Laser exposure equipment and circuit board production process

Abstract

The invention discloses laser exposure equipment and a circuit board production process, the laser exposure equipment comprises a fixed rack, a laser exposure assembly is fixedly arranged on the upper surface of the fixed rack, a cleaning module is further arranged on the fixed rack, and a copper plate bearing assembly is composed of a movable base and a bearing plate. In the irradiation exposure processing process of a common exposure device for a copper-clad plate, due to the risk that the copper-clad plate is polluted again in the process that the copper-clad plate is carried to the exposure device after being cleaned, the exposure device with the cleaning module is designed, the copper plate can be automatically moved to the cleaning module through the arrangement of the copper plate bearing assembly, and the cleaning efficiency is improved. The copper plate is automatically blown and cleaned through the shielding unit and the blowing unit, the lifting unit is adopted, a one-way inclined air channel is automatically formed, foreign matter directional movement and one-way clean air flow during cleaning are achieved, and pollutants are prevented from being reversely diffused.

Description

Technical Field

[0001] This application relates to the field of printed circuit board manufacturing equipment technology, and in particular to a laser exposure device. Background Technology

[0002] In the manufacturing process of printed circuit boards (PCBs), pattern transfer is one of the key steps. Traditionally, screen printing technology is widely used to transfer circuit patterns from a screen template to a copper-clad laminate. This technology uses a squeegee to force ink through the mesh and adhere it to the board surface, forming the circuit pattern. Existing screen printing technology is limited by screen tension and ink characteristics, making it difficult to achieve fine circuit patterns with line width / line spacing of less than 100μm, which cannot meet the technical requirements of high-density interconnect boards. At the same time, printing with direct contact between the screen and the printing plate is prone to defects such as blurred edges, broken lines, or short circuits due to screen wear, deformation, or misalignment.

[0003] In other words, the existing technology has the following technical problems: ordinary screen printing technology cannot meet the technical requirements of high-density interconnect boards. Summary of the Invention

[0004] In view of this, this embodiment provides a laser exposure device to solve the problem that ordinary screen printing technology in the prior art cannot meet the technical requirements of high-density interconnect boards.

[0005] According to one aspect of this application, a laser exposure device is provided, comprising: a fixed frame, wherein a laser exposure component is fixedly disposed on the upper surface of the fixed frame, the laser exposure component is used to irradiate and expose a copper-clad laminate, and a copper plate bearing component is disposed on the fixed frame; A cleaning module is also provided at the fixed frame. The cleaning module includes a shielding unit and a blowing unit. The shielding unit includes a liftable and movable shield. The blowing unit is provided inside the shield. The blowing unit includes a fixed pipe, a suction hood, a nozzle, and an inclined plate. The copper plate support assembly includes a movable base and a support plate. The movable base is provided with a rotatable support plate. A lifting unit is also provided between the movable base and the support plate. When the movable base is located below the shield, the lifting unit causes the support plate to be lifted and tilted.

[0006] Furthermore, a guide groove is provided on the side of the movable base, and a fixed guide rail is fixedly provided on the side wall of the fixed frame, and the movable base slides between the guide groove and the fixed guide rail.

[0007] Further, the bottom surface of the mobile base is fixedly connected with a moving block, the bottom surface of the two sides of the fixed rack is fixedly connected with a fixed plate seat, a screw rod is rotatably connected between the two fixed plate seats, the screw rod penetrates through the moving block and is threadedly connected with the moving block, a driving motor is fixedly installed on one side of the side wall of the fixed plate seat, and one end of the driving motor is fixedly connected with one end of the screw rod.

[0008] Further, the laser exposure assembly comprises a laser support, an ultraviolet light source generator and a moving part, the bottom surface of the laser support is fixedly connected with the ultraviolet light source generator, and the moving part can drive the laser support to move linearly.

[0009] Further, the shielding cover is lifted and moved by a lifting part, and the lifting part comprises: a connecting seat fixed on the upper surface of the shielding cover, connecting frames are rotatably connected at the two ends of the connecting seat, second support frames fixed on the two sides of the upper surface of the fixed rack, a second guide rod is fixedly connected between the two second support frames, a double helix screw rod is rotatably connected between the two second support frames, a second servo motor is fixedly installed on the side wall of the second support frame, and the output shaft of the second servo motor is fixedly connected with one end of the double helix screw rod, moving seats, two moving seats are arranged at the two sides of the double helix screw rod and are threadedly connected with the double helix screw rod, the second guide rod penetrates through the moving seat and is slidingly connected with the moving seat, and the top end of the connecting frame is rotatably connected with the bottom surface of the moving seat.

