Silicon carbide growth crucible and silicon carbide growth device
By using nitrogen gas curtain protection and an automated cleaning mechanism in the silicon carbide growth apparatus, the problems of crucible contamination and crystal defects during silicon carbide growth are solved, achieving efficient crystal growth and low-cost cleaning.
Patent Information
- Application Number
- CN202511272279.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-08
- Publication Date
- 2025-11-21
AI Technical Summary
During silicon carbide growth, the gaseous substances generated by the reaction tend to nucleate and deposit unevenly in the non-seed crystal region on the inner wall of the crucible, leading to crucible contamination and increased crystal defects, which affects growth stability.
A silicon carbide growth apparatus was designed, including a protective mechanism, a closing mechanism, and a separation mechanism. The inner wall of the crucible is protected by a nitrogen gas curtain, and sand powder is separated by a rotary cleaning and magnetic filter plate to prevent gaseous substances from contacting the crucible wall and to achieve automated cleaning.
It effectively reduces nucleation in non-seed crystal regions, increases crystal growth rate by 10-15%, improves crystal purity and device flexibility, reduces cleaning difficulty, and reduces costs.
Smart Images
Figure CN120989727A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of silicon carbide growth equipment technology, specifically to a silicon carbide growth crucible and a silicon carbide growth apparatus. Background Technology
[0002] Silicon carbide (SiC), as a wide-bandgap semiconductor material, exhibits broad application prospects in high-temperature, high-frequency, and high-power electronic devices due to its excellent properties such as high breakdown electric field, high thermal conductivity, high electron saturation drift velocity, and good chemical stability. Currently, the physical vapor transport method (PVT, also known as the Lely method) is the main process for preparing high-quality, large-size silicon carbide single crystals. This method involves sublimating silicon carbide powder under high-temperature vacuum conditions to generate a vapor phase component containing silicon (Si) and carbon (C) (such as Si, Si2C, SiC2, etc.), which is then transported to the seed crystal surface under temperature gradient drive for vapor phase deposition growth.
[0003] During silicon carbide growth, gaseous substances (such as Si, Si2C, etc.) generated by the reaction are prone to non-uniform nucleation and deposition in the non-seed crystal region of the inner wall of the crucible, leading to crucible contamination, increased crystal defects, and even affecting the stability of subsequent growth batches. Summary of the Invention
[0004] The purpose of this invention is to provide a silicon carbide growth crucible and a silicon carbide growth apparatus to solve the problems mentioned in the background art.
[0005] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution:
[0006] This invention relates to a silicon carbide growth crucible and a silicon carbide growth apparatus, including a fixing frame, and further comprising:
[0007] A protective mechanism is mounted on a fixed frame. The protective mechanism includes a top cover mounted on the fixed frame, a crucible cylinder threaded onto the top cover, a heating base mounted on the crucible cylinder, a threaded groove on the inner wall of the crucible cylinder, an air outlet pipe on the top of the top cover, and a solenoid valve mounted on the air outlet pipe. The protective mechanism is used to form an air curtain through the threaded groove.
[0008] A closing mechanism is provided, which is mounted on a fixed frame. The closing mechanism includes a rotating shaft mounted on the fixed frame, a drive motor mounted on the fixed frame, an output shaft of the drive motor fixedly connected to the rotating shaft, and a toothed plate mounted on the rotating shaft. The closing mechanism is used to automatically close the crucible cylinder.
[0009] A separation mechanism is provided, which is installed inside a fixed frame. The separation mechanism includes a connecting ring block installed inside the fixed frame. The connecting ring block is provided with a limiting groove and an annular groove. The annular groove communicates with the limiting groove. A magnetic filter plate is installed inside the limiting groove. The separation mechanism is used to separate crushed sand from whole sand.
[0010] Furthermore, the protective mechanism includes a top cover and a heating base fixedly installed on a fixed frame. The crucible cylinder is threaded onto the top cover and the heating base. A threaded groove is provided on the inner wall of the crucible cylinder. An exhaust pipe is fixedly installed on the top of the top cover, and a solenoid valve is fixedly fitted onto the exhaust pipe.
