Controllable rotary lifting load platform device

Abstract

The invention provides a controllable rotary lifting load platform device, which comprises a vacuum chamber, a lifting platform and a lifting platform, the load platform is located in the vacuum chamber; the outer supporting shaft penetrates through the mounting hole, and the outer supporting shaft is provided with a hollow cavity; the inner supporting shaft penetrates through the hollow cavity and is connected with the load platform; a magnetofluid bearing is arranged on the rack, the lower end of the outer supporting shaft is arranged on the upper end face of the magnetofluid bearing, the lower end of the inner supporting shaft is connected with a driving device through the magnetofluid bearing, the driving device drives the inner supporting shaft to rotate, and the rack is fixed to a guide rail capable of ascending and descending. According to the controllable rotary lifting load platform device, the requirement for stable lifting and rotating of the load platform in the vacuum environment can be met, the sealing performance of an equipment container is also guaranteed, and meanwhile the phenomenon that when lifting and rotating are achieved through a shaft sleeve, bending is caused to be stuck due to the fact that the bending moment is too large under asymmetric loads is avoided.

Description

Technical Field

[0001] This invention relates to the field of mechanical structure design, and more specifically, to a controllable rotating lifting load platform device. Background Technology

[0002] The need for operations in high-vacuum environments is widespread and crucial. In some materials research, various operations such as heat treatment, evaporation deposition, coating, or performance testing are performed on the research material in a high-vacuum environment or a specific oxygen-free atmosphere. This is essential for the development of new materials, the improvement of existing materials, and in-depth research into material properties. For example, the growth of certain semiconductor crystal materials typically requires an oxygen-free atmosphere. This necessitates evacuating the air inside the crystal growth furnace to a high-vacuum or even ultra-high-vacuum state, and then filling it with specific high-purity gases to create a specific growth atmosphere that meets the requirements for high-quality crystal growth.

[0003] In high-vacuum environments, controllable lifting and rotating mechanisms become key components of experimental load platforms for various vacuum conditions, particularly when dealing with different loads and mission requirements. For example, in crystal growth furnaces equipped with lifting and rotating mechanisms, self-lubricating oilless copper bushings are typically used with the load platform support shaft to control axial movement and radial rotation, enabling lifting and rotation operations under high vacuum conditions. Simultaneously, to ensure the crystal growth furnace's airtightness and maintain vacuum levels, 304 stainless steel bellows and magnetohydrodynamic bearings are usually used to connect the vacuum chamber of the crystal growth furnace to the lower lifting and rotating mechanism, achieving both lifting and rotation functions while meeting the high-vacuum environment or oxygen isolation requirements of the growth furnace.

[0004] The aforementioned devices and related technologies are essential for certain tasks that require lifting or rotating operations in a high vacuum environment. They provide effective solutions for many research, manufacturing, and testing needs, especially in the fields of materials science, semiconductor industry, aerospace, and optics. Therefore, ensuring the functionality and operational reliability of such devices is of paramount importance.

[0005] However, the existing technology still has the following shortcomings:

[0006] 1. Lubricant carbon contamination problem

[0007] Using graphite as a lubricant to ensure low-resistance movement and rotation of the support shaft and the copper bushing is a common and effective method. However, during use, graphite may enter the vacuum chamber, causing carbon contamination, which can adversely affect the load target.

[0008] 2. Increased deformation and resistance caused by bending moment

[0009] When the lifting device faces asymmetrical loads, especially heavy loads, the support shaft may experience bending moments caused by the asymmetrical loads as the lifting height increases. To resist these bending moments, the shaft and the copper sleeve may deform to some extent, leading to increased friction between them. This can cause the support shaft and the copper sleeve to jam during lifting or rotation, especially during combined lifting and rotation movements, preventing the device from functioning properly.

[0010] These issues highlight challenges to the performance and reliability of existing equipment operating in the aforementioned environments. Addressing lubricant carbon contamination and effectively mitigating the effects of bending moments caused by asymmetric loads are essential for their specific applications, ensuring stable operation and meeting application requirements. Summary of the Invention

[0011] This invention aims to at least partially solve one of the technical problems in related technologies. To this end, this invention provides a controllable rotating and lifting load platform device, comprising: a vacuum chamber with a mounting hole at its bottom; a load platform located inside the vacuum chamber; an outer support shaft passing through the mounting hole and having a hollow cavity; an inner support shaft passing through the hollow cavity and connected to the load platform; and a frame, on which a magnetohydrodynamic (MHD) bearing is mounted, the lower end of the outer support shaft being disposed on the upper end surface of the MHD bearing, the lower end of the inner support shaft being connected to a drive device via the central rotating shaft of the MHD bearing, the drive device driving the inner support shaft to rotate via the central rotating shaft of the MHD bearing, and the frame being fixed on a liftable guide rail.

