Rolling device for copper sputtering target blank
By designing a copper sputtering target rolling device with positioning and temperature control structures, the problem of unstable rolling in existing devices was solved, and high-quality rolling effect of copper sputtering target billets was achieved.
Patent Information
- Application Number
- CN202511225281.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-29
- Publication Date
- 2025-11-21
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
Existing copper sputtering target billet rolling equipment lacks effective restraint structures, resulting in unstable rolling effects and poor performance in some areas.
A copper sputtering target billet rolling device was designed, which includes a positioning structure, a temperature control structure, and a rolling assembly. The pressure of the limiting roller is adjusted by a second cylinder, and the temperature is uniformly controlled by a fan and a heating tube, ensuring the positioning and temperature stability of the copper sputtering target billet during the rolling process.
This method achieves good positioning and temperature uniformity of the copper sputtering target billet during the rolling process, improves the rolling quality, and avoids the problem of poor local effects.
Smart Images
Figure CN120984702A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of copper sputtering target processing technology, and more specifically, to a rolling apparatus for copper sputtering target blanks. Background Technology
[0002] Sputtering targets are essential raw materials in the manufacturing of electronic components such as semiconductor chips, flat panel displays, and solar cells. In physical vapor deposition (PVD), high-energy particles bombard the surface of the target, causing its atoms or molecules to deposit as thin films on substrates such as silicon wafers and glass substrates, thereby forming microelectronic circuits with various functions. Copper (Cu) has become the main target material for fabricating interconnect wires due to its excellent conductivity, resistance to electromigration, and relatively low cost.
[0003] The performance of the sputtering target, especially the uniformity, grain size and orientation (texture), and density of its final microstructure, directly determines the quality and uniformity of the deposited film, thus affecting the performance, yield, and reliability of the end-device. To obtain high-performance copper sputtering targets, the preparation of the billet (blank) is a crucial preliminary step. Currently, the preparation of large-size, high-performance copper sputtering target blanks typically employs a process route of melting-casting-thermomechanical processing (rolling / forging). Among these, rolling is the core plastic forming method that imparts a dense, uniform, and fine-grained microstructure to the blank. However, existing rolling devices for copper sputtering target blanks do not have a good restraining structure for the copper sputtering target blank itself during use. This can easily lead to poor rolling effect in some parts of the formed blank and unstable rolling effect. Therefore, we propose a rolling device for copper sputtering target blanks. Summary of the Invention
[0004] This invention proposes a rolling device for copper sputtering target blanks, which solves the problem mentioned in the background art that existing copper sputtering target blank rolling devices do not have a good restraining structure for the copper sputtering target blank itself, which easily leads to poor rolling effect and unstable rolling effect in some parts of the rolled blank during use.
[0005] The technical solution of the present invention is as follows: A rolling device for copper sputtering target billet includes a box body, a box door rotatably connected to the outer surface of the box body, a rolling assembly connected inside the box body, a set of positioning structures respectively provided inside the box body corresponding to the feeding and discharging directions of the rolling assembly, and a temperature control structure provided inside the box body. The positioning structure includes a second cylinder fixedly connected to the upper end of the housing. The output end of the second cylinder is fixedly connected to a second adjusting frame. The lower end of the second adjusting frame is fixedly connected to a lower pressing frame. A pushing spring is connected inside the lower pressing frame. A sliding block is connected to the lower end of the pushing spring. A pushing column is fixedly connected to the lower end of the sliding block. A limit roller is rotatably connected to the outer surface of the pushing column.
[0006] As a further technical solution of the present invention, the temperature control structure includes a partition fixedly connected to the inside of the box. Ventilation holes are provided on the outer surface of the partition near the upper and lower ends. A fan is rotatably connected between the partition and the inner walls of the left and right sides of the box. A heating tube is fixedly connected between the partition and the inner walls of the left and right sides of the box. A temperature control component is connected between the partition and the inner walls of the left and right sides of the box on one side. A support roller is rotatably connected to the inner side of the partition.