[0010] Further, the fixed pipe is fixedly arranged on one side of the inner wall of the shielding cover, a nozzle is installed on the fixed pipe, the angle of the nozzle is inclined downward, and the suction cover is fixedly arranged on the other side of the inner wall of the shielding cover and is located at the blowing end position of the nozzle.

[0011] Further, one end of the fixed pipe is fixedly connected with an air source connecting pipe, the air source connecting pipe is used for externally connecting a cleaning air source, and a suction pipe is connected to the suction cover and is used for externally connecting an industrial dust collector.

[0012] Further, the inclined plates are arranged at equal intervals in the interior of the shielding cover, the front end of the inclined plate is provided with a reverse folding part, and the gap between the bottom of the inclined plate and the inclined state of the bearing plate is the same.

[0013] Further, the lifting unit comprises a moving slider, a support frame and a contact guide rod, the bottom surface of the bearing plate is rotationally connected with the support frame, the inside of the moving base is provided with an inner cavity, the moving slider is slidably connected in the inner cavity of the moving base, the bottom end of the support frame is rotationally connected with the moving slider, the side wall of the moving slider is fixedly connected with the contact guide rod, and the side wall of the moving slider is fixedly connected with the connecting spring.

[0014] Further, the circuit board production process comprises the following steps: A. The copper-clad plate which has completed the pretreatment such as cleaning and drying and has been coated with photosensitive glue is placed on the bearing plate of the copper plate bearing assembly of the equipment; the vacuum suction or electrostatic suction function on the bearing plate is started to firmly fix the copper-clad plate to prevent displacement of the copper-clad plate in the subsequent movement and tilting process; B. The driving motor is started to drive the screw rod to rotate and drive the moving base to slide along the fixed guide rail; the copper-clad plate is accurately conveyed to the initial exposure position below the laser exposure assembly to prepare for exposure; C. If the system detects or presets the need for cleaning, the moving base will continue to move to the position directly below the shielding unit, the lifting unit is automatically started, the top rod on the fixed rack side is inserted into the through hole of the moving base, the contact guide rod is pushed to move the moving slider, and then the support frame is used to lift one end of the bearing plate to form a tilting angle, The second servo motor is started to drive the double helical screw rod to rotate and make the moving base move in the same direction to drive the connecting frame to rotate and lower the shielding cover to fold with the tilted moving base; D. The blowing unit works: the external filtered and ionized clean air source is blown out through the fixed pipe and the inclined nozzle to form a one-way clean ion wind, at the same time, the suction cover is started to be connected with the external industrial dust collector to instantly suck away the blown pollutants to form a one-way flow, completely clean the plate surface and avoid secondary pollution; after cleaning, the shielding cover is raised, the top rod is withdrawn, the bearing plate is restored to be horizontal under the action of the connecting spring and is fixed by the magnetic suction plate.

[0015] E. After cleaning, if it is directly started from this step without cleaning, the copper-clad plate is accurately positioned to the exposure position by the moving base; F. The first servo motor is started to drive the threaded rod to rotate to drive the laser support and the ultraviolet light source generator thereon to perform accurate linear scanning motion along the first guide rod; the ultraviolet light source generator emits ultraviolet light of a specific wavelength and intensity according to the preset circuit diagram data to scan and expose the photosensitive glue on the copper-clad plate to complete pattern transfer.

[0016] After exposure, the moving base is automatically returned to the feeding position, the vacuum suction is released, the copper-clad plate which has completed pattern transfer is taken down and is transferred to subsequent standard processes such as development, etching and film removal for processing.

