liquid inside the replenishment tank drives the float to float. The float is equipped with a magnetic ring that matches the liquid level sensor. When the float slides on the bottom circumference of the liquid level sensor, the magnetic ring inside the float and several magnetic sensing chips inside the liquid level sensor will generate magnetic induction. The liquid level sensor is located inside the replenishment tank and is equipped with a magnetic sensing chip at fixed intervals db. The fixed interval db is determined according to the actual range and measurement accuracy of the liquid level sensor. The magnetic sensing chip sends an analog signal to the processing unit. The processing unit determines the sensing height he based on the analog signals emitted by the two adjacent magnetic sensing chips of the float. To correct for floating errors, the processing unit internally presets the float's buoyancy height hf above the replenishing liquid surface and the float's structural height ha. The buoyancy height hf is determined based on the float's own density and the density of the replenishing liquid, which is generally a single medium. The structural height ha is determined based on the lowest liquid height measured by the float. The magnetic ring inside the float is located at the middle height of the float. The processing unit corrects for floating errors based on the buoyancy height hf, the sensing height he, and the structural height ha, and calculates the actual height H of the replenishing liquid surface using the formula: H is a pure numerical value. After the calculation is completed, the actual height H is assigned a unit in millimeters. The processing unit marks the actual height H as the first height of the replenished liquid surface, and then calculates the second height of the liquid surface.
[0008] Furthermore, the specific steps for calculating the second height of the liquid level are as follows: The processing unit supplies power to the brushless motor and the first ranging sensor respectively. The output shaft of the brushless motor rotates, driving the first ranging sensor to rotate. The first ranging sensor sends a laser downward along the axis of the replenishment tank and receives the light signal reflected back from the liquid surface. The first ranging sensor records the first time difference between the emitted laser and the received reflected light signal. The first ranging sensor transmits the first time difference to the processing unit. The processing unit calculates the height hi of the replenishment liquid surface from the first ranging sensor based on the first time difference. The processing unit internally presets the distance ho of the first ranging sensor from the bottom surface of the replenishment tank. The processing unit subtracts the height hi from the distance ho to obtain the height hp of the first point. Each time the brushless motor rotates by a first fixed angle, the first ranging sensor completes one laser transmission and receives the reflected light signal. The value of the first fixed angle is determined according to the radius of the replenishment tank. The larger the radius of the replenishment tank, the more first point height hp needs to be collected, and the smaller the value of the fixed angle. The first point height hp of several first ranging sensors corresponds to the reflection points on the liquid surface to form a line segment. The liquid surface is formed by the rotation of the brushless motor. The processing unit calculates the first point height hp at each first fixed angle and averages it to obtain the second height of the liquid surface. Subsequently, the third height of the liquid surface is calculated.
[0009] Furthermore, the calculation of the third height of the liquid surface is as follows: The processing unit supplies power to the brushless motor, the micro motor driving the second ranging sensor, and the second ranging sensor. The output shaft of the brushless motor rotates, causing the second ranging sensor to rotate horizontally. At the same time, the output shaft of the micro motor rotates, causing the second ranging sensor to rotate vertically by 90 degrees. The second ranging sensor sends a laser downward and receives the light signal reflected back from the first target point. Since the second ranging sensor does not emit the laser vertically downward, the first target point here includes both the liquid surface and the inner wall of the curved surface of the replenishment tank. The second ranging sensor records the second time difference between emitting the laser and receiving the reflected light signal. The second ranging sensor transmits the second time difference to the processing unit. The processing unit calculates the length ht of the first target point based on the second time difference. Each time the brushless motor rotates by a first fixed angle, the second ranging sensor completes one laser transmission and receives the reflected light signal. After the brushless motor rotates one revolution, the micro motor drives the second ranging sensor to rotate by a second fixed angle until the second ranging sensor emits a laser to the bottom edge of the replenishment tank. The brushless motor and the second ranging sensor then stop. The value of the second fixed angle is determined according to the total height of the replenishment tank. The greater the total height of the replenishment tank, the more lengths ht of the first target point need to be collected, and the smaller the value of the fixed angle. The lengths ht of the first target points obtained by several second ranging sensors through the rotation of the brushless motor correspond to the first target points and form a circle. Then, the micro motor drives the second ranging sensor to rotate to obtain several concentric circles with different radii. The concentric circles with different radii form the liquid surface. The processing unit calculates the height hr of the second point based on the rotation angle of the second ranging sensor and the length ht of the first target point. The rotation angle of the second ranging sensor is provided by the driving micro motor. The micro motor is equipped with a Hall sensor, which can feed back the rotation angle to the processing unit. The height hr of the second point is calculated using trigonometric functions. The processing unit calculates the average value of all second point heights hr to obtain the third height of the liquid surface, and then calculates the volume of the wall-mounted droplets.
[0010] Furthermore, the specific steps for calculating the volume of the wall-mounted liquid droplets are as follows: The brushless motor and the second ranging sensor continue to rotate. Each time the brushless motor rotates by a first fixed angle, the second ranging sensor completes one laser transmission and receives the light signal reflected back from the second target point. After the brushless motor rotates one revolution, the micro motor drives the second ranging sensor to rotate by a second fixed angle until the second ranging sensor emits a laser to the top edge of the replenishment tank. The brushless motor and the second ranging sensor then stop, and the second ranging sensor has completed a complete scan of the curved inner wall of the replenishment tank. The second ranging sensor records a third time difference between emitting laser light and receiving the light signal reflected back from the second target point. The second ranging sensor transmits the third time difference to the processing unit. The processing unit calculates the distance hs between the second ranging sensor and the second target point based on the third time difference. The processing unit compares the length hs of each second target point with the average length hs of its two adjacent second target points. The processing unit presets an error allowable range, which is used to filter out misidentified droplet points. Second target points whose comparison results exceed the error allowable range are marked as droplet points. The processing unit presets a droplet model, which is the ideal volume of the droplet when it is on the inner wall of the replenishment tank. The unit is cubic millimeters. The volume of the droplet model is determined based on the roughness of the inner wall of the replenishment tank and the surface tension of the replenishing liquid. An ideal droplet model can be calculated in the experiment and saved in the processing unit for use by the processing unit. The processing unit counts the number of all droplets and multiplies it by the droplet model to obtain the volume of the wall-mounted droplet.