[0007] As a further technical solution of the present invention, the temperature control component includes a sliding plate slidably connected between the partition and the inner wall of the box, a fixing plate fixedly connected to both the inner wall of the box and the outer surface of the partition, a connecting spring connecting the fixing plate and the sliding plate, a sliding rheostat fixedly connected to the inner wall surface of the box, an air duct fixedly connected to the outer surface of the sliding plate, and the slider of the sliding rheostat and the sliding plate fixedly connected by a bracket.
[0008] As a further technical solution of the present invention, the rolling assembly includes a support plate fixedly connected to the box body via a bracket. The surface of the support plate is provided with air passage holes. The inner surface of the support plate is rotatably connected to a drive roller, a driven roller, and an adjusting roller. The two ends of the driven roller are connected to adjusting blocks. The surface of the adjusting blocks is fixedly connected to an adjusting frame. A cylinder is connected between the adjusting frame and the outer shell of the box body.
[0009] As a further technical solution of the present invention, the second adjusting frame and the various structures on the lower pressing frame are moved up and down by adjusting the pushing and contraction of the second cylinder. The lower pressing frame is an inverted "mountain" shaped structure. The sliding block is pushed down by the pushing spring. The sliding block slides up and down along the internal cavity of the lower pressing frame. The length of the three sets of pushing columns corresponding to a set of lower pressing frames is inversely proportional to the distance between the rolling components.
[0010] As a further technical solution of the present invention, the two ends of the limiting roller are rotatably connected to the top moving column through bearings, the second adjusting frame penetrates the outer shell of the box to its interior, the second adjusting frame is an inverted "U" shaped structure, and the second adjusting frame is slidably connected to the outer shell of the box, and the positioning is achieved by the limiting roller squeezing the blank.
[0011] As a further technical solution of the present invention, the fan on the left side blows air from top to bottom, and the fan on the other side blows air from bottom to top. The heating tube is used to emit the temperature required during rolling, and the fan is used to blow air to achieve uniform temperature inside the box.
[0012] As a further technical solution of the present invention, the sliding plate slides up and down along the inner side of the box and the partition, the air duct is a hollow frustum structure, and the lower end of the air duct is connected to the space on the back of the sliding plate.
[0013] As a further technical solution of the present invention, the sliding plate is moved upward by the wind blowing the sliding plate, and the sliding plate is moved downward by the elastic force of the connecting spring pushing the sliding plate. The sliding rheostat and the heating tube are electrically connected.
[0014] As a further technical solution of the present invention, the first adjustment frame penetrates the outer shell of the box, and the first adjustment frame is slidably connected to the outer shell of the box. The adjustment block is slidably connected to the support plate, and the driven roller is rotatably connected to the adjustment block. The distance between the driven roller and the driving roller is adjusted by the pushing and contracting of the first cylinder. The adjustment roller is also provided with a set of first cylinders, a first adjustment frame and an adjustment block, and the adjustment roller is tilted. The top of the support roller is flush with the top of the driving roller. The driven roller and the driving roller are rotatably connected by a set of gears.
[0015] The working principle and beneficial effects of this invention are as follows: In this invention, the positioning structure allows for the adjustment of the limiting roller to apply different levels of pressure to the copper sputtering target blank during the rolling process by the contraction and extension of the No. 2 cylinder. The pressure is greater closer to the active roller, thus achieving a good positioning effect. This results in higher quality copper sputtering target blanks that are pressed and formed, and avoids the problem of poor local rolling effect. Attached Figure Description
[0016] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.
[0017] Figure 1 This is a schematic diagram of the rolling apparatus for the copper sputtering target blank of the present invention; Figure 2 For the present invention Figure 1 A schematic diagram of the cut-out section of the structure; Figure 3 For the present invention Figure 2 A schematic diagram of the cut-out section of the structure; Figure 4 This is a partial structural diagram of the positioning structure of the present invention cut open; Figure 5 For the present invention Figure 2 A partial structural diagram of the left half; Figure 6 For the present invention Figure 2 A partial structural diagram of the right half; Figure 7 This is a partial structural diagram of the temperature control component of the present invention; Figure 8 This is a partial structural diagram of the rolling assembly of the present invention.
