Transfer tooling for MEMS sensor packaging

Abstract

The application provides a transfer tool for MEMS sensor packaging, and belongs to the technical field of sensors. The tool comprises a bearing plate, a plurality of clamping pieces and a lifting plate. The bearing plate is provided with a plurality of accommodation grooves for accommodating housings. The plurality of clamping pieces are arranged on the bearing plate and correspond to the accommodation grooves one by one. Each clamping piece has an elastic degree of freedom that is bent towards the corresponding accommodation groove and extends into the accommodation groove, so as to clamp and constrain the housing in the accommodation groove. The lifting plate is arranged below the bearing plate. The lifting plate is provided with a plurality of jacks corresponding to the accommodation grooves one by one, and a plurality of release portions corresponding to the clamping pieces one by one. When the lifting plate rises, the release portion abuts against the corresponding clamping piece, so as to drive the clamping piece to elastically deform and release the clamping and constraint on the housing, and the jack extends into the corresponding accommodation groove, so as to lift the housing out of the accommodation groove. The transfer tool for MEMS sensor packaging provided by the application facilitates the release of the housing and the separation of the housing from the transfer tool.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of sensors, and more particularly relates to a transfer tool for MEMS sensor packaging. BACKGROUND

[0002] MEMS sensor is a kind of micro device which combines precision mechanical system and microelectronic circuit technology to perceive physical signals from the outside world and convert them into electrical signals. Due to its small size, light weight, low cost, low power consumption, high reliability, and suitability for mass production and high integration, MEMS sensor has become a key component of many modern technology products.

[0003] In the packaging process of MEMS sensor, the shell is usually transferred between different processes by means of a transfer tool. In the prior art, an adhesive layer is often provided on the transfer tool to fix the shell. However, this method has the problem of difficult operation when separating the shell from the transfer tool later, which may cause the adhesive to remain on the surface of the shell, thereby affecting the cleanliness of the product. SUMMARY

[0004] The present application aims to provide a transfer tool for MEMS sensor packaging, which is designed to facilitate the separation of the shell from the transfer tool.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the present application is to provide a transfer tool for MEMS sensor packaging, comprising:

[0006] a carrier plate, which is provided with a plurality of accommodation grooves for accommodating shells in an array;

[0007] a plurality of clamping members, each of which is provided on the carrier plate and corresponds to one of the accommodation grooves; each clamping member has an elastic degree of freedom which is bent towards the corresponding accommodation groove and extends into the accommodation groove, so as to clamp and constrain the shell in the accommodation groove;

[0008] a lifting plate, which is provided below the carrier plate; the lifting plate is provided with a plurality of jacks corresponding to each of the accommodation grooves, and a plurality of release portions corresponding to each of the clamping members;

[0009] When the lifting plate rises, the release portion abuts against the corresponding clamping member to drive the clamping member to elastically deform and release the clamping constraint on the shell, and the jack extends into the corresponding accommodation groove to lift the shell out of the accommodation groove.

[0010] In one possible implementation, the lifting plate has a first height and a second height, and the first height is lower than the second height.

[0011] When the lifting plate is lifted to the first height, the releasing part drives the clamping piece to release the shell, and the top post has a gap with the bottom surface of the shell.

[0012] When the lifting plate is lifted from the first height to the second height, the clamping piece remains in a state of releasing the shell, and the top post pushes the shell out of the accommodating groove.

[0013] In a possible implementation, the releasing part comprises:

[0014] A sliding ring vertically slidingly sleeved on the top post;

[0015] A pushing block fixedly arranged on the periphery of the sliding ring and located on the inner side of the clamping piece;

[0016] A spring having two ends fixedly connected with the lifting plate and the pushing block respectively;

[0017] The clamping piece has a transversely protruding blocking part; when the lifting plate is lifted to the first height, the pushing block abuts against the inner side surface of the clamping piece and pushes the clamping piece to bend away from the accommodating groove, so that the clamping piece releases the shell, the pushing block vertically abuts against the blocking part, and the pushing block is limited to continue to rise.