[0011] Furthermore, when calculating the second and third liquid levels, the processing unit controls the brushless motor, the first ranging sensor, and the second ranging sensor to operate intermittently based on the vibration information, as detailed below: The processing unit establishes an amplitude curve table, normalizes the vibration information and inputs it into the amplitude curve table to obtain the vibration curve. The processing unit presets a first vibration threshold and a second vibration threshold. The first vibration threshold ranges from 0.2 to 0.5, and the second vibration threshold ranges from 0.5 to 0.9. When taking the values, the first vibration threshold must be less than the second vibration threshold. When the vertical axis value corresponding to the vibration curve is greater than the first vibration threshold, it indicates that the vibration amplitude is moderate and has little impact on the vertical ranging of the first ranging sensor, but does affect the tilt ranging of the second ranging sensor. The processing unit controls the second ranging sensor and the micro motor driving the second ranging sensor to stop. When the vertical axis value corresponding to the vibration curve is lower than the first vibration threshold, the second ranging sensor restarts. When the vertical axis value corresponding to the vibration curve is greater than the second vibration threshold, it indicates that the vibration amplitude is large and will affect both the first and second ranging sensors. The processing unit controls the brushless motor, the first ranging sensor, and the second ranging sensor to stop respectively. When the vertical axis value corresponding to the vibration curve is less than the second vibration threshold, the brushless motor and the first ranging sensor restart. When the vertical axis value corresponding to the vibration curve continues to decrease until it is less than the first vibration threshold, the second ranging sensor restarts.
[0012] Furthermore, the replenishment device releases replenishment liquid according to the replenishment volume, specifically including the following: When the operator or other automated equipment sends a liquid replenishment command to the processing unit, the processing unit multiplies the first liquid level height by the area of the bottom surface of the replenishment tank to obtain the first volume Va. The area of the bottom surface is obtained from the radius of the replenishment tank preset inside the processing unit. The processing unit divides the liquid weight by the density of the replenishment liquid to obtain the second volume Vb. The density of the replenishment liquid is preset by the operator and stored in the processing unit. The processing unit multiplies the second liquid level height by the area of the bottom surface of the replenishment tank to obtain the third volume Vc. The processing unit multiplies the third liquid level height by the area of the bottom surface of the replenishment tank to obtain the fourth volume. The fourth volume is added to the volume of the wall-mounted droplets to obtain the fifth volume Vd. The processing unit according to the formula The final volume VA of the replenished liquid inside the replenishment tank is calculated. w1, w2, w3 and w4 are all weighting coefficients and satisfy conditions one and two. Condition one is w1+w2+w3+w4=1, and condition two is w4>w3>w2>w1.
[0013] Furthermore, both the first and third pneumatic diaphragm valves are 1 / 2" pneumatic diaphragm valves, while the second pneumatic diaphragm valve is a 3 / 8" pneumatic diaphragm valve. The first pneumatic diaphragm valve is used for the inlet of the replenishment tank. The vent valve reduces the internal air pressure of the replenishment tank. The replenishing liquid enters the connecting pipe through the first pneumatic diaphragm valve and then enters the replenishment tank through the outlet valve. The third pneumatic diaphragm valve is used for coarse replenishment of the replenishing liquid. The processing unit controls the third pneumatic diaphragm valve to output the first part of the replenishing liquid volume. The second pneumatic diaphragm valve is used for fine replenishment of the replenishing liquid. The processing unit controls the second pneumatic diaphragm valve to output the second part of the replenishing liquid volume. After the third pneumatic diaphragm valve completes the liquid discharge, the processing unit recalculates the final volume VA of the replenished liquid inside the replenishment tank. If the decrease in the final volume VA is equal to the first part of the replenishment volume, the second pneumatic diaphragm valve performs subsequent fine replenishment. If the decrease in the final volume VA is not equal to the first part of the replenishment volume, the processing unit calculates the error between the decrease in the final volume VA and the first part of the replenishment volume. The error can be positive or negative. The processing unit adds the error to the second part of the replenishment volume and marks it as a correction amount. The processing unit controls the second pneumatic diaphragm valve to discharge liquid according to the correction amount.
[0014] Furthermore, when the weighing sensor acquires the liquid weight, if the weighing sensor is installed on the top surface of the first fixed plate, the fixing clamp is not used to fix the replenishment tank. The first fixed plate or the matching suspension structure is responsible for suspending the entire replenishment system equipment. The weighing sensor needs to subtract the weights of the replenishment tank, fixing clamp, vent valve, second fixed plate, water outlet valve, first pneumatic diaphragm valve, connecting pipe, second pneumatic diaphragm valve, and third pneumatic diaphragm valve in sequence to obtain the liquid weight. If the weighing sensor is installed on the bottom surface of the second fixed plate, the fixing clamp is used to fix the replenishment tank. The weighing sensor needs to subtract the weights of the replenishment tank, liquid level sensor, first fixed plate, float, fixing clamp, vent valve, brushless motor, base plate, first ranging sensor, second ranging sensor, micro motor, and vibration sensor in sequence to obtain the liquid weight.
