Circulating liquid temperature control system and method

Abstract

The invention provides a circulating liquid temperature control system which is used for regulating and controlling the temperature of circulating liquid flowing through liquid using equipment. The system comprises a cooling device, a heating device and a control device, the cooling device and the heating device are sequentially arranged in the flowing direction of circulating liquid, a liquid outlet pipeline of the liquid using equipment is sequentially connected with the cooling device and the heating device, and a liquid inlet pipeline of the liquid using equipment is connected with the heating device; the control device is used for controlling the cooling device or the heating device to work according to the collected first real-time temperature of the circulating liquid and a set temperature; and the power increasing amplitude of the heating device is determined according to the temperature difference between the collected first real-time temperature and the collected second real-time temperature. The control device compares the collected first real-time temperature of the circulating liquid with the set temperature, the cooling device or the heating device is accurately controlled to work, and the temperature of the circulating liquid can be stabilized near the set value.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of temperature control equipment, in particular to a circulating liquid temperature control system and method. BACKGROUND

[0002] In integrated circuit process, the semiconductor special temperature control equipment needs to provide-120℃~150℃ ultra-wide temperature range constant temperature circulating liquid for liquid equipment, and needs to frequently switch between ultra-low temperature and high temperature to adapt to the strict requirements of key technologies such as photolithography and etching on temperature, and small temperature fluctuation may lead to chip yield reduction and performance damage. The heater or refrigerator is the core temperature control element of the circulating liquid system, but the existing control method can only control the cooling device or heating device to work according to the deviation of the real-time temperature of the circulating liquid and the set temperature, and cannot cope with the complex temperature change when switching between ultra-wide temperature range, when the circulating liquid is rapidly heated from ultra-low temperature or cooled from high temperature, only single device adjustment is easy to appear temperature overshoot or lag, and it is difficult to accurately and stably keep the circulating liquid at the set temperature; secondly, the power of the heating device in the prior art is mostly fixed power position switching or irregular adjustment, without considering the temperature difference characteristics of the circulating liquid at different temperature stages, which leads to insufficient power increase and slow heating when the temperature difference is large, and excessive power increase and temperature fluctuation when the temperature difference is small, further aggravating the problem of insufficient temperature control accuracy, which cannot meet the high requirements of semiconductor process on the constant temperature of circulating liquid. SUMMARY

[0003] The present application provides a circulating liquid temperature control system and method, which can solve the technical problem of insufficient temperature control accuracy.

[0004] The technical scheme of the present application is: In a first aspect, the present application provides a circulating liquid temperature control system for regulating the temperature of circulating liquid flowing through a liquid equipment; the system comprises: a cooling device, a heating device and a control device, the cooling device and the heating device are arranged in sequence along the flow direction of the circulating liquid, the outlet pipeline of the liquid equipment is connected with the cooling device and the heating device in sequence, and the inlet pipeline of the liquid equipment is connected with the heating device. The control device controls the cooling device or the heating device to work according to the first real-time temperature and the set temperature of the circulating liquid collected; and determines the amplitude of the power increase of the heating device according to the temperature difference between the first real-time temperature and the second real-time temperature.

[0005] In a possible implementation, a first temperature sensor is arranged on the liquid inlet pipeline to collect the first real-time temperature of the circulating liquid; the control device determines the magnitude of the first real-time temperature and the set temperature, and if the first real-time temperature is higher than the set temperature, controls the cooling device to work and the heating device to be turned off.

[0006] In a possible implementation, the cooling device comprises a refrigerating device and a first heat exchanger, the refrigerating device is used to provide cold energy, and the first heat exchanger is connected with the refrigerating device and the liquid inlet pipeline respectively.

[0007] In a possible implementation, a second temperature sensor is arranged on the pipeline between the cooling device and the heating device to collect the second real-time temperature of the circulating liquid; the control device determines the magnitude of the first real-time temperature and the set temperature, and if the first real-time temperature is lower than the set temperature, controls the heating device to work and the cooling device to be turned off; the control device further determines the amplitude of the power increase of the heating device according to the difference between the second real-time temperature and the second temperature.

