Wafer boat clamping mechanism

Abstract

The invention relates to the technical field of special equipment for semiconductor devices, and provides a wafer boat clamping mechanism which comprises a first clamping jaw and a second clamping jaw, the first clamping jaw and the second clamping jaw are driven to get close to each other or get away from each other so as to clamp or release an object, the first clamping jaw and the second clamping jaw each comprise a first support and a second support, and the first support and the second support are arranged in parallel. The first support is suitable for clamping a first type of wafer boats, and the second support is suitable for clamping a second type of wafer boats. The wafer boat carrying efficiency can be improved, different types and sizes of wafer boats can be clamped, and the application range is wide.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor device special equipment, in particular to a wafer boat clamping mechanism. BACKGROUND

[0002] The semiconductor wafer is stored in a wafer boat, and the wafer and the wafer boat are relatively valuable, so they should not be damaged during storage and transportation. The traditional wafer boat is usually manually taken, which is not only low in efficiency, but also easy to damage the wafer boat or the wafer. Related technologies use a robot to automatically take and transport the wafer boat. However, different types of wafer boats generally have different shapes. For example, the design of a quartz wafer boat gives priority to avoiding its brittle weakness, and the shape is relatively thick and simple, while a silicon carbide wafer boat can fully utilize its superb strength, stiffness and thermal performance, and pursue higher loading density, better thermal uniformity and adapt to extreme high temperature environment, and the shape is generally designed to be more slender and compact. The mechanical hand with fixed structure is difficult to be applicable to the taking of wafer boats of different types and different sizes. SUMMARY

[0003] The present application provides a wafer boat clamping mechanism to solve the above technical problems, which can improve the transportation efficiency of the wafer boat and clamp wafer boats of different types and sizes, and has a wide range of applications.

[0004] The technical scheme adopted by the present application is as follows: A wafer boat clamping mechanism, comprising a first clamping jaw and a second clamping jaw, the first clamping jaw and the second clamping jaw are driven to approach or move away from each other to clamp or release an object, the first clamping jaw and the second clamping jaw each comprise a first support and a second support, the first support is suitable for clamping a first type of wafer boat, and the second support is suitable for clamping a second type of wafer boat.

[0005] The first clamping jaw and the second clamping jaw each further comprise a guide plate support, and a wafer groove for accommodating a wafer is formed in the guide plate support.

[0006] The wafer boat clamping mechanism further comprises an electric claw, a support plate, a linear guide rail fixed to the support plate, a first sliding block and a second sliding block, one end of the first clamping jaw is fixed to the first sliding block, one end of the second clamping jaw is fixed to the second sliding block, the first sliding block and the second sliding block are arranged in a guide rail groove on one side of the linear guide rail, the electric claw is located on the other side of the linear guide rail, and the first sliding block and the second sliding block are driven to slide on the linear guide rail by the electric claw to drive the first clamping jaw and the second clamping jaw to approach or move away from each other.

[0007] The clamping detection device is arranged on the first support and the second support to correspondingly detect whether the first type of crystal boat and the second type of crystal boat are successfully clamped.

[0008] The first type of crystal boat is a quartz crystal boat, and the clamping detection device comprises a fiber sensor group arranged on the first support of the first clamping jaw and the first support of the second clamping jaw to detect whether the quartz crystal boat is successfully clamped.

[0009] The second type of crystal boat is a silicon carbide crystal boat, and the clamping detection device comprises a pressure sensor group arranged on the second support of the first clamping jaw and the second support of the second clamping jaw to detect whether the silicon carbide crystal boat is successfully clamped.

[0010] The crystal boat clamping mechanism further comprises an opening jaw detection device for detecting whether the first clamping jaw (1) and the second clamping jaw (2) are away from each other to the maximum opening degree.

[0011] The opening jaw detection device comprises an inductive reed (15) arranged on the back of the electric jaw (6) and moving with the electric jaw (6), and a slot photoelectric sensor (16) arranged on the back of the electric jaw (6) and fixed in position.

[0012] The crystal boat clamping mechanism further comprises an image acquisition device for acquiring an image of the top of a wafer on a crystal boat to be clamped, and a control device for judging whether the wafer on the crystal boat to be clamped is tilted according to the image.

[0013] The control device controls the crystal boat clamping mechanism to clamp the crystal boat to be clamped when it is determined that the wafer on the crystal boat to be clamped is not tilted, and stops clamping the crystal boat to be clamped and issues an alarm when it is determined that the wafer on the crystal boat to be clamped is tilted.