[0015] The present invention has the following beneficial effects: 1. By using a multi-dimensional liquid replenishment detection system consisting of a liquid level sensor, a distance sensor, a vibration sensor, and a weighing sensor, the calculation error of liquid replenishment caused by liquid level error and wall-mounted droplets is reduced, thereby improving the accuracy of volume calculation.
[0016] 2. The combination of coarse and fine fluid replenishment with an error correction mechanism enables precise control of the fluid replenishment volume.
[0017] Of course, any product implementing this invention does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description
[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is a flowchart of a weighing and replenishing system according to the present invention; Figure 2 This is an exploded view of the internal structure of the replenishment tank and the replenishment device of the present invention; Figure 3 For the present invention Figure 2 A magnified view of a section at point A in the middle; Figure 4 This is a scanning diagram of the second ranging sensor of the present invention during operation.
[0020] The attached diagram lists the components represented by each number as follows: In the diagram: 1-Replenishment tank, 2-Level sensor, 3-First fixing plate, 4-Float ball, 5-Fixing clamp, 6-Ventilation valve, 7-Second fixing plate, 8-Outlet valve, 9-First pneumatic diaphragm valve, 10-Connecting pipe, 11-Second pneumatic diaphragm valve, 12-Third pneumatic diaphragm valve, 13-Brushless motor, 14-Baseboard, 15-First ranging sensor, 16-Second ranging sensor, 17-Vibration sensor. Detailed Implementation
[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0022] Please see Figure 1-4 This invention provides a technical solution: a weighing and replenishing system, comprising a replenishing tank 1 and a processing unit, wherein the processing unit is an external controller used only for data collection and data processing, such as... Figure 2-3 As shown, a first fixing plate 3 is fixedly connected to the top of the replenishment tank 1. A liquid level sensor 2 is fixedly connected to the center of the top of the first fixing plate 3. One end of the liquid level sensor 2 passes through the first fixing plate 3 and extends into the interior of the replenishment tank 1. A second fixing plate 7 is fixedly connected to the bottom of the replenishment tank 1. The second fixing plate 7 is equipped with a replenishment device. A brushless motor 13 is fixedly connected to the bottom surface of the first fixed plate 3. The brushless motor 13 is a hollow shaft brushless motor. The liquid level sensor 2 is located inside the liquid replenishment tank 1, with one end passing through the shaft of the brushless motor 13 and extending downward. A base plate 14 is fixedly connected to the bottom side of the output shaft of the brushless motor 13. Several first ranging sensors 15 are fixedly mounted on the bottom surface of the base plate 14. A second ranging sensor 16 is mounted on the bottom surface of the base plate 14. A vibration sensor 17 is mounted on the side of the second ranging sensor 16. A communication line is integrated inside the base plate 14. The communication line is used for power supply, control and transmission of electrical signals for the first ranging sensor 15, the second ranging sensor 16 and the vibration sensor 17. A weighing sensor is fixedly connected to the top surface of the first fixed plate 3 or the bottom surface of the second fixed plate 7. like Figure 1 As shown, the output terminals of the weighing sensor, liquid level sensor 2, first distance sensor 15, second distance sensor 16 and vibration sensor 17 are all electrically connected to the input terminal of the processing unit, and the output terminal of the processing unit is electrically connected to the input terminal of the brushless motor 13. The liquid level sensor 2 is used to calculate the first height of the liquid level inside the replenishment tank 1. The weighing sensor is used to obtain the weight of the replenished liquid inside the replenishment tank 1. The first distance sensor 15 is used to calculate the second height of the liquid level inside the replenishment tank 1. The second distance sensor 16 is used to calculate the third height of the liquid level inside the replenishment tank 1 and the volume of the wall-mounted droplets. The vibration sensor 17 is used to obtain vibration information inside the replenishment tank 1. The processing unit calculates the final volume VA and replenishment amount of the replenished liquid based on the first height, second height, third height of the liquid level, liquid weight and vibration information. The replenishment device releases the replenished liquid according to the replenishment amount.
[0023] Among them, the liquid level sensor 2 is located inside the liquid replenishment tank 1 and is slidably connected to a float ball 4 on one side of the periphery. The float ball 4 floats on the surface of the replenishing liquid. The bottom sides of the liquid replenishment tank 1 are fixedly connected to fixing clips 5, which are used to fix the liquid replenishment tank 1. The side of the liquid replenishment tank is connected to a vent valve. The replenishing liquid is controlled by adjusting the vent valve to control the speed of liquid inlet and outlet of the liquid replenishment tank. The replenishment device includes a water outlet valve 8, the top of which passes through the second fixing plate 7 and is connected to the replenishment tank 1. One end of the bottom of the water outlet valve 8 is connected to a connecting pipe 10, which has an "H" shaped structure. The other end of the top of the connecting pipe 10 is connected to a first pneumatic diaphragm valve 9, one end of the bottom of the connecting pipe 10 is connected to a second pneumatic diaphragm valve 11, and the other end of the bottom of the connecting pipe 10 is connected to a third pneumatic diaphragm valve 12. The output end of the processing unit is electrically connected to the input ends of the first pneumatic diaphragm valve 9, the second pneumatic diaphragm valve 11, and the third pneumatic diaphragm valve 12, respectively. The first pneumatic diaphragm valve 9, the second pneumatic diaphragm valve 11, and the third pneumatic diaphragm valve 12 release replenishment liquid according to the replenishment volume. The second ranging sensor 16 is installed inside the rotating table, and the vibration sensor 17 is fixed on the side of the rotating table. The rotating table drives the second ranging sensor 16 to rotate reciprocally 90 degrees in the vertical direction through a micro-motor. The micro-motor is fixed inside the rotating table, and the output shaft of the micro-motor directly acts on the second ranging sensor 16. Any micro-motor on the market that can achieve the effect of reciprocating drive in the vertical direction can be used, and the specific model is not restricted here. The rotating table is fixed on the bottom surface of the substrate 14.
