Vacuum coating clamp with height adjusting function

Abstract

The invention discloses a vacuum coating clamp with a height adjusting function, and relates to the technical field of coating clamps, the vacuum coating clamp comprises a placing box, a clamping mechanism used for fixing a plurality of substrates at the same time is arranged in the placing box, and a lifting mechanism used for changing the heights of the substrates is arranged at the bottom of the placing box; a release mechanism used for releasing a plurality of substrates at the same time is arranged on the side face of the placing box, an inclined mechanism used for keeping the substrates on the same side is further arranged at the bottom of the placing box, and the clamping mechanism comprises a plurality of containing holes formed in the upper surface of the placing box. The multiple extrusion plates are driven to move synchronously and transversely, all substrates inserted into the containing holes can be pressed or released at the same time in one-time operation, the defect that a traditional clamp needs to tighten screws or operate buckles one by one is thoroughly overcome, the clamping efficiency is greatly improved, and the clamping device is suitable for large-scale coating production.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of coating clamps, in particular to a vacuum coating clamp with height adjustment function. BACKGROUND

[0002] As one of the core processes of the present surface engineering, vacuum coating technology is widely used in optical devices, semiconductor manufacturing, microelectronic packaging, aerospace, decorative materials and new energy fields. Its basic principle is to evaporate or sputter solid materials (such as metals, oxides, nitrides, etc.) into gaseous atoms, molecules or ions through physical or chemical methods in a high vacuum (usually 10 -2 ~ 10 -5 Pa) environment, and then condense and deposit on the surface of the substrate to form functional thin films with specific optical, electrical, mechanical or protective properties. Common vacuum coating technologies include electron beam evaporation, resistance heating evaporation, magnetron sputtering, ion beam assisted deposition and chemical vapor deposition, etc.

[0003] In the above coating process, the clamp is a key device for carrying and fixing the substrate, and its design rationality directly affects the stability of the coating process and the film quality. However, the existing clamp generally uses single-point screw compression, spring clamping or manual buckle to fix the substrate. Such structure has obvious technical defects: in batch coating operation, it is impossible to realize the synchronous clamping and releasing of multiple substrates, and the operator needs to tighten or loosen each clamping point one by one, resulting in a long clamping process, high labor intensity and serious impact on production efficiency.

[0004] Therefore, the present application provides a vacuum coating clamp with height adjustment function to make up for and improve the shortcomings of the prior art. SUMMARY

[0005] In view of the above problems, the present application provides a vacuum coating clamp with height adjustment function, which can effectively solve the problem that multiple substrates cannot be clamped and released synchronously in the prior art. In order to achieve the above purpose, the present application provides the following technical solutions:

[0006] The present application discloses a vacuum coating clamp with height adjustment function, comprising a placing box, the placing box is internally provided with a clamping mechanism for simultaneously fixing multiple substrates, the bottom of the placing box is provided with a lifting mechanism for changing the height of the substrate, the side of the placing box is provided with a release mechanism for simultaneously releasing multiple substrates, and the bottom of the placing box is further provided with an inclination mechanism for keeping the substrates on the same side.

[0007] The clamping mechanism comprises a plurality of accommodating holes formed on the upper surface of the placing box, and each accommodating hole is fixedly connected with a semicircular arc-shaped plate at the bottom, and the arc-shaped plate is further fixedly connected with a bottom plate for placing the substrate.

[0008] Further, the clamping mechanism further comprises two connecting plates symmetrically sliding through the side wall of the placing box, and a plurality of extrusion plates for clamping the substrate are fixedly connected between the two connecting plates, each extrusion plate is located above the upper surface of the bottom plate, a cross plate is fixedly connected between the same end of the two connecting plates, a V-shaped plate is fixedly connected to the side surface of the cross plate away from the cross plate.

