A Semiconductor Intelligent Logistics Management Method and System

Abstract

This invention belongs to the field of semiconductor manufacturing management technology. It provides a semiconductor intelligent logistics management method and system, comprising: obtaining the photoresist pre-delivery time based on the real-time tracking of the time required for each stage of wafer production on the wafer production line within multiple historical logistics cycles. This ensures that the photoresist arrives on time during wafer production, avoiding increased storage costs due to early arrival or production delays due to late arrival. It also allows for dynamic adjustments based on real-time production and logistics status, helping to reduce idle time during wafer production caused by waiting for photoresist and preventing missed effective usage periods. Furthermore, it performs a pre-delivery matching degree analysis on the photoresist pre-delivery times within multiple historical logistics cycles to assess whether the pre-delivery times match, screening out low-match production lines. This not only helps to rationally manage inventory levels but also avoids inventory backlogs due to premature pre-delivery or inventory shortages due to late pre-delivery.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing management technology, specifically a semiconductor intelligent logistics management method and system. Background Technology

[0002] In traditional semiconductor logistics management models, the control over the time required for each stage of wafer production lacks real-time and dynamic aspects. Since wafer production involves multiple processes and stages, the production time of each stage is affected by various factors such as equipment status, process parameters, and raw material quality. The previous method of scheduling photoresist pre-delivery based solely on fixed times is difficult to adapt to this dynamically changing production environment. This can lead to photoresist arriving at the production line too early, increasing storage costs, as photoresist typically requires specific storage conditions, and additional storage time means higher investment in warehousing facilities and energy consumption; or it can arrive too late, affecting production progress, causing production line shutdowns due to material shortages, increasing equipment idle costs and the risk of order delays.

[0003] In existing technologies, current logistics management methods lack a scientific and effective matching analysis mechanism when assessing photoresist pre-delivery times. They fail to fully consider various variables in actual production, leading to frequent mismatches between pre-delivery times and actual production needs. When pre-delivery times are mismatched, companies struggle to rationally manage inventory levels. In semiconductor manufacturing workshops, multiple production lines often operate simultaneously, and conflicts easily arise in the pre-delivery time arrangements for photoresist. Traditional logistics management lacks effective analysis and handling mechanisms for pre-delivery conflicts, failing to promptly identify and resolve overlapping pre-delivery periods. Once a pre-delivery conflict occurs, a production line may halt production due to waiting for photoresist, severely impacting production efficiency and order delivery. Furthermore, in terms of logistics transportation resource scheduling, the lack of a clearly defined minimum interval between pre-delivery times for conflicting production lines easily leads to multiple pre-delivery tasks competing for AGV and other transportation resources simultaneously, resulting in low AGV utilization, reduced transportation efficiency, and further exacerbating the risk of production interruptions.

[0004] Therefore, the present invention provides a semiconductor intelligent logistics management method and system. Summary of the Invention

[0005] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0006] The technical solution adopted by this invention to solve its technical problem is:

[0007] Firstly, a semiconductor intelligent logistics management method includes:

[0008] The photoresist pre-delivery time is obtained by tracking the time required for each stage of wafer production on the wafer production line in real time over multiple historical logistics cycles.

[0009] A pre-delivery matching degree analysis was performed on the photoresist pre-delivery time in multiple historical logistics cycles to assess whether the pre-delivery time matched, and then the production lines with low matching were screened out.

[0010] Perform a pre-feed conflict analysis on the historical pre-feed process of each low-matching production line to determine whether the pre-feed strategy needs to be adjusted.

[0011] If pre-delivery adjustments are required, obtain the pre-delivery interval management value and manage the pre-delivery time for production lines with pre-delivery conflicts.

[0012] Preferably, the method for obtaining the photoresist pre-feed time is as follows:

[0013] The entire wafer production workshop is divided according to the wafer production process, resulting in multiple wafer production stages. The time corresponding to each wafer production stage within the historical logistics cycle is obtained as the unit stage time. The unit stage times corresponding to the same wafer production stage within the historical logistics cycle are compared, and the maximum and minimum unit stage times are selected. The summation and average are calculated to output the duration of the same stage.

[0014] According to the wafer production stages corresponding to the same stage duration, the production time of each stage is calculated by summing the values. The production time of the photoresist in each historical logistics cycle is obtained and the average value is calculated to obtain the average photoresist transportation time. The difference between the stage production time and the average photoresist transportation time is calculated to obtain the photoresist pre-delivery time.