[0024] Among them, when the liquid replenishment bucket 1 finishes replenishing the liquid injection, the first height of the liquid surface is calculated. The specific content of calculating the first height of the liquid surface is as follows: Calculate the induction height he. The replenishing liquid inside the liquid replenishment bucket 1 drives the floating ball 4 to float. A magnetic ring matching the liquid level sensor 2 is arranged inside the floating ball 4. When the magnetic ring inside the floating ball 4 slides on the circumferential side surface of the bottom of the liquid level sensor 2, the magnetic ring inside the floating ball 4 generates magnetic induction with several magnetic sensing chips inside the liquid level sensor 2. A magnetic sensing chip is arranged at a fixed distance db every other inside one end of the liquid replenishment bucket 1 where the liquid level sensor 2 is located. The fixed distance db is determined according to the actual range and measurement accuracy of the liquid level sensor 2. The distance magnetic sensing chip sends an analog signal to the processing unit, and the processing unit determines the induction height he according to the analog signals sent by two adjacent magnetic sensing chips of the floating ball 4. For example, the analog quantities after quantization of the analog signals sent by the two magnetic sensing chips closest to the floating ball 4 are 0.5 and 1.5 respectively, then the induction height , ca < cc, ca is the length value of the position where the first magnetic sensing chip is located, and cc is the length value of the position where the second magnetic sensing chip is located; Correct the floating error. The processing unit internally presets the floating height hf of the floating ball 4 above the surface of the replenishing liquid and the structural height ha of the floating ball 4. The floating height hf is determined according to the density of the floating ball 4 itself and the density of the replenishing liquid. The replenishing liquid is generally a single medium. The structural height ha is determined according to the lowest height of the liquid measured by the floating ball 4. The magnetic ring inside the floating ball 4 is located at the middle height of the floating ball 4. The processing unit corrects the floating error according to the floating height hf, the induction height he, and the structural height ha, and calculates the actual height H of the surface of the replenishing liquid. The formula is , H is a pure numerical value. After the calculation is completed, the unit of the actual height H is given, and the unit is millimeter. The processing unit marks the actual height H as the first height of the surface of the replenishing liquid, and then calculates the second height of the liquid surface.
[0025] Among them, the specific content of calculating the second height of the liquid surface is as follows: The processing unit calculates the height hp of the first point. It supplies power to the brushless motor 13 and the first ranging sensor 15. The output shaft of the brushless motor 13 rotates, which drives the first ranging sensor 15 to rotate. The first ranging sensor 15 sends a laser downward along the axis of the replenishment tank 1 and receives the light signal reflected back from the liquid surface. The first ranging sensor 15 records the first time difference between the emitted laser and the received reflected light signal. The first ranging sensor 15 transmits the first time difference to the processing unit. The processing unit calculates the height hi of the replenishment liquid surface from the first ranging sensor 15 based on the first time difference. The processing unit internally presets the distance ho of the first ranging sensor 15 from the bottom surface of the replenishment tank 1. The processing unit subtracts the height hi from the distance ho to obtain the height hp of the first point. Each time the brushless motor 13 rotates by 1 degree, the first ranging sensor 15 completes one laser transmission and receives the reflected light signal. The value of the first fixed angle is determined according to the radius of the replenishment tank 1. The larger the radius of the replenishment tank 1, the more first point height hp needs to be collected, and the smaller the value of the fixed angle. The first point height hp of several first ranging sensors 15 correspond to the reflection points on the liquid surface to form a line segment. The line segment forms the liquid surface through the rotation of the brushless motor 13. The processing unit calculates the first point height hp under each first fixed angle and calculates the average to obtain the second height of the liquid surface. Subsequently, the third height of the liquid surface is calculated.
[0026] The specific steps for calculating the third height of the liquid level are as follows: like Figure 4 As shown, the height hr of the second point is calculated. The processing unit supplies power to the brushless motor 13, the micro motor driving the second ranging sensor 16, and the second ranging sensor 16. The output shaft of the brushless motor 13 rotates, causing the second ranging sensor 16 to rotate horizontally. At the same time, the output shaft of the micro motor rotates, driving the second ranging sensor 16 to rotate vertically 90 degrees back and forth. The second ranging sensor 16 sends laser light downwards and receives the light signal reflected back from the first target point. Since the second ranging sensor 16 does not emit laser light vertically downwards, the first target point here includes both the liquid surface and the curved inner wall of the replenishment tank 1. Figure 4 Point B is the liquid surface area, and point C is the inner wall area of the curved surface of the replenishment tank 1. The second ranging sensor 16 records the second time difference between the emitted laser and the received reflected light signal. The second ranging sensor 16 transmits the second time difference to the processing unit. The processing unit calculates the length ht of the first target point based on the second time difference. The first target point is within the range of B. Each time the brushless motor 13 rotates one fixed angle, the second ranging sensor 16 completes one cycle of sending a laser and receiving the reflected light signal. After the brushless motor 13 rotates one revolution, the micro motor drives the second ranging sensor 16 to rotate one second fixed angle of 0.5 degrees until the second ranging sensor 16 emits a laser to the bottom edge of the replenishment tank 1. Figure 4At the junction of B and C, the brushless motor 13 and the second ranging sensor 16 stop. The value of the second fixed angle is determined according to the total height of the replenishment tank 1. The larger the total height of the replenishment tank 1, the more length ht of the first target point needs to be collected, and the smaller the value of the fixed angle. The length ht of the first target point obtained by the rotation of several second ranging sensors 16 through the brushless motor 13 corresponds to the first target point and forms a circle. Then, the micro motor drives the second ranging sensor 16 to rotate to obtain several concentric circles with different radii. The liquid surface is formed by the concentric circles with different radii. The processing unit calculates the height hr of the second point according to the rotation angle of the second ranging sensor 16 and the length ht of the first target point. The rotation angle of the second ranging sensor 16 is provided by the driving micro motor. The micro motor is equipped with a Hall sensor, which can feed back the rotation angle of its own rotation to the processing unit. The height hr of the second point is calculated using trigonometric functions, which is the vertical length from the second ranging sensor 16 to B. The processing unit calculates the average value of all second point heights hr to obtain the third height of the liquid surface, and then calculates the volume of the wall-mounted droplets.
