Special gas premixing method and device
By adjusting the inert gas flow rate and pressure holding detection using a controller, the problem of uneven mixing of special gases was solved, thus improving the accuracy and efficiency of special gas processing.
Patent Information
- Application Number
- CN202511239632.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-01
- Publication Date
- 2025-11-28
AI Technical Summary
In existing technologies, the lack of effective premixing methods in cleaning equipment when processing special gases leads to uneven mixing of the special gases, which in turn results in inaccurate experimental data on the treatment effect.
The inert gas flow rate is adjusted by the controller to match the target concentration. The inert gas and the target exhaust gas are input using the first and second pipeline assemblies in the special gas premixing device to ensure uniform mixing. A pressure test is performed before input to ensure airtightness.
It achieves uniform mixing of special gases, improves the accuracy of treatment results, reduces human error, lowers the workload of operators, and enhances the efficiency and convenience of the premixing process.
Smart Images
Figure CN121016535A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of waste gas treatment, and more particularly to a special gas premixing method and apparatus. Background Technology
[0002] As the semiconductor industry prospers and production capacity increases significantly, the production process generates various special gases (target waste gases) that pose serious hazards to human health and the environment, such as hydrogen, methane, and chlorine. These gases are generally toxic, harmful, flammable, and explosive. To avoid the risks caused by their direct emission, they need to be pretreated at the waste gas treatment equipment.
[0003] In the treatment of special gases at the client end, scrubbers are commonly used waste gas treatment equipment. However, in the existing technology, when scrubbers treat special gases, there is often a problem of uneven mixing of special gases due to the lack of effective premixing methods. Uneven mixing will directly lead to inaccurate test data of scrubbers treating special gases, and will not accurately reflect the actual treatment capacity of the equipment. Summary of the Invention
[0004] Based on this, this application provides a special gas premixing method and apparatus to solve the problem of uneven mixing of special gases, which often occurs and leads to inaccurate test data of cleaning equipment processing special gases.
[0005] The technical solution of this application is: In a first aspect, this application provides a special gas premixing method applied to a controller of a special gas premixing device, the special gas premixing device further comprising: a tank, a first pipeline assembly, and a second pipeline assembly; the first pipeline assembly is connected to the tank and is used to input an inert gas into the interior of the tank; the second pipeline assembly is connected to the tank and is used to input a target waste gas into the interior of the tank; the method includes: Inert gas is introduced into the tank through the first pipeline assembly, and target exhaust gas is introduced into the tank through the second pipeline assembly; Based on the current flow rate and target concentration of the target exhaust gas, the current flow rate of the inert gas is adjusted to the target flow rate; wherein the target flow rate matches the target concentration.
[0006] In a possible implementation, adjusting the current flow rate of the inert gas to the target flow rate based on the current flow rate and target concentration of the target exhaust gas includes: Based on the current flow rate and target concentration of the target exhaust gas, and according to the relationship between the current flow rate of the inert gas and the current flow rate and target concentration of the target exhaust gas, the current flow rate of the inert gas is adjusted to the target flow rate; The relationship is: x = (y + x) × c%; Where x represents the current flow rate of the inert gas, y represents the current flow rate of the target exhaust gas, and c% represents the target concentration of the target exhaust gas.
[0007] In a possible implementation, the input of the target exhaust gas into the interior of the tank via the second piping assembly includes: Different types of target exhaust gas are introduced into the interior of the tank through multiple second pipes in the second pipe assembly, and it is determined that only one type of target exhaust gas is introduced into the tank at any given time.
[0008] In a possible implementation, before introducing inert gas into the interior of the tank through the first piping assembly and the target exhaust gas into the interior of the tank through the second piping assembly, the method further includes: The tank is pressurized by introducing pressure-holding gas into it. During the pressure-holding process, the pressure value of the tank is acquired in real time, and it is determined whether the pressure drop of the tank meets the set conditions.