[0009] Further, the lifting mechanism comprises a rack fixedly connected to the bottom of the placing box, a rectangular mounting shell slidingly sleeved outside the rack, a transmission shaft rotatably connected to the side surface of the mounting shell, a gear fixedly connected to one end of the transmission shaft, the gear being engaged with the rack, and a handle fixedly connected to the other end of the transmission shaft.

[0010] Further, the lifting mechanism further comprises a ratchet fixedly connected to the outside of the transmission shaft, and a pawl rotatably connected to the outside of the mounting shell, the pawl being engaged with the ratchet, and a push piece fixedly connected to the end of the pawl away from the ratchet.

[0011] Further, the release mechanism comprises a base fixedly connected to the bottom of the mounting shell, a supporting rod fixedly connected to the top of the base for pushing the cross plate to move, and an inclined surface formed on one side of the top of the supporting rod close to the cross plate.

[0012] Further, the release mechanism further comprises a roller fixedly connected to the side of the cross plate away from the placing box, and the roller is in rolling connection with the inclined surface of the top of the supporting rod.

[0013] Further, the bottom of the rack extends to the bottom of the base, and the bottom of the rack is symmetrically provided with an inclined surface.

[0014] Further, a plurality of arc-shaped plates are located on the same side of the bottom plate, and the size of the bottom plate is consistent with that of the accommodating hole.

[0015] Further, the tilting mechanism comprises a supporting base rotatably connected to the bottom of the base, an L-shaped rod circumferentially and slidingly connected to the lower surface of the base, one end of the L-shaped rod extending below the protrusion on the side surface of the supporting base, and the other end of the L-shaped rod being in sliding connection with the inclined surface of the bottom of the rack.

[0016] Further, the tilting mechanism further comprises a limiting block fixedly connected to the lower surface of the base, a return spring fixedly connected to the side surface of the limiting block, and one end of the return spring being fixedly connected with the L-shaped rod away from the limiting block.

[0017] The beneficial effects of the present application are as follows:

[0018] 1、The device is provided with a clamping mechanism, which utilizes the rigid connection of the horizontal plate and the two connecting plates to drive the multiple extrusion plates to move horizontally synchronously, so that all the substrates inserted into the accommodating holes can be pressed or released simultaneously in one operation, thereby completely overcoming the disadvantages of the traditional clamps that need to be tightened with screws or operated with buckles one by one, greatly improving the clamping efficiency, and being suitable for large-batch film plating production.

[0019] 2、The device is provided with a lifting mechanism, which can realize the continuous and stable lifting of the clamp in the vertical direction through the meshing transmission of the rotating handle driving gear and the vertical rack, so that the distance between the substrates and the evaporation source or the sputtering target can be flexibly adjusted, and the film plating operation on a large number of substrates at the same time is facilitated.

[0020] 3、The device is provided with a release mechanism, when the clamp is lowered to the set position during substrate unloading, the inclined surface of the supporting rod pushes the roller, drives the horizontal plate to move towards the placement plate, and drives all the extrusion plates to exit synchronously, thereby one-time releasing the pressing state of all the substrates, compared with the traditional way of tightening screws one by one or manually loosening buckles, the artificial operation steps and time are greatly reduced, especially suitable for large-batch and high-frequency vacuum film plating production lines, effectively improving the operation efficiency and reducing the labor intensity of the operators.

[0021] 4、The device is provided with an inclined mechanism, when multiple substrates are clamped at the same time, the inclined placement box can support the bottoms of the multiple substrates by the bottom plate and press the sides of the multiple substrates by the corresponding extrusion plates, and the semi-circular arc plate wraps and positions the side walls of the substrates, forming a three-point constraint structure, which effectively prevents the displacement, inclination or vibration of the substrates in the vacuum environment or during rotation, ensures the consistency of the positions of the substrates during film plating, and improves the uniformity and adhesion of the film layer during large-batch film plating. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creating any creative labor.

[0023] Figure 1 It is a perspective view of the first angle in the present application.