[0027] The specific steps for calculating the volume of the wall-mounted liquid droplets are as follows: like Figure 4 As shown, the brushless motor 13 and the second ranging sensor 16 continue to rotate. Each time the brushless motor 13 rotates by a first fixed angle, the second ranging sensor 16 completes one laser transmission and receives the light signal reflected back from the second target point. After the brushless motor 13 rotates one revolution, the micro-motor drives the second ranging sensor 16 to rotate by a second fixed angle of 0.5 degrees until the second ranging sensor 16 emits a laser to the top edge of the replenishment tank 1. Figure 4 At the very top of point C, the brushless motor 13 and the second ranging sensor 16 stop, and the second ranging sensor 16 completes a full scan of the curved inner wall of the replenishment tank 1. The second ranging sensor 16 records the third time difference between the emitted laser and the received light signal reflected back from the second target point. The second ranging sensor 16 transmits the third time difference to the processing unit. The processing unit calculates the distance hs between the second ranging sensor 16 and the second target point based on the third time difference. The second target point is within the range C. The processing unit compares the length hs of each second target point with the average length hs of its two adjacent second target points. The processing unit presets an error allowable range of ±5%. The error allowable range is used to filter out misidentified droplet points. Second target points whose comparison results exceed the error allowable range are marked as droplet points. The processing unit presets a droplet model, which is the ideal volume of the droplet when it is on the inner wall of the replenishment tank 1. The unit is cubic millimeters. The volume of the droplet model is determined based on the roughness of the inner wall of the replenishment tank 1 and the surface tension of the replenishing liquid. An ideal droplet model can be calculated in the experiment and saved in the processing unit for the processing unit to call. The processing unit counts the number of all droplets and multiplies it by the droplet model to obtain the volume of the wall-mounted droplet.
[0028] When calculating the second and third liquid levels, the processing unit controls the brushless motor 13, the first ranging sensor 15, and the second ranging sensor 16 to operate intermittently based on vibration information. The specific details are as follows: The processing unit establishes an amplitude curve table, normalizes the vibration information, and inputs it into the amplitude curve table to obtain the vibration curve. The processing unit presets a first vibration threshold of 0.5 and a second vibration threshold of 0.8. The first vibration threshold ranges from 0.2 to 0.5, and the second vibration threshold ranges from 0.5 to 0.9. When taking the values, the first vibration threshold must be less than the second vibration threshold. When the vertical coordinate value of the vibration curve is greater than the first vibration threshold, it indicates that the vibration amplitude is moderate and has little impact on the vertical distance measurement of the first ranging sensor 15, but has an impact on the tilt distance measurement of the second ranging sensor 16. The processing unit controls the second ranging sensor 16 and the micro motor driving the second ranging sensor 16 to stop. When the vertical coordinate value of the vibration curve is lower than the first vibration threshold, the second ranging sensor 16 is restarted. When the vertical coordinate value of the vibration curve is greater than the second vibration threshold, it indicates that the vibration amplitude is large and will affect both the first ranging sensor 15 and the second ranging sensor 16. The processing unit controls the brushless motor 13, the first ranging sensor 15 and the second ranging sensor 16 to stop respectively. When the vertical coordinate value of the vibration curve is less than the second vibration threshold, the brushless motor 13 and the first ranging sensor 15 are restarted. The vertical coordinate value of the vibration curve continues to decrease until it is less than the first vibration threshold, at which point the second ranging sensor 16 is restarted. This avoids errors in the calculation results of the second and third liquid surface heights caused by mechanical resonance or random vibrations caused by human intervention.
[0029] The replenishment device releases replenishment liquid according to the replenishment volume, specifically including the following: When the operator or other automated equipment sends a liquid replenishment command to the processing unit, the processing unit multiplies the first liquid level height by the area of the bottom surface of the replenishment tank 1 to obtain the first volume Va. The area of the bottom surface is obtained from the radius of the replenishment tank 1 preset inside the processing unit. The processing unit divides the liquid weight by the density of the replenishment liquid to obtain the second volume Vb. The density of the replenishment liquid is preset by the operator and stored in the processing unit. The processing unit multiplies the second liquid level height by the area of the bottom surface of the replenishment tank 1 to obtain the third volume Vc. The processing unit multiplies the third liquid level height by the area of the bottom surface of the replenishment tank 1 to obtain the fourth volume. The fourth volume is added to the volume of the wall-mounted liquid droplets to obtain the fifth volume Vd. The processing unit according to the formula The final volume VA of the replenished liquid inside the replenishment tank 1 is calculated. w1, w2, w3 and w4 are all weighting coefficients and satisfy conditions one and two. Condition one is w1+w2+w3+w4=1, and condition two is w4>w3>w2>w1. The initial values of w1, w2, w3 and w4 are 0.1, 0.2, 0.3 and 0.4 respectively.
