Closure system

Abstract

The invention relates to a closure system comprising a closure element (110) for closing a process chamber (12), a process tool assembly (140) which can be inserted into the process chamber through an opening (122) in the closure element (110) for processing in the process chamber and by means of which the opening (122) in the closure element (110) can be closed when the process tool assembly has been guided through the opening and inserted into the process chamber, and a controller (170) for bringing about a conjoint movement of the process tool assembly (140) and the closure element (110) when the process chamber (12) is closed and when the process tool assembly (140) has been partly guided through the opening (122) in the closure element (110), the process tool assembly (140) and the closure element (110) being coupled by a fluid bearing (1350).

Description

[0001] LOCKING SYSTEM

[0002] TECHNICAL AREA

[0003] The present disclosure relates to a closure system, in particular a closure system for a process plant suitable for processing substrates in semiconductor manufacturing, a process plant with such a closure system and a method for using a closure system for a process plant

[0004] STATE OF THE ART

[0005] In the semiconductor industry, the bonding of a component, such as a semiconductor chip (also referred to by the English term "die"), to a substrate such as a wafer, glass substrate, organic substrate, lead frame, or another die is carried out under controlled conditions to ensure the formation of an effective bond. Generally, it is necessary to avoid oxidation or the presence of impurities, such as organic or metallic foreign particles, on the surfaces of the die and the substrate, especially during bonding. A process environment with minimal oxygen can be particularly advantageous when processing is carried out at temperatures above 70° Celsius.

[0006] Typically, bonding processes are carried out using systems that reduce oxidation through the use of process gases such as inert gas or forming gas. A technical challenge in operating bonding systems is maintaining the stable process environment required for high-quality bonds. The process parameters for achieving a stable environment are usually difficult to control and generally very resource-intensive. Furthermore, existing bonding systems typically do not meet the desired handling requirements for a high number of process cycles per unit of time while maintaining consistently high bond quality. For example, conventional process steps in existing systems may require large quantities of process gases to reduce oxidation during processing.Furthermore, tools used for processing that were exposed to ambient air prior to processing can significantly contribute to an undesirable increase in the concentration of oxygen atoms or other impurities.

[0007] To complicate matters further, some process steps require additional heat input, and some process steps must be carried out under constantly elevated temperatures or with alternating heat input. Therefore, neither the use of process plants with particularly large process chambers, as disclosed, for example, in EP 3098837 A2, nor process chambers pressurized with process gases are economically viable or suitable for the high technical requirements of a stable and particularly low-contamination process environment. Solutions from related technical fields, such as those described in DE102010033303A1 or DE4325192A1, are also not even remotely helpful in solving the present problem.

[0008] TASK

[0009] One objective of the present disclosure is to provide a technical solution for process plants which at least partially avoids, mitigates, or eliminates some of the disadvantages of the prior art, whether identified herein or elsewhere, or to provide an alternative approach.

[0010] SOLUTION TO THE TASK

[0011] This problem is solved by technical devices according to the independent claims. Technically advantageous embodiments are the subject of the dependent claims, the description, and the drawings. DESCRIPTION OF INVENTION

[0012] One aspect of the invention describes a closure system with a closure element for closing a process chamber, with a process tool assembly that can be inserted into the process chamber for processing in the process chamber through an opening of the closure element with at least one of its parts, with which the opening in the closure element can be closed in the passed-through and inserted-into-the-process-chamber state, and with a control for effecting a movement of the process tool assembly in conjunction with a movement of the closure element when the process chamber is closed and when the process tool assembly is at least partially passed through the opening of the closure element.

[0013] The invention also discloses a closure system comprising a closure element for closing a process chamber, a process tool assembly that can be inserted into the process chamber through an opening in the closure element with at least one of its parts, the opening in the closure element being closable in the inserted state, and a control system for effecting a movement of the process tool assembly in conjunction with a movement of the closure element when the process chamber is closed and when the process tool assembly is at least partially inserted through the opening of the closure element, wherein preferably the process tool assembly (140) and the closure element (110) are coupled by a fluid bearing (1350).

[0014] Such sealing systems enable, in particular, the provision and / or maintenance of a protective atmosphere within a closed process chamber of a process plant. The process tool assembly, or at least one of its components, passing through the opening in the sealing element thus provides process tools for processing within the process chamber without a restricted range of motion or freedom of movement limited by the sealing system. This has the advantage that the atmosphere in the process chamber remains stable and constant during processing, ensuring a stable process environment with a reduced concentration of impurities in manufacturing processes for producing high-quality bonded joints.In embodiments of a locking system, the movement of the process tool assembly or at least one of its parts can be effected by means of a positioning device for the joint movement of the process tool assembly with the locking element.

[0015] In embodiments of a locking system, the joint movement of the locking element and the process tool assembly, or at least one of its parts, can be effected synchronously or synchronously to each other.

[0016] In embodiments of a locking system, the joint movement of the locking element and the process tool assembly, or at least one of its parts, relative to each other can be effected.

[0017] In embodiments of a locking system, the movement of the locking element can be effected by a displacement of the locking element, preferably at one end of the locking element.

[0018] In all these embodiments of a locking system, the movement of the locking element can be effected by a rolling up and / or rolling down of the locking element, preferably at one end of the locking element.

[0019] Furthermore, in embodiments of a locking system, the moving or rolling up and / or unrolling of the locking element can be effected by means of one, preferably two or more, drive device(s) controlled and / or regulated by the control system.

[0020] In the case of moving the locking element, the drive device additionally comprises one, preferably several, co-rotating traction drives for moving the locking element.

[0021] A movable, preferably plate-shaped, closure element has the particular advantage that it can be moved relative to the process chamber along its longitudinal axis by means of the traction drive(s) in such a way that the opening in the closure element can be moved relative to the process chamber. This means that the opening in the closure element can be moved and positioned at a desired location by means of the movement of the closure element, thus allowing access to the process chamber at a desired point for a process tool assembly without negatively affecting the process atmosphere, for example, by contamination from the ambient atmosphere.

[0022] In the case of winding and / or unwinding the locking element, the drive device additionally comprises one, preferably two, winding and unwinding units for winding and / or unwinding the locking element.

[0023] A retractable closure element has the particular advantage that the process chamber and the closure element are independent of each other in their respective geometric dimensions, specifically in their longitudinal length. This means that the longitudinal extent of a closure element is independent of the number of processing stations or the length of the process chamber if the closure element can be retracted and / or unrolled at the two opposite longitudinal ends of the process chamber instead of being rigidly displaceable along its longitudinal axis. In particular, a retractable and / or unrollable closure element has proven to be especially advantageous for achieving two to four times the number of process cycles per unit of time compared to a displaceable closure element.

