Crystal plasma mechanical arm

Abstract

The invention relates to the technical field of mechanical arms, in particular to a wafer mechanical arm which comprises a base, a first motor is installed in the base, the output end of the first motor passes through a driving mechanism, a hollow shell is connected to the driving mechanism, connecting pipes are fixedly connected to the periphery of the hollow shell at equal intervals, and first suction cups are fixedly connected to the ends of the connecting pipes. And an adsorption reinforcing mechanism is mounted at the upper end of the hollow shell. The four connecting pipes provided with the first suction cups are arranged on the hollow shell, the adsorption reinforcing mechanism is additionally arranged, the stability when a wafer is clamped is remarkably enhanced through the reasonable configuration of the four first suction cups, in the wafer clamping process, the four first suction cups and four rubber blocks and a supporting plate of the adsorption reinforcing mechanism work cooperatively, and the clamping efficiency of the wafer is improved. Even if the first suction cups or the second suction cups are likely to loosen, the rubber blocks can still tightly abut the wafers against the corresponding first suction cups by means of the frictional property and the fitting property of the rubber blocks.

Description

Technical Field

[0001] This invention relates to the field of robotic arm technology, specifically a crystal-based robotic arm. Background Technology

[0002] A crystal prototype robotic arm may refer to a robotic arm used to manipulate, transport, or handle crystal prototypes, such as wafers, crystals, or other similar objects. These robotic arms typically feature high precision, high stability, and high flexibility to meet the stringent requirements of fields such as semiconductor manufacturing and materials science.

[0003] For example, patent number 202122001694.9 describes a robotic arm for wafer transfer, including a base. A rotating disk is rotatably mounted on the top of the base. A first motor is fixedly installed inside the base, and the output shaft of the first motor extends through the base and is fixedly connected to the rotating disk. A column is fixedly mounted on the top of the rotating disk. A cavity is formed inside the column, and a vertically arranged screw is rotatably mounted inside the cavity. A second motor is fixedly mounted on the top of the column, and the output shaft of the second motor is vertically downward, extending through the cavity and fixedly connected to the screw. A groove penetrating the cavity is formed on one side of the column along its vertical direction. A slider is threaded onto the screw. The side of the slider near the groove extends to the outside of the column and is fixedly connected to a first telescopic rod. The first telescopic rod is fixedly connected to a second telescopic rod at the end furthest from the column, and the second telescopic rod is fixedly connected to a suction cup at the end furthest from the first telescopic rod. A protective mechanism is provided at the end of the second telescopic rod near the suction cup. Through the setting of the protective mechanism, the protective tray can support and protect the wafer during the wafer transfer process, effectively preventing the wafer from falling directly to the ground and being damaged if it accidentally falls off. However, there are still the following shortcomings: Although the protective tray in the protective mechanism is designed to support the wafer and effectively prevent it from falling, in certain situations, such as when the suction cup becomes loose and the wafer surface lacks sufficient friction due to its smooth characteristics, the single support of the protective tray is insufficient. If no additional fixing or restraining force is applied to the wafer at this time, the wafer is prone to sliding on the protective tray, which may lead to the risk of it slipping off the tray. Summary of the Invention

[0004] To address the problems in the prior art, the present invention provides a crystal prototype robotic arm.

[0005] The technical solution adopted by the present invention to solve its technical problem is: a crystal origin robotic arm, including a base, a first motor installed inside the base, the output end of the first motor is driven by a driving mechanism, a hollow shell is connected to the driving mechanism, and a second suction cup is fixedly connected to the lower end of the hollow shell; The hollow shell is fixedly connected to connecting pipes at equal intervals around its periphery. A first suction cup is fixedly connected to the end of each connecting pipe. An adsorption and reinforcement mechanism is installed on the upper end of the hollow shell. The adsorption and reinforcement mechanism includes a carrier ring, which is fixedly connected to the upper end of the hollow shell. Four mounting plates are fixedly connected to the periphery of the carrier ring at equal intervals. A fixing shell is fixedly connected to the lower end of one side of each mounting plate. A motor is fixedly connected to the upper end of one side of each mounting plate. A support plate is fixedly connected to the output of the motor via a rotating rod. One side of the support plate is located below the corresponding first suction cup. A rubber block is fixedly connected to the upper end of one side of the support plate.

[0006] Specifically, the rotating rod is rotatably connected between the corresponding mounting plate and the fixed shell, and a fixedly connected rotating ring is sleeved on the outer side of the upper end of the rotating rod, and the rotating ring is rotatably connected inside the corresponding fixed shell.

[0007] Specifically, the drive mechanism includes a chassis, with a column vertically and fixedly connected to the upper center of the chassis. A lifting groove is formed in the middle of the inner side of the column, and a through groove is formed on one side wall of the lifting groove. A second motor is fixedly connected to the upper end of the column, and a screw is fixedly connected to the output end of the second motor. A threaded lifting block is sleeved on the upper end of the screw. A first electric telescopic rod is fixedly connected to one side of the lifting block through the through groove. The first electric telescopic rod is horizontally arranged and a second electric telescopic rod is fixedly connected to its end. The second electric telescopic rod is parallel to the column, and its end is fixedly connected to the upper end of the hollow shell.