[0014] The beneficial effects of the present application are as follows: The present application can adapt to crystal boats of different sizes by opening and closing the two clamping jaws, and can adapt to different types of crystal boats by arranging two supports, thereby improving the carrying efficiency of the crystal boat and being able to clamp crystal boats of different types and sizes, and having a wide range of applications. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 The figure is a perspective structural schematic view of the crystal boat clamping mechanism from one perspective of an embodiment of the present application; Figure 2 The figure is a perspective structural schematic view of the crystal boat clamping mechanism from another perspective of an embodiment of the present application; Figure 3 A schematic view of a wafer boat clamping mechanism clamping a quartz wafer boat according to an embodiment of the present application; Figure 4 A schematic view of a wafer boat clamping mechanism clamping a quartz wafer boat according to an embodiment of the present application; Figure 5 A schematic view of a wafer boat clamping mechanism clamping a silicon carbide wafer boat according to an embodiment of the present application; Figure 6 A schematic view of a wafer boat clamping mechanism clamping a silicon carbide wafer boat according to an embodiment of the present application; Figure 7 A schematic view of a wafer boat clamping mechanism clamping a silicon carbide wafer boat according to an embodiment of the present application;

[0016] Reference signs: First clamping jaw 1, second clamping jaw 2, first support 3, second support 4, guide plate support 5, electric jaw 6, support plate 7, linear guide rail 8, first sliding block 9, second sliding block 10, quartz wafer boat 11, silicon carbide wafer boat 12, optical fiber sensor 13, pressure sensor 14, inductive reed 15, groove photoelectric sensor 16, camera 17, lens 18, light source 19, controller 20, mounting bracket 21. DETAILED DESCRIPTION

[0017] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0018] As shown in the drawings, Figure 1 The wafer boat clamping mechanism according to an embodiment of the present application comprises a first clamping jaw 1 and a second clamping jaw 2. The first clamping jaw 1 and the second clamping jaw 2 are driven to approach or move away from each other to clamp or release an article. The first clamping jaw 1 and the second clamping jaw 2 each comprise a first support 3 and a second support 4. The first support 3 is adapted to clamp a first type of wafer boat, and the second support 4 is adapted to clamp a second type of wafer boat.

[0019] In an embodiment of the present application, as shown in the drawings, Figure 1 The first clamping jaw 1 and the second clamping jaw 2 each further comprise a guide plate support 5. The guide plate support 5 is provided with a wafer groove for accommodating a wafer. When the wafer boat clamping mechanism clamps a wafer boat, the edge portion of the wafer in the wafer boat can be accommodated in the wafer groove one by one, thereby improving the stability of the wafer during the conveying process.

[0020] Further, as shown in the drawings, Figure 2As shown, the wafer boat clamping mechanism of the embodiment of the present application can further include an electric claw 6, a support plate 7, a linear guide rail 8, a first sliding block 9 and a second sliding block 10. The linear guide rail 8 is fixed on the support plate 7, one end of the first clamping claw 1 is fixed on the first sliding block 9, one end of the second clamping claw 2 is fixed on the second sliding block 10, the first sliding block 9 and the second sliding block 10 are arranged in the guide rail groove on one side of the linear guide rail 8, the electric claw 6 is located on the other side of the linear guide rail 8, and the first sliding block 9 and the second sliding block 10 are driven by the electric claw 6 to slide on the linear guide rail 8 to drive the first clamping claw 1 and the second clamping claw 2 to approach or move away from each other.

[0021] In an embodiment of the present application, as shown in Figure 3 and Figure 4 , the first type of wafer boat is a quartz wafer boat 11, the first clamping claw 1 and the second clamping claw 2 approach each other until the two first supports 3 are matched with the two ends of the quartz wafer boat 11 to achieve clamping of the quartz wafer boat 11; the first clamping claw 1 and the second clamping claw 2 move away from each other to release the quartz wafer boat 11. The first support 3 is designed to be suitable for the shape of the quartz wafer boat 11 and has an arc-shaped groove corresponding to the arc-shaped protrusion of the quartz wafer boat 11 to achieve the matching of the two first supports 3 with the two ends of the quartz wafer boat 11 when clamping.

[0022] In an embodiment of the present application, as shown in Figure 5 and Figure 6 , the second type of wafer boat is a silicon carbide wafer boat 12, the first clamping claw 1 and the second clamping claw 2 approach each other until the two second supports 4 are matched with the two ends of the silicon carbide wafer boat 12 to achieve clamping of the silicon carbide wafer boat 12; the first clamping claw 1 and the second clamping claw 2 move away from each other to release the silicon carbide wafer boat 12. The second support 4 is designed to be suitable for the shape of the silicon carbide wafer boat 12 and has an L-shaped groove corresponding to the side wall of the silicon carbide wafer boat 12 to achieve the matching of the two second supports 4 with the two ends of the silicon carbide wafer boat 12 when clamping.