[0024] Figure 2 It is a perspective view of the second angle in the present application.

[0025] Figure 3 It is a perspective view of the second angle in the present application. Figure 1 It is an enlarged view of the structure at A in the present application.

[0026] Figure 4 A structure zoomed in at B in the figure. Figure 2 A structure zoomed in at B in the figure.

[0027] Figure 5 A longitudinal sectional view of the mounting shell in the figure.

[0028] Figure 6 A perspective view of the clamping mechanism in the figure.

[0029] Figure 7 A perspective view of the support seat in the figure.

[0030] Figure 8 A structure zoomed in at C in the figure. Figure 7 A structure zoomed in at C in the figure.

[0031] The reference signs in the figure respectively represent: 10, a placing box; 20, a clamping mechanism; 201, a bottom plate; 202, an arc-shaped plate; 203, a pressing plate; 204, a connecting plate; 205, a cross plate; 206, a V-shaped plate; 207, a containing hole; 30, a lifting mechanism; 301, a rack; 302, a mounting shell; 303, a transmission shaft; 304, a gear; 305, a ratchet wheel; 306, a pawl; 307, a push piece; 308, a rocking handle; 40, a releasing mechanism; 401, a supporting rod; 402, an inclined surface; 403, a roller; 404, a base; 50, an inclining mechanism; 501, a support seat; 502, an L-shaped rod; 503, a return spring; 504, a limiting block. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0033] The present application will be further described below with reference to the embodiments.

[0034] With reference to Figures 1 to 8 The vacuum coating clamp with height adjustment function in the embodiment comprises a placing box 10, the placing box 10 is internally provided with a clamping mechanism 20 for simultaneously fixing multiple substrates, the bottom of the placing box 10 is provided with a lifting mechanism 30 for changing the height of the substrates, the side of the placing box 10 is provided with a releasing mechanism 40 for simultaneously releasing multiple substrates, and the bottom of the placing box 10 is further provided with an inclining mechanism 50 for keeping the substrates on the same side.

[0035] The clamping mechanism 20 comprises a plurality of accommodating holes 207 formed on the upper surface of the placing box 10, and each accommodating hole 207 is fixedly connected with a semicircular arc-shaped plate 202 at the bottom, and the arc-shaped plate 202 is further fixedly connected with a bottom plate 201 for placing the substrate.

[0036] The clamping mechanism 20 further comprises two connecting plates 204 symmetrically sliding through the side walls of the placing box 10, and a plurality of extrusion plates 203 for clamping the substrate are fixedly connected between the two connecting plates 204, each extrusion plate 203 is located above the upper surface of the bottom plate 201, and a horizontal plate 205 is fixedly connected between the same end of the two connecting plates 204, and a V-shaped plate 206 is fixedly connected to the side surface of the placing box 10 away from the horizontal plate 205.

[0037] The plurality of arc-shaped plates 202 are located on the same side of the bottom plate 201, and the size of the bottom plate 201 is consistent with that of the accommodating hole 207.

[0038] In specific work, when clamping the substrate, first, a plurality of substrates are simultaneously and respectively placed into the accommodating holes 207, so that the substrates are located on the upper surface of the bottom plate 201, and then the placing box 10 is lifted upward by the lifting mechanism 30, at this time, under the elastic pushing of the V-shaped plate 206, the horizontal plate 205 moves away from the placing box 10, and the horizontal plate 205 moves the extrusion plate 203 synchronously by the connecting plate 204 during the movement, and the extrusion plate 203 moves from the bottom plate 201 to the direction close to the arc-shaped plate 202, and the substrate is clamped by the extrusion plate 203 and the arc-shaped plate 202, and the plurality of extrusion plates 203 are driven to move horizontally synchronously by the rigid linkage structure of the horizontal plate 205 and the two connecting plates 204, so that the unified clamping of all the substrates inserted into the accommodating holes 207 can be realized in a single operation, which effectively solves the low efficiency problem caused by the traditional clamp which needs to be screwed or manually operated, significantly improves the clamping speed and operation convenience, and is especially suitable for large-scale and high-frequency batch film production scenes.

