Automatic chip testing equipment

Abstract

The invention relates to the field of semiconductor chip production equipment, and discloses chip automatic test equipment, which is characterized in that chip test positioning mechanisms are arranged above two sides of a chip placement acupoint; the chip test positioning mechanism comprises an elastic pressing part which elastically presses the upper surface of the corresponding side of the chip in the chip placement acupoint in the vertical direction in a normal state, and a transmission mechanism. An avoiding driving mechanism used for linearly driving the transmission mechanism is arranged in the equipment shell, and in the process that the avoiding driving mechanism drives the transmission mechanism to move upwards, the elastic abutting part firstly vertically moves upwards and then moves towards the lateral upper portion to leave the upper portion of the chip placement hole; and the chip testing and positioning mechanism is provided with a pressure adjusting structure for adjusting the pressure of the elastic pressing part on the upper surface of the chip. The pressure can be adjusted according to the thickness of the chip, and the chip and parts such as conductive adhesive on equipment are not damaged while the requirement of conducting connection is met; the automatic chip testing equipment is higher in chip testing applicability and better in testing stability.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor chip production equipment, and particularly relates to chip automatic test equipment. BACKGROUND

[0002] In the production and processing of chips, in order to improve the yield and quality stability of chips, chip detection and testing is an important process in chip production. In the chip testing process, the to-be-tested chip needs to be stably positioned and limited with the test circuit board for testing. The existing test equipment generally includes a test seat arranged on the upper side of the test circuit board for limiting the chip and a chip positioning mechanism for positioning the chip. The existing chip positioning mechanism generally includes two types, the first type is an elastic rotating pressing block, which is moved away when the chip is taken and placed, and then the chip is positioned and pressed in the test seat by elasticity. Since the spring is not adjustable, the pressure generated by the elastic rotation angle is different for chips of different thicknesses. For a chip with small thickness, the elastic pressure is insufficient, which leads to unstable connection of the chip with the test circuit board. For a chip with large thickness, the elastic pressure is too large, which leads to damage to the connection structure of the chip with the test circuit board, and the practicability is poor. The other type is a multi-directional driving mechanism cooperating with a pressing block. The pressing block is moved away when the chip is taken and placed, and then the pressing block is moved above the chip for positioning and pressing during testing. The multi-directional driving mechanism is composed of a horizontal power driving mechanism and a vertical power driving mechanism, and the structure is large and complex, and the stability needs to be improved. SUMMARY

[0003] The present application provides chip automatic test equipment. The technical problem that the applicability and testing stability of the chip positioning mechanism of the existing test equipment need to be improved is solved.

[0004] The chip automatic testing device comprises a device shell, a fixed base plate arranged in the device shell, a plurality of test circuit boards arranged on the fixed base plate, a test seat arranged on the upper side of the test circuit board and used for limiting the chip, and a chip transfer mechanism used for automatically feeding and discharging the chip in the test seat.

[0005] Further, the chip test positioning mechanism further comprises a limiting outer plate frame, a vertical sliding part, a horizontal sliding part and a horizontal driving part, the vertical sliding part is arranged in the limiting outer plate frame and is limited to move in the vertical direction by the limiting outer plate frame, the vertical sliding part is provided with a horizontal through limiting cavity for limiting the horizontal sliding part to move in the horizontal direction, the limiting outer plate frame is provided with a window for the horizontal sliding part to move, the vertical sliding part is provided with a vertical through giving cavity corresponding to the horizontal through limiting cavity, the horizontal driving part is fixedly arranged on the upper side of the limiting outer plate frame at the upper end and extends into the vertical through giving cavity in the vertical direction at the lower end, the horizontal sliding part is provided with a vertical through driving cavity for the horizontal driving part to pass through in the vertical direction, one end of the elastic pressing part protruding from the horizontal through limiting cavity is fixed on the horizontal sliding part, a first elastic member is arranged between the upper part of the elastic pressing part and the corresponding side of the horizontal sliding part, the upper end of the vertical through driving cavity is provided with a first driving slope away from the side of the elastic pressing part, the lower end of the horizontal driving part is provided with a second driving slope parallel to the first driving slope, the lower end of the transmission mechanism is fixedly connected with the vertical sliding part, and the upper end of the limiting outer plate frame is provided with a vertical through giving hole for the transmission mechanism to pass through. One-way driving can realize the required movement of the elastic pressing part in the vertical direction and the horizontal direction, and the structure is simple.