[0015] Preferably, the pre-send matching degree analysis process is as follows:

[0016] The photoresist pre-delivery time and the actual photoresist transportation time in each historical logistics cycle are taken, the difference is calculated, and the absolute value is then compared with the actual photoresist transportation time to obtain the pre-delivery time difference. If the pre-delivery time difference is greater than the pre-delivery time difference threshold, it is marked as a low-matching pre-delivery cycle.

[0017] Extract the proportion of low-match pre-delivery cycle quantity to the total number of historical logistics cycles to obtain the low-match quantity ratio.

[0018] Obtain the pre-send duration difference corresponding to each low-match pre-send cycle, perform average calculation, and output the low-match degree value;

[0019] The low-match ratio is calculated by multiplying the low-match degree value to obtain the low-match screening value.

[0020] The preferred method for screening low-match production lines is:

[0021] If the low-match screening value is greater than the low-match screening threshold, it is marked as a low-match production line;

[0022] If the low-match filter value is less than or equal to the low-match filter threshold, it is marked as a high-match production line.

[0023] Preferably, a pre-feeding conflict analysis is performed on the historical pre-feeding process of each low-matching production line to obtain the overlapping conflict value. The process is as follows:

[0024] For production lines with overlapping pre-delivery periods, extract the local time period where the pre-delivery periods of the photoresist pre-delivery overlaps between the two production lines with overlapping pre-delivery periods within the same historical logistics cycle, and compare it with the photoresist pre-delivery period of the target production line within the historical logistics cycle to obtain the pre-delivery period overlap ratio.

[0025] The overlap ratio of all pre-send periods is averaged to output the overlap conflict value.

[0026] Preferably, a pre-feed conflict analysis is performed on the historical pre-feed process of each low-matching production line to obtain the ratio of overlapping production lines. The process is as follows:

[0027] Within the same historical logistics cycle, the number of overlapping production lines pre-delivered during the statistical period is calculated and compared with the total number of low-matching production lines to output the ratio of overlapping production line numbers.

[0028] Preferably, the method for obtaining the photoresist pre-delivery time period is as follows:

[0029] The starting time of the historical logistics cycle is summed with the production duration of each stage to obtain the starting time of the photoresist pre-delivery.

[0030] The photoresist pre-delivery start time and the photoresist pre-delivery time are summed to obtain the photoresist pre-delivery end time.

[0031] The photoresist pre-delivery start time node and the photoresist pre-delivery end time node are combined to construct the photoresist pre-delivery period.

[0032] Preferably, the process for determining whether the pre-delivery strategy needs adjustment is as follows:

[0033] The ratio of overlapping production line quantity to overlapping conflict value is calculated to obtain the pre-feed conflict analysis value. If the pre-feed conflict analysis value is greater than the pre-feed conflict analysis threshold, it is displayed as a pre-charge adjustment signal.

[0034] Preferably, the pre-delivery interval management value is obtained, and pre-delivery time management is performed on the pre-delivery conflict production lines. The process is as follows:

[0035] Extract the average photoresist transport time corresponding to the target production line, multiply it by the overlap time ratio of the pre-delivery period, and sum it with the average photoresist transport time to output the basic time interval adjustment value.

[0036] The ratio of the pre-sent conflict analysis value to the pre-sent conflict analysis threshold is calculated, and the conflict impact coefficient is output.

[0037] The pre-send interval management value is obtained by multiplying the basic interval adjustment value with the conflict impact coefficient.

[0038] The photoresist pre-feed time is summed with the pre-feed interval management value to obtain the photoresist pre-feed adjustment time.

[0039] Secondly, a semiconductor intelligent logistics management system includes the following modules:

[0040] Pre-delivery time acquisition module: Based on the real-time tracking of the time required for each stage of wafer production on the wafer production line within multiple historical logistics cycles, the photoresist pre-delivery time is obtained.

[0041] Low-configuration production screening module: Analyzes the pre-delivery matching degree of photoresist pre-delivery time in multiple historical logistics cycles, evaluates whether the pre-delivery time matches, and screens out low-matching production lines.

[0042] Low-match conflict analysis module: Performs pre-feed conflict analysis on the historical pre-feed process of each low-match production line to determine whether the pre-feed strategy needs to be adjusted;

[0043] Low-configuration pre-delivery adjustment module: If pre-delivery adjustment is required, the pre-delivery interval management value is obtained to manage the pre-delivery time for production lines with pre-delivery conflicts.