[0018] In a possible implementation, the releasing part further comprises:

[0019] A limiting block fixedly arranged on the pushing block and located on the outer side of the clamping piece;

[0020] When the lifting plate is lowered to the state that the clamping piece clamps the shell, the limiting block abuts against the outer side surface of the clamping piece to limit the clamping piece to bend away from the accommodating groove, and a gap exists between the pushing block and the clamping piece.

[0021] In a possible implementation, the clamping piece has an extension part, and the extension part gradually inclines toward the accommodating groove in a direction from bottom to top;

[0022] When the lifting plate is lifted, the releasing part abuts against the inner side of the extension part and moves along the extension part to drive the clamping piece to gradually bend away from the accommodating groove.

[0023] In a possible implementation, the transfer tool for the MEMS sensor package further comprises a base arranged below the bearing plate, the base is fixedly connected with the bearing plate, and a lifting space is formed between the bearing plate and the base;

[0024] The lifting plate is vertically slidingly arranged in the lifting space.

[0025] In a possible implementation, the base and the bearing plate are connected through a guide portion, the guide portion extends vertically, and the lifting plate is in vertical sliding connection with the guide portion.

[0026] In a possible implementation, the clamping piece comprises:

[0027] a plurality of elastic pieces are arranged at intervals around the accommodation groove, and one end of each elastic piece is fixed to the bearing plate and the other end extends towards the lifting plate;

[0028] The elastic piece has an elastic degree of freedom that is bent towards the accommodation groove.

[0029] In a possible implementation, the elastic piece has a first segment, a second segment and a third segment connected in sequence in a top-to-bottom direction;

[0030] The first segment has a top end fixed to the bearing plate and another end extending vertically towards the lifting plate;

[0031] The second segment is in a C shape bent towards the accommodation groove;

[0032] The third segment extends vertically towards the lifting plate.

[0033] In a possible implementation, the bearing plate comprises:

[0034] a plate body, which is provided with a plurality of openings arranged in a matrix;

[0035] a plurality of groove bodies, each corresponding to one of the openings and fixedly arranged on a bottom surface of the plate body;

[0036] The groove body and the corresponding opening enclose the accommodation groove.

[0037] Compared with the prior art, the transport tool for the MEMS sensor package has the beneficial effects that the traditional adhesive layer fixing method is easy to leave adhesive residues affecting the cleanliness of the shell, and the tool realizes glue-free fixing of the shell through elastic clamping of the clamping piece. The clamping piece has an elastic degree of freedom that is bent towards the accommodation groove, and after the shell is placed in the accommodation groove, the clamping piece naturally fits the periphery of the shell to form stable constraint, completely eliminating the risk of adhesive residue and meeting the stringent requirements of the packaging process on cleanliness.

[0038] When the lifting plate rises, the releasing portion first drives the clamping piece to elastically deform and release the constraint, and then the jacks extend into the accommodation groove to eject the shell. When transferring between packaging procedures, only the lifting plate needs to be driven to rise, and the release and ejection of all shells can be completed synchronously, without the need for manual separation, which greatly shortens the process conversion time and meets the needs of large-scale production. BRIEF DESCRIPTION OF DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description only constitute some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort.

[0040] Figure 1 The overall structural schematic diagram of the transfer tooling for MEMS sensor packaging provided by the embodiments of the present application.

[0041] Figure 2 The sectional view of the transfer tooling for MEMS sensor packaging provided by the embodiments of the present application.

[0042] Figure 3 Another angle sectional view of the transfer tooling for MEMS sensor packaging provided by the embodiments of the present application.

[0043] Figure 4 The enlarged structural schematic diagram of part A in the figure. Figure 3

[0044] In the figure: 1, bearing plate; 11, accommodating groove; 12, plate body; 121, opening; 13, groove body; 14, first via hole; 15, second via hole; 2, clamping piece; 21, elastic sheet; 211, first section; 212, second section; 213, third section; 214, fourth section; 215, fifth section; 216, gasket; 3, lifting plate; 31, top column; 32, release part; 321, sliding ring; 322, pushing block; 323, spring; 324, limiting block; 4, base; 41, guide part; 5, shell. DETAILED DESCRIPTION

[0045] In order to make the technical problems, technical solutions and beneficial effects of the present application more clearly understood, the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0046] Please refer to Figures 1 to 4 , the transfer tooling for MEMS sensor packaging provided by the present application will be described.