[0017] Through the above-mentioned embodiments of the present application, in order to solve the problem in the prior art that the ordinary exposure equipment has the risk of being contaminated again during the process of being transported to the exposure equipment after being cleaned, the exposure equipment with a cleaning module is designed, the copper plate can be automatically moved to the cleaning module through the setting of the copper plate bearing assembly, the copper plate is automatically sprayed and cleaned through the shielding unit and the spraying unit, and the lifting unit is adopted to automatically form a one-way inclined air duct to realize the directional movement of foreign matters during cleaning, the one-way clean air flow prevents the reverse diffusion of pollutants, so that the copper plate is cleaned in a closed environment, and the risk of secondary pollution is greatly reduced. It is especially suitable for exposure production of copper-clad plates. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0019] Figure 1 the overall structure schematic diagram of an embodiment of the present application; Figure 2 the front view structure schematic diagram of an embodiment of the present application; Figure 3 the top view structure schematic diagram of an embodiment of the present application; Figure 4 the structure schematic diagram of the shielding unit of an embodiment of the present application; Figure 5 the side view structure schematic diagram of the shielding unit of an embodiment of the present application; Figure 6 the three-dimensional structure schematic diagram of the spraying unit of an embodiment of the present application; Figure 7 the front view internal structure schematic diagram of the spraying unit of an embodiment of the present application; Figure 8 the structure schematic diagram of the lifting unit of an embodiment of the present application; Figure 9 the structure schematic diagram of the lifting unit of an embodiment of the present application; Figure 8 the structure schematic diagram of the A part of the lifting unit of an embodiment of the present application; Figure 10 the overall side view structure schematic diagram of an embodiment of the present application.

[0020] In the drawings: 1, fixed rack; 101, top rod; 102, limiting rod; 2, copper plate bearing assembly; 201, moving base; 2011, guide groove; 202, fixed guide rail; 203, bearing plate; 204, fixed plate seat; 205, screw; 206, drive motor; 207, moving block; 3, laser exposure assembly; 301, first support frame; 302, first guide rod; 303, threaded rod; 304, first servo motor; 305, laser support; 306, ultraviolet light source generator; 4, shielding unit; 401, second support frame; 402, second guide rod; 403, double helix screw; 404, moving seat; 305, connecting frame; 406, connecting seat; 407, shielding cover; 408, second servo motor; 5, blowing unit; 501, fixed pipe; 5011, gas source connecting pipe; 502, nozzle; 503, inclined plate; 5031, reverse folding part; 504, suction cover; 5041, suction pipe; 6, lifting unit; 601, moving slide; 602, support frame; 603, contact guide rod; 604, limit sleeve; 605, connecting spring; 606, magnetic plate; 7, sealing unit; 701, sealing ring; 702, fixed plate; 703, fixed cylinder; 704, moving piston; 705, moving guide rod; 706, reset spring; 707, contact plate. DETAILED DESCRIPTION

[0021] In order to make the person skilled in the art better understand the scheme of the present application, the technical scheme in the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor should be within the protection scope of the present application.

[0022] The present application provides a laser exposure device and a circuit board production process, which can be applied to integrated circuit manufacturing, high-density interconnection printed circuit board manufacturing and other electronic circuit manufacturing in the electronic core industry.

[0023] Please refer to Figure 1 As shown in the figure, a laser exposure device comprises a fixed frame 1, a laser exposure assembly 3 is fixedly arranged on the upper surface of the fixed frame 1, the laser exposure assembly 3 is used for irradiating and exposing the copper-clad plate, and a copper plate bearing assembly 2 is arranged on the fixed frame 1; The fixed rack 1 is also provided with a cleaning module, the cleaning module comprises a shielding unit 4 and a blowing unit 5, the shielding unit 4 comprises a shielding cover 407 which can be lifted and moved, the inside of the shielding cover 407 is provided with the blowing unit 5, the blowing unit 5 comprises a fixed pipe 501, a suction cover 504, a nozzle 502 and an inclined plate 503; The copper plate bearing assembly 2 comprises a moving base 201 and a bearing plate 203, the moving base 201 is provided with the rotatable bearing plate 203, and the moving base 201 and the bearing plate 203 are also provided with a lifting unit 6, when the moving base 201 is in the position below the shielding cover 407, the lifting unit 6 drives the bearing plate 203 to lift and tilt.

[0024] In order to solve the problem that the ordinary exposure equipment has the risk of being polluted again in the process of exposure and processing of copper-clad plate in the prior art, the exposure equipment with a cleaning module is designed, the copper plate can be automatically moved to the cleaning module through the setting of the copper plate bearing assembly 2, the copper plate is automatically blown and cleaned through the shielding unit 4 and the blowing unit 5, the lifting unit 6 is adopted to automatically form a one-way inclined air duct, the directional movement of foreign matters during cleaning is realized, the one-way clean air flow prevents the pollution from spreading in the reverse direction, the cleaning is carried out in a closed environment, and the risk of secondary pollution is greatly reduced. It is especially suitable for exposure production of copper-clad plate.