[0006] Further, the limiting outer plate frame comprises an upper fixed plate, a lower fixed plate, a front fixed plate and a rear fixed plate, the upper fixed plate and the lower fixed plate are arranged in correspondence with each other, the front fixed plate and the rear fixed plate are fixed to the front side and the rear side of the lower surface of the upper fixed plate and the upper surface of the lower fixed plate, the front fixed plate and the rear fixed plate are provided with at least two vertical limiting convex strips arranged in the vertical direction on the corresponding side, the vertical sliding part is arranged between the upper fixed plate and the lower fixed plate and is provided with vertical limiting sliding grooves on the front and rear sides matched with the vertical limiting convex strips, and the upper fixed plate is provided with a spring part arranged in an elastic compression manner between the vertical sliding part. The simple structure realizes elastic contact limiting and taking and placing of the upper surface of the chip.

[0007] Further, the horizontal limiting cavity comprises a first horizontal limiting cavity body away from one side of the elastic pressing part and a second horizontal limiting cavity body close to one side of the elastic pressing part, the height of the first horizontal limiting cavity body is greater than the height of the second horizontal limiting cavity body, and the horizontal sliding part comprises a first horizontal sliding part and a second horizontal sliding part which are horizontally limited and slide by the first horizontal limiting cavity body and the second horizontal limiting cavity body respectively. The second horizontal limiting cavity body can limit the horizontal sliding distance of the first horizontal sliding part towards one side of the elastic pressing part, and the structure is simple and effective.

[0008] Further, the elastic pressing part comprises a transmission rod and an elastic pressing head which is replaceably and fixedly arranged at the lower end of the transmission rod, and one end of the upper part is fixedly connected with the horizontal sliding part. The overall applicability of the equipment is effectively improved.

[0009] Further, the transmission rod is provided with a horizontally protruding rectangular boss at a horizontal corresponding position on the corresponding side of the horizontal sliding part, the horizontal sliding part is provided with a rectangular recess matched with the rectangular boss at a corresponding position on the corresponding end of the transmission rod and the rectangular boss, the transmission rod is provided with a first threaded hole horizontally penetrating at a corresponding position of the rectangular boss, the bottom of the rectangular recess is provided with a second threaded hole matched with the first threaded hole, and the first threaded hole is provided with a first bolt which fixes the transmission rod and the horizontal sliding part together through the first threaded hole and the second threaded hole. The structure is compact and stable.

[0010] Further, the placing driving mechanism comprises a positioning plate, a driving plate and a linear driving mechanism for driving the vertical movement of the driving plate, the upper fixed plate is fixed to the lower surface of the positioning plate, the transmission mechanism comprises a limiting part, a connecting part and a fixed part which are sequentially connected, the positioning plate, the driving plate and the upper fixed plate are provided with coaxial vertically penetrating driving limiting holes at corresponding positions above the vertical limiting cavity and above the upper end of the vertical sliding part, the inner diameter of the driving limiting hole is smaller than the outer diameter of the limiting part, the lower end of the connecting part vertically penetrates the driving limiting hole and the fixed part is fixed to the upper end of the vertical sliding part, and the limiting part is located above the driving plate. The cost is reduced and the stability is improved.

[0011] Further, the part of the connecting part above the positioning plate during operation is a positioning threaded rod, the part of the connecting part below the positioning threaded rod is a light pole, a plurality of positioning nuts matched with the positioning threaded rod are arranged on the positioning threaded rod, and a positioning washer with a U-shaped opening is arranged between the positioning nut on the positioning threaded rod and the limiting part. While meeting the connection, the conductive glue and other components on the chip and the device are not damaged, and the practicability is high.

[0012] Further, a plurality of alignment limiting holes vertically penetrating are arranged on the driving plate, an alignment limiting rod limited by the alignment limiting holes to move in the vertical direction is arranged on the positioning plate, and the lower end of the alignment limiting rod is fixed on the positioning plate through the alignment limiting hole. The stability of the device in long-term operation is improved.

[0013] Further, the lower end of the transmission rod is provided with a horizontal lug, the horizontal lug is perpendicular to the horizontal movement direction of the horizontal sliding part in the horizontal protruding direction of the lower end of the transmission rod, the elastic pressure head is fixed on the side of the lower end of the horizontal lug away from the transmission rod, and the chip test positioning mechanisms for limiting the chip in the chip accommodation hole are symmetrically arranged on the front side above the left side of the chip accommodation hole and the rear side above the right side of the chip accommodation hole. The structure is more compact, and the occupied space is small. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a front view schematic diagram of the chip positioning structure of the application;

[0015] Figure 2 It is a front view schematic diagram of the chip test positioning mechanism after removing some components;

[0016] Figure 3 It is a front view schematic diagram of the structure of the chip test positioning mechanism, the test circuit board and the test seat after removing some components;

[0017] Figure 4 It is a front view schematic diagram of the chip test positioning mechanism;

[0018] Figure 5 It is a sectional view schematic diagram of the chip test positioning mechanism in the case of elastically pressing the chip;

[0019] Figure 6 It is a sectional view schematic diagram of the chip test positioning mechanism in the case of moving away from the chip above;

[0020] Figure 7 It is a sectional view schematic diagram of the elastic pressing part, the limiting outer plate frame, the vertical sliding part, the horizontal sliding part and the first elastic member;

[0021] Figure 8Fig. 2 is a cross-sectional view of the elastic pressing part and the horizontal sliding part;

[0022] Figure 9 Fig. 3 is a cross-sectional view of the chip testing positioning mechanism and the part components of the giving-in driving mechanism when the elastic pressing part presses the chip;

[0023] Figure 10 Fig. 4 is a cross-sectional view of the chip testing positioning mechanism and the part components of the giving-in driving mechanism when the chip testing positioning mechanism is removed from above the chip.

