Dust removal filter, fine silicon powder inert treatment system and treatment method

Abstract

The invention discloses a dust removal filter, a fine silicon powder inert treatment system and a fine silicon powder inert treatment method, and relates to the technical field of process dust removal in industrial production. The filter bag is arranged in the shell, the simple harmonic mechanism is arranged on the shell and used for tensioning or loosening the filter bag, the blowing air bag is arranged on the side wall of the shell, the nozzle is arranged at the bottom of the shell and communicated with the blowing air bag, and the nozzle is arranged right opposite to the ash removal opening; the fine silicon powder inert treatment system comprises a crystal pulling furnace, a dust removal filter, a centralized dust collector, a buffer tank for temporarily storing and isolating dust, and an inflammable dust centralized harmless treatment device which are communicated in sequence; the invention relates to a fine silicon powder inert treatment method, which comprises the following steps: filtering gas in a crystal pulling furnace, carrying out rapping ash removal and back flushing ash removal on a filter bag, carrying out secondary filtering after ash removal, temporarily storing and isolating dust, oxidizing the dust and carrying out harmless treatment on the dust, so that residual inflammable dust on the inner side of the filter bag is removed in two ways; and the burning-through risk of the filter bag is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of process dust removal in the industrial production of single crystal silicon, polycrystalline silicon, heavily doped silicon single crystal and the like, and particularly relates to a dust removal filter, a fine silicon powder inert treatment system and a treatment method. BACKGROUND

[0002] In the production of the semiconductor industry, especially in the process of pulling crystals in the production of single crystal silicon, polycrystalline silicon and heavily doped silicon single crystal, inert gas is often used as a protective atmosphere in order to protect the process environment and equipment. These gases need to be purified by a filter before being recycled, and a large amount of fine dust generated in the process is collected. These dusts are mainly composed of silicon powder and other materials, which are extremely flammable and explosive, and pose a great hidden danger to production safety. The resistance of the filter bag of the existing dust removal filter gradually increases, which seriously affects the quality of the crystal bar and the power consumption of the downstream equipment, such as the decrease of the crystal formation rate, the decrease of the original crystal yield, the decrease of the single crystal yield, the increase of the oxygen content, the low efficiency of manual dust cleaning, the misoperation caused by incomplete oxidation of the dust in the dust removal filter, and the burning of the filter bag. This makes it impossible to guarantee the safety and sustainability of production, and seriously affects the production.

[0003] Therefore, it is necessary to develop and design a dust removal filter, a fine silicon powder inert treatment system and a treatment method, and to set up a dust collector self-cleaning system, which can not only reduce the resistance of the dust collector, improve the quality of the crystal bar, and reduce the power consumption, but also improve the dust conveying efficiency, which is a technical problem that needs to be solved by the technical personnel in the field. SUMMARY

[0004] In order to solve the above problems, the present application provides a dust removal filter, a fine silicon powder inert treatment system and a treatment method, which sets up a dust collector self-cleaning system, which can not only reduce the resistance of the dust collector, improve the quality of the crystal bar, and reduce the power consumption, but also improve the dust conveying efficiency.

[0005] To achieve the above-mentioned purpose, the present application provides the following solutions:

[0006] A dust removal filter, comprising a shell, a dust removal port, a first air outlet and an air inlet arranged on the shell respectively, a filter bag arranged inside the shell, a simple harmonic mechanism arranged on the shell for tensioning or relaxing the filter bag, a blowing gas bag arranged on the side wall of the shell, a nozzle arranged at the bottom of the shell and communicating with the blowing gas bag, and a control system for controlling the opening and closing of the dust removal port, the air inlet and the first air outlet, wherein the nozzle is arranged opposite to the dust removal port, and the communication end of the blowing gas bag with the shell is arranged at the end of the filter bag away from the air inlet.

[0007] Preferably, the simple harmonic mechanism comprises a support arranged on the inner wall of the shell, a fixed hanger arranged on the support, a movable hanger arranged below the fixed hanger for fixing one end of the filter bag, a spring arranged between the fixed hanger and the movable hanger, and a first air cylinder arranged at the top of the shell and having an output end connected with the movable hanger.

[0008] Preferably, a guide mechanism is further arranged on the fixed hanger, one end of the guide mechanism is connected with the movable hanger, and the other end of the guide mechanism is in sliding connection with the fixed hanger.

[0009] Preferably, the first air outlet is in communication with the blowing air bag, a second air outlet is arranged on the blowing air bag, the air inlet is arranged at a position close to the bottom of the shell, and the first air outlet and the second air outlet are arranged at positions close to the top of the shell.

[0010] Preferably, the nozzles are arranged in four, and are uniformly arranged on the side wall of the bottom of the shell away from the ash removal port.

[0011] The application further discloses a fine silicon powder inert treatment system, and the dust removal filter is applied, and the system comprises a crystal pulling furnace, the dust removal filter, a central dust collector, a buffer tank for temporarily storing and isolating dust, and a combustible dust central harmless treatment device which are sequentially connected, the first air outlet is connected with a first vacuum pump, a crystal pulling furnace air outlet of the crystal pulling furnace is connected with a second vacuum pump through a first filter cartridge filter, and a central dust collector air outlet of the central dust collector is connected with a third vacuum pump through a second filter cartridge filter.

[0012] Preferably, the central dust collector comprises a cylinder body, a stainless steel filter cartridge arranged in the cylinder body, and a conical ash hopper arranged below the cylinder body.

[0013] The conical ash hopper comprises a second air cylinder arranged on the outer wall of the conical ash hopper, a first connecting rod and a second connecting rod connected with the output end of the second air cylinder, a first ratchet mechanism and a second ratchet mechanism connected with the first connecting rod and the second connecting rod respectively, and an ash hopper spiral shaft penetrating through the middle parts of the first ratchet mechanism and the second ratchet mechanism, and the first ratchet mechanism and the second ratchet mechanism are used for ensuring that the ash hopper spiral shaft rotates in one direction.

[0014] Preferably, a sweeping rod is sleeved on the ash hopper spiral shaft, and an end of the sweeping rod is provided with a sweeping brush matched with the inside of the conical ash hopper.

[0015] Preferably, a back-blowing air bag is arranged on the outer wall of the cylinder body, and the back-blowing air bag is in communication with the inside of the cylinder body.

[0016] The application also discloses a micro-silicon powder inert treatment method.

[0017] The inert protective gas in the crystal pulling furnace enters the dust removal filter through a pipeline for filtering operation;

[0018] After the filtering operation is completed, the filter bag is pulled tight and the dust is removed and back-blowing is performed;

[0019] During the crystal pulling process, the filter bag is vibrated to remove the dust or the filter bag is vibrated to remove the dust and back-blowing is performed after the crystal pulling is completed;

[0020] After the dust removal is completed, the dust is transported to a centralized dust collector for centralized collection and secondary filtering;

[0021] When oxidation is needed, the dust is transported from the temporary storage tank to the combustible dust centralized harmless treatment device for oxidation and humidification;

[0022] Finally, the dust is discharged from the combustible dust centralized harmless treatment device.