[0011] Furthermore, an air inlet pipe is fixedly installed on the solenoid valve, a circular groove is opened inside the top cover, a trapezoidal annular groove is opened inside the top cover, the trapezoidal annular groove is connected to the crucible cylinder, the circular groove and the air outlet pipe, an air outlet groove is opened inside the crucible cylinder, and several circular holes are opened on the crucible cylinder, all of which are connected to the air outlet groove.
[0012] Furthermore, an annular gas box is rotatably fitted on the outer wall of the crucible cylinder, and a circular gas inlet pipe is fixedly installed on the outer wall of the annular gas box. A sliding plate is slidably installed on the fixing frame, and the circular gas inlet pipe passes through the sliding plate. A processing box is fixedly installed on the right side of the sliding plate, and the circular gas inlet pipe communicates with the processing box. A connecting pipe is fixedly installed on the right side of the processing box, and a nitrogen box is fixedly installed on the right side of the fixing frame. The nitrogen box is connected to the gas inlet pipe and the connecting pipe. The processing box includes a high-temperature filtration module, a condensation module, and an adsorption module for purifying and recycling nitrogen.
[0013] Furthermore, the closing mechanism includes a rotating shaft rotatably mounted on a fixed frame, a drive motor fixedly mounted on the fixed frame, a gear fixedly sleeved on the rotating shaft, and several toothed plates fixedly mounted on the crucible cylinder, the gear meshing with the several toothed plates.
[0014] Furthermore, a T-shaped ring plate is slidably installed on the fixed frame, and a number of connecting springs are fixedly installed on the top of the T-shaped ring plate. Limiting rods are fixedly installed on the top of the connecting springs, and the tops of the limiting rods slide into the air outlet grooves. The limiting rods are respectively adapted to a number of circular holes.
[0015] Furthermore, a fixing rod is fixedly installed on the fixing frame, and a rectangular sand-discharging block is fixedly installed at the top of the fixing rod. A sand-discharging groove is provided inside the rectangular sand-discharging block, and a sandblasting machine is fixedly installed on the outer wall of the rectangular sand-discharging block. The sandblasting machine is connected to the sand-discharging groove.
[0016] Furthermore, the separation mechanism includes a connecting ring block fixedly mounted on a fixed rod, wherein a limiting groove and an annular groove are formed on the connecting ring block, and the limiting groove and the annular groove are connected.
[0017] Furthermore, a magnetic filter plate is rotatably installed in the limiting groove, and several connecting rods are fixedly installed on the top of the T-shaped ring plate, with the ends of the connecting rods being fixedly connected to the magnetic filter plate.
[0018] Furthermore, a circular rod is fixedly installed at the bottom of the magnetic filter plate, the bottom end of the circular rod extends into the annular groove, a push plate is fixedly installed at the bottom end of the circular rod, the push plate is slidably connected to the annular groove, and a discharge pipe is fixedly installed at the bottom of the connecting ring block.
[0019] The present invention has the following beneficial effects:
[0020] (1) This invention provides a silicon carbide growth crucible and silicon carbide growth apparatus. During use, the gas inside the crucible is extracted through the exhaust pipe to ensure a vacuum state inside the crucible. Then, the solenoid valve is closed to prevent air from entering. Next, the nitrogen in the nitrogen tank is preheated. Nitrogen is then introduced into the crucible through the nitrogen tank via the inlet pipe, outlet pipe, circular groove, and trapezoidal annular groove. Under the limiting effect of the trapezoidal annular groove, the nitrogen blows into the threaded groove on the crucible. Under the limiting effect of the threaded groove, the nitrogen rotates and descends along the threaded groove, forming an air curtain on the inner wall of the crucible. During its descent, the nitrogen comes into contact with the circular hole and exits from the circular hole. The nitrogen gas enters through the shaped hole into the outlet groove, and then enters the processing box through the annular gas box and the circular inlet pipe. It then enters the nitrogen box through the processing box and the connecting pipe, forming a cycle. The high-temperature filtration module, condensation module and adsorption module in the processing box purify the nitrogen gas to prevent impurities from entering the nitrogen box (117) and affecting crystal growth. The nitrogen gas curtain will block the reaction gas phases such as Si / Si2C from contacting the crucible wall, reducing the nucleation of non-seed crystal areas. The spiral gas curtain (tangential gas inlet) generates swirling flow, which enhances the axial transmission of SiC2 / Si2C to the seed crystal, thereby increasing the crystal growth rate by 10-15%.