[0018] In the diagram: 1. Box body; 2. Box door; 3. Rolling assembly; 31. Support plate; 32. Air vent; 33. Driving roller; 34. Driven roller; 35. No. 1 adjusting frame; 36. No. 1 cylinder; 37. Adjusting roller; 38. Adjusting block; 4. Positioning structure; 40. Support roller; 41. No. 2 cylinder; 42. No. 2 adjusting frame; 43. Lower pressure frame; 44. Pushing spring; 45. Sliding block; 46. Pushing column; 47. Limiting roller; 5. Temperature control structure; 51. Partition plate; 52. Ventilation hole; 53. Fan; 54. Heating tube; 55. Temperature control assembly; 551. Sliding plate; 552. Fixed plate; 553. Connecting spring; 554. Sliding rheostat; 555. Air duct. Detailed Implementation
[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.
[0020] Example 1, as Figures 1-4 As shown, this embodiment proposes a rolling device for copper sputtering target blanks, including a box body 1, a box door 2 rotatably connected to the outer surface of the box body 1, a rolling assembly 3 connected inside the box body 1, a set of positioning structures 4 respectively provided inside the box body 1 corresponding to the feeding and discharging directions of the rolling assembly 3, and a temperature control structure 5 provided inside the box body 1. The positioning structure 4 includes a second cylinder 41 fixedly connected to the upper end of the housing 1. The output end of the second cylinder 41 is fixedly connected to a second adjusting frame 42. The lower end of the second adjusting frame 42 is fixedly connected to a lower pressing frame 43. The lower pressing frame 43 is internally connected to a pushing spring 44. The lower end of the pushing spring 44 is connected to a sliding block 45. The lower end of the sliding block 45 is fixedly connected to a pushing column 46. The outer surface of the pushing column 46 is rotatably connected to a limit roller 47.
[0021] The second adjusting frame 42 and the various structures on the lower pressing frame 43 are moved up and down by the pushing and contraction adjustment of the second cylinder 41. The lower pressing frame 43 is an inverted "mountain" shaped structure. The sliding block 45 is pushed down by the pushing spring 44. The sliding block 45 slides up and down along the internal cavity of the lower pressing frame 43. The length of the three sets of pushing columns 46 corresponding to one set of lower pressing frames 43 is inversely proportional to the distance between the rolling components 3.
[0022] The two ends of the limiting roller 47 are rotatably connected to the top column 46 through bearings. The second adjusting frame 42 penetrates the outer shell of the box 1 to its interior. The second adjusting frame 42 is an inverted "U" shaped structure, and the second adjusting frame 42 is slidably connected to the outer shell of the box 1. The positioning is achieved by pressing the blank through the limiting roller 47.
[0023] In this embodiment, during the rolling process of the copper sputtering target blank, the limiting roller 47 can be adjusted to apply different levels of pressure to the copper sputtering target blank by the contraction and extension of the second cylinder 41. The pressure is greater closer to the active roller 33, thereby achieving a good positioning effect. This results in a higher quality copper sputtering target blank that has been pressed and formed, and there is no problem of poor local rolling effect.
[0024] Example 2, as Figures 5-7 As shown, based on Embodiment 1, a temperature control structure 5 is also proposed, including a partition 51 fixedly connected inside the box 1. Ventilation holes 52 are provided on the outer surface of the partition 51 near the upper and lower ends. A fan 53 is rotatably connected between the partition 51 and the inner walls of the left and right sides of the box 1. A heating tube 54 is fixedly connected between the partition 51 and the inner walls of the left and right sides of the box 1. A temperature control component 55 is connected between the partition 51 and the inner walls of the left and right sides of the box 1 on one side. A support roller 40 is rotatably connected to the inner side of the partition 51.