[0023] The application has the following technical effects compared with the prior art:

[0024] After the inert protective gas carrying the dust volatilized from the heated silicon material enters the shell from the air inlet, the inert protective gas is filtered through the filter bag, the filtered gas is discharged through the first air outlet, after the filtering operation is completed, the air inlet and the first air outlet are closed through the control system, the dust removal operation of the filter bag is started, the resistance of the filter bag is prevented from becoming large, the filter bag is instantly tightened from the relaxed state through the simple harmonic mechanism, the dust attached to the filter bag is removed through vibration, then the inert gas in the blowing gas bag is blown into the shell through the communication port at the top of the upper shell to blow off the remaining dust attached to the filter bag, the dust removal operation of the filter bag is completed, the residual combustible dust inside the filter bag is removed through the two ways, the risk of burning through the filter bag is reduced, when the dust needs to be discharged, the control system opens the dust removal port due to the fact that the nozzle is arranged opposite to the dust removal port, the dust is blown out of the dust removal port to the next stage equipment under the cooperation of the nozzle. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without any creative labor.

[0026] ATTACHMENT Figure 1 The figure is a schematic diagram of the overall structure of the micro-silicon powder inert treatment system disclosed by the application.

[0027] Figure 1 is a front view of the dust filter according to the present application. Figure 2 Figure 2 is a sectional view of the dust filter according to the present application.

[0028] Figure 3 is a front view of the dust collector according to the present application. Figure 3 Figure 4 is a sectional view of the dust collector according to the present application.

[0029] Figure 5 is a front view of the cone-shaped ash hopper according to the present application. Figure 4 Figure 6 is a sectional view of the cone-shaped ash hopper according to the present application.

[0030] Figure 7 is a front view of the buffer tank according to the present application. Figure 5 Figure 8 is a sectional view of the buffer tank according to the present application.

[0031] Figure 9 is a front view of the combustible dust harmless treatment device according to the present application. Figure 6 Figure 10 is a rear view of the combustible dust harmless treatment device according to the present application.

[0032] Figure 11 is a sectional view of the combustible dust harmless treatment device according to the present application. Figure 7 Figure 12 is a plan view of the combustible dust harmless treatment device according to the present application.

[0033] Figure 13 is a front view of the chain scraper according to the present application. Figure 8 Figure 14 is a plan view of the chain scraper according to the present application.

[0034] Figure 15 is a sectional view of the chain scraper according to the present application. Figure 9 Figure 16 is a plan view of the louver dust discharging mechanism according to the present application.

[0035] Figure 17 is a front view of the louver dust discharging mechanism according to the present application. Figure 10 Figure 18 is a plan view of the louver dust discharging mechanism according to the present application.

[0036] Figure 19 is a front view of the spiral humidifier according to the present application. Figure 11 Figure 20 is a plan view of the spiral humidifier according to the present application.

[0037] Figure 21 is a sectional view of the spiral humidifier according to the present application. Figure 12 Figure 22 is a plan view of the spiral humidifier according to the present application.

[0038] Figure 23 is a front view of the louver dust discharging mechanism according to the present application. Figure 13 Figure 24 is a plan view of the louver dust discharging mechanism according to the present application.

[0039] Figure 25 is a front view of the louver dust discharging mechanism according to the present application. Figure 14 Figure 26 is a plan view of the louver dust discharging mechanism according to the present application.

[0040] Figure 27 is a front view of the spiral humidifier according to the present application. Figure 15 Figure 28 is a plan view of the spiral humidifier according to the present application. Figure 29 is a sectional view of the spiral humidifier according to the present application.

[0041] Figure 30 is a plan view of the spiral humidifier according to the present application. Figure 16 Figure 31 is a sectional view of the spiral humidifier according to the present application.

[0042] 1, upper shell; 2, lower shell; 3, dust cleaning port; 4, first pneumatic ball valve; 5, first pulse ball valve; 6, blow gas bag; 7, first manual ball valve; 8, nozzle; 9, second air outlet; 10, air inlet; 11, flower plate; 12, support; 13, fixed hanger; 14, guide mechanism; 15, movable hanger; 16, spring; 17, filter bag; 18, first air cylinder; 19, third pneumatic ball valve; 20, fourth manual ball valve; 21, ninth pneumatic ball valve; 22, connecting pipeline; 23, centralized dust collection platform; 24, centralized dust collection dust discharge port flange; 25, conical hopper air inlet; 26, conical hopper; 27, cylinder; 28, back flushing gas bag; 29, second pulse ball valve; 30, fifth pneumatic ball valve; 31, second manual ball valve; 32, back flushing pipe; 33, dust collector air outlet; 34, upper head; 35, stainless steel filter cartridge; 36, mounting plate; 37, spiral shaft fixing seat; 38, dust sweeping rod; 39, first connecting rod; 40, second air cylinder; 41, air cylinder mounting cylinder; 42, air cylinder mounting seat; 43, first ratchet mechanism; 44, conical hopper rib plate; 45, hopper spiral shaft; 46, third manual ball valve; 47, vent line; 48, pressure sensor; 49, sixth pneumatic ball valve; 50, equal pressure communication pipeline; 51, seventh pneumatic ball valve; 52, upper cylinder of buffer tank; 53, first solenoid valve; 54, slight positive pressure pipeline; 55, buffer tank discharge port; 56, lower cone of buffer tank; 57, gas replacement pipeline; 58, buffer tank inlet; 59, star-shaped discharge valve; 60, corrugated hose; 61, casing of flammable dust harmless treatment device; 62, exhaust pipe; 63, touch screen; 64, inlet; 65, damper; 66, servo motor reducer; 67, discharge port of spiral humidifier; 68, small filter; 69, fan; 70, casing of spiral humidifier; 71, fan connecting hose; 72, air inlet pipeline of small filter; 73, booster water pump; 74, external water supply pipeline; 75, drain hose; 76, second solenoid valve; 77, right-angle pipe joint; 78, water distribution hose; 79, busbar; 80, first motor reducer; 81, first temperature sensor; 82, universal coupling; 83, second motor reducer; 84, plum blossom coupling; 85, second temperature sensor; 86, sprocket driven shaft; 87, chain wheel; 88, transmission chain; 89, scraper; 90, chain scraper beam; 91, chain wheel driving shaft; 92, upper layer bottom plate of chain scraper; 93, lower layer bottom plate of chain scraper; 94, dust crushing mechanism mounting seat; 95, torsional spring; 96, dust crushing plate; 97, hopper circle edge; 98, weighing hopper; 99, cylinder actuator; 100, pneumatic vibrator; 101, louver mechanism casing; 102, square-round variable diameter pipe; 103, upper mounting plate of weighing sensor; 104, small circular pipe of weighing discharge; 105, large circular pipe of weighing discharge; 106, lower mounting plate of weighing sensor; 107, weighing sensor; 108, louvered dust discharging reverse blade; 109, louvered dust discharging rotating rod;110, louver ash unloading long connecting rod; 111, louver ash unloading short connecting rod; 112, spiral humidifier motor reducer mounting seat; 113, discharge port side bearing seat; 114, discharge port side flange; 115, spiral stirring main shaft; 116, clamp; 117, first water nozzle; 118, second water nozzle; 119, third water nozzle; 120, fourth water nozzle; 121, spiral humidifier feed port; 122, bearing cover; 123, feed port side bearing seat; 124, feed port side flange; 125, bearing baffle ring; 126, floating seal ring; 127, wool sealing gasket; 128, feed port side sealing gasket cover plate; 129, round nut; 130, double row angular contact ball bearing; 131, floating seal ring cover plate; 132, discharge port side sealing gasket cover plate; 133, anti-rotation spiral belt; 134, spiral belt support rod; 135, normal rotation spiral belt; 136, second pneumatic ball valve; 137, Kf pipe joint; 138, buffer tank top plate; 139, eighth pneumatic ball valve; 140, oxidation cabin; 141, dust humidification cabin; 142, electrical cabinet cabin; 143, oxidation cabin upper cover; 144, oxidation cabin bottom plate; 145, oxidation cabin discharge port; 146, fireproof cloth; 147, dust humidification cabin bottom plate; 148, gas recovery pipeline; A, dust removal filter; B, dust removal pipeline; C, fourth pneumatic ball valve; D, centralized dust collector; E, buffer tank; F, flammable dust centralized harmless treatment device; G, tenth pneumatic ball valve; H, dust collection pipeline; J1, first filter cartridge filter; J2, second filter cartridge filter; K1, first vacuum pump; K2, second vacuum pump; K3, third vacuum pump; L, crystal pulling furnace; M, chain scraper; N, louver ash unloading mechanism; P, spiral humidifier. DETAILED DESCRIPTION