[0009] In a possible implementation, the step of maintaining pressure in the tank by introducing pressure-holding gas into the tank, acquiring the pressure value of the tank in real time during the pressure-holding process, and determining whether the pressure drop of the tank meets the set conditions includes: The pressure value of the tank is acquired in real time during the first time period during the pressure holding process; It is then determined whether the pressure drop in the first time period before the set time meets the first set condition, and whether the pressure in the second time period after the set time meets the second set condition.
[0010] In a possible implementation, the first setting condition is a pressure drop within 10 psi, and the second setting condition is a pressure drop within 1 psi.
[0011] Secondly, this application also provides a special gas premixing device, including: a tank, a first pipeline assembly, a second pipeline assembly, and a controller; The first pipeline assembly is connected to the tank body and is used to introduce inert gas into the interior of the tank body; the second pipeline assembly is connected to the tank body and is used to introduce target exhaust gas into the interior of the tank body. Inert gas is introduced into the tank through the first pipeline assembly, and target exhaust gas is introduced into the tank through the second pipeline assembly; The controller is used to adjust the current flow rate of the inert gas to the target flow rate based on the current flow rate and target concentration of the target exhaust gas; wherein the target flow rate matches the target concentration.
[0012] In a possible implementation, a first valve body assembly and a first flow meter are provided on the first pipe of the first pipe assembly; the controller is used to control the flow rate of the inert gas through the first valve body assembly and to obtain the concentration of the inert gas in the tank through the first flow meter.
[0013] In a possible implementation, the second pipeline assembly includes a plurality of second pipelines for inputting different target exhaust gases, each of the second pipelines being provided with a second valve body assembly and a second flow meter; the controller is further configured to obtain the flow rate of the corresponding target exhaust gas through the second valve body assembly and to obtain the concentration of the corresponding target exhaust gas in the tank through the second flow meter.
[0014] In a possible implementation, at any given time, only one of the valve body assemblies on the second pipe is in the open state.
[0015] The embodiments of this application have the following beneficial effects: Based on the current flow rate and target concentration of the target exhaust gas, the current flow rate of the inert gas is adjusted to the target flow rate; whereby the target flow rate matches the target concentration. The controller automatically calculates and adjusts the target inert gas flow rate, replacing the traditional manual flow adjustment method. This not only reduces human error but also lowers the workload of operators. Furthermore, it eliminates the need for complex operating procedures tailored to different specialty gases and concentration requirements; simply inputting the target concentration parameter achieves automatic adaptation, improving the efficiency and convenience of the specialty gas premixing process. Attached Figure Description
[0016] To more clearly illustrate the technical solutions of this application, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this application and therefore should not be considered as a limitation on the scope of protection of this application. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 A flowchart of the gas mixing method of this application is shown; Figure 2 A system diagram of the gas mixing device of this application is shown.
[0018] Icons: 1. Tank; 2. First pipe; 3. Second pipe. Detailed Implementation
[0019] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.
[0020] The components of the embodiments of this application described and illustrated in the accompanying drawings can be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of this application provided in the drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0021] In the following, the terms “comprising,” “having,” and their cognates, which may be used in various embodiments of this application, are intended only to indicate a particular feature, number, step, operation, element, component, or combination thereof, and should not be construed as excluding, firstly, the presence of one or more other features, numbers, steps, operations, elements, components, or combinations thereof, or adding the possibility of one or more features, numbers, steps, operations, elements, components, or combinations thereof.
[0022] Furthermore, the terms "first," "second," and "third" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.
[0023] Unless otherwise specified, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which the various embodiments of this application pertain. Terms (such as those defined in commonly used dictionaries) shall be interpreted as having the same meaning as in their contextual meaning in the relevant technical field and shall not be construed as having an idealized or overly formal meaning, unless clearly defined in the various embodiments of this application.