[0030] Among them, the first pneumatic diaphragm valve 9 and the third pneumatic diaphragm valve 12 are both 1 / 2" pneumatic diaphragm valves, and the second pneumatic diaphragm valve 11 is a 3 / 8" pneumatic diaphragm valve. The first pneumatic diaphragm valve 9 is used for the inlet of the replenishment tank 1. The vent valve 6 reduces the air pressure inside the replenishment tank 1. The replenishment liquid enters the connecting pipe 10 through the first pneumatic diaphragm valve 9 and enters the replenishment tank 1 through the outlet valve 8. The third pneumatic diaphragm valve 12 is used for the coarse replenishment of the replenishment liquid. The processing unit controls the third pneumatic diaphragm valve 12 to output the first part (95%) of the replenishment volume. The second pneumatic diaphragm valve 11 is used for the fine replenishment of the replenishment liquid. The processing unit controls the second pneumatic diaphragm valve 11 to output the fine replenishment of the replenishment liquid. After valve 11 outputs 5% of the second portion of the replenishment volume, and the third pneumatic diaphragm valve 12 completes the liquid discharge, the processing unit recalculates the final volume VA of the replenished liquid inside the replenishment tank 1. If the decrease in the final volume VA is equal to the first portion of the replenishment volume, the second pneumatic diaphragm valve 11 performs subsequent fine replenishment. If the decrease in the final volume VA is not equal to the first portion of the replenishment volume, the processing unit calculates the error between the decrease in the final volume VA and the first portion of the replenishment volume. The error can be positive or negative. The processing unit adds the error to the second portion of the replenishment volume and marks it as a correction amount. The processing unit controls the second pneumatic diaphragm valve 11 to discharge liquid according to the correction amount.
[0031] When the weighing sensor acquires the liquid weight, if the weighing sensor is installed on the top surface of the first fixed plate 3, the fixing clip 5 is not used to fix the replenishment tank 1. The first fixed plate 3 or the matching suspension structure is responsible for suspending the entire replenishment system equipment. The weighing sensor needs to subtract the weight of the replenishment tank 1, fixing clip 5, vent valve 6, second fixed plate 7, water outlet valve 8, first pneumatic diaphragm valve 9, connecting pipe 10, second pneumatic diaphragm valve 11, and third pneumatic diaphragm valve 12 in sequence to obtain the liquid weight. If the weighing sensor is installed on the bottom surface of the second fixed plate 7, the fixing clip 5 is used to fix the replenishment tank 1. The weighing sensor needs to subtract the weight of the replenishment tank 1, liquid level sensor 2, first fixed plate 3, float ball 4, fixing clip 5, vent valve 6, brushless motor 13, base plate 14, first distance sensor 15, second distance sensor 16, micro motor, and vibration sensor 17 in sequence to obtain the liquid weight, thus avoiding weighing errors.
[0032] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.
Claims
1. A weighing and replenishing system, comprising a replenishing tank (1) and a processing unit, wherein a first fixing plate (3) is fixedly connected to the top of the replenishing tank (1), a liquid level sensor (2) is fixedly connected to the center of the top of the first fixing plate (3), one end of the liquid level sensor (2) penetrates through the first fixing plate (3) and extends into the replenishing tank (1), and a second fixing plate (7) is fixedly connected to the bottom of the replenishing tank (1), wherein the second fixing plate (7) is provided with a replenishing device; characterized in that: A brushless motor (13) is fixedly connected to the bottom surface of the first fixing plate (3). A base plate (14) is fixedly connected to the bottom side of the output shaft of the brushless motor (13). A plurality of first distance sensors (15) are fixed to the bottom surface of the base plate (14). A second distance sensor (16) is provided on the bottom surface of the base plate (14). A vibration sensor (17) is provided on the side of the second distance sensor (16). A weighing sensor is fixedly connected to the top surface of the first fixing plate (3) or the bottom surface of the second fixing plate (7). The output terminals of the weighing sensor, liquid level sensor (2), first distance sensor (15), second distance sensor (16) and vibration sensor (17) are all electrically connected to the input terminal of the processing unit, and the output terminal of the processing unit is electrically connected to the input terminal of the brushless motor (13). The liquid level sensor (2) is used to calculate the first height of the liquid level inside the replenishment tank (1), the weighing sensor is used to obtain the liquid weight, the first distance sensor (15) is used to calculate the second height of the liquid level, the second distance sensor (16) is used to calculate the third height of the liquid level and the volume of the wall-mounted droplets, the vibration sensor (17) is used to obtain vibration information, the processing unit calculates the final volume VA and the replenishment amount, and the replenishment device releases replenishment liquid according to the replenishment amount.