[0043] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0044] The purpose of the present application is to provide a dust removal filter, a fine silicon powder inert treatment system and a treatment method, which are provided with a dust collector self-cleaning system, can not only reduce the resistance of the dust collector, improve the quality of the crystal bar, reduce the power consumption, but also improve the dust conveying efficiency.

[0045] In order to make the above-mentioned purposes, characteristics and advantages of the present application more obvious and easy to understand, the present application will be further described in detail below with reference to the drawings and specific embodiments.

[0046] Reference Figures 2-3The dust removal filter disclosed in the embodiment of the application at least comprises a shell, the shell comprises an upper shell 1 and a lower shell 2, the lower shell 2 is provided with a dust removal port 3 and an air inlet 10, the upper shell 1 is provided with a first air outlet, the inside of the shell is provided with a filter bag 17 for filtering the gas conveyed by a crystal pulling furnace L into the inside of the shell, the upper shell 1 is further provided with a simple harmonic mechanism for tensioning and relaxing the filter bag 17, the sidewall of the upper shell 1 is provided with a blowing gas bag 6, the lower shell 2 is provided with a nozzle 8 near the bottom, the nozzle 8 is arranged opposite to the dust removal port 3 so as to blow the dust out of the dust removal port 3, the communication end of the blowing gas bag 6 with the upper shell 1 is arranged at the end of the filter bag 17 away from the air inlet 10, that is, the blowing end of the blowing gas bag 6 is arranged at the top of the upper shell, the blowing gas bag 6 is opposite to the direction of the gas entering the air inlet 10, thereby realizing back blowing of the filter bag 17 and improving the dust removal effect of the filter bag 17, and the control system for controlling the opening and closing of the dust removal port 3, the air inlet 10 and the first air outlet is further included.

[0047] In the embodiment, after the inert protective gas carrying the dust volatilized by the heated silicon material enters the shell through the air inlet 10, the inert protective gas is filtered through the filter bag 17, the filtered gas is discharged through the first air outlet, after the filtering operation is completed, the air inlet 10 and the first air outlet are controlled to be closed through the control system, the dust removal operation of the filter bag 17 is started, the resistance of the filter bag 17 is prevented from becoming large, the filter bag 17 is first instantaneously tightened from the relaxed state through the simple harmonic mechanism, the dust attached to the filter bag 17 is removed through vibration, then the inert gas in the blowing gas bag 6 is blown into the shell through the communication port at the top of the upper shell 1, so as to blow the remaining dust attached to the filter bag 17, the dust removal operation of the filter bag 17 is completed, the residual combustible dust inside the filter bag 17 is removed through the two ways, the risk of burning of the filter bag 17 is reduced, when the dust needs to be discharged, the dust removal port 3 is opened through the control system due to the fact that the nozzle 8 is arranged opposite to the dust removal port 3, the dust is blown out of the dust removal port 3 to the next stage equipment under the cooperation of the nozzle 8.

[0048] It should be noted that the inert gas in the blowing gas bag 6 can also be sprayed into the inside of the shell through the nozzle 8, and the gas pressure sprayed out of the nozzle 8 is ensured to be large enough, although it is positive blowing, but the dust attached to the filter bag 17 can also be blown off.

[0049] Reference Figures 1-3In an embodiment, the simple harmonic mechanism comprises a support 12 arranged on the inner wall of the shell, the bottom of the support 12 is provided with a flower plate 11 for fixing and supporting the bottom of the filter bag 17, and the top of the support 12 is provided with a fixed hanger 13, the lower part of the fixed hanger 13 is provided with a movable hanger 15 for fixing the upper end of the filter bag 17, a spring 16 is arranged between the movable hanger 15 and the fixed hanger 13, the top of the upper shell 1 is provided with a first cylinder 18, the shell of the first cylinder 18 is fixedly connected with the upper shell 1, the output end of the first cylinder 18 is fixedly connected with the movable hanger 15, the movable hanger 15 drives the filter bag 17 to vibrate by setting the simple harmonic mechanism, which not only can assist in removing the dust accumulated on the surface of the filter bag 17, but also can improve the filtering effect, and when it is necessary to clean the dust, the first cylinder 18 drives the movable hanger 15 to move instantaneously, so that the filter bag 17 is taut, under the action of the inertial force, the dust attached to the filter bag 17 will fall off, thereby improving the dust cleaning effect.

[0050] It should be noted that the first cylinder 18 is arranged in three groups, and eight springs 16 are arranged between each group of movable hangers 15 and the fixed hanger 13.