[0008] In a possible implementation, the heating device comprises a heating cylinder and a heater, two ends of the heating cylinder are connected with the liquid inlet pipeline and the liquid outlet pipeline respectively, and the heater is arranged in the heating cylinder; the control device controls the amplitude of the heating by controlling the amplitude of the power increase of the heater.

[0009] In a possible implementation, the system further comprises a liquid adjusting system, the liquid adjusting system comprises a liquid adjusting tank, a first liquid adjusting pipeline and a second liquid adjusting pipeline; the liquid outlet and the liquid inlet of the liquid adjusting tank are connected with the first liquid adjusting pipeline and the second liquid adjusting pipeline respectively; the first liquid adjusting pipeline is connected with the liquid inlet pipeline, and the second liquid adjusting pipeline is connected with the pipeline between the cooling device and the heating device; a flow valve is arranged on the first liquid adjusting pipeline and / or the second liquid adjusting pipeline.

[0010] In a possible implementation, the upper end and the lower end of the heating cylinder are respectively provided with a liquid outlet and a liquid inlet, so that the circulating liquid flows through the heating cylinder from bottom to top; the control device adjusts the opening degree of the flow valve in real time, so that the circulating liquid always fills the heating cylinder.

[0011] In a second aspect, the application further provides a circulating liquid temperature control method, which is used for a control device of a circulating liquid temperature control system, the system further comprises a cooling device, a heating device and a control device, the cooling device and the heating device are sequentially connected in the flowing direction of the circulating liquid, a liquid outlet pipeline of a liquid using device is sequentially connected with the cooling device and the heating device, and a liquid inlet pipeline of the liquid using device is connected with the heating device; the method comprises the following steps: According to the first real-time temperature of the circulating liquid collected and the set temperature, the cooling device or the heating device is controlled to work; According to the temperature difference between the first real-time temperature and the second real-time temperature, the amplitude of the power increase of the heating device is determined.

[0012] In a possible implementation, the control device judges the size of the first real-time temperature and the set temperature, and if the first real-time temperature is higher than the set temperature, the cooling device is controlled to work and the heating device is turned off.

[0013] In a possible implementation, the control device judges the size of the first real-time temperature and the set temperature, and if the first real-time temperature is lower than the set temperature, the heating device is controlled to work and the cooling device is turned off; and the control device determines the amplitude of the power increase of the heating device according to the difference between the second real-time temperature and the second temperature.

[0014] The embodiments of the present application have the following beneficial effects: The control device compares the first real-time temperature of the circulating liquid collected with the set temperature, accurately controls the cooling device or the heating device to work, and can stabilize the temperature of the circulating liquid near the set value. For example, when the load is stable, the temperature stability can reach ±0.3℃. The system can also achieve high-precision temperature control through similar control logic, and meet the strict requirements of liquid equipment on the temperature of the circulating liquid. The cooling device and the heating device are arranged in sequence, and the circulating liquid passes through the cooling device first and then the heating device, so that the temperature of the circulating liquid can be effectively adjusted. The cooling device can quickly reduce the temperature of the circulating liquid, and the heating device can timely increase the temperature as needed.

[0015] Moreover, the control device can reasonably control the working state of the cooling device and the heating device according to the temperature of the circulating liquid, so as to avoid unnecessary energy consumption. The control device determines the amplitude of the power increase of the heating device according to the temperature difference between the first real-time temperature and the second real-time temperature, and the self-adaptive adjustment mode can make the heating device accurately adjust the power according to the actual demand, which can quickly meet the demand for temperature rise, avoid energy waste and inaccurate temperature control caused by excessive or insufficient power, and improve the stability and energy utilization efficiency of the system. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the present application, the following will briefly introduce the drawings needed in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and should not be regarded as a limitation on the protection scope of the present application. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0017] Figure 1 The overall system diagram of the circulating liquid temperature control system of the embodiment of the application is shown. Figure 2 The structure diagram of the heating device of the circulating liquid temperature control system of the embodiment of the application is shown.

[0018] Label: 1, heater cylinder; 2, cover; 3, glue filling cylinder body; 4, internal thread joint; 5, heater; 6, long diameter elbow; 7, stainless steel pipe; 9, base; 10, flange blind; 12, sealing gasket; 13, pressure measuring welding piece; 14, liquid inlet pipeline; 15, liquid outlet pipeline; 16, first temperature sensor; 17, second temperature sensor; 18, refrigerator; 19, first heat exchanger; 20, liquid equipment; 21, liquid adjusting tank; 22, first liquid adjusting pipe; 23, second liquid adjusting pipe; 24, flow valve; 25, heating device. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the application will be described clearly and completely below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application.