[0021] (2) The present invention provides a silicon carbide growth crucible and silicon carbide growth device. After the crystal is grown and formed, the drive motor is started. The drive motor drives the rotating shaft to rotate. The rotating shaft drives the gear to rotate. The gear drives the crucible cylinder to rotate under the action of several tooth plates. The crucible cylinder will rotate and descend. Since the top cover and the crucible cylinder are not moving, the crystal grown on the top cover and the crucible cylinder will remain still. After the crucible cylinder descends, the crystal will be exposed and can be removed. At the same time, the top cover and the crucible cylinder are exposed, which makes it easy to install seed crystals into the top cover and to put SiC powder into the heating base. It also makes it easy to clean the top cover and the crucible cylinder. When the crucible cylinder descends, it will drive the annular gas box to descend. The annular gas box will drive the circular air inlet pipe, the sliding plate and the processing box to descend synchronously, which improves the flexibility and rationality of the device.
[0022] (3) The present invention provides a silicon carbide growth crucible and silicon carbide growth device. When the crucible tube rotates and descends, the corresponding crucible tube will drive the limiting rod, connecting spring and T-shaped ring plate to rotate synchronously. Under the elastic force of the connecting spring, the limiting rod will extend into the circular hole. As the crucible tube continues to descend, the connecting spring will be continuously compressed, and the limiting rod will block the circular hole. After the rectangular sand-discharging block enters the crucible tube, the sandblasting machine is started. The sandblasting machine will spray sand onto the inner wall of the crucible tube through the rectangular sand-discharging block. During the continuous rotation and descent of the crucible tube, the sand sprayed by the rectangular sand-discharging block will thoroughly clean the inner wall of the crucible tube and remove the Si deposits on the inner wall of the crucible tube. The closure of the circular hole prevents the sprayed sand from falling into the gas outlet groove, resulting in impure nitrogen. The sprayed sand will slide down the bottom inner wall of the crucible tube into the limiting groove for collection, solving the problem of the crucible tube being difficult to clean and improving the purity of crystal growth.
[0023] (4) The present invention provides a silicon carbide growth crucible and silicon carbide growth device. The sand falling into the limiting groove will be placed on the magnetic filter plate. When the T-shaped ring plate rotates, it will drive the connecting rod to rotate. The connecting rod will drive the magnetic filter plate to rotate. Under the action of centrifugal force, the magnetic filter plate will filter the sand on the surface of the magnetic filter plate and filter down the metal impurities at the same time, separating the broken sand powder and the intact sand during sandblasting. The corresponding metal substances and intact sand will remain on the magnetic filter plate, and the corresponding sand powder will enter the annular groove. When the magnetic filter plate rotates, it will drive the circular rod to rotate. The circular rod will drive the push plate to rotate. The push plate will push the sand powder in the annular groove to be discharged from the discharge pipe, thereby realizing the separation of intact sand and sand powder, which is convenient for the reuse of intact sand in the later stage and reduces costs. After cleaning, the reverse drive motor will rotate the corresponding crucible cylinder back to the top cover and heating base, which is convenient for the next crystal growth and forming.
[0024] Of course, any product implementing this invention does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description
[0025] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0026] Figure 1 This is a schematic diagram of the overall structure of the present invention;
[0027] Figure 2 This is a schematic cross-sectional view of the side portion of the present invention;
[0028] Figure 3 This is a side cross-sectional view of the present invention;
[0029] Figure 4 For the present invention Figure 3 A magnified structural diagram of A in the middle;
[0030] Figure 5 For the present invention Figure 3 A magnified structural diagram of B in the diagram;
[0031] Figure 6 For the present invention Figure 3 A magnified structural diagram of C;
[0032] Figure 7 For the present invention Figure 3 A magnified structural diagram of D in the diagram;
[0033] Figure 8 For the present invention Figure 2 A magnified structural diagram of E in the middle.