2. The weighing and replenishing system according to claim 1, characterized in that, The liquid level sensor (2) is located inside the liquid replenishment tank (1) and a float (4) is slidably connected to one end of the circumferential side. The float (4) floats on the surface of the replenishing liquid. Fixing clips (5) are fixedly connected to both sides of the bottom of the liquid replenishment tank (1). The fixing clips (5) are used to fix the liquid replenishment tank (1). A vent valve (6) is connected to the side of the liquid replenishment tank (1). The replenishing liquid is controlled by adjusting the vent valve (6) to control the speed of liquid inlet and outlet of the liquid replenishment tank (1). The replenishment device includes a water outlet valve (8), the top of which passes through the second fixing plate (7) and is connected to the replenishment tank (1). One end of the bottom of the water outlet valve (8) is connected to a connecting pipe (10), which has an "H" shaped structure. The other end of the top of the connecting pipe (10) is connected to a first pneumatic diaphragm valve (9), one end of the bottom of the connecting pipe (10) is connected to a second pneumatic diaphragm valve (11), and the other end of the bottom of the connecting pipe (10) is connected to a third pneumatic diaphragm valve (12). The output end of the processing unit is electrically connected to the input ends of the first pneumatic diaphragm valve (9), the second pneumatic diaphragm valve (11), and the third pneumatic diaphragm valve (12), respectively. The first pneumatic diaphragm valve (9), the second pneumatic diaphragm valve (11), and the third pneumatic diaphragm valve (12) release replenishment liquid according to the replenishment volume. The second ranging sensor (16) is installed inside the rotating platform, the vibration sensor (17) is fixed to the side of the rotating platform, the rotating platform drives the second ranging sensor (16) to rotate 90 degrees vertically, the micro motor is fixed inside the rotating platform and the output shaft of the micro motor directly acts on the second ranging sensor (16), and the rotating platform is fixed to the bottom surface of the substrate (14).
3. The weighing and replenishing system according to claim 1, characterized in that, After the replenishment tank (1) has finished replenishing the liquid, the calculation of the first liquid level height begins. The specific calculation of the first liquid level height is as follows: The replenishing liquid inside the replenishing tank (1) drives the float (4) to float. The float (4) is equipped with a magnetic ring that matches the liquid level sensor (2). When the float (4) slides on the bottom circumferential side of the liquid level sensor (2), the magnetic ring inside the float (4) and several magnetic sensing chips inside the liquid level sensor (2) generate magnetic induction. The liquid level sensor (2) is located inside the replenishing tank (1) and is equipped with a magnetic sensing chip at fixed distances db. The magnetic sensing chip sends an analog signal to the processing unit. The processing unit determines the sensing height he based on the analog signal emitted by two adjacent magnetic sensing chips of the float (4). The processing unit internally presets the buoyancy height hf of the float (4) above the surface of the replenishing liquid and the structural height ha of the float (4). The magnetic ring inside the float (4) is located at the middle height of the float (4). The processing unit corrects the floating error based on the buoyancy height hf, the sensing height he, and the structural height ha, and calculates the actual height H of the replenishing liquid surface, using the formula: The processing unit marks the actual height H as the first height of the replenished liquid level, and then calculates the second height of the liquid level.
4. The weighing and replenishing system according to claim 1, characterized in that, The specific steps for calculating the second height of the liquid level are as follows: The processing unit supplies power to the brushless motor (13) and the first ranging sensor (15) respectively. The output shaft of the brushless motor (13) rotates, driving the first ranging sensor (15) to rotate. The first ranging sensor (15) sends laser downward along the axis of the replenishment tank (1) and receives the light signal reflected back from the liquid surface. The first ranging sensor (15) records the first time difference between the emitted laser and the received reflected light signal. The first ranging sensor (15) transmits the first time difference to the processing unit. The processing unit calculates the height hi of the replenishment liquid surface from the first ranging sensor (15) based on the first time difference. The processing unit presets the distance ho of the first ranging sensor (15) from the bottom surface of the replenishment tank (1). The processing unit subtracts the height hi from the distance ho to obtain the height hp of the first point. Each time the brushless motor (13) rotates by a first fixed angle, the first ranging sensor (15) completes one laser transmission and receives the reflected light signal. The processing unit calculates the height hp of the first point at each first fixed angle and averages it to obtain the second height of the liquid surface. Subsequently, the third height of the liquid surface is calculated.
5. A weighing and replenishing system according to claim 1, characterized in that, The specific steps for calculating the third height of the liquid level are as follows: The processing unit supplies power to the brushless motor (13) and the second ranging sensor (16) respectively. The output shaft of the brushless motor (13) rotates, driving the second ranging sensor (16) to rotate horizontally. At the same time, the second ranging sensor (16) rotates vertically back and forth. The second ranging sensor (16) sends laser downwards and receives the light signal reflected back from the first target point. The second ranging sensor (16) records the second time difference between sending laser and receiving the reflected light signal. The second ranging sensor (16) transmits the second time difference to the processing unit. The processing unit calculates the length ht of the first target point based on the second time difference. Each time the brushless motor (13) rotates by a first fixed angle, the second ranging sensor (16) completes one laser transmission and receives the reflected light signal. After the brushless motor (13) rotates one revolution, the second ranging sensor (16) rotates by a second fixed angle until the second ranging sensor (16) emits a laser to the bottom edge of the replenishment tank (1). The brushless motor (13) and the second ranging sensor (16) stop. The processing unit calculates the height hr of the second point based on the rotation angle and length ht of the second ranging sensor (16) and calculates the height hr of the second point using trigonometric functions. The processing unit calculates the average value of all second point heights hr to obtain the third height of the liquid surface, and then calculates the volume of the wall-mounted droplets.