[0051] Reference Figure 3 In an embodiment, the fixed hanger 13 is further provided with a guide mechanism 14, one end of the guide mechanism 14 is connected with the movable hanger 15, and the other end of the guide mechanism 14 is slidably connected with the fixed hanger 13, the guide mechanism 14 can ensure that the movable hanger 15 is more stable during the up-down simple harmonic vibration, and can avoid the situation that the movable hanger 15 is stuck, the guide mechanism 14 can be a guide rod, one end of the guide rod is connected with the movable hanger 15, and the other end of the guide rod penetrates through the fixed hanger 13.

[0052] Reference Figures 2-3 As an embodiment, the first air outlet is communicated with the blowing gas bag 6, the blowing gas bag 6 is provided with a second air outlet 9, and the air inlet 10 is arranged at a position close to the bottom of the lower shell 2, the first air outlet and the second air outlet 9 are arranged at a position close to the top of the upper shell 1, that is, when normal filtering, the first air outlet and the second air outlet 9 are communicated, and the filtered gas is discharged through the second air outlet 9, when blowing, the first air outlet serves as the air inlet, so that the gas in the blowing gas bag 6 is blown from the top of the upper shell 1, and the blowing of the filter bag 17 is completed.

[0053] It should be noted that the second air outlet 9 is communicated with the outside air, the blowing gas bag 6 and the first air outlet are communicated through the first pneumatic ball valve 4 and the first pulse ball valve 5, and the blowing gas bag 6 and the nozzle 8 are communicated through the first manual ball valve 7 and the second pneumatic ball valve 136.

[0054] Reference Figure 1 and Figure 2, as a preferred way, the nozzle 8 is set to 4, and is uniformly arranged on the side wall of the bottom of the lower shell 2 away from the ash removal port 3, specifically the top view of the lower shell 2 is a circular section, the ash removal port 3 is arranged on one side of the circular section, the cross section of the ash removal port 3 is equally divided, and the equal division line passes through the center of the circular section, at this time the axis perpendicular to the equal division line divides the circular section into equal semicircles, the four nozzles 8 are uniformly distributed on the semicircle away from the ash removal port 3, and the nozzle 8 is arranged opposite to the ash removal port 3. The nozzle 8 is arranged opposite to the ash removal port 3, which can produce a clear directional airflow, directly pushing the material to move towards the ash removal port 3, and the four nozzles 8 are uniformly distributed to form an airflow field covering the entire semicircle, ensuring that the dust is effectively pushed.

[0055] It should be noted that the ash removal port 3 is communicated with the fourth manual ball valve 20, the ninth pneumatic ball valve 21, the connecting pipeline 22 and the fourth pneumatic ball valve C in sequence.

[0056] Reference Figure 1 , the application also discloses a fine silicon powder inert treatment system applying the dust removal filter, which comprises a crystal pulling furnace L, a dust removal filter A, a centralized dust collector D, a buffer tank E for temporarily storing and isolating dust and a flammable dust centralized harmless treatment device F which are communicated in sequence, the crystal pulling furnace L is communicated with the dust removal filter A through the third pneumatic ball valve 19, the dust removal filter A is communicated with the centralized dust collector D through the fourth pneumatic ball valve C arranged on the ash removal management B, the second air outlet 9 is connected with the first vacuum pump K1 and discharged through the gas recovery pipeline 148, the crystal pulling furnace air outlet of the crystal pulling furnace L is connected with the second vacuum pump K2 through the first filter cartridge filter J1 and discharged through the gas recovery pipeline 148, and the dust collector air outlet 33 of the centralized dust collector D is connected with the third vacuum pump K3 in sequence through the tenth pneumatic ball valve G arranged on the dust collection pipeline H and the second filter cartridge filter J2, the secondary filtration of the dust can be realized through the arrangement of the dust removal filter A and the centralized dust collector D, the temporary storage and isolation of the dust can be realized through the arrangement of the buffer tank E, and the oxidation and humidification of the dust can be realized through the arrangement of the flammable dust centralized harmless treatment device F, so that the efficient collection, safe temporary storage and harmless treatment of the dust are realized, and the high-standard requirements of modern industry on environmental protection and safety are met.

[0057] It should be noted that the crystal pulling furnace L and the dust removal filter A can be in the form of multiple groups in parallel and connected with the centralized dust collector D, so as to improve the working efficiency.

[0058] Reference Figure 4 and Figure 5, as a kind of implementation, the central dust collector D includes cylinder body 27, is provided with upper head 34 above cylinder body 27, upper head 34, cylinder body 27 and conical hopper 26 are fixed by screw, constitute closed cavity, upper head 34 is provided with dust collector air outlet 33 and blowback pipe 32 communicated with cylinder body 27, the inside of cylinder body 27 is provided with the stainless steel filter cartridge 35 for the secondary filtration of dust, the stainless steel filter cartridge 35 is installed in the inside of cylinder body 27 by mounting plate 36 arranged in the inside of cylinder body 27, conical hopper 26 includes the second cylinder 40 arranged on the outer wall of conical hopper 26, the second cylinder 40 is fixed on the outer wall of conical hopper 26 by cylinder mounting cylinder 41 and cylinder cylinder mounting seat 42, the output end of second cylinder 40 is connected with first connecting rod 39 and second connecting rod, the inside of conical hopper 26 is provided with helical shaft fixing seat 37, helical shaft fixing seat 37 is arranged on the inner wall of conical hopper 26 by conical hopper rib plate 44, the middle of conical hopper 26 is provided with hopper helical shaft 45, hopper helical shaft 45 is rotatably connected with helical shaft fixing seat 37, and first ratchet mechanism 43 and second ratchet mechanism are sleeved on the outer wall of hopper helical shaft 45, first ratchet mechanism 43 and second ratchet mechanism are installed on hopper helical shaft 45, for converting the linear motion of second cylinder 40 into the rotary motion of hopper helical shaft 45, by setting conical hopper 26 and setting hopper helical shaft 45 in conical hopper 26, the conveying efficiency of dust can be guaranteed.

[0059] It should be noted that the central dust collector D is supported by the central dust collection platform 23, and in the embodiment, the rotation of the hopper helical shaft 45 is realized by the two ratchet mechanisms, which is prior art, and will not be described again. The sidewall of the conical hopper 26 is provided with a conical hopper air inlet 25 communicated with the ash removal port 3. The conical hopper air inlet 25 is arranged at a position close to the top of the conical hopper 26. The discharge port of the conical hopper 26 is provided with a central dust collection ash discharge flange 24.

[0060] Reference Figure 4 and Figure 5 , as a kind of implementation, hopper helical shaft 45 is sleeved with sweep ash rod 38, the end of sweep ash rod 38 is provided with sweep ash brush abutting with the inside of conical hopper 26, which can avoid the adhesion of dust on the inner wall of conical hopper 26.