[0024] In the figure, the following are marked: fixed base plate 100, testing circuit board 200, testing seat 300, chip placement hole 301, chip testing positioning mechanism 400, elastic pressing part 410, transmission rod 411, elastic pressing head 412, second elastic member limiting cavity 413, rectangular boss 414, first threaded hole 415, first bolt 416, horizontal protrusion 417, transmission mechanism 420, limiting part 421, connecting part 422, fixed part 423, spring member 424, position adjusting nut 425, position adjusting washer 426, limiting outer plate frame 430, upper fixed plate 431, lower fixed plate 432, front fixed plate 433, rear fixed plate 434, vertical limiting protrusion 435, vertical sliding part 440, horizontal through limiting cavity 441, vertical through giving-in cavity 442, vertical limiting sliding groove 443, first elastic member limiting cavity 444, spring limiting groove 445, horizontal sliding part 450, vertical through driving cavity 451, first driving inclined surface 452, rectangular recess 453, second threaded hole 454, horizontal driving part 460, first elastic member 470, giving-in driving mechanism 500, positioning plate 510, alignment limiting rod 511, driving plate 520, chip 600. DETAILED DESCRIPTION

[0025] The present application is further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] As Figure 1The chip automatic test equipment shown comprises a device shell, a fixed base plate 100 arranged inside the device shell, a plurality of test circuit boards 200 arranged on the fixed base plate 100, a test seat 300 arranged on the upper side of the test circuit board 200 for limiting the chip 600 and a chip transfer mechanism for automatically feeding and discharging the chip 600 in the test seat 300, the upper surface of the test seat 300 is provided with a chip placement acupoint 301 for accommodating the limited chip 600, the upper sides of both sides of the chip placement acupoint 301 are provided with a chip test positioning mechanism 400, the chip test positioning mechanism 400 comprises an elastic pressing part 410 elastically pressed in the vertical direction of the chip 600 corresponding to one side of the upper surface of the chip placement acupoint 301 in the normal state and a transmission mechanism 420, the device shell is provided with a let-out driving mechanism 500 for linearly driving the transmission mechanism 420 and the let-out driving mechanism 500 drives the transmission mechanism 420 to move upward, during which the elastic pressing part 410 first moves upward vertically and then moves to the upper side of the chip placement acupoint 301, the chip test positioning mechanism 400 is provided with a pressure adjusting structure for adjusting the pressure of the elastic pressing part 410 on the upper surface of the chip 600.

[0027] In the specific implementation, initially, the chip placement acupoint 301 on the test seat 300 is empty, and the lower end of the elastic pressing part 410 is located in the chip placement acupoint 301; the let-out driving mechanism 500 drives the transmission mechanism 420 to move upward, during which the elastic pressing part 410 first moves upward and then moves to the upper side of the chip placement acupoint 301 to a preset position; the chip transfer mechanism transfers the chip 600 to be tested to the chip placement acupoint 301 on the test seat 300 (each chip test positioning mechanism 400 is arranged at intervals, and the elastic pressing part 410 first moves upward and then moves to the upper side of the chip placement acupoint 301 to a preset position, and there is no blockage directly above the chip); the let-out driving mechanism 500 moves downward to reset, and the elastic pressing part 410 resets, first moves to the lower side and then moves downward vertically until the lower end of the elastic pressing part 410 elastically contacts the upper surface of the side corresponding to the chip 600 in the chip placement acupoint 301, the chip 600 is limited and pressed, the chip 600 is in conduction with the test circuit board 200, and after stable positioning, the chip 600 is detected and tested; after the chip 600 is tested, the let-out driving mechanism 500 drives the transmission mechanism 420 to move upward, during which the elastic pressing part 410 first moves upward and then moves to the upper side of the chip placement acupoint 301 to a preset position; the chip transfer mechanism transfers the tested chip 600 in the chip placement acupoint 301 on the test seat 300 away and transfers the chip 600 to be tested to the chip placement acupoint 301, and the chip 600 to be tested can be tested according to the above operation; the elastic pressing part 410 elastically contacts and presses the chip 600 vertically, the chip 600 is positioned, only vertical force is applied, and the positioning and limiting are more stable;

[0028] When the device is used for testing, when testing chips 600 of different thicknesses, the pressure adjusting structure can be adjusted according to the thickness of the chip 600, so that the chip 600 of different thicknesses can adjust the pressure according to the actual needs, while meeting the connection of the conductive glue, without causing damage to the chip 600 and the conductive glue and other components on the device;

[0029] The chip automatic testing device is more suitable for testing the chip 600, and the testing stability is better.

