Temperature adjusting device

Abstract

The invention provides a temperature adjusting device capable of accurately ascertaining changes in the amount of circulating liquid flowing between the temperature adjusting device and a load and finding leakage of the circulating liquid at an early stage. A temperature control device (1) is provided with: a main container (20) for storing a circulating liquid (L); a circulation flow path (10) which conveys the circulation liquid in the container to a load (70) and receives the circulation liquid from the load and conveys the circulation liquid to the container; a circulation pump (23) for conveying the circulation liquid in the container to the load through the circulation flow path; a temperature control unit (8) that is provided in the circulation flow path and that controls the temperature of the circulation liquid for which the temperature of the load is adjusted; and a control unit (60) having a processor (61) that executes a leak detection process for detecting a leak of the circulating liquid. The container is provided with: a liquid level switch (55) for detecting the liquid level of the circulating liquid; and a liquid level reference position (Ps) disposed above the switch for starting detection of leakage of the circulating liquid. When the liquid level of the circulating liquid is detected by the switch within a first set time in the leak detection process, the processor outputs a first alarm signal as a signal that the circulating liquid leaks from the temperature adjusting device.

Description

Technical Field

[0001] The present invention relates to a temperature regulating device that controls the temperature of a load at a desired temperature by supplying a temperature-regulated circulating fluid to the load. Background Technology

[0002] Temperature control devices that regulate the temperature of a load to a desired temperature by supplying a temperature-conditioned circulating fluid to the load are well known, for example, as disclosed in Patent Document 1. In conventional temperature control devices, the circulating fluid used to regulate the temperature of the load is supplied from a main container to the load via a delivery path, the load is conditioned, and the conditioned circulating fluid is returned to a return path, where it is temperature-controlled by a heat exchanger, heater, etc., and then stored back in the main container. Furthermore, the main container is equipped with a level sensor, such as a level switch, for detecting the level of the circulating fluid. By detecting the level of the circulating fluid, it is possible to replenish the circulating fluid from a secondary container to the main container or to issue an alarm.

[0003] However, in temperature control devices that use fluorinated liquids as the circulating fluid, it is necessary to properly manage the amount of circulating fluid used, taking into account the environmental impact. In particular, in the event of leakage of the circulating fluid to the outside, there is a risk that it will also adversely affect the temperature control function of the temperature control device.

[0004] However, in the conventional temperature control device, it is difficult to detect leaks of the circulating fluid in the early stages because the amount of circulating fluid flowing between the device and the load cannot be accurately measured. Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 2005-106434 Summary of the Invention The problem that the invention aims to solve

[0005] Therefore, the technical challenge of this invention is to provide a temperature regulating device that can accurately control the change in the amount of circulating fluid flowing between the device and the load, and detect leakage of the circulating fluid at an early stage. Methods for solving problems

[0006] To address the aforementioned technical challenges, the present invention relates to a temperature regulating device for regulating the temperature of a load to a predetermined set temperature. The device is characterized by comprising: a main container storing a circulating liquid for regulating the temperature of the load; a circulation path for conveying the circulating liquid from the main container to the load and receiving circulating liquid that has regulated the load and conveying it back to the main container; a circulation pump for conveying the circulating liquid from the main container to the load through the circulation path; a temperature control unit disposed in the circulation path for controlling the temperature of the circulating liquid that has regulated the load; and a control unit having a processor for performing a leak detection process to detect leakage of the circulating liquid. The main container includes: a first liquid level detection sensor for detecting the liquid level of the circulating liquid stored in the main container; and a liquid level reference position disposed above the first liquid level detection sensor for initiating the leak detection process. During the leak detection process, if the liquid level of the main container is detected by the first liquid level detection sensor within a predetermined first set time, the processor outputs a first alarm signal as a signal that the circulating liquid is leaking from the temperature regulating device.

[0007] In this case, preferably, the temperature control unit includes: a heat exchanger that exchanges heat with the circulating liquid; and a heat exchange circuit that supplies the heat exchanger with a heat exchange medium for exchanging heat with the circulating liquid. Additionally, preferably, the temperature regulating device further includes: a secondary container housing the main container and storing the circulating liquid; and a supply pump that supplies the circulating liquid from the secondary container to the main container, wherein the liquid level reference position is defined by a through-hole disposed on the side wall of the main container and communicating between the interior of the main container and the interior of the secondary container, or by the upper edge of the side wall of the main container.

[0008] Alternatively, preferably, in the leakage detection process, if the first liquid level detection sensor does not detect the liquid level of the main container within the first set time, the processor causes the supply pump to drive for a pre-set second set time to supply the circulating liquid in the auxiliary container to the main container, thereby causing the liquid level of the circulating liquid in the main container to reach the liquid level reference position, and the leakage detection process is restarted.