[0024] In embodiments of a closure system, the closure element is guided by a guide arrangement with at least one bearing, preferably a plain bearing, a fluidic bearing, or a ball bearing, to reduce friction between the closure element and the process chamber. Preferably, the guide arrangement is configured to guide the closure element along its direction of movement. Advantageous guide arrangements are, for example, designed as rails with a guide groove as a recess or with suitable recesses for the corresponding bearing(s).The at least one bearing, preferably the multiple bearings, supports at least one, preferably both, or particularly preferably three or even all four, sides of the closure element, namely at least the underside facing the process chamber, preferably also the top side running parallel to the underside, or, and particularly preferably, also the underside and the two side edge surfaces running along the longitudinal axis of the direction of movement, or even all four sides, namely the underside and the top side and the two side edge surfaces. In embodiments of a closure system, the guide arrangement is gas-tight and preferably connected to the process chamber by force-fit and / or form-fit.

[0025] In embodiments of a closure system, the closure element and / or the at least one bearing and / or the guide arrangement can be cooled, preferably by a process gas as a cooling medium, and preferably also in addition to the previously described temperature control function, which can also be applied here for cooling. This has the advantage that a further cooling option can be implemented relatively easily in the process plant, which can be used not only to cool the entire process tool assembly or a part thereof, but also to cool individual or all measuring devices as well as the process chamber itself.

[0026] In embodiments of a closure system, the process tool assembly comprises a process head as one of its parts, with one or more process tools for picking up and / or placing and / or bonding a component onto a substrate. Preferably, the process head is a bonding head, a solder dispensing head, a solder distribution head, or a cleaning process head.

[0027] In embodiments of a closure system, the process tool assembly can be coupled to the closure element. This enables, in particular, both the stabilization of process parameters and, preferably, an increase in positioning accuracy, which contributes to an improvement in the quality of bond connections in manufacturing processes.

[0028] Preferably, embodiments of a closure system also have a first flange arranged around the opening of the closure element for coupling. When the opening is closed by the process tool assembly, the process tool assembly can be coupled to this first flange by means of a second flange. In the case of such coupling, a fluid bearing forms between the first and second flanges due to a process gas, preferably one that can be introduced during operation. This fluid bearing causes the first flange to be spaced apart from the second flange. This also has the advantage that the combined movement can be performed without parasitic load being transferred from the process tool assembly to the closure element. This improves the freedom of movement, the freedom from acceleration, and ultimately the resulting positioning accuracy of the components.Furthermore, this enables both a separation of the ambient atmosphere from the atmosphere in the process chamber and preferably a stabilization of the coupled flanges, preferably without direct mechanical contact between the flanges, thus stabilizing the process parameters and preferably increasing the positioning accuracy, which contributes to an increase in the quality of bond connections in manufacturing processes.

[0029] In embodiments of a closure system, at least one guide, such as a guide pin engaging in a guide hole or a hinge for mechanical support of the fluid bearing on one or both flanges, is provided for coupling the first flange to the second flange. This also has the advantage that the combined movement can be performed without parasitic load being transferred from the process tool assembly to the closure element.

[0030] In embodiments of a closure system, the process chamber is temperature-controlled, preferably by means of a process gas. Particularly suitable process gases for this purpose are, for example, gases for purging or particle removal, especially inert gases or forming gases, preferably without corrosive or material-abrasive properties. This has the advantage that, instead of a separate temperature control circuit, gas already used for processing can be used to heat the process chamber. Temperature control of the process chamber inherently includes both a heat input into the process chamber to heat the atmosphere within it and a heat output from the process chamber to cool the atmosphere within it. This enables, in particular, the stabilization of process parameters, which contributes to an increase in the quality of bonded connections.

[0031] In embodiments of a closure system, the closure element is also referred to as a cover or lid of the process chamber, whereby the technical function according to the disclosure remains unchanged regardless of the designation. The closure element can be in the form of a sliding plate, a rollable band, or a rollable film as defined in the disclosure. A further aspect of the invention describes a process plant with one of the previously described embodiments of a closure system, which is suitable for processing and / or loading a substrate with a component.Such components are, for example, semiconductor chips or “dies”, which are to be processed and / or connected together under controlled conditions on a substrate such as a wafer, a glass carrier, an organic or inorganic substrate, a lead frame or on another “die” in order to ensure low-contamination processing or high-quality bond connections.

[0032] Preferably, the process system comprises one of the previously described embodiments of a closure system with a process tool assembly. Preferably, the process tool assembly includes a process head with one or more process tools for picking up and / or placing and / or bonding the component to the substrate.

[0033] This has the advantage that the process tool assembly previously passed through the opening in the closure element not only provides process tools without a restricted radius of action or freedom of movement restricted by the closure system for the execution of process steps within the process chamber, but also allows them to remain in the atmosphere of the process chamber not only during processing but also during downtimes or process breaks.

[0034] This eliminates the need for process tools that have been exposed to ambient air prior to processing, which would significantly contribute to an undesirable increase in the concentration of oxygen atoms or other impurities in the process chamber. Furthermore, this approach allows for the stabilization of process parameters, which in turn improves the quality of bonded connections.

[0035] An embodiment of a process plant with one of the previously described embodiments of a closure system also includes a process tool assembly with the previously described features.

[0036] Preferably, the process plant or process tool assembly additionally comprises at least one or more first optical measuring devices for detecting the substrate itself and / or the position of the substrate. Preferably, a first optical measuring device is a camera directed downwards with its viewing angle, which, as a so-called top-down camera, provides a top-down image of an object, here a component to be scanned or the placement position of a component already scanned. This enables, in particular, an increase in positioning accuracy, which contributes to an improvement in the quality of bonded connections.

[0037] In embodiments of a process plant with one of the previously described embodiments of a closure system, either the process plant itself or the process tool assembly also comprises one or more second optical measuring devices for detecting the component picked up by the one or more process tools as such and / or the position of the component relative to at least one of the process tools, and preferably to the substrate.

[0038] Preferably, a second optical measuring device is a camera oriented upwards with its viewing angle, which, as a so-called bottom-view camera, provides an under-view image of an object, here a receiving surface of a process tool or a component that has already been captured. This enables, in particular, an increase in positioning accuracy, which contributes to an improvement in the quality of bond connections.

[0039] Preferably, each measuring device features process gas-based cooling, as previously described elsewhere. The cooling system for the first optical measuring device is designed such that the process gas can be directed as a cooling gas stream onto the first optical measuring device or that it is surrounded by a constant gas flow. In this way, distortion or misalignment of the first measuring device can be reduced or avoided, thereby ensuring consistently high reliability of the acquired data. The process gas can also be circulated around one or all of the flange openings via pipes or lines, and preferably not only the measuring devices can be accessed through such coolable flange openings.