[0025] As a specific technical solution, please participate Figure 1 and Figure 2 As shown in the drawings, the side of the moving base 201 is provided with a guide groove 2011, the side wall of the fixed rack 1 is fixedly provided with a fixed guide rail 202, the moving base 201 is slidably connected with the fixed guide rail 202 through the guide groove 2011, Further, please refer to Figure 2 and Figure 3 As shown in the drawings, the bottom surface of the moving base 201 is fixedly connected with a moving block 207, the bottom surface of the two sides of the fixed rack 1 is fixedly connected with a fixed plate seat 204, a screw rod 205 is rotatably connected between the two fixed plate seats 204, the screw rod 205 penetrates through the moving block 207 and is threadedly connected with the moving block 207, one end of a driving motor 206 is fixedly connected with one end of the screw rod 205, through the working of the driving motor 206, the screw rod 205 can be rotated, the moving block 207 can be moved through the rotation of the screw rod 205, and the moving base 201 can be moved, so that the copper-clad plate can be moved, and the function of movement adjustment is realized.

[0026] Preferably, a lubricating coating or ball bearing is arranged between the guide groove 2011 of the moving base 201 and the fixed guide rail 202 to reduce frictional resistance and improve movement stability.

[0027] Preferably, as shown in Figure 1 The moving base 201 and the bearing plate 203 are rotatably connected through a hinge, and the bearing plate 203 is preferably provided with a structure for fixing the copper-clad plate, which ensures that the copper-clad plate remains fixed when bearing the copper-clad plate. Specifically, the copper-clad plate fixing structure on the bearing plate 203 can be a vacuum adsorption hole array or an electrostatic adsorption plate, with a hole diameter of 0.5-1 mm and a hole pitch of 5-10 mm. The adsorption is achieved by an external vacuum pump to prevent displacement of the copper plate during movement or tilting.

[0028] As a specific technical solution, please refer to Figure 1 and Figure 10 The laser exposure assembly 3 includes a laser support 305, an ultraviolet light source generator 306, and a moving part. The bottom surface of the laser support 305 is fixedly connected with the ultraviolet light source generator 306, and the moving part is fixed on the upper surface of the fixed rack 1. The moving part can drive the laser support 305 to move linearly. Through this technical solution, the copper-clad plate can be irradiated by the ultraviolet light source generator 306, and the position of irradiation can be adjusted by the linear movement of the laser support 305. In combination with the movement of the copper plate bearing assembly 2, the position of the copper-clad plate can be adjusted, and different positions of the copper-clad plate can be fully irradiated and exposed.

[0029] Specifically, please refer to Figure 1 and Figure 10 The moving part is composed of a first support frame 301, a threaded rod 303, and a first servo motor 304. The threaded rod 303 is arranged between and rotatably connected with the two first support frames 301. The first support frames 301 are fixedly arranged at the two side positions of the fixed rack 1. A first guide rod 302 is fixedly connected between the two first support frames 301. The first guide rod 302 penetrates through the laser support 305 and is in sliding fit with the laser support 305. The threaded rod 303 penetrates through the laser support 305 and is in threaded fit with the laser support 305. The first servo motor 304 is fixedly connected to the side wall of the first support frame 301. The output shaft of the first servo motor 304 is fixedly connected to one end of the threaded rod 303. Through this technical solution, the threaded rod 303 can be rotated by the operation of the first servo motor 304, and the laser support 305 can be moved by the rotation of the threaded rod 303, thereby realizing the linear movement function of the ultraviolet light source generator 306.

[0030] Preferably, the wavelength range of the ultraviolet light source generator 306 is 355-405 nm, and the power is 100-500 mW / cm2, and the exposure intensity can be adjusted according to the characteristics of the copper plate photosensitive layer.

[0031] Specifically, the first servo motor 304 can adopt a stepper motor or a servo motor, and the moving precision is controlled within ±0.1 mm, so as to realize precise positioning of the ultraviolet light source generator 306.