[0009] Preferably, the circulation path includes: a conveying path connected to the main container for conveying the circulating liquid in the main container to the load; and a return path for receiving the circulating liquid that has been temperature-regulated for the load and returning it to the main container. A temperature sensor for detecting the temperature of the circulating liquid conveyed from the main container is provided in the conveying path of the circulation path. When the temperature regulation device starts operating, the processor performs a circulating liquid temperature monitoring process to monitor whether the temperature of the circulating liquid detected by the temperature sensor meets a predetermined condition. If the temperature of the circulating liquid meets the predetermined condition during the circulating liquid temperature monitoring process, the supply pump is driven for a preset second set time to supply the circulating liquid in the auxiliary container to the main container, thereby causing the liquid level of the circulating liquid in the main container to reach the liquid level reference position, and initiating the leak detection process. Preferably, the predetermined condition is that the temperature of the circulating liquid detected by the temperature sensor is maintained at the set temperature for a preset third set time.

[0010] In addition, preferably, during the execution of the leak detection process, if the temperature of the circulating fluid detected by the temperature sensor does not meet the set temperature, the processor stops the leak detection process and executes the circulating fluid temperature monitoring process.

[0011] Additionally, preferably, the secondary container is equipped with an upper limit liquid level sensor. The upper limit liquid level sensor detects the upper limit position where the liquid level of the circulating liquid stored in the secondary container is not in contact with the bottom of the main container. When the upper limit position is detected by the upper limit liquid level sensor, the processor outputs a second alarm signal as a signal that there is a risk of the circulating liquid in the secondary container contacting the main container. Invention Effects

[0012] By utilizing the temperature control device according to the present invention, it is possible to provide a temperature control device that can accurately control the change in the amount of circulating fluid flowing between the load and the system, thereby enabling early detection of leaks in the circulating fluid. Attached Figure Description Figure 1 This is a circuit diagram of a temperature regulating device according to an embodiment of the present invention, showing the state in which the circulating liquid in the main container is at the liquid level reference position. Figure 2 This is a magnified view of the upper part of the main container. Figure 3 This indicates a state where the circulating liquid in the secondary container is supplied to the main container, causing the main container to become full. Figure 4This indicates that the level of the circulating liquid in the main container has decreased, and the level of the circulating liquid is detected by a liquid level detection sensor. Figure 5 This is a flowchart of a processor used to detect leaks in the circulating fluid from the flow path when the temperature control device is operating. Detailed Implementation

[0013] Figures 1 to 5 This illustrates one embodiment of the temperature regulating device according to the present invention. Furthermore, in this embodiment, an example is given where the load is a semiconductor manufacturing apparatus and the circulating fluid used to cool the load is an insulating cooling medium (e.g., a fluorinated liquid).

[0014] like Figure 1 and Figure 2 As shown, the temperature regulating device 1 is configured to include: a housing 3 covering the outside of the temperature regulating device 1; a main container 20 storing circulating liquid L for regulating the temperature of the load 70; a circulation path 10 for conveying the circulating liquid L in the main container 20 to the load 70, and receiving the circulating liquid L that has regulated the temperature of the load 70 and conveying it to the main container 20; a circulation pump 23 for conveying the circulating liquid L in the main container 20 to the load 70 through the circulation path 10; a temperature control unit 8 disposed in the circulation path 10 for controlling the temperature of the circulating liquid L that has regulated the temperature of the load 70; a secondary container 40 containing the main container 20 and storing the circulating liquid L; a supply pump 51 for supplying the circulating liquid L in the secondary container 40 to the main container 20; and a control unit 60 having a processor 61 that performs a leak detection process for detecting leaks in the circulating liquid L. In this embodiment, the temperature control unit 8 includes: a heat exchanger 11 that exchanges heat with the circulating liquid L; a refrigeration circuit 30 (heat exchange circuit) that supplies the heat exchanger 11 with a cooling medium (heat exchange medium) that exchanges heat with the circulating liquid L; and a heater 24 that heats the circulating liquid L in the main container 20.

[0015] Furthermore, the aforementioned circulation path 10, main container 20, circulation pump 23, temperature control unit 8, auxiliary container 40, supply pump 51, and control unit 60 are housed within a single enclosure 3. Additionally, the enclosure 3 has the following openings on its side: a circulating liquid outlet 16a and a circulating liquid return outlet 14a for the circulation path 10; and a cooling water supply outlet 25a and a cooling water outlet 25b for supplying cooling water to the condenser 32 of the refrigeration circuit 30. This allows the piping 71, 71', 72, 72' of the user-side temperature control target device (load 70), etc., to be connected to these openings (ports) 16a, 14a, 25b, 25a.

[0016] At the bottom of the housing 3, there is a drain pan 4 for receiving leaked circulating liquid. The drain pan 4 is provided with a drain port 5 for discharging the circulating liquid accumulated in the drain pan 4 to the outside.