[0024] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0025] First Embodiment This application provides a method for premixing a special gas, applied to the controller of a special gas premixing device. The special gas premixing device further includes: a tank 1, a first pipeline assembly, and a second pipeline assembly; the first pipeline assembly is connected to the tank 1 and is used to input an inert gas into the interior of the tank 1; the second pipeline assembly is connected to the tank 1 and is used to input a target exhaust gas into the interior of the tank 1; the method includes: Step S10: Inert gas is introduced into the interior of tank 1 through the first pipeline assembly, and target exhaust gas is introduced into the interior of tank 1 through the second pipeline assembly; Step S11: Based on the current flow rate and target concentration of the target exhaust gas, adjust the current flow rate of the inert gas to the target flow rate; wherein, the target flow rate matches the target concentration.
[0026] In step S10, inert gas is introduced into the interior of tank 1 through the first pipeline assembly, and target exhaust gas is introduced into the interior of tank 1 through the second pipeline assembly, thereby achieving the mixing of inert gas and target exhaust gas.
[0027] In step S11, based on the current flow rate and target concentration of the target exhaust gas, the current flow rate of the inert gas is adjusted to the target flow rate; wherein, the target flow rate matches the target concentration. The controller automatically calculates and adjusts the target flow rate of the inert gas, replacing the traditional manual flow rate adjustment method. This not only reduces human error but also lowers the workload of operators. Furthermore, it eliminates the need for complex operating procedures tailored to different specialty gases and concentration requirements; simply inputting the "target concentration" parameter achieves automatic adaptation, improving the efficiency and convenience of the specialty gas premixing process.
[0028] In some embodiments, adjusting the current flow rate of the inert gas to the target flow rate based on the current flow rate and target concentration of the target exhaust gas includes: Step S110: Based on the current flow rate and target concentration of the target exhaust gas, and according to the relationship between the current flow rate of the inert gas and the current flow rate and target concentration of the target exhaust gas, adjust the current flow rate of the inert gas to the target flow rate. The relationship is: x = (y + x) × c% Where x represents the current flow rate of the inert gas, y represents the current flow rate of the target exhaust gas, and c% represents the target concentration of the target exhaust gas.
[0029] In step S110, based on the current flow rate and target concentration of the target exhaust gas, and according to the relationship between the current flow rate of the inert gas and the current flow rate and target concentration of the target exhaust gas, the current flow rate of the inert gas is adjusted to the target flow rate. The relationship is: x = (y + x) × c% Where x represents the current flow rate of the inert gas, y represents the current flow rate of the target exhaust gas, and c% represents the target concentration of the target exhaust gas.
[0030] When the target waste gas and inert gas are remixed, the flow rate of the target waste gas is adjusted according to its concentration. For example, if the current flow rate of target waste gas A is 15sl in the first pipeline assembly and the target concentration is 15%, the corresponding current flow rate of the inert gas is x = (15 + x) * 0.15. This ensures that the inert gas and target waste gas are mixed in a preset ratio, fundamentally solving the problem of inaccurate test data from cleaning equipment due to uneven mixing.
[0031] In some embodiments, the target exhaust gas is introduced into the interior of the tank 1 through a second piping assembly, including: In step S100, different types of target exhaust gas are input into the interior of tank 1 through multiple second pipes 3 in the second pipe assembly, and it is determined that only one type of target exhaust gas is input into tank 1 at any given time.
[0032] In step S100, different types of target exhaust gases are input into the tank 1 through multiple second pipes 3 in the second pipe assembly, and it is determined that only one type of target exhaust gas is input into the tank 1 at any given time. The tank 1 is connected to the air inlets of multiple second pipes 3, and the pneumatic solenoid valves and flow meters of each air inlet are interlocked in the software. That is, when target exhaust gas A is running, the software lock for other target exhaust gases cannot be opened. This avoids interference caused by the simultaneous input of multiple target exhaust gases, which would affect the accuracy of data measurement.
[0033] In some embodiments, before introducing inert gas into the interior of tank 1 through a first piping assembly and introducing target exhaust gas into the interior of tank 1 through a second piping assembly, the method further includes: The pressure in tank 1 is maintained by introducing pressurizing gas into it. During this process, the pressure value of tank 1 is monitored in real time, and it is determined whether the pressure drop in tank 1 meets the set conditions. Before introducing the target waste gas, the airtightness of tank 1 needs to be tested. This is done by introducing pressurizing gas into tank 1 and monitoring the pressure value in real time. If the pressure drop in tank 1 meets the set conditions, the airtightness of tank 1 is confirmed to be good. If it does not meet the set conditions, the airtightness of tank 1 must be repaired before introducing the target waste gas to prevent leakage and diffusion.