[0032] As a specific technical solution, please refer to Figure 4 As shown in the figure, the shielding cover 407 is moved up and down by the lifting component, and the lifting component comprises: A connecting seat 406 is fixed on the upper surface of the shielding cover 407, both ends of the connecting seat 406 are rotatably connected with a connecting frame 405, A second supporting frame 401 is fixed on both sides of the upper surface of the fixed rack 1, a second guide rod 402 is fixedly connected between the two second supporting frames 401, a double helix screw rod 403 is rotatably connected between the two second supporting frames 401, a second servo motor 408 is fixedly installed on the side wall of the second supporting frame 401, and the output shaft of the second servo motor 408 is fixedly connected with one end of the double helix screw rod 403, A moving seat 404 is provided, and two moving seats 404 are provided on both sides of the double helix screw rod 403 and are threadedly connected with the double helix screw rod 403, the second guide rod 402 penetrates the moving seat 404 and is slidably connected with the moving seat 404, and the top end of the connecting frame 405 is rotatably connected with the bottom surface of the moving seat 404; Through the working of the second servo motor 408, the double helix screw rod 403 can be rotated, so that the synchronous movement of the moving seats 404 on both sides can be driven by the rotation of the double helix screw rod 403, and the same direction or opposite direction movement is realized. When the moving seats 404 move in the same direction, the connecting frame 405 can be angularly rotated, so that the shielding cover 407 moves downward, and when the moving seats 404 move in the opposite direction, the shielding cover 407 moves upward. The lifting movement function of the shielding cover 407 is realized.

[0033] As a preferred technical solution, please refer to Figure 7 and Figure 8 As shown in the figure, the fixed pipe 501 is fixedly arranged on one side of the inner wall of the shielding cover 407, the nozzle 502 is installed on the fixed pipe 501, the angle of the nozzle 502 is inclined downward, the suction cover 504 is fixedly arranged on the other side of the inner wall of the shielding cover 407, and the suction cover 504 is located at the blowing end position of the nozzle 502.

[0034] Specifically, please refer to Figure 5 ,Figure 6 and Figure 7 As shown in the figure, one end of the fixed pipe 501 is fixedly connected with an air source connecting pipe 5011, and the air source connecting pipe 5011 is used for connecting an external cleaning air source. The cleaning air source can be provided with a high-efficiency filter and an ion generator, so that the filtered pure ionized air is delivered to the inside of the fixed pipe 501 and then sprayed out through the nozzle 502, forming a clean ion wind from top to bottom, thereby ensuring the cleaning effect on the copper-clad plate. The suction cover 504 is connected with a suction pipe 5041 for connecting an external industrial dust collector. The airflow flows in one direction, and once the particulate matter is blown away from the plate surface, it can be directly sucked into the fixed pipe 501, effectively avoiding the problem of secondary pollution.

[0035] Specifically, the inclination angle of the nozzle 502 is 30-45°, the nozzle diameter is 1-2 mm, the jet speed is controlled at 10-20 m / s, and the jet pressure is 0.2-0.5 MPa, so as to ensure that the airflow can effectively blow away the particulate matter without damaging the surface of the copper plate. Specifically, the air volume of the industrial dust collector connected to the suction pipe 5041 is not less than 50 m³ / h, and the suction negative pressure is not less than -10 kPa, so as to ensure that the particulate matter can be quickly sucked away.

[0036] As a further technical solution, please refer to Figure 8 As shown in the figure, the inclined plate 503 is provided with a plurality of inclined plates 503, which are fixed at equal intervals in the inside of the shielding cover 407. The front end of the inclined plate 503 is provided with a reverse folding part 5031, and the bottom of the plurality of inclined plates 503 is the same gap as the inclined state of the bearing plate 203. Through this technical solution, after the airflow is blown obliquely downward, the particulate matter can be effectively blown away from the plate surface. At the same time, the inclined plate 503 can play a shielding role. The reverse folding part 5031 can play a blocking role when the floating particles fall again, thereby reducing the phenomenon of re-pollution due to the floating and falling of particles during jet cleaning.