[0034] The attached diagram lists the components represented by each number as follows:
[0035] In the diagram: 1. Fixing frame; 101. Top cover; 102. Crucible cylinder; 103. Heating base; 104. Threaded groove; 105. Gas outlet pipe; 106. Solenoid valve; 107. Gas inlet pipe; 108. Circular groove; 109. Trapezoidal annular groove; 110. Gas outlet groove; 111. Circular hole; 112. Annular gas box; 113. Circular gas inlet pipe; 114. Sliding plate; 115. Processing box; 116. Connecting pipe; 117. 1. Nitrogen box; 2. Rotating shaft; 201. Drive motor; 202. Gear; 203. Tooth plate; 204. T-shaped ring plate; 205. Connecting spring; 206. Limiting rod; 207. Fixing rod; 208. Rectangular sand discharge block; 209. Sandblasting machine; 3. Connecting ring block; 301. Limiting groove; 302. Annular groove; 303. Magnetic filter plate; 304. Connecting rod; 305. Circular rod; 306. Push plate; 307. Discharge pipe. Detailed Implementation
[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0037] Please see Figures 1-8 As shown, the present invention is a silicon carbide growth crucible and silicon carbide growth apparatus, including a fixing frame 1, and further comprising:
[0038] The protective mechanism is mounted on a fixed frame 1. The protective mechanism includes a top cover 101 mounted on the fixed frame 1, a crucible cylinder 102 threaded onto the top cover 101, a heating base 103 mounted on the crucible cylinder 102, and a threaded groove 104 formed on the inner wall of the crucible cylinder 102. An air outlet pipe 105 is located at the top of the top cover 101, and a solenoid valve 106 is mounted on the air outlet pipe 105. The protective mechanism is used to form an air curtain through the threaded groove 104. The protective mechanism includes a fixed frame 101. A top cover 101 and a heating base 103 are mounted on a fixed frame 1. A crucible cylinder 102 is threaded onto the top cover 101 and the heating base 103. A threaded groove 104 is formed on the inner wall of the crucible cylinder 102. An exhaust pipe 105 is fixedly installed on the top of the top cover 101. A solenoid valve 106 is fixedly fitted onto the exhaust pipe 105. An intake pipe 107 is fixedly installed onto the solenoid valve 106. A circular groove 108 and a trapezoidal annular groove 108 are formed inside the top cover 101. 09. The trapezoidal annular groove 109 communicates with the crucible cylinder 102, the circular groove 108, and the vent pipe 105. A vent groove 110 is provided inside the crucible cylinder 102, and several circular holes 111 are provided on the crucible cylinder 102, all of which communicate with the vent groove 110. An annular gas box 112 is rotatably fitted onto the outer wall of the crucible cylinder 102. A circular gas inlet pipe 113 is fixedly installed on the outer wall of the annular gas box 112. A sliding plate 114 is slidably installed on the fixing frame 1. A circular inlet pipe 113 passes through a sliding plate 114. A processing box 115 is fixedly installed on the right side of the sliding plate 114. The circular inlet pipe 113 communicates with the processing box 115. A connecting pipe 116 is fixedly installed on the right side of the processing box 115. A nitrogen tank 117 is fixedly installed on the right side of the mounting bracket 1. The nitrogen tank 117 is connected to the inlet pipe 107 and the connecting pipe 116. The processing box 115 includes a high-temperature filtration module, a condensation module, and an adsorption module to purify and recycle nitrogen.