[0061] Reference Figure 4 and Figure 5 , as a kind of implementation, the outer wall of cylinder body 27 is provided with blowback gas bag 28, the air outlet of blowback gas bag 28 is connected with upper head 34 in turn through second pulse ball valve 29, fifth pneumatic ball valve 30, second manual ball valve 31 and blowback pipe 32, and then communicates with cylinder body 27, the blowback cleaning of the stainless steel filter cartridge 35 in the inside of cylinder body 27 is completed by the gas transported in blowback gas bag 28.

[0062] ReferenceFigure 6 As an embodiment, the buffer tank E includes a buffer tank upper cylinder 52, a buffer tank top plate 138, a buffer tank lower cylinder 56, a buffer tank inlet 58, and a buffer tank outlet 55, which together constitute the tank body of the buffer tank. The buffer tank top plate 138 is provided with a venting pipeline 47, an equalizing pipeline 50, a Kf pipe joint 137, and the buffer tank inlet 58. The buffer tank E is provided with a slight positive pressure pipeline 54 and a gas replacement pipeline 57 near the bottom. The venting pipeline 47, the equalizing pipeline 50, the slight positive pressure pipeline 54, and the gas replacement pipeline 57 are each provided with a third manual ball valve 46. The venting pipeline 47, the slight positive pressure pipeline 54, and the gas replacement pipeline 57 are each provided with a first electromagnetic valve 53. The buffer tank inlet 58 is installed with a sixth pneumatic ball valve 49, which is connected to the concentrated dust collector D through the sixth pneumatic ball valve 49, and is used to control the dust discharge of the hopper. The venting pipeline 47 is connected to the first electromagnetic valve 53 through the installation of the third manual ball valve 46, and is controlled by the first electromagnetic valve 53, and is used for venting and exhausting. The third manual ball valve 46 is used for emergency repair. The Kf pipe joint 137 is used to install a pressure sensor 48. The equalizing pipeline 50 is connected to the concentrated dust collector D through the installation of the third manual ball valve 46 and the seventh pneumatic ball valve 51, so that the buffer tank E and the concentrated dust collector D are at the same pressure, facilitating the discharge of the ash. The third manual ball valve 46 is used for emergency repair. The buffer tank upper cylinder 52 is welded below the buffer tank top plate 138. The buffer tank lower cylinder 56 is welded below the buffer tank upper cylinder 52. The buffer tank lower cylinder 56 is provided with the gas replacement pipeline 57 and the slight positive pressure pipeline 54 on the different sides of the tangential opposite sides of the side wall, for forming a cyclone air inlet flow. The buffer tank outlet 55 is welded below the buffer tank lower cylinder 56 and is connected to an eighth pneumatic ball valve 139, which is used to control the discharge of the buffer tank E. The gas replacement pipeline 57 is connected to the first electromagnetic valve 53 through the installation of the third manual ball valve 46, and the gas replacement pipeline 57 is controlled by the first electromagnetic valve 53. The third manual ball valve 46 is used for emergency repair. The slight positive pressure pipeline 54 is connected to the first electromagnetic valve 53 through the installation of the third manual ball valve 46. The first electromagnetic valve 53 is used to control the on-off of the pipeline air inlet. The third manual ball valve 46 is used for emergency repair. The buffer tank E is used to isolate the concentrated dust collector D and the combustible dust concentrated harmless treatment device F, and prevent explosion caused by dust explosion during treatment.

[0063] Reference Figures 7-12, as a way of implementation, flammable dust centralized harmless treatment device F, including star type unloading valve 59, chain scraper M, louver unloading mechanism N, spiral humidifier P, flammable dust harmless treatment device shell 61, flammable dust harmless treatment device shell 61, by upper oxidation cabin 140, lower dust humidification cabin 141 and electrical cabinet cabin 142, oxidation cabin 140 is sealed structure, two sides have access doors, the top oxidation cabin upper cover 143 can be removed, below the oxidation cabin bottom plate 144, provided with oxidation cabin discharge port 145, the side is skin, oxidation cabin 140 is respectively installed with first temperature sensor 81 and second temperature sensor 85, located at the longitudinal ends of oxidation cabin 140, for measuring the temperature of material on chain scraper M, oxidation cabin upper cover 143, provided with feed inlet 64, corrugated hose 60 is installed on feed inlet 64, eighth pneumatic ball valve 139 is connected through corrugated hose 60, star type unloading valve 59 is connected below feed inlet 64, for uniform distribution of material, chain scraper M is longitudinally installed in oxidation cabin 140, installed on oxidation cabin bottom plate 144, dust humidification cabin 141, located below oxidation cabin 140, for installing spiral humidifier P, louver unloading mechanism N, small filter 68 and booster water pump 73, the side wall has access door or skin, the bottom has dust humidification cabin bottom plate 147, for supporting installation equipment, between dust humidification cabin 141 and electrical cabinet cabin 142, spiral humidifier discharge port 67 is arranged, for spiral humidifier P discharge, electrical cabinet cabin 142, for installing electrical control equipment and human-computer interaction equipment touch screen 63;

[0064] Reference Figures 10-12, as a way of implementation, the chain scraper M, including chain scraper M beam 90, sprocket driven shaft 86, sprocket drive shaft 91, sprocket 87, transmission chain 88, scraper 89, chain scraper M upper layer bottom plate 92, chain scraper M lower layer bottom plate 93, the first motor reducer 80, the second motor reducer 83, universal coupling 82 and plum coupling 84, chain scraper M beam 90, chain scraper M upper layer bottom plate 92, chain scraper M lower layer bottom plate 93 are equipment frame, used for installing and fixing sprocket drive shaft 91 and sprocket driven shaft 86, scraper 89 is installed between two transmission chains 88, sprocket drive shaft 91 and sprocket driven shaft 86 are installed at both ends between two chain scraper M beams 90 respectively, two sprockets 87 are installed at both ends of each shaft respectively, sprocket 87 is used for engaging with transmission chain 88, transmission chain 88 is used for torque transmission of sprocket drive shaft 91 to sprocket driven shaft 86, so as to drive scraper 89 to move along the direction of transmission chain 88, the first motor reducer 80 and the second motor reducer 83 are installed and fixed outside oxidation cabin 140, are connected to drive upper and lower sprocket drive shafts 91 through universal coupling 82 and plum coupling 84 respectively, the side of sprocket driven shaft 86 of chain scraper M is the discharge port 145 of oxidation cabin, used for discharging of chain scraper M, further comprising dust breaking plate 96, the dust breaking plate 96 comprises a plate body and a rotating shaft, the plate body is fixedly connected to the rotating shaft, the conveying end of the lower layer bottom plate 93 of the chain scraper M is fixedly connected with a dust breaking mechanism mounting seat 94, both ends of the rotating shaft are rotatably installed on the dust breaking mechanism mounting seat 94, one end of the torsional spring 95 is fixedly installed on the dust breaking mechanism mounting seat 94, and the other end is fixedly connected with the plate body, after the dust in the buffer tank E enters the oxidation cabin 140 through the star type discharge valve 59, falls into the upper layer bottom plate 92 of the chain scraper M, when the scraper 89 moves to the end of the upper layer bottom plate 92 of the chain scraper M along with the transmission chain 88, the dust falls to the beginning of the lower layer bottom plate 93 of the chain scraper M, and continues to move to the end of the lower layer bottom plate 93 of the chain scraper M under the action of the scraper 89, when the dust moves to the end of the lower layer bottom plate 93 of the chain scraper M under the driving of the scraper 89, the dust collected by the scraper 89 contacts the dust breaking plate, at this time, the dust breaking plate will hinder the dust from continuing to advance due to the elastic force of the torsional spring 95, and under the extrusion action of the dust breaking plate and the scraper 89, the flaky dust is broken, and the broken dust enters the discharge port, when the scraper 89 moves to the next station, the dust breaking plate restores to the original state under the action of the torsional spring 95, and the conveying of one process is completed.