[0040] One embodiment of a process plant can be a "die bonder" comprising a process chamber with a closure system as described above. According to the teaching of the disclosure, the die bonder, as an embodiment of a process plant, thus comprises a process tool assembly that is freely movable within the process chamber without having to leave the atmosphere in the process chamber for processing.

[0041] In this way, a beneficial die bonder is provided, the advantages of which are explained above. In particular, the penetration of contaminants is reduced and the risk of oxidation is minimized.

[0042] In certain embodiments, the process chamber of the die bonder also includes a first processing station for feeding components and a second processing station for providing a substrate. The process tool assembly can thus pick up a component at the component station using at least one process tool and place the component onto a substrate at the substrate station.

[0043] According to a further aspect of the invention, a method is provided which comprises steps for arranging a closure element such that it extends over a process chamber of a process plant, such as a plant for thermocompression bonding of substrates or general process plants for placing or bonding components, in order to ensure the closure of the process chamber, wherein the closure element comprises an opening through which access to the process chamber is permitted. Furthermore, movement of the closure element relative to the process chamber can be included in order to effect movement of the access area relative to the channel.Furthermore, the process can include closing the closure element by means of a process tool assembly that partially passes through the opening of the closure element in the area of ​​the opening of the closure element, as well as forming a bearing around the opening of the closure element. It can also include causing movement of at least a part of the process tool assembly in order to effect a movement of the access area relative to the process chamber, preferably synchronous or synchronized. Measuring the oxygen concentration in the process chamber before or during the movement of the closure element can also be included, as can measuring the oxygen concentration at a point in the process chamber towards which the opening is to be moved, or at a point in the process chamber towards which the opening is movable.In particular, it is possible to pick up and / or place components as well as to perform visual recording, for example taking pictures, before picking up and / or placing components and / or after picking up and / or placing components, after or before each of the previous steps.

[0044] All embodiments of a closure system and previously described aspects thus enable, in particular, high-quality bond connections, since all process parameters, especially in a resource-saving manner with regard to process gas consumption, are controllable and / or adjustable, and process steps can be carried out in a stable process environment with unrestricted freedom of movement and high process cycles per unit of time, thus contributing to an increase in the quality of bond connections in manufacturing processes.

[0045] The present invention thus makes it possible to reduce contamination in the process chamber by arranging all process plant elements for processing substrates within the closed process chamber itself. This oversized process chamber, with its limited freedom of movement, then needs to be flooded with process gas to prevent contamination. In this way, the overall size of the process plant can also be reduced, and cleaning and maintenance are simplified.

[0046] All embodiments of a closure system and the described aspects make it possible to meet modern handling requirements for a high number of process cycles per unit of time while maintaining a consistently increased quality of bond connections in manufacturing processes.

[0047] All features described in connection with the individual embodiments of the invention described above and illustrated below can be provided in different combinations in the individual aspects of the invention in order to simultaneously realize their respective inherent advantages, even if these have been described for different embodiments. The scope of protection of the present invention is defined by the following claims and is not limited by the features described above or shown in the following figures.

[0048] FIGURE DESCRIPTION

[0049] Further advantages and features of the invention and its aspects will become apparent from the following figures, namely: FIG. 1 shows a section of a schematic top view of an embodiment of a locking element of a locking system;

[0050] FIG. 2 shows a schematic embodiment of a closure system with a closure element and a process tool assembly;

[0051] FIG. 3 shows a side view of a schematically represented process plant with an embodiment of a closure system with a roll-up cover;

[0052] FIG. 4 shows a side view of a schematically represented process plant with an embodiment of a closure system with a sliding cover;

[0053] FIG. 5 schematically shows the sequence of steps in a procedure for using a closure system.

[0054] DETAILED DESCRIPTION

[0055] FIG. 1 shows a section of a schematic top view of an embodiment of a closure element 110 for closing the process chamber 12, which is not visible. The process chamber 12 itself is concealed by the closure element 110. The internal volume of the process chamber 12, which is separated from the outside atmosphere when closed by the closure element 110, typically has a volume in the range of about 2 to 10 liters, preferably in the range of about 3 to 5 liters.In practice, a volume of 4 liters has proven particularly effective for the process chamber. However, for especially large substrates, or in cases involving numerous process steps and / or multiple processing stations, or more than one concealed component station 30 or concealed substrate position 40 (covered by the sealing element 110), a larger volume of up to 100 liters has proven useful. Volumes up to a maximum of 10 liters are particularly advantageous because they are smaller than the conventional build volumes of standard process chambers. This allows for a resource-efficient reduction in the amount of purge gas required to flush or flood the process chambers, which are sealed by a sealing system. Only a small, separate build volume needs to be flushed, flooded, cooled, or temperature-controlled to provide a suitable process atmosphere.Furthermore, the significantly smaller construction volume of this type of process chamber with a closure system allows not only the relative heating power at local points, but also the absolute heating power required to temperature-control the entire volume of the process chamber to be improved.

[0056] In the section shown in FIG. 1, the closure element 110 is depicted in planar form and the section represents features of all embodiments, because the closure element 110 can be implemented in the form of a sliding plate, a rollable band or a rollable film according to the disclosure.

[0057] The closure element 110 can be formed from one or more sheets, e.g., a spring steel sheet. Alternatively, the closure element 110 can be formed from a strip, e.g., a temperature-resistant plastic strip. The material from which the closure element 110 is formed can be a rollable flat material, as described below. The closure element 110 can be referred to as a roll-top cover, such as a rollable cover that can be rolled up and / or unrolled to cover a flat surface. The closure element 110 forms a closure for the process chamber 12 by closing the process chamber 12 itself, e.g., by being arranged directly on the non-visible process chamber wall 15, or in conjunction with other components, such as...of the illustrated guide arrangements 135, in which the locking element 110 is held or rests and guided as described in detail below.

[0058] In the illustrated embodiment, the closure element 110 is guided in its two directions of movement along the longitudinal axis, which extends along the x-axis shown in FIG. 1, on both sides by two guide arrangements 112 spaced parallel to each other within the process chamber 12 (not visible). Each guide arrangement 112 has at least one bearing 135, with which the closure element is mounted in the guide arrangement 112 to reduce friction between the closure element 110 and the process chamber 12. Preferably, a bearing 135 is designed as a plain bearing, a fluidic bearing, or a ball bearing.