[0025] The temperature control assembly 55 includes a sliding plate 551 that is slidably connected between the partition 51 and the inner wall of the box 1. A fixing plate 552 is fixedly connected to both the inner wall of the box 1 and the outer surface of the partition 51. A connecting spring 553 is connected between the fixing plate 552 and the sliding plate 551. A sliding rheostat 554 is fixedly connected to the inner wall surface of the box 1. A vent 555 is fixedly connected to the outer surface of the sliding plate 551. The slider of the sliding rheostat 554 is fixedly connected to the sliding plate 551 through a bracket.
[0026] The fan 53 on the left blows air from top to bottom, while the fan 53 on the other side blows air from bottom to top. The heating tube 54 is used to generate the temperature required during rolling. The fan 53 is used to blow air to achieve uniform temperature inside the box 1. The sliding plate 551 slides up and down along the inner side of the box 1 and the partition 51. The air duct 555 is a hollow frustum structure. The lower end of the air duct 555 is connected to the space behind the sliding plate 551. The air force blows the sliding plate 551, causing the sliding plate 551 to move upward, and the spring force of the connecting spring 553 pushes the sliding plate 551 downward. The sliding rheostat 554 and the heating tube 54 are electrically connected.
[0027] In this embodiment, during use, the airflow inside the housing 1 can be circulated to heat the rolled copper sputtering target billet, thereby maintaining the temperature requirements for hot rolling. When the airflow increases, the heat circulation can be automatically increased synchronously, and when the airflow decreases, the heat circulation can be automatically reduced, so that the temperature of each area of the entire copper sputtering target billet tends to be uniform during the rolling process.
[0028] Example 3, as Figure 8 As shown, based on Embodiment 2, a rolling assembly 3 is further proposed, including a support plate 31 fixedly connected to the housing 1 via a bracket. Air vents 32 are formed on the surface of the support plate 31. An active roller 33, a driven roller 34, and an adjusting roller 37 are rotatably connected to the inner surface of the support plate 31. Adjusting blocks 38 are connected to both ends of the driven roller 34. A first adjusting frame 35 is fixedly connected to the surface of the adjusting block 38. A first cylinder 36 is connected between the first adjusting frame 35 and the outer shell of the housing 1. The first adjusting frame 35 penetrates the outer shell of the housing 1. The outer shell of the housing 1 is slidably connected to the housing 38, the support plate 31 is slidably connected to the adjustment block 38, and the driven roller 34 is rotatably connected to the adjustment block 38. The distance between the driven roller 34 and the driving roller 33 is adjusted by the pushing and contraction of the first cylinder 36. The adjustment roller 37 is also equipped with a set of first cylinder 36, first adjustment frame 35 and adjustment block 38, and the adjustment roller 37 is tilted. The top of the support roller 40 is flush with the top of the driving roller 33. The driven roller 34 and the driving roller 33 are rotatably connected by a set of gears.
[0029] In this embodiment, during use, the distance between the driving roller 33 and the driven roller 34 can be freely adjusted to achieve different thicknesses in the rolling process. At the same time, the final rolled arc-shaped workpiece can be achieved by adjusting the roller 37 to move obliquely. The specific settings are based on the user's actual needs.