[0039] During use, the gas inside the crucible cylinder 102 is extracted through the vent pipe 105 to ensure a vacuum state inside the crucible cylinder 102. Then, the solenoid valve 106 is closed to prevent air from entering. The nitrogen in the nitrogen tank 117 is then preheated. Nitrogen is introduced into the crucible cylinder 102 through the nitrogen tank 117 via the inlet pipe 107, the outlet pipe 105, the circular groove 108, and the trapezoidal annular groove 109. Under the limiting action of the trapezoidal annular groove 109, the nitrogen is blown into the threaded groove 104 on the crucible cylinder 102. Under the limiting action of the threaded groove 104, the nitrogen rotates and descends along the threaded groove 104, forming an air curtain on the inner wall of the crucible cylinder 102. During its descent, the nitrogen comes into contact with the circular hole 11. 1. The gas enters from the circular hole 111 into the outlet groove 110, and then from the annular gas box 112 and the circular inlet pipe 113 into the processing box 115. Finally, it enters from the processing box 115 and the connecting pipe 116 into the nitrogen box 117, forming a cycle. The high-temperature filtration module, condensation module and adsorption module in the processing box 115 purify the nitrogen to prevent impurities from entering the nitrogen box 117 and affecting crystal growth. The nitrogen gas curtain will block the reaction gas phases such as Si / Si2C from contacting the crucible wall, reducing nucleation in the non-seed crystal area. The spiral gas curtain tangentially enters and generates swirling flow, which enhances the axial transmission of SiC2 / Si2C to the seed crystal, thereby increasing the crystal growth rate by 10-15%.
[0040] like Figure 2 , Figure 3 , Figure 5 , Figure 6 , Figure 7 and Figure 8 As shown, a closing mechanism is mounted on a fixed frame 1. The closing mechanism includes a rotating shaft 2 mounted on the fixed frame 1, a drive motor 201 mounted on the fixed frame 1, and a gear 202 fixedly connected to the output shaft of the drive motor 201. A gear plate 203 is mounted on the rotating shaft 2. The closing mechanism is used to automatically close the crucible cylinder 102. The closing mechanism includes a rotating shaft 2 rotatably mounted on the fixed frame 1, a drive motor 201 fixedly mounted on the fixed frame 1, a gear 202 fixedly sleeved on the rotating shaft 2, and several gear plates 203 fixedly mounted on the crucible cylinder 102. The gear 202 meshes with the several gear plates 203. A sliding mounting plate is mounted on the fixed frame 1. The device is equipped with a T-shaped ring plate 204. Several connecting springs 205 are fixedly installed on the top of the T-shaped ring plate 204. Limiting rods 206 are fixedly installed on the top of each connecting spring 205. The tops of the limiting rods 206 slide into the air outlet groove 110. The limiting rods 206 are respectively matched with several circular holes 111. A fixing rod 207 is fixedly installed on the fixing frame 1. A rectangular sand-discharging block 208 is fixedly installed on the top of the fixing rod 207. A sand-discharging groove is provided inside the rectangular sand-discharging block 208. A sandblasting machine 209 is fixedly installed on the outer wall of the rectangular sand-discharging block 208. The sandblasting machine 209 is connected to the sand-discharging groove.
[0041] As the crucible cylinder 102 rotates and descends, it drives the limiting rod 206, connecting spring 205, and T-shaped ring plate 204 to rotate synchronously. Under the elastic force of the connecting spring 205, the limiting rod 206 extends into the circular hole 111. As the crucible cylinder 102 continues to descend, the connecting spring 205 is continuously compressed, and the limiting rod 206 blocks the circular hole 111. After the rectangular sand-discharging block 208 enters the crucible cylinder 102, the sandblasting machine 209 is started. The sandblasting machine 209 will pass through the rectangular sand-discharging block 208. Sand is sprayed onto the inner wall of the crucible cylinder 102. As the crucible cylinder 102 continues to rotate and descend, the sand sprayed by the rectangular sand-discharging block 208 thoroughly cleans the inner wall of the crucible cylinder 102, removing the Si deposits on the inner wall of the crucible cylinder 102. The closure of the circular hole 111 prevents the sprayed sand from falling into the gas outlet groove 110, which would result in impure nitrogen. The corresponding sprayed sand will slide down the bottom inner wall of the crucible cylinder 102 into the limiting groove 301 for collection, solving the problem that the crucible cylinder 102 is inconvenient to clean, while improving the purity of crystal growth.