[0030] On the basis of the above, Figures 1 to 3 The chip testing positioning mechanism 400 further comprises a limiting outer plate frame 430, a vertical sliding part 440, a horizontal sliding part 450, and a horizontal driving part 460. The vertical sliding part 440 is arranged inside the limiting outer plate frame 430 and is limited in the vertical direction by the limiting outer plate frame 430. The vertical sliding part 440 is provided with a horizontal through-limiting cavity 441 for limiting the horizontal direction movement of the horizontal sliding part 450. The limiting outer plate frame 430 is provided with a window for the movement of the horizontal sliding part 450. The vertical sliding part 440 is provided with a vertical through-accommodation cavity 442 at a position corresponding to the horizontal through-limiting cavity 441. The horizontal driving part 460 is fixedly arranged at the upper side of the limiting outer plate frame 430 and extends into the vertical through-accommodation cavity 442 in the vertical direction. The horizontal sliding part 450 is provided with a vertical through-driving cavity 451 for the vertical direction movement of the horizontal driving part 460. The upper part of the elastic pressing part 410 is fixed to one end of the horizontal sliding part 450 protruding from the horizontal through-limiting cavity 441. A first elastic member 470 is arranged between the upper part of the elastic pressing part 410 and the corresponding side of the horizontal sliding part 450. The upper end of the vertical through-driving cavity 451 is provided with a first driving inclined surface 452 away from the side of the elastic pressing part 410. The lower end of the horizontal driving part 460 is provided with a second driving inclined surface parallel to the first driving inclined surface 452. The lower end of the transmission mechanism 420 is fixedly connected to the vertical sliding part 440. The upper end of the limiting outer plate frame 430 is provided with a vertical through-accommodation hole for the transmission mechanism 420.

[0031] In specific implementation, when the vertical sliding part 440 moves in the vertical direction in the limiting outer plate frame 430, the horizontal sliding part 450 is driven to move in the vertical direction. The horizontal sliding part 450 drives the elastic pressing part 410 fixed thereto to move in the vertical direction.

[0032] In the normal state, the second driving inclined surface is located above the first driving inclined surface 452, and the horizontal driving part 460 does not exert force on the horizontal sliding part 450. The first elastic member 470 exerts force to make the elastic pressing part 410 away from the vertical sliding part 440, and the lower end of the elastic pressing part 410 is located in the corresponding chip accommodating cavity 301.

[0033] When the transmission mechanism 420 drives the vertical sliding part 440 to move upward, the horizontal sliding part 450 and the elastic pressing part 410 are driven to move upward by the vertical sliding part 440. When the second driving slope at the lower end of the horizontal driving part 460 contacts the first driving slope 452 of the horizontal sliding part 450 and exerts force, the horizontal driving part 460 drives the horizontal sliding part 450 to move horizontally away from the corresponding chip mounting hole 301, i.e. the displacement driving mechanism 500 drives the transmission mechanism 420 to move upward. During the process, the elastic pressing part 410 first moves upward vertically and then moves upward to the side to move away from the upper side of the chip mounting hole 301.

[0034] The one-way driving can realize the on-demand movement of the elastic pressing part 410 in the vertical direction and the horizontal direction, and the structure is simple.

[0035] On the basis of the above, Figures 1 to 6 As shown in the figure, the limiting outer plate frame 430 includes an upper fixed plate 431, a lower fixed plate 432, a front fixed plate 433, and a rear fixed plate 434. The upper fixed plate 431 and the lower fixed plate 432 are arranged in a corresponding manner. The front fixed plate 433 and the rear fixed plate 434 are fixed to the front side and the rear side of the lower surface of the upper fixed plate 431 and the upper surface of the lower fixed plate 432 at the upper and lower ends. The front fixed plate 433 and the rear fixed plate 434 are provided with at least two vertical limiting protrusions 435 arranged in a vertical direction on the corresponding side. The vertical sliding part 440 is arranged between the upper fixed plate 431 and the lower fixed plate 432 and is provided with vertical limiting grooves 443 on the front and rear sides, which match the vertical limiting protrusions 435. The upper fixed plate 431 and the vertical sliding part 440 are provided with a spring member 424 arranged in a compressed manner.