6. A weighing and replenishing system according to claim 1, characterized in that, The specific steps for calculating the volume of liquid droplets hanging on the wall are as follows: The brushless motor (13) and the second ranging sensor (16) continue to rotate. Each time the brushless motor (13) rotates by a first fixed angle, the second ranging sensor (16) completes one laser transmission and receives the light signal reflected back from the second target point. After the brushless motor (13) rotates one revolution, the second ranging sensor (16) rotates by a second fixed angle until the second ranging sensor (16) emits a laser to the top edge of the replenishment tank (1), at which point the brushless motor (13) and the second ranging sensor (16) stop. The second ranging sensor (16) records the third time difference between emitting laser and receiving the light signal reflected back from the second target point. The second ranging sensor (16) transmits the third time difference to the processing unit. The processing unit calculates the distance hs between the second ranging sensor (16) and the second target point based on the third time difference. The processing unit compares the length hs of each second target point with the average length hs of its two adjacent second target points in turn. The processing unit presets an error allowable range and marks the second target point whose comparison result exceeds the error allowable range as a droplet point. The processing unit presets a droplet model, which is the ideal volume of the droplet when it is on the inner wall of the replenishment tank (1), in cubic millimeters. The processing unit counts the number of all droplets and multiplies it by the droplet model to obtain the volume of the wall-mounted droplet.
7. A weighing and replenishing system according to claim 1, characterized in that, When calculating the second and third liquid levels, the processing unit controls the brushless motor (13), the first ranging sensor (15), and the second ranging sensor (16) to work intermittently based on the vibration information, as detailed below: The processing unit establishes an amplitude curve table, normalizes the vibration information and inputs it into the amplitude curve table to obtain the vibration curve. The processing unit presets a first vibration threshold and a second vibration threshold. The first vibration threshold ranges from 0.2 to 0.5, and the second vibration threshold ranges from 0.5 to 0.
9. When taking the values, the first vibration threshold must be less than the second vibration threshold. When the vibration curve is greater than the first vibration threshold, the processing unit controls the second ranging sensor (16) to stop. When the vibration curve is lower than the first vibration threshold, the second ranging sensor (16) is restarted. When the vibration curve is greater than the second vibration threshold, the processing unit controls the brushless motor (13), the first ranging sensor (15) and the second ranging sensor (16) to stop respectively. When the vibration curve is less than the second vibration threshold, the brushless motor (13) and the first ranging sensor (15) are restarted. When the vibration curve continues to decrease until it is less than the first vibration threshold, the second ranging sensor (16) is restarted.
8. A weighing and replenishing system according to claim 1, characterized in that, The replenishment device releases replenishing liquid according to the replenishment volume, specifically including the following: When the operator or other automated equipment sends the liquid replenishment command to the processing unit, the processing unit multiplies the first height of the liquid surface by the area of the bottom surface of the replenishment tank (1) to obtain the first volume Va, the processing unit divides the liquid weight by the density of the replenishing liquid to obtain the second volume Vb, the processing unit multiplies the second height of the liquid surface by the area of the bottom surface of the replenishment tank (1) to obtain the third volume Vc, the processing unit multiplies the third height of the liquid surface by the area of the bottom surface of the replenishment tank (1) to obtain the fourth volume, and adds the wall-mounted liquid droplet volume to obtain the fifth volume Vd. The processing unit according to the formula The final volume VA of the replenished liquid inside the replenishment tank (1) is calculated. w1, w2, w3 and w4 are all weighting coefficients and satisfy conditions one and two. Condition one is w1+w2+w3+w4=1, and condition two is w4>w3>w2>w1.
9. A weighing and replenishing system according to claim 1, characterized in that, The first pneumatic diaphragm valve (9) and the third pneumatic diaphragm valve (12) are both 1 / 2 pneumatic diaphragm valves, and the second pneumatic diaphragm valve (11) is a 3 / 8 pneumatic diaphragm valve. The first pneumatic diaphragm valve (9) is used for the liquid inlet of the replenishment tank (1). The vent valve (6) reduces the air pressure inside the replenishment tank (1). The replenished liquid enters the connecting pipe (10) through the first pneumatic diaphragm valve (9) and enters the replenishment tank (1) through the outlet valve (8). The third pneumatic diaphragm valve (12) is used for the coarse replenishment of the replenished liquid outlet. The processing unit controls the third pneumatic diaphragm valve (12) to output the first part of the replenishment volume. The second pneumatic diaphragm valve (11) is used for the fine replenishment of the replenished liquid outlet. The processing unit controls the second pneumatic diaphragm valve (11) to output the second part of the replenishment volume. After the third pneumatic diaphragm valve (12) completes the liquid discharge, the processing unit recalculates the final volume VA of the replenishment liquid inside the replenishment tank (1). If the final volume VA decreases by an amount equal to the first part of the replenishment volume, the second pneumatic diaphragm valve (11) performs subsequent fine replenishment. If the final volume VA decreases by an amount not equal to the first part of the replenishment volume, the processing unit calculates the error between the final volume VA decrease and the first part of the replenishment volume. The error can be positive or negative. The processing unit adds the error to the second part of the replenishment volume and marks it as a correction amount. The processing unit controls the second pneumatic diaphragm valve (11) to discharge the liquid according to the correction amount.
10. A weighing and replenishing system according to claim 1, characterized in that, When the weighing sensor obtains the liquid weight, if the weighing sensor is installed on the top surface of the first fixed plate (3), the weighing sensor needs to subtract the weight of the replenishment tank (1), the fixing clamp (5), the vent valve (6), the second fixed plate (7), the water outlet valve (8), the first pneumatic diaphragm valve (9), the connecting pipe (10), the second pneumatic diaphragm valve (11), and the third pneumatic diaphragm valve (12) in sequence to obtain the liquid weight. If the weighing sensor is installed on the bottom surface of the second fixed plate (7), the weighing sensor needs to subtract the weight of the replenishment tank (1), the liquid level sensor (2), the first fixed plate (3), the float (4), the fixing clamp (5), the vent valve (6), the brushless motor (13), the base plate (14), the first distance sensor (15), the second distance sensor (16), and the vibration sensor (17) in sequence to obtain the liquid weight.