[0012] This invention solves the problem of lifting and rotating the load platform by setting up a dual-axis structure. The outer support shaft ensures the axial movement of the load, and the inner support shaft ensures the rotational movement of the load. This solves the problem of jamming caused by excessive bending moment and increased resistance due to asymmetrical load when using copper sleeves to achieve lifting and rotation.

[0013] Optionally, the inner support shaft and the outer support shaft are coupled by rolling bearings.

[0014] Optionally, a bearing end cap is provided at the upper end of the outer support shaft, the rolling bearing is sleeved on the inner support shaft, and the bearing end cap abuts against the rolling bearing.

[0015] Optionally, the load platform and the inner support shaft are connected by a first pin.

[0016] Optionally, the outer support shaft and the mounting hole are fitted together by a linear bearing.

[0017] Optionally, a bellows is sleeved on the outer side of the outer support shaft, the upper end of the bellows is sealed to the lower end face of the vacuum chamber to seal the mounting hole, and the lower end face of the bellows is sealed to the upper end face of the magnetohydrodynamic bearing.

[0018] Optionally, the corrugated pipe is a stainless steel corrugated pipe.

[0019] Optionally, the stainless steel bellows is sealed to the upper end face of the magnetohydrodynamic bearing via a first blind hole using bolts, and the stainless steel bellows is sealed to the lower end face of the vacuum chamber via a second blind hole using bolts.

[0020] Optionally, the inner support shaft is connected to the central rotating shaft of the magnetohydrodynamic bearing via a second pin; the driving device is a stepper motor.

[0021] Optionally, there is a gap between the outer support shaft and the inner support shaft.

[0022] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0023] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0024] Figure 1 This is a three-dimensional schematic diagram of a controllable rotating lifting load platform device according to an embodiment of the present invention;

[0025] Figure 2 This is a cross-sectional schematic diagram of a controllable rotating lifting load platform device according to an embodiment of the present invention;

[0026] Figure 3 This is a partial view of a controllable rotating lifting load platform device according to an embodiment of the present invention;

[0027] Figure 4 This is a partial view of a controllable rotating lifting load platform device according to an embodiment of the present invention.

[0028] Figure label:

[0029] 1-Vacuum chamber; 2-Load platform; 3-Bearing end cover; 4-Magnetohydrodynamic bearing; 5-Outer support shaft; 6-Inner support shaft; 7-Linear bearing; 8-Rolling bearing; 9-Frame; 10-Drive device; 11-Bellwall; 12-First blind hole; 13-Second blind hole; 14-First pin; 15-Second pin. Detailed Implementation

[0030] The technical solution of the present invention will be further described in detail below with reference to specific embodiments. It should be understood that the following embodiments are merely illustrative and explanatory of the present invention, and should not be construed as limiting the scope of protection of the present invention. All technologies implemented based on the above content of the present invention are covered within the scope of protection intended by the present invention.

[0031] See Figure 1 and Figure 2 This embodiment provides a controllable rotating and lifting load platform device that can be used in a high vacuum environment. Specifically, the controllable rotating and lifting load platform device mainly includes: a vacuum chamber 1, a load platform 2, an outer support shaft 5, an inner support shaft 6, and a frame 9. The vacuum chamber 1 has a mounting hole at its bottom, and the load platform 2 is located inside the vacuum chamber 1. The outer support shaft 5 passes through the mounting hole and has a hollow cavity. The inner support shaft 6 passes through the hollow cavity and is connected to the load platform 2. A magnetohydrodynamic (MHD) bearing 4 is installed on the frame 9. The lower end of the outer support shaft 5 is located on the upper surface of the MHD bearing 4. The lower end of the inner support shaft 6 is connected to a drive device 10 through the central rotating shaft of the MHD bearing 4. The drive device 10 drives the inner support shaft 6 to rotate through the central rotating shaft of the MHD bearing 4, and the inner support shaft 6 drives the load platform 2 to rotate. The frame 9 is fixed on a liftable guide rail. The magnetohydrodynamic bearing 4 is a magnetohydrodynamic sealing device that has the characteristic of maintaining good sealing performance while keeping the central rotating shaft dynamically rotating. Thus, the drive device 10 can transmit the rotational motion to the inner support shaft 6 while ensuring the sealing performance of the vacuum chamber 1.