[0017] As mentioned above, the circulating fluid L uses an insulating cooling medium such as fluorinated liquid. This insulating cooling medium (fluorinated liquid) has the characteristic that its volume increases with increasing temperature. Alternatively, ethylene glycol or water can be used as the circulating fluid L. In this embodiment, the circulating fluid L in the main container 20 is transported to the load 70 via a transport flow path 16 connecting the main container 20 to the circulating fluid outlet 16a and a pipe 71 connecting the circulating fluid outlet 16a to the inlet 70a of the load 70. After cooling the load 70, the circulating fluid L is transported to the heat exchanger 11 via a pipe 71' connecting the outlet 70b of the load 70 to the circulating fluid return port 14a and a first return flow path 14 connecting the circulating fluid return port 14a to the heat exchanger 11 of the temperature control unit 8. The circulating fluid L, whose temperature is controlled by the heat exchanger 11, returns to the main container 20 via a second return flow path 15 connecting the heat exchanger 11 to the main container 20. That is, the circulation path 10 is configured to have a conveying path 16, piping 71, 71', a first return path 14, a heat exchanger 11, and a second return path 15.

[0018] The conveying flow path 16 connects the outlet 20a of the bottom wall 21 of the main container 20 with the circulating liquid outlet 16a. Pipe 71 connects the circulating liquid outlet 16a with the inlet 70a of the load 70. Pipe 71' connects the circulating liquid return port 14a with the outlet 70b of the load 70. The first return flow path 14 connects the circulating liquid return port 14a with the circulating liquid inlet 11a of the heat exchanger 11. The second return flow path 15 connects the circulating liquid outlet 11b of the heat exchanger 11 with the inlet 20b of the bottom wall of the main container 20.

[0019] Within the heat exchanger 11, a circulating liquid heat exchange path 12 is provided, connecting the circulating liquid inlet 11a and the circulating liquid outlet 11b. A first return path 14 and a second return path 15 are connected to this circulating liquid heat exchange path 12. Additionally, within the heat exchanger 11, a cooling medium heat exchange path 13 is provided, connecting the cooling medium inlet 11c and the cooling medium outlet 11d. A third circulation path 36 and a fourth circulation path 37, which will be described later in the refrigeration circuit (heat exchange circuit) 30, are connected to this cooling medium heat exchange path 13. The circulating liquid flowing in the circulating liquid heat exchange path 12 exchanges heat with the cooling medium flowing in the cooling medium heat exchange path 13 and is controlled to a predetermined temperature. The circulating liquid, controlled to the predetermined temperature, returns from the circulating liquid outlet 11b of the heat exchanger 11 to the main container 20 via the second return path 15.

[0020] In the first return flow path 14, a flow sensor 14b and a temperature sensor 14c for detecting the flow rate and temperature of the circulating fluid L are provided from upstream to downstream. These sensors 14b and 14c are electrically connected to the control unit 60. Additionally, in the delivery flow path 16, a pressure sensor 16b and a temperature sensor 16c for detecting the pressure and temperature of the circulating fluid L are provided from upstream to downstream. These sensors 16b and 16c are also electrically connected to the control unit 60.

[0021] The main container 20 has an opening at the top and is divided by a bottom wall 21 and a side wall 22, storing circulating fluid L inside. On the other hand, the auxiliary container 40 has a first end 40a and a second end 40b on both sides in the width direction, divided by a bottom wall 41, a side wall 42, and an upper wall 43. It has a larger volume than the main container 20, accommodating the entire main container 20 inside, and storing circulating fluid L. The main container 20 is positioned above the auxiliary container 40, near the first end 40a, with a gap extending above the bottom wall 21 of the main container 20. Therefore, a space 44 is formed within the auxiliary container 40 around the main container 20. In this embodiment, the space portion 44 includes: a lower space portion 44a formed between the bottom wall 41 of the sub-container 40 and the bottom wall 21 of the main container 20, a transverse space portion 44b formed on the side of the second end 40b of the sub-container 40, and an upper space portion 44c formed above the main container 20.

[0022] The lower space 44a stores circulating fluid L, the transverse space 44b houses a heat exchanger 11, and the upper space 44c houses various sensors, which will be described later.

[0023] The refrigeration circuit 30 of the temperature control unit 8 includes: a compressor 31 that compresses a gaseous cooling medium and forms it into a high-temperature, high-pressure gaseous cooling medium; a condenser 32 that cools the high-temperature, high-pressure gaseous cooling medium supplied from the compressor 31 and forms it into a low-temperature, high-pressure liquid cooling medium; a first expansion valve 33 that depressurizes the low-temperature, high-pressure liquid cooling medium supplied from the condenser 32 and forms it into a low-temperature, low-pressure liquid cooling medium; and a heat exchanger 11 (evaporator) that heats the low-temperature, low-pressure liquid cooling medium supplied from the first expansion valve 33 and forms it into a high-temperature, low-pressure gaseous cooling medium. In this embodiment, the heat exchanger 11 is part of the circulation path 10 and also part of the refrigeration circuit 30.