[0044] The beneficial effects of this invention are as follows:

[0045] This invention obtains the photoresist pre-delivery time by tracking the time required for each stage of wafer production on the wafer production line in real time across multiple historical logistics cycles. This ensures that the photoresist arrives on time during wafer production, avoiding increased storage costs due to early arrival or production delays due to late arrival. Furthermore, it can dynamically adjust based on real-time production and logistics status, helping to reduce idle time during wafer production caused by waiting for photoresist and preventing missed effective usage cycles. By performing a pre-delivery matching analysis on the photoresist pre-delivery times across multiple historical logistics cycles, the invention assesses whether the pre-delivery times match and identifies production lines with low matching. This not only helps to rationally manage inventory levels but also avoids inventory backlog caused by premature pre-delivery or inventory shortage caused by late pre-delivery, achieving precise inventory control and reducing inventory costs.

[0046] This invention performs pre-delivery conflict analysis on the historical pre-delivery process of each low-matching production line to determine whether the pre-delivery strategy needs adjustment. If pre-delivery adjustment is required, a pre-delivery interval management value is obtained, and pre-delivery time management is implemented for production lines with pre-delivery conflicts. This not only allows for rapid adjustment of photoresist pre-delivery time based on the pre-delivery interval management value, ensuring that photoresist pre-delivery times between production lines are reasonably staggered and avoiding production line shutdowns due to pre-delivery conflicts, but also clarifies the minimum interval between pre-delivery times of conflicting production lines. This allows logistics managers to rationally arrange the usage sequence and time of AGVs based on this value, avoiding situations where multiple pre-delivery tasks compete for AGVs simultaneously, thereby improving AGV utilization and transportation efficiency. Attached Figure Description

[0047] The invention will now be further described with reference to the accompanying drawings.

[0048] Figure 1 This is a flowchart of the steps of a semiconductor intelligent logistics management method according to the present invention;

[0049] Figure 2 This is a flowchart illustrating the judgment process of a semiconductor intelligent logistics management method according to the present invention;

[0050] Figure 3 This is a schematic diagram of a semiconductor intelligent logistics management system according to the present invention. Detailed Implementation

[0051] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0052] Example 1

[0053] Please see Figure 1 - Figure 2 As shown in the embodiment of the present invention, a semiconductor intelligent logistics management method includes the following steps:

[0054] Step 1: Within multiple historical logistics cycles, obtain the photoresist pre-delivery time based on the time required for each stage of wafer production on the wafer production line in real time tracking.

[0055] It should be noted that the historical logistics cycle refers to the time required for each wafer manufacturing and transfer to the photolithography coating stage on a wafer production line. Each wafer production line has multiple historical logistics cycles.

[0056] In some embodiments, the entire wafer fabrication workshop is divided according to the wafer fabrication process, resulting in multiple wafer fabrication stages;

[0057] It should be noted that the wafer manufacturing process refers to the wafer manufacturing stages within a semiconductor wafer manufacturing plant, specifically including: wafer preprocessing stage, underlying thin film deposition stage, thin film post-processing stage, photolithography preparation stage, and photoresist coating stage, etc.

[0058] For example, a time analysis of the wafer fabrication stage before the photoresist coating stage is performed to obtain the photoresist pre-delivery time process as follows:

[0059] Obtain the time corresponding to the wafer production stage within the historical logistics cycle as the unit stage time. Compare the unit stage times corresponding to the same wafer production stage within the historical logistics cycle, select the maximum and minimum unit stage times, and calculate the sum and average to output the duration of the same stage.

[0060] The production time of each stage is calculated by summing the wafer production stages corresponding to the same stage duration.

[0061] Obtain the photoresist logistics time for each historical logistics cycle, and calculate the average value to obtain the average photoresist transportation time.

[0062] The photoresist pre-delivery time is obtained by subtracting the stage production time from the photoresist transportation time.

[0063] The significance of obtaining the photoresist pre-delivery time is as follows: From the perspective of logistics material scheduling, accurately obtaining the usage time node of photoresist in the semiconductor production process can ensure that the photoresist arrives on time when the wafer is being produced, avoiding the increase in storage costs due to early arrival or the impact on production progress due to late arrival. Moreover, it can be dynamically adjusted according to the real-time production situation and logistics status, which helps to reduce the idle time caused by waiting for photoresist during the wafer production process and avoid missing the effective usage cycle of photoresist.

[0064] Precise delivery timing can help companies rationally control photoresist inventory levels, avoid excessive inventory leading to capital occupation and storage costs, and prevent production interruptions caused by insufficient inventory. Through an intelligent logistics management system, precise control of photoresist inventory can be achieved based on the delivery timing and actual production needs.