[0047] Please refer to Figure 1 , Figure 2 and Figure 3 ​, a transfer tool for MEMS sensor package, comprising a carrier plate 1, a plurality of clamping pieces 2 and a lifting plate 3. The carrier plate 1 is provided with a plurality of accommodation grooves 11 for accommodating housings 5. The plurality of clamping pieces 2 are arranged on the carrier plate 1 and correspond to the accommodation grooves 11 one by one. Each clamping piece 2 has an elastic freedom degree which is bent towards the corresponding accommodation groove 11 and extends into the accommodation groove 11 to clamp and constrain the housing 5 in the accommodation groove 11. The lifting plate 3 is arranged below the carrier plate 1. The lifting plate 3 is provided with a plurality of jacks 31 corresponding to the accommodation grooves 11 one by one and a plurality of release portions 32 corresponding to the clamping pieces 2 one by one.

[0048] When the lifting plate 3 rises, the release portion 32 abuts against the corresponding clamping piece 2 to drive the clamping piece 2 to elastically deform and release the clamping and constraint on the housing 5, and the jack 31 extends into the corresponding accommodation groove 11 to lift the housing 5 out of the accommodation groove 11.

[0049] Specifically, please refer to Figure 2 and Figure 3 The bottom wall of the accommodation groove 11 has a first through hole 14 for the jack 31 to enter, so that the jack 31 can contact the housing 5 in the accommodation groove 11. The side wall of the accommodation groove 11 has a second through hole 15 for the clamping piece 2 to enter, so that the clamping piece 2 can contact the housing 5 in the accommodation groove 11.

[0050] When the housing 5 is placed in the accommodation groove 11, the clamping piece 2 can actively clamp and fix the side wall of the housing 5 by virtue of its elastic freedom degree bent towards the accommodation groove 11, so that the housing 5 is stably constrained without relying on adhesive material. When the housing 5 needs to be unloaded, the lifting plate 3 moves upward, and the release portion 32 of the lifting plate 3 first contacts the clamping piece 2 and drives the clamping piece 2 to elastically deform, so that the clamping piece 2 expands outward to release the clamping force on the housing 5. At the same time, the jack 31 extends into the bottom of the accommodation groove 11 to smoothly lift the housing 5 out of the accommodation groove 11, which significantly improves the product cleanliness and the removal efficiency, and is especially suitable for the process of MEMS sensor package which has extremely high cleanliness requirements.

[0051] In some possible embodiments, please refer to Figure 2 and Figure 3 The carrier plate 1 comprises a plate body 12 and a plurality of groove bodies 13. The plate body 12 is provided with a plurality of openings 121 arranged in a matrix. The plurality of groove bodies 13 correspond to the openings 121 one by one and are fixedly arranged on the bottom surface of the plate body 12. The groove body 13 and the corresponding opening 121 form the accommodation groove 11.

[0052] In some possible embodiments, the lifting plate 3 has a first height and a second height, and the first height is lower than the second height.

[0053] When the lifting plate 3 is lifted to the first height, the releasing part 32 drives the clamping piece 2 to release the shell 5, and the top post 31 has a gap with the bottom surface of the shell 5.

[0054] When the lifting plate 3 is lifted from the first height to the second height, the clamping piece 2 is kept in the state of releasing the shell 5, and the top post 31 pushes the shell 5 out of the containing groove 11.

[0055] The first height and the second height of the lifting plate 3 are designed in steps, realizing the orderly operation of releasing first and then pushing out. When the lifting plate 3 is lifted to the first height, the releasing part 32 releases the clamping of the clamping piece 2 on the shell 5, and at this time the top post 31 still keeps a gap with the shell 5, avoiding scratching or deformation of the shell 5 caused by forcibly pushing out when the constraint is not completely released. When the lifting plate 3 is lifted to the second height, the top post 31 stably pushes up the shell 5, realizing the stable separation of the shell 5 and the bearing plate 1.

