Gas conveying system

Abstract

The invention belongs to the technical field of gas conveying, and particularly relates to a gas conveying system which comprises a conveying pipeline, an eddy current heating coil is installed in the side wall of the conveying pipeline, a liquid storage cylinder is arranged outside the conveying pipeline, a throwing cylinder is rotationally connected into the conveying pipeline, and a plurality of heat conduction copper pipes are arranged on the throwing cylinder in a penetrating mode. A liquid conveying groove is formed in the side wall of the conveying pipeline, a liquid inlet is communicated between the liquid conveying groove and the liquid storage cylinder, a liquid outlet pipe is communicated between the liquid conveying groove and the throwing cylinder, and a liquid conveying device for conveying liquid in the liquid storage cylinder into the throwing cylinder is installed in the liquid conveying groove. The liquid conveying device is used for continuously conveying heated water in a circulating mode, gas can continuously penetrate through the heat conduction copper pipe when conveyed in the conveying pipeline, heat is absorbed through the heat conduction copper pipe for temperature rise, the interaction time of the heat and the gas is greatly prolonged, heating is more sufficient, and meanwhile energy waste is avoided.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of gas delivery, and particularly relates to a gas delivery system. BACKGROUND

[0002] In semiconductor manufacturing, the purity and cleanliness of gas have a high requirement. Generally, the gas is stored in a liquefied cylinder and delivered through a gas delivery pipeline during use.

[0003] Since the gas is stored in a liquid state in the cylinder, it needs to be depressurized before delivery. During high-flow delivery, the pressure in the pipeline system is unstable and the pipeline system is damaged due to the pressure drop in the pipeline and the heat absorption of the liquefied cylinder. Therefore, the liquefied gas needs to be preheated before being depressurized and delivered. However, due to the complexity of the delivery pipeline system, the heating component is usually only arranged at the front end of the delivery pipeline. When the liquefied electronic gas is released, the pressure is high and the flow rate is fast, so the electronic gas is often delivered out before being fully heated. At the same time, the heat generated by the heating component is difficult to directly transfer to the electronic gas, so a large amount of heat is wasted. SUMMARY

[0004] In view of the deficiencies of the prior art, the present application provides a gas delivery system which greatly prolongs the heat exchange time between heat and gas, makes the heating more sufficient, and avoids energy waste.

[0005] In order to achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0006] A gas delivery system comprises a delivery pipeline (1), a vortex heating coil (5) is arranged in the side wall of the delivery pipeline (1); a liquid storage cylinder (2) is arranged outside the delivery pipeline (1) opposite to the vortex heating coil (5); a spinning cylinder (15) is rotatably connected in the delivery pipeline (1), a plurality of heat-conducting copper pipes (16) are arranged through the spinning cylinder (15), and a plurality of axial flow blades (17) are arranged on the side wall of the spinning cylinder (15);

[0007] A liquid delivery groove (10) is arranged in the side wall of the delivery pipeline (1), a liquid inlet (12) is arranged in communication between the liquid delivery groove (10) and the liquid storage cylinder (2), a liquid outlet pipe (13) is arranged in communication between the liquid delivery groove (10) and the spinning cylinder (15), and a liquid delivery device is arranged in the liquid delivery groove (10) to deliver the liquid in the liquid storage cylinder (2) to the spinning cylinder (15);

[0008] The spinning drum (15) is provided with an annular drum (18) which is fixedly connected to the inner wall of the conveying pipe (1) through a support, a first through hole (19) is formed in the side wall of the spinning drum (15), a second through hole (20) is formed in the inner wall of the annular drum (18) and is opposite to the first through hole (19), and a liquid return pipe (22) is in communication between the annular drum (18) and the liquid storage drum (2).

[0009] Preferably, the infusion device comprises a magnetic plug (11) which is sealingly and slidably connected in the infusion groove (10), a liquid inlet one-way valve is installed in the liquid inlet (12), and a liquid outlet one-way valve is installed in the liquid outlet pipe (13).

[0010] Preferably, an annular groove (6) is formed in the side wall of the conveying pipe (1), a gear (7) is rotatably connected in the annular groove (6), a rotating ring (3) is rotatably arranged outside the conveying pipe (1), a plurality of turbulence vanes (4) are fixedly connected to the side wall of the rotating ring (3), and the rotating ring (3) and the turbulence vanes (4) are located in the liquid storage drum (2).