[0065] Step 2: Analyze the pre-delivery matching degree of photoresist pre-delivery time in multiple historical logistics cycles, evaluate whether the pre-delivery time matches, and screen out production lines with low matching.

[0066] In some embodiments, the photoresist pre-delivery time and the actual photoresist transportation time in each historical logistics cycle are obtained, the difference is calculated, the absolute value is taken, and then the ratio with the actual photoresist transportation time is calculated to obtain the pre-delivery time difference.

[0067] If the pre-delivery time difference is greater than the pre-delivery time difference threshold, it indicates that the photoresist pre-delivery time matching degree is low within the analyzed historical logistics cycle, and it is marked as a low matching pre-delivery cycle.

[0068] If the pre-delivery time difference is less than or equal to the pre-delivery time difference threshold, it indicates that the photoresist pre-delivery time matching degree is high within the analyzed historical logistics cycle, and it is marked as a high matching pre-delivery cycle.

[0069] Extract the proportion of low-match pre-delivery cycle quantity to the total number of historical logistics cycles to obtain the low-match quantity ratio.

[0070] Obtain the pre-send duration difference corresponding to each low-match pre-send cycle, perform average calculation, and output the low-match degree value;

[0071] The low-match ratio is calculated by multiplying the low-match degree value to obtain the low-match screening value.

[0072] Understandably, the meaning of the low-match screening value is: it comprehensively considers the frequency of low-match occurrences and the degree of deviation of each low-match. On the one hand, the low-match quantity ratio reflects the frequency of low-match occurrences in the photoresist pre-shipment of the analyzed wafer production line in multiple historical logistics cycles. On the other hand, the low-match degree value reflects the degree of time difference deviation of low-match occurrences in the photoresist pre-shipment of the analyzed wafer production line in multiple historical logistics cycles.

[0073] The low-spec filter value is compared with the low-spec filter threshold, as follows:

[0074] If the low-match screening value is greater than the low-match screening threshold, it indicates that the pre-delivery matching degree of the analyzed wafer production line is low in multiple historical logistics cycles, and it is marked as a low-match production line.

[0075] If the low-match screening value is less than or equal to the low-match screening threshold, it indicates that the pre-delivery matching degree of the analyzed wafer production line is relatively high in multiple historical logistics cycles, and it is marked as a high-match production line.

[0076] It should be noted that the significance of acquiring low-match production lines is that, from the perspective of logistics efficiency, the mismatch between the photoresist pre-delivery time and the actual production line demand leads to a high probability of production waiting or interruption. Screening out these production lines not only helps to rationally arrange inventory levels, but also avoids the problems of inventory backlog due to pre-delivery too early or inventory shortage due to pre-delivery too late, thereby achieving precise inventory control and reducing inventory costs.

[0077] From a production quality perspective, timely supply of photoresist is fundamental to ensuring semiconductor production quality. Low-matching production lines may experience instability in production process due to unstable photoresist supply, which in turn affects product quality. Screening and optimizing these production lines can ensure timely and sufficient supply of photoresist, thereby guaranteeing the stability of semiconductor production.

[0078] The specific solution in this embodiment is as follows: Within multiple historical logistics cycles, the photoresist pre-delivery time is obtained by tracking the time required for each stage of wafer production on the wafer production line in real time. This ensures that the photoresist arrives on time during wafer production, avoiding increased storage costs due to early arrival or production delays due to late arrival. Furthermore, it allows for dynamic adjustments based on real-time production and logistics status, helping to reduce idle time during wafer production caused by waiting for photoresist and preventing missed effective usage cycles of the photoresist. By performing a pre-delivery matching analysis on the photoresist pre-delivery times within multiple historical logistics cycles, the matching of pre-delivery times is evaluated, and production lines with low matching are identified. This not only helps to rationally manage inventory levels but also avoids inventory backlog due to premature pre-delivery or inventory shortage due to late pre-delivery, achieving precise inventory control and reducing inventory costs.