[0024] The refrigeration circuit 30 includes: a first cooling medium flow path 34 connecting the outlet 31b of the compressor 31 to the inlet 32a of the condenser 32; a second cooling medium flow path 35 connecting the outlet 32b of the condenser 32 to the inlet 33a of the first expansion valve 33; a third cooling medium flow path 36 connecting the outlet 33b of the first expansion valve 33 to the cooling medium inlet 11c of the heat exchanger 11; and a fourth cooling medium flow path 37 connecting the cooling medium outlet 11d of the heat exchanger 11 to the inlet 31a of the compressor 31. In the second cooling medium flow path 35, a pressure sensor 35a, a high-pressure sensor 35b, and a filter 35c are provided from its upstream side to its downstream side. These pressure sensors 35a and high-pressure sensors 35b are also electrically connected to the control unit 60.

[0025] Furthermore, a fifth cooling medium flow path 38 is provided between the third cooling medium flow path 36, downstream of the first expansion valve 33, and the first cooling medium flow path 34, connecting them. A second expansion valve 27 is provided in this fifth cooling medium flow path 38. Additionally, a sixth cooling medium flow path 39 is provided between the second cooling medium flow path 35, downstream of the filter 35c, and the compressor 31, connecting them. A third expansion valve 28 is provided in this sixth cooling medium flow path 39. Moreover, the second expansion valve 27 can be used to control the temperature regulation function of the cooling medium of the heat exchanger 11 relative to the circulating liquid L, and the third expansion valve 28 can be used to prevent the compressor 31 from overheating. The compressor 31 and the first to third expansion valves 33, 27, and 28 are also electrically connected to the control unit 60, which controls these compressors 31 and the first to third expansion valves 33, 27, and 28.

[0026] In this embodiment, the condenser 32 is a water-cooled condenser arranged along the outer surface of the side wall 42 of the sub-container 40, and is equipped with a heat dissipation circuit 25 for supplying industrial water. The heat dissipation circuit 25 has: a heat dissipation water supply path 25c connecting the heat dissipation water supply port 25a and the heat dissipation water inlet 32c of the condenser 32; and a heat dissipation water discharge path 25d connecting the heat dissipation water outlet 25b and the heat dissipation water outlet 32d of the condenser 32. A water control valve 25e is provided in the heat dissipation water discharge path 25d. This water control valve 25e is also electrically connected to the control unit 60, and the temperature of the cooling medium can be controlled by controlling the opening degree of the water control valve 25e by the control unit 60. Alternatively, the condenser 32 may also be an air-cooled type.

[0027] In the sub-container 40, a supply pump 51 is provided to supply the circulating liquid L in the sub-container 40 to the main container 20. In this embodiment, the supply pump 51 is a submersible pump that draws the circulating liquid L from the sub-container 40 into the main container 20, and is arranged vertically within the transverse space 44b on the second end 40b side of the sub-container 40. A discharge port 51a is provided at the upper part of the supply pump 51 for discharging the drawn circulating liquid L from the sub-container 40 into the main container 20. The supply pump 51 is also electrically connected to the control unit 60.

[0028] Inside the secondary container 40, there are a total of three level switches 52, 53, and 54: one located near the lower part of the upper wall 43 of the secondary container 40, one located near the lower part of the bottom wall 21 of the main container 20, and one located above the bottom wall 41 of the secondary container 40. In this embodiment, these level switches 52, 53, and 54 are float-type level switches and are electrically connected to the control unit 60. Details regarding the float-type level switches will be explained later. In addition, on the side wall 42 of the secondary container 40 at the first end 40a, there is a level gauge 45 that allows visual confirmation of the volume of circulating liquid L in the secondary container 40 from the outside of the tank 3; and a circulating liquid inlet 46 for replenishing the secondary container 40 with circulating liquid L from the outside of the tank 3.