[0011] An inner gear ring (14) which is engaged with the gear (7) is welded to the inner wall of the rotating ring (3), a rotating drum (8) is fixedly connected to the side wall of the gear (7), a screw rod (9) is threadedly connected in the rotating drum (8), and the screw rod (9) is fixedly connected with the magnetic plug (11).

[0012] Further preferably, the rotating ring (3) and the turbulence vanes (4) are made of aluminum.

[0013] Preferably, a plurality of heat preservation grooves (23) are formed in the side wall of the conveying pipe (1), and an exhaust pipe (21) which is in communication with the inside of the spinning drum (15) is arranged in the middle region of the spinning drum (15), each heat preservation groove (23) is in communication with the exhaust pipe (21) through an independent shunt pipe (24).

[0014] Further preferably, a rubber plug (25) is sealingly and slidably connected in the heat preservation groove (23), an opening (26) which is in communication with the inside of the conveying pipe (1) is formed in the inner wall of the heat preservation groove (23), and a moving mechanism which moves the rubber plug (25) up and down is installed in the heat preservation groove (23).

[0015] More preferably, the moving mechanism comprises an electric vibrating piece (27) which is installed in the heat preservation groove (23), the upper end of the rubber plug (25) is in contact with the electric vibrating piece (27), and the lower end of the rubber plug (25) is connected to the inner wall of the heat preservation groove (23) through a spring.

[0016] An induction coil (28) is also installed in the side wall of the conveying pipe (1), and the induction coil (28) is set close to the eddy current heating coil (5). The induction coil (28) is electrically connected to the electric vibrating plate (27).

[0017] The present invention has the following beneficial effects:

[0018] (1) The gas delivery system provided by the present invention can set water in the storage tank and absorb the heat emitted by the eddy current heating coil. At the same time, the heated water is continuously circulated and delivered by the delivery device. When the gas is delivered in the delivery pipeline, it can continuously pass through the heat-conducting copper pipe and absorb heat through the heat-conducting copper pipe to raise the temperature. This can greatly extend the interaction time between heat and gas, making the heating more complete and avoiding energy waste.

[0019] (2) The gas delivery system provided by the present invention can drive the spinning drum to rotate at high speed by the kinetic energy generated during the high-pressure gas delivery when the liquid delivery device delivers water to the spinning drum. On the one hand, it can make the water in the spinning drum mix evenly and heat the gas passing through evenly. On the other hand, it can separate the generated water vapor from the liquefied water and discharge the water vapor into the heat preservation tank to keep the entire delivery pipeline warm, so as to keep the entire complex delivery pipeline system warm without installing a large number of electric heating components.

[0020] (3) The gas delivery system provided by this invention uses a high-frequency alternating current to heat the gas flowing through the pipe under the eddy current effect. Furthermore, the magnetic poles of the generated magnetic field constantly change, attracting and repelling the magnetic plug, causing it to move back and forth. This serves two purposes: first, it can transport the liquid in the storage tank to the swivel drum; second, it can drive the rotating drum to rotate back and forth, thereby driving the internal gear ring to rotate back and forth through gears. Ultimately, this causes the rotating ring and its outer turbulence-inducing blades to rotate back and forth, causing the water in the storage tank to flow back and forth. Simultaneously, the heat generated by the eddy current heating coil is continuously and rapidly transferred to the water body through the rotating ring and turbulence-inducing blades, causing the water temperature to rise rapidly.

[0021] (4) In the gas conveying system provided by the present invention, the eddy current heating coil 5 will generate an alternating magnetic field when a high-frequency alternating current is applied, and the induction coil under this alternating magnetic field will also generate current due to mutual inductance, and transmit this current to the electric vibrator. After the electric vibrator is energized, it will vibrate continuously, which can vibrate the rubber stopper downward. Then the spring will push the rubber stopper upward to reset. When the rubber stopper moves upward, it can draw water vapor in the swivel into the heat preservation tank, and the water vapor entering the heat preservation tank will release heat when it gradually cools down and forms condensate. When the rubber stopper moves downward, it can draw some gas into the heat preservation tank from the opening, so that the released heat can be transferred to the gas again to prevent it from cooling down, thereby heat preservation treatment of the entire conveying pipeline. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a gas delivery system proposed in this invention;

[0023] Figure 2 for Figure 1 Enlarged schematic diagram of the structure at point A in the diagram;

[0024] Figure 3 for Figure 1 Enlarged schematic diagram of the structure at point B in the diagram;

[0025] Figure 4 This is a schematic diagram of the side fit between the internal gear ring and the gear in this invention;

[0026] Figure 5 This is a side view of the structure of the swirl tube, annular tube, heat-conducting copper tube, liquid outlet tube, and exhaust tube in this invention.