[0032] In a vacuum environment, to ensure the load platform 2 reaches the designated position and that lifting and rotation are smooth, the controllable rotating lifting load platform device in this embodiment is equipped with a dual-axis support structure, consisting of an outer support shaft 5 and an inner support shaft 6. When lifting the load platform 2 is required, a vertically lifting frame 9 is used, which supports the magnetohydrodynamic bearing 4 to enable the vertical movement of the entire structure, thereby lifting the load platform 2. When the load needs to rotate, the characteristics of the magnetohydrodynamic bearing 4 are utilized to transmit rotational power to the inner support shaft 6 while maintaining a tight seal.

[0033] The controllable rotating lifting load platform device in the above embodiment can meet the requirements for stable lifting and rotation of the load platform in a vacuum environment, and also ensure the sealing of the equipment container. At the same time, it avoids the phenomenon of bending and jamming caused by excessive bending moment under asymmetrical load when using bushing to achieve lifting and rotation.

[0034] In some embodiments, to ensure stable rotation, the inner support shaft 6 and the outer support shaft 5 are connected by a rolling bearing 8. The rolling bearing 8 makes the rotation of the inner support shaft 6 more stable. The rolling bearing 8 is located at the top of the hollow cavity of the outer support shaft 5.

[0035] In some embodiments, a bearing end cap 3 is provided at the upper end of the outer support shaft 5, and the rolling bearing 8 is sleeved on the inner support shaft 6, with the bearing end cap 3 abutting against the rolling bearing 8. The bearing end cap 3 can prevent the rolling bearing 8 from moving and provides a certain degree of protection for the rolling bearing 8, preventing or reducing dust from entering the rolling bearing 8.

[0036] In some embodiments, the upper and lower ends of the inner support shaft 6 are connected to the load platform 2 and the magnetohydrodynamic bearing 4 respectively via pins. Specifically, the load platform 2 and the inner support shaft 6 are connected by a first pin 14. The inner support shaft 6 is connected to the central rotation axis of the magnetohydrodynamic bearing 4 via a second pin 15; rotational transmission is achieved by using pins.

[0037] In some embodiments, the outer support shaft 5 is engaged with the mounting hole via a linear bearing 7. The linear bearing 7 ensures smoother lifting and lowering of the outer support shaft 6.

[0038] In some embodiments, to ensure a vacuum environment during lifting and lowering, a bellows 11 is fitted around the outer side of the outer support shaft 5. The upper end of the bellows 11 is sealed to the lower end face of the vacuum chamber 1 to seal the mounting hole, and the lower end face of the bellows 11 is sealed to the upper end face of the magnetohydrodynamic bearing 4. The upper and lower end faces of the bellows 11 are respectively sealed to the vacuum chamber 1 and the magnetohydrodynamic bearing 4 to achieve the airtightness of the vacuum chamber. The lower end of the outer support shaft 5 is located on the upper end face of the magnetohydrodynamic bearing 4. The outer support shaft 5 is circumferentially connected to the mounting hole by a linear bearing 7. The lower end face of the magnetohydrodynamic bearing 4 is fixed to the frame 9, which is fixed to a vertically lifting guide rail (not shown in the figure). The vertical lifting and lowering of the frame 9 ensures the smooth lifting and lowering of the entire load platform.

[0039] In some embodiments, the bellows 11 is a stainless steel bellows. The stainless steel bellows is sealed to the upper end face of the magnetohydrodynamic bearing 4 by bolts through the first blind hole 12, and the stainless steel bellows is sealed to the lower end face of the vacuum chamber 1 by bolts through the second blind hole 13.

[0040] In some embodiments, the drive device 10 is a stepper motor. A gap exists between the outer support shaft 5 and the inner support shaft 6. This gap ensures the normal rotation of the inner support shaft 6.