[0065] Reference Figures 13-14, as a way of implementation, the shutter dust mechanism N, installed in the dust humidification cabin 141 inside, including the hopper ring edge 97, weighing hopper 98, cylinder actuator 99, pneumatic vibrator 100, shutter mechanism shell 101, square round reducer pipe 102, weighing sensor upper mounting plate 103, weighing material small round pipe 104, weighing material large round pipe 105, weighing sensor lower mounting plate 106, weighing sensor 107, shutter dust discharge reverse blade 108, shutter dust discharge rotating rod 109, shutter dust discharge long connecting rod 110 and shutter dust discharge short connecting rod 111, weighing hopper 98, used for temporary storage of materials, the top is equipped with hopper ring edge 97, used for connecting the upper equipment, the lower part is equipped with two pieces of shutter dust discharge reverse blade 108, which can be reversed to achieve the plugging and opening of the discharge port of the weighing hopper 98, used for controlling the discharge of the weighed material, shutter mechanism shell 101, used for installing and fixing the shutter dust discharge reverse blade 108, connected with the weighing hopper 98 above, connected with the square round reducer pipe 102 below, the weighing sensor upper mounting plate 103 is connected with the square round reducer pipe 102, connected with three evenly distributed weighing sensors 107 below, used for supporting and fixing the upper equipment, the weighing sensor lower mounting plate 106 is connected with the base of the weighing sensor 107, used for the installation and fixation of the weighing sensor 107, the weighing material large round pipe 105 is welded at the center position, used for receiving the incoming material of the weighing material small round pipe 104 above and discharging, the weighing material small round pipe 104 is inserted in the center of the weighing material large round pipe 105 without contacting it, preventing interference with the accuracy of the weighing sensor 107, the hopper ring edge 97 is connected with the oxidation cabin discharge port 145 through the soft connection fireproof cloth 146, which ensures that the weighing sensor 107 is not affected by using the soft connection fireproof cloth 146, the cylinder actuator 99 is connected with the shutter dust discharge long connecting rod 110 and the arc-shaped lever set on the shutter dust discharge reverse blade 108 in sequence through the shutter dust discharge short connecting rod 111, converting the linear motion of the cylinder actuator 99 into rotary motion to realize the opening and closing of the shutter dust discharge reverse blade 108, the pneumatic vibrator 100 is installed on the side of the shutter mechanism shell 101, used to assist in vibrating the material when the shutter dust discharge reverse blade 108 is opened.

[0066] Reference Figures 15-16, as a way of implementation, the screw humidifier P, located in the dust humidification cabin 141 inside and below the louver unloading mechanism N, installed on the dust humidification cabin bottom plate 147, the louver unloading mechanism N through the weighing sensor on the installation plate 103 on the lower hole with the screw humidifier feed port 121 connected, screw humidifier P includes servo motor reducer 66, screw humidifier discharge port 67, screw humidifier shell 70, screw humidifier motor reducer mounting seat 112, discharge port side bearing seat 113, discharge port side flange 114, screw stirring spindle 115, clamp 116, first water nozzle 117, second water nozzle 118, third water nozzle 119, fourth water nozzle 120, screw humidifier feed port 121, bearing cover 122, feed port side bearing seat 123, feed port side flange 124, bearing retainer 125, packing seal ring 126, wool sealing pad 127, feed port side sealing pad cover plate 128, round nut 129, double row angular contact ball bearing 130, packing seal ring cover plate 131, discharge port side sealing ring cover plate 132, reverse screw belt 133, screw belt support rod 134 and positive screw belt 135, screw humidifier shell 70, both sides are respectively provided with screw humidifier feed port 121 and screw humidifier discharge port 67, for feeding and discharging materials, discharge port side flange 114 and feed port side flange 124 are respectively welded on both ends of screw humidifier shell 70, discharge port side bearing seat 113 and feed port side bearing seat 123 are respectively connected and fixed, screw stirring spindle 115 is composed of reverse screw belt 133, screw belt support rod 134 and positive screw belt 135, both sides of the shaft are provided with double row angular contact ball bearing 130, screw stirring spindle 115 is positioned by the cooperation of discharge port side bearing seat 113, feed port side bearing seat 123 and double row angular contact ball bearing 130 on both sides of screw humidifier shell 70, packing seal ring 126 is installed in feed port side bearing seat 123 and fixed by packing seal ring cover plate 131, wool sealing pad 127 is installed between feed port side sealing pad cover plate 128 and packing seal ring cover plate 131 for sealing, bearing retainer 125 and round nut 129 are used to lock double row angular contact ball bearing 130 on screw stirring spindle 115, bearing cover 122 is fixed with feed port side bearing seat 123 by general screw and is used to lock double row angular contact ball bearing 130 on screw humidifier feed port 121 side from moving, packing seal ring 126 on screw humidifier discharge port 67 side is fixed by discharge port side sealing ring cover plate 132, wool sealing pad 127 on screw humidifier discharge port 67 side is fixed by discharge port side sealing ring cover plate 132 and discharge port side flange 114, one side of screw humidifier motor reducer mounting seat 112 is fixed with discharge port side bearing seat 113 by screw, the other side is fixed with servo motor reducer 66, screw stirring spindle 115 is connected and driven by fixing servo motor reducer 66 shaft hole,The first water spraying nozzle 117, the second water spraying nozzle 118, the third water spraying nozzle 119 and the fourth water spraying nozzle 120 are fixed with the spiral humidifier shell 70 through the clamp 116, used for adding water to the inside of the spiral humidifier shell 70, the booster water pump 73 is installed in the dust humidification cabin 141, the water supply pipeline 74 is connected with the booster water pump 73, the drain hose 75 is connected with the water collecting pipe 79, the water is divided into four water hoses 78 through the water collecting pipe 79, four second electromagnetic valves 76 and four right-angle pipe joints 77 are connected through four water hoses, and finally the first water spraying nozzle 117, the second water spraying nozzle 118, the third water spraying nozzle 119 and the fourth water spraying nozzle 120 are connected respectively, so as to supply water for the spiral humidifier P.