[0059] The use of a plain bearing or a fluidic bearing, which can be formed, for example, by means of one of the process gases used for processing, has the advantage of a particularly low-friction bearing, whereas a ball bearing enables a particularly simple and mechanically stable design.

[0060] The opening 122 is recessed in the closure element 110. The optional first flange 144 is arranged around the opening 122 on the closure element 110 such that its flange opening 1520 surrounds the opening 122, preferably in the same shape, and together they form a passage that enables improved atmospheric separation between the atmosphere in the process chamber and the ambient atmosphere by means of additional fluid bearings using one or more fluid bearings. If the flange opening 1520 and the opening 122 have approximately or completely the same shape and size, this offers the advantage of an improved mechanical connection. Preferably, the first flange 144 has more than one flange opening, so that each of these flange openings forms more than one passage with the opening 122, as shown, for example, in FIGS. 3 and 4.

[0061] Furthermore, the optional first flange 144 schematically indicates the fluid bearing 1350, which, in the case of a second flange coupled to the first flange 144, both provides fluidic support for the first flange 144 and the second flange, and also generates an overpressure between the first flange 144 and the second flange. The process gas requirement for providing the overpressure for fluid bearing is significantly lower than the process gas loss from conventional openings in known systems.

[0062] To form the fluid bearing 1350, process gas at high overpressure or high inlet pressure is introduced through inlets (not shown) in the first flange 144 and the second flange 146 (not shown). This reduces, or completely prevents, the ingress of particles or contaminants into the process chamber 12 around the opening 122 and along the side edges of the closure element 110, which are guided by the guide arrangements 112 and supported in the bearings 135. Such a fluid bearing could also be formed without the optional first flange 144, in which case the second flange would be the only coupling flange.

[0063] The closure element 110 can be made of a coated metal sheet, the coating leading to better sliding behavior in conjunction with the bearings 135, which advantageously leads to a reduction in the contamination of particles caused by the movement of the closure element 112 as such, i.e. in the form of shifting or rolling up and / or rolling down, or by the abrasion of the closure element 110 in general.

[0064] The closure element 110 is planar, i.e., flat, at least in the area of ​​the closure element 110 that extends over the concealed process chamber 12 for closure.

[0065] As shown in FIG. 1, the closure element 110 comprises the opening 122, through which access to the concealed process chamber 12 is provided. As described in more detail below, the movement of the closure element 110 and the movement of the opening 122 relative to the process chamber 12 that necessarily accompanies the movement of the closure element 110 allows access through the opening 122 to any point within the process chamber 12. This means that a process tool, guided through the opening 122 and inserted into the process chamber 12, can access at least every machining station within the process chamber 12, provided that the process tool assembly is at least partially inserted and the closure element is moved together.In the case of a first flange 1520 arranged on the closure element 110, the insertion takes place as already mentioned through the passage(s) formed by the opening 122 and by the flange opening(s).

[0066] Preferably, this means that not only every processing station, but also every point can be reached by a process tool appropriately introduced into the process chamber 12.

[0067] Preferably, the movement of a process tool assembly 140 is combined with the movement of the locking element 110 or vice versa, as shown later in FIG.

[0068] 3 or Fig. 4 schematically shown there, the control 170 is synchronously controlled, or the two movements of the cover 110 and process tool assembly 140 shown there in the two drawings are synchronized with each other.

[0069] FIG. 2 shows a schematic embodiment of a closure system with a closure element 110, as shown, for example, in FIG. 1, and a process tool assembly 140 in a perspective view. A schematically indicated section of the closure element 110, which extends along its longitudinal axis parallel to the drawn x-axis, is also shown as in FIG. 1.

[0070] The locking element 110 is supported by its side edges in the guide arrangements 112 arranged on both sides by means of the two bearings 135 indicated by dashed lines. In this embodiment, the two guide arrangements 112 are each designed as a guide rail with a recessed guide groove for receiving the bearing 135. For the sake of clarity, the recess or guide groove itself does not have its own reference numeral, since the recess is completely filled, particularly in the case of a fluid bearing as bearing 135.

[0071] The process tool assembly 140 includes the optional housing 147, indicated by dashed lines, for general mechanical protection, but also, in particular, to further prevent the ingress of contaminants.

[0072] The process tool assembly 140 is arranged on the positioning device 134 by means of the carrier 148. The positioning device 134 moves the process tool assembly 140 in both directions of movement of the closure element 110, which is guided by the two guide arrangements 135, relative to the process chamber 12 (not shown) along the x-axis shown.

[0073] The flange designated as the second flange 146 (due to the existing optional first flange 144) is mechanically attached to the support 148. The housing 147, indicated by dashed lines, is mechanically connected to the second flange 146.

[0074] Embodiments of a closure element 110 can, instead of having a single opening 122, also have as many openings as there are flange openings in a flange, preferably in the second flange 146, since the first flange 144 is optional, wherein the flange openings preferably have the shape of the openings in the closure element 110. Alternatively, only one large opening 122 in the closure element, as shown in FIG. 1, is also possible for a flange with multiple flange openings. The size of the opening 122 is such that its circumference surrounds all flange openings.

[0075] Preferably, with the process tool assembly decoupled, the opening 122 can be used as a maintenance opening for access to the process chamber 12 when the machine is at a standstill or not in use. In FIG. 2, unlike the embodiment shown in FIG. 1, the closure element 110 has two openings 122, which in the present embodiment are identical in shape and alignment with the two dashed flange openings 152 and 153 of the first flange 144. The shape and number of openings of a closure element are thus essentially determined by the process tool assembly and its components to be inserted. Preferably, the optional first flange 144 and / or the second flange 146 has more than one flange opening, so that each of these flange openings forms more than one passage into the process chamber 12 with the opening 122.

[0076] Furthermore, in this embodiment, the two flange openings 152 and 153 differ in shape, specifically in diameter. Accordingly, the second flange 146 has two flange openings 162 and 163. The two flange openings 152 and 153 of the first flange 144 and the two flange openings 162 and 163 of the second flange 146 are aligned with each other such that, together with the opening 122 (not shown), they each form a passage through the closure element 110.

[0077] The flange openings 152 and 153 of the first flange 144 thus surround, preferably in the same way, the multiple openings 122 (not shown) and together form the two passageways shown. The atmospheric separation between the atmosphere in the process chamber 12 and the ambient atmosphere is improved by an additional three-dimensional extension of the fluid bearing, which is formed by a plurality of outlets 164 in the circumferential side walls of the flange openings, preferably of all flanges.