[0042] like Figure 7 and Figure 8 As shown, the separation mechanism is installed within the fixed frame 1. The separation mechanism includes a connecting ring block 3 installed within the fixed frame 1. The connecting ring block 3 has a limiting groove 301 and an annular groove 302, which communicate with the limiting groove 301. A magnetic filter plate 303 is installed within the limiting groove 301. The separation mechanism is used to separate crushed sand from whole sand. The separation mechanism also includes a connecting ring block 3 fixedly installed on a fixed rod 207. The connecting ring block 3 has a limiting groove 301 and an annular groove 302. 302 is connected; a magnetic filter plate 303 is rotatably installed in the limiting groove 301; several connecting rods 304 are fixedly installed on the top of the T-shaped ring plate 204, and the ends of the connecting rods 304 are fixedly connected to the magnetic filter plate 303; a circular rod 305 is fixedly installed on the bottom of the magnetic filter plate 303, the bottom end of the circular rod 305 extends into the annular groove 302, a push plate 306 is fixedly installed on the bottom end of the circular rod 305, the push plate 306 is slidably connected to the annular groove 302, and a discharge pipe 307 is fixedly installed on the bottom of the connecting ring block 3.
[0043] The sand falling into the limiting groove 301 will be placed on the magnetic filter plate 303. When the T-shaped ring plate 204 rotates, it will drive the connecting rod 304 to rotate, which in turn will drive the magnetic filter plate 303 to rotate. Under the action of centrifugal force, the magnetic filter plate 303 filters the sand on its surface and also filters out metal impurities, separating the broken sand powder from the intact sand during sandblasting. The corresponding metal substances and intact sand will remain on the magnetic filter plate 303, while the corresponding sand powder will enter the annular groove 301. Inside 02, when the magnetic filter plate 303 rotates, it drives the circular rod 305 to rotate. The circular rod 305 drives the push plate 306 to rotate. The push plate 306 pushes the sand powder in the annular groove 302 to be discharged from the discharge pipe 307, thereby realizing the separation of whole sand and sand powder. This facilitates the reuse of whole sand in the later stage and reduces costs. After cleaning, the reverse drive motor 201 is reversed, and the corresponding crucible cylinder 102 will rotate again onto the top cover 101 and the heating base 103, which is convenient for the next crystal growth and forming.
[0044] During use, the gas inside the crucible cylinder 102 is extracted through the vent pipe 105 to ensure a vacuum state inside the crucible cylinder 102. Then, the solenoid valve 106 is closed to prevent air from entering. The nitrogen in the nitrogen tank 117 is then preheated. Nitrogen is introduced into the crucible cylinder 102 through the nitrogen tank 117 via the inlet pipe 107, the outlet pipe 105, the circular groove 108, and the trapezoidal annular groove 109. Under the limiting action of the trapezoidal annular groove 109, the nitrogen is blown into the threaded groove 104 on the crucible cylinder 102. Under the limiting action of the threaded groove 104, the nitrogen rotates and descends along the threaded groove 104, forming a vacuum on the inner wall of the crucible cylinder 102. Nitrogen gas enters the outlet groove 110 through the circular hole 111 during its descent, and then enters the processing box 115 through the annular gas box 112 and the circular inlet pipe 113. Finally, it enters the nitrogen box 117 through the processing box 115 and the connecting pipe 116, forming a cycle. The high-temperature filtration module, condensation module, and adsorption module in the processing box 115 purify the nitrogen gas to prevent impurities from entering the nitrogen box 117 and affecting crystal growth. The nitrogen gas curtain also blocks the contact of Si / Si2C and other reactive gas phases with the crucible wall. The spiral gas curtain generates swirling flow through tangential air intake.
[0045] After the crystal is grown and formed, the drive motor 201 is started. The drive motor 201 drives the rotating shaft 2 to rotate, and the rotating shaft 2 drives the gear 202 to rotate. Under the action of several toothed plates 203, the gear 202 drives the crucible cylinder 102 to rotate. The crucible cylinder 102 will rotate and descend. Since the top cover 101 and the crucible cylinder 102 are stationary, the crystal grown on the top cover 101 and the crucible cylinder 102 will remain stationary. Correspondingly, after the crucible cylinder 102 descends, the crystal will be exposed and can be removed. At the same time, the top cover 101 and the crucible cylinder 102 are exposed, which facilitates the installation of seed crystals into the top cover 101 and the placement of SiC powder into the heating base 103. It also facilitates the cleaning of the top cover 101 and the crucible cylinder 102. When the crucible cylinder 102 descends, it will drive the annular gas box 112 to descend. The annular gas box 112 will drive the circular air inlet pipe 113, the sliding plate 114 and the processing box 115 to descend synchronously.