[0020] The components of the embodiments of the application generally described and illustrated in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments of the application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the application.

[0021] In the following, the terms "include", "have", and their synonymous words used in various embodiments of the application are only intended to represent specific features, numbers, steps, operations, elements, components, or combinations of the foregoing, and should not be understood as excluding the existence or adding the possibility of one or more other features, numbers, steps, operations, elements, components, or combinations of the foregoing.

[0022] In addition, the terms "first", "second", "third", and the like are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0023] Unless otherwise specified, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which the various embodiments of this application pertain. Terms (such as those defined in commonly used dictionaries) shall be interpreted as having the same meaning as in their contextual meaning in the relevant technical field and shall not be construed as having an idealized or overly formal meaning, unless clearly defined in the various embodiments of this application.

[0024] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0025] First Embodiment This embodiment provides a circulating liquid temperature control system for regulating the temperature of the circulating liquid flowing through the liquid-using device 20. The system includes a cooling device, a heating device 25, and a control device. The cooling device and the heating device 25 are arranged sequentially along the flow direction of the circulating liquid. The liquid outlet pipe 15 of the liquid-using device 20 is connected sequentially to the cooling device and the heating device 25, and the liquid inlet pipe 14 of the liquid-using device 20 is connected to the heating device 25. The control device controls the operation of the cooling device or the heating device 25 based on the first real-time temperature and the set temperature of the circulating liquid; it also determines the extent of the power increase of the heating device 25 based on the temperature difference between the first real-time temperature and the second real-time temperature.

[0026] In this embodiment, reference Figure 1 and Figure 2 The control device compares the collected real-time temperature of the circulating fluid with the set temperature to precisely control the operation of the cooling or heating device 25, stabilizing the circulating fluid temperature near the set value. For example, under stable load, the temperature stability can reach ±0.3℃. This system can also achieve high-precision temperature control through similar control logic, meeting the stringent requirements of the fluid-using equipment 20 for the circulating fluid temperature. The cooling and heating devices 25 are arranged sequentially; the circulating fluid first passes through the cooling device and then the heating device 25, ensuring effective temperature regulation. The cooling device can quickly lower the circulating fluid temperature, while the heating device 25 can raise the temperature as needed.

[0027] Moreover, the control device can reasonably control the working state of the cooling device and the heating device 25 according to the temperature of the circulating liquid, so as to avoid unnecessary energy consumption. The control device determines the amplitude of the power increase of the heating device 25 according to the temperature difference between the first real-time temperature and the second real-time temperature, and the self-adaptive adjustment mode can make the heating device 25 accurately adjust the power according to the actual demand, which can quickly meet the demand of temperature rise, avoid energy waste and inaccurate temperature control caused by excessive or insufficient power, and improve the stability and energy utilization efficiency of the system.

[0028] In some embodiments, a first temperature sensor 16 is arranged on the liquid inlet pipeline 14 to collect the first real-time temperature of the circulating liquid; the control device judges the size of the first real-time temperature and the set temperature, and if the first real-time temperature is higher than the set temperature, the cooling device is controlled to work and the heating device 25 is controlled to be turned off. When the temperature of the circulating liquid is too high, the cooling device is controlled to work and the heating device 25 is controlled to be turned off, so as to meet the requirement of cooling the circulating liquid and avoid waste of electric power caused by the cooling device and the heating device 25 being turned on at the same time.

[0029] In some embodiments, the cooling device includes a refrigerator 18 and a first heat exchanger 19, the refrigerator 18 is used to provide cold energy, and the first heat exchanger 19 is connected with the refrigerator 18 and the liquid inlet pipeline 14, respectively.

[0030] In some embodiments, a second temperature sensor 17 is arranged on the pipeline between the cooling device and the heating device 25 to collect the second real-time temperature of the circulating liquid; the control device judges the size of the first real-time temperature and the set temperature, and if the first real-time temperature is less than the set temperature, the heating device 25 is controlled to work and the cooling device is controlled to be turned off; the control device also determines the amplitude of the power increase of the heating device 25 according to the difference between the second real-time temperature and the second temperature.