[0029] Additionally, a discharge pipe 47 extending outward is provided at the bottom of the side wall 42 on the first end 40a side of the sub-container 40, and a drain valve 47a is installed at the end of the discharge pipe 47. By opening the drain valve 47a, the circulating liquid L in the sub-container 40 can be discharged to the outside. Among the three level switches 52, 53, and 54, the level switch 52, located near the lower part of the upper wall 43, is a switch that detects the level of the circulating liquid L in the sub-container 40 when it is approximately full. The level switch (upper limit level sensor) 53, located near the lower part of the bottom wall 21 of the main container 20, is a switch that detects that the level of the circulating liquid L stored in the sub-container 40 will not reach the upper limit position of the bottom of the main container 20. The level switch 54, located at the bottom of the sub-container 40, is a switch that detects the lower limit of the circulating liquid L stored in the sub-container 40. Furthermore, when the level of the circulating liquid L in the secondary container 40 is detected by the three level switches 52, 53, and 54, the processor 61 issues an alarm to urge the replenishment of circulating liquid to the secondary container 40 from the circulating liquid inlet 46, or to open the drain valve 47a to discharge the circulating liquid L from the secondary container 40. Details of this alarm will be described later.

[0030] In the main container 20, a submersible circulation pump 23 is provided to supply circulating liquid L to the conveying flow path 16 of the circulation flow path 10. This circulation pump 23 is also electrically connected to the control unit 60. Additionally, a heater 24 (temperature control unit 8) is provided on the upper wall 43 of the sub-container 40. The heater 24 heats the circulating liquid L stored in the main container 20 from a position at the middle of its vertical direction. Furthermore, a temperature fuse 26 is provided on the upper wall 43 of the sub-container 40, located in the upper space 44c above the main container 20. The heater 24 and the temperature fuse 26 are also electrically connected to the control unit 60. Therefore, for example, when the temperature of the air inside the main container 20 is higher than a preset predetermined temperature, the processor 61 determines that the circulating liquid L is in an overheated state and can perform controls such as shutting off the power to the temperature regulating device 1.

[0031] Furthermore, on the upper wall 43 of the secondary container 40, two level switches 55 and 56 are provided, one above the other, located in the upper part of the main container 20. These level switches 55 and 56 are also electrically connected to the control unit 60. The level of the circulating liquid L in the main container 20 can be detected using these level switches 55 and 56. The upper level switch 55 (first level detection sensor) detects the level of the circulating liquid L in the main container 20, thereby allowing the processor 61 to detect leakage of the circulating liquid L from the temperature control device 1. Leakage of the circulating liquid L from the temperature control device 1 will be described later. The level switch 56 is positioned lower than the level switch 55 and detects the lower limit of the circulating liquid L stored in the main container 20.

[0032] like Figure 1 and Figure 2 As shown, a connecting hole 22a is provided on the upper part of the side wall 22 of the main container 20 on the side of the first end 40a of the secondary container 40. This connecting hole 22a penetrates the side wall 22 and communicates with a gap 48 formed between the side wall 22 of the main container 20 and the opposite side wall 42 of the secondary container 40. The gap 48 extends vertically and communicates with the circulating fluid inlet 46 and the lower space 44a. Thus, the circulating fluid L discharged from the connecting hole 22a returns to the secondary container 40 through the gap 48. Furthermore, the liquid level of the circulating fluid L in the main container 20 can be maintained at the same position as the connecting hole 22a using this connecting hole 22a.

[0033] Hereinafter, the position of the connecting hole 22a relative to the main container 20 will be referred to as the "liquid level reference position Ps". In this embodiment, since the connecting hole 22a has an opening extending in the vertical direction, the liquid level reference position Ps is defined at the lower end of the connecting hole 22a. This liquid level reference position Ps serves as the reference position when starting to detect leakage of circulating fluid L from the temperature control device 1. Alternatively, the liquid level reference position Ps may also be defined at the upper edge of the side wall 22 of the main container 20. In this case, the connecting hole 22a is not required.

[0034] The level switch 55 is positioned at a predetermined distance h below the level reference position Ps. This predetermined distance h is, for example, determined by taking into account the amount of circulating fluid L leaking from the temperature control device 1 per unit time.

[0035] As mentioned above, these level switches 52 to 56 are, for example, float-type level switches. Furthermore, since level switches 52 to 56 each have the same structure, level switch 55 will be described below. The float-type level switch 55 is configured such that a magnet is provided on the inner surface of the float 55a, and a reed switch is disposed within a rod 55b that movably supports the float 55a. When the float 55a moves up and down relative to the rod 55b, the magnetic field generated by the magnet causes the reed switch to operate on / off. Additionally, limiters (not shown) are provided on the rod 55b, on the upper and lower sides of the float 55a, to limit the up and down movement of the float 55a. Level switch 56 is positioned below level switch 55 and detects the lower limit of the circulating liquid L stored in the main container 20.

[0036] Next, the control unit 60 with processor 61 will be described, which performs a leak detection process for detecting leaks in the circulating fluid L.