[0030] In summary, the specific operating principle of this invention is as follows: During use, the user can open the box door 2 to the outside, then place the copper sputtering target blank to be rolled on the support roller 40, and then close the box door 2. The copper sputtering target blank is rolled by the rolling assembly 3. At the same time, the temperature is controlled by the temperature control structure 5 to maintain its rolling temperature, and the copper sputtering target blank is positioned by the positioning structure 4 to maintain its position stability. During the rolling process of the copper sputtering target blank by the rolling assembly 3, the copper sputtering target blank is between the driven roller 34 and the driving roller 33. The first cylinder 36 retracts, which causes the first adjusting frame 35 to move downward, so that the driving roller 33 and the driven roller 34 clamp the copper sputtering target blank. The driving roller 33 is driven to rotate by a set of motors, and the driven roller 34 is driven by gears, so that the rolling and conveying effects can be achieved. The driving roller 33 can be moved back and forth for rolling by the rotation of the motor. In the case of arc rolling, the first cylinder 36 corresponding to the adjusting roller 37 can be extended, so that the first adjusting frame 35 corresponding to it can push the adjusting block 38, so that the adjusting block 38 and the adjusting roller 37 can move accordingly, so that the material rolled between the driven roller 34 and the driving roller 33 forms an arc shape. Before rolling, since the copper sputtering target billet is not positioned and fixed, the second cylinder 41 can be retracted to drive the second adjusting frame 42 to move downward. At the same time, the lower pressing frame 43 moves downward synchronously. At this time, the relatively lower limiting roller 47 will first come into contact with the copper sputtering target billet. Then, the rolling assembly 3 rolls and conveys the copper sputtering target billet. The closer the limiting roller 47 is to the rolling assembly 3, the greater the positioning and squeezing force on the copper sputtering target billet, which can make the conveying and rolling effect of the copper sputtering target billet better. During the rolling process described above, the fan 53 can blow air synchronously to create a circulation of airflow inside the box 1. Under the action of the airflow, the sliding plate 551 on the right side will move upward a certain distance. As the sliding plate 551 moves upward, the connecting spring 553 will be compressed, and the slider of the sliding rheostat 554 will slide upward a certain distance. At this time, the heating tube 54 controlled by the sliding rheostat 554 will generate more heat. The greater the upward movement of the sliding plate 551, the greater the heat generated. This achieves the effect of automatically controlling the temperature of the circulating air inside the box 1 through the airflow. The airflow is achieved through the ventilation hole 52, and the air passage hole 32 can also facilitate the passage of hot air. In actual use, when the equipment needs to heat up quickly at the beginning of operation, the fan 53 can run at high speed to blow out a larger airflow. At this time, the sliding plate 551 moves up a greater distance, thus generating more heat. Once it approaches the temperature required for rolling, the fan 53 can be run at medium or low speed. At this time, under the pushing action of the connecting spring 553, the range of upward movement of the sliding plate 551 can be reduced. At this time, it is only necessary to maintain the temperature of the internal circulation of the box 1 to meet the rolling requirements.
[0031] It should be understood that in this application, all rotating, sliding, meshing, belt-driven and other moving parts are well lubricated and not prone to slippage or wear, and each part is provided with a corresponding protective shell. However, in the accompanying drawings of this application, the connection state of each moving part is not shown. It should also be understood that all parts in this application are made of metal or plastic materials with suitable strength in the relevant field to ensure that their structural rigidity meets the actual requirements.
[0032] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A rolling apparatus for copper sputtering target blanks, comprising a housing (1), wherein a door (2) is rotatably connected to the outer surface of the housing (1), characterized in that, The box (1) is connected to a rolling assembly (3). A set of positioning structures (4) are respectively provided inside the box (1) in the direction of feeding and discharging of the rolling assembly (3). A temperature control structure (5) is provided inside the box (1). The positioning structure (4) includes a second cylinder (41) fixedly connected to the upper end of the housing (1). The output end of the second cylinder (41) is fixedly connected to a second adjusting frame (42). The lower end of the second adjusting frame (42) is fixedly connected to a lower pressing frame (43). The inside of the lower pressing frame (43) is connected to a top spring (44). The lower end of the top spring (44) is connected to a sliding block (45). The lower end of the sliding block (45) is fixedly connected to a top column (46). The outer surface of the top column (46) is rotatably connected to a limit roller (47).
2. The rolling apparatus for copper sputtering target billet according to claim 1, characterized in that, The temperature control structure (5) includes a partition (51) fixedly connected inside the box (1). Ventilation holes (52) are provided on the outer surface of the partition (51) near the upper and lower ends. A fan (53) is rotatably connected between the partition (51) inside the box (1) and the inner walls of the left and right sides of the box (1). A heating tube (54) is fixedly connected between the partition (51) inside the box (1) and the inner walls of the left and right sides of the box (1). A temperature control component (55) is connected between the partition (51) inside one side of the box (1) and the inner walls of the left and right sides of the box (1). A support roller (40) is rotatably connected to the inner side of the partition (51).