[0031] In the embodiments, if the difference between the first real-time temperature and the second real-time temperature is large, the heating power can be greatly increased to speed up the temperature rise of the circulating liquid and avoid under-temperature of the target object; if the difference between the first real-time temperature and the second real-time temperature is within a normal range, the heating is performed at a normal heating power to avoid waste of electric energy.

[0032] In some embodiments, the heating device 25 includes a heating cylinder and a heater 5, both ends of the heating cylinder are connected with the liquid inlet pipeline 14 and the liquid outlet pipeline 15, respectively, and the heater 5 is arranged in the heating cylinder; the control device controls the amplitude of the heating by controlling the amplitude of the power increase of the heater 5.

[0033] Further, with reference to Figure 2The heating device 25 further comprises a cover 2, a glue filling cylinder 3, an internal thread structure, a long-diameter elbow 6, a base 9, a flange, a sealing gasket 12, etc. The cover 2 is sealingly arranged at the top of the heating cylinder, the glue filling cylinder 3 is located at the top of the heating cylinder, and the bottom is provided with a flange and a sealing gasket 12. The side of the glue filling cylinder 3 is provided with an internal thread structure, through which the cable line can be sealingly penetrated, so that the heating appliance inside the glue filling cylinder 3 is connected with the external power supply, and at the same time the sealing property of the wire is ensured. The long-diameter elbow 6 is sealingly connected with the liquid inlet port of the heating cylinder, and the liquid inlet pipeline 14 is sealingly connected with the long-diameter elbow 6. The second temperature sensor 17 is arranged on the long-diameter elbow 6, so as to collect the temperature value of the circulating liquid. The liquid outlet end of the top of the heating cylinder is further provided with a pressure measuring welding piece 13, and a pressure sensor can be arranged on the pressure measuring welding piece 13, for real-time detection of the pressure of the internal circulating liquid. When the pressure exceeds the preset value, the pressure can be reduced by reducing the opening of the flow valve 24. When the pressure is less than the preset value, the pressure can be increased by increasing the opening of the flow valve 24.

[0034] Further, the heating device 25 can be selected to have a tubular heater 5 structure, which is welded by argon arc welding. The heater 5 is inserted into the heating cylinder to keep coaxial and is welded, the pressure measuring welding piece 13 is inserted into the circular hole of the cover 2 and is welded with the bottom surface flush, then the welded cover 2 and the heating cylinder are welded, and the orientation of the pressure measuring port is adjusted during welding. The glue filling cylinder 3 is butt welded with the flange, and the internal thread joint 4 is butt welded with the hole of the glue filling cylinder 3. The welded glue filling cylinder 3 is butt welded with the heater 5 and keeps coaxial. After welding is completed, pickling and rust removal are performed, and the joint is protected. The cable line is installed from the internal thread joint 4, and after wiring is completed, the mixed glue is used to fill the glue filling cylinder 3 to the surface of the flange, and after waiting for 24 hours for solidification, the sealing gasket 12, the flange and the base 9 are installed, and the M6 hexagonal head bolt is used to fasten and connect in the flat gasket three combination mode according to the standard torque. Before the flange plate 10 is sealed, the epoxy resin glue is filled in the glue filling cylinder to protect the wiring terminal. The special electronic filling glue is used to fill and protect the wiring terminal of the heater 5, the filling glue has a wide temperature resistance range, has the characteristics of insulation, moisture resistance, anti-creeping and chemical medium resistance, etc., and provides effective protection for the wiring terminal; the flange and the sealing gasket 12 are installed to prevent water from the outside from penetrating into the wiring terminal of the heater 5 and to prevent short circuit failure.

[0035] In some embodiments, the system further comprises a liquid adjusting system, the liquid adjusting system comprising a liquid adjusting tank 21, a first liquid adjusting pipe 22 and a second liquid adjusting pipe 23; the liquid outlet and the liquid inlet of the liquid adjusting tank 21 are connected with the first liquid adjusting pipe 22 and the second liquid adjusting pipe 23 respectively; the first liquid adjusting pipe 22 is connected with the liquid inlet pipeline 14, and the second liquid adjusting pipe 23 is connected with the pipeline between the cooling device and the heating device 25; the first liquid adjusting pipe 22 and / or the second liquid adjusting pipe 23 is provided with a flow valve 24.