[0008] Specifically, the lifting block is slidably connected inside the lifting groove, and the longitudinal section of the lifting block has a convex structure with the protruding part facing the through groove.

[0009] Specifically, the chassis is fixedly connected to the output end of the first motor and is located on the same center line as the output end of the first motor, and the lower end of the chassis abuts against the upper end of the base.

[0010] Specifically, the screw and the chassis are located on the same center line, and the lower end of the screw is rotatably connected to the lower inner wall of the lifting groove.

[0011] Specifically, two ventilation slots are symmetrically formed on the side wall of the base with respect to the first motor.

[0012] The beneficial effects of the present invention are as follows: The present invention arranges four connecting tubes equipped with first suction cups on a hollow shell and adds an adsorption and reinforcement mechanism. The reasonable configuration of the four first suction cups significantly enhances the stability of the wafer when it is clamped. During the wafer clamping process, the four first suction cups work together with the four rubber blocks and the tray of the adsorption and reinforcement mechanism. Even when the first or second suction cup may become loose, the rubber blocks can still hold the wafer tightly against the corresponding first suction cup due to their friction and adhesion, thereby greatly reducing the possibility of the wafer sliding on the tray. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0014] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a cross-sectional view of the present invention; Figure 3 This is a cross-sectional view of the column of the present invention; Figure 4 This is a cross-sectional view of the adsorption reinforcement mechanism of the present invention.

[0015] In the diagram: 1. Base; 2. First motor; 3. Drive mechanism; 31. Chassis; 32. Column; 33. Lifting groove; 34. Through groove; 35. Second motor; 36. Screw; 37. Lifting block; 38. First electric telescopic rod; 39. Second electric telescopic rod; 4. Connecting pipe; 5. First suction cup; 6. Hollow shell; 7. Adsorption reinforcement mechanism; 71. Carrying ring; 72. Mounting plate; 73. Fixed shell; 74. Motor; 75. Rotating rod; 76. Support plate; 77. Rubber block; 78. Rotating ring; 8. Second suction cup. Detailed Implementation

[0016] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0017] like Figures 1-4 As shown, the present invention provides the following technical solution: Example 1: A crystal origin robotic arm includes a base 1, a first motor 2 installed inside the base 1, the output end of the first motor 2 is connected to a drive mechanism 3, a hollow shell 6 is connected to the drive mechanism 3, a second suction cup 8 is fixedly connected to the lower end of the hollow shell 6, and two ventilation slots are symmetrically opened on the side wall of the base 1 about the first motor 2. The drive mechanism 3 includes a chassis 31, which is fixedly connected to the output end of the first motor 2 and is located on the same center line as the output end of the first motor 2. The lower end of the chassis 31 abuts against the upper end of the base 1. A column 32 is vertically and fixedly connected to the middle of the upper end of the chassis 31. A lifting groove 33 is opened in the middle of the inner side of the column 32. A through groove 34 is opened on one side wall of the lifting groove 33. A second motor 35 is fixedly connected to the upper end of the column 32. A screw 36 is fixedly connected to the output end of the second motor 35. The screw 36 and the chassis 31 are located on the same center line. The lower end of the screw 36 is rotatably connected to the lower inner wall of the lifting groove 33. The upper end of the screw 36 is fitted with a threaded lifting block 37. The lifting block 37 is slidably connected inside the lifting groove 33. The longitudinal section of the lifting block 37 is convex and the protruding part faces the through groove 34. The lifting block 37 passes through the through groove 34 on one side and is fixedly connected to a first electric telescopic rod 38. The first electric telescopic rod 38 is horizontally set and the end is fixedly connected to a second electric telescopic rod 39. The second electric telescopic rod 39 is parallel to the column 32. The end of the second electric telescopic rod 39 is fixedly connected to the upper end of the hollow shell 6.

[0018] When in use, the power is turned on, the first motor 2 drives the chassis 31 to rotate the column 32 at the upper end of the base 1, the second motor 35 drives the screw 36 to rotate, and the screw 36 drives the lifting block 37 to move vertically in the lifting groove 33 to adjust the height of the hollow shell 6. At the same time, the first electric telescopic rod 38 drives the hollow shell 6 to move, moving the hollow shell 6 above the wafer. The second electric telescopic rod 39 moves the hollow shell 6 downward, pressing the second suction cup 8 against the upper end of the wafer, initially sucking the wafer. During this process, the external air will flow between the two ventilation grooves, driving the air flow in the base 1, carrying away the heat generated by the first motor 2 when it is working, and achieving the purpose of cooling.