[0078] As shown in FIG. 2, the side walls of all flange openings 152, 153, 162 and 163 each have one or more outlets 164 for the discharge of process gas that can be admitted into the inlets 165 of the first flange 144 and the second flange 146, thus forming the three-dimensional fluid bearing 1350. The fluid bearing 1350 is therefore formed not only between the closure element 110 or the optional first flange 144 and the second flange 146, but also in the passages formed between the side walls of all flange openings 152, 153, 162 and 163 and the process head 150 with its process tool 151, and, in the case of an optional measuring device, also in the first optical measuring device 160.Through these two feedthroughs, the process head 150 and the first optical measuring device 160, as parts of the process tool assembly 140, can each be inserted at least partially into the process chamber 12 not shown.

[0079] The process head 150 can be moved independently of the process tool assembly 140 by means of the positioning device 136 (indicated by dashed lines), preferably along the z-axis shown. Control is achieved as shown in FIGS. 3 and 4 via the control unit 170 (not shown here), which is preferably connected to a central control unit of the process plant or forms a common control unit.

[0080] The positioning device 136 is also arranged such that it moves the process head 150 not only in a direction orthogonal to the closure element 110, i.e., for example, in the vertical axis designated as the z-axis or in a direction orthogonal to the plane of the closure element 110, but also to selectively move the process head 150 at least partially or completely into or out of the process chamber 12. For this purpose, the process head 150 is attached to the carrier 148 as part of the process tool group 140. The process head can thus be moved indirectly with the aid of the positioning device 136 along the longitudinal direction designated as the x-axis and in a direction orthogonal to it along the surface orthogonal of the closure element 110 designated as the z-axis.

[0081] Furthermore, the positioning device 136 is preferably designed to move the process head 150 orthogonally to the direction of movement along the longitudinal axis shown as the x-axis, so that the movement corresponds to a movement along the y-axis shown.

[0082] Furthermore, the positioning device 136 is preferably designed to rotate the process head 150 about its own longitudinal axis as well as to tilt the process head 150 along the z-axis to correct angular errors relative to its longitudinal axis.

[0083] The 150 process head is generally suitable for processing components and can be selected from a variety of different process heads that are necessary or desirable in the field of semiconductor manufacturing, as the expert knows.

[0084] Embodiments of a process head can be configured, for example, as a bonding head, a solder dispensing head, a solder distribution head, or generally for cleaning, such as a plasma head. The process tool 151 is attached to the process head 150. The features described above are particularly advantageous in embodiments of a closure system for process equipment used as die bonders.

[0085] Depending on requirements, the first optical measuring device 160 can also be movable along the indicated z-axis in a controllable manner, or it can occupy a fixed position relative to the process tool assembly 140 and only be movable as part of it. By providing only one first optical measuring device 160, it can be advantageous to enable continuous acquisition and / or measurement of the process chamber 12 while simultaneously preventing the ingress of contaminants through the arrangement of the movable closure element 110 described above by synchronized or synchronous movement and / or tracking of the closure element 110, in particular by motion-correcting tracking.

[0086] FIG. 3 shows a side view of a schematically represented process plant 10 with an embodiment of a closure system having a sliding closure element 110 for closing the process chamber 12. The closure element 110 shown in FIG. 3 corresponds to the closure element 110 shown in partial view in FIG. 1 with all its features described above.

[0087] The closure element 110 is designed as a sliding plate and arranged so that it can be moved by the two drive devices 130 and 132. Both drive devices 130 and 132 are designed to cause movement of the closure element 110 relative to the process chamber 12 along its longitudinal axis, shown as the x-axis, by means of the two traction drives 1330 and 1332. This allows movement of the opening 122 relative to the process chamber 12. This means that the movement of the closure element 110 makes the opening 122 movable and allows it to be positioned at a desired location. This ensures contamination-free access to the process chamber 12 at a desired location for the process tool assembly 140 with the process tool 151, while simultaneously closing the opening 122 with the process tool assembly 140.

[0088] The process chamber 12 has the chamber base typical for all embodiments, here the process chamber base 16, with the process chamber wall 15 surrounding the process chamber base 16. The guide arrangement 112 is arranged on the process chamber wall 15 such that the closing element 110 for closing the process chamber 12 is slidably mounted in its recessed bearings 135 with the aid of the guide arrangement 135.

[0089] Although the movable embodiment of the closure element 110, like the rollable closure element in FIG. 4, is supported on both sides in the direction of movement along the longitudinal axis shown as the x-axis by the guide arrangement 112 and the respective bearing 135, unlike the embodiment shown in FIG. 2, only on the side opposite the process chamber floor 16, the use of a guide arrangement 112 is also possible in this embodiment of a movable closure element. This guide arrangement has a recess as shown in FIG. 2, into which the movable closure element 110 is inserted.

[0090] Furthermore, the locking element 110 shown in FIG. 3 corresponds to the locking element 110 shown schematically from above in FIG. 1 and to the locking element 110 shown in partial perspective in FIG. 2 with all its previously described features.

[0091] In the process plant 10 shown in FIG. 3, along the travel path of the process tool assembly 140, which is less than or equal to the length of the process chamber 12, the component station 30 with the component 20 mounted on it, one, two or more oxygen sensors 24 and / or a sensor for measuring process gases for continuous, periodic or random measurement of the oxygen or process gas concentration on the process chamber wall 15 or inside the process chamber 12, the second optical measuring device 161 in the form of an under-view camera for position detection and / or alignment and / or for visual detection of the component 20 picked up by the tool 151, and the substrate station 40 as a further example of a processing station are arranged accordingly.A substrate 11 is located on substrate station 40, on which a component 20 was already placed in a previous process step.

[0092] During the bonding process steps, as an example of possible processing steps, the process chamber 12 is continuously purged with a process gas to create a suitable process atmosphere within it. This significantly reduces the risk of contamination within the process chamber 12 compared to the prior art. As can be seen from the description above and the description of possible process steps below, the bonding process can be carried out with the process chamber 12 closed, and the process head 150 does not need to be removed from the protective atmosphere within the process chamber 12, thus ensuring efficient and low-contamination processing.

[0093] In the first step of this processing example, a component 20, e.g., a semiconductor chip, is fed into the process chamber 12 of the process system 10 at the component station 30, which can be, for example, a component feeder, a chuck, or a general component staging device. The component station 30 can include a component feeder that provides a stack of components 20, which can be picked up individually or in groups of two or more chips from the top of the stack.