[0079] Example 2

[0080] Please see Figure 1 - Figure 2 As shown in the embodiment of the present invention, a semiconductor intelligent logistics management method further includes the following steps:

[0081] Step 3: Perform a pre-feed conflict analysis on the historical pre-feed process of each low-matching production line to determine whether the pre-feed strategy needs to be adjusted;

[0082] It should be noted that the historical pre-delivery process includes: from the perspective of the pre-delivery path, it is necessary to consider whether there is local overlap in the pre-delivery routes for photoresist; from the perspective of the pre-delivery time, it is necessary to consider the conflict between the route time window and resource scheduling, that is, the execution of the pre-delivery route depends on the "time window" (such as the available time period of AGV, the scheduled time period for warehouse outbound). Analyze whether there is a "time window conflict" in the historical routes: for example, a certain pre-delivery route needs to use AGVs from "10:00 to 10:30", but the AGVs have been occupied by the pre-delivery routes of other production lines during this period, which causes the start of this route to be delayed, and thus causes the pre-delivery time difference to exceed the standard.

[0083] In some embodiments, a low-match production line is extracted as the target production line, and the photoresist pre-delivery period of the target production line within the historical logistics cycle is obtained. This pre-delivery period is then compared with the photoresist pre-delivery periods of other low-match production lines within the historical logistics cycle. The process is as follows:

[0084] The target production line is paired with any low-matching production line in the same historical logistics cycle for photoresist pre-delivery time period. If there is an overlap in the photoresist pre-delivery time period of two low-matching production lines in the same historical logistics cycle, the low-matching production line analyzed is taken as the pre-delivery overlapping production line.

[0085] If there is no overlap in the photoresist pre-delivery period between two low-match production lines within the same historical logistics cycle, no further operations will be performed.

[0086] For production lines with overlapping pre-delivery periods, extract the local time period where the pre-delivery periods of the photoresist pre-delivery overlaps between the two production lines with overlapping pre-delivery periods within the same historical logistics cycle, and compare it with the photoresist pre-delivery period of the target production line within the historical logistics cycle to obtain the pre-delivery period overlap ratio.

[0087] The overlap ratio of all pre-send periods is averaged to output the overlap conflict value.

[0088] It should be noted that the photoresist pre-delivery period is obtained by acquiring the photoresist pre-delivery time and the duration of each production stage.

[0089] Specifically, the starting time of the historical logistics cycle is summed with the production duration of each stage to obtain the starting time of the photoresist pre-delivery.

[0090] The photoresist pre-delivery start time and the photoresist pre-delivery time are summed to obtain the photoresist pre-delivery end time.

[0091] The photoresist pre-delivery start time node and the photoresist pre-delivery end time node are combined to construct the photoresist pre-delivery period;

[0092] Within the same historical logistics cycle, the number of overlapping production lines pre-delivered during the statistical period is calculated and compared with the total number of low-matching production lines to output the ratio of overlapping production line numbers.

[0093] The ratio of overlapping production line quantity to overlap conflict value is calculated, and the pre-delivery conflict analysis value is output.

[0094] Understandably, the significance of the pre-delivery conflict analysis value lies in measuring the severity of the pre-delivery conflict between each low-matching production line and other low-matching production lines in the historical pre-delivery process. On the one hand, the ratio of overlapping production lines reflects the proportion of production lines that have pre-delivery conflicts with the target production line among all low-matching production lines, indicating the scope of the conflict of the target production line. On the other hand, the overlap conflict value reflects the degree of difference in the overlap of pre-delivery periods between the target production line and other low-matching production lines.

[0095] Specifically, in semiconductor smart logistics, the rational allocation of transportation resources (such as AGVs) is crucial. Pre-delivery conflict analysis can reveal the transportation resource conflicts caused by overlapping pre-delivery periods between low-match production lines. By analyzing this value, managers can understand which production lines have resource competition in their pre-delivery arrangements, and then adjust the pre-delivery strategy to rationally plan the usage time and routes of AGVs. It can also help identify the problem of warehousing resource shortages caused by pre-delivery period conflicts.

[0096] In semiconductor factories, multiple production lines typically operate simultaneously. Timely supply of photoresist is crucial to ensuring production continuity. Pre-feed conflict analysis helps coordinate the production rhythm between different production lines. When pre-feed conflicts are found between multiple low-matched production lines, the photoresist supply to each production line can be made more balanced by adjusting the pre-feed time. This avoids some production lines from producing too fast or too slow due to pre-feed conflicts, thus achieving overall production plan coordination and optimization.

[0097] The pre-sent conflict analysis value is compared with the pre-sent conflict analysis threshold, as follows:

[0098] If the pre-feed conflict analysis value is greater than the pre-feed conflict analysis threshold, it indicates that the conflict range of the target production line is large and the difference in the pre-feed time period overlap between the target production line and other low-matching production lines is small, which is displayed as a pre-flush adjustment signal.