[0034] In some embodiments, the tank 1 is pressurized by introducing pressurizing gas into the tank 1, and the pressure value of the tank 1 is acquired in real time during the pressurization process, and it is determined whether the pressure drop of the tank 1 meets the set conditions, including: During the pressure holding process, the pressure value of tank 1 in the first time period is acquired in real time; It then determines whether the pressure drop in the first time period before the set time meets the first set condition, and whether the pressure in the second time period after the set time meets the second set condition.
[0035] In this embodiment, the pressure value of tank 1 is acquired in real time during a first time period, such as a pressure holding period of 40 minutes. A pressure drop of 10 psi is allowed in the first ten minutes, and the pressure fluctuation range from the 11th minute to the 40th minute is less than 1 psi. If the pressure difference between the initial pressure detection and the pressure holding period at the 11th minute is greater than 10 psi, the system alarms and checks the airtightness of tank 1.
[0036] Preferably, the first setting condition is a pressure drop within 10 psi, and the second setting condition is a pressure drop within 1 psi.
[0037] Second Embodiment This application also provides a special gas premixing device, including: a tank 1, a first pipeline assembly, a second pipeline assembly, and a controller; The first pipeline assembly is connected to the tank 1 and is used to introduce inert gas into the tank 1; the second pipeline assembly is connected to the tank 1 and is used to introduce the target exhaust gas into the tank 1. Inert gas is introduced into the interior of tank 1 through the first pipeline assembly, and the target exhaust gas is introduced into the interior of tank 1 through the second pipeline assembly; The controller is used to adjust the current flow rate of the inert gas to the target flow rate based on the current flow rate and target concentration of the target exhaust gas; wherein the target flow rate matches the target concentration.
[0038] In this embodiment, the current flow rate of the inert gas is adjusted to the target flow rate based on the current flow rate and target concentration of the target exhaust gas; wherein, the target flow rate matches the target concentration. The controller automatically calculates and adjusts the target inert gas flow rate, replacing the traditional manual flow rate adjustment method. This not only reduces human error but also lowers the workload of operators. Furthermore, it eliminates the need for complex operating procedures tailored to different specialty gases and concentration requirements; simply inputting the "target concentration" parameter achieves automatic adaptation, improving the efficiency and convenience of the specialty gas premixing process.
[0039] In some embodiments, a first valve body assembly and a first flow meter are provided on the first pipe 2 of the first pipe assembly; the controller is used to control the flow rate of the inert gas through the first valve body assembly and to obtain the concentration of the inert gas in the tank 1 through the first flow meter.
[0040] In some embodiments, the second pipeline assembly includes a plurality of second pipelines 3 for inputting different target exhaust gases, each second pipeline 3 being provided with a second valve body assembly and a second flow meter; the controller is also used to obtain the flow rate of the corresponding target exhaust gas through the second valve body assembly and to obtain the concentration of the corresponding target exhaust gas in the tank 1 through the second flow meter.
[0041] In some embodiments, at any given time, only one valve assembly on the second pipe 3 is in the open state.
[0042] In the several embodiments provided in this application, it should be understood that the disclosed apparatus and methods can also be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the flowcharts and block diagrams in the accompanying drawings show the architecture, functionality, and operation of possible implementations of apparatus, methods, and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that, in alternative implementations, the functions marked in the blocks may occur in a different order than those marked in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, and combinations of blocks in the block diagram and / or flowchart, can be implemented using a dedicated hardware-based system that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.
[0043] In addition, the functional modules or units in the various embodiments of this application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.
[0044] If the aforementioned functions are implemented as software functional modules and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a smartphone, personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.
[0045] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.