[0046] As the crucible cylinder 102 rotates and descends, it drives the limiting rod 206, connecting spring 205, and T-shaped ring plate 204 to rotate synchronously. Under the elastic force of the connecting spring 205, the limiting rod 206 extends into the circular hole 111. As the crucible cylinder 102 continues to descend, the connecting spring 205 is continuously compressed, and the limiting rod 206 blocks the circular hole 111. After the rectangular sand-discharging block 208 enters the crucible cylinder 102, the sandblasting machine 209 is started. The sandblasting machine 209 will pass through the rectangular... The sand-discharging block 208 sprays sand onto the inner wall of the crucible cylinder 102. As the crucible cylinder 102 continues to rotate and descend, the sand sprayed by the rectangular sand-discharging block 208 thoroughly cleans the inner wall of the crucible cylinder 102, removing the Si deposits on the inner wall of the crucible cylinder 102. The closure of the circular hole 111 prevents the sprayed sand from falling into the gas outlet groove 110, which would result in impure nitrogen. Correspondingly, the sprayed sand will slide down the bottom inner wall of the crucible cylinder 102 into the limiting groove 301 for collection, solving the problem that the crucible cylinder 102 is inconvenient to clean.
[0047] The sand falling into the limiting groove 301 will be placed on the magnetic filter plate 303. When the T-shaped ring plate 204 rotates, it will drive the connecting rod 304 to rotate. The connecting rod 304 will drive the magnetic filter plate 303 to rotate. Under the action of centrifugal force, the magnetic filter plate 303 filters the sand on its surface and metal impurities at the same time, separating the broken sand powder from the intact sand during sandblasting. The corresponding metal substances and intact sand will remain on the magnetic filter plate 303, and the corresponding sand powder will enter the annular groove 302. When the magnetic filter plate 303 rotates, it will drive the circular rod 305 to rotate. The circular rod 305 will drive the push plate 306 to rotate. The push plate 306 will push the sand powder in the annular groove 302 to be discharged from the discharge pipe 307. After cleaning, the reverse drive motor 201 will rotate, and the corresponding crucible cylinder 102 will rotate again to the top cover 101 and the heating base 103 to facilitate the next crystal growth and forming.
[0048] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims
1. A silicon carbide growth crucible, comprising a fixing frame (1), characterized in that, Also includes: A protective mechanism is provided on a fixed frame (1). The protective mechanism includes a top cover (101) provided on the fixed frame (1). A crucible cylinder (102) is threaded on the top cover (101). A heating base (103) is provided on the crucible cylinder (102). A threaded groove (104) is provided on the inner wall of the crucible cylinder (102). An air outlet pipe (105) is provided on the top of the top cover (101). A solenoid valve (106) is provided on the air outlet pipe (105). The protective mechanism is used to form an air curtain through the threaded groove (104). A closing mechanism is provided on a fixed frame (1). The closing mechanism includes a rotating shaft (2) provided on the fixed frame (1). A drive motor (201) is provided on the fixed frame (1). The output shaft of the drive motor (201) is fixedly connected to the rotating shaft (2). A toothed plate (203) is provided on the rotating shaft (2). The closing mechanism is used to automatically close the crucible cylinder (102). The separation mechanism is set inside the fixed frame (1). The separation mechanism includes a connecting ring block (3) set inside the fixed frame (1). The connecting ring block (3) is provided with a limiting groove (301) and an annular groove (302). The annular groove (302) communicates with the limiting groove (301). A magnetic filter plate (303) is provided inside the limiting groove (301). The separation mechanism is used to separate crushed sand from whole sand.