[0019] Example 2: The technical solution of this example, which differs from that of Example 1, includes: connecting pipes 4 are fixedly connected at equal intervals around the periphery of the hollow shell 6, and a first suction cup 5 is fixedly connected to the end of the connecting pipe 4. An adsorption and reinforcement mechanism 7 is installed on the upper end of the hollow shell 6. The adsorption and reinforcement mechanism 7 includes a carrier ring 71, which is fixedly connected to the upper end of the hollow shell 6. Four mounting plates 72 are fixedly connected at equal intervals around the periphery of the carrier ring 71. A fixing shell 73 is fixedly connected to the lower end of one side of the mounting plate 72. A motor 74 is fixedly connected to the upper end of one side of the mounting plate 72. A support plate 76 is fixedly connected to the output of the motor 74 through a rotating rod 75. One side of the support plate 76 is located below the corresponding first suction cup 5. A rubber block 77 is fixedly connected to the upper end of one side of the support plate 76.

[0020] Specifically, the rotating rod 75 is rotatably connected between the corresponding mounting plate 72 and the fixed shell 73, and a fixedly connected rotating ring 78 is sleeved on the outer side of the upper end of the rotating rod 75, and the rotating ring 78 is rotatably connected inside the corresponding fixed shell 73.

[0021] While the second suction cup 8 rests against the top of the wafer, the four first suction cups 5 rest against the edge of the wafer, holding the periphery of the wafer. The motor 74 rotates the rotating rod 75, which in turn rotates the tray 76 to the bottom of the wafer. The upper end of the rubber block 77 rests against the lower end of the wafer and cooperates with the corresponding first suction cup 5 to clamp the wafer, increasing the stability of the wafer when it is clamped. The rotating ring 78 rotates in the corresponding fixed shell 73, supporting the rotating rod 75 and reducing the load on the connection between the rotating rod 75 and the motor 74. Then, the first motor 2 continues to rotate the column 32, and the first electric telescopic rod 38 extends and retracts to pick up and transfer the wafer. During this process, if the first suction cup 5 or the second suction cup 8 becomes loose, the rubber block 77, with its own friction and adhesion, can still hold the wafer tightly against the corresponding first suction cup 5, making it difficult for the wafer to slide on the tray 76.

[0022] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of protection claimed by the present invention. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A crystal-based robotic arm, comprising a base (1), wherein a first motor (2) is installed inside the base (1), the output end of the first motor (2) is connected to a drive mechanism (3), a hollow shell (6) is connected to the drive mechanism (3), and a second suction cup (8) is fixedly connected to the lower end of the hollow shell (6). Its features are: The hollow shell (6) is fixedly connected with connecting pipes (4) at equal intervals around its periphery. The end of the connecting pipe (4) is fixedly connected with a first suction cup (5). An adsorption reinforcement mechanism (7) is installed on the upper end of the hollow shell (6). The adsorption reinforcement mechanism (7) includes a carrier ring (71). The carrier ring (71) is fixedly connected to the upper end of the hollow shell (6). Four mounting plates (72) are fixedly connected at equal intervals around the periphery of the carrier ring (71). A fixing shell (73) is fixedly connected to the lower end of one side of the mounting plate (72). A motor (74) is fixedly connected to the upper end of one side of the mounting plate (72). A support plate (76) is fixedly connected to the output of the motor (74) through a rotating rod (75). One side of the support plate (76) is located below the corresponding first suction cup (5). A rubber block (77) is fixedly connected to the upper end of one side of the support plate (76).

2. The crystal precursor robotic arm according to claim 1, characterized in that: The rotating rod (75) is rotatably connected between the corresponding mounting plate (72) and the fixed shell (73). The upper outer side of the rotating rod (75) is fitted with a fixedly connected rotating ring (78), which is rotatably connected inside the corresponding fixed shell (73).

3. The crystal precursor robotic arm according to claim 1, characterized in that: The drive mechanism (3) includes a chassis (31), a column (32) is vertically and fixedly connected to the middle of the upper end of the chassis (31), a lifting groove (33) is provided in the middle of the inner side of the column (32), a through groove (34) is provided on one side wall of the lifting groove (33), a second motor (35) is fixedly connected to the upper end of the column (32), a screw (36) is fixedly connected to the output end of the second motor (35), a threaded lifting block (37) is sleeved on the upper end of the screw (36), a first electric telescopic rod (38) is fixedly connected to one side of the lifting block (37) through the through groove (34), the first electric telescopic rod (38) is horizontally set and a second electric telescopic rod (39) is fixedly connected to the end, the second electric telescopic rod (39) is parallel to the column (32), and the end of the second electric telescopic rod (39) is fixedly connected to the upper end of the hollow shell (6).

4. The crystal precursor robotic arm according to claim 3, characterized in that: The lifting block (37) is slidably connected inside the lifting groove (33), and the longitudinal section of the lifting block (37) has a convex structure with the protruding part facing the through groove (34).

5. A crystal precursor robotic arm according to claim 3, characterized in that: The chassis (31) is fixedly connected to the output end of the first motor (2) and is located on the same center line as the output end of the first motor (2). The lower end of the chassis (31) abuts against the upper end of the base (1).

6. The crystal precursor robotic arm according to claim 3, characterized in that: The screw (36) and the chassis (31) are located on the same center line, and the lower end of the screw (36) is rotatably connected to the lower inner wall of the lifting groove (33).

7. The crystal precursor robotic arm according to claim 1, characterized in that: Two ventilation slots are symmetrically provided on the side wall of the base (1) about the first motor (2).

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