[0027] In the diagram: 1. Delivery pipe, 2. Storage cylinder, 3. Rotating ring, 4. Turbulence vane, 5. Eddy current heating coil, 6. Annular groove, 7. Gear, 8. Rotating drum, 9. Screw, 10. Delivery tank, 11. Magnetic plug, 12. Inlet, 13. Outlet pipe, 14. Internal gear ring, 15. Swinging drum, 16. Heat-conducting copper pipe, 17. Axial flow vane, 18. Annular cylinder, 19. First through hole, 20. Second through hole, 21. Exhaust pipe, 22. Return pipe, 23. Insulation tank, 24. Diverter pipe, 25. Rubber plug, 26. Opening, 27. Electric vibrator, 28. Induction coil. Detailed Implementation

[0028] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0029] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0030] Reference Figures 1-5A gas delivery system includes a delivery pipe 1, an eddy current heating coil 5 installed in the side wall of the delivery pipe 1, a liquid storage cylinder 2 located outside the delivery pipe 1, a delivery tank 10 formed in the side wall of the delivery pipe 1, an inlet 12 connecting the delivery tank 10 and the liquid storage cylinder 2, and a rotatable drum 15 rotatably connected inside the delivery pipe 1. Multiple heat-conducting copper tubes 16 are threaded through the drum 15, with both ends of the heat-conducting copper tubes 16 extending outside the drum 15. It should be noted that by setting the heat-conducting copper tubes 16, the gas in the delivery pipe 1 will pass through each heat-conducting copper tube 16 during flow, and can efficiently transfer heat with the rotating heated water in the drum 15, thereby reducing waste caused by heat leakage.

[0031] Multiple axial flow blades 17 are installed on the side wall of the centrifuge 15, and a liquid outlet pipe 13 is connected between the liquid inlet tank 10 and the centrifuge 15. A liquid inlet device is installed in the liquid inlet tank 10 to transport the liquid in the liquid storage tank 2 to the centrifuge 15. The centrifuge 15 is fitted with an annular cylinder 18, which is fixedly connected to the inner wall of the delivery pipe 1 by a bracket. A first through hole 19 is opened on the side wall of the centrifuge 15, and a second through hole 20 is opened on the inner wall of the annular cylinder 18. It should be noted that the inner ring of the annular cylinder 18 is tightly fitted with the outer ring of the centrifuge 15. Therefore, when the centrifuge 15 rotates, the water in the centrifuge 15 will flow into the annular cylinder 18 through the first through hole 19 and the second through hole 20 only when the first through hole 19 and the second through hole 20 are opposite each other, and will not splash out.

[0032] A return pipe 22 connects the annular cylinder 18 and the storage cylinder 2. Multiple heat-insulating grooves 23 are provided in the side wall of the conveying pipe 1, and an exhaust pipe 21 communicating with the inside of the sling 15 is provided on the sling 15. Each heat-insulating groove 23 is connected to the exhaust pipe 21 through a diversion pipe 24.

[0033] A rubber stopper 25, made of thermally conductive rubber, is slidably connected to the inner wall of the insulation tank 23. An opening 26 communicating with the inside of the conveying pipe 1 is provided on the inner wall of the insulation tank 23, and a moving mechanism for moving the rubber stopper 25 up and down is installed inside the insulation tank 23.

[0034] The moving mechanism includes an electric vibrating plate 27 installed in the heat preservation tank 23, and the upper end of the rubber plug 25 is in contact with the electric vibrating plate 27, while the lower end is connected to the inner wall of the heat preservation tank 23 by a spring. An induction coil 28 is also installed in the side wall of the conveying pipe 1, and the induction coil 28 is set close to the eddy current heating coil 5. The induction coil 28 is electrically connected to the electric vibrating plate 27.