[0023] In an embodiment of the present application, the wafer boat clamping mechanism can further include a clamping detection device arranged on the first support 3 and the second support 4 to correspondingly detect whether the first type of wafer boat and the second type of wafer boat are successfully clamped.

[0024] Specifically, as shown in Figure 1 and Figure 2 , the clamping detection device includes an optical fiber sensor group arranged on the first support 3 of the first clamping claw 1 and the first support 3 of the second clamping claw 2 to detect whether the quartz wafer boat 11 is successfully clamped. The optical fiber sensor group here includes two optical fiber sensors 13 arranged on the first support 3 of the first clamping claw 1 and the first support 3 of the second clamping claw 2 respectively. The optical fiber sensor 13 can detect whether there is quartz at the position it measures, thereby judging whether the quartz wafer boat 11 is successfully clamped.

[0025] As shown in Figure 1 and Figure 2 , the clamping detection device includes a pressure sensor group arranged on the second support 4 of the first clamping jaw 1 and the second support 4 of the second clamping jaw 2 to detect whether the clamping to the silicon carbide crystal boat 12 is successful. The pressure sensor group here includes two pressure sensors 14 arranged on the second support 4 of the first clamping jaw 1 and the second support 4 of the second clamping jaw 2 respectively. The pressure sensor 14 can detect whether the position where it is arranged is subjected to external pressure, thereby judging whether the clamping to the silicon carbide crystal boat 12 is successful.

[0026] In an embodiment of the present application, the crystal boat clamping mechanism can further include an open jaw detection device for detecting whether the first clamping jaw 1 and the second clamping jaw 2 are away from each other to the maximum opening degree. That is, detecting whether the electric jaw 6 is opened to the maximum degree when driving to release the article.

[0027] Specifically, as shown in Figure 7 , the open jaw detection device includes a sensing reed 15 arranged on the back of the electric jaw 6 and moving with the electric jaw 6, and a slot photoelectric sensor 16 arranged on the back of the electric jaw 6 and fixed in position. Since the sensing reed 15 moves with the opening and closing of the electric jaw, while the slot photoelectric sensor 16 does not move with the opening and closing of the electric jaw, and the slot photoelectric sensor 16 is arranged at a position corresponding to the maximum opening degree of the electric jaw. When the electric jaw 6 is opened to the maximum degree, that is, whether the first clamping jaw 1 and the second clamping jaw 2 are away from each other to the maximum opening degree, the sensing reed 15 will reach the slot of the slot photoelectric sensor 16 and be detected by the slot photoelectric sensor 16; when the electric jaw 6 is not opened to the maximum degree, or has switched from the maximum opening degree to the closed state, the sensing reed 15 will leave the slot of the slot photoelectric sensor 16 and the slot photoelectric sensor 16 cannot detect the sensing reed 15. Therefore, by sensing the sensing reed 15 by the slot photoelectric sensor 16, it can be judged whether the first clamping jaw 1 and the second clamping jaw 2 are away from each other to the maximum opening degree.

[0028] Through the cooperation of the clamping detection device and the open jaw detection device, the detection of clamping in place and opening in place of the clamping mechanism can be realized. In the clamping process, the driving of the two clamping jaws away from each other is stopped until the successful clamping is judged. In the clamping or releasing process, the driving of the two clamping jaws away from each other is stopped until the maximum opening degree is judged, so that the article is better clamped and released.

[0029] In an embodiment of the present application, the crystal boat clamping mechanism can further include an image acquisition device for acquiring an image of the top of the wafer on the crystal boat to be clamped, and a control device for judging whether the wafer on the crystal boat to be clamped is tilted according to the image.