[0099] If the pre-feed conflict analysis value is less than or equal to the pre-feed conflict analysis threshold, it indicates that the conflict range of the target production line is small and the difference in the pre-feed time period overlap between the target production line and other low-matching production lines is large, which is displayed as a pre-charge non-adjustment signal.

[0100] Step 4: If pre-delivery adjustment is required, obtain the pre-delivery interval management value and manage the pre-delivery time for production lines with pre-delivery conflicts.

[0101] In some embodiments, the average time for photoresist transportation corresponding to the target production line is extracted, multiplied by the overlap ratio of the pre-delivery period, and then summed with the average time for photoresist transportation to output the basic time interval adjustment value.

[0102] The ratio of the pre-sent conflict analysis value to the pre-sent conflict analysis threshold is calculated, and the conflict impact coefficient is output.

[0103] The pre-send interval management value is obtained by multiplying the basic interval adjustment value with the conflict impact coefficient.

[0104] The photoresist pre-feed time is summed with the pre-feed interval management value to obtain the photoresist pre-feed adjustment time;

[0105] It should be noted that the significance of obtaining the pre-delivery interval management value is that it is a key indicator that quantifies the minimum interval between pre-delivery times that need to be staggered for production lines with pre-delivery conflicts. From the perspective of logistics and transportation efficiency, in semiconductor factories, the number of transportation resources such as AGVs (Automated Guided Vehicles) is limited. The pre-delivery interval management value clarifies the minimum interval between pre-delivery times for each production line with pre-delivery conflicts, so that logistics managers can reasonably arrange the usage sequence and time of AGVs based on this value, avoiding the situation where multiple pre-delivery tasks compete for AGVs at the same time, thereby improving the utilization rate of AGVs and transportation efficiency.

[0106] From the perspective of production plan execution, in the semiconductor production process, the production plan may be dynamically adjusted according to factors such as market demand and equipment status. The pre-delivery interval management value provides flexibility for adjusting the production plan. When it is necessary to change the production plan, logistics management personnel can quickly adjust the pre-delivery time of photoresist according to the pre-delivery interval management value to ensure that the pre-delivery time of photoresist between production lines is reasonably staggered, and avoid the situation where a production line is waiting for photoresist and has to stop production due to pre-delivery conflicts.

[0107] From the perspective of production and inventory management, the advance delivery interval management value can ensure that photoresist is delivered to the production line on time when needed, reducing inventory backlog or stockouts caused by unreasonable advance delivery times. Inventory backlog increases the company's warehousing costs and capital occupation costs, while stockouts can lead to production interruptions and order delays. When photoresist can be delivered to the production line and used in a timely manner according to the requirements of the advance delivery interval management value, the inventory turnover speed will be accelerated.

[0108] The specific solution in this embodiment is as follows: A pre-delivery conflict analysis is performed on the historical pre-delivery process of each low-matching production line to determine whether the pre-delivery strategy needs adjustment. If adjustment is required, the pre-delivery interval management value is obtained, and pre-delivery time management is implemented for production lines with pre-delivery conflicts. This not only allows for rapid adjustment of photoresist pre-delivery times based on the pre-delivery interval management value, ensuring that photoresist pre-delivery times between production lines are reasonably staggered and avoiding production stoppages due to pre-delivery conflicts, but also clarifies the minimum interval between pre-delivery times for conflicting production lines. This allows logistics managers to rationally arrange the usage sequence and time of AGVs based on this value, avoiding situations where multiple pre-delivery tasks compete for AGVs simultaneously, thereby improving AGV utilization and transportation efficiency.

[0109] Example 3

[0110] Please see Figure 3 As shown in the embodiment of the present invention, a semiconductor intelligent logistics management system includes the following modules:

[0111] Pre-delivery time acquisition module: Based on the real-time tracking of the time required for each stage of wafer production on the wafer production line within multiple historical logistics cycles, the photoresist pre-delivery time is obtained.

[0112] Low-configuration production screening module: Analyzes the pre-delivery matching degree of photoresist pre-delivery time in multiple historical logistics cycles, evaluates whether the pre-delivery time matches, and screens out low-matching production lines.

[0113] Low-match conflict analysis module: Performs pre-feed conflict analysis on the historical pre-feed process of each low-match production line to determine whether the pre-feed strategy needs to be adjusted;

[0114] Low-configuration pre-delivery adjustment module: If pre-delivery adjustment is required, the pre-delivery interval management value is obtained to manage the pre-delivery time for production lines with pre-delivery conflicts.