[0041] To achieve smooth rotation, the rolling bearing 8 can be installed on the underside of the load platform 2, and positioned by the bearing end cover 3 and the shoulder of the inner support shaft 6. The load platform 2 is connected by the first pin 14 to ensure stable connection during repeated rotation of the load platform.

[0042] To ensure airtightness, a stainless steel bellows 11 is used to seal the upper end face of the magnetohydrodynamic bearing 4 and the lower end face of the vacuum chamber 1 via blind bolts. To achieve smooth vertical movement of the outer support shaft 5, a linear bearing 7 is used to connect the outer support shaft 5 to the mounting hole at the bottom of the vacuum chamber 1. The inner support shaft 6 is connected to the magnetohydrodynamic bearing 4 via a pin.

[0043] The controllable rotating lifting load platform device of this embodiment has the following advantages:

[0044] 1. Lubricant carbon contamination issue: This embodiment uses linear bearings and rolling bearings to achieve the lifting and rotation of the load platform, which differs from using only graphite copper bushings. This embodiment does not use copper bushings and therefore does not require lubricant to reduce resistance; instead, it utilizes the rolling of the balls to reduce resistance and ensure the lifting and rotation of the load platform.

[0045] 2. Jamming problem caused by increased deformation and resistance due to bending moment: This implementation uses a dual-axis structure, with the outer support shaft ensuring axial movement of the load and the inner support shaft ensuring rotational movement of the load. This solves the jamming problem caused by excessive bending moment and increased resistance due to asymmetrical loads when using copper bushings for lifting and rotation.

[0046] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0047] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0048] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0049] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0050] In this invention, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0051] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A controllable rotating lifting load platform device, characterized in that, include: A vacuum chamber (1) has mounting holes at its bottom; A load platform (2) is located inside the vacuum chamber (1); An outer support shaft (5) passes through the mounting hole and has a hollow cavity; An inner support shaft (6) passes through the hollow cavity and is connected to the load platform (2); as well as A frame (9) is provided with a magnetohydrodynamic bearing (4). The lower end of the outer support shaft (5) is located on the upper end surface of the magnetohydrodynamic bearing (4). The lower end of the inner support shaft (6) is connected to a drive device (10) through the central rotating shaft of the magnetohydrodynamic bearing (4). The drive device (10) drives the inner support shaft (6) to rotate through the central rotating shaft of the magnetohydrodynamic bearing (4). The frame (9) is fixed on a guide rail that can be raised and lowered.

2. The controllable rotating lifting load platform device according to claim 1, characterized in that, The inner support shaft (6) and the outer support shaft (5) are connected by a rolling bearing (8).

3. The controllable rotating lifting load platform device according to claim 2, characterized in that, The upper end of the outer support shaft (5) is provided with a bearing end cap (3), the rolling bearing (8) is sleeved on the inner support shaft (6), and the bearing end cap (3) abuts against the rolling bearing (8).

4. The controllable rotating lifting load platform device according to claim 1, characterized in that, The load platform (2) and the inner support shaft (6) are connected by a first pin (14).

5. The controllable rotating lifting load platform device according to claim 1, characterized in that, The outer support shaft (6) is engaged with the mounting hole by a linear bearing (7).

6. The controllable rotating lifting load platform device according to claim 1, characterized in that, A bellows (11) is sleeved on the outside of the outer support shaft (6). The upper end of the bellows (11) is sealed to the lower end face of the vacuum chamber (1) to seal the mounting hole. The lower end face of the bellows (11) is sealed to the upper end face of the magnetohydrodynamic bearing (4).

7. The controllable rotating lifting load platform device according to claim 6, characterized in that, The corrugated pipe (11) is a stainless steel corrugated pipe.

8. The controllable rotating lifting load platform device according to claim 7, characterized in that, The stainless steel bellows is sealed to the upper end face of the magnetohydrodynamic bearing (4) by bolts through the first blind hole (12), and the stainless steel bellows is sealed to the lower end face of the vacuum chamber (1) by bolts through the second blind hole (13).

9. The controllable rotating lifting load platform device according to claim 1, characterized in that, The inner support shaft (6) is connected to the central rotation shaft of the magnetohydrodynamic bearing (4) by a second pin (15); the drive device (10) is a stepper motor.

10. The controllable rotating lifting load platform device according to claim 1, characterized in that, There is a gap between the outer support shaft (5) and the inner support shaft (6).

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