[0037] like Figure 1 and Figure 5As shown, when the temperature regulating device 1 starts running, the processor 61 performs a circulating fluid temperature monitoring process. This process monitors whether the temperature of the circulating fluid L in the main container 20, detected by the temperature sensor 16c, meets a predetermined condition (step 1). In this embodiment, the predetermined condition is that the temperature of the circulating fluid L detected by the temperature sensor 16c is maintained at a preset set temperature for a predetermined time (a third predetermined time, for example, 3 hours). Furthermore, in the circulating fluid temperature monitoring process, if the detected temperature of the circulating fluid L does not meet the set temperature, step 1 is repeated. Alternatively, if the temperature of the circulating fluid L does not meet the set temperature, the processor 61 may control the temperature of the cooling medium flowing in the heat exchanger 11 in the cooling circuit 30 to control the temperature of the circulating fluid L, or the heater 24 may be used to control the temperature of the circulating fluid L in the main container 20. Additionally, the set temperature may be set to have a predetermined allowable range.

[0038] Furthermore, in the circulating fluid temperature monitoring process, when the circulating fluid L meets the specified conditions, the processor 61 proceeds to step 2, initiating level detection of the circulating fluid L by the level switch 55. The processor 61 then drives the supply pump 51 for a preset time (a second preset time, e.g., 4 seconds) to supply the circulating fluid from the auxiliary container 40 to the main container 20 (step 3). Thus, for example, the level of the circulating fluid L in the main container 20 changes from the state detected by the level switch 55 (see...) Figure 3 The liquid level shifts upwards to reach the reference position Ps (reference). Figure 4 Furthermore, even if the circulating liquid L supplied to the main container 20 exceeds the liquid level reference position Ps during the operation of the supply pump 51, the circulating liquid L will flow out from the connecting hole 22a into the auxiliary container 40. Therefore, the liquid level of the circulating liquid L in the main container 20 can be maintained at the liquid level reference position Ps.

[0039] Furthermore, the processor 61 initializes the timer that keeps track of elapsed time in sync with the end of the supply of circulating fluid L by the supply pump 51 (step 4), and begins the leak detection process (steps 5 to 7).

[0040] When the processor 61 starts the leak detection process, it determines whether the temperature of the circulating fluid L detected by the temperature sensor 16c meets the set temperature (step 5). If the temperature of the circulating fluid L meets the set temperature, the leak detection process continues and proceeds to step 6. If the temperature of the circulating fluid L does not meet the set temperature, the leak detection process is stopped, and the processor returns to step 1 and executes the circulating fluid temperature monitoring process.

[0041] If the temperature of the circulating liquid L meets the set temperature in step 5, the process proceeds to step 6, where the processor 61 determines whether the level of the circulating liquid L in the main container 20 is detected by the level switch 55. If the processor 61 determines that the level of the circulating liquid L in the main container 20 is not detected by the level switch 55, the process proceeds to step 7, where it determines whether the elapsed time since the timer was initialized has exceeded a preset first set time (e.g., 1 hour). If the processor 61 determines that the elapsed time is within the first set time, it returns to step 5 and continues the leak detection process.

[0042] On the other hand, in the leak detection process, if the processor 61 determines that the level of the circulating liquid L in the main container 20 is detected by the level switch 55 (step 6), it proceeds to step 8 and outputs a first alarm signal as a signal that the circulating liquid L is leaking from the temperature control device 1. Here, when the processor 61 outputs the first alarm signal, the processor can, for example, cause the display device or speaker installed in the control unit 60 to output a display or sound to inform that the circulating liquid L is leaking, or stop the operation of the temperature control device 1.

[0043] Thus, in the leak detection and handling process, by detecting the change in the liquid level of the circulating liquid L within a first predetermined time period using the liquid level switch 55, the change in the amount of circulating liquid L flowing between the load 70 and the temperature control device 1 can be accurately determined. Consequently, the processor 61 can output a first alarm signal as a signal of leakage of circulating liquid L from the temperature control device 1 based on the liquid level detection of the circulating liquid L by the liquid level switch 55.

[0044] Additionally, in step 6, if the processor 61 determines that the level of the circulating liquid L in the main container 20 is detected by the level switch 55, and if the elapsed time since the timer was initialized exceeds the first set time (e.g., 1 hour) (step 7), it causes the supply pump 51 to drive for the second set time to supply the circulating liquid L in the auxiliary container 40 to the main container 20, thereby causing the level of the circulating liquid L in the main container 20 to reach the level reference position Ps, and the leak detection process is started again.

[0045] Furthermore, during the operation of the temperature control device 1, when the level switch 53 (upper limit level sensor) installed in the secondary container 40 detects the upper limit position of the circulating liquid in the secondary container 40, the processor 61 outputs a second alarm signal indicating a risk that the circulating liquid L in the secondary container 40 may come into contact with the main container 20. This is because when the circulating liquid L in the secondary container 40 comes into contact with the main container 20, heat exchange occurs between them, and the temperature of the circulating liquid L in the main container 20 may change. In this case, similar to the case of the first alarm signal, the processor 61 may output a display or sound from the display device, speaker, etc., installed in the control unit 60 to inform the user that the circulating liquid has come into contact with the main container 20, or may stop the operation of the temperature control device 1.