[0067] Reference Figure 8 As an embodiment, the small filter 68 is installed in the dust oxidation cabin 140, connected with the oxidation cabin 140 through the small filter air inlet pipeline 72, connected with the air outlet pipeline 62 through the fan 69 and the fan connecting hose 71, used for replacing and filtering the air in the oxidation cabin 140 and then discharging, the air door 65 is installed in the dust humidification cabin 141 and connected with the oxidation cabin 140, used for controlling the air inlet amount of the oxidation cabin 140, so as to control the oxidation speed of the combustible dust.

[0068] The application further discloses a fine silicon powder inert treatment method, and the fine silicon powder inert treatment system is used, and the method comprises the following steps.

[0069] The inert protective gas in the crystal pulling furnace L is filtered in the dust removal filter A through a pipeline;

[0070] During the crystal pulling process, the filter bag 17 is vibrated and cleaned, or the filter bag 17 is vibrated and cleaned and back-flushed after the crystal pulling is completed;

[0071] After the cleaning is completed, the dust is transported to the centralized dust collector D for centralized collection and secondary filtration;

[0072] After the secondary filtration is completed, the dust is temporarily stored and isolated in the buffer tank E;

[0073] When oxidation is needed, the dust is transported from the buffer tank E to the combustible dust centralized harmless treatment device F for oxidation and humidification;

[0074] Finally, the dust is discharged from the combustible dust centralized harmless treatment device F.

[0075] The working principle of the embodiment is as follows:

[0076] The inert protective gas in the crystal pulling furnace L carries the dust volatilized from the heated silicon material, passes through the pipeline, the third pneumatic ball valve 19, the dust removal filter A filters out the impurities contained in the inert gas, and is discharged to the gas recovery pipeline 148 through the first vacuum pump K1. At this time, the fourth manual ball valve 20 connected to the ash removal port 3 is always open for emergency repair, the ninth pneumatic ball valve 21 is in a closed state, the first pneumatic ball valve 4 and the second pneumatic ball valve 136 on the two pipelines connected with the blowing gas bag 6 are in a closed state to avoid the influence of external gas on the system pressure of the entire crystal pulling process. This process is the filtering operation of the dust removal filter A. During the filtering operation, the dust removal filter A is programmed to open a certain first cylinder 18 to vibrate and hit. Through one of the three first cylinders 18, the movable hanger 15 is repeatedly pushed and hit to drive the movable hanger 15 to stretch the spring 16, and the filter bag 17 is in a relaxed state. When the first cylinder 18 is quickly retracted, the movable hanger 15 is quickly retracted under the action of the spring 16 and tightens the filter bag 17. This process is the vibration and ash removal of the filter bag 17. The vibration and ash removal of the filter bag 17 does not affect the filtering operation of the dust removal filter A, that is, the filtering operation can also be performed during this process. When the dust removal filter A performs the ash removal operation, self-cleaning needs to be completed first, that is, the ninth pneumatic ball valve 21 is in a closed state, the fourth manual ball valve 20 is always open for emergency repair, and the third pneumatic ball valve 19 is closed to disconnect the connection with the crystal pulling furnace L. The crystal pulling furnace L is connected to the pipeline of the first filter cylinder dust remover J1 and the second vacuum pump K2 to filter the gas inside the crystal pulling furnace L. The dust removal filter A first performs the vibration and ash removal of the filter bag 17. After the set time is completed, the first pneumatic ball valve 4 of the blowing gas bag 6 is opened, and the inert gas in the blowing gas bag 6 is used to backflush the filter bag 17 through the first pulse ball valve 5 to prevent too much combustible dust from remaining on the filter bag 17, which may cause the filter bag 17 to burn through. This process is the self-cleaning of the dust removal filter A before ash removal. The two methods are used to remove the residual combustible dust inside the filter bag 17 to reduce the risk of burning through the filter bag 17.

[0077] After the ninth pneumatic ball valve 21 opens, the pipeline is connected, the tenth pneumatic ball valve G and the fourth pneumatic ball valve C on the inlet and outlet sides of the central dust collector D are all opened, the dust collection pipeline H, the second filter cartridge filter J2, the third vacuum pump K3, and the gas recovery pipeline 148 are connected, the rear end forms a negative pressure, the second filter cartridge filter J2 is a secondary filter, which filters finer dust, and the filter material of the central dust collector D is metal, so the filtering precision is slightly lower, and therefore the gas needs to be filtered through the second filter cartridge filter J2 before being discharged, and the third pneumatic ball valve 19 is in a closed state. At this time, the second pneumatic ball valve 136 connected to the blowing gas bag 6 of the dust filter A is opened, inert gas in the blowing gas bag 6 is connected, and the inert gas is blown through the blowing nozzle 8 to complete the pneumatic conveying of the combustible dust in the lower housing 2. This process is a central dust removal operation. When the central dust removal operation is completed, the ninth pneumatic ball valve 21 and the second pneumatic ball valve 136 are closed, the third pneumatic ball valve 19 is opened, and the filtering operation continues. The other dust filters A complete the dust removal operation in the connected pipeline;

[0078] When the central dust collector D works for a set time, the fourth pneumatic ball valve C and the tenth pneumatic ball valve G on the inlet and outlet are closed, the third vacuum pump K3 is stopped, the fifth pneumatic ball valve 30 on the backflushing gas bag 28 is opened, the second manual ball valve 31 is always open for emergency repair, the second pulse ball valve 29 is opened, and the inert gas in the backflushing gas bag 28 is used for backflushing operation of the stainless steel filter cartridge 35 through program setting. The inert gas is used to clean the combustible dust attached to the outside of the stainless steel filter cartridge 35, increase the air permeability of the stainless steel filter cartridge 35, and the process is a self-cleaning process of the central dust collector D. When the self-cleaning of the central dust collector D is completed, the fourth pneumatic ball valve C on the inlet of the central dust collector and the tenth pneumatic ball valve G on the outlet are opened, and the central dust removal operation continues.