[0037] As a specific technical solution, please refer to Figure 8 As shown in the figure, the lifting unit 6 includes a moving slider 601, a support frame 602, and a contact guide rod 603. The bottom surface of the bearing plate 203 is rotatably connected with the support frame 602. The inside of the moving base 201 is provided with an inner cavity. The moving slider 601 is slidably connected in the inner cavity of the moving base 201. The bottom end of the support frame 602 is rotatably connected with the moving slider 601. The side wall of the moving slider 601 is fixedly connected with one end of the contact guide rod 603. The inner cavity of the moving base 201 is fixedly connected with a limiting sleeve 604. The contact guide rod 603 penetrates through the limiting sleeve 604 and is in sliding fit with the limiting sleeve 604. One end of the connecting spring 605 is fixedly connected with the side wall of the moving slider 601. The other end of the connecting spring 605 is fixedly connected with the side wall of the limiting sleeve 604. Further, the side wall of the fixed rack 1 is further fixedly provided with a top rod 101, and the side wall of the moving base 201 is provided with a through hole for the insertion of the top rod 101. The side wall of the fixed rack 1 is further fixedly connected with a limiting rod 102. When the moving base 201 moves to a position below the shielding cover 407, the top rod 101 enters the inner cavity of the moving base 201 through the through hole, thereby pushing the contact guide rod 603 to move, so that the moving slider 601 moves, the support frame 602 angularly rotates, one end of the bearing plate 203 is lifted, the bearing plate 203 is inclined, and an inclination angle is formed, so that the one-way inclined air duct is formed by automatically cooperating with the blowing unit 5, and the cleaning effect is ensured. The upper surface of the moving base 201 is further fixedly connected with a magnetic plate 606. After the copper-clad plate is cleaned, the shielding cover 407 moves upward and is separated from the moving base 201. The moving base 201 moves and is separated from the top rod 101. Because the positioning effect of the top rod 101 is lost, the bearing plate 203 is automatically turned over, and the magnetic plate 606 adsorbs the bearing plate 203, thereby achieving the fixing effect and ensuring the horizontal fixing effect of the bearing plate 203.

[0038] Further, in the lifting unit 6, the elastic coefficient of the connecting spring 605 is preferably 5-10 N / mm, so as to ensure that the bearing plate 203 can quickly recover to the horizontal state and be attached to the magnetic plate 606 after the top rod 101 is separated.

[0039] As a preferred technical solution, refer to Figure 9 As shown in the figure, the sealing unit 7 is further arranged between the shielding cover 407 and the moving base 201. The sealing unit 7 comprises a sealing ring 701, a fixed plate 702 and a contact plate 707. The bottom side of the shielding cover 407 is provided with a groove for placing the sealing ring 701. The sealing ring 701 is fixedly arranged in the groove of the shielding cover 407. The side wall of the shielding cover 407 is fixedly connected with the fixed plate 702. The bottom surface of the fixed plate 702 is fixedly connected with a fixed cylinder 703. The inner cavity of the fixed cylinder 703 is slidingly connected with a moving piston 704. One end of the moving piston 704 is fixedly connected with a moving guide rod 705. The other end of the moving guide rod 705 extends out of the inner cavity of the fixed cylinder 703. One end of a reset spring 706 is fixedly connected with the bottom surface of the moving piston 704. The other end of the reset spring 706 is fixedly connected with the inner cavity wall of the fixed cylinder 703. The contact plate 707 is fixedly arranged at the side wall of the moving base 201. Through the technical scheme, when the shielding cover 407 is pressed down and attached to the moving base 201, the contact plate 707 will contact the moving guide rod 705 at this time, the moving guide rod 705 is pushed to move upward, so that the moving piston 704 is pushed to move upward through the movement of the moving guide rod 705, the gas in the inner cavity of the fixed cylinder 703 is transported to the inner cavity of the sealing ring 701 through the connecting pipe 708, so that the sealing ring 701 is expanded, and the gap between the shielding cover 407 and the moving base 201 is blocked, so that the outside can be effectively isolated during cleaning, and the problem of external particulate matter entering and causing pollution due to air flow is reduced.

[0040] Preferably, the device further comprises a PLC or industrial computer control system, which integrates linkage control of the driving motor 206, the first servo motor 304, the second servo motor 408, the gas source switch, the suction switch and the like.

[0041] The circuit board production process comprises the following steps: A. The copper-clad plate which has completed the pretreatment such as cleaning, drying and the like and which has been coated with photosensitive glue is placed on the bearing plate 203 of the copper plate bearing assembly 2 of the equipment; the vacuum adsorption or electrostatic adsorption function on the bearing plate is started to firmly fix the copper-clad plate, so that displacement of the copper-clad plate in the subsequent movement and tilting process is prevented; B. The driving motor 206 is started to drive the screw rod 205 to rotate, so that the moving base 201 is driven to slide along the fixed guide rail 202; the copper-clad plate is accurately transported to the initial exposure position below the laser exposure assembly 3, so as to prepare for exposure; C. If the system detects or presets that cleaning is needed, the moving base 201 will continue to move to the position directly below the shielding unit 4, the lifting unit 6 is automatically started, the top rod 101 on the fixed rack side is inserted into the through hole of the moving base, the contact guide rod 603 is pushed, the moving slider 601 is moved, and then one end of the bearing plate 203 is lifted up through the support frame 602, so as to form a tilting angle, The second servo motor 408 is started to drive the double helical screw rod 403 to rotate, so that the moving seat 404 moves in the same direction, the connecting frame 405 is driven to rotate, the shielding cover 407 is lowered, and the shielding cover 407 is combined with the tilted moving base. D. The blowing unit 5 works: the external filtered and ionized clean gas source blows out one-way clean ion wind through the fixed pipe 501 and the inclined nozzle 502. At the same time, the suction cover 504 is started to be connected with the external industrial dust collector, so that the pollution caused by blowing is instantly removed, a one-way flow is formed, the board surface is completely cleaned and secondary pollution is avoided, after cleaning is completed, the shielding cover is raised, the top rod is withdrawn, the bearing plate is restored to be horizontal under the action of the connecting spring 605, and is fixed by the magnetic adsorption plate 606.