[0094] The first drive device 130 with its traction drive 1130 and the second drive device 132 with its traction drive 1331 move the movable locking element 110 in the respective direction of movement along the longitudinal axis shown as the x-axis by means of the traction drive 1331, which is operated by the control unit 170 in sync with the traction drive 1330. Thus, the movable locking element 110 is moved by the two traction drives 1330 and 1331, which rotate in the same direction, so that the area with the opening(s) 122 moves across the component station 30.In the case of a plate-shaped locking element with sufficiently high mechanical stiffness, the operation of both traction drives 1330 and 1331 in synchronous operation can be technically realized in such a way that both traction drives 1330 and 1331 are actively controlled and driven, or only one of the two traction drives is active and the other traction drive only rotates passively.

[0095] The drive mechanism of the two drive devices 130, 132 with their respective traction drives 1330 and 1331 causes the closing element 110 to move relative to the process chamber 12 in such a way that the process chamber 12 remains closed and its internal atmosphere is protected against penetrating contamination by the bearings 135. As can be seen from FIG. 3, the control of the respective components, units and devices by the control unit 170 is shown by means of the arrows.

[0096] Preferably, all individual controls or control steps are controlled by a central control unit of the associated process plant (not shown). Preferably, the central control unit of the process plant is connected to the control unit 170 or forms a control unit, so that the control unit 170, as already explained with reference to FIG. 2, also controls the positioning device 136 and its movement in conjunction with the movements of the closing element 110 and the movements of the process tool assembly 140.

[0097] In embodiments of a sliding locking element 110, it has also proven effective in practice to reinforce the side edges of the locking element running along the direction of movement and to reduce the material thickness of the locking element in order to save weight while maintaining high stiffness, in order to enable high acceleration cycles with active control of both traction drives due to the lower weight.

[0098] Simultaneously with the movement of the closure element 110, the positioning device 134, due to the common control 170, moves the process tool assembly 140 synchronously or synchronously, so that both, i.e. the closure element 110 with its opening(s) 122 and the process tool assembly 140 with the process head 150, preferably in use, which is inserted into the process chamber 12 through one of the openings 12, can be moved together to the same position along the longitudinal axis.

[0099] In addition, the positioning device 134 can move the first optical measuring device 160 over the component 20 at the component station 30, and the two drive devices 130 and 132 can be moved together to move the closure element 110.

[0100] The first optical measuring device 160 can visually detect the component 20 at the substrate station 40 and thus determine the position of the component before it is picked up by the process tool 151 and / or inspect the component 20 accordingly. The positioning device 134 moves the process head 150 over the component at the component station 30, and the first drive device 130 is operated, preferably together with the drive device 132, to move the closure element 110 synchronously.

[0101] The positioning device 136 also ensures that the process head 150 can be moved in the process chamber 12 in the direction of the component station 30 in order to pick up the component 20 from the component station 30 using the process tool 151.

[0102] The positioning device 136 is also designed such that the process head 150 can be rotated during or before the recording process. Subsequently, the process head 150 can be moved upwards, but must remain within the process chamber 12.

[0103] As shown in FIG. 1, a component 20 has already been picked up at the component station 30, while at least part of the process head 150, such as the lower end of the process head 150, remains in the process chamber 12, so that the risk of contamination is reduced and prevented during the further process steps, as long as the process head 150 is at least partially inside the process chamber 12 or the process tool assembly 140 is coupled to the closure element 110.

[0104] In a second step, the process head 150 moves the component 20 from component station 30 through process chamber 12 to substrate station 40 by jointly moving the closure element 110 and the process tool assembly 140. For this purpose, the two traction drives 1330 and 1331 and the positioning device 134 are moved synchronously or synchronously by the controller 170 to move the closure element 110 and the process tool assembly 140 in both directions along the longitudinal axis of process chamber 12, shown as the x-axis. During this movement, at least part of the process head 150, e.g., the lower end of the process head 150, remains within process chamber 12.

[0105] Furthermore, the process head 150, used for inspecting a component picked up by the process tool 151, can be moved to the second optical measuring device 161 as a possible embodiment for a further component station in the form of a measuring station or an inspection station for quality assurance. The second optical measuring device 161 serves as a so-called underside camera, since the camera's viewing angle is directed towards the underside of the picked-up component 20. The second optical measuring device 161 visually detects both the component 20 and any position marks that may be applied to the component 20 or to the process tool 151, or simply the position of the process tool 151 itself. In this way, not only the condition of the component 20 but also its position relative to the process tool 151 or to the process head 150 can be determined, and a position correction can be determined and applied accordingly if necessary.The information on the condition can also be used to determine whether the picked-up component 20 is defective or intact before the picked-up component 20 is placed on the substrate 30 for assembly.

[0106] In a third step, the component 20 is moved towards the substrate station 40. The substrate station 40 provides the substrate 11, for example in the form of a wafer, in the process chamber 12. The substrate 11 can preferably be introduced into the process chamber 12 before the component 20 is moved towards the substrate station 40. The positioning device 136 moves the process head 150 in such a way as to place and mount the component 20 onto the substrate 11, thereby connecting the component 20 to the substrate 11 by means of a so-called bond connection. The information acquired by the second measuring device 161 can be used to control, preferably by the control unit 170, the positioning of the component 20 on the substrate 40, whereby the positioning device 136 can also cause a rotation of the process head 150 during or before this placement step.

[0107] In addition to positioning the component 20 on the substrate 11 along the longitudinal direction shown as the x-axis, the process head 150 can also be moved orthogonally to the longitudinal direction. There are several ways to control the transverse positioning of the component 20 on the substrate 40 using the controller 170 and the positioning device 134 and the positioning device 136, and / or to simultaneously move one of the processing stations, for example, the substrate station 40, in one of the two transverse directions along the transverse axis shown as the y-axis. For example, one of the processing stations, such as the substrate station 40, can also include an additional movable support for holding the substrate 20, and this support can be further moved by an additional drive mechanism to provide an additional degree of freedom for movement.Numerous combined motion controls of the positioning device 134 and / or the positioning device 136 are known to those skilled in the art in order to move the process head 150 in such a way that the process head 150, in combination with the movement of the locking element 110 along the x-axis, can realize any additional movement along the longitudinal direction in the same direction of movement and / or in the direction orthogonal to the locking element 110.Since the drive devices 130 and 132 effect the longitudinal movement of the closure element 110 and the first flange 144, and the positioning device 134 effect the longitudinal movement of the second flange 146, it is advantageously possible to achieve a more accurate and precise movement or placement of the process head 150 by using the positioning device 134 for this purpose, whereas a potentially less precise movement of the closure element 110 and the first flange 144 can be achieved with the two drive devices 130 and 132.