[0035] The infusion device includes a magnetic plug 11 that is slidably connected in the infusion tank 10, an inlet check valve installed in the inlet 12, and an outlet check valve installed in the outlet pipe 13. An annular groove 6 is provided on the side wall of the delivery pipe 1, and a gear 7 is rotatably connected in the annular groove 6. A rotating ring 3 is rotatably provided outside the delivery pipe 1, and multiple baffles 4 are fixedly connected to the side wall of the rotating ring 3. The rotating ring 3 and the baffles 4 are located in the storage tank 2 and are all made of aluminum. The aluminum rotating ring 3 and baffles 4 can quickly transfer the heat generated by the eddy current heating coil 5 to the water in the storage tank 2.

[0036] An internal gear ring 14 that meshes with the gear 7 is welded to the inner wall of the rotating ring 3. A rotating cylinder 8 is fixedly connected to the side wall of the gear 7. The rotating cylinder 8 is internally threaded to the screw 9, and the screw 9 is fixedly connected to the magnetic plug 11. It should be noted that the thread resistance between the screw 9 and the rotating cylinder 8 is small. When the screw 9 moves inside the rotating cylinder 8, it can push the rotating cylinder 8 to rotate.

[0037] During the use of this device, when the depressurized gas is introduced into the conveying pipeline 1, the eddy current heating coil 5 is also immediately energized with high-frequency alternating current, and the gas flowing through it is heated under the eddy current effect.

[0038] When high-frequency alternating current is applied to the eddy current heating coil 5, the magnetic poles of the generated magnetic field change continuously, thus attracting and repelling the magnetic plug 11, causing the magnetic plug 11 to move back and forth. When the magnetic plug 11 moves to the right, it can draw water from the liquid storage cylinder 2 into the infusion tank 10, while when the magnetic plug 11 moves to the left, it can squeeze the water in the infusion tank 10 into the centrifugal drum 15.

[0039] Meanwhile, the gas in the conveying pipe 1 will flow at high speed, which can drive the axial flow blades 17 to rotate and drive the swivel drum 15 to rotate at high speed. Therefore, the water flowing into the swivel drum 15 will be swung to the edge of the swivel drum 15 as the swivel drum 15 rotates at high speed, and will be swung out from the first through hole 19 and the second through hole 20 into the annular cylinder 18, and finally flow back into the storage cylinder 2 through the return pipe 22.

[0040] During the above process, the magnetic plug 11 will drive the screw 9 to repeatedly enter and exit the rotating drum 8 as it moves back and forth. Since the screw 9 is threadedly connected to the rotating drum 8, it can drive the rotating drum 8 to rotate back and forth, thereby driving the internal gear ring 14 to rotate back and forth through the gear 7. Ultimately, the rotating ring 3 and the turbulence-disrupting blades 4 on its outer side will rotate back and forth, causing the water in the liquid storage tank 2 to flow back and forth. At the same time, the heat generated by the eddy current heating coil 5 will be continuously and rapidly transferred to the water body through the rotating ring 3 and the turbulence-disrupting blades 4, and the water temperature will rise rapidly.

[0041] When the gas in the conveying pipe 1 passes through the swivel cylinder 15, it will pass through the heat-conducting copper pipes 16 installed through the swivel cylinder 15. At this time, the gas flow direction is horizontal, and the heating water in the swivel cylinder 15 circulates outside the heat-conducting copper pipes 16. Compared with the traditional method of directly heating the gas using electric heating components, this device can heat the flowing gas for a longer time and more evenly, so that the heat energy generated by the eddy current heating coil 5 can be more effectively absorbed by the gas. This not only enables the gas to be heated to the required temperature quickly and fully, but also greatly reduces the energy waste caused by heat leakage.

[0042] Furthermore, some of the heated water will form a water vapor state. This water vapor, upon entering the centrifugal drum 15, will accumulate in the central area due to its lighter weight, thus separating it from the completely liquid water. Throughout the process, the eddy current heating coil 5 generates an alternating magnetic field when a high-frequency alternating current is applied. The induction coil 28, under this alternating magnetic field, will generate a current due to mutual inductance, which is then transmitted to the vibrating plate 27. The vibrating plate 27 vibrates continuously after being energized, causing the rubber stopper 25 to vibrate downwards. Subsequently, a spring pushes the rubber stopper 25 upwards to return it to its original position. Therefore, the rubber stopper 25 will continuously move up and down during this process.