[0042] E. After cleaning, if cleaning is not needed, the copper-clad plate is accurately positioned to the exposure position by the moving base 201. F, the first servo motor 304 starts, drives the threaded rod 303 to rotate, drives the laser support 305 and the ultraviolet light source generator 306 on it to carry out accurate linear scanning movement along the first guide rod 302, the ultraviolet light source generator 306 emits ultraviolet light of specific wavelength and intensity according to preset circuit diagram data, scans and exposes the photosensitive adhesive on the copper-clad plate, and completes pattern transfer.

[0043] After exposure is completed, the moving base 201 automatically returns to the feeding station, releases vacuum adsorption, takes the copper-clad plate with completed pattern transfer, and moves to subsequent developing, etching, film removing and other standard processes for processing.

[0044] The above only describes the preferred embodiments of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A laser exposure apparatus, comprising: A fixed frame (1) is provided with a laser exposure component (3) fixed on the upper surface of the fixed frame (1). The laser exposure component (3) is used to expose the copper-clad laminate. A copper plate bearing component (2) is provided on the fixed frame (1). The feature is that a cleaning module is also provided at the fixed frame (1), the cleaning module includes a shielding unit (4) and a blowing unit (5), the shielding unit (4) includes a liftable shield (407), the blowing unit (5) is provided inside the shield (407), the blowing unit (5) includes a fixed pipe (501), a suction hood (504), a nozzle (502) and an inclined plate (503); The copper plate support assembly (2) includes a movable base (201) and a support plate (203). The movable base (201) is provided with a rotatable support plate (203). A lifting unit (6) is also provided between the movable base (201) and the support plate (203). When the movable base (201) is below the shield (407), the lifting unit (6) causes the support plate (203) to be lifted and tilted.

2. The laser exposure apparatus according to claim 1, characterized in that: The movable base (201) has a guide groove (2011) on its side, and a fixed guide rail (202) is fixedly installed on the side wall of the fixed frame (1). The movable base (201) slides between the guide groove (2011) and the fixed guide rail (202).

3. The laser exposure apparatus according to claim 1, characterized in that: A movable block (207) is fixedly connected to the bottom surface of the movable base (201). Fixed plates (204) are fixedly connected to the bottom surfaces of both sides of the fixed frame (1). A screw (205) is rotatably connected between the two fixed plates (204). The screw (205) passes through the movable block (207) and is threadedly engaged with the movable block (207). A drive motor (206) is fixedly installed on one side wall of the fixed plate (204). One end of the drive motor (206) is fixedly connected to one end of the screw (205).

4. The laser exposure apparatus according to claim 1, characterized in that: The laser exposure assembly (3) includes a laser support (305), an ultraviolet light source generator (306), and a moving component. The ultraviolet light source generator (306) is fixedly connected to the bottom surface of the laser support (305), and the moving component can drive the laser support (305) to move linearly.

5. The laser exposure apparatus according to claim 1, characterized in that: The shield (407) is moved up and down via a lifting component, the lifting component comprising: A connecting seat (406) is fixed on the upper surface of the shield (407), and a connecting bracket (405) is rotatably connected to both ends of the connecting seat (406). A second support frame (401) is fixed on both sides of the upper surface of the fixed frame (1). A second guide rod (402) is fixedly connected between the two second support frames (401). A double helical screw (403) is rotatably connected between the two second support frames (401). A second servo motor (408) is fixedly installed on the side wall of the second support frame (401). The end of the output shaft of the second servo motor (408) is fixedly connected to one end of the double helical screw (403). The movable seat (404) is provided in two parts. The two movable seats (404) are respectively disposed on both sides of the double helical screw (403) and threadedly engaged with the double helical screw (403). The second guide rod (402) passes through the movable seat (404) and slides between it and the movable seat (404). The top end of the connecting frame (405) is rotatably connected to the bottom surface of the movable seat (404).