[0056] When the lifting plate 3 is lifted to the first height, the releasing part 32 has driven the clamping piece 2 to complete the elastic deformation, so that it completely releases the constraint on the shell 5, and at this time the top post 31 has approached the bottom surface of the shell 5 but still keeps a small gap, avoiding extrusion or friction caused by the early contact of the top post 31 and the shell 5. Then the lifting plate 3 continues to rise to the second height, and the top post 31 formally pushes up the shell 5, realizing complete separation. This step-by-step action design not only reduces the risk of damage to the shell 5 during the release process, but also improves the action accuracy and repeatability of the tooling.

[0057] Please refer to Figure 3 and Figure 4 In some possible embodiments, the releasing part 32 includes a sliding ring 321, a pushing block 322 and a spring 323. The sliding ring 321 is vertically sleeved on the top post 31. The pushing block 322 is fixedly arranged on the periphery of the sliding ring 321 and located on the inner side of the clamping piece 2. The pushing block 322 extends outward along the radial direction of the sliding ring 321. The spring 323 has two ends fixedly connected with the lifting plate 3 and the pushing block 322 respectively and sleeved on the top post 31.

[0058] The clamping piece 2 has a transversely protruding blocking part. When the lifting plate 3 is lifted to the first height, the pushing block 322 abuts against the inner side of the clamping piece 2 and pushes the clamping piece 2 to bend away from the containing groove 11, so that the clamping piece 2 releases the shell 5, the pushing block 322 vertically abuts against the blocking part to limit the continuous lifting of the pushing block 322.

[0059] It should be noted that the elastic coefficient of the spring 323 is greater than that of the clamping piece 2, so that the pushing block 322 can push open the clamping piece 2 under the support of the spring 323, and the pushing block 322 can drive the clamping piece 2 to bend. The side of the clamping piece 2 close to the containing groove 11 in the horizontal direction is the inner side, and the side away from the containing groove 11 is the outer side.

[0060] When the lifting plate 3 rises, the pushing block 322 first abuts against the inner side of the clamping piece 2, pushing the clamping piece 2 to bend outward to release the shell 5. When the pushing block 322 vertically abuts against the blocking part on the clamping piece 2, the blocking part limits the pushing block 322 from continuing to rise, avoiding the elastic failure of the clamping piece 2 due to excessive bending. The position of the blocking part can control the bending amount of the clamping piece 2 not to exceed a threshold, prolonging the service life of the clamping piece 2.

[0061] When the lifting plate 3 rises, the sliding ring 321 vertically slides along the top column 31, bringing the pushing block 322 into contact with the inner side of the clamping piece 2. The pushing block 322 continuously applies force under the buffering action of the spring 323, pushing the clamping piece 2 to bend away from the accommodating groove 11, thereby releasing the shell 5. When the pushing block 322 vertically abuts against the blocking part on the clamping piece 2, the upward movement of the pushing block 322 is limited, preventing the clamping piece 2 from being excessively deformed and damaged. Not only does this achieve a smooth release of the clamping force, but it also protects the elastic life of the clamping piece 2 through mechanical limiting.

[0062] Please refer to Figure 4 In some possible embodiments, the release part 32 further includes a limiting block 324. The limiting block 324 is fixedly arranged on the pushing block 322 and located on the outer side of the clamping piece 2. When the lifting plate 3 descends to the state where the clamping piece 2 clamps the shell 5, the limiting block 324 abuts against the outer side of the clamping piece 2 to limit the clamping piece 2 from bending away from the accommodating groove 11 and to ensure that there is a space between the pushing block 322 and the clamping piece 2.

[0063] For example, the pushing block 322 and the limiting block 324 can adopt a ring-shaped plate, and a long strip sliding opening corresponding to the clamping piece 2 is formed in the ring-shaped plate. The long strip sliding opening is for the clamping piece 2 to pass through. The part of the ring-shaped plate on the inner side of the clamping piece 2 forms the pushing block 322, and the part of the ring-shaped plate on the outer side of the clamping piece 2 forms the limiting block 324.

[0064] When the lifting plate 3 descends to the lowest position, the limiting block 324 abuts against the outer side of the clamping piece 2, thereby limiting the clamping piece 2 from bending outward and ensuring that the clamping piece 2 always maintains the clamping force on the shell 5. At the same time, the pushing block 322 maintains a space with the clamping piece 2, avoiding interference with the natural elastic clamping state of the clamping piece 2.