[0046] As described above, the temperature regulating device 1 can be provided as follows: in the leakage detection process, the liquid level of the circulating liquid L in the main container 20 is detected by the liquid level switch 55 within a specified time, thereby accurately grasping the change in the amount of circulating liquid L flowing between the load 70 and the container 20, and enabling early detection of leakage of the circulating liquid L.

[0047] Furthermore, in the above embodiment, a temperature control unit 8 is shown that has a refrigeration circuit 30 (heat exchange circuit) that supplies a cooling medium for heat exchange with the circulating liquid L to the heat exchanger 11; however, it is not limited to this. The temperature control unit 8 may also have a heat exchange circuit that connects the heat dissipation water supply path 25c and the heat dissipation water discharge path 25d of the heat dissipation circuit 25 to the heat exchanger 11 in a manner that directly supplies cooling water to the heat exchanger 11. Explanation of reference numerals in the attached figures 1 Temperature control device 8 Temperature Control Section 10 Circulating Flow Paths 11. Heat Exchanger (Temperature Control Unit) 14 First Return Flow Path (Return Flow Path) 15. Second Return Flow Path (Return Flow Path) 16Conveying flow path 16C temperature sensor 20 main container 22 sidewalls 22a connecting hole 22b upper edge 23 Circulating Pump 24. Heater (Temperature Control Unit) 30. Refrigeration circuit (temperature control unit, heat exchange circuit) 40 containers 51 supply pump 53 Liquid Level Switch (Upper Limit Liquid Level Sensor) 55 Liquid Level Switch (First Liquid Level Detection Sensor) 60 Control Department 61 processor 70 load L circulating fluid Ps Liquid level reference position Claims (as amended under Article 19 of the Treaty) 1. A temperature regulating device for regulating the temperature of a load to a predetermined set temperature, characterized in that, The temperature regulating device has: The main container stores the circulating fluid used to regulate the temperature of the load; The circulation path delivers the circulating liquid in the main container to the load, and receives the circulating liquid that has been temperature-regulated for the load and delivers it to the main container; A circulation pump delivers the circulating liquid in the main container to the load through the circulation flow path; A temperature control unit, disposed in the circulation path, controls the temperature of the circulating fluid for which the load has been conditioned; and The control unit includes a processor that performs leak detection processing to detect leaks in the circulating fluid. The main container includes: a first liquid level detection sensor for detecting the liquid level of the circulating liquid stored in the main container; and a liquid level reference position disposed above the first liquid level detection sensor for initiating the leak detection process. This liquid level reference position is defined by the lower end of a through-hole disposed in the side wall of the main container, or by the upper edge of the side wall of the main container. In the leak detection process, if the liquid level of the main container is detected by the first liquid level detection sensor within a preset first set time period, the processor outputs a first alarm signal as a signal that the circulating liquid is leaking from the temperature control device. 2. The temperature regulating device as described in claim 1, characterized in that, The temperature control unit includes: a heat exchanger that exchanges heat with the circulating liquid; and a heat exchange circuit that supplies the heat exchanger with a heat exchange medium for exchanging heat with the circulating liquid. 3. The temperature regulating device as described in claim 1, characterized in that, The temperature regulating device further comprises: a secondary container internally configured with the main container and storing circulating liquid; and a supply pump for supplying the circulating liquid in the secondary container to the main container. The connecting hole connects the interior of the main container with the interior of the secondary container. 4. The temperature regulating device as described in claim 3, characterized in that, In the leak detection process, if the first liquid level detection sensor does not detect the liquid level of the main container within the first set time, the processor causes the supply pump to drive for a pre-set second set time to supply the circulating liquid in the auxiliary container to the main container, thereby causing the liquid level of the circulating liquid in the main container to reach the liquid level reference position, and the leak detection process is restarted. 5. The temperature regulating device as described in claim 3, characterized in that, The circulation path includes: a conveying path connected to the main container for conveying the circulating liquid in the main container to the load; and a return path for receiving the circulating liquid that has been temperature-conditioned by the load and returning it to the main container. In the conveying flow path of the circulating flow path, a temperature sensor is provided to detect the temperature of the circulating liquid conveyed from the main container. When the processor starts operating the temperature regulation device, it performs a circulating fluid temperature monitoring process to monitor whether the temperature of the circulating fluid detected by the temperature sensor meets the specified conditions. If the temperature of the circulating fluid meets the specified conditions during the circulating fluid temperature monitoring process, the processor drives the supply pump for a pre-set second time to supply the circulating fluid in the auxiliary container to the main container, thereby causing the liquid level of the circulating fluid in the main container to reach the liquid level reference position, and the leakage detection process begins. 6. The temperature regulating device as described in claim 5, characterized in that, The specified condition is that the temperature of the circulating fluid detected by the temperature sensor is maintained at the set temperature for a predetermined third specified time. 7. The temperature regulating device as described in claim 5 or 6, characterized in that, During the execution of the leak detection process, if the temperature of the circulating fluid detected by the temperature sensor does not meet the set temperature, the processor stops the leak detection process and executes the circulating fluid temperature monitoring process. 8. The temperature regulating device as described in claim 3, characterized in that, The secondary container is equipped with an upper limit level sensor, which detects the upper limit position where the level of the circulating liquid stored in the secondary container is not in contact with the bottom of the main container. When the upper limit position is detected by the upper limit liquid level sensor, the processor outputs a second alarm signal as a signal that there is a risk of the circulating liquid in the secondary container coming into contact with the main container.