[0043] When the rubber stopper 25 moves upward, it draws the water vapor in the swirl tube 15 into the insulation tank 23. When the rubber stopper 25 moves downward, it pushes the water vapor back into the swirl tube 15. Furthermore, the water vapor entering the insulation tank 23 releases heat as it gradually cools and forms condensate. When the rubber stopper 25 moves downward, it draws some gas into the insulation tank 23 through the opening 26, allowing the released heat to be transferred back to the gas, preventing it from cooling down. This provides insulation for the entire conveying pipeline 1, further maximizing the use of the heat generated by the eddy current heating coil 5, significantly improving energy efficiency, and reducing energy waste. Simultaneously, because the insulation tank 23 is distributed throughout the entire conveying pipeline 1, it ensures uniform heating and insulation of the gas in the conveying system, maintaining a constant pressure and preventing damage to the system.

[0044] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A gas delivery system, characterized in that, The system includes a conveying pipe (1), in which an eddy current heating coil (5) is installed in the side wall of the conveying pipe (1); a liquid storage cylinder (2) is provided outside the conveying pipe (1) opposite to the eddy current heating coil (5); a rotatable cylinder (15) is rotatably connected inside the conveying pipe (1), and multiple heat-conducting copper pipes (16) are provided through the rotatable cylinder (15), and multiple axial flow blades (17) are installed on the side wall of the rotatable cylinder (15); The side wall of the conveying pipe (1) is provided with a liquid delivery tank (10), and the liquid delivery tank (10) is connected to the liquid storage cylinder (2) by an inlet (12). The liquid delivery tank (10) is connected to the liquid discharge cylinder (15) by an outlet pipe (13). The liquid delivery tank (10) is equipped with a liquid delivery device that delivers the liquid in the liquid storage cylinder (2) to the liquid discharge cylinder (15). The slinger (15) is fitted with an annular cylinder (18), which is fixedly connected to the inner wall of the conveying pipe (1) by a bracket. The slinger (15) has a first through hole (19) on its side wall, and the annular cylinder (18) has a second through hole (20) opposite to the first through hole (19) on its inner wall. The annular cylinder (18) is connected to the liquid storage cylinder (2) by a return pipe (22).

2. The gas delivery system according to claim 1, characterized in that, The infusion device includes a magnetic plug (11) that is sealed and slidably connected in the infusion tank (10), an inlet check valve is installed in the inlet (12), and an outlet check valve is installed in the outlet pipe (13).

3. A gas delivery system according to claim 2, characterized in that, The side wall of the conveying pipe (1) is provided with an annular groove (6), and a gear (7) is rotatably connected in the annular groove (6). A rotating ring (3) is rotatably provided outside the conveying pipe (1), and multiple baffles (4) are fixedly connected on the side wall of the rotating ring (3). The rotating ring (3) and the baffles (4) are located inside the liquid storage cylinder (2). The inner wall of the rotating ring (3) is welded with an internal gear ring (14) that meshes with the gear (7). A rotating cylinder (8) is fixedly connected to the side wall of the gear (7). A screw (9) is threadedly connected to the rotating cylinder (8), and the screw (9) is fixedly connected to the magnetic plug (11).

4. A gas delivery system according to claim 3, characterized in that, Both the rotating ring (3) and the baffle blades (4) are made of aluminum.

5. A gas delivery system according to any one of claims 1-4, characterized in that, The side wall of the conveying pipe (1) is provided with multiple heat insulation grooves (23), and the middle area of ​​the sling (15) is provided with an exhaust pipe (21) that communicates with its interior. Each heat insulation groove (23) is connected to the exhaust pipe (21) through an independent diversion pipe (24).

6. A gas delivery system according to claim 5, characterized in that, A rubber stopper (25) is slidably connected inside the heat insulation tank (23). An opening (26) communicating with the inside of the conveying pipe (1) is provided on the inner wall of the heat insulation tank (23). A moving mechanism for moving the rubber stopper (25) up and down is installed inside the heat insulation tank (23).

7. A gas delivery system according to claim 6, characterized in that, The moving mechanism includes an electric vibrating plate (27) installed in the heat preservation tank (23), the upper end of the rubber plug (25) is in contact with the electric vibrating plate (27), and the lower end is connected to the inner wall of the heat preservation tank (23) by a spring; An induction coil (28) is also installed in the side wall of the conveying pipe (1), and the induction coil (28) is set close to the eddy current heating coil (5). The induction coil (28) is electrically connected to the electric vibrating plate (27).

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