[0108] After processing, for example in the form of a bonding process in a die bonder as an embodiment of a process system, the process head 150 can be moved back to the component station 30. The process head 150 can be moved back to the component station 30 without being removed from the process chamber 12. This also reduces the risk of contamination in the process chamber 12 between individual process steps, since the process head 150 does not come into contact with the surrounding atmosphere and thus with contaminating ambient air between the individual process steps, preventing the unintentional introduction of oxygen atoms into the process chamber in the next process step.

[0109] Furthermore, throughout the entire processing operation, the first optical measuring device 160 can interact with the substrate 11 in the process chamber 12 in such a way that, for example, visual detection, position determination for positioning or position monitoring, and / or process monitoring are possible at each processing station. In this way, it can be ensured that processing is successful and with improved precision at each processing station, and any defects can be detected inline during processing and not only during quality control after production.

[0110] FIG. 4 shows a side view of a schematically represented process plant 10 with an embodiment of a closure system having a rollable closure element 110 for closing the process chamber 12. The closure element 110 shown in FIG. 4 corresponds to the closure element 110 shown in partial view in FIG. 1 with all its features described above.

[0111] Furthermore, the structure and function of the process chamber 12 together with the control 170 also corresponds to the structure and function of the process chamber 12 shown in FIG. 3 with its control 170 with all its previously described features, with the previously described difference that the closure element 110 is rollable instead of sliding and is supported on both sides in the direction of movement along the longitudinal axis shown as the x-axis by the guide arrangement 112 and the bearing 135.

[0112] In contrast to FIG. 3, the process unit 10 for winding and / or unwinding the rollable closure element 110 has one of the two drive devices at each of the two longitudinal ends of the process chamber 12 along the longitudinal axis shown as the x-axis, namely the drive device 130 with the winding and unwinding unit 1332 for winding and / or unwinding the closure element and the drive device 132 with the winding and unwinding unit 1333 for unwinding and / or winding the closure element.

[0113] The two winding and unwinding units 1332 and 1333 can be operated in opposite directions by the control unit 170 in such a way that the movement of the opening(s) 122 of the rollable closure element 122 along its direction of movement along the longitudinal axis shown as the x-axis can be effected by simultaneously winding up the closure element 122 by the winding and unwinding unit 1332 of the drive device 130 and unwinding the closure element 122 by the winding and unwinding unit 1333 of the drive device 132 and vice versa.

[0114] This has the particular advantage that the process chamber and the closure element are independent of each other in their respective geometric dimensions in their respective longitudinal dimension, or rather, the longitudinal extent of a closure element is independent of the number of processing stations or of the length of the process chamber if the closure element can be rolled up and / or unrolled at the two opposite longitudinal ends of the process chamber instead of being rigidly displaceable in its direction of movement along the longitudinal axis.

[0115] By rolling up and / or unrolling the rollable and / or unrollable closure element, which is designed as a foil or as a flexible band, preferably each made of a metal foil or a metal strip made of a spring steel alloy, two to four times higher process cycles per unit of time can be achieved compared to a sliding closure element, which proves to be particularly advantageous in modern semiconductor manufacturing.

[0116] As an additional advantage within the scope of the invention, an embodiment of a process plant 10 with a rollable closure element 110 offers, in addition to all the advantages of a plate-shaped closure element, the further advantage of a significantly smaller required machine footprint while maintaining the same possible travel distance of the process tool assembly 140 or the same length of the process chamber 12 than is the case with an embodiment of a process plant 10 with a sliding closure element 110. All this is achieved with the same protective properties for the internal atmosphere in the process chamber.

[0117] Although the rollable embodiment of the rollable and / or unrollable locking element 110, as well as the sliding locking element in FIG. 3, is only supported on both sides of the guide arrangement 112 and the respective bearing 135 in the direction of movement along the longitudinal axis shown as the x-axis, the use of a guide arrangement 112, which has a recess as shown in FIG. 2, into which the rollable locking element 110 is inserted, is also possible in this embodiment of a rollable locking element.

[0118] Furthermore, the locking element 110 shown in FIG. 4 also corresponds to the locking element 110 shown schematically from above in FIG. 1 and to the locking element 110 shown in partial perspective in FIG. 2 with all its previously described features.

[0119] In the embodiments of a process plant 10 shown in FIGS. 3 and FIGS. 4, cable carriers (not shown) can also be provided to guide cables (not shown) for supplying power and / or transmitting control signals or data to or from the process tool assembly 140. Advantageously, these flexible cable carriers and / or cables ensure that the power supply and / or transmission is possible at all points to which the process tool assembly 140 is movable during its movement.

[0120] Furthermore, in the embodiments of a process plant 10 shown in FIGS. 3 and FIG. 4, oxygen sensors 24 are arranged inside the process chamber 10, preferably on the process chamber wall 15, for measuring the oxygen concentration in the process chamber 12. Preferably, a plurality of oxygen sensors can be arranged at a plurality of locations inside the process chamber 12 for measuring the oxygen concentration. In this way, the oxygen concentration can additionally be measured at all these locations before the process tool assembly 140, a component 20, or a substrate 11 is moved from one processing station, such as the component station 30, to another processing station, such as the substrate station 40. In the case of local contamination, an additional purging process with a process gas could further reduce the risk of contamination by oxidation.This further increases the quality of the bond connections.

[0121] FIG. 5 schematically shows the sequence of a method for using a closure system with its steps, as well as the method for using a closure system in conjunction with a process plant, as shown in FIGS. 1 to 4 above, using the corresponding reference numerals. The method comprises the following possible process steps S110, S120, S130, S140, S150, and S160.

[0122] Step S110 comprises arranging a closure element 110 such that it extends over a process chamber 12 of a process plant, e.g. a plant for thermocompression bonding of substrates or general process plants for placing or bonding components, in order to ensure the closure of the process chamber 12, wherein the closure element 110 comprises an opening 122 through which access to the process chamber 12 is enabled by the closure element 110.

[0123] Step S120 comprises causing a movement of the closure element 110 relative to the process chamber 12 in order to cause a movement of the opening 122 relative to the process chamber 12.

[0124] Step S130 is optional and comprises closing the closure element 110 by means of a process tool assembly 140, which partially extends through the opening 122 of the closure element 110 in the region of the opening 122 of the closure element, and forming a bearing by means of a fluid bearing 1350 around the opening 122 of the closure element 110. Step S140 is optional and comprises synchronously or synchronously effecting a joint movement of the closure element and, preferably of at least a part of, the process tool assembly 140, in order to effect the synchronous or synchronized movement of the opening 122 relative to the process chamber 12.

[0125] Step S150 is optional and records the picking up and / or placement as well as any further processing steps associated with a component 20 from any processing station onto a substrate or the placement at another processing station and preferably also includes the measurement of the oxygen concentration in the process chamber 12 before or during the movement of the closure element 110 required for these processing steps.