Claims

1. A temperature adjustment device for adjusting a temperature of a load to a prescribed set temperature, characterized by comprising: a main container that stores a circulating liquid used for temperature adjustment of the load; a circulating flow path that transports the circulating liquid in the main container to the load and receives the circulating liquid that has been subjected to temperature adjustment of the load and transports it to the main container; a circulating pump that transports the circulating liquid in the main container to the load through the circulating flow path; a temperature control section that is provided to the circulating flow path and controls a temperature of the circulating liquid that has been subjected to temperature adjustment of the load; and a control section that has a processor that executes a leakage detection process that detects leakage of the circulating liquid, wherein the main container has a first liquid level detection sensor that detects a liquid level of the circulating liquid stored in the main container, and a liquid level reference position that is provided at a position higher than the first liquid level detection sensor and is used to start the leakage detection process, and wherein in the leakage detection process, the processor outputs a first alarm signal that is a signal indicating leakage of the circulating liquid from the temperature adjustment device, when the liquid level of the main container is detected by the first liquid level detection sensor within a first set time that is set in advance.

2. The temperature adjustment device according to claim 1, characterized in that the temperature control section includes a heat exchanger that exchanges heat with the circulating liquid, and a heat exchange circuit that supplies a heat exchange medium used for heat exchange with the circulating liquid to the heat exchanger.

3. The temperature adjustment device according to claim 1, characterized by further comprising a sub container that houses the main container inside and stores the circulating liquid, and a supply pump that supplies the circulating liquid in the sub container to the main container, wherein the liquid level reference position is defined by a communication hole that is provided through a side wall of the main container and communicates the inside of the main container with the inside of the sub container, or an upper end edge of the side wall of the main container.

4. The temperature adjustment device according to claim 3, characterized in that in the leakage detection process, when the liquid level of the main container is not detected by the first liquid level detection sensor within the first set time, the processor drives the supply pump for a second set time that is set in advance, supplies the circulating liquid in the sub container to the main container, thereby bringing the liquid level of the circulating liquid in the main container to the liquid level reference position, and starts the leakage detection process again.

5. The temperature adjustment device according to claim 3, characterized in that the circulating flow path has a transport flow path that is connected to the main container and transports the circulating liquid in the main container to the load, and a return flow path that receives the circulating liquid that has been subjected to temperature adjustment of the load and returns it to the main container, wherein in the transport flow path of the circulating flow path, a temperature sensor that detects a temperature of the circulating liquid transported from the main container is provided. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ The processor, when starting operation of the temperature adjustment device, executes a circulating liquid temperature monitoring process of monitoring whether the temperature of the circulating liquid detected by the temperature sensor satisfies a prescribed condition, and in a case where the temperature of the circulating liquid satisfies the prescribed condition in the circulating liquid temperature monitoring process, causes the supply pump to be driven for a second set time set in advance, supplies the circulating liquid in the sub-tank to the main tank, thereby causing the liquid level of the circulating liquid in the main tank to reach the liquid level reference position, and starts the leakage detection process.

6. The temperature adjustment device according to claim 5, wherein the prescribed condition is that the temperature of the circulating liquid detected by the temperature sensor is maintained in a state where the set temperature is satisfied for a third prescribed time set in advance.

7. The temperature adjustment device according to claim 5 or 6, wherein in a case where the temperature of the circulating liquid detected by the temperature sensor does not satisfy the set temperature during execution of the leakage detection process, the processor suspends the leakage detection process and executes the circulating liquid temperature monitoring process.

8. The temperature adjustment device according to claim 3, wherein the sub-tank is provided with an upper limit liquid level sensor that detects an upper limit position where the liquid level of the circulating liquid stored in the sub-tank does not contact the bottom of the main tank, when the upper limit position is detected by the upper limit liquid level sensor, the processor outputs a second alarm signal that is a signal of a risk that the circulating liquid in the sub-tank comes into contact with the main tank.

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