[0036] In this embodiment, the upper end of the horizontal driving part 460 is fixed to the lower surface of the upper fixed plate 431 by a bolt structure. The upper and lower ends of the front fixed plate 433 and the rear fixed plate 434 are provided with two first fixed plate threaded holes. The upper fixed plate 431 and the lower fixed plate 432 are provided with second fixed plate threaded holes penetrating the corresponding positions of the first fixed plate threaded holes. The upper fixed plate 431 and the lower fixed plate 432 are fixed together by bolts through the first fixed plate threaded holes and the second fixed plate threaded holes. The front fixed plate 433 and the rear fixed plate 434 are provided with two vertical limiting protrusions 435 arranged in a vertical direction on the corresponding side. The first fixed plate threaded holes are arranged at positions corresponding to the vertical limiting protrusions 435. In this way, the structure is more compact and reasonable while ensuring structural firmness, thereby saving space. The upper end of the vertical sliding part 440 is provided with a spring limiting groove 445, and one end of the spring member 424 is located in the spring limiting groove 445, so as to prevent the spring from moving and improve the running stability.

[0037] In the embodiment, after installation, the vertical sliding part 440 is limited to move vertically between the upper fixed plate 431 and the lower fixed plate 432. The spring member 424 is arranged such that, in the normal state without force applied to the vertical sliding part 440, the spring member 424 exerts an elastic downward pressure on the vertical sliding part 440, which drives the elastic pressing part 410 to elastically press and exert pressure on the upper surface of the chip 600. When the transmission mechanism 420 drives the vertical sliding part 440 to move upward, the elastic pressing part 410 is allowed to move, and the spring member 424 is further compressed. After the chip transfer mechanism takes and places the chip 600, the force applied to the transmission mechanism 420 is removed, and the spring member 424 exerts a force to reset the vertical sliding part 440. The simple structure realizes elastic contact limiting and taking and placing allowing of the upper surface of the chip 600.

[0038] On the basis of the above, Figure 2 to and Figure 6 As shown, the horizontal through-limiting cavity 441 includes a first horizontal limiting cavity away from the elastic pressing part 410 and a second horizontal limiting cavity close to the elastic pressing part 410. The height of the first horizontal limiting cavity is greater than that of the second horizontal limiting cavity. The horizontal sliding part 450 includes a first horizontal sliding part and a second horizontal sliding part, which are respectively limited to horizontally slide by the first horizontal limiting cavity and the second horizontal limiting cavity. The second horizontal limiting cavity can limit the distance of the first horizontal sliding part horizontally sliding toward the side of the elastic pressing part 410, which is simple and effective.

[0039] On the basis of the above, Figure 4 to and Figure 8 As shown, the elastic pressing part 410 includes a transmission rod 411 and an elastic pressure head 412 replaceably and fixedly installed at the lower end of the transmission rod 411. The upper part is fixedly connected to one end corresponding to the horizontal sliding part 450. In this embodiment, the vertical sliding part 440 close to the side of the transmission rod 411 is provided with a first elastic member limiting cavity 444 corresponding to the upper and lower sides of the horizontal through-limiting cavity 441. The transmission rod 411 is provided with a second elastic member limiting cavity 413 corresponding to the position of the first elastic member limiting cavity 444. The first elastic member 470 includes two springs, and the two ends of the springs are elastically contacted with the bottoms of the corresponding first elastic member limiting cavity 444 and the second elastic member limiting cavity 413, respectively, to limit and protect the first elastic member 470, effectively improving the stability and service life of use.

[0040] The main body of the elastic pressing head 412 is made of plastic material, and the end is attached with an elastic rubber layer. The main body of the elastic pressing head 412 is fixed to the lower end of the transmission rod 411 through a bolt structure. In specific implementation, the elastic pressing head 412 can also be attached to the lower end of the transmission rod 411 through glue. The elastic pressing head 412 can be replaced according to the size of the chip to effectively improve the overall applicability of the equipment.

[0041] On the basis of the above, Figure 8 The transmission rod 411 is provided with a horizontally protruding rectangular boss 414 at a horizontal corresponding position corresponding to one side of the horizontal sliding part 450. The horizontal sliding part 450 is provided with a rectangular recess 453 matched with the rectangular boss 414 at a corresponding position corresponding to one end of the transmission rod 411. The transmission rod 411 is provided with a first threaded hole 415 horizontally penetrating at a corresponding position of the rectangular boss 414. The bottom of the rectangular recess 453 is provided with a second threaded hole 454 matched with the first threaded hole 415. The first threaded hole 415 is provided with a first bolt 416 for fixing the transmission rod 411 and the horizontal sliding part 450 together through the first threaded hole 415 and the second threaded hole 454. In this specific embodiment, the first threaded hole 415 is provided with a hidden accommodation hole for accommodating the nut of the first bolt 416 away from the second threaded hole 454. After installation, the nut of the first bolt 416 is located in the hidden accommodation hole, avoiding hindering the operation of the structure or other adverse effects during the picking and placing of the chip 600. In specific implementation, after the rectangular boss 414 and the rectangular recess 453 are connected, the rectangular structure prevents the relative rotation and vertical movement of the rectangular boss 414 and the rectangular recess 453. The first bolt 416 fixes the transmission rod 411 and the horizontal sliding part 450 together through the first threaded hole 415 and the second threaded hole 454, limiting the movement in the horizontal direction. The transmission rod 411 and the horizontal sliding part 450 are stably fixed together through one bolt, and the structure is compact and stable.