[0039] When it is necessary to release the clamping of the substrate, the horizontal plate 205 is pushed towards the placing box 10, and the horizontal plate 205 synchronously pushes the extrusion plate 203 to move by the connecting plate 204, so that the extrusion plate 203 moves away from the arc-shaped plate 202 synchronously, thereby synchronously releasing the clamping of all the substrates, overcoming the defects of the traditional clamp which is operated one by one.

[0040] The lifting mechanism 30 comprises a rack 301 fixedly connected to the bottom of the placing box 10, a rectangular mounting shell 302 slidingly sleeved outside the rack 301, a transmission shaft 303 rotatably connected to the side surface of the mounting shell 302, a gear 304 fixedly connected to one end of the transmission shaft 303 and engaged with the rack 301, and a handle 308 fixedly connected to the other end of the transmission shaft 303.

[0041] The lifting mechanism 30 further comprises a ratchet wheel 305 fixedly connected outside the transmission shaft 303, and a pawl 306 rotatably connected outside the mounting shell 302 and engaged with the ratchet wheel 305, and the pawl 306 is fixedly connected with a push piece 307 at an end away from the ratchet wheel 305.

[0042] The bottom of the rack 301 extends to the bottom of the base 404, and the bottom of the rack 301 is symmetrically provided with inclined surfaces.

[0043] In specific work, after the substrate is placed in the accommodating hole 207, the transmission shaft 303 is driven to rotate by rotating the handle 308, the gear 304 is synchronously driven to rotate by the transmission shaft 303, the rack 301 is driven to move upwards along the mounting shell 302 by the gear 304, the rack 301 synchronously drives the placing box 10 to rise, the continuous and stable lifting of the clamp in the vertical direction can be realized, the distance between the substrate and the evaporation source or the sputtering target can be flexibly adjusted, and the film coating operation on a large number of substrates at the same time is facilitated.

[0044] The releasing mechanism 40 comprises a base 404 fixedly connected to the bottom of the mounting shell 302, and a supporting rod 401 for driving the horizontal plate 205 to move is fixedly connected to the top of the base 404, and an inclined surface 402 is formed in the top of the supporting rod 401 close to one side of the horizontal plate 205.

[0045] The releasing mechanism 40 further comprises a roller 403 fixedly connected to the side of the horizontal plate 205 away from the placing box 10, and the roller 403 is in rolling connection with the inclined surface 402 at the top of the supporting rod 401.

[0046] In specific work, when the placing box 10 is lifted by the lifting mechanism 30, the roller 403 moves upwards from the inclined surface 402 at the top of the supporting rod 401, and when the roller 403 is separated from the top of the inclined surface 402, the releasing mechanism 40 releases the restriction on the clamping mechanism 20, so that the V-shaped plate 206 can drive the horizontal plate 205 to move away from the placing box 10, and the simultaneous clamping of multiple substrates is realized.

[0047] When the lifting mechanism 30 is lowered, the roller 403 moves from the top of the inclined surface 402 to the surface of the inclined surface 402, at this time, the roller 403 is pushed by the inclined surface 402 at the top of the supporting rod 401, so that the horizontal plate 205 moves towards the placing box 10, the horizontal plate 205 synchronously drives the pressing plate 203 to move by the connecting plate 204, so that the pressing plate 203 synchronously moves away from the arc-shaped plate 202, thereby synchronously releasing the clamping of all substrates, thereby driving all the pressing plates 203 to synchronously exit, and the pressing state of all the substrates is released at one time, compared with the traditional way of tightening the screw or manually loosening the buckle one by one, the artificial operation steps and time are greatly reduced, especially suitable for large quantities and high frequency vacuum coating production lines, effectively improving the work efficiency and reducing the labor intensity of the operators.