[0030] Specifically, as shown in Figure 1As shown, the image acquisition device includes a camera 17, a lens 18 and a light source 19 arranged above the electric claw 6 and facing the front of the electric claw 6. When the wafer boat clamping mechanism is to clamp the wafer boat to be clamped, it is moved to a pre-set position, and the wafer boat clamping mechanism is similar to Figure 4 and Figure 6 As shown, the angle of view faces the wafer boat, i.e. the face of the wafer towards the wafer boat clamping mechanism, and the height of the lens is slightly higher than the top of the wafer. At this time, the light source 19 can be turned on and the camera 17 can be started to acquire the image of the top of the wafer on the wafer boat. The control device is a controller 20 with image processing function. The control device can detect the lower arc line in the image (the arc line corresponding to the wafer closest to the lens 18) and the upper arc line (the arc line corresponding to the wafer farthest from the lens 18) at the lowermost and uppermost positions by edge detection algorithm, and then calculate the distance between the point at the uppermost position of the lower arc line and the point at the uppermost position of the upper arc line. Then, according to the total number of wafers on the wafer boat or the wafer boat, the number-length corresponding relationship table is searched to obtain the corresponding length. It should be noted that the number-length corresponding relationship table is pre-stored, which represents the corresponding relationship between the total number of wafers and the length of the image of the cylinder formed by the wafers under the corresponding camera angle of view when the planes of the wafers on the wafer boat are all perpendicular to the horizontal plane, i.e. no inclination occurs. Finally, the calculated distance is subtracted by the length obtained by looking up the table, and if the difference is greater than a pre-set threshold, it is determined that the wafers on the wafer boat to be clamped are inclined, otherwise it is determined that the wafers on the wafer boat to be clamped are not inclined. When the control device determines that the wafers on the wafer boat to be clamped are not inclined, the wafer boat clamping mechanism can be controlled to clamp the wafer boat to be clamped, and when the control device determines that the wafers on the wafer boat to be clamped are inclined, the wafer boat clamping mechanism stops clamping the wafer boat to be clamped and issues an alarm to prevent damage to the wafers during clamping or handling.

[0031] In addition, as shown in Figure 1 The wafer boat clamping mechanism of the embodiment of the present application can further include a mounting bracket 21, which can be used to install the wafer boat clamping mechanism as a whole on a movable mechanism such as a mechanical arm.

[0032] In use, first, under the driving of the mechanical arm, the wafer boat clamping mechanism is moved to the position of the wafer boat, and the horizontal distance and the vertical distance of the wafer boat clamping mechanism relative to the wafer boat are both at pre-set values. The light source 19 and the camera 17 are started to acquire images. When it is determined according to the images that the wafers on the wafer boat are not inclined, the first clamping jaw and the second clamping jaw are driven to approach each other. When the clamping detection device determines that the wafer boat is successfully clamped, the wafer boat clamping mechanism is driven by the mechanical arm to handle the wafer boat.

[0033] The crystal boat clamping mechanism according to the embodiment of the application can adapt to crystal boats of different sizes by opening and closing of the two clamping jaws, and can adapt to different types of crystal boats by the two types of supports, thereby improving the carrying efficiency of the crystal boats and being capable of clamping crystal boats of different types and sizes, and having a wide range of applications.

[0034] In the description of the present application, the terms "first", "second", "third" and the like are used only for the purpose of description, and should not be understood as indicating or implying relative importance or implying the number of the technical features indicated. Therefore, the features defined as "first", "second" and "third" can explicitly or implicitly include one or more of the features. The meaning of "plurality" is two or more, unless otherwise specifically limited.

[0035] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0036] In the present application, unless otherwise specifically defined and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0037] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms is not necessarily for the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or examples described in the present application and the features of the different embodiments or examples without contradiction.

[0038] Any processes or methods described in the flowcharts or otherwise described herein represent embodiments of processes that can be employed, and the claims are not limited to the precise steps or the order in which the steps are presented. It is possible, for example, that certain steps can be performed in an order other than that which is presented, or certain steps can be performed substantially simultaneously, or in reverse order, depending on the circumstances. It is also possible, for example, that certain steps can be performed by different entities than those presented, or that certain steps can be performed by a single entity, depending on the circumstances.

[0039] The logic and / or steps represented in the flowcharts or otherwise described herein, for example, can be embodied in non-transitory computer-readable media, which can be executed by an instruction execution system, apparatus, or device, such as a computer-based system, processor, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For purposes of this specification, a "computer-readable medium" can be any apparatus that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. The computer-readable medium can be a product of the manufacturing and / or processing. The computer-readable medium can include, but is not limited to, the following: an electronic connection (electrical) having one or more wires; a portable computer diskette (magnetic); a RAM; a ROM; an erasable programmable ROM (EPROM or Flash memory); an optical fiber; and a portable compact disc read-only memory (CDROM). The computer-readable medium can also be, or be included in, paper or other suitable material upon which the program is printed, as the program can be electronically captured, via for instance optical scanning of the paper or other suitable medium, then compiled, interpreted, or otherwise processed in a suitable manner, if necessary, and then stored in a computer memory.