[0042] On the basis of the above, Figure 1 、 Figure 2 、 Figure 3 、 Figure 9 and Figure 10As shown, the let go driving mechanism 500 includes a positioning plate 510, a driving plate 520 and a linear driving mechanism driving the driving plate 520 to move vertically, the upper fixed plate 431 is fixed with the lower surface of the positioning plate 510, the transmission mechanism 420 includes a limiting part 421, a connecting part 422 and a fixed part 423 connected in sequence, the positioning plate 510, the driving plate 520 and the upper fixed plate 431 are provided with coaxial driving limiting holes vertically penetrating corresponding positions on the upper end of the vertical sliding part 440 except the let go cavity 442, the inner diameter of the driving limiting hole is smaller than the outer diameter of the limiting part 421, the lower end of the connecting part 422 vertically penetrates the driving limiting hole and the fixed part 423 is fixed on the upper end of the vertical sliding part 440, and the limiting part 421 is above the driving plate 520.

[0043] In this embodiment, the spring member 424 is sleeved outside the connecting part 422 to further limit the spring member 424 and improve stability; the linear driving mechanism is two cylinders, the two cylinders are fixed to the two ends of the driving plate 520 through connecting plates to drive the driving plate 520 to move up and down, and in specific implementation, the linear driving mechanism can also be a linear motor or other mechanism or component having a linear driving function; in a normal state, the driving plate 520 is at an initial position, the spring member 424 applies a downward elastic force to the vertical sliding part 440, so that the vertical sliding part 440 drives the limiting part 421 to move downward until the limiting part 421 is limited by the upper surface of the driving plate 520, that is, the limiting part 421 and the upper surface of the driving plate 520 are in contact under the action of the elastic force of the spring member 424;

[0044] In specific implementation, during the upward movement of the driving plate 520 driven by the linear driving mechanism, the driving plate 520 drives the limiting part 421 to move upward, that is, the vertical sliding part 440 is driven to move upward, and then the elastic pressing part 410 is first vertically moved upward and then moved to the upper side to move away from the upper side of the chip placement hole 301; during the reset of the driving plate 520 driven by the linear driving mechanism, the spring member 424 applies a downward elastic force to the vertical sliding part 440, so that the vertical sliding part 440 drives the limiting part 421 to move downward with the driving plate 520 until the driving plate 520 is reset to the initial position, and the limiting part 421 and the upper surface of the driving plate 520 are in contact under the action of the elastic force of the spring member 424;

[0045] During the whole process, the driving plate 520 does not apply a downward force to the transmission mechanism 420, and the downward force of the transmission mechanism 420 is applied by the spring member 424, that is, the linear driving mechanism does not apply a downward force to the vertical sliding part 440, so the linear driving mechanism does not affect the pressure of the chip through the elastic pressing part 410, the requirement for the linear driving mechanism is low in precise positioning test, thereby reducing the cost and improving the stability.

[0046] On the basis of the above, asFigure 1 、 Figure 9 and Figure 10 As shown in the above, the part of the connecting part 422 above the positioning plate 510 during operation is a positioning threaded rod, the part of the connecting part 422 below the positioning threaded rod is a light pole, a plurality of positioning nuts 425 matched with the positioning threaded rod are arranged on the positioning threaded rod, and a positioning washer 426 with a “U”-shaped opening is arranged between the positioning nut 425 and the limiting part 421 on the positioning threaded rod. In the specific implementation, the positioning nut 425 and the positioning washer 426 can adjust the relative position of the transmission mechanism 420 and the driving plate 520, that is, the vertical direction position of the vertical sliding part 440 connected with the transmission mechanism 420 in the normal state, that is, the position of the elastic pressing part 410 in the vertical direction linked with the vertical sliding part 440, so as to realize the adjustment of the elastic force of the elastic pressing part 410 on the chip, the pressure of the elastic pressing part 410 on the upper surface of the chip 600 can be stably adjusted, the position of the positioning nut 425 and the number of the positioning washer 426 can be adjusted according to the thickness of the chip 600, so that the chips 600 with different thicknesses can be adjusted according to the actual demand, the pressure can be adjusted, the chip 600 and the conductive adhesive and other components on the equipment can be damaged at the same time, and the practicability is high.