[0048] The tilting mechanism 50 comprises a support base 501 rotatably connected to the bottom of the base 404, and the lower surface of the base 404 is also circumferentially symmetrically slidably connected with an L-shaped rod 502, one end of the L-shaped rod 502 extending below the protrusion on the side of the support base 501, and the other end of the L-shaped rod 502 slidably connected with the inclined surface at the bottom of the rack 301.

[0049] The tilting mechanism 50 further comprises a limiting block 504 fixedly connected to the lower surface of the base 404, and the limiting block 504 is fixedly connected with a return spring 503 on the side, and one end of the return spring 503 away from the limiting block 504 is fixedly connected with the L-shaped rod 502.

[0050] In specific work, when the lifting mechanism 30 rises, the rack 301 is separated from between the two L-shaped rods 502, at this time, under the pushing of the return spring 503, the L-shaped rod 502 extends below the protrusion on the side of the support base 501, so as to realize the fixation of the support base 501 below the base 404.

[0051] When the lifting mechanism 30 descends, the bottom of the rack 301 descends between the two L-shaped rods 502, the L-shaped rod 502 is pushed by the rack 301 to be separated from below the protrusion on the side of the support base 501, and then the rack 301 continues to descend to push the base 404 to rotate with the one end of the support base 501 as the axis, so that the placing box 10 is in an inclined state, and one side of the arc-shaped plate 202 is in abutment, so that the substrate after being released from clamping is between the arc-shaped plate 202 and the bottom plate 201, avoiding the substrate from sliding into the interior of the placing box 10, the inclined placing box 10 can make the bottoms of multiple substrates supported by the bottom plate 201 and the sides pressed by the corresponding pressing plates 203, and the three-point constraint structure is formed by the wrapping and positioning of the substrate side wall by the semicircular arc-shaped plate 202, effectively preventing the displacement, tilting or vibration of the substrate in the vacuum environment or the rotation process, ensuring the consistency of the position of the substrate in the coating process, and improving the film uniformity and adhesion in large-scale coating.

[0052] Working principle:

[0053] When clamping the substrates, multiple substrates are clamped by the clamping mechanism 20 at the same time, and the placing box 10 is lifted by the lifting mechanism 30, in the process of lifting, the clamping mechanism 20 is released, so that multiple substrates are clamped at the same time, through the rigid linkage structure of the transverse plate 205 and the two side connecting plates 204, the multiple pressing plates 203 are driven to move horizontally synchronously, the unified clamping of all the substrates inserted into the containing holes 207 can be realized in a single operation, the low efficiency problem caused by the traditional clamp which needs to be screwed or manually operated buckle is effectively solved, the clamping speed and operation convenience are significantly improved, after coating, the placing box 10 is lowered by the lifting mechanism 30, the clamping of the clamping mechanism 20 is released by the releasing mechanism 40, the clamping of all the substrates is released synchronously, so that all the pressing plates 203 are driven to exit synchronously, the pressing state of all the substrates is released at one time, compared with the traditional way of screwing or manually opening the buckle, the artificial operation steps and time are greatly reduced, at the same time, the bottom of the rack 301 is inclined by the inclination mechanism 50, so that the placing box 10 is in an inclined state, to avoid the coated substrates from sliding into the placing box 10, then new substrates are placed in the placing box 10, the placing box 10 is lifted by the lifting mechanism 30, in the process of lifting, the clamping mechanism 20 is released, so that multiple substrates are clamped at the same time, at this time, the placing box 10 is restored to the horizontal state from the inclined state.