[0115] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor intelligent logistics management method, characterized in that: include: The photoresist pre-delivery time is obtained by tracking the time required for each stage of wafer production on the wafer production line in real time over multiple historical logistics cycles. A pre-delivery matching degree analysis was performed on the photoresist pre-delivery time in multiple historical logistics cycles to assess whether the pre-delivery time matched, and then the production lines with low matching were screened out. Perform a pre-feed conflict analysis on the historical pre-feed process of each low-matching production line to determine whether the pre-feed strategy needs to be adjusted. If pre-delivery adjustments are required, obtain the pre-delivery interval management value and manage the pre-delivery time for production lines with pre-delivery conflicts. The method for obtaining the photoresist pre-feed time is as follows: The entire wafer production workshop is divided according to the wafer production process, resulting in multiple wafer production stages. The time corresponding to each wafer production stage within the historical logistics cycle is obtained as the unit stage time. The unit stage times corresponding to the same wafer production stage within the historical logistics cycle are compared, and the maximum and minimum unit stage times are selected. The summation and average are calculated to output the duration of the same stage. According to the wafer production stages corresponding to the same stage duration, the production time of each stage is calculated by summing the values. The production time of each stage is obtained, and the average value of the photoresist logistics time in each historical logistics cycle is calculated to obtain the average photoresist transportation time. The difference between the stage production time and the average photoresist transportation time is calculated to obtain the photoresist pre-delivery time. The historical pre-feeding process of the production line is analyzed for pre-feeding conflicts to obtain overlapping conflict values. The process is as follows: Extract a low-match production line as the target production line, obtain the photoresist pre-delivery time period of the target production line in the historical logistics cycle, and compare it with the photoresist pre-delivery time periods of other low-match production lines in the historical logistics cycle. If there is an overlap of photoresist pre-delivery time periods of two low-match production lines in the same historical logistics cycle, the low-match production line analyzed is taken as the production line with overlapping time periods. For production lines with overlapping pre-delivery periods, extract the local time period where the pre-delivery periods of the photoresist pre-delivery overlaps between the two production lines with overlapping pre-delivery periods within the same historical logistics cycle, and compare it with the photoresist pre-delivery period of the target production line within the historical logistics cycle to obtain the pre-delivery period overlap ratio. The overlap ratio of all pre-send periods is averaged to output the overlap conflict value. For each low-match production line, a pre-feed conflict analysis is performed on the historical pre-feed process to obtain the ratio of overlapping production lines. The process is as follows: Within the same historical logistics cycle, the number of overlapping production lines pre-delivered during the statistical period is calculated and compared with the total number of low-matching production lines to output the ratio of overlapping production line numbers. The process for determining whether the pre-delivery strategy needs adjustment is as follows: The ratio of the number of overlapping production lines to the overlap conflict value is calculated, and the pre-delivery conflict analysis value is output. If the pre-delivery conflict analysis value is greater than the pre-delivery conflict analysis threshold, it is displayed as a pre-delivery adjustment signal. The process of obtaining the pre-delivery interval management value and managing the pre-delivery time for production lines with pre-delivery conflicts is as follows: Extract the average photoresist transport time corresponding to the target production line, multiply it by the overlap time ratio of the pre-delivery period, and sum it with the average photoresist transport time to output the basic time interval adjustment value. The ratio of the pre-sent conflict analysis value to the pre-sent conflict analysis threshold is calculated, and the conflict impact coefficient is output. The pre-send interval management value is obtained by multiplying the basic interval adjustment value with the conflict impact coefficient. The photoresist pre-feed time is summed with the pre-feed interval management value to obtain the photoresist pre-feed adjustment time.

2. The semiconductor intelligent logistics management method according to claim 1, characterized in that: The pre-send matching degree analysis process is as follows: Extract the photoresist pre-delivery time and the actual photoresist transportation time in each historical logistics cycle, calculate the difference, take the absolute value, and then calculate the ratio with the actual photoresist transportation time to obtain the pre-delivery time difference. If the pre-delivery time difference is greater than the pre-delivery time difference threshold, it is marked as a low-matching pre-delivery cycle. Extract the proportion of low-match pre-delivery cycle quantity to the total number of historical logistics cycles to obtain the low-match quantity ratio. Obtain the pre-send duration difference corresponding to each low-match pre-send cycle, perform average calculation, and output the low-match degree value; The low-match ratio is calculated by multiplying the low-match degree value to obtain the low-match screening value.