3. The rolling apparatus for copper sputtering target blanks according to claim 2, characterized in that, The temperature control component (55) includes a sliding plate (551) slidably connected between the partition (51) and the inner wall of the box (1). The inner wall of the box (1) and the outer surface of the partition (51) are both fixedly connected to a fixing plate (552). A connecting spring (553) is connected between the fixing plate (552) and the sliding plate (551). A sliding rheostat (554) is fixedly connected to the inner wall surface of the box (1). A ventilator (555) is fixedly connected to the outer surface of the sliding plate (551). The slider of the sliding rheostat (554) is fixedly connected to the sliding plate (551) through a bracket.
4. The rolling apparatus for copper sputtering target billet according to claim 3, characterized in that, The rolling assembly (3) includes a support plate (31) fixedly connected to the housing (1) via a bracket. The surface of the support plate (31) has ventilation holes (32). The inner surface of the support plate (31) is rotatably connected to a drive roller (33), a driven roller (34), and an adjusting roller (37). The two ends of the driven roller (34) are connected to adjusting blocks (38). The surface of the adjusting block (38) is fixedly connected to an adjusting frame (35). A cylinder (36) is connected between the adjusting frame (35) and the outer shell of the housing (1).
5. The rolling apparatus for copper sputtering target blanks according to claim 1, characterized in that, The second adjusting frame (42) and the various structures on the lower pressing frame (43) are moved up and down by the pushing and contraction adjustment of the second cylinder (41). The lower pressing frame (43) is an inverted "mountain" shaped structure. The sliding block (45) is pushed down by the pushing spring (44). The sliding block (45) slides up and down along the internal cavity of the lower pressing frame (43). The length of the three sets of pushing columns (46) corresponding to a set of lower pressing frames (43) is inversely proportional to the distance between the rolling components (3).
6. The rolling apparatus for copper sputtering target blanks according to claim 5, characterized in that, The two ends of the limiting roller (47) are rotatably connected to the top moving column (46) through bearings. The second adjusting frame (42) penetrates the outer shell of the box (1) to its interior. The second adjusting frame (42) is an inverted "U" shaped structure, and the second adjusting frame (42) is slidably connected to the outer shell of the box (1). The positioning is achieved by squeezing the blank through the limiting roller (47).
7. The rolling apparatus for copper sputtering target blanks according to claim 2, characterized in that, The fan (53) on the left side blows air from top to bottom, while the fan (53) on the other side blows air from bottom to top. The heating tube (54) is used to generate the temperature required during rolling. The fan (53) is used to blow air to achieve uniform temperature inside the box (1).
8. The rolling apparatus for copper sputtering target blanks according to claim 3, characterized in that, The sliding plate (551) slides up and down along the inner side of the box (1) and the partition (51). The air duct (555) is a hollow frustum structure. The lower end of the air duct (555) is connected to the space behind the sliding plate (551).
9. The rolling apparatus for copper sputtering target blanks according to claim 8, characterized in that, The sliding plate (551) is moved upward by the wind, which in turn causes the slider of the sliding rheostat (554) to move upward. The sliding plate (551) is moved downward by the elastic force of the connecting spring (553). The sliding rheostat (554) and the heating tube (54) are electrically connected.
10. The rolling apparatus for copper sputtering target blanks according to claim 4, characterized in that, The first adjustment frame (35) penetrates the outer shell of the box (1), and the first adjustment frame (35) and the outer shell of the box (1) are slidably connected. The adjustment block (38) and the support plate (31) are slidably connected. The driven roller (34) and the adjustment block (38) are rotatably connected. The distance between the driven roller (34) and the driving roller (33) is adjusted by pushing and contracting the first cylinder (36). The adjustment roller (37) is also equipped with a set of first cylinder (36), first adjustment frame (35) and adjustment block (38). The adjustment roller (37) is tilted. The top of the support roller (40) is flush with the top of the driving roller (33). The driven roller (34) and the driving roller (33) are rotatably connected by a set of gears.