[0054] The above embodiments are only used to illustrate the technical solutions of the present application, but not limit it; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements will not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A vacuum coating fixture with height adjustment function, characterized in that, The device includes a placement box (10), which has a clamping mechanism (20) for simultaneously fixing multiple substrates inside, a lifting mechanism (30) for changing the height of the substrates at the bottom of the placement box (10), a release mechanism (40) for simultaneously releasing multiple substrates on the side of the placement box (10), and a tilting mechanism (50) for keeping the substrates on the same side at the bottom of the placement box (10). The clamping mechanism (20) includes a plurality of receiving holes (207) opened on the upper surface of the placement box (10), and a semi-circular arc plate (202) is fixedly connected to the bottom of each receiving hole (207), and a base plate (201) for placing the substrate is also fixedly connected to the bottom of the arc plate (202).

2. A vacuum coating fixture with height adjustment function according to claim 1, characterized in that, The clamping mechanism (20) further includes a connecting plate (204) that slides symmetrically through the side wall of the placement box (10). A plurality of extrusion plates (203) for clamping the substrate are fixedly connected between the two connecting plates (204). Each extrusion plate (203) is located above the upper surface of the base plate (201). A horizontal plate (205) is fixedly connected between the same end of the two connecting plates (204). A V-shaped plate (206) is fixedly connected to the side of the horizontal plate (205). The end of the V-shaped plate (206) away from the horizontal plate (205) is fixedly connected to the side of the placement box (10).

3. A vacuum coating fixture with height adjustment function according to claim 1, characterized in that, The lifting mechanism (30) includes a rack (301) fixedly connected to the bottom of the placement box (10). A rectangular mounting shell (302) is slidably sleeved on the outside of the rack (301). A drive shaft (303) is rotatably connected to the side of the mounting shell (302). A gear (304) is fixedly connected to one end of the drive shaft (303). The gear (304) meshes with the rack (301). A crank (308) is fixedly connected to the other end of the drive shaft (303).

4. A vacuum coating fixture with height adjustment function according to claim 3, characterized in that, The lifting mechanism (30) also includes a ratchet (305) fixedly connected to the outside of the drive shaft (303), and a pawl (306) is rotatably connected to the outside of the mounting housing (302). The pawl (306) meshes with the ratchet (305), and a paddle (307) is fixedly connected to the end of the pawl (306) away from the ratchet (305).

5. A vacuum coating fixture with height adjustment function according to claim 1, characterized in that, The release mechanism (40) includes a base (404) fixedly connected to the bottom of the mounting shell (302), and a support rod (401) for pushing the horizontal plate (205) to move is fixedly connected to the top of the base (404). An inclined surface (402) is provided on the top of the support rod (401) near the side of the horizontal plate (205).

6. A vacuum coating fixture with height adjustment function according to claim 5, characterized in that, The release mechanism (40) also includes a roller (403) fixedly connected to the side of the horizontal plate (205) away from the placement box (10), and the roller (403) is tactilely connected to the inclined surface (402) at the top of the support rod (401).

7. A vacuum coating fixture with height adjustment function according to claim 3, characterized in that, The bottom of the rack (301) extends to the bottom of the base (404), and the bottom of the rack (301) is symmetrically provided with inclined surfaces.

8. A vacuum coating fixture with height adjustment function according to claim 2, characterized in that, Multiple of the arc-shaped plates (202) are located on the same side of the base plate (201), and the base plate (201) is the same size as the receiving hole (207).

9. A vacuum coating fixture with height adjustment function according to claim 5, characterized in that, The tilting mechanism (50) includes a support seat (501) rotatably connected to the bottom of the base (404). An L-shaped rod (502) is circumferentially slidably connected to the lower surface of the base (404). One end of the L-shaped rod (502) extends to the underside of the protrusion on the side of the support seat (501), and the other end of the L-shaped rod (502) is slidably connected to the inclined surface at the bottom of the rack (301).

10. A vacuum coating fixture with height adjustment function according to claim 9, characterized in that, The tilting mechanism (50) also includes a limiting block (504) fixedly connected to the lower surface of the base (404). A return spring (503) is fixedly connected to the side of the limiting block (504). The end of the return spring (503) away from the limiting block (504) is fixedly connected to the L-shaped rod (502).

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