3. The semiconductor intelligent logistics management method according to claim 2, characterized in that: The screening method for low-match production lines is as follows: If the low-match screening value is greater than the low-match screening threshold, it is marked as a low-match production line; If the low-match filter value is less than or equal to the low-match filter threshold, it is marked as a high-match production line.

4. The semiconductor intelligent logistics management method according to claim 1, characterized in that: The method for obtaining the photoresist pre-delivery time period is as follows: The starting time of the historical logistics cycle is summed with the production duration of each stage to obtain the starting time of the photoresist pre-delivery. The photoresist pre-delivery start time and the photoresist pre-delivery time are summed to obtain the photoresist pre-delivery end time. The photoresist pre-delivery start time node and the photoresist pre-delivery end time node are combined to construct the photoresist pre-delivery period.

5. A semiconductor intelligent logistics management system, characterized in that: Includes the following modules: Pre-delivery time acquisition module: Based on the real-time tracking of the time required for each stage of wafer production on the wafer production line within multiple historical logistics cycles, the photoresist pre-delivery time is obtained. Low-configuration production screening module: Analyzes the pre-delivery matching degree of photoresist pre-delivery time in multiple historical logistics cycles, evaluates whether the pre-delivery time matches, and screens out low-matching production lines. Low-match conflict analysis module: Performs pre-feed conflict analysis on the historical pre-feed process of each low-match production line to determine whether the pre-feed strategy needs to be adjusted; Low-configuration pre-delivery adjustment module: If pre-delivery adjustment is required, the pre-delivery interval management value is obtained to manage the pre-delivery time for production lines with pre-delivery conflicts. The method for obtaining the photoresist pre-feed time is as follows: The entire wafer production workshop is divided according to the wafer production process, resulting in multiple wafer production stages. The time corresponding to each wafer production stage within the historical logistics cycle is obtained as the unit stage time. The unit stage times corresponding to the same wafer production stage within the historical logistics cycle are compared, and the maximum and minimum unit stage times are selected. The summation and average are calculated to output the duration of the same stage. According to the wafer production stages corresponding to the same stage duration, the production time of each stage is calculated by summing the values. The production time of each stage is obtained, and the average value of the photoresist logistics time in each historical logistics cycle is calculated to obtain the average photoresist transportation time. The difference between the stage production time and the average photoresist transportation time is calculated to obtain the photoresist pre-delivery time. The historical pre-feeding process of the production line is analyzed for pre-feeding conflicts to obtain overlapping conflict values. The process is as follows: Extract a low-match production line as the target production line, obtain the photoresist pre-delivery time period of the target production line in the historical logistics cycle, and compare it with the photoresist pre-delivery time periods of other low-match production lines in the historical logistics cycle. If there is an overlap of photoresist pre-delivery time periods of two low-match production lines in the same historical logistics cycle, the low-match production line analyzed is taken as the production line with overlapping time periods. For production lines with overlapping pre-delivery periods, extract the local time period where the pre-delivery periods of the photoresist pre-delivery overlaps between the two production lines with overlapping pre-delivery periods within the same historical logistics cycle, and compare it with the photoresist pre-delivery period of the target production line within the historical logistics cycle to obtain the pre-delivery period overlap ratio. The overlap ratio of all pre-send periods is averaged to output the overlap conflict value. For each low-match production line, a pre-feed conflict analysis is performed on the historical pre-feed process to obtain the ratio of overlapping production lines. The process is as follows: Within the same historical logistics cycle, the number of overlapping production lines pre-delivered during the statistical period is calculated and compared with the total number of low-matching production lines to output the ratio of overlapping production line numbers. The process for determining whether the pre-delivery strategy needs adjustment is as follows: The ratio of the number of overlapping production lines to the overlap conflict value is calculated, and the pre-delivery conflict analysis value is output. If the pre-delivery conflict analysis value is greater than the pre-delivery conflict analysis threshold, it is displayed as a pre-delivery adjustment signal. The process of obtaining the pre-delivery interval management value and managing the pre-delivery time for production lines with pre-delivery conflicts is as follows: Extract the average photoresist transport time corresponding to the target production line, multiply it by the overlap time ratio of the pre-delivery period, and sum it with the average photoresist transport time to output the basic time interval adjustment value. The ratio of the pre-sent conflict analysis value to the pre-sent conflict analysis threshold is calculated, and the conflict impact coefficient is output. The pre-send interval management value is obtained by multiplying the basic interval adjustment value with the conflict impact coefficient. The photoresist pre-feed time is summed with the pre-feed interval management value to obtain the photoresist pre-feed adjustment time.

Images