6. The laser exposure apparatus according to claim 1, characterized in that: The fixed tube (501) is fixedly installed on one side of the inner wall of the shield (407). A nozzle (502) is installed on the fixed tube (501). The nozzle (502) is tilted downward. The suction cover (504) is fixedly installed on the other side of the inner wall of the shield (407). The suction cover (504) is located at the blowing end of the nozzle (502).

7. The laser exposure apparatus according to claim 6, characterized in that: One end of the fixed tube (501) is fixedly connected to an air source connection tube (5011), which is used to connect to an external clean air source. The suction hood (504) is connected to a suction tube (5041) for connecting to an external industrial vacuum cleaner.

8. The laser exposure apparatus according to claim 1, characterized in that: Several inclined plates (503) are provided, and several inclined plates (503) are fixed at equal intervals inside the shield (407). The front end of each inclined plate (503) is provided with a folded part (5031), and the bottom of each inclined plate (503) has the same gap as the inclined support plate (203).

9. The laser exposure apparatus according to claim 1, characterized in that: The lifting unit (6) includes a movable slider (601), a support frame (602), and a contact guide rod (603). The support frame (602) is rotatably connected to the bottom surface of the bearing plate (203). The movable base (201) has an inner cavity. The movable slider (601) is slidably connected in the inner cavity of the movable base (201). The bottom end of the support frame (602) is rotatably connected to the movable slider (601). The contact guide rod (603) is fixedly connected to the side wall of the movable slider (601). A connecting spring (605) is fixedly connected to the side wall of the movable slider (601).

10. Based on the laser exposure equipment according to any one of claims 1-9, a circuit board manufacturing process is derived, characterized in that: The circuit board manufacturing process includes the following steps: A. Place the copper-clad laminate that has been pretreated by cleaning and drying and coated with photosensitive emulsion on the support plate (203) of the copper plate support assembly (2) of the equipment; activate the vacuum adsorption or electrostatic adsorption function on the support plate to firmly fix the copper-clad laminate and prevent it from shifting during subsequent movement and tilting. B. The drive motor (206) starts, driving the screw (205) to rotate, driving the moving base (201) to slide along the fixed guide rail (202); the copper-clad board is accurately transported to the initial exposure station below the laser exposure assembly (3) to prepare for exposure; C. If the system detects or pre-sets the need for cleaning, the movable base (201) will continue to move to directly below the shielding unit (4), the lifting unit (6) will automatically start, the top rod (101) on the fixed frame side will be inserted into the through hole of the movable base, pushing the contact guide rod (603) to move the movable slider (601), and then the support frame (602) will lift one end of the bearing plate (203) to form an inclined angle. The second servo motor (408) starts, drives the double helical screw (403) to rotate, causes the moving base (404) to move in the same direction, drives the connecting frame (405) to rotate, lowers the shield (407) and closes with the inclined moving base; D. Operation of the blowing unit (5): The external filtered and ionized clean air source blows out unidirectional clean ion air through the fixed pipe (501) and the inclined nozzle (502). At the same time, the suction hood (504) is activated and connected to the external industrial vacuum cleaner. It instantly removes the pollutants blown up, forming a unidirectional flow, thoroughly cleaning the panel surface and avoiding secondary pollution. After cleaning, the shielding hood rises, the top rod retracts, and the support plate returns to horizontal under the action of the connecting spring (605) and is attracted and fixed by the magnetic plate (606). E. After cleaning, if no cleaning is required, proceed directly from this step. The copper-clad laminate is precisely positioned to the exposure station by the moving base (201). F. The first servo motor (304) starts, drives the threaded rod (303) to rotate, and drives the laser support (305) and the ultraviolet light source generator (306) on it to perform linear scanning motion along the first guide rod (302). The ultraviolet light source generator (306) emits ultraviolet light of a specific wavelength and intensity according to the preset circuit diagram data, scans and exposes the photosensitive adhesive on the copper-clad board, and completes the pattern transfer. After exposure is completed, the mobile base (201) automatically returns to the loading station, releases the vacuum adsorption, removes the copper-clad laminate with the completed pattern transfer, and transfers it to the subsequent standard processes such as development, etching, and film removal for processing.

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