[0047] On the basis of the above, as shown in Figure 1 、 Figure 9 and Figure 10 A plurality of alignment limiting holes penetrating in the vertical direction are arranged on the driving plate 520, the alignment limiting rod 511 limited by the alignment limiting holes and moving in the vertical direction is arranged on the positioning plate 510, and the lower end of the alignment limiting rod 511 is fixed on the positioning plate 510 through the alignment limiting hole. In the specific implementation, the alignment limiting rod 511 can limit the vertical movement of the driving plate 520 relative to the positioning plate 510, avoid the deviation of the driving plate 520 in long-term use, and improve the stability of the equipment in long-term operation.

[0048] On the basis of the above, as shown in Figure 1 and Figure 4 The lower end of the transmission rod 411 is provided with a horizontal lug 417, the horizontal lug 417 protrudes horizontally at the lower end of the transmission rod 411 in a direction perpendicular to the horizontal movement direction of the horizontal sliding part 450, the elastic pressing head 412 is fixed on the side of the lower end of the horizontal lug 417 away from the transmission rod 411, and the chip test positioning mechanism 400 limiting the chip 600 in the chip accommodation hole 301 is symmetrically arranged on the front side above the left side of the chip accommodation hole 301 and the rear side above the right side. In this specific embodiment, a plurality of test circuit boards 200 are fixed and arranged in parallel on the fixed base plate 100, and the chip test positioning mechanism 400 can be staggered and symmetrically arranged on both sides of the chip accommodation hole 301 arranged in parallel, so that the structure is more compact and the occupied space is small.

[0049] The above detailed description of the specific embodiments of the present application has been given to understand the purpose, technical solutions and beneficial effects of the present application. It should be understood that the above description is only a specific embodiment of the present application and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. An automated chip testing device, comprising a housing, a fixed substrate (100) disposed inside the housing, a plurality of test circuit boards (200) disposed on the fixed substrate (100), a test holder (300) disposed on the upper side of the test circuit board (200) for limiting the position of a chip (600), and a chip transfer mechanism for automatically loading and unloading chips (600) from the test holder (300), characterized in that: The upper surface of the test base (300) is provided with a chip placement acupoint (301) for accommodating and limiting the chip (600). Chip test positioning mechanisms (400) are provided on both sides above the chip placement acupoint (301). The chip test positioning mechanism (400) includes an elastic pressing part (410) that elastically presses against the upper surface of the chip (600) on the corresponding side in the chip placement acupoint (301) under normal conditions and a transmission mechanism (420). The device housing is provided with a clearance driving mechanism (500) for linearly driving the transmission mechanism (420). During the process of the clearance driving mechanism (500) driving the transmission mechanism (420) to move upward, the elastic pressing part (410) first moves vertically upward and then moves to the side and upward to leave the upper surface of the chip placement acupoint (301). The chip test positioning mechanism (400) is provided with a pressure adjustment structure for adjusting the pressure of the elastic pressing part (410) on the upper surface of the chip (600).

2. The automated chip testing equipment according to claim 1, characterized in that: The chip testing and positioning mechanism (400) further includes a limiting outer plate frame (430), a vertical sliding part (440), a horizontal sliding part (450), and a horizontal driving part (460). The vertical sliding part (440) is disposed inside the limiting outer plate frame (430) and its vertical movement is limited by the limiting outer plate frame (430). The vertical sliding part (440) is provided with a horizontal through-hole limiting cavity (441) that limits the horizontal movement of the horizontal sliding part (450). The limiting outer plate frame (430) is provided with a window for the horizontal sliding part (450) to move. A vertical through-hole clearance cavity (442) is provided on the vertical sliding part (440) at a position corresponding to the horizontal through-hole limiting cavity (441). The upper end of the horizontal driving part (460) is fixedly disposed inside the upper side of the limiting outer plate frame (430), and the lower end extends vertically into the vertical through-hole clearance cavity (442). The sliding part (450) is provided with a vertically penetrating drive cavity (451) through which the horizontal drive part (460) passes vertically. The upper part of the elastic pressing part (410) is fixed on the horizontal sliding part (450) and protrudes from one end of the horizontal penetrating limiting cavity (441). A first elastic element (470) is provided between the upper part of the elastic pressing part (410) and the corresponding side of the horizontal sliding part (450). A first driving inclined surface (452) is provided on the side of the upper end of the vertical penetrating drive cavity (451) away from the elastic pressing part (410). A second driving inclined surface parallel to the first driving inclined surface (452) is provided at the lower end of the horizontal drive part (460). The lower end of the transmission mechanism (420) is fixedly connected to the vertical sliding part (440). A vertically penetrating clearance hole for the transmission mechanism (420) to pass through is provided at the upper end of the limiting outer plate frame (430).