[0065] When the lifting plate 3 descends to the lowest position, the limiting block 324 abuts against the outer side of the clamping piece 2, thereby limiting the clamping piece 2 from further bending away from the accommodating groove 11 and ensuring that the clamping piece 2 maintains the inward clamping force in the natural state to reliably fix the shell 5. At the same time, the pushing block 322 maintains a space with the clamping piece 2, avoiding unnecessary friction or interference between the pushing block 322 and the clamping piece 2 and avoiding interference with the natural elastic clamping state of the clamping piece 2. This enables the tooling to maintain the elastic performance and position stability of the clamping piece 2 in long-term use, prolonging the service life of the tooling.

[0066] Please refer to Figure 2 , Figure 3 and Figure 4 , in some possible embodiments, the clamping piece 2 has an extension portion which gradually inclines towards the direction close to the accommodating groove 11 along the direction from bottom to top. When the lifting plate 3 rises, the release portion 32 abuts against the inner side of the extension portion and moves along the extension portion to drive the clamping piece 2 to gradually bend away from the accommodating groove 11.

[0067] Through the extension portion of the clamping piece 2, the contact and power transmission process of the release portion 32 and the clamping piece 2 are optimized, the progressive release of the clamping piece 2 is realized, and the sudden bounce or impact is reduced. During the working process, when the lifting plate 3 rises, the release portion 32 contacts the inner side inclined surface of the extension portion and gradually moves upward along the inclined surface. With the continuous change of the contact point, the release portion 32 drives the clamping piece 2 to stably and gradually bend away from the accommodating groove 11 until the shell 5 is completely released.

[0068] Please refer to Figure 1 , Figure 2 and Figure 3 , in some possible embodiments, the transfer tool for the MEMS sensor package further comprises a base 4 arranged below the carrier plate 1, the base 4 is fixedly connected with the carrier plate 1, and a lifting space is formed between the base 4 and the carrier plate 1. The lifting plate 3 is vertically slidingly arranged in the lifting space.

[0069] It should be understood that, for the driving of the lifting plate 3, a small cylinder or a small electric cylinder or the like driving member can be arranged on the base 4 to drive, and the specific driving mode is not limited herein.

[0070] By additionally arranging the base 4 and fixedly connecting the base 4 with the carrier plate 1 to form the lifting space, the structural rigidity of the whole tool and the motion stability of the lifting plate 3 are improved. The base 4 serves as a basic support component and together with the carrier plate 1 forms a closed frame structure, so that the lifting plate 3 can vertically slide in the limited lifting space, avoiding the jamming or deviation caused by the eccentric load or external interference. Not only the overall mechanical strength of the tool is enhanced, but also the alignment accuracy when the ejector pin 31 ejects the shell 5 is ensured, thereby improving the reusability and long-term reliability of the tool.

[0071] Please refer to Figure 1 , Figure 2 and Figure 3 , in some possible embodiments, the base 4 and the carrier plate 1 are connected through a guide portion 41, the guide portion 41 extends vertically, and the lifting plate 3 is vertically slidingly connected with the guide portion 41.

[0072] The base 4 and the bearing plate 1 are connected through the guide part 41, which ensures that the movement direction of the lifting plate 3 is vertical, preventing horizontal deviation or shaking. The guide part 41 extends vertically and forms a sliding fit with the lifting plate 3, which can effectively constrain the movement trajectory of the lifting plate 3, so that the top column 31 can accurately align the first via hole 14 position of the accommodation groove 11, and the release part 32 can also accurately contact the predetermined part of the clamping piece 2.

[0073] Please refer to Figure 2 、 Figure 3 and Figure 4 In some possible embodiments, the clamping piece 2 includes a plurality of elastic pieces 21. The plurality of elastic pieces 21 are arranged around the accommodation groove 11 and fixed to the bearing plate 1 at one end and extend towards the lifting plate 3 at the other end. The elastic piece 21 has a bending elastic degree towards the inside of the accommodation groove 11.