[0079] When the oxidation operation is performed, the sixth pneumatic ball valve 49 and the eighth pneumatic ball valve 139 respectively arranged at the inlet 58 and the outlet 55 of the buffer tank E are in a closed state, the first electromagnetic valve 53 on the gas displacement pipeline 57 is opened to connect the inert gas, the first electromagnetic valve 53 on the venting pipeline 47 is opened to discharge the gas in the cavity of the buffer tank E through the venting pipeline 47 under the action of the cyclone gas flow, and the inert gas is replaced to prevent dust explosion during discharge. After the gas displacement is completed, the first electromagnetic valve 53 on the venting pipeline 47 is closed, the seventh pneumatic ball valve 51 of the equal pressure connecting pipeline 50 is opened to connect the central dust collector D cylinder, so that the two devices are at equal pressure, facilitating discharge. When the pressure sensor 48 feedbacks the equal pressure, the sixth pneumatic ball valve 49 is opened to prepare for dust removal, and the second cylinder 40 of the central dust collector D is started to drive the ash bucket screw shaft 45. The dust falls into the buffer tank E under the action of gravity and spiral extrusion.

[0080] When the time to discharge ash, stop the second cylinder 40, close the sixth pneumatic ball valve 49 and the seventh pneumatic ball valve 51, open the first electromagnetic valve 53 of the micro-positive pressure pipeline 54, open the eighth pneumatic ball valve 139, the combustible dust is discharged along the pipeline under the action of gravity, to the star-shaped discharge valve 59, through which the material is uniformly distributed, and the dust falls on the upper layer of the chain scraper 92, and the scraper 89 pushes the combustible dust to the sprocket drive shaft 91 side, in this process, the dust slowly completes the oxidation with the limited oxygen in the oxidation cabin 140, and reaches the end of the upper layer of the chain scraper 92, and falls on the lower layer of the chain scraper 93, and completes the turnover of the dust, so that it is more fully oxidized;

[0081] In the process of oxidation, the fan 69 connected to the small filter 68 adjusts the speed in real time through the calculation of the PLC system after the two first temperature sensors 81 and the second temperature sensor 85 arranged on the side wall of the oxidation cabin 140, so as to control the oxidation process, and finally the oxidized dust is pushed into the oxidation cabin discharge port 145 by the scraper 89, the discharge port is provided with a dust crushing device to crush the dust agglomerated in the oxidation process, and falls into the weighing hopper 98 in the louver unloading mechanism N, and the weighing sensor 107 feeds back to the set weight, and the cylinder actuator 99 drives the louver unloading reverse blade 108 to open, and the pneumatic vibrator 100 works to assist the unloading, and the oxidized dust falls into the spiral humidifier P.

[0082] The spiral humidifier P drives the spiral stirring main shaft 115 under the setting of the program, and humidifies the dust again through the cooperation of the first water nozzle 117, the second water nozzle 118, the third water nozzle 119 and the fourth water nozzle 120 to complete the passivation treatment, and finally is discharged.

[0083] It should be noted that for those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and the present application can be realized in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the application. Any reference signs in the claims should not be regarded as limiting the claims involved.

Claims

1. A dust removal filter, characterized in that, The device includes a housing, a dust removal port, a first air outlet, and an air inlet respectively disposed on the housing, a filter bag disposed inside the housing, a simple harmonic mechanism disposed on the housing for tensioning or relaxing the filter bag, a jet air manifold disposed on the side wall of the housing, a nozzle disposed at the bottom of the housing and communicating with the jet air manifold, and a control system for controlling the opening and closing of the dust removal port, the air inlet, and the first air outlet. The nozzle is disposed directly opposite the dust removal port, and the end of the jet air manifold communicating with the housing is disposed at the end of the filter bag away from the air inlet.

2. The dust filter according to claim 1, characterized in that, The simple harmonic mechanism includes a bracket disposed on the inner wall of the housing, a fixed hanger disposed on the bracket, a movable hanger disposed below the fixed hanger for fixing one end of the filter bag, a spring disposed between the fixed hanger and the movable hanger, and a first cylinder disposed on the top of the housing with its output end connected to the movable hanger.

3. The dust filter according to claim 2, characterized in that, The fixed hanger is also provided with a guide mechanism, one end of which is connected to the movable hanger, and the other end of which is slidably connected to the fixed hanger.

4. The dust filter according to claim 1, characterized in that, The first air outlet is connected to the blowing air bag, the blowing air bag is provided with a second air outlet, and the air inlet is located near the bottom of the housing, while the first air outlet and the second air outlet are located near the top of the housing.

5. The dust filter according to claim 1, characterized in that, The nozzles are configured as four and are evenly distributed on the side wall of the bottom of the housing away from the dust removal port.

6. A microcrystalline silicon powder inert treatment system, using a dust filter as described in any one of claims 1-5, characterized in that, The device includes a crystal pulling furnace, a dust removal filter, a centralized dust collector, a buffer tank for temporarily storing and isolating dust, and a centralized harmless treatment device for flammable dust, all connected in sequence. The first air outlet is connected to a first vacuum pump, the air outlet of the crystal pulling furnace is connected to a second vacuum pump through a first cartridge filter, and the air outlet of the centralized dust collector is connected to a third vacuum pump through a second cartridge filter.

7. The microcrystalline silicon powder inert treatment system according to claim 6, characterized in that, The centralized dust collector includes a cylindrical body, a stainless steel filter cartridge disposed inside the cylindrical body, and a conical ash hopper disposed below the cylindrical body. The conical ash hopper includes a second cylinder disposed on the outer wall of the conical ash hopper, a first connecting rod and a second connecting rod connected to the output end of the second cylinder, a first ratchet mechanism and a second ratchet mechanism respectively connected to the first connecting rod and the second connecting rod, and an ash hopper spiral shaft passing through the middle of the first ratchet mechanism and the second ratchet mechanism. The first ratchet mechanism and the second ratchet mechanism are used to ensure that the ash hopper spiral shaft rotates in one direction.

8. The microcrystalline silicon powder inert treatment system according to claim 7, characterized in that, A sweeping rod is sleeved on the spiral shaft of the ash hopper, and a sweeping brush is provided at the end of the sweeping rod to fit into the inside of the conical ash hopper.

9. The microcrystalline silicon powder inert treatment system according to claim 7, characterized in that, A backflush air bag is provided on the outer wall of the cylinder, and the backflush air bag is in communication with the inside of the cylinder.

10. A method for inert treatment of fine silicon powder, using the fine silicon powder inert treatment system as described in any one of claims 7-9, characterized in that, Includes the following steps: The inert protective gas inside the crystal pulling furnace enters the dust removal filter through a pipeline for filtration. During the crystal pulling process, the filter bags are vibrated and cleaned, or after the crystal pulling process, the filter bags are vibrated and cleaned by back-blowing. After the dust removal is completed, the dust is transported to a centralized dust collector for collection and secondary filtration. After secondary filtration, the dust enters a buffer tank for temporary storage and isolation. When oxidation is required, the dust is transported from the temporary storage tank to the centralized harmless treatment device for flammable dust for oxidation and humidification. Finally, the dust is discharged from the centralized harmless treatment device for flammable dust.

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