3. The automated chip testing equipment according to claim 2, characterized in that: The limiting outer plate frame (430) includes an upper fixing plate (431), a lower fixing plate (432), a front fixing plate (433), and a rear fixing plate (434). The upper fixing plate (431) and the lower fixing plate (432) are arranged vertically and vertically respectively. The upper and lower ends of the front fixing plate (433) and the rear fixing plate (434) are fixed to the front and rear sides of the lower surface of the upper fixing plate (431) and the upper surface of the lower fixing plate (432) respectively. The front fixing plate (433) At least two vertically positioned vertical limiting protrusions (435) are provided on one side of the upper fixed plate (431) and the lower fixed plate (432). The vertical sliding part (440) is provided between the upper fixed plate (431) and the lower fixed plate (432) and has vertical limiting grooves (443) matching the vertical limiting protrusions (435) on both the front and rear sides. An elastically compressed spring (424) is provided between the upper fixed plate (431) and the vertical sliding part (440).

4. The automated chip testing equipment according to claim 2, characterized in that: The horizontal through-limiting cavity (441) includes a first horizontal limiting cavity on the side away from the elastic pressing part (410) and a second horizontal limiting cavity on the side close to the elastic pressing part (410). The height of the first horizontal limiting cavity is greater than the height of the second horizontal limiting cavity. The horizontal sliding part (450) includes a first horizontal sliding part and a second horizontal sliding part that are respectively limited to horizontal sliding by the first horizontal limiting cavity and the second horizontal limiting cavity.

5. The automated chip testing equipment according to claim 2, characterized in that: The elastic pressing part (410) includes a transmission rod (411) and an elastic pressure head (412) that can be replaced and fixed at the lower end of the transmission rod (411). The upper part is fixedly connected to one end of the horizontal sliding part (450).

6. The automated chip testing equipment according to claim 5, characterized in that: A horizontally protruding rectangular boss (414) is provided at a horizontally corresponding position on the side of the transmission rod (411) and the horizontal sliding part (450). A rectangular recess (453) matching the rectangular boss (414) is provided at the end of the horizontal sliding part (450) corresponding to the transmission rod (411) and at a position corresponding to the rectangular boss (414). A horizontally penetrating first threaded hole (415) is provided at the position corresponding to the rectangular boss (414) on the transmission rod (411). A second threaded hole (454) matching the first threaded hole (415) is provided at the bottom of the rectangular recess (453). A first bolt (416) is provided in the first threaded hole (415) to fix the transmission rod (411) and the horizontal sliding part (450) together through the first threaded hole (415) and the second threaded hole (454).

7. The automated chip testing equipment according to claim 3, characterized in that: The clearance drive mechanism (500) includes a positioning plate (510), a drive plate (520), and a linear drive mechanism for driving the drive plate (520) to move vertically. The upper fixed plate (431) is fixed to the lower surface of the positioning plate (510). The transmission mechanism (420) includes a limiting part (421), a connecting part (422), and a fixing part (423) connected in sequence. The positioning plate (510), the drive plate (520), and the upper fixed plate (431) are fixed to the lower surface of the positioning plate (510). A driving limiting hole is provided on the plate (431) at a corresponding position outside the vertical sliding part (440) and the vertically penetrating relief cavity (442). The inner diameter of the driving limiting hole is smaller than the outer diameter of the limiting part (421). The lower end of the connecting part (422) passes vertically through the driving limiting hole and the fixing part (423) is fixed to the upper end of the vertical sliding part (440). The limiting part (421) is located above the driving plate (520).

8. The automated chip testing equipment according to claim 7, characterized in that: During operation, the part of the connecting part (422) above the positioning plate (510) is an adjusting threaded rod, and the part of the connecting part (422) below the adjusting thread is a smooth rod. The adjusting threaded rod is provided with a plurality of adjusting nuts (425) that match the adjusting threaded rod. An adjusting washer (426) with a "U" shaped opening is provided between the adjusting nut (425) and the limiting part (421) on the adjusting threaded rod.

9. The automated chip testing equipment according to claim 7, characterized in that: The drive plate (520) is provided with a plurality of vertically penetrating alignment limiting holes, and the positioning plate (510) is provided with an alignment limiting rod (511) that is limited by the alignment limiting holes to move in a relatively vertical direction. The lower end of the alignment limiting rod (511) passes through the alignment limiting holes and is fixed on the positioning plate (510).

10. The automated chip testing equipment according to claim 5, characterized in that: A horizontal protrusion (417) is provided at the lower end of the transmission rod (411). The horizontal protrusion (417) protrudes horizontally at the lower end of the transmission rod (411) in a direction perpendicular to the horizontal movement direction of the horizontal sliding part (450). The elastic pressure head (412) is fixed on the side of the lower end of the horizontal protrusion (417) away from the transmission rod (411). The chip testing and positioning mechanism (400) that limits the chip (600) inside the chip placement acupoint (301) on both sides is symmetrically arranged on the front side above the left side and the rear side above the right side of the chip placement acupoint (301).

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