[0126] Step S160 is optional and includes measuring the oxygen concentration at a point in the process chamber 12 to which the opening 122 is to be moved, or at a point in the process chamber 12 to which the opening 122 is movable.

[0127] It goes without saying that any one, all or a combination of the features described above can be included in steps of the procedure for the use of the closure system 110 or the process plant 12, as desired or necessary.

[0128] Although preferred embodiments have been shown and described, the person skilled in the art can see that various changes and modifications can be made without extending the scope of aspects of the invention as illustrated in the following drawings and claimed in the following claims and as detailed above.

[0129] Finally, it should be noted that the features and aspects described above can be combined and / or used either individually or in combination with one another where appropriate, in particular as specified in the attached claims. The optional features for each aspect or exemplary embodiment of the invention, as set out below, are also permissible for all other aspects or exemplary embodiments of the invention where appropriate. In other words, the person skilled in the art reading this description should consider the optional features for each aspect or exemplary embodiment of the invention as interchangeable and combinable between different aspects and exemplary embodiments. REFERENCE MARK LIST

[0130] 10 Process plant

[0131] 11 Substrat

[0132] 12th Tribunal

[0133] 15 Process chamber wall

[0134] 16 Process chamber floor

[0135] 20 components

[0136] 24 Oxygen sensor

[0137] 30 component stations

[0138] 40 substrate stations

[0139] 110 locking element

[0140] 112 Leadership order

[0141] 122 Opening

[0142] 130 Drive device

[0143] 1330 traction drive

[0144] 1331 Traction drive

[0145] 1332 Winding and unwinding unit

[0146] 1333 Winding and unwinding unit

[0147] 132 Drive device

[0148] 134 Positioning device

[0149] 135 storage

[0150] 1350 fluid bearings

[0151] 136 Positioning device

[0152] 140 Process tool assembly 144 First flange

[0153] 146 Second flange

[0154] 147 cases

[0155] 148 carriers

[0156] 150 Process head

[0157] 151 Process tool

[0158] 1520 Flange opening

[0159] 152 Flange opening

[0160] 153 Flange opening

[0161] 160 First optical measuring device 161 Second optical measuring device 162 Flange opening

[0162] 163 Flange opening

[0163] 164 Outlet

[0164] 165 Admission

[0165] 170 Control

Claims

PATENT CLAIMS 1. Locking system with - a closure element (110) for closing a process chamber (12); - a part of a process tool assembly (140) that can be inserted into the process chamber through an opening (122) of the closure element (110) for processing in the process chamber, with which the opening (122) of the closure element (110) can be closed in the carried out and inserted state; - a control (170) for effecting a movement of the process tool assembly (140) in conjunction with a movement of the closure element (110) when the process chamber (12) is closed and when part of the process tool assembly (140) passes through the opening (122) of the closure element (110).

2. Locking system according to claim 1, wherein for the joint movement of the process tool assembly (140) with the locking element (110), the movement of the process tool assembly (140) can be effected by means of a positioning device (134).

3. Closure system according to claim 1 or claim 2, wherein the joint movement of the closure element (110) and the process tool assembly (140) can be effected synchronously or synchronously with each other.

4. Closure system according to one of the preceding claims, wherein the joint movement of the closure element (110) and the process tool assembly (140) relative to each other can be effected.

5. Locking system according to one of the preceding claims, wherein the movement of the locking element (110) can be effected by a displacement of the locking element (110), preferably at one end of the locking element (110).

6. Locking system according to one of claims 1 to 4, wherein the movement of the locking element (110) can be effected by a rolling up and / or rolling down of the locking element (110), preferably at one end of the locking element (110).

7. Locking system according to claim 5 or 6, wherein the moving or rolling up and / or rolling down of the locking element (110) can be effected by means of a drive device (130, 132) controlled and / or regulated by the control (170).

8. Locking system according to claim 7, wherein in the case of rolling up and / or unrolling the locking element (110) the drive device (130, 132) comprises a rolling and unrolling unit (1332, 1333) for rolling up and / or unrolling the locking element (110).

9. Closure system according to one of the preceding claims, wherein the closure element (110) is guided by a guide arrangement (112) with at least one bearing (135), preferably a sliding bearing, a fluidic bearing or a ball bearing, to reduce friction between the closure element (110) and the process chamber (12).

10. Locking system according to claim 9, wherein the guide arrangement (112) is arranged to guide the locking element (110) along the direction of movement of the locking element (110).

11. Closure system according to claim 9 or claim 10, wherein the guide arrangement (112) is connected to the process chamber (12) in a gas-tight manner, and preferably by force and / or form locking.

12. Closure system according to one of claims 9 to 11, wherein the cover and / or the at least one bearing (135) and / or the guide arrangement (112) are each coolable, preferably by a process gas as a cooling medium.

13. Closure system according to one of the preceding claims, wherein the process tool assembly (140) comprises a process head (150), preferably a bonding head or a solder dispensing head or a solder distribution head or a cleaning head.

14. Closure system according to one of the preceding claims, wherein the process tool assembly (140) can be coupled to the closure element (110).

15. Closure system according to claim 14, wherein a first flange (144) is arranged for coupling to the closure element (110) around whose opening (122) a first flange (144) is arranged, to which, when the opening (122) is closed, the Process tool assembly (140), the process tool assembly (140) can be coupled by means of a second flange (146).

16. Closure system according to claim 15, wherein in the case of coupling between the first flange (144) and the second flange (146) the coupling is effected by means of a fluid bearing (1350) which can be formed between the first flange (144) and the second flange (146), preferably by means of a process gas, such that, due to the fluid bearing, the first flange (144) is spaced apart from the second flange (146).

17. Closure system according to one of the preceding claims, wherein the process chamber (12) is temperature-controlled, preferably by means of a process gas.

18. Processing plant with a closure system according to one of claims 1 to 17 for processing and / or loading a substrate (11) with a component (10).

19. Process plant according to claim 18, wherein the process tool assembly (140) comprises a process head (15) as one of its parts, preferably with one or more process tools (151) for picking up and / or placing and / or bonding the component (10) onto the substrate (11).

20. Process plant according to one of claims 18 or 19, wherein the process tool assembly (140) additionally comprises at least one or more first optical measuring devices (160) for detecting the substrate (11) as such and / or the position of the substrate (11).

21. Process plant according to one of claims 18 to 20, wherein the process plant comprises one or more second optical measuring devices (161) for detecting the component (11) picked up by the one or of the several process tools (151) as such and / or the position of the component (11) relative to at least one of the process tools (151), and preferably to the substrate (11).

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