[0036] Furthermore, the upper and lower ends of the heating cylinder are respectively provided with a liquid outlet and a liquid inlet, so that the circulating liquid flows through the heating cylinder from bottom to top; the control device adjusts the opening of the flow valve 24 in real time so that the circulating liquid always fills the heating cylinder.

[0037] In this embodiment, the circulating fluid inside the heating device 25 flows from bottom to top to prevent the exposed heating tube from burning dry. A flow meter FS1 is installed in the circulating fluid system to monitor the circulating fluid flow rate. An alarm interlock is triggered when the flow rate is low or there is no flow. A pressure transmitter is installed at the outlet PT1 of the heater 5, with low-pressure protection. The normal pressure in the circulating fluid system is 3~8 bar. If the pressure drops when there is no flow in the system, an alarm interlock will be triggered. The dual protection of flow and pressure provides reliable protection for the heater 5.

[0038] Second Embodiment An embodiment of this application provides a circulating fluid temperature control method for use with a control device of a circulating fluid temperature control system. The system further includes a cooling device, a heating device 25, and a control device. The cooling device and the heating device 25 are sequentially connected along the flow direction of the circulating fluid. The outlet pipe 15 of the liquid-using device 20 is sequentially connected to the cooling device and the heating device 25, and the inlet pipe 14 of the liquid-using device 20 is connected to the heating device 25. The method includes: Step S1: Control the operation of the cooling device or the heating device 25 based on the first real-time temperature of the circulating fluid and the set temperature. Step S2: Determine the magnitude of the power increase of the heating device 25 based on the temperature difference between the first real-time temperature and the second real-time temperature.

[0039] Furthermore, the control device determines the difference between the first real-time temperature and the set temperature. If the first real-time temperature is higher than the set temperature, it controls the cooling device to operate and shuts down the heating device 25.

[0040] Furthermore, the control device determines the difference between the first real-time temperature and the set temperature. If the first real-time temperature is less than the set temperature, it controls the heating device 25 to operate and shuts down the cooling device. The control device also determines the extent of the power increase of the heating device 25 based on the difference between the second real-time temperature and the second temperature.

[0041] The control device determines the difference between the first real-time temperature and the set temperature. If the first real-time temperature is higher than the set temperature, it controls the cooling device to operate and shuts down the heating device 25.

[0042] In this embodiment, the control device compares the collected real-time temperature of the circulating fluid with the set temperature to precisely control the operation of the cooling device or heating device 25, stabilizing the circulating fluid temperature near the set value. For example, under stable load, the temperature stability can reach ±0.3℃. This system can also achieve high-precision temperature control through similar control logic, meeting the stringent requirements of the liquid-using equipment 20 for the circulating fluid temperature. The cooling device and heating device 25 are arranged sequentially; the circulating fluid first passes through the cooling device and then the heating device 25, ensuring effective temperature regulation. The cooling device can quickly lower the circulating fluid temperature, while the heating device 25 can promptly raise the temperature as needed.

[0043] Furthermore, the control device can rationally control the operating status of the cooling device and the heating device 25 based on the temperature of the circulating fluid, avoiding unnecessary energy consumption. The control device determines the extent of the power increase of the heating device 25 based on the temperature difference between the first and second real-time temperatures collected. This adaptive adjustment allows the heating device 25 to precisely adjust its power according to actual needs, quickly meeting the temperature rise requirements while avoiding energy waste and inaccurate temperature control caused by excessive or insufficient power, thus improving system stability and energy efficiency.

[0044] In the several embodiments provided in this application, it should be understood that the disclosed apparatus and methods can also be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the flowcharts and block diagrams in the accompanying drawings show the architecture, functionality, and operation of possible implementations of apparatus, methods, and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that, in alternative implementations, the functions marked in the blocks may occur in a different order than those marked in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, and combinations of blocks in the block diagram and / or flowchart, can be implemented using a dedicated hardware-based system that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.