2. The silicon carbide growth crucible according to claim 1, characterized in that: The protective mechanism includes a top cover (101) and a heating base (103) fixedly installed on a fixed frame (1). The crucible cylinder (102) is threaded onto the top cover (101) and the heating base (103). A threaded groove (104) is provided on the inner wall of the crucible cylinder (102). An exhaust pipe (105) is fixedly installed on the top of the top cover (101). A solenoid valve (106) is fixedly installed on the exhaust pipe (105).
3. The silicon carbide growth crucible according to claim 1, characterized in that: An air inlet pipe (107) is fixedly installed on the solenoid valve (106). A circular groove (108) is opened in the top cover (101). A trapezoidal annular groove (109) is opened in the top cover (101). The trapezoidal annular groove (109) is connected to the crucible cylinder (102), the circular groove (108) and the air outlet pipe (105). An air outlet groove (110) is opened in the crucible cylinder (102). Several circular holes (111) are opened on the crucible cylinder (102). Several circular holes (111) are connected to the air outlet groove (110).
4. The silicon carbide growth crucible according to claim 1, characterized in that: An annular gas box (112) is rotatably fitted on the outer wall of the crucible cylinder (102). A circular air inlet pipe (113) is fixedly installed on the outer wall of the annular gas box (112). A sliding plate (114) is slidably installed on the fixing frame (1). The circular air inlet pipe (113) passes through the sliding plate (114). A processing box (115) is fixedly installed on the right side of the sliding plate (114). The circular air inlet pipe (113) communicates with the processing box (115). A connecting pipe (116) is fixedly installed on the right side of the processing box (115). A nitrogen box (117) is fixedly installed on the right side of the fixing frame (1). The nitrogen box (117) is connected to the air inlet pipe (107) and the connecting pipe (116). The processing box (115) includes a high-temperature filtration module, a condensation module, and an adsorption module to purify and recycle nitrogen.
5. A silicon carbide growth crucible according to claim 1, characterized in that: The closing mechanism includes a rotating shaft (2) rotatably mounted on a fixed frame (1), a drive motor (201) is fixedly mounted on the fixed frame (1), a gear (202) is fixedly sleeved on the rotating shaft (2), and a plurality of toothed plates (203) are fixedly mounted on the crucible cylinder (102), and the gear (202) meshes with the plurality of toothed plates (203).
6. A silicon carbide growth crucible according to claim 3, characterized in that: A T-shaped ring plate (204) is slidably installed on the fixed frame (1). Several connecting springs (205) are fixedly installed on the top of the T-shaped ring plate (204). Limiting rods (206) are fixedly installed on the top of the several connecting springs (205). The tops of the several limiting rods (206) slide into the air outlet groove (110). The several limiting rods (206) are respectively adapted to several circular holes (111).
7. A silicon carbide growth crucible according to claim 1, characterized in that: A fixing rod (207) is fixedly installed on the fixing frame (1). A rectangular sand-discharging block (208) is fixedly installed at the top of the fixing rod (207). A sand-discharging groove is provided inside the rectangular sand-discharging block (208). A sandblasting machine (209) is fixedly installed on the outer wall of the rectangular sand-discharging block (208). The sandblasting machine (209) is connected to the sand-discharging groove.
8. A silicon carbide growth crucible according to claim 7, characterized in that: The separation mechanism includes a connecting ring block (3) fixedly installed on a fixed rod (207). The connecting ring block (3) has a limiting groove (301) and an annular groove (302) that are connected.
9. A silicon carbide growth crucible according to claim 1, characterized in that: A magnetic filter plate (303) is rotatably installed in the limiting groove (301), and a number of connecting rods (304) are fixedly installed on the top of the T-shaped ring plate (204), with the ends of the connecting rods (304) being fixedly connected to the magnetic filter plate (303).
10. A silicon carbide growth apparatus according to claim 1, characterized in that: The invention includes a silicon carbide growth crucible as described in any one of claims 1-9, wherein a circular rod (305) is fixedly installed at the bottom of the magnetic filter plate (303), the bottom end of the circular rod (305) extends into the annular groove (302), a push plate (306) is fixedly installed at the bottom end of the circular rod (305), the push plate (306) is slidably connected to the annular groove (302), and a discharge pipe (307) is fixedly installed at the bottom of the connecting ring block (3).