[0074] The plurality of elastic pieces 21 are arranged around the accommodation groove 11 and apply uniform clamping force to the shell 5 from the circumferential direction, avoiding deformation or surface indentation of the shell 5 caused by single-point stress. When the shell 5 is placed in the accommodation groove 11, the plurality of elastic pieces 21 simultaneously elastically deform and tighten inwardly, wrapping and clamping the shell 5 from multiple directions, avoiding single-point stress concentration or eccentric loading, which not only improves the adaptability and reliability of clamping, but also is suitable for slightly deformed shells 5, enhancing the versatility and fault tolerance of the tooling.

[0075] Please refer to Figure 4 In some possible embodiments, the elastic piece 21 has a first segment 211, a second segment 212, a third segment 213, a fourth segment 214 and a fifth segment 215 connected in sequence in the direction from top to bottom.

[0076] Specifically, the top end of the first segment 211 is fixed to the bearing plate 1 and the other end extends vertically towards the lifting plate 3. The second segment 212 is C-shaped and bends towards the inside of the accommodation groove 11, and the second segment 212 extends into the accommodation groove 11 through the second via hole 15. The third segment 213 extends vertically towards the lifting plate 3. The fourth segment 214 is C-shaped and bends horizontally towards the inside of the accommodation groove 11, and the fourth segment 214 forms a blocking part. The fifth segment 215 gradually tilts away from the accommodation groove 11 in the direction from top to bottom, and the fifth segment 215 forms an extension part.

[0077] The first segment 211 provides rigid connection and initial support with the bearing plate 1. The second segment 212 is C-shaped and bends towards the inside of the accommodation groove 11, which can provide controllable and compliant elastic restoring force during clamping and releasing. The third segment 213 is used to lengthen the arm and connect with the fourth segment 214. The fourth segment 214 is bent to form a blocking part for limiting the upward movement of the pushing block 322. The fifth segment 215 is designed to tilt, and when the lifting plate 3 rises, the release part 32 slides along the fifth segment 215, thereby pushing the entire clamping piece 2 to bend.

[0078] Please refer to Figure 3 and Figure 4 In some possible embodiments, the second section 212 is fixed with a gasket 216 towards one side inside the accommodating groove 11. The gasket 216 added inside the second section 212 of the spring sheet 21 improves the material properties and wear resistance of the clamping contact surface. The gasket 216 can generally be made of soft or high-friction coefficient material and attached to the actual contact area between the spring sheet 21 and the shell 5. On the one hand, the gasket 216 can increase the friction with the surface of the shell 5 to prevent sliding or displacement during clamping. On the other hand, the gasket 216 can buffer the clamping force to avoid scratches or indentations caused by the direct hard contact between the spring sheet 21 and the shell 5.

[0079] In summary, the transfer tool for the packaging of MEMS sensors provided by the present application can realize the glue-free fixing of the shell 5 through the elastic clamping of the clamping piece 2, compared with the traditional glue fixing method which is prone to residual glue affecting the cleanliness of the shell 5. The clamping piece 2 has an elastic degree of freedom bent towards the accommodating groove 11. After the shell 5 is placed in the accommodating groove 11, the clamping piece 2 naturally adheres to the outer periphery of the shell 5 to form stable constraint, completely eliminating the risk of glue residue and meeting the stringent requirements of the packaging process on cleanliness.

[0080] When the lifting plate 3 rises, the release part 32 first drives the clamping piece 2 to elastically deform and release the constraint, and then the top column 31 extends into the accommodating groove 11 to eject the shell 5. During the transfer between packaging procedures, only the lifting plate 3 needs to be driven to rise, and the release and ejection of all the shells 5 can be completed synchronously without the need for manual separation, which greatly shortens the process conversion time and meets the needs of large-scale production.