[0045] In addition, the functional modules or units in the various embodiments of this application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0046] If the aforementioned functions are implemented as software functional modules and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a smartphone, personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0047] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

Claims

1. A circulating liquid temperature control system, characterized in that, The system is used to regulate the temperature of the circulating liquid flowing through the liquid-using equipment. The system includes a cooling device, a heating device, and a control device. The cooling device and the heating device are arranged sequentially along the flow direction of the circulating liquid. The liquid outlet pipe of the liquid-using equipment is connected to the cooling device and the heating device in sequence, and the liquid inlet pipe of the liquid-using equipment is connected to the heating device. The control device controls the operation of the cooling device or the heating device based on the first real-time temperature and the set temperature of the circulating liquid; it also determines the extent of the power increase of the heating device based on the temperature difference between the first real-time temperature and the second real-time temperature.

2. The circulating liquid temperature control system according to claim 1, characterized in that, A first temperature sensor is installed on the liquid inlet pipe to collect the first real-time temperature of the circulating liquid; the control device determines the magnitude of the first real-time temperature and the set temperature, and if the first real-time temperature is higher than the set temperature, controls the cooling device to work and shuts down the heating device.

3. The circulating liquid temperature control system according to claim 2, characterized in that, The cooling device includes a refrigerator and a first heat exchanger. The refrigerator is used to provide cooling capacity. The first heat exchanger is connected to the refrigerator and the liquid inlet pipe, respectively.

4. The circulating liquid temperature control system according to claim 1, characterized in that, A second temperature sensor is installed on the pipeline between the cooling device and the heating device to collect the second real-time temperature of the circulating liquid; the control device determines the difference between the first real-time temperature and the set temperature, and if the first real-time temperature is less than the set temperature, controls the heating device to work and shuts down the cooling device; the control device also determines the extent of the power increase of the heating device based on the difference between the second real-time temperature and the second temperature.

5. The circulating liquid temperature control system according to claim 4, characterized in that, The heating device includes a heating cylinder and a heater. The two ends of the heating cylinder are connected to the liquid inlet pipe and the liquid outlet pipe, respectively. The heater is disposed inside the heating cylinder. The control device controls the heating amplitude by controlling the increase in the power of the heater.

6. The circulating liquid temperature control system according to claim 5, characterized in that, The system further includes a liquid preparation system, which includes a liquid preparation tank, a first liquid preparation pipe, and a second liquid preparation pipe; the liquid outlet and the liquid inlet of the liquid preparation tank are respectively connected to the first liquid preparation pipe and the second liquid preparation pipe; the first liquid preparation pipe is connected to the liquid inlet pipe, and the second liquid preparation pipe is connected to the pipe between the cooling device and the heating device; a flow valve is provided on the first liquid preparation pipe and / or the second liquid preparation pipe.

7. The circulating liquid temperature control system according to claim 6, characterized in that, The heating cylinder is provided with an outlet and an inlet at its upper and lower ends, respectively, so that the circulating liquid flows through the heating cylinder from bottom to top; the control device adjusts the opening of the flow valve in real time so that the circulating liquid always fills the heating cylinder.

8. A method for controlling the temperature of a circulating fluid, characterized in that, A control device for a circulating fluid temperature control system, the system further comprising a cooling device, a heating device, and a control device, wherein the cooling device and the heating device are sequentially connected along the flow direction of the circulating fluid, the outlet pipe of the liquid-using equipment is sequentially connected to the cooling device and the heating device, and the inlet pipe of the liquid-using equipment is connected to the heating device; the method includes: The cooling device or the heating device is controlled to operate based on the first real-time temperature of the circulating fluid and the set temperature. The magnitude of the power increase of the heating device is determined based on the temperature difference between the first real-time temperature and the second real-time temperature.

9. The circulating fluid temperature control method according to claim 8, characterized in that, The control device determines the difference between the first real-time temperature and the set temperature. If the first real-time temperature is higher than the set temperature, it controls the cooling device to operate and shuts down the heating device.

10. The circulating fluid temperature control method according to claim 8, characterized in that, The control device determines the difference between the first real-time temperature and the set temperature. If the first real-time temperature is lower than the set temperature, it controls the heating device to work and shuts down the cooling device. The control device also determines the extent of the power increase of the heating device based on the difference between the second real-time temperature and the second temperature.

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