[0040] It should be understood that aspects of the application can be implemented in hardware, software, firmware, or combinations thereof. In the above embodiments, various steps or methods can be implemented in software or firmware that is stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, any of the following technologies, known in the art, or combinations thereof, can be used: a discrete logic circuit having logic gates for implementing logic functions upon data signals, an application specific integrated circuit having appropriate combinational logic gates, a programmable gate array (PGA), a field programmable gate array (FPGA), or the like.

[0041] Those skilled in the art can understand that all or part of the steps of the method carried out by the above-mentioned embodiments can be instructed by a program to relevant hardware, and the program can be stored in a computer readable storage medium. When the program is executed, it includes one of the steps of the method embodiments or a combination thereof.

[0042] In addition, each functional unit in each embodiment of the present application can be integrated into one processing module, or each unit can exist physically alone, or two or more units can be integrated into one module. The integrated module can be realized in the form of hardware or in the form of a software functional module. When the integrated module is realized in the form of a software functional module and sold or used as an independent product, it can also be stored in a computer readable storage medium.

[0043] Although the embodiments of the present application have been shown and described above, it should be understood that the above-mentioned embodiments are exemplary and cannot be understood as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above-mentioned embodiments within the scope of the present application.

Claims

1. A crystal boat clamping mechanism, characterized by, The utility model relates to a kind of wafer boat clamping device, including first jaw (1) and second jaw (2), the first jaw (1) and the second jaw (2) are driven to each other close or far, to clamp or release article, the first jaw (1) and the second jaw (2) each include first support (3) and second support (4), the first support (3) is suitable for clamping first type crystal boat, the second support (4) is suitable for clamping second type crystal boat.

2. The wafer boat clamping mechanism of claim 1, wherein, The first jaw (1) and the second jaw (2) also each include guide piece support (5), and wafer groove for accommodating wafer is formed in the guide piece support (5).

3. The wafer boat clamping mechanism of claim 1 or 2, wherein, Further comprising: Electric claw (6); Supporting plate (7); Linear guide rail (8), the linear guide rail (8) is fixed on the supporting plate (7); First slider (9) and second slider (10), one end of the first jaw (1) is fixed on the first slider (9), one end of the second jaw (2) is fixed on the second slider (10), the first slider (9) and the second slider (10) are arranged in the guide rail groove of one side of the linear guide rail (8), the electric claw (6) is located on the other side of the linear guide rail (8), the first slider (9) and the second slider (10) are driven to slide on the linear guide rail (8) by the electric claw (6), to drive the first jaw (1) and the second jaw (2) to each other close or far.

4. The wafer boat clamping mechanism of claim 1 or 2, wherein, Further comprising: Clamping detection device, the clamping detection device is arranged on the first support (3) and the second support (4), to correspondingly detect whether the first type crystal boat and the second type crystal boat are clamped successfully.

5. The wafer boat clamping mechanism of claim 4, wherein, The first type crystal boat is quartz crystal boat (11), and the clamping detection device includes a group of optical fiber sensors, which are arranged on the first support (3) of the first jaw (1) and the first support (3) of the second jaw (2) to detect whether the quartz crystal boat (11) is clamped successfully.

6. The wafer boat clamping mechanism of claim 4, wherein, The second type crystal boat is silicon carbide crystal boat (12), and the clamping detection device includes a group of pressure sensors, which are arranged on the second support (4) of the first jaw (1) and the second support (4) of the second jaw (2) to detect whether the silicon carbide crystal boat (12) is clamped successfully.

7. The wafer boat clamping mechanism of claim 3, wherein, Further comprising: Claw opening detection device, the claw opening detection device is used to detect whether the first jaw (1) and the second jaw (2) are far away from each other to the maximum opening.

8. The wafer boat clamping mechanism of claim 7, wherein, The claw opening detection device includes: Induction reed (15) arranged on the back of the electric claw (6) and moving with the electric claw (6); Slot photoelectric sensor (16) arranged on the back of the electric claw (6) and fixed in position.

9. The wafer boat clamping mechanism of claim 1 or 2, wherein, Further comprising: Image acquisition device, the image acquisition device is used to acquire the image of the top of wafer on the crystal boat to be clamped; Control device, the control device is used to judge whether the wafer on the crystal boat to be clamped is inclined according to the image.

10. The wafer boat clamping mechanism of claim 9, wherein, The control device controls the wafer boat clamping mechanism to clamp the wafer boat to be clamped when it is determined that the wafer on the wafer boat to be clamped is not tilted, and stops clamping the wafer boat to be clamped when it is determined that the wafer on the wafer boat to be clamped is tilted, and issues a warning.

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