Claims
1. A method for premixing a special gas, characterized in that, A controller for a special gas premixing device, the special gas premixing device further comprising: a tank, a first pipeline assembly, and a second pipeline assembly; the first pipeline assembly is connected to the tank and is used to input an inert gas into the interior of the tank; the second pipeline assembly is connected to the tank and is used to input a target exhaust gas into the interior of the tank; the method includes: Inert gas is introduced into the tank through the first pipeline assembly, and target exhaust gas is introduced into the tank through the second pipeline assembly; Based on the current flow rate and target concentration of the target exhaust gas, the current flow rate of the inert gas is adjusted to the target flow rate; wherein the target flow rate matches the target concentration.
2. The special gas premixing method according to claim 1, characterized in that, The step of adjusting the current flow rate of the inert gas to the target flow rate based on the current flow rate and target concentration of the target exhaust gas includes: Based on the current flow rate and target concentration of the target exhaust gas, and according to the relationship between the current flow rate of the inert gas and the current flow rate and target concentration of the target exhaust gas, the current flow rate of the inert gas is adjusted to the target flow rate; The relationship is: x = (y + x) × c%; Where x represents the current flow rate of the inert gas, y represents the current flow rate of the target exhaust gas, and c% represents the target concentration of the target exhaust gas.
3. The special gas premixing method according to claim 1, characterized in that, The process of introducing the target exhaust gas into the tank through the second pipeline assembly includes: Different types of target exhaust gas are introduced into the interior of the tank through multiple second pipes in the second pipe assembly, and it is determined that only one type of target exhaust gas is introduced into the tank at any given time.
4. The special gas premixing method according to claim 1, characterized in that, Before introducing inert gas into the tank through the first piping assembly and the target exhaust gas into the tank through the second piping assembly, the method further includes: The tank is pressurized by introducing pressure-holding gas into it. During the pressure-holding process, the pressure value of the tank is acquired in real time, and it is determined whether the pressure drop of the tank meets the set conditions.
5. The special gas premixing method according to claim 4, characterized in that, The process of maintaining pressure in the tank by introducing pressure-holding gas, acquiring the pressure value of the tank in real time during the pressure-holding process, and determining whether the pressure drop of the tank meets the set conditions includes: The pressure value of the tank is acquired in real time during the first time period during the pressure holding process; It is then determined whether the pressure drop in the first time period before the set time meets the first set condition, and whether the pressure in the second time period after the set time meets the second set condition.
6. The special gas premixing method according to claim 5, characterized in that, The first setting condition is a pressure drop within 10 psi, and the second setting condition is a pressure drop within 1 psi.
7. A special gas premixing device, characterized in that, include: Tank body, first piping assembly, second piping assembly, and controller; The first pipeline assembly is connected to the tank body and is used to introduce inert gas into the interior of the tank body; the second pipeline assembly is connected to the tank body and is used to introduce target exhaust gas into the interior of the tank body. Inert gas is introduced into the tank through the first pipeline assembly, and target exhaust gas is introduced into the tank through the second pipeline assembly; The controller is used to adjust the current flow rate of the inert gas to the target flow rate based on the current flow rate and target concentration of the target exhaust gas; wherein the target flow rate matches the target concentration.
8. The special gas premixing device according to claim 7, characterized in that, The first pipeline assembly is provided with a first valve body assembly and a first flow meter on its first pipeline; the controller is used to control the flow rate of the inert gas through the first valve body assembly and to obtain the concentration of the inert gas in the tank through the first flow meter.
9. The special gas premixing device according to claim 7, characterized in that, The second pipeline assembly includes multiple second pipelines for inputting different target exhaust gases, each of which is equipped with a second valve body assembly and a second flow meter; the controller is also used to obtain the flow rate of the corresponding target exhaust gas through the second valve body assembly and to obtain the concentration of the corresponding target exhaust gas in the tank through the second flow meter.
10. The special gas premixing device according to claim 9, characterized in that, At any given time, only one valve assembly on the second pipeline is in the open state.