[0081] The above only describes the preferred embodiments of the present application and should not be used to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A transfer tool for a MEMS sensor package, characterized by, The application relates to a shell lifting device. The device comprises: a bearing plate (1) provided with a plurality of accommodation grooves (11) for accommodating shells (5); a plurality of clamping pieces (2) arranged on the bearing plate (1) and corresponding to the accommodation grooves (11); each clamping piece (2) has an elastic freedom degree which is bent towards the corresponding accommodation groove (11) and extends into the accommodation groove (11) to clamp and constrain the shell (5) in the accommodation groove (11); a lifting plate (3) arranged below the bearing plate (1); the lifting plate (3) is provided with a plurality of jacks (31) corresponding to the accommodation grooves (11) and a plurality of release portions (32) corresponding to the clamping pieces (2); when the lifting plate (3) is lifted, the release portion (32) abuts against the corresponding clamping piece (2) to drive the clamping piece (2) to elastically deform and release the clamping and constraint of the shell (5), and the jack (31) extends into the corresponding accommodation groove (11) to lift the shell (5) out of the accommodation groove (11); the lifting plate (3) has a first height and a second height, and the first height is lower than the second height; when the lifting plate (3) is lifted to the first height, the release portion (32) drives the clamping piece (2) to release the shell (5), and the jack (31) has a gap with the bottom surface of the shell (5); when the lifting plate (3) is lifted from the first height to the second height, the clamping piece (2) remains in the state of releasing the shell (5), and the jack (31) lifts the shell (5) out of the accommodation groove (11); the release portion (32) comprises: a sliding ring (321) vertically slidingly sleeved on the jack (31); a pushing block (322) fixedly arranged on the periphery of the sliding ring (321) and located on the inner side of the clamping piece (2); a spring (323) having two ends fixed to the lifting plate (3) and the pushing block (322) respectively; wherein the clamping piece (2) has a transversely protruding blocking portion; when the lifting plate (3) is lifted to the first height, the pushing block (322) abuts against the inner side surface of the clamping piece (2) and pushes the clamping piece (2) to bend away from the accommodation groove (11), so that the clamping piece (2) releases the shell (5) and the pushing block (322) vertically abuts against the blocking portion to limit the continuous lifting of the pushing block (322); the clamping piece (2) comprises: a plurality of elastic sheets (21) arranged at intervals around the accommodation groove (11) and having one end fixed to the bearing plate (1) and the other end extending towards the lifting plate (3); 2. The transfer tooling for a MEMS sensor package of claim 1, wherein, the elastic sheet (21) has an elastic freedom degree which is bent towards the accommodation groove (11). the release portion (32) further comprises: a limiting block (324) fixedly arranged on the pushing block (322) and located on the outer side of the clamping piece (2). When the lifting plate (3) is lowered to clamp the shell (5) by the clamping piece (2), the limiting block (324) abuts against the outer side of the clamping piece (2) to limit the clamping piece (2) from being bent away from the containing groove (11), and the pushing block (322) is spaced apart from the clamping piece (2).

3. The transfer tooling for a MEMS sensor package of claim 1, wherein, The clamping piece (2) has an extension portion which gradually inclines towards the containing groove (11) in a direction from bottom to top; When the lifting plate (3) is raised, the release portion (32) abuts against the inner side of the extension portion and moves along the extension portion to drive the clamping piece (2) to gradually bend away from the containing groove (11).

4. The transfer tooling for a MEMS sensor package of claim 1, wherein, The transfer tool for the MEMS sensor package further comprises a base (4) arranged below the bearing plate (1), the base (4) is fixedly connected with the bearing plate (1) and forms a lifting space with the bearing plate (1). The lifting plate (3) is vertically slidably arranged in the lifting space.

5. The transfer tooling for a MEMS sensor package of claim 4, wherein, The base (4) and the bearing plate (1) are connected through a guide portion (41), the guide portion (41) extends vertically, and the lifting plate (3) is vertically slidably connected with the guide portion (41).

6. The transfer tooling for a MEMS sensor package of claim 1, wherein, The elastic sheet (21) has a first section (211), a second section (212) and a third section (213) connected in sequence in a direction from top to bottom; The top end of the first section (211) is fixed with the bearing plate (1) and the other end extends vertically towards the lifting plate (3); The second section (212) is C-shaped and is bent towards the containing groove (11); The third section (213) extends vertically towards the lifting plate (3).

7. The transfer tooling for a MEMS sensor package of claim 1, wherein, The bearing plate (1) comprises: A plate body (12) which is arranged in a matrix form and has a plurality of openings (121); A plurality of groove bodies (13) which correspond to the openings (121) one by one and are fixedly arranged on the bottom surface of the plate body (12); The groove body (13) and the corresponding opening (121) form the containing groove (11).

Images